KR100455097B1 - Inspection jig for inspecting board and board inspection apparatus having the same - Google Patents

Abstract

The present invention provides a substrate inspection inspection jig and a substrate inspection apparatus provided with the inspection jig, which can make the substrate inspection high accuracy and high reliability. The probe rear end 44 is fitted into the recessed portion (tip) 211 of the connecting electrode 21 corresponding thereto. Further, bending is forcibly given to the axial middle portion 41 of the probe 4. For this reason, the probe rear end portion 44 and the tip portion 211 of the connecting electrode 21 are added to contact with the load applied in the axial direction of the probe 4, and the contact portion, that is, the locking portion. The load component is also applied along the direction substantially orthogonal to the axial direction. As described above, load components in a plurality of directions act on the contact portion between the probe rear end portion and the connecting electrode, and the probe and the connecting electrode reliably and with low resistance make a significant contribution to the improvement of inspection accuracy and reliability.

Description

Inspection Jig for Substrate Inspection and Substrate Inspection Apparatus provided with the Inspection Jig {INSPECTION JIG FOR INSPECTING BOARD AND BOARD INSPECTION APPARATUS HAVING THE SAME}

The present invention relates to a substrate inspection inspection jig for inspecting the substrate by contacting the tip of the probe with a substrate to be inspected, and a substrate inspection apparatus having the inspection jig. In this case, the present invention provides a substrate inspection apparatus for inspecting electrical wiring on various substrates such as printed wiring boards, flexible substrates, multilayer wiring boards, glass substrates for liquid crystal displays and plasma displays, and film media for semiconductor packages, and Applicable to the inspection jig for inspecting the substrate that can be used in the substrate inspection device, these various wiring substrates are collectively referred to as "substrate" in the present specification.

The board | substrate pattern which consists of a some wiring is formed in the board | substrate, and in order to test whether a wiring pattern is completed as designed, more board | substrate inspection apparatus is provided than before. For example, in a conventional board inspection apparatus, a plurality of probes are pressed against a substrate in order to check whether adjacent wirings are short-circuited among the wiring groups constituting the wiring pattern. Supply the board to inspect the board. More specifically, the short-circuit inspection between the selection wirings is selected by checking whether two wires to be inspected are selected and whether a predetermined current flows when a voltage is applied between the probes pressed against one end of each of the selection terminals. Is doing.

In this way, in order to press the plurality of probes on the substrate simultaneously, a test jig for a substrate inspection such as that described in JP 61-129166 A is used. In this inspection jig, a plurality of probes 103 are supported by the probe supporting board 101 and the probe guide board 102 as shown in FIG. Moreover, in order to electrically connect the probe 103 supported in this way with the board | substrate inspection part 104, the electrode part 105 is provided facing the rear end part 103a of the probe 103. As shown in FIG. The electrode portion 105 is provided with a plurality of connecting electrodes 106 so as to correspond one-to-one with the rear ends 103a of the plurality of probes 103, and the probe 103 is used as the probe support board 101. By interposing the rear end 103a of the connecting electrode 106, the connecting electrode 106 is electrically connected to the rear end 103a of the corresponding probe 103, respectively.

However, the contact resistance is unstable because the rear end 103a of the probe 103 and the connecting electrode 106 are only in contact with the load applied in the axial direction (up and down direction in the drawing). In particular, as the size of the substrate to be inspected becomes more recent, the number of probes that press the substrate tightly increases, and it is difficult to suppress the contact resistance of the plurality of probes 103 and the connecting electrode 106 to a predetermined value or less. It is one of the factors of lowering the precision.

In addition, if the inspection of the substrate is repeated using the inspection jig configured as described above, some probes 103 may not contact the connecting electrode 106 at a frequency of about one time, so that the inspection of the substrate is performed correctly. I could not do it. Therefore, there also existed a problem that the reliability of a board | substrate inspection apparatus falls.

