WO2023140655A1

WO2023140655A1 - Electrically conductive contact pin

Info

Publication number: WO2023140655A1
Application number: PCT/KR2023/000965
Authority: WO
Inventors: 안범모; 박승호; 홍창희
Original assignee: (주)포인트엔지니어링
Priority date: 2022-01-21
Filing date: 2023-01-19
Publication date: 2023-07-27
Also published as: KR20230113027A; TW202342992A

Abstract

The present invention provides an electrically conductive contact pin which improves the reliability of a test for a subject, and is prevented from departure from a guide plate.

Description

electrically conductive contact pins

The present invention relates to electrically conductive contact pins.

The electrical property test of a semiconductor device is performed by bringing a test object (semiconductor wafer or semiconductor package) close to a test device having a plurality of electrically conductive contact pins and contacting the electrically conductive contact pins with corresponding external terminals (solderbones or bumps, etc.) on the test object. Examples of testing devices include, but are not limited to, probe cards or test sockets.

Conventional test sockets include a pogo type test socket and a rubber type test socket.

An electrically conductive contact pin (hereinafter referred to as 'pogo type socket pin') used in a pogo type test socket includes a pin unit and a barrel accommodating the pin unit. By providing a spring member between the plungers at both ends of the pin portion, it is possible to apply necessary contact pressure and absorb shock at the contact position. In order to slide between the fin and the barrel, a gap must exist between the outer surface of the fin and the inner surface of the barrel. However, since the pogo-type socket pin is manufactured separately from the barrel and the pin and then combined and used, it is impossible to precisely manage the gap, such that the outer surface of the pin is separated from the inner surface of the barrel more than necessary. Therefore, since electrical signals are lost and distorted in the process of being transferred to the barrel via the plungers at both ends, contact stability is not constant. In addition, the pin portion has a sharp tip portion in order to increase the contact effect with the external terminal of the test object. The pointed tip portion generates a press-fitting mark or groove on the external terminal of the test object after the test. Due to the loss of the contact shape of the external terminal, errors in vision inspection occur and reliability of the external terminal is deteriorated in a subsequent process such as soldering.

On the other hand, the electrically conductive contact pins (hereinafter referred to as 'rubber type socket pins') used in rubber-type test sockets have a structure in which conductive micro-balls are placed inside a silicone rubber, which is a rubber material. When stress is applied by placing an object (e.g., a semiconductor package) on top and closing the socket, the gold-based conductive micro-balls strongly press each other and increase conduction, making them electrically connected. However, this rubber-type socket pin has a problem in that contact stability is secured only when it is pressed with an excessive pressing force.

Meanwhile, with the advancement and high integration of semiconductor technology, the pitch of external terminals of an object to be inspected is becoming more narrow. However, conventional rubber-type socket pins are manufactured by preparing a molding material in which conductive particles are distributed in a fluid elastic material, inserting the molding material into a predetermined mold, and then applying a magnetic field in the thickness direction to arrange the conductive particles in the thickness direction. When the gap between the magnetic fields is narrowed, the conductive particles are irregularly oriented and signals flow in the plane direction. Therefore, existing rubber-type socket pins have limitations in responding to the narrow pitch technology trend.

In addition, since the pogo-type socket pin is used after separately manufacturing the barrel and the pin, it is difficult to manufacture them in a small size. Therefore, existing pogo-type socket pins also have limitations in responding to the narrow pitch technology trend.

Therefore, there is a need to develop a new type of electrically conductive contact pin and a test device having the same, which can improve test reliability for an object to be tested in line with recent technological trends.

[Prior art literature]

[Patent Literature]

(Patent Document 1) Republic of Korea Registration No. 10-0659944 Patent Registration

(Patent Document 2) Republic of Korea Registration No. 10-0952712 Patent Publication

The present invention has been made to solve the above-described problems of the prior art, and an object of the present invention is to provide an electrically conductive contact pin with improved test reliability for an object to be tested.

Further, the present invention aims to prevent the electrically conductive contact pins from being separated from the guide plate.

In order to solve the above problems and achieve the objects, an electrically conductive contact pin according to the present invention includes a boundary portion extending in the width direction; Supporting parts extending in the longitudinal direction from both sides of the boundary part; a first connection part provided on an upper part of the boundary part; a second connection part provided under the boundary part; and an elastic part connecting the first and second connection parts to the boundary part, wherein when the elastic part is compressed, at least one of the first and second connection parts contacts the support part and pushes the support part outward to bring the support part into close contact with the inner surface of the guide hole of the guide plate.

In addition, the elastic part includes a first elastic part connecting the boundary part and the first connection part and a second elastic part connecting the boundary part and the second connection part. As the first elastic part is compressed, the first connection part contacts the support part to push the support part outward to bring the support part into close contact with the inner surface of the guide hole of the guide plate, and the second connection part contacts the support part and pushes the support part outward as the second elastic part is compressed. The support part is brought into close contact with the inner surface of the guide hole of the guide plate.

In addition, at least one of the first and second connection parts includes a thin part located inside the support part and a thick part connected to the thin part, and the thick part is located inside the support part in a state of being in contact with the support part as the elastic part is compressed, and pushes the support part outward to bring the support part into close contact with the inner surface of the guide hole.

In addition, the first connecting part includes a first thin part located inside the support part and a first thick part provided on an upper part of the first thin part, and as the elastic part is compressed, the first thick part is located inside the support part in a state of being in contact with the support part, and pushes the support part outward to bring the support part into close contact with the inside of the guide hole.

In addition, the second connection part includes a second thin part located inside the support part and a second thick part provided under the second thin part, and as the elastic part is compressed, the second thick part is in contact with the support part. It is located inside the support part and pushes the support part outward to bring the support part into close contact with the inner surface of the guide hole.

In addition, the first connection part may include a base part connected to the elastic part; at least two protrusions extending in one direction from the base; and a groove provided between the two protrusions.

In addition, the elastic part includes a first elastic part connecting the boundary part and the first connection part, and a second elastic part connecting the boundary part and the second connection part. The first elastic part has a 1-1 elastic protrusion at one end and is connected to the first connection part through the 1-1 elastic protrusion, and has a 1-2 elastic protrusion at the other end and is connected to the boundary part through the 1-2 elastic protrusion.

The elastic part includes a first elastic part connecting the boundary part and the first connection part, and a second elastic part connecting the boundary part and the second connection part.

In addition, the support portion, a first holding portion provided at one end; and a second catching portion provided at the other end.

In addition, a plurality of metal layers are formed by being stacked in the thickness direction of the electrically conductive contact pin.

In addition, a fine trench provided on the side surface is included.

The electrically conductive contact pins of the present invention can prevent the electrically conductive contact pins from being separated from the guide plate during inspection of an object to be inspected, and can improve reliability of inspection of the object to be inspected.

1 is a plan view of an electrically conductive contact pin according to a first preferred embodiment of the present invention;

2 is a perspective view of an electrically conductive contact pin according to a first preferred embodiment of the present invention;

Figure 3 is a perspective view of an installation member according to a preferred embodiment of the present invention.

4 shows an electrically conductive contact pin according to a first preferred embodiment of the present invention installed on an installation member;

Figure 5 is a diagram showing the inspection of the inspection target using the inspection device according to a preferred embodiment of the present invention.

6 is a diagram representing a current path of an electrically conductive contact pin according to a first preferred embodiment of the present invention;

7A to 7D are diagrams illustrating a method of manufacturing an electrically conductive contact pin according to a first preferred embodiment of the present invention.

8 is a side view of an electrically conductive contact pin according to a first preferred embodiment of the present invention;

9 is a plan view of an electrically conductive contact pin according to a second preferred embodiment of the present invention.

10 is a plan view of an electrically conductive contact pin according to a third preferred embodiment of the present invention.

11 is a plan view of an electrically conductive contact pin according to a fourth preferred embodiment of the present invention.

The following merely illustrates the principles of the invention. Therefore, those skilled in the art can invent various devices that embody the principles of the invention and fall within the concept and scope of the invention, even though not explicitly described or shown herein. In addition, it should be understood that all conditional terms and embodiments listed in this specification are, in principle, expressly intended only for the purpose of understanding the concept of the invention, and are not limited to such specifically listed embodiments and conditions.

The above objects, features and advantages will become more apparent through the following detailed description in conjunction with the accompanying drawings, and accordingly, those skilled in the art to which the invention belongs will be able to easily implement the technical idea of the invention.

Embodiments described in this specification will be described with reference to sectional views and/or perspective views, which are ideal exemplary views of the present invention. Films and thicknesses of regions shown in these drawings are exaggerated for effective description of technical content. The shape of the illustrative drawings may be modified due to manufacturing techniques and/or tolerances. Therefore, embodiments of the present invention are not limited to the specific shapes shown, but also include changes in shapes generated according to manufacturing processes. Technical terms used in this specification are used only to describe specific embodiments, and are not intended to limit the present invention. Singular expressions include plural expressions unless the context clearly dictates otherwise. In this specification, terms such as "comprise" or "comprise" are intended to designate that the features, numbers, steps, operations, components, parts, or combinations thereof described in this specification exist, but it should be understood that the presence or addition of one or more other features or numbers, steps, operations, components, parts, or combinations thereof is not precluded.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description of various embodiments, the same names and the same reference numbers will be given to components performing the same functions even if the embodiments are different. In addition, configurations and operations already described in other embodiments will be omitted for convenience.

The electrically

conductive contact pins

100a, 100b, 100c, and 100d according to a preferred embodiment of the present invention are provided in the test device 10 and electrically and physically contact the test object 400 to transmit electrical signals. Used. The inspection device 10 may be an inspection device used in a semiconductor manufacturing process, and may be, for example, a probe card or a test socket. The test device 10 includes an installation member 200 having electrically

conductive contact pins

100a, 100b, 100c and 100d and a through hole 210 accommodating the electrically

conductive contact pins

100a, 100b, 100c and 100d. The installation member 200 includes a guide plate GP having a guide hole GH.

The electrically

conductive contact pins

100a, 100b, 100c, and 100d according to an embodiment of the present invention may be probe pins provided in a probe card or socket pins provided in a test socket. Hereinafter, socket pins are exemplified and described as examples of the electrically

conductive contact pins

100a, 100b, 100c, and 100d, but the electrically

conductive contact pins

100a, 100b, 100c, and 100d according to a preferred embodiment of the present invention are not limited thereto, and all pins for checking whether the object 400 is defective by applying electricity are included.

Meanwhile, although the first to fourth embodiments are separately described below, embodiments in which configurations of each embodiment are combined are also included in preferred embodiments of the present invention.

