JP2002090410A - Checking fixture for board inspection and board inspection apparatus with checking fixture - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a checking fixture, for board inspection, by which a board can be inspected with high accuracy and with high reliability and to provide a board inspection apparatus with the checking fixture. SOLUTION: The rear-end part 44 of a probe is fitted into the recess (the tip part) 211 of a connecting electrode 21 corresponding to the rear-end part. A flexure is given forcibly to the intermediate part in the axial direction of the probe 4. As a result, the rear-end part 44 of the probe and the tip part 211 of the connecting electrode 21 are brought into contact in a state that a load is applied along the axial direction of the probe 4. Also a load component along a direction nearly at right angles to the axial direction is applied to their contact part, i.e., their lock part. The load component in a plurality of directions acts on the contact part of the rear-end part of the probe with the connecting electrode. The probe and the connecting electrode are brought into contact surely and at a low resistance so as to contribute toward enhancing the inspection accuracy and the reliability of the checking fixture.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection jig for inspecting a substrate by bringing the tip of a probe into contact with a substrate to be inspected and an inspection apparatus provided with the inspection jig. It is. The present invention is a printed wiring board, a flexible board, a multilayer wiring board, a glass substrate for a liquid crystal display or a plasma display,
In addition, the present invention can be applied to a board inspection apparatus for inspecting electrical wiring on various substrates such as a film carrier for a semiconductor package, and an inspection jig for board inspection that can be used in the board inspection apparatus. Wiring boards are collectively referred to as “boards”.

[0002]

2. Description of the Related Art A wiring pattern composed of a plurality of wirings is formed on a substrate, and a large number of substrate inspection apparatuses have been provided in order to inspect whether or not the wiring pattern is finished as designed. . For example, in a conventional board inspection apparatus, a plurality of probes are pressed against a substrate to check whether or not adjacent wirings in a wiring group constituting a wiring pattern are short-circuited. The board inspection is performed by selectively giving an electric signal.
More specifically, two wirings to be inspected are selected,
By checking whether a predetermined current flows when a voltage is applied between the probes pressed against one end of each of the selected ends, a short-circuit test between the selected wires is performed.

In order to press a plurality of probes against a substrate at the same time, an inspection jig for inspecting a substrate as described in, for example, Japanese Utility Model Application Laid-Open No. 61-129166 is used. In this inspection jig, as shown in FIG. 8, the probe holding board 101 and the probe guide board 102
Supports a plurality of probes 103. Further, in order to electrically connect the probe 103 thus supported to the substrate inspection unit 104, an electrode unit 105 is disposed to face the rear end 103a of the probe 103. The electrode portion 105 is provided with a plurality of connection electrodes 106 so as to correspond one-to-one with the rear end portions 103 a of the plurality of probes 103.
, The rear end 103a of the probe 103 is interposed between the probe 103 and the connecting electrode 106, so that the corresponding probe 1
03 is in electrical contact with the rear end 103a.

[0004]

However, the rear end portion 103a of the probe 103 and the connection electrode 106 are only in contact with each other in a state where a load is applied along the axial direction (vertical direction in the figure). And the contact resistance is unstable. In particular, in recent years, the number of probes to be pressed against a substrate to be inspected has been increased along with the refinement of the substrate to be inspected, and it is difficult to suppress the contact resistance between these many probes 103 and the connection electrodes 106 to a predetermined value or less. This is one of the factors that makes the inspection difficult.

[0005] Further, when the board inspection is repeatedly performed using the inspection jig configured as described above, some probes 103 do not contact the connection electrode 106 about once in 1,000 times. In some cases, accurate board inspection cannot be performed. Therefore, there is also a problem that the reliability of the substrate inspection device is reduced.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and provides an inspection jig for inspecting a substrate capable of inspecting a substrate with high accuracy and high reliability, and a substrate inspection apparatus provided with the inspection jig. The purpose is to do.

