TW202415956A - Check socket and check device - Google Patents

Abstract

The present invention provides an inspection socket and an inspection device with high contact reliability. The inspection socket includes at least one plate-shaped probe, a shell and a conductive component. The probe has a first end portion arranged at one end of a first direction and a second end portion arranged at the other end of the first direction. The shell accommodates the probe inside with the first end portion exposed to the outside. The conductive component is arranged at a portion of the shell that is closer to the second end portion than the first end portion in the first direction, and is electrically connected to the second end portion. The shell extends along a second direction intersecting the first direction, and the probe is accommodated inside the shell in a manner that the second direction becomes a thickness direction.

Description

Check socket and check device

The present disclosure relates to an inspection socket and an inspection device.

Patent document 1 describes a solar cell electrode inspection device. [Prior art document] [Patent document]

Patent document 1: Japanese Patent Publication No. 2008-071989

[The problem that the invention wants to solve]

Generally speaking, in inspection devices including the inspection device of Patent Document 1, a cylindrical spring probe (so-called pogo pin) is used. However, the spring probe generally does not have a tip that is suitable for the narrow electrode of a solar cell, which may cause poor contact during inspection.

The purpose of this disclosure is to provide a testing socket and testing device with high contact reliability. [Means for solving the problem]

The inspection socket of one form disclosed in the present invention comprises: At least one plate-shaped probe having a first end portion provided at one end of a first direction and a second end portion provided at the other end of the first direction; A housing that accommodates the probe in a state where the first end portion is exposed to the outside; and A conductive member provided at a portion of the housing that is closer to the second end portion than the first end portion in the first direction and electrically connected to the second end portion, The housing extends along a second direction intersecting the first direction, The probe is accommodated in the housing in a manner that the second direction becomes a thickness direction, The first end portion of the probe is configured to face the electrode of the inspection object including the elongated electrode extending along the second direction in the first direction, and can contact the electrode in a crossed state.

The inspection device of one form disclosed herein includes at least one inspection socket of the said form. [Effect of the invention]

According to the present disclosure, a testing socket and a testing device with high contact reliability can be provided.

An example of the present disclosure is described below with reference to the attached drawings. The following description is merely an example in nature and is not intended to limit the present disclosure, the objects to which the present disclosure applies, or the uses of the present disclosure. The attached drawings are schematic, and the ratios of the dimensions may not necessarily be consistent with the actual ones.

As shown in FIG1 , an inspection device 1 of an embodiment of the present disclosure includes at least one inspection socket 10. In the inspection device 1, as shown in FIG2 and FIG3 , a first end 21 of a probe 20 of the inspection socket 10 described later is configured to face a thin and long electrode 110 of an inspection object (e.g., a solar cell panel) 100 in a first direction (e.g., Z direction) and to be able to contact the electrode 110 in a crossed (e.g., orthogonal) state. The electrode 110 extends, for example, along a second direction (e.g., X direction) that intersects the first direction Z.

In this embodiment, the inspection object 100 has a plurality of electrodes 110 arranged at intervals, for example, at equal intervals, in a third direction (for example, the Y direction) intersecting the first direction Z and the second direction X, and the inspection device 1 includes a plurality of inspection sockets 10, the same number of which is the plurality of electrodes 110. The plurality of inspection sockets 10 are arranged at intervals, for example, at equal intervals, in the third direction Y in such a manner that the first end 21 of the probe 20 of each inspection socket 10 can contact each electrode 110. The inspection device 1 is configured so that all the inspection sockets 10 can move simultaneously along the Z direction toward the inspection object 100.

The inspection device 1 may also be configured as follows. ・The dimension W1 of the probe 20 in the third direction Y is larger than the dimension W2 of the electrode 110 in the third direction Y. ・The dimension W3 of the inspection socket 10 in the third direction Y is smaller than the linear distance W4 between adjacent electrodes 110.

