WO2019039233A1

WO2019039233A1 - Electrical connection device

Info

Publication number: WO2019039233A1
Application number: PCT/JP2018/029189
Authority: WO
Inventors: 美佳那須; 剛村本
Original assignee: 株式会社日本マイクロニクス
Priority date: 2017-08-24
Filing date: 2018-08-03
Publication date: 2019-02-28
Also published as: TWI682180B; TW201920963A; JP2019039753A

Abstract

This electrical connection device is provided with: a probe (10) which comprises a top-side plunger (121) and a bottom-side plunger (122), the tip of each exposed from the open ends at both ends of a barrel (11), and which comprises a stopper region (13) formed in an intermediate region between the two ends of the barrel (11) and having an outer diameter different from that of the main body portion of the barrel (11); and a probe head (20) which comprises a middle guide (23) through which is passed whichever of the stopper region (13) and the main body section of the barrel (11) has the smaller outer diameter and through which cannot pass whichever thereof has the larger outer diameter, and which retains the probe (10) in a state in which the thinner region has been passed through the middle guide (23). The probe (10) is configured to be capable of expanding and contracting in the axial direction between the two ends and the stopper region (13), and when the probe (10) is expanded or contracted in the axial direction, the relatively larger region presses against the middle guide (23).

Description

Electrical connection device

The present invention relates to an electrical connection device used to measure the characteristics of an object under test.

In order to measure the characteristics of an object to be inspected such as an integrated circuit without separating it from the wafer, an electrical connection device having a probe for contacting the object to be inspected is used. One end of the probe is brought into contact with the test object, and the other end of the probe is brought into contact with a terminal (hereinafter referred to as "land") disposed on the substrate and electrically connected to the tester.

At this time, it is necessary to secure an electrical connection between the probe and the test object or land. To that end, an overdrive (OD) is applied to press the probe strongly against the test subject. Also, a preload structure is employed in which the probe and the land are preloaded by elastically deforming the probe. For this reason, the structure which provides the part which elastically deforms in a probe is employ | adopted (for example, refer patent document 1).

Unexamined-Japanese-Patent No. 2010-281583

There is an appropriate range of preload sizes in order for the probe to make stable contact with the land. However, applying an OD affects the preload and causes a problem that the contact between the probe and the land becomes unstable. According to the study of the present inventors, it has been found that the pressure on the contact of the probe with the land is so large that the land is damaged and the contact becomes unstable. The problem that this contact becomes unstable also occurs between the probe and the test object.

SUMMARY OF THE INVENTION In view of the above problems, the present invention aims to provide an electrical connection device in which a probe can be in stable contact with a test object and a land disposed on a substrate.

According to one aspect of the present invention, there is provided a tube-shaped barrel, and a rod-shaped top side plunger and a bottom side plunger which are joined to the barrel in a state where their tips are exposed from the open ends of both ends of the barrel. And a probe region having a stopper region having an outer diameter different from that of the main body of the barrel is formed in the middle region between both ends, and the region having a relatively small outer diameter of the stopper region and the main body passes through and outside A relatively thick diameter area has a middle guide which can not pass through, and a relatively thin area is provided with a probe head for holding the probe in a state of penetrating the middle guide, and the probe is between the both ends and the stopper area An electrical connection device is provided which is configured to be axially extensible and retractable in each of the above, and in which the relatively thick region is crimped to the middle guide when the probe is axially contracted.

According to the present invention, it is possible to provide an electrical connection device capable of stably contacting the probe with the test object and the land disposed on the substrate.

