JP3577416B2 - Electrical connection device - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an electrical connection device used for testing a flat test object such as an integrated circuit and a liquid crystal display panel.
[0002]
[Prior art]
Inspection or testing of the electrical characteristics of a package or molded semiconductor device, particularly an integrated circuit (IC), generally involves testing an electrical connection device such as a test socket or test socket for removably mounting the semiconductor device. This is performed using the device.
[0003]
As one type of this type of connecting device, a crank-shaped contact, in which a needle tip portion that is in contact with a lead (electrode portion) of a semiconductor device and a needle rear portion that is connected to a conductive portion of a substrate are bent in opposite directions, that is, Some use a probe (Japanese Patent Application Laid-Open No. 7-229949). In this conventional connection device, each probe is attached to a common needle holder with an adhesive at the center between the needle tip and the needle rear so that the needle tip extends upward and the needle rear extends downward. Is done.
[0004]
However, this conventional connection device requires skill in assembling such as attaching a probe to a needle holder, soldering a rear portion of a needle to a conductive portion of a substrate, and also requires an effective range of the probe (from the tip of the probe). Due to the large length dimension (up to the point of contact with the conductive part), there is a limit to increasing the frequency of the electrical signal used for the test.
[0005]
As another connection device, there is a device using a Z-shaped or annular plate-shaped probe (US Pat. No. 5,336,094, US Pat. No. 5,388,996). However, in this conventional auxiliary device, since each probe is pressed against the electrode portion of the device under test at its arc-shaped deformed surface portion, even if the deformed surface portion is pressed against the electrode portion of the device under test, the deformed surface portion with respect to the electrode portion is not affected. Since the rubbing action caused by the displacement of the electrodes does not occur, a film such as an oxide film existing in the electrode portion is not effectively removed, and as a result, good electrical contact between the probe and the electrode portion is not obtained. .
[0006]
As one of the connection devices for testing the electrical characteristics of a packaged or unmolded semiconductor device, particularly an IC chip, there is a device using a probe bent in a C-shape (Japanese Patent Application Laid-Open No. Hei 5-299483). However, in this conventional connection device, since each probe is merely maintained in the socket by its spring force, both ends of the C-shape of the probe must be further curved, so that the shape of the probe is complicated and expensive. is there.
[0007]
[Problem to be solved]
Therefore, in the electrical connection device for testing a device under test, when the tip of the probe is pressed against the electrode portion of the device under test, the probe is reliably elastically deformed without retreating and the electrode portion of the device under test is It is important that the probe has a simple shape, is stable, is compatible with high-frequency tests, and is easy to manufacture, despite providing an effective rubbing effect on the probe.
[0008]
[Solutions, actions, and effects]
The connection device of the present invention includes a plurality of probes each of which electrically connects the electrode portion and the conductive portion, and an assembling device that attaches the probes to the substrate in parallel. Each probe has a deformed portion curved in an arc shape, a stylus tip which is a stylus tip following one end of the deformed portion and has a tip pressed against an electrode portion of the device under test, and a probe other than the deformed portion. It is a blade type probe having a needle rear part following an end part. The assembling device is a recess extending in the arrangement direction of the probe, the recess having an arc-shaped inner surface facing the retreat preventing portion facing forward and preventing the retreat of the probe, and the deforming portion or the An elastically deformable needle holding portion that contacts the inner surface, the deformed portion, and the rear end portion so that at least a part of the needle rear portion contacts the conductive portion. The probe further includes a rear end surface that is in contact with the anti-backup portion.
[0009]
Although the probe has a deformed portion, its shape is simpler and less expensive than a conventional C-shaped probe. In addition, a part of the probe is disposed between the substrate and the needle holder, and the probe is in contact with the conductive part and the needle holder at least at a part of the deformed part or the needle rear part. This stabilizes the probe and facilitates the assembly of the connection device.
[0010]
In each probe, the tip of the needle tip is pressed against the electrode portion of the device under test. As a result, the overdrive acts on each probe, but each probe does not retreat because the probe is in contact with the retraction preventing portion at the rear end.
[0011]
For this reason, each probe is surely elastically deformed at a portion closer to the needle tip than the contact portion with the conductive portion, or each probe is surely elastically deformed at the needle holding portion, so that the tip ends to the electrode portion. Displaced. As a result, a part of the film such as an oxide film existing in the electrode portion is scraped (or scraped) by the tip of the needle tip, and the probe and the electrode portion are maintained in a good electrical connection state. .
[0012]
The effective range of the probe is on the tip side of the contact portion with the conductive portion. For this reason, the effective range of the probe is smaller than that of the conventional probe, the leakage of the electric signal between the adjacent probes is small, and the probe is suitable for the high frequency test.
[0013]
The probe may have an outer portion that extends in an arc shape and that contacts the conductive portion when at least the electrode portion is pressed against a needle tip. Thereby, the contact portion of the outer portion with the conductive portion changes toward the needle tip side as the pressing force by the test object increases.
[0014]
The assembling apparatus includes one or more covers assembled to the board, the covers having the recesses, and the recesses being open to the side of the board; and an arrangement direction of the probes received in the recesses. And a needle holder having the needle holder. As a result, since the needle holder is not displaced with respect to the cover, the probe is more stabilized, and the assembling work is easier.
[0015]
The cover further includes a plurality of slots spaced apart in a longitudinal direction of the needle holder, the slots being open to the substrate side and the object to be inspected and communicating with the recess. The tip of each probe can penetrate the slot and project its tip out of the slot. Accordingly, the position of the needle tip in the probe arrangement direction is regulated by the slot, so that the probe is more stabilized and the assembling work is easier.
[0016]
Instead of the above, the cover further includes a plurality of slots that are open to the substrate side and communicate with the recesses, the plurality of slots being spaced in the longitudinal direction of the needle holder. Can arrange at least a part of the deformation portion in the slot. Also in this case, since the position of the probe in the arrangement direction of the probe is regulated by the slot, the probe is further stabilized, and the assembling work is easier.
[0017]
The probe may include a rear end surface contacting the anti-backup portion. However, a stopper disposed on the cover to form the retraction preventing portion may be provided on the assembling device.