[0007]

In order to achieve the above object, an inspection jig for inspecting a substrate according to the present invention supports a plurality of probes while supporting a plurality of probes in a state where an intermediate portion in an axial direction thereof is bent. A plurality of connection electrodes are provided so as to correspond one-to-one with a contact portion for bringing the front end portion into contact with the substrate to be inspected and the rear end portions of the plurality of probes, and the plurality of connection electrodes correspond respectively. And an electrode portion to be brought into contact with the rear end of the probe. Then, one end of the rear end of each probe and the front end of the connection electrode that contacts the rear end of the probe is locked to the other end so that both are electrically connected, The plurality of probes and the plurality of connection electrodes are configured.

[0008] In the invention thus constituted, the rear end of the probe and the front end of the connection electrode are brought into contact with each other in a state where a load is applied along the axial direction of the probe, as in the prior art. A load component along a direction substantially perpendicular to the axial direction is also applied to the contact portion, that is, the locking portion. This is because the probe is bent at the intermediate portion in the axial direction, so that a load is generated in the probe due to the bending, and the load is applied to the contact portion as it is. As described above, a load component in a plurality of directions acts on the contact portion between the rear end of the probe and the connection electrode, so that the probe and the connection electrode are surely and in low contact with each other, so that the inspection accuracy and It greatly contributes to the improvement of reliability.

Further, in the inspection jig configured as described above, since a plurality of probes are supported by the contact portions, when some of the probes are damaged or broken, only the probes are used. The probe can be detached from the contact part and a new probe can be attached, and it is excellent in maintainability and assemblability.

Here, when the bending directions of the plurality of probes are aligned in one direction, the load applied to the contact portion between the rear end of the probe and the connection electrode is made uniform, and the contact resistance at each contact portion is reduced. It can be made uniform. Therefore, it is advantageous for improving the inspection accuracy and reliability.

In order to interlock the rear end of each probe and the front end of the connection electrode with each other, for example, one end is formed in a convex shape while the other end is formed. What is necessary is just to form so that it may be formed in a concave shape, and the convex part of one end may be locked to the inner wall surface of the concave part of the other end. Also, while one end is formed in a convex shape, the other end is formed in a concave shape,
You may comprise so that the convex part of one end may be fitted in the concave part of the other end. With this configuration, the rear end of each probe and the front end of the connection electrode are mutually and reliably locked.

The contact portion is provided with a first plate which is disposed opposite to the substrate and penetrates and supports a plurality of probe tips, and a second plate which is disposed opposite to the electrode portion and which penetrates and supports a plurality of probe rear ends. And a bending control means disposed between the first plate and the second plate to control a bending state of an intermediate portion in the axial direction of the plurality of probes. Here, if at least one or more interval adjusting plates are arranged near the first plate as the deflection control means,
An interval between the interval adjusting plate closest to the second plate among the interval adjusting plates and the second plate (hereinafter, referred to as a “plate interval”) is adjusted, and the bending state of the intermediate portion in the axial direction of the plurality of probes is controlled.

In particular, while the diameter of the probe is being reduced in order to cope with the increase in the number of probes accompanying finer substrates, in this case, it is desirable to configure the deflection control means with a plurality of interval adjusting plates. That is, in such a technical background, it is necessary to form a through hole for penetrating and supporting the probe in the deflection control means by micromachining. However, considering workability, it is preferable to use a relatively thin plate. This is because when the plate interval is largely changed, it is necessary to prepare a relatively thick interval adjusting plate in order to configure the deflection control means with a single interval adjusting plate, and it is necessary to prepare a fine through hole in the thick plate. This is because it is very difficult to form a small through-hole. On the other hand, when a plurality of relatively thin plates are prepared and the interval between the plates is adjusted, it is easy to form fine through holes in each plate.

In the contact portion configured as described above, when the first plate and the second plate are arranged in parallel at a predetermined distance from each other and are relatively shifted in parallel, the bending direction of the plurality of probes can be improved. Can be aligned in the parallel shift direction, the load on the contact portion can be made uniform, and the contact resistance at each contact portion can be made uniform.

