JP2010085107A - Inspection tool, electrode structure and method of manufacturing electrode structure - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide, when using a contact (coaxial contact) having such a structure that includes a cylindrical contact and a rod-shaped contact, an inspection tool, an electrode structure and a method of manufacturing the electrode structure that are suitably used for such a contact and that miniaturize and simplify the configuration of an electrode part. <P>SOLUTION: A probe 1 includes: a first contact 2 formed of an electroconductive material in an almost cylindrical shape; and a second contact 3 that is formed of an electroconductive material in a long and thin shape and that is inserted in the first contact 2 while being insulated from the first contact 2. A first electrode part 22 and a second electrode part 23 that conduct by contact with the first and second contacts 2, 3 are disposed so that the center of the first electrode part 22 is separate from that of the second electrode part 23 in planar view. The maximum width of the first electrode part 22 in planar view is set smaller than the outer diameter of the first contact 2. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an inspection jig, an electrode structure, and an electrode structure manufacturing method used for inspecting electrical characteristics of an inspection target of a substrate to be inspected.

  As an inspection method for the electrical characteristics of the inspection target such as the wiring pattern provided on the board to be inspected, two contacts, a contact for current supply and a contact for voltage measurement, are provided, and the two contacts are inspected. There is a technique (a so-called four-contact method) in which an inspection object is inspected by contacting them simultaneously (for example, Patent Document 1). In this four-contact method, the current supply contactor and the voltage measurement contactor are separated, so that the current flowing between the voltage measurement contactor and the inspection point can be substantially ignored. Therefore, the influence of the contact resistance between the contact for voltage measurement and the inspection point is substantially excluded, and the voltage between the two inspection points where the contact for voltage measurement contacts can be accurately measured.

  Conventional probes and inspection jigs used in such a four-contact method are provided corresponding to each inspection point with a set of two needle-shaped contactors arranged in parallel in an insulated state, The two contacts are brought into contact with each inspection point at the same time.

  Further, in recent years, since the miniaturization of wiring patterns and the like provided on the substrate has been rapidly progressing, the inspection jig is also required to cope with the densification of the inspection object.

In order to cope with such miniaturization, a substrate inspection jig as disclosed in Patent Document 2 has been proposed. In the technology disclosed in Patent Document 2, it is possible to cope with a narrow pitch by accommodating a conductive cylindrical contact and a rod-shaped contact inside the cylindrical contact.
JP 2004-184374 A JP 2007-205808 A

  When a contact as disclosed in Patent Document 2 is used, an electrode portion that is conductively connected to the inspection device is formed in the same manner as the cross-sectional shape of the contact, or a concave shape that accommodates the cylindrical contact is formed. A method such as using a connector is performed.

  However, in such a structure of the electrode part, the electrode part (member) has a diameter larger than the outer diameter of the cylindrical contact, and the pitch of the electrode part cannot correspond to the narrow pitch, There was a problem that the structure became complicated.

  Therefore, the problem to be solved by the present invention is preferably used for such a contact when using a contact (coaxial contact) having a structure like the cylindrical contact and the rod contact as described above. In addition, the present invention provides an inspection jig, an electrode structure, and an electrode structure manufacturing method capable of miniaturizing and simplifying the configuration of the electrode portion.

  In order to solve the above-mentioned problems, the invention of claim 1 is an inspection jig, wherein one end is in electrical contact with an inspection point to be inspected on the substrate to be inspected, and the other end is an inspection for inspecting electrical characteristics. A plurality of probes that are in conductive contact with an electrode part that is electrically connected to the apparatus, a guide that guides both ends of the probe to the predetermined inspection point and the electrode part, and a holder that holds the probe; An electrode body including the electrode portion, and the probe is formed in a substantially cylindrical shape with a conductive material, and is elongated with a conductive material and insulated from the first contact. A second contact accommodated in the internal space of the first contact, wherein the electrode portion is electrically connected to the first electrode portion, and a first electrode portion for conducting contact with the first contact. The second electric device is in contact with the second contactor in a non-contact manner. The first electrode part and the second electrode part are arranged such that the center of the first electrode part and the center of the second electrode part are separated from each other in plan view, The maximum width of the first electrode portion is smaller than the outer diameter of the first contact.

  Further, in the invention of claim 2, in the inspection jig according to the invention of claim 1, the first electrode portion is substantially the same size and substantially the same shape as the second electrode portion in plan view, or It is smaller than the size of the second electrode part and has a similar shape.

  According to a third aspect of the present invention, in the inspection jig according to the first or second aspect of the present invention, the second electrode portion is disposed substantially in the center with respect to the radial direction of the probe, and the first electrode portion is A straight line connecting the first electrode portion and the second electrode portion is disposed at a predetermined angle with respect to an arrangement direction in which a plurality of probes are arranged.

  According to a fourth aspect of the invention, in the inspection jig according to the third aspect of the invention, the predetermined angle is about 45 degrees.

  According to a fifth aspect of the present invention, in the inspection jig according to any one of the first to fourth aspects, the first electrode portion and the second electrode portion are formed so as to protrude from the surface of the electrode body. Has been.

  According to a sixth aspect of the present invention, in the inspection jig according to any of the first to fifth aspects, the first electrode portion and the second electrode portion are through holes provided in the electrode body. A linear electrode body whose end surface on the inspected substrate side is positioned flush with the surface of the electrode body; and the end surface of the electrode holding member of the electrode body is formed by plating, and the electrode And a protruding portion that rises from the surface of the body toward the substrate to be inspected.