[0018]
In a preferred embodiment, the probe is curved in an arc at least at the deformation.
[0019]
BEST MODE FOR CARRYING OUT THE INVENTION
Referring to FIGS. 1 to 6, an electrical connection device 10 is used as an auxiliary device used for inspection, that is, a test of a flat inspection object 12. In the illustrated example, the device under test 12 is a semiconductor device such as a package or a molded integrated circuit. However, the present invention is directed to an electrical device for testing another flat device under test such as a liquid crystal display panel. It can also be applied to connection devices.
[0020]
The device under test 12 has a main body portion 14 packaged or molded in a rectangular planar shape, and a plurality of leads, that is, electrode portions 16 protruding outward from portions corresponding to respective sides of the rectangular shape. The electrode portions 16 are divided into a plurality of electrode portion groups corresponding to the respective sides of the rectangle, and are arranged in parallel for each electrode portion group.
[0021]
The auxiliary device or connection device 10 includes a substrate 20, a plurality of contacts or probes 22, a plurality of needle holders 24 for pressing the probes 22 against the substrate 20, and a flat cover 26 for assembling the needle holders to the substrate 20. including.
[0022]
The board 20 is a wiring board in which a wiring pattern is formed on one surface of an electrically insulating material by a printed wiring technique, and a plurality of strip-shaped printed wiring portions, that is, conductive portions 28 each corresponding to the probe 22 are provided on one surface. To have. Each conductive part 28 is a part of a wiring pattern. The conductive portions 28 are divided into a plurality of conductive portion groups corresponding to the respective rectangular sides of the main body 14 of the device under test 12, and are arranged in parallel for each conductive portion group.
[0023]
As shown in FIG. 7, each probe 22 is formed in the shape of an elastic non-conductive thin wire, and has a tip portion 30 having a tapered tip portion and an arc-shaped needle main portion, that is, a deformed portion 31. , And is curved in a semicircular shape over the entire range up to the needle rear portion 32.
[0024]
Each probe 22 has a conductive film formed on a portion other than the rear portion of the needle indicated by reference numeral 32 in FIG. 7, that is, on the entire outer surfaces of the needle tip portion 30 and the deformed portion 31. As a result, the portion in front of the portion in contact with the conductive portion 28 has conductivity, but the rear portion 32 of the needle has non-conductivity. Leakage of test electrical signals, especially between adjacent probes, is eliminated.
[0025]
However, each probe 22 may form the core in the form of a conductive thin wire, preferably a metal thin wire, and form a nonconductive coating on the needle rear portion 32 of the core. The probe 22 may be formed from a thin wire such as a metal, a ceramic, a synthetic resin, or the like, or may be formed by other processing methods such as press working and etching using these materials.
[0026]
Each probe 22 has a circular cross-sectional shape in the example shown in FIGS. In the examples shown in FIGS. 1 to 7, the probe 22 is a so-called flea needle whose tip, that is, the tip extends at right angles to the curved surface of the probe 22.
[0027]
However, the probe 22 may be a so-called ono-type needle whose tip extends in parallel with the curved surface of the probe 22, as in a probe 50 shown in FIG. 8, and has a conical or pyramid-shaped needle tip. It may be shaped. The cross-sectional shape of the probe may be circular or square.
[0028]
The probes 22 are divided into a plurality of probe groups corresponding to each rectangular side of the main body 14 of the device under test 12. In the illustrated example, the probe 22 is divided into four probe groups because the inspection object 12 has a plurality of electrode portions on each of four sides of the rectangle. For the same reason, four needle holders 24 are provided in the illustrated example.
[0029]
Each needle holder 24 is formed in a columnar shape by a cylindrical holding rod 34 and an electrically insulating elastic material layer 36 formed on the outer peripheral surface of the holding rod 34. The holding rod 34 can be a conductive or non-conductive rod-shaped member. The electrically insulating layer, that is, the elastic material layer 36 can be a tube formed of a rubber material such as silicon rubber. However, the needle holder 24 may be formed in a rod shape with a single member such as rubber that can be elastically deformed.
[0030]
The cover 26 has an opening 38 formed at the center to accommodate the device under test 12, a plurality of slots 40 formed outside the opening 38 and extending outward with respect to the opening 38, and It has a plurality of recesses 42 formed and continuously extending in the arrangement direction of the slots 40. Such a cover 26 can be formed from a non-conductive material.
[0031]
The opening 38 has a rectangular shape similar to that of the test object 12, and each corner is formed in an arc shape. The upper part of the opening 38 is made smaller toward the lower side by an inclined surface 38a facing from the outside toward the center. Each corner of the opening 38 is an arc surface.
[0032]
The slots 40 are slots for accommodating at least the deformed portion 31 and the needle rear portion 32 of the probe 22, and therefore are provided in the same number as the probes 22 in the illustrated example. The slots 40 are divided into a plurality of groove groups corresponding to the rectangular sides forming the openings 38, and are formed in parallel for each slot group. Each slot 40 opens to the side of the substrate 20, that is, downward, and opens to the opening 38.
[0033]
Adjacent slots 40 are defined by partition walls 44. In the illustrated example, the partition wall 44 is provided so as to partition the rear half of the slot 40, so that adjacent slots 40 are continuous at the opening 38. However, the partition wall 44 may be provided so as to partition the entire slot 40.
[0034]
The recess 42 corresponds to each of the sides of the rectangle forming the opening 38 and extends along the corresponding side. In the illustrated example, four recesses 42 are provided. Each recess 42 is a semi-cylindrical groove for accommodating the needle holder 24, and is open to the bottom of the corresponding slot 40. The groove bottom surface of each recess 42 has an upwardly convex cross-sectional shape.
[0035]
The connection device 10 arranges each needle holder 24 in the recess 42 and arranges each probe 22 in the slot 40 with its rear end in contact with the inner bottom surface (the upper surface in the illustrated example) of the slot 40, that is, the end surface 40a. Then, in this state, the probe 22, the needle holder 24 and the cover 26 are overlaid on the substrate 20, and in this state, the cover 26 is mounted on the substrate 20 by a plurality of screw members 46 such as bolts.
