CN101968501B - Probe apparatus - Google Patents
Probe apparatus Download PDFInfo
- Publication number
- CN101968501B CN101968501B CN2010102390723A CN201010239072A CN101968501B CN 101968501 B CN101968501 B CN 101968501B CN 2010102390723 A CN2010102390723 A CN 2010102390723A CN 201010239072 A CN201010239072 A CN 201010239072A CN 101968501 B CN101968501 B CN 101968501B
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- Prior art keywords
- mentioned
- probe
- bearing assembly
- recess
- coupling
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
- G01R1/0675—Needle-like
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
Abstract
The invention provides a probe apparatus, which can decrease the displacement amount difference of the probe relative to a probe retainer as possible for performing the accurate experiment. According to the probe apparatus, an assembling apparatus assembling a combining assembly to the lower side a supporting assembly comprises a recess which is formed in any one of the combining assembly and the supporting assembly; a connecting component which is embedded with the recess; a first screw thread component which is used for assembling the connecting component onto the combining assembly or the supporting assembly; a second screw thread component which is matched to the other one of the combining assembly and the supporting assembly by the screw thread connecting mode via penetrating the connecting component along the vertical direction.
Description
Technical field
The present invention relates to the probe unit for the tested energizing test of having a medical check-up of the such tabular of display panels.
Background technology
Generally speaking, the such tested testing fixture that utilizes the such probe unit of employing probe unit of having a medical check-up of tabular of display panels is that test unit checks i.e. test.As one of such probe unit, the device of patent documentation 1 and 2 records is arranged.
The probe unit of patent documentation 1 record comprises: be installed in the tabular glide base on the body frame of test unit; Be installed in the connection assembly on the probe base; Hang on the bearing assembly on the connection assembly with can adjusting height and position; Probe assembly (assembled probe body), it is by forming a plurality of probe support on the probe retainer, and it is assembled on the bearing assembly.
Be inserted under the state that is formed on the recess on the bearing assembly at the protuberance of giving prominence to upward from the probe retainer, probe assembly is installed on the bearing assembly by a pair of screw member.Thus, probe assembly can be maintained on the bearing assembly with respect to bearing assembly with loading and unloading.
Each probe comprises: tabular pin middle section; Front end area from the forwards one extension of pin middle section; From front end needle region outstanding front end needle point downwards; Back-end region from the rearward one extension of pin middle section; From back-end region outstanding rear end needle point upward.Such probe is under the state of left and right directions at the thickness direction of pin middle section, is configured on the probe retainer.
Assembled probe body also comprises except probe and probe retainer: pair of guide rods, and along thickness direction transfixion pin middle section and the extension of pin middle section, both ends are supported on the probe retainer; The front channel bar, it is bearing on the probe retainer, has in order to take in the front end needle point a plurality of grooves that devices spaced apart ground forms on left and right directions; The rear end side channel bar, it is bearing on the probe retainer, has in order to take in the rear end needle point a plurality of grooves that devices spaced apart ground forms on left and right directions.
In the probe unit of patent documentation 1 record, probe is bearing on the probe retainer by pair of guide rods.In such probe unit, front end needle point and rear end needle point are pressed on respectively on the connecting portion of the such wiring plates of tested electrode of having a medical check-up and anode strip, when overdrive (overdrive) acts on each probe, probe with respect to the displacement of probe retainer according to the size that is present in the gap between each probe and the guide rod and difference.
Because design is upper and process the tolerance of allowing, can't avoid forming between probe and guide rod gap as described above.Its result, electrically contacting between the pad (land) of the contact between front end needle point and the tested electrode of having a medical check-up and rear end needle point and wiring plates becomes unstable, can't test accurately namely checking.
In order to solve above-mentioned problem, in the probe unit of patent documentation 2 records, with above-mentioned guide rod as register pin, and the 1st and the 2nd recess that is provided with the Japanese コ word shape open towards the place ahead in leading section and the rearward end of the pin central portion of each probe respectively, the bearing bar on the rearward end of being located at front channel bar and component sheets is provided with rearward outstanding and be entrenched in the 1st and the 2nd protuberance in the 1st and the 2nd recess respectively.
In the probe unit of patent documentation 2 record, by with guide rod as register pin, the 1st recess and the 1st protuberance chimeric and the 2nd recess and the 2nd protuberance chimeric, the probe that being reduced in overdrives when acting on each probe is poor with respect to the displacement of component sheets.
But, in the probe unit of patent documentation 2 records, show no sign of the apparatus for assembling that openly probe assembly is assembled on the bearing assembly (slide assemblies).
In addition, in the apparatus for assembling of patent documentation 1 record, the repeatability of the tip position in order to obtain to change the consumables such as probe, probe assembly, connection plates, accessory part, use a plurality of members such as the required retainer of complicated operation, a plurality of protuberance, a plurality of plunger, a plurality of plunger pin, a plurality of compression helical springs, so the not only shape of apparatus for assembling and structure complicated, and the replacing operation of consumables becomes numerous and diverse.
