KR20080112365A - Substrate inspecting jig, and electrode structure of connecting electrode unit in the jig - Google Patents

Abstract

Provided is a substrate inspecting jig, which can reduce a contact resistance between a contact maker and a connecting electrode unit and which has a stable contact resistance without regard to the number of uses. In order to inspect the electric characteristics of an object substrate, the substrate inspecting jig acquires the electric conductions between a substrate inspecting device body and a plurality of substrate inspection points formed at the wiring pattern of the object substrate. The substrate inspecting jig comprises a group of electrically conductive contacts having two end portions for electric conductions, one of which is forced to contact with one of the substrate inspection points, a contact holder for holding the contact group, and a connecting electrode member including the connecting electrode unit arranged to confront the other end portions of the individual contacts of the contact group and adapted to be connected with the substrate inspecting device body. At least a portion of the side circumference near each of the other end portions is brought, when the other end portions of the contact group and the connecting electrode member are to be connected, into contact with a portion of the confronting connecting electrode unit thereby to establish the electrically conductive state. ® KIPO & WIPO 2009

Description

Substrate inspection jig and electrode structure of connection electrode part in this jig | SUBSTRATE INSPECTING JIG, AND ELECTRODE STRUCTURE OF CONNECTING ELECTRODE UNIT IN THE JIG}

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a substrate inspection jig for use in inspecting a substrate to be inspected and an electrode structure of a connecting electrode portion in a substrate inspection jig, and more particularly, to a contactor and a substrate inspection jig for a substrate inspection jig. The electrode structure of the board | substrate inspection jig which reduces the contact resistance of the electrode part of this invention, and an inspection jig which has this electrode structure.

In addition, the present invention is not limited to a printed wiring board, but is, for example, applied to various substrates such as a flexible substrate, a multilayer wiring board, an electrode plate for a liquid crystal display or a plasma display, a package substrate for a semiconductor package, a film carrier or a semiconductor wafer. The present invention can be applied to the inspection of electrical wiring in the present invention. In this specification, such various wiring boards are collectively referred to as 'substrates'.

In the conventional wiring pattern formed on a circuit board, it is necessary to accurately transmit electrical signals to electrical / electronic parts such as semiconductors and resistors such as ICs mounted on the circuit board, and therefore, printed wiring before mounting the electrical / electronic parts. The resistance value between inspection points formed in the wiring pattern to be inspected is measured for the wiring pattern formed on the substrate, the circuit wiring board having the wiring pattern formed on the liquid crystal panel or the plasma display panel, or the substrate such as the semiconductor wafer. It was judged that good and bad.

In this determination inspection, an inspection method for inspecting disconnection and short circuit in the wiring pattern is performed. In the inspection of such conduction or short circuit, the measurement terminals are brought into contact with each of the inspection points formed at two locations of the wiring pattern to be inspected, and a predetermined level of measurement current flows between the measurement terminals, thereby providing a voltage value between the measurement terminals. Was determined, and good and bad judgments were made by comparing this voltage value with a predetermined threshold value.

However, in the substrate inspection jig used in such a method, when the measurement terminals brought into contact with each of the two inspection points of the wiring pattern one by one are shared between the supply of the measurement current and the measurement of the voltage, between the measurement terminals and the inspection points. Has a problem that the contact resistance of? Affects the measured voltage, thereby decreasing the measurement accuracy of the resistance value and decreasing the reliability of the test result.

In particular, in recent years, the miniaturization of the wiring pattern formed on the circuit board has progressed, and the resistance value of the wiring pattern is decreasing, and the influence that the contact resistance has on this measured value has become a big problem.

In order to solve the problem of such contact resistance, the contactor disclosed by patent document 2 is proposed. This contact member has a substantially linear contact portion which can be contacted substantially perpendicularly to the electrode to be measured, and a portion extending along the longitudinal direction of the contact portion is composed of a material having a coefficient of thermal expansion different from that of other portions of the contact portion. . Since the contact portion is made of bimetal by such a configuration, when the contact portion is brought into contact with the electrode to be measured substantially perpendicularly under a predetermined environmental temperature and overdrive is performed in that state, the environmental temperature transmitted from the electrode to be measured is The contact causes the contact portion to bend toward a portion composed of a material having a small coefficient of thermal expansion.

However, even if such a contactor is used, it is only possible to make vertical contact with the electrode portion, and in view of the contact stability, it cannot be said that the contact has a sufficient contact stability and a low contact resistance value.

Patent Document 1: Japanese Patent Application Laid-Open No. 6-66832

Patent Document 2: Japanese Patent Application Laid-Open No. 2005-345129

This invention is made | formed in view of such a situation, and provides the electrode structure of the board | substrate inspection jig which reduces the contact resistance of the contact of a board | substrate inspection jig and the electrode part of a board | substrate inspection jig, and the inspection jig which has this electrode structure.

Invention of Claim 1 is a board | substrate test | inspection for obtaining the electrical conduction between the board | substrate test apparatus main body and the some test subject point formed in the wiring pattern of the said board | substrate to test the electrical characteristic of a board | substrate to test. As the jig for use, the substrate inspection jig has an end portion for conducting electrical conduction at both ends, and a contact group comprising contact members having a rod-like contact with one end pressed against one of the substrate inspection points; A contact electrode body connected to the substrate inspection apparatus main body including a contact supporter for supporting the contact group, and a connection electrode part disposed to face the other end of each contact of the contact group; At least a part of the side circumferential surface in the vicinity of each of the other ends when connecting the other end and the connecting electrode body of the A substrate inspection jig is provided which is brought into an electrically conductive state by contacting a portion of the connecting electrode portion opposite thereto.

