200813442 .九、發明說明： 9 【發明所屬之技術領域】 〃本發明係關於-種於進行液晶面板及半導體積體電路 等之電子零件的導通狀態檢查及動作特性檢查時，接觸於 該電子零件的電極或端子以進行電氣訊號的傳送接收之導 電性接觸件單元。 【先前技術】 以往，關於半導體積體電路等之檢查對象的電氣特性 檢查之技術領域中，為人所知者有關於具備下列功能之導 電性接觸件單元之技術，亦即具有：對應於半導體積體電 路的連接用電極而配設複數個導電性接觸件，並將導電性 接觸件物理性接觸於連接用電極，藉此確保電性導通之功 能。該導電性接觸件單元係具備：複數個導電性接觸件； 及用以保持複數個導電性接觸件之導電性接觸件保持具。 於如此的導電性接觸件單元中，提案有為了隨著作為檢查 _對象之半導體積體電路等的精細化傾向而能夠對應於連接 用電極的排列間隔之窄化的各種技術。 例如於下列專利文獻1中，係揭示有一種關於具備接 觸於檢查對象之接觸部及彈壓於該接觸部之彈性部，且呈 板狀之導電性接觸件之技術。於此習知技術中，係於板厚 方向以狹窄的間隔排列·複數個導電性接觸件而配置，藉此 可對應於檢查對象之連接用電極的排列間隔之窄化。 專利文獻1:日本特開2001-343397號公報 ,【發明内容】 319525 5 200813442 (發明所欲解決之課題） - 然而’於以前述導電性接觸件重複進行檢查時，每個 導電性接觸件的荷重特性可能產生變動。因此，不僅無法 實施穩定的檢查，並可能因情況的不同導致導電性接觸件 的損壞，而有耐久性上的問題。 本發明係鑑於前述問題而研創者，其目的在於提供一 種耐久性佳之導電性接觸件單元。 (用以解決課題之手段） 馨為了解決前述課題並達成目#，本發明的一態樣為一 種V電性接觸件單元，係在輸出檢查用訊號之電路構造與 心查對象之間進行訊號之傳送接收的導電性接觸件單元， 其特徵為具備：複數個導電性接觸件，係由呈板狀之導電 性材料所形成’且具有：第i接觸部，係與輸出檢查用訊 f之電路構造接觸；彈性部，係可朝長度方向伸縮之彈性 部，第2接觸部，係與檢查對象接觸，且其與檢查對象接 籲觸之前端比前述彈性部之寬度方向之端緣部更朝遠離前述 彈性部之寬度方向的中心軸的方向突出；第1連接部，係 連接前述彈性部與前述第1接觸部；及第2連接部，係連 接前述彈性部與前述第2接觸部，且設有貫穿於板厚方向 f將與前述長度方向平行之邊作為長邊的長方形狀之開口 邻丄導電性接觸件保持具，具有：複數個第1導引溝，係 將别述導電性接觸件之長度方向之端緣部中之前述第2接 觸邛大出側的一端緣部予以嵌合保持；及複數個第2導引 溝，係分別與前述複數個第i導引溝相對向配置，且將被 319525 6 200813442 ^入於相對向之前述第丨導引溝之前述導電性接觸件之另 -端緣部予以嵌合保持；以及棒狀構件，係固定在前述 電性接觸件㈣具，且貫通分別設置在前述複數個導電性 接觸件的前述開口部；並且前述棒狀構件之與長度方向垂 直之剖面係形成為，藉由從一長方形切除包含有位於下方 之短邊之至少—部分之區域所得的形狀，其中前述長方形 係將具有與前述開口部之短邊長度大致相等且比該開口部 之系丑邊長度更短之長度的2邊、亦即與前述開口部之 平行之2邊作為短邊。 此外，於上述發明中，前述棒狀構件之與長度方向垂 直之剖面可形成為梯形。 此外，於上述發明中，前述梯形之剖面中之上底之長 度與下底之長度的比可構成為2 : 1。 _ 、 此外，於上述發明中，前述棒狀構件之與長度方向垂 直之剖面可形成為具有2組平行之料的五㈣狀。 此外，於上述發明中，前述棒狀構件之與長度方向垂 直之剖面可形成為直角三角形。 赛雷上述發明中，别述弟2接觸部之前端可比前 述¥電性朗絲持具之外無巾之在㈣形柄前述第 1導引溝之部分的外侧面更朝該外側面的法線方 (發明之效果） 根據本發明，係構成為具備··複數個導電性接觸件， 係由呈祕之導電性材料所形成’且具有：第：， 係與輸出檢查用訊號之電路構造接觸；彈性部，係可朝長 319525 7 200813442 =㈣縮之彈性部’·第2接觸部，其與檢查縣接觸之 m前述彈性部之寬度方向之端緣部更朝遠離寬度方向 方向突出，·第】連接部，係連接前述彈性部盘 部’·τ連接部，係連接前述彈性部與前 且設有貫穿於板厚方向並將與前述長度方 «千仃之邊作為長邊的長方形狀之開口部；以及 件，係固定在前述導電性接觸件保持具，且貫通分別 ==導電性接觸件的前述開口部；並且前述棒狀 構件之與長度方向垂直之剖面係形成為，藉由從 2除包含有位於下方之姐邊之至少一部分之區域所得的： 狀、中前述長方形係將具有與前述開口部之短邊長产大 =等且比該開口部之短邊長度更短之長度的2邊、二即 ”刖述開口部之短邊平行之2邊作為短邊，藉此，可提供 耐久性佳之導電性接觸件單元。 Ζ、 【實施方式】 •At以下係參照附加圖式，說明用以實施本發明之最佳型 ，（以下稱為「實施型態」.）。此外，圖式為示意性者，各 =之厚度與寬度之間的關係，以及各個部分之厚度的比 率等可能會與實際上有所不同，在此應予留意，此外， 於圖式彼此之間，當然亦可能包含相互之尺寸關係及比率 互為不同之部分。 第1圖係顯示本發明一實施型態之導電性接觸件單元 的構成之斜視圖。第1圖所示之導電性接觸件單it 1係用 以進行作為檢查對象之液晶面板等之電路構造的導通狀態 319525 8 200813442 :作二檢查者’並具傷：呈板狀之複數個導電性 ， M收納保持複數個導電性接觸件2之導電性 接觸件保持具3 ;及固念认道兩 、 ^ ,n^ 疋於導電性接觸件保持具3並支撐 稷數個導電性接觸件2之棒狀構件4。 ，:先《兄明導電性接觸件2。第2圖係顯示 之導電性接觸件2的構成 ^ 2 m夕千圖式。於以下的說明中，將第 ==稱為「導電性接觸件2的長度方向」，將第 »:二方:二為「導電性接觸件2的寬度方向」，將分 二 方向正交之方向、亦即與紙面垂直之 方向，為¥電性接觸件2的板厚方向」。 成a =圖所7^之導電性接觸件2係使科電性材料而形 狀，並確立用以產生檢查用的訊號之 查對象之間的雷性i查垃 ^ θ ^ ^ 且 。更/、體而言，導電性接觸件2係 Γ性接觸於包含檢查用電路之預定電路構造之第 〇 σ 1，物理性接觸於液晶面板等檢查對象之第2接 =22，介置於第1接觸部21及第2接觸部22之間，並 方，伸縮之彈性部23 ;連接第1接觸部21與彈 、，弟1連接部24，及連接第2接觸部22與彈性部 並形成有貫通於板厚（厚度）方向且具有與長度方向平 仃之長邊之開口部25的第2連接部26。 第1接觸部21係以從第j連接部24的短 部朝長度方向突出之方式而設置。然而，第 連接部24突出之位置並不限定於此，只要因應接 、象的電路構造所設置之電極的位置#條件而決定即 319525 9 200813442 可。 第2接觸部22係比彈性部23之寬度方向的端緣部更 朝遠離彈性部23之寬度方向的·中心軸的方向突出。第2 接觸部22的形狀須因應導電性接觸件2的材質或檢查時應 施加於導電性接觸件2之荷重、用以收納並保持導電性接 觸件2之導電性接觸件單元3的形狀、及檢查對象的種類 等之種種條件而予以決定，只要比第2連接部26之寬度方 向的端緣部更往該寬度方向突出’即可針對該形狀的細部 進行適當的變更。 =性部23係具有於與導電性接觸件2的長度方向正矣 2寬度方向平行之複數個直線部仏、及將鄰接的直縛 接之複數個彎曲部23b，並沿著長度方向而形成 : 子狀蛇行之形狀。直線部23a的線徑為相同，彎曲 #饥的外徑及線徑亦為相同。彈性部23之彎曲部23t I數目係因應施加於導電性接觸件2之荷重而適當地決 接著說明導電性接觸件保持具3 電性接觸件保持具3係形成為大致呈長 狀’並具有：貫通上面部3a與底面部（於第】 / 而保持複數個導電性接觸件2之保持圖中未圖：) 經介保持部而互為相對向之侧面部3b/i別形成於 將棒狀構件4的端邻+ 的預疋位置，並 第3円在鹿…予固疋之固定用孔部32。 弟3圖係顯示導電性接觸件保持 分放大斜視圖。如第 々上面邛3a之部 弟3圖所不，於保持部_形成有多數 319525 10 200813442 ;對下述，造.於安裝導電性接觸件2時，將該導電性接觸 '育为覓度方向之一方端緣部予以嵌合保持之直線狀的第 1導引溝3la;及位於與此第〗導引溝3u相對向之位置， 並將嵌入於該第丨導引溝31a之導電性接觸件2的寬度方 向之另一方端緣部予以嵌合保持之直線狀的第2導引溝 31t>。成對之第1導引溝31a及第2導引溝3ib，係具有將 2電性接觸件2定位於與該長度方向垂直之面方向之功 此並具有將導電性接觸件2的伸縮動作予以導引之功 籲能。此外，第i導引溝31a及第2導引溝m所形成的成 對中’互為鄰接的對彼此之間的間隔完全相等且互為平行。 々各個第1導引溝31a及第2導引溝31b係具有相同的 溝見度（设定為w)，且具有相同的溝深度（設定為幻。在此 係說明第1導引溝31a的溝深度及第2導引溝训的溝深 度為相等之情形，但是—導引溝的溝深度亦可互為不同。 第4圖係顯示導電性接觸件單元1的内部構成之圖 <。第4圖騎之導電性接觸件料具3的剖面係相當於 第3圖之A—A線剖面。如第4圖所示，第〗導引溝3U 及第2導引溝31b係具有，沿著第4圖的z軸方向（與溝寬 度方向垂直之方向）互相平行而延伸之構造。第工導引溝 31a於第4圖的z軸方向延伸之長度，係比第2導引溝31匕 於相同的z軸方向延伸之長度還短’第2導引溝3iw系到 達導電性接觸件保持具3的底面部3d為止，但第丨導引溝 31a僅到達比底面部3d更為垂直上方的位置為止。 具有以上構成之導電性接觸件保持具3係將導電性接 319525 11 200813442 :觸件2保持為，於第1圖及第4圖所示之座標系（xyz)中寬 、度方向與x軸方向平行，板厚方向與y軸方向平行，且長 度方向與z軸方向平行。就此點而言，導電性接觸件2的 板厚係比第1導引溝31a及第2導引溝31b的溝寬度㈨ 稍小。 —保持於導電性接觸件保持具3之導電性接觸件2係於 尚未％加於第1接觸部21及第2接觸部22之狀態（第 4圖所不之狀態)下’第2接觸部22的前端Q係比導電性 接觸件保持具3的侧面部3e更往X軸的正方向突出預定量 (將犬出1設為δ〇。此外，第2接觸部22的前端q係從導 η觸件:呆持具3的底面部3(1往2軸的負方向突出預定 =(將犬出1設為h)。藉此，操作人員即使從導電性接觸件 杳盤金斜上方亦施夠確認導電性接觸件2的前端與檢 -ί象之間的物理性接觸之有無（參照第 料第,接觸部21的前端ρ且平行於二方： •此所說::二2::22的前端的偏移量設為Δ1。在 接觸件2 ^ 及偏移量Λΐ，係因應導電性 杳對象之^ 接觸件保持具3的大小、應予施加於檢 查對象之荷重等的條件而適當決定。 杈 來看就St導電性接觸件2電性連接而產生短路之觀點 成。例如可2觸件保持具3較理想為以絕緣性材料所形 佯持 ㉟熱膨脹的合成樹脂來形成導電性接觸件 " 例如可藉由二氧化鋁（Al2〇3)、二氧化錘 319525 12 200813442 :⑽2)、二氧切（Si〇2)等的陶究、石夕、環氧等之孰硬化性 -树脂、聚碳酸醋等工程塑膝等而形成導電 件持 技術，成第1:溝- =不論是否有絕緣性）形成母材，並對可與導電性；3 :之包合弟1導引溝31a及第2導引溝佈 當的絕緣性塗料’藉此取代使 ' ^適 接觸件保持具3之方式。就此點而㈣^4而形成導電性 …的表面的一部分或全:塗 ^著說明棒狀構件4。關於棒狀構件4,係將 =件2安裝於保持部31，並於貫通各個 二 ::的開口部25之後，將其兩端部插通於分別形成在4 生接觸件保持具3之互為相對向的側面料之：： 二而固定於導電性接觸件保持具3。棒狀構件4係一次 部Μ所保持之複數個導電性接觸件2的開口 广，精此貫現防止導電性接觸件2從保持部31脫 功能，並實現將初期撓曲賦予至導電性接觸件2之功 棒狀構件4之與長度方向垂直之剖面如第4圖所；係 ’藉由從—長方形切除包含有絲下方之短邊之、至 之區域所得的形狀，其中前述長方形係將具有盘 ¥電性接觸件2的笫2洁% & Θ 邊吾声女功士贫 所具有之開口部25之短 大致相專且比該開口部25之短邊長度更短之長度 具濟而」與開口部25之短邊平行之2邊作為短邊，更 /、_ 0，係形成為將短邊方向的邊形成為上邊與下邊之 319525 13 200813442 -梯形。