200902985 六、發明說明： 【發明所屬之技術領域】 體電路等電 性觸頭保持 路構 器及 本發明係關於用以收納於半導體積 造的電性檢查所使用之導電性觸頭之導電 導電性觸頭單元。 【先前技術】 於進行ic晶片等半導體積體電路的電性 ^ 使用對應於該半導體積體電路所具有之外部連時，係 設置圖案而將複數個導電性觸頭收納於預定位用電極的 觸頭單元。此導電性觸頭單元為了收納 =導電性 頭，乃具備使賴緣性構件而形成之導電_4電f生觸 ^ ^ + 电改觸碩保持器。 一而，近年來的半導體積體電路，為了 、 ^ 處理，逐漸具備以具有數百個百萬赫兹（ΜΉζ)㈤速運异 十億赫兹（GHz)的高頻率數之電性訊號（高2頻3 = 進行動作之構造，並且半導體積體電路之高積讀化^小型 化亦顯著地進行。於下列專利文獻i及2中，係揭示亦可 對應於具有該種特性之半導體積體電路的檢查之技術。 專利文獻1 :日本特開2001-99889號公報 專利文獻2 :日本特開2005-49163號公報 【發明内容】 (發明所欲解決之課題） 然而，於上述的先前技術中，由於未充分施行傳送訊 號之導電性觸頭之間的串擾對策’因此存在檢查對象與電 路構造之間之傳送訊號的損失變大，且導電性觸頭單元出 320343 3 200902985 現電性特性的問題。 本發明係鑒於上述問題而創作出之發明，目的在於提 供一種傳送訊號的損失較小’且電性特性良好之導電性觸 頭保持器及導電性觸頭單元。 (用以解決課題之手段） 為了解決上述課題並達成目的，本發明之導電性觸頭 保持器為收納複數個導電性觸頭，該導電性觸頭係透過其 ^端部分別與不同之電路構造接觸而於前述不同電路構造 =進行電性喊的輸出人，其特徵為具備:絕緣性保持器 係由絕緣性材料所形成，並且以使各導電性觸頭的 構:，外#突出之狀態予以收納並保持；及導電性境體 個底而係由導電性材料所形成，形成為具有互相平行的兩 持;前域，並且藉由前述絕緣性保持器構件保 從前述構件的前述兩個底面的各個底面，係 的兩端部件的表面中分別讓前述導電性觸頭 此：! 表面中的任-表面露出。 中，前述絕緣頭保持器的特徵於上述發明 厚度方向之第1及第°冓件係由分別形成為板狀且層積於 體構件係藉由前11構件所形成；前述導電性塊 明中 述導電 此外，本發明之㈣轉11構件央持於厚度方向。 Θ之導電性觸頭伴 ，前述第〗保持器構件係：二寺：的特徵，於上述發 歐性_構件之 面通於厚度方向並使前 拜-構件係具有貫通 開口#，剧述 方向並使前述導電性塊 320343 200902985 體構件之另一邊的底面露出之第2.部； 2開口部之使前述導電性機體構件的底 1及第 口面的面積，係小於該開口面的相反側之二： 此外，本發明之導電性觸頭保持器的特徵為:積。 發明中’前述導電性塊體構件係具備：本^:上述 呈柱狀，·略呈柱狀的第！突起部，具 :形成為略 個，且從前述本體部往該本體 古=二固底面的一 =本體:往與前述第1突起部所突起之方向為相二 起；而前述本體部的與前述兩個底面平行之=方向大 積，係大於前述兩個底面的面積。 之剖面 此外，本發明之導電性觸頭保持器 =中:前述導電性塊體構件係具有:從前述^ 路出之第1塊體構件；從前述第2開口 =件;以可相對地移動之方式連結前述^及第2 = 件之連結手段；及用以y導前述第 塊體構件之間的相對移動方向之引導手T構件與前述第2 此外’本發明之導電性觸頭保持器二特 f明中，前述第1塊體構件係具有··形成為略呈柱狀之ί =體部；及具有前述兩個底面的—個，且從 ^ =往該第1本體部的高度方向突起之略呈柱狀的第！突 起部；前述第2壤體構件係具有：形成為略呈柱狀，且高 度方向與前述第i本體部的高度方向—致之第林體部； 及具有前述兩個底面的另一個，且從前述第2本體部，往 320343 200902985 - 與前述第1突起部從前述第〗本體部所突 方向突起之略呈柱狀的第2突起部；前述之方向為相反 部的與前述兩個底面平行之平面之剖面積，/及第2本體 個底面的面積。 係大於前述兩200902985 VI. Description of the Invention: [Technical Field] The body circuit isoelectric contact retention path device and the present invention relate to conductive conduction of a conductive contact for electrical inspection used for semiconductor fabrication Sexual contact unit. [Prior Art] When the semiconductor integrated circuit such as an ic chip is used, when the external connection of the semiconductor integrated circuit is used, a pattern is provided and a plurality of conductive contacts are accommodated in the predetermined electrode. Contact unit. In order to accommodate the = conductive head, the conductive contact unit includes a conductive electric contactor which is formed by the insulating member. In addition, in recent years, semiconductor integrated circuits have been gradually equipped with high-frequency electrical signals with hundreds of millions of Hertz (five) speeds of different billions of Hertz (GHz). Frequency 3 = structure in which the operation is performed, and high-product readout and miniaturization of the semiconductor integrated circuit are also remarkably performed. In the following Patent Documents i and 2, it is disclosed that the semiconductor integrated circuit having such characteristics can also be used. [Patent Document 1] Japanese Laid-Open Patent Publication No. 2001-99889 (Patent Document 2) Japanese Laid-Open Patent Publication No. Hei No. 2005-49163 (Problem to be Solved by the Invention) However, in the above prior art, Since the crosstalk countermeasure between the conductive contacts that transmit the signal is not sufficiently performed, the loss of the transmission signal between the inspection object and the circuit structure becomes large, and the problem of the electrical characteristics of the conductive contact unit is 320343 3 200902985 The present invention has been made in view of the above problems, and an object thereof is to provide a conductive contact holder and conductivity having a small loss of transmission signal and excellent electrical characteristics. Head unit. (Means for solving the problem) In order to solve the above problems and achieve the object, the conductive contact holder of the present invention accommodates a plurality of conductive contacts, and the conductive contacts are respectively transmitted through the ends thereof Different circuit configurations are in contact with each other in the above-mentioned different circuit configuration = an output person who performs electrical shouting, characterized in that the insulating holder is formed of an insulating material and the structure of each conductive contact is: a state in which the protrusion is received and held; and a conductive body is formed by a conductive material, formed to have two holdings parallel to each other; a front field, and the member is protected by the insulating holder member Each of the two bottom surfaces of the two bottom surfaces respectively exposes any of the surfaces of the conductive contacts to the surface of the conductive contact. The insulating head holder is characterized by the thickness direction of the invention. The first and the second members are respectively formed into a plate shape and laminated on the body member by the first 11 members; the conductive blocks are electrically conductive, and the fourth embodiment of the present invention The central direction is in the thickness direction. The conductive contact of the 伴 is the same as the above-mentioned keeper structure: the feature of the two temples, the surface of the above-mentioned European-made member is in the thickness direction and the front-member system is connected. Opening #, the direction of the play and the second portion of the other side of the conductive member 320343 200902985 body member exposed; 2 the opening portion of the conductive body member of the bottom 1 and the first surface of the conductive body member is smaller than In addition, the conductive contact holder of the present invention is characterized in that: the above-mentioned conductive block member is provided with: the above-mentioned columnar shape, and a column slightly The first protrusion portion is formed to be slightly formed, and a body from the main body portion to the bottom surface of the body body is formed to be opposite to the direction in which the first protrusion portion protrudes; The direction of the main body portion parallel to the two bottom surfaces is larger than the area of the two bottom surfaces. Further, in