JP4443916B2 - Probe device - Google Patents

Description

  The present invention relates to a probe apparatus used for inspecting a plate-like object such as a liquid crystal panel and an integrated circuit.

[Definition of terms]
In the present invention, one direction and the other direction in a plane parallel to the object to be inspected are referred to as the front-rear direction and the left-right direction, respectively, and the direction perpendicular to the object to be inspected is referred to as the up-down direction. Are called the front and rear, respectively, and the plane parallel to the object to be inspected is called the horizontal plane.

  In general, flat objects such as integrated circuits and liquid crystal display panels are inspected using a probe device such as a probe card or a probe unit.

  One of the probe devices used in a current-carrying test for a display substrate such as a liquid crystal display panel is described in Patent Document 1.

JP2001-141747

  In the probe device described in Patent Document 1, a plurality of wirings extending in parallel in the front-rear direction at intervals in the left-right direction are formed on one surface of the electrically insulating film by a photolithography technique, and protrusions are formed on the front end portions of the respective wirings. An electrode is formed, and a probe sheet that uses a part of each wiring as a probe (probe element) is used.

  The probe sheet is attached to the lower side of the probe holder and assembled to the probe block. The probe holder is detachably attached to the lower side of the tip of the probe base by moving in the front-rear direction with respect to the probe base, and is removably assembled to the probe base with a screw member.

  Each wiring of the probe sheet is electrically connected to the wiring of the wiring member arranged on the lower side of the probe base via the wiring of the first and second connection sheets arranged on the lower side of the probe holder. Yes.

  In the first connection sheet, an integrated circuit used for driving a display substrate is attached to an electrical insulating sheet, and a plurality of wirings extending forward from the integrated circuit and a plurality of wirings extending backward from the integrated circuit are electrically connected like polyimide. It is a tab (TAB) formed on the insulating sheet, and is bonded to the rear end portion of the probe sheet at the front end portion.

  During the energization test (inspection), the inspection signal is transmitted to the wiring member, the second connection sheet, and the second connection while the protruding electrode provided at the tip of each wiring of the probe sheet is pressed against the electrode of the display substrate. 1 is supplied to the integrated circuit via a connection sheet.

  Thus, the display substrate operates by supplying a drive signal from the integrated circuit to the electrode specified by the input signal via the first connection sheet and the probe sheet.

  However, the above-described conventional apparatus uses a tab (TAB) as the first connection sheet, and the front end of the tab, although the probe sheet must be replaced occasionally due to wear or damage to the probe, particularly the protruding electrode. The part is bonded to the probe sheet.

  For this reason, when replacing the probe sheet, it is necessary to peel off the probe sheet from the first connection sheet, which often damages the wiring of the first connection sheet. As a result, the first connection sheet itself is also replaced. Must.

  If the probe sheet and the first connection sheet are not bonded in order to solve the above problem, the positional relationship between the probe sheet and the first connection sheet is shifted with repeated use of the probe device, and as a result, the probe The wiring of the sheet and the wiring of the first connection sheet are electrically disconnected.

  An object of the present invention is to allow the probe sheet to be easily peeled off from the first connecting member even when the probe sheet and the first connecting member are bonded.

  A probe device according to the present invention is a probe sheet having a probe holder and a plurality of first wires extending in the front-rear direction at intervals in the left-right direction, and a probe disposed in a front portion below the probe holder A glass substrate disposed behind the probe holder and below the probe holder, the driving integrated circuit being disposed, and a plurality of front and rear sides from the integrated circuit. And a glass substrate having a second wiring and a plurality of third wirings. The glass substrate is combined with the probe sheet in a state where the second wiring is electrically connected to the first wiring.

  The adhesion of the wiring to the glass of the glass substrate is greater than the adhesion of the wiring to the electrical insulating sheet of the tab. For this reason, even if the probe sheet and the glass substrate are bonded, the probe sheet can be easily peeled off from the glass substrate without damaging the wiring of the glass substrate when replacing the probe sheet, and the glass substrate should be used again. Can do.