為了能衾1 # s 4 :形之頂點部分施:=電性接觸件2的滑動 圖所示，形成此楹，㈣成為R形狀。如第5圖的放大 h的比=】:形/之剖面中之上底之長度…底之長 狀構件4所要欠之u2)。此比例僅為例子之一，可因應棒 午所要求之剛性等條件而進行變更。 鐘於棒狀構件4為貫 部25並用以Hi入 ^性接觸件2的開口 構件4較王部的導電性接觸件2之情況，棒狀 生過大剛性較高，且即使施加荷重亦不會產 陶曼等絕緣性二所：:性接：件2之間的滑動阻力小之 部25之間的間隔。結果可==構件4與開口 杜Ο ΛΑ 4 k 使於施加何重日守之導電性接觸 接觸件2^Γ噴暢，且能夠確保以棒狀構件4將導電性 接觸件2予以支撐之穩定性。 於具有以上構成之導電性接觸件保持具3的上方，安 ^用以確保與產生並輸出檢查用訊號之訊號處理電路之間 =性連接之電路基板⑽。電路基板_係於由聚酿亞 ，專所組成之薄片狀的基材之一方表面，形成有由鎳等所 、，且成之多數條配線及連接用電極而成者。於安裝電路 100時’以使電路基板_的電極與導電性接觸件2的^ ^ 接觸部接觸之方式進行定位，並藉由以與導電性接觸件 保持具3相同的材料所構成之固定構件1〇1以及導電性接 觸件保持具3 ’將電路基板100予以夾持，並使用螺釘等 固定手段（未圖示）予以固定。結果’於各個導電性接觸件 2，施加有起因於作用在本身之重力以外的力之荷重（初期 319525 14 200813442 4重），#而使各彈性部23於長度方向收縮。 接者，說明導電性接觸件單 的接觸態樣。於進行檢杳蚌n ^查對象200之間 示)使液晶面板觀的驅動手段（未圖 :===第2接觸部22的前端 H攸弟1接觸部21的前端卩往又軸方向 】，因此於與檢查對象鳩接觸之導電性接觸件2合^ 二二部23收、_開口部25離開㈣構 達微小角度 2係於第4圖中往順時針方向旋轉 象2=Ϊ述旋轉，f 2接觸部22的前端Q係與檢查對 象200的表面—邊持續接觸狀態，—邊於檢查對象2⑼之 =移動:t此，第2接觸部22的前端係於檢查 ^ 私動，並藉此去除形成於檢查對象200的表面 的氧化膜以及附著於該表面之污垢，因此可於與檢查對象 馨200之間獲得穩定的電性接觸。此時，若適當地控制檢查 對象綱㈣動速度（上升速度），則可防止第2接觸部2一2 的刖端刮知檢查對象2〇〇的表面，且不須對導電性接觸件 2施加過度之荷重即可達成。 以上所說明之導電性接觸件單元丨，係以將一部分嵌 =於沿著導電性接觸件2的彈性部23的伸縮方向所延伸^ 第1導引溝31a及第2導引溝31b之狀態，將導電性接觸 件2予以保持。因此可防止呈板狀之導電性接觸件2特有 之彈性部23收縮時的壓曲及扭曲之問題的產生，而避免起 319525 15 200813442 :因於這些壓曲及扭曲而導致彈性部23的彈簧特性之劣 -化。因此，即使於適當的範圍内對導電性接觸件2施加= 定以上的荷重，亦不會產生壓曲及扭曲，而能夠實現較大 的行程（stroke)’因此於與檢查對象2〇〇之間可獲得所 的接觸狀態。 檢查對象200係如上所述與第2接觸部22的前端 接觸後再持續稍微上升，但可藉由接觸後之檢查對象_ 的上5，使導隸接觸件2旋轉達微/jm與棒狀構件 4或第2導引溝31b接觸。於本實施型態中， ,4的剖面形狀構成為上述梯形，藉此可減少開口部= ，與棒狀構件4之間的接觸部位，達科電性㈣件2之 重㈣的穩定化。結果可提料電性接觸件2的耐久性: 並提升檢查的可靠性。 引^外^導電性接觸件單元1中，係構成為以第！導 ^ a及弟2導引溝31b而保持導電性接觸件2，因此 接觸件2與導電性接觸件保持具3(的保持部 +之:的接觸面積並減少滑動阻力，而能夠順暢地進行導 电性接觸件2的伸縮動作。 導引生接觸件單元1之第1導引溝31a及第2 =冓的各個溝寬度（W)，可為與導電性接觸件2的板 厚相同程度之值，互相鄰接m、#， 啁仟2的板 導引…間的各;31a之間及第2 性接魅h… 、要充分確保所鄰接之導電 可將複數個導币降巴緣性’則可為任意之較小的值。因此 稷數個性接觸件2的排列間隔予以窄化，而充分 319525 16 200813442 對應於電路基板ioo或檢查對象200所具有之連接用的電 . 極或端子之排列間隔的狹窄化。 此外，於導電性接觸件單元1中，係藉由使棒狀構件 4貫通導電性接觸件2,將初期撓曲賦予至導電性接觸件2 並防止鬆脫。結果’可縮小第2接觸部22的前端q、 導電性接觸件2的下端從導電性接觸件保持具3的底 Μ於垂直下方突出之突出量h。換言之，即使縮小第2接 = 22,亦可防止該前端的扭曲而穩定地予以保持，並抑 •制¥電性接觸件2於下端部附近從第i導引溝仏及 =溝=Γ。因此，可提高導電性接觸件2的位置 精確度，&升導電性接觸件單元！之可靠性及耐久性。 此Γ外’於㈣導電性接觸件單元1時料電性接觸件 於保持部31之步驟，係首先將第1接觸部21侧插 入於保持部31的内部，鋏後蔣办 1導引溝3la&m 方向的端緣部篏入於第 H π ¥引溝31b’而藉此完成此步驟。因此， ，可獲得比習知的導電性接 =口此 低製造成本之效果。 午早疋更谷易進订組裝’並.降 備由？f:上所說明之本發明的-實施型態，係構成為罝 =:導導電電:::::成之複數個導電性接觸- _用訊號之電路構造接:、具=:==輪 伸縮之彈性部；第2 :〖生“了朝長度方向 前述彈性部之寬度方& :，、一檢查對象接觸之前端比 軸的方向突出；帛i遠2緣部更朝遠離寬度方向的中心 邛，係連接前述彈性部與前述第 319525 17 200813442 2觸部；及第2連接部’係連接前述彈性部 有貫穿於板厚方向並將與前述長度方向平行 二持具，且貫通分別設置在前述複』 =電生接觸件的則述開口部；並且前述棒狀構件之與長度 向垂直之剖面係形成為’藉由從一長方形切除包含有： 导:方之短邊之至少-部分之區域所得的形狀，其中前述 長方形係將具有與前述開口部之短邊長度大致相等 開口部之短邊長度更短之長度的2邊、亦即與前述開^ 之紐邊平行之2邊作為短邊，藉此，可提供耐久性佳之 電性接觸件單元。… ^此外，根據本實施型態，即使檢查次數增加而使與導 電性接觸件之間的摩擦變小，亦無須增加導電性接觸件與 棒狀構件之接觸部位，而能夠達到導電性接觸件之荷重特 性的穩定化。結果，可提升導電性接觸件2的耐久性，並 •進行穩定的檢查。 到目前為止係詳細敘述用以實施本發明之最佳型態， 但本發明並不應僅限定於上述一實施型態。第6圖至第8 圖係顯示本發明之導電性接觸件保持具所具備之棒狀構件 的其他構成例之剖面圖。其中，第6圖所示之棒狀構件5 係具有與上述一實施型態之棒狀構件4於圖中呈左右反轉 之剖面形狀。此外，第7圖所示之棒狀構件6係具備具有 2組平行之對邊的五角形狀之剖面。再者，第8圖所示之 棒狀構件7係具有直角三角形之剖面。於第6圖至第8圖 319525 18 200813442 各剖面之頂 中’為了能夠改善導電性接觸件2的滑動性 點部分係被施以倒角而形成為R形狀。 如此，本發明之導電性接觸件保持具所具備 件之與長度方向垂直之剖面只要形 、 奉構 銪从士 一丄 、要形成為，於保持導電性接 觸料，错由從-長方形切除包含有位於下方之短邊之至 卜部分之區域所得的形狀即可，其中 有與該導電性接觸件所具有之開口部之短邊長度大^等 且比該開Π部之短邊長度更短之長度的、亦即盘該開 口部之短邊平行之2邊作為短邊。此外，關於邊的比例， 只要因應棒狀構件所要求之剛性等條件而適當決定即可。 本發明之導電性接觸件單元並不僅限定於液晶面板的 檢查，亦可適用為裝載有半導體晶片之封裝基板或晶圓等 級檢查中所使用之高密度導電性接觸件單元。 、 從以上說明中可明瞭，本發明可包含在此所未記載的 種種實施型態等，且在不脫離以申請專利範圍所特定之技 馨術性思想的範圍内，可進行種種的設計變更等。 (產業上之利用可能性） 如前所述，本發明之導電性接觸件單元係適用於進行 液晶面板及半導體積體電路等之電子零件的導通狀態檢杳 及動作特性檢查時。一 【圖式簡單說明】 第1圖係顯示本發明一實施型態之導電性接觸件單元 的構成之斜視圖。 第2圖係顯示本發明一實施型態之導電性接觸件的構 319525 19 200813442 . 成之圖式。 第3圖係顯示導雷性妓6 —大斜視圖^ 接觸件㈣具的上面部之部分放 第4圖係顯示本發明一病^ 的内部構成之圖式。 心型悲之導電性接觸件單元 示棒狀構件的剖面形狀之 圖 弟6圖係顯示棒狀構件的其他構成例（第2例）之剖面 圖 第7圖係顯示棒狀構件的其他構成例（第3例）之剖面 圖 。第8圖係顯示棒狀構件的其他構成例（第4,之剖面 主要元件符號說明】 1 導電性接觸件單 元 2 '5 導電性接觸件 3 3 a 上面部 3b、3c 3d 底面部 4、5、 21 第1接觸部 22 23 彈性部 23a 23b 彎曲部 24 25 開口部 26 31 保持部 31a 31b 第2導引溝 32 100 電路基板 101 導電性接觸件保持具 側面部 6' 7棒狀構件 第2接觸部 直線部 第1連接部 第2連接部 第1導引溝 固定用孔部 固定構件 319525 20 200813442200813442. IX. Invention: 9 Technical Fields of the Invention The present invention relates to an electronic component that is in contact with an electronic component of a liquid crystal panel, a semiconductor integrated circuit, or the like, and is in contact with the electronic component. The electrode or terminal is a conductive contact unit for transmitting and receiving electrical signals. [Prior Art] Conventionally, in the technical field of electrical property inspection of an inspection object such as a semiconductor integrated circuit, there is known a technique for a conductive contact unit having the following functions, that is, corresponding to a semiconductor A plurality of conductive contacts are disposed on the connection electrodes of the integrated circuit, and the conductive contacts are physically contacted with the electrodes for connection, thereby ensuring electrical conduction. The conductive contact unit is provided with: a plurality of conductive contacts; and a conductive contact holder for holding a plurality of conductive contacts. In such a conductive contact unit, various techniques have been proposed which can correspond to narrowing of