The invention according to claim 2, wherein the connection electrode portion has a structure for receiving the other end of the contact opposite to the contact portion, and the conduction state of the contact and the connection electrode portion is at least the other end of the contact. And the substrate inspection jig according to claim 1, which is formed by contact between an inner surface of the connection electrode portion.

The invention as set forth in claim 3, wherein the connecting electrode portion is shaped such that at least a part of the other end of the contact opposite to them can be inserted in a flowable manner. The substrate inspection jig according to claim 1 or 2 is provided. do.

Invention of Claim 4 is provided with the board | substrate inspection jig of any one of Claims 1-3 characterized by the said connecting electrode part being formed in cylindrical shape.

The invention according to claim 5 is provided with the substrate inspection jig according to any one of claims 1 to 4, wherein the connection electrode portion is formed to be inclined or curved with respect to the long axis of the contact.

The invention according to claim 6, wherein the connection electrode part has a sliding part that slides in a direction perpendicular to the inward and outward direction of the contact. The jig for inspection of a substrate according to any one of claims 1 to 5 is provided.

The invention according to claim 7 provides the substrate inspection jig according to claim 1, wherein the other end of the contact is bent with respect to the long axis of the contact.

The invention according to claim 8, wherein the contact support has a first support having a first support hole for supporting the vicinity of one end of the contact, and a second support hole for supporting the vicinity of the other end of the contact. It has a 2 support part, The said 2nd support part is arrange | positioned in contact with the said electrode body, The board | substrate inspection jig of Claim 1 is provided.

The invention according to claim 9, wherein the contact support has a first support having a first support hole for supporting the vicinity of one end of the contact, and a second support hole for supporting the vicinity of the other end of the contact. It has 2 support parts, The said 2nd support part is arrange | positioned at predetermined intervals with the said electrode body, The board | substrate inspection jig of Claim 1 is provided.

The invention according to claim 10, wherein the contact supporter comprises a protective part which slides in the long axis direction of the contact so that the contact protrudes in use when the other side of the contact makes contact with the connecting electrode portion. The board | substrate inspection jig of Claim 1 is provided.

In the invention described in claim 11, the range in the vicinity of the other end is a range in which the side circumferential surface of the other end can contact at least the connection electrode portion at the time of the connection. Provide inspection jig.

The invention according to claim 12, in order to inspect the electrical characteristics of the substrate under test, to obtain electrical conduction between the substrate inspection apparatus main body and the plurality of substrate inspection points formed on the wiring pattern of the substrate under test. As an electrode structure of the contact electrode part which is contact-contacted with the other end of the said contact point which the contact-contacted contact and the said contact electrode body connected to the said contact | connecting board | substrate inspection apparatus main body are brought into contact with the said contact point, and are connected to the said test | inspection point. And the connecting electrode portion is in contact with a portion of the connecting electrode portion in which at least a portion of the side circumferential surface in the vicinity of the other end portion of the contactor opposes this when connecting the other end portion of the contact with the connecting electrode body. Provided is an electrode structure of a connection electrode portion.

The above problems are solved by providing these inventions.

Effect of the Invention

According to the invention as set forth in claim 1, when connecting the other end of the contact group and the connecting electrode body, at least a part of the side circumferential surface in the vicinity of the other end of the contact member is electrically contacted with a part of the connecting electrode part opposite thereto. Since the conductive state becomes conductive, the contact resistance value between the contactor and the connecting electrode portion can be reduced, and a jig for inspecting the substrate having a stable contact resistance value regardless of the number of times of use is provided.

According to the invention of claim 2, since the conduction state of the contactor and the connection electrode part depends at least on the contact between the other end of the contactor and the inner surface of the connection electrode part, it is possible to increase the contact area of the contactor and the connection electrode part. The jig for board | substrate inspection which can reduce contact resistance value more and has stable contact resistance value irrespective of the frequency | count of use is provided.

According to the invention of claim 3, the connecting electrode portion is shaped so as to allow the contactor to flow therein, and therefore, there is provided a substrate inspection jig that can prevent an excessive burden from being brought in and out of the contacting electrode portion.

According to the invention of claim 4, since the connecting electrode portion is formed in a cylindrical shape, the contact surface with which the contactor contacts can be created uniformly, and a jig for substrate inspection of stable contact resistance value is provided even when contacting any cylindrical portion.

According to the invention of claim 5, since the connecting electrode portion is formed inclined or curved with respect to the long axis of the contact, when the contact is made to enter and exit the contacting portion, the contacting surface makes contact with the inner surface of the connecting electrode portion. The present invention provides a substrate inspection jig which can reduce the contact resistance between the contact electrode portion and the connection electrode and has a stable contact resistance regardless of the number of times of use.

According to the invention as set forth in claim 6, since the connecting electrode part has a sliding part which slides in a direction perpendicular to the in and out direction of the contact, when the contact is accommodated in the connecting electrode part, the contact and the connecting electrode part can be reliably brought into contact with the contactor. Provided is a substrate inspection jig which can reduce the contact resistance with the connecting electrode and has a stable contact resistance regardless of the number of times of use.

