JP4974311B1 - Inspection jig - Google Patents

Abstract

An inspection jig for electrically connecting an inspection point provided on the inspection board and an inspection device for inspecting the inspection board to inspect a wiring provided on the inspection board, one end of which is the inspection point A flexible and conductive contact that is in conductive contact and is in conductive contact with the electrode portion that is electrically connected to the inspection device at the other end, and an inspection guide hole that guides one end of the contact to the inspection point An inspection-side support, and an electrode-side support having an electrode guide hole for guiding the other end of the contact to the electrode, the contact being in contact with the inspection point, A bar-like conductive conductor portion having a second end portion that comes into contact with the electrode portion and having flexibility, and insulation that is coated on the outer periphery of the conductor portion excluding the first end portion and the second end portion And the length of the second end is in contact with the electrode body Inspecting jig, characterized in that it is shorter than the depth of the bore, to facilitate positioning of the rear end and the electrode of the contact, to allow accurate inspection.
[Selection] Figure 11

Description

  The present invention relates to an inspection jig for electrically connecting inspection points set in advance on an inspection target portion of an inspection object such as a substrate on which a plurality of wirings are formed, and an inspection apparatus.

  The inspection jig supplies electric power (electric signal, etc.) from the inspection device to a predetermined inspection position to the inspection target part of the inspection object via the contact, and detects an electric signal from the inspection target part. Is used to detect the electrical characteristics of the inspection target part, perform an operation test, and the like.

  Examples of inspected objects include various substrates such as printed wiring boards, flexible boards, ceramic multilayer wiring boards, electrode plates for liquid crystal displays and plasma displays, package boards for semiconductor packages, and film carriers, semiconductor wafers and semiconductors. This corresponds to a semiconductor device such as a chip or a CSP (Chip size package).

  In the present specification, these inspection objects are collectively referred to as “inspection object”, and an inspection target portion set in the inspection object is referred to as “inspection point”.

  For example, when the object to be inspected is a substrate and is an electric / electronic component such as a semiconductor circuit such as an IC or a resistor mounted thereon, a target portion formed on the substrate is a wiring or an electrode. In that case, in order to ensure that the wiring of the target part can accurately transmit the electrical signal to them, the wiring on the printed wiring board, liquid crystal panel or plasma display panel before mounting the electrical / electronic component is used. An electrical characteristic such as a resistance value between predetermined inspection points is measured to judge whether the wiring is good or bad.

  Specifically, the determination of the quality of the wiring is performed by bringing the current supply terminal and / or the tip of the voltage measurement contact into contact with each inspection point, and checking the inspection point from the current supply terminal of the contact. Measure the voltage generated in the wiring between the tips of the contacts that are in contact with the inspection point and supply the measurement current to the inspection point, and the resistance value of the wiring between the predetermined inspection points from those supply current and the measured voltage Is done by calculating

  When inspecting the inspection substrate using the substrate inspection apparatus, the jig moving means is moved so that the contact (contact pin) for inspecting the substrate inspection jig contacts the contact portion of the inspection substrate. Control is performed such that a predetermined inspection is performed, and when the inspection is completed, the inspection jig is moved by the jig moving means to move away from the inspection substrate.

  Here, for example, an inspection jig disclosed in Patent Document 1 includes a front end side support body, a rear end side support body arranged with a predetermined gap from the front end side support body, a front end side support body, and a rear side. A connecting body for connecting the end side support body, the front end side support body is formed with a front end side insertion hole in a direction orthogonal to the facing surface facing the object to be inspected, and the rear end side support body is provided with a front end side insertion hole; A rear end side insertion hole is formed in a direction inclined with respect to the forming direction. Further, the rear end side insertion hole is inclined with respect to the front end side insertion hole so that the distal end side of the probe inserted through the rear end side insertion hole faces the front end side insertion hole.

  Further, an electrode support body on which an electrode that contacts the rear end of the probe is formed is disposed with a predetermined gap between the electrode support body and the rear end side support body that holds the probe, and biases the rear end side support body. An urging mechanism is provided. This urging mechanism has a conical tip, and is inserted into an insertion hole provided in a portion where the urging mechanism of the rear end support comes into contact with the probe, which is supported by the electrode support. The edge and electrode are also positioned.

  In the inspection jig disclosed in Patent Document 1, in order to suppress dents generated on the surface of the inspection point by rubbing while the tip of the probe is in contact with the surface of the inspection point, the tip of the probe is used only at the time of inspection. An urging mechanism is provided so as to protrude.

  However, in the inspection jig shown in Patent Document 1, the length of the rear end portion of the probe is longer than the length in the axial direction of the rearmost small-diameter hole of the rear end side support. Since it is formed in this way, the probe rear end is swayed in a plane direction parallel to the rear surface of the rear end side support on the probe rear end.

  For this reason, every time the tip of the probe comes into contact with the inspection point of the object to be inspected (each time inspection is performed), the state where the rear end of the probe contacts the electrode is not stable, and the probe and electrode are There was a problem that the contact resistance greatly changed. Since it has such a problem, a contact resistance value will change for every test | inspection, and the exact test | inspection was not able to be implemented.

  Further, when the inspection is repeated, the rear end of the probe rubs against the electrode surface, and the electrode surface is worn, and it is difficult to obtain an accurate inspection result.

  Further, in the disclosed technique disclosed in Patent Document 1, since the urging mechanism has a role of positioning, the urging mechanism is worn by contact with the tip or the insertion hole. In this case, the distal end may enter the insertion hole deeper than in the initial state, so that the urging force changes when the distal end or the insertion hole is worn. Since a plurality of urging mechanisms and insertion holes are provided, the urging mechanism and the insertion hole are not constant depending on the progress of wear, and therefore the force that the rear end side support urges the electrode support varies depending on the location. It will be. For this reason, when the opposing surface approaches the contact surface, the opposing surface and the contact surface approach each other against the biasing force that varies depending on the location, and the tip of the probe comes into contact with the inspection point.

JP 2009-047512 A

  The present invention has been made in view of such circumstances, and provides an inspection jig that facilitates the positioning of the rear end of the contact and the electrode and enables accurate inspection.

  The present invention also provides an inspection jig that is easy to maintain such as replacement of a contact.

The invention according to claim 1 is an inspection jig for electrically connecting an inspection point provided on the inspection substrate and an inspection device for inspecting the inspection substrate in order to inspect the wiring provided on the inspection substrate. An electrode body including a plurality of electrodes electrically connected to the inspection apparatus, the electrode body including a support plate provided with the electrodes and a support member holding a wiring connected to the electrodes And a flexible and conductive contact whose one end is in conductive contact with the inspection point and whose other end is in conductive contact with the electrode, and an inspection guide hole for guiding one end of the contact to the inspection point. An inspection-side support, an electrode-side support having an electrode guide hole for guiding the other end of the contact to the electrode, and the inspection-side support and the electrode-side support are arranged at a predetermined interval. and a post for retaining Te, the support member before Symbol electrode body , During non-inspection, the electrode-side support has a biasing means for maintaining the predetermined distance is spaced apart from said support member of said electrode member, wherein the contact includes a first end in contact with the test point A bar-shaped conductive conductor portion having a second end portion that comes into contact with the electrode and having flexibility, and an insulating portion that is coated on the outer periphery of the conductor portion excluding the first end portion and the second end portion has a length of the second end portion, said being shorter than the depth of the electrode guide bore abutting the electrode body, further, the support plate of the electrode assembly, the electrode is fixed The biasing means includes a biasing portion that biases the electrode-side support body to the inspection-side support body side together with the movable plate.

