WO2008020565A1

WO2008020565A1 - Conductive contactor unit

Info

Publication number: WO2008020565A1
Application number: PCT/JP2007/065659
Authority: WO
Inventors: Yuka Ooyashiki; Takahiro Motegi
Original assignee: Nhk Spring Co., Ltd.
Priority date: 2006-08-18
Filing date: 2007-08-09
Publication date: 2008-02-21
Also published as: TW200813442A; TWI346206B; JP4781938B2; KR20090045347A; CN101506665A; JP2008046045A

Abstract

A conductive contactor unit excellent in durability. The conductive contactor unit comprises a first contact portion touching a circuit structure delivering an inspecting signal, an elastic portion able to telescope in the longitudinal direction, a second contact portion of which the distal end touching an inspection object projects beyond the edge end of the elastic portion in the width direction in a direction away from the central axis in the width direction, a plurality of planar conductive contactors having a second joint for connecting the elastic portion with the second contact portion and provided with a rectangular opening penetrating in the plate thickness direction and having a long side parallel with the longitudinal direction, and a rodlike member bonded to a conductive contactor holder and penetrating the openings provided in the plurality of conductive contactors, respectively. Cross-section of the rodlike member in a direction perpendicular to the longitudinal direction has such a profile that a region including at least a portion of a short side located below is removed from a rectangle having two sides of substantially same length as that of the short side of the opening and shorter than the length of the short side of the opening, and parallel with the short side of the opening as the short sides.

Description

Specification

Conductive contact unit

Technical field

[0001] The present invention relates to a conductive material that transmits and receives electrical signals by contacting electrodes and terminals of an electronic component when conducting a conduction state inspection or an operation characteristic inspection in an electronic component such as a liquid crystal panel or a semiconductor integrated circuit. This relates to the contact unit.

Background art

Conventionally, in the technical field relating to inspection of electrical characteristics of an inspection target of a semiconductor integrated circuit or the like, a plurality of conductive contacts are provided corresponding to the connection electrodes of the semiconductor integrated circuit, and the conductive contacts are used for connection. A technology related to a conductive contact unit having a function of ensuring electrical continuity by making physical contact with an electrode is known! /. The conductive contact unit includes a plurality of conductive contacts and a conductive contact holder that holds the plurality of conductive contacts. In such a conductive contact unit, various technologies have been proposed to cope with the narrowing of the arrangement interval of the connection electrodes accompanying the trend toward miniaturization of the semiconductor integrated circuit to be inspected. .

[0003] For example, Patent Document 1 below discloses a technique relating to a plate-shaped conductive contact that includes a contact portion that contacts an object to be inspected and an elastic portion that urges and urges against the contact portion. Yes. In this prior art, by arranging a plurality of conductive contacts arranged in the plate thickness direction at a narrow interval, it is possible to cope with a narrow array interval of connection electrodes to be inspected.

[0004] Patent Document 1: Japanese Patent Laid-Open No. 2001-343397

Disclosure of the invention

Problems to be solved by the invention

However, when the inspection is repeated with the above-described conductive contact unit, the load characteristics for each conductive contact may be disturbed. For this reason, there is a possibility that the conductive contact may be damaged depending on the case where the stable inspection cannot be carried out, and there has been a problem in durability. The present invention has been made in view of the above, and an object thereof is to provide a conductive contact unit having excellent durability.

Means for solving the problem

In order to solve the above-described problems and achieve the object, one embodiment of the present invention provides a conductive contact that transmits and receives signals between a circuit structure that outputs a test signal and a test target. A first contact portion that is made of a plate-like conductive material and that contacts a circuit structure that outputs a signal for inspection, an elastic portion that can be expanded and contracted in the longitudinal direction, The contact tip is a second contact portion that protrudes in a direction away from the center axis of the elastic portion in the width direction than the edge portion in the width direction of the elastic portion, and the elastic portion and the first contact. A rectangular opening having a long side extending in the plate thickness direction and parallel to the longitudinal direction. The first connecting portion connecting the portion and the elastic portion and the second contact portion are connected. A plurality of conductive contacts having a second connection portion provided, and one edge in a longitudinal direction of the conductive contacts; A plurality of first guide grooves that fit and hold the edge portion on the side from which the second contact portion protrudes, and the plurality of first guide grooves, and are opposed to each other. A conductive contact holder having a plurality of second guide grooves for fitting and holding the other edge of the conductive contact fitted in the first guide groove, and fixed to the conductive contact holder; A bar-shaped member penetrating the opening provided in each of the plurality of conductive contacts, and a cross section perpendicular to the longitudinal direction of the bar-shaped member is substantially equal to the length of the short side of the opening. Shorter than the length of the short side of the opening! /, At least one of the two sides having a length, which is lower than the rectangle having two sides parallel to the short side of the opening and having a short side. It is characterized by the shape obtained by removing the region including the part.

