201226940 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種用於檢測一玻璃面板之陣列檢測 裝置。 【先前技術】 就大眾所知，平面顯示器（flat panel displays)係一 f薄型㈣像顯示器’它比傳統使用陰極射線管的顯示 、更t更溥。平面顯示器的種類繁多，目前已經被發展 :使用的例如為液晶顯示器（丨iquid出邛】哪)、電 水顯不杰（plasma dlsplay pands)、場發射顯示器（fieid emission displays)、有機發光二極體顯示器（。啊 emitting diodes)等。 /、中液曰曰顯示器具有複數液晶單元陣列設置，並依 據影像資料提供資料訊號至各液晶單元以調整各液晶單 元之光線牙透率進而顯示晝面。由於其薄型化、輕量化、 低耗電以及低操作雷廢笠彳見 斤卞4優點，液晶顯示器已被廣泛的使 用以下簡述種習知液晶顯示面板的製造方法。 首先，於一上玻璃面板形成一彩色濾、光層及一共同電 極層下破璃面板形成複數薄膜電晶體及晝素電 極。上玻璃面板與下破璃面板係相對設置。 然後，於上玻璃面板與下玻璃面板各形成一配向層。 之後，在配向層上磨擦以提供—預傾角及—配向方向來配 向液曰曰層之液曰曰刀子。其中’液晶層將會形成於兩配向層 201226940 此外’依據一預定圖案在兩玻璃面板之至少其中之一 上塗勝’以形成框膠，藉以在兩玻璃面板之間形成一間 隙，並避免液晶 漏到玻璃面板外。然後兩玻璃面板在維 持一間隙的情況下封合。之後，在兩玻璃面板之間形成液 日日層’如此就製成液晶面板0 在製造方法的過程中，需要有一檢測程序來檢驗下玻 璃面板（以下皆稱為玻璃面板（glass panel )，其上設置有 薄膜電晶體及畫素電極）是否有缺陷存在，例如設置於玻 璃面板之資料線或掃描線的電性連接是否良好、或是晝素 單元之色彩的精確度。 一種習知用以檢測玻璃面板之陣列檢測裝置係包含 複數社針以陣列檢測裝置檢測玻璃面板之流程包括將探 針對應於電極在玻璃面板上的位置，在施以麼力情況下使 探針與電極接觸’然後透過探針對f極提供電子訊號。 電極在玻璃面板上的位置及電極在玻璃面板上的排 歹J方式/亦即電極的數目及彼此之間的距離，會因不同類 型之玻璃面板而有所差異。因此，利用單—種基板測試裝 置來測试多種玻璃面板時，必須具有可隨不同待測玻璃面 板上電極㈣置及㈣方式而更換成能與之相對應之探 .十模、’且的功此。然而，當同時欲檢測多種玻璃面板時，更 換相對應於其電極的探針模組的動作會造成流程上效率 降低的問題。 4 201226940 【發明内容】 有鑒於上述習知技術之問題，本發明之一目的係提供 一種陣列檢測裝置，其不同的探針桿上具有不同排列型態 的探針，探針桿之間可以旋轉的方式進行更替，使得因不 同玻璃面板上而有不同位置、排列方式及排列方向的電極 均能有效率的利用單一種陣列檢測裝置進行檢測。 為達上述目的，本發明之一種陣列檢測裝置包含一探 針模組，設置於一探針模組支撐框架上，使該探針模組可 沿該探針模組支撐框架之一長轴方向移動；以及複數探針 桿，設置於該探針模組上，使該等探針桿為可旋轉，其中， 該等探針桿上分別具有不同排列型態之複數探針。 【實施方式】 以下將參照相關圖式，說明依據本發明較佳實施例之 一種陣列檢測裝置，其中相同的元件將以相同的參照符號 加以說明。 請參照圖1所示，本發明第一實施例之一種陣列檢測 裝置係包含之一載入單元10、一檢測單元20以及一卸載 單元30,其中，載入單元10用以載入一玻璃面板P，檢 測單元20可檢測載入單元10所載入之玻璃面板P，卸載 單元30則將被載入單元10載入並被檢測單元20檢測過 之玻璃面板P卸載。 測試單元20用以測試玻璃面板P之電性缺陷 (electrical defects )。測試單元20包含一透光支樓板21、 5 201226940 一測試模組22、一探針模組23及一控制單元（圖未表示 位於載入單元ίο上之玻璃面板p被放置在透光支撐板21 上，由測試模組22進行測試玻璃面板p之電性缺陷。探 針杈組23對置於透光支樓板21上的玻璃面板p之電極£ 通以電訊號’控制單元係控制測試模組2 2及探針模組2 3。 如圖2及圖3所示，一探針模組支撐框架％被設置 在透光支撐才反211上並沿透光支稽板21之一長轴方向（χ 轴方向）延伸突出-預設長度。探針模組23被設置在探針 模組支樓框架5G上，使探針模組23可沿探針模 架50之一長軸方向（Χ軸方闩、必也 、軸方向）移動。探針模組23包含 複數探針桿70、-升降單元8〇及一旋轉單元9〇。探針桿 7〇為可旋轉地被設置在探針模組23上。探針桿7〇上分別 =不同的排列方式的探針6〇。升降單…Ζ轴方 向移動探針桿7〇。旋轉單以Q旋難針桿％。 j =支撐框架50與—Y轴驅動單元51連結，使 探針杈組支撐框架5〇可被 使 轴方向)移動，此方向二驅動早元51沿-方向 長轴方向（X轴方向）。2地垂直於探針支樓框架50之 探針模組支偉框架50及探早：52被…於 23。多種綠性驅動裝置，如一=:向_罙針模組 一滾珠結構（ban贿w)尊了達^贿福〇〇或 或X轴驅動單元52。 