  According to a seventh aspect of the present invention, in the inspection jig according to the second aspect of the present invention, an outer diameter of the second electrode portion is smaller than an inner diameter of the first contact, and the second electrode portion is The first electrode portion is disposed outside the inner periphery of the first contact, and the first electrode portion is positioned outside the outer periphery of the second contact and contacts the end of the first contact. It is arranged at a position where it can touch.

  According to an eighth aspect of the present invention, in the inspection jig according to the seventh aspect of the present invention, the second electrode portion is disposed such that the center thereof substantially coincides with the central axis of the second contactor.

  According to a ninth aspect of the present invention, in the inspection jig according to the seventh aspect of the present invention, the center of the second electrode portion is arranged so as to deviate from the central axis of the second contactor.

  According to a tenth aspect of the present invention, in the inspection jig according to any of the seventh to ninth aspects, the outer diameter of the first electrode portion is smaller than the outer diameter of the second electrode portion.

  According to the invention of claim 11, one end is in conductive contact with an inspection point to be inspected on the substrate to be inspected, and the other end is in conductive contact with an electrode portion electrically connected to an inspection apparatus for inspecting electrical characteristics. An electrode structure provided in a substrate inspection jig comprising a plurality of probes to be formed, wherein the probe is formed in a substantially cylindrical shape with a conductive material, and is formed elongated with a conductive material, And a second contact accommodated in an internal space of the first contact in a state of being insulated from the first contact, and the electrode portion is a first electrode portion for conducting contact with the first contact And a second electrode portion that is electrically non-contacting with the first electrode portion and is in conductive contact with the second contactor, the first electrode portion and the second electrode portion being Arranged so that the center of one electrode part and the center of the second electrode part are separated. It is smaller than the outer diameter of the maximum width of the first contact of the first electrode portion in a plan view.

  According to a twelfth aspect of the invention, there is provided an electrode structure manufacturing method according to the eleventh aspect of the invention, wherein the conductive linear members respectively forming the first electrode portion and the second electrode portion are the wire A holding body having a holding hole for holding the shaped member is disposed so as to penetrate, and the protruding portion of the linear member protruding from the holding body is cut and removed so as to be flush with the holding body.

  According to the first, eleventh, and twelfth aspects of the present invention, the first electrode portion and the second electrode portion are separated from each other in plan view in the center of the first electrode portion and the center of the second electrode portion. Since the maximum width of the first electrode portion in plan view is smaller than the outer diameter of the first contact, the pitch between the electrode portions is narrowed when using a contact such as a coaxial contact. In addition, even a four-contact inspection can be performed with high reliability.

  According to the second aspect of the present invention, the first electrode portion is substantially the same size and substantially the same shape as the second electrode portion in a plan view, or a shape that is smaller and similar to the size of the second electrode portion. Therefore, the pitch between the electrode portions can be further shortened.

  In particular, when the first electrode portion and the second electrode portion have the same shape, the same member can be used, and the cost can be reduced. On the other hand, in the case of similar shapes, the positions of the first and second electrode portions can be easily grasped.

  According to the third aspect of the present invention, the second electrode portion is disposed substantially in the center with respect to the radial direction of the probe, and the first electrode portion has a plurality of straight lines connecting the first electrode portion and the second electrode portion. Since the probes are arranged at a predetermined angle with respect to the arrangement direction in which the probes are arranged, the pitch between the electrode portions can be further shortened.

  According to the fourth aspect of the invention, since the predetermined angle is about 45 degrees, the pitch between the electrode portions can be further shortened.

  According to the fifth aspect of the invention, since the first electrode portion and the second electrode portion are formed so as to protrude from the surface of the electrode body, each electrode portion is in conductive contact with the first and second contactors. In some cases, contact can be made stably.

  According to the invention described in claim 6, since the first electrode portion and the second electrode portion are formed from a linear electrode body and a protruding portion protruding from the electrode body by plating, the electrode portion can be easily manufactured. can do. Moreover, since the protrusion is formed by plating with relatively easy thickness adjustment, the height of the protrusion of the protrusions of the first and second electrode portions from the surface of the electrode holding member can be easily adjusted.

  According to the seventh aspect of the present invention, the outer diameter of the second electrode portion is smaller than the inner diameter of the first contact, and the second electrode portion is positioned inside the inner periphery of the first contact. Since the first electrode portion is disposed at a position outside the outer periphery of the second contact and capable of contacting the end of the first contact, each electrode portion and each contact Can stably make electrical contact.

  According to the eighth aspect of the invention, since the second electrode portion is arranged so that the center thereof substantially coincides with the central axis of the second contactor, the second electrode portion and the second contactor are more A stable contact can be achieved.

  According to the ninth aspect of the present invention, since the second electrode portion is disposed so that the center thereof is deviated from the central axis of the second contact, when the second contact is a tubular member, Two electrode parts will contact | abut and contact the cylindrical edge part of a 2nd contactor, and can contact more stably.

  According to the invention described in claim 10, since the outer diameter of the first electrode portion is smaller than the outer diameter of the second electrode portion, the pitch between the electrode portions can be made shorter. For this reason, by using the present invention, it is possible to measure a test object having a shorter bump pitch or the like.

  According to the twelfth aspect of the present invention, the conductive linear members that respectively form the first electrode portion and the second electrode portion are disposed so as to penetrate the holding body having the holding holes for holding the linear members. Since the protruding portion of the linear member protruding from the body is cut and removed so as to be flush with the holding body, the electrode structure can be easily manufactured.

