KR101000426B1 - Conductive contactor and conductive contactor unit - Google Patents

Abstract

The present invention provides a conductive contactor and a conductive contactor unit which can cope with narrowing of the spaced intervals, and are excellent in durability and can easily see the contact situation with the inspection object.

For this purpose, a first contact portion in contact with a circuit structure for outputting an inspection signal, a plurality of straight portions extending in a direction parallel to the longitudinal direction and perpendicular to the longitudinal direction, and the adjacent straight portions are connected to each other. A plurality of curved portions curved in an arc shape, the elastic portion stretchable in the longitudinal direction and the tip contacting the inspection object protrude in a direction farther from the central axis in the width direction of the elastic portion than the edge end in the width direction of the elastic portion; The outer diameter of the said curved part provided with a 2nd contact part and the curved part curved in the side from which the said 2nd contact part protrudes is made smaller, so that the closer to the front-end | tip of the said 2nd contact part, The said 2nd among the said some curved parts. The outer diameter of the curved portion that is curved on the side opposite to the side where the contact portion protrudes may be close to the tip of the second contact portion. Make it louder.

Description

Conductive contactor and conductive contact unit {CONDUCTIVE CONTACTOR AND CONDUCTIVE CONTACTOR UNIT}

The present invention relates to a conductive contact and a conductive contact for contacting electrodes or terminals of the electronic part and transmitting and receiving electrical signals when conducting conduction state inspection or operation characteristic inspection in an electronic component such as a liquid crystal panel or a semiconductor integrated circuit. A conductive contact unit constituted using.

Background Art Conventionally, in the technical field related to the inspection of electrical characteristics of inspection targets such as semiconductor integrated circuits, a plurality of conductive contacts are provided corresponding to the connecting electrodes of the semiconductor integrated circuit, and electrical conduction is performed by physically contacting the conductive contacts with the connecting electrodes. Description of the Related Art [0002] Techniques related to conductive contact units having a function of securing a structure are known. The conductive contact unit includes a plurality of conductive contacts and a conductive contact holder holding the plurality of conductive contacts. In such a conductive contact unit, various techniques have been proposed to cope with narrowing of the arrangement intervals of the connecting electrodes according to the miniaturization tendency of the semiconductor integrated circuit to be inspected.

For example, Patent Literature 1 below discloses a technique for a conductive contact having a contact portion in contact with an inspection object and an elastic portion that is elastically added to the contact portion, and forming a plate shape. In this prior art, by arranging a plurality of conductive contacts arranged in the plate thickness direction at narrow intervals, it is possible to cope with narrowing of the arrangement intervals of the connecting electrodes to be inspected.

[Patent Document 1]

Japanese Patent Application Laid-Open No. 2001-343397

However, in the above-described prior art, since the tip of the conductive contact strokes in a direction substantially parallel to the stretch direction of the elastic body, the oxide film formed on the surface of the inspection object, the contamination adhered to the surface thereof, and the like cannot be sufficiently removed. In some cases, electrical contact could not be obtained. In this case, an excessive load may be applied to the conductive contactor, causing a problem in durability of the conductive contactor.

In the inspection, it is preferable that the operator can visually see contact between the tip of the conductive contact and the inspection object. However, in the conventional conductive contact unit, when viewed from the top, the tip of the conductive contact on the lower side is the conductive contact. Since it is located inward from the side of the holder, when observing the contact with the inspection object near the tip of the conductive contact, the operator must bend and look into the vicinity of the contact, and the operator increases as the number of observations increases. The burden on was also increased.

SUMMARY OF THE INVENTION The present invention has been made in view of the above, and an object of the present invention is to provide a conductive contactor and a conductive contactor unit which can cope with narrowing of the interval of arrangement and are excellent in durability and can easily see the contact situation with the inspection object. It is done.

MEANS TO SOLVE THE PROBLEM In order to solve the said subject and achieve the objective, one form of this invention is a conductive contact which forms a plate shape, and electrically connects the circuit structure which outputs a test signal, and an inspection object, The length of the said conductive contact A first contact portion located at the end of the direction and in contact with the circuit structure, a plurality of straight portions extending perpendicular to the longitudinal direction and parallel to the width direction of the conductive contact, and adjacent straight lines; It has a plurality of curved portions connected to each other to be curved in an arc shape, is located in the middle portion of the longitudinal direction, the elastic portion that is stretchable in the longitudinal direction, and the other end of the first contact portion in the longitudinal direction, The tip in contact with the inspection object is farther from the central axis in the width direction of the elastic portion than the edge end in the width direction of the elastic portion. Has a second contact portion protruding in a direction, and an outer diameter of the curved portion that is curved at the side from which the second contact portion protrudes from the plurality of curved portions is smaller as closer to the tip of the second contact portion, and the plurality of curved portions The outer diameter of the curved portion that is curved on the side opposite to the side from which the second contact portion protrudes is characterized in that the closer to the front end of the second contact portion.

Moreover, in the said invention, the outer diameter of the said curved part curved in the side which the said 2nd contact part protrudes among the said some curved parts makes a straight line which connects the front-end | tip of the said 1st and 2nd contact part as a reference straight line, The outer diameter of the curved portion that is linearly changed according to the first reference amount determined for each curved portion using the reference straight line, and the curved portion that is curved on the side opposite to the side from which the second contact portion protrudes from the plurality of curved portions is the reference straight line. It may change linearly in accordance with the 2nd reference amount determined with respect to each curved part using.