[0036]
Each screw member 46 passes through the cover 26 in the thickness direction, and is screwed into a screw hole formed in the substrate 20. As a result, the probe 22 is pressed against the conductive portion 28 of the substrate 20 by the needle holder 24 at a part of the arcuate curved portion, that is, the deformed portion 31, and is held between the substrate 20 and the needle holder 24, and is maintained in that state. Is done.
[0037]
In the illustrated example, the needle holder 24, the cover 26, and the screw member 46 function as an assembling device that assembles the probe 22 to the substrate 20 in parallel. In addition, the lower half of each needle holder 24 protrudes in an arc shape from the recess 42 toward the substrate 20 and extends in the direction in which the probes 22 are arranged, so that the probe 22 is pressed inside the curved portion of the probe 22 so as to press the probe 22 against the substrate 20. Acts as a contacting needle holder.
[0038]
The probes 22 are arranged in the slots 40 in such a manner that the probe tips 30 project upward into the openings 38, and are simply brought into contact with the substrate 20 with the probe holders 24. be able to. Therefore, the connection device 10 can be easily manufactured.
[0039]
In a state where the probe 22 is assembled to the connection device 10, at least the needle rear portion 32 is received in a portion defined by the partition wall 44 of the slot 40, and the probe 22 is connected to the substrate via an elastic material layer 36 made of an electrically insulating material. Since it is pressed by 20, it is stably maintained by the slot 40 and the needle holder 24, and the electrical contact with the adjacent probe is reliably prevented.
[0040]
In the assembled state, each probe 22 is pressed by the conductive portion 28 at an arc-shaped curved portion where the electric insulating layer 32 is not present, that is, at the arc-shaped outer portion of the deformed portion 31. Acts as a deformation part.
[0041]
Since each probe 22 is pressed against the conductive portion 28 at a portion where the electric insulating layer 32 does not exist, the effective range of the probe 22 is from the contact portion of the probe 22 to the conductive portion 28 to the tip of the needle. Smaller than the connection device. In addition, as shown in FIG. 5, the elastic material layer 36 is elastically deformed by being pressed by the substrate 20, the cover 26, and the pressing rod 34, so that each probe 22 is firmly maintained. The pressing rod 34 and the elastic material layer 36 may be eccentric to each other in advance as shown in FIG. 5, or may be eccentric to each other in an assembled state.
[0042]
At the time of inspection, the inspection object 12 is put into the opening 38 from above. At this time, if the position of the test object 12 with respect to the connection device 10 is shifted, the test object 12 comes into contact with the inclined surface 38a and is guided to the center of the opening 38 by the inclined surface 38a. As a result, as shown in FIG. 5, the device under test 12 is housed in the connection device 10 in a state where the electrode portion 16 is in contact with the tip of the probe 22, that is, the tip.
[0043]
When the test object 12 arranged in the connection device 10 is pushed down by the pressing body 48, each probe 22 is deformed as shown in FIG. At this time, a force acts on the probe 22 to retreat the probe 22 along the arcuate outer surface of the deformable portion 31. However, since the rear end face of each probe 22 is in direct contact with the end face 40a of the slot 40, each probe 22 does not move (retreat) around the needle holder 24 in the circumferential direction.
[0044]
However, when the probe 22 and the test object 12 are pressed, each probe 22 has a larger radius of curvature without the probe retreating in the circumferential direction of the needle holder 24 (the bending direction of the deformable portion 31). The elastic material layer 36 is elastically deformed at a position closer to the needle tip than the contact portion of the conductive portion 28, and the elastic material layer 36 is elastically deformed so that it is compressed and deformed.
[0045]
As a result, the tip of each probe 22 is displaced with respect to the electrode portion 16, so that a rubbing action (or a scraping action) for removing a part of the film present on the surface of the electrode portion 16 occurs. . In addition, each probe 22 has its rear end partially recessed into the elastic material layer 36, thereby preventing the needle tip 30 from falling down in the axial direction of the needle holder 24.
[0046]
As shown in FIG. 6, when the probe 22 is elastically deformed, the contact portion of the probe 22 with the conductive portion 28 changes to the side of the needle tip. In addition, since the elastic material layer 36 is dented by the rear end of the probe, the rear end of the probe 22 tends to separate from the inner surface of the recess 40. However, the probe 22 is pushed back by the restoring force of the needle holder 24 and slides slightly with respect to the conductive portion 28.
[0047]
This slippage is a movement in which the probe 22 is displaced with its rear end surface in contact with the inner surface 40a (that is, the probe 22 is not a movement in which the probe 22 retreats along the outer periphery of the needle holder 24), and therefore has a large radius of curvature. Such elastic deformation of the probe 22 is not affected by the above-described slip, and the probe 22 is surely elastically deformed.
[0048]
According to the connection device 10, as described above, the shape of the probe is simple, the probe is inexpensive, the effective range of the probe 22 is small, and the probe 22 is suitable for a high-frequency test, and the probe is stably maintained. Nevertheless, the fabrication of the connection device is easy. In addition, the device under test 12 is naturally and correctly arranged on the connection device 10, and the electrode portion 16 of the device under test 12 surely comes into contact with the tip of the needle and is elastically deformed without retreating, so that the electrode portion 16 is rubbed against the electrode portion 16. The action occurs effectively. Further, the structure of the needle holder 24 is simple, and electrical short-circuit between the probes 22 is reliably prevented.
[0049]
Referring to FIG. 9, the probe 52 has a needle rear portion 32 having an electrically insulating layer, which is bent upward to form a J-shape, and the needle rear portion 32 is inserted into the needle holder 24, and the probe 52 has a deformed portion. 31 is pressed by the conductive portion 28 at the arc-shaped rear end. Also in this embodiment, the probe 52 has its needle rear part 32 prevented from moving with respect to the needle holder 24, so that the contact portion of the probe 52 with the conductive portion changes to the needle tip side. Do not move around in the circumferential direction.