Patent documentation 1: TOHKEMY 2004-191064 communique
Patent documentation 2: TOHKEMY 2009-115585 communique
Summary of the invention
The probe unit that the object of the present invention is to provide a kind of shape of simplifying apparatus for assembling and structure and carry out easily the replacing operation of consumables.
Probe unit of the present invention comprises: bearing assembly; Coupling unit, it is configured in the downside of this bearing assembly; Apparatus for assembling, it is assembled into above-mentioned coupling unit the downside of above-mentioned bearing assembly; Assembled probe body, comprise a plurality of probes with front end needle point and rear end needle point and the probe retainer that disposes this probe, and above-mentioned probe on above-mentioned probe retainer, and is assembled in the downside of above-mentioned coupling unit with the state configuration of extending along fore-and-aft direction on devices spaced apart ground on the left and right directions.
Above-mentioned apparatus for assembling comprises: recess, and it is formed on the either party in above-mentioned coupling unit and the above-mentioned bearing assembly; Coupling member, it is entrenched in this recess; The 1st screw member, it is used for this coupling member is assembled into above-mentioned coupling unit or above-mentioned bearing assembly; The 2nd screw member, it runs through above-mentioned coupling member along the vertical direction, with the opposing party's threaded engagement in above-mentioned coupling unit and the above-mentioned bearing assembly.
Above-mentioned recess and above-mentioned coupling member can have circular or polygonal shape of cross section.
Above-mentioned apparatus for assembling also comprises: the 2nd recess, it is formed on the above-mentioned either party in above-mentioned coupling unit and the above-mentioned bearing assembly, and in the XY face that is formed by left and right directions and fore-and-aft direction, extend, be formed on above-mentioned coupling unit and above-mentioned bearing assembly in above-mentioned either party on above-mentioned recess be communicated with; The pin member, it extends in above-mentioned XY face from above-mentioned coupling member, is incorporated in above-mentioned the 2nd recess.
Above-mentioned apparatus for assembling can also comprise: the 3rd recess, and it is formed on the above-mentioned either party in above-mentioned coupling member and the above-mentioned bearing assembly, and the opposing party's side in above-mentioned coupling member and above-mentioned bearing assembly is open; The 2nd pin member, its opposing party from above-mentioned coupling member and above-mentioned bearing assembly extends along the vertical direction, is incorporated in above-mentioned the 3rd recess.
Above-mentioned coupling unit can front have towards below and dispose the stage portion of above-mentioned assembled probe body, and have for the chimeric above-mentioned recess of above-mentioned coupling member, also have the internal thread hole for above-mentioned the 2nd screw member threaded engagement.
Above-mentioned recess also can be formed on the above-mentioned coupling unit, and above-mentioned coupling member is installed on the above-mentioned bearing assembly by above-mentioned the 1st screw member, and above-mentioned the 1st screw member runs through above-mentioned coupling member downwards from the top, with above-mentioned coupling unit threaded engagement.
Probe unit of the present invention can also comprise: the wiring plates, it is configured in the downside of above-mentioned coupling unit, rearward end is turned back to the upside of above-mentioned coupling unit to be formed, and the lower surface at leading section has a plurality of connecting portions, and has a plurality of the 1st wirings of rearward extending from this connecting portion; Coupling assembling, it is configured between the rearward end and above-mentioned bearing assembly of above-mentioned coupling unit, and is installed on above-mentioned coupling unit or the above-mentioned bearing assembly; Connect plates, it is installed in the downside of above-mentioned coupling assembling with the state leading section that rearward extends from this coupling assembling, and it has a plurality of the 2nd wirings that direction is forwards, backwards extended, and leading section of each the 2nd wiring and the above-mentioned the 1st connects up and contacts; Elastic body, it is configured in the downside of above-mentioned coupling assembling and the position corresponding with the contact site of the above-mentioned the 1st and the 2nd wiring.
In probe unit of the present invention, the apparatus for assembling that is assembled into the downside of bearing assembly in connection with assembly comprises: recess, and it is formed on the either party in coupling unit and the bearing assembly; Coupling member, itself and this recess is chimeric; The 1st screw member, it is used for this coupling member is assembled into coupling unit or bearing assembly; The 2nd screw member, it runs through coupling member along the vertical direction, with the opposing party's threaded engagement in coupling unit and the above-mentioned bearing assembly.
Therefore, can under the state that coupling unit is separated from bearing assembly, carry out the replacing of assembled probe body and wiring plates.Can also make coupling unit separate and make the replacing of carrying out probe under the state that assembled probe body separates from coupling unit from bearing assembly.And can make coupling unit separate and make the replacing that connects plates under the state that coupling assembling separates from bearing assembly from bearing assembly.
As the above results, according to the present invention, compared with prior art, simplify shape and the structure of apparatus for assembling, make the replacing operation of the consumables that comprise probe become easy.
Description of drawings
Fig. 1 is the front view of an embodiment of expression probe unit of the present invention.
Fig. 2 is the right side view of probe unit shown in Figure 1.
Fig. 3 is the vertical view of probe unit shown in Figure 1.
Fig. 4 is the enlarged drawing of the IV part among Fig. 3.
Fig. 5 is the V-V cut-open view of Fig. 1.
