JP5804237B2 - Inspection jig - Google Patents

Description

The present invention, Osamu again and again relates inspection used for inspecting the electrical characteristics of the wiring pattern to be inspected of the substrate to be inspected.

  As an inspection method for the electrical characteristics of the inspection target such as the wiring pattern provided on the board to be inspected, two contacts, a contact for current supply and a contact for voltage measurement, are provided, and the two contacts are inspected. There is a technique (a so-called four-contact method) in which an inspection object is inspected by contacting them simultaneously (for example, Patent Document 1). In this four-contact method, the current supply contactor and the voltage measurement contactor are separated, so that the current flowing between the voltage measurement contactor and the inspection point can be substantially ignored. Therefore, the influence of the contact resistance between the contact for voltage measurement and the inspection point is substantially excluded, and the voltage between the two inspection points where the contact for voltage measurement contacts can be accurately measured.

  In such a conventional probe and inspection jig used in the four-contact method, two needle-like contacts arranged in parallel in an insulated state are provided as a set corresponding to each inspection point. Two contacts are brought into contact with each inspection point simultaneously.

  In recent years, since the miniaturization of wiring patterns and the like provided on the substrate has been rapidly progressing, the inspection jig is also required to cope with the densification of the inspection object.

  In order to cope with such miniaturization, a substrate inspection jig as disclosed in Patent Document 2 has been proposed. In the technology disclosed in Patent Document 2, it is possible to cope with a narrow pitch by accommodating a conductive cylindrical contact and a rod-shaped contact inside the cylindrical contact.

JP 2004-184374 A JP 2007-205808 A

  In the case of using a contact as disclosed in Patent Document 2, an electrode portion that is conductively connected to the inspection apparatus is formed in the same manner as the cross-sectional shape of the contact.

  However, in such a structure of the electrode part, the electrode part (member) has a diameter larger than the outer diameter of the cylindrical contact, and the pitch of the electrode part cannot correspond to the narrow pitch, There was a problem that the structure became complicated.

In addition, a contact (coaxial contact) having such a structure as a cylindrical contact and a rod contact is used to calculate the resistance value of a fine wiring formed on the substrate. High stability of the contact between the child and the electrode portion is required.

  Therefore, the problem to be solved by the present invention is that, when the coaxial contact as described above is used, the structure of the electrode portion can be miniaturized and simplified, and the substrate having high contact stability between the coaxial contact and the electrode portion. An inspection jig, an electrode structure thereof, and a manufacturing method thereof are provided.