[0008] In the above invention, the cross section perpendicular to the longitudinal direction of the rod-shaped member may be trapezoidal.

[0009] In the above invention, the ratio of the length of the upper base to the length of the lower base in the trapezoidal cross section may be 2: 1.

[0010] In the above invention, the cross section perpendicular to the longitudinal direction of the rod-shaped member may have a pentagonal shape having two sets of parallel opposite sides.

[0011] In the above invention, the cross section perpendicular to the longitudinal direction of the rod-shaped member is a right triangle. It may be shaped.

[0012] In the invention described above, the tip of the second contact portion is the outer surface of the conductive contact holder, and the outer surface of the portion where the first guide groove is formed on the inner surface. It is better to project in the direction of the normal of the outer surface!

The invention's effect

[0013] According to the present invention, the first contact portion that is formed of a plate-like conductive material and contacts a circuit structure that outputs a signal for inspection, an elastic portion that can expand and contract in the longitudinal direction, and a contact with an inspection target. A second contact portion that protrudes in a direction in which the tip to touch is farther away from the central axis in the width direction of the elastic portion than the edge portion in the width direction of the elastic portion; the elastic portion and the first contact portion The first connecting portion and the elastic portion and the second contact portion are connected, and a rectangular opening having a long side extending in the plate thickness direction and parallel to the longitudinal direction is provided. A plurality of conductive contacts having a second connection portion formed thereon, and a conductive contact holder holding the plurality of conductive contacts, and the openings provided in the plurality of conductive contacts, respectively. A cross section perpendicular to the longitudinal direction of the bar-shaped member, A rectangle that is approximately equal to the length of the short side of the mouth and shorter than the length of the short side of the opening! /, And has two sides that are parallel to the short side of the opening. From this, it is possible to provide a conductive contact unit excellent in durability by forming a shape obtained by removing a region including at least a part of the short side located below.

Brief Description of Drawings

FIG. 1 is a perspective view showing a configuration of a conductive contact unit according to an embodiment of the present invention.

FIG. 2 is a diagram showing a configuration of a conductive contact according to an embodiment of the present invention.

FIG. 3 is a partially enlarged perspective view of the upper surface portion of the conductive contact holder.

FIG. 4 is a diagram showing an internal configuration of a conductive contact unit according to one embodiment of the present invention.

FIG. 5 is a partially enlarged view showing the cross-sectional shape of the rod-shaped member.

FIG. 6 is a cross-sectional view showing another configuration example (second example) of the rod-shaped member.

FIG. 7 is a cross-sectional view showing another configuration example (third example) of the rod-shaped member. FIG. 8 is a cross-sectional view showing another configuration example (fourth example) of the rod-shaped member. Explanation of symbols

1 Conductive contact unit

2 Conductive contact

3 Conductive contact holder

3a Top surface

3b, 3c side

3d bottom

4, 5, 6, 7 Bar-shaped member

21 First contact

22 Second contact area

23 Elastic part

23a Straight section

23b Curved part

24 First connection

25 opening

26 Second connection

31 Holding part

32 fixing hole

31 a 1st guide groove

31b Second guide groove

100 circuit board

101 Fixing member

200 Inspection target

P, Q Tip

Δ Offset amount

1

δ, h Protrusion

1

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the best mode for carrying out the present invention (hereinafter referred to as “embodiment”) will be described with reference to the accompanying drawings. It should be noted that the drawings are schematic, and the relationship between the thickness and width of each part, the ratio of the thickness of each part, etc. may differ from the actual ones. Of course, there are cases in which parts having different dimensional relationships and ratios are included.