The present invention has been made in view of the above problems, and an object thereof is to provide a substrate inspection inspection jig and a substrate inspection apparatus having the inspection jig, which can make the substrate inspection high accuracy and high reliability.

1 is a perspective view showing an embodiment of a substrate inspection apparatus according to the present invention;

FIG. 2 is an exploded perspective view of a substrate inspection inspection jig used in the substrate inspection apparatus of FIG. 1;

3 is a view showing the assembly procedure of the inspection jig for board inspection used in the substrate inspection apparatus of FIG.

Fig. 4 is an enlarged cross-sectional view showing a contact state of a probe front end to a substrate and a contact state of a probe rear end to a connecting electrode;

5 is a graph showing the change in probe load with respect to the plate spacing,

6 is a view showing the assembly sequence of the inspection jig in another embodiment of the inspection jig for inspecting the substrate according to the present invention;

7 is an enlarged cross-sectional view showing a contact state of the inspection jig shown in FIG. 6 to the substrate of the probe front end and a contact state of the probe rear end to the connecting electrode;

8 is a view showing a conventional inspection jig for board inspection.

* Description of the symbols for the main parts of the drawings *

1 contact part 2 electrode part

3: Jig 4: Probe

5 substrate inspection unit 12 first plate

13: 2nd plate 14a, 14c: Spacing adjustment spacer (bending control means)

14b, 14d: Spacing adjustment plate (bending control means)

21: electrode for connection 41: intermediate part of the axial direction (of the probe)

42: electrical insulation jacket 43: probe tip

44: probe rear end 121, 141: probe hole

211: tip end (of the connecting electrode)

P3, P4: circled part

ΔL: Plate spacing

In order to achieve the above object, the inspection jig for board inspection according to the present invention includes a contact portion for contacting a tip of each probe to a substrate to be inspected while supporting the plurality of probes in a state in which the axial intermediate portion thereof is bent; A plurality of connecting electrodes are provided so as to correspond one-to-one with the rear ends of the plurality of probes, and an electrode portion for bringing the plurality of connecting electrodes into contact with the corresponding rear ends of the probes is provided. The plurality of probes and the plurality of connecting electrodes are configured such that one end of the rear end of each probe and the front end of the connecting electrode in contact with the rear end of the probe are caught by the other end so that the two are electrically connected. have.

In the invention configured as described above, as in the prior art, the rear end portion of the probe and the front end portion of the connecting electrode come into contact with the load applied along the axial direction of the probe, and the contact portion, that is, the latching portion, is almost in contact with the axial direction. A load component is also applied along the orthogonal direction. This is because the axial middle part of each probe is bent, so that a load is generated in the probe due to the bending, and the load is applied to the contact portion as it is. In this way, a load component in a plurality of directions acts on the contact portion between the probe rear end portion and the connecting electrode, and the probe and the connecting electrode are surely and with low resistance, thereby greatly contributing to the improvement of inspection accuracy and reliability.

In the inspection jig configured as described above, since a plurality of probes are supported by the contact portion, when damage or damage occurs to some of the probes, only the probe can be removed from the contact portion, and a new probe can be mounted. It is also excellent in maintainability and assembly.

Here, when the bending directions of the plurality of probes are aligned in one direction, the load applied to the contact portion between the probe rear end portion and the connecting electrode can be made uniform, and the contact resistance at each contact portion can be made uniform. Therefore, it is advantageous in the improvement of inspection precision and reliability.

In addition, in order to engage each of the rear end portions of the probes and the front end portions of the connecting electrodes, for example, one of these ends is formed in a convex shape, while the other end is formed in a concave shape. What is necessary is just to comprise so that it may be caught by the inner wall surface of the recessed part of one edge part. In addition, one end may be formed convex, while the other end may be formed concave, and the convex portion of one end may be inserted into the concave portion of the other end. With this configuration, the rear end of each probe and the front end of the connecting electrode are secured to each other.

