.201245726 六、發明說明： 【發明所屬之技術領域】 本發明是關於一種檢查治具，可使電連接事先被設定 於複數配線所形成的基板等之被檢查物的檢查對象部上的 檢查點與檢查裝置。 【先前技術】 檢查治具，是經由接點，於具有被檢查物的檢查對象 部’將電力（電信號等）從檢查裝置供應於預定檢査位置 ’而且藉由從檢査對象部檢測出電信號，被使用於爲了實 施檢查對象部的電特性之檢測，動作試驗等。 做爲被檢查物，例如，相當於印刷配線基板、可撓性 基板、陶瓷多層配線基板、液晶顯示器或電漿顯示器用的 電極板、及半導體封裝用的封裝基板或是薄膜托架等各種 的基板、或半導體晶圓或半導體晶片或CSP( Chip size package )等的半導體裝置。 在本發明專利說明書中’總稱此些上述的被檢查物爲 「被檢查物」，而被設定於被檢查物的檢查對象部稱爲「 檢查點j 。 例如，被檢查物爲基板，在被裝載於基板的1C等的 半導體電路或是電阻器等之電氣、電子零件時，被形成於 基板的對象部，成爲配線或電極。在這時候，對象部之配 線，是爲了保證可將電信號正確地傳輸至此些，測定被形 成於安裝電氣、電子零件之前的印刷配線基板、液晶面板 -5- 3 201245726 或電漿顯示器面板的配線上之預定檢查點間的電阻値等的 電性特性，來判斷其配線的良否。 具體而言，判斷其配線的良否，是於各檢査點，抵接 電流供應用端子及/或電壓測定用的接點前端，並將測定 用電流由其接點之電流供應用端子供應至檢查點，而且測 定抵接於檢查點之接點的前端間之配線的電壓，且進行藉 由由此些之供應電流與所測定的電壓來算出預定之檢查點 間的配線之電阻値。 還有，在使用基板檢査裝置進行檢查用基板的檢查之 際，來移動治具移動手段而使得基板檢查治具的檢査用接 點（接觸銷.）抵接於檢查用基板的接觸部分，藉此進行預 定之檢查，當檢査終了時，則進行著利用治具移動手段來 移動檢查治具而由檢查用基板遠離的控制。 在此，例如揭示於專利文獻1的檢查治具，是具備： 前端側支承體，及與其前端側支承體經由預定間隔所配置 的後端側支承體，及連結前端支承體與後段側支承體的連 結體，在前端支承體有前端側插通孔形成於正交於與檢查 對象對向的對向面之方向，在後端支承體有後端側插通孔 形成於對於前端側插通孔的形成方向呈傾斜的方向。還有 ，後端側插通孔’是被插通於該後端側插通孔的探針之前 端側朝向前端側插通孔的方式對於前端側插通孔形成傾斜 〇 更且，形成有探針之後端所接觸之電極的電極側支承 體，具備經由預定間隙配置於與保持探針的後端側支承體 -6- 201245726 之間，且彈推後端側支承體的彈推機構。該彈推機構，是 前端被形成圓錐狀，且藉由插入於設在後端側支承體的彈 推機構所抵接之部分的插入孔，也進行被支承於電極側支 承體的探針之後端與電極的定位。 在被揭示於專利文獻1的檢查治具中，爲了抑制探針 之前端以接觸於檢查點之表面的狀態下藉由進行摩擦移動 發生於檢查點表面的打痕，設有僅在檢查時能突出探針之 前端的彈推機構。 然而，在表示於專利文獻1的檢査治具中，探針之後 端部分的長度，是形成比後端側支承體的最後側之小徑孔 的軸方向的長度還要長。因如此地所形成，因此，探針之 後端，是朝向與探針之後端的後端側支承體之後方表面平 行之面方向偏離》 所以，每當探針之前端抵接於被檢査物的檢査點（每 當進行檢查）時，則探針之後端與電極所接觸之狀態不穩 定，而在每當進行檢查時，有探針與電極之接觸電阻產生 大變化的問題。因具此種問題，因此，每當檢查時，則成 爲接觸電阻値會變化，而無法實施正確的檢查。 更且，若重複檢查時，則探針之後端成爲摩擦電極表 面，使得電極表面會摩耗，而有無法得到正確之檢查結果 的耐久性的問題。 又，在專利文獻1之揭示技術中，在彈推機構具有定 位之作用之故，因而藉由使彈推機構之前端或插入孔抵接 而成爲摩擦β這時候，會產生前端比初期狀態還要深地進 r*· 二‘ 201245726 入插入孔之情形之故，因而若前端或插入孔有摩耗，則成 爲彈推力有變化。因彈推機構與插入孔是設置複數，且因 應於摩耗之進行程度而在此些之間並不一定之故，因而視 部位使得後端側支承體彈推電極支承體的力量上會產生不 相同。所以，當對向面接近於接觸面之際，抗拒藉由部位 有不相同的彈推力，成爲對向面與接觸面相接近而把探針 之前端接觸於檢查點之情形。 專利文獻1 :日本特開2009-0475 1 2號公報 【發明內容】 本發明，是鑑於此些事項而創作者，提供一種檢查治 具，可使接點之後端與電極之定位成爲容易地進行，並可 進行正確的檢查。 又，本發明是提供一種檢查治具，可使更換接點等之 維修成爲容易。 如申請專利範圍第1項所述的發明，提供一種檢查治 具，是爲了進行設於檢查基板的配線之檢查，用來電連接 設於該檢查基板的檢查點與檢查該檢查基板的檢査裝置的 檢查治具，其特徵爲：具有：接點、及檢查側支承體、及 電極側支承體、及支柱、以及電極體；該接點，是一端與 上述檢查點導通接觸，而且另一端與上述檢查裝置電連接 的電極部導通接觸之具可撓性且導電性者；該檢查側支承 體’是具有將上述接點之一端引導至上述檢查點的檢查引 導孔；該電極側支承體，是具有將上述接點之另一端引導 -8- 201245726 至上述電極的電極引導孔；該支柱，是 置上述檢查側支承體與上述電極側支承 電極體，是具有：配置複數上述電極， 使上述電極側支承體隔開預定距離並予 ，上述接點是具有：具備與上述檢查點 及與上述電極部接觸的第二端部，而且 的導電性的導體部，及絕緣被膜於除了 二端部的上述導體部之外周的絕緣部， 之長度，是形成比抵接於上述電極體的 深度還要短。 如申請專利範圍第2項所述的發明 利範圍第1項所述的檢查治具，其中， ，是具有朝向上述電極體延伸的軸部， 有可滑動地插入保持上述軸部的軸承部 如申請專利範圍第3項所述的發明 利範圍第1項或第2項所述的檢查治具 手段是具有：具備抵接於上述電極側支 面的抵接構件，及將上述抵接構件彈推 體的彈推部。 如申請專利範圍第4項所述的發明 利範圍第1項所述的檢查治具，其中， 的上述彈推手段之推壓力，是比設於該 點之推壓力還要大。 如申請專利範圍第5項所述的發明 隔著預定間隔來配 體並予以保持；該 而且在非檢查時， 以保持的彈推手段 接觸的第一端部， 具有可撓性之棒狀 上述第一端部與第 又，上述第二端部 上述電極引導孔之 ，是提供如申請專 上述電極側支承體 上述電極體，是具 〇 ，是提供如申請專 ，其中，上述彈推 承體之表面的抵接 於上述電極側支承 ，是提供如申請專 設於上述檢查治具 檢查治具的上述接 ，是提供如申請專 -9- 201245726 利範圍第1項所述的檢查治具，其中，更且，上述可動板 配置於上述電極板之周圍。 如申請專利範圍第1項所述的發明，是接點之第二端 部之長度，爲形成比抵接於電極體的電極引導孔之深度還 要短之故，因而使得接點之另一端成爲定位於電極引導孔 之內部，可將接點之後端穩定地抵接於電極，並可穩定地 接觸接點與電極》 如申請專利範圍第2項所述的發明，是藉由於電極側 支承體設置軸部，並於電極體設置軸承部，可正確地接觸 電極側支承體與電極體，而不會發生每當檢查所導致的偏 位。 如申請專利範圍第3項所述的發明，是彈推手段是具 有：具備抵接於電極側支承體之表面的抵接面的抵接構件 ，及將抵接構件彈推於電極側支承體的彈推部所形成，藉 此，可提供一種不會使得彈推手段與電極側支承體摩耗， 且高耐久性的檢查治具。 如申請專利範圍第4項所述的發明，是設於檢査治具 的彈推手段之推壓力，比設於該檢查治具的接點之推壓力 還要大之故，因而可使接點確實地接觸於檢査點與電極之 雙方。 如申請專利範圍第5項所述的發明，更且，於電極側 支承體與電極體之間具有可動板，而彈推手段具有：將電 極側支承體與可動板一起朝向檢查側支承體側彈推的彈推 部之故，因而可容易地進行維修來自電極側支承體的檢查 -10- 201245726 治具。 如申請專利範圍第6項所述的發明，更且，於電極體 之周圍具有可動板’彈推手段具有：將電極側支承體與可 動板一起朝向檢查側支承體側彈推的彈推部之故’因而可 容易地進行維修來自電極側支承體的檢查治具’而且成爲 可將接點之後端部與電極之接觸做成確實者。 【實施方式】 說明實施本發明所用的最好形態。 以下，依據圖式來說明本發明的實施形態。 第1圖是本發明的實施形態的檢査治具1的槪略側面 圖。但是，爲了瞭解本發明的構造，將局部做成斷面圖。 第2圖是表示於第1圖的檢查治具1的俯視圖。第3圖是 表示於第1圖的檢査側支承體2的斷面構造的槪略部分斷 面圖。第4圖是表示於第1圖的電極側支承體3的斷面構 造的槪略部分斷面俯視圖，第4(a)圖是表示非檢查時之 狀態，第4 ( b )圖是表示檢查時之狀態。第5圖是電極側 支承體3的仰視圖。第6圖是電極體6的俯視圖。第7圖 是表示朝著第6圖之A-A線方向所觀看的表示非檢查時的 檢查治具1之狀態，表示擴大第1圖的一部分的槪略斷面 圖。第8圖是對於表示於第7圖之狀態，表示檢查時的檢 查治具之狀態，並擴大局部的槪略斷面圖。在該圖中，斷 面是也沿著第6圖之A-A線所觀看的方向。第9圖是裝載 表示於第1圖之檢查治具的檢查裝置的槪略構造圖。還有 -11 - 201245726 ，接點之一端在第3圖被表示，而接點之後端在第4圖被 表示。第7圖與第8圖，是表示非檢查時與檢查時，每當 進行檢查時，使得此些狀態有所變移。 在以下的說明中，在第1圖、第3圖、第4圖、第7 圖至第9圖中，將圖式之上及下分別說明做爲「前面、先 方或前方」及「後面或後方」。 [檢査治具之槪要] 本實施形態的檢查治具1，是被裝載於進行印刷配線 基板或半導體積體電路等的被檢查物50之電檢查的檢查 裝置30所使用（參照第9圖）。 如第1圖或是第2圖所示地，該檢查治具1，是具備 :治具本體部40、及底板4 1、以及限制構件42 :該底板 4 1 ’是載置有治具本體部40，該限制構件42，是限制治 具本體部40對前方之動作。 如第1圖所示地，該治具本體部40，是具備：檢查側 支承體2，及電極側支承體3 ;該電極側支承體3，是經由 預定間隔來配置於檢查側支承體2之後方。 檢查側支承體2,是具有將下述的接點5之一端（前 端5e)引導至檢查點的檢查引導孔13 (參照第3圖）。 電極側支承體3，是具有將接點5之另一端（後端5f)引 導至電極7的電極引導孔20 [參照第4(a)圖、第4(b) 圖]。 檢查側支承體2及電極側支承體3，是分別形成扁平 -12- 201245726 端部5d。還有，爲了說明之方便上，將抵接於第一端部 5c的檢查點之部位做爲前端5e，而將抵接於第二端部5d 的電極之部位做爲後端5f。 第一端部5c的前端5e或是第二端部5d的後端5f， 是如圖所示地也可形成半球面狀。 接點5之第一端部5c，是在檢查時，被插入支承在檢 查側支承體2的檢查引導孔13內（參照第3圖）。第一 端部5c的前端5e，是成爲導通接觸於被形成於被檢查物 5 0上的檢查點。 該第一端部5c的長度，是形成比該檢査引導孔13之 長度還要長。此乃爲了在檢查時利用檢查點與電極使得接 點5被夾持而做成彎曲。在第3圖中，表示著非檢查時的 檢查治具，接點5之第一端部5c是被收容於檢查引導孔 13內，而第一端部5c的前端5e也成爲配置於檢查引導孔 1 3內。 接點5之第二端部5d，是利用下述的電極側支承體3 的電極引導孔20被引導至電極7 (接觸面7a)(參照第4 圖）。第二端部5d之後端5f，是成爲導通接觸於電極7 〇 第一端部5d的長度，是詳細如下所述，惟形成比構 成該電極引導孔20的小徑孔17b的軸方向長度還要短。 檢查側支承體2，是從被檢查物5所配置的一方（前 方）依次地積層有複數（在本形態爲3片）的支承板10、 11、12所構成。此些之支承板10〜12是藉由螺栓等的固 -14- 201245726 之長方體狀（矩形之板狀）。檢查側支承體2及電極側 承體3，是配置成此些之表面互相地平行。 具體而言，被配置於檢查側支承體2之四角落的4 支柱4,檢查側支承體2及電極側支承體3，是被連結 定·.（參照第1圖、第2圖在本實施形態中，支柱4 連結檢查側支承體2及電極側支承體3 ^ 還有，在檢查側支承體2及電極側支承體3，插通 做爲接觸於被檢查物5G的檢查點之接點的複數接點5» 電極體6，是被安裝於電極側支承體3之後方（參 第1圖）。如第1圖所示地，電極體6，是固定有導電 觸於接點5(具體而言，接點5之後端5f)的複數電極 。還有，在電極體6是安裝有：將電極側支承體3朝向 方彈推的彈推手段14，及在檢查被檢查物50時限制電 側支承體3之移動的滑動機構8。 接點5是以鎢、高速鋼（SKH)、鈹鋼（Be_Cu) 之金屬的其他導電體所形成，而且形成具有可屈曲的彈 (可撓性）的棒狀。 如第3圖及第4圖所示地，本形態的接點5，是具 :以如上所述的導電體所構成的導體部5a，及覆蓋該導 部5a之外周面的絕緣部5b。絕緣部5b，是由合成樹脂 的絕緣體所形成。絕緣部5b，是可使用於導體部5a之 面藉由施以絕緣塗裝所形成的絕緣保護膜。在接點5之 端’未形成有絕緣部5b，而在接點5之一端（前端）形 有第一端部5c’且在接點5之另一端（後端）形成有第 支 支 固 爲 有 照 接 7 前 極 等 性 備 體 等 表 兩 成 -13- 201245726 定手段被互相地固定。 還有，如第3圖所示地，在各支承板10、11、12各 別形成有貫通孔l〇a、11a、12a。藉由此些之貫通孔10a 、11a、12a配置成互相地連結，構成有接點5之第一端部 5c被插通的一個檢查引導孔13。 更且，支承板10的前方表面，成爲對向於被檢查物 50的對向面2a。 檢查引導孔13，是具有朝向對於被檢查物50之前方 的接點5之引導方向。具體而言，檢查引導孔13，是成爲 具有正交於對向面2a的接點5之引導方向。因此，由對 於被檢查物50的檢查點大約直角方向可接觸接點5之前 端5e。 還有，檢查引導孔13,是僅形成檢查治具1所具有的 接點5之數量。 三個貫通孔l〇a、1 la、12a，是形成同心狀。在第3 圖中，貫通孔1 〇 a，是由小徑孔1 〇 b與比小徑孔1 〇 b還要 大直徑的大徑孔1 0 c所構成，而貫通孔1 2 a，是由小徑孔 1 2 b與比小徑孔1 2 b還要大直徑的大徑孔1 2 c所構成。 還有，小徑孔1 〇b與小徑孔12b，是以比導體部5 a之 外直徑還要稍大，且比絕緣部5b之部分的接點5之外直 徑還要稍小的內直徑所形成。 還有，貫通孔1 1 a之內直徑’是成爲比小徑孔丨〇b之 內直徑及小徑孔1 2b之內直徑還要大。 如第3圖所示地，被形成於接點5之第一端部5 c的 -15- 201245726 導體部5a與絕緣部5b之境界的前端緣5g’是配置於比檢 查引導孔1 3之小徑孔1 2b還要後方。 還有，如上所述地，小徑孔1 2b，是以比絕緣部5b之 部分的接點5之外直徑還要稍小的內直徑所形成。所以’ 絕緣部5b的前端緣5g，是成爲抵接於小徑孔12b的開口 緣12d。亦即，前端緣5g與開口緣12d，是成爲防止接點 5脫落至檢查對象側所用的防脫部。 電極側支承體3，是從檢查側支承體2的前方依次地 積層有複數（在本形態爲3片）的支承板15、16、17所 構成。此些之支承板15〜17是藉由螺栓等的固定手段互 相地被固定。 如第4(a)圖或是第4(b)圖所示地，在各支承板 15〜17各別形成有貫通孔15a、16a、17a。藉由此些之貫 通孔15a〜17a配置成互相地連結，構成有接點5之第二 端部5d被插通的一個電極引導孔20。該電極引導孔20， 是僅形成檢查治具1所具有的接點5之數量。 電極引導孔20 ’是被形成於對於被形成於檢查引導孔 1 3之引導方向（亦即，對向面2a的正交方向）的傾斜之 引導方向。亦即’三個貫通孔15a〜17a，是以各該中心稍 微偏離的狀態下所形成，全體電極引導孔20被形成於對 於對向面2a之正交方向傾斜的方向α 例如，如4 ( a )圖所示地，以貫通孔1 5a〜丨7a之順 序在其中心朝向圖示右方向稍微偏離的狀態下，形成有三 個貫通孔15a〜17a。亦即，引導接點5之後端側的引導方 -16- 201245726 向，是成爲引導至對於與電極側支承體3之表面正交的 線傾斜之方向。 貫通孔15a，是由小徑孔15b與比小徑孔15b還要 直徑的大徑孔1 5c所構成。同樣地，貫通孔1 6a，是由 徑孔1 6b與大徑孔1 6b所構成，貫通孔1 7a，是由小徑 17b與大徑孔17c所構成。 小徑孔15b、16b、17b，是以比絕緣部5b所形成之 分的接點5之外直徑還要稍大的內直徑所形成。 還有，如上所述地，小徑孔1 7b，是以比絕緣部5b 部分的接點5之外直徑還要稍大的內直徑所形成，絕緣 5b之後端緣5h，是成爲可插入至小徑孔17b之內部。 點5是對於與電極側支承體3之表面正交的法線傾斜之 向所配置。所以，接點5是如第4 ( b )圖所示地，成爲 於小徑孔1 7b也傾斜地配置。又，該小徑孔1 7b，是形 軸方向對於電極側支承體3之表面正交。 形成於接點5之第二端部5d的導體部5a與絕緣部 的境界的後端緣5h，是如第4(b)圖的檢查時的檢查 具之狀態所示地，比電極引導孔20的大徑孔17c還位 後方。 這時候，可移動至平行於後端5f的電極側支承體 的後方表面之方向的移動量，是接點5成爲被限制在小 孔1 7b之內部移動的範圍。因此，若在接點5傾斜地被 入的情形（由非檢查時移行至檢查時的情形或是由檢查 移行至非檢查時的情形），則可將第二端部5d的後端 法 大 小 孔 部 之 部 接 方 對 成 5b 治 於 徑 插 時 5f -17- 201245726 的可移動量成爲極少，且穩定地與電極成爲接觸。 藉此，在接觸下述的電極7的接觸面7a與後端5f時 ，成爲可進行接觸面7a與後端5f的精密定位。特別是， 在實際之檢查中，因接點5及電極7是通常設置數千支， 因此可使接觸面7a與後端5f之定位成爲容易地進行，成 爲對於縮短作業時間上有很大貢獻。 如第5圖所示地，在電極側支承體3的底面（後方表 面），形成有圓形狀之插入孔3a。具體而言，貫通支承板 17的方式，且支承板17的四角落之各個近旁形成有插入 孔3a。還有，如第7圖所不地，在插入孔3a，插入有構 成滑動機構8的下述之軸部8a並加以固定。. 在各接點5中，被插通於檢查引導孔13的第一端部 5c比被插通於電極引導孔20的第二端部5d被配置於偏離 電極引導孔2 0的引導方向之傾斜方向的位置。亦即，如 第5圖所示地，插通有接點5之第一端部5c的檢查引導 孔13之後端側的開口位置（亦即，支承板12之貫通孔 12a的開口位置），是由插通有其接點5之第二端部5d的 電極引導孔20來觀看，被配置於電極引導孔20之引導方 向的傾斜側。 如第1圖所示地，電極體6是積層有：複數電極7所 埋設之矩形的支承板22、23，及保持被導電連接於電極7 的配線24之大約塊狀的支承構件25所構成。本形態的電 極體6是做爲全體被形成大約長方體狀，後端面爲經由固 定板48被固定於底板41之前方表面。還有，配線24是 -18- 201245726 被連接於下述的檢查裝置30的控制部31。 如第4圖所示地，電極7之前方表面，是成爲接點5 之後端5f所接觸的接觸面7a。還有，接點5之後端5f， 是如上所述地形成球面狀。因此，即使沿著具有傾斜之引 導方向的電極引導孔20使得接點5的第二端部5d傾斜， 後端5f與接觸面7a是也成爲合適的導電連接狀態。 在電極體6，安裝有滑動機構8，也安裝有彈推手段 14。具體而言’如第6圖所示地，於電極體6之四角落的 各該近旁安裝有滑動機構8及彈推手段14。在本形態中， 彈推手段14被安裝於比滑動機構8位於電極體6之四角 落還位於遠的位置。 滑動機構8是具備：由電極側支承體3之後方表面所 突出的棒狀軸部8a，與被固定於電極體6且軸部8a被插 入之圓筒形狀的軸承部8b(參照第1圖）。 軸部8a’是一端被固定於電極側支承體3的支承板 17之後方方向，且另一端是被插通於下述的軸承部8b。 這時候’軸部8a是軸方向對於支承板17的後方表面成爲 直角。 軸承部8b’是被嵌合固定於設在電極體6的貫通孔（ 未予圖示）。該軸承部8b，是例如將排列於軸方向的複數 滾珠軸承具備於內部複數條的線性襯套等的直動軸承，成 爲被插入有因應於軸承之內側形狀使得斷面之形狀或直徑 被合適地調整的軸部8a。 藉由軸部8a被插通於軸承部8b，軸部8a是成爲精度 201245726 優異地（對於朝向軸方向直角的方向的移動量少）朝 方向可進行直線運動（滑動）。 滑動機構8,是設置成爲了高精度地進行電極側 體3對於電極體6的前後方向之移動，在電極側支承 之後方表面與電極體6之前方表面相抵接之際，做成 度優異地抵接被插通於電極引導孔20內的接點5之 5f，與被形成於電極體6的電極7之接觸面7a。 因此，當安裝滑動機構8之際，使得後端5d與 面7a合適地接觸的方式進行安裝滑動機構8» 如上所述地在本形態中，滑動機構8安裝於電極 ，做成可使電極側支承體3與電極體6朝向前後方向 優異地移動》因此，藉由外力朝向前方移動電極側支 3時’則可精度優異地接觸電極7之接觸面7a與被插 電極側支承體3的接點5之後端5 f。 彈推手段14是具備··抵接構件43、及筒構件44 彈推部（壓縮螺旋彈簧45)、以及止動輪46;該抵 件43’是由電極體6之前方表面突出並抵接於電極側 體3 ;該筒構件44，是收納有抵接構件43之後端側 彈推部（壓縮螺旋彈簧45)，是對於筒構件44朝向 彈推抵接構件43;該止動輪46，是將抵接構件43安 筒構件44所用的E型止動輪（參照第丨圖）。 筒構件44 ’是形成前端側有開口的有底圓筒狀， 固定於電極體6。還有，抵接構件43，是具有圓筒形 且比配置於前側的圓筒部43 a、配置於後側的圓筒部 向軸 支承 體3 可精 後端 接觸 體6 精度 承體 通於 、及 接構 支承 :該 前方 裝於 且被 狀， 43a -20- 201245726 還要小直徑的小徑部4 3 b所構成。 圓筒部43a，是將朝向長軸方向呈直角的平面具有於 端面的圓柱狀地所形成。因此，抵接構件43的前端側是 成爲抵接於支承板17的後方表面。 在小徑部43b的外周側，插通有壓縮螺旋彈簧45。具 體而言，壓縮螺旋彈簧45之各該端部抵接於圓筒部43a 的後端面及筒構件44之底面的狀態下，有壓縮螺旋彈簧 45被插通於小徑部43b的外面側。 還有，在小徑部4 3 b的後端側，是被插通於被形成在 筒構件44的底面，且突出於比筒構件44的底面還要後側 。在小徑部43b的後端，固定有止動輪46.。 如上所述地在本形態中，彈推手段1 4，-是被安裝於電 極體6，朝向前方向彈推著電極側支承體3。亦即，彈推 手段14，是朝向被固定於電極體6的電極7之接觸面7a ，及經由支柱4被固定於電極側支承體3的檢查側支承體 2之前方表面（亦即，對向面2a)遠離的方向，彈推著檢 查側支承體2、電極側支承體3及支柱4。 如第.1圖所示地，限制構件42是具備：抵接於電極 側支承體3的前方表面的限制板4 7，及限制板4 7被固定 的固定板48。 固定板48’是被配置於治具本體部40之後方，並被 固定於底板41。 限制板47，是被固定於固定板48之前端。 在本形態中，在非檢查時’使得壓縮螺旋彈簧4 5稍. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . With inspection device. [Prior Art] The jig is inspected by supplying a power (electrical signal or the like) from the inspection device to the predetermined inspection position in the inspection target portion having the inspection object via the contact, and detecting the electric signal from the inspection target portion. It is used to perform detection of electrical characteristics of the inspection target part, operation test, and the like. The object to be inspected is, for example, a printed wiring board, a flexible substrate, a ceramic multilayer wiring board, an electrode plate for a liquid crystal display or a plasma display, a package substrate for a semiconductor package, or a film carrier. A semiconductor device such as a substrate or a semiconductor wafer or a semiconductor wafer or a CSP (Chip size package). In the patent specification of the present invention, the above-mentioned test object is generally referred to as "inspected object", and the inspection target portion set in the test object is referred to as "check point j. For example, the object to be inspected is a substrate, and is When a semiconductor circuit such as 1C such as a substrate or an electrical or electronic component such as a resistor is mounted on a substrate, the target portion of the substrate is formed as a wiring or an electrode. At this time, the wiring of the target portion is to ensure an electrical signal. This is accurately transmitted to the above, and the electrical characteristics such as the resistance 値 between the predetermined inspection points on the printed wiring board before the installation of the electrical and electronic components, the liquid crystal panel-5-3 201245726, or the wiring of the plasma display panel are measured. Specifically, it is judged whether or not the wiring is good or not. It is determined whether the wiring is in contact with the current supply terminal and/or the contact tip for voltage measurement at each inspection point, and the measurement current is connected by the contact point. The current supply terminal is supplied to the checkpoint, and the voltage of the wiring between the front ends of the contacts abutting the checkpoint is measured, and the current is supplied by the current The predetermined voltage is used to calculate the resistance 配线 of the wiring between the predetermined inspection points. When the inspection substrate is inspected by the substrate inspection device, the jig moving means is moved to make the inspection contact of the substrate inspection jig. (contact pin.) abuts on the contact portion of the inspection substrate, thereby performing a predetermined inspection, and when the inspection is completed, the control for moving the inspection jig by the jig moving means and moving away from the inspection substrate is performed. For example, the inspection jig disclosed in Patent Document 1 includes a distal end side support body, a rear end side support body disposed at a predetermined interval from the distal end side support body, and a distal end support body and a rear end side support body. In the connection body, the distal end support body has a distal end side insertion hole formed in a direction orthogonal to the opposing surface facing the inspection object, and the rear end support body has a rear end side insertion hole formed in the front end side insertion hole. The direction in which the insertion direction is inclined is also the manner in which the rear end side insertion hole ' is inserted into the front end side of the probe of the rear end side insertion hole toward the front end side. The side insertion through hole is formed with an electrode side support body having an electrode that is in contact with the rear end of the probe, and is disposed between the rear end side support body -6-201245726 and the holding probe via a predetermined gap, and a spring pushing mechanism that pushes the rear end side support body. The spring pushing mechanism is an insertion hole in which a front end is formed in a conical shape and is inserted into a portion of the rear end side support body that is abutted by a spring pushing mechanism. Positioning of the probe rear end and the electrode to be supported by the electrode-side support body. In the inspection jig disclosed in Patent Document 1, in order to suppress the front end of the probe from coming into contact with the surface of the inspection point, The frictional movement occurs on the surface of the inspection point, and is provided with a spring pushing mechanism that can protrude the front end of the probe only at the time of inspection. However, in the inspection fixture shown in Patent Document 1, the length of the rear end portion of the probe is The length of the small diameter hole which is formed on the rearmost side of the rear end side support body is longer than the axial direction. Because of this, the rear end of the probe is deviated in a direction parallel to the surface of the rear end side of the rear end side of the probe. Therefore, whenever the front end of the probe abuts against the inspection object, At the point (when the inspection is performed), the state in which the probe is in contact with the electrode at the rear end is unstable, and there is a problem that the contact resistance between the probe and the electrode greatly changes every time the inspection is performed. Because of this problem, whenever it is checked, the contact resistance will change and the correct inspection cannot be performed. Further, when the inspection is repeated, the rear end of the probe becomes the surface of the friction electrode, so that the surface of the electrode is worn out, and there is a problem that durability of the correct inspection result cannot be obtained. Further, in the technique disclosed in Patent Document 1, since the spring pushing mechanism has a positioning function, when the front end of the spring pushing mechanism or the insertion hole abuts to become the friction β, the front end is generated more than the initial state. It is necessary to deeply enter the case where r*·2' 201245726 is inserted into the hole, and if the front end or the insertion hole is worn out, the spring force is changed. Since the push mechanism and the insertion hole are plural, and it is not necessarily caused by the degree of wear, the visual position causes the rear end support to push the electrode support. the same. Therefore, when the opposite surface is close to the contact surface, the resistance is prevented by the different projectile thrust portions, and the opposite surface of the probe is brought close to the contact surface, and the front end of the probe is brought into contact with the inspection point. [Patent Document 1] Japanese Laid-Open Patent Publication No. 2009-0475 No. 2-2 SUMMARY OF THE INVENTION The present invention has been made in view of such circumstances, and provides an inspection jig that allows positioning of the rear end of the contact and the electrode to be easily performed. And can be checked correctly. Further, the present invention provides an inspection jig which makes it easy to perform maintenance of replacement contacts and the like. According to the invention of claim 1, the inspection jig is provided for performing inspection of wiring provided on the inspection substrate, for electrically connecting the inspection point provided on the inspection substrate and the inspection device for inspecting the inspection substrate. The inspection jig has a contact point, an inspection side support body, an electrode side support body, a support post, and an electrode body; the contact point is one end in conduction contact with the inspection point, and the other end is opposite to the above The electrode portion of the electrical connection of the inspection device is electrically conductive and electrically conductive; the inspection-side support body has an inspection guide hole for guiding one end of the contact to the inspection point; the electrode-side support body is An electrode guiding hole for guiding the other end of the contact to -8-201245726 to the electrode; the pillar is provided with the inspection-side support and the electrode-side supporting electrode, and has a plurality of electrodes arranged to cause the electrode The side support body is spaced apart by a predetermined distance, and the contact point has a second end portion that is in contact with the inspection point and the electrode portion, and The conductive portion of the conductor, and an insulating film in addition to the conductor portion of the second end portion of the periphery of the insulating portion, of length is even shorter than the depth of formation of the contact to the electrode body. The inspection jig according to the first aspect of the invention, wherein the inspection tool has a shaft portion extending toward the electrode body, and a bearing portion slidably inserted and held by the shaft portion is The inspection jig according to the first aspect or the second aspect of the invention of the present invention, comprising: an abutting member that is in contact with the electrode-side support surface, and the abutting member The pusher of the pusher. The inspection jig according to the first aspect of the invention, wherein the pushing force of the pushing means is larger than a pressing force provided at the point. The invention according to claim 5 is ligand-supported and held at a predetermined interval; and in the case of non-inspection, the first end portion which is contacted by the held elastic pushing means has a flexible rod shape as described above The first end portion and the second electrode portion of the second end portion are provided with the electrode body of the electrode side support body as claimed in the application, and the utility model provides the above-mentioned electrode body. The surface of the surface is supported by the electrode-side support, and the above-mentioned connection is provided as set forth in the above-mentioned inspection jig inspection jig, and the inspection jig according to the first item of the application-specific application -9-201245726 is provided. Further, the movable plate is disposed around the electrode plate. According to the invention of claim 1, the length of the second end portion of the contact is shorter than the depth of the electrode guiding hole abutting against the electrode body, thereby making the other end of the contact Positioning in the inside of the electrode guiding hole, the rear end of the contact can be stably abutted against the electrode, and the contact and the electrode can be stably contacted. The invention according to the second aspect of the patent application is supported by the electrode side. The shaft portion is provided, and the bearing portion is provided on the electrode body, so that the electrode side support body and the electrode body can be accurately contacted without occurrence of a misalignment caused by the inspection. According to the invention of claim 3, the elastic pushing means includes: an abutting member having an abutting surface that abuts against the surface of the electrode-side supporting body; and the abutting member is urged to the electrode-side supporting body The push-pull portion is formed, whereby an inspection jig that does not cause the elastic pushing means and the electrode-side support body to be worn and has high durability can be provided. According to the invention of claim 4, the pushing force of the elastic pushing means provided in the inspection jig is larger than the pressing force of the contact provided on the inspection jig, so that the contact can be made Make sure to contact both the checkpoint and the electrode. The invention according to claim 5, further comprising a movable plate between the electrode-side support and the electrode body, and the spring-pushing means having the electrode-side support body and the movable plate toward the inspection-side support body side The push-pull portion of the pusher can be easily repaired by the inspection of the electrode-side support body-10-201245726. According to the invention of the sixth aspect of the invention, the movable plate is provided around the electrode body, and the spring pushing means has a pushing portion that pushes the electrode side support body together with the movable plate toward