JPH11162605A - Electric connecting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To establish good electric connection of probes with an electrode of an object to be inspected by equipping an installation device with a retreat preventing part to prevent the probes from retreating and a stylus retaining part capable of elastic deformation which contacts a deformation part or the stylus rear part, and arranging so that the tail of each probe contacts the retreat preventing part. SOLUTION: When probes 22 are pressed to an object to be inspected 12, each probe 22 makes elastic deformation in a part nearer the stylus tip than the contacting part 28 with an electric conduction part 28 so that the radius of curvature enlarges without retreat of the probe 22 in the circumferential direction of a stylus retainer 24 (in the curving direction of the deformation part 31) and causes an elastic material layer 36 to make elastic deformation compressively. Thereby the stylus tip of each probe 22 makes displacement relative to an electrode part 16, and part of the film on the surface of the electrode part 16 is exfoliated in rubbing. Part of the tail of each probe 22 generates a dint in the elastic material layer 36, which precludes the stylus tip 30 from tumbling in the axial direction of the stylus retainer 24.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to an electrical connection device used for testing a flat test object such as an integrated circuit and a liquid crystal display panel.

[0002]

2. Description of the Related Art Inspection or testing of the electrical characteristics of a package or molded semiconductor device, especially an integrated circuit (IC), generally involves an electrical connection such as a test socket or test socket for removably mounting the semiconductor device. This is performed using the device as an auxiliary device for inspection.

[0003] As one type of this type of connection device, a crank-shaped portion in which a needle tip portion contacting a lead (electrode portion) of a semiconductor device and a needle rear portion connected to a conductive portion of a substrate are bent in opposite directions. There is one using a contact, that is, a probe (Japanese Patent Application Laid-Open No. 7-229949). In this conventional connection device, each probe is attached to a common needle holder with an adhesive at a central portion between the needle tip and the needle rear so that the needle tip extends upward and the needle rear extends downward. Is done.

[0004] However, this conventional connection device requires skill in assembling such as an operation of attaching a probe to a needle holder and an operation of soldering a rear portion of a needle to a conductive portion of a substrate. Because of the large length dimension (from the needle tip to the point of contact with the conductive part), there is a limit to increasing the frequency of the electrical signal used for the test.

As another connecting device, there is a device using a plate-shaped probe formed in a Z-shape or an annular shape (US Pat. No. 5,336,094, US Pat. No. 5,388,996).
issue). However, in this conventional auxiliary device, each probe is pressed against the electrode portion of the device under test at the arc-shaped deformed surface portion. Therefore, even if the deformed surface portion is pressed against the electrode portion of the device under test,
Since no rubbing action due to the displacement of the deformed surface portion with respect to the electrode portion occurs, a film such as an oxide film existing in the electrode portion is not effectively removed, and as a result, a good electrical connection between the probe and the electrode portion. No contact is obtained.

[0006] As one of the connection devices for testing the electrical characteristics of a packaged or unmolded semiconductor device, particularly an IC chip, there is a device using a probe bent in a C-shape (Japanese Patent Laid-Open No. 5-299483). . However, in this conventional connection device, since each probe is merely maintained in the socket by its spring force, both ends of the C-shaped probe must be further curved.
The probe shape is complicated and expensive.

[0007]

Therefore, in the electrical connection device for testing the device under test, when the tip of the probe is pressed against the electrode portion of the device under test, the probe is surely elastically deformed without retreating. Despite giving an effective rubbing action to the electrode part of the test object, the shape of the probe is simple, the probe is stable, conforms to the high frequency test,
It is important that fabrication is easy.

[0008]

A connecting device according to the present invention comprises a plurality of probes, each of which electrically connects an electrode portion of a device under test and a conductive portion of a substrate, and connecting the probes to the substrate in parallel. And an assembling device. Each probe is
A deformable part, a needle tip following the one end of the deformable part and having a tip pressed against the electrode part of the test object, and a needle rear part following the other end of the deformable part. . The assembling device, a retreat preventing unit for preventing the probe from retreating,
An elastically deformable needle holding portion that comes into contact with the deformable portion or the needle rear portion. The probe has the rear end portion in contact with the anti-backup portion.

Although the probe has a deformed portion, its shape is simpler and less expensive than a conventional C-shaped probe. In addition, a part of the probe is disposed between the substrate and the needle holder, and the probe is brought into contact with the conductive part and the needle holder at least at a part of the deformed part or the rear part of the needle. This stabilizes the probe and facilitates the assembly of the connection device.

In each probe, the tip of the probe tip is pressed against the electrode of the device under test. As a result, the overdrive acts on each probe, but each probe does not retreat because the probe is in contact with the retraction preventing portion at the rear end.

[0011] For this reason, the tip of the electrode is formed by ensuring that each probe is elastically deformed at a position closer to the stylus tip than the contact portion with the conductive portion, or that each probe reliably deforms the pressing portion. Displaced relative to the part. As a result, a part of the film such as an oxide film existing in the electrode portion is scraped (or scraped) by the tip of the needle tip, and the probe and the electrode portion are maintained in a good electrical connection state. . Although the probe has a deformed portion, its shape is simpler and cheaper than a conventional C-shaped probe.

[0012] The effective range of the probe is on the tip side of the contact portion with the conductive portion. Therefore, the effective range of the probe is smaller than that of the conventional probe, the leakage of the electric signal between the adjacent probes is small, and the probe is suitable for a high frequency test.

[0013] The probe may have an outer portion extending in an arc shape and contacting the conductive portion when at least the electrode portion is pressed against the needle tip.
Thereby, the contact portion of the outer portion with the conductive portion changes to the needle tip side as the pressing force by the test object increases.

[0014] The assembling apparatus is one or more covers assembled to the substrate and has a recess extending in a direction in which the probes are arranged, and the retraction preventing portion. The recess opens to the substrate side. A cover, and one or more needle holders that are received in the recesses and extend in the arrangement direction of the probes, the needle holders having the needle holders may be provided. As a result, the needle holder is not displaced with respect to the cover, so that the probe is further stabilized and the assembling operation becomes easier.

