JP2021105547A

JP2021105547A - Contact probe

Info

Publication number: JP2021105547A
Application number: JP2019236539A
Authority: JP
Inventors: 一也相馬; Kazuya Soma; 雅宏高橋; Masahiro Takahashi; 成彦西脇; Shigehiko Nishiwaki; 佑哉廣中; Yuya HIRONAKA; 高橋　秀志; Shuji Takahashi; 秀志高橋
Original assignee: NHK Spring Co Ltd
Current assignee: NHK Spring Co Ltd
Priority date: 2019-12-26
Filing date: 2019-12-26
Publication date: 2021-07-26
Also published as: JP2024055974A

Abstract

To provide a contact probe capable of maintaining stable contact resistance in repetitive use.SOLUTION: A contact probe according to the present invention for transmitting a signal by contacting with electrodes different from each other at its respective both ends in a longitudinal direction includes: a conductive member extending in the longitudinal direction; and a pipe member which is provided at least at one end of the conductive member and which is made of platinum group elements or an alloy having the platinum group elements as main components.SELECTED DRAWING: Figure 2

Description

本発明は、コンタクトプローブに関する。 The present invention relates to a contact probe.

従来、半導体集積回路（パッケージ）や液晶パネルなどの検査対象の導通状態検査や動作特性検査を行う際には、検査対象と検査用信号を出力する信号処理装置との間の電気的な接続を図るために、接続端子であるコンタクトプローブを複数収容するプローブユニットが用いられる。プローブユニットとして、プリント配線基板の電気回路の電極および検査用信号を出力する回路基板の電極と両端部でそれぞれ接触することによって半導体集積回路と回路基板との間を電気的に接続するコンタクトプローブを有するプローブユニットが開示されている（例えば、特許文献１を参照）。 Conventionally, when performing a continuity state inspection or an operating characteristic inspection of an inspection target such as a semiconductor integrated circuit (package) or a liquid crystal panel, an electrical connection is made between the inspection target and a signal processing device that outputs an inspection signal. For this purpose, a probe unit that accommodates a plurality of contact probes that are connection terminals is used. As a probe unit, a contact probe that electrically connects the semiconductor integrated circuit and the circuit board by contacting the electrodes of the electric circuit of the printed wiring board and the electrodes of the circuit board that outputs the inspection signal at both ends. The probe unit having the probe unit is disclosed (see, for example, Patent Document 1).

特開平１０−２８２１４０号公報Japanese Unexamined Patent Publication No. 10-282140

ところで、上述したコンタクトプローブは、繰り返して検査に使用される。このため、コンタクトプローブの端部が摩耗によって擦り減ったり、基板側の電極のメッキや母材を削ったりすることによって接触抵抗が変化するおそれがあった。特許文献１が開示するコンタクトプローブは、端部に着脱可能なチップを設けて、このチップを交換することによって摩耗による電気特性の変化を抑制している。しかしながら、チップを交換する時期の特定の難しさや、その交換に係る労力に鑑みて、接触部分自体の耐久性を向上することが求められている。 By the way, the above-mentioned contact probe is repeatedly used for inspection. For this reason, there is a possibility that the end portion of the contact probe may be worn away due to wear, or the contact resistance may change due to plating of the electrode on the substrate side or scraping of the base material. The contact probe disclosed in Patent Document 1 is provided with a removable tip at the end, and by exchanging the tip, a change in electrical characteristics due to wear is suppressed. However, in view of the specific difficulty of replacing the chip and the labor involved in the replacement, it is required to improve the durability of the contact portion itself.

本発明は、上記に鑑みてなされたものであって、繰り返しの使用において安定した接触抵抗を維持することができるコンタクトプローブおよび信号伝送方法を提供することを目的とする。 The present invention has been made in view of the above, and an object of the present invention is to provide a contact probe and a signal transmission method capable of maintaining a stable contact resistance in repeated use.

上述した課題を解決し、目的を達成するために、本発明に係るコンタクトプローブは、長手方向の両端で互いに異なる電極とそれぞれ接触して信号を伝送するコンタクトプローブであって、前記長手方向に延びる導電性部材と、前記導電性部材の少なくとも一端に設けられ、白金族元素、または前記白金族元素を主成分とする合金からなるパイプ部材と、を備えることを特徴とする。 In order to solve the above-mentioned problems and achieve the object, the contact probe according to the present invention is a contact probe that transmits a signal by contacting different electrodes at both ends in the longitudinal direction and extends in the longitudinal direction. It is characterized by including a conductive member and a pipe member provided at at least one end of the conductive member and made of a platinum group element or an alloy containing the platinum group element as a main component.

また、本発明に係るコンタクトプローブは、上記の発明において、前記導電性部材は、前記長手方向の一端側に位置する第１プランジャと、前記長手方向の他端側に位置する第２プランジャと、一端で前記第１プランジャと接続するとともに、他端で前記第２プランジャと接続するコイルばねと、を有することを特徴とする。 Further, in the contact probe according to the present invention, in the above invention, the conductive member includes a first plunger located on one end side in the longitudinal direction and a second plunger located on the other end side in the longitudinal direction. It is characterized by having a coil spring connected to the first plunger at one end and a coil spring connected to the second plunger at the other end.

また、本発明に係るコンタクトプローブは、上記の発明において、前記パイプ部材は、単一の前記白金族元素からなることを特徴とする。 Further, the contact probe according to the present invention is characterized in that, in the above invention, the pipe member is composed of a single platinum group element.

また、本発明に係るコンタクトプローブは、上記の発明において、前記導電性部材は、前記長手方向と直交する方向に突出し、前記パイプ部材に圧接する突出部、を有することを特徴とする。 Further, the contact probe according to the present invention is characterized in that, in the above invention, the conductive member has a protruding portion that protrudes in a direction orthogonal to the longitudinal direction and presses against the pipe member.

また、本発明に係るコンタクトプローブは、上記の発明において、前記導電性部材は、前記パイプ部材が取り付けられる端部に設けられ、前記長手方向と直交する方向に対して垂直な平面部、を有することを特徴とする。 Further, in the above invention, the contact probe according to the present invention has the conductive member provided at the end portion to which the pipe member is attached, and has a flat surface portion perpendicular to the direction orthogonal to the longitudinal direction. It is characterized by that.

また、本発明に係るコンタクトプローブは、上記の発明において、前記導電性部材は、前記パイプ部材に圧入される先端部、を有し、前記パイプ部材は、前記先端部全体を覆う、ことを特徴とする。 Further, in the above invention, the contact probe according to the present invention is characterized in that the conductive member has a tip portion that is press-fitted into the pipe member, and the pipe member covers the entire tip portion. And.

また、本発明に係るコンタクトプローブは、上記の発明において、前記導電性部材は、前記パイプ部材に圧入される先端部、を有し、前記パイプ部材は、前記先端部の一部を覆う、ことを特徴とする。 Further, in the above invention, the contact probe according to the present invention has the conductive member having a tip portion to be press-fitted into the pipe member, and the pipe member covers a part of the tip portion. It is characterized by.

また、本発明に係るコンタクトプローブは、上記の発明において、前記導電性部材は、前記パイプ部材に圧入される先端部、を有し、前記パイプ部材の内周面には、前記先端部に係止する凸部が形成される、ことを特徴とする。 Further, in the contact probe according to the present invention, in the above invention, the conductive member has a tip portion that is press-fitted into the pipe member, and the inner peripheral surface of the pipe member is engaged with the tip portion. It is characterized in that a convex portion to be stopped is formed.

また、本発明に係るコンタクトプローブは、上記の発明において、前記先端部には、前記凸部と係止する凹部が形成される、ことを特徴とする。 Further, the contact probe according to the present invention is characterized in that, in the above invention, a concave portion that engages with the convex portion is formed at the tip portion.

また、本発明に係るコンタクトプローブは、上記の発明において、前記パイプ部材は、一方の端部側の開口を通過する平面と、他方の端部側の開口を通過する平面とが互いに平行な筒状をなす、ことを特徴とする。 Further, in the contact probe according to the present invention, in the above invention, the pipe member is a cylinder in which a plane passing through an opening on one end side and a plane passing through an opening on the other end side are parallel to each other. It is characterized by forming a shape.

また、本発明に係るコンタクトプローブは、上記の発明において、前記パイプ部材は、一方の端部の開口を通過する平面が、中心軸に対して傾斜している筒状をなす、ことを特徴とする。 Further, the contact probe according to the present invention is characterized in that, in the above invention, the pipe member has a tubular shape in which a plane passing through an opening at one end is inclined with respect to a central axis. do.

また、本発明に係るコンタクトプローブは、上記の発明において、前記パイプ部材は、一方の端部が扁平な形状をなす、ことを特徴とする。 Further, the contact probe according to the present invention is characterized in that, in the above invention, the pipe member has a flat shape at one end.

また、本発明に係るコンタクトプローブは、上記の発明において、前記パイプ部材は、前記扁平な形状をなす部分において、内周面同士が接触している、ことを特徴とする。 Further, the contact probe according to the present invention is characterized in that, in the above invention, the inner peripheral surfaces of the pipe member are in contact with each other in the flat portion.