the arrangement interval of the connection electrodes in order to refine the tendency of the semiconductor integrated circuit or the like to be examined. For example, in the following Patent Document 1, there is disclosed a technique of providing a conductive contact having a plate shape in contact with a contact portion to be inspected and an elastic portion that is pressed against the contact portion. In this prior art, a plurality of conductive contacts are arranged at a narrow interval in the thickness direction, whereby the arrangement interval of the connection electrodes to be inspected can be narrowed. Patent Document 1: JP-A-2001-343397, SUMMARY OF THE INVENTION 319525 5 200813442 (Problems to be Solved by the Invention) - However, when the above-mentioned conductive contacts are repeatedly inspected, each of the conductive contacts Load characteristics may vary. Therefore, not only the stable inspection cannot be performed, but also the contact of the conductive contact may be caused by the difference in the situation, and there is a problem of durability. The present invention has been made in view of the above problems, and an object thereof is to provide a conductive contact unit excellent in durability. (Means for Solving the Problem) In order to solve the above problems and achieve the goal, an aspect of the present invention is a V electrical contact unit that performs signal between a circuit structure for outputting an inspection signal and a target object. The conductive contact unit for transmitting and receiving is characterized in that: a plurality of conductive contacts are formed by a plate-shaped conductive material and have an ith contact portion and an output inspection signal f The circuit structure is in contact with each other; the elastic portion is an elastic portion that is expandable and contractable in the longitudinal direction, and the second contact portion is in contact with the inspection object, and the front end of the contact with the inspection object is more than the end portion of the elastic portion in the width direction. a first connecting portion that connects the elastic portion and the first contact portion, and a second connecting portion that connects the elastic portion and the second contact portion, and protrudes in a direction away from a central axis in a width direction of the elastic portion; Further, a rectangular-shaped opening ortho-conductive contact holder having a long side parallel to the longitudinal direction of the longitudinal direction f is provided, and has a plurality of first guiding grooves. One end edge portion of the second contact opening side of the end edge portion of the conductive contact member in the longitudinal direction is fitted and held; and a plurality of second guiding grooves are respectively associated with the plurality of ith guides The guiding groove is disposed opposite to each other, and is to be fitted and held by the other end edge portion of the conductive contact member opposite to the foregoing second guiding groove; and the rod member is fixed in the foregoing The electrical contact member (4) has a through-opening portion respectively disposed in the plurality of conductive contacts; and the cross-section of the rod-shaped member perpendicular to the longitudinal direction is formed by cutting from a rectangular shape and including a shape obtained by at least a portion of the short side, wherein the rectangular shape has two sides that are substantially equal in length to the short side of the opening and shorter than the length of the ugly side of the opening, that is, The two parallel sides of the opening are referred to as short sides. Further, in the above invention, the cross section perpendicular to the longitudinal direction of the rod-shaped member may be formed in a trapezoidal shape. Further, in the above invention, the ratio of the length of the upper base to the length of the lower base in the trapezoidal cross section may be 2:1. Further, in the above invention, the cross section perpendicular to the longitudinal direction of the rod-shaped member may be formed in a five (four) shape having two sets of parallel materials. Further, in the above invention, the cross section perpendicular to the longitudinal direction of the rod-shaped member may be formed into a right-angled triangle. In the above invention, in the above invention, the front end of the contact portion of the other two can be made thinner than the outer side of the portion of the first guiding groove of the (four)-shaped handle. Thread side (effect of the invention) According to the present invention, a plurality of conductive contacts are provided, which are formed of a conductive material of a secret type, and have a circuit structure for outputting an inspection signal. Contact; elastic portion, which can be extended toward the length 319525 7 200813442 = (4) the elastic portion of the second portion, which is in contact with the inspection county, and protrudes away from the width direction at the edge portion in the width