JP2011095218A - Probe head - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To achieve a probe head having improved stability and reproducibility of measurement. <P>SOLUTION: The probe head includes: a vessel having holes formed in a truncated chevron shape with a predetermined angle on a bottom; a partition for two-dividing the bottom and an opening of the vessel; an attachment board fixed to the partition oppositely to the bottom; a trapezoidal pedestal having one of ends fixed to the attachment board and having side faces tapered toward the tip; a disk like bearing rotatably attached to both side faces of the pedestal; a rod like shaft fixed to a side face of the bearing; a tip pin formed in an L shape and having one of ends fixed to the center of the bearing and the other end serving as a free end; and a slide lever having one of ends engaged with the rod like shaft and the other end located on an external surface of the vessel. The slide lever located on the external surface of the vessel is linearly moved thereby rotating the bearing via the rod like shaft, and thus pitches of the tip pin can be changed. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a probe head of a probe that is used as a probe pin, a socket pin, or the like and performs an electrical test by contacting each terminal of a semiconductor IC chip, a liquid crystal device, or the like.

FIG. 6A is a perspective view showing a digital oscilloscope probe, for example. A probe head 2 is disposed at the tip of the probe 1, and a pair of tip pins 3 a and 3 b are inserted into the probe head 2.
FIG. 6B is an enlarged view of the tip pin 3. One end of the tip pin is formed at an acute angle, and is bent at a predetermined angle θ. The socket is formed as an insertion portion from the bent portion to the other end, and is formed on the probe head 2 in FIG. Is omitted).

  The socket has a certain holding force in a state in which the tip pin is inserted, and can be moved by manually rotating the tip pin. That is, when the tip pin itself is not a straight type but an angle type having a certain angle, the tip pin pitch can be changed by rotating the tip pin. Then, the tip pin is brought into contact with the object to be measured and the electrical characteristics are observed.

When measuring the object to be measured, a pair of pins 3a and 3b whose pitch can be changed is rotated, the pitch of the tip pin is manually changed according to the object to be measured, and the tip pins 3a and 3b are changed to the object to be measured. Press and touch to measure.
In addition, the following patent document is known as a prior art regarding a contact probe.

JP 2002-116222 A JP 2000-155131 A JP-A-6-313775

  By the way, in the above configuration, when measuring the object to be measured, the tip pins 3a and 3b whose pitch can be changed are inserted and the pitch is manually adjusted. There is no mechanism for fixing the pin pitch with only the socket portion. During measurement, the tip pin is pressed against the object to be measured and brought into contact with it, so that the tip pin moves due to the pressing force and the pin pitch changes.

In addition, if the tip pin moves, the measurement data will be lost or the contact between the tip pin and the object to be measured will increase, and the man-hour for the measurement will increase. As a result, there is a problem that the stability and reproducibility of the measurement are impaired.
In addition, the pin pitch is not adjusted to a specific number of millimeters, but is adjusted in accordance with the object to be measured. Therefore, there is a problem that measurement stability and reproducibility are low even with the same object to be measured.

  Therefore, the present invention provides a pin pitch fixing mechanism for preventing the tip pin from moving even if the tip pin is brought into contact with the object to be measured when a pin that can change the pin pitch is used at the tip of the probe. It is an object to provide a probe head with improved reproducibility and reproducibility.

The present invention has been made to solve the above problems, and in the probe head according to claim 1,
A container having a hole formed in a square shape at a predetermined angle at the bottom, a partition plate that bisects the bottom and the opening of the container, a mounting plate that faces the bottom and is fixed to the partition plate, A trapezoidal pedestal formed such that one end is fixed to the mounting plate and a side surface is tapered toward the tip; a disc-shaped bearing rotatably mounted on both side surfaces of the pedestal; and the bearing A rod-shaped shaft fixed to the side surface of the shaft, a tip pin having one end formed in an L shape fixed to the center of the bearing and the other end being a free end, and one end engaged with the rod-shaped shaft. A slide lever arranged so that an end is positioned on the outer surface of the container is provided, and the bearing is rotated through the rod-shaped shaft by moving the slide lever arranged on the outer surface of the container in a linear direction. Let the tip pin Characterized in that the changeable pitch.

In claim 2, in the probe head according to claim 1,
The width of the C-shaped hole is slightly larger than the diameter of the tip pin, and the tip pin can slide along the C-shaped hole.

In claim 3, in the probe head according to claim 1,
A scale is provided along the long hole, and the pin pitch of the tip pin is read by this scale.