  According to a second aspect of the present invention, the electrode-side support body has a shaft portion extending toward the electrode body, and the electrode body has a bearing portion for inserting and holding the shaft portion so as to be slidable. An inspection jig according to claim 1 is provided.

  According to a third aspect of the present invention, the biasing means includes a contact member having a contact surface that contacts the surface of the electrode-side support, and a bias that biases the contact member to the electrode-side support. The inspection jig according to claim 1, further comprising an urging portion.

  The invention according to claim 4 is characterized in that the pressing force of the urging means provided in the inspection jig is larger than the pressing force of the contact provided in the inspection jig. Provide inspection jigs.

The invention according to claim 5 further provides the inspection jig according to claim 1, wherein the movable plate is disposed around the electrode plate .

  According to the first aspect of the present invention, since the length of the second end portion of the contact is formed shorter than the depth of the electrode guide hole contacting the electrode body, the other end of the contact is inside the electrode guide hole. Therefore, the rear end of the contact can be stably brought into contact with the electrode, and the contact and the electrode can be stably brought into contact with each other.

  According to the second aspect of the present invention, by providing a shaft portion on the electrode-side support and providing a bearing portion on the electrode body, the electrode-side support and the electrode body can be brought into contact with each other accurately. There is no waking.

  According to a third aspect of the present invention, the biasing means includes a contact member having a contact surface that contacts the surface of the electrode-side support, and a biasing portion that biases the contact member to the electrode-side support. As a result, it is possible to provide a highly durable inspection jig without the urging means and the electrode-side support being worn.

  In the invention according to claim 4, since the pressing force of the biasing means provided in the inspection jig is larger than the pressing force of the contact provided in the inspection jig, the contact is surely provided at both the inspection point and the electrode. Can touch.

  The invention according to claim 5 further includes a movable plate between the electrode side support and the electrode body, and the biasing means biases the electrode side support together with the movable plate toward the inspection side support. Since the biasing portion is provided, the maintenance of the inspection jig from the electrode side support side can be easily performed.

  The invention described in claim 6 further includes a movable plate around the electrode body, and the biasing means has a biasing portion that biases the electrode side support body together with the movable plate toward the inspection side support body. Maintenance of the inspection jig from the electrode side support side can be easily performed, and contact between the rear end portion of the contact and the electrode can be ensured.

1 is a schematic side view of an inspection jig 1 according to an embodiment of the present invention. It is a top view of the inspection jig 1 shown in FIG. FIG. 2 is a schematic partial cross-sectional view showing a cross-sectional structure of an inspection-side support 2 shown in FIG. It is a schematic fragmentary sectional view which shows the cross-section of the electrode side support body 3 shown in FIG. 1, (a) has shown the state at the time of a non-inspection, (b) has shown the state at the time of an inspection. FIG. 4 is a bottom view of the electrode side support 3. 3 is a plan view of an electrode body 6. FIG. 6 is a partial view of the inspection jig taken along line AA in FIG. 6 for explaining the state of the inspection jig when the inspection jig including the electrode body according to the embodiment shown in FIG. 6 is not inspected. It is an expanded sectional view. 6 is a partially enlarged cross-sectional view of the inspection jig taken along the line AA of FIG. 6 for explaining the state of the inspection jig when inspecting the inspection jig having the electrode body according to the embodiment shown in FIG. FIG. It is a schematic block diagram of the inspection apparatus carrying the inspection jig shown in FIG. It is a top view of the electrode body which concerns on other embodiment. It is a front view which shows the outline of the state of the electrode body shown to FIG. 10A at the time of a non-inspection. It is a front view which shows the outline of the state of the electrode body shown to FIG. 10A at the time of a test | inspection. It is a partially expanded sectional view which looked at the inspection jig along the BB line of Drawing 10A for explaining the state at the time of non-inspection of the inspection jig provided with the electrode object concerning the embodiment shown in Drawing 10A. . It is a partially expanded sectional view which looked at the inspection jig along the BB line of Drawing 10A for explaining the state at the time of inspection of the inspection jig provided with the electrode object concerning the embodiment shown in Drawing 10A.

  The best mode for carrying out the present invention will be described.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 is a schematic side view of an inspection jig 1 according to an embodiment of the present invention. However, in order to understand the structure of the present invention, a part is shown in a sectional view. FIG. 2 is a plan view of the inspection jig 1 shown in FIG. FIG. 3 is a schematic partial cross-sectional view showing a cross-sectional structure of the inspection-side support 2 shown in FIG. 4A and 4B are schematic partial cross-sectional views showing the cross-sectional structure of the electrode-side support 3 shown in FIG. 1, wherein FIG. 4A shows a state during non-inspection, and FIG. 4B shows a state during inspection. FIG. 5 is a bottom view of the electrode side support 3. FIG. 6 is a plan view of the electrode body 6. FIG. 7 shows a state of the inspection jig 1 at the time of non-inspection as viewed in the direction of the line AA in FIG. 6, and shows a schematic cross-sectional view enlarging a part of FIG. FIG. 8 shows the state of the inspection jig at the time of inspection with respect to the state shown in FIG. Also in this figure, the cross section is the direction seen along the line AA in FIG. FIG. 9 is a schematic configuration diagram of an inspection apparatus equipped with the inspection jig shown in FIG. Note that one end of the contact is shown in FIG. 3, and the rear end of the contact is shown in FIG. 7 and 8 show the non-inspection itself and the time of inspection, and these states change each time an inspection is performed.

  In the following description, in FIG. 1, FIG. 3, FIG. 4, and FIG. 7 to FIG. 9, the top and bottom of the drawings will be described as “first, front or front” and “rear or rear”, respectively.

[Outline of inspection jig]
The inspection jig 1 of this embodiment is mounted and used in an inspection apparatus 30 that performs an electrical inspection of an object to be inspected 50 such as a printed wiring board or a semiconductor integrated circuit (see FIG. 9).

  As shown in FIG. 1 or FIG. 2, the inspection jig 1 regulates the jig body 40, the base plate 41 on which the jig body 40 is placed, and the movement of the jig body 40 forward. And a regulating member 42 to be used.

  As shown in FIG. 1, the jig main body 40 includes an inspection-side support 2 and an electrode-side support 3 that is disposed behind the inspection-side support 2 with a predetermined interval.

  The inspection-side support 2 has an inspection guide hole 13 that guides one end (tip 5e) of a contact 5 described later to an inspection point (see FIG. 3). The electrode side support 3 has an electrode guide hole 20 for guiding the other end (rear end 5f) of the contact 5 to the electrode 7 (see FIGS. 4A and 4B).

  The inspection-side support body 2 and the electrode-side support body 3 are each formed in a flat rectangular parallelepiped shape (rectangular plate shape). The inspection-side support 2 and the electrode-side support 3 are arranged so that their surfaces are parallel to each other.