It is a schematic diagram which shows the structure of the electrical connection apparatus based on the 1st Embodiment of this invention, FIG. 1 (a) shows the structure of the whole electrical connection apparatus, FIG.1 (b) shows the structure of a probe. Show. It is a schematic diagram which shows the structure of the electrical connection apparatus of a comparative example, FIG. 2 (a) shows the whole structure of an electrical connection apparatus, FIG.2 (b) shows the structure of a probe. It is a schematic diagram which shows the structure of the probe of the electrical connection apparatus which concerns on the 1st Embodiment of this invention, FIG. 3 (a) shows the structure of a barrel, FIG.3 (b) shows the cross section of a barrel, 3 (c) shows the configuration of the plunger. It is a schematic diagram which shows the other structure of the probe of the electrical connection apparatus which concerns on the 1st Embodiment of this invention, FIG. 4 (a) shows the structure of a barrel, FIG.4 (b) shows the structure of a plunger. Show. It is a schematic diagram which shows the other structure of the probe of the electrical connection apparatus which concerns on the 1st Embodiment of this invention, Fig.5 (a) shows the structure of a probe, FIG.5 (b) shows the structure of a barrel. FIG. 5 (c) shows the configuration of the plunger. It is a schematic diagram which shows the structure of the electrical connection apparatus which concerns on the modification of the 1st Embodiment of this invention, FIG. 6 (a) shows the structure of the whole electrical connection apparatus, FIG.6 (b) is a probe. Shows the configuration of It is a schematic diagram which shows the structure of the probe of the electrical connection apparatus based on the modification of the 1st Embodiment of this invention, FIG. 7 (a) shows the structure of a barrel, FIG.7 (b) shows the cross section of a barrel. FIG. 7 (c) shows the configuration of the plunger. It is a schematic diagram which shows the other structure of the probe of the electrical connection apparatus based on the modification of the 1st Embodiment of this invention, FIG. 8 (a) shows the structure of a barrel, FIG.8 (b) is a plunger Shows the configuration of It is a schematic diagram which shows the other structure of the probe of the electrical connection apparatus based on the modification of the 1st Embodiment of this invention, FIG. 9 (a) shows the structure of a probe, FIG.9 (b) is a barrel. The configuration is shown, and FIG. 9 (c) shows the configuration of the plunger. It is a schematic diagram which shows the Example of the electrical connecting apparatus based on the modification of the 1st Embodiment of this invention. It is a schematic diagram explaining the example of the assembling method of the electrical connection apparatus shown in FIG. 10, FIG. 11 (a) is a side view, FIG.11 (b) is a top view (the 1). It is a schematic diagram explaining the example of the assembly method of the electrical connection apparatus shown in FIG. 10, FIG. 12 (a) is a side view, FIG.12 (b) is a top view (the 2). It is a schematic diagram which shows the structure of the electrical connection apparatus which concerns on the other modification of the 1st Embodiment of this invention. It is a schematic diagram which shows the structure of the electrical connection apparatus which concerns on the other modification of the 1st Embodiment of this invention. It is a schematic diagram which shows the structure of the electrical connection apparatus which concerns on the 2nd Embodiment of this invention. It is a schematic diagram which shows the Example of the electrical connection apparatus which concerns on the 2nd Embodiment of this invention. It is a schematic diagram explaining the example of the assembling method of the electrical connection apparatus shown in FIG. 16, FIG. 17 (a) is a side view, FIG.17 (b) is a top view (the 1). It is a schematic diagram explaining the example of the assembly method of the electrical connection apparatus shown in FIG. 16, FIG. 18 (a) is a side view, FIG.18 (b) is a top view (the 2).

Next, embodiments of the present invention will be described with reference to the drawings. In the following description of the drawings, the same or similar parts are denoted by the same or similar reference numerals. However, it should be noted that the drawings are schematic, and the ratio of thickness of each part is different from the actual one. Moreover, it is a matter of course that parts having different dimensional relationships and ratios among the drawings are included. The embodiments described below exemplify apparatuses and methods for embodying the technical concept of the present invention, and the embodiments of the present invention are not limited to the materials, shapes, structures, arrangements and the like of components. Not specific to

First Embodiment
The electrical connection device according to the first embodiment of the present invention comprises a probe 10 and a probe head 20 for holding the probe 10, as shown in FIG. 1 (a). One end of the probe 10 contacts the land 31 disposed on the substrate 3, and the other end contacts the test object 2. Note that FIG. 1 shows a state in which the probe 10 and the inspection object 2 are not in contact with each other, and the stage (not shown) on which the inspection object 2 is mounted rises at the time of inspection. Body 2 contacts. The lands 31 are electrically connected to an inspection device such as a tester, and the electrical connection device is used to determine the electrical characteristics of the device under test 2.

