JP6410457B2

JP6410457B2 - Contact, inspection jig, and method of manufacturing contact

Info

Publication number: JP6410457B2
Application number: JP2014080336A
Authority: JP
Inventors: 秀雄西川
Original assignee: 秀雄西川
Priority date: 2014-04-09
Filing date: 2014-04-09
Publication date: 2018-10-24
Anticipated expiration: 2034-04-09
Also published as: JP2015200602A

Description

本発明は、プリント配線基板や電子部品等に備えられた電極端子に接触される接触子及び検査治具に関するものである。 The present invention relates to a contact and an inspection jig that are in contact with electrode terminals provided on a printed wiring board, an electronic component, or the like.

近年、プリント配線基板の微細、高密度に対応したビルドアップ工法による多層製品が定在化している。この製造工法による基板には、層間の配線である微細なビアホールなどが多数存在することになる。その信頼性試験の１つとして、検査端子間の内部配線抵抗を正確に測定して良否を判定する４端子測定（ケルビン法）が行われている。
４端子測定は１つの検査端子に２本の接触子を導電接触させるために、接触子の個数が２倍になる。微細な検査端子には２本の接触点の間隔が小さいことが必要になる。 In recent years, multilayer products using a build-up method corresponding to the fine and high density of printed wiring boards have been established. A substrate formed by this manufacturing method has a large number of fine via holes that are wirings between layers. As one of the reliability tests, four-terminal measurement (Kelvin method) is performed in which the internal wiring resistance between the inspection terminals is accurately measured to determine pass / fail.
In the four-terminal measurement, since the two contacts are brought into conductive contact with one inspection terminal, the number of contacts is doubled. A fine inspection terminal requires a small distance between two contact points.

上記に対応した先行技術として、特許文献１のプリント配線板の検査治具がある。この検査治具は、特許文献１の図１（以下（先１の図１）とする）に示す通りプランジャー（先１の３、２５、２６、２７）の軸を偏心移動させ、かつ先端を斜め断面にすることにより接触点の間隔を最小にしている。 As a prior art corresponding to the above, there is a printed wiring board inspection jig disclosed in Patent Document 1. This inspection jig moves the shaft of the plunger (3, 25, 26, 27 of the tip 1) eccentrically as shown in FIG. The distance between the contact points is minimized by making the cross section into an oblique section.

しかし、プランジャーとスプリングとが直列に配置されて、各軸の外径は概略同じであって、プランジャー（先１の３）は連結部（先１の８）において接合されて偏心している。この場合、偏心方向の幅は２倍となって、接触子の配置蜜度が小さくなる。又、プランジャーの基部の円錐端とスプリングの終端とが連接（直列に当接）するので、荷重の方向が垂直軸から傾斜した方向になる。これは、プランジャーに回転と傾斜が生じて、尖端の位置精度が悪くなる。連結部を摺動自在に案内する案内部（先１の１９）は、長孔が好ましいがルーター加工は工数を要して多数の孔開けには適さない。丸孔では連結部の案内が不十分になる。 However, the plunger and the spring are arranged in series, the outer diameters of the respective shafts are substantially the same, and the plunger (tip 1-3) is joined and eccentric at the connecting portion (tip 1-8). . In this case, the width in the eccentric direction is doubled, and the arrangement degree of contact is reduced. Further, since the conical end of the base portion of the plunger and the terminal end of the spring are connected (contacted in series), the direction of the load is inclined from the vertical axis. This causes rotation and inclination of the plunger, and the position accuracy of the tip is deteriorated. The guide portion (19 at the tip 1) for slidably guiding the connecting portion is preferably a long hole, but router processing requires man-hours and is not suitable for making a large number of holes. In a round hole, the guide of a connection part becomes inadequate.

（先１の図３）のプランジャー（先１の２５）では連結部（先１の８ｘ）が円柱で丸孔に案内されて回転と傾斜は改善する。しかし、プランジャー（先１の２５）の形状が複雑で製作のコスト的な問題がある。プランジャーの別の形態として、軸状部材が屈曲した（先１の図４、５)のプランジャー（先１の２６、２７）の場合、コスト的に改善されている。又、連結部（先１の８ｙ、８ｚ）の屈曲量を調節して所望の寸法に偏心させることができる。しかし、プランジャーの長円形柱の連結部（先１の８ｙ、８ｚ）を垂直摺動させる案内には上述した案内部（先１の１９）の問題が共通する。 In the plunger (25 of the first point 1) of FIG. 3 (first point 1), the connecting portion (8x of the first point 1) is guided in a round hole with a cylindrical shape, and rotation and inclination are improved. However, the shape of the plunger (25 of point 1) is complicated, and there is a problem of manufacturing cost. As another form of the plunger, when the shaft-shaped member is bent (see FIGS. 4 and 5 of the first tip) (first tip 26 and 27), the cost is improved. Further, the bending amount of the connecting portion (the tip 1 8y, 8z) can be adjusted to be eccentric to a desired dimension. However, the problem of the above-mentioned guide part (point 1 19) is common to the guide for vertically sliding the connecting part (point 1 8y, 8z) of the oval column of the plunger.

上述の案内部の課題は、特許文献２において、特に（先２の図２）に、第１の穴（先２の１９ａ）と第２の穴（先２の１９ｂ）を重ねて略長穴として改善されている。しかし、各穴を重ねた面積が拡大して接触子の配置蜜度が小さく（悪く）なる。 The problem with the above-mentioned guide part is that in Patent Document 2, the first hole (the tip 2 19a) and the second hole (the tip 2 19b) are overlapped with each other (FIG. 2 of the tip 2). As has been improved. However, the area where the holes are overlapped is enlarged, and the arrangement density of the contacts is reduced (bad).

特許文献３の図１６には、第２プランジャ（先３の１８２）の軸を偏心させて接触子の先端の接触点の間隔を小さくしている。しかし、第２プランジャ（先３の１８２）は径と軸が異なる複雑な形状となる問題がある。又、反対側に円錐端の第１プランジャ（先３の３１、１８１）を配置して部品点数がバネ部材と合わせて３個となりコスト改善の余地もある。 In FIG. 16 of patent document 3, the axis | shaft of a 2nd plunger (182 of tip 3) is eccentric, and the space | interval of the contact point of the front-end | tip of a contactor is made small. However, there is a problem that the second plunger (the tip 182) has a complicated shape with a different diameter and axis. Moreover, the first plunger (31, 181 of the tip 3) is arranged on the opposite side, and the number of parts is three, including the spring member, and there is room for cost improvement.