  Specifically, the inspection side support body 2 and the electrode side support body 3 are connected and fixed by four support columns 4 arranged at the four corners of the inspection side support body 2 (see FIGS. 1 and 2). . In this embodiment, the support column 4 connects the inspection side support body 2 and the electrode side support body 3.

  In addition, a plurality of contacts 5 as contacts that come into contact with the inspection point of the inspection object 50 are inserted through the inspection-side support 2 and the electrode-side support 3.

  The electrode body 6 is attached to the back of the electrode side support body 3 (refer FIG. 1). As shown in FIG. 1, the electrode body 6 is fixed with a plurality of electrodes 7 that are in conductive contact with the contact 5 (specifically, the rear end 5 f of the contact 5). The electrode body 6 is provided with a biasing means 14 for biasing the electrode side support 3 toward the front and a slide mechanism 8 for restricting the movement of the electrode side support 3 when the inspection object 50 is inspected. ing.

  The contact 5 is formed of a metal such as tungsten, high-speed steel (SKH), beryllium copper (Be-Cu) or other conductors, and is formed in a rod shape having bendable elasticity (flexibility). .

As shown in FIGS. 3 and 4, the contact 5 of this embodiment includes a conductor portion 5 a made of the conductor as described above and an insulating portion 5 b that covers the outer peripheral surface of the conductor portion 5 a. . The insulating part 5b is formed of an insulator such as a synthetic resin. The insulating part 5b can use an insulating film formed by applying an insulating coating to the surface of the conductor part 5a. Insulating portions 5 b are not formed at both ends of the contact 5, a first end 5 c is formed at one end (front end) of the contact 5, and a first end 5 c is formed at the other end (rear end) of the contact 5. Two end portions 5d are formed. For convenience of explanation, a portion that contacts the inspection point of the first end portion 5c is referred to as a front end 5f, and a portion that contacts the electrode of the second end portion 5d is referred to as a rear end 5f.

  The front end 5f of the first end 5c and the rear end 5f of the second end 5d can be formed in a hemispherical shape as shown in the figure.

  The first end portion 5c of the contact 5 is inserted and supported in the inspection guide hole 13 of the inspection-side support 2 at the time of inspection (see FIG. 3). The tip 5e of the first end portion 5c is in conductive contact with an inspection point formed on the inspection object 50.

  The length of the first end portion 5 c is longer than the length of the inspection guide hole 13. This is because the contact 5 is sandwiched and curved by the inspection point and the electrode during the inspection. FIG. 3 shows an inspection jig for non-inspection. The first end 5c of the contact 5 is accommodated in the inspection guide hole 13, and the tip 5e of the first end 5c is also in the inspection guide hole 13. Will be placed.

  The second end 5d of the contact 5 is guided to the electrode 7 (contact surface 7a) by an electrode guide hole 20 of the electrode side support 3 described later (see FIG. 4). The rear end 5f of the second end portion 5d is in conductive contact with the electrode 7.

  Although the details of the second end portion 5d will be described later, the second end portion 5d is formed to be shorter than the axial length of the small diameter hole 17b constituting the electrode guide hole 20.

  The inspection-side support 2 is configured by laminating a plurality (three in this embodiment) of support plates 10, 11, and 12 in order from the side (front side) where the inspection object 50 is disposed. These support plates 10 to 12 are fixed to each other by fixing means such as bolts.

  Further, as shown in FIG. 3, through holes 10 a, 11 a, and 12 a are formed in the support plates 10, 11, and 12, respectively. By arrange | positioning so that these through-holes 10a, 11a, and 12a may be mutually connected, the one test | inspection guide hole 13 in which the 1st end part 5c of the contactor 5 is penetrated is comprised.

  Further, the front surface of the support plate 10 is a facing surface 2 a that faces the inspection object 50.

  The inspection guide hole 13 has a guide direction of the contact 5 facing toward the inspection object 50. Specifically, the inspection guide hole 13 has the guide direction of the contact 5 orthogonal to the facing surface 2a. Therefore, the tip 5e of the contact 5 can be brought into contact with the inspection point of the inspection object 50 from a substantially perpendicular direction.

  Further, the inspection guide holes 13 are formed as many as the number of the contacts 5 included in the inspection jig 1.

  The three through holes 10a, 11a, and 12a are formed concentrically. In FIG. 3, the through hole 10a is composed of a small diameter hole 10b and a large diameter hole 10c having a larger diameter than the small diameter hole 10b, and the through hole 12a is composed of a large diameter hole 12c having a larger diameter than the small diameter hole 12b and the small diameter hole 12b. It is composed of

  The small-diameter hole 10b and the small-diameter hole 12b are formed to have an inner diameter slightly larger than the outer diameter of the conductor portion 5a and slightly smaller than the outer diameter of the contact 5 in the insulating portion 5b.

  Moreover, the internal diameter of the through-hole 11a is larger than the internal diameter of the small diameter hole 10b and the internal diameter of the small diameter hole 12b.

  A tip edge 5g, which is a boundary between the conductor portion 5a and the insulating portion 5b, formed at the first end portion 5c of the contact 5 is arranged behind the small diameter hole 12b of the inspection guide hole 13 as shown in FIG. Yes.

  As described above, the small-diameter hole 12b is formed with an inner diameter slightly smaller than the outer diameter of the contact 5 in the insulating portion 5b. Therefore, the leading edge 5g of the insulating portion 5b comes into contact with the open edge 12d of the small diameter hole 12b. That is, the tip edge 5g and the opening edge 12d serve as a retaining portion for preventing the contact 5 from falling off to the inspection object side.

  The electrode side support 3 is configured by laminating a plurality (three in this embodiment) of support plates 15, 16, and 17 in order from the front side of the inspection side support 2. These support plates 15 to 17 are fixed to each other by fixing means such as bolts.

  As shown in FIG. 4A or 4B, through holes 15a, 16a, and 17a are formed in the support plates 15 to 17, respectively. By arranging these through holes 15a to 17a to be connected to each other, one electrode guide hole 20 through which the second end portion 5d of the contact 5 is inserted is configured. The electrode guide holes 20 are formed as many as the number of contacts 5 included in the inspection jig 1.

  The electrode guide hole 20 is formed in a guide direction that is inclined with respect to the guide direction formed in the inspection guide hole 13 (that is, the direction perpendicular to the facing surface 2a). That is, the three through-holes 15a to 17a are formed in a state where the respective centers are slightly shifted, and the entire electrode guide hole 20 is formed in a direction inclined with respect to the orthogonal direction of the opposing surface 2a. .

  For example, as shown to Fig.4 (a), the three through-holes 15a-17a are formed in the state which the center shifted | deviated little by little in the illustration right direction in order of the through-holes 15a-17a. That is, the guide direction for guiding the rear end side of the contact 5 is guided in a direction inclined with respect to a normal line orthogonal to the surface of the electrode side support 3.

  The through hole 15a includes a small diameter hole 15b and a large diameter hole 15c having a larger diameter than the small diameter hole 15b. Similarly, the through hole 16a includes a small diameter hole 16b and a large diameter hole 16c, and the through hole 17a includes a small diameter hole 17b and a large diameter hole 17c.

