KR101055343B1 - Probe Unit and Inspection Device - Google Patents

Abstract

An object of the present invention is to improve the inspection efficiency by reducing the frequency of replacement of parts by sharing the apparatus in the normal lighting test and the simple lighting test. The present invention provides a probe unit for selectively applying at least a simple lighting test signal or a normal lighting test signal by contacting each probe with a plurality of terminals of a circuit of the test counter board, the probe unit being connected to the probe and at least for a simple lighting test signal. An FPC connecting plate having a terminal and a terminal for a normal lighting test signal, and an inspection signal switching connecting device for selectively switching the connection to at least one of the terminal for a simple lighting test signal or the terminal for a signal for the normal lighting test signal.

Probe unit, liquid crystal panel, normal lighting test, simple lighting test, test signal switching connecting device, FPC connecting plate, panel tap device, pressing member

Description

Probe Unit and Inspection Apparatus

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe unit and an inspection apparatus for use in simple lighting inspection and normal lighting inspection of inspection counterplates such as liquid crystal panels.

In manufacturing processes, such as a liquid crystal panel, lighting test of the liquid crystal panel etc. is performed. Generally, the inspection apparatus provided with the probe unit which has a some probe is used for this inspection. In this case, the lighting test is usually performed by supplying a test signal to each electrode while pressing each probe of the probe unit to an electrode such as a liquid crystal panel. In general inspection, the same signal as the conditions of use of the product is applied to a liquid crystal panel or the like, and each cell is displayed in full color or the like to perform various inspections such as point defects, line defects, and stains.

An example of the said probe unit is shown in FIG. The probe unit 1 is comprised by the probe base 2, the support part 3, the probe assembly 4, the connection cable part 5, and the signal generator 6. As shown in FIG.

The said probe base 2 is a board | plate material which supports the some support part 3 which supported the probe assembly 4 integrally. By the said probe base 2, the some probe assembly 4 is supported by the support part 3 in the state which opposes the liquid crystal panel 7 on a worktable (not shown).

The said support part 3 is a member for supporting the said probe assembly 4 from the front end side, with the proximal end side supported by the said probe base 2.

The probe assembly 4 is a member for contacting a terminal of a circuit of the liquid crystal panel 7 to transmit an inspection signal. The probe assembly 4 is supported by the support part 3. The probe assembly 4 includes a probe block 8 and a probe 9. The probe block 8 is provided in the support part 3. The probe 9 is provided in the probe block 8. The probe 9 is a member in direct contact with the terminal of the circuit of the liquid crystal panel 7. The tip of the probe 9 is in contact with the terminal of the circuit of the liquid crystal panel 7, and the proximal end is in contact with the terminal of the connecting cable part 5.

The connection cable part 5 is a member for electrically connecting the probe 9 and the signal generator 6. Specifically, the connection cable part 5 includes a TCP plate 11 electrically connected to the proximal end of the probe 9, an FPC 12 connected to the TCP plate 11, and the FPC 12. The FC board 13 to which is connected is connected, and the cable 14 which connects the said FC board 13 and the signal generator 6 is comprised. As a result, the connection cable part 5 electrically connects the signal generator 6 and the probe 9.

The signal generator 6 is a device for generating a normal lighting test signal. The normal lighting test signal generated by the signal generator 6 is applied to the terminals of the circuit of the liquid crystal panel 7 through the connection cable part 5 and the probe 9 to project the test pattern onto the liquid crystal panel 7. The inspection is done.

In the case of the simple lighting test, a simple lighting test probe unit or a simple lighting test device is used. That is, the probe unit is replaced with the probe unit for simple lighting test for simple lighting inspection, or the simple lighting inspection device is installed for simple lighting inspection. The simple inspection is applied to a liquid crystal panel or the like by applying a signal that is less than the conditions of use of the product or a pseudo-signal to display a single color, various display patterns, and the like. To say.

There is Patent Literature 1 as such a lighting inspection apparatus.

Patent Document 1: Japanese Patent Application Laid-open No. Hei 9-138422

However, in the conventional lighting inspection apparatus, when switching from the normal lighting inspection to the simple lighting inspection, the normal lighting inspection probe unit is removed and replaced with the simple lighting inspection probe unit. When switching from the simple lighting test to the normal lighting test, the simple lighting test probe unit is removed and replaced with the normal lighting test probe unit. In the case of replacing the probe unit, there is a problem in that replacement work is required each time, resulting in poor inspection efficiency.

In the case where a simple lighting inspection apparatus is provided separately from the ordinary inspection apparatus, there is a problem that the cost increases due to the need for the installation space of the apparatus.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a probe unit and an inspection apparatus in which cost is reduced and inspection efficiency is improved by promoting sharing of the apparatus in a lighting inspection and a simple lighting inspection. .

In order to solve the above problems, a probe unit according to the present invention is a probe unit for selectively applying at least a simple lighting test signal or a normal lighting test signal by contacting each probe to a plurality of terminals of a circuit of the test counter plate. An FPC connecting plate connected to the probe and having at least a terminal for a simple lighting test signal and a terminal for a normal lighting test signal; Characterized in that it comprises a test signal switching connection device for switching.

An inspection apparatus according to the present invention is an inspection apparatus for inspecting an inspection target plate, comprising: a panel set portion for carrying out an inspection target plate inserted from the outside to the outside after completion of the inspection; It is characterized by having a measuring unit for supporting and testing, and using the above-described probe unit as the measuring unit probe unit.

