JP5193200B2 - Conductive contact holder and conductive contact unit - Google Patents

Description

  The present invention relates to a conductive contact holder and a conductive contact unit for accommodating a conductive contact used for electrical inspection of a circuit structure such as a semiconductor integrated circuit.

  When conducting electrical inspection of a semiconductor integrated circuit such as an IC chip, a conductive material that accommodates a plurality of conductive contacts in a predetermined position corresponding to the installation pattern of the external connection electrodes of the semiconductor integrated circuit. A contact unit is used. The conductive contact unit includes a conductive contact holder formed using an insulating member to accommodate a plurality of conductive contacts.

  By the way, recent semiconductor integrated circuits have a structure that operates by an electrical signal (high frequency signal) having a high frequency of about several hundred megahertz (MHz) to several hundred gigahertz (GHz) in order to realize high-speed arithmetic processing. Accordingly, high integration and miniaturization of semiconductor integrated circuits have been remarkably advanced. In the following Patent Documents 1 and 2, technologies that can cope with the inspection of a semiconductor integrated circuit having such characteristics are disclosed.

JP 2001-99889 A Japanese Patent Laying-Open No. 2005-49163

  However, in the above-described prior art, since a countermeasure against crosstalk between the conductive contacts that transmit signals is not sufficiently taken, the loss of the transmission signal between the inspection target and the circuit structure is large. There was a problem with the electrical characteristics of the unit.

  The present invention has been made in view of the above, and an object of the present invention is to provide a conductive contact holder and a conductive contact unit that have less transmission signal loss and excellent electrical characteristics.

  In order to solve the above-described problems and achieve the object, the conductive contact holder according to the present invention performs input / output of electrical signals between the different circuit structures by contacting both ends of the conductive contact holders respectively. A conductive contact holder for accommodating a plurality of conductive contacts, which is made of an insulating material, and stores and holds the conductive contacts in a state in which both ends of the conductive contacts protrude outward. And a conductive block member formed of a conductive material, having a substantially columnar shape having two bottom surfaces parallel to each other, and held by the insulating holder member, the conductive block member comprising the two Each of the bottom surfaces is exposed from one of two surfaces that project both ends of the conductive contact member, of the surface of the insulating holder member.

  The conductive contact holder according to the present invention is the conductive contact holder according to the present invention, wherein the insulating holder member is formed of a first and a second holder member each having a plate shape and laminated in a plate thickness direction. The functional block member is sandwiched between the first and second holder members in the plate thickness direction.

  Further, in the conductive contact holder according to the present invention, in the above invention, the first holder member has a first opening that penetrates in the plate thickness direction and exposes one bottom surface of the conductive block member. The second holder member has a second opening that penetrates in the plate thickness direction and exposes the other bottom surface of the conductive block member, and the first and second openings are the conductive block member. The area of the opening surface on the side where the bottom surface is exposed is smaller than the area of the opening surface on the side opposite to the opening surface.

  In the conductive contact holder according to the present invention, in the above invention, the conductive block member has a substantially columnar main body part and one of the two bottom surfaces, and the main body part extends from the main body part. A substantially columnar first protrusion protruding in the height direction and the other of the two bottom surfaces, and a substantially columnar second protruding from the main body in a direction opposite to the direction in which the first protrusion protrudes. And a cross-sectional area of the main body in a plane parallel to the two bottom surfaces is larger than an area of the two bottom surfaces.

  In the conductive contact holder according to the present invention, the conductive block member is a first block member exposed from the first opening and a second block member exposed from the second opening. And a connecting means for connecting the first and second block members so as to be relatively movable, and a guide means for guiding a relative moving direction of the first block member and the second block member. It is characterized by that.

  Further, in the conductive contact holder according to the present invention, in the above invention, the first block member has a first body portion having a substantially columnar shape and one of the two bottom surfaces, and A substantially columnar first protrusion projecting in the height direction of the first main body, and the second block member has a substantially columnar shape, the height direction being the height direction of the first main body. A second main body portion that coincides with the other bottom surface, and a substantially columnar shape that protrudes from the second main body portion in a direction opposite to the direction in which the first protrusion protrudes from the first main body portion. And a cross-sectional area of the first and second main body portions in a plane parallel to the two bottom surfaces is larger than an area of the two bottom surfaces.

  Moreover, the conductive contact holder according to the present invention is characterized in that, in the above invention, the plurality of conductive contacts are arranged along an outer periphery of a side surface of the conductive block member.