[0050]
That is, when the probe 52 is pushed down by the test object, a force acting on the probe 52 to retreat the probe 52 along the outer surface of the deformed portion 31 is applied. However, since the rear end of the probe 52 is inserted into the needle holder 24, the probe 52 is elastically deformed so as to increase the radius of curvature of the deformable portion 31 without retreating in the circumferential direction of the needle holder 24. Therefore, even when the probe 52 is used, the same operation and effect as in the case where the probe 22 is used can be obtained.
[0051]
Referring to FIG. 10, the probe 54 has a rear end (particularly, a rear end surface) abutted on a stopper 56 formed of a leaf spring for preventing retreat. The stopper 56 is provided for each probe group, and is attached to the cover 26 by a plurality of screw members 58. The stopper 56 can be formed from an electrically insulating plate material, but may be formed by forming an electrical insulating layer on the surface of a conductive plate material, and furthermore, the rear end of each probe has non-conductivity. If so, a conductive plate may be used.
[0052]
Also in the embodiment shown in FIG. 10, the probe 54 does not move around the needle holder 24 in the circumferential direction because the rear end of the probe abuts the stopper 56 and is prevented from moving backward with respect to the needle holder 24. For this reason, when the probe 54 is pushed down by the test object, the probe 54 is elastically deformed so that the radius of curvature of the deformable portion 31 increases. Therefore, even when the probe 54 is scattered, the same operation and effect as in the case where the probe 22 is used can be obtained.
[0053]
Referring to FIG. 11, the probe 60 has a convex portion 62 and a concave portion 64 at a portion that comes into contact with the conductive portion 28. The probe 60 is pressed against the conductive part 28 at the convex part 62. Therefore, in the case of the probe 60, a portion having the convex portion 62 functions as a deformed portion.
[0054]
According to the probe 60, since the convex portion 62 is engaged with the conductive portion 28, the movement of the probe 60 with respect to the needle holder 24 is performed by the engagement between the convex portion 62 and the conductive portion 28, as in the probe described above. When the rear end of the probe 60 is brought into contact with the end surface of the slot, the inner surface of the recess or the stopper, the probe 60 is more reliably prevented. For this reason, the electrical connection between the conductive portion 28 and each probe becomes more reliable.
[0055]
In each of the above embodiments, a needle holder having a semi-cylindrical shape may be used instead of the needle retainer 24 having a part of the columnar portion as the convex part used as the needle retainer, or a semi-cylindrical convex part. May be used as a needle holder. Further, the needle holder may be a simple non-conductive rod-shaped member that does not use an elastic material as long as at least the outer surface has non-conductivity.
[0056]
Referring to FIG. 12, a connection device 70 uses a probe 72 formed in a substantially U-shape. The probe 72 is formed in a substantially U shape by a needle tip portion 74, a needle main portion, that is, a deformed portion 76, and a needle rear portion 78. The needle tip portion 74 and the needle rear portion 78 linearly extend substantially parallel to each other upward from the tip end and the rear end of the deformable portion 76, respectively. At least the outer peripheral surface of the needle tip portion 74 and the deformed portion 76 is made conductive.
[0057]
The deforming portion 76 extends obliquely upward from the rear end side toward the needle tip portion 74, and is curved obliquely downward with a large radius of curvature. Needle rear portion 78 may be conductive or non-conductive. The needle rear part 78 has a larger cross-sectional shape than the needle tip part and the deformed part 76. The probe 72 has either a circular or rectangular cross-sectional shape. For this reason, the probe 72 has either a thin line or a band shape.
[0058]
The cover 80 of the connection device 70 has an opening 38 formed at the center to accommodate the device under test 12, a plurality of slots 82 extending in parallel outward from the opening 38, and formed outside the opening 38. It has a plurality of recesses 84 extending continuously in the arrangement direction of the slots 82. Such a cover 80 can be formed from a non-conductive material. The opening 38 is the same as the opening 38 of the cover 26 in the connection device 10. For this reason, the upper part of the opening 38 is an inclined surface 38a.
[0059]
The slots 82 are grooves for accommodating at least a part of the deformed portion 76 of the probe 72, and thus are provided in the same number as the probes 72 in the illustrated example. The slots 82 are divided into a plurality of slot groups corresponding to the sides of the rectangle forming the opening 38, and are formed in parallel for each slot group. Each slot 82 opens to the side of the substrate 20, that is, downward, and opens to the opening 38 at the top end.
[0060]
Adjacent slots 82 are defined by partition walls 86. The ends of the adjacent partition walls 86 on the side of the opening 38 are connected by a wall 88 closing the corresponding end of the slot 82. However, the end of the adjacent partition wall 86 on the side of the opening 38 may not be connected, and the corresponding end of the slot 82 may be opened.
[0061]
The recesses 84 correspond to each of the sides of the rectangle forming the opening 38 and extend along the corresponding sides. In the illustrated example, four recesses 84 are actually provided. Each of the recesses 84 is a groove having a rectangular cross section for accommodating the needle holder 90, and is opened at the rear end of the corresponding slot 82 and on the side of the substrate 20. Each recess 84 has a rectangular cross-sectional shape.
[0062]
Each needle holder 90 is formed in a rectangular cross section by an elastic material such as rubber, and is fitted in the recess 84. In the illustrated example, the needle presser 90 communicates with a slot 82 for receiving a part of the deformed portion 76 and the needle rear portion 78 of the probe 72. groove Having. However, such a slot may be formed in the cover 80 or may not be formed in either the cover 80 or the needle holder 90 depending on the shape and size of the probe.
[0063]
The connecting device 70 arranges each of the probes 72 so that the needle holders 90 are arranged in the recesses 84, the deformed portions 76 of the probes 72 are in the grooves 82, and the needle rear portions 78 are in the recesses 84. In this state, the probe 72, the needle holder 90 and the cover 80 are overlaid on the substrate 20, and in this state, the cover 80 is mounted on the substrate 20 with a plurality of screw members such as bolts, whereby assembly can be performed.
[0064]
In a state in which the probe 72 is assembled in the connecting device 70, each probe 72 is pressed against the conductive portion of the substrate 20 by the needle holder 90 at the rear end of the deformed portion 76. The tip of each probe 72 protrudes upward from the slot 82 into the opening 38, the needle rear part 78 of each probe 72 is pressed against the inner wall surface forming the slot 82 by the needle holder 90, and the rear end face of each probe 72 is a needle. It is received by the presser foot 90. Therefore, each probe 72 is pressed against the substrate 20 on the rear end side of the deformed portion 76.
