JP2009271005A - Substrate inspection tool - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate inspection tool can shorten an arrangement pitch of respective contacts for inspection to cope with minute inspection points. <P>SOLUTION: This substrate inspection tool for inspecting electric characteristics of a substrate to be inspected has a plurality of groups of bar-like contacts having end parts on one side being in pressure-contact with an inspection point and having current conductivity and flexibility, a holding body holding the groups of contacts, and an electrode body provided with electrode parts arranged by opposing to end parts on the other side of respective contacts in the groups of contacts. The group of contacts are provided with a pair of contacts being two contacts abutted on one inspection point. The holding body has an inspection point guide part having a guide hole for guiding the end part on one side of the contact to the inspection point. The inspection point guide part has a first plate-like member arranged on an inspection point side and having a first guide hole for guiding the contact and a second plate-like member having a second guide hole for guiding the contact. The pitch of the pair of first guide holes for guiding the pair of contacts is set to be shorter than the pitch of a pair of second guide holes for guiding the pair of contacts. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

The present invention relates to a substrate inspection jig, and more particularly to a substrate inspection jig that can reduce the arrangement pitch between inspection contacts and cope with fine inspection points.
The present invention is not limited to a printed wiring board, but includes, for example, various substrates and semiconductor wafers such as flexible substrates, multilayer wiring substrates, electrode plates for liquid crystal displays and plasma displays, and package substrates and film carriers for semiconductor packages. In the present specification, these various test substrates are collectively referred to as “substrates”.

The substrate inspection jig is used to electrically connect a substrate to be inspected and a substrate inspection apparatus for calculating the electrical characteristics of the substrate. By using this substrate inspection jig, the substrate inspection apparatus supplies power for performing inspection to an inspection point set on the substrate to be inspected, or extracts an electrical signal from the inspection point. It will be.
The substrate inspection jig includes a plurality of contacts whose one end is in conductive contact with the inspection point and whose other end is in conductive contact with the electrode portion of the substrate inspection apparatus.
When the contact is pressed against the substrate and the electrode portion, the substrate and the substrate inspection apparatus are electrically connected.

As such a substrate inspection jig, an invention of a substrate inspection jig as disclosed in Patent Document 1 has been proposed.
In the substrate inspection jig disclosed in Patent Document 1, a technique is disclosed in which a plurality of contacts (probes) are used while being held by a front end side support body and a rear end side support body having probe insertion holes. Yes. In the substrate inspection jig disclosed in Patent Document 1, a technique is disclosed in which the probe insertion hole of the front end side support is arranged at a position shifted to the inclined side of the probe insertion hole of the rear end side support. In the substrate inspection jig of Patent Document 1, the probe insertion hole is arranged at a position shifted in this way, so that the intermediate portion of the probe is inclined between the front end side support body and the rear end side support body. The probe can be smoothly bent when the tip of the probe comes into contact with the inspection object. Further, by forming the substrate inspection jig in this way, it is not necessary to shift the front end support and the rear end support when mounting the probe, and the probe can be easily replaced. Can do.

As such a substrate inspection jig, an invention of a substrate inspection jig as disclosed in Patent Document 2 has also been proposed.
The jig for substrate inspection disclosed in Patent Document 2 discloses a technique of forming a taper shape in which the diameter gradually increases toward the center portion in the longitudinal direction of the insulating coating portion covering the contact, It has been proposed for the purpose of easily and smoothly inserting and removing the contact with respect to the hole.

JP 2005-338065 A JP 2007-333542 A

  However, in such a substrate inspection jig, the probe insertion hole of the front end side support body and the probe insertion hole of the rear end side support body are arranged at the inclined positions, and the probe mounting is merely facilitated. For this reason, when the contact is brought into contact with a minute inspection point as in recent years, there is a problem that the contact cannot be made at a pitch shorter than the outer diameter of the insulating portion of the contact. In particular, in Cited Document 2, since the insertion hole of the first plate and the insertion hole of the second plate are arranged coaxially, the pitch of the contact is set to the size of the diameter of the contact (insulation coating portion of the contact). It had the problem of being affected. The cited document 1 is also in the same state.

The present invention has been made in view of such a situation, and provides a substrate inspection jig capable of reliably contacting a contact with a fine inspection point.
In particular, when two contacts need to be brought into contact with one inspection point as used in the four-terminal measurement method, the contact pitch is minimized as much as possible to ensure even minute inspection points. A substrate inspection jig capable of bringing two contact elements into contact with an inspection point is provided.