According to the invention as set forth in claim 7, the other side of the contact is formed to bend with respect to the long axis of the contact. When the contact is made to enter and exit the contact electrode, the contact surface touches the inner surface of the contact electrode part while touching it. Provided is a substrate inspection jig which can reduce the contact resistance with the connecting electrode and has a stable contact resistance regardless of the number of times of use.

According to the invention as set forth in claim 8, the contact supporter is formed of two members, and one support part is disposed in contact with the connecting electrode body, thereby providing a substrate inspection jig that can reliably guide the contactor to the connecting electrode part. .

According to the invention as set forth in claim 9, the contact supporter is composed of two members, and since one support part is arranged at a predetermined distance from the connecting electrode body, the contactor can bend in a space formed by this predetermined distance, thereby making contact with the contactor. Contacting the inner surface of the connecting electrode portion when the contact is made to the connecting electrode portion, thereby reducing the contact resistance value between the contact and the connecting electrode portion, and having a stable contact resistance value regardless of the number of times of use. Provide inspection jig.

According to the invention of claim 10, since the contact support has a protective portion for protecting the contact, it is possible to effectively protect the contact when not in use when using the contact, and to provide a substrate inspection jig that can extend the service life of the contact. do.

According to the invention as set forth in claim 11, the range near the other end is a range in which the side circumferential surface of the other end can contact at least the connection electrode portion at the time of the connection, and thus the contact with the contactor connection electrode portion is performed. Provided is a substrate inspection jig that can increase the contact area, reduce the contact resistance between the contactor and the connecting electrode, and have a stable contact resistance regardless of the number of times of use.

According to the invention as set forth in claim 12, at least a part of the side circumferential surface in the vicinity of the other end of the contactor contacts with a part of the connecting electrode portion opposite to the other end when the other end of the contactor is connected to the connecting electrode body. Provided is a connection electrode portion of a substrate inspection jig that can reduce the contact resistance value with the connection electrode portion and has a stable contact resistance value regardless of the number of times of use.

1 shows an outline of the configuration in the case of using the jig for inspecting a substrate according to the present invention.

Fig. 2 shows a schematic configuration of a substrate inspection jig according to the present invention, and shows the position structure of a contactor, a contact supporter and a connecting electrode body.

3 shows one embodiment of a contact. (a) is a rod-shaped member, (b) is a rod-shaped member and a cylindrical member, (c) has shown the rod-shaped member, a cylindrical member, and an insulation part.

Fig. 4 shows the operation of the protective part, (a) shows the state when the substrate inspection jig is not in use, and (b) shows the state when the substrate inspection jig is in use.

5A to 5D show one embodiment of the connecting electrode portion, respectively.

6 shows another embodiment of a contact.

7 shows a state of using a substrate inspection jig according to the present invention.

8 shows an embodiment of a sliding part of the connecting electrode body.

9 shows another embodiment of a contactor and a contact support according to the present invention.

10 shows another embodiment of a contactor and a contact support in accordance with the present invention.

Fig. 11 shows an embodiment of a substrate inspection jig according to the present invention.

12 shows the result of measuring the resistance of the contactor including the contact resistance between the substrate inspection jig according to the present invention and the substrate inspection jig having the conventional electrode structure.

<Description of the code>

1 Jig for PCB Inspection

1 'Substrate Inspection Jig (Other Embodiments)

2 contact

2A receptacle

3 contact support

31 First Support

32 Second Support

4 connecting electrode body

41 connecting electrode

BEST MODE FOR CARRYING OUT THE INVENTION The best mode for carrying out the present invention will be described.

1 shows an outline of the configuration in the case of using the jig for inspecting a substrate according to the present invention. In FIG. 1, a plurality of contactors 101, a support body 102 supporting these contacts 101 in a multiplied shape, and supporting the support bodies 102 and at the same time being in contact with the contactor 101 are connected. A connecting electrode body 103 having a connecting electrode portion to be used, an inspection signal processing unit 104 which is an inspection signal processing unit for processing the detected electrical signal, and a wire cable connecting the inspection contactor 101 and the inspection signal processing unit 104 ( 105). The contactor 101 is a terminal contacting each inspection point of the wiring pattern formed on the substrate under test, and the connecting electrode body 103 is electrically connected by performing a pitch conversion between the contactor 101 and the inspection signal processing unit 104. .

The connecting electrode body 103 has a connecting electrode portion 106 electrically connected to the contactor 101 on the arrangement side of the support body 102. According to the present invention, by creatively studying the connection electrode section 106, the connection resistance value with the contactor 101 can be reduced and the connection resistance value with stability is provided.

The board | substrate inspection jig 1 of one Embodiment which concerns on this invention consists of a contactor 2, the contactor support body 3, and the connection electrode body 4 (refer FIG. 2). In addition, although the connection electrode body 4 is connected with the test signal processing part 104 as mentioned above, it abbreviate | omits in this FIG.

The contact 2 has flexibility and electrical conductivity, and is formed in a rod shape such as a needle shape or a long shape. One of these contacts 2 is pressed against the inspection point of the substrate to be inspected, and the other is in contact with the connecting electrode portion described later. For this reason, the contactor 2 can transmit the electrical signal from the inspection signal processing unit 104 to the inspection point and transmit the electrical signal from the inspection point to the inspection signal processing unit 104.

Since the contactor 2 is flexible, the contactor 2 is bent (buckled) in a direction perpendicular to the long axis direction of the contactor 2 in a space formed inside the contactor support 3 described later. For this reason, when this contactor 2 is used, it is bent under load from the inspection point or the connecting electrode portion of the substrate under test, and this bending causes the pressing force to be generated for each contact portion.