  Further, the conductive contact holder according to the present invention is the above-described invention, wherein the conductive block member has an insertion hole for inserting and holding a ground conductive contact for supplying a ground potential to each circuit structure. It is characterized by having.

  A conductive contact unit according to the present invention includes the conductive contact holder according to any one of the above inventions, and a plurality of the conductive contacts accommodated in the insulating holder member. To do.

  Moreover, the conductive contact unit according to the present invention is characterized in that, in the above invention, the plurality of conductive contacts are arranged along an outer periphery of a side surface of the conductive block member.

  Moreover, the conductive contact unit according to the present invention is the insertion hole in the above invention, wherein the conductive block member is inserted and held through an earth conductive contact for supplying a ground potential to each circuit structure. It is characterized by having.

  According to the present invention, an insulating holder member that holds a conductive contact that inputs and outputs an electric signal between different circuit structures, and two surfaces that are held by the insulating holder member and are opposite to each other are insulative. A strong ground can be formed around the conductive contact by providing the conductive block member exposed from the surface of the holder member that protrudes both ends of the conductive contact. Therefore, it is possible to provide a conductive contact holder and a conductive contact unit that have little loss of transmission signal and excellent electrical characteristics.

FIG. 1 is an exploded perspective view showing a configuration of a conductive contact unit according to Embodiment 1 of the present invention. FIG. 2 is a partial cross-sectional view showing a configuration of a main part of the conductive contact unit according to Embodiment 1 of the present invention. FIG. 3 is a diagram showing a state at the time of inspection using the conductive contact unit according to Embodiment 1 of the present invention. FIG. 4 is an exploded perspective view showing the configuration of the conductive contact unit according to Embodiment 2 of the present invention. FIG. 5 is a partial cross-sectional view showing a configuration of a main part of the conductive contact unit according to Embodiment 2 of the present invention. FIG. 6 is a diagram showing a state at the time of inspection using the conductive contact unit according to Embodiment 2 of the present invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1, 11 Conductive contact unit 2, 12 Conductive contact 3, 8 Conductive contact holder 4 1st holder member 5 2nd holder member 6, 9 Conductive block member 6a Main-body part 6b, 91b 1st protrusion part 6c, 92b Second projection 7 Screw 21, 121 First plunger 21a, 22a, 121a, 122a Tip 21b, 22b, 121b, 122b Flange 21c, 22c, 121c, 122c Boss 21d, 22d, 121d, 122d End portion 22, 122 Second plunger 23, 93, 123 Spring member 23a, 123a Close winding portion 23b, 123b Coarse winding portion 41 First opening portion 51 Second opening portion 41a, 42a, 51a, 52a, 911a, 921a Small diameter portion 41b, 42b, 51b, 52b, 911b, 921b Large diameter portion 42, 52, 91 DESCRIPTION OF SYMBOLS 1, 921 Insertion hole 43, 53 Screw hole 91 1st block member 91a 1st main body part 92 2nd block member 92a 2nd main body part 94 Guide member 100 Semiconductor integrated circuit 101, 201 Connection electrode 102, 202 Ground electrode 200 Circuit Substrate 912, 913, 922, 923 Recess

  The best mode for carrying out the present invention (hereinafter referred to as “embodiment”) will be described below with reference to the accompanying drawings. It should be noted that the drawings are schematic, and the relationship between the thickness and width of each part, the ratio of the thickness of each part, and the like may be different from the actual ones. Of course, there may be included portions having different dimensional relationships and ratios.

(Embodiment 1)
FIG. 1 is an exploded perspective view showing a configuration of a conductive contact unit according to Embodiment 1 of the present invention. FIG. 2 is a partial cross-sectional view showing a configuration of a main part of the conductive contact unit according to the first embodiment. A conductive contact unit 1 shown in FIGS. 1 and 2 is an apparatus for inspecting electrical characteristics of a predetermined circuit structure typified by a semiconductor integrated circuit such as an IC chip. The conductive contact unit 1 is formed using a conductive material, and a plurality of conductive contacts 2 that transmit and receive electrical signals between a semiconductor integrated circuit to be inspected and a circuit board on which the inspection circuit is mounted. And a conductive contact holder 3 for accommodating and holding the plurality of conductive contacts 2 in a predetermined pattern.

  The conductive contact holder 3 is formed in a plate shape using an insulating material such as a synthetic resin material having a high insulating property, and the first holder member 4 and the second holder member are stacked along the plate thickness direction. 5 and a conductive block member 6 that is formed using a conductive material, has a substantially columnar shape having two bottom surfaces parallel to each other, and is sandwiched between the first holder member 4 and the second holder member 5. The first holder member 4 and the second holder member 5 constitute an insulating holder member.