According to the first aspect of the present invention, in order to inspect the electrical characteristics of the substrate to be inspected, electrical continuity between the substrate inspection apparatus main body and a plurality of inspection points provided in the wiring pattern of the substrate to be inspected. A substrate inspection jig for obtaining a plurality of rod-shaped, electrically conductive and flexible rods having ends that are electrically conductive at both ends and one end pressed against the inspection point A contact group, a holding body that holds the contact group, and the other end of each contact of the contact group are disposed opposite to each other and are electrically connected to the substrate inspection apparatus main body. The electrode assembly includes an electrode body and an electrode body that supports the holding body, and the contact group includes a pair of contact elements that are in contact with one inspection point. Inspection point guide having a guide hole for guiding one end of the contact to the inspection point The inspection point guide part is disposed on the inspection point side and has a first plate-like member having a first guide hole for guiding the contact, and facing the first plate-like member, A second plate-like member disposed on the electrode body side and having a second guide hole for guiding the contact, and the pitch of the pair of first guide holes for guiding the pair of contacts is Provided is a substrate inspection jig which is formed shorter than a pair of second guide hole pitches for guiding a contact.
According to a second aspect of the present invention, the contact is formed by forming an insulating coating portion made of an insulating material on a portion excluding the rod-shaped both ends, and the diameter of the insulating coating portion is the pitch of the second guide hole. The substrate inspection jig according to claim 1, wherein the substrate inspection jig is formed smaller.
According to a third aspect of the present invention, the holding body includes a third plate-like member having a third guide hole for guiding the other end of the contact to the electrode portion, and the third guide hole. 3. The substrate inspection jig according to claim 2, wherein the insulating portions of the pair of contacts are shifted in a direction with less mutual interference.
According to a fourth aspect of the present invention, the first guide hole of the holder is a straight line connecting the third guide hole and the second guide hole, and the second plate-like member extending from the second guide hole. The board inspection jig according to claim 3, wherein the board inspection jig is formed on the first plate-like member in the vicinity sandwiched between the lines.

According to the first aspect of the present invention, in the pair of contacts that abut against one inspection point, the pitch of the first guide holes of the first plate member is greater than the pitch of the second guide holes of the second plate member. Since it is formed short, the pitch between the tips of the contacts can be made smaller than the outer diameter of the insulating coating portion, and the pair of contacts can be reliably brought into contact with minute inspection points.
In particular, when the inspection point has a curved shape such as a solder bump, the pair of contacts slides down due to a slight misalignment, and a poor contact state can be prevented.
According to the invention described in claim 2, since the diameter of the insulating coating portion of the contact is formed smaller than the pitch of the second guide holes, the mutual interference at the time of inserting and bending the pair of contacts is alleviated. Connection reliability can be ensured.
According to invention of Claim 3, since the 3rd guide hole has shifted to the direction of bending, the state of bending is controlled, there is little mutual interference of an insulating-film part, a contact load is stabilized, and reliable. A connection is obtained.
According to the invention of claim 4, the first guide hole is in the vicinity of the position sandwiched between the straight line connecting the third guide hole and the second guide hole and the straight line extending directly below the third guide hole. Since it is formed, it becomes easy to insert a contact having a flat tip from the third guide hole into the first guide hole.

The best mode for carrying out the present invention will be described.
FIG. 1 shows an overall schematic configuration when a substrate inspection jig 1 according to the present invention is used. In FIG. 1, a substrate inspection jig 1 includes a plurality of contacts 2, a holding body 3 that holds the contacts 2 in a multi-needle shape, supports the holding body 3, and comes into contact with the contact 2 to be conductive. 2 shows an electrode body 4 having an electrode portion (not shown), an inspection signal processing portion 5 that processes an electric signal to be detected, and a lead wire 44 that connects the electrode portion and the inspection signal processing portion 5.
The contact 2 electrically connects the electrode part and the inspection point.
The holding body 3 holds the contact 2 in a multi-needle shape, and guides one end of the contact 2 to the inspection point and the other end to the electrode portion.
The present invention relates to the substrate inspection jig 1, and in particular, it is an object to easily perform the four-terminal measurement method by bringing two contactors 2 into contact with one inspection point. It is said.
FIG. 1 is a schematic view, and the number of contacts 2 and the number of wire cables are not particularly limited. Further, the contactor 2 and the electrode part 41 shown in the drawings are disclosed only for one or a pair of structures for convenience of explanation, and the actual substrate inspection jig 1 has a plurality of contacts and their contacts. A plurality of electrode portions corresponding to the contact 2 are provided.