the conductive contact holder of the present invention, the conductive block member has: a first block member that is branched from the path; and a second opening member that is relatively movable And a connecting means for connecting the second member and the second member; and a guiding hand member for guiding the relative moving direction between the first block members and the second conductive member retaining member of the present invention In the second embodiment, the first block member has a body shape which is formed into a columnar shape, and a body having the two bottom faces, and the height from the ^1 to the first body portion The direction of the protrusion is slightly columnar! a second portion of the second body member having a substantially columnar shape and a height direction that is opposite to a height direction of the i-th body portion; and the other of the two bottom surfaces a second columnar portion projecting from the second main body portion to 320343 200902985 - and the first protrusion portion protruding from the first body portion; wherein the direction is the opposite portion and the two bottom surfaces The cross-sectional area of the parallel plane, and / the area of the bottom surface of the second body. The system is larger than the above two
-,…此外’本發明之導電性觸頭保持器的待徵A 孓月尹，複數個前述導電性觸頭係沪為，於上述 件之側面的外周而配置。 别处導電性塊體構 前徵為，於上述 =應接—以 本發明之導電性觸 _ 項發明之導電性觸頭其特徵為具傷 :上述任一 構件之複數個前述導電性觸頭。收納於前逑絕緣性保持器 此外’本發明之導 明中，複數個前述導以=，’於上越發 之側面的外周而配置。 '、別逑‘電性塊體構件 此外’本發明之導電性觸 明令，前述導電性塊體構件係 的特徵為，於上逑發 進行供應接地電位的接地用導電以野各電路構造 插通孔。 導電f生觸項插通邀予以保持之 (發明之效果） 根據本發明，係具借 電路構造間進行電性訊輪出=口件，將在不同 出入之導電性觸頭予以保 320343 200902985 =及導紐㈣構件，賴由此絕錄料㈣件保持， 為相反的兩個表面係從絕緣性保持器構件的表面中使 導電性觸頭的兩端部突出之表面露出，藉此 =邊形成強力的接地。因此，可提供一種傳送訊號 性觸頭單元。 丨之^電_碩保持器及導電 【實施方式】 以下參照附圖，說明用以實施本發明 下稱為「實施形態」）。此外，圖式 = 圭开〜（以 *意各部分之厚度與寬度之 :例等可能與實物有所不同的情形，當然，圖式相:： 間亦可能包含尺寸關係或比例互為不同之产況。 (實施形態1) 月' 第1圖係顯示本發明實施形態 Γ成，分解圖。此外，第_顯示== 觸頭單元之主要部分的構成之部分剖面圖：： =弟2圖所示之導電性觸頭單元“系 卜 半導體積體電路的代表性預定電路構造之電:特= 置。導電性觸頭單元’具備：使用導電性材料所形成= ^作為檢查對象之半導體積體電路與褒载有檢查用電路之 電路基板之間’進行雷姓却％ 電路之 觸頭2;及以預定圖接收傳送之複數個導電性 導電性觸頭保收納亚保持複數個導電性觸頭2之 導電性觸頭保持器3係具潘··各自使用絕緣性較高之 320343 200902985 =成樹脂材等絕緣性材料而形成缺 積而成之第1保持器構件4及第 ^Γ予度方向層 導電性材料所形成’形為具有互相^ 及使用 呈柱狀，並且由第“呆持器構 ：=個底面之略 -以夹持之導電性塊體構件器構件Η 持器構件5係構成絕緣性保持器構件。特4及第2保 邊的表 4 _ 構件6之- 數個插通孔42 . U:部41 ;讓導電性觸頭2插通之複 43，係沿著第1狂心 插通孔42及螺絲孔 持器構件4。 /、、态構件4的厚度方向分別貫通第1保 第對象相對向之—側（第1圖、 構件5相對二：:叫係小於與第2保持器 係形成為如第2圖戶 成之附有階差的孔^ 部化及大徑部^所形 成之孔42係形成為由小#部42a及大徑部42b所形 向之二二2㈣°小徑部42a#於與檢查對象相對 圖、第2圖的上面側）具有開口，另一方 1大徑部仙與第2保持器構件5相對向之一侧具有開 面中5係具有:使導電性塊體構件6的表 4弟1保持器構件4露出之表面為不同的表面露 320343 8 200902985 中之：：::: 保持器構件4的插通孔42 且讓導電性觸頭2插通之複數個插通孔 及各自與第1保持器構件4的螺絲孔43中之任一個遠 通，且將螺絲7予以螺合之螺絲孔幻。 第2開口部51之與電路基板相對向之一侧（第ι圖、 弟2圖的下面側）的開口面積，係小於與第i保 4相對向之侧的開口面積。 牛 如第2円斛-“ 開口部51係形成為 1弟2圖所不之由小徑部51a及大徑部5 階差的孔形狀。大/吓^成之附有 大仏卩训_ 口關形成為與第⑽口 大I 4 41b的開口面相同形狀。 插通孔52係形成為由小徑部❿及大徑部奶所形 之一 的孔形狀。小徑部52a於與電路基板相對向 圖 '第2圖的下面側）具有開-口，另一方 大徑部52b盥第！伴姓w姐从 方面， _…持态構件4相對向之一側具有開口。 、—的直徑係形成為與大徑部42b的直徑相同。 ，第1圖中’對於各個導電性觸 表性地僅記载j個。 # Η係代 關於構成第1保持器構件及 緣性材料，可使用且古“保持_件5之絕 絕緣性⑽U 〃有良好的絕緣性之合成樹脂材。此外， H m、祕較佳讀㈣料或可機械加工 ^鐵氣龍（註冊商標）等。Further, in the above-mentioned conductive contact holder of the present invention, a plurality of the above-mentioned conductive contacts are arranged on the outer circumference of the side surface of the above-mentioned member. The conductive block structure of the present invention is characterized in that the conductive contact of the present invention is characterized by an injury: a plurality of the aforementioned conductive contacts of any of the above members. In the front sill insulation holder, in the guide of the present invention, a plurality of the above-mentioned guides are arranged at the outer circumference of the side surface of the upper side. In addition, the conductive block member of the present invention is characterized in that the conductive block member is characterized in that the grounding conductive material for supplying the ground potential in the upper burst is inserted into the circuit structure. hole. According to the invention, the electrical device is electrically connected to the circuit member to make the electrical contact with the port, and the conductive contacts in different accesses are protected. 320343 200902985 = And the member of the guide member (4) is held by the material of the fourth member, and the opposite surfaces are exposed from the surface of the insulating holder member to the surface of the end portion of the conductive contact, thereby Form a strong grounding. Therefore, a transmission signal contact unit can be provided. EMBODIMENT OF THE INVENTION The present invention will be described below with reference to the accompanying drawings. In addition, the pattern = 圭开~ (with * the thickness and width of each part: examples may be different from the real thing, of course, the pattern phase:: may also contain dimensional relationships or ratios are different (Embodiment 1) The first section shows an embodiment of the present invention, and an exploded view. In addition, the _ display == a partial cross-sectional view of the main part of the contact unit:: = 2 The conductive contact unit shown is "electrical of a representative predetermined circuit configuration of the semiconductor integrated circuit: the conductive contact unit" has a semiconductor product formed by using a conductive material = ^ as a test object. The contact between the body circuit and the circuit substrate carrying the inspection circuit is performed; the contact 2 of the circuit with the surname of the circuit; and the plurality of conductive conductive contacts received and transmitted by the predetermined pattern to maintain the plurality of conductive contacts The conductive contact holder 3 of the first head has a high insulating property of 320343 200902985 = an insulating material such as a resin material, and the first retainer member 4 and the first member are formed. Directional layer of conductive material 'The shape is such that they have a mutual shape and are used in a column shape, and the first "stayer structure: = a bottom surface - the sandwiched conductive block member member member 5 constitutes an insulating holder member" Table 4 of the 4th and 2nd margins _ Member 6 - a plurality of insertion holes 42. U: portion 