TWI682180B - Electrical connection device - Google Patents

Abstract

The purpose of present invention is to provide an electrical connecting device capable of stably contacting a probe with an object to be inspected and a land arranged on the substrate.

Provided is an electrical connecting device has a probe 10 and a probe head 20. The probe 10 has a top side plunger 121 and a bottom side plunger 122, the tip portions of which are exposed from the open ends of both ends of the barrel 11, a stopper region 13 having an outer diameter different from that of the main body part of the barrel 11 was formed in an intermediate region between both end portions of the barrel 11. The probe head 20 has a middle guide 23 where the region where the outer diameter is relatively narrow of the stopper region 13 and the body part of the barrel 11 passes through and a region where the outer diameter is relatively thick cannot pass through. And the probe head 20 holds the probe 10 in a state in which a relatively narrow area passes through the middle guide 23. The probe 10 is configured to be capable of expansion and contraction in the axial direction between the both end portions and the stopper region 13, and when the probe 10 expands and contracts in the axial direction, a relatively thick region is pressed against the middle guide 23.

Description

Electrical connection device

The invention relates to an electrical connection device for measuring the characteristics of a test object.

In order to measure the characteristics of a test object such as an integrated circuit without being separated from the wafer, an electrical connection device having a probe that contacts the test object is used. One end of the probe is brought into contact with the object to be inspected, and the other end of the probe is brought into contact with a terminal (hereinafter referred to as "pad") arranged on the substrate and electrically connected to the tester.

At this time, the electrical connection between the probe and the object to be inspected or the pad must be ensured. Therefore, an overload (OD: over drive) is applied in order to force-bond the probe to the subject. In addition, a preload structure that applies a preload to the probe and the pad by elastically deforming the probe is adopted. Therefore, a structure is provided in which the probe is elastically deformed (see, for example, Patent Document 1).

[Prior Technical Literature] [Patent Literature]

Patent Document 1: Japanese Patent Application Publication No. 2010-281583

In order for the probe to make stable contact with the pad, the size of the front load has an appropriate range. However, when the OD is applied, the probe is affected, and there is a problem that the contact between the probe and the pad becomes unstable. According to the review of the inventor group of the present case, since the pressure of the contact between the probe and the pad is too high, the pad will be damaged, so that the contact becomes unstable. In addition, the problem that the contact becomes unstable also occurs between the probe and the subject.

In view of the above problems, an object of the present invention is to provide an electrical connection device in which a probe can be in stable contact with a test object and pads arranged on a substrate.

According to the same aspect of the present invention, it is possible to provide an electrical connection device comprising: a probe having a tubular barrel portion, and a tip portion exposed from the opening ends of both ends of the barrel portion and joined to the barrel portion, respectively A rod-shaped top plunger and a bottom plunger, and a braking region having an outer diameter different from that of the main body of the barrel is formed in the middle of both ends; and the probe head has the braking region and the main body A relatively thin outer diameter area will pass, and a relatively thick outer diameter area cannot pass through the intermediate guide, and the probe is held in a state where the relatively thin area penetrates the intermediate guide; the probe is configured at both ends It is free to expand and contract with the braking area in the axial direction. When the probe is extended and contracted in the axial direction, the relatively thick area is crimped on the intermediate guide.

According to the present invention, it is possible to provide an electrical connection device in which the probe can stably contact the object to be inspected and the pads arranged on the substrate.

2‧‧‧ subject

3‧‧‧ substrate

10‧‧‧probe

11‧‧‧Cylinder

11a‧‧‧Top

11b‧‧‧Bottom

12‧‧‧ Plunger

13‧‧‧brake area

14‧‧‧Joint parts

20‧‧‧ Probe head

21‧‧‧Top guide

22‧‧‧Bottom guide

23‧‧‧Intermediate guide

23a‧‧‧Guide plate

23b‧‧‧Guide plate

121‧‧‧Top side plunger

122‧‧‧Bottom plunger

123‧‧‧Middle plunger

131‧‧‧ 1st braking zone

132‧‧‧ 2nd braking area

200‧‧‧Positioning hole

231‧‧‧First intermediate guide

232‧‧‧The second middle guide

233‧‧‧ middle area

FIG. 1 is a schematic diagram of the configuration of the electrical connection device according to the first embodiment of the present invention. FIG. 1 (a) shows the overall configuration of the electrical connection device, and FIG. 1 (b) shows the configuration of the probe.