As shown in FIG. 4 and FIG. 5 , the inspection socket 10 includes at least one plate-shaped probe 20, a housing 30 for accommodating the probe 20, and a conductive member 40. In the present embodiment, the inspection socket 10 includes a plurality of probes 20 arranged at intervals in the second direction X. The plurality of probes 20 include a first probe 120 and a second probe 220. The first probe 120 is, for example, a force pin, and the second probe 220 is, for example, a sense pin. Each probe 20 is formed by a single part.

As shown in FIG6 , the probe 20 has a first end 21 disposed at one end of the first direction Z and a second end 22 disposed at the other end of the first direction Z. In the present embodiment, the probe 20 includes a first contact portion 201 having the first end 21, a second contact portion 202 having the second end 22, and an elastic portion 203 located between the first contact portion 201 and the second contact portion 202. The first contact portion 201 and the second contact portion 202 are located on an imaginary straight line L1 extending along the first direction Z and are connected by the elastic portion 203.

The first contact portion 201 has a substantially rectangular plate shape extending along the first direction Z. The end of the first contact portion 201 farther from the second contact portion 202 in the first direction Z constitutes the first end portion 21. As an example, the surface of the first end portion 21 that can contact the electrode 110 is curved. The elastic portion 203 is connected to the end of the first contact portion 201 in the first direction Z that is close to the second contact portion 202 from the third direction Y.

The second contact portion 202 has a substantially rectangular plate shape extending along the first direction Z. The length of the second contact portion 202 in the first direction Z is smaller than that of the first contact portion 201. The end of the second contact portion 202 farther from the first contact portion 201 in the first direction Z constitutes the second end portion 22. The elastic portion 203 is connected to the end of the second contact portion 202 closer to the first contact portion 201 in the first direction Z from the third direction Y.

The elastic portion 203 includes a plurality of components 204 arranged with gaps 205 between them. Each component 204 has a plurality of first portions 206 and a plurality of second portions 207. Each first portion 206 is arranged at intervals along the first direction Z and extends linearly along the third direction Y. Each second portion 207 has a substantially semicircular arc shape extending along the first direction Z, and both ends are connected to the ends of the adjacent first portion 206. The first portions 206 located at both ends of each component 204 in the first direction Z are connected to the first contact portion 201 and the second contact portion 202 from the same side of the third direction Y. All the first portions 206 and the second portions 207 are located on the same side relative to the side surface 208 of the first contact portion 201. The side surface 208 is a side surface that is opposite to the side surface to which the first portion 206 of each component 204 is connected, among a pair of side surfaces of the first contact portion 201 that intersect the third direction Y.

As shown in FIG4 , the housing 30 extends along the second direction X, and as shown in FIG5 , is configured to accommodate the probe 20 inside with the first end 21 exposed to the outside. In this embodiment, the housing 30 includes a first housing 31 accommodating the probe 20 and a second housing 32 that can accommodate and hold the first housing 31 .

As shown in FIG5 , the first housing 31 has a substantially T-shaped cross section. The first housing 31 has a plurality of slit-shaped first receiving portions 33 capable of receiving one probe 20 with the first end portion 21 exposed to the outside. The first housing 31 is provided with first receiving portions 33 equal to or greater than the number of the probes 20. The probes 20 are received in the first receiving portions 33 in such a manner that the second direction X becomes the thickness direction thereof. The plurality of first receiving portions 33 are arranged along the second direction X in such a manner that the first ends 21 of the received probes 20 are arranged in a row along the second direction X (see FIG3 ).