The cover may further include a plurality of slots spaced in a longitudinal direction of the needle holder, the plurality of slots being open to the substrate and the object to be inspected and communicating with the recess. And the probe tip can be made to penetrate through the slot of the probe tip, and the probe tip can be projected out of the slot. Accordingly, the position of the needle tip in the probe arrangement direction is regulated by the slot, so that the probe is more stabilized and the assembling work is easier.

Alternatively, the cover may further comprise:
A plurality of slots that are open to the substrate side and communicate with the recesses, the plurality of slots being spaced apart in the longitudinal direction of the needle holder, and each probe has at least a part of the deformed portion in the slot. Can be arranged.
Also in this case, the position of the probe in the arrangement direction of the probe is regulated by the slot, so that the probe is further stabilized, and the assembling work becomes easier.

[0017] The receding prevention portion may include an inner surface of the recess or an end surface of the slot. In this case, the probe may include a rear end surface contacting the anti-backup portion. However, the assembling device may be provided with a stopper disposed on the cover so as to form the retraction preventing portion.

In a preferred embodiment, the probe is
At least at the deformed portion, it is curved in an arc shape.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to FIGS. 1 to 6, an electrical connection device 10 is used as an auxiliary device used for testing or testing a flat plate-shaped device under test 12. Inspection object 12
In the illustrated example, the semiconductor device is a semiconductor device such as a package or a molded integrated circuit. However, the present invention is also applicable to an electrical connection device for testing other flat test objects such as a liquid crystal display panel. Can be applied.

The device under test 12 has a main body 14 packaged or molded in a rectangular planar shape, and a plurality of leads or electrode portions 16 projecting outward from portions corresponding to the respective sides of the rectangle. The electrode portions 16 are divided into a plurality of electrode portion groups corresponding to the respective sides of the rectangle, and are arranged in parallel for each electrode portion group.

The auxiliary device, that is, the contact device 10,
0, a plurality of contacts or probes 22, a plurality of needle holders 24 for pressing the probes 22 against the substrate 12, and a flat cover 26 for attaching the needle holders to the substrate 20.

The substrate 20 is a wiring substrate in which a wiring pattern is formed on one surface of an electrically insulating material by a printed wiring technique, and a plurality of strip-shaped printed wiring portions, that is, conductive portions 28 each corresponding to the probe 22 are formed on the substrate 20. Have on one side.
Each conductive part 28 is a part of a wiring pattern. The conductive portions 28 are divided into a plurality of conductive portion groups corresponding to the respective rectangular sides of the main body 14 of the device under test 12, and are arranged in parallel for each conductive portion group.

As shown in FIG. 7, each probe 22 is formed in the shape of an elastic non-conductive thin wire, and has a tip portion 30 having a tapered tip portion and a needle main portion having an arc shape. It is curved in a semicircular shape over the entire range from the deforming portion 31 to the needle rear portion 32.

Each probe 22 has a portion other than the needle rear portion indicated by reference numeral 32 in FIG.
Has a conductive film on the entire outer surface. Thereby, the portion in front of the portion in contact with the conductive portion 28 has conductivity, but the needle rear portion 32 has non-conductivity, so that it acts as a probe having conductivity,
Leakage of the test electrical signal at the needle rear portion 32, particularly between adjacent probes, is eliminated.

However, in each probe 22, the core may be formed in the form of a conductive thin wire, preferably a metal thin wire, and a non-conductive film may be formed on the core rear portion 32.
The probe 22 may be formed from a thin wire of metal, ceramic, synthetic resin, or the like, or may be formed by another processing method such as a press working or an etching working using those materials.

Each probe 22 has a circular cross-sectional shape in the example shown in FIGS. The probe 22 is shown in FIG.
7 are so-called flea-type needles whose tips, that is, tips, extend at right angles to the curved surface of the probe 22. In the example shown in FIG.

However, the probe 22 may be a so-called ono-type needle whose tip extends in parallel with the curved surface of the probe 22, like a probe 50 shown in FIG. 8, or a conical or pyramid-shaped needle tip. It may have a shape having a portion. The cross-sectional shape of the probe may be circular or square.

The probe 22 is connected to the body 14 of the device under test 12.
Are divided into a plurality of probe groups corresponding to each side of the rectangle. In the illustrated example, the probe 22 is divided into four probe groups because the device under test 12 has a plurality of electrode portions on each of four sides of the rectangle. For the same reason, four needle holders 24 are provided in the illustrated example.

Each needle holder 24 has a cylindrical holding rod 34,
It is formed in a columnar shape by an electrically insulating elastic material layer 36 formed on the outer peripheral surface of the holding rod 34. Presser bar 34
Can be a conductive or non-conductive rod-like member. The electrically insulating layer, that is, the elastic material layer 36 can be a tube formed of a rubber material such as silicon rubber. However, the needle holder 24 may be formed in a rod shape with a single member such as rubber that can be elastically deformed.

The cover 26 has an opening 38 formed at the center to accommodate the device under test 12, a plurality of slots 40 formed outside the opening 38 and extending outward with respect to the opening 38, and an opening 38. And a plurality of recesses 42 formed continuously outside in the direction in which the slots 40 are arranged. Such a cover 26 can be formed from a non-conductive material.

The opening 38 has a rectangular shape similar to that of the device under test 12, and each corner has an arc shape.
The upper part of the opening 38 has an inclined surface 38a facing from the outside toward the center.
The lower the size, the smaller it is. Each corner of the opening 38 is an arc surface.

The slot 40 has at least the probe 22
Are accommodated in the same number as the number of the probes 22 in the illustrated example. The slots 40 are divided into a plurality of groove groups corresponding to the sides of the rectangle forming the opening 38, and are formed in parallel for each slot group. Each slot 40
Open to the side of the substrate 20, that is, downward, and open to the opening.

The adjacent slots 40 are defined by partition walls 44. The partition wall 44 is, in the illustrated example,
The slot 40 is provided so as to define the rear half of the slot 40, so that adjacent slots 40 are continuous at the opening 38. However, the partition wall 44 may be provided so as to partition the entire slot 40.