  The small-diameter holes 15b, 16b, and 17b are formed with an inner diameter that is slightly larger than the outer diameter of the contact 5 in the portion where the insulating portion 5b is formed.

  Further, as described above, the small diameter hole 17b is formed with an inner diameter slightly larger than the outer diameter of the contact 5 of the insulating portion 5b, and the rear end edge 5h of the insulating portion 5b is formed inside the small diameter hole 17b. Can be inserted. The contact 5 is disposed so as to be inclined with respect to a normal line orthogonal to the surface of the electrode side support 3. For this reason, as shown in FIG.4 (b), the contactor 5 is also inclined and arrange | positioned with respect to the small diameter hole 17b. The small diameter hole 17 b is formed so that the axial direction is orthogonal to the surface of the electrode side support 3.

  As shown in the state of the inspection jig at the time of inspection in FIG. 4B, the rear end edge 5h, which is the boundary between the conductor portion 5a and the insulating portion 5b formed at the second end portion 5d of the contact 5, The electrode guide hole 20 is disposed behind the large-diameter hole 17c.

  At this time, the amount of movement of the rear end 5f in the direction parallel to the rear surface of the electrode side support 3 is restricted to the range in which the contact 5 moves inside the small diameter hole 17b. For this reason, when the contactor 5 is inserted at an angle (when shifting from non-inspection to inspection or when shifting from inspection to non-inspection), the rear end 5f of the second end 5d moves. The possible amount can be very small and will be in stable contact with the electrode.

  Thereby, when the contact surface 7a of the electrode 7 mentioned later and the rear end 5f are contacted, it becomes possible to perform precise positioning of the contact surface 7a and the rear end 5f. In particular, in actual inspection, since thousands of contacts 5 and electrodes 7 are usually provided, the easy positioning of the contact surface 7a and the rear end 5f greatly contributes to shortening the working time.

  As shown in FIG. 5, a circular insertion hole 3 a is formed on the bottom surface (rear surface) of the electrode side support 3. Specifically, insertion holes 3 a are formed in the vicinity of the four corners of the support plate 17 so as to penetrate the support plate 17. As shown in FIG. 7, a shaft portion 8 a described later constituting the slide mechanism 8 is inserted and fixed in the insertion hole 3 a.

  In each contactor 5, the first end portion 5 c inserted through the inspection guide hole 13 is displaced from the second end portion 5 d inserted through the electrode guide hole 20 in the inclined direction of the guide direction of the electrode guide hole 20. Has been placed. That is, the opening position on the rear end side of the inspection guide hole 13 through which the first end portion 5c of the contact 5 is inserted (that is, the opening position of the through hole 12a of the support plate 12) is as shown in FIG. When viewed from the electrode guide hole 20 through which the second end 5d of the contactor 5 is inserted, the electrode guide hole 20 is disposed on the inclined side in the guide direction.

  As shown in FIG. 1, the electrode body 6 includes rectangular support plates 22 and 23 in which a plurality of electrodes 7 are embedded, and a substantially block-shaped support member 25 that holds wirings 24 that are conductively connected to the electrodes 7. It is configured by stacking. The electrode body 6 of this embodiment is formed in a substantially rectangular parallelepiped shape as a whole, and the rear end surface is fixed to the front surface of the base plate 41 via the fixing plate 48. Note that the wiring 24 is connected to a control unit 31 of the inspection apparatus 30 described later.

  The front surface of the electrode 7 is a contact surface 7a with which the rear end 5f of the contact 5 comes into contact, as shown in FIG. Note that the rear end 5f of the contact 5 is formed in a spherical shape as described above. Therefore, even if the second end portion 5d of the contact 5 is inclined along the electrode guide hole 20 having the inclined guide direction, the rear end 5f and the contact surface 7a are in a suitable conductive contact state.

  In addition to the slide mechanism 8 being attached to the electrode body 6, an urging means 14 is also attached. Specifically, as shown in FIG. 6, the slide mechanism 8 and the urging means 14 are attached in the vicinity of each of the four corners of the electrode body 6. In this embodiment, the biasing means 14 is attached at a position farther from the four corners of the electrode body 6 than the slide mechanism 8.

  The slide mechanism 8 includes a rod-shaped shaft portion 8a that protrudes from the rear surface of the electrode-side support 3 and a cylindrical bearing portion 8b that is fixed to the electrode body 6 and into which the shaft portion 8a is inserted (see FIG. 1). ).

  One end of the shaft portion 8a is fixed rearward to the support plate 17 of the electrode side support 3, and the other end is inserted into a bearing portion 8b described later. At this time, the shaft portion 8 a is fixed so that the axial direction is perpendicular to the rear surface of the support plate 17.

  The bearing portion 8 b is fixed by being fitted into a through hole (not shown) provided in the electrode body 6. The bearing portion 8b is a linear motion bearing such as a linear bush having, for example, a plurality of ball bearings arranged in the axial direction, and the cross-sectional shape and diameter are suitably adjusted according to the inner shape of the bearing. The shaft portion 8a is inserted.

  By inserting the shaft portion 8a through the bearing portion 8b, the shaft portion 8a can perform linear motion (sliding) in the axial direction with high accuracy (less movement in a direction perpendicular to the axial direction).

  The slide mechanism 8 is provided in order to move the electrode-side support 3 in the front-rear direction with respect to the electrode body 6 with high accuracy, and when the rear surface of the electrode support 3 and the front surface of the electrode body 6 come into contact with each other. The rear end 5f of the contact 5 inserted into the electrode guide hole 20 and the contact surface 7a of the electrode 7 formed on the electrode body 6 can be brought into contact with each other with high accuracy.

  For this reason, when the slide mechanism 8 is attached, the slide mechanism 8 is attached so that the rear end 5d and the contact surface 7a are preferably in contact with each other.

  As described above, in this embodiment, the slide mechanism 8 is attached to the electrode body 6, and the electrode side support body 3 and the electrode body 6 can be accurately moved in the front-rear direction. For this reason, when the electrode side support body 3 moves ahead by external force, the contact surface 7a of the electrode 7 and the rear end 5f of the contact 5 inserted through the electrode side support body 3 can be brought into contact with each other with high accuracy.

  The urging means 14 protrudes from the front surface of the electrode body 6 and comes into contact with the electrode side support 3, the cylinder member 44 in which the rear end side of the contact member 43 is accommodated, and the cylinder member 44 And an urging portion (compression coil spring 45) for urging the abutting member 43 first, and a retaining ring 46 such as an E-type retaining ring for attaching the abutting member 43 to the cylindrical member 44 (FIG. 1). reference).

  The cylindrical member 44 is formed in a bottomed cylindrical shape having an opening on the front end side, and is fixed to the electrode body 6. The abutting member 43 has a cylindrical shape, and includes a cylindrical portion 43a disposed on the front side and a small-diameter portion 43b disposed on the rear side and having a smaller diameter than the cylindrical portion 43a.

  The cylindrical portion 43a is formed in a cylindrical shape having a plane perpendicular to the major axis direction on the end surface. Therefore, the tip end side of the contact member 43 comes into contact with the rear surface of the support plate 17.

