JPH10185956A - Probe unit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To use a common probe unit for various kinds of liquid crystal substrates having different sizes by a method wherein positions of a plurality of probe blocks can be adjusted corresponding to the size, and the probe block can be switched over between a contactable condition and a non-contactable condition by each of sides. SOLUTION: Two first probe assemblies and two second probe assemblies are attached to respective four sides of a frame type probe base. A second movable base 50 of the second probe assembly can be moved on a guide rail 54 in an X direction. A second upper plate 52 can be rotated around a rotation shaft 60. A probe block 66 can be moved along a guide groove 64 in a Y direction. While the second upper plate 52 is pulled downward by an extension coil spring 76, a projection piece 78 is in contact with a movable piece 80. When an air cylinder 82 is compressed and the movable piece 80 is moved to the left, the second upper plate 52 is rotated and a probe needle is raised to be in a non-contactable condition. The first probe assembly has a structure similar to the second probe assembly.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe unit for inspecting a substrate to be measured by bringing contacts into contact with a large number of electrodes arranged around a rectangular substrate to be measured.

[0002]

2. Description of the Related Art In a liquid crystal prober, all electrodes (TAB) of a liquid crystal display panel substrate (hereinafter, referred to as a liquid crystal substrate) are used.
So that the contact (probe needle etc.) contacts the pad)
The unit in which the contact is positioned and fixed is called a probe unit. The probe unit is distinguished from a probe card used in a wafer prober in this way.

FIG. 8 is a plan view of a conventional probe unit for inspecting a rectangular liquid crystal substrate, and FIG. 9 is a side sectional view thereof (a sectional view taken along line AA in FIG. 8). A plurality of probe blocks 12 are provided on the probe base 10 having a rectangular frame shape.
Are accurately positioned and fixed with screws or the like. Many probe needles for contacting the electrodes (TAB pads) of the liquid crystal substrate 18 are grouped in TAB units,
Each group is attached to one probe block 12. One end of a flexible wiring board 14 is connected to the rear end of the probe block 12,
The other end of 4 is connected to a connector 16. This connector 16 is connected to a tester. Probe block 1
2 may be provided with a position adjusting mechanism for finely adjusting the mounting position of the probe needle with respect to the probe block.

FIG. 10 is an example of a wiring diagram formed on a liquid crystal substrate. This figure shows the vertical and horizontal center lines 3 of the liquid crystal substrate.
The wiring state of a quarter region sandwiched between 0 and 32 is shown. The data lines 20 extending in the vertical direction have TAB pads 22 for signal input alternately at both ends.
These pads 22 are grouped in TAB units, and are grouped so as to match the pitch of the TAB wiring pattern. The area 24 in which the pads 22 are aggregated in this manner is hereinafter referred to as a pad area. The gate line 26 extending in the lateral direction is connected to one of the left and right ends (FIG.
A pad region 28 is provided at the left end (when 0, left).

The size of the pad region 24 of the data line 20 in the pad arrangement direction is Wx, and the size of the pad region 24 adjacent to the data line 20 is Wx.
Is X1. The dimension of the pad region 28 of the gate line 26 in the pad arrangement direction is Wy, and the interval between adjacent pad regions 26 is Y1.

FIG. 11 is a plan view showing an example of the arrangement of pad regions on a liquid crystal substrate. In the liquid crystal substrate 18, four data line pad regions 24 are arranged on each side along two opposing X sides 34 (sides extending in the X direction). Also, three pad regions 28 of the gate line are arranged along one Y side 36 (side extending in the Y direction). The center-to-center distance (ie, pitch) of the pad region 24 on the X side 34 is Px,
The distance between the centers of the pad regions 28 on the Y side 36 is Py.
This liquid crystal substrate is called a double-tab type liquid crystal substrate because the pad regions 24 for the data lines are formed on the X sides 34 on both sides. On the other hand, the one in which the pad region 24 is formed only on one X side 34 is called a single tab type liquid crystal substrate. That is, in the two-tab type liquid crystal substrate, two X sides and one Y piece have pad areas, and in the one-tab type liquid crystal substrate, one X piece and one Y piece have pad areas.