In addition, with respect to the contact portion, a first plate disposed to face the substrate and supporting the plurality of probe front ends, a second plate disposed opposite to the electrode portion and supporting the plurality of probe rear ends, a first plate and a second plate It may be comprised by the bending control means arrange | positioned between plates and controlling the bending state of the axial middle part of a some probe. Here, when at least one or more spacing adjusting plates are disposed in the vicinity of the first plate as the bending control means, the spacing from the spacing adjusting plate closest to the second plate among the spacing adjusting plates (hereinafter, "plate spacing") Is controlled to control the bending state of the plurality of probe axial intermediate portions.

In particular, the probe diameter to cope with the increase in the number of probes due to the miniaturization of the substrate is only reduced. In this case, it is preferable to configure the bending control means with a plurality of gap adjusting plates. In other words, in such a technical background, it is necessary to form through holes for penetrating and supporting the probes in the bending control means by micromachining, but considering the workability, it is preferable to use a relatively thin plate. Because, when the plate gap is largely changed, it is necessary to prepare a relatively thick gap adjusting plate in order to configure the bending control means with a single gap adjusting plate, and it is very difficult to form fine through holes in a thick plate. On the other hand, when a plurality of relatively thin plates are prepared and the plate spacing is adjusted, the formation of fine through holes in each plate becomes easy.

Moreover, in the contact part comprised as mentioned above, when the 1st plate and the 2nd plate are arrange | positioned in parallel by a predetermined space | interval, and they are relatively parallel shifted, the bending direction of a some probe can be matched in a parallel shift direction, and a contact The load to the part can be equalized and the contact resistance at each contact part can be equalized.

In addition, if the axial middle portions of the plurality of probes are covered with an electrically insulating sheath, the axial middle portions of the probes may be in direct contact with each other to prevent electrical short circuits from occurring.

Moreover, in order to achieve the said objective, the board | substrate test | inspection apparatus which concerns on this invention is electrically connected to the test jig of any one of Claims 1-7, and the some electrode for connection, and is electrically connected to the some probe selectively. It is provided with a board | substrate inspection part which supplies a test | inspection and a board | substrate. By using the test jig configured as described above, the probe and the board | substrate test | inspection part can be connected reliably and low resistance through an electrode part, and board | substrate test | inspection can be performed with high precision and excellent reliability.

(Example)

1 is a perspective view showing an embodiment of a substrate inspection apparatus according to the present invention. 2 is an exploded perspective view of a substrate inspection inspection jig used in the substrate inspection apparatus of FIG. 1. This board | substrate test | inspection apparatus supports the contact part 1 and electrode part 2 which make the front-end | tip part 43 of the said probe 4 contact the board | substrate (reference | symbol S in FIG. 4) to test | inspect while supporting a some probe 4. And an inspection jig 3 having a structure and a substrate inspection portion (reference numeral 5 in FIG. 4) electrically connected to the inspection jig 3, and selectively supplying an electrical signal to the plurality of probes 4 from the substrate inspection portion. Inspect the board.

As shown in FIGS. 1 and 2, the contact portion 1 constituting the inspection jig 3 is spaced apart from each other in parallel with the first plate 12 and the second plate 13 through the spacer 11. At the same time, between the two plates 12 and 13, the gap adjusting spacer 14a, the gap adjusting plate 14b, the gap adjusting spacer 14c and the gap adjusting plate 14d are in the corresponding order from the upper side to the lower side. Lamination is arranged. In each of these plates 12, 14b and 14d, a plurality of probe holes 121, 141 and 141 for penetrating and supporting the probe 4 are provided, and a plurality of positioning holes 122 and 142 are provided. Formed.

The axial middle portion 41 of each probe 4 is covered with an electrically insulating sheath 42 such as trifluoroethylene, as shown in FIG. 2, and as will be described in detail later, When the tip portion 43 is inserted into and penetrated the probe holes 121 and 141, the electrical insulating sheath 42 is configured to be caught at the periphery of the probe holes 121 and 141. In other words, the inner diameters of the probe holes 121 and 141 are set smaller than the outer diameter of the electrical insulating shell 42.