Further, if the axially intermediate portions of the plurality of probes are covered with the electrically insulating outer skin, it is possible to prevent the axially intermediate portions of the probes from coming into direct contact with each other, thereby preventing an electrical short circuit.

In order to achieve the above object, a substrate inspection apparatus according to the present invention further comprises an inspection jig according to any one of claims 1 to 7, and a plurality of connection jigs electrically connected to the plurality of connection electrodes. And a board inspection unit for selectively performing an electrical signal to the probe to perform a board inspection. By using the inspection jig configured as described above, the probe and the substrate inspection unit can be reliably connected to the substrate inspection unit via the electrode unit with low resistance, and with high accuracy and excellent reliability. Substrate inspection can be performed.

[0017]

FIG. 1 is a perspective view showing one embodiment of a substrate inspection apparatus according to the present invention. FIG. 2 is an exploded perspective view of a board inspection jig used in the board inspection apparatus of FIG. The substrate inspection apparatus supports a plurality of probes 4 while supporting the tip 4 of the probes 4.
An inspection jig 3 having a contact portion 1 and an electrode portion 2 for bringing the substrate 3 into contact with a substrate to be inspected (reference numeral S in FIG. 4), and a substrate inspection portion electrically connected to the inspection jig 3 (FIG. 5), and a board inspection is performed by selectively supplying an electric signal to the plurality of probes 4 from the board inspection unit.

As shown in FIGS. 1 and 2, the contact portion 1 of the inspection jig 3 is provided with a first
The plate 12 and the second plate 13 are spaced apart substantially in parallel, and a distance adjusting spacer 14 a and a distance adjusting plate 14 are provided between the two plates 12 and 13.
b, spacing adjustment spacer 14c and spacing adjustment plate 1
4d are stacked and arranged in this order from the upper side to the lower side. Each of these first plates 12, 14b, 14d has a plurality of probe holes 121, 141, 141 for penetrating and supporting the probe 4, and a plurality of positioning holes 122, 142, 142 formed therein. ing.

The axial intermediate portion 41 of each probe 4 is shown in FIG.
As shown in FIG. 5, the probe is covered with an electrically insulating sheath 42 such as trifluoroethylene. When the distal end 43 of the probe 4 is inserted into the probe holes 121 and 141 as described later in detail, the electrically insulating sheath 42 is Probe hole 121,1
It is configured to be locked at the peripheral portion of the reference numeral 41. That is, the inner diameter of the probe holes 121 and 141 is
2 is set smaller than the outer diameter.

On the other hand, a through hole 131 for inserting the probe 4 is also formed in the second plate 13, and this through hole 131 is different from the probe holes 121 and 141.
The probe 4 has an inner diameter that is larger than the outer diameter of the electrically insulated outer skin 42, and the probe 4 can be inserted with the outer insulated outer skin 42 covered. Further, the second plate 13 is provided with an assembly positioning hole 132 and a setting positioning hole 133 used when assembling the inspection jig 3 as described in detail below.

Next, the procedure for assembling the inspection jig 3 will be described with reference to FIG.
Clarify the structure of FIG. 3 is a view showing a procedure of assembling the inspection jig for board inspection used in the board inspection apparatus of FIG. 1, and schematically shows a cross section taken along line AA of FIG. 2.

First, as shown in FIG.
Between the plate 12 and the second plate 13 and the first
The spacing adjusting spacers 14a, 14b, 14c, and 14d are stacked and arranged near the plate 12 (the spacers 14a and 14c are not shown in the drawing). Thereby, the distance from the interval adjustment plate 14d closest to the second plate 13 to the second plate 13, that is, the plate interval ΔL is adjusted to control the bending state of the probe 4,
The contact load between the tip 43 of the probe 4 and the substrate can be adjusted. This will be described in detail later.