Although the contactor 2 will not be specifically limited if it is formed in the shape mentioned above, It can also form like one Embodiment as shown in FIG.

As shown in Fig. 3 (a), the contactor 2 shown in Fig. 3 is formed of an elongated rod-shaped member 21 having both ends in the shape of forward. The thin shape may be a sharp shape as shown in Fig. 3A, or may be a spherical shape.

The rod-shaped member 21 may be stainless steel, beryllium copper (BeCu) or tungsten (W). The rod-shaped member 21 is not particularly limited and may be a conductive material.

The rod-shaped member 21 is preferably formed in a cylindrical or cylindrical shape so as to apply a uniform load to the contact area in contact with the connecting electrode portion described later, but is not particularly limited.

The length and thickness of the rod-shaped member 21 are not particularly limited and are appropriately set in accordance with the pitch of the wiring pattern formed on the substrate under test and the size of the substrate under test.

In FIG.3 (b), the state which accommodated the rod-shaped member 21 in the cylindrical member 22 is shown. This cylindrical member 22 has flexibility and electrical conductivity. The rod-shaped member 21 is inserted into this cylindrical member 22. In FIG.3 (b), when comparing the one end 22a which is the front end of the cylindrical member 22, and the other end 22b which is the other front end, the rod-shaped member 21 which protrudes from the one end 22a is compared. ) Is set to be longer than the length of the rod-shaped member 21 protruding from the other end 22b.

In this case, one end 22a is in contact with the connecting electrode portion, and the other end 22b is in contact with the inspection point of the substrate under test. By changing the length of the arrangement in this way, the contact area where the rod-shaped member 21 comes into contact with the connecting electrode portion can be increased, and the length of the rod-shaped member 21 protruding from the other end 22b is set short. Therefore, the cylindrical member 22 can fulfill the stopper role of preventing the rod-shaped member 21 from penetrating into the inspection point more than necessary when the contactor comes into contact with the inspection point such as bumps, and has a spherical shape. It is possible to stably contact with inspection points such as bumps. Furthermore, the contact with the inspection point by the rod-shaped member 21 and the cylindrical member 22 can be made possible, regardless of the workability of the tip-shaped shape of the rod-shaped member 21.

The protruding amount of the rod-shaped member 21 on the other end 22b side can be set to be shorter than the one end 22a as described above, and can also be set as the amount (length) penetrating into the inspection point as described above. have.

The cylindrical member 22 is not particularly limited as long as it can accommodate the rod-shaped member 21 therein and can be brought into a conductive state with the rod-shaped member 21.

The cylindrical member 22 and the rod-shaped member 21 are electrically connected to each other. For this reason, it forms by electrolytic plating or electroless plating as a whole in the state which inserted the rod-shaped member 21 into the cylindrical member 22 (state shown in FIG.3 (b)).

Alternatively, by forming a plurality of protrusions (not shown) inside the cylindrical member 22, the cylindrical member 22 has a caulking structure for pressing the rod-shaped member 21. It can be brought into electrical contact with each other.

In FIG. 3C, the rod-shaped member 21 and the cylindrical member 22 are integrated with each other, and the insulating portion 23 is formed on the surface circumferential surface of the cylindrical member 22. The place where this insulating part 23 is formed is formed in the place other than the one end and the other end of the contactor 2, as shown in FIG.3 (c). Moreover, the step | step 24 formed by this insulating part 23 and the cylindrical member 22 is used as a latching part when the contactor 2 is arrange | positioned at the contactor support body 3 mentioned later.

When the contactor 2 bends, this insulation part 23 prevents a short circuit even if it contacts the adjacent contactor 2.

Polyurethane can be used for this insulating part 23, but it is not specifically limited.

In the above description, the case where the contactor 2 is formed by using the rod-shaped member 21, the tubular member 22, and the insulated portion 23 has been described, but the rod-shaped member 21 and the insulated portion 23 are formed. You may use a contactor, and the structure of a contactor is not limited to these.

In the present specification, a part of the contactor 2 accommodated in the connecting electrode part 41 will be described as 2A, but the receiving part 2A of the contactor 2 is a contactor in which the insulating part 23 is not formed. It becomes one end of (2). For example, it is a part (part of length L) of the contactor 2 from the front-end | tip of the contactor 2 to the level | step difference 24. As shown in FIG. It is not necessary for all of these portions L to be accommodated in the connecting electrode portion, but it is preferable that as many portions as possible be accommodated.

Although the length L of this part is set suitably by the length accommodated in a connection electrode part, in order to become a contact state (conduction state) with sufficient stability, it is preferable that it is about 2-5 mm.

This part of the contactor 2 corresponds to the other end part, and at least a part of the side circumferential surface of this part comes into contact with the connecting electrode part 41.

The contact supporter 3 supports a contact group consisting of a plurality of contacts 2. As shown in FIG. 2, this contact support 3 has a first support portion 31 and a second support portion 32 to support a plurality of contacts 2.

In the contact support 3 shown in FIG. 2, the first support part 31 is disposed above the ground, the second support part 32 is disposed below the ground, and the first support part 31 has a front end of the contactor 2. Guide points are provided, and the second support part 32 guides the other end of the contactor 2 to the connection electrode part.