The width direction of the electrically

conductive contact pins

100a, 100b, 100c, and 100d described below is the ±x direction indicated in the drawing, the length direction of the electrically

conductive contact pins

100a, 100b, 100c, and 100d is the ±y direction indicated in the drawing, and the thickness direction of the electrically

conductive contact pins

100a, 100b, 100c, and 100d is indicated in the drawing. is in the ±z direction.

The electrically

conductive contact pins

100a, 100b, 100c, and 100d have an overall length dimension L in a longitudinal direction (±y direction), an overall thickness dimension H in a thickness direction (±z direction) perpendicular to the longitudinal direction, and an overall width dimension (W) in a width direction (±x direction) perpendicular to the longitudinal direction.

Example 1

Hereinafter, an electrically conductive contact pin 100a according to a first preferred embodiment of the present invention will be described with reference to FIGS. 1 to 8 . 1 is a plan view of an electrically conductive contact pin 100a according to a first preferred embodiment of the present invention, FIG. 2 is a perspective view of the electrically conductive contact pin 100a according to a first preferred embodiment of the present invention, FIG. 3 is a perspective view of an installation member 200 according to a first preferred embodiment of the present invention, and FIG. FIG. 5 is a diagram showing inspection of an object to be inspected 400 using the inspection device 10 according to a preferred embodiment of the present invention, FIG. 6 is a diagram showing a current path of the electrically conductive contact pin 100a according to the first preferred embodiment of the present invention, FIGS. This is a side view of the electrically conductive contact pin 100a according to the first embodiment.

Referring to FIG. 1 , an electrically conductive contact pin according to a first preferred embodiment of the present invention (hereinafter referred to as 'the electrically conductive contact pin 100a of the first embodiment') includes a boundary portion 140 extending in the width direction, a support portion 130 extending in the longitudinal direction from both sides of the boundary portion 140, a first connection portion 110 provided on the upper portion of the boundary portion 140, and a lower portion of the boundary portion 140. An elastic part (SP) connecting the first and

second connection parts

110 and 120 to the second connection part 120 and the boundary part 140 is included.

The boundary portion 140 extends in the width direction (±x direction).

The support portion 130 extends from both sides of the boundary portion 140 in the longitudinal direction (±y direction). Accordingly, the support part 130 includes a first support part 134 provided on one side (specifically, the left side) of the boundary part 140 and a second support part 135 provided on the other side (specifically, right side) of the boundary part 140.

The first and

second support portions

134 and 135 are connected to each other through the boundary portion 140 with the boundary portion 140 extending in the width direction interposed therebetween.

The first and

second support portions

134 and 135 are formed along the length direction of the electrically conductive contact pin 100a of the first embodiment, and the first and

second support portions

134 and 135 are integrally connected to the boundary portion 140 extending along the width direction of the electrically conductive contact pin 100a of the first embodiment.

Based on the boundary portion 140, the upper side and the lower side of the support portion 130 may be closed or opened with respect to each other in the width direction. Through this, the electrically conductive contact pin 100a of the first embodiment can be inserted into the guide hole GH of the guide plate GP, and the process of installing and replacing the conductive contact pin 100a can be performed more easily.

The electrically conductive contact pin 100a of the first embodiment is provided with spaces above and below the boundary 140 by the boundary 140 and the support 130 provided on both sides of the boundary 140.

The first connection part 110 is provided in the upper space US and is provided above the boundary part 140 . The second connection part 120 is provided in the lower space LS and provided below the boundary part 140 .

The elastic part SP includes a first elastic part 150 connecting the boundary part 140 and the first connection part 110 and a second elastic part 160 connecting the boundary part 140 and the second connection part 120.

The first elastic part 150 is provided in the upper space US and connects the boundary part 140 and the first connection part 110 spaced apart from the boundary part 140 . The first elastic part 150 has a 1-1 elastic protrusion 151 at one end and is connected to the first connection part 110 through the 1-1 elastic protrusion 151, and has a 1-2 elastic protrusion 152 at the other end and is connected to the boundary portion 140 through the 1-2 elastic protrusion 152.

The 1-1st elastic protrusion 151 is provided above the first elastic part 150 and is provided between the base part 111 and the first elastic part 150 in the longitudinal direction, and is formed on the central axis of the electrically conductive contact pin 100a of the first embodiment in the longitudinal direction. The 1-2nd elastic protrusion 152 is provided below the first elastic part 150 and is provided between the boundary part 140 and the first elastic part 150 in the longitudinal direction, and is provided to deviate from the central axis of the electrically conductive contact pin 100a of the first embodiment to one side (specifically, to the left side).

The first elastic part 150 is compressed or stretched based on the boundary part 140 . When the first elastic part 150 is compressed and deformed, the positional movement is limited by the boundary part 140 fixed to the support part 130 .

The second elastic part 160 is provided in the lower space LS and connects the boundary part 140 and the second connection part 120 spaced apart from the boundary part 140 . The second elastic part 160 has a 2-1 elastic protrusion 161 at one end and is connected to the second connection part 120 through the 2-1 elastic protrusion 161, and has a 2-2 elastic protrusion 162 at the other end and is connected to the boundary 140 through the 2-2 elastic protrusion 162.

The 2-1st elastic protrusion 161 is provided under the second elastic part 160 and is provided between the contact body part 121 and the second elastic part 160 in the longitudinal direction, and is formed on the central axis of the electrically conductive contact pin 100a of the first embodiment in the longitudinal direction. The 2-2nd elastic protrusion 162 is provided on the upper part of the second elastic part 160 and is provided between the boundary part 140 and the second elastic part 160 in the longitudinal direction. The 2-2nd elastic protrusion 162 is provided above the second elastic part 160 to deviate from the longitudinal central axis of the electrically conductive contact pin 100a of the first embodiment to one side (specifically, to the right), but is provided in the opposite direction to the 1-2nd elastic protrusion 152.

The second elastic part 160 is compressed or stretched based on the boundary part 140 . When the second elastic part 160 is compressed and deformed, the positional movement is limited by the boundary part 140 fixed to the support part 130 .

In the electrically conductive contact pin 100a of the first embodiment, a region corresponding to the upper space US where the first elastic part 150 is provided and a region corresponding to the lower space LS where the second elastic part 160 is provided are distinguished from each other based on the boundary part 140. Accordingly, foreign substances introduced from the first elastic part 150 cannot flow into the second elastic part 160, and foreign substances introduced from the second elastic part 160 cannot flow into the first elastic part 150. The electrically conductive contact pin 100a of the first embodiment restricts the movement of foreign matter introduced into the support part 130 through the boundary part 140 to another area, thereby preventing the operation of the first and second

elastic parts

150 and 160 from being disturbed by the foreign matter.

The boundary portion 140, the support portion 130, the first connection portion 110, the second connection portion 120, the first elastic portion 150, and the second elastic portion 160 are integrally provided. The boundary portion 140, the support portion 130, the first connection portion 110, the second connection portion 120, the first elastic portion 150, and the second elastic portion 160 are manufactured at once using a plating process.

Referring to FIGS. 7A to 7D , the electrically conductive contact pins 100a of the first embodiment are formed by filling the inner space 1100 with a metal material by electroplating using a mold 1000 having an inner space 1100. Accordingly, the boundary portion 140, the support portion 130, the first connection portion 110, the second connection portion 120, the first elastic portion 150, and the second elastic portion 160 are connected to each other and manufactured as an integral body.

Whereas conventional electrically conductive contact pins are provided by separately manufacturing barrels and pins and then assembling or combining them, in the electrically conductive contact pin 100a of the first embodiment, the boundary portion 140, the support portion 130, the first connection portion 110, the second connection portion 120, the first elastic portion 150, and the second elastic portion 160 are fabricated at once using a plating process. Therefore, there is a structural difference in that the electrically conductive contact pin 100a of the first embodiment is integrally provided.

Referring to FIG. 2 , the electrically conductive contact pins 100a of the first embodiment have the same shape in each section in the thickness direction. The electrically conductive contact pins 100a of the first embodiment are formed by extending the same cross-sectional shape in the thickness direction.

The electrically conductive contact pin 100a of the first embodiment is provided by stacking a plurality of metal layers in the thickness direction. The plurality of metal layers include a first metal layer 101 and a second metal layer 102 .

The first metal layer 101 is a metal having relatively high wear resistance compared to the second metal layer 102, and is preferably made of rhodium (Rd), platinum (Pt), iridium (Ir), palladium (Pd), nickel (Ni), manganese (Mn), tungsten (W), phosphorus (Ph) or an alloy thereof, or a palladium-cobalt (PdCo) alloy, a palladium-nickel (PdNi) alloy, or a nickel- It may be formed of a metal selected from a phosphorus (NiPh) alloy, a nickel-manganese (NiMn), a nickel-cobalt (NiCo), or a nickel-tungsten (NiW) alloy. The second metal layer 102 is a metal having relatively high electrical conductivity compared to the first metal layer 101, and is preferably selected from among copper (Cu), silver (Ag), gold (Au), or alloys thereof. Can be formed of. However, it is not limited thereto.

The first metal layer 101 is provided on the bottom and top surfaces of the electrically conductive contact pin 100a of the first embodiment in the thickness direction, and the second metal layer 102 is provided between the first metal layers 1 . For example, the electrically conductive contact pin 100a of the first embodiment is provided by alternately stacking a first metal layer 101 , a second metal layer 102 , and a first metal layer 101 in that order. The number of layers to be stacked may consist of three or more layers.

One end of the first connection part 110 is a free end and the other end is connected to the first elastic part 150 so that it can move vertically (±y direction) elastically by contact pressure.

Referring to Figures 5 and 6, when the test object 400 is inspected, the connection terminal 410 of the test object 400 moves downward (-y direction) while being in contact with the upper surface of the first connector 110. In this case, the elastic part SP is compressed and deformed. In the electrically conductive contact pin 100a of the first embodiment, at least one of the first and

second connection parts

110 and 120 contacts the support part 130 according to the compressive deformation of the elastic part SP, and pushes the support part 130 outward to bring the support part 130 into close contact with the inner surface of the guide hole GH of the guide plate GP. The boundary part 140 is provided to be fixed to the support part 130, and when the elastic parts SP provided in the upper space US and the lower space LS are compressed and deformed with respect to the boundary part 140, the upper space US and performs a function of limiting the positional movement of the elastic parts SP provided in the lower space LS.