FIG. 2 is a schematic diagram of the configuration of the electrical connection device of the comparative example. FIG. 2 (a) shows the overall configuration of the electrical connection device, and FIG. 2 (b) shows the configuration of the probe.

FIG. 3 is a schematic diagram of the structure of the probe of the electrical connection device according to the first embodiment of the present invention. FIG. 3 (a) shows the structure of the barrel, and FIG. 3 (b) shows the cross section of the barrel. Figure 3(c) shows the structure of the plunger.

FIG. 4 is a schematic diagram of another structure of the probe of the electrical connection device according to the first embodiment of the present invention. FIG. 4 (a) shows the structure of the barrel, and FIG. 4 (b) shows the structure of the plunger .

FIG. 5 is a schematic diagram of another structure of the probe of the electrical connection device according to the first embodiment of the present invention. FIG. 5 (a) shows the structure of the probe, and FIG. 5 (b) shows the structure of the barrel Figure 5(c) shows the structure of the plunger.

FIG. 6 is a schematic diagram of the configuration of an electrical connection device according to a modification of the first embodiment of the present invention. FIG. 6(a) shows the overall configuration of the electrical connection device, and FIG. 6(b) shows the probe. Composition.

FIG. 7 is a schematic diagram of the structure of the probe of the electrical connection device according to a modification of the first embodiment of the present invention. FIG. 7(a) shows the configuration of the barrel, and FIG. 7(b) shows the barrel. Figure 7(c) shows the structure of the plunger.

FIG. 8 is a schematic diagram of another structure of the probe of the electrical connection device according to a modification of the first embodiment of the present invention. FIG. 8(a) shows the configuration of the barrel, and FIG. 8(b) shows the column. The composition of the plug.

FIG. 9 is a schematic diagram of another structure of the probe of the electrical connection device according to a modification of the first embodiment of the present invention. FIG. 9(a) shows the configuration of the probe, and FIG. 9(b) shows the barrel. Fig. 9(c) shows the configuration of the plunger.

Fig. 10 is a schematic diagram of an embodiment of an electrical connection device according to a modification of the first embodiment of the present invention.

FIG. 11 is a schematic diagram for explaining an example of an assembly method of the electrical connection device shown in FIG. 10, FIG. 11(a) is a side view, and FIG. 11(b) is a plan view (part 1).

FIG. 12 is a schematic diagram for explaining an example of the assembly method of the electrical connection device shown in FIG. 10, FIG. 12(a) is a side view, and FIG. 12(b) is a plan view (No. 2).

FIG. 13 is a schematic diagram of the configuration of an electrical connection device according to another modification of the first embodiment of the present invention.

FIG. 14 is a schematic diagram of the configuration of an electrical connection device according to another modification of the first embodiment of the present invention.

Fig. 15 is a schematic diagram of the configuration of an electrical connection device according to a second embodiment of the present invention.

Fig. 16 is a schematic diagram of an embodiment of an electrical connection device according to a second embodiment of the invention.

FIG. 17 is a schematic diagram for explaining an example of an assembly method of the electrical connection device shown in FIG. 16, FIG. 17(a) is a side view, and FIG. 17(b) is a plan view (part 1).

FIG. 18 is a schematic diagram for explaining an example of the assembly method of the electrical connection device shown in FIG. 16, FIG. 18(a) is a side view, and FIG. 18(b) is a plan view (No. 2).

Next, an embodiment of the present invention will be described with reference to the drawings. In the following figures, the same or similar symbols are attached to the same or similar parts. However, the drawing is only a schematic diagram, and it should be noted that the thickness ratio of each part is different from reality. Furthermore, of course, the drawings also include portions having different dimensional relationships or ratios. The embodiments shown below are examples of devices or methods embodying the technical idea of the present invention. The embodiments of the present invention do not limit the materials, shapes, structures, arrangements, etc. of the components to the contents described below.