[Probe configuration]
FIG. 1 is a side view of a probe used in an inspection jig according to an embodiment of the present invention. 2A is a side view of the first contact provided in the probe of FIG. 1, and FIG. 2B is a side view of the second contact provided in the probe of FIG. FIG.

  The probe 1 according to this embodiment includes a first contact 2 having a substantially cylindrical shape and a second contact 3 having an elongated shape, as shown in FIGS. And is used to inspect the electrical characteristics of the inspection target of the substrate to be inspected. Examples of the inspection target include a wiring pattern provided on the substrate to be inspected, a solder bump applied to the wiring pattern, or both the wiring pattern and the solder bump. The contents of the inspection include, for example, a continuity inspection for inspecting whether the wiring patterns are conductive, an insulation inspection for inspecting whether the wiring patterns are insulated, or the like. In particular, the probe 1 according to the present embodiment has a coaxial structure in which a second contact 3 is inserted in an insulated state into the first contact 2 as will be described later. By electrically contacting 2 and 3 with the same inspection point to be inspected, the electrical characteristics of the inspection object can be inspected by the 4-contact method. In FIG. 1 and the like, the second contact 3 is slightly longer than the first contact 2.

  The first contactor 2 has a substantially cylindrical shape as shown in FIG. In the configuration of the probe shown in FIG. 1, the first contact 2 is formed slightly shorter than the second contact 3 described later. However, when the inspection is performed in contact with the inspection point, the first contact 2 is formed. The length is not particularly limited as long as both the first and second contacts can be contacted, and either one (the first contact 2 or the second contact) is formed long and the contact is formed long. By providing an expansion / contraction member (for example, a spring member) to the contact point, when it comes into contact with the inspection point, it can be contracted by the length of the contact point so that both contacts can simultaneously contact the inspection point. .

  The contacts 2 and 3 shown in FIG. 1 or 2 are clamped from the inspection points and the electrode portions 22 and 23 when the inspection points of the substrate to be inspected and the electrode portions 22 and 23 are electrically connected. The contacts 2 and 3 are curved, and both ends of the contacts 2 and 3 press the inspection point and the electrode part, respectively. As described above, when the contacts 2 and 3 are curved, a conduction state between the inspection point and the electrode portions 22 and 23 can be obtained.

  For example, the first contact 2 may be provided with an expansion / contraction portion at least in one axial direction (not shown in the present embodiment), and the second contact 3 is provided with the expansion / contraction portion. In the case of contact with the inspection point, it is formed so that it can be simultaneously contacted at the time of inspection. This stretchable part can be formed in a substantially coil spring shape that elastically stretches in the axial direction of the first contactor 2. In addition, you may provide an expansion-contraction part in the several location of the axial direction of the 1st contactor 2 as a modification. This stretchable part is formed by cutting a part of a cylindrical member forming the first contact 2 into a substantially spiral shape using a laser beam or the like. A metal material (for example, nickel (Ni) or beryllium copper (CuBe)) is used as the material of the cylindrical member forming the first contactor 2.

  The second contactor 3 is formed in an elongated shape with a conductive material, and is formed in the first contactor 2 (more specifically, the first contactor 2 so that the central axis thereof is substantially coincident with the first contactor 2. Inside). As shown in FIG. 2B, the second contactor 3 can be formed in an elongated rod shape, but can also be formed in a cylindrical shape with a diameter smaller than that of the first contactor 2.

  Although the detailed description in the present embodiment is not performed, when the second contactor 3 is formed in a substantially cylindrical shape, like the first contactor 2, an expansion / contraction part is provided at least in one axial direction. Can be provided. In this case, the expansion / contraction part has a substantially coil spring shape that elastically expands and contracts in the axial direction of the second contactor 3. In addition, you may provide an expansion-contraction part in the several location of the axial direction of the 2nd contactor 3 as a modification. The stretchable part is formed by cutting a part of the cylindrical member forming the first contact 2 into a substantially spiral shape using a laser beam or the like. A metal material (for example, nickel (Ni) or beryllium copper (CuBe)) is used as the material of the cylindrical member forming the first contactor 2.

  Since the second contact 3 is inserted into the first contact 2, the outer diameter of the second contact 3 is set smaller than the inner diameter of the first contact 2. Further, in order to ensure insulation between the first contactor 2 and the second contactor 3, an insulating material (for example, a radially outward surface on the outer peripheral surface) of the second contactor 3 is provided. , Resin) is provided. A method of forming an expansion / contraction part after applying an insulating layer to a rod-like member or cylindrical member constituting the second contactor 3 or an insulating layer after forming an expansion / contraction part on the cylindrical member or rod-like member The method can be adopted.

  Insulating layers are provided on both end surfaces in the axial direction of the cylindrical second contactor 3 that is electrically connected to an inspection target or an electrode portion described later (or both end surfaces and the outer peripheral side surface in the vicinity thereof). It is not done. As a modification, an insulating spacer may be interposed between the outer peripheral side surface of the second contact 3 and the inner peripheral surface of the second contact 2. Examples of the configuration of the spacer include a ring shape, a cylindrical shape, and a sheet shape. In the case of a sheet-like spacer, a configuration such as winding around the outer peripheral side surface of the second contact 3 and inserting it into the first contact 2 can be adopted.

  Here, the axial length of the first contact 2 is set to, for example, 5 to 100 mm. Moreover, as shown in FIG. 4 described later, the outer diameter R21 of the first contactor 2 is set to, for example, 50 to 100 μm, and the inner diameter R22 thereof is set to, for example, 40 to 90 μm. The axial length of the second contactor 3 is set to, for example, 5 to 100 μm, and the outer diameter R31 thereof is set to, for example, 20 to 80 μm. In addition, when the 2nd contactor 3 is a cylindrical member as FIG. 4 shows, the internal diameter R32 is set to 10-70 micrometers, for example.

