WO2012067125A1

WO2012067125A1 - Probe unit

Info

Publication number: WO2012067125A1
Application number: PCT/JP2011/076334
Authority: WO
Inventors: 風間　俊男; 浩平広中; 重樹石川
Original assignee: 日本発條株式会社
Priority date: 2010-11-17
Filing date: 2011-11-15
Publication date: 2012-05-24
Also published as: TWI457573B; JPWO2012067125A1; TW201234017A

Abstract

This probe unit is provided with: a plurality of large-diameter probes; a plurality of small-diameter probes each having a diameter that is smaller than that of the large-diameter probes; a large-diameter probe holder that is provided with a plurality of large holes, which individually hold the plurality of large-diameter probes, penetrating in the direction of thickness, and that houses in the state of the end of a small-diameter probe contacting a large-diameter probe at one end of each large hole; and a small-diameter probe holder that is provided with a plurality of small holes, which individually hold the plurality of small-diameter probes in a removal-preventing state, and that is stacked onto the large-diameter probe holder in a manner so that the direction of thickness thereof matches the direction of thickness of the large-diameter holder. The center axis in the lengthwise direction of interconnecting large holes and small holes differ from each other, and the plurality of small holes include those that are such that the distance between the center axes of two adjacent small holes is smaller than the distance between the center axes of the two large holes with which the small holes respectively interconnect.

Description

Probe unit

The present invention relates to a probe unit that houses a conductive probe that inputs and outputs signals in an electrical characteristic inspection of a semiconductor integrated circuit or the like.

In the inspection of electrical characteristics of a semiconductor integrated circuit such as an IC chip, a probe unit in which a plurality of conductive probes are accommodated at predetermined positions is used corresponding to the external electrode installation pattern of the semiconductor integrated circuit. The probe unit includes a probe holder provided with a plurality of holes through which the contact probe is inserted, and both ends of the conductive probe held by the probe holder are connected to a semiconductor integrated circuit and a circuit board that outputs a test signal. By contacting each of the electrodes, the semiconductor integrated circuit and the circuit board are electrically connected (see, for example, Patent Document 1).

JP 2002-107377 A

By the way, in recent years, a probe capable of flowing a large current of about 10 to 20 A has been required in the case of inspecting a semiconductor for a control system of an automobile. In order to meet this requirement, the probe diameter may be increased. However, in the case where the maximum diameter or pitch of the semiconductor electrodes is 1 mm or less, there is a problem that the diameter of the probe has to be made rather thin, and as a result, the allowable current becomes small. Also, in the case of inspection that requires two probes per terminal as in the four-terminal measurement, a probe with a small diameter is necessary, and the allowable current has to be reduced.

The present invention has been made in view of the above, and an object of the present invention is to provide a probe unit capable of suppressing a reduction in allowable current due to a narrowed probe diameter.

In order to solve the above-described problems and achieve the object, each of the probe units according to the present invention is formed using a conductive material, and is connected to the first tip portion having a substantially needle shape and the first tip portion. A first plunger having a first base end on the same axis, a second front end whose tip is directed in a direction opposite to the front end of the first plunger, and a length in the axial direction compared to the first base end A second plunger having a long second base end on the same axis, one end in the longitudinal direction encompassing the first base end, and the other end including the second base end. A tightly wound portion attached to the first and second plungers and tightly wound on the first plunger side, and a coarsely wound portion wound at a predetermined pitch on the second plunger side, along the longitudinal direction A coil-shaped spring member that is stretchable, and has a longitudinal direction A plurality of large-diameter probes that are telescopically stretchable, a plurality of small-diameter probes that are each formed using a conductive material and have a diameter smaller than the diameter of the large-diameter probe, and the plurality of large-diameter probes A plurality of large hole portions held in the hole, and having a diameter smaller than that of the large hole portion, communicating with any of the plurality of large hole portions, and receiving the end portion of the small diameter probe in contact with the second tip portion. A large-diameter probe holder through which a set of the large-hole portion and the reception-hole portion communicating with each other passes in the thickness direction, and the plurality of small-diameter probes are individually retained. A small-diameter probe holder that is provided on the large-diameter probe holder so that each small-hole portion communicates with one of the plurality of receiving-hole portions. Before and communicate with each other A central axis in a longitudinal direction of the large hole portion and the small hole portion is different, and the plurality of small hole portions have two distances between the center axes of two adjacent small hole portions corresponding to the two small hole portions, respectively. The second base end portion enters the inside of the tightly wound portion when a load at the time of inspection is applied to at least the small-diameter probe. And

In the probe unit according to the present invention as set forth in the invention described above, the tip of the second plunger forms a plane substantially perpendicular to the longitudinal direction of the large-diameter probe.

