JP2678178B2 - Probing method and probe device - Google Patents

Description

The present invention relates to a probing method and a probe device for inspecting each liquid crystal drive element on an LCD (liquid crystal display) substrate.

(Prior Art) For example, when inspecting the electrical characteristics of the LCD, in order to electrically connect the gate and source of the TFT to the probe needle, the source lead electrode and the gate lead electrode at the edge of the substrate must be connected. It is necessary to contact the inspection electrodes with each other.

Further, since the gate of the TFT is connected to the transparent electrode in each pixel forming the screen, in order to perform a functional test of any TFT, the transparent electrode on the pixel in which the TFT exists also has an inspection electrode. Need to contact.

Here, as a probe device for inspecting such an LCD, there are those disclosed in JP-A-61-70579 and JP-A-62-204291.

In the probe devices disclosed in these publications, LC
By providing three probe heads that can be moved in a direction parallel to one side and / or the other side of the mounting table on which D is mounted, and by moving these on the mounting table, the function test of the liquid crystal drive element is performed. is there.

(Problem to be Solved by the Invention) According to the above-described probe device, the moving range of each probe head is large, and when the electrodes formed at the fine pitch are contacted, the cumulative error due to the sequential movement increases, There is a problem that the control is extremely complicated.

Here, the above probe device has one LC in one substrate.
It was developed for the one with D formed, but in recent years, some LCDs are sliced after they are formed on one substrate. In this case, it is possible to apply the probe device as it is, but it is difficult to carry out an efficient inspection because it is not a device assuming such a substrate.

Therefore, an object of the present invention is to solve the above-mentioned conventional problems, and provide a probing method and a probe device which are optimal for inspecting an object to be inspected in which a plurality of LCDs are formed in one substrate. Especially.

[Structure of the Invention] (Means for Solving the Problems) The probing method according to claim 1 is characterized in that at least a signal line electrode and a scanning line electrode of a substrate formed by forming a plurality of liquid crystal display devices are first and second. When the probe of the probe head is brought into contact to inspect the liquid crystal display device, the first and second probe heads are moved within the vertical and horizontal sizes of one liquid crystal display device, respectively. The probe of the probe head is brought into contact with all the electrodes of the liquid crystal display device to perform the inspection, and the mounting table supporting the substrate is moved to move the other liquid crystal display device to the first,
The liquid crystal display device is inspected by setting it within the moving range of the second probe head.

The probe device according to claim 2, wherein the probes of the first and second probe heads are brought into contact with at least the signal line electrodes and the scanning line electrodes of a substrate formed by forming a plurality of liquid crystal display devices. A probe device for inspecting an apparatus, wherein the first probe head is movable within a range of one side of the liquid crystal display device in a direction parallel to one side of the liquid crystal display device, and the probe is Two signal line electrode heads capable of contacting a part of all signal line electrodes facing each other of the liquid crystal display device, wherein the second probe head is the liquid crystal display device in a direction parallel to the other side of the liquid crystal display device. The scanning head is configured as two scanning line electrode heads that are movable within the range of the other side and in which the probe is capable of contacting a part of all scanning line electrodes facing each other. Put With, at the time of inspection of the other liquid crystal display device, and having a first, moving the mounting table such that the within moving range of the second probe head another liquid crystal display device is set.

The probe device according to claim 3 is the probe device according to claim 2, wherein the signal line electrode head is attached to a movable member that moves in a direction orthogonal to one side of the substrate, and the scanning line electrode head is the substrate. Is attached to a movable member that moves in a direction orthogonal to the other side, and the signal and scanning line electrode heads can be set at positions corresponding to the outer size of the liquid crystal display device.

A probe device according to a fourth aspect is the probe device according to the second aspect, wherein the first and second probe heads are configured to be movable within a vertical size and a horizontal size of one liquid crystal display device, respectively. Provided is a third probe head having a probe which is movable in a direction parallel to both sides within the range of one side and the other side and which has a probe capable of contacting a pixel electrode of a liquid crystal driving element provided in the liquid crystal display device. It is characterized by that.

(Operation) According to each of the inventions described in claims 1 to 4, the operation of setting each liquid crystal display device formed on one substrate within the movement range of the probe head is realized by moving the mounting table. ,
Moreover, this is realized by moving the first and second probe heads in order to bring the probe of the probe head into contact with each electrode in the liquid crystal display device.