また、本発明に係るコンタクトプローブは、上記の発明において、前記パイプ部材は、一方の端部が面取りされてなる曲面をなす、ことを特徴とする。 Further, the contact probe according to the present invention is characterized in that, in the above invention, the pipe member has a curved surface having one end chamfered.

また、本発明に係るコンタクトプローブは、上記の発明において、前記パイプ部材は、前記導電性部材に連なる側と反対側の端部に設けられ、先端に向かって縮径する縮径部を有することを特徴とする。 Further, in the above-mentioned invention, the contact probe according to the present invention has the pipe member provided at the end portion on the side opposite to the side connected to the conductive member and has a reduced diameter portion whose diameter is reduced toward the tip end. It is characterized by.

本発明によれば、繰り返しの使用において安定した接触抵抗を維持することができるという効果を奏する。 According to the present invention, there is an effect that stable contact resistance can be maintained in repeated use.

図１は、本発明の一実施の形態にかかるプローブユニットの構成を示す斜視図である。FIG. 1 is a perspective view showing a configuration of a probe unit according to an embodiment of the present invention. 図２は、本発明の一実施の形態にかかるプローブユニットの要部の構成を示す部分断面図である。FIG. 2 is a partial cross-sectional view showing the configuration of a main part of the probe unit according to the embodiment of the present invention. 図３は、半導体集積回路の検査時におけるプローブユニットの要部の構成を示す部分断面図である。FIG. 3 is a partial cross-sectional view showing the configuration of a main part of the probe unit at the time of inspection of a semiconductor integrated circuit. 図４は、本発明の実施の形態の変形例１にかかるプローブユニットにおける第１プランジャおよびパイプ部材の構成を示す部分断面図である。FIG. 4 is a partial cross-sectional view showing the configuration of the first plunger and the pipe member in the probe unit according to the first modification of the embodiment of the present invention. 図５は、本発明の実施の形態の変形例１におけるパイプ部材の構成を示す斜視図である。FIG. 5 is a perspective view showing the configuration of the pipe member in the first modification of the embodiment of the present invention. 図６は、本発明の実施の形態の変形例１における第１プランジャとパイプ部材との取り付け方法を説明する図（その１）である。FIG. 6 is a diagram (No. 1) for explaining a method of attaching the first plunger and the pipe member in the first modification of the embodiment of the present invention. 図７は、本発明の実施の形態の変形例１における第１プランジャとパイプ部材との取り付け方法を説明する図（その２）である。FIG. 7 is a diagram (No. 2) for explaining a method of attaching the first plunger and the pipe member in the first modification of the embodiment of the present invention. 図８は、本発明の実施の形態の変形例２にかかるプローブユニットにおける第１プランジャおよびパイプ部材の構成を示す部分断面図である。FIG. 8 is a partial cross-sectional view showing the configuration of the first plunger and the pipe member in the probe unit according to the second modification of the embodiment of the present invention. 図９は、本発明の実施の形態の変形例３における第１プランジャの先端部の構成を示す斜視図である。FIG. 9 is a perspective view showing the configuration of the tip end portion of the first plunger in the modified example 3 of the embodiment of the present invention. 図１０は、本発明の実施の形態の変形例４における第１プランジャの先端部の構成を示す斜視図である。FIG. 10 is a perspective view showing the configuration of the tip end portion of the first plunger in the modified example 4 of the embodiment of the present invention. 図１１は、本発明の実施の形態の変形例５における第１プランジャの先端部の構成を示す斜視図である。FIG. 11 is a perspective view showing the configuration of the tip end portion of the first plunger in the modified example 5 of the embodiment of the present invention. 図１２は、本発明の実施の形態の変形例６におけるパイプ部材の構成を示す斜視図である。FIG. 12 is a perspective view showing the configuration of the pipe member in the modified example 6 of the embodiment of the present invention. 図１３は、本発明の実施の形態の変形例７におけるパイプ部材の先端部の構成を示す断面図である。FIG. 13 is a cross-sectional view showing the configuration of the tip end portion of the pipe member in the modified example 7 of the embodiment of the present invention. 図１４は、本発明の実施の形態の変形例８におけるパイプ部材の構成を示す斜視図である。FIG. 14 is a perspective view showing the configuration of the pipe member in the modified example 8 of the embodiment of the present invention. 図１５は、本発明の実施の形態の変形例９におけるパイプ部材の構成を示す斜視図である。FIG. 15 is a perspective view showing the configuration of the pipe member in the modified example 9 of the embodiment of the present invention. 図１６は、本発明の実施の形態の変形例１０におけるパイプ部材の構成を示す斜視図である。FIG. 16 is a perspective view showing the configuration of the pipe member in the modified example 10 of the embodiment of the present invention. 図１７は、本発明の実施の形態の変形例１０にかかるパイプ部材の使用例を示す図であり、プローブユニットの要部の構成を示す断面図である。FIG. 17 is a diagram showing a usage example of the pipe member according to the modified example 10 of the embodiment of the present invention, and is a cross-sectional view showing the configuration of a main part of the probe unit. 図１８は、本発明の実施の形態の変形例１１におけるパイプ部材の構成を示す斜視図である。FIG. 18 is a perspective view showing the configuration of the pipe member in the modified example 11 of the embodiment of the present invention.

以下、本発明を実施するための形態を図面と共に詳細に説明する。なお、以下の実施の形態により本発明が限定されるものではない。また、以下の説明において参照する各図は、本発明の内容を理解でき得る程度に形状、大きさ、および位置関係を概略的に示してあるに過ぎず、従って、本発明は各図で例示された形状、大きさ、および位置関係のみに限定されるものではない。 Hereinafter, embodiments for carrying out the present invention will be described in detail together with drawings. The present invention is not limited to the following embodiments. In addition, each of the figures referred to in the following description merely schematically shows the shape, size, and positional relationship to the extent that the content of the present invention can be understood. Therefore, the present invention is illustrated in each figure. It is not limited to the shape, size, and positional relationship.

図１は、本発明の一実施の形態にかかるプローブユニットの構成を示す斜視図である。図１に示すプローブユニット１は、検査対象物である半導体集積回路１００の電気特性検査を行う際に使用する装置であって、半導体集積回路１００と半導体集積回路１００へ検査用信号を出力する回路基板２００との間を電気的に接続する装置である。 FIG. 1 is a perspective view showing a configuration of a probe unit according to an embodiment of the present invention. The probe unit 1 shown in FIG. 1 is a device used when inspecting the electrical characteristics of the semiconductor integrated circuit 100, which is an inspection target, and is a circuit that outputs an inspection signal to the semiconductor integrated circuit 100 and the semiconductor integrated circuit 100. It is a device that electrically connects to and from the substrate 200.

プローブユニット１は、長手方向の両端で互いに異なる二つの被接触体である半導体集積回路１００および回路基板２００に接触する導電性のコンタクトプローブ２（以下、単に「プローブ２」という）と、複数のプローブ２を所定のパターンにしたがって収容して保持するプローブホルダ３と、プローブホルダ３の周囲に設けられ、検査の際に複数のプローブ２と接触する半導体集積回路１００の位置ずれが生じるのを抑制するホルダ部材４と、を有する。 The probe unit 1 includes a plurality of conductive contact probes 2 (hereinafter, simply referred to as “probe 2”) that come into contact with the semiconductor integrated circuit 100 and the circuit board 200, which are two contact bodies that are different from each other at both ends in the longitudinal direction. The probe holder 3 that houses and holds the probe 2 according to a predetermined pattern and the semiconductor integrated circuit 100 that is provided around the probe holder 3 and comes into contact with the plurality of probes 2 are suppressed from being displaced. It has a holder member 4 and a holder member 4.