Fig. 6 is the cut-open view of exploded representation probe unit shown in Figure 1.
Fig. 7 has removed assembled probe body and coupling unit front view afterwards.
Fig. 8 is expression is assembled into an embodiment of the apparatus for assembling on the bearing assembly in connection with assembly exploded perspective view.
Fig. 9 is the front view that amplifies the part of expression assembled probe body.
Figure 10 is the right side view of assembled probe body shown in Figure 9.
Figure 11 is the XI-XI cut-open view of Fig. 9.
Figure 12 is the rear end needle point of expression probe and the amplification view of an embodiment near thereof.
Figure 13 is expression probe, the recess at component sheets place and the amplification view of protuberance and near their embodiment.
Figure 14 is elastic body and near amplification view thereof.
Figure 15 is other the cut-open view of embodiment of expression assembled probe body.
Embodiment
In the present invention, in Fig. 1, above-below direction is called above-below direction or Z direction, left and right directions is called left and right directions or directions X, paper is carried on the back direction be called fore-and-aft direction or Y-direction.But these directions are according to the tested posture of having a medical check-up that is accommodated in housing panels section as worktable and difference.
Therefore, probe unit of the present invention is to be installed on the test unit with as follows state to use: said above-below direction (Z direction) in fact might be the state of the either direction in the state etc. of the state of above-below direction, the state that turns upside down, vergence direction in the present invention.
Embodiment
With reference to Fig. 1～Fig. 4, probe unit 10 haves a medical check-up 12 with the display panels of local repressentation in Fig. 2,5,10,11 and 15 as tested, is used for tested 12 the inspection of lighting of having a medical check-up.Tested having a medical check-up 12 has rectangular shape, and in addition, the pitch in corresponding with rectangular adjacent 2 limits at least edge with regulation is formed with a plurality of electrodes 14 (with reference to Figure 10,11 and 15).Each electrode 14 has along the shape of the band shape of extending with the direction (directions X or Y-direction) of the edge quadrature that disposes this electrode 14.
With reference to Fig. 1～Fig. 5, probe unit 10 comprises: assembled probe body 16; Bearing assembly 18, it is used for supporting assembled probe body 16; Connection assembly 20, it links bearing assembly 18; Coupling unit 22, it is supported in the downside (either side on the Z direction) of bearing assembly 18; Apparatus for assembling 24, it is used for being assembled in connection with assembly 22 downside of bearing assembly 18; Wiring plates 26, it is supported in the downside of coupling unit 22; Coupling assembling 28, it is installed in the downside of bearing assembly 18.
By being assembled with connection assembly 20 at the flat probe base 30 that is installed on the body frame of test unit (not shown), probe unit 10 is assembled on the test unit as the part of test unit.
With reference to Fig. 9～Figure 11, in assembled probe body 16, a plurality of probes 32 of being made by conductive material with the state configuration of rearward extending on devices spaced apart ground on the left and right directions in devices spaced apart on the fore-and-aft direction be assembled on a pair of channel bar 36 of lower surface of component sheets 34, end with bar member 38 penetration probes 32, two bar members 38 of circular shape of cross section is assembled on the component sheets 34 by a pair of covering 40.
As shown in figure 11, each probe 32 is pins of template, comprising: rectangular tabular pin main part 32a; From the front end of the pin main part 32a front end area 32b that extends of one forwards; The back-end region 32c that extends of one rearward from the rear end of pin main part 32a; From the front end of front end area 32b crooked front end needle point 32d downwards; The crooked rear end needle point 32e that forms upward from the rear end of back-end region 32c.Front end needle point 32d and rear end needle point 32e form triangle and sharp-pointed.
Each channel bar 36 is made into the shape of prism-shaped by the material of electrical insulating property, and is installed in front lower surface and the rear portion lower surface of component sheets 34 with the state that extends along left and right directions.Such as Fig. 9～shown in Figure 12, each channel bar 36 lower surface have alongst compartment of terrain that (left and right directions) separate regulation forwards, backwards direction extend and open a plurality of grooves 42 downwards.
Each probe 32 is take the thickness direction of pin main part 32a as left and right directions, and forwards with under the outstanding state in rear be configured in side by side on the channel bar 36 from component sheets 34 respectively at front end needle point 32d and rear end needle point 32e, and make the groove 42 of front end area 32b and back-end region 32c and channel bar 36 chimeric.
Shown in Fig. 1 and 9, each covering 40 forms with the tabular covering member 40b that is positioned at its outside by being positioned at inboard tabular covering member 40a.
Also shown in Fig. 1,2,9 and 10, each covering 40 utilizes a plurality of screw members 44 that run through covering member 40a, 40b and cooperate with the end thread of component sheets 34 left and right directions can be installed in the side of component sheets 34 left and right directions with dismantling.
And each covering 40 utilizes a plurality of register pins 46 with respect to component sheets 34 location.Each register pin 46 is installed in this end with the end state that direction is outstanding to the left and right from component sheets 34 left and right directions, and inserts two covering member 40a, 40b.