  As described above, according to the probe 1 according to the present embodiment, the second contact 3 that is elongated from the conductive material is formed in the first contact 2 that is formed in a substantially cylindrical shape from the conductive material. This is a so-called coaxial structure that is inserted in a state of being insulated from one contact 2. Therefore, the outer first contactor 2 and the inner second contactor 3 can be easily arranged close to each other with high positional accuracy while ensuring an insulating state. As a result, the inspection by the four-contact method can be performed with high reliability sufficiently corresponding to the densification of the inspection target (for example, wiring pattern) provided on the substrate to be inspected.

  Further, since the first and second contacts 2 and 3 constituting the probe 1 have a substantially cylindrical shape or a rod-like shape, the tips of the first and second contacts 2 and 3 are inspected on the substrate to be inspected. Even if the test object is susceptible to damage such as solder bumps from the tips of the first and second contactors 2 and 3 when brought into contact with the object, the first and second contacts are reduced while reducing the damage received by the test object. The electrical connection state (for example, contact resistance) between the second contacts 2 and 3 and the inspection object can be stabilized. In this regard, for example, in the case of a conventional needle-shaped contact, when the contact is brought into contact with the inspection object, the tip of the contact bites into the inspection object such as a solder bump, and the damage to the inspection object increases. There is.

  In addition, it is preferable that at least one location (one location in the present embodiment) of the first and second contactors 2 and 3 constituting the probe 1 is provided with a stretchable portion that elastically stretches in the axial direction. By providing such a stretchable part, the repulsive force when compressed in the axial direction is stabilized. As a result, when the tips of the first and second contacts 2 and 3 are brought into contact with the inspection target of the substrate to be inspected, between the tips of the first and second contacts 2 and 3 and the inspection target, and The pressing force between the rear ends of the first and second contacts 2 and 3 and the electrode portion on the substrate inspection apparatus main body side can be stabilized, and the first and second contacts 2 and 3 are inspected and the electrodes. The electrical connection state (for example, contact resistance) between the parts can be stabilized.

  In addition, since a part of cylindrical member which forms the 1st and 2nd contactors 2 and 3 is cut and formed in a substantially spiral shape, an expansion-contraction part is formed in the 1st and 1st which has a substantially coil spring-like expansion-contraction part. The two contacts 2 and 3 can be easily manufactured.

  The probe 1 described above has been described with respect to the probe structure that is pressed against the inspection point and the electrode part by using the expansion / contraction part. However, the first contactor 2 and / or the second contactor 3 itself is flexible. It is also possible to form the member so as to be in contact with the inspection point and the electrode portion at the same time by bending one or both of the contacts when pressed from both ends.

  The electrode structure of the present invention is a coaxial contact as described above, whether it has a stretchable part, uses the flexibility of the contact itself, or uses both. If it exists, it can utilize suitably.

[Configuration of inspection jig]
FIG. 3 is a cross-sectional view showing a configuration of an inspection jig according to an embodiment of the present invention using the probe of FIG. FIG. 4 is an enlarged view showing a part of the configuration of FIG. FIG. 5 is a diagram showing the positional relationship between the first and second contact elements and the first and second electrode portions provided in each probe in the inspection jig of FIG. In FIG. 4 and FIGS. 8 and 10 described later, the probe holding member 21 is omitted for convenience. 3, 8, and 9, the second contactor 3 is a rod-shaped member. In the configurations of FIGS. 4, 5, 10, and 11, the second contactor 3 is cylindrical. The case of a member is shown.

  As shown in FIGS. 3 to 5, the inspection jig 20 includes at least one probe 1, a probe holding member 21, the same number of sets of first and second electrode portions 22 and 23 as the probe 1, and an electrode holding member 24. And is used to inspect the electrical characteristics of the inspection target of the substrate 6 to be inspected. The probe holding member 21 corresponds to the holding body according to the present invention, the first and second electrode parts 22 and 23 correspond to the electrode part, and the first and second electrode parts 22 and 23 correspond to the electrode body. And a member formed by assembling the electrode holding member 24 and the like.

  In the example shown in FIG. 3, the tip 1 a of the probe 1 is brought into contact with the solder bump 7 provided on the wiring pattern of the substrate 6 to be inspected. Therefore, the tips 2a and 3a of the first and second contactors 2 and 3 of the probe 1 are brought into contact with one inspection point (solder bump 7 and the like) of the substrate 6 to be inspected. An inspection current is supplied to the inspected substrate 6 side through one of the first and second contacts 2 and 3, and the potential of the inspection point is measured through the other. As a result, an inspection is performed by the four-contact method regarding the electrical characteristics of the inspection target provided on the substrate 6 to be inspected.

  In the probe 1 shown in FIG. 3, the rear end 2b of the first contact 2 and the rear end 3b of the second contact 3 are arranged so as to be substantially flush with each other. The tip 3a of the second contactor 3 is arranged so as to be arranged along the arc shape that is the surface shape of the bump to be inspected. As shown in FIG. 3, the tip of the second contactor 3 is arranged. 3 a is arranged at a position protruding from the tip 2 a of the first contact 2. As described above, by arranging the first contact 2 and the second contact 3, the respective contacts 2, 3 can surely contact the electrode portions 22, 23 and the inspection point.