As shown in FIG. 1 (b), the probe 10 has a bar-shaped barrel 11, and rod-shaped top side plungers 121 and bottom side plungers 122 whose tips are respectively exposed from the open ends of both ends of the barrel 11. Have. A stopper area 13 having an outer diameter different from that of the main body of the barrel 11 is formed in the middle area of both ends of the probe 10. The main body of the barrel 11 is a portion having a substantially constant outer diameter except the stopper region 13.

The top side plunger 121 and the bottom side plunger 122 are joined to the barrel 11 at the joint point 14. The top side plunger 121 and the bottom side plunger 122 and the barrel 11 may be welded by spot welding or may be bonded by an adhesive. Hereinafter, the top side plunger 121, the bottom side plunger 122, and the intermediate portion plunger 123 described later will be collectively referred to as "plunger 12". A conductive material is used for the probe 10 that electrically connects the land 31 and the test object 2. For example, a Ni material or the like is used for the barrel 11, and an AgPdCu material or the like is used for the plunger 12.

The probe head 20 has a top guide 21 having a through hole through which the top side plunger 121 penetrates, a bottom guide 22 having a through hole through which the bottom side plunger 122 penetrates, and between the top guide 21 and the bottom guide 22. A middle guide 23 is provided. The middle guide 23 is configured such that a region having a relatively small outer diameter passes through the stopper region 13 of the probe 10 and the main body of the barrel 11 and a region having a relatively large outer diameter can not pass. The probe head 20 is made of, for example, a ceramic.

As shown in FIG. 1A, the probe 10 is held by the probe head 20 in a state where the middle guide 23 of the probe head 20 is penetrated. For this reason, when the probe 10 is attached to the probe head 20, the probe 10 is supported by the middle guide 23 at the stopper region 13 inside the probe head 20 and is in a hanging state.

In the probe 10 shown in FIG. 1 (b), the stopper region 13 is a bowl-shaped region having an outer diameter larger than that of the main body of the barrel 11. The probe head 20 shown in FIG. 1A has a configuration in which a first middle guide 231 and a second middle guide 232 are disposed on both sides along the axial direction of the stopper region 13. In the middle area 233 between the first middle guide 231 and the second middle guide 232, the stopper area 13 whose outer diameter is larger than that of the main body of the barrel 11 is disposed.

The probe 10 is configured to be axially extensible and contractible between each of the end portions and an intermediate region in which the stopper region 13 is formed. Specifically, between each end of the barrel 11 and the middle region, a spiral cut is formed through the side of the barrel 11. The region in which the cut is formed is a spring portion, and the probe 10 is axially expandable. In addition, the notch | incision is not formed in the area | region where the stopper area | region 13 is arrange | positioned.

By forming a spring portion on the probe 10, it is possible to apply an OD or preload in a fixed size. In the following, the spring portion close to the opening end where the tip end portion of the top side plunger 121 is exposed is the “top side spring portion”, and the spring portion near the opening end where the tip portion of the bottom side plunger 122 is exposed Department. In addition, in order to make a drawing intelligible, the part inserted in the inside of the barrel 11 of the plunger 12 is abbreviate | omitting illustration.