Each inboard covering member 40a has the hole 48 (with reference to Fig. 9) of the end of taking in bar member 38.Thus, bar member 38 together utilizes screw member 44 and register pin 46 to be installed on the component sheets 34 with covering member 40a and 40b and positions.
Shown in Figure 10,11 and 13, the channel bar 36 of front side and each probe 32 have the protuberance 50 of rearward giving prominence to and the recess 52 of forwards opening in rearward end and leading section respectively.Protuberance 50 and recess 52 have the cross sectional shape of Japanese コ word shape, and chimeric mutually.
In addition, protuberance 50 and recess 52 comprise respectively: the lower edge and rising wood 50a and the 52a that are positioned at below (either side on the Z direction); Be positioned at rising wood and lower edge 50b and the 52b of top (opposite side on the Z direction).
The lower edge 52b of the lower edge 50a of protuberance 50 and recess 52 is towards the below, and the rising wood 50b of protuberance 50 and the rising wood 52a of recess 52 are towards the top.The rising wood 52a of recess 52 goes lower more rearward.Thus, the inside bottom downside at recess 52 is formed with a pair recess 52c who adds.
Also can be provided with register pin 54 at coupling unit 22 on the contrary with above-mentioned, be provided with pilot hole in component sheets 34.
Each probe 32 with state configuration as described below on channel bar 36: protuberance 50 and recess 52 are mutually chimeric, and bar member 38 penetration probes 32, and chimeric at front end area 32b and back-end region 32c and groove 42.
In addition, such channel bar 36 utilizes screw member, the bonding agent iseikonia is above-mentioned is assembled on the component sheets 34 like that, and covering 40 is assembled on the component sheets 34 as described above, keeps thereby each probe 32 is assembled on the component sheets 34.
Shown in Fig. 6 and 8, coupling unit 22 has the downward stage portion 56 that has disposed assembled probe body 16.Stage portion 56 is in the to the left and right direction extension of leading section of the bottom of coupling unit 22 downwards.
Shown in Fig. 1,5 and 6, assembled probe body 16 utilize the through hole 57 that runs through coupling unit 22 from the top downwards and with the screw member 60 with head of internal thread hole 58 threaded engagement of being located at component sheets 34, insert at register pin 54 under the state of above-mentioned pilot hole and be maintained on the downward stage portion 56.
In the drawings, adjacent probe 32 separates than large-spacing at left and right directions, but in fact the arrangement pitch of probe 32 is less.Particularly the configuration section distance of electrode is different with width dimensions and different according to tested 12 the kind of having a medical check-up apart from, width dimensions for the number of the groove of the number of probe 32, gauge, arrangement pitch and channel bar 36, configuration section.
Also can be after being installed to two channel bars 36 on the component sheets 34, a side covering 40 is installed on the component sheets 34.
Can carry out the decomposition of assembled probe body 16 with above-mentioned opposite operation by carrying out.Can by carrying out with after above-mentioned opposite operation also changes original probe into new probe, carry out operation same as described above and carry out the replacing of probe 32.
Under with the state in the above-mentioned pilot hole of register pin 54 (with reference to Fig. 1 and 6) Intercalation assembly 22, make screw member 60 from the top downwards the through hole 57 by coupling unit 22 and with the above-mentioned internal thread hole threaded engagement of component sheets 34, thereby assembled probe body 16 can be assembled on the coupling unit 22.
Unloading assembled probe body 16 from coupling unit 22 can carry out with above-mentioned opposite operation by carrying out.
In this embodiment, component sheets 34 and channel bar 36 are formed in one on the above-below direction distolateral (lower side) disposes a plurality of probes 32 side by side along left and right directions devices spaced apart ground probe retainer.
With reference to Fig. 1～7, bearing assembly 18 is made into the shape of cross section of L word shape by tabular 2 support 18a and 18b.Connection assembly 20 is made of the shape of the word of falling L shape the extension 20b that is installed in the main part 20a on the probe base 30 and forwards extend from the top of main part 20a.
In illustrated example, bearing assembly 18 forms supporting mass with coupling unit 22, and screw member 60 is as assembled probe body 16 being installed to the assembly on the coupling unit 22 and playing a role.
Bearing assembly 18 utilizes along left and right directions devices spaced apart and the pair of guide rails 62 of extending along the vertical direction and the guide 64 that extends along the vertical direction between two guide rails 62 and can be along the vertical direction links with the front surface of the main part 20a of connection assembly 20 movably, and utilizes ground, position that bolt 66 can adjust above-below direction and the extension 20b of connection assembly 20 to link.
Two guide rails 62 and guide 64 are respectively linear track and linear guide.Two guide rails 62 are installed in the rear end face of the support 18a of bearing assembly 18.With respect to this, guide 64 is configured between two guide rails 62 of left and right directions, and is installed in the front end face of the main part 20a of connection assembly 20, thereby can be moved along the vertical direction by 62 guiding of two guide rails.
Each compression helical spring 70 with the state configuration of the extension 20b that runs through along the vertical direction connection assembly 20 between bearing assembly 18 and tabular spring press spare 72, this spring press spare 72 utilizes a plurality of screw members 71 (with reference to Fig. 3 and 5) to be installed on the extension 20b of connection assembly 20.Thus, by adjusting the screw-in amount in the bolt 66 screw-in threaded holes 68, can adjust the height and position of bearing assembly 18 and assembled probe body 16.