41; the conductive contact 2 is inserted through the complex 43, along the first mad heart insertion hole 42 and the screw hole holder member 4. The thickness direction of the member member 4 penetrates the opposite side of the first security object (the first figure, the member 5 is opposite to the second: the system is smaller than the second holder system) The hole 42 formed in the hole portion and the large-diameter portion formed as shown in Fig. 2 is formed such that the small portion 42a and the large diameter portion 42b are formed to be two-two (four) ° small. The diameter portion 42a# has an opening on the side opposite to the inspection object and the upper surface side of the second figure, and the other one large diameter portion and the second holder member 5 have an opening surface on one side of the second holder member 5: The exposed surface of the holder member 4 of the body block member 6 is a different surface exposed 320343 8 200902985: ::::: the insertion hole 42 of the holder member 4 and allows the conductive contact The plurality of insertion holes through which the head 2 is inserted and the screw holes each of which is remotely connected to the screw hole 43 of the first holder member 4, and the screw 7 is screwed. The second opening portion 51 and the circuit The opening area of the substrate facing one side (the lower side of the first drawing, the second drawing) is smaller than the opening area on the side opposite to the i-th protection 4. The cow is the second side - "the opening portion 51 is formed. It is a hole shape of the step of the small diameter portion 51a and the large diameter portion 5 which is not the case of the 1st and 2nd figures. The big/scarred is attached to the large 仏卩 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The insertion hole 52 is formed in a hole shape which is formed by one of the small diameter portion and the large diameter portion. The small-diameter portion 52a has an opening-to-mouth on the side opposite to the circuit board in the 'Fig. 2', and the other large-diameter portion 52b is the first! With the surname w, from the aspect, the holding member 4 has an opening on one side of the opposite side. The diameter of the - is formed to be the same as the diameter of the large diameter portion 42b. In Fig. 1, only one j is described for each conductivity. # Η 代 关于 关于 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第(4) Materials or mechanical processing ^ Tielong (registered trademark), etc.
部、7持_4及第2保持_5形成開D 鑽孔加工、冓成母材之絕緣性_ 衡孔成形中任一項，或是藉由雷射、 32034 200902985 子束、離:束、線放電等之中任—項來進行加工。 6係且接有者t明導電性塊體構件6的構成巧電性塊體構件 體== 為，本體部心 6b ’门又方肖犬起之形成為長方體的帛1突起部 反方^ΐ體部6a往與第1突起部6b所突起之方向為相 體才料ΓίΐΓ成為長謂的第2突起部6c。與導電性塊 係大於兩個启固底面平行之平面處之本體部仏的剖面積， 生底面的面積。於導電性塊體構件6由第i保持 ° 4及第2保持器構件5所夾持之狀態下’第i突起 所具有之底面（第2圖的上面）係從第1保持器構件 的弟1開口部4!露出’㈣，第2突起部&所具有之 都面（第2圖的下面），係從第2保持器構件5的第2開口 :51露出。本體部6a、.第、突起部6b、第2突起部6c， ’、可形*成為略呈柱狀，或是形成為長方體以外之形狀。 λ ^電性塊體構件6的兩個底面之面積，係小於第j開 的小徑部4U之開口面的面積及第2開口部51的 51a之開口面的面積。相對於此，與導電性塊體構 、6的兩個底面平行之平面處之本體部⑪的剖面積，係大 /第1開口部41的小徑部仏開口面的面積及第2開口部 。。的k部51a開口面的面積。因此，於組入導電性觸頭 二兀/之狀態下，導電性塊體構件6係藉由第丨開口部41 白、小從部41a及第2開口部51的小徑部51a防止脫落。 在第1突起部6b及第2突起部6c從本體部6a所突 &之方向之導電性塊體構件6的厚度（高度），係大於絕緣 320343 200902985 持和()第1 _構件4的厚度與第2保 構件’導電性塊體構件6在以第1保持器 持器構件的厚度方二所夾持之狀訂，可沿著各保 離。為了槿二° (第圖的上下方向）僅移動微小距 第！^移動，祕導電性塊體構件6的側面與 的空二。二/，及第2開口部51的内侧面之間，設置微小 件為可^，由於導電性塊體構件6對絕緣性保持器構 件^盘^目此於檢查時’可適#地進行導電性塊體構 件與外部㈣路構造之狀料。 1塊體構件6除了具有提升導電性卿保持器3 3 0 t之功料’亦具有可防止於電性訊號通過導電性觸 所產生並放射之電磁波、或是從外部傳播來之電磁 /專達至其他導電性觸頭2之功能（電磁波遮蔽功能）。 、為了使導電性塊體構件6充分發揮電磁波遮蔽功能， 構成導電性塊體構件6之導電性材料的體積固有電阻率， 較理想為1至__左右之較小值。此外，構成導電性 塊體構件6之導電性材料’較理想為可於檢查時的種種溫 ，條件下使用。妻於此點，關於構成導電性塊體構件6之 ¥電f生材料’較理想為具有高強度及耐熱性’並且熱膨脹 :數較小之導電性材料，例如有恒範鋼材（ίη·)或科伐 合金材（Kovar)(註冊商標）等低熱膨脹金屬、半導體、、 陶瓷、玻璃等。 接著參照第2圖說明導電性觸頭2的構成。導電性觸 320343 11 200902985 員2為進行電性訊號的接收傳送之訊號用導電性觸頭，係 具備.具有尖銳端之第1插棒21 ;往與第1插棒21為相 反方向突出之具有尖銳端之第2插棒22;及連結第i插棒 21與第2插棒22之彈簧構件23。 第1插棒21係具有：前端部2ia ;具有較前端部21& 的直徑還大之直徑之凸緣部21b :經介凸緣部2ib往與前 j部21a為相反方向突出，並形成為較凸緣部2lb的直徑 還小且較彈簧構件23的内徑稍大之直徑的圓柱狀，且壓入 有彈黃構件23的端部之凸柱部21c;及形成為較凸柱部2ic 的直徑還小且較彈簧構件23的内徑還小直徑的圓柱狀，並 從凸柱部21c往與凸緣部21b為相反側延伸之基端部 21d ’並且形成為對長度方向的中心軸呈軸對稱之形狀。第 1插棒21係藉由凸緣部21b抵接於構成插通孔42之小徑 部42a與大徑部42b之間的交界之階梯狀部分，來防止從 第1保持器構件4脫落。 第2插棒22係具有：前端部22a ;具有較前端部22a 的直徑還大之直徑之凸緣部22b ;經介凸緣部22b往與前 端部22a為相反方向突出’並形成為較凸緣部22b的直徑 還小且較彈簧構件23的内徑稍大之直徑的圓柱狀，且壓入 有彈簧構件23的端部之凸柱部22c;及形成為較凸柱部22c 的直徑還小且較彈簧構件23的内徑還小之直徑的圓柱 狀，並從凸柱部22c往與凸緣部22b為相反側延伸之基端 邛22d，並且形成為對與長度方向平行之中心軸呈軸對稱 之形狀。第2插棒22,係藉由凸緣部22b抵接於構成插通 320343 12 200902985 孔52之小徑部52a盥大柝卹 v + ”大仫邛52b之間的交界之階梯狀部 /刀，來防正從第2保持器構件5脫落。 彈簧構件23為具有相同直徑之線圈彈菩，裝設於第i 插棒21之—側為密捲繞部仏，裝設於第2插棒22之一 側為疏捲繞部23b。密捲繞部仏的端部係抵接於凸緣部 训，而疏捲繞部23b的端部係抵接於凸緣部22b。-旦對 立導電性卿2施加射，卿㈣件23f#，而使密捲繞 P a的至〉刀接觸於第2插棒的基端部咖。藉 ^可透過依序經由第i插棒21、彈簧構件23的密捲繞 4 23a及弟2插棒22之最短路徑，而實現電性導通。 具有以上構狀導電,_頭2，如沿著導電性塊體 構件6之侧面的外周包圍導電性塊體構件，之方式地 複數個。 第3圖_錢料電賴頭單元」檢查時的狀態 圖。於第3圖中，於導電性觸頭單元j的第】保持器構 4侧，安裝有作為檢查對象之半導體積體電路_。半導體 積體電路100的連接用電極1〇1，係與導電性觸頭2之第工 插棒21的前端部21a接觸；半導體積體電路1〇〇的接地電 極102，係以面狀方式與導電性塊體構件6之第1突起 6b的表面接觸。 大 ° 相對於此，於導電性觸頭單元i之第2保持器構件5 側的表面’縣設有連接於—產生檢查—號之訊號處 理電路之電路基板·。電路基板的連接用電極如1， 係與導電性觸頭2之第2插棒22接觸，電路基板2〇〇的接 320343 13 200902985 地電極202係以面狀之方式與導電性塊體構件6之第2突 起部6c的表面接觸。 如此，於使用導電性觸頭單元1進行半導體積體電路 100的檢查時，第1突起部6b的表面係以面狀方式與半導 體積體電路100的接地電極102接觸，第2突起部6c的表 面以面狀方式與電路基板200的接地電極202接觸，因此， 於導電性觸頭2的周邊形成強力的接地。結果，可減少鄰 接的導電性觸頭2之間之串擾，並抑制半導體積體電路100 與電路基板200之間所傳送之訊號之損失，因此可提升導 電性觸頭保持器3的電性特性。 根據以上所說明之本發明的實施形態1，係具備：絕 緣性保持器構件，將不同電路構造間進行電性訊號的輸出 入之導電性觸頭予以保持；及導電性塊體構件，係藉由此 絕緣性保持器構件所保持，且互為相反的兩個表面係從使 絕緣性保持器構件的表面中之使導電性觸頭的兩端部突出 之表面露出，藉此，可於導電性觸頭的周邊形成強力的接 地。因此，可提供一種傳送訊號的損失較小，且電性特性 良好之導電性觸頭保持器及導電性觸頭單元。 (實施形態2) 第4圖係顯示本發明實施形態2之導電性觸頭單元的 構成之立體分解圖。此外，第5圖係顯示本發明實施形態 2之導電性觸頭單元之主要部分的構成之部分剖面圖。第4 圖及第5圖所示之導電性觸頭單元11，除了導電性塊體構 件的構成之外，其他係與上述實施形態1之導電性觸頭單 14 320343 200902985 元1具有同樣的構成。因此， 與導電性觸頭單元i的構成要幸圖中’對於 加與第】圖及第2圖為相同之圖號為㈣之構成要素，係附 以下說明本實施形態2之 成。導電性觸頭佯持弩 觸頭保持器8的構 保持器構件5 =係具请··第1保持器構件4;第2 相平行的兩個底面之略 形成為具有互 及第2保持器構件5 由第1保持器構件4 導雷#_碰 火持之導電㈣體構件9。 V電性塊體構件9係具備：從第 1開口部41露屮夕势，α 1 丁灯m偁件4的第 的第2開：露^ 動之方式連Μ ^ / _構件92 ’·以可相對地移 往厚度方㈣推之複2塊體構件92，且互 以引導第1㈣數個彈貫構件93 (連結手段）；及用 動方向之㈣/構件91與第2塊體構件92之間的相對移 °複數烟狀㈣導構件94 (引導手段）。 邱91第體構件91係具有：形成為長方體之第1本體 個a’及具有導電性塊體構件9所具有之兩個 本一，度方向 5食万體的弟1突起部91b。與導電性塊體構 、兩個底面平行之平面處之第1本體部91a的剖面 f ’係大於兩個底面的面積。帛1本體部9la及第i突起. ^ 9lb #可％成為略呈柱狀’或是形成為長方 體以外之 开> 狀。 第2境體構件92係具有：第2本體部92&，形成為長 320343 15 200902985 方體，且高度方向與第1本體部91a的高度方向一致；及 第2突起部92b，具有導電性塊體構件9所具有之兩個底 面的另一個，且從第2本體部92係往與第1突起部91b 從苐1本體部91a所突起之方向為相反方向突起而形成為 長方體。