図２は、プローブホルダ３に収容されるプローブ２の詳細な構成を示す部分断面図である。図２に示すプローブ２は、導電性材料を用いて形成され、半導体集積回路１００の検査を行なうときにその半導体集積回路１００側に位置する第１プランジャ２１と、検査回路を備えた回路基板２００の電極に接触する第２プランジャ２２と、第１プランジャ２１と第２プランジャ２２との間に設けられて第１プランジャ２１および第２プランジャ２２を伸縮自在に連結するコイルばね２３と、第１プランジャ２１に設けられて半導体集積回路１００の電極に接触するパイプ部材２４とを備える。プローブ２を構成する第１プランジャ２１および第２プランジャ２２、コイルばね２３ならびにパイプ部材２４は同一の軸線を有している。すなわち、第１プランジャ２１および第２プランジャ２２、コイルばね２３ならびにパイプ部材２４は、各々の中心軸が、同一の直線上に位置している。プローブ２は、半導体集積回路１００をコンタクトさせた際に、コイルばね２３が軸線方向に伸縮することによって半導体集積回路１００の電極への衝撃を和らげるとともに、半導体集積回路１００および回路基板２００に荷重を加える。なお、本明細書において、「同一（同等）」とは製造上の誤差を含んでいる。 FIG. 2 is a partial cross-sectional view showing a detailed configuration of the probe 2 housed in the probe holder 3. The probe 2 shown in FIG. 2 is formed by using a conductive material, and has a first plunger 21 located on the semiconductor integrated circuit 100 side when inspecting the semiconductor integrated circuit 100, and a circuit board 200 provided with the inspection circuit. A coil spring 23 that is provided between the first plunger 21 and the second plunger 22 and that connects the first plunger 21 and the second plunger 22 so as to be expandable and contractible, and the first plunger. 21 is provided with a pipe member 24 that comes into contact with the electrodes of the semiconductor integrated circuit 100. The first plunger 21, the second plunger 22, the coil spring 23, and the pipe member 24 constituting the probe 2 have the same axis. That is, the central axes of the first plunger 21, the second plunger 22, the coil spring 23, and the pipe member 24 are located on the same straight line. When the semiconductor integrated circuit 100 is brought into contact with the probe 2, the coil spring 23 expands and contracts in the axial direction to soften the impact on the electrodes of the semiconductor integrated circuit 100 and to apply a load to the semiconductor integrated circuit 100 and the circuit board 200. Add. In addition, in this specification, "same (equivalent)" includes a manufacturing error.

第１プランジャ２１は、パイプ部材２４が取り付けられる先端部２１ａと、先端部２１ａの径と比して大きい径を有するフランジ部２１ｂと、フランジ部２１ｂを介して先端部２１ａと反対側に延び、フランジ部２１ｂと比して径が小さい、コイルばね２３の一端部が圧入されるボス部２１ｃと、ボス部２１ｃを介してフランジ部２１ｂと反対側に延び、ボス部２１ｃと比して径の小さい基端部２１ｄとを有する。第１プランジャ２１は、コイルばね２３の伸縮作用によって軸線方向に移動が可能であり、コイルばね２３の弾性力によって半導体集積回路１００方向に付勢される。 The first plunger 21 extends to the opposite side to the tip portion 21a via the tip portion 21a to which the pipe member 24 is attached, the flange portion 21b having a diameter larger than the diameter of the tip portion 21a, and the flange portion 21b. A boss portion 21c into which one end of the coil spring 23 is press-fitted, which has a smaller diameter than the flange portion 21b, extends to the opposite side of the flange portion 21b via the boss portion 21c, and has a diameter larger than that of the boss portion 21c. It has a small proximal end 21d. The first plunger 21 can move in the axial direction by the expansion and contraction action of the coil spring 23, and is urged in the direction of the semiconductor integrated circuit 100 by the elastic force of the coil spring 23.

第２プランジャ２２は、先細な先端形状をなし、回路基板２００の電極に接触する先端部２２ａと、先端部２２ａの径と比して大きい径を有するフランジ部２２ｂと、フランジ部２２ｂを介して先端部２２ａと反対側に延び、フランジ部２２ｂと比して径が小さい、コイルばね２３の他端部が圧入されるボス部２２ｃと、ボス部２２ｃを介してフランジ部２２ｂと反対側に延び、ボス部２２ｃと比して径の小さい基端部２２ｄとを有する。第２プランジャ２２は、コイルばね２３の伸縮作用によって軸線方向に移動が可能であり、コイルばね２３の弾性力によって回路基板２００方向に付勢され、回路基板２００の電極と接触する。 The second plunger 22 has a tapered tip shape, and is interposed via a tip portion 22a that contacts an electrode of the circuit board 200, a flange portion 22b having a diameter larger than the diameter of the tip portion 22a, and a flange portion 22b. A boss portion 22c that extends to the opposite side of the tip portion 22a and has a smaller diameter than the flange portion 22b, and the other end of the coil spring 23 is press-fitted, and extends to the opposite side of the flange portion 22b via the boss portion 22c. It has a base end portion 22d having a diameter smaller than that of the boss portion 22c. The second plunger 22 can move in the axial direction by the expansion and contraction action of the coil spring 23, is urged in the circuit board 200 direction by the elastic force of the coil spring 23, and comes into contact with the electrodes of the circuit board 200.

コイルばね２３は、一端が第１プランジャ２１のボス部２１ｃに取り付けられ、線材が密に巻回されてなる密着巻き部２３ａと、密着巻き部２３ａの他端から延び、所定の間隔をもって巻回されてボス部２２ｃに取り付けられる粗巻き部２３ｂとを有する。粗巻き部２３ｂは、プローブ２の最大収縮時に巻回の軸方向で隣り合う線材同士が接触しない程度の間隔で巻回されることが好ましい。コイルばね２３は、例えば、一本の導電性の線材を巻回してなる。 One end of the coil spring 23 is attached to the boss portion 21c of the first plunger 21, and the wire rod is wound tightly from the close contact winding portion 23a and the other end of the close contact winding portion 23a, and the coil spring 23 is wound at a predetermined interval. It has a coarse winding portion 23b that is attached to the boss portion 22c. The coarsely wound portion 23b is preferably wound at intervals such that adjacent wires do not come into contact with each other in the axial direction of winding when the probe 2 is maximally contracted. The coil spring 23 is formed by winding, for example, a single conductive wire rod.

密着巻き部２３ａの端部は、例えば第１プランジャ２１のボス部２１ｃにバネの巻き付き力および／または半田付けによって接合されて、フランジ部２１ｂに当接している。一方、粗巻き部２３ｂの端部は、フランジ部２２ｂに当接している。第２プランジャ２２とコイルばね２３とにおいても、バネの巻き付き力および／または半田付けによって接合されていてもよい。プローブ２は、粗巻き部２３ｂの伸縮によって、軸線方向に伸縮する。 The end portion of the close contact winding portion 23a is joined to the boss portion 21c of the first plunger 21 by a spring winding force and / or soldering, and is in contact with the flange portion 21b. On the other hand, the end portion of the rough winding portion 23b is in contact with the flange portion 22b. The second plunger 22 and the coil spring 23 may also be joined by a spring winding force and / or soldering. The probe 2 expands and contracts in the axial direction due to the expansion and contraction of the coarse winding portion 23b.

パイプ部材２４は、一端側の開口を通過する平面と、他端側の開口を通過する平面とが互いに平行な筒状をなす。パイプ部材２４は、外周のなす径がフランジ部２１ｂの径より小さい。パイプ部材２４は、例えば第１プランジャ２１の先端部２１ａに圧入して取り付けられる。このほか、パイプ部材２４は、半田付けや、ろう付け、溶接等の公知の接合によって先端部２１ａに取り付けられてもよい。 The pipe member 24 has a tubular shape in which a plane passing through the opening on one end side and a plane passing through the opening on the other end side are parallel to each other. The diameter formed by the outer circumference of the pipe member 24 is smaller than the diameter of the flange portion 21b. The pipe member 24 is attached by press-fitting it into, for example, the tip portion 21a of the first plunger 21. In addition, the pipe member 24 may be attached to the tip portion 21a by a known joining such as soldering, brazing, or welding.

パイプ部材２４は、白金族元素によって構成される導電性材料を用いて形成される。パイプ部材２４を構成する材料としては、白金族金属や、白金族金属を主成分とする合金が挙げられる。ここでいう主成分とは、合金を構成する元素のうち、最も含有率が高い成分をさす。合金は、異なる複数の白金族元素からなる合金であることが好ましい。なお、本明細書における白金族元素とは、周期表における第５周期および第６周期の第８族、第９族、第１０族の元素、すなわちルテニウム、ロジウム、パラジウム、オスミウム、イリジウム、白金を含む。パイプ部材２４は、単一の白金族元素によって形成されることが好ましい。 The pipe member 24 is formed by using a conductive material composed of platinum group elements. Examples of the material constituting the pipe member 24 include a platinum group metal and an alloy containing a platinum group metal as a main component. The main component here refers to the component having the highest content among the elements constituting the alloy. The alloy is preferably an alloy composed of a plurality of different platinum group elements. The platinum group elements in the present specification refer to the elements of the 8th, 9th, and 10th groups of the 5th and 6th periods in the periodic table, that is, ruthenium, rhodium, palladium, osmium, iridium, and platinum. include. The pipe member 24 is preferably formed of a single platinum group element.

一方、第１プランジャ２１、第２プランジャ２２およびコイルばね２３は、導電性材料を用いて形成される。導電性材料としては、ベリリウム銅等が挙げられる。第１プランジャ２１、第２プランジャ２２およびコイルばね２３を形成する導電性材料は、パイプ部材２４を形成する導電性材料（白金族元素）よりも硬度および耐酸化性が低い。 On the other hand, the first plunger 21, the second plunger 22 and the coil spring 23 are formed by using a conductive material. Examples of the conductive material include beryllium copper and the like. The conductive material forming the first plunger 21, the second plunger 22 and the coil spring 23 has lower hardness and oxidation resistance than the conductive material (platinum group element) forming the pipe member 24.