FIG. 12 is a plan view showing a difference in the position of a pad region due to a difference in size of a liquid crystal substrate of the same format (for example, SVGA format). In the same type of liquid crystal substrate, even if the size is different, since the TAB having the same wiring pitch is used, the dimensions of the pad region are the same. However, the intervals between adjacent pad regions are different. That is,
On the X side, the interval between adjacent pad regions 24 is X1 in the 10-inch liquid crystal substrate 18a, but spreads to X2 in the 11-inch liquid crystal substrate 18b, and further spreads to X3 in the 12-inch liquid crystal substrate 18c. Therefore,
The center distance (pitch) of the pad region 24 also differs depending on the size of the liquid crystal substrate. Similarly on the Y side, 1
In the 0-inch liquid crystal substrate 18a, adjacent pad regions 28
Is Y1, but this spreads to Y2 on the 11-inch liquid crystal substrate 18b, and further spreads to Y3 on the 12-inch liquid crystal substrate 18c. The TAB used differs depending on the substrate maker.

[0008]

As shown in FIG. 12, if the size of the liquid crystal substrate is different, the position of the pad region is different. Therefore, the conventional probe unit shown in FIG. Made as a probe unit. That is, even for a liquid crystal substrate of the same type (for example, SVGA type), it is necessary to prepare a probe unit for each substrate size, such as for a 10-inch substrate, an 11-inch substrate, and a 12-inch substrate. In order to change the size of the liquid crystal substrate to be inspected, it is necessary to replace the probe unit in the liquid crystal prober. Since this probe unit is very large as compared with a probe card for a wafer, the replacement operation is a two-person operation and takes time. Further, there is a possibility that the probe unit may be damaged due to an accident during the operation.

By the way, the types of liquid crystal probers are as follows.
There are an array prober that inspects the electrical characteristics of circuit elements such as transistors formed on a glass substrate, and a lighting inspection prober that performs a lighting inspection, which is the final inspection of a liquid crystal substrate, each requiring a dedicated probe unit. . The reason is that even if the probe needle contact position is the same, the probe unit configuration (TA
B / IC). After all, as a probe unit for inspecting a liquid crystal substrate, (a)
A dedicated probe unit is required according to the type of the liquid crystal substrate, (b) the size of the liquid crystal substrate, and (c) the distinction between the array prober and the lighting inspection prober. For example, if there are two types and types of liquid crystal substrates and three types of sizes,
This alone requires a total of six types of probe units, and if two types are used for array prober and lighting inspection, a total of 12 types of probe units are required. Then, actually, another spare probe unit is prepared for each probe unit, so that 24 probe units are prepared.

As described above, the conventional probe unit is
Since probe units are prepared for each board size and each board type, (1) the number of probe units increases and the cost increases, and (2) it is necessary to safely store many unused probe units. (3) There is a problem that a probe unit needs to be replaced with a change in size or product type.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to enable a common probe unit to cope with different sizes of substrates to be measured. Another object of the present invention is to provide a combination of a substrate type (for example, double-tab type or single-tab type) and a type of inspection (for example, lighting inspection, TFT array inspection, or open / short inspection). To inspect two or four types of boards with a common probe unit.

[0012]

A probe unit according to the present invention has a plurality of probe blocks arranged on each of four sides of a frame-shaped probe base so that the positions of the probe blocks on each side can be adjusted in the X and Y directions. Thus, it is possible to cope with a plurality of substrate sizes. In addition, the probe blocks belonging to each side can be switched between the contactable state and the contactless state for each side, and only the probe blocks on some sides are used and the probe blocks on the remaining sides are used. I try not to. That is,
The present invention provides a probe unit for inspecting a substrate to be measured by bringing a contact into contact with a large number of electrodes arranged around a rectangular substrate to be measured, the probe unit having the following configurations (a) to (g). I have. (A) Two X sides extending in the X direction and the X side
A frame-shaped probe base including two Y sides extending in a Y direction perpendicular to the direction. (B) A first movable base mounted so as to be position-adjustable in the Y direction on each of two X sides of the probe base. (C) a first upper plate that is attached to the first movable base and that can be in one of a state in which the contact can contact the electrode and a state in which the electrode cannot contact the electrode; (D) A plurality of probe blocks which are attached to the first upper plate so as to be position-adjustable in the X direction and include the contacts. (E) a second movable base mounted so as to be position-adjustable in the X direction on each of the two Y sides of the probe base. (F) a second upper plate attached to the second movable base, wherein the contact can be in one of a state in which the contact can contact the electrode and a state in which the electrode cannot contact the electrode; (G) A plurality of probe blocks which are attached to the second upper plate so as to be position-adjustable in the Y direction and include the contacts.