FIG. 1 is a perspective view showing a configuration of a conductive contact unit according to an embodiment of the present invention. The conductive contact unit 1 shown in the figure performs a conduction state inspection and an operation characteristic inspection of a circuit structure such as a liquid crystal panel to be inspected, and includes a plurality of plate-like conductive contact 2 and A conductive contact holder 3 that accommodates and holds a plurality of conductive contacts 2 and a rod-like member 4 that is fixed to the conductive contact holder 3 and supports the plurality of conductive contacts 2 are provided.

[0018] First, the conductive contact 2 will be described. FIG. 2 is a diagram illustrating a configuration of the conductive contact 2 according to the first embodiment. In the following description, the vertical direction in FIG. 2 is “longitudinal direction of conductive contact 2”, and the horizontal direction in FIG. 2 is “width direction of conductive contact 2”. The direction in which the contact is made, that is, the direction perpendicular to the paper surface, is referred to as the “plate thickness direction of the conductive contact 2”.

The conductive contact 2 shown in FIG. 2 is formed in a plate shape using a conductive material, and establishes an electrical connection between a circuit structure that generates a test signal and a test target. To do. More specifically, the conductive contact 2 includes a first contact portion 21 that is in physical contact with a predetermined circuit structure including an inspection circuit, and a second contact that is in physical contact with an inspection target such as a liquid crystal panel. An elastic part 23 that is interposed between the contact part 22, the first contact part 21 and the second contact part 22 and can be expanded and contracted in the longitudinal direction, and a first connection part 24 that connects the first contact part 21 and the elastic part 23 And a second connection portion 26 that connects the second contact portion 22 and the elastic portion 23, penetrates in the thickness direction, and has a rectangular opening 25 having a long side parallel to the longitudinal direction. .

The first contact portion 21 is provided so as to protrude in the longitudinal direction from the central portion in the short direction of the first connection portion 24. The protruding position of the first contact portion 21 from the first connection portion 24 is not limited to this, and may be determined according to conditions such as the position of the electrode provided in the circuit structure to be contacted. [0021] The second contact portion 22 protrudes in the direction of the center axial force in the width direction of the elastic portion 23, away from the edge of the elastic portion 23 in the width direction. The shape of the second contact portion 22 is the material of the conductive contact 2, the load to be applied to the conductive contact 2 during inspection, and the conductive contact holder 3 that holds and holds the conductive contact 2. If it protrudes in the width direction from the edge in the width direction of the second connection portion 26, the details of the shape should be determined. Can be appropriately changed.

The elastic portion 23 includes a plurality of straight portions 23a that are orthogonal to the longitudinal direction of the conductive contact 2 and parallel to the width direction, and a plurality of curved portions 23b that connect adjacent straight portions. Along the way, it is meandering in an S shape. The wire diameter of the straight portion 23a is uniform, and the outer diameter and wire diameter of the curved portion 23b are also uniform. Note that the number of the curved portions 23b of the elastic portion 23 is determined according to the load applied to the conductive contact 2.

Next, the conductive contact holder 3 will be described. As shown in FIG. 1, the conductive contact holder 3 has a substantially rectangular parallelepiped appearance, and passes through the top surface portion 3a and the bottom surface portion (not shown in FIG. 1) to attach a plurality of conductive contact members 2 to each other. The holding part 31 to hold | maintain and the fixing hole part 32 which each is formed in the predetermined position of the side part 3b which mutually opposes via the holding part 31, and fixes the edge part of the rod-shaped member 4 are provided.

FIG. 3 is a partially enlarged perspective view of the upper surface portion 3 a of the conductive contact holder 3. As shown in FIG. 3, in the holding portion 31, when the conductive contact 2 is mounted, the first linear guide that fits and holds one edge in the width direction of the conductive contact 2 A groove 31a and a linear shape that is positioned opposite to the first guide groove 31a and that fits and holds the other edge in the width direction of the conductive contact 2 fitted in the first guide groove 31a. A plurality of pairs of the second guide grooves 31b are formed. The first guide groove 31a and the second guide groove 31b forming a pair have a function of positioning the conductive contact 2 with respect to the surface direction perpendicular to the longitudinal direction, and guide the expansion and contraction of the conductive contact 2 It has a function to do. Further, among the pairs formed by the first guide groove 31a and the second guide groove 31b, the intervals between adjacent pairs are all equal and parallel to each other.