As described above, since the terminal for the simple lighting test signal and the terminal for the normal lighting test signal are selectively connected to the probe unit, any test signal is applied to the probe unit, so that the apparatus can be shared in the normal lighting test and the simple lighting test. It is possible to improve the inspection efficiency by reducing the exchange frequency of the device.

EMBODIMENT OF THE INVENTION Hereinafter, the probe unit and inspection apparatus which concern on embodiment of this invention are demonstrated, referring an accompanying drawing.

[First Embodiment]

First, the first embodiment of the present invention will be described. The inspection apparatus 21 according to the present embodiment mainly includes a panel set portion 22 and a measurement portion 23 as shown in FIG. 3.

The panel set portion 22 is a device for receiving the liquid crystal panel 7 as an inspection counter plate inserted from the outside, returning it to the measuring unit 23, and handing the liquid crystal panel 7 after completion of the inspection to the outside. . The panel set portion 22 has a panel water supply device 27 in the opening 26, receives the liquid crystal panel 7 from the outside by the panel water supply device 27, and conveys an arm ( 28) and convey to the measuring unit 23. Moreover, the panel water supply apparatus 27 receives the liquid crystal panel 7 after completion | finish of inspection by the measurement part 23, and hands it to the exterior.

The measuring unit 23 is a device for supporting and lighting the liquid crystal panel 7 passed from the panel set unit 22. As shown in FIG. 4, the measuring unit 23 includes an alignment stage 29, a backlight (not shown), a work table 30, a probe unit 31, and a panel receiving unit 30A. Consists of.

The alignment stage 29 is provided with the X moving mechanism, the Y moving mechanism, the Z moving mechanism, and the θ rotating mechanism (both not shown) therein.

The backlight is an illuminating device for shining light from the rear side of the liquid crystal panel 7 supported by the panel receiving portion 30A. The backlight is supported above the alignment stage 29.

The panel receiving portion 30A is a member for determining and supporting the position of the liquid crystal panel 7. The work table 30 supports 30 A of panel receiving parts. The liquid crystal panel 7 supported by the panel receiving portion 30A is accurately aligned with the probe unit 31 by the alignment stage 29 operating in the XYZθ direction.

As shown in Figs. 4 and 5, the probe unit 31 is a device that contacts the terminal 7C of the liquid crystal panel 7 and applies a test signal to turn on the liquid crystal panel 7 to be inspected. The probe unit 31 is provided with a probe base 32, a probe device 33, and an alignment camera 34.

The probe base 32 is a plate material for integrally supporting the probe device 33 and the alignment camera 34. The probe base 32 is supported by the liquid crystal panel 7 on the worktable 30 facing the probe device 33, the alignment camera 34, and the like, while being fixed to the main body side of the inspection apparatus 21. It is.

The probe apparatus 33 is provided in plurality in each probe base 32. The probe device 33 is composed of a support portion 37 and a probe assembly 38.

The said support part 37 is a member for supporting the said probe assembly 38 from the front end side, with the base end supported by the said probe base 32. As shown in FIG. The support part 37 is a suspension block 40 directly installed on the probe base 32 to support the whole, and a slide slidably supported through the guide rail 41 at the tip of the suspension block 40. The block 42 and the probe plate 43 integrally provided in the lower surface of the said slide block 42 are comprised. The height of the slide block 42 is adjusted by the adjustment screw 44 with respect to the suspension block 40.

The probe assembly 38 is a member for contacting the terminal 7C of the circuit of the liquid crystal panel 7 and applying a test signal. The probe assembly 38 is provided on the bottom surface of the probe plate 43. As shown in FIG. 1, the probe assembly 38 includes a probe block 46, a probe 47, an FPC connecting plate 48, and an inspection signal switching connecting device 49. As shown in FIG.

As shown in Figs. 1 and 6, the probe block 46 directly contacts the terminal 7C of the circuit of the liquid crystal panel 7 and selectively applies a simple lighting test signal or a normal lighting test signal, thereby simplifying the lighting test. And a member for a normal lighting test.

The probe block 46 is directly provided on the lower surface of the probe plate 43. The probe block 46 is provided with a probe 47. The probe 47 is a blade type contactor which contacts the terminal 7C of the circuit of the liquid crystal panel 7 and applies a test signal for lighting. The probe 47 is provided below the probe block 46 in the same number as the terminal 7C of the circuit of the liquid crystal panel at the position of the circuit terminal. 47A of the front end needle part of each blade which comprises the said probe 47 is in direct contact with the terminal 7C of the circuit of the liquid crystal panel 7, and the base end needle 47B is a FPC connecting plate ( The wiring 53 is to be in contact with the wiring 53 described later.

The FPC connecting plate 48 is a member for electrically connecting the probe 47 and the test signal switching connecting device 49. The FPC connecting plate 48 is constituted by the FPC 51 and the contact probes 52A and 52B.

The FPC 51 is a known flexible wiring board composed of an insulating resin and a flexible synthetic resin. The FPC 51 has its front end fixed to the probe block 46 and its proximal end fixed to the test signal switching block 55 described later. The proximal end of the FPC 51 is supported by the inspection signal switching block 55 with a predetermined space on the upper surface of the glass substrate 58 of the inspection signal switching block 55. Specifically, the FPC 51 inspects the contact probes 52A and 52B of the FPC 51 with a predetermined space at a position corresponding to each of the pads 61 and 62 of the glass substrate 58. It is supported by the signal switching block 55. As a result, the FPC 51 is pressed by the pressing members 73A and 73B to be described later, so that the FPC 51 is bent, and the contact probes 52A and 52B and the pads 61 and 62 are respectively bent. Are pressed against each other (see Figs. 10 and 11).