特許文献４の図７、８には、プランジャ（先４の１４１）とコイルバネ（先４の１４５）を同軸に配置したコンタクトピン（先４の１４０）がある。コイルバネの他方を密着細巻きにして、簡易の円錐端として他方にはプランジャを不要にしている。しかし、プランジャは金属薄板からプレス打抜き加工により製造されるので断面が矩形であるので、絶縁部材の丸孔に組み込まれ、１万回以上の繰り返しの摺動には適さない。矩形孔はドリル加工では困難となる。
次に、（先４の図９）にはプランジャ（先４の４１）は丸棒をプレス加工で先端の端子部（先４の４２）と幅広部（先４の４３）を潰ぶして（カシメ）形成することが可能であることが示されている。しかし、端子部（先４の４２）のＶ字形状には複雑な後加工を要する。又、プランジャが回転して、２個のコンタクトピンの接触点の間隔を小さくすることにはならない。
上記のように、２本の接触子の接触点の間隔を小さくする、又は、製造を容易にする各種の工夫がなされているが、それぞれに問題点を有している。 In FIGS. 7 and 8 of Patent Document 4, there is a contact pin (140 of tip 4) in which a plunger (141 of tip 4) and a coil spring (145 of tip 4) are arranged coaxially. The other side of the coil spring is tightly wound, and a plunger is not required on the other side as a simple conical end. However, since the plunger is manufactured from a thin metal plate by press punching and has a rectangular cross section, it is incorporated in a round hole of the insulating member and is not suitable for repeated sliding over 10,000 times. Rectangular holes are difficult to drill.
Next, in FIG. 9 of the tip 4, the plunger (tip 41) is formed by pressing a round bar and crushing the terminal portion (tip 4 42) and the wide portion (tip 4 43) ( Caulking) has been shown to be possible to form. However, complicated post-processing is required for the V-shape of the terminal portion (42 of the tip 4). Further, the plunger does not rotate, and the interval between the contact points of the two contact pins is not reduced.
As described above, various attempts have been made to reduce the interval between the contact points of the two contacts or to facilitate the manufacture, but each has its own problems.

特許３７１１２６４号公報Japanese Patent No. 3711264 特開２００６−１７０６３３公報JP 2006-170633 A 再公ＷＯ２００８／１３３２０９号公報Republication WO2008 / 133209 特許３７６８１８３号公報Japanese Patent No. 3768183

プリント配線基板の４端子測定を行う場合、接触子の数が２倍となり、これに検査点の増加が相乗することにより、検査治具の全体価格が騰貴する。このように検査治具の製造コストが問題となっている。本発明は、上記の課題に鑑みてなされたもので、製造が容易であり、安価に製造でき、加えて保守も容易であって、高密度のプリント配線板への通電に好適であり、かつ４端子測定に好適な検査治具及び接触子を提供することを目的とする。
本発明はさらに、当該接触子の製造方法を提供することを目的とする。
When 4-terminal measurement of a printed wiring board is performed, the number of contacts doubles, and the increase in inspection points synergizes with this, thereby increasing the overall price of the inspection jig. Thus, the manufacturing cost of the inspection jig is a problem. The present invention has been made in view of the above problems, is easy to manufacture, can be manufactured at a low cost, is easy to maintain, is suitable for energizing a high-density printed wiring board, and An object of the present invention is to provide an inspection jig and a contact suitable for 4-terminal measurement.
It is another object of the present invention to provide a method for manufacturing the contact.

第１の手段の本発明は、電子部品の検査に用いられる検査治具に組み込まれて使用される接触子であって、導電性の接触針とコイルばねからなり、コイルばねは、一端に接触針を内側に連結する一端部と、一端部に続いて伸縮してばね特性のある本体部と、本体部の他端にコイル径の内側に最端部のある他端部とを有し、接触針は円形の軸状部材であって、電子部品に接触する先端と、先端に続く突出部と、一端部と連結されて本体部の伸縮を内側から同軸に案内する中継部と、突出部と中継部の間にあって、偏平状に所定長さ圧延されて軸幅が拡大した偏平面には傾斜が有って前記コイルばねの線径分強、突出部と中継部との軸が偏心した係止部とを有し、連結された突出部と本体部の外周側面は実質的に同一面にある接触子。 The first aspect of the present invention is a contactor incorporated in an inspection jig used for inspecting an electronic component, comprising a conductive contact needle and a coil spring, and the coil spring is in contact with one end. One end portion connecting the needle to the inside, a main body portion that expands and contracts following the one end portion and has a spring characteristic, and the other end portion having the outermost end portion inside the coil diameter at the other end of the main body portion, The contact needle is a circular shaft-shaped member, and includes a tip that comes into contact with the electronic component, a protrusion that follows the tip, a relay that is connected to one end and guides expansion and contraction of the main body from the inside, and a protrusion. And the relay portion, and the flat surface that is rolled into a flat shape for a predetermined length and has an increased shaft width has an inclination, and the coil spring has a strong wire diameter, and the shaft of the projecting portion and the relay portion is eccentric. The contact which has a latching | locking part and the outer peripheral side surface of the protrusion part connected and the main-body part exists on the same surface substantially.

第２の手段の本発明は、上記手段の接触子において、先端の形状が、検査部位と接触する接触点が偏心方向の外周にある。
第３の手段の本発明は、上記手段の接触子において、接触針の係止部はプレス加工により形成されている。
第４の手段の本発明は、上記手段の接触子において、接触針の係止部の端部には、略左右対称な傾斜のある肩部がある。
第５の手段の本発明は、上記手段の接触子において、係止部の（偏平）圧延部分の表裏は軸方向に相互に移動がある。
第６の手段の本発明は、上記手段の接触子において、コイルばねの一端部は密着巻きにて本体部から縮径されている。 According to the second means of the present invention, in the contact of the above means, the tip shape is such that the contact point in contact with the examination site is on the outer periphery in the eccentric direction.
According to the third means of the present invention, in the contact of the above means, the engaging portion of the contact needle is formed by pressing.
According to the fourth aspect of the present invention, in the contact of the above means, the end portion of the locking portion of the contact needle has a shoulder portion having a substantially symmetrical inclination.
According to the fifth means of the present invention, in the contact of the above means, the front and back of the (flat) rolled portion of the locking portion are moved relative to each other in the axial direction.
According to the sixth means of the present invention, in the contact of the above means, one end portion of the coil spring is reduced in diameter from the main body portion by tight winding.