Each of the first guide groove 31a and the second guide groove 31b has the same groove width (referred to as w) and the same groove depth (referred to as d). Here, the groove depth of the first guide groove 31a and the groove depth of the second guide groove 31b are equal to each other! /. Although the case has been described, the groove depths of both guide grooves are different from each other. It does not matter.

FIG. 4 is a diagram showing an internal configuration of the conductive contact unit 1. The cross section of the conductive contact holder 3 shown in the figure corresponds to the cross section along line AA in FIG. As shown in FIG. 4, the first guide groove 31a and the second guide groove 31b have a structure extending in parallel with each other along the z-axis direction (direction perpendicular to the groove width direction) in FIG. The length of the first guide groove 31a extending in the z-axis direction of FIG. 4 is shorter than the length of the second guide groove 31b extending in the same z-axis direction. The second guide groove 31b is a conductive contact holder 3 The force reaching the bottom surface portion 3d of the first guide groove 31a reaches only a position vertically above the bottom surface portion 3d! / ,!

[0027] The conductive contact holder 3 having the above-described configuration is such that the width direction is parallel to the X-axis direction in the coordinate system (xyz) shown in FIGS. The direction is parallel to the y-axis direction, and the longitudinal force is held so as to be parallel to the axial direction. In this sense, the plate thickness of the conductive contact 2 is slightly smaller than the groove width (w) of the first guide groove 31a and the second guide groove 31b.

[0028] The conductive contact 2 held by the conductive contact holder 3 is loaded with a load on the first contact portion 21 and the second contact portion 22! /,! /, And the state (the state shown in FIG. 4). ), The tip Q of the second contact portion 22 protrudes a predetermined amount in the positive direction of the X-axis from the side surface portion 3c of the conductive contact holder 3 (the protrusion amount is δ). The tip Q of the second contact portion 22 is the bottom surface portion of the conductive contact holder 3.

1

By a predetermined amount of protrusion from the 3d in the direction of the _Ζ axis negative (the amount of protrusion and h). As a result, the operator can confirm the presence or absence of physical contact between the tip of the conductive contact 2 and the inspection object even from an obliquely upper side of the conductive contact unit 1 (see FIG. 1). In FIG. 4, the offset amount of the tip of the second contact portion 22 from the axis O that passes through the tip P of the first contact portion 21 and is parallel to the z-axis direction is Δ. Protrusion amounts δ and h described here, and offset amount Δ

1 1 1 is appropriately determined according to conditions such as the size of the conductive contact 2 and the conductive contact holder 3 and the load to be applied to the inspection object.

The conductive contact holder 3 is preferably formed of an insulating material from the viewpoint of being electrically connected to the conductive contact 2 and preventing a short circuit from occurring. For example, the conductive contact holder 3 is formed using a synthetic resin having low thermal expansion, and the first guide groove 31a and the second guide groove 31b are formed by dicing or the like! Other examples include alumina (A1 ○ ₃ ), ceramics such as Zirco-Yure (Zr ○ ₂ ), silica (Si ○ ₂ ), thermosetting resins such as silicon and epoxy, engineering plastics such as polycarbonate, etc. The first guide groove 31a and the second guide groove 31b may be formed by a processing technique such as etching. In addition, instead of forming the conductive contact holder 3 using an insulating material, a base material is formed using another suitable material (regardless of insulation), and the conductive contact 2 is contacted. A suitable insulating paint may be applied to the possible portion (the portion including the first guide groove 31a and the second guide groove 31b). In this sense, an insulating paint may be applied to part or all of the surface of the conductive contact 2.

[0030] Continued! /, The rod-like member 4 will be described as! /. The rod-shaped member 4 has a plurality of conductive contacts 2 attached to the holding portion 31 and passes through the opening 25 of each conductive contact 2, and then both ends thereof face each other of the conductive contact holder 3. It passes through the fixing holes 32 respectively formed in the side surface portions 3b and is fixed to the conductive contact holder 3. The rod-like member 4 functions to prevent the conductive contact 2 from being removed from the holding portion 31 by penetrating through the openings 25 of the plurality of conductive contacts 2 held by the holding portion 31 at the same time. It performs the function of imparting initial deflection to contact 2.

As shown in FIG. 4, the cross section perpendicular to the longitudinal direction of the rod-shaped member 4 is substantially equal to the length of the short side of the opening 25 of the second connecting portion 26 of the conductive contact 2. Is shorter than the length of the short side! /, A rectangular force that has two sides that are parallel to the short side of the opening 25 and the short side is at least one of the short sides located below. It has a shape obtained by removing the region including the part, and more specifically, it has a trapezoidal shape with the sides in the short direction being the upper side and the lower side. The apex of this trapezoid is chamfered to make the conductive contact 2 more slidable and has an R shape. As shown in the enlarged view of FIG. 5, the ratio of the upper base length u to the lower base length V in the trapezoidal cross section is 2: 1 (v = u / 2). This ratio is merely an example, and can be changed according to conditions such as rigidity required for the rod-shaped member 4.

[0032] In view of supporting the conductive contacts 2 through the openings 25 of a large number of conductive contacts 2, the rod-shaped member 4 has high rigidity and little deflection even when a load is applied. Low sliding resistance with the conductive contact 2! / Insulating materials such as ceramics are particularly preferred! /. This As a result, the distance between the rod-shaped member 4 and the opening 25 can be reduced. As a result, the conductive contact 2 can be smoothly moved when a load is applied, and the support stability of the conductive contact 2 can be ensured by the rod-like member 4.

A circuit board 100 that establishes an electrical connection with a signal processing circuit that generates and outputs an inspection signal is attached above the conductive contact holder 3 having the above configuration. The circuit board 100 has a large number of wirings and connection electrodes made of nickel or the like formed on one surface of a sheet-like base material made of polyimide or the like. When mounting the circuit board 100, position the electrode so that the electrode of the circuit board 100 is in contact with the first contact portion 21 of the conductive contact 2, and a fixing member made of the same material as the conductive contact holder 3 The circuit board 100 is sandwiched between 101 and the conductive contact holder 3 and fixed using fastening means (not shown) such as screws. As a result, a load (initial load) due to a force other than gravity acting on itself is applied to each conductive contact 2, and each elastic portion 23 contracts in the longitudinal direction.

Next, a contact mode between the conductive contact unit 1 and the inspection object 200 will be described. When performing inspection, the inspection object 200 such as a liquid crystal panel is brought into contact with the tip Q of the second contact portion 22 by a predetermined driving means (not shown), and is raised until it reaches a predetermined position. . The tip Q of the second contact portion 22 is equal to Δ in the X-axis direction from the tip P of the first contact portion 21 as described above.

1 Because of the offset, a moment is generated in the conductive contact 2 in contact with the inspection object 200. That is, the conductive contact 2 rotates by a small angle in the clockwise direction in FIG. 4 after the elastic portion 23 contracts and the opening 25 is separated from the rod-like member 4 by force.

[0035] By the rotation described above, the tip Q of the second contact portion 22 moves while pulling on the surface while maintaining the contact state with the surface of the inspection object 200. In this way, the tip of the second contact portion 22 moves on the inspection object 200, thereby removing the oxide film formed on the surface of the inspection object 200 and the dirt adhering to the surface. It is possible to obtain stable electrical contact between them. At that time, if the moving speed (rising speed) of the inspection target 200 is appropriately controlled, an excessive load is applied to the conductive contact 2 in which the tip of the second contact portion 22 does not greatly damage the surface of the inspection target 200. No need to add.

[0036] The conductive contact unit 1 described above is partially fitted in the first guide groove 31a and the second guide groove 3 lb extending along the expansion / contraction direction of the elastic portion 23 of the conductive contact 2. State Holds the conductive contact 2. This prevents the occurrence of buckling and torsion when the elastic part 23 contracts, which is a problem peculiar to the plate-like conductive contact 2, and causes the spring characteristics of the elastic part 23 to deteriorate due to them. You do n’t have to. Therefore, even if a certain load or more is applied to the conductive contact 2 within an appropriate range, a large stoke can be realized without causing buckling or twisting. It is possible to obtain a contact state.

[0037] The inspection object 200 continues to rise slightly after contacting the tip Q of the second contact portion 22 as described above. However, due to the increase of the inspection object 200 after contact, the conductive contact 2 has only a small angle. Rotates to contact the rod-like member 4 and the second guide groove 31b. In the present embodiment, the trapezoidal shape described above is used as the cross-sectional shape of the bar-shaped member 4, so that the number of contact points between the opening 25 and the bar-shaped member 4 is reduced, and the load characteristics of the conductive contact 2 are stabilized. be able to. As a result, the durability of the conductive contact 2 is improved, and the reliability of inspection can be improved.

In the conductive contact unit 1, since the conductive contact 2 is held by the first guide groove 31a and the second guide groove 31b, the conductive contact 2 and the conductive contact holder 3 It is possible to reduce the sliding resistance by reducing the contact area with the (holding portion 31), and the conductive contact 2 can be smoothly expanded and contracted.

[0039] Furthermore, the conductive contactor unit 1 has a groove width of the first guide groove 31a and the second guide groove 31b.

Each interval between the first guide grooves 31a and the second guide grooves 31b adjacent to each other where (w) is the same value as the thickness of the conductive contact 2 is between the adjacent conductive contacts 2. Any small value can be used as long as the insulation can be sufficiently secured. Therefore, it is possible to reduce the arrangement interval of the plurality of conductive contacts 2 and sufficiently cope with the reduction of the arrangement interval of the connection electrodes and terminals of the circuit board 100 and the inspection target 200. be able to.

In addition, in the conductive contact unit 1, the conductive contact 2 is penetrated through the rod-like member 4 to give the conductive contact 2 initial deflection and prevent it from coming off. As a result, the protrusion amount h in which the tip Q of the second contact portion 22, that is, the lower end of the conductive contact 2 protrudes vertically downward from the bottom surface portion 3 d of the conductive contact holder 3 can be reduced. In other words, even if the second contact portion 22 is made smaller, it is possible to prevent bending near the tip and stably hold the conductive contact 2, and the conductive contact 2 closes the first guide groove 31a near the lower end. Yo And / or slipping out of the second guide groove 31b. Therefore, the positional accuracy of the conductive contact 2 is increased, and the reliability and durability of the conductive contact unit 1 can be improved.

[0041] When assembling the conductive contact unit 1, the step of accommodating the conductive contact 2 in the holding portion 31 is performed by inserting the first contact portion 21 side first into the holding portion 31 and then in the width direction. This is completed by fitting the edge portions of the first guide groove 31a and the second guide groove 31b. Therefore, assembling is easy even when compared with the conventional conductive contact unit, and if the manufacturing cost is reduced, the result can be obtained.

[0042] According to the embodiment of the present invention described above, the first contact portion that is formed of a plate-like conductive material and that contacts the circuit structure that outputs a signal for inspection, expands and contracts in the longitudinal direction. A second contact portion that protrudes in a direction in which the tip that contacts the object to be inspected is farther away from the central axis in the width direction of the elastic portion than the edge in the width direction of the elastic portion; A first connecting portion that connects the elastic portion and the first contact portion, and the elastic portion and the second contact portion are connected, and a side that penetrates in the plate thickness direction and is parallel to the longitudinal direction is defined as a long side. A plurality of conductive contacts having a second connection portion provided with a rectangular opening, and a plurality of the conductive contacts fixed to a conductive contact holder holding the plurality of conductive contacts. A bar-shaped member penetrating the opening provided in each of the children, and a longitudinal direction of the bar-shaped member The cross section perpendicular to the direction is substantially equal to the length of the short side of the opening and shorter than the length of the short side of the opening! /, And has two lengths parallel to the short side of the opening. To provide a conductive contact unit with excellent durability by forming a shape obtained by removing a region including at least a part of a short side located below from a rectangular shape having two short sides. Can do.

[0043] Further, according to the present embodiment, even if the number of inspections increases and the friction between the conductive contacts decreases, the number of contact points between the conductive contacts and the rod-shaped member may increase. The load characteristics of the conductive contact can be stabilized. As a result, the durability of the conductive contact is improved and stable inspection is possible.

[0044] The best mode for carrying out the present invention has been described in detail so far, but the present invention should not be limited only by the above-described embodiment. FIG. 6 to FIG. 8 are cross-sectional views showing other configuration examples of the rod-shaped member provided in the conductive contact holder according to the present invention. this house The rod-like member 5 shown in FIG. 6 has a cross-sectional shape that is reversed from the rod-like member 4 in the above embodiment in the drawing. Further, the rod-like member 6 shown in FIG. 7 has a pentagonal cross section having two sets of parallel opposite sides. Furthermore, the rod-shaped member 7 shown in FIG. 8 has a right-angled triangular cross section. 6 to 8, the apex portion in each cross section is chamfered to improve the slidability of the conductive contact 2 and forms an R shape.

[0045] As described above, the cross section perpendicular to the longitudinal direction of the rod-shaped member provided in the conductive contact holder according to the present invention is a short of the opening of the conductive contact when the conductive contact is held. Positioned downward from a rectangle that has two sides that are approximately equal to the length of the side and shorter than the length of the short side of the opening! /, And have two sides parallel to the short side of the opening. It suffices if the shape is obtained by removing a region including at least a part of the short side. In addition, the ratio of the sides! /, Even if it is determined appropriately according to conditions such as rigidity required for the rod-shaped member! /,

Incidentally, the conductive contact unit according to the present invention is not limited to the case of inspecting a liquid crystal panel, but as a high-density conductive contact unit used for inspection of a package substrate mounted with a semiconductor chip or a wafer level. Is also applicable.

As is apparent from the above description, the present invention can include various embodiments and the like not described herein, and deviates from the technical idea specified by the claims. Various design changes and the like can be made without departing from the scope.

Industrial applicability

As described above, the conductive contact unit according to the present invention is useful when conducting a conduction state inspection or an operation characteristic inspection in an electronic component such as a liquid crystal panel or a semiconductor integrated circuit.

Claims

The scope of the claims

[1] A conductive contact unit that transmits and receives signals between a circuit structure that outputs inspection signals and an inspection target,

A first contact portion that is formed of a plate-shaped conductive material and contacts a circuit structure that outputs a signal for inspection, an elastic portion that can expand and contract in the longitudinal direction, and a tip that contacts the inspection object. A second contact portion that protrudes in a direction away from the central axis in the width direction of the elastic portion than the edge portion in the width direction of the elastic portion, a second contact portion that connects the elastic portion and the first contact portion. 1 connection part and 2nd connection which provided the rectangular-shaped opening part which connected the said elastic part and the said 2nd contact part, and penetrated in the plate | board thickness direction and made the side parallel to the said longitudinal direction into a long side A plurality of conductive contacts having a portion;

A plurality of first guide grooves which are one edge in the longitudinal direction of the conductive contact and the second contact protrudes and holds the edge on the side, and the plurality of first A conductive contact having a plurality of second guide grooves that are positioned opposite to each of the one guide grooves and that fit and hold the other edge of the conductive contact that is fitted into the opposed first guide grooves. A holder,

A bar-shaped member fixed to the conductive contact holder and penetrating through the opening provided in each of the plurality of conductive contacts;

With

The cross section perpendicular to the longitudinal direction of the rod-shaped member is two sides having a length substantially equal to the length of the short side of the opening and shorter than the length of the short side of the opening. A conductive contact unit characterized by having a shape obtained by removing a region including at least a part of a short side located below from a rectangle having two short sides parallel to the short side.

2. The conductive contact unit according to claim 1, wherein a cross section perpendicular to the longitudinal direction of the rod-shaped member has a trapezoidal shape.

3. The conductive contact unit according to claim 2, wherein the ratio of the length of the upper base to the length of the lower base in the trapezoidal cross section is 2: 1.

4. The conductive contact unit according to claim 1, wherein a cross section perpendicular to the longitudinal direction of the bar-shaped member has a pentagonal shape having two sets of parallel opposite sides.

5. The conductive contact unit according to claim 1, wherein a cross section perpendicular to the longitudinal direction of the rod-shaped member has a right triangle shape.

[6] The tip of the second contact portion is an outer surface of the conductive contact holder and is in a direction normal to the outer surface of the outer surface of the portion where the first guide groove is formed inside. The conductive contact unit according to claim 1, wherein the conductive contact unit protrudes.