On the other hand, although the through hole 131 is formed in the second plate 13 to insert and penetrate the probe 4, the through hole 131 is different from the probe holes 121 and 141, and the electrical insulating shell ( It has an inner diameter larger than the outer diameter of 42, and is free to insert and penetrate the probe 4 while covering the electrical insulating shell 42. The second plate 13 is provided with an assembling positioning hole 132 and a set positioning hole 133 used for assembling the inspection jig 3 as described in detail below.

Next, the assembly procedure of the test jig 3 is demonstrated, referring FIG. 3, and the structure of the contact part 1 and the electrode part 2 is clarified. FIG. 3 is a diagram showing an assembling procedure of a substrate inspection inspection jig used in the substrate inspection apparatus of FIG. 1, which schematically shows a cross section taken along the line A-A in FIG. 2.

First, as shown in FIG. 3A at first, a gap adjusting spacer 14a and a gap adjusting plate 14b between the first plate 12 and the second plate 13 and near the first plate 12. The spacer spacer 14c and the spacer plate 14d are stacked in a stacked arrangement (the illustration of the spacers 14a and 14c in this drawing is omitted). Accordingly, the bending state of the probe 4 is controlled by adjusting the distance from the space adjusting plate 14d closest to the second plate 13 to the second plate 13, that is, the plate spacing ΔL, so that the probe 4 can be controlled. The contact load between the tip portion 43 and the substrate can be adjusted. This will be explained in detail later.

In addition, the positioning pins 15 are inserted through the positioning holes 122 and 142 and the assembling positioning holes 132 while the plates 12, 14b, 14d, and 13 are stacked and arranged. Thus, the probe holes 121 and 141 and the through holes 131 are aligned in a straight line. In this state, the probe 4 having the outer shell is inserted from the second plate 13 side, and the probe tip portion 43 is inserted in the order of the probe holes 141, 141, 121 and the plates 12, 14b. Through 14d).

Next, as shown in FIG. 3B, the rear end portion 44 of the probe 4 is inserted into the electrode 21 for connection of the electrode portion 2. In this electrode portion 2, a plurality of connecting electrodes 21 are provided on the electrode guide plate 22 in a one-to-one correspondence with the rear end portion 44 of the probe 4. In addition, the tip 211 of each connecting electrode 21 has a concave shape, and the probe rear end 44 can be fitted into the recess (tip) 211. Therefore, when the contact part 1 and the electrode part 2 are moved relatively close, with respect to all the probes 4, the front end part 211 of the connecting electrode 21 corresponding to each probe rear end part 44 corresponds to it. Is inserted into and electrically connected.

Subsequently, as shown in FIG. 3C, the positioning pin 15 is pulled out of the assembling positioning hole 132 so that the second plate 13 and the electrode guide plate 22 are integrally formed with the first plate 12. ) And the positioning pin 15 is inserted into the set positioning hole 133 after the parallel shift in the direction of the arrow relative to the gap adjusting plates 14b and 14d. As a result, the probe tip 43 and the probe trailing end 44 are relatively shifted in parallel so that the axial middle portion 41 of the probe 4 is closed. As a result, for example, as shown in FIG. 4, on the probe tip side, the probe tip 43 is in physical contact with the first plate 12 and the spacing plate 14d at the circled portions P1 and P2, respectively. do.

On the other hand, on the rear end side of the probe, the probe rear end portion 44 and the tip end portion 211 of the probe rear end portion 44 and the connection electrode 21 are connected to the probe ( A load is applied along the axial direction (up and down direction in Fig. 4) of 4), and a load component is also applied along the circle portions (hanging portions) P3 and P4 in a direction substantially perpendicular to the axial direction, that is, in a substantially horizontal direction. Because the axial intermediate portion 41 of each probe 4 is bent, a load due to the warpage is generated in the probe 4, and the load is applied to each part of the circled portions P3 and P4 as it is. Because. In this way, a load component in a plurality of directions acts on the contact portion between the probe rear end 44 and the connecting electrode 21, so that the probe 4 and the connecting electrode 21 are surely and with low resistance.