The recesses 42 correspond to the sides of the rectangle forming the opening 38 and extend along the corresponding sides.
In the illustrated example, four recesses 42 are provided. Each recess 42 is a semi-cylindrical groove for accommodating the needle holder 24, and is open to the bottom of the corresponding slot 40. The groove bottom surface of each recess 42 has an upwardly convex cross-sectional shape.

The connecting device 10 connects each needle holder 24 to the recess 42
, And each probe 22 is arranged in the slot 40 with its rear end in contact with the inner bottom surface (upper surface in the illustrated example) of the slot 40, that is, the end surface 40a. In this state, the probe 22, the needle holder 24 and By assembling the cover 26 on the substrate 20 and attaching the cover 26 to the substrate 20 with a plurality of screw members 46 such as bolts in this state, assembly can be performed.

Each screw member 46 passes through the cover 26 in the thickness direction thereof, and is screwed into a screw hole formed in the substrate 20. As a result, the probe 22 is pressed against the conductive portion 28 of the substrate 20 by the needle presser 24 at a part of the arcuate curved portion, that is, the deformed portion 31, and is held between the substrate 20 and the needle presser 24 and maintained in that state. Is done.

In the illustrated example, the needle holder 24, the cover 26, and the screw member 46 function as an assembling device for assembling the probe 22 to the substrate 20 in parallel. Further, the lower half of each needle holder 24 protrudes in an arc shape from the recess 42 toward the substrate 20 and extends in the direction in which the probes 22 are arranged, so that the inside of the curved portion of the probe 22 is pressed in order to press the probe 22 against the substrate 20. Acts as an abutting needle holder.

The probe 22 has an opening 38 with a needle tip 30.
The probes 22 can be correctly arranged in parallel for each probe group simply by arranging them in the slots 40 so as to protrude upward and contacting the substrate 20 with the needle holder 24.
For this reason, manufacture of 10 is easy.

When the probe 22 is assembled to the connecting device 10, at least the needle rear portion 32 is received in a portion defined by the partition wall 44 of the slot 40, and the elastic material layer 3 made of an electrically insulating material is used.
6 is pressed against the substrate 20 via the
0 and the needle holder 24 stably maintain the electrical contact with the adjacent probe.

In the assembled state, each probe 22 is pressed by the conductive portion 28 at the arc-shaped curved portion where the electric insulating layer 32 is not present, that is, at the arc-shaped outside portion of the deformed portion 31. The part acts as a deformation part.

Since each probe 22 is pressed by the conductive portion 28 at a portion where the electric insulating layer 32 does not exist, the effective range of the probe 22 is
From the contact portion to the needle tip, which is smaller than a conventional connection device. In addition, as shown in FIG. 5, the elastic material layer 36 is elastically deformed by being pressed by the substrate 20, the cover 26, and the pressing rod 34, so that each probe 22 is firmly maintained. The pressing rod 34 and the elastic material layer 36 may be eccentric to each other in advance as shown in FIG. 5, or may be eccentric to each other in an assembled state.

At the time of inspection, the object to be inspected 12 is
Put in 8. At this time, if the position of the device under test 12 with respect to the connection device 10 is shifted, the device under test 12 comes into contact with the inclined surface 38a and is guided to the center of the opening 38 by the inclined surface 38a. As a result, as shown in FIG. 5, the test object 12 is housed in the connection device 10 in a state where the electrode portion 16 is in contact with the tip of the probe 22, that is, the tip.

When the test object 12 arranged in the connection device 10 is pressed down by the pressing body 48, each probe 22
Is deformed by the overdrive action as shown in FIG. At this time, a force acting on the probe 22 to retreat the probe 22 along the arcuate outer surface of the deformed portion 31 is applied. However, since the rear end face of each probe 22 is in direct contact with the end face 40a of the slot 40,
2 does not move (retreat) around the needle holder 24 in the circumferential direction.

However, when the probe 22 and the device under test 12 are pressed, each probe 22
4 without retreating in the circumferential direction (the bending direction of the deformable portion 31), the elastic material is elastically deformed at a portion on the needle tip side of the contact portion of the conductive portion 28 so that the radius of curvature is increased, and the elastic material layer 36 is This is elastically deformed so as to be compressed and deformed.

As a result, the tip of each probe 22 is displaced with respect to the electrode 16, so that a rubbing action (or a scraping action) for removing a part of the film present on the surface of the electrode 16 is performed. ). In addition, each probe 22 has its rear end partially recessed in the elastic material layer 36, thereby preventing the needle tip 30 from falling down in the axial direction of the needle holder 24.

As shown in FIG. 6, when the probe 22 is elastically deformed, the contact point of the probe 22 with the conductive portion 28 changes to the needle tip side. Further, since the elastic material layer 36 is dented by the rear end of the probe, the probe 2
The rear end of the second member tends to move away from the inner surface of the recess 40. However, the probe 22 is pushed back by the restoring force of the needle holder 24 and slides slightly with respect to the conductive portion 28.

This slippage is a movement in which the probe 22 is displaced with its rear end face in contact with the inner surface 40a (that is, the probe 22 is not a movement in which the probe 22 retreats along the outer periphery of the needle holder 24), and thus has a curvature. The elastic deformation of the probe 22 having a larger radius is not affected by the above-described slip, and the probe 22 is surely elastically deformed.

According to the connection device 10, as described above,
Not only is the shape of the probe simple and the probe is inexpensive, but also the effective range of the probe 22 is small, suitable for high-frequency testing, and the connection device can be manufactured despite the fact that the probe is stably maintained. Easy. In addition, the device under test 12 is naturally and correctly arranged on the connection device 10, and the electrode portion 16 of the device under test 12 reliably contacts the needle tip and elastically deforms without retreating.
The rubbing action is effectively produced. Further, the structure of the needle presser 24 is simple, and an electrical short circuit between the probes 22 is reliably prevented.

Referring to FIG. 9, the probe 52 has a needle rear portion 32 having an electrically insulating layer which is bent upward to form a J-shape, and the needle rear portion 32 is inserted into the needle holder 24. The rear end of the deformed portion 31 is pressed by the conductive portion 28. Also in this embodiment, the probe 52 has its needle rear portion 32 prevented from moving with respect to the needle holder 24, so that the contact portion of the probe 52 with the conductive portion changes to the needle tip side. Do not move around in the circumferential direction.

