JP2008045969A - Probe for four-terminal measurement - Google Patents

Probe for four-terminal measurement Download PDF

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JP2008045969A
JP2008045969A JP2006221013A JP2006221013A JP2008045969A JP 2008045969 A JP2008045969 A JP 2008045969A JP 2006221013 A JP2006221013 A JP 2006221013A JP 2006221013 A JP2006221013 A JP 2006221013A JP 2008045969 A JP2008045969 A JP 2008045969A
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probe
tip
terminal measurement
elastic deformation
deformation
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JP4886422B2 (en
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Tadashi Tomoi
忠司 友井
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Hioki EE Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an easily-manufacturable probe for four-terminal measurement having excellent durability, capable of performing easily measuring operation, and realizing excellent electric contact with an inspection object. <P>SOLUTION: This probe 1 for four-terminal measurement has characteristics wherein two root parts 11 of two probes 2, 3 mounted on an operation arm of an electric measuring device through an elastic deformation part and constituting two terminals on one side of the probe 1 for four-terminal measurement are connected through plate springs 9a, 9b having a deformation direction on the same plane as a deformation direction of the elastic deformation part, and the two tips 2a, 3a thereof are brought close in the gradually narrowed state toward each tip, and one tip 2a on the furthermore separated side from a deformation fulcrum 8c of the elastic deformation part between the two tips is furthermore projected than the other one tip 3a. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、ベアボードの導通確認等の回路検査を行うためのプローブ固定具に固定される四端子測定用プローブに関するものである。   The present invention relates to a four-terminal measuring probe fixed to a probe fixture for performing circuit inspection such as conduction check of a bare board.

電気機器に組み込まれるプリント基板、集積回路、液晶パネル等の電子部品は、電気機器に組み込まれる前に、プリントパターンや回路、素子等の導通確認、絶縁確認、動作確認のような電気的性能検査が行なわれる。この性能検査では、四端子法による抵抗の測定が高精度であることから広く採用されている。   Electronic components such as printed circuit boards, integrated circuits, and liquid crystal panels that are installed in electrical equipment are tested for electrical performance such as confirmation of continuity, insulation, and operation of printed patterns, circuits, and elements before being installed in electrical equipment. Is done. In this performance inspection, resistance measurement by the four probe method is widely used because of its high accuracy.

性能検査の際、ベアボードテスタ等の検査機器を電子部品に接続するため、四端子測定用プローブが用いられる。このプローブを、検査ポイントへ接触させてから、導通確認等の所期の性能検査が行なわれる。   In the performance inspection, a four-terminal measurement probe is used to connect an inspection device such as a bare board tester to an electronic component. After the probe is brought into contact with the inspection point, an expected performance inspection such as continuity confirmation is performed.

四端子測定は次のように行われる。まず、被測定基板の測定位置付近にプローブを近づけ、さらに垂直方向に移動させることによりプローブを接触させる。このとき、二本のプローブの内の一本が、被測定基板に接触し、その後もう一本が接触する。接触後も垂直方向に移動を続け、電気的接触が安定するまで行う。そして、被測定基板を検査機器と導通させ、電気的性能検査を行う。   Four-terminal measurement is performed as follows. First, the probe is brought into contact by moving the probe closer to the vicinity of the measurement position on the substrate to be measured and moving the probe in the vertical direction. At this time, one of the two probes comes into contact with the substrate to be measured, and the other then comes into contact. Continue to move vertically after contact until the electrical contact is stable. Then, the substrate to be measured is brought into conduction with the inspection device, and an electrical performance inspection is performed.

特許文献１に、探針は同軸プローブであり、互いに絶縁された内側プローブ針と外側プローブ針とを有し、各プローブ針が個別に沈み込むように構成された四端子測定用プローブが記載されている。   Patent Document 1 describes a four-terminal measurement probe in which a probe is a coaxial probe, and has an inner probe needle and an outer probe needle insulated from each other, and each probe needle is configured to sink separately. ing.

しかし、この場合、構造が複雑なため高コストになってしまうことがある。また、プローブ針とその他の部分との摩擦により、打痕がより大きくなったり、電気的接触が不安定になったりすることがある。プローブの接触動作を速めるとその傾向が高くなる。さらに、より小さな検査ポイントに対応したプローブを製造する場合、二本のプローブ間の距離をより小さくしなければならないが、そのために絶縁物の厚さを薄くすると、絶縁性能が悪化したり絶縁できなかったりする。   However, in this case, the structure may be complicated, resulting in high costs. In addition, the friction between the probe needle and other parts may cause a larger dent or unstable electrical contact. This tendency increases when the contact operation of the probe is accelerated. In addition, when manufacturing a probe for a smaller inspection point, the distance between the two probes must be made smaller. For this reason, if the thickness of the insulator is reduced, the insulation performance deteriorates or insulation can be prevented. There is not.