In the probe unit according to the present invention, in the above invention, the large-diameter probe holder is laminated on the first substrate, the first substrate holding the tip portion of the first plunger exposed, and the first substrate. And a second substrate that is stacked on the small-diameter probe holder and receives the end of the small-diameter probe held by the small-diameter probe holder.

The probe unit according to the present invention is characterized in that, in the above invention, the small-diameter probe holder is formed by laminating two substrates that expose and hold either one end of the small-diameter probe. To do.

The probe unit according to the present invention is characterized in that, in the above invention, the large-diameter probe holder and the small-diameter probe holder have an insulating property at least in contact with the large-diameter probe and / or the small-diameter probe. To do.

According to the probe unit according to the present invention, since a pair of probes is configured by combining a large-diameter probe and a small-diameter probe in a state in which the axes are shifted from each other, it is possible to cope with the narrowing of the pitch to be inspected. In addition, it is not necessary to reduce the diameter of both ends of the probe. Therefore, it is possible to suppress a decrease in allowable current due to the narrowing of the probe.

FIG. 1 is a diagram showing a configuration of a main part of a probe unit according to an embodiment of the present invention. FIG. 2 is a diagram schematically showing the positional relationship between the large hole portion and the small hole portion. FIG. 3 is a diagram showing an outline of assembly of the probe unit according to the embodiment of the present invention. FIG. 4 is a perspective view schematically showing the overall configuration of the probe unit according to the embodiment of the present invention. FIG. 5 is a diagram showing a state at the time of inspection of the probe unit according to the embodiment of the present invention.

Hereinafter, embodiments for carrying out the present invention will be described in detail with reference to the drawings. In addition, this invention is not limited by the following embodiment. The drawings referred to in the following description only schematically show the shape, size, and positional relationship so that the contents of the present invention can be understood. That is, the present invention is not limited only to the shape, size, and positional relationship illustrated in each drawing.

FIG. 1 is a partial cross-sectional view showing a configuration of a main part of a probe unit according to an embodiment of the present invention. A probe unit 1 shown in FIG. 1 is a device used when an electrical characteristic test is performed on a semiconductor integrated circuit to be inspected, and between the semiconductor integrated circuit and a circuit board that outputs a test signal to the semiconductor integrated circuit. Is an apparatus for electrically connecting the two. The probe unit 1 has a plurality of large-diameter probes 2 each having one end in contact with an electrode provided on a circuit board, each one in contact with the large-diameter probe 2, and the other end in contact with an electrode of a semiconductor integrated circuit. A plurality of small-diameter probes 3 having a diameter smaller than that of the large-diameter probe 2, a large-diameter probe holder 4 that holds the plurality of large-diameter probes 2 in a state where the large-diameter probes 2 are prevented from being detached, and a large-diameter probe holder 4 are detachable. And a small-diameter probe holder 5 that holds the plurality of small-diameter probes 3 in a state where they are prevented from coming off.

The large-diameter probe 2 is formed using a conductive material, and has a first needle 21 having a substantially needle shape, a spring member 22 that is an elastic member that has one end attached to the first plunger 21 and is elastic in the longitudinal direction, The other end of the spring member 22 is attached and the second plunger 23 has a tip directed in a direction opposite to the tip of the first plunger 21. In the state shown in FIG. 1, the first plunger 21, the spring member 22, and the second plunger 23 have the same center axis in the longitudinal direction.

