JP2023174031A - Inspection device - Google Patents

Abstract

To enable stable inspection of high frequency properties of an inspection target.SOLUTION: An inspection device is provided, comprising a probe, and an insulative block provided with a first hole for the probe to be inserted and a second hole connected to the first hole to allow the probe to be inserted, the second hole having a smaller diameter than the first hole. A ratio of a thickness of the insulative block to a depth of the first hole is 1.40 or less.SELECTED DRAWING: Figure 3

Description

The present invention relates to an inspection device.

In recent years, various testing devices for testing semiconductor devices such as integrated circuits (ICs) have been developed. For example, Patent Document 1 describes a high frequency probe socket. This probe socket includes a plurality of probes and a noise shielding body. A plurality of probes are inserted through the noise shielding body.

Special table 2018-529951 publication

For example, the high frequency characteristics of an object to be tested such as a semiconductor device may be tested using a testing device such as a high frequency probe socket described in Patent Document 1. In this inspection, it may be required to stably inspect the high frequency characteristics of the object to be inspected.

One example of the object of the present invention is to stably test the high frequency characteristics of an object to be tested. Other objects of the invention will become apparent from the description herein.

One aspect of the present invention is
probe and
an insulating block provided with a first hole through which the probe is inserted; and a second hole communicating with the first hole, through which the probe is inserted, and having a diameter smaller than the diameter of the first hole;
Equipped with
In the inspection device, the ratio of the thickness of the insulating block to the depth of the first hole is 1.40 or less.

One aspect of the present invention is
probe and
a conductive block through which the probe is inserted;
Equipped with
In the inspection device, the conductive block has a convex portion that contacts the inspection substrate.

According to the above aspect of the present invention, it is possible to stably test the high frequency characteristics of the object to be tested.

FIG. 2 is a top perspective view showing the inspection device according to the embodiment together with the inspection board. It is a downward perspective view showing an inspection device concerning an embodiment. FIG. 2 is a diagram showing a cross section taken along line AA' in FIG. 1 together with an object to be inspected and a substrate to be inspected. 4 is an enlarged view of a portion of FIG. 3. FIG. FIG. 3 is a cross-sectional view showing an inspection apparatus according to a comparative example together with an object to be inspected and a substrate to be inspected. 6 is an enlarged view of a portion of FIG. 5. FIG.

Embodiments of the present invention will be described below with reference to the drawings. In all the drawings, similar components are denoted by the same reference numerals, and description thereof will be omitted as appropriate.

FIG. 1 is a top perspective view showing the inspection device 10 according to the embodiment together with the inspection board 30. FIG. 2 is a downward perspective view showing the inspection device 10 according to the embodiment. FIG. 3 is a diagram showing a cross section taken along line AA' in FIG. 1 together with the object to be inspected 20 and the inspection substrate 30. FIG. 4 is an enlarged view of a portion of FIG. 3.

To explain the directions, an X direction, a Y direction, and a Z direction will be defined. The Z direction is a direction parallel to the vertical direction. The X direction is one of the horizontal directions perpendicular to the Z direction. The Y direction is one of the horizontal directions perpendicular to the Z direction and the X direction. In the embodiment, description will be given assuming that the X direction is the left-right direction, the Y direction is the front-back direction, and the Z direction is the up-down direction. In each figure, the directions pointed by the arrows of the X, Y, and Z axes are defined as the left direction, the forward direction, and the upward direction, respectively. In FIGS. 3 and 4, a white circle with a black dot indicating the Y direction indicates that the direction indicated by the Y-axis arrow is from the back of the page to the front.

As shown in FIG. 1, the inspection device 10 includes two ground probes 110, six connection probes 120, a pin plate 130, a pin block 140, and a retainer 150. As shown in FIG. 3, each ground probe 110 has a ground barrel 112 and a ground plunger 114. Each connection probe 120 has a connection barrel 122, a first connection plunger 124, and a second connection plunger 126.

As shown in FIG. 3, an object to be inspected 20 is arranged above the inspection apparatus 10. The object to be inspected 20 is, for example, a semiconductor device such as an integrated circuit (IC). A test board 30 is arranged below the test device 10 . The test board 30 is, for example, a wiring board such as a printed circuit board (PCB). The object to be inspected 20 and the inspection board 30 are electrically connected to each other via the inspection device 10.