the inspection side support body side. Therefore, it is possible to easily perform the inspection of the inspection jig from the electrode-side support body, and it is possible to make the contact between the end portion and the electrode after the contact. [Embodiment] The best mode for carrying out the invention will be described. Hereinafter, embodiments of the present invention will be described based on the drawings. Fig. 1 is a schematic side view showing an inspection jig 1 according to an embodiment of the present invention. However, in order to understand the structure of the present invention, a partial cross-sectional view will be made. Fig. 2 is a plan view showing the inspection jig 1 of Fig. 1 . Fig. 3 is a schematic partial cross-sectional view showing the cross-sectional structure of the inspection-side support body 2 of Fig. 1. Fig. 4 is a schematic partial cross-sectional plan view showing a cross-sectional structure of the electrode-side support 3 of Fig. 1, wherein Fig. 4(a) shows a state at the time of non-inspection, and Fig. 4(b) shows an inspection. The state of the time. Fig. 5 is a bottom view of the electrode side support body 3. Fig. 6 is a plan view of the electrode body 6. Fig. 7 is a schematic cross-sectional view showing a state in which the inspection jig 1 at the time of non-inspection is viewed in the direction of the line A-A of Fig. 6, and a part of the first figure is enlarged. Fig. 8 is a schematic cross-sectional view showing the state of the inspection jig at the time of inspection and showing an enlarged state in the state shown in Fig. 7. In the figure, the cut surface is also the direction viewed along the line A-A of Fig. 6. Fig. 9 is a schematic structural view showing an inspection apparatus for loading the inspection jig shown in Fig. 1. Also -11 - 201245726, one end of the joint is shown in Figure 3, and the end of the joint is shown in Figure 4. Fig. 7 and Fig. 8 show the state in which these states are changed each time the inspection is performed during non-inspection and inspection. In the following description, in the first, third, fourth, and seventh to ninth drawings, the above and below are described as "front, first or front" and "back" or rear". [Inspection Fixture 1] The inspection jig 1 of the present embodiment is used in an inspection device 30 that is mounted on an electrical inspection of an inspection object 50 such as a printed wiring board or a semiconductor integrated circuit (see Fig. 9). ). As shown in FIG. 1 or FIG. 2, the inspection jig 1 includes a jig main body portion 40, a bottom plate 41, and a regulating member 42: the bottom plate 4 1 ' is mounted with a jig body In the portion 40, the restricting member 42 restricts the action of the jig main body portion 40 to the front. As shown in Fig. 1, the jig main body portion 40 includes an inspection side support body 2 and an electrode side support body 3, and the electrode side support body 3 is disposed on the inspection side support body 2 at a predetermined interval. After that. The inspection side support 2 is an inspection guide hole 13 (see Fig. 3) having one end (front end 5e) of the contact 5 described below being guided to the inspection point. The electrode-side support 3 has an electrode guiding hole 20 for guiding the other end (the rear end 5f) of the contact 5 to the electrode 7 [refer to Figs. 4(a) and 4(b)]. The inspection side support 2 and the electrode side support 3 are formed into flat ends -12-201245726 end portions 5d, respectively. Further, for convenience of explanation, a portion abutting on the inspection point of the first end portion 5c is referred to as a front end 5e, and a portion abutting against the electrode of the second end portion 5d is referred to as a rear end 5f. The front end 5e of the first end portion 5c or the rear end 5f of the second end portion 5d may have a hemispherical shape as shown in the drawing. The first end portion 5c of the contact 5 is inserted into the inspection guide hole 13 supported by the inspection-side support body 2 during inspection (see Fig. 3). The front end 5e of the first end portion 5c is electrically connected to the inspection point formed on the inspection object 50. The length of the first end portion 5c is formed longer than the length of the inspection guide hole 13. This is to make the joint 5 to be bent by the checkpoint and the electrode during the inspection. In the third drawing, the inspection jig at the time of non-inspection is shown, the first end portion 5c of the contact 5 is housed in the inspection guide hole 13, and the front end 5e of the first end portion 5c is also placed in the inspection guide. Hole 1 3 inside. The second end portion 5d of the contact 5 is guided to the electrode 7 (contact surface 7a) by the electrode guiding hole 20 of the electrode side support 3 described below (see Fig. 4). The rear end 5f of the second end portion 5d is a length that is electrically connected to the first end portion 5d of the electrode 7A, and is described in detail below, but is formed to be longer than the axial length of the small diameter hole 17b constituting the electrode guiding hole 20. Be short. The inspection side support body 2 is composed of a plurality of support plates 10, 11, and 12 which are stacked in a plurality (in this embodiment, three pieces) in order from one side (front side) of the test object 5. The support plates 10 to 12 are formed in a rectangular parallelepiped shape (rectangular plate shape) by a bolt or the like. The inspection side support 2 and the electrode side support 3 are arranged such that the surfaces thereof are parallel to each other. Specifically, the four pillars 4 disposed at the four corners of the inspection side support body 2, the inspection side support body 2 and the electrode side support body 3 are connected to each other. (Refer to Fig. 1 and Fig. 2 in this embodiment. In the embodiment, the column 4 is connected to the inspection side support 2 and the electrode side support 3 ^. Further, the inspection side support 2 and the electrode side support 3 are inserted into the contact point of the inspection point contacting the inspection object 5G. The plurality of contacts 5» of the electrode body 6 are mounted behind the electrode-side support 3 (see Fig. 1). As shown in Fig. 1, the electrode body 6 is fixed with a conductive contact 5 ( Specifically, the plurality of electrodes of the rear end 5f) of the contact 5. Further, the electrode body 6 is provided with a spring pushing means 14 for pushing the electrode side support body 3 toward the square, and when inspecting the object 50 to be inspected. A sliding mechanism 8 that restricts the movement of the electric side support 3. The contact 5 is formed of other conductors of metal such as tungsten, high speed steel (SKH), and beryllium steel (Be_Cu), and is formed with a buckling elastic (flexible) The shape of the rod is as shown in Fig. 3 and Fig. 4, and the contact 5 of the present embodiment has the following structure: The conductor portion 5a and the insulating portion 5b covering the outer peripheral surface of the guide portion 5a. The insulating portion 5b is formed of an insulator of synthetic resin. The insulating portion 5b is formed by applying an insulating coating to the surface of the conductor portion 5a. An insulating protective film formed by mounting. The insulating portion 5b is not formed at the end of the contact 5, and the first end portion 5c' is formed at one end (front end) of the contact 5 and at the other end of the contact 5 (post The end portion is formed with the first branching, the illuminating joint, the front pole, the equal-prepared preparation body, etc. The two-way assembly is fixed to each other. 13-201245726 The fixing means are fixed to each other. Also, as shown in Fig. 3, in each of the supporting plates 10 The through holes l〇a, 11a, and 12a are formed in each of the 11, 12, and 12, and the through holes 10a, 11a, and 12a are arranged to be connected to each other, and the first end portion 5c of the contact 5 is inserted. Further, the front surface of the support plate 10 is opposed to the facing surface 2a of the inspection object 50. The inspection guide hole 13 has a contact point 5 toward the front of the inspection object 50. In particular, the inspection guide hole 13 is formed to have a contact 5 orthogonal to the opposite surface 2a. Therefore, the front end 5e of the contact 5 can be contacted by the inspection point for the inspection object 50. The inspection guide hole 13 is formed to form only the number of the contacts 5 of the inspection jig 1. The three through holes l〇a, 1 la, and 12a are formed concentrically. In the third figure, the through hole 1 〇a is larger than the small diameter hole 1 〇b and larger than the small diameter hole 1 〇b. The large diameter hole 10 c is formed, and the through hole 1 2 a is composed of a small diameter hole 1 2 b and a large diameter hole 1 2 c having a larger diameter than the small diameter hole 1 2 b. The small diameter hole 1 〇b and the small diameter hole 12b are formed by an inner diameter which is slightly larger than the outer diameter of the conductor portion 5a and which is slightly smaller than the outer diameter of the contact portion 5 of the portion of the insulating portion 5b. . Further, the inner diameter ' of the through hole 1 1 a is larger than the inner diameter of the small diameter hole b and the inner diameter of the small diameter hole 12 2b. As shown in Fig. 3, the front end edge 5g' of the boundary between the -15-201245726 conductor portion 5a and the insulating portion 5b formed at the first end portion 5c of the contact 5 is disposed in the inspection guide hole 13 The small diameter hole 1 2b is also rearward. Further, as described above, the small diameter hole 12b is formed with an inner diameter slightly smaller than the outer diameter of the contact portion 5 of the portion of the insulating portion 5b. Therefore, the front end edge 5g of the insulating portion 5b is an opening edge 12d that abuts against the small diameter hole 12b. In other words, the front end edge 5g and the opening edge 12d serve as a retaining portion for preventing the contact 5 from falling off to the inspection target side. The electrode-side support body 3 is composed of a plurality of support plates (16 in the present embodiment) which are sequentially laminated from the front side of the inspection-side support body 2. The support plates 15 to 17 of these are fixed to each other by a fixing means such as a bolt. As shown in Fig. 4(a) or Fig. 4(b), through holes 15a, 16a, and 17a are formed in each of the support plates 15 to 17 respectively. The through holes 15a to 17a are arranged to be coupled to each other, and an electrode guiding hole 20 through which the second end portion 5d of the contact 5 is inserted is formed. The electrode guiding hole 20 is the number of contacts 5 which only the inspection jig 1 is formed. The electrode guiding hole 20' is a guiding direction formed to be inclined with respect to the guiding direction formed in