[0065]
When the tip of the needle tip portion 74 is pressed against the electrode portion 16 of the device under test 12, the probe itself is elastically deformed so that the needle tip portion 74 and the needle rear portion 78 are opened. 90 is elastically deformed. As a result, the probe 72 rubs the electrode portion 16 at its tip, and removes a part of the film such as an oxide film present on the surface of the electrode portion 16.
[0066]
The force for retreating the probe 72 is a force for displacing the probe 72 along the arcuate outer surface of the deformed portion 76. Since the inner surface 84a of the place 84 is indirectly in contact with the inner surface 84a through the needle holder 90, the inner surface 84a is blocked. However, the rear end surface of the probe 72 may be brought into direct contact with the inner surface 84a of the recess 84 by the needle holder 90, and the probe 72 may be pressed against the substrate 20 by the needle holder 90.
[0067]
The connection device 70 not only has the same operation and effect as the connection device 10 but also stabilizes the probe 72 because the needle rear part 78 is pressed against the inner surface of the recess 84 by the needle holder 90.
[0068]
Referring to FIG. 13, the connecting device 100 is different from the connecting device 10 shown in FIGS. 1 to 6 in that a plurality of probes 102 having a shape shown in FIG. Is used.
[0069]
Each probe 102 includes a needle tip 30 and a deformed portion 31 formed of a conductive thin wire having elasticity, and a needle rear portion 104 coupled to a rear end of the deformed portion 31. It is curved in an arc with the same curvature over the entire range up to. The needle rear portion 104 is formed of an electrically insulating resin material such as a synthetic resin.
[0070]
The tip portion of the probe tip 30 of each probe 102 is a tapered portion that becomes thinner toward the tip, and the portion behind the tip portion is a rod-shaped portion having a circular cross section. The rear end of the deformed portion 31 of each probe 102 has a notch 106 on the upper side for increasing the coupling force with the needle rear portion 104.
[0071]
The inner portion of the rear end of the deformed portion 31 of each probe 102 is covered by the needle rear portion 104, but the outer portion is exposed without being covered by the needle rear portion 104. Such a probe 102 can be manufactured by forming the needle rear portion 104 using an electrically insulating material such as a synthetic resin. The end face of the probe 102 is in direct contact with the inner bottom face of the slot 40, that is, the end face 40a.
[0072]
The connecting device 100 using a plurality of probes 102 is different from the connecting device 100 shown in FIG. 13 in that the deformed portion 31 of each probe 102 is pressed by the conductive portion 28 at the outer portion of the coupling portion to the needle rear portion 104. It can be assembled in the same manner as the connecting device 10, operates in the same manner as the connecting device 10, and produces the same effects as the connecting device 10.
[0073]
Instead of using a plurality of independent probes in the connection device 10 or 100, as shown in FIG. 15, one or more needle assemblies 110 in which a plurality of probes are connected at the back of the needle may be used.
[0074]
Each probe 112 used in the needle assembly 110 is formed similarly to the probe 102 shown in FIG. 14 except that a plurality of probes 112 are connected by a common needle rear portion 114 at the rear end of the deformed portion 31. ing.
[0075]
Therefore, the needle tip portion 30 and the deformed portion 31 of each probe 112 are the same as those of the probe 102 shown in FIG. 14, and the deformed portion 31 of each probe 112 increases the coupling force with the common needle rear portion 114. Notch 106 on the upper side. The common needle rear portion 114 has an elongated shape curved into a shallow gutter shape by a non-conductive material, and is curved in an arc with the same curvature together with the needle tip portions 30 and the deformed portions 31 of the plurality of probes 112. .
[0076]
The common needle rear portion 114 may be common to each probe group on each side of the rectangle formed by the opening 38 of the cover 26, or may be common to two or more probes. Further, since the adjacent probes 112 are connected to the common needle rear portion 114 in the deformed portion 31, the cover 26 of the connection device using the probe assembly 110 does not include the groove 40 and the partition wall 44. However, a slot for receiving only the needle tip portion 30 and the deformed portion 31 of each probe 112 may be provided.
[0077]
Therefore, slot 40 is a continuous common slot. However, a portion of the common slot 40 that receives only the needle tip 30 and the deformed portion 31 of each probe 112 may be separated by a partition. The retraction of the probe 112 is prevented by the rear end surface of the common needle rear portion 114 abutting the inner bottom surface or end surface of the common slot.
[0078]
The inside portion of the rear end of each deformed portion 31 is covered by the common needle rear portion 114, but the outside is exposed without being covered by the common needle rear portion 114. The needle assembly 110 can also be manufactured by molding using an electrically insulating material such as a synthetic resin as the common needle rear portion 114.
[0079]
The connecting device using the needle assembly 110 can be assembled and used in the same manner as the connecting devices 10 and 70. In addition to having the same operation and effect as the connecting device 10, the needle rear portion 114 of the plurality of probes 112 can be used. The common connection provides the advantage that the needle assembly 110 is easier to manufacture and assemble into a connection device.
[0080]
Referring to FIG. 16, a connecting device 120 uses a plurality of probes 122 having the shape shown in FIG. 17, instead of using the probe 72 integrally extending from the front end to the rear end in the connecting device 70 shown in FIG. .
[0081]
As shown in FIG. 17, each probe 122 is formed in a substantially U-shape by a needle tip portion 74, a deformed portion 76, and a needle rear portion 124. The tip portion 74 and the deformation portion 76 are the same as those of the probe 72 shown in FIG. Therefore, the needle tip 74 and the deformable portion 76 are formed in an L-shape in which the needle tip 74 linearly extends upward from the tip of the deformable portion 76.
[0082]
The deformed portion 76 of each probe 122 has a notch 126 on the upper side for increasing the coupling force with the needle rear portion 124. The upper (inner) portion of the rear end of the deformed portion 76 is covered by the needle rear portion 124, but the lower (outer) portion is exposed without being covered by the needle rear portion 124.