  The probe device further includes a probe base on which the probe holder is removably assembled, and a connection sheet disposed behind the glass substrate and below the probe holder and spaced in the left-right direction. A connection sheet having a plurality of fourth wirings extending in the front-rear direction, and a plate-like or sheet-like wiring member disposed behind the probe holder and below the probe base in the left-right direction. A wiring member having a plurality of fifth wirings extending in the front-rear direction at intervals, wherein the connection sheet includes the third wiring at the front end portion and the third wiring at the rear end portion. 5 may be combined with the glass substrate and the probe holder in a state of being electrically connected to the wiring 5.

  The rear end portion of the connection sheet may be bent to the upper side of the probe holder through the rear end portion of the probe holder. By doing so, when the probe holder is attached to and detached from the probe base, the degree of damage to the wiring of the connection sheet or the wiring member is smaller than the degree of damage when the protruding electrode is provided on one of the connection sheet and the wiring member. Become.

  The glass substrate and the probe sheet may be bonded by an anisotropic conductive sheet having conductivity only in the thickness direction, and the glass substrate and the connection sheet have conductivity only in the thickness direction. It may be adhered by an anisotropic conductive sheet. By doing so, when replacing the probe sheet, the anisotropic conductive sheet can be peeled off from the glass substrate together with the probe sheet, and the new probe sheet can be adhered to the glass substrate with the new anisotropic conductive sheet. The wiring of the substrate and the wiring of the probe sheet can be electrically connected accurately. Also, when replacing the connection sheet, the anisotropic conductive sheet can be peeled off from the glass substrate together with the connection sheet, and the new connection sheet can be bonded to the glass substrate with the new anisotropic conductive sheet. The wiring of the connection sheet can be electrically connected accurately.

  The probe device may further include an attachment member for assembling the glass substrate to the probe holder, and the attachment member may have a recess for receiving the integrated circuit. By doing so, the position of the integrated circuit on the glass substrate is stabilized.

  The probe device further includes an attachment member attached to the lower side of the probe holder, and a frame that forms a recess for receiving the integrated circuit and is attached to the glass substrate side of the attachment member. The mounting member may press the integrated circuit in the recess toward the glass substrate. Such an arrangement facilitates the exchange action of the integrated circuit.

  The horizontal cross-sectional shape of the recess may be smaller as it is closer to the glass substrate. By doing so, the integrated circuit is positioned with respect to the wiring of the glass substrate only by dropping the integrated circuit into the recess.

  Each of the second and third wirings may be connected to the electrode of the integrated circuit via a protruding electrode provided on the second wiring, or a contact provided in the form of a cantilever, It may be connected to the electrode of the integrated circuit through a protruding electrode provided on the contact. By doing so, the connection state between the second and third wirings and the electrodes of the integrated circuit is stabilized.

  Referring to FIGS. 1 to 8, a probe device 10 is used in part for an inspection device for the liquid crystal panel 12 shown in FIG. The liquid crystal panel 12 has a rectangular shape, and a plurality of electrodes 14 are formed at a predetermined pitch on an edge corresponding to at least one side of the rectangle.

  The probe device 10 includes a plurality of probe blocks 16 and a probe base 18 to which these probe blocks 16 are detachably attached. The probe blocks 16 are spaced apart in the left-right direction.

  In the illustrated example, each probe block 16 is common to the probe sheet 20, the sheet-like glass substrate 22 connected to the probe sheet 20, the connection sheet 24 connected to the glass substrate 22, and the plurality of probe blocks 16. A wiring member 26 disposed on the lower side of the probe base 18 and a probe holder 28 on which the probe sheet 20, the glass substrate 22 and the connection sheet 24 are mounted.

  The probe sheet 20 is formed by forming a plurality of wirings (not shown) on the upper surface of the electrically insulating film 30 such as polyimide by a printed wiring technique so as to extend in parallel in the front-rear direction at intervals in the left-right direction. is doing. The probe sheet 20 has a rectangular shape when seen in a plan view.