the inspection guiding hole 13 (i.e., the orthogonal direction of the opposing surface 2a). That is, the 'three through holes 15a to 17a are formed in a state in which the centers are slightly deviated, and the entire electrode guiding holes 20 are formed in a direction α which is inclined with respect to the orthogonal direction of the opposing surface 2a, for example, 4 ( a) As shown in the figure, three through holes 15a to 17a are formed in a state in which the through holes 15 5a to 7a are slightly shifted from the center in the drawing right direction. In other words, the guide side -16 - 201245726 of the end side of the guide contact 5 is directed to the direction inclined with respect to the line orthogonal to the surface of the electrode side support body 3. The through hole 15a is composed of a small diameter hole 15b and a large diameter hole 15c having a diameter larger than the small diameter hole 15b. Similarly, the through hole 16a is composed of a radial hole 16b and a large diameter hole 16b, and the through hole 17a is composed of a small diameter 17b and a large diameter hole 17c. The small diameter holes 15b, 16b, and 17b are formed by an inner diameter slightly larger than the outer diameter of the contact 5 formed by the insulating portion 5b. Further, as described above, the small diameter hole 17b is formed with an inner diameter slightly larger than the outer diameter of the contact portion 5 of the insulating portion 5b, and the end edge 5h after the insulation 5b is inserted into The inside of the small diameter hole 17b. Point 5 is disposed in a direction in which the normal line orthogonal to the surface of the electrode-side support 3 is inclined. Therefore, as shown in Fig. 4(b), the contact 5 is also disposed such that the small diameter hole 17b is also inclined. Further, the small diameter hole 17b is orthogonal to the surface of the electrode side support body 3 in the axial direction. The rear end edge 5h of the conductor portion 5a formed at the second end portion 5d of the contact 5 and the boundary of the insulating portion is a specific electrode guiding hole as shown in the state of the inspection tool at the time of inspection in Fig. 4(b) The large diameter hole 17c of 20 is also positioned behind. At this time, the amount of movement that can be moved in the direction parallel to the rear surface of the electrode-side support of the rear end 5f is a range in which the contact 5 is restricted from moving inside the small hole 17b. Therefore, if the contact point 5 is obliquely inserted (the case of moving from the non-inspection to the inspection or the case of the inspection to the non-inspection), the rear end of the second end portion 5d can be sized. When the part is connected to the 5b, the amount of movement of the 5f -17-201245726 is extremely small, and it is in stable contact with the electrode. Thereby, when the contact surface 7a and the rear end 5f of the electrode 7 to be described later are brought into contact, the contact surface 7a and the rear end 5f can be precisely positioned. In particular, in the actual inspection, since the contacts 5 and the electrodes 7 are usually provided in a plurality of thousands, the positioning of the contact surface 7a and the rear end 5f can be easily performed, which contributes greatly to shortening the working time. . As shown in Fig. 5, a circular insertion hole 3a is formed in the bottom surface (rear surface) of the electrode side support body 3. Specifically, the insertion hole 3a is formed in the vicinity of the four corners of the support plate 17 so as to penetrate the support plate 17. Further, as shown in Fig. 7, the following shaft portion 8a constituting the slide mechanism 8 is inserted into the insertion hole 3a and fixed. In each of the contacts 5, the first end portion 5c inserted through the inspection guide hole 13 is disposed in a direction away from the electrode guiding hole 20 from the second end portion 5d inserted through the electrode guiding hole 20. The position in the oblique direction. That is, as shown in Fig. 5, the opening position of the end side of the inspection guide hole 13 of the first end portion 5c of the contact 5 is inserted (i.e., the opening position of the through hole 12a of the support plate 12), It is viewed by the electrode guiding hole 20 through which the second end portion 5d of the contact 5 is inserted, and is disposed on the inclined side of the guiding direction of the electrode guiding hole 20. As shown in Fig. 1, the electrode body 6 is formed by laminating rectangular support plates 22 and 23 in which the plurality of electrodes 7 are embedded, and a substantially block-shaped support member 25 for holding the wires 24 electrically connected to the electrodes 7. . The electrode body 6 of the present embodiment is formed in a substantially rectangular parallelepiped shape as a whole, and the rear end surface is fixed to the front surface of the bottom plate 41 via the fixing plate 48. Further, the wiring 24 is -18-201245726 and is connected to the control unit 31 of the inspection device 30 described below. As shown in Fig. 4, the front surface of the electrode 7 is the contact surface 7a which is brought into contact with the rear end 5f of the contact 5. Further, the rear end 5f of the contact 5 is formed in a spherical shape as described above. Therefore, even if the second end portion 5d of the joint 5 is inclined along the electrode guiding hole 20 having the inclined guiding direction, the rear end 5f and the contact surface 7a are also in a suitable conductive connection state. A sliding mechanism 8 is attached to the electrode body 6, and a spring pushing means 14 is also attached. Specifically, as shown in Fig. 6, a slide mechanism 8 and a spring pushing means 14 are attached to each of the four corners of the electrode body 6. In the present embodiment, the spring pushing means 14 is attached to a position farther than the sliding mechanism 8 at the four corners of the electrode body 6. The slide mechanism 8 includes a rod-shaped shaft portion 8a that protrudes from the rear surface of the electrode-side support body 3, and a cylindrical bearing portion 8b that is fixed to the electrode body 6 and into which the shaft portion 8a is inserted (see FIG. 1). ). The shaft portion 8a' is a rear direction in which the one end is fixed to the support plate 17 of the electrode side support body 3, and the other end is inserted into the bearing portion 8b to be described later. At this time, the shaft portion 8a has a right angle with respect to the rear surface of the support plate 17 in the axial direction. The bearing portion 8b' is fitted and fixed to a through hole (not shown) provided in the electrode body 6. The bearing portion 8b is, for example, a linear motion bearing in which a plurality of ball bearings arranged in the axial direction are provided in a plurality of linear bushings, and the shape or diameter of the cross section is adapted to be inserted into the inner shape of the bearing. The shaft portion 8a is adjusted. When the shaft portion 8a is inserted into the bearing portion 8b, the shaft portion 8a is excellent in accuracy (201245726) (the amount of movement in the direction perpendicular to the axial direction is small), and linear motion (sliding) is possible in the direction. In the slide mechanism 8, the electrode side body 3 is moved in the front-rear direction of the electrode body 6 with high precision, and the surface is in contact with the front surface of the electrode body 6 after being supported on the electrode side, and is excellent in degree of formation. 5f which is inserted into the contact 5 in the electrode guiding hole 20 is brought into contact with the contact surface 7a of the electrode 7 formed on the electrode body 6. Therefore, when the slide mechanism 8 is attached, the slide mechanism 8 is mounted such that the rear end 5d is in proper contact with the surface 7a. As described above, in the present embodiment, the slide mechanism 8 is attached to the electrode so that the electrode side can be made. The support body 3 and the electrode body 6 are preferably moved in the front-rear direction. Therefore, when the electrode side branch 3 is moved forward by an external force, the contact surface 7a of the electrode 7 and the electrode-side support body 3 can be contacted with high precision. Point 5 after the end 5 f. The spring pushing means 14 includes the abutting member 43 and the elastic member (compression coil spring 45) of the tubular member 44, and the stopper wheel 46; the abutting member 43' protrudes from the front surface of the electrode body 6 and abuts against The electrode side member 3 is an end side elastic pressing portion (compression coil spring 45) in which the abutting member 43 is housed, and the tubular member 44 is directed toward the elastically abutting member 43; the stopper wheel 46 is The E-shaped stop wheel used for the abutment member 43 to the tubular member 44 (see the first drawing). The tubular member 44' is formed in a bottomed cylindrical shape having an opening on the distal end side, and is fixed to the electrode body 6. Further, the abutting member 43 has a cylindrical shape and is disposed on the rear side of the cylindrical portion 43a and the cylindrical portion disposed on the rear side. And the joint support: the front side is attached to the shape, and the 43a -20-201245726 also has a small diameter small diameter portion 4 3 b. The cylindrical portion 43a is formed in a columnar shape having an end surface at a right angle to the longitudinal direction. Therefore, the front end side of the abutting member 43 is abutted against the rear surface of the support plate 17. A compression coil spring 45 is inserted into the outer peripheral side of the small diameter portion 43b. Specifically, in a state where each end portion of the compression coil spring 45 abuts against the rear end surface of the cylindrical portion 43a and the bottom surface of the tubular member 44, the compression coil spring 45 is inserted into the outer surface side of the small diameter portion 43b. Further, the rear end side of the small diameter portion 433b is inserted into the bottom surface formed on the tubular member 44, and protrudes rearward from the bottom surface of the tubular member 44. A stopper wheel 46. is fixed to the rear end of the small diameter portion 43b. As described above, in the present embodiment, the spring pushing means 14 is mounted on the electrode body 6, and the electrode side support body 3 is pushed in the forward direction. In other words, the spring pushing means 14 is directed to the contact surface 7a of the electrode 7 fixed to the electrode body 6, and to the front surface of the inspection side support body 2 which is fixed to the electrode side support body 3 via the stay 4 (that is, The inspection side support 2, the electrode side support 3, and the support 4 are pushed in the direction away from the surface 2a). As shown in Fig. 1, the regulating member 42 is provided with a fixing plate 47 that abuts against the front surface of the electrode-side supporting body 3, and a fixing plate 48 to which the regulating plate 47 is fixed. The fixing plate 48' is disposed behind the jig main body portion 40 and is fixed to the bottom plate 41. The restricting plate 47 is fixed to the front end of the fixed plate 48. In this embodiment, when the non-inspection is made, the compression coil spring 45 is slightly