與導電性塊體構件9的兩個底面平行之平面處之 第2本體部92a的剖面積，係大於兩個底面的面積。在此， 第2本體部92a及第2突起部92b，亦可形成為略呈柱狀， 或是形成為長方體以外之形狀。 導電性塊體構件9的兩個底面之面積，係小於第i開 邓41的小徑部41a之開口面的面積。相對於此，與導電 性塊體構件9的兩個底面平行之平面處之第】本體部％ 的剖面積，係大於第i開口部41的小徑部4U之開口面的 面積此外，導電性塊體構件9的兩個底面之面積，係小 於第2開口部51的小徑部5U.之開口面的面積。相對於 此，與導電性塊體構件9的兩個底面平行之平面處之第2 本體部92a的剖面積，係大於第2開口部51的小徑部51a 之開口面的面積還大。因此，於組入導電性觸頭單元H 之狀態下，導電性塊體構件9係藉由第i開口部4i的小後 部41a及第2開口部51的小徑部化防止脱落。 二 、導電性塊體構件9係收納並保持有供應接地電位用之 導電性觸頭12 (接地用導電性觸頭）。在此，導電性觸頭 12係與導電性觸頭2具有同樣構成，亦即，導電性觸頭12 係具備第1插棒121、第2插棒122及彈簧構件⑵。第工 插棒121係具有前端部121a、凸緣部im、凸柱部Ulc、 320343 16 200902985 及基端部121d;第2插棒122係具有前端部122a、凸緣部 122b、凸柱部122c、及基端部i22d。此外，彈簧構件123 係具有密捲繞部123a及疏捲繞部〗23b。 於第1塊體構件91設置有可讓導電性觸頭12插通之 插通孔91〗。插通孔911係具備：具有較第丨插棒121之 前端部121a的直徑稍大且較凸緣部121b的直徑還小之直 徑之小徑部911a ;及具有較凸緣部121b的直徑還大之直 徑之大徑部911b。另一方面，於第2塊體構件92設置有 可讓導電性觸頭12插通之插通孔912。插通孔912係具 備··具有較第2插棒122之前端部〗22a的直徑稍大且較凸 緣部122b的直徑還小之直徑之小徑部921a;及具有較凸 緣部122b的直㈣大之直徑之大徑部㈣。大徑部9仙 與大控部921b係具有相同直徑。 導電性觸頭12的第r插棒12卜係藉由凸緣部121b 抵接於插通孔911之小徑部911a與大徑部⑽之間的交 界之階梯狀部分，來防止從第！塊體構件91脫落。此外， 導電性觸頭12的第2插棒122，係藉由凸緣部122b抵接 於插通孔921之小徑部92la與大徑部㈣之間的交界之 階梯狀部分，來防止從第2塊體構件92脫落。 於第1塊體構件91的第1本體部9U，收納彈簧構件 93之凹部912及收納引導構件料之凹部913，係分別形成 =定位置。於第2塊體構件92的第2本體部似，收納 ，簧構件93之凹部922及收納引導構件％之凹部奶’ 係分別形成於預定位置。 320343 17 200902985 引導構件94係固接於凹部923，當檢查時，從半導體 積體電路1GG及f路基板2GG承受外力，而使厚度方向之 第:塊體構件91與第2塊體構件92之間的距離變短時， 引導構件94之未固定的前端部，係-歧人地插入凹部 9!3 ’ -邊引導兩者之相對移動方向。引導構件％係假定 為銷型的構件’但亦可形成為其他形狀。此外，亦可將引 導構件94固接於第1本體部91a的凹部913。 亦如第5圖所示，導電性塊體構件9在 寺器構件5所夹持之狀態下，可沿_ 離。為了構=方向⑷圖的上下方向）僅移動微小距 離=成為可移動，亦於第丨塊體構件91的侧面與第 511二内側面以及第2塊體構件92與第2開口部 ^内側面之間，分別設置微小的空隙。如此，由於導電 2體構件？對絕緣性保持器構件為可移動，因此，於檢 查時’可適當地進行導電 、 之間之對準。订導電1 生塊體構件9與外部的電路構造 件93二 及第2塊體構件92，係藉由彈簧構 W絕緣性保持器構件的厚度 _ 之方向彈推。導電性_構件9藉由彈黃構件== 之方向之導電性塊體構件 予乂彈推 的伸縮狀態之影響，而較二:技並不受到彈簧構件93 保持器構件4的厚度與第 +度（第1 還大。 構件5的厚度之合計） 第6圖係顯示 使用具有均構柄導魏觸頭單元 320343 18 200902985 η之檢查時的狀關。於第6圖中，於導電性觸 的第1保持器構件4側，安褒有半導體積體電路疋11 導體積體電路100的連接用電極101係與導電性觸0。半 第1插棒21的前端部21a接觸，半導體積體電路2之 地電極102係與第1塊體構件91之第丨突 〇的接 %。丨91b的矣1 及導電性觸頭12之第1插棒121的前端部121&接 相對於此’於導電性觸頭單元11之第2 $ 布z保持态構件5 側的表面，係裝設有電路基板200。電路基板2〇〇的連接 用電極2〇1係與導電性觸頭2之第2插棒22接觸，電路基 板200的接地電極202係與第2塊體構件％之第2突起部 92b的表面及導電性觸頭12之第2插棒122的前端部122a 接觸。 如此，於使用導電性觸頭單元11進行半導體積體電 路100的檢查時，第1突起部91b的表面係以面狀方式與 半導體積體電路100的接地電極102接觸，第2突起部92b 的表面以面狀方式與電路基板200的接地電極202接觸， 因此，於導電性觸頭2的周邊形成強力的接地。 此外，於導電性觸頭保持器8中，由於導電性塊體構 件9保持有接地用的導電性觸頭12，因此即使於半導體積 體電路100之接地電極102的表面與第1突起部91b的表 面之間產生不匹配時，或是於電路基板200的接地電極202 與第2突起部92b的表面之間產生不匹配時，亦可分別使 第1插棒121的前端部121a與接地電極1〇2接觸、以及使 第2插棒122的前端部122a與接地電極202接觸。此時， 19 320343 200902985 一旦對=電性觸頭12的彈簧構件123施加荷重 件123营曲而與導電性塊體構件9直接 性 …電位與導電性塊體構件 觸 92b的f面之門^ *疋於接地電極2G2與第2突起部 的周圍形成強力的接地。綠、、]於導電性觸頭2 導電而保持於導電性塊體構件9之 予以勿略、並曰積’相對於導電性塊體構件9的容積可 之導;性塊體構= = 因士道❸電變動值，亦可視為幾乎為裳。 因此’導電性塊體構件9的電位可安定地4手為零。 根據以上所說明之本發明的實能、 電位。 緣性保持器構件，將不同電路構造間進：：、2 ’係具備：絕 入之導電性觸頭予以彳 仃電性訊號的輪出 緣性保持器構件保持，且互塊體構件’藉由此絕 緣性保持器構件的表面中使。^ =面，係為從絕 因此，與上述實施形態也。 且_一電剛保持= 用 件收柄並保持接地電位:應、2之為導電性塊體構 電性塊體構件的表面所設置之電極與電 320343 200902985 極之間產生不匹配時，亦可確實地謀求接觸。因此，根據 本實施形態2,可在不受到作為接觸對象之電路構造的表 面狀態之影響，而確實地形成強力的接地。 、 (其他實施形態） ，上係已詳細敘述實施形態卜2作為用以實施本發 明之最佳的實施形態，但本發明並不限定於這些實施^ 態。例如，可對實施形態i之導電性塊體構件6形成用以 收納導電性觸頭之插通孔’再將導電性觸頭12收納於 此插通孔。此外，亦可構成為於實施形態2之導電性塊體 構件9巾，將插通孔911予以封閉，❿不收納接地 性觸頭12。 此外’亦可適用具有上述以外的構成作為導電性觸 頭。再者，訊號用導電性觸頭及接地用導電性觸頭12之形 狀或構成，亦可有所不同。 於以上的說明中，係假定將本發明之導電性觸頭單元 使用於半導體積體電路的檢查之情況，但亦可適用於裝載 有作為檢查對象的半㈣晶>{之封裝基板，或是使用於晶 圓等級的檢查之高密度的探針單元。 Βθ 如此，本發明可包含在此所未記载之種種實施形態， 只要在不脫離以申請專利範圍所特定出之技術思想之範圍 内，可進行種種的設計變更等。 [產業利用可能性] …如上所述’本發明之導電性觸頭保持器及導電性觸頭 早70’於進行1C晶片等半導體積體電路的電性檢查時，乃 320343 21 200902985 為有用，尤其適合於進行使用有高頻率的電性訊號之檢查。 【圖式簡單說明】 第1圖係顯示本發明實施形態i之導電性觸頭單元的 構成之立體分解圖。 第2圖係顯示本發明實施形態1之導電性觸頭單元之 主要部分的構成之部分剖面圖。 第3圖係顯示使用本發明 元之檢查時的狀態圖。 實施形態1之導電性觸頭單 第4圖係顯示本發明 構成之立體分解圖。 貫施形態2之導電性觸頭單元的 第5圖係顯示本發明實施形態 主要邓为的構成之部分剖面圖。 2之導電性觸頭單元之 第6圖係顯示使用本發明實施形態2 元之檢查時的狀態圖。 之導電性觸頭單 【主要元件符號說明】 1 ' 11 導電性觸頭單元 2、12 導電性觸頭 3 ^ 8 導電性觸頭保持器 4 第1保持器構件 5 第2保持器構件 6 ' 9 導電性塊體構件 6a 本體部 6b、91b 第1突起部 6c 、 92b 第2突起部 320343 22 200902985 7 21 ' 121 21a、22a 21b > 22b 21c 、 22c 21d > 22d 22 ' 122 螺絲 第1插棒 121a ' 122a 前端部 121b、122b 凸緣部 121c、122c 凸柱部 121d、122d 基端部 第2插棒 23、93、123彈簧構件 23a、123a 密捲繞部 23b、123b 疏捲繞部 41 第1開口部 51 第2開口部 921a 921b 小徑部 大徑部 41a、42a、51a、52a、911a 41b、42b、51b、52b、911b 42、52、911、921 插通孔 43、53 91 91a 92 92a 94 100 101 102 200 201 202 螺絲孔 第1塊體構件 第1本體部 第2塊體構件 第2本體部 引導構件 半導體積體電路 連接用電極 接地電極 電路基板 912、913、922、923 凹部 23 320343Part, 7 holding _4 and 2nd holding _5 forming open D drilling process, insulating into the base material _ balance hole forming, or by laser, 32034 200902985 beam, away: beam , line discharge, etc. - to process. 6-series and connected to the conductive block member 6 constitutes the electrically conductive block member body ==, the body portion 6b 'the door and the square dog are formed into a rectangular parallelepiped 突起 1 protrusion reversed The body portion 6a is in the direction in which the first projection portion 6b protrudes, and the second projection portion 6c is a long-term projection. And the conductive block is larger than the cross-sectional area of the body portion 平面 at a plane parallel to the two bottom surfaces, and the area of the bottom surface. The bottom surface (the upper surface of the second figure) of the i-th protrusion is in the state in which the conductive block member 6 is sandwiched by the i-th holding 4 and the second holder member 5, and is the younger member of the first holder member. The opening portion 4 is exposed (4), and the entire surface (the lower surface of the second drawing) of the second projections & is exposed from the second opening 51 of the second holder member 5. The main body portion 6a, the first projection portion 6b, the second projection portion 6c, ', the shape * are slightly columnar, or formed into a shape other than a rectangular parallelepiped. The area of the two bottom faces of the λ ^ electrical block member 6 is smaller than the area of the opening face of the small-diameter portion 4U of the j-th opening and the area of the opening face of the 51a of the second opening portion 51. On the other hand, the cross-sectional area of the main body portion 11 on the plane parallel to the two bottom surfaces of the conductive block structure 6 is the area of the small-diameter portion 仏 opening surface of the large/first opening portion 41 and the second opening portion. . . The area of the opening surface of the k portion 51a. Therefore, in the state in which