The first support part 31 has a first supporting hole 33 for guiding a predetermined contactor 2 to a predetermined inspection point. The first supporting hole 33 is formed to be larger than the outer diameter of the rod-shaped member 21 or the cylindrical member 22 of the contactor 2 and smaller than the diameter of the insulating portion 23. The formation in this way prevents the contactor 2 from escaping from the first support hole 33 of the first support part 31.

The second support part 32 has a second support hole 34 for guiding the predetermined contactor 2 to the predetermined connection electrode part. The second support hole 34 is formed to be larger than the outer diameter of the rod-shaped member 21 or the cylindrical member 22 of the contactor 2 and smaller than the diameter of the insulating portion 23. This formation prevents the contactor 2 from exiting from the second support hole 34 of the second support portion 32.

By forming the first and second support holes 33 and 34 in this way, the contactor 2 is prevented from falling out from the contact supporter 3.

The first support part 31 and the second support part 32 are disposed at predetermined intervals with the struts 35 therebetween. For this reason, a space is formed between the first support part 31 and the second support part 32 by the support 35, and the contactor 2 can bend in this space.

The length of the space by the support 35 is appropriately set by the user.

In FIG. 2, the first support part 31 is formed by two plate members. These plate members are formed as a plate member for forming the first support hole 33 and a plate member for forming a screw hole for fixing to the support 35. The number of these plate members is not specifically limited, As long as it has the above function, it may be one sheet or two sheets or more.

 In addition, in FIG. 2, the 2nd support part 32 is formed of three board members. These plate members are formed as a plate member for forming the second support hole 34 and a plate member for forming a screw hole for fixing the support 35. The number of these plate members is not specifically limited, As long as it has the above function, it may be one sheet or two sheets or more.

It is preferable that the second support portion 32 is formed of a plurality of plate members, and the plate members are moved by a predetermined length in the perpendicular direction (left and right direction in Fig. 2) with respect to the contactor 2, respectively.

By moving the plurality of plate members little by little in this manner, the second support holes 34 are inclined to be formed. For this reason, when the contactor 2 is supported by the contact supporter 3, the contactor 2 will bend lightly, and a contact resistance will be produced with the board member, and the contactor 2 will be stably supported.

The second support part 32 is a protection for slidingly moving in the long axis direction of the contactor 2 such that the contactor 2 protrudes in use in contacting the contactor 2 with the contact electrode part on the contact electrode part side of the contactor 2. The part 36 is provided.

As shown in Fig. 2, the protection part 36 is arranged on the connecting electrode part side of the second support part 32, and a spring mechanism 37 is formed so as to slide in the long axis direction of the contactor 2. As shown in Figs.

This protection part 36 is formed with the board member of predetermined thickness, and protects the front-end | tip part (part in contact with a connection electrode part) of the contactor 2 when the board | substrate inspection jig is not used.

For example, Fig. 4 shows the operation of the protective part, and Fig. 4A shows the state when the board inspection jig is not in use, and Fig. 4B shows the state when the substrate inspection jig is in use. It is shown.

In FIG. 4A, the contactor 2 and the contact supporter 3 of the substrate inspection jig are not connected to the connecting electrode body 4. In this state, the connecting electrode of the contactor 2 is shown. The end part which contacts the part is protected by the protection part 36. In addition, although the front-end | tip of the contactor 2 slightly protrudes in the figure, it may be accommodated in the protection part 36 inside.

FIG. 4B shows a state in which the contactor 2 and the contact supporter 3 of the substrate inspection jig are connected to the connecting electrode body 4. In addition, in FIG.4 (b), the connection electrode body 4 is abbreviate | omitted. In this state, the protection part 36 slides and the contactor 2 protrudes, and this protruding contactor 2 comes into contact with the connecting electrode part.

In this case, the protection part 36 abuts on the lower end of the second support part 32 and becomes elastically supported by the spring of the spring mechanism 37. In addition, although the protection part 36 intends to return to the position shown in FIG. 4A, in the state of FIG. 4B, the connection electrode body 4, the protection part 36, and the protection part 36 and The second support part 32 is in contact with each other.

In Fig. 2, two projection-shaped portions 38 for aligning the contact support 3 and the connecting electrode body 4 described later are formed.

The connecting electrode body 4 includes a connecting electrode portion 41 that supports the contact support 3 and accommodates a part of the contactor 2 therein.

The connecting electrode portion 41 is formed in a hole shape extending from the surface of the connecting electrode body 4 into the connecting electrode body 4 so as to accommodate the contactor 2 therein. Since the connection electrode part 41 is formed in the shape of a hole extending into the connection electrode body 4 in this manner, a part of the contactor 2 can be reliably accommodated in the connection electrode part 41. In this case, a part of the contactor 2 can make a part of the contactor 2 contact with an inner surface by forming an electrode part on the inner surface of the connection electrode part 41.

The connecting electrode part 41 is connected to the conducting wire 42. This conducting wire 42 is connected to the inspection signal processing unit as described above.

It is preferable that the connection electrode part 41 is shaped so that the contactor 2 can be inserted in a flowable manner. The connection electrode part 41 can fit the contactor 2 in a flowable manner so that the contactor 2 can be accommodated inside the connection electrode part 41 or the contactor 2 can be removed from the connection electrode part 41. In this case, the frictional resistance between the contactor 2 and the connecting electrode portion 41 can be reduced and can be easily taken out.

The connection electrode part 41 accommodates a part of the contactor 2 inside, and uses the inner surface of the connection electrode part 41 as an electrode part. For this reason, the connection electrode part 41 can be formed in the electrically conductive cylindrical shape. In this case, the cylindrical connecting electrode portion 41 accommodates the contactor 2 therein and the cylindrical inner surface functions as an electrode portion.

