JPH01143982A - Probe device - Google Patents

Abstract

PURPOSE:To surely execute adjustment for simultaneously contacting probe electrodes supported by plural probe cards with electrode pads on a body to be inspected by independently adjusting the relative positional relation of plural probe cards. CONSTITUTION:The 1st and 2nd probe cards 22a, 22b are respectively supported by movable parts 25a, 25b and X and Y direction driving mechanisms 27a, 27b and 28a, 28b for driving the probe card 22a in the rectangular axis direction in a two-dimensional face and a theta direction driving mechanism 29a, 29b for rotating the probe card 22a in the Z axis direction are provided. In case of inspecting the body 10 to be inspected, the positions of the probe electrodes 23a, 23b in the Z direction are adjusted by the mechanisms 28a, 28b in order to set up the electrodes 23a, 23b on one and the same plane. Then, the positions in the X, Y and theta direction are adjusted by using the mechanisms 27a, 27b, 28a, 28b, 29a, 29b. Since the relative positional relation of the probe cards 22a, 22b, oppositely arranged can be independently adjusted by independent mechanisms 26a-29b, adjustment for contacting the electrodes simultaneously with the electrodes pads on the body 10 to be inspected can be surely executed.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a probe device for testing the electrical characteristics of an object to be tested.

(Prior Art) A probe device supports an object to be inspected, such as a semiconductor wafer or a liquid crystal display element (hereinafter abbreviated as LCD) on a mounting table, and contacts a probe electrode with an electrode pad of the object to be inspected. 11 on the continuity test 1 display screen using the tester.
This is used to perform electrical characteristic tests such as visual function tests.

Conventionally, when a semiconductor wafer was the object to be inspected, the probe electrodes were fixed to a single probe card and the inspection was carried out in an eight-claw manner, but in recent years, the probe electrodes have been fixed on one probe card to perform the inspection. Tests are also being put into practical use in which probe electrodes are brought into contact with two rows of electrode pads at the same time.

When inspecting the above-mentioned LCD, it is necessary to arrange two probe cards having probe electrodes to face each other.

In addition, due to other requirements, a probe device may be considered in which a plurality of probe cards having probe electrodes that are simultaneously contacted with electrode pads of an object to be inspected are arranged.

(Problem to be Solved by the Invention) In a probe device in which a plurality of probe cards are arranged, the probe electrodes supported by the plurality of probe cards are aligned with the electrode pads of − pieces of the test object. Although it is necessary, no consideration has been given to this company's adjustment in conventional probe devices having multiple probe cards.

In particular, since there are various sizes of objects to be inspected that are set in the probe device, the above-mentioned alignment is required every time the size of the object to be inspected changes, which places an extremely heavy burden on the operator.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to solve the above-mentioned conventional problems, and to easily adjust the relative positional relationship between each probe card when a plurality of probe cards are provided. The probe electrode of the card,
An object of the present invention is to provide a probe device that can simultaneously and correctly contact electrode pads of an object to be inspected.

[Structure of the Invention] (Means for Solving the Problems) The present invention provides a probe for testing electrical characteristics of a test object, which has a plurality of probe cards that bring probe electrodes into contact with electrode pads of a test object. In the device, the orthogonal axes on the alignment surface between the electrode pad and probe electrode are the X and Y axes, the axis orthogonal to the X and Y axes is the Z axis, and the circumferential direction of the Z axis is the θ direction. , a drive mechanism is provided that allows adjustment of the relative positional relationship of the plurality of probe cards in each of the directions.

(Function) In order to bring the probe electrodes of multiple probe cards into contact with the electrode pads of the test object simultaneously and correctly,
The tip position of each probe electrode is on the same plane,
In addition, it must be set at the same position as the electrode pad on the alignment surface.

In the present invention, in order to set the tip positions of each probe electrode on the same plane, the relative positional relationship of the plurality of probe cards in the Z-axis direction can be adjusted. In addition, so that each probe electrode is set at the same position as the electrode pad on the alignment surface,
The relative positional relationship of the plurality of probe cards can be adjusted in the Y-axis direction and in the θ direction, which is the circumferential direction of the Z-axis.

(Example) Hereinafter, an example in which the present invention is applied to an LCD prober will be described with reference to the drawings.

First, an overview of the LCD prober will be explained with reference to FIG.

The LCD prober 1 is roughly divided into a test section 2 that tests the electrical characteristics of the LCD board 10, and a test section 2 that includes an LC.
It is composed of a transport section 3 for transporting the D substrate 10.

The transport section 3 includes a storage section 31 for setting the carrier A containing the untested LCD board 10, and a storage section 31 for setting the carrier A containing the untested LCD board 10, and a storage section 31 for setting the carrier A containing the untested LCD board 10, and
It has a storage part 32 for setting the carrier B that stores the D board 10, and further includes an uninspected L from the carrier A.
The CD board 10 is taken out and transported to the inspection section 2, and the vacuum tweezers 33 for transporting the inspected LCD board 10 to the carrier B are used to temporarily place the LCD board 10 transported by the vacuum tweezers 33. , a pre-alignment stage 34 for performing predetermined alignment.