According to the present invention, since the position of the probe block can be adjusted according to the size of the substrate to be measured, a common probe unit can be used for at least two types of substrate sizes. Therefore, when the size of the substrate to be measured is changed, the operation of replacing the probe unit is not required, and the operation of adjusting the probe unit in accordance with the change in the substrate size is completed in a short time by one operator. Also, there is no need to prepare or store a probe unit for each substrate size. Further, depending on the combination of the type of the substrate to be measured and the type of inspection, the probe blocks belonging to a specific side and the probe blocks belonging to the other sides have different configurations so that two types or four types of substrates can be used. A common probe unit can be used.

The substrate to be measured to which the present invention can be applied is rectangular and has a large number of electrodes arranged in the peripheral portion. Typically, the substrate to be measured is a flat display panel such as a liquid crystal display panel or a plasma display panel. The substrate corresponds. Furthermore, the present invention can be applied to those in which the dimensions of the pad regions divided for each TAB are common in the peripheral portions of these substrates even if the substrate sizes are different.

The form of the contact attached to the probe block is not particularly limited, but a cantilever type probe needle or a bump electrode formed on a wiring pattern can be used.

In the present invention, the position of the probe block is adjusted to correspond to different substrate sizes. Therefore, the positioning accuracy of the probe block affects the positioning accuracy of the probe needle and the electrode of the substrate to be measured. Come. Therefore, if a probe needle position adjusting mechanism is provided in each probe block, the positioning accuracy of the probe needles and the electrodes of the substrate to be measured can be ensured even if the positioning accuracy of the probe block itself is not so high. A mechanism for adjusting the position of the probe needle that can be provided in the probe block is disclosed in Japanese Patent Application Laid-Open No. 3-218472.

[0017]

FIG. 1 is a plan view showing an embodiment of a probe unit according to the present invention. FIG. 2 is a front view thereof (as viewed from the direction B in FIG. 1). In FIG. 1, a rectangular frame-shaped probe base 40 has two opposing X sides (sides extending in the X direction) 42 and two opposing Y sides (sides extending in the Y direction) 44. The first probe assemblies 46 and 47 are attached to the X side 42, and the Y side 44
Are attached with second probe assemblies 48 and 49.

Next, the configuration of the probe assembly will be described.
3 is an enlarged plan view of the second probe assembly 48, FIG. 4 is a side view thereof (as viewed from the direction of arrow C in FIG. 3), and FIG. 6 is an exploded perspective view thereof. . 6, the second probe assembly 48 is roughly divided into a lower second movable base 50 and an upper second upper plate 52.
Consists of The second movable base 50 has two guide rails 5.
4 can be moved in the X direction. The guide rail 54 is fixed to the probe base 40 (see FIG. 1). The second movable base 50 can be fixed to the two guide rails 54 by tightening the two fixing screws 56. When the fixing screw 56 is loosened, the second movable base 50 can move on the guide rail 54. The two columns 58 stand on the second movable base 50 at an interval.
A rotation shaft 60 is mounted between the two. The rotation shaft 60 extends in the Y direction.

The upper second upper plate 52 has through holes 6
The second upper plate 52 can be attached to the second movable base 50 by inserting the rotation shaft 60 of the second movable base 50 into the through hole 62.
Thereby, the second upper plate 52 can rotate around the rotation shaft 60. A guide groove 64 is formed on the upper surface of the second upper plate 52. The guide groove 64 extends in the Y direction and has a trapezoidal cross section. On the other hand, a fastening block 68 is attached to the lower surface of the probe block 66 with a fixing screw 70 (see also FIG. 7A). The width of the fastening block 68 (the dimension along the longitudinal direction of the guide groove 64) is the same as the width of the probe block 66, and has the same trapezoidal cross section as the guide groove 64. The fastening block 68 can move inside the guide groove 64 in the Y direction. When the fixing screw 70 is tightened, the fastening block 68 rises and is fixed to the guide groove 64, and the probe block 66 is also fixed. Fixing screw 7
When 0 is loosened, the fastening block 68 and the probe block 66 can move together in the Y direction. Three probe blocks 66 are attached to the second upper plate 52.