プローブホルダ３は、樹脂、マシナブルセラミック、シリコンなどの絶縁性材料を用いて形成され、図２の上面側に位置する第１部材３１と下面側に位置する第２部材３２とが積層されてなる。第１部材３１および第２部材３２には、複数のプローブ２を収容するためのホルダ孔３３および３４がそれぞれ同数ずつ形成され、プローブ２を収容するホルダ孔３３および３４は、互いの軸線が一致するように形成されている。ホルダ孔３３および３４の形成位置は、半導体集積回路１００の配線パターンに応じて定められる。 The probe holder 3 is formed by using an insulating material such as resin, machinable ceramic, or silicon, and the first member 31 located on the upper surface side and the second member 32 located on the lower surface side of FIG. 2 are laminated. Become. The first member 31 and the second member 32 are formed with the same number of holder holes 33 and 34 for accommodating a plurality of probes 2, respectively, and the holder holes 33 and 34 accommodating the probes 2 have axes aligned with each other. It is formed to do. The formation positions of the holder holes 33 and 34 are determined according to the wiring pattern of the semiconductor integrated circuit 100.

ホルダ孔３３および３４は、ともに貫通方向に沿って径が異なる段付き孔形状をなしている。すなわち、ホルダ孔３３は、プローブホルダ３の上端面に開口を有する小径部３３ａと、この小径部３３ａよりも径が大きい大径部３３ｂとからなる。他方、ホルダ孔３４は、プローブホルダ３の下端面に開口を有する小径部３４ａと、この小径部３４ａよりも径が大きい大径部３４ｂとからなる。これらのホルダ孔３３および３４の形状は、収容するプローブ２の構成に応じて定められる。第１プランジャ２１のフランジ部２１ｂは、ホルダ孔３３の小径部３３ａと大径部３３ｂとの境界壁面に当接することにより、プローブ２のプローブホルダ３からの抜止機能を有する。また、第２プランジャ２２のフランジ部２２ｂは、ホルダ孔３４の小径部３４ａと大径部３４ｂとの境界壁面に当接することにより、プローブ２のプローブホルダ３からの抜止機能を有する。 Both the holder holes 33 and 34 have a stepped hole shape having different diameters along the penetrating direction. That is, the holder hole 33 is composed of a small diameter portion 33a having an opening on the upper end surface of the probe holder 3 and a large diameter portion 33b having a diameter larger than that of the small diameter portion 33a. On the other hand, the holder hole 34 is composed of a small diameter portion 34a having an opening on the lower end surface of the probe holder 3 and a large diameter portion 34b having a diameter larger than that of the small diameter portion 34a. The shapes of the holder holes 33 and 34 are determined according to the configuration of the probe 2 to be accommodated. The flange portion 21b of the first plunger 21 has a function of retaining the probe 2 from the probe holder 3 by contacting the boundary wall surface between the small diameter portion 33a and the large diameter portion 33b of the holder hole 33. Further, the flange portion 22b of the second plunger 22 has a function of retaining the probe 2 from the probe holder 3 by contacting the boundary wall surface between the small diameter portion 34a and the large diameter portion 34b of the holder hole 34.

図３は、プローブホルダ３を用いた半導体集積回路１００の検査時の状態を示す図である。半導体集積回路１００の検査時には、半導体集積回路１００からの接触荷重により、コイルばね２３は長手方向に沿って圧縮された状態となる。コイルばね２３が圧縮されると、粗巻き部２３ｂのピッチが小さくなる。この際には、密着巻き部２３ａが基端部２２ｄと接触するため、第１プランジャ２１の軸線に対して第２プランジャ２２の軸線が大きくぶれることはない。 FIG. 3 is a diagram showing a state at the time of inspection of the semiconductor integrated circuit 100 using the probe holder 3. At the time of inspection of the semiconductor integrated circuit 100, the coil spring 23 is in a compressed state along the longitudinal direction due to the contact load from the semiconductor integrated circuit 100. When the coil spring 23 is compressed, the pitch of the coarse winding portion 23b becomes smaller. At this time, since the close contact winding portion 23a comes into contact with the base end portion 22d, the axis of the second plunger 22 does not deviate significantly from the axis of the first plunger 21.

検査時に回路基板２００から半導体集積回路１００に供給される検査用信号は、回路基板２００の電極２０１からプローブ２の第２プランジャ２２、コイルばね２３、第１プランジャ２１、パイプ部材２４を経由して半導体集積回路１００の電極１０１へ到達する。 The inspection signal supplied from the circuit board 200 to the semiconductor integrated circuit 100 at the time of inspection passes from the electrode 201 of the circuit board 200 via the second plunger 22 of the probe 2, the coil spring 23, the first plunger 21, and the pipe member 24. It reaches the electrode 101 of the semiconductor integrated circuit 100.

以上説明した実施の形態では、白金族元素によって構成されるパイプ部材２４を第１プランジャ２１に取り付けて、このパイプ部材２４によって半導体集積回路１００の電極１０１に接触させて電気的な導通をはかるようにした。本実施の形態によれば、繰り返しの使用において安定した接触抵抗を維持することができる。 In the embodiment described above, the pipe member 24 composed of the platinum group element is attached to the first plunger 21 and brought into contact with the electrode 101 of the semiconductor integrated circuit 100 by the pipe member 24 to achieve electrical conduction. I made it. According to this embodiment, stable contact resistance can be maintained in repeated use.

（変形例１）
図４は、本発明の実施の形態の変形例１にかかるプローブユニットにおける第１プランジャおよびパイプ部材の構成を示す部分断面図である。変形例１は、第１プランジャの先端と、パイプ部材との構成を変えた以外は、上述した実施の形態の構成と同じである。上述した実施の形態と同じ構成には、同じ符号を付す。 (Modification example 1)
FIG. 4 is a partial cross-sectional view showing the configuration of the first plunger and the pipe member in the probe unit according to the first modification of the embodiment of the present invention. Modification 1 is the same as the configuration of the above-described embodiment except that the configuration of the tip of the first plunger and the pipe member is changed. The same components as those in the above-described embodiment are designated by the same reference numerals.

変形例１にかかるプローブは、導電性材料を用いて形成され、半導体集積回路１００の検査を行なうときにその半導体集積回路１００側に位置する第１プランジャ２１Ａと、回路基板２００の電極に接触する第２プランジャ２２と、第１プランジャ２１Ａと第２プランジャ２２との間に設けられて第１プランジャ２１Ａおよび第２プランジャ２２を伸縮自在に連結するコイルばね２３と、第１プランジャ２１Ａに設けられて半導体集積回路１００の電極に接触するパイプ部材２４Ａとを備える。 The probe according to the first modification is formed by using a conductive material, and comes into contact with the first plunger 21A located on the semiconductor integrated circuit 100 side and the electrode of the circuit board 200 when the semiconductor integrated circuit 100 is inspected. A coil spring 23 provided between the second plunger 22 and the first plunger 21A and the second plunger 22 to flexibly connect the first plunger 21A and the second plunger 22 and provided on the first plunger 21A. It includes a pipe member 24A that contacts the electrodes of the semiconductor integrated circuit 100.

先端部２１ａには、第１プランジャ２１Ａの長手方向を中心軸として外表面を周回して設けられる凹部２１ｅが形成される。 The tip portion 21a is formed with a recess 21e provided around the outer surface with the longitudinal direction of the first plunger 21A as the central axis.

パイプ部材２４Ａは、半導体集積回路１００の電極に接触する。パイプ部材２４Ａは、外周のなす径がフランジ部２１ｂの径より小さい。パイプ部材２４Ａは、上述した白金族元素を用いて形成される。 The pipe member 24A comes into contact with the electrodes of the semiconductor integrated circuit 100. The diameter formed by the outer circumference of the pipe member 24A is smaller than the diameter of the flange portion 21b. The pipe member 24A is formed by using the above-mentioned platinum group elements.

図５は、本発明の実施の形態の変形例１におけるパイプ部材の構成を示す斜視図である。パイプ部材２４Ａには、パイプ部材２４Ａの中心軸のまわりに内周面を周回して設けられる凸部２４ａが形成される。パイプ部材２４Ａは、凸部２４ａが、先端部２１ａの凹部２１ｅに係止して固定される。 FIG. 5 is a perspective view showing the configuration of the pipe member in the first modification of the embodiment of the present invention. The pipe member 24A is formed with a convex portion 24a provided around the central axis of the pipe member 24A so as to orbit the inner peripheral surface. In the pipe member 24A, the convex portion 24a is locked and fixed to the concave portion 21e of the tip portion 21a.

図６および図７は、本発明の実施の形態の変形例１における第１プランジャとパイプ部材との取り付け方法を説明する図である。まず、先端部２１ａに、パイプ部材２４Ａの母材２４１を被せる（図６参照）。ここで、母材２４１は、凸部２４ａが形成されていない、筒状の部材である。また、先端部２１ａには、予め凹部２１ｅが形成されている。 6 and 7 are views for explaining a method of attaching the first plunger and the pipe member in the first modification of the embodiment of the present invention. First, the tip portion 21a is covered with the base material 241 of the pipe member 24A (see FIG. 6). Here, the base material 241 is a tubular member on which the convex portion 24a is not formed. Further, a recess 21e is formed in advance in the tip portion 21a.