With reference to FIG. 1, the arrangement of two ground probes 110 and six connection probes 120 will be described.

When viewed from the Z direction, the two ground probes 110 are arranged substantially parallel to the X direction. In the example shown in FIG. 1, the two ground probes 110 are arranged on both sides in the X direction with respect to the horizontal center of the retainer 150 when viewed from the Z direction.

When viewed from the Z direction, the six connection probes 120 include three connection probes 120 located on the left side of the two ground probes 110 and three connection probes 120 located on the right side of the two ground probes 110. There is. When viewed from the Z direction, the three connection probes 120 on the left side are arranged substantially parallel to the Y direction at substantially equal intervals. When viewed from the Z direction, the three connection probes 120 on the right side are arranged substantially parallel to the Y direction at substantially equal intervals. When viewed from the Z direction, the center connection probe 120 of the three connection probes 120 on the left side and the center connection probe 120 of the three connection probes 120 on the right side are connected to the two ground probes 110 in the X direction. They are lined up almost parallel.

The arrangement of the two ground probes 110 and the six connection probes 120 is not limited to the example described using FIG. 1. The arrangement of the ground probe 110 and the connection probe 120 is changed as appropriate depending on conditions such as the arrangement of the electrodes of the object to be inspected 20 and the arrangement of the electrodes of the test substrate 30.

Next, with reference to FIG. 3, the configurations of each ground probe 110 and each connection probe 120 will be described. Unless otherwise specified, the configuration described below for ground probe 110 applies equally to two ground probes 110. Unless otherwise specified, the configurations described below for the connection probes 120 apply similarly to the six connection probes 120.

The ground barrel 112 extends substantially parallel to the Z direction. The gland barrel 112 is inserted into a gland insertion hole 160 provided in the pin block 140 and the retainer 150. Thereby, the pin block 140 and the retainer 150 serve as a support that supports the ground probe 110 substantially parallel to the Z direction. The lower end of the ground insertion hole 160 does not penetrate the pin block 140 in the Z direction. In the example shown in FIG. 3, the lower end of the gland insertion hole 160 is located above the lower end surface of a convex portion 142 of the pin block 140, which will be described later, in the Z direction. Specifically, in the example shown in FIG. 3, the lower end of the ground insertion hole 160 is located approximately at the center of the pin block 140 in the Z direction. However, the lower end of the gland insertion hole 160 may be shifted upward or downward in the Z direction with respect to the approximate center of the pin block 140 in the Z direction.

The ground plunger 114 is arranged on the upper end side of the ground barrel 112. The upper end of the gland insertion hole 160 is opened upward on the upper surface of the retainer 150. Thereby, the upper end of the gland plunger 114 can protrude upward from the upper surface of the retainer 150 through the upper end of the gland insertion hole 160. The ground plunger 114 is urged upward by a spring (not shown) disposed inside the ground barrel 112. Therefore, the upper end of the ground plunger 114 can come into contact with the ground electrode 22 disposed on the lower surface of the object to be inspected 20 while the ground plunger 114 is biased upward.

The connection barrel 122 extends substantially parallel to the Z direction. The connection barrel 122 is inserted into a connection insertion hole 170 provided in the pin plate 130, pin block 140, and retainer 150. Thereby, the pin plate 130 and the retainer 150 serve as a support for supporting the connection probe 120. The connection insertion hole 170 penetrates the retainer 150, the pin block 140, and the pin plate 130 in the Z direction between the upper surface of the retainer 150 and the lower surface of the pin plate 130.

The first connection plunger 124 is arranged on the upper end side of the connection barrel 122 . The upper end of the connection insertion hole 170 is opened upward on the upper surface of the retainer 150. Thereby, the upper end of the first connection plunger 124 can protrude upward from the upper surface of the retainer 150 through the upper end of the connection insertion hole 170. The first connection plunger 124 is urged upward by a spring (not shown) disposed inside the connection barrel 122. Therefore, the upper end of the first connection plunger 124 can come into contact with the connection electrode 24 disposed on the lower surface of the object to be inspected 20 while the first connection plunger 124 is biased upward.