  Each wiring of the probe sheet 20 extends from the front end to the rear end of the electrical insulating film 30 and corresponds to the electrode 14 of the liquid crystal panel 12. The wiring arrangement pitch of the probe sheet 20 is the same as the arrangement pitch of the electrodes 14 of the liquid crystal panel 12.

  The probe sheet 20 also has a protruding electrode 32 at the front end of each wiring. Each protruding electrode 32 is made of a conductive metal material such as nickel and has a hemispherical, conical or pyramidal shape. However, the protruding electrode 32 may have other shapes such as a short cylindrical shape, a short polygonal column shape, a rectangular parallelepiped shape, and a ring shape.

  The probe sheet 20 further has a slit (not shown) extending between adjacent wirings at a position corresponding to the front end portion, particularly the position where the protruding electrode 32 is formed. Each slit penetrates the electrically insulating film 30. Such slits are formed in the electrically insulating film 30 by an appropriate processing technique such as laser processing or etching processing.

  The front end portion of each wiring of the probe sheet 20, the portion of the film 30 corresponding to the front end portion, and the protruding electrode 32 act as probe elements. Therefore, the front end portion of the probe sheet 20, particularly the region where the protruding electrode 32 and the slit are formed functions as a probe region. At least the front end of the film 30 can be transparent or translucent.

  The glass substrate 22 has a plurality of wirings 34 and 36 formed on the upper surface of the glass plate 38 by a printed wiring technique, and the driving integrated circuit 40 electrically connected to the wirings 34 and 36 is formed on the upper surface of the glass plate 38. Have. The wirings 34 extend forward from the integrated circuit 40 at intervals in the left-right direction. The wirings 36 extend rearward from the integrated circuit 40 at intervals in the left-right direction.

  Each wiring 34 of the glass substrate 22 corresponds to the wiring of the probe sheet 20 and is electrically connected to the corresponding wiring of the probe sheet 20. The integrated circuit 40 is used for driving the liquid crystal panel 12, receives a driving control signal from the wiring 36, and outputs a driving signal to the wiring 34.

  The connection sheet 24 is a flat cable (FPC) in which a plurality of wirings (not shown) are formed on one surface of an electrically insulating film 42 such as polyimide by a printed wiring technique. Each wiring of the connection sheet 24 corresponds to the wiring 36 of the glass substrate 22 on a one-to-one basis, and is electrically connected to the corresponding wiring 36.

  The probe holder 28 has an inverted L-shape with a substantially horizontal plate-like portion 44 and a plate-like attachment portion 46 extending downward from the front end thereof, and is formed of an electrically insulating material. The lower surfaces of the plate-like portion 44 and the attachment portion 46 are both flat surfaces.

  A stepped portion 48 having an L-shaped cross-section opening upward and rearward is formed at the upper rear end of the plate-like portion 44. A rod-like elastic body 50 having a circular cross-sectional shape is disposed on the stepped portion 48. The elastic body 50 can be formed of rubber such as silicone rubber.

  In the illustrated example, the wiring member 26 is a plate-like wiring member in which a plurality of wirings 54 (see FIG. 3) are formed on the lower surface of an electrically insulating substrate 52 such as polyimide. The wiring 54 extends in the front-rear direction with an interval in the left-right direction, and individually corresponds to the wiring 36 of the connection sheet 24.

  The wiring member 26 has a rectangular shape, and has a size over all the probe blocks 16 arranged on one side of the rectangle. The wiring member 26 is attached to the lower side of the probe base 18 by an appropriate means such as a screw in a state in which a spacer 55 such as a rubber plate is disposed on the top surface of the distal end portion.

  The wiring 54 of the wiring member 26 is connected to a signal generator (not shown) in a state where the probe device 10 is applied to the inspection device. Instead of using a plate-like member as the wiring member 26, a sheet-like member such as a flat cable (FPC) may be used.