母材２４１を先端部２１ａに被せた後、凹部２１ｅの形成位置に合わせて、凸部２４ａを形成する。これにより、第１プランジャ２１Ａにパイプ部材２４Ａが係止する（図７参照）。なお、母材２４１の内周の径は、例えば先端部の外周の径以上である。 After covering the tip portion 21a with the base material 241, the convex portion 24a is formed in accordance with the formation position of the concave portion 21e. As a result, the pipe member 24A is locked to the first plunger 21A (see FIG. 7). The diameter of the inner circumference of the base material 241 is, for example, equal to or larger than the diameter of the outer circumference of the tip portion.

以上説明した変形例１は、上述した実施の形態の効果を得るとともに、先端部２１ａおよびパイプ部材２４Ａにそれぞれ凹部２１ｅ、凸部２４ａを形成することによって、パイプ部材２４Ａの先端部２１ａに対する固定状態を一層安定化することができる。 In the modified example 1 described above, the effect of the above-described embodiment is obtained, and the pipe member 24A is fixed to the tip portion 21a by forming the concave portion 21e and the convex portion 24a in the tip portion 21a and the pipe member 24A, respectively. Can be further stabilized.

なお、変形例１において、第１プランジャ２１Ａとパイプ部材２４Ａとの係止状態は、中心軸のまわりに回転しない状態としてもよいし、中心軸のまわりに回転可能な状態としてもよい。また、パイプ部材２４Ａに第１プランジャ２１Ａの先端部を圧入した後、凸部２４ａを形成するようにしてもよい。 In the first modification, the locked state of the first plunger 21A and the pipe member 24A may be a state in which the first plunger 21A and the pipe member 24A do not rotate around the central axis, or a state in which the first plunger 21A and the pipe member 24A can rotate around the central axis. Further, the convex portion 24a may be formed after the tip end portion of the first plunger 21A is press-fitted into the pipe member 24A.

また、変形例１では、凸部２４ａがパイプ部材２４Ａの中心軸のまわりに連続的に周回して設けられる構成を説明したが、パイプ部材２４Ａの内周面の一部に複数の凸部を設ける構成としてもよい。 Further, in the first modification, the configuration in which the convex portion 24a is provided by continuously orbiting around the central axis of the pipe member 24A has been described, but a plurality of convex portions are provided on a part of the inner peripheral surface of the pipe member 24A. It may be provided.

また、変形例１に係る凹部２１ｅを先端部２１ａにおけるフランジ部２１ｂ側の基端に設け、パイプ部材２４Ａに、フランジ部２１ｂ側に位置する側の端部を内部側に屈曲して、パイプ部材２４Ａと、先端部２１ａの凹部２１ｅとを係止して固定する構成としてもよい。 Further, the recess 21e according to the first modification is provided at the base end of the tip portion 21a on the flange portion 21b side, and the end portion of the pipe member 24A on the side located on the flange portion 21b side is bent inward to form the pipe member. The 24A and the recess 21e of the tip portion 21a may be locked and fixed.

（変形例２）
図８は、本発明の実施の形態の変形例２にかかるプローブユニットにおける第１プランジャおよびパイプ部材の構成を示す部分断面図である。変形例２は、第１プランジャの構成と、第１プランジャに対するパイプ部材の取り付け態様を変えた以外は、上述した実施の形態の構成と同じである。上述した実施の形態と同じ構成には、同じ符号を付す。 (Modification 2)
FIG. 8 is a partial cross-sectional view showing the configuration of the first plunger and the pipe member in the probe unit according to the second modification of the embodiment of the present invention. The second modification is the same as the configuration of the above-described embodiment except that the configuration of the first plunger and the mounting mode of the pipe member to the first plunger are changed. The same components as those in the above-described embodiment are designated by the same reference numerals.

変形例２にかかるプローブは、導電性材料を用いて形成され、半導体集積回路１００の検査を行なうときにその半導体集積回路１００側に位置する第１プランジャ２１Ｂと、回路基板２００の電極に接触する第２プランジャ２２と、第１プランジャ２１Ｂと第２プランジャ２２との間に設けられて第１プランジャ２１Ｂおよび第２プランジャ２２を伸縮自在に連結するコイルばね２３と、第１プランジャ２１Ｂに設けられて半導体集積回路１００の電極に接触するパイプ部材２４とを備える。 The probe according to the second modification is formed by using a conductive material, and comes into contact with the first plunger 21B located on the semiconductor integrated circuit 100 side and the electrode of the circuit board 200 when the semiconductor integrated circuit 100 is inspected. A coil spring 23 provided between the second plunger 22 and the first plunger 21B and the second plunger 22 to flexibly connect the first plunger 21B and the second plunger 22 and provided on the first plunger 21B. A pipe member 24 that comes into contact with the electrodes of the semiconductor integrated circuit 100 is provided.

第１プランジャ２１Ｂは、パイプ部材２４が取り付けられる先端部２１ｆと、先端部２１ｆの径と比して大きい径を有するフランジ部２１ｂと、ボス部２１ｃおよび基端部２１ｄとを有する。 The first plunger 21B has a tip portion 21f to which the pipe member 24 is attached, a flange portion 21b having a diameter larger than the diameter of the tip portion 21f, a boss portion 21c, and a base end portion 21d.

先端部２１ｆには、フランジ部２１ｂに連なる側と反対側（先端）に、パイプ部材２４の内周の径と同等の径の柱状をなして延びる凸部２１ｇが形成される。凸部２１ｇは、パイプ部材２４に圧入する。これにより、パイプ部材２４は、先端部２１ｆに立設される。 The tip portion 21f is formed with a convex portion 21g extending in a columnar shape having a diameter equivalent to the diameter of the inner circumference of the pipe member 24 on the side opposite to the side connected to the flange portion 21b (tip). The convex portion 21 g is press-fitted into the pipe member 24. As a result, the pipe member 24 is erected at the tip portion 21f.

以上説明した変形例２によれば、第１プランジャがパイプ部材の一部に圧入して、パイプ部材を第１プランジャに固定する場合であっても、上述した実施の形態の効果を得ることができる。 According to the second modification described above, even when the first plunger is press-fitted into a part of the pipe member to fix the pipe member to the first plunger, the effect of the above-described embodiment can be obtained. can.

また、変形例２によれば、先端部２１ｆに形成される凸部２１ｇにパイプ部材２４を取り付ける構成とすることによって、上述した実施の形態と比して、パイプ部材の中心軸方向（長手方向）の長さを短くできる。 Further, according to the second modification, by attaching the pipe member 24 to the convex portion 21g formed on the tip portion 21f, the central axial direction (longitudinal direction) of the pipe member is compared with the above-described embodiment. ) Can be shortened.

また、変形例２によれば、先端部２１ｆにおいて、凸部２１ｇ以外の部分の外周の径をパイプ部材２４の外周の径よりも大きくすることによって、コンタクトプローブがプローブホルダ３内で摺動（伸縮）する際に、パイプ部材がプローブホルダ３に接触することを抑制し、その結果、パイプ部材とプローブホルダとの間の摩擦によるパイプ部材の離脱を防止できる。 Further, according to the second modification, the contact probe slides in the probe holder 3 by making the diameter of the outer circumference of the portion other than the convex portion 21g larger than the diameter of the outer circumference of the pipe member 24 at the tip portion 21f. It is possible to prevent the pipe member from coming into contact with the probe holder 3 during expansion and contraction), and as a result, prevent the pipe member from coming off due to friction between the pipe member and the probe holder.

（変形例３）
図９は、本発明の実施の形態の変形例３における第１プランジャの先端部の構成を示す斜視図である。変形例３は、第１プランジャの先端の構成を変えた以外は、上述した実施の形態の構成と同じである。上述した実施の形態と同じ構成には、同じ符号を付す。 (Modification example 3)
FIG. 9 is a perspective view showing the configuration of the tip end portion of the first plunger in the modified example 3 of the embodiment of the present invention. Modification 3 is the same as the configuration of the above-described embodiment except that the configuration of the tip of the first plunger is changed. The same components as those in the above-described embodiment are designated by the same reference numerals.

変形例３にかかる第１プランジャの先端部２１ｈは、第１プランジャの長手方向を中心軸として外表面を周回して突出してなる突出部２１ｉを有する。先端部２１ｈは、突出部２１ｉ以外の部分の径が、パイプ部材２４の内周の径よりも小さい。一方で、突出部２１ｉは、外周のなす径のうちの最大が、パイプ部材２４の内周の径と同等かそれ以上である。パイプ部材２４は、先端部２１ｈが圧入されて取り付けられる。この際、パイプ部材２４には、突出部２１ｉが内壁に圧接する。 The tip portion 21h of the first plunger according to the third modification has a protruding portion 21i that protrudes around the outer surface with the longitudinal direction of the first plunger as the central axis. The diameter of the tip portion 21h other than the protruding portion 21i is smaller than the diameter of the inner circumference of the pipe member 24. On the other hand, the maximum diameter formed by the outer circumference of the protruding portion 21i is equal to or larger than the diameter of the inner circumference of the pipe member 24. The pipe member 24 is attached by press-fitting the tip portion 21h. At this time, the protruding portion 21i is pressed against the inner wall of the pipe member 24.