(First embodiment)

As shown in FIG. 1 (a), the electrical connection device according to the first embodiment of the present invention includes a probe 10 and a probe head 20 that holds the probe 10. One end portion of the probe 10 is in contact with the pad 31 arranged on the substrate 3, and the other end portion is in contact with the subject 2. In addition, FIG. 1 shows the state in which the probe 10 is not in contact with the subject 2, and when the test is performed, the examination table (not shown) on which the subject 2 is mounted is raised, etc., so that the subject 2 and the probe 10 contacts. The pad 31 is electrically connected to an inspection device such as a tester, and the electrical connection device is used when judging the electrical characteristics of the object 2 to be inspected.

The probe 10 has, as shown in FIG. 1(b), a tube-shaped cylindrical portion 11 and a rod-shaped top-side plunger 121 and a bottom each exposing the front end portion from the opening ends of both ends of the cylindrical portion 11 Side plunger 122. A braking region 13 having an outer diameter different from that of the main body of the cylindrical portion 11 is formed in a region between the both ends of the probe 10. In addition, the main body portion of the cylindrical portion 11 is a portion having an outer diameter substantially constant except for the braking area 13.

The top-side plunger 121 and the bottom-side plunger 122 are joined to the cylindrical portion 11 among the joining portions 14. The top-side plunger 121, the bottom-side plunger 122 and the cylindrical portion 11 may be welded by spot welding or may be adhered through an adhesive material. Hereinafter, the top plunger 121, the bottom plunger 122, and the intermediate plunger 123 described later are collectively referred to as "plunger 12". In addition, a conductive material may be used for the probe 10 that electrically connects the pad 31 and the subject 2. For example, Ni material or the like may be used for the barrel portion 11, and Ag, Pd, Cu material or the like may be used for the plunger 12.

The probe head 20 includes: a top guide 21 having a through hole through which the top plunger 121 can penetrate; a bottom guide 22 having a through hole through which the bottom plunger 122 can penetrate; and the top guide 21 and The middle guide 23 between the bottom guides 22. The intermediate guide 23 is a configuration in which the relatively thin outer diameter portion of the braking region 13 of the probe 10 and the body portion of the cylindrical portion 11 passes, and the relatively thick outer diameter region cannot pass. The probe head 20 is made of ceramic, for example.

As shown in FIG. 1( a ), the probe 10 is held by the probe head 20 while penetrating the intermediate guide 23 of the probe head 20. Therefore, when the probe 10 is attached to the probe head 20, the probe 10 is in a state of being suspended by the intermediate guide 23 by the braking region 13 inside the probe head 20.

In the probe 10 shown in FIG. 1( b ), the braking region 13 is a flange-like region whose outer diameter is thicker than that of the main body of the cylindrical portion 11. The probe head 20 shown in FIG. 1(a) has a configuration in which a first intermediate guide 231 and a second intermediate guide 232 are arranged on both sides of the braking region 13 along the axial direction. In addition, in the intermediate region 233 between the first intermediate guide 231 and the second intermediate guide 232, a braking region 13 having a larger outer diameter than the body portion of the cylindrical portion 11 is arranged.

The probe 10 is configured such that it can expand and contract in the axial direction between the both end portions and the middle region where the braking region 13 is formed. Specifically, a helical cut that penetrates the side surface of the cylindrical portion 11 is formed between each end of the cylindrical portion 11 and the middle region. The area where the cut is formed becomes a spring portion, and the probe 10 is free to expand and contract in the axial direction. In addition, no cut is formed in the area where the braking area 13 is arranged.

By forming the spring portion in the probe 10, OD or preload can be applied with a fixed size. Hereinafter, the spring portion near the open end exposed to the front end of the top plunger 121 is referred to as "top side spring portion", and the spring portion near the open end exposed to the front end of the bottom plunger 122 is referred to as "bottom spring portion" . In addition, in order to make the drawing easy to understand, the portion of the plunger 12 inserted into the cylindrical portion 11 is omitted.