[0083]
The needle rear portion 124 is formed of a non-conductive material such as a synthetic resin, and linearly extends upward from the rear end of the deformed portion 76 substantially parallel to the needle tip portion 74.
[0084]
Similarly to the probe 102 shown in FIG. 14, the probe 122 can be manufactured by molding using an electrically insulating material such as a synthetic resin for the needle rear portion 124. The connection device 120 can be used in the same manner as the connection devices 10, 70, and 100, and has the same functions and effects as the connection devices 10, 70, and 100.
[0085]
Instead of using a plurality of independent probes in the auxiliary device 70 or 120, as shown in FIG. 18, one or more needle assemblies 130 in which a plurality of probes are connected at the back of the needle may be used.
[0086]
Each probe 132 used in the needle assembly 130 is formed in the same manner as the probe 122 shown in FIG. 17 except that a plurality of probes 132 are connected by a common needle rear portion 134 at the rear end of the deformed portion 76. ing.
[0087]
Therefore, the deformed portion 76 of each probe 132 has a cutout 126 on the upper side for increasing the coupling force with the common needle rear portion 134, and the common needle rear portion 134 has a comb shape made of a non-conductive material.
[0088]
The needle assembly 130 has a substantially U-shape due to the needle tip portions 74 and the deformed portions 76 of the plurality of probes 132 and the common needle rear portion 134. The cover of the connection device using the needle assembly 130 may not have the wall 86 or 88 shown in FIG.
[0089]
The deformed portion 76 of each probe 132 has a cutout 126 on the upper side for increasing the coupling force with the needle rear portion 124. The upper (inner) portion of the rear end of the deformed portion 76 is covered by the needle rear portion 124, but the lower (outer) portion is exposed without being covered by the needle rear portion 124.
[0090]
The connecting device using the needle assembly 130 can be assembled and used in the same manner as the connecting devices 70 and 120, and has the same operation and effect as the connecting devices 70 and 120. The advantage is that the assembly of the needle assembly 130 and its assembly into the connecting device are facilitated because the joints 134 are common.
[0091]
In the above embodiment, the cover is formed by a single member, but the cover may be formed by a plurality of members. For example, the cover may be formed by a plate-like member having an opening 38 and a member having a slot and a recess, or a plate-like member having an opening 38, a member having a slot, and a member having a recess. And a plate-like member having an opening 38 and a recess and a member having a slot.
[0092]
Referring to FIG. 19, a connection device 140 uses a plurality of substantially J-shaped probes 142 similar to the probe 122 shown in FIG. Each probe 142 is entirely curved from the needle tip 144 to the rear end of the deformed portion 146. At least the surfaces of the needle tip 144 and the deformed portion 146 of each probe 142 have conductivity.
[0093]
The needle rear portion 148 is formed in an L shape by a non-conductive material such as a synthetic resin, and is fixed to the deformed portion 146. The upper (inner) portion of the rear end of the deformed portion 146 is covered by the needle rear portion 148, but the lower (outer) portion is exposed without being covered by the needle rear portion 148.
[0094]
The needle rear portion 148 is independent for each probe 142. However, a common needle rear portion 148 may be used for adjacent probes. A notch 126 as shown in FIG. 17 or FIG. 18 may be formed on the upper side of the deformable portion 146 in order to increase the coupling force between the deformable portion 146 and the needle rear portion 148.
[0095]
The connection device 140 includes a plurality of elongated covers 150 on which the probes 142 are arranged in parallel, a long needle holder 152 arranged inside each cover 150, and a spacer 154.
[0096]
Each cover 150 is essentially a cover body. For this reason, an auxiliary member having the opening 38 is provided integrally on the cover 150 or assembled with a screw member. As shown in FIG. 19, each cover 150 has a first recess 156 opening on the side of the substrate 20, a slot 158 communicating with the first recess, and a first recess 156. And a second recess 160 opening to the side. The first recess 156, the slot 158, and the second recess 160 extend continuously in the arrangement direction of the probes 142.
[0097]
The needle holder 152 is formed in a rectangular cross section by an elastic material such as hard rubber, and is disposed in the first and second recesses 156 and 160. The spacer 154 has an opening 162 having substantially the same size as the first recess 156, and the cover 150 and the substrate 20 are positioned such that the first recess 156 and the opening 162 are aligned. Placed between. Thus, the spacer 154 acts as a part of the cover 150, and the opening 162 acts as a part of the first recess 156.
[0098]
The plurality of probes 142 are arranged in parallel in the first recess 156. The probes 142 are arranged in parallel with each other so that the needle tip 144 protrudes upward through the slot 158 and the needle rear portion 148 extends into the second recess 160. The rear end of the deformed portion 146 is pressed against the conductive portion 28 of the substrate 20 by the needle holder 152. The probe 142 has its rear end face directly contacted with the inner surface 160a of the second recess 160, and is prevented from retreating.
[0099]
The cover 150 is placed on the common substrate 20 via the spacer 154 in a state where the plurality of probes 142 and the needle holders 152 are accommodated, and is assembled to the substrate 20 together with the spacer 154 by an appropriate means such as a screw member. Thereby, the plurality of probes 142, the cover 150, the needle holder 152, and the spacer 154 are unitized.
[0100]
Each of the connection devices 140 uses a plurality of units as described above. Each unit is assembled on the common substrate 20 so that the arrangement direction of the probe tips of the probes 142 matches the arrangement direction of the electrode portions of the device under test, and the probe tips of the opposing units are opposed to each other. Thus, the electrode portion of the test object is received at the tip of each probe 142.
[0101]
In the illustrated example, the cover 150 does not include a slot for receiving the deformed portion 146 of each probe 142. For this reason, each probe 142 has a spacer 164 in the needle tip 144 that contacts the adjacent probe 142. The spacer 164 is formed in a plate shape from a non-conductive material such as a synthetic resin, and is fixed to one side of the needle tip 144. However, the spacer 164 and the probe 142 may be integrally formed in a state where the needle tip of each probe 142 passes through the corresponding spacer.