第７の手段の本発明は、電子部品の検査に用いられる検査治具であって、第１乃至６の手段の何れかに記載の接触子と、接触子を保持する接触子保持体と、接触子保持体に連結された電極部とを備え、接触子保持体は、先端が露出するように突出部を軸方向に摺動可能に支持する案内部と、接触子の係止部からコイルばねを軸方向に摺動可能に収納する筒状空洞部と、を含み、電極部は、接触子保持体に連結された電気絶縁性の電極板と、電極板を貫通するように電極板に固定され、一端面が他端部の最端部に当接することにより、他端部に電気的に接続されるとともに、本体部を付勢する軸状の導電性の電極が筒状空洞部と同軸にある検査治具。
第８の手段の本発明は、上記手段の検査治具において、２個の接触子を偏心軸上に先端を内側に１対に配置している。 The seventh aspect of the present invention is an inspection jig used for inspecting an electronic component, the contact according to any one of the first to sixth means, a contact holder holding the contact, An electrode portion connected to the contact holder, and the contact holder includes a guide portion that supports the protruding portion so as to be slidable in the axial direction so that the tip is exposed, and a coil from the locking portion of the contact portion. A cylindrical cavity for slidably storing the spring in the axial direction, and the electrode portion is formed on the electrode plate so as to penetrate through the electrode plate and the electrically insulating electrode plate connected to the contact holder. The shaft-shaped conductive electrode that is fixed and is electrically connected to the other end portion by abutting the one end surface with the outermost end portion of the other end portion, and the cylindrical cavity portion. Inspection jig on the same axis.
According to the eighth aspect of the present invention, in the inspection jig according to the above means, the two contacts are arranged on the eccentric shaft in a pair with the tips on the inside.

第１又は３の手段に依れば、接触針は棒状部材を外周として、係止部はプレス加工により係止部の拡幅と軸の偏心が形成されているので、量産性に適して、製作のコストを低減する。コイルばねは接触針の中継部を内側に連結して、本体部の伸縮は摺動して案内さているのでコイルばねの線抵抗を改善する。コイルばねと中継部が同軸にあるので接触針の動作軸が安定して、偏心（軸移動）が小さく（線径強）ても接触子の回転量は小さく安定した位置精度（バラツキ）になる。係止部は両側に拡幅されているので、係止が確実である。係止部は所定長さあるので、傾斜させて偏心するのが容易である。接触子の外径はコイルばねの外径となるので、コイルばねの径を小さくして接触子の配置密度を上げることが出来る。コイルばねの最端部を内側にして、小さな電極との導電接触を確実にしている。高密度多量点の４端子測定用の接触子に適応する。 According to the 1st or 3rd means, the contact needle has a rod-shaped member as the outer periphery, and the locking part is formed by pressing to widen the locking part and the shaft eccentricity, making it suitable for mass production. Reduce costs. The coil spring connects the relay portion of the contact needle to the inside, and the expansion and contraction of the main body portion is slid and guided, thereby improving the wire resistance of the coil spring. Since the coil spring and the relay section are coaxial, the operating axis of the contact needle is stable, and even if the eccentricity (axial movement) is small (wire diameter is large), the amount of rotation of the contactor is small and stable positional accuracy (variation) is achieved. . Since the locking part is widened on both sides, the locking is reliable. Since the locking portion has a predetermined length, it is easy to be inclined and eccentric. Since the outer diameter of the contact is the outer diameter of the coil spring, the arrangement density of the contacts can be increased by reducing the diameter of the coil spring. The end of the coil spring is on the inside to ensure conductive contact with small electrodes. Applicable to high density and high density 4-terminal measuring contacts.

第２の手段に依れば、先端の形成が斜め断面など容易であり、接触点が接触子の外周にあるので、２本の接触点の間隔が最小となって、小さな検査端子の４端子測定に適応する。
第４の手段に依れば、接触子が検査治具に実装された場合、係止部の肩部に略左右対称な傾斜があるので、案内部（孔）に付勢されて突出部が中心に案内される。これは、特に第２の手段の接触針の回転を小さな偏心（軸移動）で抑止し接触点の位置精度を向上させる。
第５の手段に依れば、係止部は１回のプレスで拡幅、傾斜、偏心（軸移動）が同時にできて生産性が良い。
第６の手段に依れば、コイルばねの一端部は縮径されているので、接触針とコイルばねが確実に連結されて１体となって、接触子の挿入と取出しなど組み立てと保守が容易である。又、一端部は密着巻きにて本体部から縮径されているので、接触針の中継部とコイルばねが同軸に連結されて接触針の回転を抑止する。 According to the second means, the tip can be easily formed in an oblique section or the like, and the contact point is on the outer periphery of the contact. Therefore, the distance between the two contact points is minimized, and four terminals of small inspection terminals are provided. Adapt to measurement.
According to the fourth means, when the contact is mounted on the inspection jig, since the shoulder portion of the locking portion has a substantially symmetrical inclination, the protrusion is biased by the guide portion (hole). Guided to the center. This suppresses the rotation of the contact needle of the second means with a small eccentricity (axial movement) and improves the position accuracy of the contact point.
According to the fifth means, the locking portion can be widened, tilted, and eccentrically (axially moved) at the same time with a single press, and the productivity is good.
According to the sixth means, since the one end of the coil spring is reduced in diameter, the contact needle and the coil spring are securely connected to form one body, and assembly and maintenance such as insertion and removal of the contact are possible. Easy. Moreover, since one end part is diameter-reduced from the main-body part by close_contact | adherence winding, the relay part and coil spring of a contact needle are connected coaxially, and rotation of a contact needle is suppressed.

第７の手段に依れば、接触子に付勢が掛り、電極と接触子は導電接触の状態にあって、多数の接触子を使用する場合にも、検査治具の内部接続の信頼性を確保する。又、接触子保持体の筒状空洞部の孔が最大径となり、接触子の配置密度が良い。
第８の手段に依れば、高密度に小さな検査端子がある４端子測定に好適である。
各々の手段に依って上述した効果は、第１の手段が共通しているので、他の手段に係るものの効果になることがある。 According to the seventh means, the contact is biased, the electrode and the contact are in a conductive contact state, and even when a large number of contacts are used, the reliability of the internal connection of the inspection jig Secure. Moreover, the hole of the cylindrical cavity part of a contact holder becomes the maximum diameter, and the arrangement density of a contact is good.
According to the 8th means, it is suitable for the 4-terminal measurement which has a small test terminal in high density.
The effects described above depending on each means may be the effects of those relating to other means since the first means is common.

図１は本発明の実施形態を示す検査治具の全体の構成を示す説明図。FIG. 1 is an explanatory view showing the overall configuration of an inspection jig showing an embodiment of the present invention. 図２は本発明の実施の形態１における検査治具と接触子の説明図。FIG. 2 is an explanatory diagram of an inspection jig and a contact according to Embodiment 1 of the present invention. 図３（ａ）、図３（ｂ）は本発明の接触針の側面を拡大した説明図。FIG. 3A and FIG. 3B are explanatory views in which the side surface of the contact needle of the present invention is enlarged. 図４は本発明の接触子の上面からの拡大図。FIG. 4 is an enlarged view from the upper surface of the contact according to the present invention. 図５は本発明の接触針が係止した状態の説明図。FIG. 5 is an explanatory view of a state in which the contact needle of the present invention is locked. 図６は本発明の係止部（カシメ）の説明図。FIG. 6 is an explanatory view of a locking portion (caulking) according to the present invention.