In order to solve the above problems, according to one aspect of the present invention, there is provided an inspection device for inspecting a wiring formed on a substrate and an inspection jig for electrically connecting the substrate, one end of which inspects the substrate to be inspected. A plurality of probes that are in conductive contact with the target inspection point and the other end is in conductive contact with an electrode unit that is electrically connected to an inspection device for inspecting electrical characteristics, and both ends of the probe are subjected to predetermined inspection. A first contactor that is guided to the point and the electrode part, and that holds the probe, and an electrode body that includes a plurality of the electrode parts, and the probe is formed in a cylindrical shape from a conductive material. And a second contact formed in a bar shape with a conductive material and insulated from the first contact, and housed in an internal space of the first contact, and the electrode section is a plan view In the ring shape and A first electrode portion that is in conductive contact with the first contact, and is disposed in a non-contact and concentric circle with the first electrode in a plan view; and the second contact A second electrode part having a circular shape that is in conductive contact, and the first electrode part protrudes relative to the thickness direction of the electrode body relative to the second electrode part. Provide inspection jigs.
Relates to the aforementioned invention, the first and second electrode parts may be characterized in that it is formed to protrude from the electrode surface.
Relates to the aforementioned invention, the ratio of the amount of protrusion of the protruding amount and the second electrode portion of the first electrode portion is 1.5 to 5: can be characterized by being formed in one.
With regard to the above invention, the first electrode portion includes a top portion having the protruding height, an inner curved portion formed from an inner peripheral edge of the first electrode portion to the top portion, and an outer portion of the first electrode portion. it includes an outer curved portion from the diameter peripheral edge formed to the top portion, the outer surface of the first contactor may be characterized in that it is connected to the inner curved portion.
With regard to the above invention, the first electrode portion includes a top portion having the protruding height, an inner curved portion formed from an inner peripheral edge of the first electrode portion to the top portion, and an outer portion of the first electrode portion. it includes an outer curved portion from the diameter peripheral edge formed to the top portion, the inner surface of the first contactor, to be connected by the outer curved portion can be characterized.
Relates to the aforementioned invention, the projecting portion of the second electrode portion and the projecting portion of the first electrode portion, that is formed by plating can be characterized.
Further, according to one aspect of the present invention, one end is in conductive contact with an inspection point to be inspected on the substrate to be inspected, and the other end is in conductive contact with an electrode portion electrically connected to an inspection apparatus for inspecting electrical characteristics. An electrode structure for an inspection jig comprising a plurality of probes, wherein the first electrode part is formed in a ring shape in plan view, and is electrically non-contact with the first electrode part in plan view. A first electrode portion and a second electrode portion arranged concentrically, wherein the first electrode portion protrudes relative to the thickness direction of the electrode body relative to the second electrode portion. Provided is an electrode structure for an inspection jig.
Further, according to one aspect of the present invention, one end is in conductive contact with an inspection point to be inspected on the substrate to be inspected, and the other end is in conductive contact with an electrode portion electrically connected to an inspection apparatus for inspecting electrical characteristics. A method for manufacturing an electrode structure for an inspection jig comprising a plurality of probes, comprising a conductive core wire, an insulating insulating layer disposed at the periphery of the core wire, and disposed at the periphery of the insulating layer A linear member in which a conductive conductive layer is arranged concentrically passes through an insulating holding body having a holding hole for holding the linear member, and the linear member protrudes from the holding body. The portion is removed so as to be flush with the surface of the holding body, and the surface portion of the conductive layer and the surface portion of the core wire are plated, and the plating thickness of the conductive layer is larger than the plating thickness of the core wire. Manufacturing method of electrode structure of inspection jig, characterized by being formed thicker To provide.
Relates to the aforementioned invention, the plating is performed by electrolytic plating, the power supplied to the conductive layer and the core wire, can be characterized in that the plating thickness of the plating thickness and the core wire of the conductive layer is adjusted .

According to the above invention , when the coaxial contact is used, the configuration of the electrode portion can be miniaturized and simplified, and the substrate inspection jig having high contact stability between the coaxial contact and the electrode portion, and its electrode structure And a manufacturing method thereof.
According to the above invention , since the first electrode portion and the second electrode portion are formed so as to protrude from the surface of the electrode body, each electrode portion can be easily formed and the amount of protrusion can be easily controlled. It can be carried out.
According to the above invention , since the ratio of the protrusion amount of the first electrode portion and the protrusion amount of the second electrode portion is formed to 1.5 to 5: 1, the contactor and the electrode portion are stable at a suitable contact pressure. And conductive contact can be made.
According to the above invention , since the outer surface of the first contact is connected to the inner curved portion, the first contact 11 in which the first electrode portion 41 is to be arranged is pressed inward. It will be arrange | positioned so that force may work in direction, and the stable connection state can be provided.
According to the above invention , the inner surface of the first contactor is connected by the outer curved portion, so that the first contactor 11 whose outer side is disposed on the first electrode portion is pushed outward. It will be arrange | positioned so that force may work in the extending direction, and the stable connection state can be provided.
According to the said invention , since the protrusion part of the 1st electrode part and the protrusion part of the said 2nd electrode part are formed by plating, it can manufacture easily.
According to the above invention , the plating is performed by electrolytic plating, and the plating thickness of the conductive layer and the plating thickness of the core wire are adjusted by the power supplied to the conductive layer and the core wire. Can do.

  FIG. 1 is a side view of a probe used in an inspection jig according to an embodiment of the present invention. 2A is a side view of the first contact provided in the probe of FIG. 1, and FIG. 2B is a side view of the second contact provided in the probe of FIG. FIG.