the conductive contacts are disposed, the conductive bulk member 6 is prevented from falling off by the second opening portion 41 white and the small portion 41a and the small diameter portion 51a of the second opening portion 51. The thickness (height) of the conductive bulk member 6 in the direction in which the first projections 6b and the second projections 6c protrude from the main body portion 6a is larger than the insulation 320343 200902985 and the (1)th member 4 The thickness and the second protective member 'the conductive block member 6 are bound in the shape sandwiched by the thickness of the first holder member, and can be kept away from each other. In order to 槿 two ° (up and down direction of the figure) only move a small distance! ^ Move, the side of the conductive block member 6 and the empty two. Between the second side and the inner side surface of the second opening portion 51, a small piece of material is provided, and since the conductive block member 6 is in contact with the insulating holder member, it is electrically conductive. The material of the block body and the outer (four) road structure. In addition to the function of improving the conductivity of the holder 3, the body member 6 also has an electromagnetic wave that can prevent the electrical signal from being generated and emitted by the conductive contact, or an electromagnetic wave that is transmitted from the outside. The function of the other conductive contacts 2 (electromagnetic wave shielding function). In order to sufficiently exhibit the electromagnetic wave shielding function of the conductive bulk member 6, the volume specific resistivity of the conductive material constituting the conductive bulk member 6 is preferably a small value of about 1 to __. Further, the conductive material constituting the conductive bulk member 6 is preferably used under various conditions at the time of inspection. At this point, the electrically conductive material constituting the conductive bulk member 6 is preferably a high-strength and heat-resistant one and thermally expands: a small number of conductive materials, such as constant-state steel (ίη·) or Low thermal expansion metals such as Kovar (registered trademark), semiconductors, ceramics, glass, etc. Next, the configuration of the conductive contact 2 will be described with reference to Fig. 2 . The conductive contact 320343 11 200902985 is a first conductive rod 21 having a sharp end for transmitting a signal for receiving and transmitting an electrical signal, and has a protruding direction opposite to the first plunger 21 a second rod 22 having a sharp end; and a spring member 23 connecting the i-th rod 21 and the second rod 22. The first plunger 21 has a distal end portion 2ia, and a flange portion 21b having a larger diameter than the distal end portion 21& the protruding portion 21b protrudes in a direction opposite to the front j portion 21a, and is formed as a cylindrical shape having a diameter smaller than that of the flange portion 21b and slightly larger than the inner diameter of the spring member 23, and press-fitting the boss portion 21c of the end portion of the elastic yellow member 23; and forming the relatively convex portion 2ic The diameter is smaller and smaller than the inner diameter of the spring member 23, and has a cylindrical shape from the boss portion 21c to the base end portion 21d' extending from the opposite side of the flange portion 21b and is formed as a central axis with respect to the longitudinal direction. Axis-symmetric shape. The first plunger 21 is prevented from falling off from the first holder member 4 by the flange portion 21b abutting on the stepped portion of the boundary between the small diameter portion 42a and the large diameter portion 42b of the insertion hole 42. The second plunger 22 has a distal end portion 22a, a flange portion 22b having a diameter larger than the distal end portion 22a, and a convex portion 22 in the opposite direction to the distal end portion 22a via the flange portion 22b. The diameter of the edge portion 22b is smaller than the inner diameter of the spring member 23, and the cylindrical portion of the diameter of the spring member 23 is pressed, and the boss portion 22c of the end portion of the spring member 23 is press-fitted; and the diameter of the boss portion 22c is formed. a cylindrical shape having a smaller diameter than the inner diameter of the spring member 23, and a base end 22d extending from the stud portion 22c to the opposite side of the flange portion 22b, and being formed to be a central axis parallel to the longitudinal direction Axis-symmetric shape. The second plunger 22 is abutted against the stepped portion/knife that forms the boundary between the small-diameter portion 52a of the hole 52 of the hole 320343 12 200902985, and the large crotch v + "the big cymbal 52b by the flange portion 22b. The spring member 23 is a coil of the same diameter, and the side of the i-th insert 21 is a tightly wound portion, and is attached to the second plunger. One side of the 22 is a sparsely wound portion 23b. The end portion of the densely wound portion 抵 is in contact with the flange portion, and the end portion of the unwinding portion 23b abuts against the flange portion 22b. Sexuality 2 applies the shot, and the (four) piece 23f#, and the knives of the densely wound P a are brought into contact with the base end of the second rod. The yoke can be sequentially passed through the ith rod 21 and the spring member. The shortest path of the dense winding 4 23a and the second 2 of the rod 22 is electrically conductive. The conductive structure having the above configuration, the head 2, such as the outer circumference surrounding the conductive block of the conductive block member 6 The body member is plural in number. The third figure is a state diagram at the time of inspection. In Fig. 3, a semiconductor integrated circuit _ to be inspected is mounted on the side of the first holder structure 4 of the conductive contact unit j. The connection electrode 1〇1 of the semiconductor integrated circuit 100 is in contact with the distal end portion 21a of the working plunger 21 of the conductive contact 