本発明は特に４端子測定用の接触子を軸状部材（棒状部材）に拡幅（カシメ）のある接触針とコイルばねで構成することで、製造容易であって、保守も容易な検査治具を実現した。以下、本発明の実施形態に係る検査治具１及び接触子１０について、関連する添付図面を参照しながら説明する。
（実施の形態１） The present invention is an inspection jig that is easy to manufacture and easy to maintain, especially by forming a contact for measuring four terminals with a contact needle having a widening (crimping) on a shaft-like member (rod-like member) and a coil spring. Realized. Hereinafter, an inspection jig 1 and a contact 10 according to an embodiment of the present invention will be described with reference to related drawings.
(Embodiment 1)

本実施の形態による接触子１０を使用する検査治具１は、図１に示すように、複数の接触子１０が接触子保持体３０に保持されて、電極板４２に着脱可能に装着されている。電極板４２には図２に示す電極４１が、接触子１０のコイルばね１２と同軸に配設されて支持体４３に固着されている。支持体４３はコネクタ４５と共に治具ベース板４６に固着されている。電極４１とコネクタ４５はリード線４４で配線されて電極部４０を形成している。検査治具１が検査装置に搭載されて、コネクタ４５を介して電気的に接続される。接触子１０の先端１１１が被検査プリント配線板の検査端子に圧接することにより、電気特性を測定することが可能となる。４端子測定においては１つの検査端子に左右対称に対向して、２つの接触子１０が配置されることになる。 As shown in FIG. 1, the inspection jig 1 using the contact 10 according to the present embodiment has a plurality of contacts 10 held by a contact holder 30 and detachably attached to an electrode plate 42. Yes. An electrode 41 shown in FIG. 2 is disposed on the electrode plate 42 coaxially with the coil spring 12 of the contact 10 and is fixed to the support 43. The support body 43 is fixed to the jig base plate 46 together with the connector 45. The electrode 41 and the connector 45 are wired by lead wires 44 to form the electrode portion 40. The inspection jig 1 is mounted on the inspection apparatus and electrically connected via the connector 45. When the tip 111 of the contact 10 is pressed against the inspection terminal of the printed wiring board to be inspected, it is possible to measure the electrical characteristics. In the four-terminal measurement, two contactors 10 are arranged opposite to one inspection terminal symmetrically.

図２、３を参照しつつ、内部の構成を説明する。接触針１１は断面円形の軸状でベリリューム銅等の導電性金属でからなる。電子部品に接触する先端１１１から連続して、突出部１１２、係止部１１３、中継部１１４からなっている。
先端１１１は、２つの接触子１０の接触点１１１ａの間隔を最少にするために４５度の断面となっている。突出部１１２は接触子保持体３０の第１案内板３１の第１案内孔３１１から伸縮可能に突出することにより、被検査プリント配線板の検査端子との圧接を確保している。係止部１１３は所定の位置でカシメ（プレス）加工されて拡幅されて係止幅１１３ｗとなっており先端１１１の突出量を第２案内板３２の第２案内孔３２１に係止して定めている。係止部１１３の偏平面は傾斜して動作軸が偏心している。続く中継部１１４の外周にはコイルばね１２が配置されている。係止部１１３にコイルばね１２の一端部１２１は係止されて接触針１１と電極４１に付勢を掛けている。 The internal configuration will be described with reference to FIGS. The contact needle 11 has a circular cross section and is made of a conductive metal such as beryllium copper. Continuing from the tip 111 that contacts the electronic component, it is composed of a protruding portion 112, a locking portion 113, and a relay portion 114.
The tip 111 has a cross section of 45 degrees in order to minimize the distance between the contact points 111a of the two contacts 10. The protrusion 112 protrudes from the first guide hole 311 of the first guide plate 31 of the contact holder 30 so that the protrusion 112 can extend and contract, thereby ensuring pressure contact with the inspection terminal of the printed wiring board to be inspected. The locking portion 113 is squeezed (pressed) at a predetermined position and widened to have a locking width 113 w, and the protruding amount of the tip 111 is locked to the second guide hole 321 of the second guide plate 32. ing. The eccentric plane of the locking portion 113 is inclined and the operation axis is eccentric. A coil spring 12 is disposed on the outer periphery of the subsequent relay portion 114. One end 121 of the coil spring 12 is locked to the locking portion 113 and biases the contact needle 11 and the electrode 41.

第１案内孔３１１と同軸に第２案内板３２に第２案内孔３２１があり、突出部１１２の垂直な運動を案内している。この２層の案内孔は本発明の「案内部」の一具体例に相当する。２層の細径の案内孔の間に、径の大きい間隔孔３１２、３２２を設けることにより、垂直な運動の案内と位置精度を容易にしている。
コイルばね１２と接触針１１は、コイル保持板３３のコイル保持孔３３１に伸縮可能に保持されて軸方向の運動を案内している。案内孔とコイル保持孔３３１とは、コイルばね１２の線径分と伸縮可能なクリアランスの半分を加算した間隔の軸移動ｏｆｆがある。コイル保持孔３３１は、本発明の「筒状空洞部」の一具体例に相当する。 The second guide plate 32 has a second guide hole 321 coaxially with the first guide hole 311, and guides the vertical movement of the protrusion 112. These two layers of guide holes correspond to a specific example of the “guide portion” of the present invention. By providing large-diameter spacing holes 312 and 322 between two layers of thin guide holes, vertical motion guidance and positional accuracy are facilitated.
The coil spring 12 and the contact needle 11 are held in a coil holding hole 331 of the coil holding plate 33 so as to be expandable and contractible, and guide the movement in the axial direction. The guide hole and the coil holding hole 331 have an axial movement off at an interval obtained by adding the wire diameter of the coil spring 12 and half of the extendable clearance. The coil holding hole 331 corresponds to a specific example of the “cylindrical cavity” of the present invention.