In the electrical connection device shown in FIG. 1A, when the probe 10 expands and contracts in the axial direction, a relatively thick region of the probe 10 is crimped to the middle guide 23. For example, when the OD applied between the bottom plunger 122 and the inspection object 2 is larger than the preload applied between the top plunger 121 and the land 31, the stopper region 13 is the first middle guide. Crimp to 231. On the other hand, when the preload is larger than the OD, the stopper area 13 is crimped to the second middle guide 232.

As described above, according to the electrical connection device according to the first embodiment of the present invention, the expansion and contraction of the top side spring portion and the expansion and contraction of the bottom side spring portion contact the stopper region 13 and the middle guide 23. Braked by For this reason, the spring function of the top side spring portion that affects the pressure at which the probe 10 contacts the land 31 and the spring function of the bottom side spring portion that affects the pressure at which the probe 10 contacts the inspection object 2 are independently performed. It can be made to function.

As a result, it is possible to stably apply preload and OD as intended. That is, the probe 10 can be stably brought into contact with the lands 31 disposed on the inspection object 2 and the substrate 3. Therefore, it is possible to avoid the problem that the land 31 and the inspection object 2 are damaged by excessive pressure or the contact becomes unstable and the contact resistance varies.

On the other hand, in the electrical connection device of the comparative example shown in FIG. 2A, the top side spring portion and the bottom side spring portion do not function independently. The outer diameter of the probe 10A shown in FIG. 2B is constant at the outer diameter of the barrel 11A, and the stopper region 13 is not formed. The probe head 20A in which the top guide 21A through which the top plunger 121A passes and the bottom guide 22A through which the bottom plunger 122A contacts is in contact does not have the middle guide 23. Therefore, when the OD is applied, the preload is affected to cause problems such as the contact between the probe 10A and the land 31 becoming unstable.

Further, in the electrical connection device of the comparative example, the spring portion of the barrel 11A sags due to the crimp due to the excessive preload. Further, by applying the OD, the end of the top side plunger 121A pushes up the land 31 to cause a bending phenomenon in which the upper surface of the substrate 3 is expanded.

However, according to the electrical connection device shown in FIG. 1A, the top side spring portion and the bottom side spring portion can be functioned independently. For example, even if the OD is applied so that the tip of the bottom side plunger 122 stably contacts the inspection object 2, the preload does not affect the preload, and the top side plunger 121 is under the proper pressure set in advance. Crimp to land 31. For this reason, the spring portion of the probe 10 is not stagnated, and the occurrence of the bending phenomenon is also suppressed.

FIGS. 3A to 3C show a configuration example of the probe 10 in which the relatively thick stopper region 13 is formed in the barrel 11. In this configuration example, a bowl-shaped convex portion is formed on the outer periphery of the barrel 11, and a part of the top side plunger 121 and the bottom side plunger 122 is inserted into the barrel 11. Although the example in which the stopper area 13 is integrally formed with the main body of the barrel 11 is shown, a wedge-shaped component may be welded to the outside of the barrel 11 to form the stopper area 13.

4 (a) to 4 (b), an intermediate portion plan in which the relatively thick stopper region 13 is inserted into the interior of the barrel 11 apart from the top side plunger 121 and the bottom side plunger 122 respectively. The structural example of the probe 10 currently formed in the jar 123 is shown. The barrel 11 is divided into a top portion 11 a into which the top side plunger 121 is inserted and a bottom portion 11 b into which the bottom side plunger 122 is inserted. Then, the stopper region 13 is exposed between the top portion 11a and the bottom portion 11b.

5 (a) -5 (c) show another configuration example of the probe 10 in which the relatively thick stopper region 13 is formed in the intermediate portion plunger 123. FIG. The stopper region 13 is divided into two along the axial direction of the probe 10. The middle part plunger 123 comprises a first middle part plunger 123a connected to one of the divided ones of the stopper area 13 and a second middle part plunger 123b connected to the other divided one.