S -21 - 201245726 微撓曲的狀態下，抵接構件43抵接於電極側支承體3的 後方表面（支承板17的後方表面），還有，使得電極側 支承體3的前方表面抵接於限制板4 7。亦即，電極側支承 體3，是以彈推手段14被彈推的狀態下，抵接於限制板 47 (參照第7圖）。 還有，在該狀態下，在電極側支承體3與電極保持部 6之間形成有些微間隙。 又，在該狀態下，檢查側支承體2、電極側支承體3 及支柱4是朝向前方彈推，而接點5之前端5e，是未由對 向面2 a (參照第7圖）。亦即，在該狀態下，接點5之前 端5e是成爲被收納於檢查引導孔13中。 [檢查裝置的槪要] 第9圖是裝載表示於第1圖之檢查治具丨的檢查裝置 30的槪略構成圖。 如第9圖所示地，本形態的檢查治具丨，是被裝載於 進行被檢查物50的電性檢查（具體而言，斷線或短路等 的檢查）的檢查裝置30而被使用。 在被檢查物50’形成有接點5之前端5e所接觸的檢 查點。還有’在被檢查物50，例如在檢查後載置有1C等 的電子零組件。又’例如被載置的電子零組件，是藉由打 線接合被接合於在檢查所利用的檢查點。 檢查裝置30是具備：控制部31、及驅動部、以及檢 查機構3 3 ;該控制部3 1 ’是做爲包括來判定被檢查物5 0 -22- 201245726 的導通狀態的檢查電路的電性檢查手段；該驅動部（未予 圖示），是被連接於控制部31;該檢査機構33，是藉由 驅動部被驅動。 在控制部3 1，經由配線24被導電連接有檢查治具1 的電極7。 檢查機構33是具備：第1支承盤34、及第2支承盤 35、以及移動機構36。該第1支承盤34，是固定有檢査 治具1;該第2支承盤35，是被對向配置於第1支承盤34 ，且被固定有被檢査物50;該移動機構36，是朝向前後 方向移動第1支承盤34。 移動機構36，是例如藉由滾珠螺旋機構或油壓機構所 構成，並藉由驅動部被驅動。 在本形態中，第2支承盤35，是固定被檢查物50的 固定手段，移動機構36,是成爲朝向被檢查物50與檢查 治具1之對向面2a接近的方向來移動檢查治具1的移動 手段。 又，移動機構36，是朝向前後方向來移動第2支承盤 3 5也可以。 還有，第1支承盤34是藉由省略圖示的移動機構朝 向第9圖的紙面垂直方向可移動地構成，第2支承盤35 是藉由省略圖示的移動機構朝向第9圖的左右方向可移動 地構成也可以。 [檢查對象的檢查次序及檢查時的檢查治具之動作] -23- 201245726 第7圖是表示非檢査時的檢査治具之狀態的圖式，第 8圖是表示檢查時的檢查治具之狀態的圖式。本形態的檢 查裝置30是一面抵接檢查治具1的對向面2a與被檢查物 50，一面進行被檢查物50的電性檢查。具體而言，檢査 裝置3 0，是如以下地進行檢査。 首先，於第1支承盤34固定檢查治具1，而於第2支 承盤35固定被檢査物50。如第7圖所示地，在該狀態下 ，壓縮螺旋彈簧4 5爲以些微地撓曲的狀態，使得抵接構 件43抵接於電極側支承體3的後方表面，而且於限制板 47抵接有電極側支承體3的前方表面。 還有，在電極側支承體3的後方表面與電極6的前方 表面之間形成有些微間隙。更且，在該狀態下，接點5之 前端5e，是未由對向面2a突出，而被收納於檢査引導孔 1 3中。 還有’在該狀態下，接點5之後端5f，是接觸於電極 7之接觸面7a。又，在該狀態下，接點5之後端5f由接 觸面7a稍些離開也可以。 然後’當驅動部以控制部3 1之控制信號來驅動移動 機構36時，則第1支承盤34朝向第2支承盤35接近， 不久，對向面2a會抵接於被檢查物50« 如第8圖所不地，當對向面2a抵接於被檢查物5〇時 ，則抗拒彈推手段1 4之彈推力，使得檢查側支承體2、電 極側支承體3及支柱4朝向電極體6相對移動。亦即，朝 向接觸面7a與對向面2a接近的方向，使得檢查側支承體 -24 - 201245726 2、電極側支承體3及支柱4對於電極體6相對移動。還 有’在這時候’電極側支承體3之前方表面是成爲由限制 板47離開之狀態。 那麼說，接點5之後端5f，是藉由電極7朝向前方推 壓。這時候’接點5之前端5e，是抵接於被檢查物50之 檢查點之故’因而在檢查側支承體2與電極側支承體3之 間位於傾斜姿勢的接點5之中間部分是呈撓曲（屈曲）。 直到電極側支承體3之後方表面抵接於電極體6之前 方表面爲止’吏檢査側支承體2等對於電極體6相對移動 ’當接點5之中間部分的撓曲量成爲預定量時，則被收納 於檢查引導孔13中的接點5之前端5e，是成爲以預定接 觸壓接觸於檢查點。 這時候’在無間隙地抵接對向面與檢查點所形成之一 面時’則前端5 e是未由對向面突出，惟有些微間隙時， 則成爲使前端5 e由對向面僅突出間隙的分量。 還有，屈曲的接點5之中間部分的撓曲方向，是成爲 因應於接點5之傾斜方向的方向。 又這時候，滑動機構8的軸部8a是被安裝於一端的 電極側支承體3朝向後方移動之故，因而由軸承部3b突 出於後方的長度，成爲僅電極側支承體3的移動量會變長 〇 那麼說，當接點5之前端5e以預定接觸壓接觸於被 檢查物50的檢查點時’則接點5是被導通至檢查點。在 該狀態下，控制部3 1是將預定信號供應於檢查治具1，或 201245726 是接受以檢查治具1所檢測出的電位等，就可進行被檢査 物50的電性試驗。 又，由表示於第8圖的狀態，當第1支承盤34朝向 由第2支承盤35離開之方向移動時（亦即，當對向面2a 朝向由被檢查物50離開的方向移動），則接點5之中間 部分的撓曲會逐漸地被解決，檢查治具1，是回到表示於 第7圖之狀態。 亦即，在壓縮螺旋彈簧45爲稍微地撓曲的狀態下， 電極側支承體3的前方表面抵接於限制板4 7，而接點5之 前端5e是被收納於檢查引導孔13中。還有，在這時候， 接點5之後端5f，是接觸於電極7之接觸面7a。 [本形態之效果] 如上所述地，在本形態中，接點5之第二端部5 d形 成有比形成於電極側支承體3之最後側的支承板1 7的小 徑孔17b的軸方向長度還要短。 因此，以電極側支承體3穩定地可保持接點5之後端 側之故，因而欲組裝檢查治具之際，各構件（電極側支承 體3、電極體6、滑動機構8等）的定位成爲容易，做成 後端5f精度優異地可接·觸於電極7的接觸面7a。 還有，在電極側支承體3的後方表面與電極體6的前 方表面近接的檢查時，接點5之後端5d是抵接於電極7 的接觸面7a之同時被推壓。這時候，如上所述地接點5 之後端側是利用電極側支承體3穩定地保持之故，因而每 -26- 201245726 當進行檢查因後端5d與接觸面7a之接觸的位置不會變化 ，因此可將接點5之接觸電阻値保持在一定。因此，可得 到正確的檢查結果。 更且，檢查治具1及檢查裝置30之檢查時的動作是 如上所述，惟在實際使用時，例如，將自動地供應或搬出 被檢查物50的裝置（都未予圖示）具備於檢查裝置30, 成爲可連續地進行被檢查物之檢查。這時候，檢查治具1 是成爲連續地進行上述檢查時的動作。此時，如上所述地 接點5之後端側是利用電極側支承體3穩定地保持之故， 因而即使連續地進行檢查時，後端5f與接觸面7a之位置 因在每當檢查動作也不會相對地變化，因此可防止後端5f 摩擦接觸面7a所導致的接觸面7a之摩耗。 還有，藉由彈推機構14，朝向被形成於電極7的接觸 面7a與被形成於檢查側支承體2的對向面2a離開之方向 ，使檢查側支承體2、電極側支承體3及支柱4被彈推。 因此，被檢査物50與抵接面2a並未抵接，而在外力 末動作於檢查治具1時，以彈推手段14的彈推力，進行 彈推檢查側支承體2、電極側支承體3及支柱4，可做成 由對向面2a未突出有接點5之前端5a的狀態（亦即，接 點5之前端5a被配置於被檢查引導孔13內的狀態）。 一方面’在檢查被檢查物50時，若抵接對向面2a與 被檢查物5 〇，則抗拒彈推手段1 4的彈推力就可接近接觸 面7a與對向面2a。 因此，在檢査時，由對向面2a稍微地突出被插通於 -27- 201245726 檢查引導孔13的接點5之前端5a，並以預定之接觸壓可 接觸於被檢查物50。 如此地，在本形態中，在檢查被檢查物50時，將對 向面2a抵接於被檢查物50的狀態下，可將接點5之前端 5a以預定之接觸壓接觸於被檢查物50的檢查點。 因此，可將前端5e接觸於被檢查物50的檢查點之狀 態的接點5之前端5e的偏離量抑制在接點5之第一端部 5c與檢查引導孔13之間的間隙程度。亦即，可將接觸於 檢查點的狀態下的接點5之前端5 e的偏離量做成微小， 結果’可抑制被檢查物50的檢查點之表面發生傷痕。 特別是’在本形態中，檢查引導孔1 3是具有朝向被 檢查物50的引導方向，而電極引導孔20是對於前端側插 通孔的探針引導方向具有傾斜的引導方向，又接點5之第 —端部5c，是被配置於對於接點5之第二端部5d偏離朝 向電極引導孔20之引導方向傾斜之一邊的位置。 因此，在檢查被檢查物50時，因被配置於檢查側支 承體2與電極側支承體3之間隙的接點5之中間部分會屈 曲，因此在接觸於被檢查物50的檢查點之狀態下使接點5 之前端5e容易偏離，惟採用本形態的構造，就可將接觸 於檢查點之狀態的接點5之前端5 e的偏離量做成微小。 在本形態中’彈推手段14’是被安裝於電極體6並彈 推著電極側支承體3。所以，在當對向面2a抵接於被檢查 物5 0時（亦即’檢查時）’則可將互相地被固定的檢查 側支承體2、電極側支承體3及連結體4以一體對於電極 -28- 201245726 體6進行相對移動，並成爲可將複數接點5之前端5e確 實地做成接觸於被檢查物50之檢查點。 亦即，互相地被固定的檢查側支承體2、電極側支承 體3及連結體4是剛性較高，即使對於電極體6相對移動 也不容易變形之故，因而成爲可將來自對向面2a的複數 接點5之前端5e的突出量做成大約均等，並成爲可將複 數接點5之前端5e確實地做成接觸於被檢查物50之檢查 點。 在本形態中，彈推手段1 4，是具有使前端抵接於電極 側支承體3的後方表面的抵接構件43，而抵接構件43的 圓柱部43a前端是形成具有與電極側支承體3之後方表面 平行之平面。所以，抵接構件43所抵接的電極側支承體3 之後方表面的部位是不會摩耗，也不會有彈推手段14所 導致的彈推力的變化之故，因而具有複數的彈推手段14 是仍保持均勻的彈推力，可實施檢查。 在本形態中，檢查治具1是具備抵接於電極側支承體 3的前方表面，並限制朝向前方的電極側支承體3之動作 的限制構件42。 所以，在前後方向，可進行外力未動作於檢查治具1 時的檢查側支承體2、電極側支承體3及連結體4的定位 [其他的實施形態] 上述的形態，是本發明的合適形態的一例子’惟並不 -29- 201245726 被限定於此者，在未變更本發明的要旨的範圍內可變形成 各種。 在上述的形態中，接點5之後端5 f所接觸之電極7 的接觸面7a是形成平面狀，惟並未限定於此形狀。例如 ’在將接觸面7a形成平面狀的後接觸面7a上施以電鍍等 形成如隆起的形狀也可以。 在上述的形態中，接點5是如圖所示地具有形成球面 狀的前端5a或是後端5f。 其他例如’前端5a或是後端5f是朝向前端具有斜面 的方式形成圓錐形也可以，或是對於接點5之長軸方向形 成直角的平面狀也可以^ 。 在上述的形態中，接點5是檢查側支承體2與電極側 支承體3之間的中間部分成爲傾斜的方式，被插通於檢查 側支承體2與電極側支承體3，惟接點5是中間部分不會 成爲傾斜的方式，被插通於檢查側支承體2與電極側支承 體3也可以。 在上述的形態中，彈推手段14，是抵接構件43a的前 端，形成具有與電極側支承體3之後方表面平行之平面。 其他例如，抵接構件43 a的前端形狀，是形成比平面 還帶有稍圓味的形狀也可以。 在上述的形態中，彈推手段1 4是藉由做爲彈推構件 的壓縮螺旋彈簧45來發生彈推力。 其他例如，彈推手段14是將抗拉螺旋彈簧或板簧等 的其他彈簧構件，或是橡膠等的彈性構件等做爲彈推構件 -30- 201245726 來發生彈推力。 在上述的形態中，檢査治具1，是具備抵接於電極側 支承體3之前方表面並限制電極側支承體3等朝向前方之 動作的限制構件42。 其他例如，檢查治具1，是具備抵接於檢查側支承體 2之對向面2a並限制檢查側支承體2朝向前方的動作限制 構件也可以。 還有，檢查治具1是未具備限制電極側支承體3等朝 向前方的動作的限制構件也可以。在這時候，設有防止電 極側支承體3等朝向前方脫落的防脫構件較佳。. 在上述的形態中，藉由3片支承板10〜12構成有檢 查側支承體2。 其他例如，以2片以下或是4片以上的支承板構成有 檢查側支承體2也可以。 同樣地，在上述的形態中，藉由3片支承板15〜17 構成有電極側支承體3,惟以2片以下或是4片以上的支 承板構成有電極側支承體3也可以。 還有，在上述的形態中，由電極側支承體3的支承板 17朝向後方延伸的引導機構之軸部8a被固定於支承板17 ，惟構成如由支承板17可裝卸自如軸部8a也可以。 以下，依據第10A圖、第10B圖、第10C圖、第11 圖及第12圖，針對於其他的實施形態的檢查治具進行說 明。 在表示於第1圖至第9圖的實施形態中，滑動機構8 η· α -31 - 201245726 的軸部8a之前方的端部，被固定於電極側支承體3之支 承板17，又，彈推手段14的圓筒部43a貫通電極體6的 貫通孔，並將電極側支承體3的支承板17的後方之一面 朝向檢查側支承體2進行彈推。在表示於第10八圖 '第 10B圖、第10C圖、第Π圖及第12圖的實施形態中’詳 細是如下述地，滑動機構8的軸部8a之前方的端部’是 被固定於電極體6之支承板22之一部分的可動板22b’彈 推手段14的圓筒部43a’是電極體6的支承板22之一部 分的可動板22b的後方之一面朝向檢查側支承體2進行彈 推。 第10A圖是第二實施形態的電極體6的俯視圖，第 10B圖及第10C圖是表示於第10A圖的電極體6的前視圖 。與第一實施形態同樣地，在第二實施形態中，電極體6 ，也是由支承板22、23與支承構件25所構成。但是’在 第二實施形態中，將相當於支承板22者’由電極7之接 觸面7a所固定的中央之電極板22a與配置於其周圍的可 動板2 2b所構成。電極板22a是被固定於支承板23，惟可 動板22b，是被彈推成爲由支承板23離開。亦即，如第 10B圖及第10C圖所示地，可動板2 2b是可朝向檢查治具 的前後方向移動。 還有，如第10A圖所示地，在可動板22b前方的面上 之四角落的附近，設有小突起部52a，還有，在朝向第 10A圖位於右邊縱方向的兩個小突起之間設有大突起52b 。此些突起是在可動板2 2b抵接於支承板17的狀態下進 -32- 201245726 入被形成於支承板17的凹部（未予圖示），進行可動板 22b與支承板17的定位。 又，如第10A圖所示地，在電極板22a上之四角落的 附近，設有4個彈推手段26。此些彈推手段是未予圖示， 惟與彈推手段14同樣地，具備圓筒部與圓柱部，圓筒部 被固定於支承構件25內而圓柱部抵接於支承板17的後面 之一面。彈推手段43 a是與可動板22b-起將彈推力給予 支承板17之故，因而其所導致的彈推力，是在面臨於電 極板22a之領域的支承板1 7未作用。結果，僅以彈推手 段43a之彈推力有支承板彎曲恢復的可能性。所以，藉由 彈推手段26，做成將彈推力給予面臨於設置電極的電極板 22a之領域的支承板1 7，藉此，做成比較性分散於支承板 並可施加均勻的彈推力。 第11圖是具備第二實施形態之電極體的檢查治具的 局部擴大斷面圖，表示非檢査時之檢查治具的狀態。如該 圖所示地，可動板22b是被保持於由支承板23離開之位 置。 如第11圖所示地，滑動機構8之軸承部8b，是被嵌 入在設於電極體6之支承板23及支承構件25的貫通孔並 被固定，滑動機構8之軸部8a的前端部，是被嵌入在被 形成於可動板22b的貫通孔22 bh並被固定。藉此，可動 板22b，是可做成沿著軸部8a之軸線方向平行移動。 還有，彈推手段14的筒構件44,是被嵌入在設於支 承構件25的貫通孔並被固定，還有，彈推手段14的圓筒 -33- 201245726 部43a之前方的端部，是貫通支承板23 前端面是抵接於可動板22b之後方面並朝 板 22b。 如第10A圖所示地，於可動板22b & 定著滑動機構8的軸部8a，還有，於可動 的以符號43 a所示的位置抵接著彈推手段 之前端部。亦即，滑動機構8及彈推手段 作用於可動板2 2b。此些位置，是與在第 電極體6的支承板22的滑動機構8之軸若 14之圓柱部43a之位置相同。 再次參照第11圖，在表示於該圖的 體6的支承板2 2b之後方面抵接著彈推寻 43a之前端面，使可動板22b及電極側支 板47被彈推。在可動板2 2b與支承板23 的間隙。 然後，在檢查時，檢查治具1(第1 物50移動，當檢查側支承體2之對向面 物50時，則電極側支承體3朝向後方被 47離開。隨著其移動，可動板22b抗拒彈 縮螺旋彈簧45之彈推力並將圓柱部43a 25的圓筒部44內，同時沿著滑動機構8β 方向使可動板2 2b下降。如第12圖所示 板22 b之際，在可動板22b與支承板23 此，在接點之後端部與電極之接觸成爲確 的貫通孔，而其 向前方彈推可動 3貫通孔22bh固 板22b之後方面 14的圓柱部43a :14是被配置成 一實施例中貫通 形8a及彈推手段 狀態下，於電極 =段14的圓柱部 承體3朝向限制 之間形成有些微 圖）朝向被檢查 2a抵接於被檢査 推回而由限制板 【推手段1 4的壓 推下至支承構件 勺軸部8a之軸線 地，在停止可動 之間有間隙。藉 實之前可防止可 -34 - 201245726 動板22b抵接於支承板23並停止下降的情形。還有，如 第1圖所示地，電極側支承體3之支承板17的表面，是 與合倂可動板22b及電極板22a之一面成爲相同形狀之故 ，因而成爲藉由支承板17推壓可動板22b及電極板22a 之全面。亦即，在停止可動板22b之際，在可動板22b的 前方之一面與電極板22a的前方之一面，是配置成爲相同 平面。藉此，也可確實地保證接點之後端部與電極之接觸 。又，在這時候，於限制板47之後方面與電極側支承體3 的支承板1 5之前方表面之間形成有間隙.。 檢查之際的探針之作用是與第一實施形態相同。 在更，換接點之際，由檢查治具1拆下治具本體部40， 就可由電極側支承體3的支承板1 7之後方表面進行接點 之抽出及安裝。這時候，在第一實施形態中，4支滑動機 構8的軸部8a被固定於電極側支承體3的支承板1 7之後 方表面，還有，此些之4支軸部8a，包圍著安裝有接點之 第二端部5d的電極引導孔20所形成的部分之四角落。特 別是，隨著近年來之檢查對象的微細化，使檢查治具之治 具本體部40小型化，結果，在被固定於支承板17上的4 支軸部8a之間隔做成狹窄化時，存取於接點成爲困難。 還有，利用微細化之進行，被使用於治具本體部40的支 承板成爲也可使用薄者。所以，若是此種薄支承板，就有 很難加工，或是因設置複數孔，就有降低支承板本體的強 度的問題。 然而，在第二實施形態中，滑動機構8之軸部8a，是 -35- 201245726 被固定於可動板2 2b並被固定於電極側支承體3的支承板 17之故，因而軸部8a不會妨礙作業，又，不會使支承體 1 7本體之強度降低而彎曲的情形之故，因而即使被小型化 的治具本體部40，也可容易地進行接點之更換等的維修。 在上述的第二實施形態中，以電極板22 a及可動板 22b來構成電極體6。代替此些，電極體6是與第一實施 形態之情形同樣地使用一體者，於電極側支承體3之支承 板17與電極體6之支承板22之間，另一方面，介設於移 動自如的矩形之板，而於該板固定滑動機構8之軸部8a 的前端，而且將彈推手段14之圓柱部43 a的前端面抵接 於該板的後方表面，並構成將板彈推至電極側支承體3之 支承板1 7也可以。但是，在板，必須做成形成有使得由 電極側支承體3所突出之接點的端部可與電極體6之電極 接觸的構造。例如，於對應於此些接觸位置的板之部分形 成缺口，或是在該部分設置可導電的構造β在該實施形態 之情形，也與第二實施形態同樣地，滑動機構8之軸部8a ，是被固定於可動板22 b而未被固定於電極側支承體3的 支承板17之故，因而使得設於電極側支承體3的接點之 區域的接點之更換等的維修容易地進行。 可動板是若在非檢査時可將電極側支承體3朝向檢查 側支承體2側彈推，而在檢查時在平行地保持電極側支承 體3及檢查側支承體2的狀態下可進行後退者，則任何者 都可以，惟在配置有電極側支承體3的接點之後端部的區 域附近，用來移動電極側支承體3的構件是未被固定。 -36- 201245726 以上，針對於本發明的幾個實施形態的檢查治具加以 說明，惟本發明是並未被拘束於此些實施形態者，而熟習 該項技術者容易地進行追加、刪除、改變等，是被包括於 本發明者，還有，本發明的技術性範圍是當然藉由所附之 申請專利範圍所述者來決定。 【圖式簡單說明】 第1圖是本發明的實施形態的檢查治具1的槪略側面 圖。 第2圖是表示於第1圖的檢查治具1的俯視圖。 第3圖是表示於第1圖的檢查側支承體2的斷面構造 的槪略部分斷面圖。 第4圖是表示於第1圖的電極側支承體3的斷面構k 的槪略部分斷面圖，第4(a)圖是表示非檢查時之狀態， 第4(b)圖是表示檢查時之狀態。 第5圖是電極側支承體3的仰視圖。 第6圖是電極體6的俯視圖。 第7圖是說明具備表示於第6圖的一實施形態的電極 體的檢查治具之非檢查時的檢查治具之狀態所用的沿著第 6圖之A-A線來觀看檢查治具的局部擴大斷面圖。 第8圖是說明具備表示於第6圖的實施形態的電極體 的檢查治具之檢查時的檢査治具之狀態所用的沿著第6圖 之A-A線來觀看檢查治具的局部擴大斷面圖。 第9圖是裝載著表示於第1圖之檢查治具的檢查裝置 -37- 201245726 的槪略側面圖。 第10Α圖是其他之實施形態的電極體的俯視圖。 第10B圖是表示圖示於非檢查時的第10A圖的電極體 之狀態的槪略的前視圖。 第10C圖是表示圖示於檢查時的第10A圖的電極體之 狀態的槪略的前視圖。 第11圖是說明具備表示於第10A圖的實施形態的電 極體的檢查治具之非檢查時的狀態所用的沿著第1 〇 A圖之 B-B線來觀看檢查治具的局部擴大斷面圖。 第12圖是說明具備表示於第i〇A圖的實施形態的電 極體的檢查治具之檢查時的狀態所用的沿著第l〇A圖之 B-B線來觀看檢查治具的局部擴大斷面圖。 