絶縁性の第１案内板３１、第２案内板３２、及び、コイル保持板３３は一体に固定されることにより、接触子保持体３０を構成している。図２は、多数の接触子１０を接触子保持体３０に実装し、接触子保持体３０を電極板４２に着脱可能に固定した状態を示している。係止部１１３は、第２案内孔３２１によって押圧され、それによりコイルばね１２は圧縮する。その結果、初期荷重が電極４１に架るので、検査治具１の内部の導電接続が確実なものとなっている。 The insulating first guide plate 31, the second guide plate 32, and the coil holding plate 33 constitute a contact holder holding body 30 by being fixed integrally. FIG. 2 shows a state in which a large number of contacts 10 are mounted on the contact holder 30 and the contact holder 30 is detachably fixed to the electrode plate 42. The locking portion 113 is pressed by the second guide hole 321, thereby compressing the coil spring 12. As a result, since the initial load is placed on the electrode 41, the conductive connection inside the inspection jig 1 is ensured.

本発明の接触針１１について、図３、４を参照しつつ、詳細を説明する。図３（ａ）はカシメ面の正面図、図３(ｂ)は右側面図の拡大した説明図である。接触針１１の径はコイルばね１２の本体部１２２の内径より少し小さくコイルばね１２の伸縮を内側から摺動して案内する針径１１ｄとなっている。カシメされた偏平面は拡幅されて係止幅１１３ｗとなっており両側の肩部１１３ｓが係止の機能をする。円形軸が偏平状に圧延されたカシメ（プレス）の区間で動作軸を移動するために急激に曲げることを回避する所定の長さの係止長１１３ｈとなっている。 The contact needle 11 of the present invention will be described in detail with reference to FIGS. 3A is a front view of the crimping surface, and FIG. 3B is an enlarged explanatory view of the right side view. The diameter of the contact needle 11 is slightly smaller than the inner diameter of the main body 122 of the coil spring 12 and is a needle diameter 11d that guides the expansion and contraction of the coil spring 12 by sliding from the inside. The crimped flat surface is widened to a locking width 113w, and the shoulder portions 113s on both sides function as locking. The circular shaft has a locking length 113h of a predetermined length that avoids sudden bending in order to move the operating shaft in the crimping (press) section rolled into a flat shape.

係止長１１３ｈは所定の長さを有して、傾斜して軸移動ｏｆｆ分を偏心しており、傾斜の角度を小さくして、荷重の軸方向の伝達を容易にしている。又、カシメの偏平面は厚さが接触針の針径１１ｄからカシメ（プレス）されて小さくなっており、傾斜（曲げ）を容易にしている。傾斜角（正接角＝ｏｆｆ／１１３ｈ）を小さくして接触針１１の製作と動作を容易にしている。表面処理は、導電接触を確実にするために金めっきが望ましい。 The locking length 113h has a predetermined length and is inclined to deviate from the axial movement off, and the inclination angle is reduced to facilitate transmission of the load in the axial direction. Further, the thickness of the flat surface of the caulking is reduced by caulking (pressing) from the needle diameter 11d of the contact needle, thereby facilitating inclination (bending). The inclination angle (tangent angle = off / 113h) is reduced to facilitate the manufacture and operation of the contact needle 11. The surface treatment is preferably gold plating to ensure conductive contact.

図４に接触子１０を拡大した上面からの位置関係が示されている。先端１１１、突出部１１２の中心である突出軸１１２ｃが係止部１１３を経由して、中継部１１４（コイルばね１２、接触子１０）の中心である中継軸１１４ｃに軸移動ｏｆｆ分、偏心している。接触針１１の偏心軸１１ａとコイルばね１２（接触子１０）の外径が交差する位置に検査端子に接触する接触点１１１ａがある。接触点移動４ｗは接触子１０の外径の半分となる。又、４ｗ＝（１１ｄ／２）＋ｏｆｆであって、ｏｆｆ＝（コイルばね１２の線径）＋（コイルばね１２の伸縮に要する第１クリアランスｃ１／２）となっている。 The positional relationship from the upper surface which expanded the contactor 10 is shown by FIG. The tip 111 and the projecting shaft 112c, which is the center of the projecting portion 112, are decentered by the amount of axial movement off to the relay shaft 114c, which is the center of the relay portion 114 (coil spring 12, contact 10), via the locking portion 113 Yes. There is a contact point 111a that contacts the inspection terminal at a position where the eccentric shaft 11a of the contact needle 11 and the outer diameter of the coil spring 12 (contactor 10) intersect. The contact point movement 4w is half of the outer diameter of the contact 10. Further, 4w = (11d / 2) + off, and off = (wire diameter of the coil spring 12) + (first clearance c1 / 2 required for expansion and contraction of the coil spring 12).

係止部１１３はコイルばね１２の外径より立体的に内側にあって、コイル保持孔３３１に干渉しない幅が好ましい。係止幅１１３ｗはコイル中心径を目安とする。係止部１１３はプレス加工されるので、肩部１１３ｓは略左右対象に針径１１ｄから係止幅１１３ｗに滑らかに傾斜して拡幅されることになる。検査治具１に実装された場合、（図５を参照）第２案内孔３２１に付勢を掛けるので、両肩１１３ｓは、突出部１１２を第２案内孔３２１の中心に位置するように案内する。これは、接触針１１の回転を小さくして接触点移動４ｗのある接触点１１１ａの回転バラツキを大きく改善する。 The engagement portion 113 is preferably three-dimensionally inside the outer diameter of the coil spring 12 and has a width that does not interfere with the coil holding hole 331. The locking width 113w is based on the coil center diameter. Since the locking portion 113 is pressed, the shoulder portion 113s is widened while being smoothly inclined from the needle diameter 11d to the locking width 113w in a substantially left-right direction. When mounted on the inspection jig 1 (see FIG. 5), the second guide hole 321 is urged, so that both shoulders 113s guide the protrusion 112 so that it is positioned at the center of the second guide hole 321. To do. This reduces the rotation of the contact needle 11 and greatly improves the rotation variation of the contact point 111a where the contact point movement 4w is present.

コイルばね１２はピアノ線等の導電性金属であって、断面円形の線材を螺旋することで形成する。図２において、一方は接触針１１の中継部１１４に圧入されて、係止部１１３に係止されて同軸に連結するために密着巻きに縮径されている一端部１２１。続いて中継部１１４を内側に摺動して案内されてばね特性を有する疎巻き部１２２ａと、両側に所定巻き数の密着巻き部１２２ｂとがある本体部１２２。他方は縮径して最少巻線径にされて電極４１と接触する最端部１２３ａがある他端部１２３となっている。 The coil spring 12 is a conductive metal such as a piano wire, and is formed by spiraling a wire having a circular cross section. In FIG. 2, one end 121 is press-fitted into the relay portion 114 of the contact needle 11, and is reduced in tight winding so as to be locked to the locking portion 113 and connected coaxially. Subsequently, a main body 122 having a loosely wound part 122a having a spring characteristic guided by sliding inside the relay part 114 and a tightly wound part 122b having a predetermined number of turns on both sides. The other end is the other end 123 having a diameter reduced to a minimum winding diameter and having an end 123 a in contact with the electrode 41.