As shown in FIGS. 1, 2A and 2B, the probe 1 according to this embodiment includes a first contact 11 having a cylindrical shape and a second contact 12 having an elongated rod shape. It is configured. This probe 1 is used for inspecting electrical characteristics of an inspection target of a substrate to be inspected. Examples of the inspection object include a wiring pattern provided on a substrate to be inspected, a solder bump applied to the wiring pattern, or both a wiring pattern and a solder bump (hereinafter, these are collectively referred to in this application document). ("Wiring") . The contents of the inspection include, for example, a continuity inspection for inspecting whether the wiring patterns are conductive, an insulation inspection for inspecting whether the wiring patterns are insulated, or the like. In particular, the probe 1 according to the present embodiment has a coaxial structure in which the second contact 12 is inserted into the first contact 11 in an insulated state, as will be described later. These two first contacts 11 The second contactor 12 is brought into electrical contact with the same inspection point to be inspected, so that the electrical characteristics of the inspection object can be inspected by the four-contact method. In FIG. 1 and the like, the first contactor 11 is formed in a slightly longer state than the second contactor 12.

  The first contactor 11 has an elongated cylindrical shape as shown in FIG. The first contactor 11 is formed of a cylindrical conductive portion 113 and an insulating coating 112 that covers the outer periphery of the conductive portion 113. The outer periphery of the first contactor 11 is covered with an insulating coating 112, and the insulating coating 112 is formed except for both ends (front and rear ends) of the first contactor 11. By providing the insulating coating 112 in this manner, a short circuit failure with the adjacent first contactor 11 can be prevented. The insulating coating 112 shown in FIG. 1 or FIG. 2A is also provided in the stretchable part 111 described later, but it may not be provided in the part of the stretchable part 111.

  The first contactor 11 is preferably provided with two expansion / contraction portions 111 at at least one location (two locations in the present embodiment) on the periphery thereof. By providing such an expansion / contraction part 111, when the first contactor 11 comes into contact with the inspection point, the expansion / contraction part 111 contracts, so that the second contactor 12 shorter than the first contactor 11 is inspected. It can be configured to contact a point. The stretchable portion 111 is preferably formed so as to be disposed in the through hole of the plate-like member of the probe holding member that holds the probe 1. This is because the through-hole side wall of the plate-shaped member can serve as a guide for the expandable portion 111 by arranging the expandable portion 111 in the through-hole of the plate-shaped member.

  The stretchable portion 111 can be formed by providing a slit-like cutout on the side wall of the cylinder so as to elastically stretch in the axial direction of the first contactor 11. In addition, this expansion-contraction part 111 can cut and form a part of cylindrical member which forms the 1st contactor 11 helically using a laser beam etc. A metal material (for example, nickel (Ni) or beryllium copper (CuBe)) is used as the material of the cylindrical member forming the first contactor 11.

  The second contact 12 is formed into an elongated shape with a conductive material, and is formed in the first contact 11 (more specifically, the first contact 11 so that its central axis is substantially coincident with the first contact 11. Inside). As shown in FIG. 2B, the second contact 12 is formed in an elongated rod shape. Note that the tip of the second contact 12 may be formed in a tapered shape. The second contactor 12 has a conductive portion 122 formed in a thin rod shape and an insulating coating 121 that covers the outer periphery of the conductive portion 122.

  Since the second contact 12 is inserted into the first contact 11, the outer diameter of the second contact 12 is set smaller than the inner diameter of the first contact 11. In order to ensure insulation between the two contacts 12, an insulating coating 121 made of an insulating material (for example, resin) is provided on the outer peripheral side surface of the second contactor 12 (the surface facing the radially outer side of the outer peripheral surface). Has been granted. A method of forming an expansion / contraction portion after applying an insulating coating to the rod-shaped member or cylindrical member constituting the second contactor 12 or an insulating coating after forming an expansion / contraction portion on the cylindrical member or the rod-shaped member The method is adopted.