The rear end of the second upper plate 52 (rotating shaft 6
Two tension coil springs 76 are hooked between the two pins 72 at the end farthest from 0) and the two pins 74 at the rear end of the second movable base 50. As a result, the rear end of the second upper plate 52 is pulled downward. A protruding piece 78 is fixed to the lower surface of the rear end of the second upper plate 52. The inclined surface on the lower surface of the protruding piece 78 rests on the inclined surface on the upper surface of the movable piece 80 on the second movable base 50. The movable piece 80 is an air cylinder 82
Air cylinder 8
By the operation of 2, it is possible to move in the X direction.

Next, the movement of the second probe assembly 48 in the XY directions will be described with reference to FIG. Fixing screw 5
By loosening 6, the second movable base 50 can be moved in the X direction along the guide rail 54. Also,
By loosening each fixing screw 70, the three probe blocks 66 can be moved in the Y direction, thereby changing the pitch Py of the probe blocks 66. As described above, by moving the probe block 66 in the X direction and the Y direction, the liquid crystal substrates 1 of different sizes are moved.
8 can be supported. Furthermore, if the probe block 66 itself is provided with a probe needle position adjusting mechanism (for example, an XYZ direction adjusting mechanism), the position of the probe needle can be finely adjusted.

Next, a function of switching the second probe assembly 48 between a contactable state and a contactless state will be described with reference to FIG. FIG. 7A is a sectional view taken along line DD of FIG. When the piston of the air cylinder 82 is extended, the movable piece 80 moves rightward. Then, the projecting piece 78 of the second upper plate 52 is pushed upward by the inclined surface of the upper surface of the movable piece 80, and the upper surface of the second upper plate 52 is kept substantially horizontal. In this state, the probe unit and the liquid crystal substrate 18
Are brought close to each other to a predetermined inspection position, the tip of the probe needle 84 at the lower end of the probe block 66 can contact the electrode of the liquid crystal substrate 18.

On the other hand, as shown in FIG. 7B, when the piston of the air cylinder 82 is contracted, the movable piece 80 moves to the left. Then, the second upper plate 52 is rotated clockwise in the drawing around the rotation shaft 60 by being pulled by the tension coil spring 76 (see FIG. 6). In this state, even if the probe unit and the liquid crystal substrate 18 are brought close to each other to a predetermined inspection position, the tip of the probe needle 84 is located several mm above the liquid crystal substrate 18 and does not contact the electrodes of the liquid crystal substrate 18. Thus, the contactable state and the contactless state of the probe block 66 are switched according to the operation of the air cylinder 82.

Incidentally, the two second probe assemblies 48 and 49 in FIG. 1 have exactly the same structure as each other. Also, the first
The probe assemblies 46 and 47 are connected to the second probe assembly 4.
8, 49, except that the number of probe blocks is four, and the width in the Y direction is accordingly larger than the width in the X direction of the second probe assembly. Is different. This first probe assembly 46,
As for 47, the description of the second probe assembly 48 described with reference to FIG.
"Second movable base" is read as "first movable base",
The “second upper plate” may be read as “first upper plate”, the “X direction” may be read as “Y direction”, and the “Y direction” may be read as “X direction”.

FIG. 2 is a front view of the probe unit of FIG. 1, but shows the side surfaces of the two second probe assemblies 48 and 49 and the back surface of the first probe assembly 47. FIG. 4 is a side view of the second probe assembly 48 of FIG. 3, in which a rotation shaft 60 attached to a column 58 of the second movable base 50 is shown.
Also, the guide groove 64 having a trapezoidal cross section and the fastening block 68 therein are clearly shown.

FIG. 5 is a rear view of the first probe assembly 47. The first movable base 50a includes two guide rails 54.
a, the first upper plate 52a is pulled in the direction of the first movable base 50a by two tension coil springs 76a, and the projecting piece 78a is in contact with the movable piece 80a. appear.