Moreover, in the said invention, the linear diameter of the said linear part may be large so that it is farther from the front-end | tip of the said 1st contact part.

Moreover, in the said invention, the linear diameter of the said linear part may change linearly according to the distance from the front end of the said 1st contact part or the front end of the said 2nd contact part to the center of the said linear part.

Moreover, in the said invention, the 1st connection part which connects the said 1st contact part and the said elastic part, the 2nd connection part in which the opening part which connects the said elastic part and the said 2nd contact part, and penetrates in the plate thickness direction of the said conductive contact is formed. Furthermore, the width direction length which the said 1st connection part, the said 2nd connection part, and the said elastic part each have may be mutually equal.

Moreover, in the said invention, the 1st connection part which connects the said 1st contact part and the said elastic part, the 2nd connection part in which the opening part which connects the said elastic part and the said 2nd contact part, and penetrates in the plate thickness direction of the said conductive contact is formed. It is further provided, The edge end in the width direction of the elastic portion and the side opposite to the side on which the second contact portion protrudes, The edge end in the width direction of the first and second contact portion and the second contact portion protrudes You may retract in the direction closer to the center axis of the width direction of the said elastic part than the edge edge part on the opposite side to the present side.

Moreover, in the said invention, the edge edge part of the width direction of the said elastic part and the side which the said 2nd contact part protrudes is the edge edge part of the width direction of the said 1st and 2nd connection part, and the said 2nd contact part protrudes, You may retract in the direction closer to the center axis of the width direction of the said elastic part than the edge edge of the side which exists.

A conductive contact unit according to another aspect of the present invention includes a first contact portion located at an end portion in the longitudinal direction and in contact with a circuit structure for outputting an inspection signal, and perpendicular to the longitudinal direction, and in the width direction of the conductive contact portion. An elastic portion that is stretched in the longitudinal direction and has a plurality of curved portions extending in parallel to each other and a plurality of curved portions that are adjacent to the adjacent linear portions and are curved in an arc shape, and positioned in an intermediate portion of the longitudinal direction; A second contact portion, which is positioned at a different end from the first contact portion in the longitudinal direction and protrudes in a direction away from a central axis in the width direction of the elastic portion than an edge end in the width direction of the elastic portion, in contact with an inspection object; A first connecting portion connecting the first contact portion and the elastic portion, the elastic portion and the second contact portion, A plurality of conductive contacts formed in a plate shape and an edge end portion on one side of the edge direction in the longitudinal direction of the conductive contact and protruding from the second contact portion, having a second connecting portion having an opening formed therethrough in the thickness direction; A plurality of first guide grooves to be kept in alignment with each other, and a plurality of first guide grooves respectively positioned to face each other, and the other edge end portions of the conductive contacts inserted into the opposing first guide grooves to fit and hold each other. A conductive contact holder having a second guide groove and a rod-shaped member fixed to the conductive contact holder through the opening formed in the second connecting portion each of the plurality of conductive contacts, It is curved in the side which the said 2nd contact part protrudes among the said some curved parts. The outer diameter of the curved portion is smaller as closer to the distal end of the second contact portion, and the outer diameter of the curved portion that is curved on the opposite side to the side from which the second contact portion protrudes from the plurality of curved portions is closer to the distal end of the second contact portion. The larger the feature is.

In the above invention, the cross-sectional area perpendicular to the longitudinal direction of the rod-shaped member may be smaller than the area of the opening formed in the conductive contact.

Moreover, in the said invention, the front-end | tip of the said 2nd contact part may protrude in the normal direction of the said outer surface rather than the outer surface of the part in which the said 1st guide groove was formed inward as the outer surface of the said conductive contact holder.

According to the present invention, a first contact portion in contact with a circuit structure for outputting an inspection signal is connected to a plurality of straight portions extending in a direction parallel to the width direction and perpendicular to the longitudinal direction, and adjacent straight portions. And a plurality of curved portions that are curved in an arc shape, the elastic portion stretchable in the longitudinal direction and the tip in contact with the inspection object protrude in a direction farther from the central axis in the width direction of the elastic portion than the edge end in the width direction of the elastic portion. And an outer diameter of the curved portion that is curved on the side from which the second contact portion protrudes from the plurality of curved portions, the smaller the closer to the distal end of the second contact portion, the second of the plurality of curved portions. The outer diameter of the curved portion that is curved on the side opposite to the side where the contact portion protrudes may be close to the tip of the second contact portion. By making, it can be durable and at the same time corresponding to the possible narrowing of an array interval and to provide a conductive contact and the conductive contact unit that can be easily seen by the eye contact state of the inspection object.

1 is a perspective view showing a configuration of a conductive contact unit according to an embodiment of the present invention;

2 is a diagram showing a configuration of a conductive contact according to an embodiment of the present invention;

3 is a view for explaining a setting example of the outer diameter of the curved portion;

4 is a partially enlarged perspective view of an upper surface portion of a conductive contact holder;

5 is a diagram showing an internal configuration of a conductive contact unit according to one embodiment of the present invention;

It is a figure which shows the structure of the conductive contact which concerns on the modification of embodiment of this invention.