  The probe sheet 20 is mounted on the lower surface of the mounting portion 46 in the film 30 by an appropriate means such as an adhesive so that the front end portion projects forward of the mounting portion 46 and the wiring is on the lower side.

The glass substrate 22 is attached to the lower surface of the plate-like portion 44 by an attachment member 56 in a state where the wirings 34 and 36 and the integrated circuit 38 are on the upper side. The attachment member 56 has a recess 58 that opens downward to receive the integrated circuit 40, and is attached to the lower surface of the plate-like portion 44 by an appropriate means such as a screw or an adhesive. When the integrated circuit 40 is received in the recess 58, the position of the integrated circuit 40 on the glass substrate 22 is stabilized.

The connection sheet 24 is attached to the lower surface of the plate-like portion 44 in the film 42 by an appropriate means such as adhesion so that the wiring thereof is on the lower side. The rear end portion of the connection sheet 24 is folded upward via the rear end of the plate-like portion 46 and the elastic body 50 . Each wiring of the connection sheet 24 is electrically connected to the corresponding wiring 54 of the wiring member 26 at the folded portion.

  The rear end portion of the probe sheet 20 and the front end portion of the glass substrate 22, and the rear end portion of the glass substrate 22 and the front end portion of the connection sheet 24 are respectively an anisotropic conductive sheet 60 having conductivity only in the thickness direction, and 60 is adhered. Thereby, the wiring of the probe sheet 20 and the wiring 34 of the glass substrate 22 and the wiring 36 of the glass substrate 22 and the wiring of the connection sheet 24 are electrically connected.

  The integrated circuit 40 is bonded to the upper surface of the glass substrate 22 by an anisotropic conductive sheet 60. Therefore, the output side and input side electrodes of the integrated circuit 40 are electrically connected to the wirings 34 and 36 of the glass substrate 22, respectively.

The glass substrate 22 can be attached to the attachment member 56 using the alignment mark 62 shown in FIG. 9 so that the wirings 34 and 36 match the wirings of the probe sheet 20 and the connection sheet 24, respectively.

  The probe holder 28 also includes a convex portion 64 extending in the front-rear direction at the center in the left-right direction on the upper surface of the plate-shaped portion 44, and a groove 66 that opens upward and rearward. A bar-shaped stopper 68 extending in the vertical direction is provided on the upper surface of the front end portion of the convex portion 66. The convex part 64 has a rectangular parallelepiped shape, and the groove 66 has a convex (inverted T-shaped) cross-sectional shape.

  The probe base 18 has a pair of guides 70 attached to the front lower surface of each probe block 16 and one or more plungers 72 provided to one guide 70 for each probe block 16. Both guides 70 extend in parallel in the front-rear direction at intervals in the left-right direction so as to form a recess that receives the convex portion 64 of the probe holder 28.

  The plunger 72 is a commercially available product in which a stopper, a ball, and an elastic body that is between the stopper and the ball and pushes the ball to the opposite side of the stopper are arranged in a hollow cylinder. The portion 64 is assembled to one guide 70 so as to bias the portion 64 toward the other guide 70.

  The assembly means for releasably assembling the probe holder 28 to the lower side of the probe base 18 includes a first screw member 74 that penetrates the probe base 18 so as to be movable in the thickness direction, and a first screw member 74 that is located above the probe base 18 and is first. A second screw member 76 screwed into the screw member 74 and a cap 78 through which an upper portion of the first screw member 74 passes.

  The first screw member 74 has a flange-shaped head portion 74a at the lower end, and the lower end portion is received in the groove 66 of the probe holder 28 so as to be relatively movable in the longitudinal direction of the groove 66. . The second screw member 76 is screwed into the screw hole formed in the first screw member 74 from above.

  A stop ring 80 is assembled to the middle portion in the longitudinal direction of the first screw member 74. An elastic member 82 is disposed between the retaining ring 80 and the cap 78 so as to constantly bias the first screw member 74 downward. The elastic member 82 is a compression coil spring in the illustrated example, but may be another member such as rubber.