また、特許文献２に、四端子接続された二股構造のプローブカードの探針を有するプローブカードが記載されている。   Patent Document 2 describes a probe card having a two-pronged probe card probe connected to four terminals.

しかし、二本のプローブ針の先端の位置調整は難しく、高度な組み立てが要求される。プローブの接触動作を速めると、二本のプローブ針同士が接触してしまい、四端子測定プローブとして使用できない場合がある。また、プローブ針が被検査物に接触してから、さらに電気的接触が安定になるまでプローブの移動を行う際、その動作距離が小さいので調整が困難である。動作距離を大きくとってしまった場合、プローブが破損することがある。   However, it is difficult to adjust the positions of the tips of the two probe needles, and high level assembly is required. If the contact operation of the probe is accelerated, the two probe needles may come into contact with each other and may not be used as a four-terminal measurement probe. Further, when the probe is moved until the electrical contact is further stabilized after the probe needle contacts the object to be inspected, the adjustment is difficult because the operating distance is small. If the operating distance is increased, the probe may be damaged.

特開平６−６６８３２号公報JP-A-6-66832 特開平５−１４４８９５号公報JP-A-5-144895

本発明は前記の課題を解決するためになされたもので、製造及び測定操作が容易で、耐久性に優れ、被検査物との電気的接触が良好な四端子測定用プローブを提供することを目的とする。   The present invention has been made to solve the above problems, and provides a four-terminal measurement probe that is easy to manufacture and measure, has excellent durability, and has good electrical contact with an object to be inspected. Objective.

前記の目的を達成するためになされた、特許請求の範囲の請求項１に記載の四端子測定用プローブは、電気測定器の操作アームに弾性変形部を介して取り付けられる、四端子測定プローブの片側二端子を構成する二本のプローブ針であって、その二本の根元部は該弾性変形部の変形方向と同一面に変形方向を持つ板ばねを介して連結しており、その二本の先端は先窄まりで接近していることを特徴とする。   The four-terminal measurement probe according to claim 1, which is made to achieve the above object, is a four-terminal measurement probe attached to an operation arm of an electric measuring instrument via an elastic deformation portion. Two probe needles constituting two terminals on one side, the two root portions being connected via a leaf spring having a deformation direction on the same plane as the deformation direction of the elastic deformation portion, the two The tip of is characterized by being tapered and approaching.

請求項２に記載の四端子測定用プローブは、請求項１に記載されたものであって、該板ばねが二枚構成であることを特徴とする。   A four-terminal measuring probe according to a second aspect is the one according to the first aspect, wherein the leaf spring has a two-plate configuration.

請求項３に記載の四端子測定用プローブは、請求項１に記載されたものであって、該二本のプローブ針のうち該弾性変形部の変形支点から離れた側の一本の先端が他の一本の先端よりも突出していることを特徴とする。   The four-terminal measuring probe according to claim 3 is the probe according to claim 1, wherein one tip of the two probe needles on the side away from the deformation fulcrum of the elastically deforming portion is provided. It protrudes from the other tip.

請求項４に記載の四端子測定用プローブは、請求項１に記載されたものであって、該プローブ針が、該弾性変形部および該板ばねの変形面に交差する方向に傾斜して固定部に取り付けられ、該プローブ針の先端が、固定部よりも突出していることを特徴とする。   The four-terminal measurement probe according to claim 4 is the probe according to claim 1, wherein the probe needle is fixed while being inclined in a direction intersecting the elastic deformation portion and the deformation surface of the leaf spring. The tip of the probe needle is protruded from the fixed part.

請求項５に記載の検査方法は、請求項４に記載した四端子測定用プローブの２本を、前記により傾斜して固定部よりも突出しているプローブ針の先端が向き合う方向に重ね合わせ、４本のプローブ針の先端が接近して一つのプロービング対象について端子測定を行うことを特徴とする。   According to a fifth aspect of the present invention, there is provided an inspection method in which two of the four-terminal measuring probes according to the fourth aspect are superposed in a direction in which the tip of the probe needle that is inclined and protrudes from the fixed portion faces each other. The tip of the probe needle of the book approaches and the terminal measurement is performed for one probing object.