When the connection terminal 410 of the test object 400 moves downward and contacts the first connection part 110, the first elastic part 150 connected to the first connection part 110 is compressed and deformed. Due to the fixed state of the boundary portion 140 , the first elastic portion 150 provided in the upper space US based on the boundary portion 140 is compressed and deformed by the connection terminal 410 . The first connection part 110 comes into contact with the support part 130 while moving downward. The first connection part 110 contacts the support part 130 and pushes the support part 130 outward to bring the support part 130 into close contact with the inner surface of the guide hole GH of the guide plate GP.

The first connection portion 110 includes a base portion 111 connected to the 1-1 elastic protrusion 151, at least two protrusions 112 extending in one direction (+y direction) of the base portion 111, and a groove portion 113 provided between the two protrusions 112.

The first connector 110 implements multi-contact with the connection terminal 410 through the plurality of protrusions 112 .

The upper surface of the protrusion 112 is in contact with the lower surface of the connection terminal 410 of the test object 400 . The connection terminal 410 of the inspection object 400 may be provided in the form of a solder ball. In this case, at least a portion of the upper surface of the protruding portion 112 is formed to have a curvature so as to correspond to the curvature of the connecting terminal 410 .

The groove portion 113 is provided between the two protruding portions 112, and when the protruding portion 112 contacts the lower surface of the connection terminal 410, the lower surface of the connecting terminal 410 and the longitudinal direction form a predetermined distance apart. The bottom surface of the groove portion 113 may be formed as a flat surface or inclined toward the center portion. The electrically conductive contact pin 100a of the first embodiment has a groove portion 113 having a bottom surface inclined toward the center portion. When the process of contacting the first connector 110 and the connection terminal 410 is performed multiple times, particles generated from the connection terminal 410 may settle on the upper surface of the first connector 110 . In the electrically conductive contact pin 100a of the first embodiment, a groove 113 is formed between the protruding portion 112 including a contact surface that is in direct contact with the connection terminal 410, so that particles are accumulated toward the groove portion 113. At this time, the bottom surface of the groove part 113 is formed in a shape inclined toward the center part, so that the particles can be more effectively aggregated and accommodated. In other words, the groove 113 may function as a space for temporarily accommodating particles generated in the contact process. The electrically conductive contact pin 100a of the first embodiment accommodates particles through the groove portion 113, thereby minimizing a phenomenon in which the particles accumulate on the contact surface of the protruding portion 112 and interfere with electrical connection.

In addition, after the first connection part 110 moves downward and contacts the support part 130, the ends of the two protrusions 112 can be brought closer to each other through the configuration of the groove part 113. As a result, it is possible to make contact more efficiently in response to the curvature of the solder ball-shaped connection terminal 410.

At least one of the first and

second connection parts

110 and 120 includes a thin part TP located inside the support part 130 and a thick part HP connected to the thin part TP. The electrically conductive contact pin 100a of the first embodiment includes a first thin portion 116 and a first thick portion 115 at the first connection portion 110, and a second thin portion 126 and a second thick portion 125 at the second connection portion 120.

The first connection part 110 includes an extension part extending in the other direction (-y direction) of the base part 111, and the extension part includes a first thick part 115 and a first thin part 116.

At least a portion of the extension of the first connection portion 110 is located between the support portion 130 and the first elastic portion 150, so that at least a portion of the extension portion of the first connection portion 110 overlaps the support portion 130 in the width direction. Specifically, at least a portion of the extension part overlaps with the upper end of the support part 130 including the first locking part 131 on the inside of the support part 130 in the width direction. When an eccentric pressing force is applied to the first connection part 110 by the contact terminal 410 in contact with the first connection part 110, the extension of the first connection part 110 comes into contact with the support part 130 and is supported by the support part 130 to prevent the first elastic part 150 from being excessively buckled in the left and right directions.

The first connection portion 110 includes a first thick portion 115 and a second thin portion 126 through an extension portion extending from both sides of the base portion 111 in the other direction. The first connection part 110 is provided with a part extending in length from both sides of the base part 111 in the other direction, but is provided in a form in which the width decreases toward the boundary part 140 side. Through this, the first connection portion 110 includes a first thick portion 115 and a first thin portion 116 having different widths.

The first connection part 110 has one end directly connected to both sides of the base part 111 and has a first thick part 115 through a part having a relatively large width compared to the first thin part 116 . The first connection part 110 includes a first thin part 116 having a relatively smaller width than the first thick part 115 at the other end of the first thick part 115 . The first thin portion 116 has a certain width and is spaced apart from the inner surface of the support portion 130 in a vertical form and is located inside the support portion 130 . The first connection portion 110 has a first width deformation portion 114 recessed inward in the width direction on a side surface. The first connection part 110 includes a first thick part 115 and a first thin part 116 having different widths through the first width changing part 114 .

The first connection portion 110 is spaced apart from the support portion 130 before the connection terminal 410 of the test object 400 contacts the first connection portion 110 through the configuration of the first width deformation portion 114 . Since the first connection part 110 and the support part 130 are spaced apart from each other, the first elastic part 150 can be more easily compressed and deformed when the pressing force of the connection terminal 410 acts.

When the first connection part 110 moves downward (-y direction) according to the compressive deformation of the first elastic part 150, the distance between the support part 130 and the first connection part 110 gradually decreases, and the first thick part 115 is located inside the support part 130. The first thick portion 115 located inside the support portion 130 pushes the support portion 130 outward while in contact with the support portion 130 and adheres the support portion 130 to the inner surface of the guide hole GH of the guide plate GP.

Referring to FIG. 4 , in the electrically conductive contact pin 100a of the first embodiment before being pressed by the connection terminal 410, the first connection part 110 and the support part 130 are separated from each other. The support part 130 is spaced apart from the first connection part 110 on the inside in the width direction and finely folded inward in the width direction while being spaced apart from the inner surface of the guide hole GH on the outside in the width direction. Accordingly, a fine separation distance exists between the support part 130 and the inner surface of the guide hole GH. Referring to FIGS. 5 and 6 , the electrically conductive contact pin 100a of the first embodiment is pressed by the connection terminal 410 so that the first elastic part 150 is compressed and deformed so that the first connection part 110 moves downward. As the first connection part 110 gradually moves downward, the first thick part 115 is located inside the support part 130 and is in contact with the inner surface of the support part 130 at the same time. The support portion 130, which was in a state of being finely curled inward in the width direction before being pressed by the connection terminal 410, is brought into close contact with the inner surface of the guide hole GH while being widened outward in the width direction by the force that pushes the support portion 130 outward while the first thick portion 115 contacts it. Accordingly, a structure is formed in which the upper side of the support portion 130 connected to the boundary portion 140 to form the upper space US is tightly fixed to the inside of the guide hole GH.

When the second connector 120 contacts the connection pad 310 of the circuit board 300 and is pressed, the second elastic portion 160 compressively deforms and the second connector 120 moves upward (+y direction). Due to the fixed state of the boundary part 140, the second elastic part 160 provided in the lower space LS based on the boundary part 140 is compressed and deformed by the connection pad 310, and the second connection part 120 moves upward.

Before the second connection part 120 moves upward, since the second connection part 120 is in a state of being spaced apart from the support part 130, compression deformation of the second elastic part 160 is more easily achieved. When the second connection part 120 moves upward by a predetermined distance, the second connection part 120 comes into contact with the support part 130 . The second connection part 120 contacts the support part 130 and pushes the support part 130 outward to bring the support part 130 into close contact with the inner surface of the guide hole GH of the guide plate GP.

The second connection part 120 includes a contact body part 121 connected to the 2-1 elastic protrusion 161 and at least two contact parts 122 extending in one direction (-y direction) of the contact body part 121. One end of the second connection part 120 is a free end and the other end is connected to the second elastic part 160 so that it can move vertically (±y direction) elastically by the contact pressure of the connection pad 310 .

The second connection portion 120 includes a concave portion C between the two contact portions 122 . The second connection part 120 can make multi-contact with the connection pad 310 through the contact part 122 .

The second connection part 120 includes an extension part extending in the other direction (+y direction) of the contact body part 121, and the extension part includes a second thick part 125 and a second thin part 126.

At least a portion of the extension of the second connection portion 120 is located between the support portion 130 and the second elastic portion 160, so that at least a portion of the extension portion of the second connection portion 120 overlaps the support portion 130 in the width direction. Specifically, the extension part is positioned so that at least a part overlaps with the lower end of the support part 130 including the second locking part 132 on the inside of the support part 130 in the width direction. When an eccentric pressing force is applied to the second connection part 110 by the connection pad 310 in contact with the second connection part 110, the extension of the second connection part 120 comes into contact with the support part 130 and is supported by the support part 130 to prevent the second elastic part 160 from being excessively buckled in the left and right directions.

The second connection part 120 includes a second thick part 125 and a second thin part 126 through a part extending in the other direction from both sides of the contact body part 121 . The second connection portion 120 has a portion extending in length from both sides of the contact body portion 121 in the other direction, but is provided in a form in which the width decreases toward the boundary portion 140 side. Through this, the second connection portion 120 includes a second thick portion 125 and a second thin portion 126 having different widths.

The second connection part 120 has a second thick part 125 having a relatively large width compared to the second thin part 126 at a portion where one end is inclined outwardly in the width direction from both sides of the contact body part 121 and extends upward. The second connection part 120 includes a second thin part 126 having a relatively smaller width than the second thick part 125 at the other end of the second thick part 125 . The second thin portion 126 is spaced apart from the support portion 130 in a vertical form having a certain width and is located inside the support portion 130 . The second connector 120 includes a second width deformation portion 124 recessed inward in the width direction on a side surface corresponding to the second locking portion 132 . The second connector 120 has the second thick portion 125 and the second thin portion 126 having different widths through the second width changing portion 124 .

The second connection part 120 is in a state of being spaced apart from the support part 130 before the contact part 122 contacts the connection pad 310 of the circuit board 300 through the configuration of the second width changing part 124 . Since the second connection portion 120 and the support portion 130 are spaced apart from each other, the second elastic portion 160 can be more easily compressed and deformed when a pressing force acts on the contact portion 122 .

When the second connection part 120 moves upward according to the compressive deformation of the second elastic part 160, the distance between the support part 130 and the second connection part 120 gradually decreases, and the second thick part 125 is located inside the support part 130. The second thick part 125 located inside the support part 130 pushes the support part 130 outward while in contact with the inner surface of the support part 130 and the guide hole GH of the guide plate GP. Adhere the support part 130 to the inner surface.