The wiring 53 is provided in the lower surface of the FPC 51. The wirings 53 are arranged in parallel by the number of probes 47. The tip end of each of the wirings 53 is in electrical contact with the proximal needle 47B of each probe 47, respectively.

On the proximal end of each wiring 53, a contact probe 52A, which is a terminal for simple lighting test signal, and a contact probe 52B, which is a terminal for normal lighting test signal, are arranged at intervals in the longitudinal direction of the wiring.

The contact probes 52A and 52B cooperate with the test signal switching block 55 and the switching mechanism 56 to connect the line of the simple lighting test signal or the line of the normal lighting test signal to the probe 47 of the probe block 46. ) Is a member for selectively connecting.

The row of contact probes 52A is provided at a position that matches the simple lighting test signal pad 61 of the test signal switching block 55 described later. The column of contact probes 52B is provided at a position that matches the normal lighting test signal pad 62 of the test signal switching block 55 described later. As a result, the contact probes 52A and 52B selectively contact each pad 61 and 62 of the glass substrate 58, thereby switching between the simple lighting test circuit and the normal lighting test circuit (see FIGS. 10 and 11). ).

The test signal switching connecting device 49 selectively switches the connection to any one of the signal probe terminals of the contact probe 52A which is the terminal for the simple lighting test signal or the contact probe 52B which is the terminal for the normal lighting test signal. It is a device for selecting and connecting a circuit. The test signal switching connecting device 49 is constituted by a test signal switching block 55 and a switching mechanism 56, as shown in Figs.

The inspection signal switching block 55 is a terminal of the line of the simple lighting inspection signal (simple light inspection signal pad 62) or a terminal of the line of the normal lighting inspection signal (normal lighting inspection signal pad 61) formed on the upper surface thereof. ) Is a block for selectively contacting the contact probes 52A and 52B of the FPC connecting plate 48 to apply one of the lighting test signals to the liquid crystal panel 7.

The inspection signal switching block 55 is provided below the base plate 54. The inspection signal switching block 55 cooperates with the FPC connecting plate 48 and the switching mechanism 56 to selectively connect the line of the simple lighting inspection signal or the line of the normal lighting inspection signal to the probe 47. have.

As shown in Figs. 1, 8, 10, and 11, the inspection signal switching block 55 includes a base plate portion 57, a glass substrate 58, an FPC 59, a TCP unit 60, and a simplified point. It consists of a back pad 61 and the lighting pad 62 normally.

 The base plate portion 57 is formed in a thick rectangular plate shape, and a glass substrate 58 is provided above. At four corners of the base plate portion 57, support arm portions 64 are provided, and the base arm portions 57 are integrally provided on the lower surface of the base plate 54 by the support arm portions 64. have.

The glass substrate 58 is a board | substrate with two circuits formed in the upper surface. That is, the simple lighting circuit 65 of the line of the simple lighting test signal and the normal lighting circuit 66 of the line of the normal lighting test signal are provided on the upper surface of the glass substrate 58, respectively.

The FPC 59 is a member for connecting the simple lighting circuit 65 of the line of the simple lighting test signal and the simple lighting test signal generator (not shown). The TCP unit 60 is a member for connecting the normal lighting circuit 66 and the normal lighting test signal generator (not shown) of the line of the normal lighting test signal. An IC 67 is provided above the TCP unit 60.

The simple lighting pad 61 is a terminal of the line of the simple lighting test signal. That is, the simple lighting pad 61 is a terminal for electrically connecting the probe 47 and the simple lighting test signal generator. When the simple lighting pad 61 and the contact probe 52A come into contact with each other, the simple lighting test signal is applied to the terminal 7C of the liquid crystal panel 7 through the probe 47 so that the test pattern is projected, and the simple lighting test is performed. It is to be done. The simple lighting pads 61 are configured side by side in this embodiment. In addition, the arrangement of the above simple lighting pad 61 depends on all the conditions such as the number of installation of the above simple lighting pad 61, and may be arranged in two or more rows. It may be arranged in other arrangement patterns such as zigzag shapes.

The normal lighting pad 62 is a terminal of the line of the normal lighting test signal. That is, the normal lighting pad 62 is a terminal for connecting the probe 47 and the normal lighting test signal generator. By contacting the pad 62 for normal lighting with the contact probe 52B, the normal lighting test signal is applied to the terminal 7C of the liquid crystal panel 7 through the probe 47 so that the test pattern is projected, and the normal lighting test is performed. It is to be done. Normally, the arrangement of the lighting pads 62 is also arranged side by side in the same manner as in the simple lighting pad 61. The arrangement of the normal lighting pads 62 also varies depending on all the conditions such as the number of installations of the normal lighting pads 62 and the like, and may be arranged in two or more rows. It may be arranged in other arrangement patterns such as zigzag shapes.

The switching mechanism 56 selectively presses the pads 61 and 62 of each line of the test signal switching block 55 and the contact probes 52A and 52B of the FPC connecting plate 48 corresponding thereto. To switch the test signal. The switching mechanism 56 is composed of two pressing members 73A and 73B and pressing means 74.