本発明の四端子測定用プローブは、二本のプローブ針を取付けている板ばねの弾性変形により、検査対象に確実に接触できる。また、接触の際の動作はプローブ固定具の弾性変形のみで、プローブとその他の部分との摩擦を伴わない。そのため、電気的接触が確実に行われ、打痕が小さい。プローブ針が検査対象に接触後、さらに電気的接触が安定になるまでプローブの下動を行う際、固定具が弾性変形するので、動作距離が大きく取れる。そのため動作の自由度が高く、プローブを破損させる心配もない。   The four-terminal measuring probe of the present invention can reliably contact the inspection object by the elastic deformation of the leaf spring to which the two probe needles are attached. Further, the contact operation is only elastic deformation of the probe fixture, and there is no friction between the probe and other portions. Therefore, the electrical contact is reliably performed and the dent is small. When the probe needle is moved downward until the electrical contact is stabilized after the probe needle contacts the object to be inspected, the fixture is elastically deformed, so that a large operating distance can be obtained. Therefore, the degree of freedom of operation is high and there is no fear of damaging the probe.

プローブを固定具に固定する際に位置調整が必要であるが、剛性が高いため容易である。二本のプローブ針の間に絶縁物を挟む必要がないため、プローブ針同士をより接近させることができ、より微細な検査対象の測定が可能である。また、構造が簡単なため、製造コストを低減することができる。   Position adjustment is necessary when fixing the probe to the fixture, but it is easy because of its high rigidity. Since there is no need to sandwich an insulator between the two probe needles, the probe needles can be brought closer together, and a finer measurement of an inspection object is possible. Moreover, since the structure is simple, the manufacturing cost can be reduced.

以下、本発明の実施例を詳細に説明するが、本発明の範囲はこれらの実施例に限定されるものではない。
最初に、本発明を適用する四端子測定用プローブの構造について、図１を参照して説明する。 Examples of the present invention will be described in detail below, but the scope of the present invention is not limited to these examples.
First, the structure of a four-terminal measurement probe to which the present invention is applied will be described with reference to FIG.

四端子測定用プローブ１は、図１に示すように、二本のプローブ針２，３を備えている。プローブ針２は固定具１０の端に、プローブ針３は弾性変形部側にそれぞれ固定されている。固定具１０は、プローブ針２，弾性変形部側のプローブ針３を固定するためのプローブ固定部１１と、図示外の電気測定器の操作アームに取り付けるための取付部５と、プローブ固定部１１及び取付部５を互いに連結するための連結用アーム６，７とが一体化されて構成されている。   As shown in FIG. 1, the four-terminal measuring probe 1 includes two probe needles 2 and 3. The probe needle 2 is fixed to the end of the fixture 10, and the probe needle 3 is fixed to the elastic deformation portion side. The fixture 10 includes a probe needle 2, a probe fixing portion 11 for fixing the probe needle 3 on the elastic deformation portion side, an attachment portion 5 for attachment to an operation arm of an electric measuring instrument (not shown), and a probe fixing portion 11. The connecting arms 6 and 7 for connecting the mounting portion 5 to each other are integrated.

この場合、プローブ針２，弾性変形部側のプローブ針３は、プローブ針の先端２ａ，弾性変形部側のプローブ針の先端３ａが接触方向に先窄まりで接近するようにプローブ固定部１１の側部にその一部が埋め込まれ、固定されている。プローブ固定部１１は上下にそれぞれ上部板ばね９ａ，下部板ばね９ｂを備えている。このとき、プローブ針の先端２ａは、弾性変形部側のプローブ針の先端３ａよりも接触方向に２０μｍ突出している。こうして、プローブ針２，弾性変形部側のプローブ針３及びプローブ固定部１１が一体化する。   In this case, the probe needle 2 and the probe needle 3 on the elastic deformation portion side of the probe fixing portion 11 are arranged such that the tip 2a of the probe needle and the tip 3a of the probe needle on the elastic deformation portion side approach in a tapered manner in the contact direction. Part of it is embedded in the side and fixed. The probe fixing portion 11 is provided with an upper leaf spring 9a and a lower leaf spring 9b in the vertical direction. At this time, the tip 2a of the probe needle protrudes 20 μm in the contact direction from the tip 3a of the probe needle on the elastic deformation portion side. Thus, the probe needle 2, the probe needle 3 on the elastic deformation portion side, and the probe fixing portion 11 are integrated.