  A compression coil spring 45 is inserted on the outer peripheral side of the small diameter portion 43b. Specifically, the compression coil spring 45 is inserted into the outer peripheral side of the small diameter portion 43b in a state where the end portion of the compression coil spring 45 is in contact with the rear end surface of the cylindrical portion 43a and the bottom surface of the cylindrical member 44.

  Further, the rear end side of the small diameter portion 43 b is inserted into a through hole formed in the bottom surface of the cylindrical member 44 and protrudes rearward from the bottom surface of the cylindrical member 44. A retaining ring 46 is fixed to the rear end of the small diameter portion 43b.

  As described above, in this embodiment, the urging means 14 is attached to the electrode body 6 and urges the electrode side support body 3 in the forward direction. That is, the urging means 14 includes the contact surface 7a of the electrode 7 fixed to the electrode body 6 and the front surface (that is, the opposing surface) of the inspection-side support 2 fixed to the electrode-side support 3 via the support column 4. The inspection-side support body 2, the electrode-side support body 3, and the support column 4 are urged in the direction away from 2a).

  As shown in FIG. 1, the restricting member 42 includes a restricting plate 47 that contacts the front surface of the electrode-side support 3 and a fixed plate 48 to which the restricting plate 47 is fixed.

  The fixed plate 48 is disposed behind the jig body 40 and is fixed to the base plate 41.

  The restriction plate 47 is fixed to the front end of the fixed plate 48.

  In this embodiment, the contact member 43 contacts the rear surface of the electrode side support 3 (the rear surface of the support plate 17) with the compression coil spring 45 slightly bent during non-inspection. The front surface of the support 3 is in contact with the regulation plate 47. That is, the electrode-side support 3 is in contact with the regulation plate 47 while being urged by the urging means 14 (see FIG. 7).

  In this state, a slight gap is formed between the electrode side support 3 and the electrode holder 6.

  In this state, the inspection-side support body 2, the electrode-side support body 3, and the support column 4 are urged forward, and the tip 5e of the contactor 5 does not protrude from the facing surface 2a (see FIG. 7). That is, in this state, the tip 5 e of the contact 5 is accommodated in the inspection guide hole 13.

[Outline of inspection equipment]
FIG. 9 is a schematic configuration diagram of an inspection apparatus 30 on which the inspection jig 1 shown in FIG. 1 is mounted.

  As shown in FIG. 9, the inspection jig 1 of this embodiment is mounted and used in an inspection apparatus 30 that performs an electrical inspection (specifically, inspection of disconnection, short circuit, etc.) of the inspection object 50.

  The inspection object 50 is formed with an inspection point where the tip 5e of the contact 5 comes into contact. For example, an electronic component such as an IC is placed on the inspection object 50 after the inspection. Further, the placed electronic component is bonded to an inspection point used in the inspection by, for example, wire bonding.

  The inspection device 30 is driven by a control unit 31 as an electrical inspection unit including an inspection circuit for determining the conduction state of the inspection object 50, a drive unit (not shown) connected to the control unit 31, and a drive unit. The inspection mechanism 33 is provided.

  An electrode 7 of the inspection jig 1 is conductively connected to the control unit 31 via a wiring 24.

  The inspection mechanism 33 includes a first support plate 34 to which the inspection jig 1 is fixed, a second support plate 35 that is disposed opposite to the first support plate 34 and to which the inspection object 50 is fixed, and the first support plate 34. And a moving mechanism 36 for moving in the front-rear direction.

  The moving mechanism 36 is constituted by, for example, a ball screw mechanism or a hydraulic mechanism, and is driven by a driving unit.

  In this embodiment, the second support plate 35 is a fixing means for fixing the inspection object 50, and the moving mechanism 36 moves the inspection jig 1 in a direction in which the inspection object 50 and the facing surface 2a of the inspection jig 1 approach each other. It has become a moving means.

  The moving mechanism 36 may move the second support plate 35 in the front-rear direction.

  Further, the first support plate 34 is configured to be movable in the direction perpendicular to the paper surface of FIG. 9 by a moving mechanism (not shown), and the second support plate 35 is movable in the left-right direction of FIG. 9 by a moving mechanism (not shown). It may be configured.

[Inspection procedure for inspection and movement of inspection jig during inspection]
FIG. 7 is a view showing the state of the inspection jig during non-inspection, and FIG. 8 is a view showing the state of the inspection jig during inspection. The inspection apparatus 30 according to this embodiment performs an electrical inspection of the inspection object 50 while bringing the opposing surface 2 a of the inspection jig 1 into contact with the inspection object 50. Specifically, the inspection apparatus 30 performs the inspection as follows.

  First, the inspection jig 1 is fixed to the first support plate 34, and the inspection object 50 is fixed to the second support plate 35. In this state, as shown in FIG. 7, the abutting member 43 abuts on the rear surface of the electrode side support 3 with the compression coil spring 45 slightly bent, and the electrode side support 3 on the regulating plate 47. The front surface of the abuts.

  A slight gap is formed between the rear surface of the electrode side support 3 and the front surface of the electrode body 6. Further, in this state, the tip 5 e of the contact 5 does not protrude from the facing surface 2 a and is accommodated in the inspection guide hole 13.

  In this state, the rear end 5 f of the contact 5 is in contact with the contact surface 7 a of the electrode 7. In this state, the rear end 5f of the contact 5 may be slightly separated from the contact surface 7a.

  Thereafter, when the drive unit drives the moving mechanism 36 with a control signal from the control unit 31, the first support plate 34 approaches the second support plate 35, and the opposing surface 2 a comes into contact with the inspection object 50 in due course.

  When the facing surface 2a comes into contact with the inspection object 50, the inspection side support 2, the electrode side support 3, and the support column 4 are moved against the urging force of the urging means 14 as shown in FIG. Move relative to. That is, the inspection-side support body 2, the electrode-side support body 3, and the support column 4 move relative to the electrode body 6 in the direction in which the contact surface 7 a and the facing surface 2 a approach. At this time, the front surface of the electrode-side support 3 is in a state separated from the regulating plate 47.

  Then, the rear end 5 f of the contact 5 is pushed forward by the electrode 7. At this time, since the tip 5e of the contact 5 is in contact with the inspection point of the inspection object 50, the intermediate portion of the contact 5 that is in an inclined posture between the inspection-side support 2 and the electrode-side support 3 is Bend (bend).

  Until the rear surface of the electrode side support 3 comes into contact with the front surface of the electrode body 6, the inspection side support 2 and the like move relative to the electrode body 6, and the deflection amount of the intermediate portion of the contact 5 is a predetermined amount. Then, the tip 5e of the contact 5 housed in the inspection guide hole 13 comes into contact with the inspection point with a predetermined contact pressure.

  At this time, the tip 5e does not protrude from the facing surface when the facing surface and the surface on which the inspection point is formed contact with no gap, but if there is a slight gap, the tip 5e is the facing surface by the amount of the gap. Will protrude from.

  In addition, the bending direction of the intermediate part of the contact 5 to be bent is a direction according to the inclination direction of the contact 5.

  At this time, since the electrode side support 3 attached to one end of the shaft portion 8a of the slide mechanism 8 moves rearward, the length protruding rearward from the bearing portion 3b is the amount of movement of the electrode side support 3. It will be long.