2; the ground electrode 102 of the semiconductor integrated circuit 1 is planarly The surface of the first protrusion 6b of the conductive bulk member 6 is in contact with each other. In contrast, a circuit board connected to the signal processing circuit for generating the inspection number is provided on the surface of the second contact member 5 side of the conductive contact unit i. The connection electrode of the circuit board is in contact with the second plunger 22 of the conductive contact 2, and the connection of the circuit substrate 2 is 320343 13 200902985. The ground electrode 202 is in a planar manner and the conductive block member 6 The surface of the second protrusion 6c is in contact with each other. When the semiconductor integrated circuit 100 is inspected using the conductive contact unit 1, the surface of the first protrusion 6b is in surface contact with the ground electrode 102 of the semiconductor integrated circuit 100, and the second protrusion 6c is Since the surface is in contact with the ground electrode 202 of the circuit board 200 in a planar manner, a strong ground is formed around the conductive contact 2 . As a result, the crosstalk between the adjacent conductive contacts 2 can be reduced, and the loss of the signal transmitted between the semiconductor integrated circuit 100 and the circuit substrate 200 can be suppressed, so that the electrical characteristics of the conductive contact holder 3 can be improved. . According to the first embodiment of the present invention described above, the insulating holder member is provided, and the conductive contacts for inputting electrical signals between different circuit structures are held; and the conductive block member is borrowed. Thereby, the insulating holder member is held, and the two surfaces opposite to each other are exposed from the surface of the surface of the insulating holder member that protrudes the both end portions of the conductive contact, whereby the conductive surface can be electrically conductive. The perimeter of the sexual contact forms a strong ground. Therefore, it is possible to provide a conductive contact holder and a conductive contact unit which have a small loss of transmission signal and excellent electrical characteristics. (Embodiment 2) FIG. 4 is an exploded perspective view showing a configuration of a conductive contact unit according to Embodiment 2 of the present invention. In addition, Fig. 5 is a partial cross-sectional view showing the configuration of a main part of a conductive contact unit according to Embodiment 2 of the present invention. The conductive contact unit 11 shown in Figs. 4 and 5 has the same configuration as the conductive contact unit 14 320343 200902985 1 of the first embodiment except for the configuration of the conductive block member. . Therefore, in the configuration of the conductive contact unit i, the components of the fourth embodiment having the same reference numerals as those of the fourth embodiment are shown in the following description. The conductive contact is held by the contact holder 8; the holder member is the first holder member 4; the two bottom surfaces of the second phase are formed to have the mutual holder and the second holder. The member 5 is guided by the first holder member 4 to the conductive (four) body member 9 which is held by the flame. The V electrical block member 9 is provided with a first opening from the first opening portion 41, and a second opening of the α 1 lamp m member 4: a method of connecting the Μ ^ / _ member 92 '· The two block members 92 are relatively movable to the thickness side (four), and the first (four) number of the elastic members 93 (connection means) are guided to each other; and the (four) / member 91 and the second block member in the moving direction The relative movement between 92 is a plurality of smoked (four) guide members 94 (guide means). The first member 91 of the ninth 91 has a first body a' formed in a rectangular parallelepiped shape and a second protrusion portion 91b having two of the conductive block members 9 in the first direction. The cross section f' of the first body portion 91a at a plane parallel to the conductive block structure and the two bottom faces is larger than the area of the two bottom faces.帛1 main body portion 9la and i-th protrusion. ^ 9 lb #% can be slightly columnar ‘or formed into an open shape other than a rectangular parallelepiped. The second body member 92 has a second body portion 92 & and is formed as a square body 320343 15 200902985, and has a height direction that coincides with a height direction of the first body portion 91a; and a second protrusion portion 92b that has a conductive block. The other of the two bottom surfaces of the body member 9 is formed in a rectangular parallelepiped shape from the second main body portion 92 so as to protrude in a direction opposite to the direction in which the first projection portion 91b protrudes from the first main body portion 91a. The cross-sectional area of the second body portion 92a at a plane parallel to the two bottom faces of the conductive block member 9 is larger than the area of the two bottom faces. Here, the second main body portion 92a and the second protrusion portion 92b may be formed in a substantially columnar shape or in a shape other than a rectangular parallelepiped. The area of the two bottom surfaces of the conductive block member 9 is smaller than the area of the opening surface of the small diameter portion 41a of the first opening 41. On the other hand, the cross-sectional area of the first body portion % at the plane parallel to the two bottom surfaces of the conductive bulk member 9 is larger than the area of the opening surface of the small-diameter portion 4U of the i-th opening portion 41. The area of the two bottom surfaces of the block member 9 is smaller than the area of the opening surface of the small diameter portion 5U. of the second opening portion 51. On the other hand, the cross-sectional area of the second main body portion 92a on the plane parallel to the two bottom surfaces of the conductive block member 9 is larger than the area of the opening surface of the small-diameter