As shown in Figure 5, connection assembly 20 utilizes and runs through connection assembly 20 from the top downwards and be installed in removedly on the probe base 30 with a plurality of bolts 76 of probe base threaded engagement.Each bolt 76 runs through the main part 20a of connection assembly 20 downwards from the top, and with threaded hole 78 threaded engagement that are formed on the probe base 30.
With reference to Fig. 1～8, apparatus for assembling 24 comprises: be formed on the recess 80 (with reference to Fig. 6 and 8) on the coupling unit 22; Be entrenched in the coupling member 82 in the recess 80; Coupling member 82 is assembled into the downside of bearing assembly 18 and makes bearing assembly 18 support a plurality of screw members 84 (with reference to Fig. 3 and 7) of coupling members 82; Run through along the vertical direction coupling member 82 through hole 85 and with the screw member 86 of threaded hole 88 threaded engagement of coupling unit 22.
In illustrated example, as shown in Figure 6, internal thread hole 88 is formed among the nut 22b of the main part 22a that can not be assembled into displacement coupling unit 22, yet also can be formed directly into as shown in Figure 8 on the main part 22a.
Under can the state in the above-mentioned pilot hole of register pin 54 (with reference to Fig. 1) Intercalation assembly 22, with screw member 60 from the top downwards the through hole 57 by coupling unit 22 and with internal thread hole 58 threaded engagement of component sheets 34, thereby assembled probe body 16 is assembled on the coupling unit 22.
Apparatus for assembling 24 is by utilizing screw member 84 that coupling member 82 is installed on the bearing assembly 18, and make screw member 86 run through along the vertical direction coupling member 82 and with internal thread hole 88 threaded engagement, thereby be assembled into the downside of the support 18b of bearing assembly 18 in connection with assembly 22.
Apparatus for assembling 24 is also chimeric by recess 80 and coupling member 82, remains on the position of the regulation in the XY face that is formed by left and right directions and fore-and-aft direction with respect to bearing assembly 18 in connection with assembly 22.
In illustrated example, apparatus for assembling 24 also comprises: recess 90, and it is formed on the coupling unit 22, extends in the XY face, is communicated with recess 80; Pin member 92, it extends in the XY face from coupling member 82, and is incorporated in the recess 90; A pair of recess 94, it is formed on the lower surface of support 18b of bearing assembly 18, and open towards coupling member 82 sides; Pair of pin member 96, extend its top to coupling member 82, is incorporated in the recess 94.
Extend to a direction (being directions X in illustrated example) recess 90 and pin member 92 ratio screw member 86 position on the front in the XY face.With respect to this, two recesses 94 and two pin members 96 separate in the direction of intersecting with the direction that recess 90 and pin member 92 extends, the direction (being Y-direction in illustrated example) of preferred quadrature respectively.
Apparatus for assembling 24 utilize above-mentioned recess 90,94 and pin member 92,96 remain on the position of the regulation on left and right directions and the fore-and-aft direction in connection with assembly 22 with respect to bearing assembly 18, and remain on along the vertical direction the angle position of the regulation around the θ axis that extends.
Also can be provided with recess 80 at bearing assembly 18, coupling member 82 screw threads are fixed on the coupling unit 22.Can also with recess 90,94 and the pin member 92,96 be located at above-mentioned opposite member on.
Can pin member 96 be positioned under the state of corresponding recess 94, utilize screw member 84 coupling member 82 to be installed to the downside of bearing assembly 18, then make coupling member 82 and recess 80 chimeric, pin member 92 is positioned under the state of corresponding recess 90, make internal thread hole 88 threaded engagement of screw member 86 and coupling unit 22, thereby be assembled on the bearing assembly 18 in connection with assembly 22.
Unloading coupling unit 22 from bearing assembly 18 can carry out with above-mentioned opposite operation by carrying out.
Shown in Fig. 2,5 and 6, wiring plates 26 are the compound circuit plates, comprising: the front area 26a that is formed by flexible print wiring circuit (FPC); The zone line 26b that the anode strip (TAB) that is linked to each other by the rearward end with front area 26a forms; The Background Region 26c that the flexible print wiring circuit (FPC) that is linked to each other by the rearward end with zone line 26b forms.
Shown in Fig. 2,5,6,8,11 and 12, utilize fixed head 100 plates 26 that will connect up to be arranged at the downside of coupling unit 22, and will drive tested 12 the integrated circuit 102 of having a medical check-up and be configured in zone line 26b.
The front area 26a of wiring plates 26 has a plurality of connection pads (land) 104 (with reference to Figure 11,12) of devices spaced apart on left and right directions at the leading section lower surface, and has from connecting pad 104 many wiring 106 (with reference to Figure 11,12 and 14) that rearward devices spaced apart ground extends side by side on left and right directions.
Also can substitute and will be located at 106 the connection pad 104 of respectively connecting up as the connecting portion of the wiring 106 of rear end needle point 32e and wiring plates 26, and with the part of each wiring 106 as such connecting portion.