Referring to FIG. 4 , in the electrically conductive contact pin 100a of the first embodiment before being pressed by the connection pad 310, the second connection part 120 and the support part 130 are separated from each other. In the support part 130, except for the part in contact with the lower surface of the guide hole GH through the second hooking part 132, the remaining part is spaced apart from the second connection part 120 in the width direction, and the guide hole outside in the width direction. It is in a state of being finely closed inward in the width direction while being spaced apart from the inner surface of the hole (GH). Accordingly, a fine separation distance exists between the support part 130 and the inner surface of the guide hole GH. The support part 130 is provided in a form that is slightly widened outward in the width direction to easily form a structure that is caught in the lower opening of the guide hole by bringing the second hooking part 132 into close contact with the lower surface of the guide hole GH. Specifically, the lower side of the support part 130 forming the lower space LS is provided so as to be finely widened outward in the width direction. As a result, the inner surface of the support part 130 forming the lower space LS has an inclined shape.

Meanwhile, referring to FIGS. 5 and 6, the electrically conductive contact pin 100a of the first embodiment is pressed by the connection pad 210 so that the second elastic part 160 is compressed and deformed, so that the second connection part 120 moves upward. As the second connection part 120 gradually moves upward, the second thick part 125 is located inside the support part 130 and is in contact with the inner surface of the support part 130 at the same time. The support portion 130, which was slightly folded inward in the width direction before being pressed by the connection pad 310, expands outward in the width direction by the force that pushes the support portion 130 outward while the second thick portion 125 comes into contact with it. Accordingly, a structure is formed in which the lower side of the support portion 130 connected to the boundary portion 140 to form the lower space LS is tightly fixed to the inside of the guide hole GH.

As described with reference to FIGS. 5 and 6 , the electrically conductive contact pin 100a of the first embodiment pushes the support portion 130 outward through the configuration of the first and

second connectors

110 and 120 when inspecting the object 400. Through this, the electrically conductive contact pin 100a of the first embodiment may come into close contact with the guide hole GH of the guide hole and prevent a problem of being separated from the guide hole GH during inspection.

Referring to FIG. 4 , before the inspection of the object 400 is performed, the first elastic part 150 does not receive the pressing force by the connection terminal 410 and the second elastic part 160 does not receive the pressing force of the connection pad 310. Therefore, the support part 130 is spaced apart from the inner surface of the guide hole GH.

Referring to FIGS. 5 and 6 , when the inspection object 400 is inspected, the first and second

elastic parts

150 and 160 come into contact with the connection terminal 410 and the connection pad 310 , respectively, to receive a pressing force. At this time, in the electrically conductive contact pin 100a of the first embodiment, the thick part HP is located inside the support part 130 according to the compressive deformation of the elastic part SP, and through the configuration of the thick part HP, the support part 130 is pushed outward to form a structure in which the support part 130 adheres to the inner surface of the guide hole GH. Through this, a problem in which the electrically conductive contact pin 100a of the first embodiment is separated from the guide hole GH when the inspection target 400 is performed can be prevented. Furthermore, the inspection efficiency of the inspection target 400 can be improved.

The electrically conductive contact pin 100a of the first embodiment includes a first catching part 131 provided at one end of the support part 130 and a second catching part 132 provided at the other end of the support part 130 . As the support part 130 is provided as the first and

second support parts

134 and 135, the first and

second locking parts

131 and 132 are provided at one end and the other end of the first and

second support parts

134 and 135, respectively.

The electrically conductive contact pin 100a of the first embodiment can prevent the first and second

elastic parts

150 and 160 from being separated from the guide hole GH through the first and second hooking

parts

131 and 132 even before compression deformation.

The first and second hooking

parts

131 and 132 form a structure to prevent the electrically conductive contact pin 100a of the first embodiment from being separated from the guide hole GH while being inserted into the guide hole GH.

The first locking portion 131 forms a structure that is caught in the upper opening of the guide hole GH so that the electrically conductive contact pin 100a of the first embodiment does not escape downward. The first locking portion 131 is composed of an inclined portion 131a inclined inwardly in the width direction and a protruding jaw 131b protruding outwardly in the width direction. The electrically conductive contact pin 100a of the first embodiment is easily inserted into the guide hole GH through the configuration of the inclined portion 131a of the first hooking portion 131 . In addition, the electrically conductive contact pin 100a of the first embodiment is prevented from escaping to the bottom of the guide hole GH after being installed in the guide hole GH through the configuration of the protruding jaw 131b.

The second locking portion 132 is configured to protrude outward in the width direction. Through this, the upward movement of the electrically conductive contact pin 100a of the first embodiment is restricted.

When the conductive contact pin 100a of the first embodiment is inserted into the guide hole GH, the upper end of the conductive contact pin 100a including the first hooking part 131 is compressed inward in the width direction and the first connection part 110 side is first inserted into the guide hole GH, or the lower end of the support part 130 including the second hooking part 132 is compressed inward in the width direction to insert the second connection part 120. ) side may be inserted into the guide hole GH first. Preferably, the end (specifically, the upper end of the electrically conductive contact pin 100a of the first embodiment) including the first hooking portion 131 having the inclined portion 131a and the protruding jaw 131b may be compressed in the width direction and inserted into the guide hole GH first.

Referring to FIG. 4 , the electrically conductive contact pin 100a of the first embodiment compresses the upper end in the width direction so that the width thereof is smaller than the inner width of the guide hole GH, and then inserted into the guide hole GH through the lower opening of the guide hole GH.

Then, the electrically conductive contact pin 100a of the first embodiment is forcibly pushed into the guide hole GH by pressing it from the bottom to the top. The electrically conductive contact pin 100a of the first embodiment is compressed in the width direction and moved to the top of the guide hole GH. At this time, the electrically conductive contact pin 100a of the first embodiment slides along the inner surface of the guide hole GH through the inclined portion 131a of the first hooking portion 131 and more easily moves from the bottom of the guide hole GH to the top.

Referring to FIG. 4 , when the first hooking part 131 passes through the upper opening of the guide hole GH, the electrically conductive contact pin 100a of the first embodiment is pushed upward until the second hooking part 132 is supported on the lower surface of the guide hole GH. Through this, a part (specifically, the upper side) of the support part 130 including the first hanging part 131 protrudes from the upper surface of the guide plate GP. The support part 130 is formed to be longer than the length of the guide hole GH, and at least a part of it protrudes outward of the guide hole GH.

The support 130 may secure a contact stroke of the test object 400 through a length h protruding outward from the guide hole GH. The support part 130 secures a free space equal to the protruding length h between the upper surface of the plate GP formed around the guide hole GH through the length h protruding outward from the guide hole GH. Due to this, when the electrically conductive contact pin 100a of the first embodiment is pressed by the contact terminal 410 and moves downward, the electrically conductive contact pin 100a of the first embodiment can move downward as a whole within the free space provided through the protruding length h.

When the contact terminal 410 moves downward to contact the electrically conductive contact pin 100a of the first embodiment, the stroke may not be constant. Therefore, when the protruding length h of the support portion 130 is not secured from the guide hole GH providing a free space between the support portion 130 and the guide plate GP, the electrically conductive contact pin 100a of the first embodiment may be excessively pressurized. This may cause damage to the electrically conductive contact pins 100a of the first embodiment.

However, in the electrically conductive contact pin 100a of the first embodiment, the upper end of the support 130 protrudes beyond the guide hole GH to secure the contact stroke through the protruding length h. Due to this, after first contacting the contact terminal 410 , the electrically conductive contact pin 100a of the first embodiment moves downward as a whole through the protruding length h of the support part 130 , and damage can be prevented. Then, the electrically conductive contact pin 100a of the first embodiment is closely fixed at a certain position through the thick portion HP, so that the test can be performed in a state in which separation is prevented. The electrically conductive contact pins 100a of the first embodiment are prevented from being damaged and separated, so that inspection can be performed more effectively and inspection efficiency and inspection reliability can be improved.

The protruding length (h) may be formed to be 5 μm or more and 50 μm or less. If the protruding length h is less than 5 μm, it is difficult to secure the contact stroke of the object to be inspected, and if it exceeds 50 μm, excessive deformation of the contact pin 100a may occur or support portion 130 may be damaged. This is not preferable.

The electrically conductive contact pin 100a of the first embodiment is prevented from being separated from the guide hole GH through the first and second hooking

parts

131 and 132 even when the support part 130 and the inner surface of the guide hole GH are spaced apart from each other in the state of being inserted into the guide hole GH before performing the inspection.

Referring to FIG. 2 , the cross-sectional shapes of the first and second

elastic parts

150 and 160 in the thickness direction of the electrically conductive contact pin 100a of the first embodiment are the same in all thickness sections. This is possible by fabricating the electrically conductive contact pins 100a of the first embodiment through a plating process.

The first and second

elastic parts

150 and 160 have a shape in which a plate-shaped plate having an actual width t is repeatedly bent in an S shape, and the actual width t of the plate-shaped plate is generally constant.

The first and second

elastic parts

150 and 160 are formed by alternately connecting a plurality of straight parts 154 and a plurality of curved parts 153 . The straight portion 154 connects the curved portion 153 adjacent to the left and right, and the curved portion 153 connects the straight portion 154 adjacent to the top and bottom. The curved portion 153 is provided in an arc shape.

A straight portion 154 is disposed at the central portion of the first and second

elastic portions

150 and 160 and a curved portion 153 is disposed at an outer portion of the first and second

elastic portions

150 and 160 . The straight portion 154 is provided parallel to the width direction of the electrically conductive contact pin 100a of the first embodiment, so that the curved portion 153 is more easily deformed according to the contact pressure.

The first elastic part 150 requires an amount of compression sufficient for the first connection part 110 of the electrically conductive contact pin 100a of the first embodiment to make stable contact with the connection terminal 410 of the object 400 to be inspected, while the second elastic part 160, the second connection part 120 of the electrically conductive contact pin 100a of the first embodiment is connected to the connection pad 310 of the circuit board 300 A sufficient amount of compression is required to ensure stable contact with Therefore, the spring coefficient of the first elastic part 150 and the spring coefficient of the second elastic part 160 may be different from each other. For example, the length of the first elastic part 150 and the length of the second elastic part 160 may be provided differently. Alternatively, the width direction dimension of the first elastic part 150 and the width direction dimension of the second elastic part 160 may be provided differently from each other. Alternatively, at least one of the first and second

elastic parts

150 and 160 may be provided as one, and the other may be provided as at least two.

5 and 6, when the first and second

elastic parts

150 and 160 undergo compression deformation, the first connection part 110 and the second connection part 120 come into contact with the support part 130, and a current path is formed. Referring to FIG. 6 , a current path leading to the first connection part 110 , the support part 130 and the second connection part 120 is formed.