[0102]
In the connection device 140, when the object to be inspected is pressed by the probe 142 and an overdrive acts on the tip of the probe 142, the probe 142 is prevented from retreating along the deformable portion 146, and While being elastically deformed so as to increase the radius of curvature, the needle holder 152 is pressed against the inner surface 160b of the recess 160 opposite to the inner surface 160a. Accordingly, the contact portion of the probe 142 with the conductive portion 28 changes to the needle tip side. Further, the probe 142 slightly retreats with respect to the conductive portion 28 due to the upward displacement of the contact portion of the inner surface 160a, but this retraction is caused by the elastic deformation of the probe 142 for the same reason as in the case of the connection device 10. Do not disturb.
[0103]
According to the probe 142, although the probe 142 effectively applies a rubbing action to the electrode portion of the test object, and despite that the cover 150 does not include a slot for receiving the deformed portion 146 of the probe 142. When the needle tip is pressed against the electrode portion of the test object, there is no possibility that the adjacent probe 142 contacts the needle tip side.
[0104]
The spacer 164 may be provided in an auxiliary device using the probes 22, 50, 52, 54, 60, 72, 102, 112, 122, 132 described above. Instead of providing the spacer 164 for each probe, a plurality of adjacent probes may be connected to each other on the needle tip side with a non-conductive material such as a synthetic resin.
[0105]
Modifications of the connection device 140 are shown in FIGS.
[0106]
Referring to FIGS. 20 to 22, the connection device 170 uses a split cover 172. The test object 12 to be inspected by the connection device 170 has a plurality of electrode portions 16 on both sides in the width direction of the main body portion 14. The electrode sections 16 are divided into a plurality of electrode section groups corresponding to each side in the width direction, and are arranged in parallel for each electrode section group.
[0107]
The cover 172 is divided into first and second members 174 and 176 as shown in FIG. 20, and a plurality of screw members 178 and a plurality of positioning pins 180 (both are shown in FIGS. 21 and 22). As a result, they are assembled to the substrate 20 so as to be overlapped with each other.
[0108]
The cover main body, that is, the first member 174 integrates the cover 150 and the spacer 154 in FIG. For this reason, the first member 174 includes an opening that opens to the substrate 20 side, that is, a first recess 184, a plurality of slots 186 communicating with the first recess 184, and a needle holder having a circular cross-sectional shape. And a second recess 188 in which the electrode group 182 is arranged. On the other hand, the auxiliary member, that is, the second member 176 includes the opening 38 having the inclined surface 38a.
[0109]
The slot 186 communicates with the first and second recesses 184 and 188 and penetrates the first member 174 in the thickness direction. The second recess 188 extends continuously in the direction in which the plurality of probes 190 are arranged, and is open to the substrate 28 side.
[0110]
Each probe 190 is a plate-shaped probe (blade type needle) formed in a substantially J-shape from a conductive metal material. The probe 190 has a needle tip 192 having a needle tip, a deformed portion 194 that integrally follows the rear end of the needle tip 192, and a needle rear portion 196 that integrally follows the rear end of the deformable portion 194.
[0111]
The needle tip 192 extends through the slot 186 to project the needle tip into the opening 38. The deformation portion 194 is curved in an arc shape, and a part of the deformation portion 194 is received in the first recess 184. The needle rear portion 196 has its rear end surface in contact with the inner surface 188a of the second recess 188, and is prevented from retreating.
[0112]
The needle holder 182 is formed in a rod shape from an elastic material such as rubber in the illustrated example, and extends in the longitudinal direction of the second recess 188. The needle presser 182 presses the probe 190 so that the probe 190 is brought into contact with the conductive portion 28 in the deformed portion 194 in a state where the probe 190 is assembled in the connecting device 170.
[0113]
Since the connecting device 170 uses the blade type probe 190, when the device under test is pressed against the tip of the probe 190, the needle holder 182 is pressed against the arc-shaped inner surface 188 b by the needle rear portion 196. As a result, the probe 190 is displaced such that the contact portion with the conductive portion 28 changes to the needle tip side.
[0114]
At this time, since the rear end of the probe 190 is pressed against the inner surface 188 a by the restoring force of the needle holder 182, the probe 190 slightly slides with respect to the conductive portion 28. However, this slip does not prevent the displacement of the probe 190 such that the contact portion to the conductive portion 28 changes to the needle tip side. As a result, the connection device 170 also has the same operation and effect as the connection device 140.
[0115]
Another modification of the connection device 140 is shown in FIGS. The connection device 200 corresponds to a plurality of plate-shaped probes 202 formed in a substantially J-shape from a conductive metal material, and corresponds to a portion of the first member 174 in FIG. A plurality of units including a cover 204 to be connected and a needle holder 182 that is the same as the connection device 170 are arranged on the substrate 20 in common.
[0116]
Each probe 202 is an ono-type needle whose needle tip extends in the left-right direction in FIG. 23, and has a needle tip 206, an arc-shaped deformed portion 208, and a needle rear portion 210 that is in contact with the inner surface 188a. The probe 202 is arranged on the cover 204 similarly to the probe 190 of the connection device 170.
[0117]
Similarly to the connection device 140, the connection device 200 has a plurality of units mounted on the common substrate 20. Therefore, the connection device 200 also has the same operations and effects as those of the connection devices 140 and 170.
[0118]
In the connection device 140 or 200, the second member having the opening 38 in the connection device 170 may be commonly disposed on the plurality of covers 150 or 204.
[0119]
In the connection devices 140, 170, and 200, the first recesses 156 and 184 may be recesses formed of a plurality of grooves respectively corresponding to the probes 142 and 190 and receiving at least a part of the deformed portion of the probe. In this case, such grooves extend in parallel at intervals in the longitudinal direction of the needle holder. The first and second recesses 156 and 160 and 184 and 188 may be one recess. In the connection device 140, the opening 162 of the spacer 154 may be formed as such a groove instead of the first recess 156 being formed as a plurality of grooves.
[0120]
The present invention is not limited to the above embodiment. For example, the probe may have a simple shape such as an arc, a U, a U, an L, a V, a W, and the like. Further, the upper and lower sides may be used in a state where the upper and lower sides are reversed.