The second connection plunger 126 is arranged at the lower end side of the connection barrel 122. The lower end of the connection insertion hole 170 is opened downward on the lower surface of the pin plate 130. Thereby, the lower end of the second connection plunger 126 can protrude downward from the lower surface of the pin plate 130 through the lower end of the connection insertion hole 170. The second connection plunger 126 is urged downward by a spring (not shown) disposed inside the connection barrel 122. Therefore, the lower end of the second connection plunger 126 can come into contact with the contact portion 34 disposed on the upper surface of the test board 30 while the second connection plunger 126 is urged downward. For example, an electrode (not shown) is arranged on the contact portion 34 of the test substrate 30.

The connection electrode 24 of the object to be inspected 20 and the contact portion 34 of the inspection board 30 are electrically connected to each other via the connection probe 120. The six connection probes 120 are independently power supply or signal probes. For example, the middle connection probe 120 of the three connection probes 120 on the left side shown in FIG. 1 is a power supply probe. Of the three connection probes 120 on the left side shown in FIG. 1, the two connection probes 120 on both sides are signal probes. The middle connection probe 120 among the three connection probes 120 on the right side shown in FIG. 1 is a power supply probe. Of the three connection probes 120 on the right side shown in FIG. 1, the two connection probes 120 on both sides are signal probes.

Next, the pin plate 130, pin block 140, and retainer 150 will be explained with reference to FIGS. 1 to 3.

The pin plate 130 is an insulating block such as a resin block. Pin plate 130 is arranged below pin block 140. As shown in FIGS. 1 and 2, the pin plate 130 has a substantially rectangular shape when viewed from the Z direction. However, the shape of the pin plate 130 is not limited to this example.

The pin block 140 is a conductive block such as a metal block. Pin block 140 is arranged between pin plate 130 and retainer 150 in the Z direction. As shown in FIGS. 1 and 2, the pin block 140 has a substantially rectangular shape when viewed from the Z direction. However, the shape of the pin block 140 is not limited to this example.

The retainer 150 is an insulating block such as a resin block. The retainer 150 is arranged above the pin block 140 in the Z direction. As shown in FIGS. 1 and 2, the retainer 150 has a substantially rectangular shape when viewed from the Z direction. However, the shape of the retainer 150 is not limited to this example.

As shown in FIGS. 2 and 3, the pin plate 130 is provided with a through hole 132. The through hole 132 penetrates the pin plate 130 in the Z direction. A convex portion 142 is provided on the lower surface of the pin block 140. The convex portion 142 passes through the through hole 132 of the pin plate 130 in the Z direction. As shown in FIG. 3, the lower end surface of the convex portion 142 is in contact with the ground contact portion 32 disposed on the upper surface of the test board 30. For example, a ground electrode (not shown) is arranged at the ground contact portion 32 of the test board 30. Thereby, the ground electrode 22 of the object to be inspected 20 and the ground contact portion 32 of the inspection board 30 can be electrically connected to each other via the ground probe 110, the pin block 140, and the convex portion 142.

As shown in FIG. 3, the horizontal peripheral portion of the through hole 132 on the lower surface of the pin plate 130 faces the upper surface of the test board 30 in the Z direction with a gap 134 interposed therebetween. In other words, the height of the convex portion 142 in the Z direction is greater than the thickness of the pin plate 130 in the Z direction. Therefore, the lower end surface of the convex portion 142 can be made to protrude further downward than the lower surface of the pin plate 130. Therefore, compared to the case where the lower surface of the pin plate 130 contacts the upper surface of the test board 30, the lower end surface of the convex portion 142 can be brought into contact with the ground contact portion 32 of the test board 30 more reliably. However, the lower surface of the pin plate 130 may be in contact with the upper surface of the test board 30.

The two ground probes 110 are arranged at positions overlapping the convex portion 142 of the pin block 140 in the Z direction. Therefore, it is easier to electrically connect the two ground probes 110 and the convex portion 142 to each other, compared to the case where the two ground probes 110 are arranged at positions horizontally shifted from the corresponding position of the pin block 140. be able to. However, the two ground probes 110 may be arranged at positions horizontally shifted from the above-mentioned position of the pin block 140.

Next, with reference to FIG. 4, the upper end portion of the ground probe 110 and its surroundings will be described.