Therefore, the movement sequence of the probe head can be commonly used for a plurality of liquid crystal display devices on one substrate, and can be realized only by setting the liquid crystal display device to be inspected to the inspection position by moving the mounting table.

(Example) Hereinafter, an example in which the present invention is applied to a probe device for an LCD substrate will be specifically described with reference to the drawings.

Before describing the configuration of this probe device, let's look at the LCD
The structure of the substrate will be described with reference to FIG. 8 that schematically shows the substrate surface.

A large number of pixels 80 having a transparent electrode, a passivation film, an alignment film and the like are formed on an active matrix type liquid crystal substrate 70.

A MOS type TFT 81 is arranged in each of these pixels 80, and the sources of the MOS type TFT 81 are source lines (also referred to as scanning lines) 82a, 82b, 82c, ...
The gates are connected to gate lines (also referred to as signal lines) 83a, 83b, 83c, ... In addition, MOS type
The drain of the TFT 81 is connected to the transparent electrode in the pixel 80, respectively.

Further, the source lines 82a, 82b, 82c ...
Source lead electrodes 84a, 84b, 84c ...
Are connected to the opposing electrodes 84a ', 84b', 84c ', etc., respectively. Similarly, for the gate lines 83a, 83b, 83c, the gate lead electrodes 85a, 85b, 85c ...
5a ', 85b', 85c '...

The counter electrode is used for inspecting each line, short circuit between lines, and disconnection. On the other hand, the electrodes used for functional inspection of the TFT are electrodes connected to the gate, source, and drain of the TFT. That is, the source lead electrodes 84a, 84b, 84c ..., The gate lead electrodes 85a, 85b, 85c.

Then, the inspection target of the present probe device has the above-mentioned configuration.
A plurality of LCDs 70, for example, four (LCD) as shown in FIG.
70a-70d) is a substrate 90 formed by forming.

Next, the configuration and operation of the probe device for inspecting each LCD 70 on the substrate 90 will be described.

<First Embodiment> This first embodiment device is configured to have four probe heads movable in directions parallel to the four sides of the LCD 70.

As shown in FIG. 1 (B), there is a mounting table 1 on which the substrate 90 is mounted and supported, and the mounting table 1 has X and Y axes which are directions of two axes orthogonal to the mounting surface. It is movable in the Z axis in the height direction orthogonal to the X and Y axes, and in the θ direction which is the rotation direction around the Z axis.

Next, the configuration of the four probe heads arranged above the mounting table 1 will be described.

As the four probe heads, a first scanning line probe head 10a, a second scanning line probe head 10b, a first signal line probe head 12a, and a second signal line probe head 12b are provided. . The first,
The second scan line probe heads 10a and 10b are the LCDs.
It is movable only in the X direction, which is a direction parallel to one side of the LCD 70 facing each other, and the moving range is a range corresponding to the length of the one side of the LCD 70. This second
The first and second scanning line probe heads 10a and 10b are the L
It contacts the source lead electrode of CD70,
For example, the number of source lead electrodes of the LCD 70 on one side is 240
In this case, the number of electrodes of the first and second scanning line probe heads 10a and 10b is 60, which is 1/4 of that.
Therefore, the first and second scanning line probe heads 10
a, 10b can contact 60 source lead electrodes at a time, and in order to contact all the source lead electrodes corresponding to the length of one side, the probe heads 10a, 10b for the first and second scanning lines are provided. Is movable in the X direction. The lobe head 10a for the first and second scanning lines,
10b corresponds to the second probe head of the present invention.

On the other hand, the probe heads 12a, 12 for the first and second signal lines
b is movable only in the Y direction, which is a direction parallel to the other side of the LCD 70, and its moving range is the LC range.
The range is equivalent to the length of the other side of D70. The first and second signal line probe heads 12a and 12b are
When the number of gate lead electrodes on the other side of the LCD 70 is 240, the number of electrodes of the probe heads for the first and second signal lines are respectively It is 1/4, which is 60. Therefore, the first and second signal line probe heads 12a and 12b contact 60 gate lead electrodes at a time and contact all gate lead electrodes on the other sides. The signal line probe heads 12a and 12b can be moved in the Y direction. The probe heads 12a, 12 for the first and second signal lines
b is an example which comprises the 1st probe head of this invention.

Each probe head 10a, 10b, 12a, 12b has an UP / DOWN function so that contact and non-contact with each lead electrode can be performed independently.

Here, each of the four probe heads 10a, 10b, 12a, 12
Explaining the electrode contact structure of b, for example, as shown in FIG. 2 (A), one end of a flexible film electrode (FPC) 20 is curled, and a flexible member such as a felt 22 is interposed between the flexible film electrode (FPC) 20 and the substrate 21. An electrode structure can be mentioned as an example. Alternatively, as shown in FIG. 7B, by using the felt 22 as a core material having a round cross section, the load is concentrated on the lower end apex of the round core material, so that the pattern and the pad are easily aligned and small. The contact property with the area pad can be improved. Since it has been confirmed that the contact property is improved by making the core material hard, some substrates may be made of SUS material or the like. In addition, various contact structures can be adopted, and for example, a structure in which a plurality of probe needles are supported on a substrate may be used.

 Next, the operation of the first embodiment device will be described.

First, the mounting table 1 on which the substrate 90 is mounted is moved in the X and Y directions, and as shown in FIG. 1 (A), one LCD such as the LCD 70a on the substrate 90 is within the moving range of the four probe heads. Perform the positioning operation as set in. That is, the four probe heads are stopped at predetermined positions on four sides, and by moving the mounting table 1 in the Z direction in this state, the four probe heads and the LCD 7 are moved.
It makes contact with the gate lead electrode and the source lead electrode of 0a.

Next, the first and second scanning line probe heads 10a, 10
By b, the measurement signal from the tester is supplied, and the presence or absence of disconnection of each source line and the presence or absence of short circuit between adjacent source lines are inspected. On the other hand, by similarly using the first and second signal line probe heads 12a and 12b, the tester is selectively energized to inspect whether or not each gate line is broken and whether or not there is a short circuit between adjacent gate lines. . Further, by using the first scanning line probe head 10a and the first signal line probe head 12a, the value of the insulation resistance at the intersection of the gate line and the source line is inspected by the selective energization from the tester. .

In this embodiment, the other 60 existing next to the 60 electrodes currently in contact with each probe head
By moving so that it can contact the electrode of the book, LC
All source lead electrodes and gate lead electrodes on D70a can be contacted, and by performing the above inspection in each state, it is possible to perform defect inspection on all lines on LCD 70a or between lines or line intersections. Is possible.

The greatest merit of the configuration in which the four probe heads are moved in each direction is that only two arbitrary probe heads out of the four probe heads are used when performing one type of inspection. The other two probe heads can be moved during an inspection using these two probe heads. That is, since the movement of the probe head can be performed during the inspection using another probe head, the index time required for such movement of the probe head is
During the inspection of one LCD 70a, it can be made substantially zero, and therefore the inspection throughput can be greatly improved.

Next, a case of inspecting another LCD such as the LCD 70b on the substrate 90 will be described. In this case, since the mounting table 1 of this embodiment can be moved in the X and Y directions, the LCD 70b
In the case of performing the inspection, the mounting table 1 is moved in the X direction by one area of the LCD, so that the next inspection target LC
The D70b can be set within the moving range of the above four probe heads. After this setting, all the inspections on the LCD 70b can be performed by sequentially moving each probe head as in the inspection of the LCD 70a. And, when inspecting different LCDs in this way, since it is handled by moving the mounting table 1, the moving range of each probe head is, as described above, one side of the LCD 70 or another side. Only the range corresponding to each length is required. Therefore,
Since the moving distance of each probe head can be made shorter than before, it is possible to reliably prevent a contact failure due to an accumulated error when the probe head is moved over a long range. Moreover, regarding the movement sequence of the four probe heads, the four LCD 70 on the substrate 90
All of a, 70b, 70c, 70d can be used in common, and the same board 9
Compared to the case where each LCD above is inspected by moving only the probe head, the moving sequence becomes extremely simple, and the configuration of the control unit for such moving can be greatly simplified compared to the conventional one. .

In the case of the above embodiment, since the moving positions of the four probe heads are determined, the LC formed on the substrate 90 is
It is not possible to correspond when the inch size of D70 is different. Therefore, by using an adapter capable of changing the mounting position of the probe head in the direction orthogonal to the moving direction of each probe head, it becomes possible to use the same for the LCD 70 of each size.

<Second Embodiment> This second embodiment device is configured to have two probe heads movable in directions parallel to one side and the other side of the LCD 70.

A first probe head 30 and a second probe head 32 are provided as the two probe heads. As shown in FIG. 3, the first probe head 30 includes a first scanning line probe head 30a having 60 electrodes at predetermined intervals along the X direction in FIG. 3 and the Y direction in FIG. Along with a first signal line probe head 30b having 60 electrodes at predetermined intervals, and is movable in the X and Y directions. The movement range in the X and Y directions is a range corresponding to the lengths of one side and the other side of the LCD 70. Similarly, the second probe head is also composed of a second scanning line probe head 32a and a signal line probe head 32b having the same number of electrodes, moving direction, and moving range as the first probe head 30. There is.

The probe heads 30a, 30b, 32a, 32b also have the UP / DOWN function as in the first embodiment.

The mounting table 1 on which the substrate 90 of the second embodiment device is mounted is the same as that of the first embodiment described above, and the X and Y directions which are the orthogonal coordinates of the mounting surface and the Z direction which is the height direction. Direction further Y
It can be moved in the rotation direction θ around the axis.

 Next, the operation of the second embodiment device will be described.

First, similarly to the first embodiment, the substrate 90 is aligned by the movement of the mounting table 1, and then the mounting table 1 is moved up in the Z direction, and some of the electrodes of the LCD 70a and the first and the first electrodes are moved. Two
The electrodes of the probe heads 30 and 32 are contacted.

After completion of such contact, each probe head 30
By setting the positions of a, 30b, 32a and 32b to a predetermined value, the following inspection can be executed. That is, the probe heads 30b, 3 for the first and second signal lines of both probe heads 30, 32
By using 2b, it is possible to inspect the presence or absence of disconnection of each gate line and the presence or absence of short circuit between adjacent gate lines by selectively energizing from a tester.
Furthermore, by using the probe heads 30b and 32a, the value of the insulation resistance at the intersection of the gate line and the source line can be inspected.

In this way, after the inspection of one LCD 70a on the substrate 90 is completed, the mounting table 1 is moved in the X and / or Y directions in the same manner as in the first embodiment, so that the next inspection target is moved. It is set within the moving range of the first and second probe heads 30 and 32.

<Third Embodiment> This third embodiment device is common in that it has first and second probe heads 40 and 42 as in the second embodiment device described above, but the differences are as follows. is there.

First, the first probe head 40 is the same as the first scanning line probe head 40a and the signal line probe head.
Although it has 40b, the first probe head 40 is movable only in the Y direction in FIG. The number of electrodes of the first signal line probe head 40b having electrodes along the Y direction, which is the range of movement, is 60 as in the second embodiment, but along the X direction that cannot be moved. The first scanning line probe head 40a having electrodes has 240 electrodes so that all electrodes on one side of the LCD 70 can be simultaneously contacted. On the other hand, the second probe head 42 includes a second scanning line probe head 42a and a second signal line probe head 42b, and is movable only in the X direction in FIG. Then, the second scan line probe head 42 having electrodes along the movable X direction.
The second signal line probe head 42b has 60 electrodes, while having electrodes along the immovable Y direction.
Has 240 electrodes so that all electrodes on the other side of the LCD 70 can be collectively contacted.

The probe heads 40a, 40b, 42a, 42b can be UP / DOWN respectively. The movement of the mounting table 1 on which the substrate 90 is mounted is the same as in the first and second embodiments.

Here, the first scanning line probe head 40a
The second signal line probe head 42b needs to be in contact with all electrodes on one side or the other side of the LCD 70a. The probe heads 40a, 42b in this case
5A, the film electrode 46 requiring 240 electrode patterns can be supported on the substrate 44 as shown in FIG. 5A, but the structure shown in FIG. 5B is preferable. It is better to say As shown in FIG. 5 (B), 60 pattern electrodes are formed on one film electrode 48 and four film electrodes 48 are supported on the substrate 44, resulting in 240 film electrodes. It is possible to configure a probe head that requires the electrode pattern of As described above, a large number of electrodes required for collective contact are not formed on one film electrode 46, but the number of each film electrode is reduced to 60 as shown in FIG. 5 (B). By supporting a plurality of film electrodes 48 on one substrate 44, it is possible to solve the problem of accumulated error when a large number of pattern electrodes are formed on one film electrode 46. Further, since the number of divided film electrodes 48 is the same as the number of electrodes of each probe head as used in the above-mentioned first and second embodiments, it is possible to combine the divided film electrodes 48 in this way. By using it, the standardization of parts can be achieved, and the cost of the device can be reduced.

<Fourth Embodiment> In the fourth embodiment, by adding a third probe head 50 to the first to third embodiments, presence or absence of disconnection of each line and presence or absence of short circuit between lines described above. In addition to the detection of the resistance value at the line intersection, and the MOS type TFT which is a liquid crystal driving element.
81 functional tests will also be conducted.

The third probe head 50 makes it possible to perform the above-mentioned function inspection by contacting the transparent electrode shown in FIG. 8, that is, conducting the drain of the TFT 81. The third probe head 50 has one probe needle 62 supported by the manipulator 60 as shown in FIG. 7, and the manipulator 60 has the probe needle 62.
The position in the X and Y directions and the position in the Z direction which is the height direction can be finely adjusted.

FIG. 6A shows a configuration in which the third probe head 50 is added to the first embodiment. In the figure, the third probe head 50 is a single LCD 70, LCD 70a in the figure.
It is possible to move in the X and Y directions in the figure within the range of.

The functional inspection of the TFT 81 using the third probe head 50 will be described. First, the first table is moved within the moving range of each probe head by moving the mounting table 1 in the X and Y directions.
Set the LCD 70a. Next, the third probe head 50 is moved in the X and Y directions so that the probe needle 62 of the third probe head 50 is arranged above the moving electrode of the TFT 81 to be inspected on the LCD 70a. Moving. After that, by moving the mounting table 1 upward, the electrode pattern or probe needle of each probe head is brought into contact with the electrode pad of the LCD 70a. After that, the corresponding gate lead electrode and source lead electrode are energized from a tester (not shown) through the probe head so that the probe needle 62 of the third probe head 50 can be energized, and the current value It is possible to test the function of the TFT by measuring with a tester. By performing such an inspection while changing the positions of the first, second, and third probe heads 10, 12, 50, it is possible to perform the functional inspection of all the TFTs 81 on the LCD 70a. After the functional inspection of one LCD 70a is completed, the other LCD 70b is attached to the first to third probe heads 10, 12, 50 by the mounting table 1 as in the first embodiment described above.
Then, the function inspection can be performed on all the TFTs 81 of the four LCDs on the substrate 90 by setting within the movement range of the above and repeating the same operation thereafter.

Next, in addition to the above-described third embodiment, when performing a functional test of the TFT 81, as shown in FIG. 6 (C), the third probe head 50 is moved to the X, Y positions shown in FIG. In the same manner as the embodiment shown in FIG. 6 (A), the TFT 81 can be moved in any direction, and the movement range is set to cover the entire range of one LCD 70. It becomes possible to carry out a functional test.

Next, when performing a functional test of the TFT 81 in addition to the above-described second embodiment, the third probe head 50 is moved in the X and Y directions as shown in FIGS. 6 (A) and 6 (C). Although this may be possible, in the case of the second embodiment, the third probe head 50 may be fixed at an appropriate position (see FIG. 6 (B)). That is, the third probe head 50
In order to bring the probe needle 62 in the above into contact with the transparent electrode of the desired TFT 81, this can be realized by moving the mounting table 1 in the X and Y directions, and following this, the first and second probe heads 3
By contacting 0, 32 with the source lead electrode or the line lead electrode connected to this TFT 81, it is possible to similarly realize the above-mentioned functional test of the TFT 81.

<Fifth Embodiment> In the fifth embodiment, a probe head that contacts counter electrodes of signal lines and scanning lines is provided with a plurality of electrode pads instead of individual contacts electrically insulated for each electrode pad. The contacts are made in a batch short-circuited state. That is, in FIG. 9, except for the scanning line probe head 10a and the signal line probe head 12a,
The scan line common contactor 100 and the signal line common contactor 102 are formed. Each of the common contactors 100 and 102 is formed of, for example, a conductive rubber member that collectively shorts the electrode pads on the opposite side. Then, for example, when performing the disconnection inspection of the line, using the signal line probe head 12a in the signal line and the common contactor 102 arranged opposite thereto, in one screen, the signal line probe head 12a By moving in one direction, disconnection inspection of all signal lines can be performed. The same applies to scan lines.

<Sixth Embodiment> This sixth embodiment is a general-purpose type that can easily cope with the case where the inch size of the LCD on the substrate changes from lot to lot. The method shown in FIGS. Can be mentioned.

FIG. 10 shows the probe head 104, which moves in the X and Y directions along the X direction guide 114 or the Y direction guide 116.
Each of 106, 108, 110 is provided with a locking hole 112 corresponding to, for example, an LCD size of 3 ", 4", 6 ", 10" so that the mounting position can be moved in a direction orthogonal to the moving direction. Then, by selecting the locking hole 112 with respect to the locking pin (not shown) of the moving portion that travels on each of the guides,
The facing distance of each probe head is variable, and it is possible to cope with various sizes.

In FIG. 11, the second signal line probe head 150 that contacts the counter electrode pad and the second scanning line probe head 140 are opposed to the probe heads 120 and 130 on the opposite side. The distance can be changed.

First, in order to contact the electrode pads arranged along the left side of the LCD 70a shown in FIG. 11, the FPC card 1
20 are provided. And this FPC card 120 is LC
It is configured to have the same number of electrode pads as the total number of all electrode pads existing on the left side of D70a.

The FPC card 120 is fixed at a predetermined position, but when the inch size of the LCD 70a becomes large, a large-sized FPC card 120 is attached according to this.

A first probe card 130 and a second probe card 1 in which a plurality of probe needles are fixed in order to contact the upper and lower electrode pads of the LCD 70a in FIG.
Forty are provided. The first probe card 130 is X
It is movable along the direction guide 132 in the X direction, and the movement is converted by converting the driving force of the first motor 134 into the driving force of the first probe card 130 in the X direction with a wire or a ball screw. It is possible.

On the other hand, the moving mechanism of the second probe card 140 is as follows. That is, the first movable base 160
Can be moved in the X direction along the X direction guides 162, 162, and can be moved in the X direction by the driving force of the second motor 164. Y direction guides 166, 166 are provided in parallel on the first movable base 160.
The second movable base 170 is movable along the direction guides 166,166. Then, the second movable base 170 can be moved in the Y direction by the driving force of the third motor 168 provided on the first movable base 160. The second probe card 140 includes the second movable base 1
The second probe card 140 fixed to 70 is movable in both the X and Y directions by the movement of the first and second movable bases 160 and 170.

As a structure for contacting the electrode pad on the right side of the LCD 70a, the second movable base 170 has a second structure.
The common contactor 150 is fixed as a probe head for the signal line. This common contactor 150
Has a structure capable of collectively contacting all the electrode pads existing on the right side of the LCD 70a, and is constituted by arranging, for example, a conductive rubber member along the Y direction in FIG.

The first and second probe cards 130 and 140 and the common contactor 150 described above are provided with an up-down mechanism so that the contact state and the non-contact state with respect to the electrode pad of the LCD 70a can be switched.

According to the above configuration, even if the inch size of the LCD is different, as long as the electrode pad pitch is not different, by moving the movable bases 160 and 170, the distance between the facing probe heads and the like can be varied, so that various types can be easily changed. It can be used with LCDs of any size. The movable bases 160 and 170 described above
The moving mechanism by means of a second probe card 140
It is also used for moving in the X direction within the CD70a.

The present invention is not limited to the above embodiment,
Various modifications can be made within the scope of the present invention.

For example, in each of the above embodiments, each probe head electrode pattern can be contacted with all the source lead electrodes or the gate lead electrodes of the LCD 70 and all electrode pads on one LCD 70 can be contacted, but The inspection is not limited to the inspection using the electrode pads, and various defect inspections may be performed by using only the electrode pads in the peripheral portion of the LCD 70 where the defect is particularly likely to occur. When the third probe head 50 is provided as in the fourth embodiment, the probe head 50 may be configured to support the camera. Then, this camera can be used for alignment for positioning.

[Effects of the Invention] According to the inventions of claims 1 to 4, when inspecting an object to be inspected in which a plurality of liquid crystal display devices are formed on the same substrate, the inspection of each liquid crystal display device on the substrate is performed. This is realized by making the first and second probe heads movable within the range of one liquid crystal display device at the time of performing, and when inspecting another liquid crystal display device on the substrate, this substrate is supported. By setting another liquid crystal display device within the moving range of the first and second probe heads by moving the mounting table,
Inspection of all liquid crystal display devices on the same substrate can be performed.