<Modification>
In the electrical connection device according to the modification of the first embodiment shown in FIGS. 6 (a) and 6 (b), the first stopper region 131 and the second stopper region 132 in the form of a bowl having a large outer diameter are provided. Are formed on the probe 10 along the axial direction. The middle guide 23 is disposed between the first stopper area 131 and the second stopper area 132. The middle guide 23 is narrower than the outer diameters of the first stopper region 131 and the second stopper region 132, and is also smaller than the outer diameter of the region intermediate the first stopper region 131 and the second stopper region 132. A wide through hole is formed. Therefore, the expansion and contraction of the top side spring portion is braked by the contact between the first stopper region 131 and the middle guide 23. Further, the expansion and contraction of the bottom side spring portion is braked by the contact between the second stopper area 132 and the middle guide 23. Therefore, the spring function can be made to function independently by the top side spring portion and the bottom side spring portion.

7A to 7C, the configuration of the probe 10 in which the first stopper region 131 and the second stopper region 132, which are relatively thicker than the main body of the barrel 11, are formed in the barrel 11. An example is shown. In this configuration example, a bowl-shaped convex portion is formed at two places on the outer periphery of the barrel 11, and a part of the top side plunger 121 and the bottom side plunger 122 is inserted into the barrel 11.

8 (a) to 8 (b), the configuration of the probe 10 in which the first stopper region 131 and the second stopper region 132 are formed in the middle portion plunger 123 inserted into the inside of the barrel 11. An example is shown. The barrel 11 is divided into a top portion 11 a into which the top side plunger 121 is inserted and a bottom portion 11 b into which the bottom side plunger 122 is inserted. Then, the first stopper region 131 and the second stopper region 132 are exposed between the top portion 11a and the bottom portion 11b.

9 (a) to 9 (c) show another configuration example of the probe 10 in which the first stopper region 131 and the second stopper region 132 are formed in the intermediate portion plunger 123. FIG. The first stopper region 131 is divided into two along the axial direction of the probe 10. The intermediate portion plunger 123 is connected to the first intermediate portion plunger 123a connected to the divided one of the first stopper region 131 and to the other divided, and the second stopper region 132 is formed. It consists of the 2nd middle part plunger 123b. Although the example in which the first stopper area 131 is divided is shown here, the second stopper area 132 may be divided.

As an embodiment of the electrical connecting device shown in FIG. 6A, a guide plate 23a and a guide plate in which an opening through which the probe 10 passes are respectively formed between the top guide 21 and the bottom guide 22 in FIG. The example which arrange | positioned the middle guide 23 which accumulated 23b is shown. In the electrical connection device shown in FIG. 10, the probe 10 is disposed such that the first stopper region 131 and the second stopper region 132 are located with the middle guide 23 interposed therebetween. And the opening part each formed in the contact surface of the guide plate 23a and the guide plate 23b is shifted and arrange | positioned in the orthogonal | vertical direction and axial direction.

The electrical connection device shown in FIG. 10 can be assembled by the method shown in FIGS. 11 (a), 11 (b) to 12 (a), 12 (b). That is, the middle guide 23 is prepared by overlapping the guide plate 23a and the guide plate 23b in which the opening having a diameter larger than the outer diameter of the first stopper region 131 and the second stopper region 132 is formed. However, at a predetermined position where the top guide 21 and the bottom guide 22 and the middle guide 23 are connected, the opening is formed so that the center position of the opening of the guide plate 23a and the guide plate 23b is shifted. Then, as shown in FIGS. 11 (a) and 11 (b), the probe 10 is mounted on the middle guide 23 in a state where the center of the opening is aligned.

Thereafter, the guide plate 23a and the guide plate 23b are relatively slid as indicated by the arrows in FIGS. 12 (a) and 12 (b). For example, the guide plate 23a and the guide plate 23b are aligned so that the alignment holes 200 formed in the guide plate 23a and the guide plate 23b coincide with each other. Thereby, the central position of the opening of the guide plate 23a and the central position of the opening of the guide plate 23b are shifted, and the diameter of the overlapping region of the openings is the outer diameter of the first stopper region 131 and the second stopper region 132. It becomes narrower than. As a result, the first stopper region 131 and the second stopper region 132 can not pass through the opening of the middle guide 23. Thereby, the top side spring part and the bottom side spring part can be functioned independently.

