TWI638163B - High current probe - Google Patents
High current probe Download PDFInfo
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- TWI638163B TWI638163B TW103141057A TW103141057A TWI638163B TW I638163 B TWI638163 B TW I638163B TW 103141057 A TW103141057 A TW 103141057A TW 103141057 A TW103141057 A TW 103141057A TW I638163 B TWI638163 B TW I638163B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
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Abstract
本發明提供一種能夠不產生應變、疲勞破壞且長時間保持穩定的低電阻接觸的大電流用探針。該大電流用探針在由導電體構成的基本元件的頂端部設有導電用的接觸元件,所述接觸元件包括:固定部,其以與所述基本元件的頂端部相接觸的狀態,被固定於所述基本元件的頂端部;以及多個腿部,其自所述固定部呈放射狀突出,在將所述接觸元件按壓於被檢體時,所述多個腿部被檢體按壓而擴開變形並與被檢體相接觸,在所述基本元件的頂端部突出有止擋件,其在將所述接觸元件向被檢體按壓預定距離時鄰接於被檢體而限制所述接觸元件向被檢體方向的移動。 The present invention provides a high-current probe capable of maintaining stable low-resistance contact for a long period of time without strain or fatigue failure. This high-current probe is provided with a conductive contact element at a tip end portion of a basic element made of a conductive body, and the contact element includes a fixing portion which is contacted with the tip end portion of the basic element and is Fixed to the distal end portion of the basic element; and a plurality of legs protruding radially from the fixed portion, and when the contact element is pressed against the subject, the plurality of leg objects are pressed While expanding and deforming and contacting the subject, a stopper is protruded at the top end of the basic element, and when the contact element is pressed against the subject by a predetermined distance, the stopper is adjacent to the subject and restricts the object. The contact element moves in the direction of the subject.
Description
本發明係有關一種用於測量電阻值、電壓值等的大電流用探針。 The present invention relates to a high-current probe for measuring resistance values, voltage values, and the like.
習用之具有一種能夠通過使導電性的頂端部固鄰接於被檢體而建立電連接可測量電阻值、電壓值等的檢查用探針。尤指專用於大電流(例如從數十安培到數百安培)的探針,為了抑制發熱及確保接觸面積等需要,探針的頂端形成為在多點與被檢體相接觸。 Conventionally, an inspection probe capable of measuring an electrical resistance, a voltage, and the like by establishing an electrical connection by firmly adjoining a conductive tip portion to a subject. In particular, a probe dedicated to a large current (for example, from tens of amperes to hundreds of amperes). In order to suppress heat generation and ensure a contact area, the tip of the probe is formed to contact the subject at multiple points.
然而,由於在大氣中使用檢查物件的被檢體,有時在被檢體的表面層形成有氧化覆膜。另外,也有時進行例如鉻酸鹽處理等對電極元件等施加高電阻塗層。若如此自形成於被檢體的表面層的氧化覆膜、高電阻塗層等高電阻覆膜之上按壓探針,則由於接觸電阻增大,因此無法確保低電阻的穩定的接觸。由此,期望去除或者穿破高電阻覆膜而使探針的頂端接觸被檢體。 However, since the test object is used in the atmosphere, an oxide film may be formed on the surface layer of the test object. In addition, a high-resistance coating may be applied to an electrode element or the like, for example, by a chromate treatment. When the probe is pressed from a high-resistance coating such as an oxide film or a high-resistance coating formed on the surface layer of the subject in this way, the contact resistance increases, so stable contact with low resistance cannot be ensured. Therefore, it is desirable to remove or pierce the high-resistance coating and bring the tip of the probe into contact with the subject.
例如在專利文獻1中記載有如下方法:通過使探針的頂端形成銳利的多頂點的形狀,並通過將該探針的頂端按於被檢體的表面層而貫穿高電阻覆膜。 For example, Patent Document 1 describes a method in which a high-resistance coating is penetrated by forming the tip of a probe into a sharp multi-vertex shape, and pressing the tip of the probe against a surface layer of a subject.
然而,在使探針的頂端形成銳利的多頂點的形狀的情況下,由於探針的頂端在連結了該銳利的多頂點而成的虛擬平面上與被檢體的表面層相接觸,因此 無法跟隨被檢體表面的凹凸、傾斜等而改變接觸點。因此,存在只能對應於沒有傾斜的平滑表面、用途被限定的問題。另外,即使是沒有傾斜的平滑表面,在存在小的紋路等的情況下也存在接觸狀態不穩定的問題。另外,由於必須將多個頂點加工成均等的高度,因此存在要求較高的加工技術而成本變高的問題。 However, when the tip of the probe is formed into a sharp multi-vertex shape, the tip of the probe contacts the surface layer of the subject on a virtual plane formed by connecting the sharp multi-vertexes. It is not possible to change the contact point by following the unevenness, tilt, etc. of the surface of the subject. Therefore, there is a problem that it can only correspond to a smooth surface with no slope, and the use is limited. In addition, even if there is a smooth surface without a slope, there is a problem that the contact state is unstable in the presence of small lines and the like. In addition, since it is necessary to process a plurality of vertices to an equal height, there is a problem that a high processing technique is required and the cost becomes high.
作為解決這樣的問題的方法,專利文獻2中提出了如下方法:在探針的頂端形成呈放射狀分叉的多個接觸部,用該多個接觸部磨刷被檢體的表面層而去除高電阻覆膜。採用這樣的方法,多個接觸部的各個接觸部跟隨被檢體表面的凹凸、傾斜等而使接觸點變化,因此即使在電極存在凹凸、傾斜的情況下也能夠確保穩定的接觸。另外,由於通過將各接觸部向電極按壓而進行磨刷,能夠去除電極表面的高電阻覆膜,因此能夠防止由於高電阻覆膜所導致的接觸電阻的增大,從而能夠確保低電阻的穩定的接觸。並且,由於即使在探針頂端固定粘著有被檢體的電極材料的情況下,也能夠通過磨刷動作使該固定黏著著的電極材料剝離,因此能夠防止接觸電阻的增大,並且能夠確保低電阻的穩定的接觸。另外,由於能夠利用衝壓的沖切加工作為大電流用探針的製作方法,因此能夠廉價地進行製造。 As a method for solving such a problem, Patent Document 2 proposes a method in which a plurality of contact portions that are bifurcated radially are formed on the tip of the probe, and the surface layers of the subject are removed by rubbing with the plurality of contact portions. High resistance coating. According to this method, each contact portion of the plurality of contact portions changes the contact point according to the unevenness, inclination, and the like on the surface of the subject, so that stable contact can be ensured even when the electrode has unevenness and inclination. In addition, by rubbing each contact portion against the electrode, the high-resistance coating on the electrode surface can be removed, thereby preventing an increase in contact resistance caused by the high-resistance coating, and ensuring stable low resistance. s contact. In addition, even when the electrode material to be tested is fixed and adhered to the probe tip, the fixed and adhered electrode material can be peeled off by the brushing operation, so that an increase in contact resistance can be prevented, and it is possible to ensure Low-resistance stable contact. In addition, since a punching process can be used as a method for producing a probe for high current, it can be manufactured inexpensively.
現有技術文獻Prior art literature
專利文獻Patent literature
專利文獻1:日本實開昭62-114366號公報 Patent Document 1: Japanese Utility Model Publication No. 62-114366
專利文獻2:日本特開2011-137791號公報 Patent Document 2: Japanese Patent Application Laid-Open No. 2011-137791
但是,由於上述的專利文獻2記載的結構是通過使多個接觸部彈性變形而 磨刷被檢體的表面層的結構,因此可能存在在接觸部殘留有無法恢復的應變、或者接觸部疲勞破壞的問題。如此,若接觸部產生應變或者發生疲勞破壞,則無法實現穩定的低電阻接觸。 However, since the structure described in Patent Document 2 described above is formed by elastically deforming a plurality of contact portions, Since the structure of the surface layer of the subject is brushed, there may be a problem that an unrecoverable strain remains in the contact portion, or the contact portion is fatigue-destructed. In this way, if strain or fatigue failure occurs in the contact portion, stable low-resistance contact cannot be achieved.
因此,本發明要解決的問題在於提供一種能夠不產生應變、疲勞破壞且長時間保持穩定之低電阻接觸的大電流用探針。 Therefore, a problem to be solved by the present invention is to provide a high-current probe capable of maintaining low-resistance contact for a long period of time without strain or fatigue failure.
本發明係為了解決上述問題而做成的,其特徵如下。 The present invention has been made in order to solve the above problems, and has the following features.
請求項1所記載的發明係由導電體構成基本元件的頂端部設有導電用接觸元件的大電流用探針,其特徵在於,所述接觸元件包括:固定部:具先述基本元件的頂端固定有板,其以與前述基本元件的頂端部相接觸的狀態,被固定於欮述基本元件的頂端部;以及多個腿部:其自上述固定部呈放射狀突出;將前述接觸元件按壓於被檢體時,前述多個腿部被被檢體的放射狀按壓而擴開變形並與被檢體相接觸的同時,兩者都被配置為在多個腿部的前端內部的邊緣而磨刷被檢體的表面層的結構,在前述基本元件的頂端部突出有止擋件,其在將前述接觸元件向被檢體按壓預定距離時鄰接於被檢體而限制前述接觸元件向被檢體方向移動。 The invention described in claim 1 is a high-current probe provided with a conductive contact element at a tip portion of a basic element composed of a conductor, wherein the contact element includes: a fixing portion: the tip of the basic element described above is fixed. There is a plate which is fixed to the top end portion of the basic element in a state in contact with the top end portion of the basic element; and a plurality of legs: which protrude radially from the fixing portion; and presses the contact element on In the case of the subject, the plurality of legs are expanded and deformed by being radially pressed by the subject and contacted with the subject, and both are arranged to be ground on the inner edges of the front ends of the plurality of legs. The structure of brushing the surface layer of the subject has a stopper protruding from the top end of the basic element, and when the contact element is pressed against the subject by a predetermined distance, the stopper is adjacent to the subject to restrict the contact element from being inspected. Body direction.
請求項2所記載的發明,在上述請求項1所記載的發明的技術特徵的基礎之上,其特徵在於:所述止擋件突出設置於所述接觸元件的中央附近。 The invention described in claim 2 is based on the technical features of the invention described in claim 1, wherein the stopper is protruded near the center of the contact element.
請求項3所記載的發明,在上述請求項1或2所記載的發明的技術特徵的基礎之上,其特徵在於:所述止擋件能夠用作四端子測量的電壓測量用感測針。 The invention described in claim 3 is based on the technical features of the invention described in claim 1 or 2, characterized in that the stopper can be used as a voltage measuring sensor pin for four-terminal measurement.
請求項1所記載的發明正如上述,在將接觸元件按壓於被檢體時,多個腿部被被檢體按壓而擴開變形並與被檢體相接觸。即,由於多個腿部跟隨電極的 凹凸、傾斜而變形,因此能夠不受電極的凹凸、傾斜影響且確保穩定的接觸。另外,由於通過將各腿部的頂端按壓於電極地進行磨刷,從而能夠去除電極表面的高電阻覆膜,因此能夠確保低電阻且穩定的接觸。並且,即使在腿部的頂端固定黏著有被檢體的電極材料的情況下,也能夠通過磨刷動作使該固定黏著著的電極材料剝離,因此能夠確保低電阻且穩定的接觸。另外,由於能夠利用衝壓的沖切加工作為大電流用探針的製作方法,因此能夠廉價地進行製造。另外,即使在假設接觸元件產生磨損、劣化的情況下,也僅更換接觸元件即可,因此能夠大幅降低大電流用探針的使用成本。 According to the invention described in claim 1, as described above, when the contact element is pressed against the subject, a plurality of legs are pressed by the subject to expand and deform and come into contact with the subject. That is, since multiple legs follow the electrode's Deformation due to unevenness and inclination can ensure stable contact without being affected by unevenness and inclination of the electrode. In addition, the high-resistance coating on the surface of the electrode can be removed by rubbing the tip of each leg against the electrode, thereby ensuring stable contact with low resistance. In addition, even when the electrode material to which the subject is adhered is fixed to the tip of the leg, the fixed and adhered electrode material can be peeled off by a brushing operation, so that low-resistance and stable contact can be ensured. In addition, since a punching process can be used as a method for producing a probe for high current, it can be manufactured inexpensively. In addition, even if it is assumed that the contact element is abraded or deteriorated, it is only necessary to replace the contact element, so that the use cost of the high-current probe can be significantly reduced.
並且,由於在所述基本元件的頂端部突出有止擋件,其在將所述接觸元件向被檢體按壓預定距離時鄰接於被檢體而限制所述接觸元件向被檢體方向的移動,因此腿部的變形量被限制,從而能夠使腿部變形時產生的應力處於腿部的彈性範圍內(優選的是疲勞極限內)。由此,即使在反復使用大電流用探針的情況下,也能夠抑制應變、疲勞破壞,從而能夠長時間保持穩定的低電阻接觸。 In addition, since a stopper protrudes from a tip end portion of the basic element, the stopper is adjacent to the subject when the contact element is pressed against the subject by a predetermined distance to restrict the movement of the contact element in the direction of the subject Therefore, the amount of deformation of the leg is limited, so that the stress generated when the leg is deformed can be within the elastic range of the leg (preferably within the fatigue limit). Accordingly, even when the probe for high current is repeatedly used, strain and fatigue damage can be suppressed, and stable low-resistance contact can be maintained for a long time.
另外,請求項2所記載的發明正如上述,所述止擋件突出設置於在所述接觸元件的中央附近,因此能夠使止擋件所發揮的變形抑制大致均等地作用於所有腿部。 In addition, as described in claim 2, as described above, the stopper is protruded near the center of the contact element, so that the deformation suppression exerted by the stopper can be applied to all the legs approximately equally.
另外,請求項3所記載的發明正如上述,所述止擋件能夠用作四端子測量的電壓測量用感測針,因此在四端子測量中也能夠使用大電流用探針,並能夠進行精度較高的測量。 In addition, as described in claim 3, as described above, the stopper can be used as a voltage measuring sensor pin for four-terminal measurement. Therefore, a high-current probe can also be used in four-terminal measurement, and accuracy can be achieved Higher measurement.
10‧‧‧大電流用探針 10‧‧‧ High Current Probe
11‧‧‧套管 11‧‧‧ Casing
12‧‧‧施力元件 12‧‧‧ force application element
13‧‧‧柱塞(基本元件) 13‧‧‧ plunger (basic element)
13a‧‧‧頂端部 13a‧‧‧Top
13b‧‧‧貫通孔 13b‧‧‧through hole
13c‧‧‧後端部 13c‧‧‧Back end
14‧‧‧圓形板的接觸元件 14‧‧‧ contact element for circular plate
14a‧‧‧固定部 14a‧‧‧Fixed part
14b‧‧‧圓孔 14b‧‧‧ round hole
14c‧‧‧腿部 14c‧‧‧leg
15‧‧‧止擋件 15‧‧‧stop
15a‧‧‧平坦面 15a‧‧‧ flat surface
15b‧‧‧突起 15b‧‧‧ protrusion
15c‧‧‧軸部 15c‧‧‧Shaft
15d‧‧‧後端部 15d‧‧‧back
16、17‧‧‧絕緣法蘭盤 16, 17‧‧‧ insulating flange
20‧‧‧大電流用探針 20‧‧‧Probe for high current
21‧‧‧板狀元件(基本元件) 21‧‧‧ plate element (basic element)
21a‧‧‧頂端部 21a‧‧‧Top
22‧‧‧矩形板(接觸元件) 22‧‧‧ rectangular plate (contact element)
22a‧‧‧固定部 22a‧‧‧Fixed section
22b‧‧‧圓孔 22b‧‧‧ round hole
22c‧‧‧腿部 22c‧‧‧leg
23‧‧‧止擋件 23‧‧‧stop
25‧‧‧四端子測量用探針 25‧‧‧ Four-terminal measuring probe
26‧‧‧針引導部 26‧‧‧ Needle guide
27‧‧‧針施力元件 27‧‧‧ Needle force element
28‧‧‧連接部 28‧‧‧Connecting Department
30‧‧‧被檢體 30‧‧‧Subject
圖1係大電流用探針的外觀立體圖。 FIG. 1 is an external perspective view of a high-current probe.
圖2係圓形板的接觸元件外觀立體圖。 FIG. 2 is a perspective view of the appearance of a contact element of a circular plate.
圖3係大電流用探針的剖視圖。 Fig. 3 is a cross-sectional view of a high-current probe.
圖4係大電流用探針的局部放大剖視圖。 FIG. 4 is a partially enlarged cross-sectional view of a high-current probe.
圖5係表示利用腿部磨刷被檢體的表面層的情形的說明圖。 FIG. 5 is an explanatory view showing a state in which a surface layer of a subject is brushed by a leg.
圖6係改變了腿部的數量的變形例的大電流用探針的側視圖。 6 is a side view of a high-current probe according to a modification in which the number of legs is changed.
圖7係是使用了矩形板(接觸元件)的變形例的大電流用探針的外觀立體圖。 FIG. 7 is an external perspective view of a high-current probe using a modified example of a rectangular plate (contact element).
圖8係矩形板(接觸元件)的外觀立體圖。 FIG. 8 is an external perspective view of a rectangular plate (contact element).
圖9係變形例的大電流用探針的剖視圖。 FIG. 9 is a cross-sectional view of a high-current probe according to a modification.
圖10係變形例的大電流用探針的局部放大剖視圖。 FIG. 10 is a partially enlarged cross-sectional view of a high-current probe according to a modification.
參照附圖說明本發明的實施方式。 An embodiment of the present invention will be described with reference to the drawings.
本實施方式的大電流用探針10通過使導電性的頂端鄰接於被檢體30而與被檢體30建立電連接,並用於測量被檢體30的電阻值、電壓值等。如圖1所示,該大電流用探針10通過在其頂端以多點與被檢體30相接觸而確保接觸面積,即使在使用於大電流(例如從數十安培到數百安培)的情況下也能夠抑制發熱。 The high-current probe 10 according to the present embodiment establishes an electrical connection with the subject 30 by having a conductive tip adjacent to the subject 30, and is used to measure the resistance value, voltage value, and the like of the subject 30. As shown in FIG. 1, the high-current probe 10 is in contact with the subject 30 at a plurality of points on its tip to ensure a contact area, even when used for large currents (for example, from tens of amperes to hundreds of amperes). It is also possible to suppress heat generation.
如圖1和圖2所示,該大電流用探針10包括:套管11、施力元件12、柱塞13、圓形板的接觸元件14、止擋件15、以及絕緣法蘭盤16、17。 As shown in FIGS. 1 and 2, the high-current probe 10 includes a sleeve 11, a force applying element 12, a plunger 13, a contact element 14 of a circular plate, a stopper 15, and an insulating flange 16. , 17.
套管11是如圖3所示的由導電體構成的筒狀元件,在套管11的中空部以能夠滑動的方式保持有柱塞13。該套管11是在例如合成樹脂制的板形成孔,並將該套管11貫穿該孔的狀態下固定於合成樹脂制的板來使用的。如此固定有套管 11的板與被檢體30(電極)相對地配置為能夠接近、遠離被檢體30(電極)。在欲建立電連接的情況下,通過使板接近被檢體30,能夠將大電流用探針10的頂端(更具體地是後述的圓形板的接觸元件14)按壓於被檢體30而使其與被檢體30相接觸。另一方面,在欲使大電流用探針10的頂端形成為不與被檢體30相接觸的狀態的情況下,通過使板向自被檢體30分開的方向移動,能夠使大電流用探針10的頂端形成為不與被檢體30相接觸的狀態。 The sleeve 11 is a cylindrical member made of a conductor as shown in FIG. 3, and a plunger 13 is held in a hollow portion of the sleeve 11 so as to be slidable. The sleeve 11 is used, for example, by forming a hole in a plate made of synthetic resin, and fixing the sleeve 11 to a plate made of synthetic resin in a state where the sleeve 11 is inserted through the hole. So fixed with casing The plate 11 is disposed so as to be close to and away from the subject 30 (electrode) so as to face the subject 30 (electrode). When an electrical connection is to be established, the tip of the high-current probe 10 (more specifically, the contact element 14 of a circular plate described later) can be pressed against the subject 30 by bringing the board close to the subject 30. It is brought into contact with the subject 30. On the other hand, when the tip of the high-current probe 10 is to be in a state where it is not in contact with the subject 30, the high-current probe can be moved by moving the plate in a direction away from the subject 30. The tip of the probe 10 is formed in a state where it is not in contact with the subject 30.
施力元件12是用於對後述柱塞13施力的彈簧元件,施力元件12對柱塞13朝相對於套管11突出的方向施力。通過設置該施力元件12,能夠在將柱塞13的頂端向被檢體30按壓時,利用施力元件12的反彈力確保穩定的接觸。 The urging element 12 is a spring element for urging a plunger 13 described later, and the urging element 12 urges the plunger 13 in a direction protruding from the sleeve 11. By providing the urging element 12, when the tip of the plunger 13 is pressed against the subject 30, a stable contact can be ensured by the rebound force of the urging element 12.
柱塞13(基本元件)由導電體構成,如圖3所示貫穿於套管11而以能夠前後移動的方式保持於套管11。該柱塞13能夠在後端部13c與電線相連接,並能夠利用電線與測量設備(未圖示)電連接。在柱塞13的頂端部13a固定有後述導電用的圓形板的接觸元件14。另外,柱塞13是圖3所示的中空元件,其在長度方向上貫通形成有貫通孔13b。 The plunger 13 (basic element) is made of a conductor, and penetrates the sleeve 11 as shown in FIG. 3 and is held in the sleeve 11 so as to be able to move forward and backward. The plunger 13 can be connected to an electric wire at the rear end portion 13 c, and can be electrically connected to a measurement device (not shown) by an electric wire. A contact element 14 of a circular plate for conducting electricity, which will be described later, is fixed to the distal end portion 13 a of the plunger 13. The plunger 13 is a hollow element shown in FIG. 3 and has a through hole 13 b formed therethrough in the longitudinal direction.
圓形板的接觸元件14由導電體構成,如圖1等所示,其以與柱塞13的頂端部13a相接觸的狀態,被固定於柱塞13的頂端部13a。具體地,圓形板的接觸元件14通過被夾持於後述的絕緣法蘭盤16和柱塞13之間,而被固定於柱塞13的頂端面。能夠對例如鈹銅合金進行加工而製造該圓形板的接觸元件14。另外,也可以通過時效處理提高該圓形板的接觸元件14的剛性而提高耐久性。另外,也可以通過鍍敷鎳金提高該圓形板的接觸元件14的耐久性和電導率。 The contact element 14 of the circular plate is composed of a conductive body, and is fixed to the distal end portion 13 a of the plunger 13 in a state in contact with the distal end portion 13 a of the plunger 13 as shown in FIG. 1 and the like. Specifically, the contact element 14 of the circular plate is fixed to the front end surface of the plunger 13 by being sandwiched between the insulating flange 16 and the plunger 13 described later. The contact element 14 of this circular plate can be manufactured by processing, for example, a beryllium copper alloy. In addition, the rigidity of the contact element 14 of the circular plate may be increased by aging treatment to improve durability. In addition, the durability and electrical conductivity of the contact element 14 of the circular plate can also be improved by plating nickel gold.
如圖2所示,該圓形板的接觸元件14形成為將一塊板加工成皇冠狀的形狀,通過例如衝壓的沖切加工而製造的。該圓形板的接觸元件14包括:中央的圓形的固定部14a,以及自該固定部14a呈放射狀突出的多個腿部14c。 As shown in FIG. 2, the contact element 14 of the circular plate is formed by processing a plate into a crown shape, and is manufactured by, for example, punching and punching. The contact element 14 of the circular plate includes a circular fixed portion 14a in the center, and a plurality of leg portions 14c protruding radially from the fixed portion 14a.
固定部14a是在與柱塞13的頂端部13a相接觸的狀態下被固定於柱塞13的頂端部13a的部分,並且是被夾持於後述的絕緣法蘭盤16和柱塞13之間地被保持的部分。在該固定部14a的中央形成有圓孔14b,其能夠使後述的止擋件15的軸部15c貫穿。 The fixing portion 14 a is a portion which is fixed to the distal end portion 13 a of the plunger 13 in a state in contact with the distal end portion 13 a of the plunger 13, and is sandwiched between an insulating flange 16 and the plunger 13 described later. Ground held part. A circular hole 14b is formed in the center of the fixing portion 14a, and can pass through a shaft portion 15c of a stopper 15 described later.
腿部14c是自固定部14a的外周緣呈等間隔地突出形成的部位,其形成為自固定部14a朝向被檢體30的方向往斜向外方向突出。如圖5所示,在將柱塞13向被檢體30按壓時,該腿部14c被被檢體30按壓而擴開變形並與被檢體30相接觸。此時,如圖5所示,腿部14c頂端的邊緣磨刷被檢體30的表面層,能夠去除形成於被檢體30的表面層的高電阻覆膜。 The leg portion 14 c is a portion protruding from the outer peripheral edge of the fixing portion 14 a at regular intervals, and is formed to protrude obliquely outward from the direction of the fixing portion 14 a toward the subject 30. As shown in FIG. 5, when the plunger 13 is pressed against the subject 30, the leg portion 14 c is pressed by the subject 30 to expand and deform and contact the subject 30. At this time, as shown in FIG. 5, the edge of the top end of the leg portion 14 c is used to scrub the surface layer of the subject 30, and the high-resistance coating formed on the surface layer of the subject 30 can be removed.
此外,如圖6所示,腿部14c的數量也可以根據電流的大小等而適當地改變。另外,也可以提供腿部14c的數量不同的多個圓形板的接觸元件14,從而能夠通過更換該圓形板的接觸元件14而與使用環境相匹配地改變腿部14c的數量。 In addition, as shown in FIG. 6, the number of the leg portions 14 c may be appropriately changed according to the magnitude of the current or the like. In addition, a plurality of circular plate contact elements 14 having different numbers of leg portions 14 c may be provided, so that the number of leg portions 14 c can be changed according to the use environment by replacing the circular plate contact elements 14.
止擋件15是如圖3所示的棒狀元件,在軸部15c的頂端部形成有平坦面15a,並在該平坦面15a的中央部形成有圓錐狀的突起15b。該止擋件15配置為軸部15c貫穿柱塞13的貫穿孔13b,並且形成為頂端部的平坦面15a朝柱塞13的頂端方向突出。另外,如圖4所示,自平坦面15a突出的突起15b與圓形板的接觸元件14的腿部14c同樣地朝被檢體30的方向突出,但該突起15b的突出量設定為比腿部14c的突出量小(換言之,突起15b形成為不自連結腿部14c的頂端而成的虛擬平面突出)。 The stopper 15 is a rod-shaped element as shown in FIG. 3. A flat surface 15 a is formed at a tip end portion of the shaft portion 15 c, and a conical protrusion 15 b is formed at a central portion of the flat surface 15 a. The stopper 15 is arranged so that the shaft portion 15 c penetrates the through hole 13 b of the plunger 13, and the flat surface 15 a formed at the tip portion protrudes in the tip direction of the plunger 13. In addition, as shown in FIG. 4, the protrusion 15 b protruding from the flat surface 15 a protrudes in the direction of the subject 30 in the same manner as the leg portion 14 c of the contact member 14 of the circular plate, but the protrusion amount of the protrusion 15 b is set to be greater than that of the leg. The amount of protrusion of the portion 14c is small (in other words, the protrusion 15b is formed so as not to protrude from a virtual plane formed by connecting the ends of the leg portions 14c).
在將柱塞13向被檢體30按壓到預定距離時,該止擋件15鄰接於被檢體30,限制接觸元件14朝被檢體30方向的移動。通過該止擋件15限制接觸元件14的移動,從而抑制為腿部14c不超過預定的範圍地變形。 When the plunger 13 is pressed toward the subject 30 to a predetermined distance, the stopper 15 is adjacent to the subject 30 and restricts movement of the contact element 14 in the direction of the subject 30. The stopper 15 restricts the movement of the contact element 14 so that the leg portion 14 c is prevented from being deformed without exceeding a predetermined range.
具體地,如圖5所示,若將柱塞13向被檢體30按壓,則腿部14c被被檢體30按壓而擴開變形,並且設於止擋件15的頂端的突起15b紮入被檢體30。而且,若突起15b紮入被檢體30到一定程度的位置,則無法將柱塞13進一步向被檢體30按壓。如此,通過設置止擋件15,從而使柱塞13無法向被檢體30按壓需要以上距離,則腿部14c不能超過預定的範圍地擴開變形。 Specifically, as shown in FIG. 5, when the plunger 13 is pressed against the subject 30, the leg portion 14 c is pressed and deformed by the subject 30, and a protrusion 15 b provided at the tip of the stopper 15 is inserted. Subject 30. Furthermore, if the protrusion 15b is inserted into the subject 30 to a certain position, the plunger 13 cannot be further pressed against the subject 30. In this manner, by providing the stopper 15 so that the plunger 13 cannot be pressed against the subject 30 by the above distance, the leg portion 14c cannot be expanded and deformed beyond a predetermined range.
此外,該止擋件15與柱塞13同軸配置,並在通過圓形板的接觸元件14的重心的垂線上設有突起15b的頂點。因此,由該止擋件15產生的變形抑制大致均等地作用於所有腿部14c。此外,優選的是,由該止擋件15產生的抑制設定為腿部14c變形時產生的最大應力小於屈服點,更優選的是,由該止擋件15產生的抑制設定為腿部14c變形時產生的最大應力小於疲勞極限。 In addition, the stopper 15 is arranged coaxially with the plunger 13, and a vertex of the protrusion 15 b is provided on a vertical line passing through the center of gravity of the contact element 14 of the circular plate. Therefore, the deformation suppression by the stopper 15 is applied to all the leg portions 14 c almost equally. In addition, it is preferable that the suppression by the stopper 15 is set such that the maximum stress generated when the leg portion 14c is deformed is smaller than the yield point, and more preferably, the suppression by the stopper 15 is set as the leg portion 14c is deformed. The maximum stress generated at this time is less than the fatigue limit.
如圖3和圖4所示,絕緣法蘭盤16、17是嵌合固定於柱塞13的貫穿孔13b的筒狀絕緣元件。此外,前述的止擋件15通過壓入該絕緣法蘭盤16、17的孔而固定於柱塞13。 As shown in FIGS. 3 and 4, the insulating flanges 16 and 17 are cylindrical insulating elements fitted and fixed to the through holes 13 b of the plunger 13. In addition, the aforementioned stopper 15 is fixed to the plunger 13 by being pressed into the holes of the insulating flanges 16 and 17.
然而,本實施方式的止擋件15能夠作為四端子測量的電壓測量用感測針而使用。即,通過借助絕緣法蘭盤16、17而固定,止擋件15與柱塞13、圓形板的接觸元件14之間絕緣。另外,能夠將電線與止擋件15的後端部15d相連接,並能夠利用電線與四端子測量用的測量設備(未圖示)電連接。如此,止擋件15能夠利用與柱塞13、圓形板的接觸元件14電氣獨立的系統與測量設備連接起來。此外,由於止擋件15在頂端部具有突起15b,因此通過突起15b紮入被檢體30,能夠刺破被檢體30的表面層的高電阻覆膜,即使在進行四端子測量的情況下,也能夠實現穩定的低電阻接觸。 However, the stopper 15 of the present embodiment can be used as a voltage measuring sensor pin for four-terminal measurement. That is, by being fixed by the insulating flanges 16 and 17, the stopper 15 is insulated from the plunger 13 and the contact member 14 of the circular plate. In addition, an electric wire can be connected to the rear end portion 15 d of the stopper 15, and an electric wire can be electrically connected to a measurement device (not shown) for four-terminal measurement. In this way, the stopper 15 can be connected to the measuring device using a system that is electrically independent from the plunger 13 and the contact element 14 of the circular plate. In addition, since the stopper 15 has a protrusion 15b at the tip, the protrusion 15b is inserted into the subject 30, and the high-resistance coating of the surface layer of the subject 30 can be pierced, even in the case of four-terminal measurement. , Can also achieve stable low resistance contact.
如以上說明,採用本實施方式,在將柱塞13向被檢體30按壓時,多個腿部14c被被檢體30按壓而擴開變形並與被檢體30相接觸。即,由於多個腿部14c順應電極的凹凸、傾斜而變形,因此能夠不受電極的凹凸、傾斜影響地確保穩 定的接觸。另外,通過將各腿部14c的頂端按壓於電極並進行磨刷,能夠去除電極表面的高電阻覆膜,因此能夠確保低電阻且穩定的接觸。而且,即使在腿部14c的頂端固定黏著有被檢體30的電極材料的情況下,也能夠通過磨刷動作使該固定黏著著的電極材料剝離掉,因此能夠確保低電阻且穩定的接觸。而且,由於能夠利用衝壓的沖切加工作為製作方法,因此能夠廉價地進行製造。另外,即使在假設圓形板的接觸元件14產生磨損、劣化的情況下,也僅更換圓形板的接觸元件14即可,因此能夠大幅降低大電流用探針10的使用成本。 As described above, according to the present embodiment, when the plunger 13 is pressed against the subject 30, the plurality of legs 14 c are pressed by the subject 30 to be expanded and deformed and come into contact with the subject 30. That is, since the plurality of legs 14c are deformed in accordance with the unevenness and inclination of the electrode, it is possible to ensure stability without being affected by the unevenness and inclination of the electrode. Fixed contact. In addition, by pressing the tip of each leg portion 14c against the electrode and brushing it, the high-resistance coating on the surface of the electrode can be removed, and low-resistance and stable contact can be ensured. In addition, even when the electrode material of the subject 30 is fixedly adhered to the tip of the leg portion 14c, the fixedly adhered electrode material can be peeled off by a brushing operation, so that low-resistance and stable contact can be ensured. In addition, since a punching process can be used as a manufacturing method, it can be manufactured inexpensively. In addition, even if it is assumed that the contact element 14 of the circular plate is worn and deteriorated, it is only necessary to replace the contact element 14 of the circular plate, so that the use cost of the high-current probe 10 can be significantly reduced.
而且,由於在柱塞13的頂端部13a突出有止擋件15,其在將圓形板的接觸元件14向被檢體30按壓預定距離時鄰接於被檢體30,抑制所述腿部14c超過預定範圍地變形,因此腿部14c的變形量被限制,從而能夠使腿部14c變形時產生的應力處於腿部14c的彈性範圍內(優選的是疲勞極限內)。由此,即使在反復使用大電流用探針10的情況下,也能夠抑制應變、疲勞破壞,從而能夠長時間保持穩定的低電阻接觸。 Furthermore, since the stopper 15 protrudes from the tip portion 13a of the plunger 13, when the contact member 14 of the circular plate is pressed against the subject 30 by a predetermined distance, the stopper 15 is adjacent to the subject 30, and the leg portion 14c is suppressed. Deformation exceeds a predetermined range, so the amount of deformation of the leg portion 14c is limited, so that the stress generated when the leg portion 14c is deformed can fall within the elastic range of the leg portion 14c (preferably within the fatigue limit). Accordingly, even when the high-current probe 10 is repeatedly used, strain and fatigue damage can be suppressed, and stable low-resistance contact can be maintained for a long time.
另外,所述止擋件15突出設置於圓形板的接觸元件14的中央附近,因此能夠使止擋件15所發揮的變形抑制大致均等地作用於所有腿部14c。 In addition, since the stopper 15 is protruded near the center of the contact element 14 of the circular plate, the deformation suppression exerted by the stopper 15 can be applied to all of the legs 14 c approximately equally.
另外,所述止擋件15能夠用作四端子測量的電壓測量用感測針,因此在四端子測量中也能夠使用大電流用探針10,並能夠進行精度較高的測量。 In addition, the stopper 15 can be used as a voltage measurement sensor pin for four-terminal measurement. Therefore, a high-current probe 10 can also be used in four-terminal measurement, and highly accurate measurement can be performed.
此外,上述實施方式中,對使用柱塞13作為大電流用探針10的基本元件的例子進行了說明,但本發明的實施方式不限於此。例如,如圖7所示,也可以將板狀元件21用作基本元件。即,即使是用兩塊板狀元件21夾持被測量物地進行檢查這樣的大電流用探針20,也能夠應用本發明的結構來取得與上述實施方式同樣的效果。 In the above-mentioned embodiment, an example in which the plunger 13 is used as a basic element of the high-current probe 10 has been described, but the embodiment of the present invention is not limited to this. For example, as shown in FIG. 7, the plate-like element 21 may be used as a basic element. That is, even if it is a high-current probe 20 such that an object to be measured is sandwiched between two plate-shaped elements 21, the structure of the present invention can be applied to obtain the same effect as the embodiment described above.
另外,上述實施方式中,對使用圓形板的接觸元件14作為大電流用探針10 的接觸元件的例子進行了說明,但本發明的實施方式不限於此。例如,如圖7和圖8所示,也可以使用矩形板22作為接觸元件。該如圖7和圖8所示的例子中,矩形板22包括:長方形的固定部22a,以及自該固定部22a的外周緣以大致相同的高度突出的多個腿部22c。而且,在固定部22a的重心形成有圓孔22b。通過以貫穿該圓孔22b的方式配置止擋件23,從而止擋件23突出設置於矩形板22的中央附近。如此,即使在改變了接觸元件的形狀的情況下,也能夠應用本發明的結構來取得與上述實施方式同樣的效果。 In the above-described embodiment, the contact element 14 using a circular plate is used as the high-current probe 10. An example of a contact element has been described, but embodiments of the present invention are not limited thereto. For example, as shown in FIGS. 7 and 8, a rectangular plate 22 may be used as the contact element. In the example shown in FIGS. 7 and 8, the rectangular plate 22 includes a rectangular fixing portion 22 a and a plurality of leg portions 22 c protruding from the outer peripheral edge of the fixing portion 22 a at substantially the same height. A circular hole 22b is formed in the center of gravity of the fixed portion 22a. By placing the stopper 23 so as to penetrate the circular hole 22 b, the stopper 23 is protruded and provided near the center of the rectangular plate 22. As described above, even when the shape of the contact element is changed, the structure of the present invention can be applied to obtain the same effect as the above-mentioned embodiment.
另外,上述實施方式中,能夠將止擋件23作為四端子測量的電壓測量用感測針而使用,但不限於此,也可以相對於止擋件23獨立地設置四端子測量的電壓測量用感測針。例如,如圖9和圖10所示,也可以以貫穿止擋件23的方式設置四端子測量的電壓測量用感測針即四端子測量用探針25。該圖9和圖10所示的例子中,四端子測量用探針25配置於筒狀的針引導部26的中空部,並被針引導部26保持為能夠前後滑動。而且,四端子測量用探針25被針施力元件27以朝外側突出的方式施力,並通過向被檢體30按壓而能夠朝內側滑動。在針引導部26的後側設有用於與測量設備相連接的連接部28,通過將測量設備與該連接部28相連接,四端子測量用探針25在與被檢體30電連接時能夠執行電壓測量。此外,四端子測量用探針25與柱塞13、圓形板的接觸元件14之間絕緣。如此,以貫穿大電流用探針10的柱塞13的方式設置四端子測量的電壓測量用感測針,在四端子測量中也能夠使用大電流用探針10,並能夠進行精度較高的測量。 In addition, in the above-mentioned embodiment, the stopper 23 can be used as a voltage measuring sensor pin for four-terminal measurement, but it is not limited to this, and the four-terminal voltage measurement can be provided separately from the stopper 23 Sensing pin. For example, as shown in FIGS. 9 and 10, a four-terminal measuring probe 25 that is a voltage measuring probe for four-terminal measurement may be provided so as to penetrate the stopper 23. In the examples shown in FIG. 9 and FIG. 10, the four-terminal measurement probe 25 is disposed in the hollow portion of the cylindrical needle guide 26 and is held by the needle guide 26 so as to be able to slide back and forth. In addition, the four-terminal measurement probe 25 is urged by the needle urging element 27 so as to protrude outward, and can be slid inward by being pressed against the subject 30. A connection portion 28 for connecting to a measurement device is provided on the rear side of the needle guide portion 26. By connecting the measurement device to the connection portion 28, the four-terminal measurement probe 25 can be electrically connected to the subject 30. Perform voltage measurement. The four-terminal measuring probe 25 is insulated from the plunger 13 and the contact element 14 of the circular plate. In this way, the four-terminal voltage-sensing probe is provided so as to penetrate the plunger 13 of the high-current probe 10, and the high-current probe 10 can also be used in the four-terminal measurement. measuring.
Claims (3)
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JP2014015103A JP6373009B2 (en) | 2014-01-30 | 2014-01-30 | High current probe |
JPJP2014-015103 | 2014-01-30 |
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TW201530148A TW201530148A (en) | 2015-08-01 |
TWI638163B true TWI638163B (en) | 2018-10-11 |
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TW103141057A TWI638163B (en) | 2014-01-30 | 2014-11-26 | High current probe |
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JP (1) | JP6373009B2 (en) |
KR (1) | KR20150090996A (en) |
CN (1) | CN104820117A (en) |
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CN109932535B (en) * | 2017-12-15 | 2021-03-02 | 致茂电子(苏州)有限公司 | Current probe structure |
US10396510B1 (en) * | 2018-06-29 | 2019-08-27 | Huber + Suhner Ag | Coaxial connector with compensator |
CN110687324B (en) * | 2018-07-05 | 2023-01-31 | 台湾中国探针股份有限公司 | Dual-purpose detachable test needle structure |
JP2020180889A (en) * | 2019-04-25 | 2020-11-05 | オムロン株式会社 | Probe pin, inspection jig, and inspection unit |
TWI742604B (en) * | 2020-04-09 | 2021-10-11 | 中國探針股份有限公司 | Replaceable modular electrical testing head and test needle with replaceable modular electrical testing head |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007248133A (en) * | 2006-03-14 | 2007-09-27 | Hioki Ee Corp | Probe and measuring apparatus |
CN101907642A (en) * | 2009-06-02 | 2010-12-08 | 日本电产理德株式会社 | Inspection fixture and inspection probe |
US7946853B2 (en) * | 2005-07-02 | 2011-05-24 | Teradyne, Inc. | Compliant electro-mechanical device |
TW201235667A (en) * | 2010-11-22 | 2012-09-01 | Unitechno Inc | Kelvin contact probe and kelvin inspection jig provided with same |
Family Cites Families (3)
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US5196789A (en) * | 1991-01-28 | 1993-03-23 | Golden Joseph R | Coaxial spring contact probe |
JP3163263B2 (en) * | 1997-02-05 | 2001-05-08 | 有限会社清田製作所 | Coaxial probe |
JP2011137791A (en) * | 2010-01-04 | 2011-07-14 | Nippon Konekuto Kogyo Kk | Probe pin for large current |
-
2014
- 2014-01-30 JP JP2014015103A patent/JP6373009B2/en active Active
- 2014-11-26 TW TW103141057A patent/TWI638163B/en active
-
2015
- 2015-01-06 KR KR1020150001015A patent/KR20150090996A/en not_active Application Discontinuation
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7946853B2 (en) * | 2005-07-02 | 2011-05-24 | Teradyne, Inc. | Compliant electro-mechanical device |
JP2007248133A (en) * | 2006-03-14 | 2007-09-27 | Hioki Ee Corp | Probe and measuring apparatus |
CN101907642A (en) * | 2009-06-02 | 2010-12-08 | 日本电产理德株式会社 | Inspection fixture and inspection probe |
CN101907642B (en) * | 2009-06-02 | 2013-03-06 | 日本电产理德株式会社 | Inspection fixture and inspection probe |
TW201235667A (en) * | 2010-11-22 | 2012-09-01 | Unitechno Inc | Kelvin contact probe and kelvin inspection jig provided with same |
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TW201530148A (en) | 2015-08-01 |
KR20150090996A (en) | 2015-08-07 |
CN104820117A (en) | 2015-08-05 |
JP2015141145A (en) | 2015-08-03 |
JP6373009B2 (en) | 2018-08-15 |
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