  Since the first screw member 74 is constantly urged downward by the elastic member 82, the distance between the lower surface of the probe base 18 and the head portion 74 a of the first screw member 74 is the same as that of the first screw member 74. By adjusting the screwing amount of the second screw member 76, it can be adjusted. A portion 64 a forming the upper surface of the groove 66 of the probe holder 28 is sandwiched between the probe base 18 and the head portion 74 a of the first screw member 74.

The rear end portion of the connection sheet 24 is folded back above the probe holder 28 and pressed against the wiring member 26 by the elastic body 50. Thereby, the corresponding wiring 42 of the connection sheet 24 and each wiring 54 of the wiring member 26 are electrically connected.

  The probe device 10 also includes an arm 84 connected to the probe base 18, a pressing mechanism 86 that is disposed at the front end of the arm 84 and presses the front end of the probe sheet 20 downward, and the pressing mechanism 86 includes the probe sheet 20. Each probe block 16 includes a screw member 88 that maintains the arm 84 so that the arm 84 can be released in a state in which the probe block 16 is pressed.

  Each arm 84 has a substantially U-shaped shape at the front and rear portions, and a pivot 90 extending in the left-right direction causes the rear portion to be above the probe base 18 and the front portion of the probe holder 28 and the probe base 18. The front side is coupled to the probe base 18 in a state of extending obliquely downward.

  The arm 84 has a hole 92 through which a tool such as a hexagon wrench for operating the second screw member 76 passes, and a hole 94 through which the screw member 88 passes. The screw member 88 is screwed into a screw hole 96 formed in the probe base 18.

  The pressing mechanism 86 penetrates the inverted L-shaped base member 100 disposed below the distal end portion of the arm 84, the elastic body 102 disposed at the lower end edge of the base member 100, and the front end portion of the arm 84 in the vertical direction. One or more adjustment screws 104 that are screwed into the base member 100 and a plurality of guide pins 106 that extend in the vertical direction with an interval in the left-right direction with the adjustment screw 104 interposed therebetween.

  The base member 100 and the elastic body 102 extend in the left-right direction. The base member 100 is assembled to the front end portion of the arm 84 by an adjustment screw 104 and a guide pin 106 so as to be movable in the vertical direction. The elastic body 102 is disposed on the lower surface of the base member 100.

  The guide pin 106 is supported by one of the arm 84 and the base member 100 and is received by the other of the arm 84 and the base member 100 so as to be relatively movable in the vertical direction.

  The front end surface of the probe base 18 is a flat surface so as to act as a stopper surface 18a with which the stoppers 68 of the plurality of probe blocks 16 come into contact.

  At the time of inspection, the probe device 10 and the liquid crystal panel 12 are relatively moved in the direction of mutual approach. Thereby, first, each protruding electrode 32 is brought into contact with the electrode 14 of the liquid crystal panel 12, and then the overdrive acts on the distal end portion of the probe sheet 20, that is, the probe region. In this state, each wiring is energized and the liquid crystal panel 12 is inspected.

  As a result, the front end portion of the probe sheet 20 is elastically deformed against the force of the elastic body 102. The front end portion of the probe sheet 20 returns to its original shape when the relative pressing between the probe device 10 and the liquid crystal panel 12 is released.

  When the protruding electrode 32 of the probe sheet 20 is pressed against the electrode 14 of the liquid crystal panel 12, the arm 84 and the pressing mechanism 86 prevent the front end portion of the probe sheet 20 from being greatly bent with respect to the rear portion thereof. In addition, when the protruding electrode 32 of the probe sheet 20 is pressed against the electrode 14 of the liquid crystal panel 12, the elastic body 102 is elastically deformed, so that the contact pressure (needle pressure) between the protruding electrode 32 and the electrode 14 increases. .