  Then, when the tip 5e of the contact 5 comes into contact with the inspection point of the inspection object 50 with a predetermined contact pressure, the contact 5 is conducted to the inspection point. In this state, the control unit 31 supplies a predetermined signal to the inspection jig 1 or receives a potential detected by the inspection jig 1 to perform an electrical test on the inspection object 50.

  When the first support plate 34 moves away from the second support plate 35 from the state shown in FIG. 8 (that is, when the facing surface 2a moves away from the object 50). The bending of the intermediate part of the contact 5 is gradually eliminated, and the inspection jig 1 returns to the state shown in FIG.

  That is, with the compression coil spring 45 slightly bent, the front surface of the electrode-side support 3 abuts on the regulation plate 47, and the tip 5 e of the contact 5 is accommodated in the inspection guide hole 13. At this time, the rear end 5 f of the contact 5 is in contact with the contact surface 7 a of the electrode 7.

[Effect of this embodiment]
As described above, in this embodiment, the second end portion 5d of the contact 5 is formed shorter than the axial length of the small diameter hole 17b formed in the rearmost support plate 17 of the electrode side support 3. Yes.

  For this reason, since the rear end side of the contact 5 can be stably held by the electrode side support 3, each member (the electrode side support 3, the electrode body 6, the slide) is assembled when assembling the inspection jig. Positioning of the mechanism 8 or the like) is facilitated, and the rear end 5f can be brought into contact with the contact surface 7a of the electrode 7 with high accuracy.

  Further, at the time of inspection in which the rear surface of the electrode-side support 3 and the front surface of the electrode body 6 are close to each other, the rear end 5 d of the contact 5 is in contact with and pressed against the contact surface 7 a of the electrode 7. At this time, since the rear end side of the contact 5 is stably held by the electrode-side support 3 as described above, the position where the rear end 5d contacts the contact surface 7a does not change every time inspection is performed. Therefore, the contact resistance value of the contact 5 can be kept constant. For this reason, an accurate test result can be obtained.

  Furthermore, the operation of the inspection jig 1 and the inspection apparatus 30 during inspection is as described above. In actual use, for example, an apparatus for automatically supplying and unloading the inspection object 50 (both not shown). May be continuously inspected by the inspection apparatus 30. In this case, the inspection jig 1 continuously performs the above-described inspection operation. At this time, since the rear end side of the contact 5 is stably held by the electrode-side support 3 as described above, the rear end 5f and the contact surface 7a can be used even when the inspection is continuously performed. Therefore, the wear of the contact surface 7a due to the rear end 5f rubbing the contact surface 7a can be prevented.

  In addition, the biasing mechanism 14 causes the inspection-side support 2, the electrode-side support 3, and the column 4 to move away from the contact surface 7 a formed on the electrode 7 and the facing surface 2 a formed on the inspection-side support 2. Is energized.

  Therefore, when the inspection object 50 and the contact surface 2a are not in contact and no external force acts on the inspection jig 1, the urging force of the urging means 14 causes the inspection side support 2, the electrode side support 3 and The support 4 can be urged so that the tip 5e of the contact 5 does not protrude from the facing surface 2a (that is, the tip 5e of the contact 5 is disposed in the inspection guide hole 13).

  On the other hand, when the inspection object 50 is inspected, the contact surface 7a and the opposing surface 2a can be brought close to each other against the urging force of the urging means 14 by bringing the opposing surface 2a and the inspection object 50 into contact with each other. .

  Therefore, at the time of inspection, the tip 5e of the contact 5 inserted through the inspection guide hole 13 can be slightly protruded from the facing surface 2a and can be brought into contact with the inspection object 50 with a predetermined contact pressure.

  As described above, in this embodiment, when the inspection object 50 is inspected, the tip 5e of the contact 5 is in contact with the inspection point of the inspection object 50 in a state where the opposing surface 2a is in contact with the inspection object 50. Can be contacted with pressure.

  Therefore, the amount of displacement of the tip 5e of the contact 5 in a state where the tip 5e is in contact with the inspection point of the inspection object 50 is suppressed to about the gap between the first end 5c of the contact 5 and the inspection guide hole 13. Can do. In other words, the amount of displacement of the tip 5e of the contact 5 in contact with the inspection point can be reduced, and as a result, the occurrence of scratches on the surface of the inspection point of the inspection object 50 can be suppressed.

  In particular, in this embodiment, the inspection guide hole 13 has a guide direction toward the inspection object 50, the electrode guide hole 20 has a guide direction inclined with respect to the probe guide direction of the distal end side insertion hole 20, and the contact The first end portion 5 c of 5 is arranged at a position shifted to the side inclined to the guide direction of the electrode guide hole 20 with respect to the second end portion 5 d of the contact 5.

  Therefore, when the inspection object 50 is inspected, the intermediate portion of the contact 5 disposed in the gap between the inspection side support 2 and the electrode side support 3 is bent, and thus the state in contact with the inspection point of the inspection object 50 However, by adopting the configuration of this embodiment, the amount of displacement of the tip 5e of the contact 5 when in contact with the inspection point can be made minute.

  In this embodiment, the urging means 14 is attached to the electrode body 6 to urge the electrode side support 3. Therefore, when the opposing surface 2a comes into contact with the inspection object 50 (that is, at the time of inspection), the inspection-side support body 2, the electrode-side support body 3, and the connection body 4 that are fixed to each other are integrated into the electrode body 6. Accordingly, the tips 5e of the plurality of contacts 5 can be reliably brought into contact with the inspection point of the inspection object 50.

  That is, the inspection-side support body 2, the electrode-side support body 3 and the connection body 4 fixed to each other have relatively high rigidity and are not easily deformed even if they move relative to the electrode body 6. It is possible to make the protruding amount of the tip 5e of the contact 5 almost equal, and the tips 5e of the plurality of contacts 5 can be reliably brought into contact with the inspection point of the inspection object 50.

  In this embodiment, the urging means 14 has a contact member 43 whose tip abuts on the rear surface of the electrode-side support 3, and the tip of the cylindrical portion 43 a of the contact member 43 is connected to the rear surface of the electrode-side support 3. It is formed to have parallel planes. Therefore, the portion of the rear surface of the electrode side support 3 with which the abutting member 43 abuts does not wear and there is no change in the urging force by the urging means 14, so that the plurality of urging means 14 have a uniform urging force. Inspection can be carried out while keeping

  In this embodiment, the inspection jig 1 includes a regulating member 42 that abuts the front surface of the electrode side support 3 and regulates the movement of the electrode side support 3 toward the front.

  Therefore, in the front-rear direction, the inspection-side support body 2, the electrode-side support body 3, and the coupling body 4 can be positioned when no external force is applied to the inspection jig 1.

[Other embodiments]
The above-described embodiment is an example of a preferred embodiment of the present invention, but is not limited thereto, and various modifications can be made without departing from the scope of the present invention.

  In the embodiment described above, the contact surface 7a of the electrode 7 with which the rear end 5f of the contact 5 contacts is formed in a flat shape, but is not limited to this shape. For example, the contact surface 7a may be formed in a flat shape and then formed into a shape that is raised by plating or the like on the contact surface 7a.