Also, as described above, the plates 12, 14b,
Positioning holes 122, 14d and 13 are stacked and arranged.
142, 142 and the positioning hole 132 for assembly.
5 is inserted. As a result, the probe holes 121, 14
1, 141 and the through hole 131 are aligned on a straight line.
Then, in this state, the probe 4 having the outer skin is inserted from the second plate 13 side, and the probe tip 43 is inserted in the order of the probe holes 141, 141, and 121 so that the plate 1
They are penetrated and supported by 2, 14b and 14d.

Next, as shown in FIG. 2B, the rear end 44 of the probe 4 is fitted into the connection electrode 21 of the electrode section 2. In the electrode section 2, a plurality of connection electrodes 21 are provided on the electrode guide plate 22 in one-to-one correspondence with the rear end 44 of the probe 4. In addition, the tip 211 of each connection electrode 21 has a concave shape, and the probe rear end 44
Can be fitted into the concave portion (tip portion) 211.
Therefore, when the contact portion 1 and the electrode portion 2 are moved relatively close to each other, the rear end portions 44 of all the probes 4 become the front end portions 211 of the connection electrodes 21 corresponding thereto.
And are electrically connected.

Subsequently, as shown in FIG.
After removing the pin 15 from the positioning hole 132 for assembly, after the second plate 13 and the electrode guide plate 22 are integrally shifted in parallel with the first plate 12 and the gap adjusting plates 14b and 14d in the direction of the arrow. , Pin 15
Into the positioning hole 133 for setting. Then, the probe front end portion 43 and the probe rear end portion 44 relatively shift in parallel, and the axially intermediate portion 41 of the probe 4 bends. As a result, for example, as shown in FIG. 4, on the probe tip side, the probe tip 43 physically contacts the first plate 12 and the interval adjusting plate 14d at the circled points P1 and P2, respectively.

On the other hand, on the probe rear end side, the probe rear end portion 44 and the front end portion 2 of the connection electrode 21 are inserted in a state in which the probe rear end portion 44 is fitted into the connection electrode 21 as in the prior art.
11, a load is applied along the axial direction of the probe 4 (vertical direction in the figure), and a circled portion (locking portion) P
At 3, P4, a load component along a direction substantially perpendicular to the axial direction, that is, a substantially horizontal direction is also applied. This is because the axial intermediate portion 41 of each probe 4 is bent, so that a load is generated on the probe 4 due to the bending,
This is because the load is applied as it is to each part of the circles P3 and P4. As described above, a load component in a plurality of directions acts on the contact portion between the probe rear end portion 44 and the connection electrode 21, and the probe 4 and the connection electrode 21 are surely and in low contact with each other. .

The bending direction of each probe 4 is arbitrary, but according to this embodiment, the probe front end 43 and the probe rear end 4 are moved by the parallel shift of the plate.
4 is relatively parallel-shifted to bend the axial intermediate portion 41 of the probe 4, so that the bending direction of the probe 4 can be aligned with the parallel shift direction. By aligning the bending directions in this manner, the probe rear end 44
The load on the contact portion between the electrode and the connection electrode 21 is made uniform,
The contact resistance at each contact portion can be made uniform. Therefore, it can be said that it is advantageous to make the bending directions uniform in order to improve the inspection accuracy and reliability.

According to this embodiment, the probe 4
Of the probe 4 is covered with the electrically insulating outer cover 42, so that even if the axial middle portions 41 of the probe 4 move close to each other, an electrical short circuit is prevented and accurate board inspection can be performed. .

The inspection jig 3 constructed as described above
In this case, since the plurality of probes 4 are supported by the contact portion 1, when some of the probes 4 are damaged or broken, only the probe 4 is detached from the contact portion 1, and
A new probe 4 can be mounted, and maintenance and assemblability are excellent.

Further, according to the above-described embodiment, the spacing adjusting spacers 14a, 14b, 14c and 14d are arranged between the first plate 12 and the second plate 13. The distance from the adjustment plate 14d to the second plate 13, that is, the plate interval ΔL is adjustable. By adjusting the plate interval ΔL, the bending state of the axial intermediate portion 41 of the probe 4 can be controlled, and the probe load applied by the probe distal end portion 43 to the substrate can be set.