一方、取付部５には、図１に示すように、四端子測定用プローブ１を電気測定器の操作アームに固定するための固定用孔４ａ，４ｂが形成されている。また、連結用アーム６は、連結用アーム７よりも短めの角棒状に形成され、取付部５およびプローブ固定部１１との連結箇所には、本発明における円弧切り欠き変形支点に相当し、その一部を円弧状に切り欠いて形成された変形支点８ａ，８ｂを有している。一方、連結用アーム７は、連結用アーム６よりも長めの角棒状に形成され、取付部５およびプローブ固定部１１との連結箇所には、本発明における円弧切り欠き変形支点に相当し、その一部を円弧状に切り欠いて形成された変形支点８ｃ，８ｄを有している。これらのプローブ固定部１１、取付部５、連結用アーム６、連結用アーム７及び変形支点８ａ〜８ｄによって本発明における四節回転機構が形成される。   On the other hand, as shown in FIG. 1, fixing holes 4 a and 4 b for fixing the four-terminal measuring probe 1 to the operation arm of the electric measuring device are formed in the attachment portion 5. Further, the connecting arm 6 is formed in a rectangular bar shape shorter than the connecting arm 7, and the connecting portion between the mounting portion 5 and the probe fixing portion 11 corresponds to the arc notch deformation fulcrum in the present invention. Deformation fulcrums 8a and 8b are formed by cutting out part of them in an arc shape. On the other hand, the connecting arm 7 is formed in a rectangular bar shape longer than the connecting arm 6, and the connecting portion between the mounting portion 5 and the probe fixing portion 11 corresponds to the arc notch deformation fulcrum in the present invention. Deformation fulcrums 8c and 8d formed by cutting out a part in an arc shape. The probe fixing portion 11, the mounting portion 5, the connecting arm 6, the connecting arm 7, and the deformation fulcrums 8a to 8d form a four-bar rotation mechanism in the present invention.

次に、プロービング時の四端子測定用プローブ１の動作について、図２、３を参照して説明する。
まず、プローブ案内機構によって、プローブ針の先端２ａ及び弾性変形部側のプローブ針の先端３ａをプロービング対象体Ｐの上方に位置させる。次に、プローブ案内機構が取付部５を矢印Ａの方向に下動させると、図２に示すように、プローブ針の先端２ａがプロービング対象体Ｐに接触する。さらに矢印Ａの方向に下動させると、主に、上部板ばね９ａ及び下部板ばね９ｂは、夫々の弾性変形部側の端を中心にして、図面正面から見て反時計回りの方向に弾性変形する。その結果、図３に示すように、弾性変形部側のプローブ針の先端３ａが、矢印Ａの方向でプロービング対象体Ｐ側に付勢され、接触する。その後、さらに下動を続けると、主に、変形支点８ａ〜８ｄが弾性変形する。その際、取付部５の位置を基準とすると、連結用アーム６，７は、変形支点８ｂ，８ｄを中心にして、図面正面から見て反時計回りの方向にそれぞれ相対的に回転する。同時に、変形支点８ａ〜８ｄの元の状態に復帰しようとする復帰力がプローブ針の先端２ａ及び弾性変形部側のプローブ針の先端３ａに作用する。その復帰力は、矢印Ａの方向でプロービング対象体Ｐに付勢される。そして、プローブ針の先端２ａ及び弾性変形部側のプローブ針の先端３ａとプロービング対象体Ｐとの電気的接触が安定したところで下動を止め、電気的性能検査を行う。 Next, the operation of the four-terminal measurement probe 1 during probing will be described with reference to FIGS.
First, the tip 2a of the probe needle and the tip 3a of the probe needle on the elastic deformation portion side are positioned above the probing object P by the probe guide mechanism. Next, when the probe guide mechanism moves the mounting portion 5 downward in the direction of arrow A, the tip 2a of the probe needle contacts the probing object P as shown in FIG. When further moved downward in the direction of the arrow A, the upper leaf spring 9a and the lower leaf spring 9b are mainly elastic in the counterclockwise direction when viewed from the front of the drawing centering on the end of each elastic deformation portion. Deform. As a result, as shown in FIG. 3, the tip 3 a of the probe needle on the elastic deformation portion side is urged toward the probing object P in the direction of arrow A and comes into contact. Thereafter, when the further downward movement is continued, mainly the deformation fulcrums 8a to 8d are elastically deformed. At that time, when the position of the mounting portion 5 is used as a reference, the connecting arms 6 and 7 are relatively rotated around the deformation fulcrums 8b and 8d in the counterclockwise direction as viewed from the front of the drawing. At the same time, a return force for returning to the original state of the deformation fulcrums 8a to 8d acts on the tip 2a of the probe needle and the tip 3a of the probe needle on the elastic deformation portion side. The restoring force is urged against the probing object P in the direction of arrow A. Then, when the electrical contact between the probe needle tip 2a and the probe needle tip 3a on the elastic deformation portion side and the probing object P is stabilized, the downward movement is stopped and an electrical performance test is performed.