  The first holder member 4 is for fastening the first holder 41 that exposes one surface of the conductive block member 6, the plurality of insertion holes 42 through which the conductive contact 2 is inserted, and the second holder member 5. And a plurality of screw holes 43 into which the screws 7 are screwed. The first opening 41, the insertion hole 42, and the screw hole 43 respectively penetrate the first holder member 4 along the thickness direction of the first holder member 4.

  In the first opening 41, the area of the opening surface on the side facing the inspection object (the upper surface side in FIGS. 1 and 2) is smaller than the area of the opening surface on the side facing the second holder member 5. For this reason, the 1st opening part 41 has comprised the stepped hole shape which consists of the small diameter part 41a and the large diameter part 41b, as shown in FIG.

  The insertion hole 42 has a stepped hole shape composed of a small diameter portion 42a and a large diameter portion 42b. The small diameter portion 42 a has an opening on the side facing the inspection target (the upper surface side in FIGS. 1 and 2), while the large diameter portion 42 b has an opening on the side facing the second holder member 5.

  The second holder member 5 has a second opening 51 that exposes a surface different from the surface exposed from the first holder member 4 among the surfaces of the conductive block member 6, and the insertion holes 42 of the first holder member 4. A plurality of insertion holes 52 through which the conductive contact 2 is inserted, and screw holes 53 that are in communication with any of the screw holes 43 of the first holder member 4 and into which the screws 7 are screwed. .

  The opening area of the second opening 51 on the side facing the circuit board (the lower surface side in FIGS. 1 and 2) is smaller than the opening area on the side facing the first holder member 4. For this reason, the 2nd opening part 51 has comprised the stepped hole shape which consists of the small diameter part 51a and the large diameter part 51b, as shown in FIG. The opening surface of the large diameter portion 51 b has the same shape as the opening surface of the large diameter portion 41 b of the first opening portion 41.

  The insertion hole 52 has a stepped hole shape composed of a small diameter portion 52a and a large diameter portion 52b. The small diameter portion 52 a has an opening on the side facing the circuit board (the lower surface side in FIGS. 1 and 2), while the large diameter portion 52 b has an opening on the side facing the first holder member 4. The diameter of the large diameter part 52b is the same as the diameter of the large diameter part 42b.

  In FIG. 1, only one conductive contact 2 and screw 7 are representatively shown.

  As an insulating material constituting the first holder member 4 and the second holder member 5, a synthetic resin material having good insulating properties can be used. In addition, as the insulating material, a resin material having good slidability, a machinable ceramic, Teflon (registered trademark), or the like can be used.

  When forming an opening, an insertion hole, and a screw hole in the first holder member 4 and the second holder member 5, any one of drilling, etching, and punching is performed on the insulating material that forms the base material. Or processing using any one of a laser, an electron beam, an ion beam, a wire discharge, or the like.

  Next, the configuration of the conductive block member 6 will be described. The conductive block member 6 includes a main body 6a having a rectangular parallelepiped shape, a first protrusion 6b having a rectangular parallelepiped protruding from the main body 6a in the height direction of the main body 6a, and a first protrusion 6b from the main body 6a. A second projecting portion 6c having a rectangular parallelepiped shape projecting in a direction opposite to the projecting direction. The cross-sectional area of the main body 6a in a plane parallel to the two bottom surfaces of the conductive block member 6 is larger than the area of the two bottom surfaces. In a state where the conductive block member 6 is sandwiched between the first holder member 4 and the second holder member 5, the bottom surface (upper surface in FIG. 2) of the first protrusion 6 b is the first opening 41 of the first holder member 4. On the other hand, the bottom surface (the lower surface in FIG. 2) of the second protrusion 6 c is exposed from the second opening 51 of the second holder member 5. In addition, the main-body part 6a, the 1st projection part 6b, and the 2nd projection part 6c should just have comprised substantially column shape, and may have shapes other than a rectangular parallelepiped.

  The areas of the two bottom surfaces of the conductive block member 6 are smaller than the area of the opening surface of the small diameter portion 41 a of the first opening portion 41 and the area of the opening surface of the small diameter portion 51 a of the second opening portion 51. On the other hand, the cross-sectional area of the main body portion 6 a in a plane parallel to the two bottom surfaces of the conductive block member 6 is the area of the opening surface of the small diameter portion 41 a of the first opening portion 41 and the small diameter portion 51 a of the second opening portion 51. It is larger than the area of the opening surface. Therefore, in a state where the conductive contact unit 1 is assembled, the conductive block member 6 is prevented from being detached by the small diameter portion 41 a of the first opening 41 and the small diameter portion 51 a of the second opening 51.