A portion of the gland insertion hole 160 that penetrates the retainer 150 in the Z direction includes a large diameter hole 162, a small diameter hole 164, and a tapered hole 166. The large diameter hole 162 is located below the tapered hole 166. The upper end of the large diameter hole 162 communicates with the lower end of the tapered hole 166. The small diameter hole 164 is located above the tapered hole 166. The lower end of the small diameter hole 164 communicates with the upper end of the tapered hole 166. The horizontal diameter of the small diameter hole 164 is smaller than the horizontal diameter of the large diameter hole 162. The horizontal diameter of the tapered hole 166 decreases from the bottom to the top.

The ground barrel 112 is provided with a wide portion 112a. The horizontal diameter of the wide portion 112a of the ground barrel 112 is larger than the horizontal diameters of the upper and lower portions of the wide portion 112a of the ground barrel 112 in the Z direction. The wide portion 112a is inserted into the large diameter hole 162. The horizontal diameter of the wide portion 112a is smaller than the horizontal diameter of the large diameter hole 162. The horizontal diameter of the wide portion 112a is greater than or equal to the horizontal diameter of the portion of the gland insertion hole 160 that penetrates the pin block 140 in the Z direction. Therefore, the lower surface of the wide portion 112a can be hooked onto the horizontal peripheral portion of the ground insertion hole 160 on the upper surface of the pin block 140. Thereby, the lower surface of the wide portion 112a can be brought into contact with the corresponding portion of the upper surface of the pin block 140. Therefore, the wide portion 112a and the upper surface of the pin block 140 can be electrically connected.

Next, an example of a method for assembling the inspection device 10 will be described with reference to FIGS. 3 and 4. In this example, inspection device 10 is assembled as follows.

First, each ground probe 110 is inserted into the ground insertion hole 160 of the pin block 140 from above the pin block 140. As a result, the wide portion 112a of the ground probe 110 is caught in the horizontal peripheral portion of the ground insertion hole 160 on the top surface of the pin block 140.

Next, the pin block 140 and retainer 150 are stacked in the Z direction. As a result, the retainer 150 is placed above the pin block 140. The upper portion of each ground probe 110 is inserted into a large diameter hole 162, a small diameter hole 164, and a tapered hole 166 of the retainer 150.

Next, the pin block 140 and retainer 150 are turned upside down. As a result, the pin block 140 is placed above the retainer 150. Next, with the pin block 140 disposed above the retainer 150, each connection probe 120 is inserted into the connection insertion hole 170 of the pin block 140 and the retainer 150 from above the pin block 140. Next, the pin plate 130 and pin block 140 are stacked in the Z direction. As a result, the portion of each connection probe 120 located on the opposite side of the retainer 150 is inserted into the connection insertion hole 170 of the pin plate 130.

In this way, the inspection device 10 is assembled.

In the example described above, the lower part of the ground probe 110 is inserted into the ground insertion hole 160 of the pin block 140 before the upper part of the ground probe 110 is inserted into the large diameter hole 162, the small diameter hole 164, and the tapered hole 166. . Therefore, compared to the case where the upper part of the ground probe 110 is inserted into the large diameter hole 162, the small diameter hole 164, and the tapered hole 166, and then the lower part of the ground probe 110 is inserted into the ground insertion hole 160 of the pin block 140, The wide portion 112a of the ground probe 110 can be brought into reliable contact with the pin block 140.

FIG. 5 is a cross-sectional view showing an inspection apparatus 10K according to a comparative example together with an object to be inspected 20 and an inspection substrate 30. FIG. 6 is an enlarged view of a portion of FIG. 5. The inspection device 10K according to the comparative example is the same as the inspection device 10 according to the embodiment except for the following points.

As shown in FIG. 5, the inspection device 10K according to the comparative example includes two upper ground probes 110K1, two lower ground probes 110K2, two connection probes 120K, a pin plate 130K, a pin block 140K, and a retainer 150K. .

As shown in FIG. 5, each upper ground probe 110K1 has an upper ground barrel 112K1 and an upper ground plunger 114K1. The upper gland barrel 112K1 is inserted into the upper part of the gland insertion hole 160K. The upper part of the ground insertion hole 160K passes through the retainer 150K and the upper part of the pin block 140K in the Z direction. The upper ground plunger 114K1 is arranged on the upper end side of the upper ground barrel 112K1. The upper ground plunger 114K1 is biased upward. The upper end of the upper ground plunger 114K1 can come into contact with the ground electrode 22 of the object to be inspected 20.