最端部１２３ａを縮径にて本体部１２２のコイル内径の内側にして、電極４１との接続（位置合わせ）を確実にしている。中継部１１４の端部は密着巻き部１２２ｂの内周と導電接触して疎巻き部１２２ａの線抵抗を改善する。表面処理は、導電接触を確実にするために金めっきが望ましい。 The outermost end portion 123 a is reduced in diameter so as to be inside the coil inner diameter of the main body portion 122, thereby ensuring connection (positioning) with the electrode 41. The end of the relay part 114 is in conductive contact with the inner periphery of the tightly wound part 122b to improve the line resistance of the loosely wound part 122a. The surface treatment is preferably gold plating to ensure conductive contact.

電極部４０について、図２を参照しつつ説明する。絶縁性の電極板４２にコイル保持孔３３１と同軸に電極孔４１１が形成されている。この電極孔４１１にエナメル線などのリード線４４が挿入され、かつ接着剤４１１ａによりで固定された後に、平面加工されることによって、電極４１が形成されている。電極４１の表面処理は、導電接触を確実にするために金めっきが望ましい。 The electrode unit 40 will be described with reference to FIG. An electrode hole 411 is formed in the insulating electrode plate 42 coaxially with the coil holding hole 331. An electrode 41 is formed by inserting a lead wire 44 such as an enameled wire into the electrode hole 411 and fixing the lead wire 44 with an adhesive 411a, followed by planar processing. The surface treatment of the electrode 41 is preferably gold plating in order to ensure conductive contact.

検査治具１の組立と保守の手順について、図１、２を参照しつつ説明する。前もって、コイルばね１２の一端部１２１に接触針１１の中継部１１４を圧入して連結した接触子１０を準備する。第１案内板３１、第２案内板３２、コイル保持板３３を重ねて螺子止めし接触子保持体３０とする。コイル保持板３３を上側にして、かつ接触子１０の先端１１１を前方（下方）にして、全てのコイル保持孔３３１から第２案内孔３２１と第１案内孔３１１に、接触子１０を挿入する。次に、電極４１の形成も含めて組立完了した電極部４０を９０度に設置して、接触子１０が装着された接触子保持体３０を電極板４２に整合させ、螺子により互いを固定する。これにより組立は完了する。 Procedures for assembling and maintaining the inspection jig 1 will be described with reference to FIGS. In advance, the contact 10 in which the relay portion 114 of the contact needle 11 is press-fitted and connected to the one end 121 of the coil spring 12 is prepared. The first guide plate 31, the second guide plate 32, and the coil holding plate 33 are overlapped and screwed to form a contact holder 30. The contact 10 is inserted into the second guide hole 321 and the first guide hole 311 from all the coil holding holes 331 with the coil holding plate 33 facing upward and the tip 111 of the contact 10 facing forward (downward). . Next, the assembled electrode part 40 including the formation of the electrode 41 is installed at 90 degrees, the contact holder 30 to which the contact 10 is attached is aligned with the electrode plate 42, and is fixed to each other by screws. . This completes the assembly.

不良の接触子１０の交換、保守は、接触子保持体３０を取り外して接触子１０を取り出し、良品に交換する。各板を整合する場合、図には示していないが、複数の位置合わせピンと位置合わせ孔を整合することにより機械的な位置が決まる構成になっている。 For replacement and maintenance of the defective contactor 10, the contactor holder 30 is removed, the contactor 10 is taken out, and is replaced with a non-defective product. When aligning the plates, although not shown in the drawing, the mechanical position is determined by aligning the plurality of alignment pins and the alignment holes.

（実施の形態１の設計例）
コイルばね１２は、接触子の外径となって配置密度が決まる。線径ｄ＝０．０５、ばね指数Ｃ＝コイル径Ｄ／ｄ＝４．３（図４に相当する）とすると、コイル径Ｄ＝ｄ＊Ｃ＝０．２２、コイル外径Ｄｏｕｔ＝ｄ＊（Ｃ＋１）＝０．２７、コイル内径Ｄｉｎ＝ｄ＊（Ｃ−１）＝０．１７となる。両端の縮径は、Ｃ＝（Ｃ−１）＝３．３を目安とする。次に、ばね定数ｋ＝１０ｇｆ／ｍｍとして、有効巻数などの必要な値がばねの計算式から算出できる。必要な密着巻き部１２２ｂを指定する。 (Design example of Embodiment 1)
The arrangement density of the coil spring 12 is determined by the outer diameter of the contact. When wire diameter d = 0.05, spring index C = coil diameter D / d = 4.3 (corresponding to FIG. 4), coil diameter D = d * C = 0.22, coil outer diameter Dout = d * (C + 1) = 0.27 and coil inner diameter Din = d * (C-1) = 0.17. As a guide, the diameter reduction at both ends is C = (C−1) = 3.3. Next, as the spring constant k = 10 gf / mm, necessary values such as the effective number of turns can be calculated from the spring calculation formula. A necessary tightly wound portion 122b is designated.

接触針１１は、図５のクリアランスｃ１を０．０２取ると針径１１ｄ＝０．１７−０．０２＝０．１５となる。又、軸移動ｏｆｆ＝ｄ＋ｃ１／２＝０．０５＋０．０１＝０．０６となる。係止長１１３ｈ＝０．６とすると、傾斜Ｔａｎ＝ｏｆｆ／１１３ｈ＝０．０６／０．６＝０．１となる。係止幅１１３ｗ＝１１ｄ＋ｄ＝０．２０となる。又、カシメ厚さは０．０９となる。
When the clearance c1 of FIG. 5 is 0.02, the contact needle 11 has a needle diameter 11d = 0.17−0.02 = 0.15. Further, the axial movement off = d + c1 / 2 = 0.05 + 0.01 = 0.06. When the locking length 113h = 0.6, the inclination Tan = off / 113h = 0.06 / 0.6 = 0.1. The locking width 113 w = 11d + d = 0.20. The caulking thickness is 0.09.

接触子保持体３０について、コイル保持孔３３１の径は、コイル外径Ｄｏｕｔ＝０．２７に摺動のクリアランスｃ２を０．０３取ると０．３となる。絶縁間隔０．０６の場合、接触子１０の配置の間隔は０．３６となる。又、４ｗの時の接触点１１１ａの間隔は０．０６＋０．０３＝０．０９となる。 With respect to the contact holder 30, the diameter of the coil holding hole 331 becomes 0.3 when a sliding clearance c <b> 2 is 0.03 when the coil outer diameter Dout = 0.27. When the insulation interval is 0.06, the arrangement interval of the contacts 10 is 0.36. Further, the distance between the contact points 111a at the time of 4w is 0.06 + 0.03 = 0.09.