In addition, the connection electrode part 41 arrange | positions a cylinder (pipe) so that the surface and surface of the connection electrode body 4 may correspond. By arranging in this way, when the surface of the connection electrode body 4 becomes the same height, and the 2nd support part 32 and the protection part 36 contact | connect the connection electrode body 4, the connection electrode body 4 It can be arrange | positioned so that it may become perpendicular | vertical with respect to a surface, and even when the contactor 2 presses and bends at the time of use, a uniform load can be loaded also to any contactor 2.

The contact electrode portion 41 enters into and out of the contact electrode portion 41 depending on whether it is used or not used. Therefore, the contact electrode portion 41 has a lengthwise direction of the contact member 2 so as to reliably contact the contact electrode portion 41. It is preferable to arrange or form the connection electrode part 41 so that the longitudinal direction may cross | intersect (relatively cross).

As this specific example, for example, the connecting electrode portion 41 is formed by inclining or bending the long axis of the contactor 2.

As the connection electrode portion 41 is formed in this manner, when the contactor 2 is accommodated inside the connection electrode portion 41, it is accommodated while rubbing the inner surface of the connection electrode portion 41 so that the contactor 2 is connected. A contact state can be established reliably with the electrode part 41. In particular, by such a configuration, the oxide film formed on the electrode portion on the inner surface and the surface of the contactor 2 can be broken.

5 shows one embodiment of the connecting electrode portion. The connecting electrode part 41 shown in FIG. 5A is formed in parallel in the thickness direction of the connecting electrode body 4. Even in this case, when the contactor 2 is inclined as described above, the contactor 2 is brought into contact with the inner surface of the connection electrode part 41 while touching.

FIG. 5B shows a case where the connecting electrode portion 41 is formed to be inclined at a predetermined angle with respect to the surface of the connecting electrode body 4. In this case, even if the contactor 2 is accommodated on the surface of the connecting electrode body 4 in a substantially perpendicular direction, the contact 2 comes into contact with the inner surface of the connecting electrode portion 41 while rubbing.

FIG. 5C shows a case where the connection electrode part 41 is formed in an inverted &quot; 'shape. In this case, since the contactor 2 touches and touches in the same manner as in Fig. 5 (b) and is accommodated inside, the connecting electrode portion 41 forms an inclined direction in a reverse direction at the vertex portion of the 'u' shape. At this apex, the contactor 2 reliably comes into contact with the inner surface.

FIG. 5D illustrates a case where the connection electrode part 41 is curved. In this case, when the contactor 2 is accommodated, the contact is made while touching the surface while bending along the inner surface of the connection electrode portion 41. In this case, since the load applied to the contactor 2 is lower than that of FIG. 5C, the contactor 2 can be easily inserted and removed.

The shapes of the connection electrode portions 41 shown in FIG. 5 are not limited thereto, and the shape of the connection electrode portions 41 may be set so that the receiving directions of the connection electrode portions 41 intersect with the entry and exit directions of the contactors 2. By forming the connection electrode portion 41 in this manner, the contactor 2 is reliably in contact with the inner surface of the connection electrode portion 41, and is accommodated while rubbing the inner surface when received, so that the contact resistance value It is possible to connect the contactor 2 and the connection electrode portion 41 with low stability and high stability of the contact resistance value.

As another specific example, as shown in FIG. 6, the tip 2A of the contactor 2 accommodated in the connection electrode part 41 is formed by bending with respect to the long axis of the contactor 2.

By bending the tip 2A of the contactor 2 in this manner, the tip 2A of the contactor 2 is contacted while rubbing the inner surface of the connection electrode part 41 when the tip 2A of the contactor 2 is accommodated in the connection electrode part 41. Done.

The contactor 2 shown in FIG. 6 is bent from the central axis of the contactor 2 so that the tip 2A of the contactor 2 has a width W. As shown in FIG. This width W is preferably formed to approximately the same as the inner diameter of the connecting electrode portion 41. This is because the width W is formed to be approximately equal to the inner diameter of the connection electrode portion 1, so that the inner surface can be reliably contacted with the width W and the amount (width) to be bent can be reduced.

7 shows a state of using a substrate inspection jig according to the present invention.

In FIG. 7A, the receiving portions 2A of the plurality of contacts 2 are accommodated in the connection electrode portion 41. Although not shown in FIG. 7A, when the receiving portion 2A of the contactor 2 is bent or the contactor 2 is inclined, the contactor 2 is accommodated in the connection electrode portion 41. When received, the inner surface is touched and received. In addition, in FIG. 7, the contactor 2 is conveniently located in the substantially center of the connection electrode part 41. FIG.

When the contactor 2 is accommodated in the connection electrode part 41, the contact part 2A of the contactor 2 is reliably moved by moving the contact support body 3 or the connection electrode body 4 relatively. It is preferable to make a pressure contact with the inner surface of ().