The pressing members 73A and 73B press down the FPC connecting plate 48 as the flexible plate to selectively press-contact the terminals (pads 61 and 62) and the contact probes 52A and 52B of the respective lines. It is a member for making it. Two pressing members 73A and 73B are provided corresponding to the pad 61 for lighting test signal and the pad 62 for simple lighting test signal.

The pressing members 73A and 73B are supported to be movable up and down, and simultaneously push down all the contact probes 52A for the simple lighting test signal or all the contact probes 52B for the normal lighting test signal through the FPC 51 at the same time. The pressing members 73A and 73B are composed of an elastic member 75 and a support frame 76.

The elastic member 75 is a member that directly contacts the FPC connecting plate 48 to elastically push down the contact probes 52A and 52B. As the elastic member 75, an insulating elastic material is used. The elastic member 75 is formed in the form of a thick plate or rod longer than the width dimension of the FPC 51. Thereby, the elastic member 75 is able to equally press down all the contact probes 52A or the contact probes 52B lined up in a line with sufficient pressure. That is, the elastic member 75 is a pressure sufficient to electrically connect all of the contact probes 52A or the contact probes 52B arranged in a line to the pad 61 for lighting test signal or the pad 62 for simple lighting test signal. It is possible to push down evenly. The cross-sectional shape of the elastic member 75 is formed in a substantially octagon, a square or the like. In addition, the cross-sectional shape of the elastic member 75 should just be a shape sufficient to make it press down evenly by the pressure sufficient to electrically connect the two members.

 The support frame 76 is comprised from the horizontal rod part (not shown) and the vertical rod part 76A which rose upward from both sides of the said horizontal rod part, and is formed in the U-shape or C-shape which opened the whole shape upward. . The horizontal bar is accommodated in the elastic member 75 and supports the elastic member 75. The vertical rod 76A is supported via the pressing guide pin 81 of the pressing guide groove 90 of the slide plate 84.

A slide pin 79 is provided on the side of the vertical rod 76A. The slide pin 79 is fitted into a pin groove 80 provided in the shaft holder 78 and is supported to be slidable in the vertical direction. For this reason, the sliding amount of the vertical rod part 76A to the up-down direction is regulated.

In the upper part of the both surfaces of the vertical rod part 76A, the pressing guide pin 81 pinched in the pressing guide groove 90 of the slide plate 84 demonstrated later is provided. The pressing guide pins 81 are provided at the two vertical rod portions 76A of the two pressing members 73A and 73B, respectively. Each pair of pressing guide pins 81 is guided to the pressing guide groove 90 to selectively move the pressing members 73A and 73B up and down in accordance with the simple lighting test and the normal lighting test.

The two support frames 76 are arranged at positions matching each of the simple lighting inspection signal contact probes 52A column and the normal lighting inspection signal contact probes 52B column, respectively.

The pressing means 74 is a device for selectively bringing the two pressing members 73A and 73B up and down to selectively contact each of the contact probes 52A and 52B and the pads 61 and 62. The pressing means 74 is composed of a slide plate 84 and a drive mechanism 85.

The slide plate 84 is a plate material for selectively moving the pressing members 73A and 73B up and down by supporting the pressing members 73 in the pressing guide grooves 90 through the pressing guide pins 81.

The slide plate 84 is provided above the base plate 54 so as to be slidable along the base plate 54. Above the base plate 54, as shown in Fig. 9, a guide plate 86 is provided. Guide rails 87 are provided on both surfaces of the guide plate 86. Slide guides 88 are provided on the guide rails 87 so as to be slidable. Each slide plate 84 is fixed to each said slide guide 88, and each slide plate 84 is slidably provided.

The two slide plates 84 are integrally provided so as to slide simultaneously in the horizontal direction (left and right directions in FIG. 1) along the upper surface of the base plate 54. Each slide plate 84 is provided with a pressing guide groove 90 as shown in Figs. 1 and 7. The pressing guide pins 81 of the two pressing members 73A and 73B are respectively fitted in the pressing guide groove 90 to support the pressing members 73A and 73B.

The pressing guide groove 90 extends substantially in the horizontal direction, and is provided. Specifically, the pressing guide groove 90 is composed of a neutral groove portion 90A, a simple lighting groove portion 90B, and a normal lighting groove portion 90C.

The neutral groove portion 90A is formed in the middle of the pressing guide groove 90 and extends in the horizontal direction, and is a groove portion for supporting the two pressing members 73A and 73B in a neutral state. The pressing guide pins 81 of the pressing members 73A and 73B are positioned in the neutral groove portion 90A, and the pressing members 73A and 73B are in a neutral state. This state is the neutral position of Fig. 7B, and the two pressing members 73A and 73B are supported upward, so that a simple and normal lighting inspection signal is not applied.

The simple lighting groove part 90B is a groove part which is located in one side (left side of FIG. 1) of the neutral groove part 90A, and is extended in the downward direction. The pressing guide pin 81 of the pressing member 73A for simple lighting is guided and pushed down to the recess 90B for simple lighting, and the pressing guide pin 81 of the pressing member 73B for lighting is normally in a neutral state. By keeping it as, the simple lighting test signal is applied to the terminal 7C of the liquid crystal panel 7. This state is the simplified lighting inspection position in Fig. 7C.