  When the probe region of the probe sheet 20 is elastically deformed, each probe region is independently deformed by the slit. At this time, since each probe is elastically deformed while compressing and deforming a corresponding portion of the elastic body 102, the displacement of the probe element in the left-right direction is coupled with the fact that the tip of the adjacent probe element is not separated, It is blocked by the elastic body 102.

  When the film 28 of the probe sheet 20 is made of a transparent material such as polyimide or a translucent material such as another film, the probe 14 is brought into contact with the electrode 14 of the liquid crystal panel 12 and the protruding electrode 32 of the probe sheet 20. The positional relationship between the wiring of the sheet 20 and the electrode 14 of the liquid crystal panel 12 can be confirmed through the front end portion of the probe sheet 20 protruding forward from the mounting portion 46.

  When the probe block 16 is assembled to the probe base 18, as shown in FIG. 2, the screw member 88 is removed from the probe base 18 and the arm 84 is raised, and the screw member 76 is loosened and the screw member 74 is moved. It has been moved downward.

  In this state, the convex portion 64 of the probe block 16 is inserted between the guides 70 from the front until the stopper 68 contacts the front end surface of the probe base 18, that is, the stopper surface 18a. As a result, the probe block 16 is arranged on the probe base 18 as shown in FIG.

  Positioning of the probe block 16 in the front-rear direction is performed by the stopper 68 coming into contact with the stopper surface 18 a of the probe base 18. Positioning of the probe block 16 in the left-right direction is performed by pressing the convex portion 64 against the guide 70 on the opposite side by the plunger 72. For this reason, positioning of the probe block 16 can be performed with one touch.

When the probe block 16 is attached to the probe base 18, the first screw member 74 is pushed down by the elastic member 82, so that the portion 64 a forming the upper surface of the groove 66 is connected to the probe base 18 and the first screw member. 74 is reliably received between the head 74a.

  In a state where the probe block 16 is mounted on the probe base 18 as described above, the second screw member 76 is strongly screwed into the second screw member 74, and a portion 64a forming the upper surface of the groove 66 is formed. The probe base 18 and the head 74 a of the screw member 74 are strongly sandwiched. As a result, the probe block 16 is strongly assembled to the probe base 18 so as not to move and to be released as shown in FIG.

  Next, the arm 84 is displaced to a predetermined position, and the screw member 88 is screwed into the screw hole 96 of the probe base 18. Thereby, the arm 84 and the pressing mechanism 86 are maintained in a predetermined position. In this state, the elastic body 102 of the pressing mechanism 86 is in contact with the distal end portion of the probe sheet 20.

  Thereafter, the pressing force of the probe sheet 20 by the pressing mechanism 86 is adjusted by the adjusting screw 104.

  When the probe block 16 is removed from the probe base 18, the screw member 88 is removed from the probe base 18, the arm 84 is raised, the screw member 76 is loosened, and the portion 64 a of the probe holder 28 is connected to the head 74 a of the screw member 74 and the probe base. 18 and then the probe block 16 may be pulled forward.

  When exchanging the probe block, the probe block assembled to the probe base 18 may be removed as described above, and then a new probe block may be assembled to the probe base 18 as described above.

  As described above, according to the probe device 10, the first and second screw members 74 and 76 are tightened and loosened, and the probe block 16 is moved in the front-rear direction with respect to the probe base 18. Since the probe base 18 can be attached to and detached from the probe base 18, the probe block 16 can be easily attached to and detached from the probe base 18.

  Further, since the probe block 16 is positioned in the left-right direction and the front-rear direction simply by inserting the convex portion 64 of the probe block 16 between the guides 70 of the probe base 18, the replacement work of the probe block 16 becomes easier. .

  Furthermore, since the probe block 16 can be attached to and detached from the probe base 18 with the arm 84 raised, the arm 84 and the pressing mechanism 86 do not hinder the attachment or detachment of the probe holder 16.

  Furthermore, since the rear end portion of the connection sheet 24 is bent to the upper side of the probe holder 28 via the rear end portion of the probe holder 28, the connection sheet 24 or the connection sheet 24 is attached to or detached from the probe base 18. The degree of damage to the wiring of the wiring member 26 is smaller than the degree of damage when the protruding electrode is provided on one of the connection sheet 24 and the wiring member 26.