In addition, when the first elastic part 150 and the second elastic part 160 are compressed and deformed by pressing force, the first connection part 110 and the second connection part 120 are in close contact with the inner surface of the support part 130 through the thick part HP, and the frictional force increases. The electrically conductive contact pin 100a of the first embodiment distributes the stress applied to the first and second

elastic parts

150 and 160 as frictional force with the support part 130, thereby preventing the first and second

elastic parts

150 and 160 from being excessively deformed. Accordingly, the durability of the electrically conductive contact pin 100a of the first embodiment is improved.

In order to effectively respond to the high-frequency characteristic test of the test object 400, the overall length L of the electrically conductive contact pin 100a should be shortened. However, when the lengths of the first and second

elastic parts

150 and 160 are shortened, a problem of increasing contact pressure occurs. In order to keep the contact pressure from increasing while shortening the length of the first and second

elastic parts

150 and 160, the actual width t of the plate-shaped plates constituting the first and second

elastic parts

150 and 160 should be reduced. However, if the actual width t of the plate-shaped plate constituting the first and second

elastic parts

150 and 160 is reduced, the first and second

elastic parts

150 and 160 are easily damaged. In order to prevent breakage of the first and second

elastic parts

150 and 160 without increasing the contact pressure while shortening the length of the first and second

elastic parts

150 and 160, the total thickness H of the plate-shaped plates constituting the first and second

elastic parts

150 and 160 should be formed large.

The electrically conductive contact pin 100a of the first embodiment is formed such that the overall thickness H of the plate-shaped plate is large while reducing the actual width t of the plate-shaped plate. That is, the overall thickness dimension (H) is formed to be larger than the actual width (t) of the plate-shaped plate. Preferably, the actual width (t) of the plate-shaped plate constituting the electrically conductive contact pin (100a) of the first embodiment is provided in the range of 5 μm to 15 μm, the total thickness (H) is provided in the range of 70 μm to 200 μm, and the effective width (t) and the total thickness (H) of the plate-shaped plate are provided in the range of 1:5 to 1:30. For example, the actual width of the plate-like plate is formed to be substantially 10 μm, and the total thickness dimension (H) is formed to be 100 μm, so that the effective width (t) and the total thickness dimension (H) of the plate-like plate are formed at a ratio of 1:10. Can be formed.

Through this, it is possible to shorten the length of the first and second

elastic parts

150 and 160 while preventing damage to the first and second

elastic parts

150 and 160, and even if the length of the first and second

elastic parts

150 and 160 is shortened, it is possible to have an appropriate contact pressure. Furthermore, as it is possible to increase the total thickness H of the plate-shaped plates constituting the first and second

elastic parts

150 and 160 compared to the actual width t, the first and second

elastic parts

150 and 160 have a greater resistance to a moment acting in the forward and backward directions, and as a result, contact stability is improved.

As it is possible to shorten the length of the first and second

elastic parts

150 and 160, the overall thickness H and the overall length L of the electrically conductive contact pin 100a of the first embodiment are provided in the range of 1:3 to 1:9. Preferably, the overall length L of the electrically conductive contact pin 100a of the first embodiment may be provided in the range of 300 μm or more and less than 2 mm, more preferably in the range of 450 μm or more and 600 μm or less. In this way, it is possible to shorten the overall length L of the electrically conductive contact pin 100a of the first embodiment, so that it is easy to respond to high-frequency characteristics, and as the elastic restoration time of the first and second

elastic parts

150 and 160 is shortened, the test time can also be shortened.

In addition, as the plate-shaped plate constituting the electrically conductive contact pin 100a of the first embodiment is formed to have a size smaller than the thickness H, its actual width t is improved in bending resistance in the front and rear directions.

The overall thickness (H) and the overall width (W) of the electrically conductive contact pin 100a of the first embodiment are provided in the range of 1:1 to 1:5. Preferably, the overall thickness (H) of the electrically conductive contact pin (100a) of the first embodiment is provided in the range of 70 μm or more and less than or equal to 200 μm, the overall width (W) of the electrically conductive contact pin (100a) may be provided in the range of 100 μm or more and less than 500 μm, more preferably, the overall width (W) of the electrically conductive contact pin (100a) is provided in the range of 150 μm or more and less than 400 μm. can As such, by shortening the overall width W of the electrically conductive contact pin 100a of the first embodiment, it is possible to narrow the pitch.

Meanwhile, the overall thickness (H) and the overall width (W) of the electrically conductive contact pin 100a of the first embodiment may be formed to have substantially the same length. Accordingly, there is no need to bond a plurality of electrically conductive contact pins 100a in the thickness direction so that the overall thickness dimension H and the overall width dimension W are substantially the same length. In addition, as it is possible to form the overall thickness (H) and the overall width (W) of the electrically conductive contact pin (100a) to have substantially the same length, the resistance to the moment acting in the front and rear directions of the electrically conductive contact pin (100a) increases. As a result, the contact stability of the electrically conductive contact pin 100a is improved. Furthermore, according to the configuration in which the total thickness H of the electrically conductive contact pin 100a is 70 μm or more and the total thickness H and total width W are in the range of 1:1 to 1:5, the overall durability and deformation stability of the electrically conductive contact pin 100a are improved, and contact stability with the connection terminal 410 is improved. In addition, as the total thickness H of the electrically conductive contact pin 100a is formed to be 70 μm or more, the current carrying capacity can be improved.

An electrically conductive contact pin manufactured using a conventional photoresist mold has a small overall thickness (H) compared to an overall width (W). For example, a conventional electrically conductive contact pin has an overall thickness (H) of less than 70 μm and an overall thickness (H) and an overall width (W) in the range of 1:2 to 1:10. Therefore, the resistance to the moment that deforms the electrically conductive contact pin in the forward and backward directions by the contact pressure is weak. Conventionally, in order to prevent problems due to excessive deformation of elastic parts on the front and rear surfaces of the electrically conductive contact pins, it is considered to additionally form housings on the front and rear surfaces of the electrically conductive contact pins.

Hereinafter, a method of manufacturing the electrically conductive contact pin 100a of the first embodiment will be described.

FIG. 7A is a plan view of the mold 1000 in which the inner space 1100 is formed, and FIG. 7B is a cross-sectional view taken along line AA′ of FIG. 7A.

The mold 1000 may be made of an anodic oxide film, photoresist, silicon wafer, or a material similar thereto. However, preferably, the mold 1000 may be made of an anodic oxide film material. The anodic oxide film means a film formed by anodic oxidation of a base metal, and the pore means a hole formed in the process of forming an anodic oxide film by anodic oxidation of a metal. For example, when the base metal is aluminum (Al) or an aluminum alloy, when the base metal is anodized, an anodized film made of aluminum oxide (Al ₂ O ₃ ) is formed on the surface of the base metal. However, the base metal is not limited thereto, and includes Ta, Nb, Ti, Zr, Hf, Zn, W, Sb, or an alloy thereof. The anodic oxide film formed as above is a barrier layer without pores formed vertically inside, and a porous layer with pores formed therein. When the base material is removed from the base material on which the anodic oxide film having the barrier layer and the porous layer is formed, only the anodic oxide film made of aluminum oxide (Al ₂ O ₃ ) remains. The anodic oxide film may be formed in a structure in which the barrier layer formed during anodic oxidation is removed to pass through the upper and lower pores, or in a structure in which the barrier layer formed during anodic oxidation remains as it is and seals one end of the upper and lower parts of the pore.

The anodic oxide film has a thermal expansion coefficient of 2 to 3 ppm/°C. Due to this, when exposed to a high temperature environment, thermal deformation due to temperature is small. Accordingly, the electrically conductive contact pins 100a of the first embodiment can be manufactured precisely without thermal deformation even in a high-temperature environment.

The electrically conductive contact pins 100a of the first embodiment are manufactured using the mold 1000 made of anodized film instead of the photoresist mold. Accordingly, the effect of implementing fine shapes and precision of shapes, which were limited in realization with photoresist molds, can be exhibited. In addition, in the case of a conventional photoresist mold, an electrically conductive contact pin having a thickness of 40 μm can be manufactured, but in the case of using the mold 1000 made of an anodized film material, an electrically conductive contact pin 100a having a thickness of 100 μm or more to 200 μm or less can be manufactured.

A seed layer 1200 is provided on the lower surface of the mold 1000 . The seed layer 1200 may be provided on the lower surface of the mold 1000 before forming the inner space 1100 in the mold 1000 . Meanwhile, a support substrate (not shown) is formed under the mold 1000 to improve handleability of the mold 1000 . In addition, in this case, the seed layer 1200 is formed on the upper surface of the support substrate and the mold 1000 in which the inner space 1100 is formed may be used by being coupled to the support substrate. The seed layer 1200 may be formed of a copper (Cu) material and may be formed by a deposition method.

The inner space 1100 may be formed by wet etching the mold 1000 made of an anodic oxide film. To this end, a photoresist is provided on the upper surface of the mold 1000 and patterned, and then the anodic oxide film in the patterned open area reacts with the etching solution to form the inner space 1100 .

Then, an electroplating process is performed on the inner space 1100 of the mold 1000 to form the electrically conductive contact pins 100a of the first embodiment. FIG. 7C is a plan view illustrating a state in which an electroplating process is performed on the inner space 1100, and FIG. 7D is a cross-sectional view taken along line AA' of FIG. 7C.

The metal layer is formed while growing in the thickness direction of the mold 1000 . Accordingly, the electrically conductive contact pin 100a of the first embodiment has the same cross-sectional shape in the thickness direction and is provided by stacking a plurality of metal layers in the thickness direction. The plurality of metal layers include a first metal layer 101 and a second metal layer 102 . The first metal layer 101 is a metal having relatively high wear resistance compared to the second metal layer 102, and is made of rhodium (Rd), platinum (Pt), iridium (Ir), palladium or an alloy thereof, a palladium-cobalt (PdCo) alloy, a palladium-nickel (PdNi) alloy, or a nickel-phosphorus ( nickel-phosphor (NiPh) alloy, nickel-manganese (NiMn), nickel-cobalt (NiCo) or nickel-tungsten (NiW) alloy. The second metal layer 102 is a metal having relatively high electrical conductivity compared to the first metal layer 101 and includes copper (Cu), silver (Ag), gold (Au), or an alloy thereof.

The first metal layer 101 is provided on the bottom and top surfaces of the electrically conductive contact pin 100a of the first embodiment in the thickness direction, and the second metal layer 102 is provided between the first metal layers 101 . For example, in the electrically conductive contact pin 100a of the first embodiment, the first metal layer 101, the second metal layer 102, and the first metal layer 101 are alternately stacked, and the number of layers may be three or more.