  As shown in FIG. 3, the probe holding member 21 is a member that holds the probe 1 and is mainly formed of an insulating material. For example, a plurality of insertion holes 26 through which the probe 1 is inserted are provided. In the state where the probe 1 is held in the insertion hole 26, the tip 1 a side of the probe 1 projects from the surface of the probe holding member 21 on the substrate 6 side to be inspected. On the other hand, the rear end 1b of the probe 1 can be brought into contact with first and second electrode portions 22 and 23 held by an electrode holding member 24 described later. Note that the probe holding member 21 may be configured by overlapping a plurality of plates in the axial direction of the probe 1. Further, in this case, the probe holding member 21 may be disposed with a space in the axial direction of the probe 1 between the plates.

  As shown in FIG. 3 and FIG. 4, the first electrode part 22 and the second electrode part 23 are provided electrically independently for each first contact 2 and each second contact 3 of the probe 1, The rear end 2b of the first contact 2 and the rear end 3b of the second contact 3 are brought into contact (contact) and electrically connected. Such sets of the first and second electrode portions 22 and 23 are provided so that the number of sets is the same as the number of probes 1. A more detailed configuration of the first and second electrode portions 22 and 23 will be described later.

  The electrode holding member 24 is mainly formed of an insulating material, and the first and second electrode portions 22 and 23 are inserted into the through holes 27 and 28. The first and second electrode portions 24 and 23 are inserted into the through holes 27 and 28, respectively. The first and second electrode portions 22 and 23 are held.

  The 1st and 2nd electrode parts 22 and 23 are each provided with the electrode main bodies 31 and 32 and the protrusion parts 33 and 34, and are comprised. The electrode bodies 31 and 32 are constituted by a substantially linear conductor (for example, a metal wire or a coated metal wire in which an outer peripheral side surface of the metal wire is covered with insulation), and a portion on the inspection substrate side is an electrode holding member. The electrode holding member 24 is inserted and held in the through holes 27 and 28 of the electrode 24 from the surface opposite to the substrate 6 to be inspected. In this held state, the end surfaces 31 a and 32 a of the electrode bodies 31 and 32 on the inspection substrate 6 side are positioned on substantially the same plane as the surface 24 a of the electrode holding member 24 on the inspection substrate 6 side.

  The protruding portions 33 and 34 are formed on the end surfaces 31 a and 32 a of the electrode bodies 31 and 32 by plating, and are raised from the surface 24 a of the electrode holding member 24 toward the substrate to be inspected 6. The raised heights H3 and H4 (see FIG. 4) of the protrusions 33 and 34 from the surface 24a of the electrode holding member 24 are set to 0.1 to 5 μm, for example. In addition, the detailed content regarding the manufacturing process of the protrusion parts 33 and 34 is later mentioned based on Fig.6 (a) and FIG.6 (b).

  When the probe holding member 21 to which the probe 1 is mounted and the electrode holding member 24 provided with the first and second electrode portions 22 and 23 are fixed to each other by a predetermined fixing tool, the first and second of each set The protrusions 33 and 34 of the second electrode portions 22 and 23 are in contact with and electrically connected to the rear ends 2b and 3b of the first and second contactors 2 and 3 of the corresponding probe 1, respectively.

  As described above, the protrusions 33 and 34 that are raised from the surface 24a of the electrode holding member 24 toward the substrate to be inspected 6 are provided at the ends of the first and second electrode portions 22 and 23 on the substrate to be inspected 6 side. Therefore, the protrusions 33 and 34 of the first and second electrode portions 22 and 23 are simply and reliably brought into contact with the corresponding rear ends 2b and 3b of the first and second contactors 2 and 3, respectively. Can be connected to.

  In addition, the electrode bodies 31 and 32 of the first and second electrode portions 22 and 23 are inserted and held in through holes 27 and 28 provided in the electrode holding member 24, and end surfaces 31a and 32a on the substrate 6 side to be inspected. 32 a is positioned substantially on the same plane as the surface 24 a of the electrode holding member 24. Then, on the end surfaces 31a, 32a of the electrode bodies 31, 32 of the first and second electrode portions 22, 23 on the inspected substrate 6 side, the protruding portions 33 swelled from the surface 24a of the electrode holding member 24 to the inspected substrate 6 side. 34 is formed by plating. For this reason, the first and second electrode portions 22, 23 in which the end portion on the inspected substrate 6 side rises from the surface 24 a of the electrode holding member 24 to the inspected substrate 6 side can be easily manufactured.

  Further, since the protrusions 33 and 34 are formed by plating with relatively easy thickness adjustment, the height of the protrusions 33 and 34 of the first and second electrode parts 22 and 23 from the surface 24a of the electrode holding member 24 is increased. The heights H3 and H4 can be easily adjusted.

  Here, with reference to FIG. 6A and FIG. 6B, a manufacturing process of the protruding portions 33 and 34 of the first and second electrode portions 22 and 23 will be described. First, as shown in FIG. 6A, the electrode bodies 31 and 32 of the first and second electrode portions 22 and 23 are manufactured. In the configuration of FIG. 6A, the electrode bodies 31 and 32 are inserted and held in through holes 27 and 28 provided in the electrode holding member 24, and the end surfaces 31a and 32a on the inspected substrate 6 side are the electrodes. The holding member 24 is positioned substantially on the same plane as the surface 24a. As a production method of this configuration, for example, a metal wire (or coated metal wire) for producing the electrode bodies 31 and 32 is inserted into the through holes 27 and 28 of the electrode holding member 24, and the metal wire (or coated metal) is inserted. It is possible to adopt a method in which a portion (protruding portion) that protrudes from the surface 24a of the electrode holding member 24 to the inspected substrate 6 side is cut by a cutting means (for example, a cutter). By this method, the first and second electrode portions 22 and 23 can be easily manufactured.

