CN102539850A - Array test apparatus - Google Patents

Array test apparatus Download PDF

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Publication number
CN102539850A
CN102539850A CN2011100361608A CN201110036160A CN102539850A CN 102539850 A CN102539850 A CN 102539850A CN 2011100361608 A CN2011100361608 A CN 2011100361608A CN 201110036160 A CN201110036160 A CN 201110036160A CN 102539850 A CN102539850 A CN 102539850A
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CN
China
Prior art keywords
axle
probe
probe rod
electrode
rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2011100361608A
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Chinese (zh)
Inventor
李在�
潘俊浩
崔珍荣
朴廷喜
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Top Engineering Co Ltd
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Top Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Top Engineering Co Ltd filed Critical Top Engineering Co Ltd
Publication of CN102539850A publication Critical patent/CN102539850A/en
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays

Abstract

An array test device is provided. The probe module comprises a plurality of probe bars which are installed on the probe module for rotating and has a plurality of probe pins which are arranged in a different type. The array test apparatus can detect glass panels of various kinds having different electrode positions and arrangement modes with high efficiency.

Description

Array detecting device
Technical field
The present invention relates to a kind of array detecting device that is used for the tested glass panel.
Background technology
In general, flat-panel monitor (FPD) is than the conventional television with Braun kinescope (Braun Tube) or display is thin and light image display.LCD (LCD), plasma display (PDP), field-emitter display (FED) and Organic Light Emitting Diode (OLED) are to have developed and the representative instance of the flat-panel monitor that uses.
LCD among this FPD is to provide the mode of controlling the light transmission of liquid crystal cells based on the data of image information signal to show to expect the image display of image independently to the liquid crystal cells that is arranged as matrix shape.LCD is thin and light, comprises many other advantages low in energy consumption and that operating voltage hangs down but also have, and therefore is widely used.Below detailed description is used in the typical manufacturing approach of the liquid crystal panel among this LCD.
At first, on the upper glass panel, form colored filter and common electrode.Afterwards, on the lower-glass panel relative, form thin film transistor (TFT) (TFT) and pixel electrode with the upper glass panel.
Subsequently both alignment layers is applied to upper glass panel and lower-glass panel respectively.The friction matching layer is so that provide tilt angle and orientation orientation for the liquid crystal molecule in the liquid crystal layer that between both alignment layers, forms subsequently afterwards.
After this, form sealant pattern through at least one that fluid sealant is applied in the face glass, with keep between face glass the gap, prevent that liquid crystal from spilling and the seal glass panel between the gap.Subsequently, between face glass, form liquid crystal layer, thereby accomplish liquid crystal panel.
In said process; Whether test has the whether defective operation of lower-glass panel (hereinafter being called " face glass ") of TFT and pixel electrode, break or detect pixel cell not good realization of whether developing the color through for example detecting gate line or data line.
Typically, use array detecting device to come the tested glass panel with a plurality of probe pins.Utilizing array detecting device to come face glass tested comprises: probe pins is placed corresponding to the position that is formed on the electrode on the face glass, under pressure, probe pins contacted with electrode and then electric signal is applied to electrode through probe pins.
Be arranged on the position of the electrode on the face glass and the arrangement of electrode, that is to say, the distance between the quantity of electrode and each adjacent electrode is different for different types of face glass.Therefore, utilizing single array detecting device to test polytype face glass must comprise: probe assembly is replaced by another probe assembly with probe pins corresponding with the position of the electrode of face glass to be tested and arrangement.Yet, when test during polytype face glass, for test purpose is replaced by the problem that another probe assembly with probe pins corresponding with the position of the electrode of face glass and arrangement causes reducing treatment effeciency with probe assembly.
Summary of the invention
Therefore; To the problem that produces in the above prior art the present invention is proposed; And the purpose of this invention is to provide a kind of array detecting device; Its different types of probe rod that is configured to comprise the probe pins with different type of arrangement switches through rotating the probe rod, thus different types of face glass that can only come to test efficiently to have different electrode positions, arrangement and layout orientation through single array detecting device.
In order to realize above purpose, the present invention provides a kind of array detecting device, comprising: probe assembly, and it is arranged on the probe assembly support frame, can vertically moving along the probe assembly support frame; And a plurality of probe rods, it is arranged on the probe assembly, can rotate, and wherein on the different probe rod, is provided with probe pins with different type of arrangement.
Description of drawings
By detailed description, with being expressly understood aforesaid purpose, the feature and advantage with other of the present invention more, wherein below in conjunction with accompanying drawing:
Fig. 1 is the stereographic map that the array detecting device of first embodiment according to the present invention is shown;
Fig. 2 is the stereographic map of probe assembly of the array detecting device of Fig. 1;
Fig. 3 and 4 is stereographic maps of continued operation that the probe assembly of Fig. 2 is shown;
Fig. 5 and 6 is stereographic maps that the probe assembly of the array detecting device of second embodiment according to the present invention is shown; And
Fig. 7 and 8 is stereographic maps that the probe assembly of the array detecting device of the 3rd embodiment according to the present invention is shown.
Embodiment
Hereinafter will combine accompanying drawing to describe the embodiment according to array detecting device of the present invention in detail.
As shown in Figure 1, according to the present invention the array detecting device of first embodiment comprise with face glass P be loaded into the face glass P that loading unit 10 on it, test load by loading unit 10 test cell 20 and will be by the face glass P of test cell 20 tests unloading unit 30 from loading unit 10 unloadings.
The electric defective of test cell 20 tested glass panel P.Test cell 20 comprises transparent support board 21, test module 22, probe assembly 23 and control module (not shown).The face glass P that is loaded by loading unit 10 is placed on the transparent support board 21.Test module 22 tests are placed on the electric defective of the face glass P on the transparent support board 21.Probe assembly 23 applies electric signal to the electrode E that is placed on the face glass P on the transparent support board 21.Control module control test module 22 and probe assembly 23.
Shown in Fig. 2 and 3, probe assembly support frame 50 is arranged on transparent support board 21 tops and along vertical (X-direction) definite length extended of transparent support board 21.Probe assembly 23 is installed on the probe assembly support frame 50, can move along vertical (X-direction) of probe assembly support frame 50.Probe assembly 23 comprises a plurality of probes rod 70, lifting unit 80 and rotating unit 90.Probe rod 70 is arranged on the probe assembly 23 with rotating mode.Probe pins 60 is arranged on each probe rod 70 in a different manner.Lifting unit 80 is along Z-direction traveling probe rod 70.Rotating unit 90 rotates probe rod 70.
Probe assembly support frame 50 is connected in Y axle driver element 51, thereby probe assembly support frame 50 can be mobile perpendicular to the direction (Y direction) of vertical (X-direction) of probe assembly support frame 50 along flatly by Y axle driver element 51.And X axle driver element 52 is arranged between probe assembly support frame 50 and the probe assembly 23.X axle driver element 52 vertically moves probe assembly 23 along probe assembly support frame 50.Various linear actuating devices such as linear motor, ball-screw etc. can be used as Y axle driver element 51 and/or X axle driver element 52.
Probe rod 70 extends from probe assembly 23 along continuous straight runs.Probe pins 60 is arranged under each probe rod 70 and along the direction that probe rod 70 extends and arranges.The arrangement of probe pins 60 on probe rod 70 can be different each other.For example, the arrangement of probe pins 60 can be confirmed by the quantity or the distance between each adjacent probe pin 60 of probe pins 60.In this embodiment, probe rod 70 comprises that first probe rod, 71 and second probe rod, 72, the first probes rod 71 has probe pins 61, the second probes rod of arranging with first type of arrangement 72 and has the probe pins 62 of arranging with second type of arrangement.First type of arrangement can comprise 16 pin-type layout, wherein has 16 probe pins 61.Second type of arrangement can comprise 24 pin-type layout, and wherein the quantity of probe pins 62 is 24.The invention is not restricted to have two probe rods 70 and probe pins 60 and be arranged on this structure on the probe rod with two kinds of different type of arrangement.That is to say that the present invention can implement with the structure that different type of arrangement are arranged on the probe rod through having two or more probe rods 70 and probe pins 60.In this embodiment, the axis along the longitudinal extension of probe assembly support frame 50 is called the X axle.Flatly be called the Y axle perpendicular to the X axle and along the axis that face glass P is loaded on the device or face glass P extends from the direction of device unloading.Be erected to be called the Z axle perpendicular to the axis of X axle and Y axle.Based on this supposition, first probe rod, 71 and second probe rod 72 can and be in angle along the plane definite length extended that comprises X axle and Y axle.In this embodiment, although first probe rod, 71 and second probe rod 72 vertically between angle be illustrated as 90 °, the invention is not restricted to this structure.For example, first probe rod, 71 and second probe rod 72 vertically between angle can be 180 ° or some other angles.Like this, first probe rod, 71 and second probe rod 72 vertically between angle can be greater than or less than 90 °.Ideally; First probe rod, 71 and second probe rod 72 vertically between angle initialization be: when one in first probe rod, 71 and second probe rod 72 position that is positioned at corresponding to the electrode E of face glass P, another in first probe rod, 71 and second probe rod 72 is positioned at regional in fact top of useless part for product that perhaps is in face glass P of non-glass panel P.In the case, the in fact useful part for product of the probe rod 70 contact face glass P that can prevent not contact with electrode E, thus prevent to damage face glass P.
Lifting unit 80 is arranged on the probe assembly 23 and is connected in probe rod 70.For example use the various devices of the actuator of hydraulic pressure, the linear motor of electrification etc. can be used as lifting unit, as long as it can move up and down probe rod 70 along Z-direction.Lifting unit 80 is used for moving down the respective electrode E of the face glass P that probe rod 70 makes probe pins 60 push to be placed on the transparent support board 21.
Rotating unit 90 can comprise the rotation axis that is arranged on the probe assembly 23 and is connected in probe rod 70, and rotating unit 90 is configured to the operator and can manually rotates probe rod 70.Alternatively, rotating unit 90 can comprise the rotation motor that is arranged on the probe assembly 23 and is connected in probe rod 70, thereby probe rod 70 can automatically be rotated around the Z axle by rotation motor.In the case, step motor is used as rotation motor so that accurately control the rotational angle of probe rod 70 ideally.
In the present invention, can will have through rotating probe rod 70 corresponding to the probe pins 60 of the type of arrangement of electrode easily in alignment with the electrode E of face glass P according to the kind of face glass P (face glass can have the electrode E that arranges with different type of arrangement).The arrangement of electrode E can be confirmed by the quantity of electrode E, distance or the layout orientation of electrode E between each adjacent electrode E.As shown in Figure 3, electrode E can comprise with first type of arrangement and is arranged in the electrode E1 on the face glass P.Alternatively, as shown in Figure 4, electrode E can comprise with second type of arrangement and is arranged in the electrode E2 on the face glass P.First type of arrangement can comprise 16 electrode types layout, and wherein the quantity of electrode E is 16.Second type of arrangement can comprise 24 electrode types layout, and wherein the quantity of electrode E is 24.With regard to the layout orientation of electrode E; Although have shown in Fig. 3 and 4 along the face glass P of the electrode E of Y direction layout, the array detecting device of first embodiment can be applied to have the face glass P along the electrode E of X-direction layout according to the present invention.
Rotating unit 90 is used for rotating probe rod 70 around the Z axle.For example, as shown in Figure 3, when having face glass P corresponding to the electrode E1 of first kind probe pins 61 when being loaded on the device, rotating unit 90 rotates the position that probe rod 70 moves to corresponding to electrode E1 the probe rod 71 of winning around the Z axle.As shown in Figure 4, when having face glass P corresponding to the electrode E2 of the second type probes pin 62 when being loaded on the device, rotating unit 90 rotates the position that probe rod 70 makes that second probe rod 72 moves to corresponding to electrode E2 around the Z axle.
Like this; In the array detecting device of first embodiment according to the present invention, the probe pins 60 that can will have the arrangement corresponding with the arrangement of the electrode E of face glass P through rotating probe rod 70 according to the kind of the face glass P with the electrode E that arranges with different type of arrangement is easily in alignment with electrode E.
The operation of the array detecting device of first embodiment that description is had above-mentioned structure according to the present invention.
At first, face glass P is loaded on the transparent support board 21 by loading unit 10.Subsequently, probe assembly 23 applies electric signal to utilize the electric defective of test cell 20 tested glass panel P to the electrode E of face glass P.
At probe assembly 23 before the electrode E of face glass P applies electric signal; Probe assembly 23 can be moved along Y direction by probe assembly support frame 50; Also can be moved along X-direction by X axle driver element 52, wherein probe assembly support frame 50 is moved along Y direction by Y axle driver element 51.Through moving along X axle and/or Y direction, probe assembly 23 moves to the part that is formed with electrode E of face glass P.Thus, the electrode E that is arranged on the probe pins 60 adjacent glass panel P on the corresponding probe rod 70 places.
Here, probe rod 70 can manually perhaps be rotated around the Z axle by rotating unit 90 by the operator.Like this, has under the situation corresponding to the first kind electrode E1 of first kind probe pins 61 position that first probe rod 71 is placed on corresponding to first kind electrode E1 at face glass P.Has under the situation corresponding to the second kind of electrodes E2 of the second type probes pin 62 position that second probe rod 72 is placed on corresponding to the second kind of electrodes E2 at face glass P.
Subsequently, through the operation of lifting unit 80, probe rod 70 moves down, thereby the probe pins 60 that the electrode E with on the face glass P of probe rod 70 aims at is pushed corresponding electrode E.Under this state, when the probe pins 60 that with the respective electrode E of face glass P contact of electric signal through probe rod 70 is applied to electrode E, the electric defective that the test module 22 of test cell 20 is operated with tested glass panel P.
As stated, in the array detecting device of first embodiment, have with the probe rod of the probe pins 60 of different type of arrangement settings 70 and be installed on the probe assembly 23 with rotating mode according to the present invention.The probe rod 70 that like this, can will be provided with the probe pins 60 with arrangement corresponding with the arrangement of electrode E through rotating probe rod 70 is easily in alignment with electrode E.Therefore; Even the electrode E--with the different type of arrangement for example orientation of quantity, the distance between each adjacent electrode E or the electrode E of electrode E is different--different types of face glass P be loaded on the single array detecting device; The prior art of changing probe assembly 23 with needs is different, and array detecting device of the present invention is tested glass panel P and need not change probe assembly 23 with another probe assembly efficiently.
Hereinafter will combine Fig. 5 and 6 to describe the array detecting device of second embodiment according to the present invention in detail.In the description of second embodiment, with use identical Reference numeral represent with first embodiment in those identical members, and omit further specifying of they.
Referring to Fig. 5 and 6, be configured to: comprise first probe rod 71 of probe pins 61 and comprise that second probe rod 72 of the probe pins 62 with second type of arrangement locatees along equidirectional with first type of arrangement according to the array detecting device of second embodiment.In detail, as illustrated in Figures 5 and 6, the probe rod 70 that respectively has rectangular shape can integrate each other.In the case, to be configured to have the probe pins 60 of different type of arrangement outstanding along different directions for probe rod 70.Certainly, the invention is not restricted to this structure.For example, probe rod 70 can independently be provided with and be spaced a predetermined distance from along Z-direction.And, the invention is not restricted to comprise two probe rods 70, but can comprise two or more probe rods 70 with the probe pins 60 of arranging with different type of arrangement with the probe pins 60 of arranging with two kinds of type of arrangement.
In this embodiment; Rotating unit 90 comprises first rotating unit 91 and second rotating unit 92; First rotating unit 91 rotates probe rod 70, the second rotating units 92 around Z axle rotation probe rod 70 around the axis (the Y axle among Fig. 5 or the X axle among Fig. 6) that probe rod 70 extends the institute edge.
First rotating unit 91 can comprise the rotation axis that is connected in probe rod 70, and can be configured to the operator and can manually rotate probe rod 70.Alternatively, first rotating unit 91 can comprise the rotation motor that is arranged on the probe assembly 23 and is connected in probe rod 70, thereby probe rod 70 can automatically be rotated by rotation motor.In the case, step motor is used as rotation motor so that accurately control the rotational angle of probe rod 70 ideally.First rotating unit 91 is used for rotating probe rod 70 around the axis on probe rod 70 extension institute edges.For example, when having face glass P corresponding to the electrode E1 of first kind probe pins 61 when being loaded on the device, first rotating unit 91 rotates probe rod 70 around the axis that probe rod 70 extends the institute edges, makes the probe rod 71 of winning towards electrode E1.When having face glass P corresponding to the electrode E2 of the second type probes pin 62 when being loaded on the device, first rotating unit 91 rotates probe rod 70 around the axis that probe rod 70 extends the institute edges, makes second probe rod 72 towards electrode E2.
Second rotating unit 92 can comprise the rotation axis that is installed on the probe assembly 23 and is connected in probe rod 70, and second rotating unit 92 can be configured to the operator and can manually rotate probe rod 70 around the Z axle.Alternatively, second rotating unit 92 can comprise the rotation motor that is arranged between the probe assembly 23 and first rotating unit 91, thereby probe rod 70 can automatically be rotated around the Z axle by rotation motor.In the case, step motor is used as rotation motor so that accurately control probe rod 70 rotational angles around the Z axle ideally.Second rotating unit 92 is used for rotating probe rod 70 around the Z axle.For example, as shown in Figure 5, when electrode E is arranged in face glass P when going up along Y direction, second rotating unit 92 rotates probe rod 70 around the Z axle, makes probe pins 60 aim at corresponding electrode E.As shown in Figure 6, when electrode E is arranged in face glass P when going up along X-direction, second rotating unit 92 rotates probe rod 70 around the Z axle, makes probe pins 60 aim at respective electrode E along the X-direction layout.And, provide second rotating unit, 92 usefulness to deal with and have face glass P with the electrode E of different azimuth layout.If the layout orientation of electrode E on face glass P is always constant, then rotating unit 90 can only comprise first rotating unit 91 and not comprise second rotating unit 92.
In the array detecting device of second embodiment according to the present invention; Can be only through rotating probe rod 70 with probe pins 60 easily in alignment with respective electrode E, be that the quantity of distance or electrode E between the adjacent electrode E is different even have the electrode E--of different type of arrangement--different types of face glass P be loaded on the array detecting device.
And, even the position of electrode E is different with the orientation, also can be only through rotating probe rod 70 with probe pins 60 easily in alignment with respective electrode E.
Hereinafter will combine Fig. 7 and 8 to describe the array detecting device of the 3rd embodiment according to the present invention in detail.In the description of the 3rd embodiment, with use identical Reference numeral represent with first or second embodiment in those identical members, and omit further specifying of they.
In the array detecting device of the 3rd embodiment according to the present invention; As shown in Figure 7; Suppose along the axis of the longitudinal extension of probe assembly support frame 50 and be called the X axle; Flatly be called the Y axle, and be erected to be called the Z axle perpendicular to the axis of X axle and Y axle perpendicular to the X axle and along the axis that face glass P is loaded on the device or face glass P extends from the direction of device unloading.Based on this supposition, first probe rod, 71 and second probe excellent 72 can be on the plane that comprises X axle and Z axle definite length extended and be in angle.And rotating unit 90 can comprise first rotating unit 91, and it rotates probe rod 70 around the Y axle.
Alternatively; As shown in Figure 8; When supposition is called the X axle, flatly is called the Y axle and is erected to axis perpendicular to X axle and Y axle when being called the Z axle perpendicular to the X axle and along the axis that face glass P is loaded on the device or face glass P extends from the direction of device unloading along the axis of the longitudinal extension of probe assembly support frame 50, first probe rod, 71 and second probe excellent 72 can and be in angle along the plane definite length extended that comprises Y axle and Z axle.And rotating unit 90 can comprise first rotating unit 91, and it rotates probe rod 70 around the X axle.
In this embodiment, first probe rod, 71 and second probe rod 72 vertically between angle can be 90 °, and the invention is not restricted to this structure.For example, first probe rod, 71 and second probe rod 72 vertically between angle can be greater than or less than 90 °.In addition, the invention is not restricted to comprise the structure of two kinds of probe rods 70 with the probe pins 60 of arranging with different type of arrangement.That is to say that the present invention can implement through comprising the structure that has with two or more probes rods 70 of the probe pins 60 of two kinds or more kinds of type of arrangement settings.
First rotating unit 91 can comprise the rotation axis that is connected in probe rod 70, and can be configured to the operator and can manually rotate probe rod 70.Alternatively, first rotating unit 91 can comprise the rotation motor that is arranged on the probe assembly 23 and is connected in probe rod 70, thereby probe rod 70 can automatically be rotated by rotation motor.
First rotating unit 91 is used for rotating probe rod 70.For example, when having face glass P corresponding to the electrode E1 of first kind probe pins 61 when being loaded on the device, first rotating unit 91 rotates probes rod 70, the position that the probe rod 71 of winning is positioned at corresponding to electrode E1.When having face glass P corresponding to the electrode E2 of the second type probes pin 62 when being loaded on the device, first rotating unit 91 rotates probes rod 70, makes the position that second probe rod 72 moves to corresponding to electrode E2.
And according to the mode identical with second embodiment, rotating unit 90 may further include second rotating unit 92 that rotates probe rod 70 around the Z axle.Second rotating unit 92 can comprise the rotation axis that is installed on the probe assembly 23 and is connected in probe rod 70, and second rotating unit 92 can be configured to the operator and can manually rotate probe rod 70 around the Z axle.Alternatively, second rotating unit 92 can comprise the rotation motor that is arranged between the probe assembly 23 and first rotating unit 91, thereby probe rod 70 can automatically be rotated around the Z axle by rotation motor.Second rotating unit 92 is used for rotating probe rod 70 around the Z axle.Therefore, be loaded on the device even have the different different types of face glass P of the electrode E in orientation that arrange, probe pins 60 also can be accurately to collimator electrode E.Like this, provide second rotating unit, 92 usefulness to deal with and have the different face glass P that arrange the electrode E in orientation.If the layout orientation of electrode E on face glass P is always constant, then rotating unit 90 can only comprise first rotating unit 91 and not comprise second rotating unit 92.
In the array detecting device of the 3rd embodiment according to the present invention; Can be only through rotating probe rod 70 with probe pins 60 easily in alignment with respective electrode E, be that the quantity of distance or electrode E between each adjacent electrode E is different even have the electrode E--of different type of arrangement--different types of face glass P be loaded on the array detecting device.And, even the position of electrode E is different with the orientation, also can be only through rotating probe rod 70 with probe pins 60 easily in alignment with respective electrode E.
The technical spirit of in embodiment of the present invention, describing can independently be implemented or be bonded to each other.And, not only can be used in the device that is used for electric signal is applied to the electrode of face glass according to probe assembly of the present invention, and can be used in the device that is used for electric signal is applied to the electrode of various substrates, to test their defective.
As stated; In array detecting device according to the present invention; When testing different types of face glass of the electrode E with different type of arrangement by single array detecting device; With need to change the prior art of probe assembly with another probe assembly different, only just can be with probe pins easily in alignment with corresponding electrode through rotating the probe rod.Therefore, can improve the efficient of production run.

Claims (7)

1. array detecting device comprises:
Probe assembly, said probe assembly are arranged on the probe assembly support frame, can vertically moving along said probe assembly support frame; And
A plurality of probe rods, said a plurality of probe rods are arranged on the said probe assembly, can rotate, and wherein on the different probe rod, are provided with probe pins with different type of arrangement.
2. array detecting device according to claim 1; Wherein, When the axis along the longitudinal extension of said probe assembly support frame is called the X axle, flatly is called the Y axle perpendicular to the axis of said X axle and is erected to axis perpendicular to said X axle and Y axle when being called the Z axle
Said probe rod is along the plane definite length extended that comprises said X axle and Y axle, and said probe rod is in angle, and
Said probe rod can rotate around said Z axle.
3. array detecting device according to claim 1; Wherein, When the axis along the longitudinal extension of said probe assembly support frame is called the X axle, flatly is called the Y axle perpendicular to the axis of said X axle and is erected to axis perpendicular to said X axle and Y axle when being called the Z axle
Said probe rod is along identical direction definite length extended, and
Said probe rod can rotate around the axis that said probe rod extends the institute edge.
4. array detecting device according to claim 3, wherein, said probe rod integrates each other.
5. array detecting device according to claim 1; Wherein, When the axis along the longitudinal extension of said probe assembly support frame is called the X axle, flatly is called the Y axle perpendicular to the axis of said X axle and is erected to axis perpendicular to said X axle and Y axle when being called the Z axle
Said probe rod is along the plane definite length extended that comprises said X axle and Z axle, and said probe rod is in angle, and
Said probe rod can rotate around said Y axle.
6. array detecting device according to claim 1; Wherein, When the axis along the longitudinal extension of said probe assembly support frame is called the X axle, flatly is called the Y axle perpendicular to the axis of said X axle and is erected to axis perpendicular to said X axle and Y axle when being called the Z axle
Said probe rod is along the plane definite length extended that comprises said Y axle and Z axle, and said probe rod is in angle, and
Said probe rod can rotate around said X axle.
7. according to each described array detecting device in the claim 3 to 6, wherein, said probe rod can rotate around said Z axle.
CN2011100361608A 2010-12-20 2011-02-11 Array test apparatus Pending CN102539850A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2010-0130556 2010-12-20
KR1020100130556A KR101129195B1 (en) 2010-12-20 2010-12-20 Array test apparatus

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Application publication date: 20120704