Next, a procedure for inspecting various liquid crystal substrates using the probe unit will be described. The state shown in FIG. 1 is a state of the probe unit when measuring the 10-inch liquid crystal substrate 18. The position of the probe needle of each probe block 66 is the position of the 10-inch liquid crystal substrate 18 in FIG.
a corresponding to the pad region 24. When the lighting inspection or the TFT array inspection of the liquid crystal substrate of both tab types is performed, the two first probe assemblies 46 and 47 and the one second probe assembly 49 are brought into a contactable state shown in FIG. To The remaining second probe assembly 48 is shown in FIG.
As shown in (B), the tip of the probe needle 84 is raised to make contact impossible. Using the probe unit set in this way, a predetermined inspection is executed by bringing the probe needles into contact with the pad areas on three sides of the liquid crystal substrate of both tab types. On the other hand, when performing the lighting inspection or the TFT array inspection of the single tab type liquid crystal substrate, one first probe assembly 46 is used.
And one second probe assembly 49 in a contactable state, and the remaining first probe assembly 47 and second probe assembly 48
To make it inaccessible. As described above, the contactable state and the non-contactable state of the probe needle can be selected for each probe assembly, so that both the double-tab type liquid crystal substrate and the single-tab type liquid crystal substrate can be handled.

To change the size of the liquid crystal substrate from 10 inches to 11 inches or 12 inches, adjust the probe unit as follows. First, the second probe assembly 4
In FIGS. 8 and 49, as shown in FIG.
, The second movable base 50 is moved in the X direction along the guide rail 54, moved to a position corresponding to the 11-inch or 12-inch liquid crystal substrate, and fixed with the fixing screw 56. Next, by loosening the fixing screw 70 and moving the three probe blocks 66 in the Y direction, 11 inches or 1
It is moved to the position of the pad area corresponding to the 2-inch liquid crystal substrate and fixed with the fixing screw 70. As a result, the probe block 66 comes to a position suitable for an 11-inch or 12-inch liquid crystal substrate. First probe assembly 4 of FIG.
The same operation is carried out for 6 and 47 so that the probe block is adapted to an 11-inch or 12-inch liquid crystal substrate.

In the case of liquid crystal substrates of the same format (for example, SVGA format), even if the size is different, since the individual pad areas divided for each TAB have the same dimensions, the position of each probe block depends on the size of the liquid crystal substrate. If the adjustment is made (that is, according to the arrangement position of the pad area), a common probe unit can be used as in the present invention.

If only one tab type liquid crystal substrate is subjected to lighting inspection or TFT array inspection, two types of liquid crystal substrates can be inspected using the same probe unit. That is, the first probe assembly 46 and the second probe assembly 49 are configured so as to be able to inspect a first type of liquid crystal substrate, while the first probe assembly 47 and the second
The probe assembly 48 is configured so as to be able to inspect a second type of liquid crystal substrate. Then, when inspecting the first type of liquid crystal substrate, the probe assemblies 47 and 48 are brought into a non-contact state, and only the probe assemblies 46 and 49 are used.
On the other hand, when inspecting the liquid crystal substrate of the second type, on the contrary, the probe assemblies 46 and 49 are disabled from contacting, and only the probe assemblies 47 and 48 are used.

By the way, if only the open / short inspection of the data lines on the liquid crystal substrate is to be executed, the probe needle only needs to be brought into contact with the pad region 24 connected to the data line 20 in FIG. Area 2
8 does not require contact with a probe needle. That is,
In order to perform open / short inspection (data line) of the liquid crystal substrate of both tab types, only two opposing probe assemblies are used. Therefore, the two first probe assemblies are configured for the open / short inspection (data line) of the liquid crystal substrate of the first type of both tab types, and the two second probe assemblies are formed of the second type of both tab types. For the open / short inspection (data line) of the liquid crystal substrate. Thus, open / short inspection (data line) of two types of liquid crystal substrates of both tab types can be performed using the same probe unit. Further, in the open / short inspection (data line) of a single tab type liquid crystal substrate, only one probe assembly is required, so that four types of liquid crystal substrates can be inspected with the same probe unit.