  Subsequently, as shown in FIG. 6B, the end surfaces 31 a and 32 a on the inspection substrate 6 side of the electrode bodies 31 and 32 provided on the electrode holding member 24 as described above become the plating solution 37 in the plating tank 36. It is immersed and plating is applied to the end faces 31a and 32a of the electrode bodies 31 and 32. As a result, protrusions 33 and 34 are formed on the end surfaces 31 a and 32 a of the electrode bodies 31 and 32 so as to rise from the surface 24 a of the electrode holding member 24 toward the inspected substrate 6.

  Next, with reference to FIGS. 4 and 5, the positional relationship between the first and first contactors 2 and 3 of the probe 1 and the first and second electrode portions 22 and 23 will be described.

  In the present embodiment, as shown in FIGS. 4 and 5, the first electrode portion 22 and the second electrode portion 23 are separated from each other in the plan view when the center of the first electrode portion 22 and the center of the second electrode portion 23 are separated. Are arranged to be. The distance between the center of the first electrode part 22 and the center of the second electrode part 23 is set larger than the sum of the radius of the first electrode part 22 and the radius of the second electrode part 23. Further, the maximum width (in the present embodiment, the outer diameter R5) of the first electrode portion 22 in plan view is set to be smaller than the outer diameter R21 of the first contactor 2. That is, the arrangement form of the first electrode part 22 and the second electrode part 23 in the present embodiment is such that the second electrode part 23 surrounds the outer periphery of the first electrode part 22 (for example, a concentric structure). Is different. For this reason, the pitch between the set of the 1st and 2nd electrode parts 22 and 23 can be narrowed, and even if it is a test | inspection by a 4-contact method, it can implement with high reliability.

  The planar shape of the first and second electrode portions 22 and 23 viewed from the inspected substrate 6 side is substantially circular, but any shape such as a rectangle can be adopted. 4 and 5, the size and shape of the planar shape of the first electrode portion 22 and the planar shape of the second electrode portion 23 are set to be the same. For this reason, the 1st and 2nd electrode parts 22 and 23 can be formed using the same member, and cost reduction can be aimed at. As another configuration, for example, as shown in FIG. 11 described later, the planar shape of the first electrode portion 22 and the planar shape of the second electrode portion 23 may be similar in shape with different sizes. In the case of similar shapes, there is an advantage that the positions of the first and second electrode portions 22 and 23 can be easily grasped.

  In this embodiment, as shown in FIGS. 4 and 5, the outer diameter R6 of the protrusion 34 of the second electrode portion 23 is equal to or larger than the inner diameter R32 of the second contact 3 and the inner diameter of the first contact 2. The size is set smaller than R22. More specifically, in the present embodiment, the outer diameter R6 of the protruding portion 34 is set to be larger than the inner diameter R32 of the second contactor 3 and smaller than the outer diameter R31 of the second contactor 3. . In addition, although there is no restriction | limiting in particular about the outer diameter R5 of the protrusion part 33 of the 1st electrode part 22, In this embodiment, it is substantially the same size as the outer diameter R6 of the protrusion part 34 of the 2nd electrode part 23.

  And the 2nd electrode part 23 is arrange | positioned so that the outer edge part may be located inside the inner periphery 2c of the 1st contactor 2 of the probe 1 to which it corresponds. More specifically, in this embodiment, the 2nd electrode part 23 is arrange | positioned so that the outer edge part may be located inside the outer periphery 3c of the 2nd contactor 3 of the probe 1 to which it corresponds.

  On the other hand, the 1st electrode part 22 is a position outside the outer periphery 3c of the rear end 3b of the 2nd contactor 3 of the corresponding probe 1, Comprising: The position which can contact | abut with the rear end 2b of the 1st contactor 2 Is arranged. More preferably, in the first electrode portion 22, the portion 22a closest to the center axis C1 of the corresponding probe 1 is substantially located between the inner periphery 2c and the outer periphery 2d of the rear end 2b of the first contactor 2. Are arranged as follows.

  With such a configuration, when the inspection jig 20 is assembled, the first electrode portion 22 accidentally contacts the second contactor 3, or the second electrode portion 23 mistakenly contacts the first contactor 2. The rear ends 2b and 3b of the first and second contactors 2 and 3 and the first and second electrode portions 22 and 23 can be brought into contact with each other and electrically connected while reliably avoiding inconvenience. it can.

  In the present embodiment, the second electrode portion 23 has a center axis C1 of the probe 1 provided with the second contactor 3 corresponding to the center C23 (this center axis C1 is substantially equal to the center axis of the second contactor 3). It is arranged so as to substantially match. Accordingly, any part (or almost the whole circumference) of the peripheral edge of the second electrode part 23 can be brought into contact with the rear end 3b of the second contactor 3 and can be electrically connected. .

  Moreover, in this embodiment, as shown in FIG. 5, the separation direction of the 1st electrode part 22 with respect to the 2nd electrode part 23 when it sees on the basis of the 2nd electrode part 23 in each set can be changed. In the configuration shown in FIG. 5, a straight line L1 connecting the center of the first electrode portion 22 and the center of the second electrode portion 23 of each set is a predetermined angle θ (for example, approximately about the arrangement direction L2 in which the plurality of probes 1 are arranged. The first and second electrode portions 22 and 23 are arranged so as to be inclined at 45 degrees. Thereby, even when the pitch between the probes 1 is shortened, the pitch between the sets of the first and second electrode portions 22 and 23 can be easily shortened. This effect is most effectively exhibited when the predetermined angle θ is set to about 45 degrees.