  The thickness (height) of the conductive block member 6 in the direction in which the first protrusion 6b and the second protrusion 6c protrude from the main body 6a is the thickness of the insulating holder member (of the first holder member 4). The sum of the plate thickness and the plate thickness of the second holder member 5).

  As shown in FIG. 2, the conductive block member 6 is sandwiched between the first holder member 4 and the second holder member 5 along the plate thickness direction (vertical direction in FIG. 2) of each holder member. It can move only a minute distance. In order to enable this movement, a minute gap is also provided between the side surface of the conductive block member 6 and the inner surfaces of the first opening 41 and the second opening 51. Thus, since the conductive block member 6 is movable with respect to the insulating holder member, the conductive block member 6 can be properly aligned with the external circuit structure at the time of inspection.

  In addition to the function of improving the strength of the conductive contact holder 3, the conductive block member 6 is radiated from the electromagnetic wave generated and emitted when an electric signal passes through the conductive contact 2 or from the outside. It has a function to prevent electromagnetic waves from reaching other conductive contacts 2 (electromagnetic wave shielding function).

  In order for the conductive block member 6 to sufficiently exhibit the electromagnetic wave shielding function, it is more preferable that the volume specific resistance of the conductive material constituting the conductive block member 6 is as small as about 1 to 100 μΩ · cm. In addition, the conductive material constituting the conductive block member 6 is preferably usable under various temperature conditions at the time of inspection. In view of such a point, the conductive material constituting the conductive block member 6 is a conductive material having high strength and heat resistance and a small thermal expansion coefficient, such as Invar material and Kovar material (registered trademark). The low thermal expansion metal, semiconductor, ceramic, glass, etc. are suitable.

  Next, the configuration of the conductive contact 2 will be described with reference to FIG. The conductive contact 2 is a signal conductive contact that transmits and receives electrical signals, and includes a first plunger 21 having a sharp end and a second plunger 22 having a sharp end protruding in a direction opposite to the first plunger 21. , And a spring member 23 that connects the first plunger 21 and the second plunger 22.

  The first plunger 21 protrudes in the opposite direction to the tip 21a via the tip 21a, the flange 21b having a larger diameter than the tip 21a, and the flange 21b, and is smaller than the diameter of the flange 21b. In addition, a cylindrical shape having a slightly larger diameter than the inner diameter of the spring member 23 is formed, and a boss portion 21c into which the end of the spring member 23 is press-fitted, and a diameter smaller than the diameter of the boss portion 21c and smaller than the inner diameter of the spring member 23. And a base end portion 21d extending from the boss portion 21c to the opposite side of the flange portion 21b, and has an axisymmetric shape with respect to the central axis in the longitudinal direction. The first plunger 21 is prevented from coming off from the first holder member 4 by the flange portion 21b coming into contact with the stepped portion that forms the boundary between the small diameter portion 42a and the large diameter portion 42b of the insertion hole 42.

  The second plunger 22 protrudes in the opposite direction to the distal end portion 22a through the flange portion 22b, the flange portion 22b having a diameter larger than the diameter of the distal end portion 22a, and is smaller than the diameter of the flange portion 22b. In addition, a cylindrical shape having a slightly larger diameter than the inner diameter of the spring member 23 is formed. The boss 22c into which the end of the spring member 23 is press-fitted, and a diameter smaller than the diameter of the boss 22c and smaller than the inner diameter of the spring member 23. And has a base end portion 22d extending from the boss portion 22c to the opposite side of the flange portion 22b, and has an axisymmetric shape with respect to a central axis parallel to the longitudinal direction. The second plunger 22 is prevented from being detached from the second holder member 5 by the flange portion 22b coming into contact with the stepped portion that forms the boundary between the small diameter portion 52a and the large diameter portion 52b of the insertion hole 52.

  The spring member 23 is a coil spring having a uniform diameter, and the side attached to the first plunger 21 is a tightly wound part 23a, while the side attached to the second plunger 22 is a coarsely wound part 23b. The end portion of the tightly wound portion 23a is in contact with the flange portion 21b, while the end portion of the coarsely wound portion 23b is in contact with the flange portion 22b. When a load is applied to the conductive contact 2, the spring member 23 is bent and at least a part of the tightly wound portion 23 a comes into contact with the proximal end portion 22 d of the second plunger 22. Thereby, electrical conduction is realized by the shortest path that sequentially passes through the first plunger 21, the tightly wound portion 23 a of the spring member 23, and the second plunger 22.