Normally, the groove part for lighting 90C is a groove part located in the other side (right side of FIG. 1) of the neutral groove part 90A, and extending downward. The normal lighting groove 90C guides and pushes down the pressing guide pin 81 of the pressing member 73B for lighting, and simultaneously presses the pressing guide pin 81 of the pressing member 73B for lighting. In this case, the lighting test signal is normally applied to the terminal 7C of the liquid crystal panel 7. This state is the normal lighting inspection position of Fig. 7A.

The drive mechanism 85 is a mechanism for sliding the two slide plates 84 integrally. The drive mechanism 85 is comprised from the air cylinder 92 connected to the two slide plates 84, and an air supply apparatus (not shown). The air cylinder 92 has a hold function in three positions. That is, it is possible to hold two slide plates 84 at each of the neutral position, the simple lighting inspection position, and the normal lighting inspection position described above.

The air supply apparatus is provided with a switching valve (not shown), and it is possible to appropriately select the position of the slide plate 84 by switching the supply path of air to the air cylinder 92 with the switching valve.

The alignment camera 34 is an alignment provided on the surface of the liquid crystal panel 7 when the respective probes 47 of the probe assembly 38 of the probe device 33 are aligned with the terminals 7C of the liquid crystal panel 7. A camera for photographing marks (not shown). Three alignment cameras 34 are provided at a set position.

The inspection apparatus 21 configured as described above acts as follows. In addition, since the operation | movement of the whole test | inspection apparatus is the same as that of the conventional test | inspection apparatus, it demonstrates centering | focusing on the action of the probe unit 31 here.

First, a normal lighting test will be described. In the normal lighting inspection, as shown in Fig. 7A, the air cylinder 92 controlled by the air supply device of the drive mechanism 85 slides the two slide plates 84 and is held at the normal lighting inspection position. do. Thereby, the pressing guide pin 81 of the pressing member 73B is located in the normal lighting groove 90C of the pressing guide groove 90, and the pressing member 73B is pushed down, and the contact probe 52B has a normal point. It is pressed against the back pad 62.

Subsequently, the liquid crystal panel 7 supported by the panel support 30A is exactly aligned, and the terminal 7C of the liquid crystal panel 7 and the probe 47 are in contact with each other.

Subsequently, the normal lighting test signal generated by the normal lighting test signal generator is applied to the terminal 7C of the liquid crystal panel 7 by the probe 47 so that the test pattern is projected and the normal lighting test of the liquid crystal panel 7 is performed. Is done.

In the case of the simple lighting test, the air cylinder 92 controlled by the air supply device of the drive mechanism 85 causes the two slide plates 84 to slide as shown in Figs. 7A to 7C. , Hold in simple lighting inspection position. Thereby, the pressing guide pin 81 of the pressing member 73A is located in the simple lighting groove portion 90B of the pressing guide groove 90, and the pressing member 73A is pushed down to make the contact probe 52A simple. It is pressed against the back pad 61.

Subsequently, a simple lighting test signal is generated by the simple lighting test signal generator, and the simple lighting test signal is applied from the probe 47 to the terminal 7C of the liquid crystal panel 7 so that the test pattern is projected and the liquid crystal panel 7 A simple lighting test is performed.

When returning to normal lighting test, the air cylinder 92 is controlled by the air supply apparatus of the drive mechanism 85, the two slide plates 84 are slid, and it moves to a normal lighting test position.

As described above, the air cylinder 92 is controlled by the air supply device of the drive mechanism 85, the two slide plates 84 are slid to switch the connection circuit, and one of the lighting test signals is applied to the probe block. Therefore, there is no need to install two devices for the normal lighting test and the simple lighting test. As a result, the apparatus can be shared in the normal lighting test and the simple lighting test, and the need for replacing the device in the normal lighting test and the simple lighting test is also eliminated. As a result, inspection efficiency can be improved significantly.

Since the simple lighting inspection and the normal lighting inspection can be easily switched by the switching mechanism 56 of the inspection signal switching connecting device 49, the simple lighting inspection and the normal lighting inspection can be performed by one device, thereby reducing the cost. It can reduce the inspection efficiency.

Second Embodiment

Next, a second embodiment of the present invention will be described. Since the whole structure of the inspection apparatus which concerns on this embodiment is substantially the same as the inspection apparatus 21 of 1st Embodiment demonstrated above, it demonstrates centering around the probe assembly 95 here.

The probe assembly 95 is a member for contacting the terminal 7C of the circuit of the liquid crystal panel 7 and applying a test signal similarly to the probe assembly 38 of the first embodiment. The probe assembly 95 is provided on the lower surface of the probe plate 43. As shown in FIG. 12, the probe assembly 95 includes a probe block 96, a probe 97, and an FPC plate 98. As shown in FIG.

Like the probe block 96 of the first embodiment, the probe block 96 is integrally contacted with the terminal 7C of the circuit of the liquid crystal panel 7 to selectively apply a simple lighting test signal or a normal lighting test signal. By doing so, it is a member for simple lighting test and normal lighting test.

The probe block 96 is directly installed on the lower surface of the probe plate 43. The probe block 96 is provided with a probe 97. The probe 97 has a plurality of blades arranged side by side. The tip needle 97A of each blade constituting the probe 97 is in direct contact with the terminal 7C of the circuit of the liquid crystal panel 7, and the proximal needle 97B is described behind the FPC plate 98. The printed wiring 106 is in contact with each other.