  In the above-described embodiment, the contact 5 has a front end 5e and a rear end 5f that are formed in a spherical shape as shown in the drawing.

  In addition to this, for example, the front end 5e and the rear end 5f may be formed in a conical shape having an inclined surface toward the front end, and are formed in a planar shape perpendicular to the major axis direction of the contactor 5. May be.

  In the embodiment described above, the contact 5 is inserted through the inspection-side support 2 and the electrode-side support 3 so that the intermediate portion between the inspection-side support 2 and the electrode-side support 3 is inclined. The contact 5 may be inserted into the inspection side support 2 and the electrode side support 3 so that the intermediate portion does not tilt.

  In the embodiment described above, the urging means 14 is formed such that the tip of the contact member 43a has a plane parallel to the rear surface of the electrode side support 3.

  In addition to this, for example, the tip shape of the contact member 43a may be formed in a shape that is slightly rounder than the flat surface.

  In the embodiment described above, the urging means 14 generates the urging force by the compression coil spring 45 as the urging member.

  In addition, for example, the urging means 14 may generate an urging force using another spring member such as a tension coil spring or a leaf spring, or an elastic member such as rubber as an urging member.

  In the embodiment described above, the inspection jig 1 includes the regulating member 42 that abuts the front surface of the electrode side support 3 and regulates the forward movement of the electrode side support 3 and the like.

  In addition to this, for example, the inspection jig 1 may include a regulating member that abuts against the opposing surface 2 a of the inspection-side support 2 to restrict the movement of the inspection-side support 2 toward the tip.

  Moreover, the inspection jig 1 does not have to include a regulating member that regulates the forward movement of the electrode side support 3 or the like. In this case, it is preferable that a retaining member for preventing the electrode-side support 3 or the like from coming off is provided.

  In the embodiment described above, the inspection-side support 2 is configured by the three support plates 10 to 12.

  In addition to this, for example, the inspection-side support 2 may be composed of two or less or four or more support plates.

  Similarly, in the embodiment described above, the electrode side support 3 is configured by the three support plates 15 to 17, but the electrode side support 3 is configured by two or less or four or more support plates. good.

  In the embodiment described above, the shaft portion 8a of the guide mechanism extending backward from the support plate 17 of the electrode side support 3 is fixed to the support plate 17, but the shaft portion 8a can be detached from the support plate 17. You may comprise.

  Next, based on FIGS. 10A, 10B, 10C, 11 and 12, an inspection jig according to another embodiment will be described.

  In the embodiment shown in FIG. 1 to FIG. 9, the front end portion of the shaft portion 8 a of the slide mechanism 8 is fixed to the support plate 17 of the electrode side support 3, and the cylindrical portion 43 a of the biasing means 14 is the electrode. The rear surface of the support plate 17 of the electrode side support 3 is urged toward the inspection side support 2 through the through hole of the body 6. 10A, 10B, 10C, 11 and 12, as will be described in detail later, the distal end of the shaft portion 8a of the slide mechanism 8 is a part of the movable plate 22b of the support plate 22 of the electrode body 6. The cylindrical portion 43a of the urging means 14 urges the rear surface of the movable plate 22b of the support plate 22 of the electrode body 6 toward the inspection-side support 2.

  FIG. 10A is a plan view of the electrode body 6 according to the second embodiment, and FIGS. 10B and 10C are front views of the electrode body 6 shown in FIG. 10A. Similarly to the first embodiment, in the second embodiment, the electrode body 6 includes support plates 22 and 23 and a support member 25. However, in the second embodiment, the one corresponding to the support plate 22 is constituted by a central electrode plate 22a to which the contact surface 7a of the electrode 7 is fixed and a movable plate 22b disposed around the center electrode plate 22a. The electrode plate 22 a is fixed to the support plate 23, but the movable plate 22 b is urged away from the support plate 23. That is, as shown in FIGS. 10B and 10C, the movable plate 22b can move in the front-rear direction of the inspection jig.

  Further, as shown in FIG. 10A, small protrusions 52a are provided near the four corners on the front surface of the movable plate 22b, and two small protrusions in the right vertical direction toward FIG. 10A. Large protrusions 52b are provided therebetween. These protrusions enter a recess (not shown) formed in the support plate 17 with the movable plate 22b in contact with the support plate 17 to position the movable plate 22b and the support plate 17.

  As shown in FIG. 10A, four urging means 26 are provided near the four corners on the electrode plate 22a. Although not shown, these urging means are provided with a cylindrical portion and a columnar portion, like the urging means 14, and the cylindrical portion is fixed in the support member 25, and the columnar portion is the support plate 17. Abuts against the rear surface. Since the urging means 43a applies an urging force to the support plate 17 together with the movable plate 22b, the urging force thereby does not act on the support plate 17 facing the region of the electrode plate 22a. As a result, the support plate may be warped only by the urging force of the urging means 43a. For this reason, the urging means 26 applies an urging force to the support plate 17 facing the region of the electrode plate 22a where the electrodes are provided, whereby a uniform urging force is distributed relatively to the support plate. I was able to add it.

  FIG. 11 is a partially enlarged cross-sectional view of an inspection jig including the electrode body according to the second embodiment, and shows a state of the inspection jig during non-inspection. As shown in this figure, the movable plate 22 b is held at a position away from the support plate 23.

  As shown in FIG. 11, the bearing portion 8 b of the slide mechanism 8 is fixed by being fitted into through holes provided in the support plate 23 and the support member 25 of the electrode body 6, and the distal end portion of the shaft portion 8 a of the slide mechanism 8 is fixed. The through hole 22bh formed in the movable plate 22b is fitted and fixed. Thereby, the movable plate 22b can be translated along the axial direction of the shaft portion 8a.

  Further, the cylindrical member 44 of the urging means 14 is fixed by being fitted into a through hole provided in the support member 25, and the tip end of the cylindrical portion 43 a of the urging means 14 is fixed to the support plate 23. The front end surface of the through hole penetrates the through hole and abuts against the rear surface of the movable plate 22b to urge the movable plate 22b forward.

  As shown in FIG. 10A, the shaft portion 8a of the slide mechanism 8 is fixed to the through hole 22bh of the movable plate 22b, and the cylindrical portion 43a of the urging means 14 is positioned at a position indicated by reference numeral 43a on the rear surface of the movable plate 22b. The tip part abuts. That is, the slide mechanism 8 and the biasing means 14 are arranged so as to act on the movable plate 22b. These positions are the same as the positions of the shaft portion 8a of the slide mechanism 8 penetrating the support plate 22 of the electrode body 6 and the cylindrical portion 43a of the urging means 14 in the first embodiment.

  Referring to FIG. 11 again, in the state shown in this figure, the distal end surface of the cylindrical portion 43a of the urging means 14 abuts on the rear surface of the support plate 22b of the electrode body 6, and the movable plate 22b and the electrode side support 3 are brought into contact with each other. Is urged toward the regulating plate 47. A slight gap is formed between the movable plate 22 b and the support plate 23.