本発明の実施の形態では、円弧切り欠き変形支点を用いる例について説明したが、本発明は、これに限定されず、双曲線切り欠き変形支点や楕円切り欠き変形支点などを用いることもできるし、その形状については適宜変更することができる。   In the embodiment of the present invention, an example using an arc notch deformation fulcrum has been described, but the present invention is not limited to this, and a hyperbolic notch deformation fulcrum, an elliptical notch deformation fulcrum, etc. can be used, The shape can be changed as appropriate.

また、図４に示すように、四端子測定用プローブ１は、二本のプローブ針２，３が、該弾性変形部および該板ばねの変形面に交差する方向に傾斜してプローブ固定部１１に取り付けられ、プローブ針の先端２ａ，３ａが、プローブ固定部１１よりも突出している。   As shown in FIG. 4, the four-terminal measuring probe 1 has two probe needles 2, 3 inclined in a direction intersecting the elastic deformation portion and the deformation surface of the leaf spring, and the probe fixing portion 11. The probe needle tips 2 a and 3 a protrude from the probe fixing portion 11.

図５及び図６は、二つの四端子測定用プローブを近接させたときの正面図及び平面図をそれぞれ示している。二つの四端子測定用プローブは、プローブ固定部１１よりも突出しているプローブ針の先端２１ａ，３１ａ，２２ａ及び３２ａが向き合う方向に重ね合わされている。これら四本のプローブ針の先端２１ａ，３１ａ，２２ａ及び３２ａは先窄まりに接近している。
そのため、四本のプローブ針を用いて一つのプロービング対象について測定することができ、より精度の高い性能検査が可能である。 5 and 6 show a front view and a plan view, respectively, when two four-terminal measuring probes are brought close to each other. The two four-terminal measurement probes are superposed in the direction in which the tips 2 1 a, 3 1 a, 2 2 a, and 3 2 a of the probe needle protruding from the probe fixing portion 11 face each other. The tips 2 1 a, 3 1 a, 2 2 a and 3 2 a of these four probe needles are approaching the constriction.
Therefore, it is possible to measure one probing object using four probe needles, and it is possible to perform a performance test with higher accuracy.

本発明の四端子測定用プローブは、プリント基板、集積回路（ＩＣ）ソケット、液晶パネル、半導体のような各種電子部品について、導通確認、絶縁確認、動作確認、抵抗値測定のような性能検査をするのに、用いられる。   The four-terminal measurement probe of the present invention performs performance inspections such as continuity confirmation, insulation confirmation, operation confirmation, and resistance value measurement for various electronic components such as printed circuit boards, integrated circuit (IC) sockets, liquid crystal panels, and semiconductors. Used to do.

本発明を適用する四端子測定用プローブの外観斜視図である。1 is an external perspective view of a four-terminal measurement probe to which the present invention is applied. 本発明を適用する四端子測定用プローブの側面図であって、プローブ針の先端２ａがプロービング対象体Ｐに接触させられた状態の側面図である。It is a side view of the probe for four-terminal measurement to which the present invention is applied, and is a side view in a state where the tip 2a of the probe needle is in contact with the probing object P. 本発明を適用する四端子測定用プローブの側面図であって、プローブ針の先端２ａ及び弾性変形部側のプローブ針の先端３ａがプロービング対象体Ｐに接触させられた状態の側面図である。FIG. 4 is a side view of a four-terminal measuring probe to which the present invention is applied, in a state where the tip 2a of the probe needle and the tip 3a of the probe needle on the elastic deformation portion side are brought into contact with the probing object P. 本発明を適用する四端子測定用プローブの正面図である。It is a front view of the probe for four terminal measurement to which the present invention is applied. 本発明を適用する二つの四端子測定用プローブを近接させたときの正面図である。It is a front view when two four-terminal measurement probes to which the present invention is applied are brought close to each other. 本発明を適用する二つの四端子測定用プローブを近接させたときの平面図である。It is a top view when two four-terminal measurement probes to which the present invention is applied are brought close to each other.