[Description of Drawings]

1: conductive contact unit 2, 5: conductive contact

3: conductive contact holder 3a: upper surface part

3b, 3c: side part 3d: bottom part

4: bar-shaped member 21, 51: first contact portion

22, 52: second contact portion 23, 53: elastic portion

23a-1, 23a-2,... , 23a-n, 53a-i: straight part

23b-1, 23b-2,... , 23b- (n + 1), 53b-j: curved portion

24, 54: 1st connection part 25, 55: opening part

26, 56: second connection part 31: holding part

31a: 1st guide groove 31b: 2nd guide groove

32: fixing hole 100: circuit board

101: fixing member 200: inspection target

L ₁ : straight line (reference straight line) L ₂ , L ₃ : straight line (second straight line)

P, Q: Tip R _j : Outer Diameter

t _i , t _k , T _j , T _k : line diameter Δ ₁ : offset amount

δ ₁ , h: protrusion amount

EMBODIMENT OF THE INVENTION Hereinafter, the best form (henceforth "embodiment") for implementing this invention with reference to an accompanying drawing is demonstrated. In addition, the drawings are schematic, and the relationship between the thickness and width of each part, the ratio of the thickness of each part, and the like may be different from the actual ones. Of course, other parts may be included.

1 is a perspective view showing a configuration of a conductive contact unit according to an embodiment of the present invention. The conductive contact unit 1 shown in the drawing performs conduction state inspection or operation characteristic inspection of a circuit structure such as a liquid crystal panel to be inspected, and includes a plurality of conductive contacts 2 forming a plate shape and a plurality of conductive contacts ( A conductive contact holder 3 holding and holding 2) and a rod-shaped member 4 fixed to the conductive contact holder 3 and supporting a plurality of conductive contacts 2 are provided.

First, the conductive contact 2 will be described. 2 is a diagram illustrating a configuration of the conductive contact 2 according to the first embodiment. In the following description, the vertical direction in FIG. 2 is "the longitudinal direction of the conductive contact 2", and the horizontal direction in FIG. 2 is "the width direction of the conductive contact 2", and is perpendicular to the longitudinal direction and the width direction, respectively. The direction to be made, ie, the direction perpendicular to the ground, will be referred to as the "plate thickness direction of the conductive contact 2", respectively.

The conductive contact 2 shown in FIG. 2 is formed to have a plate shape using a conductive material, and establishes an electrical connection between a circuit structure for generating a test signal and an inspection object. More specifically, the conductive contact 2 includes a first contact portion 21 in physical contact with a predetermined circuit structure including an inspection circuit, and an agent in physical contact with an inspection object such as a liquid crystal panel. The elastic part 23 which can stretch and contract in the longitudinal direction, and the 1st contact part 21 and the elastic part 23 interposed between the 2nd contact part 22, the 1st contact part 21, and the 2nd contact part 22. As shown in FIG. And a second connecting portion 26 formed with an opening 25 penetrating in the plate thickness (thickness) direction by connecting the first connecting portion 24 for connecting the second contact portion 22 and the elastic portion 23 to each other. do.

The 1st contact part 21 is provided so that the length of the 1st connection part 24 may protrude in a longitudinal direction from the center part of a short direction. The protruding position of the first contact portion 21 from the first connection portion 24 is not limited to this, but may be determined according to conditions such as the position of the electrode provided in the circuit structure to be contacted.

The second contact portion 22 protrudes away from the central axis in the width direction of the elastic portion 23 than the edge portion in the width direction of the elastic portion 23. In addition, the shape of the second contact portion 22 is a material of the conductive contact 2 or the load to be applied to the conductive contact 2 at the time of inspection, the conductive contact holder (3) for holding and holding the conductive contact (2) It should be determined according to various conditions such as the shape of the shape, the type of inspection object, etc., and if it protrudes in the width direction from the edge end of the width direction of the second connecting portion 26, it is appropriate for the detail of the shape. It is possible to change.

The elastic portions 23 are a plurality of straight portions 23a-1, 23a-2, ..., orthogonal to the longitudinal direction of the conductive contact 2 and extending in a direction parallel to the width direction of the conductive contact 2. 23a-n) and a plurality of curved portions 23b-1, 23b-2,... Which are curved in an arc shape by connecting adjacent straight portions. , 23b-n, 23b- (n + 1)] to form a shape meandering in an S shape along the longitudinal direction. The length in the width direction of the elastic portion 23 is the same as the length in the width direction of the first connecting portion 24 and the second connecting portion 26. In addition, when shown in FIG. 2, the number n of linear parts is an odd number, but this is only an example and the specific number of n is suitably determined according to the load applied to the electroconductive contact 2. As shown in FIG.

The line diameter t _i of the linear portions 23a-i (i = 1, 2,..., N) is larger from the first contact portion 21, and is larger than t ₁ <t ₂ <. <t _n . This line diameter t _i is linearly determined in accordance with the distance from the tip end P of the first contact part 21 or the tip Q of the second contact part 22 to the center of each straight part 23a-i. It is more desirable to change. Thereby, the line of the linear part 23a-n of the part (near region of the curved part 23b-n) where the elastic part 23 tends to concentrate a stress when the internal load of the conductive contact unit 1 is applied. The diameter t _n becomes the thickest, and it becomes possible to reduce the influence of friction between the conductive contact tablet unit 1 at the corresponding portion.