  Next, when the inspection jig 1 (FIG. 1) is moved toward the inspection object 50 during inspection and the opposing surface 2 a of the inspection-side support 2 comes into contact with the inspection object 50, the electrode-side support 3. Is pushed back and leaves the restricting plate 47. Along with this, the movable plate 22b pushes down the cylindrical portion 43a into the cylindrical portion 44 of the support member 25 against the biasing force of the compression coil spring 45 of the biasing means 14, and at the same time, the shaft portion 8a of the slide mechanism 8 The movable plate 22b descends along the axial direction. As shown in FIG. 12, when the movable plate 22b stops, there is a gap between the movable plate 22b and the support plate. Thereby, it is possible to prevent the descent from stopping due to the movable plate 22b coming into contact with the support plate 23 before the contact between the rear end portion of the contact and the electrode is ensured. Further, as shown in FIG. 1, the surface of the support plate 17 of the electrode side support 3 has the same shape as the combined surface of the movable plate 22 b and the electrode plate 22 a, so the movable plate 22 b and the electrode are supported by the support plate 17. The entire surface of the plate 22a is pushed. That is, when the movable plate 22b stops, the front surface of the movable plate 22b and the front surface of the electrode plate 22a are arranged on the same plane. This can also ensure that the contact between the rear end of the contact and the electrode is reliable. In this case, a gap is formed between the rear surface of the regulating plate 47 and the front surface of the support plate 15 of the electrode side support 3.

  The action of the probe during the inspection is the same as in the first embodiment.

  When exchanging the contacts, the jig body 40 is removed from the inspection jig 1, and the contacts are removed and attached from the rear surface of the support plate 17 of the electrode side support 3. At that time, in the first embodiment, the shaft portions 8a of the four slide mechanisms 8 are fixed to the rear surface of the support plate 17 of the electrode-side support 3, and the four shaft portions 8a are It surrounds the four corners of the portion where the electrode guide hole 20 to which the second end 5d of the contact is attached. In particular, with the recent miniaturization of the inspection object, the jig main body 40 of the inspection jig is downsized, and as a result, the interval between the four shaft portions 8a fixed on the support plate 17 is reduced. In some cases, it becomes difficult to access the contacts. Further, with the progress of miniaturization, a thin support plate used for the jig body 40 is used. For this reason, if it is such a thin support plate, it has the problem that a process becomes difficult or the intensity | strength of support plate itself falls by providing a some hole.

  However, in the second embodiment, the shaft portion 8a of the slide mechanism 8 is fixed to the movable plate 22b and is not fixed to the support plate 17 of the electrode side support 3, so that the shaft portion 8a hinders work. In addition, since the strength of the support 17 itself does not decrease and bend, the maintenance such as replacement of the contacts can be easily performed even with the downsized jig body 40. Can do.

  In said 2nd embodiment, the electrode body 6 was comprised with the electrode plate 22a and the movable plate 22b. Instead, the electrode body 6 is an integral one as in the case of the first embodiment, and is separately moved between the support plate 17 of the electrode side support body 3 and the support plate 22 of the electrode body 6. An arbitrary rectangular plate is interposed, and the tip of the shaft portion 8a of the slide mechanism 8 is fixed to the plate, and the tip surface of the cylindrical portion 43a of the urging means 14 is brought into contact with the rear surface of the plate to attach the plate. You may comprise so that it may urge to the support plate 17 of the electrode side support body 3. FIG. However, the plate needs to have a configuration in which the end of the contact protruding from the electrode-side support 3 can come into contact with the electrode of the electrode body 6. For example, a notch may be formed in the portion of the plate corresponding to such a contact position, or a conductive structure may be provided in that portion. Also in this embodiment, as in the second embodiment, the shaft portion 8a of the slide mechanism 8 is fixed to the movable plate 22b and not fixed to the support plate 17 of the electrode side support 3, so that the electrode side Maintenance such as replacement of the contacts in the region of the support 3 where the contacts are provided can be easily performed.

  The movable plate can urge the electrode-side support 3 toward the inspection-side support 2 at the time of non-inspection, and can move backward while holding the electrode-side support 3 and the inspection-side support 2 in parallel at the time of inspection. Any member may be used, but a member for moving the electrode side support 3 is not fixed around a region where the rear end portion of the contact of the electrode side support 3 is arranged.

  As mentioned above, although the inspection jig concerning some embodiments concerning the present invention was explained, the present invention is not restricted to those embodiments, and addition, deletion, modification, etc. which those skilled in the art can easily make It should be understood that the present invention is included in the present invention, and that the technical scope of the present invention is defined by the description of the appended claims.

DESCRIPTION OF SYMBOLS 1 Inspection jig 2 Inspection side support body 2a Opposite surface 3 Electrode side support body 3a Insertion hole 4 Support | pillar 5 Contact 5a Conductor part 5b Insulation part 5c First end part 5d Second end part 5e Front end 5f Rear end 5g Front end edge 5h Rear Edge 7 Electrode 7a Contact surface 8 Slide mechanism 8a Shaft part 13 Inspection guide hole 14 Biasing means 20 Electrode guide hole 22a Electrode plate 22b Movable plate 30 Inspection apparatus 31 Control part (electrical inspection means)
35 Second support plate (fixing means)
36 Moving mechanism (moving means)
42 regulating member 43 abutting member 43a cylindrical part 45 compression coil spring (biasing member)
50 Inspection target

Claims (5)

An inspection jig for electrically connecting an inspection point provided on the inspection substrate and an inspection device for inspecting the inspection substrate in order to inspect the wiring provided on the inspection substrate,
An electrode body including a plurality of electrodes electrically connected to the inspection apparatus, the electrode body including a support plate provided with the electrodes and a support member holding a wiring connected to the electrodes;
A flexible and conductive contact whose one end is in conductive contact with the inspection point and whose other end is in conductive contact with the electrode;
An inspection-side support having an inspection guide hole for guiding one end of the contact to the inspection point;
An electrode side support having an electrode guide hole for guiding the other end of the contact to the electrode;
The inspection side support body and the electrode side support body have a support column arranged and held at a predetermined interval ,
The support member of the previous SL electrode body, at the time of non-test has a biasing means for maintaining the predetermined distance is separated the electrode side support member from the support member of the electrode body,
The contact is
A rod-shaped conductive conductor portion having a first end portion that contacts the inspection point and a second end portion that contacts the electrode and has flexibility;
Having an insulating part that is insulated on the outer periphery of the conductor part excluding the first end part and the second end part;
The length of the second end is formed shorter than the depth of the electrode guide hole that contacts the electrode body,
Furthermore, biasing the support plate of the electrode body consists of a said electrode plate on which electrodes are fixed and a movable plate, said biasing means, said electrode-side support to the test-side support side with the movable plate An inspection jig characterized by having an urging portion to perform. The electrode-side support has a shaft portion extending toward the electrode body,
The inspection jig according to claim 1 , wherein the support member of the electrode body includes a bearing portion that slidably inserts and holds the shaft portion. The biasing means is
A contact member having a contact surface that contacts the surface of the movable plate ;
The inspection jig according to claim 1, further comprising an urging portion that urges the contact member against the electrode-side support.   The inspection jig according to claim 1, wherein a pressing force of the urging means provided in the inspection jig is larger than a pressing force of the contact provided in the inspection jig.   Furthermore, the said movable plate is arrange | positioned around the said electrode plate, The inspection jig of Claim 1 characterized by the above-mentioned.

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