（接触点の回転誤差の検証）
接触点１１１ａの回転誤差Ｅｙは、４ｗの場合に最大となる。案内孔３２１のクリアランスｃ３を０．０３とすると、クリアランスの合計ｃは（ｃ１＋ｃ２＋ｃ３）となる。一端部１２１の蜜巻き縮径でｃ１＝０、最悪のクリアランスは（０＋ｃ２＋ｃ３）となる。この場合Ｅｙ０２３≒±０．０７（＝（（（ｃ／２）＊（Ｄｏｕｔ／２））／ｏｆｆ）−ｃ２／２）となるが、肩部１１３ｓで第２案内孔３２１の中心に案内されて、ｃ３＝０、Ｅｙ０２０≒±０．０３となる。偏心軸１１ａ方向の誤差Ｅｘ＝ｃ３／２＝±０．０２となる。そして、これらに製造の誤差が加算されるが、接触点１１１ａの間隔が０．０９から適合の範囲にあることが解る。
実施について、設定値を要求仕様に合わせて適正に変えることでと所望の接触子１０と検査治具１が得られる。
（実施の形態２） (Verification of contact point rotation error)
The rotation error Ey of the contact point 111a becomes the maximum in the case of 4w. When the clearance c3 of the guide hole 321 is 0.03, the total clearance c is (c1 + c2 + c3). The diameter of the one end 121 is c1 = 0 and the worst clearance is (0 + c2 + c3). In this case, Ey023≈ ± 0.07 (= ((((c / 2) * (Dout / 2)) / off) −c2 / 2), but is guided to the center of the second guide hole 321 by the shoulder 113s. Thus, c3 = 0 and Ey020≈ ± 0.03. Error Ex = c3 / 2 = ± 0.02 in the direction of the eccentric shaft 11a. Further, manufacturing errors are added to these, but it can be seen that the distance between the contact points 111a is within the range of suitability from 0.09.
About implementation, the desired contactor 10 and the inspection jig 1 can be obtained by appropriately changing the set values according to the required specifications.
(Embodiment 2)

接触針１１のカシメについて、図６において説明する。プレス装置のカシメの一対の金型圧部６１，６２の表裏のカシメ長さは同じで実質的にカシメ後に係止長１１３ｈとなる。係止幅１１３ｗはカシメの偏平面の厚さにより決まる。一対の金型圧部６１，６２は接触針１１の軸方向に中心が相互に少し移動している。これに依って、接触針１１がプレスされると突出部１１２と中継部１１４は係止部１１３（偏平面）にたいして傾斜して押し出される。傾斜角は方向が反対の同じになって、突出部１１２と中継部１１４は平行になる。その軸移動ｏｆｆ（傾斜角）は一対の金型圧部６１，６２の軸方向の相互の移動量によって主に決まる。 The caulking of the contact needle 11 will be described with reference to FIG. The crimping lengths of the front and back surfaces of the pair of mold pressure portions 61 and 62 of the crimping device of the press device are the same and substantially become the locking length 113h after crimping. The locking width 113w is determined by the thickness of the crimped flat surface. The pair of mold pressure parts 61 and 62 has their centers slightly moved in the axial direction of the contact needle 11. Accordingly, when the contact needle 11 is pressed, the protruding portion 112 and the relay portion 114 are pushed out by being inclined with respect to the locking portion 113 (uneven plane). The inclination angle is the same in the opposite direction, and the protruding portion 112 and the relay portion 114 are parallel. The axial movement off (inclination angle) is mainly determined by the mutual movement amount of the pair of mold pressure portions 61 and 62 in the axial direction.

一対の金型圧部６１，６２のコーナーをアール（丸）としているが細部は最適化することが好ましい。アールの表裏の半径を変えると傾斜角が変わる等がある。これからは、円形の軸状部材が圧延されて変形した部分に表裏に軸方向のずれ（移動）がある様にすることで傾斜角を変えられる。偏平面を図６では一対の金型圧部６１，６２のみで図示しているが突出部１１２と中継部１１４の軸移動ｏｆｆ（傾斜角）と平行を確保するために、一対の金型圧部６１，６２の周辺に補助の壁（当て板）があることが好ましい。このプレス装置でカシメを行うと１回のプレスで所望の接触針１１の係止部１１３が得られる。
（その他の実施の形態） Although the corners of the pair of mold pressure portions 61 and 62 are rounded, it is preferable to optimize the details. Changing the radius of Earl's front and back changes the tilt angle. From now on, the tilt angle can be changed by causing the front and back to have a shift (movement) in the axial direction at the portion where the circular shaft-shaped member is rolled and deformed. In FIG. 6, only the pair of mold pressure portions 61 and 62 is shown as the eccentric plane, but the pair of mold pressures is secured in order to ensure parallelism with the axial movement off (inclination angle) of the protrusion 112 and the relay portion 114. It is preferable that there is an auxiliary wall (pad) around the portions 61 and 62. When caulking is performed with this press apparatus, the desired engaging portion 113 of the contact needle 11 can be obtained with a single press.
(Other embodiments)

接触針１１の係止部１１３を図３ではカシメの偏平面を傾斜としたが、滑らかな曲がりでも良い。要は、係止部１１３の傾斜（ｏｆｆ／１１３ｈ＜０．５）が大きくなければ製作と使用に好都合である。係止部１１３の形成は１回目のプレスにて軸上に偏平面を形成して、次に２回目のプレスにて軸を平行移動しても良いが、１回のプレスにて形成するのがより好ましい。 In FIG. 3, the locking portion 113 of the contact needle 11 has an inclined flat surface of the caulking, but may be a smooth bend. In short, it is convenient to manufacture and use if the inclination of the locking portion 113 (off / 113h <0.5) is not large. The locking portion 113 may be formed by forming a flat surface on the shaft by the first press and then moving the shaft in parallel by the second press. Is more preferable.

接触針１１の先端１１１の形状は、中継部１１４と同様の円錐としても良い。回転誤差Ｅｙが最少（＝Ｅｘ）になる。又、突出部１２の軸と直角に交差する平面にしても良い。この形状は、例えば、検査端子が半球の半田バンプの接触に適応する。先端１１１の平面形状は、直角のほかに、４５度平面、多角錐、偏心多角錐、クラウン（先割り）などのその他の形状であっても良い。 The shape of the tip 111 of the contact needle 11 may be a cone similar to that of the relay unit 114. The rotation error Ey is minimized (= Ex). Further, it may be a plane that intersects the axis of the protrusion 12 at a right angle. This shape is suitable for, for example, contact of a solder bump whose inspection terminal is a hemisphere. The planar shape of the tip 111 may be other shapes such as a 45-degree plane, a polygonal pyramid, an eccentric polygonal pyramid, and a crown (prior split) in addition to a right angle.