【主要元件符號說明】 1 ·‘檢查治具 2 :檢查側支承體 2a :對向面 3 :電極側支承體 3a :插入孔 4 :支柱 5 :接點： 5a :導體部 5b :絕緣部 5c :第一端部 -38- 201245726 5d :第二端部 5e :前端 5 f :後端 5 g :前端緣 5 h :後端緣 7 :電極 7 a ·接觸面 8 :滑動手段 8a :軸部 13 :檢查引導孔 1 4 :彈推手段 20 :電極引導孔 22a :電極板 22b :可動板 30 :檢查裝置 3 1 :控制部（電性檢查手段） 35:第2支承盤（固定手段） 3 6 :移動機構（移動手段） 42 :限制構件 43a :抵接構件 43 :圓柱部 45 :壓縮螺旋彈簧（彈推構件） 5 0 :檢查對象 3. -39-S - 21 - 201245726 In the state of slight deflection, the abutting member 43 abuts against the rear surface of the electrode-side support 3 (the rear surface of the support plate 17), and also the front surface of the electrode-side support 3 abuts On the limit plate 47. In other words, the electrode-side support 3 is in contact with the regulating plate 47 in a state in which the elastic pushing means 14 is pushed up (see Fig. 7). Further, in this state, a slight gap is formed between the electrode-side support 3 and the electrode holding portion 6. Further, in this state, the inspection side support 2, the electrode side support 3, and the support 4 are pushed forward, and the front end 5e of the contact 5 is not opposed to the surface 2a (see Fig. 7). That is, in this state, the front end 5e of the contact 5 is housed in the inspection guide hole 13. [Summary of Inspection Apparatus] Fig. 9 is a schematic configuration diagram of the inspection apparatus 30 for loading the inspection fixture shown in Fig. 1. As shown in Fig. 9, the inspection tool of the present embodiment is used in an inspection device 30 that performs electrical inspection (specifically, inspection of disconnection or short circuit) of the inspection object 50. The inspection object 50' is formed with a check point where the end 5e is contacted before the contact 5. Further, in the object 50 to be inspected, for example, an electronic component such as 1C is placed after the inspection. Further, for example, the electronic components placed on the board are joined to the inspection points used for inspection by wire bonding. The inspection device 30 includes a control unit 31, a drive unit, and an inspection unit 33; the control unit 31' is an electric circuit including an inspection circuit for determining the conduction state of the inspection object 5 0-22-201245726. The inspection means; the drive unit (not shown) is connected to the control unit 31; the inspection unit 33 is driven by the drive unit. The electrode 7 of the inspection jig 1 is electrically connected to the control unit 31 via the wiring 24. The inspection mechanism 33 includes a first support disk 34, a second support disk 35, and a moving mechanism 36. The first support disk 34 is fixed with the inspection jig 1; the second support plate 35 is disposed opposite to the first support disk 34, and the inspection object 50 is fixed; the moving mechanism 36 is oriented The first support disk 34 is moved in the front-rear direction. The moving mechanism 36 is constituted by, for example, a ball screw mechanism or a hydraulic mechanism, and is driven by a driving portion. In the present embodiment, the second support plate 35 is a fixing means for fixing the inspection object 50, and the moving mechanism 36 moves the inspection jig in a direction in which the inspection object 50 approaches the opposing surface 2a of the inspection jig 1. 1 means of moving. Further, the moving mechanism 36 may move the second support tray 35 in the front-rear direction. In addition, the first support disk 34 is configured to be movable in the vertical direction of the paper surface of FIG. 9 by a moving mechanism (not shown), and the second support disk 35 is oriented to the left and right of FIG. 9 by a moving mechanism (not shown). The direction can be configured to be movable. [Inspection procedure of inspection object and operation of inspection jig at the time of inspection] -23- 201245726 Fig. 7 is a diagram showing the state of the inspection jig at the time of non-inspection, and Fig. 8 is a view showing the inspection jig at the time of inspection. The schema of the state. The inspection apparatus 30 of the present embodiment performs electrical inspection of the inspection object 50 while abutting against the opposing surface 2a of the inspection jig 1 and the inspection object 50. Specifically, the inspection device 30 is inspected as follows. First, the inspection jig 1 is fixed to the first support tray 34, and the inspection object 50 is fixed to the second support tray 35. As shown in Fig. 7, in this state, the compression coil spring 45 is slightly deflected, so that the abutting member 43 abuts against the rear surface of the electrode-side support 3, and is restrained by the regulating plate 47. The front surface of the electrode side support 3 is connected. Further, a slight gap is formed between the rear surface of the electrode-side support 3 and the front surface of the electrode 6. Further, in this state, the distal end 5e of the contact 5 is not protruded from the opposing surface 2a, but is accommodated in the inspection guide hole 13. Further, in this state, the end 5f of the contact 5 is the contact surface 7a which is in contact with the electrode 7. Further, in this state, the rear end 5f of the contact 5 may be slightly separated from the contact surface 7a. Then, when the drive unit drives the moving mechanism 36 by the control signal of the control unit 31, the first support disk 34 approaches the second support disk 35, and soon the facing surface 2a abuts against the object to be inspected 50«. In the case where the opposite surface 2a abuts against the object to be inspected 5, the elastic thrust of the elastic pushing means 14 is resisted, so that the inspection side support 2, the electrode side support 3, and the support 4 face the electrode. The body 6 moves relatively. That is, the inspection side support body - 24 - 201245726 2, the electrode side support body 3 and the support 4 are relatively moved with respect to the electrode body 6 in the direction in which the contact surface 7a approaches the opposite surface 2a. Further, at this time, the front surface of the electrode-side support 3 is in a state of being separated by the regulating plate 47. Then, the end 5f of the contact 5 is pushed forward by the electrode 7. At this time, the 'front end 5e of the contact 5 is abutting against the check point of the test object 50'. Therefore, the middle portion of the joint 5 in the inclined posture between the inspection side support body 2 and the electrode side support body 3 is Flexed (buckling). Until the rear surface of the electrode-side support 3 abuts against the front surface of the electrode body 6, 'the inspection side support 2 or the like moves relative to the electrode body 6'. When the amount of deflection of the intermediate portion of the contact 5 becomes a predetermined amount, Then, the front end 5e of the contact 5 accommodated in the inspection guide hole 13 comes into contact with the inspection point with a predetermined contact pressure. At this time, 'when the opposite surface and the inspection point are formed without any gaps', the front end 5 e is not protruded from the opposite surface, but when there is a slight gap, the front end 5 e is only protruded from the opposite surface. The component of the gap. Further, the direction of deflection of the intermediate portion of the bent contact 5 is a direction corresponding to the oblique direction of the contact 5. At this time, the shaft portion 8a of the slide mechanism 8 is moved rearward by the electrode-side support body 3 attached to one end. Therefore, the length of the bearing portion 3b protrudes rearward, and the amount of movement of only the electrode-side support body 3 becomes The variable length 〇 then says that when the front end 5e of the contact 5 contacts the inspection point of the inspection object 50 with a predetermined contact pressure, then the contact point 5 is turned on to the inspection point. In this state, the control unit 31 supplies the predetermined signal to the inspection jig 1 or 201245726, and receives the electric potential detected by the jig 1 to perform the electrical test of the test object 50. Further, in the state shown in FIG. 8, when the first support disk 34 is moved in the direction away from the second support disk 35 (that is, when the opposing surface 2a is moved in the direction away from the inspection object 50), Then, the deflection of the middle portion of the joint 5 is gradually solved, and the inspection jig 1 is returned to the state shown in Fig. 7. In other words, in a state where the compression coil spring 45 is slightly deflected, the front surface of the electrode-side support 3 abuts against the regulating plate 47, and the front end 5e of the contact 5 is housed in the inspection guide hole 13. Also, at this time, the rear end 5f of the contact 5 is in contact with the contact surface 7a of the electrode 7. [Effect of the present embodiment] As described above, in the second embodiment, the second end portion 5d of the contact 5 is formed with a smaller diameter hole 17b than the support plate 17 formed on the rearmost side of the electrode side support body 3. The length in the axial direction is also shorter. Therefore, the electrode-side support 3 can stably maintain the rear end side of the contact 5, and thus the positioning of each member (electrode-side support 3, electrode body 6, slide mechanism 8, etc.) when assembling the inspection jig is required. It is easy to make the contact surface 7a which can be connected to the electrode 7 with excellent precision at the rear end 5f. Further, when the rear surface of the electrode-side support 3 is in close contact with the front surface of the electrode body 6, the rear end 5d of the contact 5 is pressed against the contact surface 7a of the electrode 7. At this time, since the end side of the contact 5 is stably held by the electrode-side support 3 as described above, the position of the contact of the rear end 5d with the contact surface 7a does not change every -26-201245726. Therefore, the contact resistance of the contact 5 can be kept constant. Therefore, the correct inspection result can be obtained. Further, the operation of the inspection jig 1 and the inspection device 30 is as described above, but in actual use, for example, a device (not shown) that automatically supplies or carries out the inspection object 50 is provided. The inspection device 30 is configured to continuously perform inspection of the inspection object. At this time, the inspection jig 1 is an operation when the above inspection is continuously performed. At this time, as described above, the end side of the contact 5 is stably held by the electrode-side support body 3, so that the position of the rear end 5f and the contact surface 7a is caused by the inspection operation even when the inspection is continuously performed. It does not change relatively, so that the wear of the contact surface 7a caused by the rear end 5f frictional contact surface 7a can be prevented. Further, the elastic pressing mechanism 14 causes the inspection side support 2 and the electrode side support 3 to face the contact surface 7a formed on the electrode 7 and the opposing surface 2a formed on the inspection side support 2. And the pillar 4 is pushed. Therefore, the inspection object 50 does not abut against the abutting surface 2a, and when the external force is applied to the inspection jig 1, the elastic inspection force of the elastic force means 14 is performed, and the inspection side support body 2 and the electrode side support body are pushed. In the state in which the front end 5a of the contact 5 is not protruded from the opposing surface 2a (that is, the state in which the front end 5a of the contact 5 is disposed in the inspection guide hole 13). On the other hand, when the inspection object 50 is inspected, if the opposite surface 2a and the inspection object 5 are abutted, the elastic force against the elastic pushing means 14 can approach the contact surface 7a and the opposite surface 2a. Therefore, at the time of inspection, the front end 5a of the joint 5 which is inserted through the inspection guide hole 13 is slightly protruded from the opposite surface 2a, and is contacted with the inspection object 50 at a predetermined contact pressure. In the present embodiment, when the inspection object 50 is inspected, the opposite end 5a of the contact 5 can be brought into contact with the inspection object with a predetermined contact pressure in a state where the opposite surface 2a is in contact with the inspection object 50. 