Curved portions [23b-1, 23b-2,... , 23b- (n + 1), wherein the curved portion 23b-j (j = 2,4, ..., n + 1: j is even), which is curved at the side from which the second contact portion 22 protrudes, The closer the outer diameter R _j is to the distal end of the second contact portion 22, the smaller it is and R ₂ > R ₄ >...> R _{n + 1.} On the other hand, the side opposite to the side from which the second contact portion 22 protrudes. The curved portion 23b-j (j = 1,3, ..., n; odd is _j ) that is curved at is larger as the outer diameter R _j is closer to the tip of the second contact portion 22, and R ₁ <R _3. <a ... <R _n. in addition, R ₁ and R _2, R _1, and thus, satisfies the <R _2. the wire diameter of the curved portion [23b-k (k = 1,2 , ..., n + 1)] (t _k) is being determined by the line diameter of the linear portion [23a- (k-1)] wire diameter (t _k-1) and the straight portion (23a-k) of the connection at the end (t _k) At least t _k-1 ≤ T _k ≤ t _k (wherein T ₁ ≤ t ₁ at k = 1 and t _n ≤ T _{n + 1 at} k = _{n + 1} ).

The outer diameter R _j of the curved portion 23b-j (j = 1, 2,..., N + 1) is the tip P of the first contact portion 21 and the tip Q of the second contact portion 22. It is more preferable to make the straight line L ₁ which connects into a reference straight line, and to change linearly according to the reference amount determined using this reference straight line L ₁ . Or less, with respect to this point, it represents a setting example of the outer diameter (R _j) using the reference line (L ₁₎ will be described with reference to Figure 3 of the drawings.

First, the outer diameter R _j of the curved portion 23b-j (j = 2, 4, ..., n + 1; j is even), which is curved at the side where the second contact portion 22 protrudes, will be described. The outer diameter (R _j) in this case is a straight line (L ₁₎ and is in the same plane, at least a straight line (L ₁₎ and will not have a cross inside the elastic part 23, a conductive contact (2) length Direction is determined according to the distance from the straight line L ₂ parallel to each other. More specifically, the outer diameter R _j of the curved portion 23b-j (j = 2,4, ..., n + 1; j is even) is a distance between the straight line L ₁ and the straight line L ₂ . A linear relationship with the distance (x _j ) (first reference amount) in the direction orthogonal to the straight line (L ₂ ) passing through the center of the corresponding curved portion 23b-j [R _j = αx _j + β (α> O , β is an integer)].

On the other hand, the outer diameter R _j of the curved part 23b-j (j = 1,3, ..., n; j is an odd number) curved on the side opposite to the side where the second contact portion 22 protrudes is a straight line. On the same plane as (L ₁ ) and at least with the straight line (L ₃ ) parallel to the longitudinal direction of the conductive contact (2) does not have an intersection with the straight line (L ₁ ) inside the elastic portion (23). It depends on the distance. More specifically, the outer diameter R _j of the curved portion 23b-j (j = 1, 3,..., N; j is an odd number) is a distance between the straight line L ₁ and the straight line L ₃ . Linear relationship with the distance x ' _j (second reference amount) in the direction orthogonal to the straight line L3 through the center of the corresponding curved portion 23b-j [R _j = γx' _j + δ (γ> O , δ is an integer)].

In addition, the determination method of the outer diameter R _j demonstrated here is only an example, The definition of the 1st and 2nd reference amounts, and the value of (alpha), (beta), (gamma), (delta) can be changed suitably. Further, the second straight line method of determining the [above-mentioned straight line (L ₂₎ corresponds to a straight line or (L _3)] is also arbitrary.

In addition, instead of using two other straight lines L ₂ and L ₃ as described above as the second straight line, it is also possible to define the first and second reference amounts by using any one of the straight lines. In this case, the curved portion 23b-j (j = 1, 2, ..., n + 1) is applied with a different linear relation expression depending on whether or not the curved portion 23b is curved toward the side where the second contact portion 22 protrudes. What is necessary is just to determine the outer diameter R _j of each curved part 23b-j.

Next, the conductive contact holder 3 will be described. As shown in FIG. 1, the conductive contact holder 3 has a substantially rectangular parallelepiped shape, and penetrates the upper surface portion 3a and the bottom surface portion (not shown in FIG. 1) to allow the plurality of conductive contacts 2 to be formed. Fixing hole part 32 which is formed in the predetermined position of the holding | maintenance part 31 to hold | maintain and the side part 3b which mutually opposes via the holding part 31, and fixes the edge part of the rod-shaped member 4, respectively. Has

4 is a partially enlarged perspective view of the upper surface portion 3a of the conductive contact holder 3. As shown in FIG. 4, when attaching the conductive contact 2 to the holding part 31, the edge of the side on which the 2nd contact part 22 protrudes as one edge end of the width direction of the conductive contact 2. The width direction of the 1st guide groove 31a of the linear shape which hold | maintains an edge part, and the electroconductive contactor 2 located opposite to this 1st guide groove 31a, and inserted in the 1st guide groove 31a. A plurality of pairs of linear second guide grooves 31b are formed to fit and hold the other edge end of the edge. The paired first guide groove 31a and the second guide groove 31b have a function of positioning the conductive contact 2 with respect to the surface direction perpendicular to the longitudinal direction, and at the same time, the conductive contact 2 It has a function to guide the expansion and contraction of Moreover, the space | interval of adjacent pairs among the pair which the 1st guide groove 31a and the 2nd guide groove 31b make is the same, and is mutually parallel.

Each of the first guide groove 31a and the second guide groove 31b has the same groove width (referred to as w) and the same groove depth (referred to as d). In addition, although the groove depth of the first guide groove 31a and the groove depth of the second guide groove 31b are the same, the groove depths of the two guide grooves may be different from each other.