In addition, although the bending direction of each probe 4 is arbitrary, according to this embodiment, the probe front end 43 and the probe rear end 44 are relatively parallel-shifted by the parallel shift of a plate, and the probe 4 is carried out. Since the axial middle portion 41 is bent, the bending direction of the probe 4 can be aligned in the parallel shift direction. And by adjusting a bending direction in this way, the load to the contact part of the probe rear end part 44 and the connection electrode 21 is equalized, and the contact resistance in each contact part can be equalized. Therefore, it can be said that it is advantageous to adjust the bending direction after improving inspection accuracy and reliability.

In addition, according to this embodiment, since the axial middle part 41 of the probe 4 is covered with the electrical insulating sheath 42, even if the axial middle parts 41 of the probe 4 moved close to each other. Electrical short circuits are prevented for accurate board inspection.

In addition, in the inspection jig 3 comprised as mentioned above, since the some probe 4 is supported by the contact part 1, when the some probe 4 has damage, damage, etc., the said probe 4 ) Can be detached from the contact portion 1 and a new probe 4 can be mounted, which is also excellent in maintainability and assemblability.

Further, according to the embodiment, between the first plate 12 and the second plate 13, the gap adjusting spacer 14a, the gap adjusting plate 14b, the gap adjusting spacer 14c and the gap adjusting plate ( 14d) is arrange | positioned so that the distance from the space | interval adjustment plate 14d to the 2nd plate 13, ie, plate | interval ΔL, is adjustable. By adjusting the plate spacing ΔL, the bending state of the intermediate portion 41 in the axial direction of the probe 4 can be controlled, and the probe load given to the probe tip 43 can be set for the substrate.

Here, four types of probes having different diameters (probe diameters φ1, φ2, φ3, and φ4) are prepared, and the change in the probe load with respect to the plate spacing ΔL will be described. For example, as shown in FIG. Relationship is obtained. As is apparent from the figure, according to this embodiment, it can be seen that the inspection of the substrate with high accuracy is possible by accurately adjusting the probe load. At this time, in the present embodiment, the bending control means for adjusting the plate spacing ΔL is constituted by the gap adjusting spacer 14a, the gap adjusting plate 14b, the gap adjusting spacer 14c, and the gap adjusting plate 14d. The provision of the spacing adjusting spacers 14a and 14c is not an essential configuration requirement. For example, a plurality of spacing adjusting plates may be arranged in a stack or a warping control means may be constituted by a single spacing adjusting plate. In addition, the shape and number of the space adjusting spacer and the space adjusting plate are also arbitrary.

However, when forming the through-hole in the plate, when considering workability, processing accuracy, etc., it is advantageous to configure the bending control means with a plurality of gap adjusting plates as in the present embodiment. This is because the probe diameter to cope with the increase in the number of probes due to the miniaturization of the substrate becomes thinner, and it is necessary to form through holes for penetrating and supporting such probes in the bending control means by micromachining. In more detail, when the plate spacing ΔL is greatly changed, it is necessary to prepare a relatively thick gap adjusting plate in order to configure the bending control means with a single gap adjusting plate. On the other hand, when a plurality of relatively thin plates are prepared and the plate spacing is adjusted, the formation of fine through holes in each plate becomes easy.

By the way, in the inspection jig according to the above embodiment, the probe rear end portion 44 is configured to be inserted into the recessed portion (tip) 211 of the connecting electrode 21, but as described later, the probe rear end portion ( Even if 44 is not fitted into the recessed portion (tip) 211 of the connecting electrode 21, the same operation and effect as in the above embodiment can be obtained even when the 44 is caught by a part of the recessed portion 211. Hereinafter, another embodiment of the inspection jig for inspecting a substrate according to the present invention will be described with reference to FIGS. 6 and 7.