That is, when the probe 52 is pushed down by the test object, a force acting on the probe 52 to retreat the probe 52 along the outer surface of the deformed portion 31 is applied. However, since the rear end of the probe 52 is inserted into the needle holder 24, the probe 52 is elastically deformed so that the radius of curvature of the deformable portion 31 increases without retreating in the circumferential direction of the needle holder 24. Therefore, even when the probe 52 is used, the same operation and effect as when the probe 22 is used can be obtained.

Referring to FIG. 10, the probe 54 has its rear end (particularly, its rear end face) abutted on a stopper 56 formed of a leaf spring for preventing retreat. Stopper 56
Are provided for each probe group, and are attached to the cover 26 by a plurality of screw members 58. The stopper 56 can be formed from an electrically insulating plate material, but may be formed by forming an electric insulating layer on the surface of a conductive plate material, and furthermore, the rear end of each probe has non-conductivity. Then, a conductive plate material may be used.

According to the embodiment shown in FIG. 10, the probe 54 has its rear end in contact with the stopper 56 and
To the rear of the needle holder 2
4 does not move in the circumferential direction. Therefore, when the probe 54 is pushed down by the test object, the probe 5
4 is elastically deformed so that the radius of curvature of the deformed portion 31 increases. Therefore, even when the probe 54 is scattered, the same operation and effect as in the case where the probe 22 is used can be obtained.

Referring to FIG. 11, probe 60 has a convex portion 62 and a concave portion 64 at a position where it comes into contact with conductive portion 28. The probe 60 includes a conductive portion 28 at the convex portion 62.
Is pressed. For this reason, in the case of the probe 60, the protrusion 6
The portion having 2 acts as a deformed portion.

According to the probe 60, since the convex portion 62 is engaged with the conductive portion 28, the movement of the probe 60 with respect to the needle holder 24 is caused by the engagement between the convex portion 62 and the conductive portion 28. When the rear end of the probe 60 is brought into contact with the end surface of the slot, the inner surface of the recess, or the stopper like a probe, it is more reliably prevented. For this reason, the electrical connection between the conductive portion 28 and each probe becomes more reliable.

In each of the above embodiments, instead of the needle holder 24 in which a part of the cylindrical portion is used as a projection used as a needle holder, a needle holder having a semi-cylindrical shape may be used. May be used as a needle holder. Further, the needle holder may be a simple non-conductive rod-shaped member that does not use an elastic material, as long as at least the outer surface is non-conductive.

Referring to FIG. 12, a connecting device 70 uses a probe 72 formed in a substantially U-shape. The probe 72 includes a needle tip portion 74 and a needle main portion, that is, a deformation portion 76.
And the needle rear portion 78 are formed in a substantially U-shape.
The needle tip portion 74 and the needle rear portion 78 linearly extend substantially parallel to each other upward from the front end portion and the rear end of the deformable portion 76, respectively. At least the outer peripheral surface of the needle tip portion 74 and the deformable portion 76 is made conductive.

The deforming portion 76 has a needle tip 74 from the rear end side.
, And extends obliquely upward with a large radius of curvature. Needle rear part 78
May be conductive or non-conductive. The needle rear part 78 has a larger cross-sectional shape than the needle tip part and the deformed part 76. The probe 72 has a circular or rectangular cross-sectional shape. Therefore, the probe 7
2 has either a thin line or a band shape.

The cover 80 of the connection device 70 is
2, an opening 38 formed at the center to accommodate the two, a plurality of slots 82 extending in parallel outward from the opening 38,
A plurality of recesses 84 are formed outside the openings 38 and extend continuously in the direction in which the slots 82 are arranged. Such a cover 80 can be formed from a non-conductive material. The opening 38 is the same as the opening 38 of the cover 26 in the connection device 10. For this reason, the upper part of the opening 38 is an inclined surface 38a.

The slots 82 are grooves for accommodating at least a part of the deformed portion 76 of the probe 72. Therefore, in the illustrated example, the slots 82 are provided in the same number as the probes 72. The slots 82 are divided into a plurality of slot groups corresponding to the respective sides of the rectangle forming the opening 38, and are formed in parallel for each slot group. Each slot 82 is mounted on the substrate 20
Side, that is, downward, and open to the opening 38 at the top end.

The adjacent slots 82 are defined by partition walls 86. Opening 38 of adjacent partition wall 86
Are connected by a wall 88 closing the corresponding end of the slot 82. However, the end of the adjacent partition wall 86 on the side of the opening 38 is not connected, and the slot 8 is not connected.
The two corresponding ends may be open.

The recess 84 corresponds to each side of the rectangle forming the opening 38 and extends along the corresponding side.
In the illustrated example, four recesses 84 are actually provided. Each recess 84 is a groove having a rectangular cross-sectional shape for accommodating the needle presser 90, and the rear end of the corresponding slot 82 and the substrate 20.
And open to the side. Each recess 84 has a rectangular cross-sectional shape.

Each needle holder 90 has a rectangular cross section made of an elastic material such as rubber, and is fitted in the recess 84. In the illustrated example, the needle presser 90 is
6 has a groove communicating with a slot 82 for receiving a portion of the probe 6 and a needle rear portion 78 of the probe 72. However, such a slot may be formed in the cover 80, or may not be formed in either the cover 80 or the needle holder 90 depending on the shape and size of the probe.

The connecting device 70 inserts each needle holder 90 into the recess 84
And the deformed portion 76 of the probe 72 is
2, each probe 72 is arranged so that the needle rear part 78 is in the concave part 84, and the probe 72, the needle holder 90 and the cover 80 are superimposed on the substrate 20 in this state, and the cover 80 is bolted in this state. The substrate 20 is formed by a plurality of screw members as described above.
Can be assembled by attaching to.