The substrate inspection jig of the present invention will be described.
FIG. 2 is a cross-sectional view showing an embodiment of a substrate inspection jig according to the present invention.
A substrate inspection jig 1 according to the present invention includes a contact 2, a holding body 3, and an electrode body 4.
The contact 2 electrically connects the inspection point and the electrode part 41 of the electrode body 4. The contact 2 has ends that are electrically connected to both ends, one end is pressed against the inspection point, and the other end is pressed against the electrode portion 41.
The contact 2 includes a conductive rod-shaped member 21 and an insulating coating portion 22 that covers the periphery of the rod-shaped member 21.
The rod-shaped member 21 is a cylindrical member formed from a material having conductivity and flexibility. The tip shape of one end of this rod-like member is changed according to the inspection point that comes into contact, but when it is formed into a curved shape (semispherical shape) such as a solder bump, it is formed into a planar shape, In the case of a planar inspection point such as a plating land, it is formed in a hemispherical shape or a sharp shape. The tip shape of the other end portion of the rod-shaped member is changed according to the shape of the electrode portion 41, but when the electrode portion 41 is formed flush with the surface of the electrode body 4, the other end shape of the rod-shaped member 21 is changed. The end is formed in a curved shape.
For example, tungsten (W) or beryllium copper (BeCu) can be used for the rod-shaped member 21.

The insulating covering portion 22 is covered on the periphery of the rod-shaped member 21 and on a portion excluding both ends of the rod-shaped member 21. The insulating coating 22 is made of a non-conductive material, and for example, polytetrafluoroethylene (Teflon (registered trademark)) or polyurethane can be used.
The portion where the insulating covering portion 22 is provided is a portion excluding both ends of the rod-shaped member 21, but the first guide holes 331 a and 331 b of the first plate-shaped member 33 are rod-shaped on one end side of the rod-shaped member 21. Since it is formed to be larger than the diameter w1 of the member 21 and smaller than the diameter w2 of the insulating coating portion 22, it is necessary to form it longer than the thickness of the first plate member 33. In the embodiment shown in FIG. 2, the second plate-shaped member 34 is formed so as not to be inserted into the second guide holes 341 a and 341 b.

The length of the contact 2 is not particularly limited, but can be set to 2 to 5 cm. Although the diameter w1 of the rod-shaped member 21 is not particularly limited, a narrower shape is preferable for performing the four-terminal measurement method, and is set to 40 to 100 μm, for example (see FIG. 3).
Moreover, the thickness of the insulation coating part 22 is about 10-20 micrometers, for example, and the diameter w2 of the insulation coating part 22 is set to 60-140 micrometers, for example (refer FIG. 3).
In addition, these dimensions are not limited and are changed appropriately.

The substrate inspection jig 1 according to the present invention uses the two contacts 2 as a pair of contacts in order to bring the two contacts 2 into contact with one inspection point in order to perform the four-terminal measurement method. handle.
For this reason, by holding the pair of contacts 2 more effectively, it is possible to narrow the pitch of the positions where the contact points of the pair of contacts 2 abut.

The holding body 3 guides one end of the contact 2 to the inspection point and guides the other end to the electrode portion 41.
The holding body 3 has an inspection point guide portion 31 that guides one end portion of the contact 2 to the inspection point, and an electrode portion guide portion 32 that guides the other end portion of the contact 2 to the electrode portion 41. It becomes.
The inspection point guide portion 31 is formed of a plate member, and includes a first plate member 33 and a second plate member 34.
The first plate-like member 33 has a first guide hole 331 for guiding one end of the contact 2 and is disposed at a position (inspection point side) closest to the inspection point.
The second plate-like member 34 is disposed opposite to the first plate-like member 33 and has a second guide hole 341 that guides one end of the contact 2. The second plate member 34 is disposed on the electrode portion guide portion 32 side of the first plate member 33.

In FIG. 2, the case where a pair of contacts 2a and 2b are held is described.
The first guide holes 331a and 331b hold the contacts 2a and 2b, respectively. The first guide hole 331a holds one end of the contact 2a, and the first guide hole 331b holds one end of the contact 2b. The diameters of the first guide hole 331a and the first guide hole 331b are formed larger than the diameter w1 of the rod-shaped member 21, and are preferably slightly larger.
The second guide holes 341a and 341b hold the contacts 2a and 2b, respectively. The second guide hole 341a holds one end of the contact 2a, and the second guide hole 341b holds one end of the contact 2b.
The diameters of the second guide holes 341a and 341b are larger than the diameter w1 of the rod-like member 21, preferably slightly larger than the diameter w2 of the insulating coating portion 22, and are plate members like the first guide holes 331a and 331b. Depending on the thickness, it can be formed with two large and small coaxial holes having different diameters.