50 checkpoints. Therefore, the amount of deviation of the front end 5e of the contact 5 which contacts the front end 5e in contact with the inspection point of the inspection object 50 can be suppressed to the extent of the gap between the first end portion 5c of the contact 5 and the inspection guide hole 13. In other words, the amount of deviation of the front end 5 e of the contact 5 in the state in contact with the inspection point can be made small, and as a result, it is possible to suppress the occurrence of a flaw on the surface of the inspection point of the inspection object 50. In particular, in the present embodiment, the inspection guide hole 13 has a guiding direction toward the inspection object 50, and the electrode guiding hole 20 has a guiding direction inclined to the probe guiding direction of the front end side insertion hole, and the contact point The first end portion 5c of the fifth portion is disposed at a position inclined to one side of the guide end direction of the electrode guide hole 20 with respect to the second end portion 5d of the contact 5. Therefore, when the inspection object 50 is inspected, the intermediate portion of the contact 5 disposed in the gap between the inspection side support body 2 and the electrode side support body 3 is buckled, and thus the state of the inspection point contacting the inspection object 50 is in a state of being in contact with the inspection point 50. The front end 5e of the contact 5 is easily deviated. However, with the configuration of this embodiment, the amount of deviation of the front end 5e of the contact 5 in contact with the inspection point can be made small. In the present embodiment, the "elastic pushing means 14" is attached to the electrode body 6 and pushes the electrode side support body 3. Therefore, when the opposing surface 2a abuts against the object to be inspected 50 (that is, at the time of 'inspection'), the inspection-side support body 2, the electrode-side support body 3, and the connection body 4 which are fixed to each other can be integrated. For the electrode -28-201245726, the body 6 is relatively moved, and it becomes a check point where the front end 5e of the plurality of contacts 5 can be surely made in contact with the object 50 to be inspected. In other words, the inspection side support body 2, the electrode side support body 3, and the connection body 4 which are fixed to each other have high rigidity, and are not easily deformed even when the electrode body 6 is relatively moved, so that the opposite side can be obtained. The amount of protrusion of the front end 5e of the plurality of contacts 5 of 2a is made approximately equal, and becomes a check point at which the front end 5e of the plurality of contacts 5 can be surely made in contact with the object 50 to be inspected. In the present embodiment, the spring pushing means 14 has an abutting member 43 that abuts against the rear surface of the electrode side support body 3, and the front end of the cylindrical portion 43a of the abutting member 43 is formed with the electrode side support body. 3 plane parallel to the surface of the square. Therefore, the portion of the rear surface of the electrode-side support 3 that the abutting member 43 abuts does not wear, and there is no change in the spring force caused by the spring pushing means 14, so that there is a plurality of elastic pushing means. 14 is a spring thrust that remains uniform and can be inspected. In the present embodiment, the inspection jig 1 is provided with a regulating member 42 that abuts against the front surface of the electrode-side support 3 and restricts the operation of the electrode-side support 3 facing forward. Therefore, in the front-rear direction, the positioning of the inspection-side support 2, the electrode-side support 3, and the connection body 4 when the external force is not applied to the inspection jig 1 can be performed. [Other embodiments] The above-described embodiments are suitable for the present invention. An example of the form is not limited to the scope of the present invention, and various modifications can be made without departing from the scope of the present invention. In the above embodiment, the contact surface 7a of the electrode 7 which is in contact with the end 5f after the contact 5 is formed in a planar shape, but is not limited to this shape. For example, a shape such as a bulge may be formed by plating or the like on the rear contact surface 7a in which the contact surface 7a is formed in a planar shape. In the above embodiment, the contact 5 has a front end 5a or a rear end 5f which is formed in a spherical shape as shown. For example, the front end 5a or the rear end 5f may have a conical shape so as to have a slope toward the front end, or may be a flat shape forming a right angle with respect to the long axis direction of the contact 5. In the above-described embodiment, the contact portion 5 is such that the intermediate portion between the inspection side support 2 and the electrode side support 3 is inclined, and is inserted into the inspection side support 2 and the electrode side support 3, but the contact point 5 is a mode in which the intermediate portion does not become inclined, and may be inserted into the inspection side support body 2 and the electrode side support body 3. In the above embodiment, the spring pushing means 14 is a front end of the abutting member 43a, and has a flat surface parallel to the rear surface of the electrode side support body 3. For example, the shape of the front end of the abutting member 43a may be a shape having a slightly rounded taste than the flat surface. In the above-described embodiment, the spring pushing means 14 generates the spring force by the compression coil spring 45 as the spring pushing member. For example, the spring pushing means 14 is a spring force generated by using a spring member such as a tension coil spring or a leaf spring, or an elastic member such as rubber as the spring pushing member -30-201245726. In the above-described embodiment, the inspection jig 1 is provided with a regulating member 42 that abuts against the front surface of the electrode-side support 3 and restricts the operation of the electrode-side support 3 and the like toward the front. For example, the inspection jig 1 may include an operation restricting member that abuts against the opposing surface 2a of the inspection-side support 2 and restricts the inspection-side support 2 from facing forward. In addition, the inspection jig 1 may not include a restriction member that restricts the forward movement of the electrode-side support 3 or the like. At this time, it is preferable to provide a retaining member for preventing the electrode-side support 3 and the like from falling forward. In the above aspect, the inspection side support body 2 is constituted by the three support plates 10 to 12. For example, the inspection side support body 2 may be formed of two or less or four or more support plates. Similarly, in the above-described embodiment, the electrode side support body 3 is constituted by the three support plates 15 to 17, but the electrode side support body 3 may be formed by two or less or four or more support plates. Further, in the above-described embodiment, the shaft portion 8a of the guide mechanism extending rearward from the support plate 17 of the electrode-side support body 3 is fixed to the support plate 17, but the shaft portion 8a is detachably attached to the support plate 17 as well. can. Hereinafter, inspection tools according to other embodiments will be described based on Figs. 10A, 10B, 10C, 11 and 12. In the embodiment shown in Figs. 1 to 9, the end portion of the shaft portion 8a of the slide mechanism 8 η· α -31 - 201245726 is fixed to the support plate 17 of the electrode side support body 3, and The cylindrical portion 43a of the elastic pushing means 14 penetrates the through hole of the electrode body 6, and the rear surface of the support plate 17 of the electrode side support body 3 is pushed toward the inspection side support body 2. In the embodiment shown in FIG. 10B, FIG. 10B, FIG. 10C, FIG. 12 and FIG. 12, the details are as follows. The front end portion of the shaft portion 8a of the slide mechanism 8 is fixed. The movable portion 22b' of the movable plate 22b' of one of the support plates 22 of the electrode body 6 is a rear surface of the movable plate 22b of a portion of the support plate 22 of the electrode body 6 facing the inspection side support 2 Bouncing. Fig. 10A is a plan view of the electrode assembly 6 of the second embodiment, and Figs. 10B and 10C are front views of the electrode body 6 shown in Fig. 10A. Similarly to the first embodiment, in the second embodiment, the electrode body 6 is also constituted by the support plates 22 and 23 and the support member 25. However, in the second embodiment, the central electrode plate 22a fixed to the contact surface 7a of the electrode 7 corresponding to the support plate 22 is formed by the movable plate 22b disposed around the electrode plate 22a. The electrode plate 22a is fixed to the support plate 23, but the movable plate 22b is pushed to be separated by the support plate 23. That is, as shown in Figs. 10B and 10C, the movable plate 22b is movable in the front-rear direction of the inspection jig. Further, as shown in Fig. 10A, the small projections 52a are provided in the vicinity of the four corners on the front surface of the movable panel 22b, and the two small projections in the longitudinal direction of the right side toward the 10A plane are provided. There is a large protrusion 52b between them. These projections are recessed (not shown) formed in the support plate 17 in a state where the movable plate 22b abuts against the support plate 17, and the movable plate 22b and the support plate 17 are positioned. Further, as shown in Fig. 10A, four spring pushing means 26 are provided in the vicinity of the four corners on the electrode plate 22a. These bouncing means are not shown, but have a cylindrical portion and a cylindrical portion similarly to the elastic pushing means 14, and the cylindrical portion is fixed in the support member 25 and the cylindrical portion abuts against the rear surface of the support plate 17. one side. The spring pushing means 43a is applied to the support plate 17 with the movable plate 22b, so that the spring force caused by the spring pushing means 43b is not applied to the support plate 17 in the field facing the electrode plate 22a. As a result, there is a possibility that the support plate is bent and recovered only by the elastic thrust of the projectile arm 43a. Therefore, by the elastic pushing means 26, the supporting plate 17 for applying the elastic force to the electrode plate 22a facing the electrode is formed so as to be comparatively dispersed in the supporting plate and a uniform elastic thrust can be applied. Fig. 11 is a partially enlarged cross-sectional view showing the inspection jig including the electrode