In the state assembled in the connecting device 70, each probe 72 is pressed against the conductive portion of the substrate 20 by the needle holder 90 at the rear end of the deformed portion 76. Further, the tip of each probe 72 extends from the slot 82 to the opening 38.
The needle rear part 78 of each probe 72 is pressed by the needle holder 90 against the inner wall surface forming the slot 82, and the rear end face of each probe 72 is received by the needle holder 90. Therefore, each probe 72 is pressed against the substrate 20 on the rear end side of the deformed portion 76.

When the tip of the needle tip portion 74 is pressed against the electrode portion 16 of the device under test 12, the probe 72 is elastically deformed so that the needle tip portion 74 and the needle rear portion 78 are opened, and the probe itself is elastically deformed. The needle holder 90 is elastically deformed. This allows
The probe 72 gives a rubbing action to the electrode portion 16 at its tip, and removes a part of a film such as an oxide film present on the surface of the electrode portion 16.

The force for retreating the probe 72 is
Although the force is to displace the probe 72 along the arcuate outer surface of the deformed portion 76, the retreat of the probe 72 is performed via a needle holder 90 on the inner surface 84 a of the recess 84 whose rear end surface is disposed in the recess 84. And are indirectly contacted. However, the rear end surface of the probe 72 may be brought into direct contact with the inner surface 84a of the recess 84 by the needle holder 90, and the probe 72 may be pressed against the substrate 20 by the needle holder 90.

The connecting device 70 not only has the same operation and effect as the connecting device 10 but also has a
Since the pressure is applied to the inner surface of the recess 84 by the zero, the probe 72 is further stabilized.

Referring to FIG. 13, the connection device 100
In the connection device 10 shown in FIGS. 1 to 6, instead of using a probe extending integrally from the front end to the rear end, FIG.
A plurality of probes 102 having the shape shown in FIG.

Each probe 102 has a needle tip portion 30 and a deformed portion 31 formed of a conductive thin wire having elasticity.
A needle rear portion 104 is connected to the rear end of the deformable portion 31. The needle rear portion 104 is curved with the same curvature over the entire range from the needle tip to the rear end. The needle rear portion 104 is formed of an electrically insulating resin material such as a synthetic resin.

The tip of the probe tip 30 of each probe 102 is a tapered portion that becomes thinner toward the tip, and the portion behind the tip is a rod having a circular cross section. The rear end of the deformed portion 31 of each probe 102 has a notch 106 on the upper side for increasing the coupling force with the needle rear portion 104.

The inner portion of the rear end of the deformed portion 31 of each probe 102 is covered by the needle rear portion 104, but the outer portion is exposed without being covered by the needle rear portion 104. Such a probe 102 can be manufactured by molding using an electrically insulating material such as a synthetic resin as the needle rear portion 104. The end face of the probe 102 is in direct contact with the inner bottom face of the slot 40, that is, the end face 40a.

Connection device 1 using a plurality of probes 102
00 is assembled in the same manner as the connection device 10 except that the deformed portion 31 of each probe 102 is pressed by the conductive portion 28 at the outer portion of the coupling portion to the needle rear portion 104 as shown in FIG. And operates in the same manner as the connection device 10 to produce the same effects as those of the connection device 10.

Instead of using a plurality of independent probes in the connecting device 10 or 100, as shown in FIG. 15, one or more needle assemblies 110 in which a plurality of probes are connected at the back of the needle may be used.

Each probe 112 used in the needle assembly 110
Are a plurality of probes 112 at the rear end of the deformation portion 31.
14 is formed in the same manner as the probe 102 shown in FIG.

Therefore, the tip 3 of each probe 112
0 and the deformed part 31 are the same as those of the probe 102 shown in FIG.
Notch 1 for increasing the coupling force with common needle rear 114
06 on the upper side. The common needle rear portion 114 has an elongated shape curved into a shallow gutter shape by a non-conductive material, and the needle tip portion 30 and the deformed portion 31 of the plurality of probes 112.
Together with the same curvature.

The common needle rear portion 114 is provided with the cover 2 described above.
It may be common to each probe group on each side of the rectangle formed by the six openings 38, or may be common to two or more probes. Further, since the adjacent probes 112 are connected to the common needle rear portion 114 in the deformed portion 31, the cover 26 of the connection device using the probe assembly 110 does not include the groove 40 and the partition wall 44. However, a slot for receiving only the needle tip portion 30 and the deformed portion 31 of each probe 112 may be provided.

Therefore, slot 40 is a continuous common slot. However, the portion of the common slot 40 that receives only the needle tip 30 and the deformed portion 31 of each probe 112 may be separated by a partition. The retraction of the probe 112 is prevented by the rear end surface of the common needle rear portion 114 abutting on the inner bottom surface or end surface of the common slot.

The inner portion of the rear end of each deformed portion 31 is covered by the common needle rear portion 114, but the outer portion is exposed without being covered by the common needle rear portion 114. The needle assembly 110 can also be manufactured by molding using an electrically insulating material such as a synthetic resin as the common needle rear portion 114.

The connecting device using the needle assembly 110 can be assembled and used in the same manner as the connecting devices 10 and 70, and has the same operation and effect as the connecting device 10. The advantage that the rear portion 114 is jointed in common is that the manufacture of the needle assembly 110 and the assembly into the connecting device are facilitated.

Referring to FIG. 16, the connection device 120
In the connection device 70 shown in FIG. 12, instead of using the probe 72 extending integrally from the front end to the rear end, FIG.
A plurality of probes 122 having the shapes shown in FIG.

As shown in FIG. 17, each probe 122 is formed in a substantially U-shape by a needle tip portion 74, a deformed portion 76, and a needle rear portion 124. The needle tip portion 74 and the deformation portion 76 are the same as those of the probe 72 shown in FIG. Therefore, the needle tip portion 74 and the deformation portion 76
The needle tip 74 is formed in an L-shape extending straight upward from the tip of the deformable portion 76.

The deformed portion 76 of each probe 122 has a notch 126 on the upper side for enhancing the coupling force with the needle rear portion 124. The upper (inner) portion of the rear end of the deformed portion 76 is covered by the needle rear portion 124, but the lower (outer) portion is exposed without being covered by the needle rear portion 124.