direction of the elastic portion. The first connecting portion is connected to the elastic portion portion □ τ connecting portion, and is connected to the elastic portion and the front portion, and is provided with a rectangular shape that penetrates the thickness direction and has a long side with the length of the side And the opening is fixed to the conductive contact holder and penetrates the opening of each of the conductive contacts; and the cross section of the rod member perpendicular to the longitudinal direction is formed by Divided by 2 The rectangle having a shape of at least a portion of the lower side of the lower side of the lower side of the opening has a length that is longer than the short side of the opening and equal to the length of the short side of the opening. 2, that is, "the short side of the short side of the opening portion is referred to as a short side, whereby a conductive contact unit having excellent durability can be provided. 实施, [Embodiment] • At is referred to below with reference to an additional drawing. The best mode for carrying out the invention (hereinafter referred to as "implementation type".). In addition, the drawings are schematic, the relationship between the thickness and the width of each = and the ratio of the thickness of each part may be different from the actual one, and should be noted here, in addition, in the drawings Of course, it is also possible to include mutually different dimensional relationships and ratios. Fig. 1 is a perspective view showing the configuration of an electroconductive contact unit according to an embodiment of the present invention. The conductive contact piece unit 1 shown in Fig. 1 is used to perform a conductive state of a circuit structure such as a liquid crystal panel to be inspected. 319525 8 200813442: Two inspectors' and wounded: a plurality of conductive plates in a plate shape , the M contact holds the conductive contact holder 3 of the plurality of conductive contacts 2; and the meditation recognizes two, ^, n^ 导电 the conductive contact holder 3 and supports a plurality of conductive contacts 2 rod-shaped member 4. ,: First, "Brothers show conductive contacts 2. Fig. 2 shows the structure of the conductive contact 2 shown in Fig. 2 . In the following description, the first == is referred to as "the longitudinal direction of the conductive contact 2", and the second: two is the "width direction of the conductive contact 2", and is orthogonal to the two directions. The direction, that is, the direction perpendicular to the paper surface, is the thickness direction of the electric contact member 2". The conductive contact 2, which is a=Fig. 7^, is shaped to have an electrophysical material, and establishes a lightning property between the objects to be used for inspection, and the spectroscopy θ ^ ^ and . Further, the conductive contact 2 is in contact with the first 〇 σ 1 of the predetermined circuit structure including the inspection circuit, and physically contacts the second connection of the inspection object such as the liquid crystal panel = 22 The elastic portion 23 that is stretched and contracted between the first contact portion 21 and the second contact portion 22, and the first contact portion 21 and the elastic portion, the first connecting portion 24, and the second contact portion 22 and the elastic portion are connected. The second connecting portion 26 is formed to have an opening portion 25 that penetrates the plate thickness (thickness) direction and has a long side that is flat with respect to the longitudinal direction. The first contact portion 21 is provided to protrude from the short portion of the j-th connecting portion 24 in the longitudinal direction. However, the position at which the first connecting portion 24 protrudes is not limited thereto, and may be determined by the position # of the electrode provided in the circuit configuration of the image, that is, 319525 9 200813442. The second contact portion 22 protrudes in a direction away from the central axis in the width direction of the elastic portion 23 from the end edge portion in the width direction of the elastic portion 23. The shape of the second contact portion 22 is adapted to the shape of the conductive contact member 2 or the load to be applied to the conductive contact member 2 during inspection, and the shape of the conductive contact member 3 for accommodating and holding the conductive contact member 2, The conditions of the type of the object to be inspected and the like are determined as long as they protrude in the width direction from the edge portion in the width direction of the second connecting portion 26, and the details of the shape can be appropriately changed. The characteristic portion 23 has a plurality of straight portions 平行 which are parallel to the width direction of the conductive contact 2 in the longitudinal direction 2, and a plurality of curved portions 23b which are adjacent to each other and are formed in the longitudinal direction. : The shape of the child snake. The linear portions 23a have the same wire