5 is a diagram illustrating an internal configuration of the conductive contact unit 1. The cross section of the electroconductive contact holder 3 shown in the said figure is corresponded to the A-A line cross section of FIG. As shown in FIG. 5, the 1st guide groove 31a and the 2nd guide groove 31b have the structure extended in parallel with each other along the z-axis direction (direction perpendicular | vertical to a groove width direction) of FIG. The length in which the first guide groove 31a extends in the z-axis direction of FIG. 5 is shorter than the length in which the second guide groove 31b extends in the same z-axis direction, and the second guide groove 31b is the conductive contact holder. Although it reaches to the bottom face part 3d of (3), the 1st guide groove 31a reaches only to the position perpendicular | vertical upward rather than the bottom face part 3d.

In the conductive contact holder 3 having the above configuration, in the coordinate system xyz shown in FIGS. 1 and 5, the widthwise direction is parallel to the x-axis direction, and the plate thickness direction is the y-axis direction. It is parallel and hold | maintains so that a longitudinal direction may be parallel to a z-axis direction. In this sense, the plate thickness of the conductive contact 2 is slightly smaller than the groove width w of the first guide groove 31a and the second guide groove 31b.

The conductive contact 2 held by the conductive contact holder 3 has the second contact portion 22 in a state in which no load is applied to the first contact portion 21 and the second contact portion 22 (state shown in FIG. 5). The tip Q of the projecting portion protrudes in a predetermined amount in the x-axis positive direction from the side surface portion 3c of the conductive contact holder 3 (the amount of protrusion is δ ₁ ). In addition, the tip Q of the second contact portion 22 protrudes from the bottom portion 3d of the conductive contact holder 3 in a predetermined positive direction in the z-axis negative direction (a projection amount is h). Thereby, the operator can confirm the presence or absence of physical contact between the tip of the conductive contact 2 and the inspection object even at an oblique upper side of the conductive contact unit 1 (see FIG. 1). Further, in Fig. 5, the offset amount of the tip end of the second contact portion 22 from the first contact portion 21, the tip (P) parallel to the axis in the z-axis direction (O) passes through the are referred to as Δ _1. The protrusion amounts δ ₁ and h and the offset amount Δ ₁ described herein are appropriately determined according to the conditions of the size of the conductive contact 2 or the conductive contact holder 3, the load to be applied to the inspection object, and the like. All.

It is preferable that the conductive contact holder 3 is made of an insulating material from the viewpoint of electrically connecting with the conductive contact 2 to prevent the occurrence of a short circuit. For example, the conductive contact holder 3 may be formed using a low thermal expansion synthetic resin, and the first guide groove 31a and the second guide groove 31b may be formed by dicing or the like. In addition, for example, ceramics such as alumina (Al ₂ 0 ₃ ), zirconia (Zr0 ₂ ), silica (Si0 ₂ ), thermosetting resins such as silicon and epoxy, engineering plastics such as polycarbonate, etc. ) May be formed, and the first guide groove 31a and the second guide groove 31b may be formed by a processing technique such as etching. In addition, instead of forming the conductive contact holder 3 using an insulating material, a portion of the base material can be formed using another suitable material (with or without insulating property) and in contact with the conductive contact 2 [first A portion including the guide groove 31a or the second guide groove 31b] may be coated with an appropriate insulating paint. In this sense, an insulating paint may be applied to part or all of the surface of the conductive contact 2.

Next, the rod-shaped member 4 will be described. The rod-shaped member 4 attaches the plurality of conductive contacts 2 to the holding portion 31 and passes through the openings 25 of the respective conductive contacts 2, and then both ends thereof have conductive contact holders 3. ) Is inserted into fixing holes 32 formed in the side portions 3b facing each other, respectively, and is fixed to the conductive contact holder 3. The rod-shaped member 4 collectively penetrates through the openings 25 of the plurality of conductive contacts 2 held by the holding portion 31 to prevent a falling-out function from the holding portion 31 of the conductive contact 2. At the same time, the conductive contact 2 is provided with an initial deflection.

The cross section perpendicular | vertical to the longitudinal direction of the rod-shaped member 4 forms the shape which chamfered the rectangular angle, as shown in FIG. 5, and the area is smaller than the area of the opening part 25 which the conductive contact 2 has. . Thereby, the process at the time of forming the fixing | fixed hole part 32 with respect to the conductive contact 2 can be made easy.

The rod-shaped member 4 has a high rigidity and little warpage even when a load is applied in consideration of supporting the conductive contacts 2 through the openings 25 of the plurality of conductive contacts 2. It is preferable to form by insulating materials, such as ceramics, whose sliding resistance with (2) is small. Thereby, the movement of the conductive contact 2 when the load is applied can be made smooth. Therefore, the space | interval of the rod-shaped member 4 and the opening part 25 can also be made small, and it becomes possible to ensure the support stability of the conductive contact 2 by the rod-shaped member 4.

In addition, the cross-sectional shape perpendicular | vertical to the longitudinal direction of the rod-shaped member 4 is not limited to what was mentioned above, For example, polygonal shape, square shape, etc. may be sufficient, and circular shape may be sufficient as it. It goes without saying that the shape of the fixing hole 32 varies depending on the cross-sectional shape of the rod-shaped member 4.