The zone line 26b of wiring plates 26 has in the wiring of many front sides of devices spaced apart on the left and right directions and many rear sides wirings of devices spaced apart on left and right directions.The front side is routed in its leading section and is connected with the rearward end of wiring 106, and is connected at the lead-out terminal of rearward end with integrated circuit 102.With respect to this, rear side is routed in leading section and is connected with the input terminal of integrated circuit 102.
Many the wirings of Background Region 26c with devices spaced apart on left and right directions of wiring plates 26, and these are routed in its leading section and connect up with the rear side of zone line 26b and be connected.Wiring plates 26 are turned back to the upside of coupling unit 22 in the rearward end of Background Region 26c, make the rearward end of wiring 106 towards the top (with reference to Fig. 8 and Figure 14).
With reference to Fig. 2,5 and 6, coupling assembling 28 extends along left and right directions at the downside of bearing assembly 18, and between the rearward end and bearing assembly 18 of coupling unit 22.Coupling assembling 28 utilize a plurality of screw members 110 of devices spaced apart on the left and right directions and on fore-and-aft direction a plurality of register pins 112 of devices spaced apart can be installed in discretely the downside of bearing assembly 18.
Each screw member 110 run through upward coupling assembling 28 from the below and with bearing assembly 18 threaded engagement.Each register pin 112 is fixed on the either party in coupling assembling 28 and the bearing assembly 18 with the state that extends along the vertical direction, and is chimeric with the pilot hole among the opposing party who is located in coupling assembling 28 and the bearing assembly 18.
With reference to Fig. 2,5,6 and 14, probe unit 10 also comprises: connect plates 114, it is installed in the downside of coupling assembling 28 with the state leading section that rearward extends from coupling assembling 28; Elastic body 116, it is installed in the downside of coupling assembling.
Connect many wiring 118 (with reference to Figure 14) that plates 114 have on left and right directions devices spaced apart and extend along fore-and-aft direction.Each at least leading section of 118 of connecting up exposes at the lower surface that connects plates 114, contacts with the wiring 106 of the top of the wiring plates 26 of turning back.
The wiring 118 that connects plates 114 is connected with the circuit of test unit under probe unit 10 is assembled in state on the test unit.Therefore, each probe 32 is connected with the circuit of test unit via wiring 106, the integrated circuit 102 of wiring plates 26 and the wiring 118 that is connected plates 114.
Pass at screw member 86 under the state of coupling member 82 coupling member 82 is installed on the bearing assembly 18, assembled probe body 16 is installed on the coupling unit 22, after being installed to coupling assembling 28 on the bearing assembly 18, screw member 86 is screwed in the internal thread hole 88 of coupling unit 22, thereby be installed on the bearing assembly 18 in connection with assembly 22.
Can come to unload coupling unit 22 from bearing assembly 18 with the threaded engagement of internal thread hole 88 by removing screw member 86.
Therefore, can under the state that coupling unit 22 is separated from bearing assembly 18, carry out the replacing of assembled probe body 16 and wiring plates 26.In addition, can under the state that makes coupling unit 22 separate, make assembled probe body 16 to separate from coupling unit 22 from bearing assembly 18, carry out the replacing of probe 32.And, can under the state that makes coupling unit 22 separate, make coupling assembling 28 to separate from bearing assembly 18 from bearing assembly 18, connect the replacing of plates 114.
As the above results, adopt probe unit 10, compared with prior art, simplify shape and the structure of apparatus for assembling 24, and make the replacing operation of the consumables that comprise probe 32 become easy.
When being assembled on the bearing assembly 18 in connection with assembly 22 as described above, as shown in figure 12, the rear end needle point 32e of each probe 32 is pressed on the connection pad 104 of wiring plates 26.Rear end needle point 32e presses to the signature that connects pad 104 and acts on as described below each probe 32.
In order to make upward displacement of front end needle point 32d, each probe 32 is subject to clockwise revolving force in Figure 11, as shown in figure 13, the lower edge 52a of recess 52 is pressed in the lower edge 50a of the protuberance 50 of channel bar 36, and the rising wood 52b of recess 52 is pressed in the rising wood 50b of the protuberance 50 of channel bar 36.
Thus, for probe 32, even have the gap that causes with the tolerance of processing by in design at chimeric mutually protuberance 50 and recess 52, also front end needle point 32d can be remained on identical height and position.Its result, probe reduces significantly with respect to the difference of the displacement of probe retainer, can test accurately.
The front end needle point of probe 32 is upward during displacement, and the paying of recess 52 adds recess 52c and play a role as the keeping out of the way the space of rear end lower of protuberance 50.Probe 32 is pressed against on the channel bar 36 in addition, prevents that direction is carried out displacement to the left and right.
In to the tested test unit of testing of having a medical check-up, used a plurality of probe units 10 that will have shape as described above structure to be configured to a plurality of probe units on the probe base 30.