diameter, and the outer diameter and the wire diameter of the curved #hung are also the same. The number of the curved portions 23t1 of the elastic portion 23 is appropriately determined by the load applied to the conductive contact 2, and the conductive contact holder 3 is formed into a substantially elongated shape and has : the upper surface portion 3a and the bottom surface portion (in the first aspect) are held in a holding diagram of the plurality of conductive contacts 2 (not shown): the medium-side holding portion is opposite to each other, and the side surface portion 3b/i is formed on the rod The end of the member 4 is adjacent to the pre-twisted position of the +, and the third member is fixed to the hole 32 of the deer. Figure 3 shows the conductive contacts held in an enlarged oblique view. For example, the figure 3a of the top 邛3a is not shown in the holding section _ 319525 10 200813442; for the following, when the conductive contact 2 is installed, the conductive contact is bred as a 觅a first guiding groove 31a that is linearly fitted and held by one of the end edges of the direction; and a position opposite to the first guiding groove 3u, and the conductivity embedded in the second guiding groove 31a A linear second guide groove 31t is fitted and held by the other end edge portion of the contact 2 in the width direction. The pair of first guiding grooves 31a and second guiding grooves 3ib have a function of positioning the two electrical contacts 2 in a direction perpendicular to the longitudinal direction and have a telescopic action of the conductive contact 2 Guided by the power of appeal. Further, the pair of adjacent pairs formed by the i-th guiding groove 31a and the second guiding groove m are completely equal to each other and parallel to each other. Each of the first guiding grooves 31a and the second guiding grooves 31b has the same visibility (set to w) and has the same groove depth (set to illusion. Here, the first guiding groove 31a will be described. The groove depth and the groove depth of the second guide groove are equal, but the groove depth of the guide groove may be different from each other. Fig. 4 is a view showing the internal structure of the conductive contact unit 1 < The cross section of the conductive contact material 3 of the figure 4 corresponds to the A-A line section of Fig. 3. As shown in Fig. 4, the first guiding groove 3U and the second guiding groove 31b have a structure extending parallel to each other along the z-axis direction (direction perpendicular to the groove width direction) of Fig. 4. The length of the first guide groove 31a extending in the z-axis direction of Fig. 4 is the second guide The length of the groove 31匕 extending in the same z-axis direction is also short. The second guide groove 3iw reaches the bottom surface portion 3d of the conductive contact holder 3, but the second guide groove 31a only reaches the bottom portion 3d. The position is vertically above. The conductive contact holder 3 having the above configuration will be electrically conductively connected to 319525 11 200813442: contact 2 In the coordinate system (xyz) shown in Fig. 1 and Fig. 4, the width and the direction are parallel to the x-axis direction, the thickness direction is parallel to the y-axis direction, and the length direction is parallel to the z-axis direction. The thickness of the conductive contact 2 is slightly smaller than the groove width (9) of the first guiding groove 31a and the second guiding groove 31b. - The conductive contact 2 held by the conductive contact holder 3 is not yet % is added to the first contact portion 21 and the second contact portion 22 (the state shown in Fig. 4). The front end Q of the second contact portion 22 is more than the side surface portion 3e of the conductive contact holder 3 The positive direction of the X-axis is protruded by a predetermined amount (the dog 1 is set to δ 〇. Further, the front end q of the second contact portion 22 is from the n-contact: the bottom portion 3 of the holder 3 (1 to the negative of the 2 axes) The direction is highlighted to be predetermined = (the dog is set to 1 as h). Thereby, the operator can confirm the physical relationship between the front end of the conductive contact 2 and the inspection image even from the oblique position of the conductive contact member. The presence or absence of sexual contact (refer to the first material, the front end ρ of the contact portion 21 and parallel to the two sides: • The said:: The offset of the front end of the two 2::22 is set to Δ1. In the contact 2 ^ The offset Λΐ is appropriately determined depending on the size of the contact holder 3 and the load to be applied to the object to be inspected, etc. The 导电 conductive contact 2 is electrically connected. The viewpoint of generating a short circuit is, for example, the contact holder 3 is preferably formed of a synthetic resin which is thermally expanded by an insulating material to form a conductive contact member. For example, it can be made of alumina (Al2〇3). Dioxide hammer 319525 12 