FIG. 4 is a cross-sectional view showing configurations of a first plate member and a second plate member that are one embodiment of the inspection point guide 31.
A first guide hole 331a and a first guide hole 331b are formed in the first plate member 33 at a first pitch (distance) p1. The second plate-like member 34 is formed with a second pitch p2 between the second guide hole 341a and the second guide hole 341b.
The first pitch p1 is formed shorter than the second pitch p2. By forming the first pitch p1 shorter than the second pitch p2, the pair of contacts 2a and 2b can contact the inspection points at a narrower pitch.
The amount and direction of the pitch shortening are desirably set in the center direction of the inspection point orthogonal to the thickness equivalent of the insulating coating and the bending direction of the contact 2 described later.

This first pitch p <b> 1 is preferably formed smaller than the diameter w <b> 2 of the insulating coating portion 22 of the contact 2. By forming the first pitch p <b> 1 smaller than the diameter w <b> 2 of the insulating coating portion 22, the first pitch p <b> 1 can be brought into contact with the inspection point at a pitch smaller than the insulating coating portion 22 of the contact 2. The contact can be made at a narrow interval.
In the contact 2 made of a flexible material, good operating characteristics can be obtained.

The holding body 3 includes a third plate-like member 32 having third guide holes 321 a and 321 b for guiding the other end of the contact 2 to the electrode part 41.
Although FIG. 2 shows an embodiment in which the third plate-like member 32 is formed by a single plate member, the embodiment is not particularly limited, and the third plate-like member 32 may be formed by a plurality of plate members.
As shown in FIG. 2, the third guide holes 321a and 321b are formed so as to have a diameter larger than that of the insulating cover portion 22 of the contacts 2a and 2b. The third guide holes 321a and 321b are also formed by two large and small coaxial holes having different diameters according to the thickness of the plate member, similarly to the first guide hole 331 and the second guide hole 341. Can do.
The third guide holes 321 a and 321 b serve as insertion ports when the contact 2 is held by the holding body 3.

FIG. 5 is a schematic sectional view of the side surface of FIG. 2 showing the position of each guide hole of the substrate inspection jig according to the present invention.
The first to third guide holes in which the holding body 3 is formed are formed in each plate-like member, but these guide holes are not arranged in a straight line as shown in FIG. In FIG. 5, the position of the first guide hole is indicated by reference numeral H1, the position of the second guide hole is indicated by reference numeral H2, the position of the third guide hole is indicated by reference numeral H3, and the center position of each guide hole is indicated. .
A straight line A connecting the third guide hole H3 and the second guide hole H2 is formed so as to be inclined with respect to the normal B of the plate surface of the third plate-like member 32, and determines the bending direction of the contact 2.
The first guide hole H1 is not formed at the position H4 of the first plate-like member 33 on the straight line A, but is sandwiched between the normal line C and the straight line A of the second plate-like member 34 extending from the second guide hole H2. It is preferable that the first plate member 33 is formed in the vicinity (near) of the position.
Further, the first guide hole H1 and the second guide hole H2 are arranged so that the straight line D connecting the first guide hole H1 and the second guide hole H2 does not overlap the normal line C.
When the angle between the straight line D and the normal C connecting the first guide hole H1 and the second guide hole H2 and the angle between the straight line A connecting the second guide hole H2 and the third guide hole H3 and the normal C are straight lines, The angle between D and normal C forms a smaller angle.
By forming in this way, when the contact 2 is inserted from the third guide hole H3, the contact 2 is inserted into the second guide hole H2 via the third guide hole H3. It curves according to flexibility, and the contact 2 is inserted into the first guide hole H1. That is, the 1st guide hole H1 is arrange | positioned in the position vicinity of the front-end | tip (one edge part) of the contact 2 which passes the 3rd guide hole H3 and the 2nd guide hole H2, and becomes a curved shape. For this reason, the contact 2 can be easily inserted. This is particularly effective when the tip has a planar shape.

The position of the first guide hole H1 is arranged on the first plate-like member 33 as described above, but d1 between the first guide hole HI and the second guide hole H2, the second guide hole H2, and the third guide hole H1. The distance d2 between the guide holes H3 is preferably designed at a ratio of 1: 10-30.
The distance d3 between the first guide hole H1 and the second guide hole H2 and the distance d4 between the second guide hole H2 and the third guide hole H3 are designed such that d3: d4 is 1:10 to 200. Is preferred.
d4 determines the deflection of the contact 2, and d3 facilitates the insertion of the contact 2.