The carriers A and B are partitioned into a number of slots by a number of holes formed on the side walls, and one LCD board 10 is housed in each slot. An opening is formed on the front surface for taking out the LCI substrate 10.

The vacuum tweezers 33 are movable horizontally and vertically, and are rotatable about a shaft 33a. Also, this vacuum tweezers 3
3 is connected to a vacuum pump (not shown), and is capable of vacuum suctioning the LCD board.

The pre-alignment stage 34 is rotatable with the LCD board 10 placed thereon.
The angular position of can be changed. A sensor (not shown) is arranged near the pre-alignment stage 34 to recognize the position of the LCD board 10 and to pre-align the LCD board 10 based on this position information. As a position detection method and a positioning method for the LCD board 10, it is possible to adopt a positioning method suitable for LCD boards, etc. disclosed in Japanese Patent Application No. 164746/1986, which was previously proposed by the present applicant. can. In this way, by positioning the LCD board 10 in advance, alignment in the inspection section 2, which will be described later, is reduced, and when the LCD board 10, which has a considerable size, is transported, it is possible to reduce the burden on surrounding mechanisms, etc. It becomes possible to prevent harmful effects such as collisions.

Next, the configuration of the inspection section 2, which is a characteristic configuration of the apparatus of this embodiment, will be explained with reference to FIGS. 1 and 2. A supporting mounting table 21 is provided.

This mounting table 21 has a Z-axis which is an orthogonal axis direction on the mounting surface,
It is movable in the Y-axis direction, the Z-axis direction which is the vertical direction, and the θ direction which is the circumferential direction of the Z-axis, so that the LCD board 10 can be moved in the X,
Alignment is possible by moving in the Y and θ directions, and probe electrode + (L to li23a, 23b, which will be described later)
It is possible to drive in the Z direction so that the CD substrate 10 can be brought into contact.

The LCD substrate 10 placed on the mounting table 21 has a structure in which liquid crystal is sandwiched between two glass substrates 10a and 10b in a minute space, and on the opposite sides of the lower glass substrate 10b, Electrode pads 11 are formed at equal pitches. still,
These electrode pads], 1 are not limited to having the same number on opposite sides, for example, 50 on the - side and 3 on the other side, etc. Although it varies depending on the wiring specifications, the electrode pad pitch is usually the same. Furthermore, the external size of the LCD board 10 varies depending on the screen size, and in this case, the distance between electrode pads on opposite sides (distance Ml in FIG. 1)
are different.

In this embodiment, the probe electrodes 23 are brought into contact with the electrode pads 11 on each opposing side of the LCD substrate 10 at the same time. second probe card 22a,
22b are arranged opposite to each other.

Said 1st. As the probe electrodes 23a, 23b supported by the second probe cards 22a, 22b, in addition to the probe needles shown in FIG. 1, flexible film electrodes can also be used. In particular, the object to be inspected is the LCD board 10.
In this case, it is necessary to arrange a large number of electrode pads 11 in a small space, and the electrode pad pitch is 100 μM or less, so it is difficult in manufacturing to achieve this pad pitch with a probe needle. , one that employs a film electrode, etc. is preferable.

Said 1st. The second probe cards 22a and 22b are supported by movable parts 25a and 25b, respectively. The movable parts 25a and 25b are movable by the following drive mechanism.

To explain the drive R side of the first probe card 22a, the X-direction drive mechanism 26a drives the first probe card 22a in the orthogonal axis direction within a two-dimensional plane.
and Y-direction drive mechanism 27a, and first probe card 2
Z direction drive mechanism 28a for driving 2a in the vertical direction
and a θ direction drive mechanism 2 for rotationally driving around the Z axis.
It has 9a.

The drive mechanism for the second probe card 22b is similar, and has a suffix "a" instead of "b" for the drive mechanism for the first probe card 22a, and has respective column movement mechanisms.

Next, the effect will be explained.

In the above LCD prober 1, two probe cards 22a are provided on the electrode pad 11 of the LCD board]0.

It is necessary to contact the probe electrodes 23a, 23b of 22b at the same time, and the probe electrodes 23a, 23
The tips of the electrodes b must be set on the same plane, and the two sets of probe electrodes 23a and 23b must be set at positions where they accurately contact the electrode pads 11.

Therefore, in order to set the probe electrodes 23a and 23b on the same plane, it is first necessary to adjust the height of the probe card in the Z direction. In this embodiment, the first. Second
probe card 22a.

Since each probe card 22b has a Z-direction drive mechanism 28a, 28b, there are two probe cards 22a.

22b can be adjusted independently in the Z direction, and the heights of the tips of the probe electrodes 23a and 23b can be set to be the same.

Next, the first. X, Y in order to simultaneously bring the tips of the probe electrodes 23a, 23b of the second probe cards 22a, 22b into contact with the electrode pads 11.

Execute position adjustment in the θ direction.

To perform this adjustment, for example, first
．． The positions of the second probe cards 22a, 22b are adjusted independently and sequentially, and the position in the X direction is set for each probe card 22a, 22b.