The first plunger 21 has a tip portion 21a (first tip portion) having a sharp end, a flange portion 21b having a diameter larger than the diameter of the tip portion 21a, and a direction opposite to the tip portion 21a via the flange portion 21b. It protrudes and has a cylindrical shape having a diameter that is smaller than the diameter of the flange portion 21b and slightly larger than the inner diameter of the spring member 22, and has a boss portion 21c into which the end of the spring member 22 is press-fitted, and a diameter of the boss portion 21c. A base end portion 21d (first base end portion) having a cylindrical shape that is smaller and smaller in diameter than the inner diameter of the spring member 22 and enters the inside of the spring member 23.

The spring member 22 is wound in a state where the end portion is press-fitted into the boss portion 21c of the first plunger 21, and the wire constituting the spring member 22 is in close contact with the coarse winding portion 22b. And a tightly wound portion 22 a that is press-fitted into the second plunger 23. The coarsely wound portion 22b and the tightly wound portion 22a are connected to each other and have the same diameter.

The second plunger 23 has a columnar tip portion 23a (second tip portion) and a columnar shape having a diameter smaller than the diameter of the tip portion 23a and slightly larger than the inner diameter of the spring member 22, and a tightly wound portion. A boss portion 23b into which the end portion of 22a is press-fitted, and a base end portion 23c having a diameter smaller than that of the boss portion 23b and smaller than the inner diameter of the spring member 22 and entering the inside of the spring member 23 ( 2nd base end part). The outer diameter of the tip portion 23 a is slightly larger than the outer diameter of the spring member 22.

In the present embodiment, the length of the base end portion 23c is arbitrarily set as long as it is longer than the length of the base end portion 21d and does not come into contact with the first plunger 21 even if the large-diameter probe 2 has the maximum stroke. Is possible. Further, the distal end surface of the distal end portion 23a that forms the upper surface of the second plunger 23 in FIG. 1 is a plane orthogonal to the longitudinal direction of the large-diameter probe 2, and the small-diameter probe 3 contacts this plane.

The small-diameter probe 3 is provided with a distal end portion 31 and a proximal end portion 32 each having a sharp end, and a flange having a diameter larger than that of the distal end portion 31 and the proximal end portion 32. Part 33. The diameter of the distal end portion 31 and the diameter of the proximal end portion 32 are substantially equal, and those diameters are smaller than the outer diameter of the large diameter probe 2. The distal end of the base end portion 32 is in contact with the distal end portion 23a of the second plunger 23 of the large diameter probe 2 as described above. The small-diameter probe 3 is disposed at a position offset from the large-diameter probe 2 so that its central axis is parallel to and different from the central axis of the large-diameter probe 2.

The large-diameter probe holder 4 is formed by laminating a first substrate 41 and a second substrate 42 formed of an insulating material such as resin, machinable ceramic, or silicon in the thickness direction (vertical direction in FIG. 1). Become. The large diameter probe holder 4 has a plurality of large hole portions 4a for individually holding a plurality of large diameter probes 2 and a diameter smaller than that of the large hole portion 4a and communicates with any of the plurality of large hole portions 4a. 3 has a plurality of receiving hole portions 4b for receiving the base end portion 32 in contact with the large-diameter probe 2. A set of the large hole portion 4a and the receiving hole portion 4b communicating with each other penetrates the large diameter probe holder 4 in the thickness direction. The central axes in the longitudinal direction of the large hole portion 4a and the receiving hole portion 4b communicating with each other are parallel and different. The distance d between the central axis of the large hole portion 4a and the central axis of the receiving hole portion 4b is set to be smaller than the radius of the circle forming the distal end surface of the distal end portion 23a. By setting the distance d in this way, the large-diameter probe 2 and the small-diameter probe 3 inserted through the large hole portion 4a and the receiving hole portion 4b communicating with each other can be reliably brought into contact with each other.

The first substrate 41 is provided with a plurality of first hole portions 41a that form part of the large hole portions 4a. The first hole 41a is a cylindrical small-diameter hole 411a that can be inserted through the tip 21a of the first plunger 21, and a cylindrical large-diameter hole that is larger in diameter than the small-diameter hole 411a and coaxial with the small-diameter hole 411a. 412a. The diameter of the small diameter hole 411 a is smaller than the diameter of the flange portion 21 b of the first plunger 21. The small-diameter hole 411a prevents the first plunger 21 from coming off while the front end portion 21a of the first plunger 21 is exposed. The maximum diameter of the large-diameter hole 412a is larger than the maximum diameter of the large-diameter probe 2.