Here, four types of probes 4 having different diameters (probe diameters φ1, φ2, φ3, φ4) are prepared, and changes in the probe load with respect to the plate interval ΔL are examined.
For example, the relationship shown in FIG. 5 is obtained. As can be seen from the figure, the probe load can be controlled by adjusting the plate interval ΔL, and according to this embodiment, it is possible to precisely adjust the probe load and to perform high-precision board inspection. Understand. In this embodiment, the deflection control means for adjusting the plate interval ΔL is constituted by the interval adjusting spacer 14a, the interval adjusting plate 14b, the interval adjusting spacer 14c, and the interval adjusting plate 14d. It is not an indispensable component to provide them. For example, a plurality of interval adjusting plates may be stacked and arranged, or the bending control means may be constituted by a single interval adjusting plate. The shape and number of the spacing adjusting spacers and spacing adjusting plates are also arbitrary.

However, considering the workability and the processing accuracy when forming the through holes in the plate, it is advantageous to configure the deflection control means with a plurality of interval adjusting plates as in this embodiment. This is because the diameter of the probe is becoming thinner in order to cope with the increase in the number of probes accompanying finer substrates, and it is necessary to form through holes for supporting such probes in the deflection control means by fine processing. Is caused. More specifically, when the plate interval ΔL is largely changed, it is necessary to prepare a relatively thick interval adjusting plate in order to configure the deflection control means with a single interval adjusting plate, and to form a fine through hole. On the other hand, it is very difficult to form a fine through hole in each plate when preparing a plurality of relatively thin plates and adjusting the interval between the plates.

In the inspection jig according to the above-described embodiment, the rear end portion 44 of the probe is configured to fit into the concave portion (front end portion) 211 of the connection electrode 21. Even if the rear end portion 44 is locked at a part of the concave portion 211 even if it is not fitted into the concave portion (front end portion) 211 of the connection electrode 21, the same operation and effect as the above embodiment can be obtained. Hereinafter, another embodiment of the inspection jig for inspecting a substrate according to the present invention will be described with reference to FIGS. 6 and 7.

FIG. 6 is a view showing a procedure for assembling an inspection jig in another embodiment of the inspection jig for substrate inspection according to the present invention. FIG. 7 is an enlarged cross-sectional view showing the contact state of the probe tip of the inspection jig shown in FIG. 6 with the substrate and the contact state of the probe rear end with the connection electrode. In this embodiment, as shown in FIG. 6A, the plates 12, 14b, and 14 are arranged so that the plate interval ΔL corresponding to a predetermined probe load is secured, as in the previous embodiment.
d, 13 while arranging them in this order,
The pins 15 are inserted through the holes 22, 142, 142 and the positioning holes 132 for assembly. Thereby, the probe hole 121,
141, 141 and the through-hole 131 are aligned on a straight line. Then, in this state, the probe 4 with an outer skin is inserted from the second plate 13 side, and the probe tip 43 is inserted in the order of the probe holes 141, 141, 121 and is supported by the plates 12, 14b, 14d.

Next, as shown in FIG. 4B, the pin 15 is pulled out from the positioning hole 132 for assembly, and the second plate 13 is removed.
To the first plate 12 and the interval adjusting plates 14b, 1
After a parallel shift in the direction of the arrow relative to 4d,
The pin 15 is inserted into the positioning hole 133 for setting. Then, the probe front end portion 43 and the probe rear end portion 44 relatively shift in parallel, and the axially intermediate portion 41 of the probe 4 bends. As a result, for example, as shown in FIG. 7, on the probe distal end side, the probe distal end 43 physically contacts the first plate 12 and the interval adjusting plate 14d at the circles P1 and P2, respectively.