Meanwhile, after the plating process is completed, the first metal layer 101 and the second metal layer 102 may be made more dense by raising the temperature to a high temperature and pressing the metal layer on which the plating process is completed by applying pressure. When a photoresist material is used as a mold, the photoresist exists around the metal layer after the plating process is completed. Therefore, a process of raising the temperature to a high temperature and applying pressure cannot be performed.

Unlike this, according to a preferred embodiment of the present invention, a mold 1000 made of an anodic oxide film is provided around the metal layer on which the plating process is completed. Therefore, even if the temperature is raised to a high temperature, it is possible to densify the first metal layer 101 and the second metal layer 102 while minimizing deformation due to the low thermal expansion coefficient of the anodic oxide film. According to a preferred embodiment of the present invention, it is possible to obtain a higher density first metal layer 101 and second metal layer 102 compared to a technique using a photoresist as a mold.

When the electroplating process is completed, a process of removing the mold 1000 and the seed layer 1200 is performed. When the mold 1000 is made of an anodic oxide film material, the mold 1000 is removed using a solution that selectively reacts to the anodic oxide film material. Also, when the seed layer 1200 is made of copper (Cu), the seed layer 1200 is removed using a solution that selectively reacts with copper (Cu).

Referring to FIG. 8 , the electrically conductive contact pin 100a of the first embodiment includes a plurality of fine trenches 88 on its side surface. The fine trench 88 is formed by extending from the side of the electrically conductive contact pin 100a in the thickness direction of the electrically conductive contact pin 100a. Here, the thickness direction of the electrically conductive contact pin 100a means a direction in which metal fillers grow during electroplating.

The electrically conductive contact pin 100a is formed by alternately stacking the first metal layer 101 and the second metal layer 102, and the fine trench 88 is formed to continuously extend in the thickness direction of the electrically conductive contact pin 100a even at the interface between the first metal layer 101 and the second metal layer 102.

The fine trench 88 has a depth of 20 nm or more and 1 μm or less, and a width of 20 nm or more and 1 μm or less. Here, since the fine trench 88 is due to pores formed during the manufacture of the anodic oxide film mold 1000, the width and depth of the fine trench 88 have a value equal to or less than the range of the diameter of the pore of the anodic oxide film mold 1000. On the other hand, in the process of forming the inner space 1100 in the anodic oxide film mold 1000, some of the pores of the anodic oxide film mold 1000 are crushed together by the etching solution, and at least some of the fine trenches 88 having a depth greater than the range of diameters of the pores formed during anodic oxidation may be formed.

The anodic oxide film mold 1000 includes numerous pores, and at least a portion of the anodic oxide film mold 1000 is etched to form an inner space 1100, and a metal filler is formed in the inner space 1100 by electroplating. Accordingly, the electrically conductive contact pin 100a of the first embodiment may have a fine trench 88 formed while contacting the pores of the anodic oxide film mold 1000 on the side surface.

The fine trench 88 has an effect of increasing the surface area on the side surface of the electrically conductive contact pin 100a of the first embodiment. The electrically conductive contact pin 100a can rapidly dissipate heat generated from the electrically conductive contact pin 100a through the configuration of the micro trench 88 formed on the side surface. Due to this, the temperature rise of the electrically conductive contact pin 100a can be suppressed. In addition, through the configuration of the micro trench 88 formed on the side surface of the electrically conductive contact pin 100a, torsion resistance when the electrically conductive contact pin 100a is deformed can be improved.

The electrically conductive contact pins 100a of the first embodiment described above are provided in the test device 10 and are used to electrically and physically contact the test object 400 to transmit electrical signals.

The inspection device 10 includes the electrically conductive contact pin 100a of the first embodiment installed in the guide hole GH of the guide plate GP, which is an example of the installation member 200.

The inspection device 10 may be an inspection device used in a semiconductor manufacturing process, and may be, for example, a probe card or a test socket. The electrically conductive contact pins 100a of the first embodiment may be electrically conductive contact pins provided in a probe card to inspect a semiconductor chip, or socket pins provided in a test socket to inspect a packaged semiconductor package to inspect a semiconductor package. The test devices 10 to which the electrically conductive contact pins 100a of the first embodiment can be used are not limited thereto, but include all test devices for checking whether an object to be tested is defective by applying electricity.

The inspection target 400 of the inspection device 10 may include a semiconductor device, a memory chip, a microprocessor chip, a logic chip, a light emitting device, or a combination thereof. For example, inspection objects include logic LSIs (such as ASICs, FPGAs, and ASSPs), microprocessors (such as CPUs and GPUs), memories (including DRAM, Hybrid Memory Cube (HMC), Magnetic RAM (MRAM), Phase-Change Memory (PCM), Resistive RAM (ReRAM), ferroelectric RAM (FeRAM), and NAND flash)), semiconductor light-emitting devices (including LEDs, mini-LEDs, micro-LEDs, etc.), and power devices. , analog ICs (such as DC-AC converters and insulated gate bipolar transistors (IGBTs)), MEMS (such as acceleration sensors, pressure sensors, vibrators, and giro sensors), wire-free devices (such as GPS, FM, NFC, RFEM, MMIC, and WLAN), discrete devices, BSI, CIS, camera modules, CMOS, passive devices, GAW filters, RF filters, RF IPDs, APEs, and BBs.

Example 2

Next, look at the second embodiment according to the present invention. However, the embodiments to be described below will be described focusing on characteristic components compared to the first embodiment, and descriptions of components identical or similar to those of the first embodiment will be omitted if possible.

Hereinafter, an electrically conductive contact pin according to a second preferred embodiment of the present invention (hereinafter referred to as 'an electrically conductive contact pin 100b of the second embodiment') will be described with reference to FIG. 9 . 9 is a plan view of electrically conductive contact pins of the second embodiment installed on the guide plate GP.

The electrically conductive contact pin 100b of the second embodiment is different from the electrically conductive contact pin 100b of the first embodiment only in the configuration of the first connector 110, and all other configurations are the same.

The electrically conductive contact pin 100b of the second embodiment includes a base portion 111 connected to the 1-1 elastic protrusion 151, two protrusions 112 extending from the base portion 111 in one direction (+y direction), a groove portion 113 provided between the protrusions 112, and a flange 118 and a flange 11 extending from the base portion 111 in the other direction (−y direction). 8) and a first connection portion 110 including a side inclined portion 117 provided between the base portion 111.

The first connector 110 multi-contacts the connection terminal 410 through the two protrusions 112, and receives particles generated through repeated contact between the first connection portion 110 and the connection terminal 410 through the groove 113 between the protrusions 112. The electrically conductive contact pin 100b of the second embodiment has the bottom surface of the groove 113 flat.

The first connection part 110 extends from both sides of the base part 111 in the other direction and includes a side inclined part 117 extending obliquely outward in the width direction. The first connection part 110 has a shape in which the side inclined part 117 is formed from the side part of the protruding part 112 by forming the side surface of the protruding part 112 to be connected to the side inclined part 117 .

The side slope portion 117 has an inner slope greater than an outer slope in the width direction. The angle of cut between the bottom surface of the base portion 111 and the inner surface of the side inclined portion 117 is greater than the angle between the bottom surface of the base portion 111 and the outer surface of the side inclined portion 117 . The first connection part 110 may expand the width of the region including the first elastic part 150 inside the first connection part 110 through the configuration of the side inclined part 117 . Due to this, when the first elastic part 150 is compressed inside the first connection part 110, the first elastic part 150 is more easily compressed without interference between the first elastic part 150 and the inner surface of the side inclined part 117.

The first connection part 110 includes a flange 118 extending from one end of the side inclined part 117 in the longitudinal direction and positioned inside the support part 130 . The flange 118 extends in a vertical form from one end of the side inclined portion 117 and is spaced apart from the inner surface of the support portion 130 . The flange 118 is located between the support part 130 and the first elastic part 150 based on the width direction.

When the first connection part 110 moves downward (-y direction) as the first elastic part 150 is compressed and deformed, the lower surface of the flange 118 comes into contact with the upper surface of the boundary part 140 . The flange 118 is restricted from descending by the boundary 140 in a fixed state. As the lower surface of the flange 1180 contacts the upper surface of the boundary portion 140 , a current path is formed at the upper side of the support portion 130 .

The flange 118 is positioned to overlap the upper end of the support part 130 including the first hanging part 131 in the width direction. When an eccentric pressing force is applied by the contact terminal 410 in contact with the first connection portion 110, the flange 118 comes into contact with the support portion 130 to support the support portion 130, thereby preventing excessive buckling deformation in the left and right directions.

The electrically conductive contact pin 100b of the second embodiment includes a second thick portion 125 and a second thin portion 126 at the second connection portion 120 . The electrically conductive contact pin 100b of the second embodiment pushes the support portion 130 outward in the width direction through the second thick portion 125 of the second connection portion 120, and adheres to the inner surface of the guide hole GH to prevent the electrically conductive contact pin 100b of the second embodiment from escaping upward.

The prevention of the electrically conductive contact pin 100b according to the second embodiment of the second embodiment is prevented from coming off in the downward direction through the first locking portion 131 of the support portion 130 .

Example 3

Next, look at the third embodiment according to the present invention. However, the embodiments described below will be described focusing on characteristic components compared to the first embodiment, and descriptions of components identical or similar to those of the first embodiment will be omitted if possible.

Hereinafter, referring to FIG. 10, an electrically conductive contact pin according to a third preferred embodiment of the present invention (hereinafter referred to as 'an electrically conductive contact pin 100c of the third embodiment') will be described. 10 is a plan view of the electrically conductive contact pins 100c of the third embodiment installed on the guide plate GP.

The electrically conductive contact pin 100c of the third embodiment includes a boundary portion 140, a support portion 130, a first elastic portion 150, a second elastic portion 160, a first connection portion 110, and a second connection portion 120.

The first connection part 110 is provided between the base part 111, the two protrusions 112 extending in one direction from the base part 111, the groove part 113 provided between the protrusions 112, and the first thick part 115 and the first thin part 116 and the first thick part 115 and the base part 111 extending in the other direction from the base part 111 It includes a side inclined portion 117.

The first connection part 110 extends downward from both sides of the base part 111 and extends inwardly to the inside of the first connection part 110 through the configuration of the side inclined part 117 extending obliquely outward in the width direction. The width of the area for providing the first elastic part 150 is expanded. The side slope portion 117 has the same size of an outside slope and an inside slope with respect to the width direction.