In the configuration of the probe shown in FIG. 1, the first contact 11 is formed slightly longer than the second contact 12 described later, and the probe 1 is in contact with the inspection point and the inspection is performed. The second contactor 12 comes into contact with the inspection point as the expansion / contraction part of the first contactor 11 described later contracts. In addition, the length will not be specifically limited if the 1st contactor 11 and the 2nd contactor 12 can contact a test | inspection point.
The probe 1 is formed so that it can be bent when the first contact 11 and the second contact 12 are pressed from both ends. By forming the probe 1 in this way, the probe 1 is bent to generate an urging force that works outward from both ends of the probe 1.

  The length in the major axis direction of the first contactor 11 and the second contactor 12 is set to, for example, 5 to 100 mm, and the first contactor 11 is slightly longer than the second contactor 12 (for example, 1 to 100 μm). Is set as follows. The outer diameter of the first contactor 11 is, for example, 50 to 200 μm, and the inner diameter is 30 to 180 μm. The diameter of the second contact 12 is set to 20 to 150 μm, for example.

  As described above, the probe 1 according to the present embodiment includes the first contactor 11 formed into a cylindrical shape with a conductive material, and the second contactor 12 formed with the conductive material in an elongated shape. 11 is a so-called coaxial structure that is inserted in a state of being insulated from 11. Therefore, the outer first contactor 11 and the inner second contactor 12 can be easily arranged close to each other with high positional accuracy while ensuring an insulating state. As a result, the inspection by the four-contact method can be performed with high reliability sufficiently corresponding to the densification of the inspection target (for example, wiring pattern) provided on the substrate to be inspected.

  Moreover, it is preferable that at least one place (two places in the present embodiment) of the first contactor 11 and the second contactor 12 constituting the probe 1 is provided with an expansion / contraction part that elastically expands and contracts in the axial direction. . By forming the contactor having the expansion / contraction part long and contracting the expansion / contraction part so that the lengths of the other contactors are equal, the two contactors can contact the inspection point. become able to.

  Moreover, by providing such an expansion-contraction part, the repulsive force when compressed in an axial direction is stabilized. As a result, when the tips of the first contactor 11 and the second contactor 12 are in contact with the inspection target of the substrate to be inspected, between the tips of the first contactor 11 and the second contactor 12 and the inspection target, In addition, the pressing force between the rear ends of the first contactor 11 and the second contactor 12 and the electrode part on the substrate inspection apparatus main body side can be stabilized, and the first contactor 11 and the second contactor 12 The electrical connection state (for example, contact resistance) between a test object and an electrode part can be stabilized.

The probe 1 described above has been described with respect to the probe structure that is pressed against the inspection point and the electrode part by using the expansion / contraction part. However, the first contactor 11 and / or the second contactor 12 itself is flexible. It is also possible to form a member having a contact point, and when one or both contacts are curved when pressed from both ends, the inspection point and the electrode part can be pressed and contacted at the same time.
The first contactor 11 and the second contactor 12 may be fixed to each other with an adhesive, caulking, solder, or the like within a range that does not cause a short circuit failure and does not affect each other's movement. good.

  FIG. 3 is a schematic cross-sectional view showing the configuration of an inspection jig according to an embodiment of the present invention using the probe of FIG. FIG. 4 is an enlarged view showing a part of the configuration of FIG. FIG. 4 is a diagram showing a positional relationship and the like between a contact provided in each probe and an electrode part in the inspection jig of FIG. The actual inspection jig is provided in such a manner that the probe and the electrode portion are in contact with each other (the probe holding member and the electrode holding member are connected). In FIG. 3, the substrate T and the inspection point B are indicated by dotted lines. In FIG. 3 and FIG. 4, a pair of probes and electrode portions are shown for convenience of explanation.

The inspection jig 2 includes a plurality of probes 1, a probe holding member 3, and an electrode body 4 having the same number of electrode portions as the probe 1, and is used for inspecting the electrical characteristics of the inspection target of the substrate T. It is done. The inspection jig 2 is electrically connected to a substrate inspection device (not shown), and the substrate inspection device determines whether the wiring pattern is good or defective based on the electrical characteristics from the inspection jig 2. .