In the electrical connection device shown in FIG. 1(a), when the probe 10 expands and contracts in the axial direction, the relatively thick area of the probe 10 is pressed against the intermediate guide 23. For example, when the OD applied between the bottom-side plunger 122 and the subject 2 is greater than the preload applied between the top-side plunger 121 and the pad 31, the braking region 13 is crimped to the first intermediate guide On piece 231. On the other hand, when the preload is greater than OD, the braking area 13 is pressed against the second intermediate guide 232.

As described above, according to the electrical connection device of the first embodiment of the present invention, the expansion and contraction of the top spring portion and the individual expansion and contraction of the bottom spring portion are restricted by the contact of the braking region 13 and the intermediate guide 23. Therefore, the spring function of the top-side spring portion that affects the pressure at which the probe 10 contacts the pad 31 and the spring function of the bottom-side spring portion that affects the pressure at which the probe 10 contacts the object 2 are independently functioning .

As a result, the preload or OD can be stably applied as desired. In other words, the probe 10 can be brought into stable contact with the subject 2 and the pad 31 arranged on the substrate 3. Therefore, it is possible to avoid the problem that the pad 31 or the object to be inspected 2 is damaged due to excessive pressure or the contact becomes unstable, resulting in uneven contact resistance.

On the other hand, in the electrical connection device of the comparative example shown in FIG. 2(a), the top spring portion and the bottom spring portion cannot function independently. The outer diameter of the probe 10A shown in FIG. 2(b) is fixed to the outer diameter of the cylindrical portion 11A, and the braking region 13 is not formed. In addition, the probe head 20A that contacts the top guide 21A through which the top plunger 121A penetrates and the bottom guide 22A through which the bottom plunger 122A penetrates does not have the intermediate guide 23. Therefore, when the OD is applied, the preload is affected, and there is a problem that the contact between the probe 10A and the pad 31 becomes unstable.

In addition, in the electrical connection device of the comparative example, the spring portion of the cylindrical portion 11A may be fatigued due to the crimping caused by an excessive preload. In addition, the end of the top plunger 121A pushes the pad 31 upward due to the application of OD, and a bulging phenomenon occurs on the upper surface of the substrate 3.

However, according to the electrical connection device shown in FIG. 1(a), the top spring portion and the bottom spring portion can function independently. For example, even if OD is applied in order to make the front end of the bottom plunger 122 stably contact with the subject 2, it will not affect the preload, and the top plunger can be made with an appropriate predetermined pressure 121 is crimped onto the pad 31. Therefore, the spring portion of the probe 10 does not fatigue, and the occurrence of the bending phenomenon can be suppressed.

FIGS. 3(a) to 3(c) show a configuration example of the probe 10 in which a relatively thick braking region 13 is formed in the cylindrical portion 11. In this configuration example, a flange-shaped convex portion is formed on the periphery of the cylindrical portion 11, and a part of the top-side plunger 121 and the bottom-side plunger 122 are inserted into the cylindrical portion 11. In addition, although an example in which the braking region 13 is integrally formed with the main body of the cylindrical portion 11 is shown, it is also possible to form the braking region 13 by welding flange-like parts to the outside of the cylindrical portion 11.

FIGS. 4( a) to 4 (b) show that the relatively thick braking region 13 is formed at the middle plunger 123 which is separated from the top plunger 121 and the bottom plunger 122 and inserted into the inside of the barrel 11, respectively. Example of the configuration of the probe 10. The cylindrical portion 11 is divided into a top portion 11a into which the top plunger 121 can be inserted and a bottom portion 11b into which the bottom plunger 122 can be inserted. Moreover, the braking region 13 is exposed from between the top 11a and the bottom 11b.

FIGS. 5(a) to 5(c) show other configuration examples of the probe 10 in which the relatively thick braking region 13 is formed in the middle plunger 123. The braking region 13 is divided into two along the axial direction of the probe 10. The intermediate plunger 123 is composed of a divided first intermediate plunger 123a connected to the braking region 13 and a divided second intermediate plunger 123b connected to the other divided.