  A plurality of conductive contacts 2 having the above-described configuration are arranged so as to surround the conductive block member 6 along the outer periphery of the side surface of the conductive block member 6.

  FIG. 3 is a diagram showing a state at the time of inspection using the conductive contact unit 1. In FIG. 3, the semiconductor integrated circuit 100 to be inspected is mounted on the first holder member 4 side of the conductive contact unit 1. The connection electrode 101 of the semiconductor integrated circuit 100 is in contact with the tip 21 a of the first plunger 21 of the conductive contact 2, while the ground electrode 102 of the semiconductor integrated circuit 100 is of the first protrusion 6 b of the conductive block member 6. Make surface contact with the surface.

  On the other hand, the circuit board 200 connected to the signal processing circuit which produces | generates the signal for a test | inspection is attached to the surface at the side of the 2nd holder member 5 of the electroconductive contactor unit 1. The connection electrode 201 of the circuit board 200 is in contact with the second plunger 22 of the conductive contact 2, while the ground electrode 202 of the circuit board 200 is in surface contact with the surface of the second protrusion 6 c of the conductive block member 6. To do.

  As described above, when the semiconductor integrated circuit 100 is inspected using the conductive contact unit 1, the surface of the first protrusion 6 b is in surface contact with the ground electrode 102 of the semiconductor integrated circuit 100, 2 Since the surface of the protrusion 6 c is in surface contact with the ground electrode 202 of the circuit board 200, a strong ground is formed around the conductive contact 2. As a result, crosstalk between adjacent conductive contacts 2 can be reduced, and loss of signals transmitted between the semiconductor integrated circuit 100 and the circuit board 200 can be suppressed, and the conductive contact holder 3 can be improved.

  According to the first embodiment of the present invention described above, the insulating holder member that holds the conductive contact that performs input and output of electric signals between different circuit structures, and the insulating holder member that is held by the insulating holder member, are mutually contradictory. The two surfaces are provided with a conductive block member exposed from the surface of the surface of the insulating holder member that protrudes both ends of the conductive contact member, thereby providing a strong force around the conductive contact member. A ground can be formed. Therefore, it is possible to provide a conductive contact holder and a conductive contact unit that have little loss of transmission signal and excellent electrical characteristics.

(Embodiment 2)
FIG. 4 is an exploded perspective view showing the configuration of the conductive contact unit according to Embodiment 2 of the present invention. FIG. 5 is a partial cross-sectional view showing the configuration of the main part of the conductive contact unit according to the second embodiment. The conductive contact unit 11 shown in FIGS. 4 and 5 has the same configuration as that of the conductive contact unit 1 according to Embodiment 1 except for the configuration of the conductive block member. For this reason, in FIG. 4 and FIG. 5, about the same component as the component of the electroconductive contactor unit 1, the same code | symbol as FIG. 1 and FIG. 2 is attached | subjected.

  Hereinafter, the configuration of the conductive contact holder 8 according to the second embodiment will be described. The conductive contact holder 8 is formed using a first holder member 4, a second holder member 5, and a conductive material and has a substantially columnar shape having two bottom surfaces parallel to each other. And a conductive block member 9 sandwiched by the second holder member 5.

  The conductive block member 9 includes a first block member 91 exposed from the first opening 41 of the first holder member 4, a second block member 92 exposed from the second opening 51 of the second holder member 5, A plurality of spring members 93 (connecting means) for connecting the first block member 91 and the second block member 92 so as to be relatively movable and biasing each other in the plate thickness direction, the first block member 91 and the second block member And a plurality of pin-shaped guide members 94 (guide means) for guiding the relative movement direction with respect to 92.

  The first block member 91 has a first main body portion 91a having a rectangular parallelepiped shape and one of two bottom surfaces of the conductive block member 9, and extends from the first main body portion 91a in the height direction of the first main body portion 91a. And a first projecting portion 91b that forms a projecting rectangular parallelepiped. The cross-sectional area of the first main body 91a in a plane parallel to the two bottom surfaces of the conductive block member 9 is larger than the areas of the two bottom surfaces. In addition, the 1st main-body part 91a and the 1st projection part 91b should just have comprised substantially columnar shape, and may have shapes other than a rectangular parallelepiped.