The second substrate 42 forms a plurality of receiving hole portions 4b and a part of the large hole portion 4a, and communicates with the corresponding receiving hole portions 4b to penetrate the second substrate 42 in the thickness direction. A hole 42a is provided. The diameter of the second hole portion 42a is equal to the diameter of the large diameter hole 412a. Each of the plurality of second holes 42a is coaxially connected to one of the plurality of large-diameter holes 412a at an end different from the end communicating with the receiving hole 4b.

The small-diameter probe holder 5 is formed by laminating a third substrate 51 and a fourth substrate 52, which are respectively formed using an insulating material similar to that of the large-diameter probe holder 4, in the thickness direction (vertical direction in FIG. 1). The small-diameter probe holder 5 is provided with a plurality of small holes 5a that hold the plurality of small-diameter probes 3 in a state in which the small-diameter probes 3 are individually removed and penetrate in the thickness direction. The small-diameter probe holder 5 is stacked on the large-diameter probe holder 4 so that each of the plurality of small hole portions 5a communicates coaxially with any of the plurality of receiving hole portions 4b.

The third substrate 51 is provided with a plurality of third hole portions 51a that form part of the small hole portions 5a. The third hole 51a has a cylindrical small diameter hole 511a having a circular cross section through which the tip 31 of the small diameter probe 3 can be inserted, and a cylindrical shape having a diameter larger than that of the small diameter hole 511a and coaxial with the small diameter hole 511a. A large-diameter hole 512a. The diameter of the small diameter hole 511a is smaller than the diameter of the flange portion 33 of the small diameter probe 3. The diameter of the large-diameter hole 512 a is large enough to accommodate the flange portion 33 of the small-diameter probe 3 and has the same size as the flange portion 33. The third substrate 51 prevents the small-diameter probe 3 from coming off while the tip 31 of the small-diameter probe 3 is exposed.

The fourth substrate 52 is provided with a plurality of fourth hole portions 52a that communicate with the corresponding third hole portions 51a to form the small hole portions 5a. The fourth hole 52a is a cylindrical small diameter hole 521a through which the proximal end portion 32 of the small diameter probe 3 can be inserted, and a cylindrical large diameter hole having a diameter larger than that of the small diameter hole 521a and coaxial with the small diameter hole 521a. 522a. The small diameter hole 521a communicates with the receiving hole 4b. The diameter of the small diameter hole 521a is equal to the diameter of the receiving hole portion 4b. The diameter of the large diameter hole 522a is equal to the diameter of the large diameter hole 512a. Each of the plurality of large diameter holes 522a is in coaxial communication with any one of the plurality of large diameter holes 512a. The fourth substrate 52 prevents the small-diameter probe 3 from coming off while the proximal end portion 32 of the small-diameter probe 3 is exposed.

The large hole portion 4a, the receiving hole portion 4b, and the small hole portion 5a are formed by performing drilling, etching, punching molding, or processing using laser, electron beam, ion beam, wire discharge, or the like. .

The large-diameter probe holder 4 and the small-diameter probe holder 5 include the surface of the substrate made of a conductive material (including portions corresponding to the side surfaces of the large hole portion 4a, the receiving hole portion 4b, and the small hole portion 5a) as insulating materials. It is also possible to have a structure covered with the above.

FIG. 2 is a diagram schematically showing a positional relationship between the large hole portion 4a and the small hole portion 5a, and more specifically a diagram showing a positional relationship between the large diameter hole 412a and the small diameter hole 511a. The center axis distance H of the large diameter hole 412a is greater than the center axis distance h of the small diameter hole 511a. In the communicating large hole portion 4a and small hole portion 5a, the distance between the central axis of the large diameter hole 412a and the central axis of the small diameter hole 511a is the distance between the central axis of the large hole portion 4a and the central axis of the receiving hole portion 4b. Equal to the distance d. By setting the positional relationship between the large hole portion 4a and the small hole portion 5a in this way, the pitch on the small diameter probe 3 side in contact with the inspection object can be made narrower than the pitch on the large diameter probe 2 side.