  As is apparent from the above description, according to claims 1 and 2 of the present invention, a container having a hole formed in a square shape at a predetermined angle in the bottom, and the bottom and the opening of the container are divided into two parts. A partition plate facing the bottom and fixed to the partition plate, a trapezoidal pedestal formed so that one end is fixed to the mounting plate and a side surface is tapered toward the tip, A disk-shaped bearing rotatably attached to both side surfaces of the pedestal, a rod-shaped shaft fixed to the side surface of the bearing, and one end formed in an L-shape are fixed to the center of the bearing. The end is provided with a free end pin and a slide lever arranged so that one end is engaged with the rod-shaped shaft and the other end is located on the outer surface of the container, and the slide is disposed on the outer surface of the container By moving the lever in the linear direction Since the bearing is rotated through the rod-shaped shaft, the distance between the pins can be changed according to the object to be measured by passing the two pins at the tip of the probe through the C-shaped hole. .

  According to claim 3, since a scale is provided along the long hole and the pin pitch of the tip pin is read by this scale, it can be fixed with the distance between the tip pins (pin pitch) adjusted, Measurement stability and reproducibility can be improved.

  1A to 1C are configuration diagrams showing the appearance of the probe head of the present invention. FIG. 1A is a front view, FIG. 1B is a bottom view, and FIG. 1C is a side view.

  In these drawings, reference numeral 6 denotes a container for storing a driving mechanism for driving the tip pin, and pin guides 7 and 8 for restricting the movement of the tip pins 9 and 10 are formed at the bottom. Reference numeral 6a denotes a partition plate. A drive mechanism of a tip pin is arranged in one chamber 6b formed between the partition plate 6a and the bottom portion, and the tip pin 9, 10 is connected to the other chamber 6c having an opening. The pins 11 and 12 for transmitting the electrical signal to the probe protrude, and the inner surface of the chamber 6c is formed with projections 13 and 14 that function as a retainer for the probe head 2 and the probe 1 (see FIG. 6). ing. 6d is a scale plate for viewing the position of the slide lever 15.

  FIG. 2A is a side view showing a driving mechanism for the tip pins 9 and 10 housed in the container 6. In the figure, a mounting plate 17a is fixed to the surface of the partition plate 6a on the side of the chamber 6b formed by the bottom portion and the partition plate, and the side surface of the mounting plate 17a tapers toward the tip at a substantially central portion. A trapezoidal pedestal 17 formed in the above is fixed.

Reference numeral 18 (25) denotes a disk-shaped bearing made of an insulating member fixed to the side surface of the pedestal 17, and one end of a shaft 19 (26) is fixed to the edge of the bearing.
One end of the tip pin is bent at approximately 90 degrees, and the bent portion is firmly fixed to the center of the bearing 18 (25) by press-fitting or bonding.

  Reference numeral 20 denotes two arms having one end fixed in parallel to a corner of one side of the mounting plate 17a at a predetermined angle, and a contact 21 is fixed to each other end. As shown in the perspective view of FIG. 2 (b), the contact 21 has one end of two flat plates 21b arranged on the back surface of the U-shaped member 21a at right angles to the parallel portion constituting the U-shaped portion. They are fixed at an interval a. The distance a is slightly smaller than the outer diameter of the tip pins 9 and 10 and is formed to be slightly inclined so that the tip portion is narrow, and is held in an electrically conductive state with the tip pins 9 and 10. The

  Reference numeral 22 denotes a transmission path fixed at one end in contact with the contact 21, and the other end is fixed in contact with the socket 24 (28) via the metal plate 23, and the tip pin is contact → transmission path → metal plate → socket. It is configured to be electrically connected to the pin 11 (12) through the pin. The transmission path 22 is a conductive path formed on a printed circuit board, for example, and the contacts, transmission path, metal plate, socket, and pin are connected by a conductor such as solder.

  3A, 3B, and 3C are perspective views of the drive mechanism. 3A shows a state where the slide lever 15 is attached, FIG. 3B shows an enlarged view where the slide lever 15 is removed, and FIG. 3C shows a state where FIG. 3B is rotated 180 degrees horizontally. FIG.

  3A, the slide lever 15 includes a connecting plate 15a, a sliding plate 15c having a groove 15b fixed to one end of the connecting plate, and a knob 15d fixed to the other end of the connecting plate 15a. The sliding plate 15c is fixed in a T shape with respect to the connecting plate 15a, and the width of the groove 15b sandwiching the shaft 19 (26) is slightly larger than the outer diameter of the shaft.