  The second block member 92 has a rectangular parallelepiped shape, and has a second main body portion 92a whose height direction matches the height direction of the first main body portion 91a, and the other of the two bottom surfaces of the conductive block member 9. The first protrusion 91b includes a second protrusion 92b that forms a rectangular parallelepiped protruding from the second body 92a in a direction opposite to the direction protruding from the first body 91a. The cross-sectional area of the second main body 92a in a plane parallel to the two bottom surfaces of the conductive block member 9 is larger than the area of the two bottom surfaces. Also here, the 2nd main-body part 92a and the 2nd projection part 92b should just have comprised substantially columnar shape, and may have shapes other than a rectangular parallelepiped.

  The areas of the two bottom surfaces of the conductive block member 9 are smaller than the area of the opening surface of the small diameter portion 41 a of the first opening portion 41. On the other hand, the cross-sectional area of the first main body portion 91 a in a plane parallel to the two bottom surfaces of the conductive block member 9 is larger than the area of the opening surface of the small diameter portion 41 a of the first opening portion 41. Further, the area of the two bottom surfaces of the conductive block member 9 is smaller than the area of the opening surface of the small diameter portion 51 a of the second opening portion 51. On the other hand, the cross-sectional area of the second main body portion 92 a in a plane parallel to the two bottom surfaces of the conductive block member 9 is larger than the area of the opening surface of the small diameter portion 51 a of the second opening portion 51. Therefore, in a state where the conductive contact unit 11 is assembled, the conductive block member 9 is prevented from being detached by the small diameter portion 41 a of the first opening 41 and the small diameter portion 51 a of the second opening 51.

  The conductive block member 9 accommodates and holds a conductive contact 12 (ground conductive contact) for supplying a ground potential. Here, the conductive contact 12 has the same configuration as the conductive contact 2. That is, the conductive contact 12 includes a first plunger 121, a second plunger 122, and a spring member 123. The first plunger 121 has a distal end portion 121a, a flange portion 121b, a boss portion 121c, and a proximal end portion 121d, and the second plunger 122 has a distal end portion 122a, a flange portion 122b, a boss portion 122c, and a proximal end portion 122d. The spring member 123 has a tightly wound portion 123a and a coarsely wound portion 123b.

  The first block member 91 is provided with an insertion hole 911 through which the conductive contact 12 is inserted. The insertion hole 911 is slightly larger than the diameter of the tip 121a of the first plunger 121 and smaller in diameter than the flange 121b, and has a larger diameter than the flange 121b. 911b. On the other hand, the second block member 92 is provided with an insertion hole 921 through which the conductive contact 12 is inserted. The insertion hole 921 is slightly larger than the diameter of the distal end portion 122a of the second plunger 122, and has a smaller diameter portion 921a having a diameter smaller than the diameter of the flange portion 122b, and a large diameter portion having a diameter larger than the diameter of the flange portion 122b. 921b. The large diameter portion 911b and the large diameter portion 921b have the same diameter.

  The first plunger 121 of the conductive contact 12 is prevented from coming off from the first block member 91 by the flange portion 121b coming into contact with the stepped portion that forms the boundary between the small diameter portion 911a and the large diameter portion 911b of the insertion hole 911. ing. Further, the second plunger 122 of the conductive contact 12 comes out of the second block member 92 by the flange portion 122b coming into contact with the stepped portion that forms the boundary between the small diameter portion 921a and the large diameter portion 921b of the insertion hole 921. It has been stopped.

  In the first main body portion 91a of the first block member 91, a recess 912 that houses the spring member 93 and a recess 913 that houses the guide member 94 are formed at predetermined positions. The second main body 92a of the second block member 92 is formed with a recess 922 for accommodating the spring member 93 and a recess 923 for accommodating the guide member 94 at predetermined positions.

  The guide member 94 is fixed to the recess 923, and when the distance between the first block member 91 and the second block member 92 in the plate thickness direction is shortened due to external force from the semiconductor integrated circuit 100 and the circuit board 200 during inspection. The distal end portion of the guide member 94 that is not fixed guides the relative movement direction of the two while being inserted deeply into the concave portion 913. The guide member 94 is assumed to be a pin type, but may have another shape. Further, the guide member 94 may be fixed to the recess 913 of the first main body 91a.

  As shown in FIG. 5, the conductive block member 9 is sandwiched between the first holder member 4 and the second holder member 5 along the plate thickness direction (vertical direction in FIG. 5) of each holder member. It can move only a minute distance. In order to enable this movement, a minute gap is also formed between the side surface of the first block member 91 and the inner surface of the first opening 41 and between the second block member 92 and the inner surface of the second opening 51. Is provided. Thus, since the conductive block member 9 is movable with respect to the insulating holder member, the conductive block member 9 can be properly aligned with the external circuit structure at the time of inspection.