符号の説明Explanation of symbols

１は四端子測定用プローブ、２はプローブ針、２ａはプローブ針の先端、３は弾性変形部側のプローブ針、３ａは弾性変形部側のプローブ針の先端、４ａは固定用孔、４ｂは固定用孔、５は取付部、６は連結用アーム、７は連結用アーム、８ａ〜８ｄは変形支点、９ａは上部板ばね、９ｂは下部板ばね、１０は固定具、１１はプローブ固定部、Ｐはプロービング対象体である。   1 is a probe for measuring four terminals, 2 is a probe needle, 2a is a tip of the probe needle, 3 is a probe needle on the elastic deformation portion side, 3a is a tip of the probe needle on the elastic deformation portion side, 4a is a fixing hole, 4b is Fixing hole, 5 is a mounting portion, 6 is a connecting arm, 7 is a connecting arm, 8a to 8d are deformation fulcrums, 9a is an upper leaf spring, 9b is a lower leaf spring, 10 is a fixture, and 11 is a probe fixing portion. , P is a probing object.

Claims (5)

電気測定器の操作アームに弾性変形部を介して取り付けられる、四端子測定プローブの片側二端子を構成する二本のプローブ針であって、その二本の根元部は該弾性変形部の変形方向と同一面に変形方向を持つ板ばねを介して連結しており、その二本の先端は先窄まりで接近していることを特徴とする四端子測定用プローブ。   Two probe needles constituting one side two terminals of the four-terminal measuring probe, which are attached to the operation arm of the electric measuring instrument via the elastic deformation portion, the two root portions being the deformation directions of the elastic deformation portion A probe for four-terminal measurement, characterized in that it is connected via a leaf spring having a deformation direction on the same plane, and its two tips are constricted and approached. 該板ばねが二枚構成であることを特徴とする請求項１に記載の四端子測定用プローブ。   The four-terminal measurement probe according to claim 1, wherein the plate spring has a two-plate configuration. 該二本のプローブ針のうち該弾性変形部の変形支点から離れた側の一本の先端が他の一本の先端よりも突出していることを特徴とする請求項１に記載の四端子測定用プローブ。   The four-terminal measurement according to claim 1, wherein one tip of the two probe needles on the side away from the deformation fulcrum of the elastically deforming portion protrudes from the other tip. Probe. 該プローブ針が、該弾性変形部および該板ばねの変形面に交差する方向に傾斜して固定部に取り付けられ、該プローブ針の先端が、固定部よりも突出していることを特徴とする請求項１に記載の四端子測定用プローブ。   The probe needle is attached to the fixed portion so as to incline in a direction intersecting the elastic deformation portion and the deformation surface of the leaf spring, and the tip of the probe needle protrudes from the fixed portion. Item 4. The four-terminal measurement probe according to item 1. 請求項４に記載した四端子測定用プローブの２本を、前記により傾斜して固定部よりも突出しているプローブ針の先端が向き合う方向に重ね合わせ、４本のプローブ針の先端が接近して一つのプロービング対象について端子測定を行うことを特徴とする検査方法。   Two four-terminal measuring probes according to claim 4 are overlapped in a direction in which the tips of the probe needles that are inclined and protrude from the fixed portion face each other, and the tips of the four probe needles approach each other. An inspection method characterized by performing terminal measurement on one probing object.
JP2006221013A 2006-08-14 2006-08-14 Four-terminal measurement probe Expired - Fee Related JP4886422B2 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102735884A (en) * 2012-06-21 2012-10-17 深圳市大族激光科技股份有限公司 Bracket for measuring head of flying-probe tester and design method of bracket
CN104391141A (en) * 2014-12-08 2015-03-04 成都可为科技发展有限公司 Device convenient for acquiring electric signal of terminal block binding post by probe

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101886656B1 (en) * 2017-09-04 2018-08-09 임회진 Prove module for testing input apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102735884A (en) * 2012-06-21 2012-10-17 深圳市大族激光科技股份有限公司 Bracket for measuring head of flying-probe tester and design method of bracket
CN102735884B (en) * 2012-06-21 2014-09-10 深圳市大族激光科技股份有限公司 Bracket for measuring head of flying-probe tester and design method of bracket
CN104391141A (en) * 2014-12-08 2015-03-04 成都可为科技发展有限公司 Device convenient for acquiring electric signal of terminal block binding post by probe

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