The needle rear portion 124 is formed of a non-conductive material such as a synthetic resin, and linearly extends upward from the rear end of the deformed portion 76 substantially parallel to the needle tip portion 74.

Similarly to the probe 102 shown in FIG. 14, the probe 122 can be manufactured by molding using an electrically insulating material such as a synthetic resin for the needle rear portion 124. In addition, the connection device 120 can be used in the same manner as the connection devices 10, 70, and 100, and has the same operation and effects as those of the connection devices 10, 70, and 100.

Instead of using a plurality of independent probes in the auxiliary device 70 or 120, as shown in FIG. 18, one or more needle assemblies 130 in which a plurality of probes are connected at the back of the needle may be used.

Each probe 132 used in the needle assembly 130
Are a plurality of probes 132 at the rear end of the deformed portion 76.
17, except that they are connected by a common needle rear portion 134.

Therefore, the deformed portion 7 of each probe 132
6 has a cutout 126 on the upper side for increasing the coupling force with the common needle rear portion 134, and the common needle rear portion 134 has a comb shape made of a non-conductive material.

The needle assembly 130 includes a plurality of probes 132.
Needle tip 74 and deforming portion 76 and a common needle rear 134
And have a substantially U-shape. The cover of the connection device using the needle assembly 130 may not have the wall 86 or 88 shown in FIG.

The deformed portion 76 of each probe 132 has a notch 126 on the upper side for enhancing the coupling force with the needle rear portion 124. The upper (inner) portion of the rear end of the deformed portion 76 is covered by the needle rear portion 124, but the lower (outer) portion is exposed without being covered by the needle rear portion 124.

The connecting device using the needle assembly 130 can be assembled and used in the same manner as the connecting devices 70 and 120, and has the same operation and effect as the connecting devices 70 and 120. Needle rear 1
Advantageously, the common connection of 34 facilitates fabrication and assembly of the needle assembly 130 into a connection device.

In the above embodiment, the cover is formed by a single member. However, the cover may be formed by a plurality of members. For example, the cover may be formed by a plate-like member having an opening 38 and a member having a slot and a recess, or a plate-like member having an opening 38, a member having a slot, and a member having a recess. And a plate-shaped member having an opening 38 and a recess,
It may be formed by a member having a slot.

Referring to FIG. 19, the connection device 140
A plurality of substantially J-shaped probes 142 similar to the probe 122 shown in FIG. 17 are used. Each probe 142 is entirely curved from the needle tip 144 to the rear end of the deformed portion 146. At least the surfaces of the needle tip 144 and the deformed portion 146 of each probe 142 have conductivity.

The needle rear part 148 is formed in an L-shape from a non-conductive material such as a synthetic resin.
6 fixed. The upper (inner) portion of the rear end of the deformed portion 146 is covered by the needle rear portion 148, but the lower (outer) portion is exposed without being covered by the needle rear portion 148.

The needle rear portion 148 is independent for each probe 142. However, the common needle back 1
48 may be used. A notch 126 as shown in FIG. 17 or FIG. 18 may be formed on the upper side of the deformable portion 146 in order to increase the coupling force between the deformable portion 146 and the needle rear portion 148.

The connecting device 140 includes a plurality of probes 142.
Are provided with a plurality of elongated covers 150 arranged in parallel, a long needle holder 152 arranged in each cover 150, and a spacer 154.

Each cover 150 is essentially a cover. For this reason, the auxiliary member having the opening 38 is
It is provided integrally on 50 or assembled with a screw member. Each cover 150 has a first recess 156 opening on the side of the substrate 20 as shown in FIG.
And a slot 158 communicating with the first recess, and a second recess 160 opening on the side of the first recess 156.
First recess 156, slot 158 and second recess 16
0 continuously extends in the arrangement direction of the probes 142.

The needle holder 152 is formed in a rectangular cross section by an elastic material such as hard rubber.
And the second recesses 156 and 160. The spacer 154 has an opening 162 having substantially the same size as the first recess 156, and the first recess 15
6 is arranged between the cover 150 and the substrate 20 so that the opening 6 and the opening 162 are aligned. Therefore, the spacer 154
Acts as part of the cover 150 and the opening 162 is
Act as part of the recess 156 of

The first recess 156 has a plurality of probes 1
42 are arranged in parallel. The probes 142 are arranged side by side so that the needle tip 144 protrudes upward through the slot 158 and the needle rear 148 extends into the second recess 160, and is arranged in the second recess 160. Needle holder 152
As a result, the rear end of the deformed portion 146 is
Is pressed. The probe 142 has its rear end face directly contacted with the inner surface 160a of the second recess 160 to prevent retreat.

The cover 150 is placed on the common substrate 20 via a spacer 154 in a state where the plurality of probes 142 and the needle holder 152 are accommodated, and is assembled to the substrate 20 together with the spacer 154 by an appropriate means such as a screw member. Can be Thus, the plurality of probes 142, the cover 150, the needle holder 152, and the spacer 154 are unitized.

The connection device 140 uses a plurality of units as described above. Each unit is mounted on the common substrate 20 such that the arrangement direction of the probe tips of the probes 142 matches the arrangement direction of the electrode portions of the device under test and the probe tips of the opposing units are opposed to each other. Thus, the electrode portion of the test object is received at the tip of each probe 142.

In the illustrated example, the cover 150 does not have a slot for receiving the deformed portion 146 of each probe 142. For this reason, each probe 142 has a spacer 164 at the needle tip 144 that contacts the adjacent probe 142. The spacer 164 is formed in a plate shape from a non-conductive material such as a synthetic resin, and is fixed to one side of the needle tip 144. However, when the tip of each probe 142 penetrates the corresponding spacer, the spacer 1
The probe 64 and the probe 142 may be integrally formed.