Next, as shown in FIG.
Is moved relatively to the electrode unit 2. Then, FIG.
As shown in (2), the rear end portion 44 of each probe is locked to the inner wall surface of the corresponding concave portion (tip portion) 211 of the connection electrode 21 and is electrically connected to the connection electrode 21. Further, in this embodiment, since the axial intermediate portion 41 of the probe 4 is bent as described above, the probe rear end portion 44 and the connection electrode 21 are disposed on the probe rear end side in the same manner as in the previous embodiment. A load is applied along the axial direction (vertical direction in the figure) of the probe 4 and a direction substantially perpendicular to the axial direction at a circle mark point (locking portion) P3, that is, a substantially horizontal direction. A load component along the line is also applied. As a result, the probe 4 and the connection electrode 21 can be reliably contacted with low resistance, so that the board inspection can be performed with high accuracy and high reliability.
Further, according to the present embodiment, the same operation and effect as those in the previous embodiment can be obtained.

Further, in the above embodiment, the probe rear end portion 44 is locked with the connection electrode 21 after the axial intermediate portion 41 of the probe 4 is bent, but as in the previous embodiment, After locking the probe rear end portion 44 with the connection electrode 21, the axial intermediate portion 41 of the probe 4 may be bent.

The present invention is not limited to the above-described embodiment, and various changes other than those described above can be made without departing from the gist of the present invention. For example, in the above embodiment, the probe rear end portion 44 is formed in a convex shape, while the distal end portion 211 of the connection electrode 21 is formed in a concave shape, and the probe rear end portion 44 is fitted into the front end portion 211 of the connection electrode 21. Or it is locked by the inner wall surface of the tip portion 211, but the shape may be interchanged.
That is, while forming the probe rear end portion 44 in a concave shape,
The distal end portion 211 of the connection electrode 21 is formed in a convex shape, and the distal end portion 211 of the connection electrode 21 is fitted into the probe rear end portion 44 or locked by the inner wall surface of the probe rear end portion 44. You may.

[0039]

As described above, according to the present invention, one end of the rear end of each probe and the front end of the connection electrode in contact with the rear end of the probe is related to the other end. Since a plurality of probes and a plurality of connection electrodes are configured so as to be stopped and electrically connected to each other, a load component in a plurality of directions is applied to a contact portion between the probe rear end and the connection electrode. Acts, and the probe and the connection electrode can be surely brought into contact with each other with low resistance, and the inspection accuracy and reliability can be greatly improved. Further, since the plurality of probes are configured to be supported by the contact portions, the probes can be easily replaced, and excellent maintenance and assembling properties can be obtained.

[Brief description of the drawings]

FIG. 1 is a perspective view showing one embodiment of a substrate inspection apparatus according to the present invention.

FIG. 2 is an exploded perspective view of an inspection jig for substrate inspection used in the substrate inspection apparatus of FIG.

FIG. 3 is a view showing a procedure for assembling an inspection jig for board inspection used in the board inspection apparatus of FIG. 1;

FIG. 4 is an enlarged cross-sectional view showing a contact state of a probe tip portion with a substrate and a contact state of a probe rear end portion with a connection electrode.

FIG. 5 is a graph showing a change in a probe load with respect to a probe interval.

FIG. 6 is a view showing a procedure for assembling the inspection jig in another embodiment of the inspection jig for substrate inspection according to the present invention.

FIG. 7 is an enlarged cross-sectional view showing a contact state of a probe tip of the inspection jig shown in FIG. 6 with a substrate and a contact state of a probe rear end with a connection electrode.