As shown in FIG. 4 , the second housing 32 has a substantially rectangular parallelepiped shape. As shown in FIG. 5 , the second housing 32 has: a second housing portion 34 that can house and hold the first housing 31; and a plurality of holes 35 that can house a fastening member 60 for fixing a pressing member 50 described later to the housing 30. The second housing portion 34 penetrates the second housing 32 along the first direction Z, and the opening portion 341 that opens on the bottom surface 321 near the first end 21 of the probe 20 in the first direction Z is larger than the opening portion 342 that opens on the upper surface 322 near the second end 22. As an example, one end 311 of the first housing 31 housed in the second housing portion 34 in the first direction Z slightly protrudes from the opening portion 341 to the outside of the second housing 32. A plurality of holes 35 are provided on the upper surface 322 of the second housing 32. The first housing 31 accommodated in the second accommodation portion 34 is positioned relative to the second housing 32 by, for example, positioning pins 61 (see FIG. 7 ).

As shown in FIG. 4 , base members 36 are installed at two ends of the housing 30 in the second direction X. Each base member 36 extends along the first direction Z from the upper surface 322 of the second housing 32 .

As shown in FIG5 , the conductive member 40 is disposed at a portion of the housing 30 closer to the second end 22 than the first end 21 of the probe 20 in the first direction Z, and is electrically connected to the second end 22. In the present embodiment, the conductive member 40 includes two electrically independent conductive sheets (hereinafter referred to as the first member 41 and the second member 42). The first member 41 is in electrical contact with the first probe 120, and the second member 42 is in electrical contact with the second probe 220. The first member 41 and the second member 42 include copper, for example.

As shown in FIG7 , the first member 41 has a first body portion 43 extending along the second direction X, and a first protrusion 44. The first protrusion 44 extends from the first body portion 43 toward the third direction Y and toward the second member 42, and as shown in FIG5 , contacts the second end portion 22 of the first probe 120. The pressing member 50 is omitted in FIG7 .

As shown in FIG. 7 , the second component 42 is spaced apart from the first component 41 in the third direction Y. The second component 42 has a second body portion 45 extending along the second direction Z, and a second protrusion 46. The second protrusion 46 extends from the second body portion 45 toward the third direction Y and close to the first component 41, and as shown in FIG. 5 , electrically contacts the second end portion 22 of the second probe 220.

As shown in FIG5 , the conducting member 40 is located between the housing 30 and the pressing member 50, and is fixed to the housing 30 by the pressing member 50. As shown in FIG4 , at both ends of the conducting member 40 in the second direction X, connecting portions 47 for connecting terminals 70 are provided. One of the connecting portions 47 is electrically connected to the first member 41, and the other of the connecting portions 47 is electrically connected to the second member 42.

The inspection socket 10 can exert the effects as described below.

The inspection socket 10 includes at least one plate-shaped probe 20, a housing 30, and a conductive member 40. The probe 20 has a first end 21 disposed at one end in a first direction and a second end 22 disposed at the other end in the first direction. The housing 30 accommodates the probe 20 inside with the first end 21 exposed to the outside. The conductive member 40 is disposed at a portion of the housing 30 closer to the second end 22 than the first end 21 in the first direction, and is electrically connected to the second end 22. The housing 30 extends along a second direction intersecting the first direction, and the probe 20 is accommodated inside the housing 30 in such a manner that the second direction becomes a thickness direction. The first end 21 of the probe 20 is configured to face the electrode 110 of the inspection object 100 including the elongated electrode 110 extending along the second direction in the first direction, and can contact the electrode 110 in a crossed state. With this structure, the probe 20 can more reliably contact the narrow electrode 110, thereby reducing the occurrence of poor contact. As a result, the inspection socket 10 with high contact reliability can be realized.

A spring probe generally includes a plurality of parts, and therefore, the current characteristics are unstable in an inspection socket using the spring probe. Furthermore, for example, when inspecting the function of a solar panel, the entire surface of the solar panel to be inspected must be irradiated with light. Therefore, in order to set the size so as not to block the light irradiated to the solar panel as much as possible, there is a desire to miniaturize or thin the inspection socket used for inspecting solar panels. In order to meet this expectation, the probe housed in the inspection socket must also be miniaturized, but if the probe is miniaturized, the conduction path diameter through which the high current flows becomes smaller, and the probe generates heat when it is turned on, so there is a desire to improve the heat dissipation of the inspection socket. In the test socket 10, the plate-shaped probe 20 is used as a single component, so the current characteristics can be stabilized, thereby stabilizing the measured value during the test. In addition, the plate-shaped probe 20 can increase the area in contact with the air compared to the spring probe, so the heat dissipation of the test socket 10 can be improved, and the increase in the resistance value of the probe 20 can be suppressed.