In the schematic configuration diagram of FIG. 3, the tip of the probe 1 is in contact with the solder bump B applied to the wiring pattern of the substrate T, and the rear end of the probe 1 is in contact with the electrode portion. Specifically, the tip 11a of the first contactor 11 and the tip 12a of the second contactor 12 of the probe 1 are brought into contact with one inspection point (solder bump B) of the substrate T. On the other hand, the rear end 11b of the first contactor 11 and the rear end 12b of the second contactor 12 come into contact with each electrode part.
Note that current is supplied to the inspection B of the substrate T via one contact (for example, the first contact 11) of the probe 1, and via the other contact (second contact 12). Potential measurement between inspection points is performed. As a result, the inspection by the four-contact method regarding the electrical characteristics of the wiring pattern of the substrate T is performed.

As shown in FIG. 3, the probe holding member 3 is a member that holds the probe 1 and is formed of an insulating material. In the embodiment of FIG. 3, the probe holding member 3 is formed using a first holding member 31 and a second holding member 32. The first holding member 31 is formed with a guide hole 31h for guiding the rear end 1b of the probe 1 to a predetermined electrode portion. The second holding member 32 is formed with a guide hole 32h for guiding the tip 11a of the probe 1 to a predetermined inspection point.

  The probe holding member 3 preferably holds the probe 1 in a curved shape by the arrangement of these two guide holes, and may be arranged so as not to overlap in a direction perpendicular to the plane of the probe holding member 3. (In FIG. 3, the two guide holes are arranged so as to overlap each other at right angles, but they are arranged so as not to overlap each other in the side surface of FIG. 3).

  The first holding member 31 and the second holding member 32 can be formed from a plurality of plate-like members, and the number of these members is not particularly limited. In the embodiment of FIG. 3, the first holding member 31 and the second holding member 32 are each formed of two plate-like members. Further, the first holding member 31 and the second holding member 32 are arranged with a predetermined interval (space). The probe 1 is curved in a space formed between the first holding member 31 and the second holding member 32.

In the guide hole 31h formed in the first holding member 31, the boundary portion of the insulating coating 112 of the first contactor 11 is locked to the guide hole 31h in order to prevent the probe 1 from slipping out of the probe holding member 3. Thus, the diameter of the guide hole 31h can be formed slightly shorter than the outer diameter of the insulating coating 112. In the assembled inspection jig 2, the tip 11 a of the probe 1 protrudes from the guide hole 32 h of the second holding member 32 of the probe holding member 3 and is held. At this time, the rear end 1 b of the probe 1 is in contact with the electrode portion 40 of the electrode body 4.
In the actual inspection jig 2, as described above, the electrode body 4 and the probe holding member 3 are fixed in contact with each other, and the tip of the probe 1 slightly protrudes from the probe holding member 3. At this time, the probe 1 is locked by the insulating coating 112 and the guide hole 31h, the probe 1 is bent and the expansion / contraction part 111 is contracted by a predetermined amount, and the probe 1 is pressing the electrode part. Yes. Thereafter, when inspection is performed and the tip of the probe 1 comes into contact with the inspection point, the probe 1 is further bent to press the inspection point and the electrode portion.

The electrode body 4 includes a first electrode part 41, a second electrode part 42, and an electrode holding part 43. The electrode holding portion 43 is formed of an insulating member and is formed so that the first electrode portion 41 and the second electrode portion 42 are not short-circuited.
As shown in FIG. 4A, the first electrode portion 41 is in conductive contact with the rear end 11 b of the first contactor 11 of the probe 1. As shown in FIG. 4A, the second electrode portion 42 is in conductive contact with the rear end 12 b of the second contact 12 of the probe 1.

The first electrode portion 41 is formed in a ring shape in plan view (see FIG. 4B). The first electrode portion 41, to conductive contact with the first contact 11 is formed in the same sectional shape as the first contactor 11 (ring-shaped). The outer diameter of the first electrode part 41 is formed larger than the inner diameter of the first contactor 11 , and the inner diameter of the first electrode part 41 is formed smaller than the outer diameter of the first contactor 11 .