By the way, in FIG. 6A, the example which arrange | positions the stopper area | region 13 with a relatively large outer diameter on both sides of the middle guide 23 was shown. However, the stopper area 13 may be disposed only on one side of the middle guide 23.

For example, in the electrical connection device shown in FIG. 13, the stopper region 13 is disposed between the middle guide 23 and the bottom side spring portion, but the stopper region 13 is disposed between the middle guide 23 and the top side spring portion. Is not placed. For this reason, it is effective in the contact improvement of top side plunger 121 and land 31 improvement. For example, when the preload is made strong, it does not affect the OD.

Further, in the electrical connection device shown in FIG. 14, the stopper region 13 is disposed between the middle guide 23 and the top side spring portion, and the stopper region 13 is not disposed between the middle guide 23 and the bottom side spring portion. . Therefore, it is effective to improve the contact between the bottom side plunger 122 and the test object 2. For example, if you force OD, it does not affect preload.

As described above, the stopper region 13 may be formed between only one of both end portions of the barrel 11 and the middle guide 23.

Second Embodiment
In the electrical connection device according to the second embodiment of the present invention, as shown in FIG. 15, the stopper region 13 of the probe 10 is formed to have an outer diameter smaller than that of the main body of the barrel 11. That is, it is different from the first embodiment that the stopper area 13 is a constricted area. The other configuration is the same as that of the first embodiment.

In the electrical connection device shown in FIG. 15, a middle guide 23 is disposed between the top guide 21 and the bottom guide 22 so that the stopper region 13 can pass but the main body of the barrel 11 can not pass. For example, a middle guide 23 having a through hole which is wider than the outer diameter of the stopper region 13 and narrower than the outer diameter of the main body of the barrel 11 is disposed between the top guide 21 and the bottom guide 22. The stopper area 13 is formed, for example, by narrowing the outer diameter of the barrel 11 in the area where the plunger 12 is not disposed inside.

In the electrical connection device shown in FIG. 15, for example, the bottom side of the stopper region 13 when the OD applied between the probe 10 and the inspection object 2 is larger than the preload applied between the probe 10 and the land 31. The side of the spring portion is crimped to the middle guide 23. Further, when the preload is larger than the OD, the top side spring portion side of the stopper region 13 is crimped to the middle guide 23. Thus, the expansion and contraction of the top side spring portion and the expansion and contraction of the bottom side spring portion are respectively damped by the contact between the relatively thick region of the probe 10 and the middle guide 23. Therefore, the spring functions of the top side spring portion and the bottom side spring portion can be made to function independently.

Therefore, according to the electrical connection device according to the second embodiment of the present invention, the probe 10 can be stably brought into contact with the lands 31 disposed on the inspection object 2 and the substrate 3. For this reason, damage to the land 31 and the inspection object 2 or instability of the contact can be avoided. In addition, it is also suppressed that the spring portion of the probe 10 stagnates or the occurrence of the bending phenomenon. Others are substantially the same as in the first embodiment, and redundant descriptions will be omitted.

FIG. 16 shows an example using a middle guide 23 in which a guide plate 23a and a guide plate 23b are respectively formed by forming an opening through which the probe 10 is formed, as an embodiment of the electrical connection device shown in FIG. The electrical connection device shown in FIG. 16 has a configuration in which the stopper region 13 of the probe 10 is disposed in the openings respectively formed in the guide plate 23a and the guide plate 23b. The openings respectively formed in the guide plate 23a and the guide plate 23b are offset in the direction perpendicular to the axial direction.