Therefore, the moving range of the probe of each probe head becomes narrower than in the conventional case, and as a result, contact failure due to accumulated error of the moving position can be reliably prevented.

In addition, the first for each liquid crystal display device on the same substrate,
Since the movement sequence of the second probe head can be made common without being set for each liquid crystal display device, control during inspection is greatly simplified.

[Brief description of the drawings]

FIG. 1 is for explaining the first embodiment of the device of the present invention. FIG. 1A is a plan view of the probe device, FIG. 1B is a side view, and FIGS. 2A and 2B. ) Are schematic explanatory views each illustrating an example of a contact portion of the probe head,
FIG. 4 is a plan view for explaining the second embodiment device of the present invention, FIG. 4 is a plan view for explaining the third embodiment device of the present invention, and FIGS. 5 (A) and 5 (B). Each is a schematic explanatory view for explaining a configuration example of a film electrode, and FIGS. 6 (A), (B) and (C) are respectively the first embodiment device,
FIG. 7 is a schematic explanatory view for explaining a fourth embodiment device in which a third probe head is added to the second embodiment device and the third embodiment device, and FIG. 7 illustrates one configuration example of the third probe head. 8 is a schematic explanatory view for explaining the pattern configuration of the LCD, and FIG. 9 is a fifth embodiment device in which the probe on the side in contact with the counter electrode pad is a common contactor. Schematic explanatory view for explaining
FIG. 10 and FIG. 11 are schematic explanatory views for explaining the device of the sixth embodiment which can be applied to LCDs of different sizes. 12,30,40 ... First probe head, 10,32,42 ... Second probe head, 50 ... Third probe head, 70 ... LCD, 90 ... Substrate, 1 ... Mounting table .

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Tomoaki Kubota 2655 Tsukyu Re, Kikuyo-cho, Kikuchi-gun, Kumamoto Prefecture Tel Kyushu Co., Ltd. (56) References JP-A-62-204291 (JP, A)

Claims (4)

(57) [Claims] 1. A substrate formed by forming a plurality of liquid crystal display devices,
At least the signal line electrodes and the scanning line electrodes are brought into contact with the probes of the first and second probe heads, and when the liquid crystal display device is inspected, the first and second probe heads each have one liquid crystal display. By moving the probe of each probe head to all electrodes of the liquid crystal display device to perform the inspection by moving within the vertical and horizontal sizes of the device, by moving the mounting table that supports the substrate. A probing method characterized in that another liquid crystal display device is set within the moving range of the first and second probe heads and each liquid crystal display device is inspected. 2. A substrate formed by forming a plurality of liquid crystal display devices,
A probe device for inspecting the liquid crystal display device by bringing probes of first and second probe heads into contact with at least a signal line electrode and a scanning line electrode, wherein the first probe head is a liquid crystal display device. Two signal lines that are movable in a direction parallel to one side of the liquid crystal display device within a range of one side of the liquid crystal display device, and in which the probe is capable of contacting a part of all the signal line electrodes facing each other of the liquid crystal display device. The second probe head is movable within a range of the other side of the liquid crystal display device in a direction parallel to the other side of the liquid crystal display device, and the second probe head is an electrode head for all electrodes facing each other. Two scanning line electrode heads capable of contacting a part of the scanning line electrodes are provided, and the substrate is supported and mounted, and at the time of inspection of another liquid crystal display device, the first and second probe heads. Probe apparatus characterized by having a moving table as the within moving range other liquid crystal display device is set. 3. The signal line electrode head according to claim 2, wherein the signal line electrode head is attached to a movable member that moves in a direction orthogonal to one side of the substrate, and the scanning line electrode head is the other side of the substrate. A probe device, which is attached to a movable member that moves in a direction orthogonal to the above, and is capable of setting the signal and scanning line electrode heads at a position according to the outer size of the liquid crystal display device. 4. The liquid crystal display device according to claim 2, wherein each of the first and second probe heads is configured to be movable within a vertical size and a horizontal size of one liquid crystal display device. A third probe head is provided which is movable within the range of the sides in a direction parallel to both sides and has a probe capable of contacting a pixel electrode of a liquid crystal drive element provided in the liquid crystal display device. Characteristic probe device.