With reference to Figure 15, assembled probe body 120 also comprises the stop dog component 124 that extends along left and right directions between the channel bar 36,36 of front and back, above probe 122.Stop dog component 124 is by extending and the tabular teat 124b that gives prominence to downwards is made into the cross sectional shape of the word of falling L shape along left and right directions between the tabular main part 124a that extends along left and right directions at the upside of probe 122 and the channel bar 36 at probe 122 and rear side.
Each probe 122 comprises: front side protuberance 122a, and its inside bottom from the recess 52 of front is projected into front end, with protuberance 50 butts of the channel bar 36 of front side; Upper collateral part 122b, the lower surface of the main part 124a of itself and stop dog component 124 and the front surface butt of teat 124b.
Each probe 122 rear end needle point 32e be pressed under the state of the connection pad 104 that connects plates 26, front end needle point 32d is pressed and haves a medical check-up during 12 electrode 14 in tested, protuberance 122a is pressed on the teat 50 of the channel bar 36 of front side strongly.Thus, direction, fore-and-aft direction and above-below direction carry out displacement to the left and right with respect to the probe retainer to prevent reliably probe 122.
In the above-described embodiments, protuberance 50 and recess 52 also can with the above-mentioned opposite either side of being located at respectively in probe and the probe retainer.In this case, in the embodiment of Figure 15, protuberance 122a can be located on the channel bar 36 of front side.
In addition, also can replace the probe of template, use the probe of the pin type of being made by metal fine, with the part of each wiring as other the probe such as the probe member of probe.
The present invention not only can be applied to the probe unit that display panels is used, and can also be applied to be formed with the probe unit that other such tabulars of probe unit, integrated circuit that other such substrate for display of glass substrate of thin film transistor (TFT) use are examined body and function.
The present invention is not limited to above-described embodiment, only otherwise the main idea that breaks away from claims record just can be carried out various changes.
Claims (7)
1. a probe unit is characterized in that, comprising: bearing assembly; Coupling unit, it is configured in the downside of this bearing assembly; Apparatus for assembling, it is used for this coupling unit is assembled into the downside of above-mentioned bearing assembly; Assembled probe body, it comprises a plurality of probes with front end needle point and rear end needle point and the probe retainer that disposes this probe, and above-mentioned probe with the state configuration of extending along fore-and-aft direction on devices spaced apart ground on the left and right directions on above-mentioned probe retainer, and be assembled in the downside of above-mentioned coupling unit
Above-mentioned apparatus for assembling comprises: recess, and it is formed at the either party in above-mentioned coupling unit and the above-mentioned bearing assembly; Coupling member, it is entrenched in this recess; The 1st screw member, it is used for this coupling member is assembled into above-mentioned coupling unit or above-mentioned bearing assembly; The 2nd screw member, its run through along the vertical direction above-mentioned coupling member and with above-mentioned coupling unit and above-mentioned bearing assembly in the opposing party's threaded engagement.
2. probe unit according to claim 1,
Above-mentioned recess and above-mentioned coupling member have circular or polygonal shape of cross section.
3. probe unit according to claim 1,
Above-mentioned apparatus for assembling also comprises: the 2nd recess, and it is formed at the side who is formed with above-mentioned recess in above-mentioned coupling unit and the above-mentioned bearing assembly, and extends in the XY face that is formed by left and right directions and fore-and-aft direction, and it is communicated with above-mentioned recess; The pin member, it extends in above-mentioned XY face from above-mentioned coupling member, is incorporated in above-mentioned the 2nd recess.
4. probe unit according to claim 1,
Above-mentioned apparatus for assembling also comprises: the 3rd recess, and it is formed at the side in above-mentioned coupling member and the above-mentioned bearing assembly, and the opposing party's side in above-mentioned coupling member and above-mentioned bearing assembly is open; The 2nd pin member, its opposing party from above-mentioned coupling member and above-mentioned bearing assembly extends along the vertical direction, is incorporated in above-mentioned the 3rd recess.
5. probe unit according to claim 1,
Above-mentioned coupling unit front have towards below and dispose the stage portion of above-mentioned assembled probe body, and have for the chimeric above-mentioned recess of above-mentioned coupling member, also have the internal thread hole for above-mentioned the 2nd screw member threaded engagement.
6. probe unit according to claim 1,
Above-mentioned recess is formed on the above-mentioned coupling unit, and above-mentioned coupling member is installed on the above-mentioned bearing assembly by above-mentioned the 1st screw member, above-mentioned the 1st screw member run through above-mentioned coupling member downwards from the top and with above-mentioned coupling unit threaded engagement.