The electrical connection device shown in FIG. 16 can be assembled by the method shown in FIGS. 17 (a), 17 (b) to 18 (a) and 18 (b). That is, the middle guide 23 is prepared by overlapping the guide plate 23a and the guide plate 23b in which the openings each having a diameter larger than the outer diameter of the area other than the stopper area 13 of the probe 10 are formed. However, at a predetermined position where the top guide 21 and the bottom guide 22 and the middle guide 23 are connected, the opening is formed so that the center position of the opening of the guide plate 23a and the guide plate 23b is shifted. Then, as shown in FIGS. 17A and 17B, the probe 10 is attached to the middle guide 23 so that the stopper area 13 passes through the opening with the center of the opening aligned. .

Thereafter, the guide plate 23a and the guide plate 23b are relatively slid as indicated by the arrows in FIGS. 18 (a) and 18 (b). For example, the guide plate 23a and the guide plate 23b are aligned so that the alignment holes 200 formed in the guide plate 23a and the guide plate 23b coincide with each other. Thereby, the central position of the opening of the guide plate 23a and the central position of the opening of the guide plate 23b are shifted, and the diameter of the overlapping region of the opening becomes narrower than the outer diameter of the region other than the stopper region 13 of the probe 10. . As a result, the top side spring portion and the bottom side spring portion can be functioned independently.

(Other embodiments)
Although the present invention has been described by the embodiments as described above, it should not be understood that the descriptions and the drawings that form a part of this disclosure limit the present invention. Various alternative embodiments, examples and operation techniques will be apparent to those skilled in the art from this disclosure.

For example, although the case where the shape of the cross section of the probe 10 is circular is described above, the shape of the cross section may be a polygonal shape such as a square.

Thus, it goes without saying that the present invention includes various embodiments that are not described herein.

The electrical connection device of the present embodiment can be used in the field of measurement of the electrical characteristics of a test object.

Claims

A tube-shaped barrel, and a rod-shaped top and bottom plungers joined to the barrel in a state where their tips are exposed from the open ends of both ends of the barrel, and the middle of the ends A probe in which a stopper region having an outer diameter different from that of the body portion of the barrel is formed in the region of
The middle region has a middle guide through which the relatively narrow outer diameter region of the stopper region and the main body portion can pass while the relatively thin region can not pass through the relatively thick region. A probe head for holding the probe in a penetrating state;
Equipped with
The probe is axially telescopically configured between each end and the stop area;
An electrical connection device characterized in that the relatively thick region is crimped to the middle guide when the probe expands and contracts in the axial direction.
The electrical as set forth in claim 1, wherein a spiral cut is formed between the end of each of the ends of the barrel and the intermediate region, the spiral cut penetrating the side of the barrel. Connection device.
The stopper region is a bowl-shaped region having an outer diameter larger than that of the main body portion,
The electrical connection device according to claim 1, wherein the middle guides are disposed on both sides of the stopper area along the axial direction.
The stopper region is a bowl-shaped region having an outer diameter larger than that of the main body portion,
Two said stopper regions are formed in said probe along said axial direction,
The electrical connection device according to claim 1, wherein the middle guide is disposed between the two stopper regions.
The stopper region is a bowl-shaped region having an outer diameter larger than that of the main body portion,
The electrical connection device according to claim 1, wherein the stopper area is formed between only one of the both end portions of the barrel and the middle guide.
The electrical connection device according to claim 1, wherein the relatively thick region is formed in the barrel.
The probe further comprises an intermediate plunger spaced apart from each of the top and bottom plungers and inserted into the interior of the barrel;
The relatively thick region is formed on the middle portion plunger,
The barrel is divided into a top portion into which the top side plunger is inserted and a bottom portion into which the bottom side plunger is inserted, and the relatively thick region is exposed between the top portion and the bottom portion The electrical connection device according to claim 1, characterized in that:
The electrical connection device according to claim 1, wherein the stopper area has an outer diameter smaller than that of the main body.