The second electrode part 42 is formed in a circular shape that is not in electrical contact with the first electrode part 41 and concentrically with the first electrode part 41 in plan view (see FIG. 4B). . The second electrode portion 42 is formed in a circular shape having a diameter slightly larger than the outer diameter of the second contact element 21 in order to conduct contact with the thin rod-shaped second contact element 12 .

The first electrode portion 41 is formed with a predetermined height 41h, and the second electrode portion 42 is formed with a predetermined height 42h. The height 41 h of the first electrode portion 41 is formed so as to protrude relatively with respect to the thickness direction of the electrode body 4 than the height 42 h of the second electrode portion 42. Specifically, the first electrode portion 41 and the second electrode portion 42 are formed to protrude from the surface of the electrode body 4, and the height 41 h of the first electrode portion 41 is higher than the height 42 h of the second electrode portion 42. Is formed so as to be higher from the surface of the electrode body 4.

In this way, by forming the first electrode portion 41 with a difference in height so that the height 41h of the first electrode portion 41 is increased, the height position where the first contactor 11 and the first electrode portion 41 are in contact with each other, and the second By making the height position where the contact 22 and the second electrode part 42 contact differ, each contact can be stably brought into conductive contact with the electrode part.

The ratio of the height 41h of the first electrode portion 41 to the height 42h of the second electrode portion 42 is preferably formed to be 1.5 to 5: 1. By being formed in such a ratio, the contact position between the first contactor 11 and the first electrode part 41 has a positional relationship that suppresses the contact position between the second contactor 22 and the second electrode part 42 from around. Each contact and the electrode portion come into stable contact.
The height 42h of the second electrode portion 42 can be formed, for example, from 1 to 10 μm, and the height 41h of the first electrode portion 41 can also be formed according to such height.

  The contact position relationship between each contact and the electrode portion has the height relationship as described above, but preferably has the following arrangement relationship.

  The first electrode part 41 has a first head part 411 having a protruding height 41h, an inner curved part 412 formed from the periphery of the inner diameter 41i of the first electrode part 41 to the first head part 411, and the first electrode part It forms so that the outer side curved part 413 formed from the outer periphery of 41 outer diameter 41o periphery to the 1st top part 411 may be provided (refer FIG. 4).

At this time, the first contactor 11 and the first electrode part 41 are formed so that the outer surface of the first contactor 11 is connected to the inner curved part 412 of the first electrode part 41 (FIG. 4A). reference). In this way, the outer surface of the first contactor 11 and the inner curved portion 412 are connected in conductive contact with each other, so that the first contactor 11 is disposed on the inner side. It will be arrange | positioned so that it may press toward a direction, and a connection state will be stabilized.

In addition, the first contactor 11 and the first electrode part 41 can be formed such that the inner surface of the first contactor 11 is connected to the outer curved part 413 of the first electrode part 41. As described above, the inner surface of the first contactor 11 and the outer curved portion 413 are connected in conductive contact with each other, whereby the first contactor 11 that is disposed on the outer side is placed on the outer side. It will be arranged so as to spread and push in the direction, and the connection state will be stabilized.

  The first electrode portion 41 has a first conductive line 414. The first conductive line 414 is electrically connected to the first electrode portion 41 and transmits / receives an electric signal from the first electrode portion 41 to the inspection apparatus. The first conductive line 414 is arranged coaxially with a second conductive line 422 described later, and insulation is maintained between the first conductive line 414 and the second conductive line 422. The first electrode portion 41 is formed so that the end surface of the first conductive wire 414 and the surface of the electrode body 4 are flush with each other, and the first electrode portion 41 is formed on the end surface of the first conductive wire 414. Will be.

  The second electrode part 42 has a second top part 421 and a second conductive line 422. The second top part 421 has a height 42 h of the second electrode part 42. The second conductive wire 422 is electrically connected to the second top portion 421 and transmits / receives an electric signal from the second electrode portion 42 to the inspection apparatus.

  The second conductive line 422 is disposed inside the first conductive line 414 formed in a ring shape in plan view. The second electrode portion 42 is formed so that the end surface of the second conductive wire 422 and the surface of the electrode body 4 are flush with each other, and the second top portion 422 is formed on the end surface of the second conductive wire 421. Will be.

The first top portion 411 of the first electrode portion 41 and the second top portion 421 of the second electrode portion 42 are formed so as to protrude from the surface of the electrode body 4, but can be formed by plating. Thus, it can manufacture easily by forming by plating. The manufacturing method of this 1st electrode part 41 and the 2nd electrode part 42 prepares the member of the coaxial line formed between insulating layers, for example, and positions and arranges this coaxial line on the insulating member used as the electrode body 4 A through hole is provided.
Then, the coaxial line is disposed through the through hole, and the coaxial line is cut so that the coaxial line is flush with the surface of the electrode body 4. Next, since a member having a two-layered conductive layer is disposed on the surface of the electrode body 4, the surface of the electrode body 4 is plated. At this time, the plating thicknesses of the outer conductive end face (end face of the first conductive line 414) and the inner conductive end face (end face of the second conductive line 422) are controlled according to the current and the time.
By this control, the height of the first electrode portion 41 and the second electrode portion 42 (the amount of protrusion from the surface of the electrode body) is adjusted, and the height 41 h of the first electrode portion 41 is the height of the second electrode portion 42. It is formed to be higher than 42h.

  Here, with reference to FIG. 5, the process of manufacturing the 1st electrode part 41 and the 2nd electrode part 42 is demonstrated. In addition, in FIG. 5, the case where three electrode parts are manufactured is shown schematically.

  First, a coaxial wire a having a two-layer structure that becomes the first conductive wire 414 and the second conductive wire 422 is prepared. Next, an insulative plate-like member b serving as the electrode body 4 that holds the electrode portion is prepared, and a desired number of through holes c for penetrating the coaxial line a into the plate-like member b (in FIG. 5, 3 places) Then, the coaxial line is penetrated and supported in the through hole c of the plate member a. The coaxial line c protruding from the surface of the plate-like member a is cut out so that the surface of the plate-like member a and the cut surface of the coaxial line c are flush with each other (see FIG. 5A).

  Subsequently, as shown in FIG. 5B, the plate-like member b formed as shown in FIG. 5A is immersed in a plating tank e containing a plating solution d. At this time, the coaxial line a having a two-layer structure has an outer conductive portion a1 and an inner conductive portion a2. In FIG. 5 (b), a plurality of outer conductive portions a1 are connected in parallel so as to collectively control the amount of current supplied and the time for supplying current. Further, the plurality of inner conductive parts a2 are connected in parallel so as to collectively control the current supply amount and the current supply time.

  By connecting in this way, the plating height of the outer conductive portion a1 that becomes the first electrode portion 41 and the plating height of the inner conductive portion a2 that becomes the second electrode portion 42 can be controlled uniformly. Moreover, when performing control to form the plating height of the outer conductive portion a1 higher than the plating height of the inner conductive portion a2, the control is performed while comparing the control of the plating height of the outer conductive portion a1 and the inner conductive portion a2. Therefore, the current supply amount and the current supply time can be easily controlled.

  In the state shown in FIG. 5B, by the above method, the plating height of the outer conductive portion a1 that becomes the first electrode portion 41 is higher than the plating height of the inner conductive portion a2 that becomes the second electrode portion 42. Plating is performed so as to increase the height.

  The above is the method for forming the electrode portion of the present invention.

FIG. 1 is a side view of a probe used in an inspection jig according to an embodiment of the present invention. 2 (a) is a view of the first contact provided in the probe of Figure 1 from the side, FIG. 2 (b), the second contact provided in the probe of Figure 1 from the side FIG. FIG. 3 is a cross-sectional view showing a configuration of an inspection jig according to an embodiment of the present invention using the probe of FIG. In addition, the positional relationship between a probe, a probe holding member, an electrode body, and an inspection point is schematically shown. 4 (a) is an enlarged view showing a part of the configuration of the electrode body and the probe, FIG. 4 (b) is a schematic diagram showing the relation between the electrode position of the electrode body in a plan view. Dotted lines indicate the first conductive line and the second conductive line. FIG. 5A and FIG. 5B are explanatory diagrams of a manufacturing process of the first electrode portion and the second electrode portion.

DESCRIPTION OF SYMBOLS 1 Probe 11 1st contactor 12 2nd contactor 2 Inspection jig | tool 3 Probe holding member 4 Electrode body 41 1st electrode part 42 2nd electrode part

Claims (4)

An inspection jig that is disposed between a substrate to be inspected and a substrate inspection device and electrically connects the substrate to be inspected and the substrate inspection device,
An electrode body having a plurality of electrode portions electrically connected to the substrate inspection device;
A probe holding member that holds a plurality of probes and guides both end portions of each probe to a predetermined inspection point of a wiring to be inspected of the substrate to be inspected and a predetermined electrode portion of the electrode body, respectively. ,
Each of the probes is formed in a cylindrical shape with a conductive material, and can be expanded and contracted in the axial direction. The probe is formed in a rod shape with a conductive material, and is insulated from the first contact. A second contact housed in the internal space,
The electrode part of the electrode body has a first electrode part formed in a ring shape in a plan view, and a circular shape that is not in electrical contact with the first electrode part in a plan view and concentrically with the first electrode part. The second electrode portion, and the first electrode portion and the second electrode portion are formed to protrude from the surface of the electrode body ,
The first electrode portion has a head portion having a height relatively protruding in the thickness direction of the electrode body relative to the second electrode portion, an inner curved portion extending from the inner periphery of the first electrode portion to the head portion, An outer curved portion extending from the outer peripheral edge of the first electrode portion to the crown,
When the electrode body and the probe holding member relatively approach each other, the outer surface end portion of the first contact of the probe approaches while contacting the inner curved portion of the first electrode portion of the electrode body . The probe is positioned to align with the electrode of the electrode body;
When contacted and fixed, the first contact of the probe is in electrical contact with the first electrode portion of the electrode body, and the second contact of the probe is the second electrode portion of the electrode body. An inspection jig, wherein the inspection jig is in electrical contact. An inspection jig that is disposed between a substrate to be inspected and a substrate inspection device and electrically connects the substrate to be inspected and the substrate inspection device,
An electrode body having a plurality of electrode portions electrically connected to the substrate inspection device;
A probe holding member that holds a plurality of probes and guides both end portions of each probe to a predetermined inspection point of a wiring to be inspected of the substrate to be inspected and a predetermined electrode portion of the electrode body, respectively. ,
Each of the probes is formed in a cylindrical shape with a conductive material, and can be expanded and contracted in the axial direction. The probe is formed in a rod shape with a conductive material, and is insulated from the first contact. A second contact housed in the internal space,
The electrode part of the electrode body has a first electrode part formed in a ring shape in a plan view, and a circular shape that is not in electrical contact with the first electrode part in a plan view and concentrically with the first electrode part. The second electrode portion, and the first electrode portion and the second electrode portion are formed to protrude from the surface of the electrode body ,
The first electrode portion has a head portion having a height relatively protruding in the thickness direction of the electrode body relative to the second electrode portion, an inner curved portion extending from the inner periphery of the first electrode portion to the head portion, An outer curved portion extending from the outer peripheral edge of the first electrode portion to the crown,
When the electrode body and the probe holding member relatively approach each other, the inner surface end portion of the first contact of the probe approaches while contacting the outer curved portion of the first electrode portion of the electrode body . The probe is positioned to align with the electrode of the electrode body;
When contacted and fixed, the first contact of the probe is in electrical contact with the first electrode portion of the electrode body, and the second contact of the probe is the second electrode portion of the electrode body. An inspection jig, wherein the inspection jig is in electrical contact.   The inspection electrode according to claim 1 or 2, wherein a ratio of a protruding amount of the first electrode portion and a protruding amount of the second electrode portion of the electrode body is formed to be 1.5 to 5: 1. jig.   The inspection jig according to claim 1, wherein the protruding portion of the first electrode portion and the protruding portion of the second electrode portion of the electrode body are formed by plating.

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