Fig. 6 is a diagram showing an assembling procedure of the inspection jig in another embodiment of the inspection jig for inspecting a substrate according to the present invention. FIG. 7 is an enlarged cross-sectional view showing a contact state of the inspection jig shown in FIG. 6 to the substrate of the probe front end and a contact state of the probe rear end to the connecting electrode. In this embodiment, as shown in Fig. 6A, the plates 12, 14b, 14d, and 13 are stacked in this order so as to secure the plate spacing ΔL corresponding to the predetermined probe load in the same manner as in the previous embodiment. In the meantime, the positioning pins 15 are inserted into the positioning holes 122, 142, and 142 and the assembling positioning holes 132. Accordingly, the probe holes 121, 141, and 141 and the through holes 131 are aligned in a straight line. In this state, the probe 4 having the outer skin is inserted on the second plate 13 side, and the probe tip portion 43 is inserted in the order of the probe holes 141, 141, 121, and then the plates 12, 14b, 14d. Through).

Next, as shown in Fig. 6B, the positioning pin 15 is pulled out of the assembling positioning hole 133, and the second plate 13 is replaced by the first plate 12 and the gap adjusting plates 14b and 14d. After the parallel shift in the direction of the arrow relative to, the positioning pin 15 is inserted into the set positioning hole 133. As a result, the probe tip 43 and the probe trailing end 44 are relatively shifted in parallel so that the axial middle portion 41 of the probe 4 is closed. As a result, for example, as shown in FIG. 7, on the probe tip side, the probe tip 43 is in physical contact with the first plate 12 and the space adjusting plate 14d at the circled portions P1 and P2, respectively. .

Next, as shown in FIG. 6C, the contact portion 1 is moved relative to the electrode portion 2. Then, as shown in FIG. 7, each probe rear end 44 is caught by the inner wall surface of the recessed portion (tip) 211 of the connecting electrode 21 corresponding thereto and electrically connected to the connecting electrode 21. Connected. In addition, in this embodiment, since the axial middle part 41 of the probe 4 is bent as described above, on the rear end side of the probe, as in the previous embodiment, the probe rear end part 44 and the electrode for connection ( The tip 211 of 21 has a load applied along the axial direction (up and down direction in the figure) of the probe 4, and in the circled part (hanging part) P3, the direction is substantially orthogonal to the axial direction, that is, the substantially horizontal direction. The load component is also applied along. As a result, since the probe 4 and the connection electrode 21 can be contacted certainly and with low resistance, board | substrate test | inspection can be made high precision and high reliability. In addition, according to this embodiment, the same operation effects as those in the previous embodiment can be obtained.

In the above embodiment, the rear end portion 44 of the probe 4 is hooked with the connecting electrode 21 after the axial middle portion 41 of the probe 4 is bent. The axial middle portion 41 of the probe 4 may be bent after engaging the 44 with the connecting electrode 21.

At this time, the present invention is not limited to the above-described embodiments, and various changes can be made in addition to the above-described ones without departing from the spirit thereof. For example, in the above embodiment, the rear end portion 44 of the probe is formed convex, while the front end portion 211 of the connecting electrode 21 is formed concave, and the rear end portion 44 of the probe is connected to the electrode. The shape may be inserted into the tip portion 211 of (21) or caught by the inner wall surface of the tip portion 211. In other words, the probe rear end 44 is formed in a concave shape, while the tip end 211 of the connecting electrode 21 is formed convex, and the tip end 211 of the connecting electrode 21 is formed in the probe rear end 44. ), Or may be configured to be caught by the inner wall surface of the probe rear end 44.

As described above, according to the present invention, a plurality of probes and a plurality of connections are connected such that the rear end of each probe and one end of the front end of the connecting electrode in contact with the rear end of the probe are hooked to the other end so that the two are electrically connected. Since the electrode for the electrode is configured, a load component in multiple directions acts on the contact portion between the probe rear end portion and the connecting electrode, so that the probe and the connecting electrode can be contacted with certainty and low resistance, thereby improving inspection accuracy and reliability. It can greatly improve. Moreover, since it is comprised so that a some probe may be supported by the contact part, probe replacement becomes easy and it can obtain the outstanding maintainability and assembly property.