  The first block member 91 and the second block member 92 are urged by a spring member 93 in a direction protruding outward along the plate thickness direction of the insulating holder member. The thickness of the conductive block member 9 in the direction in which the conductive block member 9 is urged by the spring member 93 is the plate thickness of the insulating holder member (the first holder member 4) regardless of the stretched state of the spring member 93. And the total thickness of the second holder member 5).

  FIG. 6 is a view showing a state at the time of inspection using the conductive contact unit 11 having the above configuration. In FIG. 6, the semiconductor integrated circuit 100 is mounted on the first holder member 4 side of the conductive contact unit 11. The connection electrode 101 of the semiconductor integrated circuit 100 is in contact with the tip 21 a of the first plunger 21 of the conductive contact 2, while the ground electrode 102 of the semiconductor integrated circuit 100 is the first protrusion 91 b of the first block member 91. The surface and the tip 121 a of the first plunger 121 of the conductive contact 12 come into contact.

  In contrast, the circuit board 200 is attached to the surface of the conductive contact unit 11 on the second holder member 5 side. The connection electrode 201 of the circuit board 200 is in contact with the second plunger 22 of the conductive contact 2, while the ground electrode 202 of the circuit board 200 is the surface of the second protrusion 92 b of the second block member 92 and the conductive contact. It contacts with the front-end | tip part 122a of the 12th 2nd plunger 122. FIG.

  As described above, when the semiconductor integrated circuit 100 is inspected using the conductive contact unit 11, the surface of the first protrusion 91 b is in surface contact with the ground electrode 102 of the semiconductor integrated circuit 100. 2 Since the surface of the protruding portion 92 b is in surface contact with the ground electrode 202 of the circuit board 200, a strong ground is formed around the conductive contact 2.

  In the conductive contact holder 8, since the conductive block member 9 holds the conductive contact 12 for grounding, the surface of the ground electrode 102 of the semiconductor integrated circuit 100 and the surface of the first protrusion 91b Even when there is a mismatch between the front surface 121a of the first plunger 121 and the ground electrode, even when there is a mismatch between the ground electrode 202 of the circuit board 200 and the surface of the second protrusion 92b. 102, and the tip 122a of the second plunger 122 and the ground electrode 202 can be brought into contact with each other. In this case, when a load is applied to the spring member 123 of the conductive contact 12, the spring member 123 bends and directly contacts the conductive block member 9, and the potential of the conductive contact 12 and the potential of the conductive block member 9. (Earth potential) becomes equal, so there is a mismatch between the surface of the ground electrode 102 and the surface of the first protrusion 91b, or a mismatch between the surface of the ground electrode 202 and the second protrusion 92b. Even if there is, a strong ground is formed around the conductive contact 2.

  Note that the volume of the conductive contact 12 held by the conductive block member 9 as the ground conductive contact can be ignored with respect to the volume of the conductive block member 9 and is given to the conductive block member 9. The fluctuation value of the potential of the conductive block member 9 caused by the generated electric charge can be regarded as almost zero. For this reason, the potential of the conductive block member 9 is stably maintained at the ground potential.

  According to the second embodiment of the present invention described above, the insulating holder member that holds the conductive contact that inputs and outputs electrical signals between different circuit structures, and the insulating holder member that is held by the insulating holder member and are mutually contradictory. The two surfaces are provided with a conductive block member exposed from the surface of the surface of the insulating holder member that protrudes both ends of the conductive contact member, thereby providing a strong force around the conductive contact member. A ground can be formed. Therefore, similarly to the first embodiment, it is possible to provide a conductive contact holder and a conductive contact unit that have less transmission signal loss and excellent electrical characteristics.

  Further, according to the second embodiment, since the conductive block member is configured to receive and hold the conductive contact for supplying the ground potential, the connection between the electrode provided on the surface of the conductive block member and the circuit structure is provided. Even if a mismatch occurs between the electrodes for use, reliable contact can be achieved. Therefore, according to the second embodiment, a strong ground can be reliably formed regardless of the surface state of the circuit structure to be contacted.

(Other embodiments)
So far, the first and second embodiments have been described in detail as the best mode for carrying out the present invention, but the present invention should not be limited by these embodiments. For example, an insertion hole that accommodates the conductive contact 12 may be formed in the conductive block member 6 of the first embodiment, and the conductive contact 12 may be accommodated in the insertion hole. Further, the conductive block member 9 of the second embodiment may be configured such that the insertion hole 911 is closed and the grounding conductive contact 12 is not accommodated.