assembly of the second embodiment, showing the state of the inspection jig at the time of non-inspection. As shown in the figure, the movable plate 22b is held at a position separated by the support plate 23. As shown in Fig. 11, the bearing portion 8b of the slide mechanism 8 is fitted into a through hole provided in the support plate 23 of the electrode body 6 and the support member 25, and is fixed to the front end portion of the shaft portion 8a of the slide mechanism 8. It is embedded in the through hole 22 bh formed in the movable plate 22b and fixed. Thereby, the movable plate 22b can be moved in parallel along the axial direction of the shaft portion 8a. Further, the tubular member 44 of the spring pushing means 14 is fitted in a through hole provided in the support member 25, and is fixed to the end portion of the cylinder-33-201245726 portion 43a of the elastic pushing means 14, It is a state in which the front end surface of the through support plate 23 abuts against the movable plate 22b and faces the plate 22b. As shown in Fig. 10A, the movable portion 22b & defines the shaft portion 8a of the slide mechanism 8, and the movable portion is at the position indicated by the symbol 43a to abut the end portion of the spring pushing means. That is, the slide mechanism 8 and the spring pushing means act on the movable plate 22b. These positions are the same as those of the cylindrical portion 43a of the shaft of the slide mechanism 8 of the support plate 22 of the first electrode body 6. Referring again to Fig. 11, after the support plate 2 2b of the body 6 shown in the figure, the front end face of the projection 43a is pushed back, and the movable plate 22b and the electrode side support plate 47 are pushed. The gap between the movable plate 22b and the support plate 23. Then, at the time of inspection, the jig 1 is inspected (the first object 50 moves, and when the opposing side object 50 of the inspection side support body 2 is moved, the electrode side support body 3 is separated toward the rear by 47. With the movement, the movable plate 22b resists the elastic thrust of the contraction coil spring 45 and lowers the movable plate 22b in the cylindrical portion 44 of the cylindrical portion 43a 25 while moving along the direction of the sliding mechanism 8β. As shown in Fig. 12, the plate 22b is The movable plate 22b and the support plate 23, the contact between the end portion and the electrode after the contact becomes a positive through hole, and the cylindrical portion 43a: 14 of the aspect 14 after the movable 3 through hole 22bh is fixed to the front by the movable plate 3b In the embodiment, in the state of the through-shape 8a and the spring-pushing means in the embodiment, the cylindrical portion body 3 of the electrode=segment 14 is formed with some micro-images toward the restriction), and the inspection plate 2a abuts against the inspection and is pushed back by the restriction plate. [The pushing force of the pushing means 14 is pushed down to the axis of the shaft portion 8a of the support member, and there is a gap between the stops and the movable. It is possible to prevent the movable plate 22b from abutting against the support plate 23 and stopping the lowering before the actual use. Further, as shown in Fig. 1, the surface of the support plate 17 of the electrode-side support 3 has the same shape as that of one of the movable movable plate 22b and the electrode plate 22a, and thus is pushed by the support plate 17. The entire movable plate 22b and the electrode plate 22a are pressed. In other words, when the movable plate 22b is stopped, one surface on the front side of the movable plate 22b and one surface on the front side of the electrode plate 22a are arranged in the same plane. Thereby, the contact of the end portion with the electrode after the contact can also be surely ensured. Further, at this time, a gap is formed between the rear surface of the limiting plate 47 and the front surface of the support plate 15 of the electrode-side support body 3. The function of the probe at the time of inspection is the same as that of the first embodiment. Further, when the jig portion 40 is removed by the inspection jig 1, the contact surface of the support side plate 7 of the electrode side support body 3 can be extracted and attached. At this time, in the first embodiment, the shaft portion 8a of the four sliding mechanisms 8 is fixed to the rear surface of the support plate 17 of the electrode-side support body 3, and the four shaft portions 8a are surrounded by the four shaft portions 8a. The four corners of the portion formed by the electrode guiding holes 20 of the second end portion 5d of the contact are mounted. In particular, with the miniaturization of the inspection object in recent years, the jig main body portion 40 of the inspection jig is miniaturized, and as a result, the interval between the four shaft portions 8a fixed to the support plate 17 is narrowed. Access to the contacts becomes difficult. Further, the support plate used for the jig main body portion 40 can be made thin by the miniaturization. Therefore, if such a thin support plate is difficult to process, or because a plurality of holes are provided, there is a problem that the strength of the support plate body is lowered. However, in the second embodiment, the shaft portion 8a of the slide mechanism 8 is fixed to the movable plate 22b by -35-201245726 and is fixed to the support plate 17 of the electrode-side support body 3, so that the shaft portion 8a is not In addition, the work of the main body of the support body is not reduced, and the strength of the main body of the support body 17 is not reduced. Therefore, even if the jig main body portion 40 is miniaturized, maintenance such as replacement of the contacts can be easily performed. In the second embodiment described above, the electrode body 6 is constituted by the electrode plate 22a and the movable plate 22b. Instead of this, the electrode body 6 is integrally used in the same manner as in the first embodiment, and is disposed between the support plate 17 of the electrode-side support 3 and the support plate 22 of the electrode body 6, and is placed on the other hand. a rectangular plate freely, and the front end of the shaft portion 8a of the sliding mechanism 8 is fixed to the plate, and the front end surface of the cylindrical portion 43a of the spring pushing means 14 abuts against the rear surface of the plate, and the plate is pushed The support plate 17 to the electrode side support 3 may be used. However, in the plate, it is necessary to have a structure in which the end portion of the contact protruding from the electrode-side support 3 can be brought into contact with the electrode of the electrode body 6. For example, a notch is formed in a portion of the plate corresponding to the contact positions, or a conductive structure β is provided in the portion. In the case of this embodiment, the shaft portion 8a of the sliding mechanism 8 is also the same as in the second embodiment. The support plate 17 is fixed to the movable plate 22b and is not fixed to the electrode-side support 3, so that maintenance of replacement of contacts in the region of the contact of the electrode-side support 3 is easily performed. get on. When the electrode-side support 3 is pushed toward the inspection-side support 2 side during the non-inspection, the movable plate can be retracted while holding the electrode-side support 3 and the inspection-side support 2 in parallel during inspection. Any one may be used, but the member for moving the electrode-side support 3 is not fixed in the vicinity of the end portion of the end portion where the contact of the electrode-side support body 3 is disposed. -36-201245726 In the above, the inspection jig according to some embodiments of the present invention has been described. However, the present invention is not limited to such embodiments, and those skilled in the art can easily add and delete. The changes and the like are included in the inventors, and the technical scope of the present invention is of course determined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic side view of an inspection jig 1 according to an embodiment of the present invention. Fig. 2 is a plan view showing the inspection jig 1 of Fig. 1 . Fig. 3 is a schematic partial cross-sectional view showing the cross-sectional structure of the inspection-side support body 2 of Fig. 1. Fig. 4 is a schematic partial cross-sectional view showing a cross-sectional structure k of the electrode-side support 3 in Fig. 1, wherein Fig. 4(a) shows a state at the time of non-inspection, and Fig. 4(b) shows a view The status at the time of inspection. Fig. 5 is a bottom view of the electrode side support body 3. Fig. 6 is a plan view of the electrode body 6. Fig. 7 is a view showing a partial enlargement of the inspection jig viewed along the line AA of Fig. 6 for use in the state of the inspection jig at the time of non-inspection of the inspection jig of the electrode body according to the embodiment of Fig. 6; Sectional view. Fig. 8 is a partially enlarged cross-sectional view showing the inspection jig taken along line AA of Fig. 6 for use in the state of the inspection jig at the time of inspection of the inspection jig of the electrode body of the embodiment of Fig. 6; Figure. Fig. 9 is a schematic side view showing an inspection apparatus -37-201245726 in which the inspection jig shown in Fig. 1 is mounted. Fig. 10 is a plan view showing an electrode body of another embodiment. Fig. 10B is a schematic front view showing the state of the electrode body of Fig. 10A at the time of non-inspection. Fig. 10C is a schematic front view showing the state of the electrode body shown in Fig. 10A at the time of inspection. FIG. 11 is a partially enlarged cross-sectional view showing the inspection jig viewed along the line BB of the first 〇A diagram for the non-inspection state of the inspection jig of the electrode assembly according to the embodiment of FIG. 10A. . Fig. 12 is a partially enlarged cross-sectional view of the inspection jig viewed along line BB of the first 用A diagram for the state in which the inspection jig of the electrode body of the embodiment of the first embodiment is provided. Figure. [Explanation of main component symbols] 1 · 'Inspection jig 2 : Inspection side support 2a : Opposite surface 3 : Electrode side support 3a : Insertion hole 4 : Pole 5 : Contact point : 5a : Conductor part 5b : Insulation part 5c : first end -38 - 201245726 5d : second end 5e : front end 5 f : rear end 5 g : front end edge 5 h : rear end edge 7 : electrode 7 a · contact surface 8 : sliding means 8a : shaft portion 13 : Inspection guide hole 14 : Bouncing means 20 : Electrode guide hole 22 a : Electrode plate 22 b : Movable plate 30 : Inspection device 3 1 : Control portion (electrical inspection means) 35: Second support disk (fixing means) 3 6: moving mechanism (moving means) 42: restricting member 43a: abutting member 43: cylindrical portion 45: compression coil spring (pushing member) 5 0 : inspection object 3. -39-