Claims (13)

In a inspection jig for a substrate inspection, a plurality of predetermined length probes are guided to a plurality of plates, and the front end portions of the probes are brought into contact with inspection points of a substrate to be inspected, respectively. A first plate having a probe hole through which a tip end of the probe passes at a position corresponding to the inspection point of the substrate; A plurality of gap adjusting plates each having a probe hole through which the probe penetrates at a position that matches the probe hole of the first plate, and laminated on the side opposite to the substrate with respect to the first plate; A second plate disposed on the side opposite to the first plate with respect to the gap adjusting plate, with a predetermined gap therebetween and having through holes at positions corresponding to the probe holes of the first plate, respectively; An electrode guide plate stacked on the second plate and supporting a connecting electrode connected to the rear end of the probe at a position corresponding to the through hole; A probe penetrated by inserting the first plate spacing adjusting plate and the second plate into corresponding probe holes and through holes; And positioning pins for positioning a horizontal relative position between the first plate and the spacing plate and the second plate, In the first plate and the spacing plate, a positioning hole is formed through which the positioning pin is inserted. The second plate, An insertion positioning hole for positioning the second plate relative to the first plate at an assembly position where the through hole is positioned correspondingly to the probe hole by inserting and passing through the positioning pin; The positioning pin is inserted and penetrated to shift the second plate and the electrode guide plate relatively parallel to the first plate and the spacing plate from the assembly position so that the intermediate portion of the probe is bent in the shift direction. An inspection jig for inspecting a substrate, wherein a set positioning hole for positioning at a position is formed. delete delete The method of claim 1, The connection part of the said probe and the said connection electrode is formed in the concave shape which one side of the said part is formed in convex shape, and the other side of the part is fitted in the convex part, The inspection jig for board | substrate inspection. delete delete delete The method of claim 1, A portion between the spacing adjusting plate and the second plate in the plurality of probes is covered with an electrically insulating sheath. delete The method of claim 8, The inspection jig for substrate inspection, characterized in that the inner diameter of the probe hole of the spacing adjustment plate is set smaller than the outer diameter of the electrical insulation shell. The method of claim 1, And said gap adjustment plate is laminated on said first plate via a gap adjustment spacer. The inspection jig according to any one of claims 1, 4, 8, 10, and 11, And a substrate inspection unit electrically connected to the plurality of connection electrodes, the substrate inspection unit configured to selectively supply an electrical signal to the plurality of probes to perform a substrate inspection. In the assembling method of the inspection inspection jig for guiding a plurality of predetermined length probes to a plurality of plates, the tip of the probe is in contact with the inspection point of the substrate to be inspected, respectively. Disposing a first plate having a probe hole through which a tip end of the probe passes at a position corresponding to the inspection point of the substrate; Disposing a second plate provided with a through hole at a position corresponding to each of the probe holes of the first plate downwardly with a predetermined distance therebetween; Stacking and arranging a plurality of gap adjusting plates each having a probe hole penetrating the probe at a position that matches the probe hole of the first plate, between the first plate and the second plate; Inserting and positioning the positioning pins into the positioning holes formed in the first plate and the gap adjusting plate and the assembling positioning holes formed in the second plate; Inserting and penetrating the probe into the probe hole of the first plate, the probe hole of the spacing plate and the through hole of the second plate; Stacking electrode guide plates on the second plate while contacting the supporting electrodes with the corresponding probes; The positioning pin is removed from the positioning hole for assembly, and the second plate and the electrode guide plate are relatively parallel shifted with respect to the first plate and the spacing plate, and the positioning pin is moved to the assembly position. A method of assembling a substrate inspection inspection jig comprising the step of inserting and penetrating into a set positioning hole formed at a position shifted from the crystal hole.