The electrode body 4 is electrically connected to the other end of each contact 2 and connected to a substrate inspection apparatus (not shown) for inspecting the substrate (see FIG. 2).
The electrode body 4 includes an electrode part 41 and an electrode part holding plate 42.
One of the electrode parts 41 is in contact with the other end of the contact 2 to be in conductive contact, and the other is electrically connected to the substrate inspection apparatus. The electrode part 41 is formed of a conductive material.
For example, as shown in the embodiment shown in FIG. 2, the electrode portion 41 can be formed using a conductive wire 44 that is arranged so that the end face is flush with the surface of the electrode portion holding plate 42.

The electrode part holding plate 42 holds the electrode part 41 so as to be arranged at a predetermined position. The size and thickness of the electrode portion holding plate 42 are not particularly limited, and can be appropriately changed depending on use.
The above is the description of the configuration of the substrate inspection jig.

A method of assembling the substrate inspection jig of the present invention will be described.
When assembling the substrate inspection jig 1, the first guide hole H 1, the second guide hole H 2, and the first plate hole 33, the second plate member 34, and the third plate member 32 are the target. The three guide holes H3 are stacked so as to be arranged at predetermined positions (see FIG. 5).
Next, the contact 2 is inserted from the third guide hole H3 into the second guide hole H2. When one end of the contact 2 is inserted through the third guide hole H3 and inserted into the second guide hole H2, the contact 2 is bent according to the position of the guide holes. In this bent state, the contact 2 advances in the insertion direction. However, since the first guide hole H1 is disposed in the advance direction of the contact 2, the contact 2 is easily inserted into the first guide hole H1 and penetrates therethrough. Will do.

Similarly, the other pair of contacts 2 is inserted through a predetermined guide hole.
At this time, since the pair of contacts 2 is formed so that the pitch of the first guide holes H1 is shorter than the pitch of the second guide holes H2, the pair of contacts 2 is arranged at a narrower pitch. .

  The contact 2 has been described in detail as a pair of two, but as another embodiment, a single board inspection jig can be mixed at a normal inspection point.

The schematic block diagram of this board | substrate test | inspection jig | tool is shown. It is a schematic front view which shows one Embodiment of this jig | tool for board | substrate inspection. The tip sectional drawing of a contact is shown. It is a schematic front view of a 1st plate-shaped member and a 2nd plate-shaped member. It is a schematic side view which shows the arrangement position of a 1st thru | or 3rd plate-shaped member.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Board inspection jig 2 ... Contact 3 ... Holding body 33 ... First plate member 331 ... First guide hole 34 ... 2nd plate-shaped member 341 ... 2nd guide hole 4 ... Electrode body 41 ...... Electrode part

Claims (4)

In order to inspect the electrical characteristics of the substrate to be inspected, a substrate inspection treatment for obtaining electrical continuity between the substrate inspection apparatus main body and a plurality of inspection points provided in the wiring pattern of the substrate to be inspected. Tools,
A plurality of rod-shaped contact groups having electrical conductivity and flexibility, the ends having electrical conduction at both ends, and one end being pressed against the inspection point;
A holding body for holding the contact group;
The electrode assembly includes an electrode body that is disposed to face the other end of each contact of the contact group and that is electrically connected to the substrate inspection apparatus main body and supports the holding body. ,
The contact group includes a pair of contacts composed of two contacts that come into contact with one inspection point,
The holding body has an inspection point guide portion having a guide hole for guiding one end portion of the contact to the inspection point;
The inspection point guide part
A first plate-like member disposed on the inspection point side and having a first guide hole for guiding the contact;
A second plate-like member disposed on the electrode body side opposite to the first plate-like member and having a second guide hole for guiding the contact;
The pitch of the pair of first guide holes for guiding the pair of contacts is formed shorter than the pitch of the pair of second guide holes for guiding the pair of contacts. . The contact is formed with an insulating covering portion made of an insulating material in a portion excluding the rod-shaped both ends.
The substrate inspection jig according to claim 1, wherein a diameter of the insulating coating portion is formed smaller than a pitch of the second guide holes. The holding body has a third plate-like member having a third guide hole for guiding the other end of the contact to the electrode part,
3. The substrate inspection jig according to claim 2, wherein the third guide holes are shifted in a direction in which the insulating portions of the pair of contacts are less in mutual interference.   The first guide hole of the holding body is in the vicinity sandwiched between a straight line connecting the third guide hole and the second guide hole and a normal line of the second plate member extending from the second guide hole. The board inspection jig according to claim 3, wherein the board inspection jig is formed on the first plate-like member.

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