  When replacing the probe sheet 20, the probe sheet 20 is peeled off from the attachment portion 46 and the glass substrate 22 with the probe block 16 removed from the probe base 18, and a new probe sheet 20 is attached to the attachment portion 46 and the glass substrate 22. do it.

  Since the adhesion force of the wires 34 and 36 to the glass plate 38 of the glass substrate 22 is larger than the adhesion force of the wires to the electrical insulating sheet of the tab, even when the probe sheet 20 and the glass substrate 22 are bonded, The probe sheet 20 can be easily peeled off from the glass substrate 22 without damaging the wiring 34 of the glass substrate 22, and the glass substrate 22 can be used again.

  Since the glass substrate 22 and the probe sheet 20 and the glass substrate 22 and the connection sheet 24 are bonded by the anisotropic conductive sheet 60, the anisotropic conductive sheet 60 is attached to the probe sheet when the probe sheet 20 is replaced. 20 is peeled off from the glass substrate 22 together, and a new probe sheet is bonded to the glass substrate 22 with a new anisotropic conductive sheet, so that the wiring 34 of the glass substrate 22 and the wiring of the probe sheet 20 are electrically and accurately connected. can do. Further, when the connection sheet 24 is replaced, the anisotropic conductive sheet 60 is peeled off from the glass substrate 22 together with the connection sheet 24, and a new connection sheet 24 is adhered to the glass substrate 22 by the new anisotropic conductive sheet 60. The wiring 36 of the glass substrate 22 and the wiring of the connection sheet 24 can be electrically connected accurately.

  Referring to FIG. 10, the probe apparatus 10 includes, in place of the attachment member 56, an attachment member 110 attached to the lower side of the probe holder 28 and a frame 114 forming a recess 112 for receiving the integrated circuit 40. . The frame 114 is attached to the glass substrate 22 side of the attachment member 110. The attachment member 110 presses the integrated circuit 40 in the recess 112 toward the glass substrate 22.

  In the embodiment shown in FIG. 10, the integrated circuit 40 has a plurality of electrodes 116 and 118 such as bump electrodes, and the electrodes 116 and 118 are pressed against the wirings 34 and 36 of the glass substrate 22, respectively. .

  The horizontal cross-sectional shape of the recess 112 is smaller as it is closer to the glass substrate 22 side. For this reason, the integrated circuit 40 is positioned with respect to the wirings 34 and 36 of the glass substrate 22 simply by dropping the integrated circuit 40 into the recess 112, and the exchange operation of the integrated circuit 40 becomes easy.

  As shown in FIG. 11, the electrodes 116 and 118 of the integrated circuit 40 are electrically connected to the wirings 34 and 36 of the glass substrate 22 via the protruding electrodes 120 and 122 provided on the wirings 34 and 36 of the glass substrate 22, respectively. May be connected.

  Also, as shown in FIG. 12, the electrodes 116 and 118 of the integrated circuit 40 are connected to the wirings 34 and 36 of the glass substrate 22 in a cantilever manner, and the contacts 124 and 126 are provided. It may be electrically connected to the wirings 34 and 36 of the glass substrate 22 through the protruding electrodes 128 and 130 provided on the glass substrate 22.

  11 and 12, the wirings 34 and 36 of the glass substrate 22 and the electrodes 116 and 118 of the integrated circuit 40 are electrically and reliably connected.

  The present invention can be applied not only to a probe device used for a liquid crystal panel inspection device but also to a probe device used for inspection of other flat objects such as integrated circuits.

  The present invention can be applied not only to a probe device for an object to be inspected horizontally but also to a probe device for an object to be inspected obliquely. In the present invention, one direction and the other direction in a plane parallel to the object to be inspected are referred to as the front-rear direction and the left-right direction, respectively, and the direction perpendicular to the object to be inspected is referred to as the up-down direction. Direction.