Above the conductive contact holder 3 having the above configuration, a circuit board 100 for establishing an electrical connection with a signal processing circuit for generating and outputting a test signal is provided. The circuit board 100 includes a plurality of wiring and connection electrodes made of nickel or the like formed on one surface of a sheet-like base material made of polyimide or the like. When the circuit board 100 is provided, the fixing member is made of the same material as the conductive contact holder 3 by positioning the electrode of the circuit board 100 so as to contact the first contact portion 21 of the conductive contact 2. The circuit board 100 is sandwiched and held by the 101 and the conductive contact holder 3 and fixed using fastening means (not shown) such as screws. As a result, a load (initial load) resulting from a force other than gravity acting on each conductive contact 2 is applied, and each elastic portion 23 contracts in the longitudinal direction.

Next, the contact form between the conductive contact unit 1 and the inspection object 200 will be described. In the inspection, the inspection object 200 such as a liquid crystal panel is brought into contact with the tip Q of the second contact portion 22 by a predetermined driving means (not shown), and raised until reaching a predetermined position. . Since the tip Q of the second contact portion 22 is offset from the tip P of the first contact portion 21 by Δ ₁ in the x-axis direction as described above, the conductivity in contact with the inspection object 200 is achieved. The moment is generated in the contact 2. That is, the conductive contact 2 rotates by a small angle clockwise in FIG. 5 after the elastic portion 23 contracts and the opening portion 25 is separated from the rod-shaped member 4.

By the above-described rotation, the tip Q of the second contact portion 22 moves while scratching the inspection object 200 while maintaining the contact state on the surface of the inspection object 200. In this way, the tip of the second contact portion 22 moves on the inspection object 200 to remove the oxide film formed on the surface of the inspection object 200 or the contamination attached to the surface thereof, so as to remove the contamination from the inspection object 200. It is possible to obtain stable electrical contact therebetween. At that time, if the moving speed (rising speed) of the inspection object 200 is properly controlled, the tip of the second contact portion 22 does not significantly damage the surface of the inspection object 200, and excessive load is applied to the conductive contact 2 as well. It is not necessary to add.

When the inspection object 200 is brought into contact with the second contact portion 22, the elastic portion 23 causes elastic deformation by shrinkage due to the load. In the present embodiment, the line diameter t _i of the straight portion 23a-i (i = 1, 2, ..., n) and the curved portion [23b-j (j = 1, 2, ..., n + 1)] By setting the outer diameter R _j as described above, the stress distribution in the elastic portion 23 when the test object 200 is brought into contact with the second contact portion 22 and a load is applied becomes uniform, thereby The concentration of stress can be alleviated. As a result, since the maximum stress value applied to the elastic part 23 is reduced, the durability of the conductive contact 2 with respect to stress can be improved repeatedly. In addition, since the deformation of the tip portion of the second contact portion 22 can be suppressed by reducing the load, the durability of the conductive contact 2 can be improved even in this sense.

In the above-described conductive contact unit 1, a part of the conductive contact unit 1 is inserted into the first guide groove 31a and the second guide groove 31b extending along the stretching direction of the elastic portion 23 of the conductive contact 2. Maintains the conductive contact 2. This prevents the occurrence of buckling and torsion during contraction of the elastic portion 23, which is a problem peculiar to the plate-shaped conductive contact 2, and does not cause deterioration of the spring characteristics of the elastic portion 23 due to them. . Therefore, even if a predetermined load or more is applied to the conductive contact 2 within a suitable range, a large stroke can be realized without causing buckling or twisting, thereby obtaining a desired contact state with the inspection target 200.

In the conductive contact unit 1, the conductive contact 2 is held by the first guide groove 31a and the second guide groove 31b. Therefore, the conductive contact 2 and the conductive contact holder 3 are provided. ), The sliding area can be reduced by reducing the contact area between them, and the stretching operation of the conductive contact 2 can be performed smoothly.

Further, the conductive contact unit 1 has a groove width w of the first guide groove 31a and the second guide groove 31b having a value equal to the thickness of the plate of the conductive contact 2, and adjacent to each other. The spacing between the first guide grooves 31a and the second guide grooves 31b may be any small value as long as it is a value that can sufficiently secure insulation between adjacent conductive contacts 2. Therefore, it is possible to narrow the arrangement interval of the plurality of conductive contacts 2, and to cope with the narrowing of the arrangement interval of the connecting electrodes and terminals of the circuit board 100 or the inspection object 200.

In addition, in the conductive contact unit 1, the rod-like member 4 penetrates the conductive contact 2, thereby giving initial bending to the conductive contact 2 and preventing it from falling out. As a result, the tip Q of the second contact portion 22, i.e., the lower end of the conductive contact 2 can reduce the amount of projection h that protrudes downward from the bottom 3d of the conductive contact holder 3 vertically. Can be. In other words, even if the second contact portion 22 is made small, it is possible to prevent the bend near the tip and to keep it stable, so that the conductive contact 2 is located near the lower end of the first guide groove 31a and / or Deviation from the second guide groove 31b can be suppressed. As a result, the positional accuracy of the conductive contact 2 becomes high, and the reliability and durability of the conductive contact unit 1 can be improved.

When assembling the conductive contact tablet unit 1, the step of accommodating the conductive contactor 2 in the holding unit 31 is to insert the first contacting unit 21 side into the holding unit 31 first, and then This is completed by inserting the edge end portion into the first guide groove 31a and the second guide groove 31b. Therefore, as compared with the conventional conductive contact unit, the assembly is easy and the effect of reducing the manufacturing cost can be obtained.