The FPC plate 98 cooperates with the inspection signal switching block 55 to selectively connect the line of the simple lighting inspection signal or the line of the normal lighting inspection signal to the probe 97 of the probe block 96. to be. As shown in FIGS. 12-14, the FPC plate 98 is comprised from the main-body part 101, the FPC board 102, and the contact probe 103. As shown in FIG.

The main body portion 101 is formed in a substantially rectangular plate shape. The cutout groove 105 is formed in the lower part of the center of the main-body part 101. As shown in FIG. This is because the cutout groove 105 makes the body portion 101 light and at the same time slightly curved. As a result, when the pads 61 and 62 come into contact with the contact probes 103, they are slightly bent, so that the contact probes 103 can realize electrical connection without large scratches on the pads 61 and 62.

The FPC board 102 is a flexible board having printed wirings 106 provided on the lower surface thereof. The printed wirings 106 are arranged in parallel by the number of blades of the probe 97. The tip end of the printed wiring 106 is in electrical contact with the proximal end portion 97B of the probe 97. The contact probe 103 is provided in the base end of the printed wiring 106.

The contact probe 103 is a needle for electrically contacting the two pads 61 and 62, respectively. The contact probe 103 is composed of a conical or polygonal projection. The tip of the contact probe 103 is sharpened or rounded so as to have the best electrical connection in balance with the pads 61 and 62.

Thereby, when any one of the two pads 61 and 62 contacts the contact probe 103, the reliable electrical connection of the contact probe 103 and each pad 61 and 62 is realizable. At this time, even when the contact probe 103 and the pads 61 and 62 are strongly pressed, the main body portion 101 is slightly bent by the cutout groove 105 so as to alleviate the pressure contact with each other, thereby ensuring reliable electrical connection. .

The test signal switching block 55 is a device for selectively connecting either terminal of the line of the simple lighting test signal or the line of the normal lighting test signal to the contact probe 103 of the probe block 96. By moving the test signal switching block 55, one terminal of either the line of the simple lighting test signal or the line of the normal lighting test signal is selectively connected to the contact probe 103 of the probe block 96, so that the simple lighting test is performed. Alternatively, a test signal for a lighting test is normally applied. As shown in Figs. 8, 12, and 14, the inspection signal switching block 55 includes a glass substrate 58, an FPC 59, a TCP unit 60, a simple lighting pad 61, and a normal dot. The back pad 62 is comprised.

The base plate portion 107 is formed in a thick rectangular plate shape, the glass substrate 108 is provided above. On both sides of the base plate portion 57, two slide pins 125 of the switching mechanism 123 described later are provided.

The glass substrate 5 is a board | substrate with two circuits formed in the upper surface. That is, the simple lighting circuit 65 of the line of the simple lighting test signal and the normal lighting circuit 66 of the line of the normal lighting test signal are provided on the upper surface of the glass substrate 58, respectively.

The FPC 59 is a member for connecting the simple lighting circuit 65 of the line of the simple lighting test signal and the simple lighting test signal generator (not shown). The TCP unit 60 is a member for connecting the normal lighting circuit 66 and the normal lighting test signal generator (not shown) of the line of the normal lighting test signal. The drive IC 66 is provided above the TCP unit 60.

The simple lighting pad 61 is a terminal of the line of the simple lighting test signal. That is, the simple lighting pad 61 is a terminal for connecting the probe 97 and the simple lighting test signal generator. The simple lighting pad 61 is connected to the end of each line of the simple lighting circuit 65 provided on the FPC connecting plate. Then, the simple lighting pad 61 and the contact probe 103 come into contact with each other, so that the simple lighting test signal is applied to the terminal 7C of the liquid crystal panel 7 through the probe 97 so that the test pattern is applied to the liquid crystal panel. It is projected and a simple lighting test is performed.

The normal lighting pad 62 is a terminal of the line of the normal lighting test signal. That is, the normal lighting pad 62 is a terminal for connecting the probe 97 and the normal lighting test signal generator. The pad 62 for lighting is normally connected to the edge part of each line of the drive IC 66 provided on the FPC connection board. When the electrodes 121 and the contact probes 103 come into contact with each other, a normal lighting test signal is applied to the terminal 7C of the liquid crystal panel 7 through the probe 97 so that the test pattern is projected, and the normal lighting test is performed. Is done.

The inspection signal switching block 113 is slidably supported by the switching mechanism 123, as shown in Figs. The switching mechanism 123 moves the inspection signal switching block 55 by supporting and moving the inspection signal switching block 55, and either the simple lighting pad 61 or the normal lighting pad 62 is moved. One is a mechanism for selectively contacting and electrically contacting the contact probe 103. The switching mechanism 123 is comprised from the support plate 124 and the slide pin 125. As shown in FIG.

The support plate 124 is two board | plate materials respectively provided in the probe block 96 both sides. Each support plate 124 is provided so that the inspection signal switching block 55 may be inserted in both sides in the state provided in the probe block 96 both sides. Each support plate 124 is provided with a slide groove 126. The slide groove 126 is a groove for slidably supporting the slide pin 125. The slide groove 126 is formed in a V shape to slide the inspection signal switching block 113 in a V shape. The slide groove 126 is comprised from the V-shaped groove part 126A located in the center part, and extended downward, and the horizontal groove part 126B located in the both ends of the said V-shaped groove part 126A.

By moving the test signal switching block 113 along the slide groove 126 and the slide pin 125 in the reverse side direction, the lighting pad connected to the contact probe is switched.