  As a modification regarding this point, as shown in FIG. 7, a straight line L1 connecting the center of the first electrode portion 22 and the center of the second electrode portion 23 of each set is substantially parallel to the arrangement direction L2 in which the plurality of probes 1 are arranged. The first and second electrode portions 22 and 23 may be arranged so that

  4 and 5, the case where the second contactor 3 is a cylindrical member has been described. However, even if it is a rod-like member, the same effect can be obtained.

  Below, the modification of the structure which concerns on the above-mentioned embodiment is described.

  In the modification shown in FIGS. 8 and 9, the second electrode portion 23 has a center axis C1 of the probe 1 provided with the second contactor 3 corresponding to the center C23 (this center axis C1 is the second contactor 3). It is arranged so as to be slightly shifted from the central axis).

  In this case, the first electrode portion 22 and the second electrode portion 23 are set so as to be able to contact the rear end surfaces of the first contact 2 and the second contact 3, respectively. For this reason, the separation distance between the first electrode portion 22 and the second electrode portion 23 is formed to have a size corresponding to the clearance between the first contact 2 and the second contact 3.

  When the second contactor 3 is formed of a cylindrical member, the outer diameter R6 of the protrusion 34 of the second electrode portion 23 is set to a size that substantially matches the inner diameter of the second contactor 3, The protruding portion 34 of the second electrode portion 3 is formed so as to be in conductive contact with a part of the rear end surface of the second contact 3, and the protruding portion 33 of the first electrode portion 2 is one of the rear end surfaces of the first contact 2. Formed so as to be in conductive contact with the portion.

  In the modification shown in FIGS. 10 and 11, the outer diameter R <b> 5 of the first electrode portion 22 is in conductive contact with a part of the rear end surface of the first contact 2, so that the thickness in the radial direction of the first contact 2 is substantially the same. Form the same or slightly larger. The outer diameter R6 of the second electrode portion 23 is formed to be smaller or substantially the same as the outer diameter of the second contactor. Further, the outer diameter R5 of the first electrode portion 22 is set smaller than the outer diameter R6 of the second electrode portion 23. As a result, the pitch between the sets of the first and second electrode portions 22 and 23 can be reduced. In this case, the protruding portion 23 of the first electrode portion 22 is in conductive contact with the peripheral edge of the second contact 3, and a part of the tip of the protruding portion 23 is partially accommodated in the second contact 3. become. By being formed in this way, the second electrode portion 23 can be stabilized and the second contactor 3 can be stably brought into conductive contact, and the position of the second contactor 3 can be stabilized. The electrode portions 22 and 23 and the contacts 2 and 3 can be brought into conductive contact. In the configuration of FIG. 10, a cylindrical member is used for the second contactor 3, but a rod-like member can also be used.

  In FIG. 11, the electrode portions 22 and 23 are arranged so as to be arranged in parallel. However, as shown in FIG. Can be shortened, and in this case, the pitch of the bumps can be further reduced.

  As another modified example, a flange that projects radially outward from the outer peripheral side surface of the first contact 2 of the probe 1 described above is provided, and the flange is inserted into the insertion hole 26 of the probe holding member 21. A state in which a contact portion (for example, a step portion) that contacts from the inspected substrate 6 side and prevents the probe 1 from being provided is provided, and the probe 1 is compressed in the axial direction between the contact portion and the electrode portions 22 and 23. You may make it hold | maintain.

  Moreover, in the electrode structure shown in FIG.3, FIG4 and FIG.10, when the center axis | shaft of the 2nd electrode part 23 and the center axis | shaft of the 2nd contactor 3 are formed so that it may arrange | position substantially coaxially. Show. In this case, when the second contactor 3 is a cylindrical member, the outer diameter of the second electrode portion 23 is formed to be larger than the inner diameter of the second contactor 23. When the second contactor 3 is a rod-shaped member, the outer diameter of the second electrode portion 23 is formed to be smaller than the inner diameter of the first contactor 2 or smaller than the outer diameter of the second contactor 3. The

  On the other hand, the electrode structure shown in FIG. 8 is formed so that the central axis of the second electrode portion 23 and the central axis of the second contactor 3 are slightly shifted from each other. In this case, when the second contactor 3 is a cylindrical member, the outer diameter of the second electrode portion 23 is formed to be larger than the thickness of the second contactor 23, and the second contactor 3 It arrange | positions so that it may carry out conductive contact with a part bottom face. When the second contactor 3 is a rod-like member, the outer diameter of the second electrode portion 23 contacts the first contactor 2 in consideration of the clearance and thickness of the first contactor 2 and the second contactor 3. It is formed in a size that does not.

  The first electrode portion 22 and the second electrode portion 23 preferably have the same outer diameter. Since this is formed by the manufacturing method as described above, it is not necessary to distinguish between the members used for the first or second electrode portions 22 and 23, so that it is easily manufactured by using the same conductive wire. can do.