可用於丫轴驅動單元51及/ 探針桿7〇於水平方向中自探針模組23延伸。探針60 201226940 係設置在每個探針桿70下方，並沿探針桿70之延伸方向 而排列。在探針桿70上之探針60的排列方式可相互不 同。舉例來說，探針60之排列方式可由探針60的數量或 是相鄰探針60之間的距離所決定。在本實施例中，探針 桿70包含一第一探針桿71及一第二探針桿72,其中第一 探針桿71具有以第一型排列方式的第一型探針61，而第 二探針桿72具有以第二型排列方式的第二型探針62。第 一型排列方式包括由16支第一型探針61組成之一 16-針 型排列方式。第二型排列方式包括由24支第二型探針62 組成之一 24-針型排列方式。本發明不限於上述之二種探 針桿70上分別設置兩種不同排列方式的探針61及探針62 之結構。換句話說，本發明可藉由兩個以上具有不同的排 列方式之探針60的探針桿70而被據以實施。在本實施例 中，定義X軸為沿探針模組支撐框架50之長軸方向延伸。 Y軸為水平地垂直於X軸，且Y軸在玻璃面板P被載入或 卸載於該裝置之方向上延伸。而Z軸為垂直地垂直於X軸 及Y轴。在此前提下，在一包含X轴及Y轴之一平面中， 第一探針桿71及第二探針桿72可分別延伸預設長度，且 兩者間相互具有夾角。在本實施例中，第一探針桿71及 第二探針桿72在其長軸方向之間具有一 90°之夾角，然而 本發明並不限制為此結構。例如，在第一探針桿71及第 二探針桿72之長軸方向上，第一探針桿71及第二探針桿 72兩者之間可具有為180°或其他角度之夾角。因此，在第 一探針桿71及第二探針桿72之長軸方向上，第一探針桿 201226940 及第二探針桿72兩者間之㈣可為大於或小於％ 佳地，第-探針桿71及第二探針桿72之長轴 ： 之間具有-夹角，使得當第―探針桿71或第二探針桿： 其中之一對應玻璃面板P之電極時，另一者 于 板P以外之區域或在玻璃面板 ；玻璃面 不具功用之區域的上方。 如此-來，不與電極£接觸的另—探針桿7Qa 觸碰到對產品具有實質功用的 c免因 域而導致破璃面板p夸 才員。 又 升降單元80設置在探針模組23 連結。升降單元⑽可藉由許多f 器或電驅線性馬達等，或其它可心使騎桿7卜2 上下移動之裝置。升降單元8Q用以將探針支持件^ 移動’使得當玻璃面板P置於透光支禮板2ι上日;J 6〇能被壓近且對應到玻璃面板p上的電極e。 木 旋轉單元90可包含—轉轴（她tingshaft)，並伟执 置在探針模組23上並與探針桿7Q連接，使操作者能以= 動的方式旋轉探針桿70。或者，旋轉單元90可包含 轉馬達’其係設置在探針模組23上並與探針桿％連接疋 使探針桿70藉由旋轉馬達驅動以自動地繞Z轴旋轉。在 It况下U 利用步進馬達（Stepp— _。丨）作為旋 轉馬達以精確地控制探針桿7〇旋轉的角度。 在本兔明中依據玻璃面板p種類不同，可透過旋轉 探針桿70使對應電極E而構成不同排列的探針6〇能輕易 地對齊玻璃面板P之電極E(玻璃面板？可具有不同排列 201226940 型態之電極E)。電極E排列的方式可依電極£數 鄰：電極£之間的距離或電極£排列的方向所決定 電極E可包含玻璃面板？上以第—型排列的電極 或，電極E可包含在玻璃面板p上以第二_列的電 : 圖4所示。第—型排列係、以16個電極E排列而 成的16·電極型排列方式。第二型排列係以24個電極e排 列而成的24·電極型排列方式。關於電極E的排列方向， 雖然在圖3及圖4中玻璃面板P之電極_列位在Y軸方 向上’但根據本發明第—實施例之陣列檢測裝置也可被應 用於電極排列在X車由方向上之玻璃面板ρ。 旋轉單S 90具有使探針桿7〇繞ζ轴旋轉之功能。例 如’如圖3所示’當具有對應第一型探針6ι之第一型電 極Ε1的玻璃面板ρ載入陣列檢測裝置時，利用旋轉單元 9〇使探針桿7〇繞？贼轉，以便將第—探針桿π移至對 應第一型電極E1的㈣上。如圖4所示，當具有對應第 :型探針62之第二型電極E2的玻璃面板p載入陣列檢測 裳置時，利用旋轉單元90使探針桿70繞2軸旋轉，以便 將第二探針桿7 2移至對應第二型t㈣2 #位置上。 如此一來，在本發明第一實施例中的陣列檢測裝置 令由於玻璃面板ρ的種類不同而具有不同排列型態的電 極]透過旋轉探針桿％即能將與電㈣排列型態相對應 的探針60輕易地對齊玻璃面板ρ上之電極£。 以下將詳述本發明第一實施例之陣列檢測裝置之作 動過程。 201226940 首先，藉由載入單元10將玻璃面板P載入於透光支 撐板21上。之後，探針模組23對玻璃面板P之電極E通 以電訊號，以便利用測試單元20測試玻璃面板P的電性 缺陷。 在探針模組23對玻璃面板P之電極E通以電訊號之 前，當Y軸驅動單元51將探針模組支撐框架50沿Y軸移 動時，探針模組23也同時沿Y軸方向被移動，而X軸驅 動單元52則係將探針模組支撐框架50及探針模組23沿X 軸方向移動。藉由在X軸及/或Y軸方向移動，使探針模 組23被移動到玻璃面板P上電極E形成的區域。因此， 探針桿70上的探針60即能被置於玻璃面板P之電極E附 近。 