The V-shaped groove portion 126A includes the electrodes 119 and 121 of either the normal lighting pad 112 or the simple lighting pad 111 because the slide pin 125 slides along the groove. And the contact probe 103 in contact with each other, while moving one pad (111, 112) in contact with the contact probe 103 downward while contacting the other pad (112, 111) to the contact probe 103 It is supposed to be.

The horizontal groove portion 126B is positioned at both ends of the V-shaped groove portion 126A and extends slightly horizontally at both ends thereof. The horizontal groove 126B is a portion that supports the inspection signal switching block 113 not to move. While the slide pin 125 slides the V-shaped groove portion 126A, the simple lighting pad 61 or the normal lighting pad 62 comes into contact with the contact probe 103 and is pressed, and then moved slightly horizontally to contact each other. At the same time, the slide pin 125 is not lowered toward the V-shaped groove portion 126A.

The inspection apparatus 21 configured as described above acts as follows. In addition, since the operation | movement of the whole test | inspection apparatus is the same as that of the conventional test | inspection apparatus, it demonstrates centering | focusing on the action of the probe unit 31 here.

First, a normal lighting test will be described. In the normal lighting test, as shown in Fig. 14B, the test signal switching block 55 is moved to the front end side (left of Fig. 14). Thereby, the slide pin 125 moves the V-shaped groove part 126A of the slide groove 126, and the lighting pad 112 is pressed against the contact probe 103 normally. Then, the slide pin 125 moves the horizontal groove portion 126B of the slide groove 126 horizontally, and is slightly moved horizontally while the lighting pad 112 is pressed by the contact probe 103 to make contact with each other. Make it certain

Subsequently, the liquid crystal panel 7 supported by the worktable 30 is exactly aligned, and the terminal 7C of the liquid crystal panel 7 and the probe 97 of the probe block 96 are in contact with each other.

Subsequently, the normal lighting test signal generated by the normal lighting test signal generator is applied to the terminal 7C of the liquid crystal panel 7 by the probe 97 so that the test pattern is projected on the liquid crystal panel 7 and the normal lighting test is performed. Is done.

When the simple lighting test is performed, the test signal switching block 55 is moved to the proximal end, as shown in Fig. 14A. Thereby, the slide pin 125 moves the V-shaped groove part 126A of the slide groove 126, and normally the pad 62 for lighting is removed from the contact probe 103, and the simple lighting pad 61 contacts. The probe 103 is approached and pressed. Then, the slide pin 125 moves the horizontal groove portion 126B, so that the lighting pad 112 is normally pressed slightly by the contact probe 103, so that the slide pin 125 is moved horizontally to make sure the contact with each other is assured.

Subsequently, a simple lighting test signal is generated by the simple lighting test signal generator, and the simple lighting test signal is applied from the probe 97 to the terminal 7C of the liquid crystal panel 7 so that the test pattern is applied to the liquid crystal panel 7. It is projected and a simple lighting test is performed.

When returning to the normal lighting test, as described above, the test signal switching block 113 is moved to the normal lighting pad 112.

As described above, the test signal switching block 55 each provided with a terminal of the line of the simple lighting test signal (the pad for simple lighting 111) and a terminal of the line of the normal lighting test signal (normally a lighting pad 112). ), One of the terminals is selectively connected to the contact probe 103 of the FPC plate 98 of the probe block 96 so that any one lighting test signal is applied to the probe block. There is no need to install two devices for simple lighting test. As a result, the apparatus can be shared in the normal lighting test and the simple lighting test, and the frequency of replacement of the device can be reduced. As a result, cost can be reduced and inspection efficiency can be improved.

The inspection apparatus according to each of the embodiments described above can be applied to both the inspection of the normal lighting and the inspection of the simple lighting.

In the inspection apparatus according to each of the above embodiments, a simple lighting inspection signal and a normal lighting inspection signal are used as inspection signals, but the present invention can be applied even when there are other signals. For example, in the first embodiment, three pressing members are provided, and three positions for pressing down each pressing member in the pressing guide groove 90 in correspondence with the three pressing members are provided. Also in this case, the same effects and effects as those of the first embodiment can be brought about.

In the first embodiment, the contact probes 52A and 52B are provided in the FPC 51, but the pads 61 and 62 may be provided in the FPC 51. Also in this case, the same effects and effects as those of the first embodiment can be brought about.

In the second embodiment, the switching mechanism 73 slides the test signal switching block 113 to selectively contact the contact probe 103 with the simple lighting pad 111 or the normal lighting pad 112. As shown in Fig. 15, the test signal switching block 113 may be moved by the two links 128. In this case, after the inspection signal switching block 113 is moved by the link 128, a means for fixing the inspection signal switching block 113 to the FPC plate 98 is provided. Switch. Also in this case, the same effects and effects as described above can be brought.

In addition, in the said 2nd Embodiment, although the slide pin 125 was made into the mechanism which only slides in the slide groove 126, as shown in FIG. 16, the screw 129 is provided in the slide pin 125, and the slide pin After 125 moves to the horizontal groove portion 126B, the inspection portion switching block 85 may be fixed to the FPC plate 98 by the screw portion 129. Thus, after the inspection signal switching block 113 is moved, it can be fixed easily and reliably.

1 is a side view showing the main parts of a probe unit according to a first embodiment of the present invention.

2 is a side view showing a conventional probe unit.

3 is a perspective view showing an inspection apparatus according to a first embodiment of the present invention.