The first thick portion 115 extends downward from one end of the side inclined portion 117 and is formed. The first thick portion 115 is formed in a shape in which the width increases from one end of the side inclined portion 117 toward the lower direction.

The first thin portion 116 is provided below the first thick portion 115 . A first width changing portion 114 is provided between the first thin portion 116 and the first thick portion 115 . The first connection part 110 is the first connection part 110 and the support before the connection terminal 410 of the test object 400 contacts the first connection part 110 through the first width deformation part 114. Implements a spaced state between the 130.

The 1-1st elastic protrusion 151 is provided on the upper part of the first elastic part 150, and is inclined outward in the width direction on one side (specifically, the left side) of the electrically conductive contact pin 100c of the third embodiment out of the central axis in the longitudinal direction, and is located between the side inclined part 117 and the first elastic part 150. The 1-1 elastic protrusion 151 has one end connected to one end of the first elastic part 150 and the other end connected to the inner surface of the side inclined part 117 .

The 1-2nd elastic protrusion 152 is provided below the first elastic part 150 and is provided between the boundary part 140 and the first elastic part 150 in the longitudinal direction, and is provided on one side (specifically, the left side) of the electrically conductive contact pin 100c of the third embodiment deviating from the central axis in the longitudinal direction.

The first connection part 110 moves downward (in the -y direction) by the first elastic part 150 that compresses and deforms under the pressure of the connection terminal 410 . Accordingly, the first thick portion 115 is located inside the support portion 130 and pushes the support portion 130 outward while in contact with the support portion 130 . The support part 130 is in close contact with the inner surface of the guide hole GH by the first thick part 115 . Due to this, the electrically conductive contact pin 100c of the third embodiment is more tightly fixed inside the guide hole GH, effectively preventing upward separation.

The electrically conductive contact pin 100c of the third embodiment has a protrusion on the support portion 130 . The protrusion includes a first protrusion 133a and a second protrusion 133b.

The electrically conductive contact pin 100c of the third embodiment includes a second hooking portion 132 at a position corresponding to the first width changing portion 114, and a first protrusion 133a at a lower portion of the second hanging portion 132. The first protrusion 133a is provided on the support portion 130 and is formed to be convex outward from the side of the support portion 130 .

The first protrusion 133a generates friction between the inner surface of the guide hole GH and the support part 130 through its convex shape, thereby preventing the electrically conductive contact pin 100c of the third embodiment from moving freely inside the guide hole GH after installation in the guide hole GH is completed.

When the first elastic part 150 is compressed and deformed by the pressing force on the connection terminal 410 and the first connection part 110 moves downward, the first thick part 115 pushes the support part 130 outward, and the support part 130 including the first protrusion 133a is fixed so as not to move on the inner surface of the guide hole GH and is more closely attached to the inner surface of the guide hole GH. This prevents the electrically conductive contact pins 100c of the third embodiment from departing upward more effectively.

The electrically conductive contact pin 100c of the third embodiment includes first and

second connection portions

110 and 120 symmetrical up and down with respect to the boundary portion 140 .

The second connection part 120 is provided in a shape symmetrical to the first connection part 110 with respect to the boundary part 140 and includes a second thick part 125 and a second thin part 126 . When the second connection part 120 moves upward (+y direction) as the second elastic part 160 compresses and deforms under pressure from the connection pad 310, the second thick part 125 is located inside the support part 130 and contacts the support part 130. The second connection part 120 pushes the support part 130 outward based on the width direction through the second thick part 125 to bring the support part 130 into close contact with the inner surface of the guide hole GH.

The electrically conductive contact pin 100c of the third embodiment has a first hooking portion 131 at a position corresponding to the second width changing portion 124 . A second protrusion 133b is provided on the upper portion of the first hanging portion 131 . In other words, the electrically conductive contact pin 100c of the third embodiment includes the second protrusion 133b on the upper part of the first hooking part 131 and the first protrusion 133a on the lower part of the second hooking part 132.

At least one protrusion may be provided, and preferably, each may be provided around the first catching part 131 and the second catching part 132 . Accordingly, the prevention of upward and downward separation of the electrically conductive contact pins 100c according to the third embodiment can be achieved more effectively.

A first anti-interference part 136 is provided between the first hanging part 131 and the second protruding part 133b. The first interference prevention unit 136 is provided in the form of a groove having an arc-shaped cross section. The shape of the first interference prevention unit 136 is not limited thereto. The first interference preventing portion 136 prevents interference with the second protrusion 133b when the first catching portion 131 is compressed and deformed inwardly in the width direction in the process of inserting and installing the electrically conductive contact pin 100c of the third embodiment into the guide hole GH. Due to this, the electrically conductive contact pin 100c of the third embodiment can be more easily inserted into the guide hole GH.

In addition, when the first interference prevention part 136 performs the hooking function of the first hooking part 131 by bringing the protruding jaw 131b of the first hooking part 131 into contact with the lower surface of the guide hole GH, the protruding jaw 131b is slightly widened in the longitudinal direction by the second protrusion 133b to prevent the problem of deteriorating the hooking function. More specifically, when the first anti-interference portion 136 is not provided, the length of the protruding jaw 131b in the width direction is relatively small. Due to this, when the first hooking part 131 contacts the lower surface of the guide hole GH and performs the hooking function, the widthwise length of the protruding jaw 131b in contact with the guide hole GH is small, so that the electrically conductive contact pin 100c of the third embodiment can be relatively easily separated.

However, the conductive contact pin 100c of the third embodiment includes the first anti-interference part 136 between the first hooking part 131 and the second protruding part 133b to secure a relatively large length in the width direction between the second protruding part 133b and the protruding shoulder 131b of the first hanging part 131. As a result, when the first hooking part 131 performs the hooking function, the widthwise length of the protruding jaw 131b in contact with the lower surface of the guide hole GH is relatively increased to perform the hooking function more effectively. As a result, the separation prevention function through the first locking part 131 is improved.

A second anti-interference part 137 is provided between the second locking part 132 and the first protrusion 133a. The second anti-interference unit 137 is formed in the same shape as the first anti-interference unit 136, but its shape is not limited thereto. The second anti-interference part 137 secures a longer protruding length of the second hanging part 132 outward in the width direction than when the second anti-interference part 137 is not provided. As a result, the problem of deterioration of the hooking function of the second locking part 132 due to interference with the first protrusion 133a is prevented.

Hereinafter, a process of installing the electrically conductive contact pins 100c of the third embodiment to the guide holes GH of the guide plate GP will be described.

The electrically conductive contact pin 100c of the third embodiment includes a second hooking part 132 at a position corresponding to the first width-changing part 114, and a first hooking part 131 at a position corresponding to the second width-changing part 124.

The first hooking portion 131 is composed of an inclined portion 131a and a protruding jaw 131b to facilitate the installation of the conductive contact pin 100c of the third embodiment into the guide hole GH.

The electrically conductive contact pin 100c of the third embodiment compresses the lower end including the first hooking portion 131 inward in the width direction so that the width thereof is smaller than the inner width of the guide hole GH, and then the electrically conductive contact pin 100c is inserted through the upper opening of the guide hole GH. At this time, the first locking portion 131 is easily compressed and inserted into the guide hole GH without interfering with the second protrusion 133b through the first anti-interference portion 136 .

Then, the electrically conductive contact pin 100c of the third embodiment is forcibly pushed into the guide hole GH by pressing it from top to bottom. The electrically conductive contact pin 100c of the third embodiment is compressed in the width direction and moved to the lower part of the guide hole GH. The electrically conductive contact pin 100c of the third embodiment can move from the top to the bottom of the guide hole GH more easily through the inclined portion 131a of the first hanging portion 131 .

When the first hooking part 131 passes through the lower opening of the guide hole GH, the protruding jaw 131b of the first hooking part 131 compressed inward in the width direction by the elastic restoring force of the support part 130 widens outward in the width direction and is restored. The second protrusion 133b provided on the upper part of the first hanging part 131 contacts the inner surface of the guide hole GH, and friction occurs. The electrically conductive contact pin 100c of the third embodiment implements a temporary fixed state on the inner surface of the guide hole GH through the second protrusion 133b.

Then, the electrically conductive contact pin 100c of the third embodiment is forcibly pushed up so that the protrusion 131b of the first hooking portion 131 contacts the lower surface of the guide hole GH. As a result, the protruding jaw of the first hooking part 131 contacts the lower surface of the guide hole GH, friction occurs between the inner surface of the guide hole GH and the support part 130 through the protrusion 133 provided at the lower part of the second hooking part 132, and the conductive contact pin 100c of the third embodiment can be closely fixed to the guide hole GH. At this time, the protruding jaw 131b of the first hooking part 131 is in contact with the lower surface of the guide hole GH without being interfered by the second protrusion 133b by the first interference preventing part 136 .

In a state in which the connection terminal 410 and the connection pad 310 are not in contact, the conductive contact pin 100c of the third embodiment is fixed to the inner surface of the guide hole GH through the protrusion 133 in close contact with the support portion 130 primarily to fix the conductive contact pin 100c of the second embodiment so as not to move.

In a state of being in contact with the connection terminal 410 and the connection pad 310, the electrically conductive contact pin 100c of the third embodiment is in a state in which the support 130 is primarily closely and fixed to the inner surface of the guide hole GH through the protrusion, and the first thick portion 115 and the second thick portion 125 push the support portion 130 to push the support portion 130 to the inner surface of the guide hole GH. can be more closely attached. As a result, it is possible to more effectively prevent the electrically conductive contact pin 100c of the third embodiment from being separated from the guide hole GH in an upward or downward direction.

Example 4

Next, look at the fourth embodiment according to the present invention. However, the embodiments to be described below will be described focusing on characteristic components compared to the first to third embodiments, and descriptions of components identical or similar to those of the first to third embodiments will be omitted if possible.

Hereinafter, an electrically conductive contact pin according to a fourth preferred embodiment of the present invention will be described with reference to FIG. 11 (hereinafter, referred to as 'an electrically conductive contact pin 100d of the fourth embodiment'). 11 is a plan view illustrating a state in which the electrically conductive contact pins 100d according to the fourth embodiment are installed on the guide plate GP.

The electrically conductive contact pin 100d of the fourth embodiment includes a boundary portion 140, a support portion 130 including a first support portion 134 and a second support portion 135, an elastic portion SP including a first elastic portion 150 and a second elastic portion 160, and a first connection portion 110 and a second connection portion 120.