[Brief description of the drawings]
FIG. 1 is a plan view showing a first embodiment of a test auxiliary device according to the present invention.
FIG. 2 is a sectional view taken along line 2-2 in FIG.
FIG. 3 is a bottom view of a part of the test auxiliary device shown in FIG. 1 with a substrate removed.
FIG. 4 is a sectional view taken along line 4-4 in FIG. 1;
FIG. 5 is a cross-sectional view for explaining a state of a probe when an object to be inspected is arranged in an auxiliary device.
FIG. 6 is a cross-sectional view for explaining a state of the probe when the test object is pressed against the probe.
FIGS. 7A and 7B are diagrams showing a first embodiment of a probe used in the auxiliary device shown in FIG. 1, wherein FIG. 7A is a front view and FIG. 7B is a left side view.
FIGS. 8A and 8B are diagrams showing a second embodiment of the probe used in the auxiliary device shown in FIG. 1, wherein FIG. 8A is a front view and FIG. 8B is a left side view.
FIG. 9 is a sectional view showing a part of a second embodiment of the test auxiliary device.
FIG. 10 is a sectional view showing a part of a third embodiment of the test auxiliary device.
FIG. 11 is a view showing a part of a third embodiment of the probe used in the auxiliary device shown in FIG. 1;
FIG. 12 is a sectional view showing a part of a fourth embodiment of the test auxiliary device.
FIG. 13 is a sectional view showing a part of a fifth embodiment of the test auxiliary device.
14A and 14B are diagrams showing an embodiment of a probe used in the auxiliary device shown in FIG. 13, wherein FIG. 14A is a plan view, FIG. 14B is a front view, and FIG. 14C is a right side view. .
15A and 15B are diagrams showing another embodiment of the probe used in the auxiliary device shown in FIG. 13, wherein FIG. 15A is a plan view, FIG. 15B is a front view, and FIG. 15C is a right side view. is there.
FIG. 16 is a sectional view showing a part of a sixth embodiment of the test auxiliary device.
17 is a view showing one embodiment of a probe used in the auxiliary device shown in FIG. 16, wherein (A) is a plan view, (B) is a front view, and (C) is a right side view. .
18A and 18B are diagrams showing another embodiment of the probe used in the auxiliary device shown in FIG. 16, wherein FIG. 18A is a plan view, FIG. 18B is a front view, and FIG. is there.
FIG. 19 is a sectional view showing a part of a seventh embodiment of the test auxiliary device.
FIG. 20 is a sectional view showing a part of an eighth embodiment of the test auxiliary device.
FIG. 21 is a view taken along line 21-21 of FIG. 20;
FIG. 22 is a view taken along line 22-22 of FIG. 20;
FIG. 23 is a sectional view showing a part of a ninth embodiment of the test auxiliary device.
FIG. 24 is a plan view of FIG. 23;
[Explanation of symbols]
10, 70, 100, 120, 140, 170, 200 Test auxiliary device
12 Inspection object
14 Body
16 Electrode section
20 substrates
22, 50, 52, 54, 60, 72, 102, 112, 122, 132, 142, 190, 202 Probe
24,90,152,182 Needle holder
26,80,150,172,204 cover
28 conductive part
30,74,144,192,206 Needle tip
31,76,146,194 Deformed part
32, 78, 104, 114, 124, 134, 148, 196, 208 Needle rear
34 Presser bar
36 elastic material layer
38 opening
40,82 slots
42,84 recess
44,86 partition wall
46 Screw member
156,160 first and second recesses
158 slots
184,188 First and second recesses
186 slots

Claims (10)

A device for electrically connecting a plurality of electrode portions of the test object and a conductive portion formed on one surface of the substrate,
A plurality of probes each electrically connecting the electrode portion and the conductive portion, and an assembling device for assembling the probes in parallel to the substrate,
Each probe has a deformed portion that is curved in an arc shape, a needle tip that is a needle tip that follows one end of the deformed portion and has a tip that is pressed against an electrode portion of the device under test, A blade type probe having a needle rear portion following the end portion,
The assembling device is a recess extending in the arrangement direction of the probe, the recess having an arc-shaped inner surface facing the retreat preventing portion facing forward and the retreat preventing portion for preventing the retreat of the probe, and the deforming portion or the deforming portion. An elastically deformable needle pressing portion that contacts the inner surface, the deformed portion, and the rear end portion to contact at least a part of the needle rear portion with the conductive portion,
The electrical connection device, wherein the probe further includes a rear end surface that is in contact with the anti-backup portion. The electrical connection device according to claim 1, wherein each probe has a substantially arc-shaped, J-shaped, or U-shaped shape. 3. The connection device according to claim 1, wherein the probe has an outer portion that extends in an arc shape that contacts the conductive portion when at least the electrode portion is pressed against a needle tip. 4. 4. The connection device according to claim 3, wherein a contact portion of the outer portion with the conductive portion changes toward the needle tip side as a pressing force by the test object increases. 5. The assembling apparatus includes: one or more covers assembled to the substrate, the covers having the recesses, and the recesses being open to the side of the substrate; and one or more needle clamps received in the recesses. 5. The connection device according to claim 1, further comprising: a needle holder that has the needle holder and extends in a direction in which the probes are arranged. The cover further includes a plurality of slots spaced apart in the longitudinal direction of the needle holder, the slots being open to the substrate side and the test object side and communicating with the recess.
6. The connection device according to claim 5, wherein the probe tip of each probe penetrates the slot and projects the probe tip out of the slot. The cover further includes a plurality of slots that are open to the side of the substrate and communicate with the recess, the plurality of slots being spaced in the longitudinal direction of the needle holder, and each probe is at least the deformable portion. The connection device according to claim 5, wherein a part of the connection device is received in the slot. The connection device according to claim 7, wherein the retraction preventing portion includes an end face of the slot. The connection device according to any one of claims 5 to 8, wherein the assembling device further includes a stopper disposed on the cover to form the retraction preventing portion. The connection device according to any one of claims 1 to 9, wherein the probe includes a rear end surface that is in contact with the anti-backup portion.

Images