4 is a perspective view showing a measuring unit of the inspection apparatus according to the first embodiment of the present invention.

5 is a side view showing a probe unit of the inspection apparatus according to the first embodiment of the present invention.

Fig. 6 is a perspective view showing the main part of the probe unit according to the first embodiment of the present invention from below.

Fig. 7 is a side view showing the main portion of a probe unit according to the first embodiment of the present invention.

8 is a plan view showing a test signal switching block of the probe unit according to the first embodiment of the present invention.

9 is a cross-sectional view showing the main parts of a probe unit according to the first embodiment of the present invention.

10 is an enlarged view of a main portion of the probe unit according to the first embodiment of the present invention.

11 is an enlarged view of a main portion of the probe unit according to the first embodiment of the present invention.

Fig. 12 is a side view showing the main portion of a probe unit according to the second embodiment of the present invention.

Fig. 13 is a perspective view showing the main part of the probe unit according to the second embodiment of the present invention from below.

Fig. 14 is a side view showing the main portion of a probe unit according to the second embodiment of the present invention.

Fig. 15 is a side view showing a first modification of the present invention.

Fig. 16 is a side view showing a second modification of the present invention.

* Description of Major Symbols in Drawings *

7: liquid crystal panel 7A: panel display

7B: Panel terminal part 7C: Terminal

21: inspection device 22: panel set

23: measuring section 26: opening

27: panel water supply device 28: conveyance arm

29: alignment stage 30: worktable

30A: Panel receiving part 31: Probe unit

32: panel receiving part 33: probe device

34: alignment camera 35: inspection signal switching block

37: support 38: probe assembly

40: suspension block 41: guide rail

42: slide block 43: probe plate

44: adjusting screw 46: probe block

47: probe 48: FPC connection plate

49: inspection signal switching interface 51: FPC

52A, 52B: Contact Probe 53: Wiring

54: base plate 55: inspection signal switching block

56: switching mechanism 57: base plate portion

58: glass substrate 59: FPC

60: TCP unit 61: simple lighting pad

62: normal lighting pad 64: support arm portion

65: simple lighting circuit 66: normal lighting circuit

67: drive IC 73A, 73B: pressure member

74: pressing means 75: elastic member

76: support frame 76A: vertical rod

78: shaft holder 79: slide pin

80: pin groove 81: pressing guide pin

84: slide plate 85: drive mechanism

86: guide plate 87: guide rail

88: slide guide 90: pressing guide groove

90A: Neutral groove 90B: Simple lighting groove

90C: Normal lighting groove 92: Air cylinder

95: probe assembly 96: probe block

97: probe 98: FPC plate

101: main body 102: FPC plate

103: contact probe 105: cutting groove

106: printed wiring 107: base plate portion

108: glass substrate 109: FPC

110: COF 111: simple lighting pad

112: pad for normal lighting 113: test signal switching block

116: drive IC 118: pedestal

119: electrode 120: pedestal

121: electrode 123: switching mechanism

124: support plate 125: slide pin

126: slide groove 126A: V-shaped groove portion

126B: horizontal groove 128: link

129: thread

Claims (7)

A probe unit for selectively applying at least a simple lighting test signal or a normal lighting test signal by contacting each probe with a plurality of terminals of a circuit of the test counter board. An FPC connecting plate connected to the probe and having at least a simple lighting test signal terminal and a normal lighting test signal terminal; And An inspection signal switching connecting device for selectively switching a connection to at least one of the simple lighting inspection signal terminals and the normal lighting inspection signal terminal; Probe unit comprising a. 2. The test signal switching connecting apparatus according to claim 1, wherein the test signal switching connecting apparatus is provided with at least the terminal for the simple lighting test signal and the terminal for the normal lighting test signal, respectively, and any one terminal is selectively brought into contact with each terminal of the FPC connecting plate. A test signal switching block for applying a test signal to a terminal of the test counter board; And A switching mechanism for selectively switching the test signals by selectively pressing each terminal of the test signal switching block and each terminal of the FPC connection plate corresponding thereto; Probe unit comprising a. The terminal of claim 2, wherein each terminal of the test signal switching block and each terminal of the FPC connecting plate are disposed with a predetermined space at a position corresponding to each other. The switching mechanism is configured to selectively move each of the plurality of pressing members by pressing the FPC connecting plate to selectively contact and electrically contact the respective terminals, and selectively moving the plurality of pressing members. Probe unit comprising a pressing means for contacting. 4. An elastic member according to claim 3, wherein said pressing member is supported so as to be movable up and down, and an elastic member for simultaneously pressing down all the terminals for the simple lighting test signal and an elastic member for pressing down all the terminals for the normal lighting test signal simultaneously. Equipped with And said pressing means is provided with a slide plate having slide grooves for engaging and sliding each elastic member selectively by engaging the respective proximal end sides of said elastic members. The probe unit according to claim 2, wherein the switching mechanism movably supports the inspection signal switching block and moves the inspection signal switching block so that the respective terminals are selectively pressed and electrically contacted. . 6. The probe unit according to claim 5, wherein the switching mechanism has a slide groove for sliding the inspection signal switching block into a V shape. An inspection apparatus used to inspect the inspection counter plate, It has a panel set part for carrying out the test counter plate inserted from the outside to the outside after the completion of the test, and a measuring unit for supporting the test counter plate passed from the panel set part. An inspection apparatus comprising the probe unit according to any one of claims 1 to 6 as the probe unit of the measurement unit.

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