It is the figure which looked at the probe used for the inspection jig concerning one embodiment of the present invention from the side. 2A is a side view of the first contact provided in the probe of FIG. 1, and FIG. 2B is a side view of the second contact provided in the probe of FIG. FIG. It is sectional drawing which shows the structure of the inspection jig which concerns on one Embodiment of this invention using the probe of FIG. It is a figure which expands and shows a part of structure of FIG. It is a figure which shows the positional relationship etc. of the 1st and 2nd contactor with which each probe with which the inspection jig | tool of FIG. 3 is equipped, and the 1st and 2nd electrode part are provided. FIG. 6A and FIG. 6B are explanatory diagrams of the manufacturing process of the protruding portions of the first and second electrode portions. It is a figure which shows the modification of the structure shown in FIG. It is a figure shown with the modification of the inspection jig | tool shown in FIG.3 and FIG.4. It is a figure which shows the positional relationship etc. of the 1st and 2nd contactor with which each probe in the structure shown in FIG. 8 is equipped, and the 1st and 2nd electrode part. It is a figure shown with the other modification of the inspection jig | tool shown in FIG.3 and FIG.4. It is a figure which shows the positional relationship etc. of the 1st and 2nd contactor and 1st and 2nd electrode part with which each probe in the structure shown in FIG. 10 is equipped.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 Probe, 2 1st contactor, 3 2nd contactor, 6 Board to be inspected, 7 Solder bump, 20 Inspection jig, 21 Probe holding member, 22 1st electrode part, 23 2nd electrode part, 24 Electrode holding member , 26 insertion hole, 27, 28 through hole, 31, 32 electrode body, 33, 34 protrusion.

Claims (12)

An inspection jig,
A plurality of probes in which one end is in conductive contact with an inspection point to be inspected on a substrate to be inspected, and the other end is in conductive contact with an electrode unit electrically connected to an inspection device for inspecting electrical characteristics;
While guiding both ends of the probe to the predetermined inspection point and the electrode part, respectively, a holding body for holding the probe,
An electrode body comprising a plurality of the electrode parts;
With
The probe is
A first contact formed in a substantially cylindrical shape by a conductive material;
A second contact formed in an elongated shape of a conductive material and housed in an internal space of the first contact in a state insulated from the first contact;
With
The electrode part is
A first electrode portion for conducting contact with the first contact;
A second electrode portion that is in electrical non-contact with the first electrode portion and is in conductive contact with the second contact;
With
The first electrode part and the second electrode part are arranged such that the center of the first electrode part and the center of the second electrode part are separated from each other in plan view, and the first electrode part and the second electrode part in plan view are separated from each other. An inspection jig having a maximum width smaller than an outer diameter of the first contact. The inspection jig according to claim 1,
The inspection in which the first electrode portion has substantially the same size and substantially the same shape as the second electrode portion in a plan view, or a shape that is smaller and similar to the size of the second electrode portion. jig. In the inspection jig according to claim 1 or claim 2,
The second electrode portion is disposed at a substantially center with respect to the radial direction of the probe,
The first electrode unit is arranged such that a straight line connecting the first electrode unit and the second electrode unit is inclined at a predetermined angle with respect to an arrangement direction in which a plurality of probes are arranged. jig. The inspection jig according to claim 3,
The inspection jig characterized in that the predetermined angle is about 45 degrees. In the inspection jig according to any one of claims 1 to 4,
The inspection jig, wherein the first electrode portion and the second electrode portion are formed so as to protrude from the surface of the electrode body. In the inspection jig according to any one of claims 1 to 5,
The first electrode part and the second electrode part are:
A linear electrode body inserted into a through-hole provided in the electrode body, the end surface of the substrate to be inspected positioned flush with the surface of the electrode body;
A protrusion formed on the end face of the electrode holding member of the electrode body by plating, and protruding from the surface of the electrode body toward the substrate to be inspected;
An inspection jig characterized by comprising each of the above. The inspection jig according to claim 2,
The outer diameter of the second electrode portion is smaller than the inner diameter of the first contact,
The second electrode part is disposed so as to be located inside the inner periphery of the first contact,
The inspection tool, wherein the first electrode portion is disposed at a position outside the outer periphery of the second contact and capable of contacting the end of the first contact. In the inspection jig according to claim 7,
The inspection jig, wherein the second electrode portion is arranged so that a center thereof substantially coincides with a central axis of the second contactor. In the inspection jig according to claim 7,
The inspection jig, wherein the second electrode portion is arranged so that a center thereof is deviated from a central axis of the second contactor. In the inspection jig according to any one of claims 7 to 9,
The inspection jig according to claim 1, wherein an outer diameter of the first electrode portion is smaller than an outer diameter of the second electrode portion. Substrate inspection comprising a plurality of probes in which one end is in conductive contact with an inspection point to be inspected on a substrate to be inspected and the other end is in conductive contact with an electrode portion electrically connected to an inspection device for inspecting electrical characteristics An electrode structure provided in a jig for use,
The probe is
A first contact formed in a substantially cylindrical shape by a conductive material;
A second contact formed in an elongated shape of a conductive material and housed in an internal space of the first contact in a state insulated from the first contact;
With
The electrode part is
A first electrode portion for conducting contact with the first contact;
A second electrode portion that is in electrical non-contact with the first electrode portion and is in conductive contact with the second contact;
With
The first electrode part and the second electrode part are arranged such that the center of the first electrode part and the center of the second electrode part are separated from each other in plan view, and the first electrode part and the second electrode part in plan view are separated from each other. An electrode structure having a maximum width smaller than an outer diameter of the first contact. It is a manufacturing method of the electrode structure according to claim 11,
Conductive linear members that respectively form the first electrode portion and the second electrode portion are disposed through a holding body having a holding hole for holding the linear member,
A method for producing an electrode structure, comprising: cutting and removing a protruding portion of the linear member protruding from the holding body so as to be flush with the holding body.

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