After all, in this probe unit, the position of the probe block of each probe assembly can be adjusted according to the substrate size, and the contactable state and the contactless state can be selected for each probe assembly. Various liquid crystal substrates can be inspected with the probe unit. This can be summarized as follows. (1) It is possible to support liquid crystal substrates having different sizes. (2) Both liquid crystal substrates of both tab type and single tab type can be supported. (3) When a lighting inspection or a TFT array inspection of a single tab type liquid crystal substrate is performed, two types of liquid crystal substrates can be handled. (4) When performing an open / short inspection (data line) of a liquid crystal substrate of both tab types, it is possible to cope with two types of liquid crystal substrates. (5) When performing an open / short inspection (data line) of a single tab type liquid crystal substrate, it can be applied to four types of liquid crystal substrates.

In the description of the above embodiment, 10 inches,
Although the description has been made using the example of the liquid crystal substrates of three types of 11 inches and 12 inches, the substrate size is not limited to this. Further, the present invention can be applied to a substrate to be measured other than the liquid crystal substrate.

In the above embodiment, the first upper plate and the second upper plate are configured to be rotatable. However, in order to switch between the contactable state and the contactless state, the first upper plate and the second upper plate can be moved up and down. Is also good.

[0035]

According to the present invention, the positions of a plurality of probe blocks can be adjusted according to the size of a substrate to be measured, and the probe blocks can be switched between a contactable state and a contactless state for each side. With this configuration, a common probe unit can be used for substrates of different sizes and types, and the work of replacing the probe unit becomes unnecessary. Therefore, the operation of adjusting the probe unit in accordance with the change of the board size or the type is completed by one operator in a short time. In addition, there is no need to prepare or store a probe unit for each board size or product type.

[Brief description of the drawings]

FIG. 1 is a plan view showing one embodiment of a probe unit of the present invention.

FIG. 2 is a front view of the probe unit of FIG.

FIG. 3 is a plan view of a second probe assembly.

FIG. 4 is a side view of a second probe assembly.

FIG. 5 is a rear view of the first probe assembly.

FIG. 6 is an exploded perspective view of a second probe assembly.

FIG. 7 is a sectional view taken along line DD of FIG. 3;

FIG. 8 is a plan view of a conventional probe unit.

FIG. 9 is a sectional view taken along line AA of FIG. 8;

FIG. 10 is an example of a wiring diagram formed on a liquid crystal substrate.

FIG. 11 is a plan view showing an example of the arrangement of pad regions on a liquid crystal substrate.

FIG. 12 is a plan view showing a difference in the position of a pad region due to a difference in the size of the liquid crystal substrate.

[Explanation of symbols]

 18 Liquid crystal substrate 40 Probe base 42 X side 44 Y side 46, 47 First probe assembly 48, 49 Second probe assembly 50 Second movable base 50a First movable base 52 Second upper plate 52a First upper plate 54 Guide Rail 56 Fixing screw 58 Prop 60 Rotating axis 64 Guide groove 66 Probe block 68 Fastening block 70 Fixing screw 76 Pull coil spring 84 Probe needle

Claims (2)

[Claims] 1. A probe unit for inspecting a substrate to be measured by bringing a contact into contact with a number of electrodes arranged around a rectangular substrate to be measured, the probe unit having the following configuration. (A) A frame-shaped probe base including two X sides extending in the X direction and two Y sides extending in the Y direction perpendicular to the X direction. (B) A first movable base mounted so as to be position-adjustable in the Y direction on each of two X sides of the probe base. (C) a first upper plate that is attached to the first movable base and that can be in one of a state in which the contact can contact the electrode and a state in which the electrode cannot contact the electrode; (D) A plurality of probe blocks which are attached to the first upper plate so as to be position-adjustable in the X direction and include the contacts. (E) a second movable base mounted so as to be position-adjustable in the X direction on each of the two Y sides of the probe base. (F) a second upper plate attached to the second movable base, wherein the contact can be in one of a state in which the contact can contact the electrode and a state in which the electrode cannot contact the electrode; (G) A plurality of probe blocks which are attached to the second upper plate so as to be position-adjustable in the Y direction and include the contacts. 2. The method according to claim 1, wherein the first upper plate is rotatable about a rotation axis extending in the X direction, and the second upper plate is rotatable about a rotation axis extending in the Y direction. The probe unit according to claim 1, wherein: