JP3965634B2 - Contact for board inspection - Google Patents

Description

The present invention relates to a substrate inspection contact that is pressed against a predetermined inspection point set on a wiring pattern of a substrate to be inspected and enables inspection signals to be transmitted between the substrate to be inspected and a substrate inspection apparatus.
The present invention is not limited to a printed wiring board, but includes, for example, electrical wiring on various substrates such as flexible substrates, multilayer wiring substrates, electrode plates for liquid crystal displays and plasma displays, and package substrates and film carriers for semiconductor packages. In this specification, these various wiring boards are collectively referred to as “substrates”.

  Conventionally, a wiring pattern on a circuit board has to mount an electric / electronic component because it is necessary to accurately transmit an electric signal to an electric / electronic component such as a semiconductor such as an IC or a resistor mounted on the circuit board. Provided in the wiring pattern to be inspected against the previous printed wiring board, the circuit wiring board on which the wiring pattern was formed on the liquid crystal panel or plasma display panel, or the wiring pattern formed on the substrate such as a semiconductor wafer The resistance value between the inspection points was measured, and the quality was judged.

  In such a judgment inspection, inspections such as disconnection and short-circuiting of wiring patterns are made such that measurement terminals are brought into contact with inspection points provided at two locations of the wiring pattern to be inspected, one by one, between the measurement terminals. The voltage value between the measurement terminals is measured by passing a predetermined level of measurement current, and pass / fail is determined by comparing this voltage value with a predetermined threshold value.

  However, in such a method, a measurement terminal brought into contact with each of two inspection points of the wiring pattern is commonly used for supplying a measurement current and measuring a voltage (this measurement method is 2 The terminal measurement method) has a disadvantage that the contact resistance between the measurement terminal and the inspection point affects the measurement voltage, the measurement accuracy of the resistance value is lowered, and the reliability of the inspection result is lowered.

  Therefore, the current supply terminal and the voltage measurement terminal are brought into contact with each inspection point, and the measurement current is supplied between the current supply terminals brought into contact with the respective inspection points. A method of measuring the resistance value with high accuracy by measuring the voltage generated between the voltage measuring terminals brought into contact with each other to suppress the influence of the contact resistance between the measuring terminal and the inspection point (so-called 4 A terminal inspection method or a Kelvin method) is known, and a substrate inspection apparatus for inspecting a wiring pattern using this method is known (for example, see Patent Document 1).

  However, in the board inspection apparatus disclosed in Patent Document 1, when the wiring pattern is inspected using the four-terminal measurement method, the current supply terminal and the voltage measurement terminal are moved for each inspection point. It is necessary to abut while controlling. On the other hand, since the miniaturization of circuit boards has progressed in recent years and the lands that serve as inspection points have become narrower, it is extremely difficult to ensure that the two terminals are brought into contact with one land without being electrically connected to each other. There was a problem.

  In order to solve such a problem, the first terminal is formed in a cylindrical shape, and the second terminal is formed in a spiral spring that can slide in the axial direction along the outer peripheral surface of the cylindrical shape. Contact has been created (see Patent Document 2). By forming two terminals in this way, the two terminals can be easily brought into contact with a fine inspection point.

However, the contact as disclosed in Patent Document 2 has a complicated structure because it is necessary to form a fine spiral spring and fine plungers provided at both ends of the spring.
For this reason, the two terminals can be easily brought into contact with a minute inspection point without electrically conducting the two terminals, and the contact for four-terminal measurement has a configuration that can be manufactured simply and inexpensively. The creation of a child was required.

JP-A-6-66832 JP-A-2005-321211

  The present invention has been made in view of such a situation, and can easily abut a minute inspection point without electrically connecting two terminals to each other, and is inexpensive with a simple structure. Provided is a substrate inspection contact for four-terminal measurement having a structure that can be manufactured.

According to the first aspect of the present invention, the first conductive portion and the second conductive portion, each of which is pressed against a predetermined inspection point set on the wiring pattern of the substrate to be inspected and one is used for voltage measurement and the other is used for current application The first conductive part has a bar-like or needle-like shape having flexibility and conductivity, and the second conductive part has the first conductive part. It is formed by a cylindrical member that is accommodated inside and has flexibility and conductivity, and there is a gap over the entire length in the length direction between the first conductive portion and the inner peripheral surface of the second conductive portion. is formed, the substrate inspection contactor in use, the first conductive portion and the second conductive portion on the inspection point to provide a substrate inspection contactor, characterized in that in contact.

  According to a second aspect of the present invention, there is provided the contact for inspecting a substrate according to the first aspect, wherein the first conductive portion and the second conductive portion are formed so as to be coaxial.

  According to a third aspect of the present invention, the first conductive portion has a penetration portion that penetrates the inspection point, and the second conductive portion hits the inspection point when the penetration portion penetrates the inspection point. The contact for inspection of a substrate according to claim 1 or 2, wherein the first conductive part protrudes from the second conductive part to the inspection point side so as to come into contact.

  The invention according to claim 4 is characterized in that the protruding amount by which the first conductive portion protrudes is calculated based on the distance between the first conductive portion and the second conductive portion. A substrate inspection contact is provided.

  According to a fifth aspect of the present invention, the first conductive portion includes a pair of conductive and flexible rod-shaped members and a conductive elastic member that connects the rod-shaped members and expands and contracts in the long axis direction. A contact for inspecting a substrate according to any one of claims 1 to 4 is provided.

  According to a sixth aspect of the present invention, the first conductive portion includes a pair of conductive and flexible rod-shaped members and a non-conductive elastic member that connects the rod-shaped members and expands and contracts in the long axis direction. 5. A contact for inspecting a substrate according to claim 1, wherein a conductive layer for electrically connecting the pair of rod-shaped members is formed on an inner surface of the second conductive portion. provide.

  According to the seventh aspect of the present invention, one of the rod-shaped members is formed with a penetration portion that penetrates the inspection point, and the second conductive portion is located at the inspection point when the penetration portion penetrates the inspection point. 7. The substrate inspection contact according to claim 5, wherein the first conductive portion protrudes from the second conductive portion toward the inspection point so as to abut.

  According to an eighth aspect of the present invention, there is provided the substrate inspection contact according to any one of the first to seventh aspects, wherein the second conductive portion has an elastic mechanism that slides in a major axis direction.

  The invention according to claim 9 provides the contact for inspection of a substrate according to any one of claims 1 to 8, wherein the second conductive portion is formed in a tapered shape.

  The invention according to claim 10 provides the contact for inspection of a substrate according to claim 3 or 7, wherein the penetration portion is formed in a sharp shape.

  According to the first aspect of the present invention, the first conductive portion and the first conductive portion, each of which is pressed against a predetermined inspection point set on the wiring pattern of the substrate to be inspected, one of which is used for voltage measurement and the other is used for current application. A contact for inspecting a substrate having two conductive parts, wherein the first conductive part has an elongated shape having flexibility and conductivity, and the second conductive part accommodates the first conductive part therein. When the substrate inspection contact is in use, the first conductive portion and the second conductive portion are in contact with the inspection point when the substrate inspection contactor is in use. When the contactor is used, it is possible to provide a substrate inspection contact for four-terminal measurement that is brought into a pressure contact state with respect to the inspection point and the electrode portion by bending the substrate inspection contact by pressing. . Moreover, since the first and second conductive parts have a simple configuration, they can be manufactured at low cost.

  According to the invention described in claim 2, since the first conductive portion and the second conductive portion are formed coaxially, the width of the substrate inspection contact can be reduced.

  According to a third aspect of the present invention, the first conductive portion has a penetration portion that penetrates into the inspection point, and the penetration portion is configured such that the second conductive portion abuts on the inspection point when penetrating the inspection point. In addition, since the first conductive portion protrudes from the second conductive portion to the inspection point side, the first conductive portion penetrates into the inspection point, so that the first conductive portion can be reliably brought into contact with the inspection point in a low resistance state. At the same time, the second conductive portion also comes into contact with the inspection point, and both the first and second conductive portions can be reliably brought into contact with the inspection point.

  According to invention of Claim 4, since the protrusion amount which a 1st electroconductive part protrudes is calculated based on the distance of a 1st electroconductive part and a 2nd electroconductive part, it is reliably with respect to one test | inspection point. The first and second conductive parts can be contacted.

  According to the fifth aspect of the present invention, the first conductive portion includes a pair of conductive and flexible rod-shaped members, and a conductive elastic member that connects the rod-shaped members and expands and contracts in the long axis direction. The electric signal received by one rod-shaped member is transmitted to the other rod-shaped member via the elastic member, and when the first conductive portion contacts the inspection point and the electrode portion, the elastic member While contracting in the long axis direction, the rod member is biased toward the outer direction, and both rod-shaped members are in pressure contact with the inspection point and / or the electrode portion. For this reason, a 1st electroconductive part will contact a test | inspection point and an electrode part reliably.

  According to the invention of claim 6, the first conductive portion comprises a pair of conductive and flexible rod-shaped members, and a non-conductive elastic member that connects the rod-shaped members and expands and contracts in the long axis direction. Since the conductive layer is formed on the inner surface of the second conductive portion, the electric signal received by one rod-shaped member is transmitted to the other rod-shaped member via the conductive layer of the second conductive layer. In addition, the elastic member contracts in the major axis direction and is biased toward the outer direction, so that both rod-like members are in pressure contact with the inspection point and / or the electrode portion. For this reason, a 1st electroconductive part will contact a test | inspection point and an electrode part reliably.

  According to the seventh aspect of the present invention, one of the rod-shaped members is formed with a penetration portion that penetrates the inspection point, and the second conductive portion abuts on the inspection point when the penetration portion penetrates the inspection point. In addition, since the first conductive portion protrudes from the second conductive portion to the inspection point side, the first conductive portion penetrates into the inspection point, so that the inspection point can be reliably and in a low resistance state. The second conductive portion also comes into contact with the inspection point, and both the first and second conductive portions can be reliably brought into contact with the inspection point.

  According to the invention of claim 8, since the second conductive portion has an elastic mechanism that slides in the long axis direction, when pressure is applied to the second conductive portion, the elastic mechanism contracts, The urging | biasing with respect to the major axis direction of a contact will arise. This biased state ensures that the second conductive portion is in pressure contact with the inspection point.

  According to the ninth aspect of the invention, since the second conductive portion is formed in a tapered shape, the distance at the contact surface between the first conductive portion and the second conductive portion can be reduced, and the first conductive portion can be reduced. It is possible to prevent the conductive part from coming out of the second conductive part.

  According to invention of Claim 10, since the penetration part of the 1st electroconductive part is formed in the sharp shape, while being able to penetrate easily into an inspection point, it contacts low resistance with respect to an inspection point. be able to.

The best mode for carrying out the present invention will be described.
The substrate inspection contact according to the present invention transmits an electrical signal measured from a predetermined inspection point set on the wiring pattern of the substrate to be inspected to the substrate inspection apparatus. This contact transmits an electrical signal by being electrically connected to the inspection point of the substrate to be inspected and the electrode portion of the substrate inspection apparatus.
This board inspection contact has two terminals, a voltage measurement terminal and a current marking terminal. The board inspection contact having these two terminals is brought into contact with one inspection point, and the board is contacted. The resistance value between the inspection contacts is calculated. By measuring the electrical characteristics (current value and voltage value) between two contacts having two terminals in this way, the contact resistance due to the contacts is removed, and a more accurate resistance value between wiring patterns is obtained. Enables a four-terminal measurement method to be calculated.

The basic principle of a contact for inspecting a substrate according to the present invention is that a first conductive part having a penetrating part penetrating into an inspection part and a second conductive part coaxial with the first conductive part are formed as contacts. Sometimes, when the first conductive part penetrates into the inspection point, the second conductive part also provides a state of being in contact with the inspection point.
For this reason, the first conductive portion and the second conductive portion are each in contact with the inspection point, and the two terminals are surely brought into contact with each other.
In addition, the substrate inspection contact shown in the first embodiment and the second embodiment allows the substrate inspection contact to bend during use by providing flexibility to the substrate inspection contact itself. In this way, a contact state due to contact pressure is generated on the inspection point and the electrode portion that are in contact with each other.
In addition, the substrate inspection contact shown in the third embodiment is non-flexible, and the first and second conductive portions described later are arranged in the longitudinal direction of the substrate inspection contact. By providing an expansion / contraction mechanism (an elastic member or an elastic mechanism) that expands and contracts, the expansion and contraction mechanism contracts during use, thereby causing a contact state due to contact pressure to contact inspection points and electrode portions.

The basic structure of the first conductive portion and the second conductive portion of the substrate inspection contact according to the present invention is that the second conductive portion is formed as a cylindrical member, and the first conductive portion is formed inside the second conductive portion. It has the structure which accommodates a part.
The first conductive portion and the second conductive portion are coated with an insulating layer on the outer surface of the first conductive portion, coated with an insulating layer on the inner surface of the second conductive portion, or the first and second conductive portions. By covering both portions with an insulating layer, the electrical signals flowing through the respective conductive portions are reliably transmitted and received.

In this specification, the voltage measuring terminal and the current applying terminal, which are these two terminals, are described as the first conductive part and the second conductive part, and the voltage measuring terminal is the first conductive part. In addition, the current application terminal may be set as the second conductive part, the voltage measurement terminal may be set as the second conductive part, and the current application terminal may be set as the first conductive part.
The inspection point in the present invention is set in advance on a substrate to be inspected necessary for inspecting conduction and / or short circuit. In particular, the present contact for inspecting a substrate can be suitably used for a bump that facilitates inner lead bonding at a metal protrusion on a land of a chip.

A substrate inspection contact 1 (hereinafter referred to as a first contact 1) according to a first embodiment of the present invention will be described.
FIG. 1 shows a first contactor according to the present invention, wherein (a) is an exploded view and (b) is an assembly view. FIG. 2 is a cross-sectional view of one end of the first contact.
The first contact 1 includes a first conductive part 11 and a second conductive part 12. As shown in FIG. 2, the second conductive portion 12 is formed in a cylindrical shape that accommodates a first conductive portion 11 to be described later.
The second conductive portion 12 is pressed against the inspection point and the electrode portion (becomes a pressure contact state) by being bent when pressed from both ends contacting the inspection point and the electrode portion. The second conductive portion 12 is made of a flexible material. Nickel (Ni) or stainless steel can be used as a material for forming the second conductive portion 12, but is not particularly limited, and may be a material having flexibility and conductivity as described above. If there is no particular limitation.
Although not shown, it is preferable to provide an insulating layer on the outer surface of the outer conductive layer 12.

The first conductive portion 11 is formed from one long member formed in a rod shape or a needle shape. Since the first conductive portion 11 is provided coaxially with the second conductive portion 12, it is preferably formed in a columnar shape.
The first conductive portion 11 is a conductive and flexible member. When the first conductive portion 11 is made of a conductive member, an electrical signal can be received and transmitted. Moreover, since this 1st electroconductive part 11 has flexibility, the 2nd electroconductive part 12 mentioned later will bend with the press from both ends, but the 1st electroconductive part 11 also respond | corresponds to this bending. It will bend.

It is preferable that the 1st electroconductive part 11 has the penetration part 111 penetrated to a test | inspection point in one edge part which contacts a test | inspection point.
The penetration portion 111 is formed in a sharp shape. This is because the penetration portion 111 of the first conductive portion 11 can easily penetrate into the inspection point and the contact resistance with respect to the inspection point can be reduced by being formed in such a sharp shape. .
The shape of the penetrating portion 111 is preferably formed in a sharp shape, and more preferably in a pyramid shape such as a quadrangular pyramid or a triangular pyramid.
As shown in FIG. 1, the penetration portion 111 is arranged so that the first conductive portion 11 protrudes by a predetermined amount d1 from the second conductive portion 12 when the first conductive portion 11 has a sharp shape. (See FIG. 1B).
The penetration portion 111 is formed by arranging the first conductive portion 11 as shown in FIG. 2 so as to protrude from the second conductive portion 12 by a predetermined amount d1. In this case, when the board inspection contact 1 is pressed from both ends and is brought into pressure contact with the inspection point, first, the first conductive portion 11 penetrates into the inspection point by the predetermined amount d1. Abuts the inspection point. Then, by further pressing from both ends, the board inspection contact 1 is bent and pressed.

An insulating layer 13 is coated on the outer surface of the first conductive portion 11. The insulating layer 13 is formed so that the first conductive portion 11 and the second conductive portion 12 prevent electrical contact.
As shown in FIG. 2, the insulating layer 13 is preferably covered up to the inclined surface 112 that forms the penetration portion 111. This is because such a coating reliably prevents the contact between the first and second conductive portions.
For the insulating layer 13, for example, Teflon (registered trademark) or polyurethane can be used.

As described above, the second conductive portion 12 is disposed so that the first conductive portion 11 protrudes by a predetermined amount d1 that accommodates the first conductive portion 11 therein and forms the penetration portion 111. The end portion of the second conductive portion 12 is formed in a tapered shape so as to shrink inside (see FIG. 2).
As shown in FIG. 2, an extension portion 123 is formed at the tip of the second conductive portion 12 so as to extend inward with a predetermined inclination. By forming the extending portion 123 extending inward in this way, the first conductive portion 11 can be prevented from slipping out from the opening of the second conductive portion 12, and the first and second The position in contact with the inspection point of the two conductive parts can be brought closer, and even with a smaller inspection point, the first and second conductive parts 11 and 12 can be brought into contact with the target inspection point.

The inclined surface 124 on the inner surface of the extending portion 123 is an insulating layer that covers the inclined surface 112 of the sharp shape of the penetrating portion 111 of the first conductive portion 11 and / or the portion of the inclined surface 112 of the penetrating portion 111. Preferably, it is formed so as to be substantially parallel to the 13 inclined surfaces 131.
By forming the inclined surface 124 of the extending portion 123 and the inclined surface 112 of the penetration portion 111 and / or the inclined surface 131 of the insulating portion 13 to be substantially parallel, the first conductive portion 11 and the second conductive portion 12 are formed. In the case of contact, the inclined surfaces are in contact with each other, and the conductive portion of the first conductive portion 11 and the conductive portion of the second conductive portion 12 can be prevented from contacting even in the vicinity of the opening. is there.

The dimensions of the contact 1 for inspecting the substrate include, for example, an outer diameter w1 of the first conductive portion 11 of 40 to 50 μm, an outer diameter w2 of the second conductive portion 12 of 80 to 100 μm, and an inner diameter w3 of the second conductive portion 12. 60 to 70 μm, the opening diameter w4 of the extending portion 123 is 40 to 60 μm, the outer diameter w5 coated with the insulating layer 13 of the first conductive portion 11 is 50 to 70 μm, and the first conductive portion 11 and the second conductive portion 12 The clearance w6 can be set to 1 to 10 μm.
Incidentally, these numerical values can be within an allowable range of a deviation of about ± 5 μm.

The protrusion amount d1 of the penetration part 111 is set to 2 to 15 μm, preferably 7 to 13 μm, and more preferably about 10 μm.
By setting the protrusion amount d1 to this extent, the first conductive portion 11 and the second conductive portion 12 come into contact with the inspection point together, so the second conductive portion 12 contacts the center surface of the inspection point. Even in this case (see FIG. 3B described later), the first conductive portion 11 and the second conductive portion 12 are surely in contact with the inspection point B.

FIG. 3A is a cross-sectional view showing an embodiment in which the substrate inspection contact 1 is used in the dimensions of the embodiment as described above.
The inspection point B on the inspected substrate K shown in FIG. 3 is formed in a hemispherical shape (spherical shape whose lower part is crushed) having a radius r of about 35-40 μm (diameter D: about 70-80 μm). This inspection point B is a solder bump or a C4 bump, and has a shape close to a substantially sphere.
For example, in FIG. 3A, the first conductive portion 11 is in contact with the inspection point B substantially in the center, and the penetration portion 111 penetrates the inspection point B. In this case, the portion that contacts the inspection point B of the second conductive portion 12 is at a higher position than the portion that contacts (penetrates) the inspection point B of the first conductive portion 11, so that the penetration portion 111 becomes the inspection point B. By penetrating a predetermined amount (amount until the second conductive portion 12 comes into contact), the second conductive portion 12 comes into contact with the inspection point B.
FIG. 3B is a cross-sectional view showing another embodiment when a substrate inspection contact is used in the dimensions of the embodiment. The case shown in FIG. 3B is a case where the second conductive portion 12 is in contact with the approximate center of the inspection point B. Even in such a case, the first conductive portion 11 and the second conductive portion 12 are It is necessary to contact the inspection point B at the same time.
Here, with reference to FIG. 4, when the first conductive portion 11, the second conductive portion 12, and the protrusion amount d <b> 1 are examined, when the second conductive portion 12 abuts substantially at the center A point, the first conductive portion 11. Of the first conductive portion 11 and the second conductive portion 12 must be in contact with a position B shifted by a distance Δd, and the relationship expressed by the following formula (1) is required. Will meet.
This protrusion amount d1 is set based on the distance Δx between the first conductive portion 11 and the second conductive portion 12.

  In the case shown in FIG. 3B, since the protrusion amount d2 is set to be larger than the protrusion amount as described above, the first conductive portion 11 and the second conductive portion 12 are both in contact with the inspection point B.

  In the above description, the case where the inspection point B is non-coining (when the surface is not processed to be flat) has been described. Next, the case where the inspection point B is coined will be described. FIG. 5 is a cross-sectional view of the case where the substrate inspection contact according to the first embodiment of the present invention is used as a coined inspection point. In this case, since the upper surface of the inspection point B ′ is processed to be substantially flat, the penetration portion 111 penetrating into the inspection point B ′ has a projection amount d1 as the substrate inspection contact 1 has. If so, the projection amount d1 penetrates, and at the same time, the second conductive portion 12 comes into contact with the inspection point B ′.

  As shown in FIG. 2, the sharp shape of the penetrating portion 111 is set to an angle θ so as to form an acute angle in the cross-sectional shape. The angle θ of the sharp shape is preferably formed at 40 to 60 degrees so that the penetration portion 111 can easily penetrate the inspection point B and realize low resistance contact. This is because it is easy to form the projection amount d1 as described above by forming a sharp shape at an angle θ in this range.

The first conductive portion 11 is formed of a material having a hardness higher than that of a single rod-shaped inspection point, and can be easily formed by making one end thereof a sharp shape having an angle θ. By forming in this way, the 1st electroconductive part 11 can be formed, and the penetration part 111 can also be formed simultaneously.
Examples of the rod-shaped material include stainless steel, beryllium copper (BeCu), and tungsten (W).

Next, the case where the board | substrate test | inspection contact 1 of this 1st embodiment is implemented is demonstrated. FIG. 6 shows a state in which the substrate inspection contact according to the first embodiment of the present invention is used. In FIG. 6, the upper end of the substrate inspection contact 1 is pressed against the electrode part EP electrically connected to the inspection apparatus (not shown), and the lower end, which is the other end, is at the inspection point B. It shows a state of being pressed.
A plurality of the substrate inspection contacts 1 are arranged so that one end is in contact with a predetermined electrode portion EP and the other end is in contact with a predetermined inspection point B. Next, it presses so that each edge part of the board | substrate test | inspection contact 1 may contact these predetermined positions.
At this time, first, the penetration portion 111 of the first conductive portion 11 is penetrated into the inspection point B. At this time, the protruding amount d1 of the penetration portion 111 of the first conductive portion 11 is penetrated into the inspection point B, and the second conductive portion 12 is in contact with the inspection point B.
Next, since the substrate inspection contact 1 is further pressed, as shown in FIG. 6, the substrate inspection contact 1 is bent while contacting the inspection point B and the electrode part EP. Thus, if the board | substrate test | inspection contact 1 bends, it will be contacting the test | inspection point B and the electrode part EP reliably.

Next, the substrate inspection contact 2 (hereinafter referred to as the second contact 2) of the second embodiment according to the present invention will be described.
FIG. 7 shows a second contactor according to the present invention, wherein (a) shows an exploded view and (b) shows an assembly view.
The second contact 2 is pressed into contact with predetermined inspection points set on the wiring pattern of the substrate to be inspected. One is used for voltage measurement and the other is used for current application. It has a part. Similarly to the first contact 1, the second contact 2 may use the first conductive portion for voltage measurement, the second conductive portion for current application, or the first conductive portion for current application. The second conductive part may be used for voltage measurement.

The second contactor 2 includes a first conductive portion 21 including a pair of rod-shaped members 23 and an elastic member 24, and a cylindrical second conductive portion 22 that accommodates the first conductive portion 21 therein.
As shown in FIG. 7, the first conductive portion 21 includes a pair of rod-shaped members 23 and an elastic member 24 that connects the pair of rod-shaped members 23.
One of the pair of rod-shaped members 23 (the rod-shaped member shown in front of the paper in FIG. 7) preferably has a penetration portion 231 formed at one end portion 23a. The penetration portion 231 has the same function as the penetration portion 111 of the first contact 1, and when the penetration portion 231 penetrates the inspection point B, the second conductive portion 22 contacts the inspection point B. It will be.
The protrusion amount d21 of the penetration portion 231 is set to be equal to or greater than the protrusion amount d1 of the penetration portion 111 of the first contact 1. Although details will be described later, when the second contact 2 is used, when the contact 2 is pressed and the penetration portion 231 of the first conductive portion 21 penetrates the inspection point B, the elastic member 24 contracts, The second conductive portion 22 contacts the inspection point B.
The other end 23b of the rod-like member 23 is connected to an elastic member 24 described later. The first conductive portion 21 is formed by connecting the two rod-shaped members 23 via the elastic member 24.
This rod-shaped member 23 is made of a conductive and flexible material, and examples thereof include stainless steel, beryllium copper (BeCu), and tungsten (W).

The second conductive portion 22 is a cylindrical member that can accommodate the first conductive portion 21 and has at least a conductive layer for transmitting an electrical signal, as will be described in detail later.
The configuration of the second conductive portion 22 is substantially the same as that of the second conductive portion 12 of the first contact 1, and is different in that an insulating layer described later is provided.

The protruding amount d21 of the first conductive portion 21 of the second contact 2 is equal to or more than the protruding amount d1 of the first contact 1 when the penetrating portion 231 penetrates the inspection point B. The amount by which 22 abuts on the inspection point B is projected.
By providing the protruding amount d21 of the first conductive portion 21 of the second contactor 2 at least in the amount (length) as described above, first, the elastic member 24 of the first conductive portion 21 described later is in the long axis direction. Shrink to. At this time, the penetration portion 231 of the first conductive portion 21 penetrates into the inspection point B and penetrates into the inspection point B in a pressure contact state (see FIG. 8B).
In this case, the first conductive portion 21 is in a pressure contact state, and the second conductive portion 22 comes into contact with the inspection point B.
Furthermore, when the second contact 2 is pressed, the entire second contact 2 bends and comes into pressure contact with the inspection point B and the electrode part EP (see FIG. 8C).

  The elastic member 24 is a member that connects the pair of rod-shaped members 23 described above, and is also an elastic deformation member that enables the rod-shaped member 23 to slide in the long axis direction. The elastic member 24 can be a member that is biased by contracting in the long axis direction, and examples thereof include a spring, rubber, and synthetic resin.

The elastic member 24 may be a conductive member or a non-conductive member.
FIG. 9 shows a cross-sectional view of the substrate inspection contact according to the second embodiment, where (a) shows a case where the elastic member is conductive, and (b) shows a case where the elastic member is non-conductive. Is shown.
First, the case where the elastic member 24 is formed of a conductive member will be described (see FIG. 9A).
When the elastic member 24 is conductive, the elastic member 24 is conductive and has elasticity that can expand and contract in the major axis direction.
For this reason, the electric signal received in the rod-shaped member 23 which contacts the inspection point B is transmitted to the other rod-shaped member 23 through the elastic member.
When the elastic member 24 is a conductive member, the second conductive portion 22 has a conductive layer on the outer side 221 and an insulating layer on the inner side 222. By being formed in this way, the electric signal of the first conductive part 21 and the electric signal of the second conductive part can be reliably received separately.
The insulating layer can be provided so as to integrally cover the rod-shaped member 23 and the elastic member 24 as long as the sliding of the rod-shaped member 23 is not hindered, and the width of the elastic member 24 is set to the width of the second conductive portion 22. If it is formed sufficiently shorter than that, it can be provided as an insulating layer covering the outer surface of the rod-shaped member 23.
In the case shown in FIG. 9A, an insulating layer is provided on the inner portion 222 of the second conductive portion 22, and, like the first contact 1, the second conductive portion 21 has a width larger than that of the first conductive portion 21. The second conductive portion 22 has a tapered shape with a taper having an inclination parallel to the sharp shape of the penetration portion 25 so that the width of the opening portion of the conductive portion 22 is narrowed.

The dimensions of the second contact 2 in this case are as follows: the outer diameter w11 of the second conductive portion 22 is 80 to 100 μm, the inner diameter w12 is 60 to 80 μm, the outer diameter w13 of the first conductive portion 21 is 50 to 70 μm, and the insulating layer The thickness of 222 is set to 5 to 7.5 μm, and these values can be set within a tolerance of about ± 5 μm.
Further, the protrusion amount d21 in this case is set longer than the protrusion amount d1 (2 to 15 μm, preferably 7 to 13 μm, more preferably about 10 μm) of the first contact 1.
Note that an additional insulating layer may be provided on the outer surface of the outer portion 221.

Next, the case where the elastic member 24 is a non-conductive member will be described (see FIG. 9B).
When the elastic member 24 is a non-conductive member, the elastic member 24 is non-conductive and has elasticity that can expand and contract in the major axis direction.
For this reason, the electrical signal received at the bar-shaped member 23 that contacts the inspection point B is not transmitted to the other bar-shaped member 23 via the elastic member 24.
In this case, a conductive layer is provided on the innermost part 223 of the second conductive part 22. When the second contactor 2 is used for substrate inspection, the second contactor 2 will bend as a whole, and will always be in contact with the rod-like member 23 of the first conductive portion 21 and the innermost conductive layer 223. . For this reason, the electric signal received by the rod-shaped member 23 at the inspection point B is transmitted to the other rod-shaped member 23 through the conductive layer 223 at the innermost portion.
This conductive layer is formed of a conductive material. For example, gold (Au) plating using nickel (Ni) as a base can be used.

The gap between the innermost conductive layer 223 and the rod-shaped member 23 of the first conductive portion 21 is preferably as small as possible, but does not hinder the rod-shaped member 23 of the first conductive portion 21 from sliding by the elastic member 24. This is very important. As such a gap, 1 to 10 μm can be exemplified as a suitable case.
The other configuration (shape and dimensions) is the same as the configuration of the second conductive portion 22 as described above. Even when the elastic member 24 is a conductive member, the conductive layer 223 may be provided on the innermost side.

  The second conductive portion 22 can also be provided with an elastic mechanism (not shown) that slides in the long axis direction. By having this elastic mechanism, when the second contact 2 is pressed, the elastic mechanism is biased outward in the long axis direction, and the second conductive portion 22 is pressed against the inspection point B and the electrode portion EP. It becomes a state.

The operation when the second contact 2 is used will be described.
As shown in FIG. 8A, a second contact 2 for electrically connecting a predetermined electrode portion EP and a predetermined inspection point B is prepared.
Next, one rod-like member 23 of the second contact 2 is brought into contact with the inspection point B. Further, the other rod-like member 23 is brought into contact with the electrode part EP.
Next, when the second contact 2 is pressed, the penetration part 231 of the rod-shaped member 23 comes into contact with the inspection point B, and the elastic member 24 contracts in the major axis direction. When the second contact 2 is further pressed, the penetration portion 231 penetrates into the inspection point B (see FIG. 8B). In this case, since the elastic member 24 is energized outward in the long axis direction, the both rod-like members 23 of the first conductive portion 21 are in pressure contact with the inspection point B and the electrode portion EP.
When the penetration portion 231 is penetrated into the inspection point B, the second conductive portion 22 contacts the inspection point B.
Next, when the second contact 2 is pressed, the second contact 2 is bent as a whole. At this time, the second conductive portion 22 is bent, and is biased with respect to the inspection point B and the electrode portion EP. For this reason, the 2nd electroconductive part 22 will be in the state press-contacted with respect to the test | inspection point B and the electrode part EP (refer FIG. 10).
Therefore, both the first conductive portion 21 and the second conductive portion 22 are in pressure contact with the inspection point B and the electrode portion EP, respectively, and can reliably receive an electrical signal.

Next, a substrate inspection contact 3 (hereinafter referred to as a third contact 3) according to a third embodiment of the present invention will be described.
FIG. 11 shows a third contact according to the present invention, where (a) shows an exploded view and (b) shows an assembly view.
The third contact 3 is pressed into contact with predetermined inspection points set on the wiring pattern of the substrate to be inspected. One is used for voltage measurement and the other is used for current application. It has a part. Similarly to the first contact 1, the third contact 3 may also use the first conductive portion for voltage measurement, the second conductive portion for current application, or the first conductive portion for current application. The second conductive part may be used for voltage measurement.

The third contact 3 includes a first conductive portion 31 including a pair of rod-shaped members 33 and an elastic member 34, and a cylindrical second conductive portion 32 that houses the first conductive portion 31 therein.
As shown in FIG. 11, the first conductive portion 31 includes a pair of rod-shaped members 33 and an elastic member 34 that connects the pair of rod-shaped members 33.
One of the pair of rod-like members 33 (the rod-like member shown in front of the paper in FIG. 11) preferably has a penetration portion 331 at one end portion 33a. The penetration portion 331 has the same function as the penetration portion 111 of the first contact 1, and when the penetration portion 331 penetrates the inspection point B, the second conductive portion 32 contacts the inspection point B. It will be.
The protrusion amount d31 of the penetration portion 331 is set to be equal to or greater than the protrusion amount d1 of the penetration portion 111 of the first contact 1. Although details will be described later, when the third contact 3 is used, when the contact 3 is pressed and the penetration portion 331 of the first conductive portion 21 penetrates the inspection point B, the elastic member 34 contracts, The second conductive portion 32 contacts the inspection point B.
The other end 33b of the rod-shaped member 33 is connected to an elastic member 34 described later. The first conductive portion 31 is formed by connecting the two rod-shaped members 33 via the elastic member 34.
The rod-shaped member 33 is made of a conductive material, and examples thereof include stainless steel, beryllium copper (BeCu), and tungsten (W).
Note that the rod-shaped member 33 is preferably formed of an inflexible member.

The second conductive portion 32 is a cylindrical member that can accommodate the first conductive portion 31 and has a conductive layer for transmitting an electrical signal, as will be described in detail later. As with the second conductive portion 22 of the second contact 2 described with reference to FIG. 8A, the second conductive portion 32 of the third contact 3 is formed with a conductive layer on the outer side and insulated on the inner side. A layer is formed.
The second conductive portion 32 has at least one second elastic portion 321 (two are shown in FIG. 11).
The second conductive portion 32 is formed of a non-flexible member so that the third contact 3 is not bent.

The second elastic portion 321 expands and contracts in the major axis direction of the second conductive portion 32. The second elastic portion 321 forms a part of the second conductive portion 32 and is made of a conductive material. For this reason, the electrical signal received by the second conductive portion 32 is transmitted via the second elastic portion 321.
Since the second conductive portion 32 is formed in a cylindrical shape, the second elastic portion 321 can be formed so as to cut out a predetermined portion and have a cutout portion that becomes a spring or a sliding portion. The mechanism is not particularly limited as long as it is a mechanism that can transmit an electrical signal as described above and can expand and contract in the major axis direction of the second conductive portion 32.
In FIG. 11A, two second elastic portions 321 are provided at both ends of the second conductive portion 32. There are no particular restrictions on the number or location of the second elastic portions 321 provided.
When the second elastic portion 321 contracts in the major axis direction in this way, the third contactor 3 is biased toward the outer side in the major axis direction so that the second conductive portion 32 is an electrode. The part EP and the inspection point B are pressed.
Moreover, since this 3rd contactor 3 is formed with a non-flexible material, the 2nd elastic part 321 will expand-contract reliably.

The protruding amount d31 of the first conductive portion 31 of the third contact 3 is the same as the protruding amount d1 of the first contact 1 at least when the penetrating portion 331 penetrates the inspection point B. The amount of contact with the inspection point B is projected.
By providing the protrusion amount d31 of the first conductive portion 31 of the third contactor 3 at least in the amount (length) as described above, first, the elastic member 34 of the first conductive portion 31 to be described later is in the long axis direction. Shrink to. At this time, the penetration portion 331 of the first conductive portion 31 penetrates into the inspection point B and penetrates into the inspection point B in a pressure contact state.
Further, in this case, the first conductive portion 31 is in a pressure contact state and the second conductive portion 32 comes into contact with the inspection point B.
Furthermore, by pressing the third contact 3, the second elastic portion 321 of the second conductive portion 32 of the third contact 3 contracts. When the second elastic portion 321 contracts, the second elastic portion 321 is biased, and the second conductive portion 32 is also in pressure contact with the electrode portion EP and the inspection point B.

The elastic member 34 is a member that couples the pair of rod-shaped members 33 and is an elastic deformation member that enables the rod-shaped member 33 to slide in the major axis direction. The elastic member 34 can be a member that is biased when contracted in the long axis direction, and examples thereof include a spring, rubber, and synthetic resin. The elastic member 34 is a conductive member.
In addition, this 3rd contactor 3 has a structure substantially the same as the case where the elastic member 24 of the 1st electroconductive part 21 of the 2nd contactor 2 is formed with an electroconductive member.