portion 51a of the second opening portion 51. Therefore, in the state in which the conductive contact unit H is incorporated, the conductive bulk member 9 is prevented from falling off by the small diameter portion of the small rear portion 41a and the second opening portion 51 of the i-th opening portion 4i. 2. The conductive block member 9 accommodates and holds a conductive contact 12 (a conductive contact for grounding) for supplying a ground potential. Here, the conductive contact 12 has the same configuration as the conductive contact 2, that is, the conductive contact 12 includes the first plunger 121, the second plunger 122, and the spring member (2). The first plunger 121 has a front end portion 121a, a flange portion im, a boss portion Ulc, 320343 16 200902985, and a base end portion 121d. The second plunger 122 has a front end portion 122a, a flange portion 122b, and a boss portion 122c. And the base end i22d. Further, the spring member 123 has a densely wound portion 123a and a sparsely wound portion 23b. The first block member 91 is provided with an insertion hole 91 for allowing the conductive contact 12 to be inserted. The insertion hole 911 includes a small diameter portion 911a having a diameter slightly larger than the diameter of the front end portion 121a of the first boring bar 121 and smaller than the diameter of the flange portion 121b, and a diameter larger than the diameter of the flange portion 121b. The large diameter portion 911b of the large diameter. On the other hand, the second block member 92 is provided with an insertion hole 912 through which the conductive contact 12 can be inserted. The insertion hole 912 includes a small diameter portion 921a having a diameter slightly larger than the front end portion 22a of the second plunger 122 and smaller than the diameter of the flange portion 122b, and a flange portion 122b having a smaller diameter than the flange portion 122b. Straight (four) large diameter diameter section (four). The large diameter portion 9 sen has the same diameter as the large control portion 921b. The r-th insert 12 of the conductive contact 12 is prevented from coming from the first step by abutting the stepped portion of the boundary between the small-diameter portion 911a of the insertion hole 911 and the large-diameter portion (10) by the flange portion 121b. The block member 91 is detached. Further, the second plunger 122 of the conductive contact 12 is prevented from coming from the stepped portion of the boundary between the small-diameter portion 92la and the large-diameter portion (four) of the insertion hole 921 by the flange portion 122b. The second block member 92 is detached. In the first main body portion 9U of the first block member 91, the recessed portion 912 of the spring member 93 and the recessed portion 913 in which the guide member is housed are formed at a predetermined position. In the second main body portion of the second block member 92, the recessed portion 922 of the spring member 93 and the recessed milk portion accommodating the guide member % are formed at predetermined positions. 320343 17 200902985 The guiding member 94 is fixed to the concave portion 923, and receives an external force from the semiconductor integrated circuit 1GG and the f-path substrate 2GG when inspected, and the bulk member: the bulk member 91 and the second block member 92 When the distance between the guide members is shortened, the unfixed front end portion of the guide member 94 is inserted into the recess portion 9! 3' - and the relative movement direction of both is guided. The guiding member % is assumed to be a pin-shaped member 'but may be formed in other shapes. Further, the guiding member 94 may be fixed to the concave portion 913 of the first main body portion 91a. As also shown in Fig. 5, the conductive block member 9 can be separated along the state in which the temple member 5 is held. In order to adjust the vertical direction of the direction (4), only a small distance is moved = it is movable, and also on the side surface of the second block member 91 and the 511nd inner side surface, and the second block member 92 and the second opening portion. A small gap is set between the two. So, due to the conductive 2 body member? Since the insulating holder member is movable, it is possible to conduct electric conduction and alignment therebetween at the time of inspection. The conductive first bulk member 9 and the outer circuit structural member 93 and the second block member 92 are spring-drawn by the thickness _ of the spring-structured insulating holder member. The conductivity_member 9 is influenced by the expansion and contraction state of the conductive block member in the direction of the elastic member ==, and the second technique is not affected by the thickness of the spring member 93 and the holder member 4 Degree (1st is larger. The total thickness of the members 5) Fig. 6 shows the state when using the inspection with the uniform-structured guide contact unit 320343 18 200902985 η. In Fig. 6, on the side of the first holder member 4 which is electrically contacted, the connection electrode 101 of the semiconductor integrated circuit 10011 is connected to the conductive body. The distal end portion 21a of the first plunger 21 is in contact with each other, and the ground electrode 102 of the semiconductor integrated circuit 2 is connected to the first projection of the first block member 91. The 矣1 of the 丨91b and the front end portion 121& of the first plunger 121 of the conductive contact 12 are attached to the surface of the conductive member unit 11 on the side of the second member of the conductive contact unit 11 A circuit substrate 200 is provided. The connection electrode 2〇1 of the circuit board 2 is in contact with the second plunger 22 of the conductive contact 2, and the ground electrode 202 of the circuit board 200 and the surface of the second protrusion 92b of the second block member % are The front end portion 122a of the second plunger 122 of the conductive contact 12 is in contact with each other. When the semiconductor integrated circuit 100 is inspected using the conductive contact unit 11, the surface of the first