As shown in FIG. 6, the portion of the gland insertion hole 160K according to the comparative example that penetrates the retainer 150K in the Z direction includes a large diameter hole 162K, a small diameter hole 164K, and a tapered hole 166K.

As shown in FIG. 5, each lower ground probe 110K2 has a lower ground barrel 112K2 and a lower ground plunger 114K2. The lower gland barrel 112K2 is inserted into the lower part of the gland insertion hole 160K. The lower portion of the ground insertion hole 160K passes through the pin plate 130K and the lower portion of the pin block 140K in the Z direction. The lower gland plunger 114K2 is arranged at the lower end side of the lower gland barrel 112K2. The lower ground plunger 114K2 is biased downward. The lower end of the lower ground plunger 114K2 can come into contact with the ground contact portion 32 of the test board 30.

The embodiment and a comparative example will be compared.

As shown in FIGS. 4 and 6, the thickness T in the Z direction of the portion of the retainer 150 according to the embodiment through which the ground probe 110 is inserted is the same as the thickness T in the Z direction of the portion through which the upper ground probe 110K1 of the retainer 150K according to the comparative example is inserted. It is thinner than the thickness TK in the Z direction. Therefore, in the embodiment, the inductance in the retainer 150 can be reduced compared to the comparative example. Thereby, in the embodiment, the high frequency characteristics of the object to be inspected 20 can be stably inspected compared to the comparative example. The thickness T in the Z direction of the above portion of the retainer 150 according to the embodiment is not limited to the following, but is, for example, 0.4 mm or more and 0.6 mm or less.

As shown in FIGS. 4 and 6, the depth D in the Z direction of the large diameter hole 162 according to the embodiment is deeper than the depth DK in the Z direction of the large diameter hole 162K according to the comparative example. Although the depth D of the large diameter hole 162 according to the embodiment is not limited to the following, for example, it is 0.2 mm or more and 0.4 mm or less.

As shown in FIGS. 4 and 6, the ratio T/D of the thickness T to the depth D according to the embodiment is larger than the ratio TK/DK of the thickness TK to the depth DK according to the comparative example. It has become. In the embodiment, the loss (unit: dB) of the inspection device 10 was measured under a band condition of 8 GHz with the ratio T/D set to 1.30. In a comparative example, the ratio TK/DK was set to 1.50, and the loss (unit: dB) of the inspection device 10K was measured under conditions similar to those of the embodiment. The loss in the embodiment was about 10 dB lower than the loss in the comparative example. Therefore, it can be said that the smaller the ratio T/D according to the embodiment is, the more stable the high frequency characteristics of the object to be inspected 20 can be inspected. Therefore, the ratio T/D according to the embodiment can be 1.40 or less, preferably 1.30 or less.

The lower limit of the ratio T/D according to the embodiment can be determined from the viewpoint of the strength of the retainer 150, for example. For example, the smaller the ratio T/D according to the embodiment, the lower the strength of the retainer 150 tends to be. Therefore, the ratio T/D according to the embodiment may be, for example, 1.20 or more.

In the comparative example, as shown in FIG. 5, the pin block 140K is electrically connected to the ground contact portion 32 of the test board 30 via the lower ground probe 110K2. In the comparative example, the pin block 140K does not have the convex portion 142 whose lower end surface contacts the ground contact portion 32 as in the embodiment. In contrast, in the embodiment, as shown in FIG. 3, the pin block 140 is electrically connected to the ground contact portion 32 of the test board 30 via the convex portion 142. Therefore, the contact area between the lower end surface of the convex portion 142 and the ground contact part 32 of the test board 30 in the embodiment is larger than the contact area between the lower end of the lower ground probe 110K2 and the ground contact part 32 of the test board 30 in the comparative example. can do. Therefore, in the embodiment, the ground connection between the pin block 140 and the test board 30 can be strengthened compared to the comparative example. Thereby, in the embodiment, the high frequency characteristics of the object to be inspected 20 can be stably inspected compared to the comparative example.

Although the embodiments of the present invention have been described above with reference to the drawings, these are merely examples of the present invention, and various configurations other than those described above may also be adopted.

According to this specification, an inspection device of the following aspects is provided.
(Aspect 1)
In aspect 1, the inspection device includes a probe, a first hole through which the probe is inserted, and a second hole communicating with the first hole and through which the probe is inserted and having a diameter smaller than the diameter of the first hole. , and a ratio of the thickness of the insulating block to the depth of the first hole is 1.40 or less.