<Modification>

In the electrical connection device of the modified example of the first embodiment shown in FIGS. 6(a) and 6(b), the flange-shaped first braking region 131 and the second braking region 132 with a thickened outer diameter It is formed on the probe 10 along the axis direction. Furthermore, an intermediate guide 23 is arranged between the first braking area 131 and the second braking area 132. The intermediate guide 23 is formed with a through hole narrower than the outer diameter of the first braking region 131 and the second braking region 132 and larger than the outer diameter of the region between the first braking region 131 and the second braking region 132. Therefore, the expansion and contraction system of the top spring portion is restricted by the contact between the first braking region 131 and the intermediate guide 23. In addition, the expansion and contraction system of the bottom spring portion is restricted by the contact between the second braking region 132 and the intermediate guide 23. Therefore, the spring function can be independently exerted by the top spring portion and the bottom spring portion.

FIGS. 7(a) to 7(c) show a configuration example of the probe 10 in which the first braking region 131 and the second braking region 132 are relatively thicker than the body portion of the cylindrical portion 11 and are formed in the cylindrical portion 11 . In this configuration example, protruding portions are formed in two places on the periphery of the cylindrical portion 11, and a part of the top plunger 121 and the bottom plunger 122 are inserted into the cylindrical portion 11.

FIGS. 8( a) to 8 (b) show a configuration example of the probe 10 in which the first braking region 131 and the second braking region 132 are formed in the intermediate plunger 123 inserted inside the cylindrical portion 11. The cylindrical portion 11 is divided into a top portion 11a into which the top plunger 121 can be inserted and a bottom portion 11b into which the bottom plunger 122 can be inserted. Moreover, the first braking area 131 and the second braking area 132 are exposed from between the top portion 11a and the bottom portion 11b.

FIGS. 9(a) to 9(c) show other configuration examples of the probe 10 in which the first braking region 131 and the second braking region 132 are formed in the middle plunger 123. The first braking region 131 is divided into two along the axial direction of the probe 10. The intermediate plunger 123 includes a first intermediate plunger 123a connected to the divided one of the first braking regions 131 and a second intermediate plunger connected to the divided other and formed with the second braking region 132 123b. In addition, although the example in which the first braking region 131 is divided is shown here, the second braking region 132 may be divided.

FIG. 10 shows an embodiment of the electrical connection device shown in FIG. 6(a). Between the top guide 21 and the bottom guide 22, openings through which the probe 10 penetrates are respectively formed. An example of the intermediate guide 23 where the guide plate 23a and the guide plate 23b overlap. In the electrical connection device shown in FIG. 10, the probe 10 is arranged such that the first braking area 131 and the second braking area 132 are positioned to sandwich the intermediate guide 23. Then, the openings formed on the contact surfaces of the guide plate 23a and the guide plate 23b are arranged so as to be offset in the direction perpendicular to the axial direction.

The electrical connection device shown in FIG. 10 can be assembled by the method shown in FIGS. 11(a), 11(b) to 12(a), and 12(b). That is, the intermediate guide 23 is prepared by overlapping the guide plate 23a and the guide plate 23b in which an opening having a larger diameter than the outer diameter of the first braking area 131 and the second braking area 132 is formed. However, at predetermined positions where the intermediate guide 23 is connected to the top guide 21 and the bottom guide 22, the openings are formed in advance so that the positions of the centers of the openings of the guide plates 23a and 23b are shifted. Next, as shown in FIGS. 11( a) and 11 (b ), the probe 10 is mounted on the intermediate guide 23 in a state of being aligned with the center of the opening.

Next, as shown by the arrows in FIGS. 12(a) and 12(b), the guide plate 23a and the guide plate 23b are relatively slid. For example, the guide plate 23a and the guide plate 23b are aligned so that the positioning holes 200 formed in the guide plate 23a and the guide plate 23b match. Thereby, the center position of the opening of the guide plate 23a and the center position of the opening of the guide plate 23b are shifted, and the diameter of the area where the opening overlaps becomes larger than the outer diameter of the first braking area 131 and the second braking area 132 Be narrow. As a result, the first braking area 131 and the second braking area 132 cannot pass through the opening of the intermediate guide 23. This allows the top spring portion and the bottom spring portion to function independently.