The boundary portion 140 is provided in a form extending in the width direction by the straight portion 154 constituting the elastic portion SP. Therefore, in the electrically conductive contact pin 100d of the fourth embodiment, the boundary portion 140 is composed of the straight portion 154 and simultaneously performs the functions of the boundary portion 140 and the straight portion 154 . When the elastic part SP is compressed, the curved part 153 is deformed while the straight part 154 is fixed, so that the elastic part SP is compressed. Accordingly, the straight portion 154 may perform the function of the boundary portion 140 .

The boundary portion 140 is connected to the first support portion 134 extending from the left side of the boundary portion 140 through an inclined curved surface extending upward from the left side of the boundary portion 140 . The boundary portion 140 is connected to the second support portion 135 by a curved portion 153 that extends upward from the right side of the boundary portion 140 and connects the first elastic portion 150 and the boundary portion 140 . More specifically, one side of the curved portion 153 connecting the first elastic portion 150 and the boundary portion 140 includes an inclined curved surface extending upwardly outward from the curved portion 153. Through the connection portion 170, it is connected to the second support portion 135. In the electrically conductive contact pin 100d of the fourth embodiment, the curved portion 153 connecting the first elastic portion 150 and the boundary portion 140 functions as the first-second elastic protruding portion 152 .

The support part 130 has a second hanging part 132 at an upper end and a first hanging part 131 at a lower end.

The first locking portion 131 includes an inclined portion 131a inclined outward in the width direction, a protruding jaw 131b protruding outward in the width direction, and a cutout 131c provided between the inclined portion 131a and the protruding jaw 131b.

At least two or more protruding jaws 131b are formed with the cutout 131c interposed therebetween.

Through the configuration of the cutout 131c, the first hooking part 131 allows the inclined part 131a to be elastically deformed in the width direction so that the first hooking part 13 itself can be elastically deformed.

When installed in the guide hole GH, the electrically conductive contact pin 100d of the fourth embodiment is inserted through the lower opening of the guide hole GH by compressing the lower end including the first hooking portion 131 inward in the width direction. At this time, the electrically conductive contact pin 100d of the fourth embodiment can be more easily compressed and deformed at the lower end through the cutout 131c, thereby increasing insertion efficiency into the guide hole GH.

The first connection portion 110 includes a base portion 111 including a through portion 111c, two protrusions 112 extending upward from the base portion 111, a groove portion 113 provided between the two protrusions 112, a first thin portion 116 extending downward from one side of the base portion 111 and located inside the support portion 130, and a first foil. It includes a first thick portion 115 provided on the upper portion of the land portion 116.

The first connection part 110 has a through part 111c at the center of the base part 111 . The first connection part 110 has an inclined surface inclined outward on the side surface of the base part 111 and has a first width changing part 114 at a position corresponding to the second hanging part 132 .

The first connection part 110 has a first thick part 115 having different widths on the left side of the base part 111 through a first width changing part 114 formed on the left side of the base part 111. And the first thin part 116 is provided separately. The first connection part 110 has a base part 111 including a first base part 111a provided above the through part 111c and a second base part 111b provided below the through part 111c based on the through part 111c. The first thin portion 116 extends downward from the second base portion 111b and is provided inside the support portion 130 . The first thick portion 115 extends downward from the first base portion 111a and is inclined inwardly in the width direction from top to bottom based on the first base portion 111a. At this time, the left portion constituting the first thin portion 116 extends along the longitudinal axis of the first thin portion 116 and is connected to the lower end of the first thick portion 115 .

As the first elastic part 150 is compressed and deformed by the pressing force of the connection terminal 410, the first connection part 110 moves downward (-y direction). At this time, the electrically conductive contact pin 100d of the fourth embodiment allows the first thick portion 115 to be more easily compressed and deformed inward in the width direction through the through portion 111c and positioned inside the support portion 130. The first thick portion 115 is located inside the support portion 130 and pushes the support portion 130 outward while in contact with the inner surface of the support portion 130 . Due to this, the support part 130 is fixed in close contact with the inner surface of the guide hole GH, and the upward detachment of the electrically conductive contact pin 100d according to the fourth embodiment is prevented.

The first connection part 110 includes two protrusions 112 extending upward from both sides of the first base part 111a. The protruding portion 112 is formed to protrude outward from the first base portion 111a based on the width direction. The protrusion 112 has an inclined upper surface. An upper surface of the protrusion 112 is inclined downward from the outside to the inside in the width direction. As a result, particles generated in the process of repeated contact between the connection terminal 410 and the electrically conductive contact pin 100d of the fourth embodiment can easily move toward the groove 113 along the upper surface of the protrusion 112 .

The second connection part 120 includes three contact parts 122 extending downward from the contact body part 121 . In this case, the contact part 122 includes a first contact part 122a extending downward from the left side of the contact body part 121, a second contact part 122b extending downward from the right side of the contact body part 121, and a third contact part 122c provided between the first and

second contact parts

122a and 122b. A concave portion C is provided between the three contact portions 122 .

Side surfaces of the contact body portion 121 are inclined inwardly in the width direction from top to bottom. The first and

second contact portions

122a and 122b extending downward from the lower surface of the contact body 121 are inclined outward in the width direction from top to bottom. The second connection part 120 includes a contact body part 121 whose inclination direction is opposite to the width direction, and a second width changing part 124 through the first and

second contact parts

122a and 122b. The second width changing portion 124 is provided between the left surface of the contact body 121 and the upper end of the left surface of the first contact part 122a, and between the right surface of the contact body 121 and the upper right surface of the second contact part 122b.

The second connection part 120 moves upward (+y direction) according to the pressing force of the connection pad 310 and brings the first and

second contact parts

122a and 122b into contact with the inner surface of the support part 130 . Accordingly, a current path on the lower end side of the electrically conductive contact pin 100d of the fourth embodiment is formed.

Hereinafter, a process of installing the electrically conductive contact pins 100d of the fourth embodiment to the guide holes GH of the guide plate GP will be described.

The conductive contact pin 100d of the fourth embodiment compresses the lower end of the conductive contact pin 100d of the fourth embodiment including the first hooking portion 131 inward in the width direction so that the width thereof is smaller than the inner width of the guide hole GH, and then the conductive contact pin 100d is inserted through the upper opening of the guide hole GH. In the electrically conductive contact pin 100d of the fourth embodiment, through the cutout 131c provided in the first hooking portion 131, compression deformation of the lower end inward in the width direction is more easily implemented.

Then, the electrically conductive contact pin 100d of the fourth embodiment is forcibly pushed into the guide hole GH by pressing it from the top to the bottom. The electrically conductive contact pins 100d of the fourth embodiment are compressed in the width direction and moved to the lower part of the guide hole GH. The electrically conductive contact pin 100d of the fourth embodiment can move from the top to the bottom of the guide hole GH more easily through the inclined portion 131a of the first hanging portion 131 . When the first hooking portion 131 moves downward from the inside of the guide hole GH, the inclined portion 131a is easily compressed and deformed inwardly in the width direction through the cutout portion 131c.

When the first hooking part 131 passes through the lower opening of the guide hole GH, the protruding jaw 131b of the first hooking part 131 comes into contact with the lower surface of the guide hole GH due to the elastic restoring force of the support part 130.

As described above, although it has been described with reference to the preferred embodiments of the present invention, those skilled in the art variously modify or modify the present invention within the scope not departing from the spirit and scope of the present invention described in the claims below. Can be practiced.

[Description of code]

100: electrically conductive contact pin

110: first connection part

115: first thick section

116: first thin section

120: second connection part

125: second thick section

126: second thin section

130: support

140: boundary

150: first elastic part

160: second elastic part

300: circuit board

400: inspection object

Claims

Boundaries extending in the width direction;

Supporting parts extending in the longitudinal direction from both sides of the boundary part;

a first connection part provided on an upper part of the boundary part;

a second connection part provided under the boundary part; and

An elastic part connecting the first and second connectors to the boundary part,

When the elastic part is compressed, at least one of the first and second connecting parts contacts the support part and pushes the support part outward to bring the support part into close contact with the inner surface of the guide hole of the guide plate.
According to claim 1,

The elastic part includes a first elastic part connecting the boundary part and the first connection part and a second elastic part connecting the boundary part and the second connection part,

The first connecting portion contacts the support portion as the first elastic portion compresses and pushes the support portion outward to bring the support portion into close contact with the inner surface of the guide hole of the guide plate;

The electrically conductive contact pin of claim 1 , wherein the second connection portion contacts the support portion as the second elastic portion compresses, pushes the support portion outward, and brings the support portion into close contact with the inner surface of the guide hole of the guide plate.
According to claim 1,

At least one of the first and second connection parts includes a thin part located inside the support part and a thick part connected to the thin part,

The electrically conductive contact pin, wherein the thick portion is located inside the support portion in a state of being in contact with the support portion as the elastic portion is compressed, and pushes the support portion outward to bring the support portion into close contact with the inner surface of the guide hole.
According to claim 1,

The first connection part includes a first thin part located inside the support part and a first thick part provided on an upper part of the first thin part,

As the elastic part is compressed, the first thick part is located inside the support part in a state of being in contact with the support part, and pushes the support part outward to bring the support part into close contact with the inner surface of the guide hole.
According to claim 1,

The second connection part includes a second thin part located inside the support part and a second thick part provided under the second thin part,

As the elastic part is compressed, the second thick part is located inside the support part in a state of being in contact with the support part, and pushes the support part outward to bring the support part into close contact with the inner surface of the guide hole.
According to claim 1,

The first connection part,

a base portion connected to the elastic portion;

at least two protrusions extending in one direction from the base; and

An electrically conductive contact pin including a groove provided between the two protrusions.
According to claim 1,

The elastic part includes a first elastic part connecting the boundary part and the first connection part and a second elastic part connecting the boundary part and the second connection part,

The first elastic part has a 1-1 elastic protrusion at one end and is connected to the first connection part through the 1-1 elastic protrusion, and has a 1-2 elastic protrusion at the other end to be connected to the boundary portion through the 1-2 elastic protrusion.
According to claim 1,

The elastic part includes a first elastic part connecting the boundary part and the first connection part and a second elastic part connecting the boundary part and the second connection part,

The second elastic part has the 2-1 elastic protrusion at one end and is connected to the second connection part through the 2-1 elastic protrusion, and has the 2-2 elastic protrusion at the other end and is connected to the boundary portion through the 2-2 elastic protrusion.
According to claim 1,

the support,

A first holding portion provided at one end; and

An electrically conductive contact pin comprising a; second hooking portion provided at the other end.
According to claim 1,

An electrically conductive contact pin formed by stacking a plurality of metal layers in a thickness direction of the electrically conductive contact pin.
According to claim 1,

An electrically conductive contact pin comprising a fine trench provided on a side surface.