接触子保持体３０の案内板は第１案内板３１のみでも良い。ただし、接触子１０に荷重に軸方向のアンバランスもあるので、第２案内板３２を設ける方が望ましい。 The first guide plate 31 may be the only guide plate for the contact holder 30. However, since the contact 10 also has an axial imbalance in the load, it is desirable to provide the second guide plate 32.

コイルばね１２の他端部１２３の端末を縮径して最端部１２３ａを本体部１２２のコイル径の内側にしたが、内径の内側した方がより好ましい。又、端末のピッチを増しながら立体的に巻く、又は曲げる等によって、最端部１２３ａをコイルばね１２の中心にしても良い。これに依って、より小さな径の電極４１に対応することが出来る。 Although the diameter of the end of the other end 123 of the coil spring 12 is reduced to make the outermost end 123a inside the coil diameter of the main body 122, it is more preferable that the inner diameter is inside. Further, the outermost end 123a may be set at the center of the coil spring 12 by three-dimensional winding or bending while increasing the pitch of the terminal. Accordingly, it is possible to correspond to the electrode 41 having a smaller diameter.

本接触子１０は４端子測定に適応するが、通常の２端子測定に使用しても良い。接触子１０を共用化すると、製造と保守が容易になる。また、接触子１０は、他の種類の接触子の併用を妨げるものではない。必要に依り併用が可能である。 The contactor 10 is suitable for 4-terminal measurement, but may be used for normal 2-terminal measurement. If the contact 10 is shared, manufacturing and maintenance become easy. Further, the contact 10 does not prevent the combined use of other types of contacts. Can be used together if necessary.

本発明の特定の実施形態についての上述の説明は、例示を目的として提示したものである。それらは、網羅的であったり、記載した形態そのままに本発明を制限したりすることを意図したものではない。数多くの変形や変更が、上述の記載内容に照らして可能であることは当業者に自明である。 The foregoing descriptions of specific embodiments of the present invention have been presented for purposes of illustration. They are not intended to be exhaustive or to limit the invention to the precise form described. It will be apparent to those skilled in the art that many modifications and variations are possible in light of the above description.

本発明の接触子は、プリント配線基板、ＩＣパッケージ、ＩＣ等の電子部品に備えられた検査端子に導電接触させる通電治具と通電装置全般に用いることができる。 The contact according to the present invention can be used for a current-carrying jig and a current-carrying device that are in conductive contact with inspection terminals provided in electronic components such as a printed wiring board, an IC package, and an IC.

１・・・・検査治具
１０・・・接触子
１１・・・接触針、１１ａ・・偏心軸、ｏｆｆ・軸移動（偏心）
１１１・・先端、１１１ａ・接触点
１１２・・突出部、１１２ｃ・突出軸
１１３・・係止部、１１３ｗ・係止幅、１１３ｈ・係止長
１１４・・中継部、１１４ｃ・中継軸（コイル軸、接触子軸）
１２・・・コイルばね
１２１・・一端部
１２２・・本体部、１２２ａ・疎巻き部、１２２ｂ・密着巻き部
１２３・・他端部、１２３ａ・最端部
３０・・・接触子保持体
４０・・・電極部
４１・・・電極
６１、６２・一対の金型圧部 DESCRIPTION OF SYMBOLS 1 ... Inspection jig 10 ... Contact 11 ... Contact needle, 11a ... Eccentric shaft, Off / Shaft movement (eccentric)
111 ·· Tip, 111a · Contact point 112 · · Projection, 112c · Projection shaft 113 · · Locking portion, 113w · Locking width, 113h · Locking length 114 · · Relay portion, 114c · Relay shaft (coil shaft , Contactor shaft)
12... Coil spring 121 .. One end portion 122.. Main body portion 122 a Loose winding portion 122 b Close contact winding portion 123 Other end portion 123 a Endmost portion 30 Contact holder 40 ..Electrode part 41... Electrodes 61, 62 .A pair of mold pressure parts

Claims

A contactor incorporated in an inspection jig used for inspection of electronic components, comprising a conductive contact needle and a coil spring,
The coil spring has one end portion for connecting the contact needle to the inside at one end, a main body portion that expands and contracts following the one end portion, and has a spring characteristic at the other end of the main body portion. Having the other end with a portion,
The contact needle is a circular shaft-shaped member, and includes a tip that contacts an electronic component, a protruding portion that follows the tip, and a relay portion that is connected to the one end and guides expansion and contraction of the main body from the inside. And a flat body having a predetermined length between the protruding portion and the relay portion, whose front and back are both retreated and whose shaft width is increased, and the axis of the protruding portion is eccentric in parallel to the axis of the relay portion. So as to have an inclined portion inclined with respect to their axes in a direction orthogonal to the front and back receding surfaces,
A contactor characterized in that the projecting part and the outer peripheral side surface in the eccentric direction of the main body part are substantially on the same line.

2. The contact according to claim 1, wherein the tip has a shape in which a contact point in contact with an examination site is located on an outer periphery in an eccentric direction.

The one end portion contacts according to claim 1 or 2 is reduced in diameter from the main body portion at the tightly wound of the coil spring.

The contact according to any one of claims 1 to 3, wherein the front and back receding surfaces of the inclined portion are displaced from each other in the length direction of the flat body .

The contact according to any one of claims 1 to 4 , wherein the inclined portion of the contact needle has shoulder portions on both sides having a substantially symmetrical inclination that is widened at an end portion thereof.

An inspection jig used for inspecting an electronic component, comprising: the contact according to claim 5 ; a contact holder for holding the contact; and an electrode portion connected to the contact holder. ,
The contact holder is configured such that the protrusion is slidably supported in the axial direction so that the tip is exposed, and the coil spring is slidable in the axial direction from the inclined portion of the contact. A cylindrical hollow portion for storing,
The electrode part is fixed to the electrode plate so as to penetrate the electrode plate and the electrically insulating electrode plate connected to the contact holder, and one end surface is at the outermost part of the other end part. By contacting, the other end portion is electrically connected, and the shaft-like conductive electrode that urges the main body portion is coaxial with the cylindrical cavity portion ,
The inspection tool , wherein the contact receiving the bias of the main body is locked to the end of the guide at the shoulders on both sides of the inclined portion .

The inspection jig according to claim 6, wherein the two contactors paired with one inspection terminal are arranged on an eccentric shaft with the tip end inside.

6. The method of manufacturing a contact according to claim 1, wherein the inclined portion of the contact needle is formed by pressing so as to have the flat body .