FIG. 7B shows that the contact supporter 3 and the connecting electrode body 4 are reliably brought into contact with the inner surface of the connecting electrode part 41 by moving in a direction perpendicular to the major axis of the contactor 2. . For example, as shown in Fig. 7 (b), the connecting electrode body 4 is moved to the left side of the page (in the direction of the black arrow in Fig. 7 (b)), whereby the accommodating portion 2A of the contactor 2 is provided. Is pressed against the inner surface of the connecting electrode portion 41. Alternatively, by moving the contact support 3 to the right side of the page (in the direction of the white arrow in FIG. 7B), the receiving portion 2A of the contact 2 is pressed against the inner surface of the connecting electrode portion 41. Thus, by forming the sliding part which slides the contact support body 3 and / or the connection electrode body 4 in the direction perpendicular to the entry-out direction of the contact 2, the receiving part 2A of the contact 2 is connected to the connection electrode part. It becomes possible to make contact with the inner side surface of 41 more stable.

8 illustrates an embodiment of a sliding part of the connection electrode body. The sliding part shown in this FIG. 8 comprises the connecting electrode body 4 with three 1st board member 43, the 2nd board member 44, and the 3rd board member 45. As shown in FIG. The connection electrode part 41 is formed so that these three board members may penetrate. The first plate member 43 and the third plate member 45 are fixed members, and the second plate member 44 is a mechanism for sliding. For this reason, as shown in FIG.8 (b), the 2nd board member 44 slides and presses the connection electrode part 41 by the side surface, and, thereby, the connection electrode part 41 is curved shape. Thus, the receiving portion 2A of the contactor 2 is pressed against the side.

In addition, in the connection electrode body 4 shown in FIG. 8, it demonstrated using three plate members, It is not limited to three sheets, You may form a sliding part using several plate members further.

Next, another embodiment of the contactor 2 and the contact supporter 3 will be described.

9 shows another embodiment of the contactor 2 and the contact support 3. In this embodiment, the receiving portion 2A of the contactor 2 used is bent with respect to the long axis of the contactor 2 (see FIG. 6). 2A of accommodating parts are bent by this contactor 2, but when not in use, the protection part 36 (through hole) supports the accommodating part 2A of the contactor 2, and the contactor 2 is carried out. Is supported to have a straight shape. When using the board | substrate inspection jig of this embodiment, the protection part 36 is pushed up and the contactor 2 protrudes more than the protection part 36, At this time, the accommodating part 2A of the contactor 2 is carried out. ) Is bent to be bent in a predetermined direction.

In addition, when attaching this jig | tool for a test | inspection to the connection electrode body 4, the protection part 36 is aligned with the connection electrode part 41 of the connection electrode body 4, and Since the protection part 36 is pushed up in the contact state, the contactor 2 is accommodated in the connection electrode part 41 and the receiving part 2A of the contactor 2 is the inner surface of the connection electrode part 41. Touches while touching.

Another embodiment is described.

10 shows another embodiment of the contactor 2 and the contact support 3. In this embodiment, the space S is formed between the second supporting portion 32 or the protecting portion 36 and the connecting electrode body 4.

In FIG. 10, a space S is formed between the contact support 3 and the connecting electrode body 4, in which the receiving portion 2A of the contact 2 is connected to the connecting electrode 41. It is warped when it is accepted. In this way, the housing portion 2A can be bent in the space S, so that the housing portion is accommodated in the connecting electrode portion 41 and in the receiving portion 2A at the place contacting the inner surface of the connecting electrode portion 41. The pressing force as much as the deflection of (2A) is applied. For this reason, 2 A of accommodating parts stably contact the inner surface of the connection electrode part 41. FIG.

In this embodiment, the connecting electrode body 4 is slid (moved in the arrow direction) so that the contactor 2 is in stable contact with the connecting electrode portion 41.

It is an explanation of the structure of the board | substrate inspection jig which concerns on this invention.

Next, an embodiment of a substrate inspection jig according to the present invention will be described.

Fig. 11 shows an embodiment of a substrate inspection jig according to the present invention.

The contactor 2 shown in this embodiment uses tungsten as a material to form a rod-shaped member 21 having a length of 30 mm and a diameter of 90 µm, and the insulating portion 23 so that the length of the receiving portion 2A is 2 mm. To form.

The connecting electrode portion 41 is an electrically conductive pipe having an inner diameter of 95 µm and an outer diameter of 125 µm, and is plated with gold on the inner surface of the pipe.

In the embodiment shown in FIG. 11, the connecting electrode body 4 is formed of the first plate-shaped portion 43, the second plate-shaped portion 44, the third plate-shaped portion 45 and the fourth plate-shaped portion 46. At the same time, it has a slide portion 47 for moving the second plate-shaped portion 44 in the horizontal direction. The first plate-shaped portion 43 and the third plate-shaped portion 45 are fixed members, and the fourth plate-shaped portion 46 is used as a base for the substrate inspection jig 1 '.

The connecting electrode portion 41 is formed to penetrate through the first to third plate shapes.

The sliding part 47 can move the 2nd plate-shaped part 44 to the left and right. This sliding part 47 is comprised with a pair of left and right screw mechanisms, and the position of the 2nd plate-shaped part 44 can be adjusted by adjusting the left and right screws.

In FIG. 11A, a space is formed between the second support part 32 and the protection part 36 and is in a state when it is not in use.

FIG. 11B shows a state where the substrate inspection jig 1 'is used. At this time, the second support part 32 and the protection part 36 abut, and the accommodating part 2A of the contactor 2 is accommodated in the connection electrode part 41. Then, the receiving portion 2A of the contactor 2 comes into contact with the inner surface of the connecting electrode portion 41 while touching, whereby the conduction state can be established.