FIG. 8 is a view showing a conventional inspection jig for substrate inspection.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Contact part 2 ... Electrode part 3 ... Inspection jig 4 ... Probe 5 ... Substrate inspection part 12 ... First plate 13 ... Second plate 14a, 14c ... Space adjustment spacer (bending control means) 14b, 14d ... Space adjustment plate (Deflection control means) 21 ... Connection electrode 41 ... Axial middle part (of probe) 42 ... Electrical insulation sheath 43 ... Probe tip 44 ... Probe rear end 121,141 ... Probe hole 211 ... (of connection electrode) Tip part P3, P4: Circled part ΔL: Plate interval

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[Procedure amendment]

[Submission date] January 17, 2001 (2001.1.1)
7)

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] Fig. 5

[Correction method] Change

[Correction contents]

FIG. 5 is a graph showing a change in a probe load with respect to a plate interval.

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) H05K 3/00 G01R 31/28 K (72) Inventor Minoru Kato 126 Makishima-cho Megawa, Uji City, Kyoto, Japan (72) Inventor Shigeaki Koizumi 373 Toyohira, Chino-shi, Nagano Prefecture Inside Koyo Technos Co., Ltd. (72) Inventor Mitsuhiko Ito 373, Toyohira, Chino-shi, Nagano Prefecture F-term in Koyo Technos Corporation (reference) 2G003 AA00 AA07 AG03 AG12 AG20 AH05 AH07 2G011 AB06 AB07 AC06 AC14 AE01 AF00 AF07 2G014 AA02 AA03 AB59 AC06 AC10 2G032 AA00 AD08 AE00 AF02 AF03 AL03 2H088 FA13 FA30 HA01 MA20

Claims (9)

[Claims] A contact portion for contacting a tip portion of each probe with a substrate to be inspected while supporting a plurality of probes in a state where an intermediate portion in the axial direction is bent; and a rear end portion of the plurality of probes. A plurality of connection electrodes are provided so as to correspond to the one-to-one correspondence, and an electrode part for bringing the plurality of connection electrodes into contact with the corresponding rear ends of the probes, respectively; The plurality of probes and the plurality of connection electrodes are connected so that one end of the connection electrode that is in contact with the rear end is locked to the other end and both are electrically connected. An inspection jig for inspecting a substrate, wherein the inspection jig is configured. 2. The inspection jig for inspecting a substrate according to claim 1, wherein the plurality of probes are supported by the contact portion in a state of being bent in one direction. 3. The one end portion is formed in a convex shape,
The inspection jig according to claim 1, wherein the other end is formed in a concave shape, and the convex portion at the one end is locked to an inner wall surface of the concave portion at the other end. . 4. The method according to claim 1, wherein the one end is formed in a convex shape.
3. The inspection jig according to claim 1, wherein the other end is formed in a concave shape, and the convex portion of the one end is fitted into the concave portion of the other end. 5. The first contact plate is disposed to face the substrate and penetrates and supports the plurality of probe tips, and the contact portion is disposed to face the electrode portion and penetrates and supports rear ends of the plurality of probes. 5. A flexure control means disposed between the first plate and the second plate, and a flexure control means for controlling a flexure state of an intermediate portion in the axial direction of the plurality of probes. The inspection jig for substrate inspection according to any one of the above. 6. The apparatus according to claim 1, wherein the deflection control means includes at least one
At least one gap adjusting plate is arranged near the first plate, and the tip of the plurality of probes is penetrated and supported by the gap adjusting plate to adjust the gap closest to the second plate among the gap adjusting plates. The inspection jig for inspecting a board according to claim 5, wherein a bending state of an intermediate portion in an axial direction of the plurality of probes can be controlled by adjusting an interval between a plate and the second plate. 7. The first plate and the second plate are arranged in parallel at a predetermined distance from each other, and are relatively shifted in parallel so that the bending directions of the plurality of probes are aligned in the parallel shift direction. The inspection jig for inspecting a substrate according to claim 5. 8. The inspection jig for inspecting a board according to claim 1, wherein an intermediate portion in the axial direction of the plurality of probes is covered with an electrically insulating sheath. 9. An inspection jig according to claim 1, wherein said inspection jig is electrically connected to said plurality of connection electrodes to selectively apply an electric signal to said plurality of probes to perform substrate inspection. A board inspection apparatus, comprising: a board inspection unit that performs the inspection.