The inspection socket 10 can arbitrarily adopt any one or more of the multiple structures shown below. That is, any one or more of the multiple structures shown below can be arbitrarily deleted if they are already included in the aforementioned embodiment, and can be arbitrarily added if they are not included in the aforementioned embodiment. By adopting such a structure, an inspection socket 10 with high contact reliability can be more reliably realized.

The inspection socket 10 includes a plurality of probes 20 disposed at intervals along the second direction.

The plurality of probes 20 include a first probe 120 and a second probe 220. The conductive member 40 includes: a first member 41, which is in electrical contact with the first probe 120; and a second member 42, which is arranged at a distance in the third direction relative to the first member 41, is electrically independent from the first member 41, and is in electrical contact with the second probe 220. The first member 41 includes: a first body portion 43, which extends along the second direction; and a first protrusion 44, which extends from the first body portion 43 toward the third direction and close to the second member 42, and is in electrical contact with the second end 22 of the first probe 120. The second member 42 includes: a second body portion 45, which extends along the second direction; and a second protrusion 46, which extends from the second body portion 45 toward the third direction and close to the first member 41, and is in electrical contact with the second end 22 of the second probe 220.

The inspection device 1 can exert the effects described below.

The inspection device 1 includes an inspection socket 10. By using the inspection socket 10, the inspection device 1 with high contact reliability can be realized.

The inspection device 1 can arbitrarily adopt any one or more of the multiple structures shown below. That is, any one or more of the multiple structures shown below can be arbitrarily deleted if they are already included in the aforementioned embodiment, and can be arbitrarily added if they are not included in the aforementioned embodiment. By adopting such a structure, an inspection device 1 with high contact reliability can be more reliably realized.

A dimension W1 of the probe 20 in the third direction is greater than a dimension W2 of the electrode 110 in the third direction.

Check that the dimension W3 of the socket 10 in the third direction is smaller than the distance W4 between adjacent electrodes 110 .

The inspection device 1 and the inspection socket 10 may also be configured as follows.

The test socket 10 may have one probe 20 or three or more. The test socket 10 in which the housing 30 includes a plurality of first housings 31 and a plurality of probes 20 are accommodated in each first housing 31 is shown in Fig. 8 and Fig. 9. The pressing member 50 is omitted in Fig. 9.

In the inspection socket 10 of FIGS. 8 and 9 , the plurality of probes 20 include four first probes 120 and two second probes 220, and are arranged in the order of two first probes 120, two second probes 220, and two first probes 120 along the second direction X. As shown in FIG. 9 , the conductive member 40 has two first protrusions 44 and one second protrusion 46. The first protrusion 44 and the second protrusion 46 are arranged at intervals along the second direction X, and the second protrusion 46 is located between the two first protrusions 44. As shown in FIG. 8 , the two first probes 120 contact each of the first protrusions 44, and the two second probes 220 contact the second protrusion 46. That is, the inspection socket 10 may be configured such that the number of the first probes 120 is greater than the number of the second probes 220, and the number of the first protrusions 44 is greater than the number of the second protrusions 46.

The first probe 120 and the second probe 220 may have the same structure or different structures. For example, the probe 20 shown in FIG. 10 may be used as the first probe 120, and the probe 20 in FIG. 6 may be used as the second probe 220. In the probe 20 in FIG. 10 , the second contact portion 202 is not located on the imaginary straight line L1, but is located on the imaginary straight line L2 that is spaced apart from the imaginary straight line L1 in the third direction Y and is parallel to the imaginary straight line L1. The probe 20 in FIG. 10 has fewer first portions 206 and second portions 207 in each component 204 of the elastic portion 203 than the probe 20 in FIG. 6 .