以上説明した変形例３は、上述した実施の形態の効果を得るとともに、先端部２１ｈに形成される突出部２１ｉがパイプ部材２４に圧入することによって、パイプ部材２４の先端部２１ｈに対する固定状態を一層安定化することができる。 In the modified example 3 described above, the effect of the above-described embodiment is obtained, and the protruding portion 21i formed on the tip portion 21h is press-fitted into the pipe member 24 to fix the pipe member 24 to the tip portion 21h. It can be further stabilized.

なお、上述した変形例３では、突出部２１ｉが、第１プランジャの長手方向に一つ設けられている構成について説明したが、突出部２１ｉを長手方向に複数設けた構成としてもよい。 In the above-described third modification, the configuration in which one protrusion 21i is provided in the longitudinal direction of the first plunger has been described, but a configuration in which a plurality of protrusions 21i are provided in the longitudinal direction may be provided.

（変形例４）
図１０は、本発明の実施の形態の変形例４における第１プランジャの先端部の構成を示す斜視図である。変形例４は、第１プランジャの先端の構成を変えた以外は、上述した実施の形態の構成と同じである。上述した実施の形態と同じ構成には、同じ符号を付す。 (Modification example 4)
FIG. 10 is a perspective view showing the configuration of the tip end portion of the first plunger in the modified example 4 of the embodiment of the present invention. Modification 4 is the same as the configuration of the above-described embodiment except that the configuration of the tip of the first plunger is changed. The same components as those in the above-described embodiment are designated by the same reference numerals.

変形例４にかかる第１プランジャの先端部２１ｊは、フランジ部２１ｂ側と反対側の先端に設けられる先細な縮径部２１ｋを有する。パイプ部材２４は、縮径部２１ｋによって先端部２１ｊを挿入する際に、パイプ部材２４に対して先端部２１ｊを案内する。 The tip portion 21j of the first plunger according to the modified example 4 has a tapered diameter-reduced portion 21k provided at the tip opposite to the flange portion 21b side. The pipe member 24 guides the tip portion 21j with respect to the pipe member 24 when the tip portion 21j is inserted by the diameter reduction portion 21k.

以上説明した変形例４は、上述した実施の形態の効果を得るとともに、先端部２１ｊに形成される縮径部２１ｋによってパイプ部材２４への挿入を容易に行うことができる。 The modified example 4 described above can obtain the effect of the above-described embodiment and can be easily inserted into the pipe member 24 by the reduced diameter portion 21k formed at the tip portion 21j.

なお、上述した変形例３、４を組み合わせて、一つまたは複数の突出部を有し、先端が縮径した先端部としてもよい。 It should be noted that the above-described modifications 3 and 4 may be combined to form a tip portion having one or a plurality of protruding portions and having a reduced tip diameter.

（変形例５）
図１１は、本発明の実施の形態の変形例５における第１プランジャの先端部の構成を示す斜視図である。変形例５は、第１プランジャの先端の構成を変えた以外は、上述した実施の形態の構成と同じである。上述した実施の形態と同じ構成には、同じ符号を付す。 (Modification 5)
FIG. 11 is a perspective view showing the configuration of the tip end portion of the first plunger in the modified example 5 of the embodiment of the present invention. Modification 5 is the same as the configuration of the above-described embodiment except that the configuration of the tip of the first plunger is changed. The same components as those in the above-described embodiment are designated by the same reference numerals.

変形例５にかかる第１プランジャの先端部２１ｌは、円柱状の側面部の一部を切り欠いてなる平面部２１ｍを有する。平面部２１ｍは、プローブの長手方向と直交する方向に対して垂直な平面をなす。なお、平面部２１ｍと反対側に、該平面部２１ｍの表面と平行な表面を有する平面部を設けてもよい。 The tip portion 21l of the first plunger according to the modified example 5 has a flat surface portion 21m formed by cutting out a part of a columnar side surface portion. The flat surface portion 21m forms a flat surface perpendicular to the direction orthogonal to the longitudinal direction of the probe. A flat surface portion having a surface parallel to the surface of the flat surface portion 21 m may be provided on the opposite side of the flat surface portion 21 m.

以上説明した変形例５は、上述した実施の形態の効果を得るとともに、パイプ部材２４に対して先端部２１ｌを容易に挿入でき、かつ、先端部２１ｌとパイプ部材２４との径管理を簡易化することができる。 In the modified example 5 described above, the effect of the above-described embodiment can be obtained, the tip portion 21l can be easily inserted into the pipe member 24, and the diameter management between the tip portion 21l and the pipe member 24 is simplified. can do.

なお、上述した変形例５のほか、先端部は、第１プランジャの長手方向に沿って切り込まれてなるスリットを形成した構成としてもよい。また、パイプ部材の一部に、パイプ部材の中心軸方向に延びるスリットを形成してもよい。先端部およびパイプ部材のいずれか一方にスリットを形成することによって、変形例５と同様の効果を得ることができる。 In addition to the above-mentioned modification 5, the tip portion may have a structure in which a slit formed by being cut along the longitudinal direction of the first plunger is formed. Further, a slit extending in the central axis direction of the pipe member may be formed in a part of the pipe member. By forming a slit in either the tip portion or the pipe member, the same effect as in the modified example 5 can be obtained.

（変形例６）
図１２は、本発明の実施の形態の変形例６におけるパイプ部材の構成を示す斜視図である。変形例６は、パイプ部材の構成を変えた以外は、上述した実施の形態の構成と同じである。上述した実施の形態と同じ構成には、同じ符号を付す。 (Modification 6)
FIG. 12 is a perspective view showing the configuration of the pipe member in the modified example 6 of the embodiment of the present invention. Modification 6 is the same as the configuration of the above-described embodiment except that the configuration of the pipe member is changed. The same components as those in the above-described embodiment are designated by the same reference numerals.

変形例６にかかるパイプ部材２４Ｂは、先端部２１ａが挿入される側と反対側の端部が、先端に向かって縮径する縮径部２４ｂを有する。 The pipe member 24B according to the modified example 6 has a diameter-reduced portion 24b whose end portion on the side opposite to the side into which the tip portion 21a is inserted has a diameter reduced toward the tip.

以上説明した変形例６は、上述した実施の形態の効果を得るとともに、パイプ部材２４Ｂに形成される縮径部２４ｂによって、電極が小さい場合であっても、確実に接触することができる。 In the modified example 6 described above, the effects of the above-described embodiment can be obtained, and the reduced diameter portion 24b formed on the pipe member 24B enables reliable contact even when the electrodes are small.

また、パイプ部材は、以上説明した変形例６に係る縮径部２４ｂのほか、先端に向かって拡径する拡径部を有する構成としてもよいし、複数の爪部を有するクラウン状をなす構成としてもよい。 Further, the pipe member may have a diameter-expanded portion that expands toward the tip in addition to the diameter-reduced portion 24b according to the modified example 6 described above, or may have a crown-like configuration having a plurality of claw portions. May be.

（変形例７）
図１３は、本発明の実施の形態の変形例７におけるパイプ部材の先端部の構成を示す断面図である。変形例７は、パイプ部材の構成を変えた以外は、上述した実施の形態の構成と同じである。上述した実施の形態と同じ構成には、同じ符号を付す。 (Modification 7)
FIG. 13 is a cross-sectional view showing the configuration of the tip end portion of the pipe member in the modified example 7 of the embodiment of the present invention. The modified example 7 is the same as the configuration of the above-described embodiment except that the configuration of the pipe member is changed. The same components as those in the above-described embodiment are designated by the same reference numerals.

変形例７にかかるパイプ部材２４Ｃは、先端部２１ａが挿入される側と反対側の端部が、面取りされて曲面をなす端部２４ｃを有する。端部２４ｃは、外表面側の端面、および内周面側の端部ともに面取りされてなる。 The pipe member 24C according to the modified example 7 has an end portion 24c whose end portion on the side opposite to the side into which the tip end portion 21a is inserted is chamfered to form a curved surface. The end portion 24c is chamfered both on the outer surface side and the inner peripheral surface side.

以上説明した変形例７は、上述した実施の形態の効果を得るとともに、パイプ部材２４Ｃに形成される端部２４ｃによって、接触対象の電極の損傷を抑制することができる。 In the modified example 7 described above, the effects of the above-described embodiment can be obtained, and the end portion 24c formed on the pipe member 24C can suppress damage to the electrode to be contacted.