  Moreover, you may apply what has a structure other than the above as an electroconductive contactor. Further, the shape and configuration of the signal conductive contact and the ground conductive contact may be different.

  In the above description, it is assumed that the conductive contact unit according to the present invention is used for inspection of a semiconductor integrated circuit. However, it is used for inspection of a package substrate mounted with a semiconductor chip or a wafer level as an inspection target. Of course, it is applicable also to a high-density probe unit.

  Thus, the present invention can include various embodiments and the like not described herein, and various design changes and the like can be made without departing from the technical idea specified by the claims. It is possible to apply.

  As described above, the conductive contact holder and the conductive contact unit according to the present invention are useful for electrical inspection of a semiconductor integrated circuit such as an IC chip, and in particular, use high-frequency electrical signals. Suitable for performing inspections.

Claims (12)

A conductive contact holder for accommodating a plurality of conductive contacts for performing input / output of electrical signals between the different circuit structures by contacting both ends with different circuit structures,
Each is made of a plate-like insulating material, and consists of first and second holder members stacked in the thickness direction. Each conductive contact is housed and held in a state of projecting to the outside. An insulating holder member,
A conductive block member formed of a conductive material, having a substantially columnar shape having two bottom surfaces parallel to each other, and sandwiched in the plate thickness direction by the first and second holder members ;
With
The conductive block member is
Each of the two bottom surfaces is exposed from one of two surfaces that project both ends of the conductive contact from the surface of the insulating holder member, respectively. . The first holder member has a first opening that penetrates in the plate thickness direction and exposes one bottom surface of the conductive block member;
The second holder member has a second opening that penetrates in the plate thickness direction and exposes the other bottom surface of the conductive block member,
The first and second openings are
The area of the opening surface on the side to expose the bottom surface of the conductive block member is conductive contact holder according to claim 1, wherein a is smaller than the area of the opening surface of the opening face the opposite side. The conductive block member is
A main body having a substantially columnar shape;
A first columnar protrusion having one of the two bottom surfaces and protruding from the main body in the height direction of the main body;
A second protrusion having a substantially columnar shape that has the other of the two bottom surfaces and protrudes in a direction opposite to the direction in which the first protrusion protrudes from the main body;
With
The conductive contact holder according to claim 2 , wherein a cross-sectional area of the main body in a plane parallel to the two bottom surfaces is larger than an area of the two bottom surfaces. The conductive block member is
A first block member exposed from the first opening;
A second block member exposed from the second opening;
Connecting means for connecting the first and second block members to be relatively movable;
Guide means for guiding the relative movement direction of the first block member and the second block member;
The conductive contact holder according to claim 2, further comprising: The first block member is
A first main body having a substantially columnar shape;
A first protrusion having a substantially columnar shape that has one of the two bottom surfaces and protrudes from the first main body in the height direction of the first main body;
Have
The second block member is
A second body portion having a substantially columnar shape, the height direction of which coincides with the height direction of the first body portion;
A second protrusion having a substantially columnar shape that protrudes from the second main body in a direction opposite to the direction in which the first protrusion protrudes from the first main body, the other of the two bottom surfaces;
Have
5. The conductive contact holder according to claim 4 , wherein a cross-sectional area of the first and second main body portions in a plane parallel to the two bottom surfaces is larger than an area of the two bottom surfaces. The plurality of conductive contacts are:
Conductive contact holder according to any one of claims 1-5, characterized in that disposed along the outer periphery of the side surface of the conductive block member. The conductive block member is
The conductive contact holder according to any one of claims 1 to 5 , further comprising an insertion hole for inserting and holding a ground conductive contact for supplying a ground potential to each circuit structure. . The plurality of conductive contacts are:
The conductive contact holder according to claim 7 , wherein the conductive contact holder is disposed along an outer periphery of a side surface of the conductive block member. The conductive contact holder according to any one of claims 1 to 5 ,
A plurality of the conductive contacts housed in the insulating holder member;
A conductive contact unit comprising: The plurality of conductive contacts are:
The conductive contact unit according to claim 9 , wherein the conductive contact unit is disposed along an outer periphery of a side surface of the conductive block member. The conductive block member is
10. The conductive contact unit according to claim 9, further comprising an insertion hole for inserting and holding a ground conductive contact for supplying a ground potential to each circuit structure. The plurality of conductive contacts are:
The conductive contact unit according to claim 11 , wherein the conductive contact unit is disposed along an outer periphery of a side surface of the conductive block member.

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