FIG. 6(a) shows an example in which the braking region 13 having a relatively large outer diameter is arranged on both sides of the intermediate guide 23. However, the braking region 13 may be arranged only on one side of the intermediate guide 23.

For example, in the electrical connection device shown in FIG. 13, the braking area 13 is arranged between the intermediate guide 23 and the top spring portion, but the braking area is not arranged between the intermediate guide 23 and the bottom spring portion. 13. Therefore, it is quite effective for improving the contact between the top-side plunger 121 and the pad 31. For example, when a strong preload is applied, it does not affect the OD.

In addition, in the electrical connection device shown in FIG. 14, the braking region 13 is disposed between the intermediate guide 23 and the bottom spring portion, and the braking region 13 is not disposed between the intermediate guide 23 and the top spring portion. Therefore, it is quite effective for improving the contact between the bottom plunger 122 and the subject 2. For example, when a strong OD is applied, it does not affect the preload.

As described above, the braking area 13 may be formed between only one of the two end portions of the cylindrical portion 11 and the intermediate guide 23.

(Second embodiment)

As shown in FIG. 15 in the electrical connection device according to the second embodiment of the present invention, the outer diameter of the braking region 13 of the probe 10 is formed to be thinner than the main body of the cylindrical portion 11. That is, the difference from the first embodiment is that the braking region 13 is a relatively thin region. The other configuration is the same as the first embodiment.

The electrical connection device shown in FIG. 15 is an intermediate guide 23 that is configured between the top guide 21 and the bottom guide 22 so that the braking area 13 can pass, but the main body of the barrel 11 cannot pass. For example, the intermediate guide 23 formed with a through hole wider than the outer diameter of the braking region 13 and narrower than the outer diameter of the main body portion of the cylindrical portion 11 is disposed between the top guide 21 and the bottom guide 22. The braking region 13 is formed by, for example, reducing the outer diameter of the cylindrical portion 11 in the region where the plunger 12 is not arranged.

In the electrical connection device shown in FIG. 15, for example, when the OD applied between the probe 10 and the subject 2 is greater than the preload applied between the probe 10 and the pad 31, the braking area 13 The side of the bottom side spring portion will be crimped on the intermediate guide 23. In addition, when the preload is greater than OD, the side of the top spring portion of the braking region 13 is pressed against the intermediate guide 23. In this way, the expansion and contraction of the top-side spring portion and the expansion and contraction of the bottom-side spring portion can be restricted from contacting the intermediate guide 23 through the relatively thick area of the probe 10, respectively. Therefore, the spring functions of the top spring portion and the bottom spring portion can be independently exerted.

Therefore, according to the electrical connection device of the second embodiment of the present invention, the probe 10 can be brought into stable contact with the test object 2 and the pad 31 arranged on the substrate 3. Therefore, it is possible to prevent the pad 31 or the object 2 from being damaged or the contact from becoming unstable. In addition, it is possible to suppress fatigue or bending in the spring portion of the probe 10. Others are actually the same as the first embodiment, and redundant descriptions are omitted.

FIG. 16 shows an embodiment of the electrical connection device shown in FIG. 15 in which an intermediate guide formed by overlapping guide plates 23a and guide plates 23b respectively formed with openings through which the probe 10 penetrates is used 23 examples. The electrical connection device shown in FIG. 16 has a configuration in which the braking region 13 of the probe 10 is arranged at openings formed in the guide plate 23a and the guide plate 23b, respectively. In addition, the openings formed in the guide plate 23a and the guide plate 23b are formed by being shifted in a direction perpendicular to the axial direction.

The electrical connection device shown in FIG. 16 can be assembled by the method shown in FIGS. 17(a), 17(b) to 18(a), and 18(b). That is, an intermediate guide 23 is prepared in which guide plates 23 a and guide plates 23 b each having an opening larger than the outer diameter of the area other than the braking area 13 of the probe 10 are formed. However, the opening portion is formed in advance so that the center position of the opening portion of the guide plate 23a and the guide plate 23b is shifted at a predetermined position where the intermediate guide 23 is connected to the top guide 21 and the bottom guide 22. Next, as shown in FIGS. 17( a) and 17 (b ), with the position of the center of the opening aligned, install the probe 10 in such a way that the braking area 13 passes through the opening The middle guide 23.