（変形例８）
図１４は、本発明の実施の形態の変形例８におけるパイプ部材の構成を示す斜視図である。変形例８は、パイプ部材の構成を変えた以外は、上述した実施の形態の構成と同じである。上述した実施の形態と同じ構成には、同じ符号を付す。 (Modification 8)
FIG. 14 is a perspective view showing the configuration of the pipe member in the modified example 8 of the embodiment of the present invention. The modified example 8 is the same as the configuration of the above-described embodiment except that the configuration of the pipe member is changed. The same components as those in the above-described embodiment are designated by the same reference numerals.

変形例８にかかるパイプ部材２４Ｄは、先端部２１ａが挿入される側と反対側の端部が、潰し加工によって形成される扁平部２４ｄを有する。扁平部２４ｄの端面（上面）は、弧状または直線状をなして対向する外縁を有する平面をなす。扁平部２４ｄにおける内周面同士は、少なくとも一部が接触している。 The pipe member 24D according to the modified example 8 has a flat portion 24d whose end portion on the side opposite to the side into which the tip portion 21a is inserted is formed by crushing. The end surface (upper surface) of the flat portion 24d forms a flat surface having an arcuate or linear shape and facing outer edges. At least a part of the inner peripheral surfaces of the flat portion 24d is in contact with each other.

以上説明した変形例８によれば、パイプ部材２４Ｄが扁平部２４ｄを有する場合であっても、上述した実施の形態の効果を得ることができる。また、変形例８によれば、パイプ部材２４Ｄの先端が扁平な形状をなすため、電極が小さい場合であっても、確実に接触することができる。 According to the modification 8 described above, even when the pipe member 24D has the flat portion 24d, the effect of the above-described embodiment can be obtained. Further, according to the modified example 8, since the tip of the pipe member 24D has a flat shape, even if the electrodes are small, they can be reliably contacted.

また、変形例８によれば、潰し加工によって先端において、加圧方向と直交する方向が長くなるため、その先端における長手方向の向きを調整することによって、潰し加工を施していないパイプ部材と比して、電極との接触可能範囲を広くすることができる。 Further, according to the modified example 8, since the direction orthogonal to the pressurizing direction becomes longer at the tip due to the crushing process, the direction in the longitudinal direction at the tip is adjusted to be compared with the pipe member not subjected to the crushing process. Therefore, the contactable range with the electrode can be widened.

（変形例９）
図１５は、本発明の実施の形態の変形例９におけるパイプ部材の構成を示す斜視図である。変形例９は、パイプ部材の構成を変えた以外は、上述した実施の形態の構成と同じである。上述した実施の形態と同じ構成には、同じ符号を付す。 (Modification 9)
FIG. 15 is a perspective view showing the configuration of the pipe member in the modified example 9 of the embodiment of the present invention. Modification 9 is the same as the configuration of the above-described embodiment except that the configuration of the pipe member is changed. The same components as those in the above-described embodiment are designated by the same reference numerals.

変形例９にかかるパイプ部材２４Ｅは、先端部２１ａが挿入される側と反対側の端部が、潰し加工によって形成される中空扁平部２４ｅを有する。中空扁平部２４ｅの端面（上面）は、弧状または直線状をなして対向する外縁を有し、かつ楕円状の開口が形成された環状をなす。 The pipe member 24E according to the modified example 9 has a hollow flat portion 24e whose end portion on the side opposite to the side into which the tip portion 21a is inserted is formed by crushing. The end surface (upper surface) of the hollow flat portion 24e has an arcuate or linear shape with opposite outer edges, and forms an annular shape in which an elliptical opening is formed.

以上説明した変形例９によれば、パイプ部材２４Ｅが中空扁平部２４ｅを有する場合であっても、上述した実施の形態の効果を得ることができる。また、変形例９によれば、パイプ部材２４Ｅの先端が扁平な形状をなすため、電極が小さい場合であっても、確実に接触することができる。 According to the modification 9 described above, even when the pipe member 24E has the hollow flat portion 24e, the effect of the above-described embodiment can be obtained. Further, according to the modified example 9, since the tip of the pipe member 24E has a flat shape, even if the electrode is small, it can be reliably contacted.

（変形例１０）
図１６は、本発明の実施の形態の変形例１０におけるパイプ部材の構成を示す斜視図である。変形例１０は、パイプ部材の構成を変えた以外は、上述した実施の形態の構成と同じである。上述した実施の形態と同じ構成には、同じ符号を付す。 (Modification example 10)
FIG. 16 is a perspective view showing the configuration of the pipe member in the modified example 10 of the embodiment of the present invention. The modified example 10 is the same as the configuration of the above-described embodiment except that the configuration of the pipe member is changed. The same components as those in the above-described embodiment are designated by the same reference numerals.

変形例１０にかかるパイプ部材２４Ｆは、先端部２１ａが挿入される側と反対側の端部が、中心軸に対して傾斜してなる傾斜端部２４ｆを有する。 The pipe member 24F according to the modified example 10 has an inclined end portion 24f in which the end portion on the side opposite to the side into which the tip end portion 21a is inserted is inclined with respect to the central axis.

図１７は、本発明の実施の形態の変形例１０にかかるパイプ部材の使用例を示す図であり、プローブユニットの要部の構成を示す断面図である。本変形例１０のパイプ部材２５Ｆ（図１６参照）を取り付けたプローブ２Ａを用いて、四端子測定を行う。パイプ部材２５Ｆに代えた以外は、上述した実施の形態の構成と同じである。上述した実施の形態と同じ構成には、同じ符号を付す。 FIG. 17 is a diagram showing a usage example of the pipe member according to the modified example 10 of the embodiment of the present invention, and is a cross-sectional view showing the configuration of a main part of the probe unit. Four-terminal measurement is performed using the probe 2A to which the pipe member 25F (see FIG. 16) of the present modification 10 is attached. The configuration is the same as that of the above-described embodiment except that the pipe member 25F is replaced. The same components as those in the above-described embodiment are designated by the same reference numerals.

図１７では、一組のプローブ２Ａが、半導体集積回路１００の一つの電極と接触するとともに、回路基板２００の互いに異なる電極と接触する。四端子測定では、二つのプローブ２Ａが組をなす。すなわち、組をなす二つのプローブ２Ａにおいて、各パイプ部材２４Ｆが、同一の電極１０１（図３参照）に接触するとともに、各第２プランジャ２２が、互いに異なる電極２０１に接触する。 In FIG. 17, a set of probes 2A contacts one electrode of the semiconductor integrated circuit 100 and contacts different electrodes of the circuit board 200. In four-terminal measurement, two probes 2A form a pair. That is, in the two probes 2A forming a pair, each pipe member 24F contacts the same electrode 101 (see FIG. 3), and each second plunger 22 contacts different electrodes 201.

以上説明した変形例１０によれば、パイプ部材２４Ｆの端部が傾斜している構成であっても、上述した実施の形態の効果を得ることができる。また、本変形例１０にかかるパイプ部材２４Ｆを用いることによって、四端子測定に用いられるプローブ２Ａにおいても、上述した実施の形態の効果を得ることができる。 According to the modification 10 described above, the effect of the above-described embodiment can be obtained even if the end portion of the pipe member 24F is inclined. Further, by using the pipe member 24F according to the present modification 10, the effect of the above-described embodiment can be obtained also in the probe 2A used for the four-terminal measurement.

また、変形例１０によれば、パイプ部材の先端（頭頂部）のみを電極に接触させることによって、電極に対する接触面積が小さくなり、電極に対する接触圧が高くなり、導通を一層安定させることができる。 Further, according to the modified example 10, by contacting only the tip (top of the head) of the pipe member with the electrode, the contact area with respect to the electrode is reduced, the contact pressure with respect to the electrode is increased, and the conduction can be further stabilized. ..

（変形例１１）
図１８は、本発明の実施の形態の変形例１１におけるパイプ部材の構成を示す斜視図である。変形例１１は、パイプ部材の構成を変えた以外は、上述した実施の形態の構成と同じである。上述した実施の形態と同じ構成には、同じ符号を付す。 (Modification 11)
FIG. 18 is a perspective view showing the configuration of the pipe member in the modified example 11 of the embodiment of the present invention. The modified example 11 is the same as the configuration of the above-described embodiment except that the configuration of the pipe member is changed. The same components as those in the above-described embodiment are designated by the same reference numerals.

変形例１１にかかるパイプ部材２４Ｇは、先端部２１ａが挿入される側と反対側の端部が、中心軸に対して傾斜し、さらに潰し加工によって形成される傾斜扁平部２４ｇを有する。傾斜扁平部２４ｇの端面（上面）は、弧状または直線状をなして対向する外縁を有し、かつパイプ部材２４Ｇの中心軸に対して傾斜した平面をなす。 The pipe member 24G according to the modified example 11 has an inclined flat portion 24g in which the end portion on the side opposite to the side into which the tip portion 21a is inserted is inclined with respect to the central axis and is further formed by crushing. The end surface (upper surface) of the inclined flat portion 24g has an arcuate or linear shape and has opposite outer edges, and forms an inclined plane with respect to the central axis of the pipe member 24G.