In the substrate inspection jig 1 ', the slide portion 47 is provided on the left and right sides, and after the receiving portion 2A of the contactor 2 is accommodated in the connecting electrode portion 41, the connecting electrode is adjusted by adjusting the screw. The second plate-shaped portion 44 of the sieve 4 is moved in the horizontal direction. At this time, the portion of the second plate-shaped portion 44 of the connecting electrode portion 41 is curved in accordance with the movement of the second plate-shaped portion 44 so that the contact surface 2 is pressed against the inner surface of the connecting electrode portion 41. Will be.

In this embodiment, the contactor 2 is also inclined to be supported by the contact supporter 3, and the connecting electrode body 4 has a slide portion 47, so that the contactor 2 is connected to the connecting electrode portion 41. The conductive state can be established by being received while rubbing the inner surface and making stable contact.

12 shows the result of measuring the resistance of the contactor including the contact resistance between the substrate inspection jig according to the present invention and the substrate inspection jig having the conventional electrode structure. In this experiment, the jig for inspecting the substrate is set so as to be in use, and a plate with gold plating on one surface is placed on the inspected substrate side (the other side of the receiving portion 2A) of the contactor 2 as the inspected substrate. Press this test board firmly. At this time, the resistance value between the conducting wire 42 of the contact electrode part 41 and the test substrate is measured. For this reason, this resistance value includes the contact resistance of the connection electrode part 41 and the contactor 2, the resistance of the contactor 2 itself, and the contact resistance of the contactor 2 and the board under test.

In addition, the number of times shown in FIG. 12 represents the number of shorts indicating how many times are pressed.

From Fig. 12, the substrate inspection jig of the present invention has a resistance value in the range of 420 to 570 m ohms (0.15 ohms in width). It is in the 5.5 ohm range (4 ohms in width). While it is understood that the present invention is an extremely low contact resistance value compared with the conventional jig, it is understood that the deviation of the contact resistance value accompanying the increase in the number of shots is also extremely small.

For this reason, by using the jig of the present invention, the contact resistance value can be reduced, and even when the contact resistance value is processed as a correction value, there is no deviation associated with the increase in the number of shorts, so the correction value needs to be corrected. It is not possible to use very stably.

Claims (12)

A substrate inspection jig for obtaining electrical conduction between a substrate inspection apparatus main body and a plurality of substrate inspection points formed on a wiring pattern of the substrate to be inspected in order to inspect electrical characteristics of the substrate under test, The substrate inspection jig, A contact group having end portions for conducting electrical conduction at both ends, the contact group consisting of a rod-shaped contactor having one end portion electrically conductive to one of the substrate inspection points; A contact supporter for supporting the contact group; And a connecting electrode body connected to the substrate inspection apparatus main body, wherein the connecting electrode part includes a connecting electrode part disposed to face the other end of each contact of the contact group. When connecting the other end part of the said contact group and the said connection electrode body, at least one part of the side peripheral surface of the vicinity of each said other end contacted with the part of the said connection electrode part which opposes, and is in an electrically conductive state. Substrate inspection jig characterized in that the. The method of claim 1, The connection electrode portion has a structure for receiving the other end of the contact opposite to this, and the conduction state of the contact and the connection electrode portion is at least the other end of the contact and the inner side of the connection electrode portion. Jig for inspection of the substrate, characterized in that by contact with the surface. The method according to claim 1 or 2, And said connecting electrode portion is shaped to be capable of fluidly fitting at least a portion of said other end of said contact opposite thereto. The method according to any one of claims 1 to 3, The jig for testing a substrate, wherein the connecting electrode portion is formed in a cylindrical shape. The method according to any one of claims 1 to 4, A substrate inspection jig, wherein the connecting electrode portion is formed to be inclined or curved with respect to the long axis of the contact. The method according to any one of claims 1 to 5, And the connection electrode part has a sliding part that slides in a direction perpendicular to an inward and outward direction of the contact. The method of claim 1, The other end of the said contact is bent with respect to the long axis of the said contact, The board | substrate inspection jig | tool characterized by the above-mentioned. The method of claim 1, The contact support has a first support having a first support hole for supporting the vicinity of one end of the contact, and a second support having a second support hole for supporting the vicinity of the other end of the contact, And the second support portion is disposed in contact with the electrode body. The method of claim 1, The contact support has a first support having a first support hole for supporting the vicinity of one end of the contact, and a second support having a second support hole for supporting the vicinity of the other end of the contact, And the second support portion is disposed at a predetermined distance from the electrode body. The method of claim 1, The said contact support body is a board | substrate inspection jig | tool which consists of a protection part which slides in the longitudinal direction of the said contact so that the said contact might protrude in the case where the other side of the said contactor contacts the said connection electrode part. The method of claim 1, The range in the vicinity of the other end is a range in which the side circumferential surface of the other end can contact at least the connection electrode portion at the time of the connection. In order to inspect the electrical characteristics of the inspected substrate, one end is connected to the inspected point to obtain electrical conduction between the main body of the inspected substrate and the plurality of inspected points formed on the wiring pattern of the inspected substrate. As the electrode structure of the contact electrode part which is contact-contacted with the other end of the said contactor which the contact electrode which is crimp-contacted in order to contact | connect, and the said contact electrode body connected to this contact with the said board | substrate inspection apparatus main body by conducting contact with the said contactor, The connection electrode unit, At the time of connecting the other end of the contact with the connection electrode body, at least a part of the side circumferential surface in the vicinity of the other end of the contact is in contact with a part of the connection electrode part opposite thereto. Electrode structure of electrode part.

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