Assume that the probe 20 shown in FIG. 10 is used as the first probe 120, and the probe 20 in FIG. 6 is used as the second probe 220. In this case, for example, as shown in FIG. 11, the shape of the second protrusion 46 may be changed in accordance with the position of the second end 22 of the second probe 220. Conversely, when the probe 20 in FIG. 6 is used as the first probe 120, and the probe 20 in FIG. 10 is used as the second probe 220, for example, the shape of the first protrusion 44 may be changed in accordance with the position of the first probe 120. That is, the number and shape of the first protrusion 44 and the second protrusion 46 may be changed according to the design of the inspection socket 10, etc. In the inspection socket 10 of Figure 11, the second ends 22 of the four first probes 120 are located on an imaginary straight line L3 extending along the second direction X, and the second ends 22 of the two second probes 220 are located on an imaginary straight line L4 that is spaced apart from the imaginary straight line L3 in the third direction Y and parallel to the imaginary straight line L3.

The probe 20 only needs to be plate-shaped and have a first end 21 and a second end 22. For example, as shown in FIG12 , the first end 21 of the probe 20 may also have a flat surface 211 that can contact the electrode 110. As shown in FIG13 , the second end 22 of the probe 20 may also have two protrusions 221. The probe 20 of FIG13 includes two second contact portions 202 located at both ends of the third direction Y, and each second contact portion 202 is provided with a protrusion 221.

As shown in Fig. 14, the housing 30 may also have a window 301 through which the probe 20 accommodated therein can be visually observed from the outside of the housing 10. By providing the window 301, the state of the accommodated probe 20 can be confirmed even without removing the first housing 31 from the second housing 32, and the heat dissipation of the inspection socket 10 can be improved.

The conductive member 40 is not limited to a sheet material, and may be, for example, a substrate (hereinafter referred to as the third member 48). For example, as shown in FIG. 15 and FIG. 16 , the third member 48 has a pair of surfaces 481 and 482 formed with electrode patterns and intersecting the first direction Z. The surface 481 of the third member 48 is a surface facing the housing 30, and the surface 482 of the third member 48 is a surface facing the pressing member 50. The electrode pattern includes a first electrode pattern 483 electrically connected to the first probe 120, and a second electrode pattern 484 electrically connected to the second probe 220.

In the above, various embodiments of the present disclosure are described in detail with reference to the accompanying drawings, but finally, various forms of the present disclosure are described. In addition, in the following description, reference symbols are also added as an example.

The first form of the inspection socket 10 disclosed herein includes: At least one plate-shaped probe 20, having a first end 21 disposed at one end of a first direction and a second end 22 disposed at the other end of the first direction; A housing 30, housing the probe 20 inside with the first end 21 exposed to the outside; and A conductive member 40, disposed at a portion of the housing 30 closer to the second end 22 than the first end 21 in the first direction, and electrically connected to the second end 22, The housing 30 extends along the second direction, The probe 20 is housed inside the housing 30 in such a manner that the second direction intersecting the first direction becomes the thickness direction, The first end 21 of the probe 20 is configured to face the electrode of the inspection object including the elongated electrode extending along the second direction in the first direction, and can contact the electrode in a crossed state.

The second form of the inspection socket 10 disclosed herein includes in the first form of the inspection socket 10: A plurality of the probes 20 are arranged at intervals along the second direction.

The third form of the inspection socket 10 disclosed herein is in the second form of the inspection socket 10, The plurality of probes 20 include a first probe 120 and a second probe 220 different from the first probe 120.

The fourth form of the inspection socket 10 disclosed in the present invention is in the second form of the inspection socket 10, The plurality of probes 20 include a first probe 120 and a second probe 220, The conductive component 40 includes: A first component 41, electrically in contact with the first probe 120; and A second component 42, which is spaced apart from the first component 41 in a third direction intersecting the first direction and the second direction, is electrically independent of the first component 41, and is electrically in contact with the second probe 220, The first component 41 has: A first body portion 43, extending along the second direction; and A first protrusion 44, extending from the first body portion 43 toward the third direction and close to the second component 42, electrically in contact with the second end portion 22 of the first probe 120, The second component 42 has: A second body portion 45, extending along the second direction; and The second protrusion 46 extends from the second body portion 45 toward the third direction and close to the first component 41, and electrically contacts the second end portion 22 of the second probe 220.

The fifth form of the inspection socket 10 disclosed herein is a third form or a fourth form of the inspection socket 10, wherein the number of the first probes 120 is greater than the number of the second probes 220, and the number of the first protrusions 44 is greater than the number of the second protrusions 46.

The sixth form of the inspection socket 10 disclosed herein is a form of the inspection socket 10 in any form from the first form to the fifth form, wherein the housing 30 has a window 301 that enables visual observation of the probe 20 housed therein from the outside.

The seventh form of the inspection device 1 of the present disclosure includes at least one inspection socket 10 of any form from the first form to the sixth form.

The eighth form of the inspection device 1 disclosed herein is the inspection device 1 of the seventh form, wherein the dimension of the probe 20 in the third direction intersecting the first direction and the second direction is greater than the dimension of the electrode in the third direction.

The ninth form of the inspection device 1 disclosed herein is in the seventh form or the eighth form of the inspection device 1, The first end 21 of the probe 20 has a plane 211 capable of contacting the electrode.

The inspection device 1 of the tenth form disclosed herein is an inspection device 1 of any form from the seventh form to the ninth form, the inspection object includes a plurality of electrodes arranged at intervals in a third direction intersecting the first direction and the second direction, the dimension of the inspection socket 10 in the third direction is smaller than the distance between adjacent electrodes.

By appropriately combining any of the above-mentioned various embodiments or variations, the effects of each embodiment can be achieved. Moreover, embodiments can be combined with each other, embodiments can be combined with each other, or embodiments can be combined with embodiments, and different embodiments or features in embodiments can also be combined with each other.

This disclosure is fully described in relation to the preferred embodiment with reference to the accompanying drawings, but various modifications or alterations are obvious to those familiar with the present technology. It should be understood that such modifications or alterations are included in the scope of this disclosure as long as they do not deviate from the scope of the attached patent application. [Industrial Applicability]

The inspection socket disclosed herein can be applied to an inspection device used in the inspection of solar panels, for example.

The inspection device disclosed herein can be used, for example, as an inspection device for solar panels.

1: Inspection device 10: Inspection socket 20: Probe 21: First end 22: Second end 30: Housing 31: First housing 32: Second housing 33: First receiving portion 34: Second receiving portion 35: Hole 36: Base member 40: Conductive member 41: First member 42: Second member 43: First body 44: First protrusion 45: Second body 46: Second protrusion 47: Connecting portion 48: Third member 50: Pressing member 60: Fastening member 61: Positioning pin 70: Terminal 100: Inspection object 110: Electrode 120: First probe 201: First contact portion 202: Second contact part 203: Elastic part 204: Component 205: Gap 206: First part 207: Second part 208: Side surface 211: Plane 220: Second probe 221: Protrusion 301: Window 311: One end 321: Bottom surface 322: Upper surface 341, 342: Opening part 481, 482: Surface 483: First electrode pattern 484: Second electrode pattern L1, L2, L3, L4: Imaginary straight line V-V: Section line W1, W2, W3: Dimensions W4: Straight line distance X: Second direction Y: Third direction Z: First direction

FIG. 1 is a perspective view of an inspection device according to an embodiment of the present disclosure. FIG. 2 is an enlarged front view of the inspection device of FIG. 1. FIG. 3 is a cross-sectional view along line III-III of FIG. 2. FIG. 4 is a perspective view of an inspection socket according to an embodiment of the present disclosure. FIG. 5 is a cross-sectional view along line V-V of FIG. 4. FIG. 6 is a perspective view of a probe of the inspection socket of FIG. 4. FIG. 7 is an enlarged perspective view of the inspection socket of FIG. 4 with a pressing member removed. FIG. 8 is a cross-sectional view of a first variant of the inspection socket of FIG. 4. FIG. 9 is an enlarged perspective view of the inspection socket of FIG. 8 with a pressing member removed. FIG. 10 is a perspective view of a probe of a second variant of the inspection socket of FIG. 4. FIG. 11 is an enlarged top view of the second variant of the inspection socket of FIG. 4. FIG. 12 is an enlarged plan view of a probe of a third variant of the inspection socket of FIG. 4 . FIG. 13 is an enlarged plan view of a probe of a fourth variant of the inspection socket of FIG. 4 . FIG. 14 is an enlarged front view of a fifth variant of the inspection socket of FIG. 4 . FIG. 15 is a bottom view of a conductive member of a sixth variant of the inspection socket of FIG. 4 . FIG. 16 is a top view of a conductive member of a sixth variant of the inspection socket of FIG. 4 .

10: Check the socket

30: Shell

36: Base components

40: Conductive components

47:Connection part

50: Press components

60: Fastening components

70: Terminal

V-V: section line

X: Second direction

Y: Third direction

Z: First direction

Claims (10)

A test socket comprises: At least one plate-shaped probe having a first end portion provided at one end of a first direction and a second end portion provided at the other end of the first direction; A housing that accommodates the probe in a state where the first end portion is exposed to the outside; and A conductive member provided at a portion of the housing that is closer to the second end portion than the first end portion in the first direction and electrically connected to the second end portion, The housing extends along a second direction intersecting the first direction, The probe is accommodated in the housing in a manner that the second direction becomes a thickness direction, The first end portion of the probe is configured to face the electrode of the test object including the elongated electrode extending along the second direction in the first direction, and can contact the electrode in a crossed state. The inspection socket as described in claim 1 comprises: A plurality of the probes are arranged at intervals along the second direction. An inspection socket as described in claim 2, wherein the plurality of probes include a first probe and a second probe different from the first probe. The inspection socket as described in claim 2, wherein the plurality of probes include a first probe and a second probe, the conductive member includes: a first member electrically contacting the first probe; and a second member, which is spaced apart from the first member in a third direction intersecting the first direction and the second direction, is electrically independent of the first member, and is electrically contacting the second probe, the first member having: a first body extending along the second direction; and a first protrusion extending from the first body toward the third direction and close to the second member, electrically contacting the second end of the first probe, the second member having: a second body extending along the second direction; and a second protrusion extending from the second body toward the third direction and close to the first member, electrically contacting the second end of the second probe. An inspection socket as described in claim 3 or claim 4, wherein the number of the first probes is greater than the number of the second probes, and the number of the first protrusions is greater than the number of the second protrusions. An inspection socket as described in any one of claim 1 to claim 4, wherein the housing has a window portion that enables visual observation of the probe housed inside from the outside. An inspection device comprises at least one inspection socket as described in any one of claim 1 to claim 4. An inspection device as described in claim 7, wherein the dimension of the probe in a third direction intersecting the first direction and the second direction is greater than the dimension of the electrode in the third direction. An inspection device as described in claim 7, wherein the first end of the probe has a flat surface capable of contacting the electrode. The inspection device as described in claim 7, wherein the inspection object includes a plurality of electrodes arranged at intervals in a third direction intersecting the first direction and the second direction, and the dimension of the inspection socket in the third direction is smaller than the distance between adjacent electrodes.

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