  As described above, the knob 15c is disposed so as to be exposed on the outer surface of the container (see FIGS. 1 and 2). When the knob 15c is slid in the linear direction, the shaft 19 ( 26) moves and the bearing 18 (25) rotates. At this time, the shaft and the groove 15b move while the contact portion slides. Further, by inserting the groove 15e formed in the knob into the plate thickness portion of the container 6, moderate friction is generated and the movement of the slide lever 15 is suppressed. Thereby, the movement of the tip pin 10 (9) is also suppressed, and the pin pitch can be fixed.

  4A to 4C are perspective views of the drive mechanism seen from other directions, FIG. 4C is a side view of FIG. 4A, and FIG. 4B is a view of FIG. It shows a state rotated by a predetermined degree, and mainly shows the relationship between the mounting plate 17a, the pedestal 17, and the bearing 18 (25). The pedestal 17 is formed in a trapezoidal shape such that one end is fixed to the mounting plate 17a and the side surface is tapered toward the tip, and disk-shaped bearings are rotatably attached to both side surfaces of the pedestal 17.

  Therefore, the bearing is inclined with respect to the mounting plate 17a along the side surface constituting the trapezoid of the base 17, and one end of the rod-shaped shaft 19 (26) is fixed to the side surface of the bearing. That is, the shaft is fixed while being inclined with respect to the bearing surface at an angle corresponding to the trapezoidal inclination of the pedestal and the taper of the side surface of the pedestal.

  FIGS. 5A and 5B show the operation of the drive mechanism configured as described above. FIG. 5A is a side view and FIG. 5B is a front view. In these drawings, when the slide lever 15 moves from the position a to the position b, the bearing 18 (25) rotates through the shaft 19 (26), and the tip of the tip pin 10 (9) fixed to the bearing. Moves from the position of a widened to the maximum width to the position of b narrowed down to the minimum. The spread of the tip pin can be set at an arbitrary position with good reproducibility by the scale plate 6d graduated on the outer surface of the container.

  The above description merely shows a specific preferred embodiment for the purpose of explanation and illustration of the present invention. Therefore, the present invention is not limited to the above-described embodiments, and includes many changes and modifications without departing from the essence thereof.

It is a block diagram which shows an example of embodiment of the probe head of this invention. It is a figure (b) which shows an example of a side view (a) of a drive mechanism stored in a probe head, and a shape of a contact. It is a perspective view which shows the detail of a drive mechanism. It is a perspective view which shows the detail of a drive mechanism. It is the side view (a) and front view which show operation | movement of a drive mechanism. It is a perspective view which shows the prior art example of a probe.

DESCRIPTION OF SYMBOLS 1 Probe 2 Probe head 3 Pin 4 Insertion part 6 Container 6a Partition plate 6b, 6c Chamber 6d Scale plate 7,8 Pin guide 9,10 Tip pin 11,12 Pin 13,14 Protrusion 15 Slide lever 15a Connecting plate 15b Groove 15c Sliding Moving plate 17 Base 18, 25 Bearing 19, 26 Shaft 20, 27 Arm 21 Contact 21a U-shaped member 21b Flat plate 22 Transmission path 23 Metal plate 24, 28 Socket

Claims (3)

  A container having a hole formed in a square shape at a predetermined angle at the bottom, a partition plate that bisects the bottom and the opening of the container, a mounting plate that faces the bottom and is fixed to the partition plate, A trapezoidal pedestal formed such that one end is fixed to the mounting plate and a side surface is tapered toward the tip; a disc-shaped bearing rotatably mounted on both side surfaces of the pedestal; and the bearing A rod-shaped shaft fixed to the side surface of the shaft, a tip pin having one end formed in an L shape fixed to the center of the bearing and the other end being a free end, and one end engaged with the rod-shaped shaft. A slide lever arranged so that an end is positioned on the outer surface of the container is provided, and the bearing is rotated through the rod-shaped shaft by moving the slide lever arranged on the outer surface of the container in a linear direction. Let the tip pin Probe head is characterized in that the changeable pitch.   The width of the C-shaped hole is formed slightly larger than the diameter of the tip pin, and the tip pin can slide along the C-shaped hole. Probe head.   2. The probe head according to claim 1, wherein a scale is provided along the elongated hole, and the pin pitch of the tip pin is read by the scale.