FIG. 3 is a diagram showing an outline of assembly of the probe unit 1. When assembling the probe unit 1, after combining the two probe holders so that the second substrate 42 of the large-diameter probe holder 4 and the fourth substrate 52 of the small-diameter probe holder 5 face each other, screws or the like are used. Conclude. The large-diameter probe holder 4 and the small-diameter probe holder 5 are provided with positioning openings, and positioning pins are provided in the large-diameter probe holder 4 and the small-diameter probe holder 5 corresponding to the opening. If both are positioned by insertion, the assembly of the probe unit 1 can be performed more easily and quickly.

FIG. 4 is a perspective view showing an overall configuration of the probe unit 1 and an outline of electrical characteristic inspection of a semiconductor integrated circuit using the probe unit 1. In the probe unit 1, a holder member 6 is provided on the outer periphery of the large-diameter probe holder 4 and the small-diameter probe holder 5 to prevent the semiconductor integrated circuit 100 from being displaced during inspection. A circuit board 200 having a circuit for outputting a test signal is attached to the bottom surface side of the holder member 6.

FIG. 5 is a partial cross-sectional view showing a configuration of a main part of the probe unit 1 when the semiconductor integrated circuit 100 is inspected. In the state shown in FIG. 5, the large-diameter probe 2 receives an upward force in the drawing by contacting the electrode 201 of the circuit board 200. On the other hand, the small-diameter probe 3 receives a downward force in the figure by contacting the electrode 101 of the semiconductor integrated circuit 100. Therefore, the spring member 22 of the large-diameter probe 2 is contracted along the longitudinal direction as compared with the state where the small-diameter probe 3 is not in contact with the electrode 101 of the semiconductor integrated circuit 100.

An inspection signal generated when inspecting the semiconductor integrated circuit 100 passes through the first plunger 21 of the large-diameter probe 2, the tightly wound portion 22 a, and the second plunger 23 via the electrode 201 of the circuit board 200, and then passes through the small-diameter probe 3. It reaches the electrode 101 of the semiconductor integrated circuit 100 via the route. Thus, in the large-diameter probe 2, the first plunger 21 and the second plunger 23 are conducted through the tightly wound portion 22a, so that the electrical signal conduction path can be minimized. Therefore, it is possible to prevent a signal from flowing to the rough winding portion 22b during inspection, and to reduce and stabilize the inductance and resistance.

When the probe unit 1 repeats the inspection, the small-diameter probe 3 repeatedly contacts and separates from the electrode 101 every inspection, and therefore, the tip 31 may be worn or the small-diameter probe 3 may be damaged by long-term use. is there. In such a case, in this embodiment, since the small diameter probe holder 5 can be removed from the large diameter probe holder 4, only the small diameter probe 3 can be easily replaced.

According to the embodiment of the present invention described above, a set of probes is configured by combining a large-diameter probe and a small-diameter probe in a state where their axes are shifted from each other. In the case of corresponding to the above, it is not necessary to reduce the diameter of both ends of the probe. Therefore, it is possible to suppress a decrease in allowable current due to the narrowing of the probe.

Further, according to the present embodiment, the deterioration with time is severe, and the small diameter probe, which is the largest cause of the increase in the contact resistance value, can be replaced independently of the large diameter probe, so that maintenance can be easily performed. It becomes. In addition, since only the small-diameter probe is replaced, the large-diameter probe holder can be used as it is unless there is a particular problem. Therefore, a large-diameter probe can be saved and it is economical.

Further, according to the present embodiment, since the second plunger of the large diameter probe and the small diameter probe are processed separately, the processing is easier than the case where the large diameter probe and the small diameter probe are offset and integrally formed.

When the large-diameter probe and small-diameter probe are offset and integrally molded, the probe does not have an axisymmetric shape. For this reason, when housing the integrally formed probe in the probe holder, positioning must be performed while paying attention to the position of the hole through which the portion corresponding to the small diameter probe is inserted, and it takes time to house the probe. There was a problem. In contrast, in the present embodiment, the large-diameter probe and the small-diameter probe are separated so that each probe has an axisymmetric shape, so that each probe can be easily accommodated in the probe holder. it can.

Further, according to the present embodiment, the second base end portion of the second plunger is made longer than the first base end portion of the first plunger, thereby being orthogonal to the longitudinal direction of the second plunger when a load is applied. The rotation around the shaft can be suppressed. Therefore, the second plunger can be smoothly moved up and down without the flange portion or the second base end portion of the second plunger being caught by the probe holder or the spring member.

Further, according to the present embodiment, the lateral load applied to the tightly wound portion of the spring member (the rotational load due to the inclination of the second plunger caused by the deviation of the axes of the large diameter probe and the small diameter probe) is 2 Since the base end of the plunger is long, it decreases and the tight winding of the tightly wound portion during the stroke is maintained. For this reason, there exists an effect that the electrical resistance value of a close_contact | adherence winding part is stabilized.

As is apparent from the above description, the present invention can include various embodiments and the like not described herein, and within the scope not departing from the technical idea specified by the claims. Various design changes can be made.

As described above, the probe unit according to the present invention is useful for inspection of electrical characteristics of a semiconductor integrated circuit such as an IC chip.

DESCRIPTION OF SYMBOLS 1 Probe unit 2 Large diameter probe 3 Small diameter probe 4 Large diameter probe holder 4a Large hole part 4b Receiving hole part 5 Small diameter probe holder 5a Small hole part 6 Holder member 21

1st plunger

21a, 23a, 31 Tip part 21b, 33

Flange part

21c,

23b Boss portion

21d, 23c, 32 Base end portion 22 Spring member 22a Adhesion winding portion 22b Coarse winding portion 23 Second plunger 41 First substrate 41a First hole portion 42 Second substrate 42a Second hole portion 51 Third substrate 51a Third hole 52 Fourth substrate 52a Fourth hole 100 Semiconductor integrated

circuit

101, 201 Electrode 200

Circuit board

411a, 511a, 521a

Small diameter hole

412a, 512a, 522a Large diameter hole

Claims

A first plunger, each of which is formed using a conductive material and has a substantially needle-like shape, and a first plunger that is coaxially connected to the first distal end, and a distal end of the first plunger. A second plunger having a second distal end portion directed in a direction opposite to the distal end and a second proximal end portion having a longer axial length than the first proximal end portion on the same axis, and one longitudinal end portion A tightly wound portion that includes a first base end portion and a second end portion that covers the second base end portion and is attached to the first and second plungers and tightly wound on the first plunger side And a coiled spring member that is stretchable along the longitudinal direction, and that is stretchable along the longitudinal direction. A plurality of large diameter probes,
A plurality of small diameter probes each formed using a conductive material and having a diameter smaller than the diameter of the large diameter probe;
A plurality of large hole portions for individually holding the plurality of large diameter probes; a diameter smaller than the large hole portion; A large-diameter probe holder having a plurality of receiving hole portions that are received in contact with the distal end portion, and a set of the large hole portion and the receiving hole portion communicating with each other in the thickness direction;
A plurality of small hole portions that hold the plurality of small diameter probes in a state in which the plurality of small diameter probes are individually prevented from penetrating in the thickness direction, and each small hole portion communicates with one of the plurality of receiving hole portions. A small diameter probe holder stacked on a large diameter probe holder;
With
The central axis in the longitudinal direction of the large hole part and the small hole part communicating with each other is different,
The plurality of small holes include ones in which the distance between the central axes of two adjacent small holes is smaller than the distance between the central axes of the two large holes corresponding to the two small holes, respectively.
The probe unit characterized in that the second base end portion enters the inside of the tightly wound portion at least when a load at the time of inspection is applied to the small-diameter probe.
The probe unit according to claim 1, wherein the tip of the second plunger forms a plane substantially perpendicular to the longitudinal direction of the large-diameter probe.
The large-diameter probe holder is
A first substrate that exposes and holds the tip of the first plunger;
A second substrate stacked on the first substrate and stacked on the small-diameter probe holder and receiving an end of the small-diameter probe held by the small-diameter probe holder;
The probe unit according to claim 1, comprising:
The small diameter probe holder is
The probe unit according to any one of claims 1 to 3, wherein two substrates that respectively expose and hold one end of the small-diameter probe are stacked.
The probe according to any one of claims 1 to 4, wherein the large-diameter probe holder and the small-diameter probe holder have an insulating property at least in contact with the large-diameter probe and / or the small-diameter probe. unit.