protrusion 91b is in surface contact with the ground electrode 102 of the semiconductor integrated circuit 100, and the second protrusion 92b is Since the surface is in contact with the ground electrode 202 of the circuit board 200 in a planar manner, a strong ground is formed around the conductive contact 2 . Further, in the conductive contact holder 8, since the conductive block member 9 holds the conductive contact 12 for grounding, even the surface of the ground electrode 102 of the semiconductor integrated circuit 100 and the first protrusion 91b When there is a mismatch between the surfaces, or when a mismatch occurs between the ground electrode 202 of the circuit board 200 and the surface of the second protrusion 92b, the front end portion 121a of the first plunger 121 and the ground electrode may be respectively formed. The contact is made 1 2 and the front end portion 122 a of the second plunger 122 is brought into contact with the ground electrode 202 . At this time, 19 320343 200902985, once the load member 123 is applied to the spring member 123 of the electric contact 12, and the conductive block member 9 is directly... the potential and the surface of the conductive block member touch 92b are ^ * A strong ground is formed around the ground electrode 2G2 and the second protrusion. The green, and the conductive contact 2 are electrically conductive and held in the conductive bulk member 9 and are not hoarded and can be guided relative to the volume of the conductive bulk member 9; the block structure == The change of the morale can also be regarded as almost a skirt. Therefore, the potential of the conductive bulk member 9 can be set to be zero by four hands. According to the actual energy and potential of the present invention described above. The edge retainer member, between the different circuit structures::, 2 ' is equipped with: the conductive contact of the permanent contact is held by the wheel-out retainer member of the electrical signal, and the inter-block member is borrowed Thereby the surface of the insulating holder member is made. ^ = face, the system is from the absolute, and the above embodiment is also. And _ a battery just keep = use the handle to hold the ground potential: should be, 2 is the conductive block body structure of the surface of the electrode set and the electricity 320343 200902985 pole mismatch, also Can be sure to seek contact. Therefore, according to the second embodiment, it is possible to reliably form a strong ground without being affected by the surface state of the circuit structure to be contacted. (Other Embodiments) The above embodiment has been described in detail as a preferred embodiment for carrying out the invention, but the present invention is not limited to these embodiments. For example, the conductive bulk member 6 of the embodiment i can be formed with an insertion hole for accommodating the conductive contact, and the conductive contact 12 can be accommodated in the insertion hole. Further, the conductive block member 9 of the second embodiment may be configured such that the insertion hole 911 is closed and the ground contact 12 is not accommodated. Further, a configuration other than the above may be applied as the conductive contact. Further, the shape of the conductive contact for the signal and the conductive contact 12 for the ground may be different or different. In the above description, it is assumed that the conductive contact unit of the present invention is used for inspection of a semiconductor integrated circuit, but may be applied to a package substrate on which a semi-tetrazed crystal is to be inspected, or It is a high-density probe unit for wafer level inspection. Β θ As described above, the present invention can be embodied in various embodiments, and various design changes and the like can be made without departing from the scope of the technical scope of the invention. [Industrial Applicability] As described above, the conductive contact holder and the conductive contact 70 of the present invention are useful for performing electrical inspection of a semiconductor integrated circuit such as a 1C wafer, and are useful as 320343 21 200902985, It is especially suitable for inspections using electrical signals with high frequencies. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is an exploded perspective view showing the configuration of a conductive contact unit according to an embodiment i of the present invention. Fig. 2 is a partial cross-sectional view showing the configuration of a main portion of a conductive contact unit according to Embodiment 1 of the present invention. Fig. 3 is a view showing a state when the inspection of the present invention is used. Conductive contact sheet of the first embodiment Fig. 4 is a perspective exploded view showing the configuration of the present invention. Fig. 5 showing the conductive contact unit of the second embodiment shows a partial cross-sectional view showing the configuration of the main embodiment of the present invention. Fig. 6 is a view showing a state in which the inspection of the embodiment 2 of the present invention is performed. Conductive contact list [Main component symbol description] 1 ' 11 Conductive contact unit 2, 12 Conductive contact 3 ^ 8 Conductive contact holder 4 First holder member 5 Second holder member 6 ' 9 conductive block member 6a main body portion 6b, 91b first protruding portion 6c, 92b second protruding portion 320343 22 200902985 7 21 '121 21a, 22a 21b > 22b 21c, 22c 21d > 22d 22 ' 122 screw first Insert 121a' 122a Front end portions 121b, 122b Flange portions 121c, 122c Bump portions 121d, 122d Base end portion Second rods 23, 93, 123 Spring members 23a, 123a Closely wound portions 23b, 123b Unwinding portion 41 first opening portion 51 second opening portion 921a 921b small diameter portion large diameter portions 41a, 42a, 51a, 52a, 911a 41b, 42b, 51b, 52b, 911b 42, 52, 911, 921 insertion holes 43, 53 91 91a 92 92a 94 100 101 102 200 201 202 Screw hole 1st body member 1st body part 2nd block member 2nd body part guide member semiconductor integrated circuit connection electrode ground electrode circuit board 912, 913, 922, 923 Concave 23 320343