Here, each probe electrode 23 cannot be adjusted only in the X direction.
If the tips of the probe cards a and 23b cannot be accurately aligned with the electrode pads 11, this is because the probe cards 22a and 22b are set at an angle, so the θ direction drive mechanism 29a
, 29b, the first and second probe cards 22a,
22b so that the tips of the probe electrodes 23a and 23b are properly aligned with the electrode pad 11.

Then, the first . Second probe card 22a
, 22b are set, the position is finally adjusted in the Y direction, which is the direction of the distance between the two probe cards 22a and 22b, and the first. Adjustments are made so that all the probe electrodes 123a, 23b of the second probe cards 22a, 22b are simultaneously and correctly aligned with the electrode pads 11.

Here, the above-mentioned alignment work is generally performed by an operator who confirms the contact between the electrode pads 23a, 23b and the probe needle 11 using a microscope (not shown) placed above the inspection section 2. However, there are no questions regarding the method.

Such adjustment of the relative positional relationship between the two probe cards is performed by setting a dummy board for position confirmation on the mounting table 21 before setting the LCD board 10 to be inspected. It's okay.

In this way, in this embodiment, the first. The relative positional relationship of the second probe cards 22a and 22b is determined by the independent drive machines Wi26a to 29a and 26b to 29b.
Therefore, even in the LCD prober 1 having two probe cards 22a and 22b, the position adjustment of both probe cards can be easily performed.

It should be noted that the present invention is not limited to the above-mentioned embodiments, and various modifications can be made within the scope of the gist of the present invention.

As is clear from the above description, it is sufficient that the positions of the multiple probe cards can be adjusted relative to each other in the X, Y, Z, and θ directions, so it is not necessarily possible to move the multiple probe cards individually as in the above embodiment. It is not necessary to do so, and it is sufficient that one of the probe cards is movable in each direction. In this case, one probe card is
, θ directions, and the other probe card may be fixed, or X, Y, Z.

The drive mechanism in the θ direction may be shared between the two 10-board cards.

Most preferably, one probe card is X.

All probe cards are movable in the Y, Z, and θ directions, while the other probe card is fixed only in the Z direction, and the other probe cards are movable in the Y, Z, and θ directions.

A system that allows movement in the θ direction should be adopted.

The reason for this is the X and Y of one probe card.

If the θ direction is fixed, the measurement center of the mounting table 21 will be determined according to the position of the probe card on the two-dimensional surface, and since this measurement center is the drive program information for the mounting table 21, the measurement center will be fixed. This is because there is a concern that the operating program will need to be significantly modified each time it changes. Note that the Z direction can be easily corrected by setting the overdrive amount of the mounting table 21, and it is thought that there will be less damage if the Z direction of one probe card is fixed.

In addition, there are various other types of objects to be inspected, such as one in which electrode pads are arranged on different sides of a substrate, and a plurality of probe cards each having probe electrodes that are to be in contact with the electrode pads on each side at the same time are required. It can be applied to the inspection of objects to be inspected.

Further, in the above embodiment, the first. Second probe card 2
Independent Y direction drive machine tg27a, 2 for each 2a, 22b
7b, but the position adjustment in the Y direction is to change the distance between the two probe cards facing each other, so one drive #! It is also possible to adopt a method in which both are moved symmetrically by one structure.

Further, the present invention is not limited to a probe device having two probe cards, but is similarly applicable to a probe device having a plurality of probe cards arranged according to the number of electrode pad rows of the object to be inspected.

[Effects of the Invention] As explained above, according to the present invention, the relative positional relationship of a plurality of probe cards can be adjusted. Adjustment for simultaneous contact with the pads can be reliably performed.

[Brief explanation of the drawing]

FIG. 1 is a plan view of an inspection section of a CD prober to which the present invention is applied, FIG. 2 is a front view schematically showing the inspection section of FIG. 1, and FIG. 3 is a schematic perspective view of an LCD prober. . 10... Test object, 11... Electrode pad, 21...
- Mounting table, 22a, 22b...first. Second 10-book card, 2
3a, 23b...-probe electrode, 26a, 26b...X-direction axis drive mechanism, 27a, 27
b...X-direction axis drive mechanism, 28a, 28b...2-direction axis drive mechanism, 29a, 29b...θ-direction axis drive mechanism.

Claims (3)

[Claims] (1) In a probe device that has multiple probe cards that bring probe electrodes into contact with the electrode pads of the test object and tests the electrical characteristics of the test object, the electrode pads and the probe electrodes are orthogonal on the alignment plane. The axial directions are the X and Y axes, the axial direction perpendicular to the X and Y axes is the Z axis, and the circumferential direction of the Z axis is the θ direction, and the relative positional relationship of the plurality of probe cards in each of the above directions is A probe device characterized by being provided with an adjustable drive mechanism. (2) One of the two probe cards has XY, Z
The probe device according to claim 1, wherein the probe device is movable in the axial direction and the θ direction, and the other probe card is fixed. (3) One of the two probe cards has XY, Z
The probe device according to claim 1, wherein the probe card is movable in the axial direction and the θ direction, and the other probe card is fixed only in the Z direction, and is movable in the X, Y-axis directions, and the θ direction.