7. probe unit according to claim 1,
This probe unit also comprises:
The wiring plates, the downside that it is configured in above-mentioned coupling unit makes rearward end turn back to the upside of above-mentioned coupling unit and forms, and has a plurality of connecting portions at the lower surface of leading section, and has a plurality of the 1st wirings of rearward extending from this connecting portion;
Coupling assembling, it is configured between the rearward end and above-mentioned bearing assembly of above-mentioned coupling unit, and is installed on above-mentioned coupling unit or the above-mentioned bearing assembly;
Connect plates, it is installed in the downside of above-mentioned coupling assembling with the state leading section that rearward extends from this coupling assembling, and has a plurality of the 2nd wirings of forwards, backwards direction extension, and leading section of each the 2nd wiring contacts with above-mentioned the 1st wiring;
Elastic body, it is configured in the downside of above-mentioned coupling assembling and the position corresponding with the contact site of the above-mentioned the 1st and the 2nd wiring.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009-174249 | 2009-07-27 | ||
| JP2009174249A JP5491790B2 (en) | 2009-07-27 | 2009-07-27 | Probe device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101968501A CN101968501A (en) | 2011-02-09 |
| CN101968501B true CN101968501B (en) | 2013-04-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010102390723A Active CN101968501B (en) | 2009-07-27 | 2010-07-23 | Probe apparatus |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5491790B2 (en) |
| KR (1) | KR101123649B1 (en) |
| CN (1) | CN101968501B (en) |
| TW (1) | TWI420112B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012233723A (en) * | 2011-04-28 | 2012-11-29 | Micronics Japan Co Ltd | Probe device and probe unit |
| KR101558256B1 (en) * | 2015-05-18 | 2015-10-12 | 주식회사 기가레인 | A probe pin and assembly for fixing the probe pin |
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| JP2005274488A (en) * | 2004-03-26 | 2005-10-06 | Micronics Japan Co Ltd | Probe assembly |
| KR100684045B1 (en) * | 2005-08-08 | 2007-02-16 | 주식회사 프로텍 | Probe assembly for a tester of the liquid crystal display |
| JP2007322158A (en) * | 2006-05-30 | 2007-12-13 | Micronics Japan Co Ltd | Probe unit and inspection device |
| CN101281212A (en) * | 2007-04-02 | 2008-10-08 | 日本麦可罗尼克斯股份有限公司 | Assembled probe body |
| CN101303370A (en) * | 2007-05-08 | 2008-11-12 | 日本麦可罗尼克斯股份有限公司 | Probe unit and detection apparatus |
| CN101308164A (en) * | 2007-05-16 | 2008-11-19 | 日本麦可罗尼克斯股份有限公司 | Probe assembly and inspection device |
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| JPS59137843U (en) * | 1983-03-05 | 1984-09-14 | 株式会社東海理化電機製作所 | Removable mirror mounting device for vehicles |
| JP2000214184A (en) * | 1999-01-26 | 2000-08-04 | Micronics Japan Co Ltd | Probe device |
| JP2001004662A (en) * | 1999-06-22 | 2001-01-12 | Micronics Japan Co Ltd | Probe device |
| TW548409B (en) * | 2001-12-31 | 2003-08-21 | Internat Technology Co Ltd | Prober for testing TFT-LCD |
| JP4313565B2 (en) * | 2002-12-06 | 2009-08-12 | 株式会社日本マイクロニクス | Probe device |
| JP4790997B2 (en) * | 2004-03-26 | 2011-10-12 | 株式会社日本マイクロニクス | Probe device |
| TW200815763A (en) * | 2006-09-26 | 2008-04-01 | Nihon Micronics Kabushiki Kaisha | Electrical test probe and electrical test probe assembly |
| KR20080052710A (en) * | 2006-12-08 | 2008-06-12 | 주식회사 파이컴 | Probe assembly |
| MX2009007895A (en) * | 2007-01-31 | 2009-07-31 | Moen Inc | Valve cartridge insensitive to installation load. |
| JP2009115585A (en) * | 2007-11-06 | 2009-05-28 | Micronics Japan Co Ltd | Probe assembly and test device |
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2009
- 2009-07-27 JP JP2009174249A patent/JP5491790B2/en active Active
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2010
- 2010-06-02 TW TW099117733A patent/TWI420112B/en active
- 2010-07-07 KR KR1020100065121A patent/KR101123649B1/en active IP Right Grant
- 2010-07-23 CN CN2010102390723A patent/CN101968501B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005274488A (en) * | 2004-03-26 | 2005-10-06 | Micronics Japan Co Ltd | Probe assembly |
| KR100684045B1 (en) * | 2005-08-08 | 2007-02-16 | 주식회사 프로텍 | Probe assembly for a tester of the liquid crystal display |
| JP2007322158A (en) * | 2006-05-30 | 2007-12-13 | Micronics Japan Co Ltd | Probe unit and inspection device |
| CN101281212A (en) * | 2007-04-02 | 2008-10-08 | 日本麦可罗尼克斯股份有限公司 | Assembled probe body |
| CN101303370A (en) * | 2007-05-08 | 2008-11-12 | 日本麦可罗尼克斯股份有限公司 | Probe unit and detection apparatus |
| CN101308164A (en) * | 2007-05-16 | 2008-11-19 | 日本麦可罗尼克斯股份有限公司 | Probe assembly and inspection device |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201104259A (en) | 2011-02-01 |
| JP5491790B2 (en) | 2014-05-14 |
| KR101123649B1 (en) | 2012-03-20 |
| JP2011027580A (en) | 2011-02-10 |
| CN101968501A (en) | 2011-02-09 |
| KR20110011540A (en) | 2011-02-08 |
| TWI420112B (en) | 2013-12-21 |
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