In the connection device 140, when the object to be inspected is pressed by the probe 142 and an overdrive acts on the tip of the probe 142, the probe 142 is deformed in a state where it is prevented from retreating along the deformed portion 146. Part 1
The needle holder 152 is elastically deformed so as to increase the radius of curvature of 46, and presses the needle holder 152 against the inner surface 160b of the recess 160 opposite to the inner surface 160a. Thereby, the conductive portion 28
The contact portion of the probe 142 to the tip changes to the needle tip side. Further, the probe 142 slightly retreats with respect to the conductive portion 28 due to the upward displacement of the contact portion of the inner surface 160a, but this retraction is caused by the elastic deformation of the probe 142 for the same reason as that of the connection device 10. Do not disturb.

According to the probe 142, the probe 142
Effectively applies a rubbing action to the electrode portion of the test object, and despite that the cover 150 does not have a slot for receiving the deformed portion 146 of the probe 142, the tip of the test object is When pressed by the electrode portion, there is no possibility that the adjacent probe 142 comes into contact on the needle tip side.

The spacer 164 is provided for the probe 2 already described.
2,50,52,54,60,72,102,112,
The auxiliary devices 122 and 132 may be provided. Instead of providing the spacer 164 for each probe, a plurality of adjacent probes may be connected to each other on the needle tip side with a non-conductive material such as a synthetic resin.

FIGS. 20 to 2 show modifications of the connection device 140. FIGS.
It is shown in FIG.

Referring to FIGS. 20 to 22, the connection device 170 uses a split cover 172. The test object 12 to be inspected by the connection device 170 has a plurality of electrode portions 16 on both sides in the width direction of the main body portion 14. The electrode section 16
It is divided into a plurality of electrode unit groups corresponding to each side in the width direction, and is arranged in parallel for each electrode unit group.

As shown in FIG. 20, the cover 172 is
And a plurality of screw members 178 and a plurality of positioning pins 18.
0 (see FIG. 21 and FIG. 22), they are assembled to the substrate 20 in a state where they are superimposed on each other.

The cover main body, that is, the first member 174
Integrates the cover 150 and the spacer 154 in FIG. For this reason, the first member 174 has an opening that opens to the substrate 20 side, that is, a first recess 184,
A plurality of slots 186 communicating with the first recess 184;
The second in which the needle presser 182 having a circular cross-sectional shape is disposed.
Is provided for each electrode group. On the other hand, the auxiliary member, that is, the second member 176 has the opening 38 having the inclined surface 38a.

The slot 186 has the first and second recesses 1
84, 188 and the first member 174
Through in the thickness direction. The second recess 188 extends continuously in the direction in which the plurality of probes 190 are arranged, and is open to the substrate 28 side.

Each probe 190 is a plate-like probe (a blade-type needle) formed in a substantially J-shape from a conductive metal material. The probe 190 has a needle tip 192 having a needle tip, a deformed portion 194 integrally connected to the rear end of the needle tip 192, and a needle rear portion 196 integrally connected to the rear end of the deformed portion 194.

The needle tip 192 extends through the slot 186 so that the needle tip projects into the opening 38. Deformation part 194
Are arcuately curved, and partly in the first recess 18.
4 accepted. The needle rear portion 196 has its rear end surface in contact with the inner surface 188a of the second recess 188, and is prevented from retreating.

The needle holder 182 is formed in a rod shape from an elastic material such as rubber in the illustrated example, and extends in the longitudinal direction of the second recess 188. The needle presser 182 is used to connect the probe 1
The probe 190 is pressed so that the deformable portion 194 contacts the conductive portion 28.

Since the connection device 170 uses the blade type probe 190, when the object to be inspected is pressed against the tip of the probe 190, the needle holder 182 is pressed against the arc-shaped inner surface 188b by the needle rear portion 196. As a result, the probe 190 is displaced so that the contact portion with the conductive portion 28 changes to the needle tip side.

At this time, since the rear end of the probe 190 is pressed against the inner surface 188 a by the restoring force of the needle holder 182, the probe 190 slightly slides on the conductive portion 28. However, this slip does not prevent the displacement of the probe 190 such that the contact portion to the conductive portion 28 changes to the needle tip side. As a result, the connection device 170 also has the same operation and effect as the connection device 140.

Another modification of the connection device 140 is shown in FIGS. The connection device 200 corresponds to a plurality of plate-like probes 202 formed in a substantially J-shape from a conductive metal material and a portion of the first member 174 in FIG. 20 that is to the left of the line 23-23. Cover 204,
A plurality of units provided with the same needle holder 182 as the connection device 170 are arranged on the board 20 in common.

Each probe 202 is an ono-type needle whose tip extends in the left-right direction in FIG.
6. It has an arc-shaped deformed portion 208 and a needle rear portion 210 that is in contact with the inner surface 188a. The probe 202 is connected to the connection device 1
It is arranged on the cover 204 similarly to the 70 probe 190.

In the connection device 200, a plurality of units are mounted on the common substrate 20, similarly to the connection device 140. Therefore, the connecting device 200 is also connected to the connecting device 140,
The same operations and effects as those of 170 are achieved.

In the connection device 140 or 200, the second member having the opening 38 in the connection device 170 may be commonly disposed on the plurality of covers 150 or 204.

In the connection devices 140, 170, and 200, the first recesses 156, 184 are connected to the probes 142, 19, respectively.
The recess may be formed by a plurality of grooves individually corresponding to 0 and receiving at least a part of the deformed portion of the probe. In this case, such grooves extend in parallel at intervals in the longitudinal direction of the needle holder. First and second recesses 156 and 1
60 and 184 and 188 may be one recess. In the connection device 140, the opening 162 of the spacer 154 may be formed as such a groove instead of the first recess 156 being formed as a plurality of grooves.

The present invention is not limited to the above embodiment. For example, probes can be arcuate, U-shaped, U-shaped, L-shaped,
It can be a simple shape such as a V-shape or a W-shape. Further, the upper and lower sides may be used in a state where the upper and lower sides are reversed.

[Brief description of the drawings]

FIG. 1 is a plan view showing a first embodiment of a test auxiliary device according to the present invention.

FIG. 2 is a sectional view taken along line 2-2 in FIG.

3 is a bottom view of a part of the test auxiliary device shown in FIG. 1 with a substrate removed.

FIG. 4 is a sectional view taken along line 4-4 in FIG. 1;

FIG. 5 is a cross-sectional view for explaining a state of a probe when an object to be inspected is arranged in an auxiliary device.