According to one embodiment of the present invention described above, the first contact portion in contact with the circuit structure for outputting the test signal, a plurality of straight portions extending in the direction parallel to the width direction and perpendicular to the longitudinal direction and adjacent An elastic portion that can be stretched in the longitudinal direction and a tip that is in contact with an object to be inspected has a plurality of curved portions that are curved in an arc shape by connecting the straight portions with each other, and a tip in contact with the inspection object is centered in the width direction of the elastic portion rather than an edge of the width direction of the elastic portion. And a second contact portion protruding in a direction away from the axis, wherein an outer diameter of the curved portion that is curved at the side from which the second contact portion protrudes from the plurality of curved portions is made smaller as the tip of the second contact portion becomes smaller, The outer diameter of the curved portion is bent from the side opposite to the side protruding the second contact portion of the curved portion of the By increasing the closer to the tip of the two contact portions, it is possible to provide a conductive contact and a conductive contact unit which can cope with narrowing of the arrangement interval, and are excellent in durability and can easily see the contact with the inspection object.

Moreover, according to this embodiment, the width | variety of the some linear part which comprises an elastic part, and the outer diameter of a curved part are set so that it may change in an inclined manner as mentioned above, and the elastic part at the time of contacting an electroconductive contact object to an inspection object and a load applied to it The stress distribution in E is uniform, the stress can be prevented from concentrating on a specific portion, and the maximum stress value applied to the elastic portion can be reduced. Therefore, the durability of the conductive contact with respect to cyclic stress can be improved. In addition, since the deformation of the tip portion of the second contact portion can be suppressed by reducing the load, the durability of the conductive contact can be improved even in this sense.

In addition, according to the present embodiment, since the contact portion (second contact portion) of the conductive contact with the inspection object is projected outward from the width direction than the conductive contact holder, the operator is obliquely above the conductive contact unit at the time of inspection. The inspection can be performed by visually or by a microscope to confirm the physical contact between the tip of the conductive contact and the test object, and to bend the posture and observe the contact between the conductive contact and the test object. Disappears. Therefore, the workability and reliability of the inspection can be further improved, and the burden on the operator can be reduced.

6 is a diagram illustrating a configuration of a conductive contact according to a modification of the present embodiment. The conductive contact 5 shown in FIG. 6 has a first contact portion 51, a second contact portion 52, a resilient portion 53, a first connecting portion 54, and a second opening 55. The connection part 56 is provided. The second contact portion 52 is in a direction farther from the central axis in the width direction of the elastic portion 53 than the edge end in the width direction of the second connecting portion 56 (and the edge end in the width direction of the elastic portion 53). It protrudes. Moreover, the edge part of the width direction of the elastic part 53 is a direction closer to the central axis of the width direction of the elastic part 53 than the edge end of the 1st connection part 54 or the edge end of the 2nd connection part 56. Are evading. Moreover, the elastic part 53 is similar to the elastic part 23 of the conductive contact 2, and the linear part 53a-i (i = 1, 2, ..., n) and the curved part 53b-j (J = 1 , 2,..., N + 1)] and meandering in an S shape, and the line diameter t _i and the curved portion of the straight portion 53a-i (1 = 1, 2, ..., n)] The outer diameter R _j and the line diameter T _{j of} [53b-j (j = 1, 2, ..., n + 1)] are set in the same manner as in the above-described embodiment.

In the case shown in FIG. 6, the evacuation amount from the edge end in the width direction of the first connecting portion 54 on the side where the second contact portion 52 protrudes is r ₁ , while the second contact portion 52 protrudes. The evacuation amount from the edge end in the width direction of the first connecting portion 54 on the opposite side is r ₂ . In other words, the width (length in the width direction) of the elastic portion 53 is smaller by r ₁ + r ₂ than the width of the first connecting portion 54 or the width of the second connecting portion 56. The amount of retractions r ₁ and r ₂ need to be smaller than the value d of the groove depth of the conductive contact holder 3. By using the conductive contact 5 having such a configuration, the conductive contact 5 can be reliably held without deviating from the first guide groove 31a or the second guide groove 31b. In addition, the retraction amounts r ₁ and r ₂ may be the same or different. Moreover, the evacuation amount of one of these may be zero.

In this way, by retracting at least a portion of the elastic portion 53 in the direction of the center of the conductive contact 5 main body, when the conductive contact 5 is received by the conductive contact holder 3 for inspection, the elastic portion 53 ), The edge end portion of the c) is less likely to contact the bottom of the first guide groove 31a or the second guide groove 31b, so that the friction between the elastic portion 53 and the bottom of each guide groove can be reduced. . As a result, the latching of the elastic portion 53 when the load is applied can be suppressed, and more reliable home return capability can be provided. Moreover, since the sliding resistance with the conductive contact holder 3 becomes small, it becomes possible to reduce the nonuniformity of the test load value of the conductive contact 5 and to stabilize it.

The best mode for carrying out the present invention has been described in detail so far, but the present invention should not be limited only by the above embodiment. For example, the conductive contact unit according to the present invention can be applied not only to inspecting the liquid crystal panel but also to a high-density conductive contact unit to be used for inspection of package substrates and wafer-levels on which semiconductor chips are mounted.

As described above, the present invention may include various embodiments not described herein, and various design changes and the like may be made without departing from the technical idea specified by the claims. .

As described above, the conductive contact and the conductive contact unit according to the present invention are useful for conducting conduction state inspection and operation characteristic inspection in electronic components such as liquid crystal panels and semiconductor integrated circuits.

Claims (10)

In the conductive contact which forms a plate shape and electrically connects the circuit structure which outputs an inspection signal, and an inspection object, A first contact portion located at an end portion in the longitudinal direction of the conductive contact, and in contact with the circuit structure; And a plurality of straight portions extending in a direction parallel to the longitudinal direction and parallel to the width direction of the conductive contact, and a plurality of curved portions connected to the adjacent straight portions, and curved in an arc shape. Located in the middle portion in the longitudinal direction, the elastic portion that is stretchable in the longitudinal direction, A second contact portion which is positioned at a different end from the first contact portion in the longitudinal direction and protrudes away from the central axis in the width direction of the elastic portion than the edge portion in the width direction of the elastic portion is in contact with the inspection object. Equipped, The outer diameter of the curved portion that is curved on the side from which the second contact portion protrudes among the plurality of curved portions is smaller as the closer to the tip of the second contact portion, The outer diameter of the said curved part curved in the opposite side to the side from which the said 2nd contact part protrudes among the said curved parts is so large that it is closer to the front-end | tip of the said 2nd contact part, The conductive contact characterized by the above-mentioned. The method of claim 1, The outer diameter of the curved portion that is curved on the side from which the second contact portion protrudes among the plurality of curved portions is a straight line connecting the ends of the first and second contact portions as a reference straight line, and the angle is determined using the reference straight line. The outer diameter of the curved portion that is linearly changed according to the first reference amount determined with respect to the curved portion, and that is curved on the side opposite to the side from which the second contact portion protrudes from the plurality of curved portions, is used for each curved portion using the reference straight line. A conductive contact, characterized in that it changes linearly in accordance with a determined second reference amount. The method of claim 1, The line diameter of the said linear part is so large that it is farther from the front-end | tip of the said 1st contact part, The conductive contact characterized by the above-mentioned. The method of claim 3, wherein The wire diameter of the straight portion varies linearly with the distance from the distal end of the first contact portion or the distal end of the second contact portion to the center of the straight portion. 5. The method according to any one of claims 1 to 4, A first connecting portion connecting the first contact portion and the elastic portion, And a second connecting portion which connects the elastic portion and the second contact portion and has an opening penetrating in the plate thickness direction of the conductive contact, The said 1st connection part, the said 2nd connection part, and the said length of the said width direction which the said elastic part respectively have are the same, The electrically conductive contact characterized by the above-mentioned. 5. The method according to any one of claims 1 to 4, A first connecting portion connecting the first contact portion and the elastic portion, And a second connecting portion which connects the elastic portion and the second contact portion and has an opening penetrating in the plate thickness direction of the conductive contact, The edge end on the opposite side to the side from which the second contact portion protrudes as the edge end in the width direction of the elastic portion is the opposite side to the side from which the second contact portion protrudes as the edge end in the width direction of the first and second connecting portions. A conductive contact, characterized in that the retracted in the direction closer to the central axis of the width direction of the elastic portion than the edge end of the. The method of claim 6, An edge end of the side in which the second contact portion protrudes as an edge end in the width direction of the elastic portion, and an edge end of the side in which the second contact portion protrudes as an edge end in the width direction of the first and second connecting portions. A conductive contact, characterized in that it is retracted in a direction approaching a central axis in the width direction of the elastic portion. A first contact portion located at an end portion in the longitudinal direction and in contact with a circuit structure for outputting an inspection signal, and a plurality of straight portions and adjacent portions extending perpendicular to the longitudinal direction and parallel to the width direction of the conductive contact; A plurality of curved portions connected to the straight portions to be curved in an arc shape, positioned at an intermediate portion in the longitudinal direction, stretchable in the longitudinal direction, and end portions different from the first contact portions in the longitudinal direction. A first contact portion which is positioned at and protrudes away from a central axis in the width direction of the elastic portion than an edge end in the width direction of the elastic portion, and a first contact portion connecting the first contact portion and the elastic portion. A second portion in which a connecting portion, the elastic portion, and the second contact portion are connected, and an opening penetrating in the thickness direction is formed. Have in part, and a plurality of conductive contact constituting the plate-like, A plurality of first guide grooves for holding and holding the edge ends of the side where the second contact portion protrudes as one edge end in the longitudinal direction of the conductive contact, and are respectively opposed to the plurality of first guide grooves, A conductive contact holder having a plurality of second guide grooves to hold and hold the other edge end of the conductive contact inserted into the first guide groove; A rod-shaped member fixed to the conductive contact holder through the opening formed in the second connecting portion each of the plurality of conductive contacts; The conductive contact, The outer diameter of the curved portion that is curved on the side from which the second contact portion protrudes among the plurality of curved portions is smaller as the closer to the tip of the second contact portion, An outer diameter of the curved portion that is curved on the side opposite to the side from which the second contact portion protrudes among the plurality of curved portions is larger as the closer to the tip of the second contact portion. The method of claim 8, The cross-sectional area perpendicular to the longitudinal direction of the rod-shaped member is smaller than the area of the opening formed in the conductive contact. The method according to claim 8 or 9, And a tip of the second contact portion protrudes in the normal direction of the outer surface than the outer surface of the portion where the first guide groove is formed as an outer surface of the conductive contact holder.

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