  The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit of the present invention.

It is a perspective view which shows one Example of the probe apparatus which concerns on this invention. It is a perspective view which shows the state which raised the arm of the probe apparatus shown in FIG. It is the perspective view which looked at the probe apparatus shown in FIG. 1 from the downward direction. It is a perspective view which shows the relationship between the probe block in the probe apparatus shown in FIG. 1, a liquid crystal panel, and a wiring member. It is a perspective view which shows one Example of the probe block in the probe apparatus shown in FIG. It is a longitudinal cross-sectional view of the probe apparatus shown in FIG. It is a perspective view which shows one Example of the probe block receiving location in the probe apparatus shown in FIG. It is sectional drawing obtained along the 8-8 line in FIG. It is a top view which shows one Example of the glass substrate in the probe apparatus shown in FIG. It is sectional drawing which shows the other Example of the attachment member for integrated circuits. It is sectional drawing which shows the further another Example of the attachment member for integrated circuits. It is sectional drawing which shows the further another Example of the attaching part agent for integrated circuits.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Probe apparatus 12 Liquid crystal panel 14 Electrode of liquid crystal panel 16 Probe block 18 Probe base 20 Probe sheet 22 Glass substrate 24 Connection sheet 26 Wiring member 28 Probe holder 32 Projection electrode 34, 36 Wiring of glass substrate 38 Glass plate 40 Integrated circuit 54 Wiring Wiring of members 56, 110 Mounting member 58, 112 Recess 60 Anisotropic conductive sheet 62 Alignment mark 114 Frame 116, 118 Integrated circuit electrode 120, 122 Projection electrode 124, 126 Contact 128, 130 Projection electrode

Claims (7)

A probe holder;
A probe sheet having a plurality of first wirings extending in the front-rear direction at intervals in the left-right direction, the probe sheet disposed at the lower front portion of the probe holder;
A glass substrate disposed behind the probe sheet and below the probe holder, wherein a driving integrated circuit is disposed, and a plurality of second substrates extending forward and backward from the integrated circuit. A glass substrate having two wirings and a plurality of third wirings;
An attachment member attached to the lower side of the probe holder;
A frame for forming a recess for receiving the integrated circuit, the frame being mounted on the glass substrate side of the mounting member,
The glass substrate is combined with the probe sheet in a state where the second wiring is electrically connected to the first wiring,
The probe device, wherein the attachment member presses the integrated circuit in the recess toward the glass substrate. Furthermore, a probe base in which the probe holder is detachably assembled;
A connection sheet disposed behind the probe holder on the rear side of the glass substrate, and having a plurality of fourth wirings extending in the front-rear direction at intervals in the left-right direction, and
A plate-like or sheet-like wiring member disposed behind the probe holder and below the probe base, and having a plurality of fifth wires extending in the front-rear direction at intervals in the left-right direction. Including wiring members,
The connection sheet is combined with the glass substrate and the probe holder so that the fourth wiring is electrically connected to the third wiring at the front end and the fifth wiring at the rear end. The probe device according to claim 1.   The probe device according to claim 2, wherein a rear end portion of the connection sheet is bent to an upper side of the probe holder through a rear end portion of the probe holder.   The glass substrate and the probe sheet are bonded by an anisotropic conductive sheet having conductivity only in the thickness direction, and the glass substrate and the connection sheet are anisotropic only in the thickness direction. The probe device according to claim 1, wherein the probe device is bonded by a conductive sheet.   The probe device according to claim 1, wherein a horizontal cross-sectional shape of the recess is smaller at a position closer to the glass substrate.   6. The probe device according to claim 1, wherein each of the second and third wirings is connected to an electrode of the integrated circuit through a protruding electrode provided on the second and third wirings.   Each of the second and third wirings is connected to the electrode of the integrated circuit via a contact provided in a cantilever shape and a protruding electrode provided on the contact. The probe apparatus according to claim 1 or 5.

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