以上説明した変形例１１によれば、パイプ部材２４Ｇが傾斜扁平部２４ｇを有する場合であっても、上述した実施の形態の効果を得ることができる。また、本変形例１１にかかるパイプ部材２４Ｇを四端子測定用のプローブに適用することによって、上述した変形例１０にかかるパイプ部材２４Ｆを用いる場合と比して、プローブの先端間の距離を小さくすることができる。 According to the modification 11 described above, even when the pipe member 24G has the inclined flat portion 24g, the effect of the above-described embodiment can be obtained. Further, by applying the pipe member 24G according to the present modification 11 to the probe for four-terminal measurement, the distance between the tips of the probes can be reduced as compared with the case where the pipe member 24F according to the above-mentioned modification 10 is used. can do.

また、変形例１１によれば、変形例１０と同様、パイプ部材の先端（頭頂部）のみを電極に接触させることによって、電極に対する接触面積が小さくなり、電極に対する接触圧が高くなり、導通を一層安定させることができる。 Further, according to the modified example 11, as in the modified example 10, by contacting only the tip (top of the head) of the pipe member with the electrode, the contact area with respect to the electrode is reduced, the contact pressure with respect to the electrode is increased, and conduction is achieved. It can be made more stable.

なお、変形例１１にかかるパイプ部材２４Ｇにおいて、変形例９のように、先端部２１ａが挿入される側と反対側の端部に潰し加工を施して中空扁平部を形成してもよい。 In the pipe member 24G according to the modified example 11, as in the modified example 9, the end portion on the side opposite to the side where the tip portion 21a is inserted may be crushed to form a hollow flat portion.

なお、上述した実施の形態では、第１プランジャ２１および第２プランジャ２２が、先端部およびフランジ部によって接触部を構成する例を説明したが、先端部とフランジ部とを一体化して、段部を有しない接触部を構成してもよい。 In the above-described embodiment, the example in which the first plunger 21 and the second plunger 22 form a contact portion by the tip portion and the flange portion has been described, but the tip portion and the flange portion are integrated to form a step portion. You may configure the contact part which does not have.

なお、上述した実施の形態および変形例で説明した第１プランジャの先端部の構成や、パイプ部材の構成を、第２プランジャ側に適用してもよい。 The configuration of the tip portion of the first plunger and the configuration of the pipe member described in the above-described embodiments and modifications may be applied to the second plunger side.

また、ここで説明したコンタクトプローブの構成はあくまでも一例に過ぎず、従来知られているさまざまな種類のプローブを適用することが可能である。例えば、上述したようなプランジャとコイルばねとで構成されるものに限らず、ポゴピンや、ワイヤを弓状に撓ませて荷重を得るワイヤープローブ、電気接点同士を接続する接続端子（コネクタ）等の導電性部材の先端にパイプ部材を取り付けた構成としてもよいし、これらのプローブを適宜組み合わせてもよい。 Further, the configuration of the contact probe described here is merely an example, and various types of conventionally known probes can be applied. For example, it is not limited to the one composed of a plunger and a coil spring as described above, but also a pogo pin, a wire probe that bends a wire in an arch shape to obtain a load, a connection terminal (connector) for connecting electrical contacts, and the like. A pipe member may be attached to the tip of the conductive member, or these probes may be combined as appropriate.

また、上述した実施の形態および変形例では、半導体集積回路の電極が半球状をなす例（図３参照）について説明したが、これに限らず、例えば板状をなす電極であってもよい。すなわち、プローブユニットが検査する半導体集積回路の電極は、ＢＧＡ（Ball grid array）のような球状（半球状）であってもよいし、ＱＦＰ（Quad Flat Package）のような板状であってもよい。 Further, in the above-described embodiments and modifications, an example in which the electrodes of the semiconductor integrated circuit have a hemispherical shape (see FIG. 3) has been described, but the present invention is not limited to this, and for example, a plate-shaped electrode may be used. That is, the electrodes of the semiconductor integrated circuit inspected by the probe unit may be spherical (hemispherical) such as BGA (Ball grid array) or plate-shaped such as QFP (Quad Flat Package). good.

このように、本発明はここでは記載していない様々な実施の形態等を含みうるものであり、特許請求の範囲により特定される技術的思想を逸脱しない範囲内において種々の設計変更等を施すことが可能である。 As described above, the present invention may include various embodiments not described here, and make various design changes and the like within a range that does not deviate from the technical idea specified by the claims. It is possible.

以上のように、本発明に係るコンタクトプローブは、繰り返しの使用において安定した接触抵抗を維持するのに好適である。 As described above, the contact probe according to the present invention is suitable for maintaining a stable contact resistance in repeated use.

１プローブユニット
２、２Ａコンタクトプローブ（プローブ）
３プローブホルダ
２１、２１Ａ、２１Ｂ第１プランジャ
２１ａ、２１ｆ、２１ｈ、２１ｊ、２１ｌ、２２ａ先端部
２１ｂ、２２ｂフランジ部
２１ｃ、２２ｃボス部
２１ｄ、２２ｄ基端部
２１ｅ凹部
２１ｇ、２４ａ凸部
２１ｉ突出部
２１ｋ、２４ｂ縮径部
２２第２プランジャ
２３コイルばね
２３ａ密着巻き部
２３ｂ粗巻き部
２４、２４Ａ、２４Ｂ、２４Ｃ、２４Ｄ、２４Ｅ、２４Ｆ、２４Ｇパイプ部材
２４ｄ扁平部
２４ｅ中空扁平部
２４ｆ傾斜端部
２４ｇ傾斜扁平部
３１第１部材
３２第２部材
３３、３４ホルダ孔
３３ａ、３４ａ小径部
３３ｂ、３４ｂ大径部
１００半導体集積回路
１０１、２０１電極
２００回路基板 1 Probe unit 2, 2A Contact probe (probe)
3 Probe holders 21, 21A, 21B 1st plunger 21a, 21f, 21h, 21j, 21l, 22a Tip part 21b, 22b Flange part 21c, 22c Boss part 21d, 22d Base end part 21e Recessed part 21g, 24a Convex part 21i Protruding part 21k, 24b Reduced diameter part 22 2nd plunger 23 Coil spring 23a Close contact winding part 23b Coarse winding part 24, 24A, 24B, 24C, 24D, 24E, 24F, 24G Pipe member 24d Flat part 24e Hollow flat part 24f Inclined end part 24g Inclined flat part 31 1st member 32 2nd member 33, 34 Holder holes 33a, 34a Small diameter part 33b, 34b Large diameter part 100 Semiconductor integrated circuit 101, 201 Electrode 200 Circuit board

Claims

A contact probe that transmits signals by contacting different electrodes at both ends in the longitudinal direction.
The conductive member extending in the longitudinal direction and
A pipe member provided at at least one end of the conductive member and made of a platinum group element or an alloy containing the platinum group element as a main component.
A contact probe comprising.

The conductive member is
The first plunger located on one end side in the longitudinal direction and
The second plunger located on the other end side in the longitudinal direction and
A coil spring that connects to the first plunger at one end and connects to the second plunger at the other end.
The contact probe according to claim 1, wherein the contact probe has.

The contact probe according to claim 1 or 2, wherein the pipe member is composed of a single platinum group element.

The conductive member is
A protruding portion that protrudes in a direction orthogonal to the longitudinal direction and presses against the pipe member,
The contact probe according to any one of claims 1 to 3, wherein the contact probe has.

The conductive member is
A flat surface portion provided at an end portion to which the pipe member is attached and perpendicular to a direction orthogonal to the longitudinal direction.
The contact probe according to any one of claims 1 to 3, wherein the contact probe has.

The conductive member is
The tip that is press-fitted into the pipe member,
Have,
The pipe member covers the entire tip portion.
The contact probe according to any one of claims 1 to 5.

The conductive member is
The tip that is press-fitted into the pipe member,
Have,
The pipe member covers a part of the tip portion.
The contact probe according to any one of claims 1 to 5.

The conductive member is
The tip that is press-fitted into the pipe member,
Have,
A convex portion that locks to the tip portion is formed on the inner peripheral surface of the pipe member.
The contact probe according to any one of claims 1 to 5.

A concave portion that engages with the convex portion is formed at the tip portion.
The contact probe according to claim 8.

The pipe member has a tubular shape in which a plane passing through an opening on one end side and a plane passing through an opening on the other end side are parallel to each other.
The contact probe according to any one of claims 1 to 9.

The pipe member has a tubular shape in which a plane passing through an opening at one end is inclined with respect to the central axis.
The contact probe according to any one of claims 1 to 9.

The pipe member has a flat shape at one end.
The contact probe according to claim 10 or 11.

The inner peripheral surfaces of the pipe member are in contact with each other in the flat portion.
The contact probe according to claim 12.

The pipe member has a curved surface having one end chamfered.
The contact probe according to claim 10 or 11.

The contact probe according to claim 10, wherein the pipe member is provided at an end portion on the side opposite to the side connected to the conductive member and has a diameter-reduced portion whose diameter is reduced toward the tip end.