200813442 : (10) 2), anaerobic (Si〇2) and other ceramics, Shi Xi, epoxy, etc., hardenability - resin, polycarbonate, and other engineering knees to form conductive parts Technology, into the first: groove - = regardless of whether there is insulation) to form the base material, and can be electrically conductive; 3: the inclusion of the brother 1 guiding groove 31a and the second guiding groove cloth as insulating coating ' This replaces the way in which the contact element is held. At this point, part or all of the surface of the conductive ... is formed by (4) ^4: the rod-shaped member 4 is coated. In the rod-shaped member 4, the member 2 is attached to the holding portion 31, and after the opening portion 25 of each of the two members is inserted, the both end portions thereof are inserted into the mutual contact holders 3, which are formed in each other. For the opposite side material:: Two is fixed to the conductive contact holder 3. The rod-shaped member 4 has a wide opening of the plurality of conductive contacts 2 held by the primary portion, and the above-described prevention prevents the conductive contact 2 from being deactivated from the holding portion 31, and imparts initial deflection to the conductive contact. The cross section perpendicular to the longitudinal direction of the rod-shaped member 4 of the member 2 is as shown in Fig. 4; the shape obtained by cutting the region from the short side of the underside of the filament by a rectangle, wherein the rectangle is The opening portion 25 having the disk-shaped electrical contact member 2 has a shorter length than the short portion of the opening portion 25 and is shorter than the length of the short portion of the opening portion 25. The two sides parallel to the short side of the opening portion 25 are short sides, and more, _ 0 is formed so that the side in the short side direction is formed as the upper side and the lower side of 319525 13 200813442 - trapezoidal. In order to be able to 衾1 # s 4 : the apex portion of the shape is applied: = the sliding view of the electrical contact 2 is formed, and (4) is formed into an R shape. The ratio of the magnification h as shown in Fig. 5 =]: the length of the upper base in the shape/section; the length of the bottom member 4 is owed by u2). This ratio is only one of the examples and can be changed in response to conditions such as the rigidity required at noon. In the case where the rod member 4 is the continuous portion 25 and is used for the conductive member 2 of the king portion of the opening member 4 of the contact member 2, the rod shape is too large and the rigidity is high, and even if a load is applied, Two insulations such as Taeman are produced:: Sexual connection: the interval between the portions 25 where the sliding resistance between the members 2 is small. As a result, the member 4 and the opening cuckoo ΛΑ 4 k can be used to squirt the conductive contact member 2 Γ, and the stability of supporting the conductive contact member 2 by the rod member 4 can be ensured. . Above the conductive contact holder 3 having the above configuration, a circuit board (10) for ensuring a positive connection with a signal processing circuit for generating and outputting an inspection signal is provided. The circuit board is formed on one of the surface of a sheet-like base material composed of a poly-roller, and is formed of nickel or the like, and is formed by a plurality of wirings and connecting electrodes. When the circuit 100 is mounted, 'the electrode is placed in contact with the contact portion of the conductive contact 2, and the fixing member is made of the same material as the conductive contact holder 3. 1〇1 and the conductive contact holder 3' sandwich the circuit board 100, and are fixed by a fixing means (not shown) such as a screw. As a result, in each of the conductive contacts 2, a load due to a force other than the gravity acting on itself (initial 319525 14 200813442 4 weight) is applied, and the elastic portions 23 are contracted in the longitudinal direction. The contact person describes the contact state of the conductive contact piece. The driving means for viewing the liquid crystal panel is shown between the inspection targets (not shown: === the front end of the second contact portion 22, the front end of the contact portion 21 of the first contact portion 21 is turned to the direction of the other axis] Therefore, the conductive contact 2 in contact with the inspection target 合 is combined with the second portion 23, the opening portion 25 is separated (4), and the micro angle 2 is rotated in the clockwise direction in the fourth figure. The front end Q of the contact portion 22 of the f 2 is in continuous contact with the surface of the inspection object 200, and the movement of the inspection object 2 (9) is: t, the front end of the second contact portion 22 is attached to the inspection, and Thereby, the oxide film formed on the surface of the inspection object 200 and the dirt adhering to the surface of the inspection object 200 are removed, so that stable electrical contact can be obtained between the inspection object 200. At this time, if the inspection target (4) is appropriately controlled The speed (rising speed) prevents the end of the second contact portion 2-2 from scratching the surface of the inspection object 2〇〇, and it is not necessary to apply an excessive load to the conductive contact 2. Conductive contact unit 丨, to embed a portion of the conductor along the conductivity The conductive contact 2 is held in a state in which the elastic portion 23 of the contact 2 extends in the expansion/contraction direction of the first guide groove 31a and the second guide groove 31b. Therefore, the plate-like conductive contact 2 can be prevented. The occurrence of the problem of buckling and twisting when the elastic portion 23 is contracted is avoided, and the 319525 15 200813442 is avoided: the spring characteristics of the elastic portion 23 are deteriorated due to these buckling and twisting. Therefore, even if appropriate In the range, the load of the conductive contact 2 is set to be equal to or greater than the fixed load, and no buckling and distortion are generated, and a large stroke can be realized, so that the contact with the inspection object 2〇〇 can be obtained. The inspection object 200 continues to rise slightly after coming into contact with the front end of the second contact portion 22 as described above, but the guide contact 2 can be rotated by micro/jm by the upper 5 of the inspection object _ after contact. The rod-shaped member 4 or the second guide groove 31b is in contact with each other. In the present embodiment, the cross-sectional shape of 4 is configured as the trapezoid, whereby the contact portion between the opening portion and the rod-shaped member 4 can be reduced. Stabilization of the weight of the electrical (four) pieces 2 (four). The results can be Durability of the electrical contact 2: and improving the reliability of the inspection. The conductive contact unit 1 is configured to maintain conductive contact with the guide guide 31b and the guide groove 31b. Since the contact 2 and the conductive contact holder 3 have a contact area of the holding portion 3 and reduce the sliding resistance, the telescopic operation of the conductive contact 2 can be smoothly performed. The respective groove widths (W) of the first guiding groove 31a and the second = 冓 of the unit 1 may be equal to the thickness of the conductive contact 2, and may be adjacent to the plate guides of m, #, 啁仟2. Between each of them; 31a and the second sex enchantment h..., to ensure that the adjacent conduction can reduce the number of coins, the value can be any smaller value. Therefore, the arrangement interval of the number of individual contact members 2 is narrowed, and sufficient 319525 16 200813442 corresponds to the narrowing of the arrangement interval of the electrodes or terminals for connection of the circuit board ioo or the inspection object 200. Further, in the conductive contact unit 1, the rod-shaped member 4 is passed through the conductive contact 2, and the initial deflection is imparted to the conductive contact 2 to prevent loosening. As a result, the leading end q of the second contact portion 22 and the amount of protrusion h of the lower end of the conductive contact 2 projecting from the bottom of the conductive contact holder 3 vertically downward can be reduced. In other words, even if the second connection = 22 is reduced, the front end can be prevented from being twisted and stably held, and the electric contact 2 can be prevented from the i-th guiding groove and the = groove = 于 in the vicinity of the lower end portion. Therefore, the positional accuracy of the conductive contact 2 can be improved, & the conductive contact unit! Reliability and durability. In the case where the (four) conductive contact unit 1 is electrically connected to the holding portion 31, the first contact portion 21 side is first inserted into the holding portion 31, and then the guide groove is formed. The end portion of the 3la & m direction is inserted into the H π ¥ groove 31b' to complete this step. Therefore, the effect of lower manufacturing cost than the conventional conductivity connection can be obtained. In the early morning, I’m going to make a purchase. f: The embodiment of the invention described above is constructed as 罝=: conductive conductive::::: a plurality of conductive contacts - _ circuit construction with signal:, with ==== The elastic portion of the wheel is stretched; the second: 〖raws the width of the elastic portion in the longitudinal direction &:, the front end of the inspection object contacts the direction of the axis; the edge of the 远i far 2 is further away from the width direction a center 邛 connecting the elastic portion and the 319525 17 200813442 2 contact portion; and the second connecting portion ′ connecting the elastic portion through the plate thickness direction and parallel to the longitudinal direction of the holder, and respectively The opening portion is provided in the foregoing "the electric contact"; and the cross-section perpendicular to the length of the rod-shaped member is formed as 'by cutting from a rectangle: at least: the short side of the guide: The shape obtained in the partial region, wherein the rectangular shape has two sides having a length shorter than a short side length of the opening portion and a short side length of the opening portion, that is, two sides parallel to the front side of the opening As a short side, it provides excellent durability Electrical contact unit.... Further, according to the present embodiment, even if the number of inspections is increased to make the friction with the conductive contact member small, it is not necessary to increase the contact portion between the conductive contact member and the rod member. Stabilization of the load characteristics of the conductive contact member can be achieved. As a result, the durability of the conductive contact member 2 can be improved and a stable inspection can be performed. The best mode for carrying out the invention has been described in detail so far. However, the present invention is not limited to the above-described one embodiment. Fig. 6 to Fig. 8 are cross-sectional views showing other structural examples of the rod-shaped member provided in the conductive contact holder of the present invention. The rod-shaped member 5 shown in Fig. 6 has a cross-sectional shape which is reversed to the left and right in the figure in the above-described one embodiment. Further, the rod-shaped member 6 shown in Fig. 7 has two sets. The cross-section of the pentagonal shape of the opposite sides. Furthermore, the rod-shaped member 7 shown in Fig. 8 has a cross-section of a right-angled triangle. In the top of each section of Figure 6 to Figure 8 319525 18 200813442 Conductive The slidability point portion of the sexual contact member 2 is chamfered to form an R shape. Thus, the conductive contact holder of the present invention has a cross section perpendicular to the longitudinal direction of the member, as long as it is shaped and framed. a shape to be formed in order to maintain the conductive contact material, and the shape obtained by cutting the region containing the short side from the short side to the portion of the portion from the rectangle may be obtained from the conductive contact member. The length of the short side of the opening portion is larger than the length of the short side of the opening portion, that is, the two sides parallel to the short side of the opening portion of the disk are short sides. The conductive contact unit of the present invention is not limited to the inspection of the liquid crystal panel, and may be applied to a package substrate or a wafer level inspection in which a semiconductor wafer is mounted, in accordance with conditions required for the rigidity of the rod member. High density conductive contact unit used. As can be understood from the above description, the present invention can include various embodiments and the like which are not described herein, and various design changes can be made without departing from the scope of the artisan ideas specified in the scope of the patent application. Wait. (Industrial Applicability) As described above, the conductive contact unit of the present invention is suitable for performing on-state inspection and operational characteristic inspection of electronic components such as liquid crystal panels and semiconductor integrated circuits. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing the configuration of a conductive contact unit according to an embodiment of the present invention. Fig. 2 is a view showing the structure of an electroconductive contact member according to an embodiment of the present invention 319525 19 200813442. Fig. 3 shows a lightning-producing 妓 6 - a large oblique view ^ a portion of the upper surface of the contact member (four). Fig. 4 is a view showing the internal constitution of a disease of the present invention. FIG. 7 is a cross-sectional view showing a cross-sectional shape of a rod-shaped member, and FIG. 7 is a cross-sectional view showing another configuration example of the rod-shaped member (second example). FIG. 7 is a view showing another configuration example of the rod-shaped member. (3rd example) section view. Fig. 8 is a view showing another configuration example of the rod member (fourth section, main component symbol description) 1 conductive contact unit 2 '5 conductive contact 3 3 a upper surface portion 3b, 3c 3d bottom portion 4, 5 21, first contact portion 22 23 elastic portion 23a 23b curved portion 24 25 opening portion 26 31 holding portion 31a 31b second guiding groove 32 100 circuit substrate 101 conductive contact holder side portion 6' 7 rod member second Contact portion straight portion first connection portion second connection portion first guide groove fixing hole portion fixing member 319525 20 200813442
200 檢查對象 P、Q w 溝寬度 △ 1 ¢5 i、h 突出量 前端 偏移量200 Inspection object P, Q w groove width △ 1 ¢5 i, h protrusion amount front end offset
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