The "probe" corresponds to the "ground probe" in the embodiment described above. The "insulating block" corresponds to the "retainer" in the above embodiment. The "first hole" corresponds to the "large diameter hole" in the above embodiment. The "second hole" corresponds to the "small diameter hole" in the above embodiment.

According to the above aspect, the smaller the ratio, the more stable the high frequency characteristics of the object to be tested can be. Therefore, in the above embodiment, the high frequency characteristics of the object to be inspected can be tested stably, compared to the case where the ratio is higher than the numerical value in the above embodiment.

(Aspect 2)
In a second aspect, the inspection device further includes a conductive block through which the probe is inserted and which overlaps the insulating block, and after the probe is inserted into the conductive block, the probe is inserted into the first hole and the first hole. It is inserted through two holes.

The "conductive block" corresponds to the "pin block" in the above embodiment.

According to the above aspect, the probe can be brought into contact with the conductive block more reliably than in the case where the probe is inserted into the conductive block after the probe is inserted into the first hole and the second hole.

(Aspect 3)
In aspect 3, the inspection device includes a probe and a conductive block through which the probe is inserted, and the conductive block has a convex portion that contacts the test substrate.

The "probe" corresponds to the "ground probe" and "connection probe" in the above embodiment. The "conductive block" corresponds to the "pin block" in the above embodiment.

According to the above aspect, the contact area between the convex portion and the test board can be made larger than the contact area between the probe and the test board when the probe is brought into contact with the test board. Therefore, in the above embodiment, the ground connection between the conductive block and the test board can be strengthened compared to the case where the probe is brought into contact with the test board. As a result, in the above-described aspect, the high frequency characteristics of the object to be tested can be tested more stably than when the probe is brought into contact with the testing board.

(Aspect 4)
In a fourth aspect, the inspection device further includes an insulating block provided with a through hole through which the convex portion passes, and at least a part of the surface of the insulating block on the side where the inspection board is located is connected to the insulating block through a gap. It faces the test board.

The "insulating block" corresponds to the "pin plate" in the above embodiment.

According to the above aspect, the convex portion can be brought into contact with the test board more reliably than when the insulating block contacts the test board.

(Aspect 5)
In aspect 5, the probe is arranged at a position overlapping the convex portion of the conductive block.

According to the above aspect, the probe and the protrusion can be electrically connected to each other more easily than when the probe is disposed at a position shifted from the position overlapping the protrusion of the conductive block.

10,10K Inspection device 20 Object to be inspected 22 Ground electrode 24 Connection electrode 30 Inspection board 32 Ground contact part 34 Contact part 110 Ground probe 110K1 Upper ground probe 110K2 Lower ground probe 112 Ground barrel 112K1 Upper ground barrel 112K2 Lower ground barrel 112a Wide part 114 Ground plunger 114K1 Upper ground plunger 114K2 Lower ground plunger 120, 120K Connection probe 122 Connection barrel 124 First connection plunger 126 Second connection plunger 130, 130K Pin plate 132 Through hole 134 Gap 140, 140K Pin block 142 Convex portion 150, 150K Retainer 160, 160K Gland insertion hole 162, 162K Large diameter hole 164, 164K Small diameter hole 166, 166K Taper hole 170 Connection insertion hole

Claims (5)

probe and
an insulating block provided with a first hole through which the probe is inserted; and a second hole communicating with the first hole through which the probe is inserted and having a diameter smaller than the diameter of the first hole;
Equipped with
An inspection device, wherein the ratio of the thickness of the insulating block to the depth of the first hole is 1.40 or less. further comprising a conductive block through which the probe is inserted and which overlaps the insulating block,
The inspection device according to claim 1, wherein after the probe is inserted into the conductive block, the probe is inserted into the first hole and the second hole. probe and
a conductive block through which the probe is inserted;
Equipped with
An inspection device, wherein the conductive block has a convex portion that contacts a test substrate. further comprising an insulating block provided with a through hole through which the convex portion passes,
The inspection device according to claim 3, wherein at least a portion of the surface of the insulating block on the side where the inspection board is located faces the inspection board with a gap interposed therebetween. The inspection device according to claim 3 or 4, wherein the probe is arranged at a position overlapping the convex portion of the conductive block.

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