FIG. 6 is a cross-sectional view for explaining a state of the probe when the test object is pressed against the probe.

FIG. 7 is a diagram showing a first embodiment of a probe used in the auxiliary device shown in FIG. 1, wherein (A) is a front view,
(B) is a left side view.

8A and 8B are diagrams showing a second embodiment of the probe used in the auxiliary device shown in FIG. 1, wherein FIG. 8A is a front view,
(B) is a left side view.

FIG. 9 is a sectional view showing a part of a second embodiment of the test auxiliary device.

FIG. 10 is a sectional view showing a part of a third embodiment of the test auxiliary device.

FIG. 11 shows a third example of the probe used in the auxiliary device shown in FIG. 1;
It is a figure which shows a part of Example of this.

FIG. 12 is a sectional view showing a part of a fourth embodiment of the test auxiliary device.

FIG. 13 is a sectional view showing a part of a fifth embodiment of the test auxiliary device.

FIG. 14 is a view showing one embodiment of a probe used in the auxiliary device shown in FIG. 13, (A) is a plan view,
(B) It is a front view, (C) is a right view.

FIG. 15 is a view showing another embodiment of the probe used in the auxiliary device shown in FIG. 13, wherein (A) is a plan view,
(B) It is a front view, (C) is a right view.

FIG. 16 is a sectional view showing a part of a sixth embodiment of the test auxiliary device.

FIG. 17 is a view showing one embodiment of a probe used in the auxiliary device shown in FIG. 16, (A) is a plan view,
(B) It is a front view, (C) is a right view.

FIG. 18 is a view showing another embodiment of the probe used in the auxiliary device shown in FIG. 16, wherein (A) is a plan view,
(B) It is a front view, (C) is a right view.

FIG. 19 is a sectional view showing a part of a seventh embodiment of the test auxiliary device.

FIG. 20 is a sectional view showing a part of an eighth embodiment of the test auxiliary device.

FIG. 21 is a view taken along line 21-21 of FIG. 20;

FIG. 22 is a view taken along line 22-22 of FIG. 20;

FIG. 23 is a sectional view showing a part of a ninth embodiment of the test auxiliary device.

FIG. 24 is a plan view of FIG. 23;

[Description of Signs] 10, 70, 100, 120, 140, 170, 200
Test auxiliary device 12 Inspection object 14 Main body 16 Electrode unit 20 Substrate 22, 50, 52, 54, 60, 72, 102, 11
2, 122, 132, 142, 190, 202 Probe 24, 90, 152, 182 Needle holder 26, 80, 150, 172, 204 Cover 28 Conductive part 30, 74, 144, 192, 206 Needle tip 31, 76 , 146, 194 Deformed portions 32, 78, 104, 114, 124, 134, 14
8,196,208 Needle rear part 34 Presser bar 36 Elastic material layer 38 Opening 40,82 Slot 42,84 Concave part 44,86 Partition wall 46 Screw member 156,160 First and second concave part 158 Slot 184,188 First First and second recesses 186 slots

Claims (11)

[Claims] An apparatus for electrically connecting a plurality of electrode portions of an object to be inspected and a conductive portion formed on one surface of a substrate, wherein each of the plurality of electrode portions is connected to the electrode portion and the conductive portion. A plurality of probes electrically connected to each other, and an assembling apparatus for assembling the probes in parallel with the substrate, wherein each probe is a deformed portion, and a probe tip portion following one end of the deformed portion, which is inspected. A needle tip having a tip pressed against an electrode part of the body, and a needle rear portion following the other end of the deformable portion, wherein the assembling device includes a retreat preventing portion for preventing retreat of the probe; And an elastically deformable needle holding portion that comes into contact with the rear portion of the needle, and wherein the probe has the rear end portion in contact with the retraction preventing portion. 2. A substrate having a plurality of conductive portions on one surface, a plurality of probes for electrically connecting an electrode portion of a device under test and the conductive portions, and a plurality of probes connected in parallel to the substrate. Each probe includes a curved deformed portion, a needle tip that is a needle tip following one end of the deformed portion, and has a tip pressed against the electrode portion of the device under test. A stylus rear portion following the other end of the deformable portion, wherein the assembling device contacts the conductive portion with at least a part of the anti-backup portion for preventing the probe from receding, and the deformable portion or the stylus rear portion. And an elastically deformable needle holding portion that comes into contact with the probe to cause the probe to make contact with the rear end portion of the probe. 3. The connection device according to claim 1, wherein the probe has an outer portion that extends in an arc shape that contacts the conductive portion when at least the electrode portion is pressed against a needle tip. 4. The connection device according to claim 3, wherein a contact portion of the outer portion with the conductive portion changes to the needle tip side as a pressing force by the test object increases. 5. The assembly device according to claim 1, wherein the at least one cover is attached to the substrate and has a recess extending in a direction in which the probes are arranged, and the retraction preventing portion. 5. The needle holder according to claim 1, further comprising: a cover to be opened; and one or more needle holders received in the recesses, the needle holders having the needle holders and extending in a direction in which the probes are arranged. The connection device according to item 1. 6. The cover further includes a plurality of slots spaced apart in a longitudinal direction of the needle holder, the plurality of slots being open to the substrate and the object to be inspected and communicating with the recess. The connection device according to claim 5, further comprising a slot, wherein a probe tip of each probe penetrates the slot and projects the probe tip out of the slot. 7. The connection device according to claim 5, wherein the anti-backup portion includes an inner surface of the recess. 8. The probe further comprises a plurality of slots opened to the side of the substrate and communicating with the recess, the plurality of slots being spaced in a longitudinal direction of the needle holder. The connection device according to claim 5, wherein at least a part of the deformation portion is received in the slot. 9. The connection device according to claim 8, wherein the anti-backup portion includes an inner surface of the recess or an end surface of the slot. 10. The connecting device according to claim 5, wherein the assembling device further comprises a stopper disposed on the cover to form the retraction preventing portion. 11. The connection device according to claim 1, wherein the probe includes a rear end face that is in contact with the anti-backup portion.