Next, as shown by the arrows in FIGS. 18(a) and 18(b), the guide plate 23a and the guide plate 23b are relatively slid. For example, the guide plate 23a and the guide plate 23b are aligned so that the positioning holes 200 formed in the guide plate 23a and the guide plate 23b match. As a result, the center position of the opening of the guide plate 23a and the center position of the opening of the guide plate 23b are shifted, and the diameter of the area where the opening overlaps becomes narrower than the outer diameter of the area other than the braking area 13 of the probe 10. As a result, the top spring portion and the bottom spring portion can function independently.

(Other embodiments)

As described above, although the present invention is described using the embodiments, the discussion and drawings forming part of this disclosure should not be construed as limiting the content of the present invention. Based on this disclosure, those with ordinary knowledge in the technical field to which the present invention belongs understand that there can be various alternative embodiments, embodiments, and operation techniques.

For example, the above shows that the probe 10 has a circular cross-sectional shape, but the cross-sectional shape may also be a polygonal shape such as a quadrangular shape.

As such, the present invention naturally includes various embodiments and the like not described in this specification.

2‧‧‧ subject

3‧‧‧ substrate

10‧‧‧probe

11‧‧‧Cylinder

13‧‧‧brake area

14‧‧‧Joint parts

20‧‧‧ Probe head

21‧‧‧Top guide

22‧‧‧Bottom guide

23‧‧‧Intermediate guide

31‧‧‧solder pad

121‧‧‧Top side plunger

122‧‧‧Bottom plunger

231‧‧‧First intermediate guide

232‧‧‧The second middle guide

233‧‧‧ middle area

Claims (8)

An electrical connection device includes a probe, a tubular barrel, and a rod-shaped top plunger that engages with the barrel in a state where the tip is exposed from the opening ends of both ends of the barrel. And the bottom plunger, and a braking area having an outer diameter different from that of the main body of the cylindrical portion is formed in the middle of the two end portions; and a probe head having the outer diameter of the braking area and the main body opposite to each other A thinner region will pass through, and a relatively thick outer diameter region cannot pass through the intermediate guide, and the probe is held in a state where the relatively thinner region penetrates the intermediate guide, and the probe is configured to Between the end portion and the braking area, respectively, the shaft is free to expand and contract. When the probe extends and contracts in the axial direction, the relatively thick area is crimped on the intermediate guide. The electrical connection device according to item 1 of the patent application scope, wherein between each end of the two end portions of the cylindrical portion and the intermediate region, a spiral shape penetrating the side surface of the cylindrical portion is formed incision. The electrical connection device as described in item 1 or 2 of the patent application range, wherein the braking area is a flange-like area having a larger outer diameter than the main body portion, on both sides of the braking area along the axial direction The aforementioned intermediate guides are respectively arranged. The electrical connection device according to item 1 or 2 of the patent application range, wherein the braking region is a flange-like region having an outer diameter thicker than the body portion, and the two braking regions are formed along the axial direction in the foregoing The probe is provided with the intermediate guide between the two braking areas. The electrical connection device according to item 1 or 2 of the patent application range, wherein the braking area is a flange-like area having an outer diameter thicker than that of the main body, only at one of the two ends of the cylindrical portion The aforementioned braking area is formed between the aforementioned intermediate guide. The electrical connection device as described in item 1 or 2 of the patent application, wherein the relatively thick area is formed in the cylindrical portion. The electrical connection device according to item 1 or 2 of the patent application scope, wherein the probe further includes an intermediate column inserted separately from the top plunger and the bottom plunger and inserted into the cylinder Plug, the relatively thick area is formed in the middle plunger, the barrel is divided into a top into which the top side plunger can be inserted and a bottom into which the bottom side plunger can be inserted, the relatively thick area It is exposed from between the top and the bottom. The electrical connection device according to item 1 or 2 of the patent application, wherein the outer diameter of the braking region is thinner than the main body portion.

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