The operation when the third contact 3 is used will be described.
FIG. 12 shows a case where the third contact 3 according to the present invention is used.
First, one rod-shaped member 33 of the third contact 3 is brought into contact with the inspection point B. Further, the other rod-shaped member 33 is brought into contact with the electrode part EP. At this time, when the penetrating portion 331 of the rod-shaped member 33 first comes into contact with the inspection point B, the elastic member 34 contracts in the major axis direction, and the third contactor 3 is further pressed, whereby the penetrating portion 331 is inspected. It penetrates into B. In this case, since the elastic member 34 is in an urging state, the rod-like members 33 of the first conductive portion 31 are in pressure contact with the inspection point B and the electrode portion EP.
Here, when the third contact 3 is further pressed, the penetration portion 331 penetrates into the inspection point B. At this time, the second conductive portion 32 is in contact with the inspection point B.
Further, when the third contact 3 is pressed, the second elastic portion 321 of the second conductive portion 32 and the elastic member 34 of the first conductive portion 31 contract in the major axis direction, respectively. In this case, the elastic member 34 and the second elastic portion 321 are biased outward in the major axis direction, and the first conductive portion 31 and the second conductive portion 32 are pressed against the inspection point B and the electrode portion EP. A state is reached (see FIG. 12).
Therefore, both the first conductive portion 31 and the second conductive portion 32 are in pressure contact with the inspection point B and the electrode portion EP, respectively, and can reliably receive an electrical signal.

The board | substrate inspection contact of 1st embodiment which concerns on this invention is shown, (a) is an exploded view, (b) is an assembly drawing. It is sectional drawing of the end of the board | substrate inspection contact of 1st embodiment which concerns on this invention. (A) is sectional drawing which shows one Embodiment at the time of using the board | substrate inspection contact of 1st embodiment which concerns on this invention, (b) is the board | substrate inspection contact of 1st embodiment which concerns on this invention. It is sectional drawing which shows other embodiment at the time of using a child. It is a side view which shows one Embodiment of an inspection point. It is sectional drawing in the case of using the contact for board | substrate inspection of 1st embodiment which concerns on this invention for the coined inspection point. The mode at the time of using the board | substrate test | inspection contactor of 1st embodiment which concerns on this invention is shown. The contactor for board | substrate inspection of 2nd embodiment which concerns on this invention is shown, (a) is an exploded view, (b) has shown the assembly drawing. The case where the board | substrate inspection contact of 2nd embodiment which concerns on this invention is used is shown, and the mode of the 1st electroconductive part of the contact for board | substrate inspection of 2nd embodiment is shown. Sectional drawing of the contact for a board | substrate test | inspection of 2nd embodiment is shown, (a) has shown the case where an elastic member is electroconductive, (b) has shown the case where an elastic member is nonelectroconductive. . The case where the board | substrate inspection contact of 2nd embodiment which concerns on this invention is used is shown. The board | substrate inspection contact of 1st embodiment which concerns on this invention is shown, (a) is an exploded view, (b) is an assembly drawing. The case where the board | substrate inspection contact of 3rd embodiment which concerns on this invention is used is shown.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Board inspection contact 11 of 1st embodiment ... 1st electroconductive part 12 ... 2nd electroconductive part 111 ... penetration part 2 ... 2nd embodiment Contact for substrate inspection 21 ... First conductive portion 22 ... Second conductive portion 23 ... Rod member 24 ... Elastic member 3 ... Substrate according to the third embodiment Inspection contact 31... First conductive portion 32... Second conductive portion 33... Bar-shaped member 34 ... Elastic member 321 ... Second elastic portion

Claims (10)

A substrate inspection contact having a first conductive portion and a second conductive portion, each of which is press-contacted to a predetermined inspection point set on a wiring pattern of a substrate to be inspected and one is used for voltage measurement and the other is used for current application Because
The first conductive portion has a rod-like or needle-like shape having flexibility and conductivity,
The second conductive portion is formed by a cylindrical member having flexibility and conductivity while accommodating the first conductive portion therein, and the first conductive portion and an inner peripheral surface of the second conductive portion. A gap is formed between the entire length in the length direction,
The substrate inspection contact, wherein the first conductive portion and the second conductive portion are in contact with the inspection point when the substrate inspection contact is in use.   The contact for a substrate inspection according to claim 1, wherein the first conductive portion and the second conductive portion are formed so as to be coaxial. The first conductive portion has a penetration portion that penetrates the inspection point,
The first conductive part protrudes from the second conductive part to the inspection point side so that the second conductive part comes into contact with the inspection point when the penetration part penetrates the inspection point. 3. The contact for inspecting a substrate according to claim 1, wherein the contact is for inspection.   4. The contact for inspection of a substrate according to claim 3, wherein an amount of protrusion by which the first conductive portion protrudes is calculated based on a distance between the first conductive portion and the second conductive portion.   The first conductive portion includes a pair of conductive and flexible rod-shaped members and a conductive elastic member that connects the rod-shaped members and expands and contracts in the long axis direction. 4. A contact for inspecting a substrate according to any one of 4 above. The first conductive portion includes a pair of conductive and flexible rod-shaped members and a non-conductive elastic member that connects the rod-shaped members and expands and contracts in the long axis direction.
5. The substrate inspection contact according to claim 1, wherein a conductive layer that electrically connects the pair of rod-shaped members is formed on an inner surface of the second conductive portion. One of the rod-shaped members is formed with a penetration portion that penetrates the inspection point.
The first conductive part protrudes from the second conductive part to the inspection point side so that the second conductive part comes into contact with the inspection point when the penetration part penetrates the inspection point. The contact for board inspection according to claim 5 or 6.   The substrate inspection contact according to claim 1, wherein the second conductive portion has an elastic mechanism that slides in a major axis direction.   9. The substrate inspection contact according to claim 1, wherein the second conductive portion is formed in a tapered shape.   The contact for substrate inspection according to claim 3 or 7, wherein the penetration portion is formed in a sharp shape.

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