此處之探針桿70可被操作者以手動方式或藉由旋轉 單元90繞Z軸旋轉。因此，當玻璃面板P具有與第一型 探針61排列方式相對應的第一型電極E1時，第一探針桿 71會被放置於對應第一型電極E1的位置。當玻璃面板P 具有與第二型探針62排列方式相對應的第二型電極E2 時，第二探針桿72會被放置於對應第二型電極E2的位置。 然後，探針桿70藉由升降單元80之運作被向下移 動，使與電極E對齊的探針60各別被壓近對應的電極E。 同時，探針桿70上的探針60分別與電極E接觸並對電極 E通以電訊號，之後測試單元20之測試模組22對玻璃面 板P進行電性缺陷之測試。 承上所述，本發明第一實施例之陣列檢測裝置，探針201226940 VI. Description of the Invention: [Technical Field] The present invention relates to an array detecting device for detecting a glass panel. [Prior Art] As far as the public is concerned, a flat panel display is a thin (four) image display device which is more versatile than the conventional display using a cathode ray tube. A wide variety of flat panel displays have been developed: for example, liquid crystal displays (丨iquid), plasma dlsplay pands, fieid emission displays, organic light-emitting diodes Body display (. ah emitting diodes) and so on. /, the liquid liquid display has a plurality of liquid crystal cell array settings, and provides data signals to the liquid crystal cells according to the image data to adjust the light tooth transmittance of each liquid crystal cell to display the kneading surface. Due to its advantages of thinness, light weight, low power consumption, and low operational cost, the liquid crystal display has been widely used in the following description of a conventional liquid crystal display panel manufacturing method. First, a color filter, a light layer and a common electrode layer are formed on an upper glass panel to form a plurality of thin film transistors and a halogen electrode. The upper glass panel is opposite to the lower glass panel. Then, an alignment layer is formed on each of the upper glass panel and the lower glass panel. Thereafter, a liquid helium knife is provided which is rubbed on the alignment layer to provide a pretilt angle and an alignment direction to align the liquid helium layer. Wherein 'the liquid crystal layer will be formed on the two alignment layers 201226940 and 'scrape on at least one of the two glass panels according to a predetermined pattern' to form a sealant, thereby forming a gap between the two glass panels, and avoiding liquid crystal leakage Outside the glass panel. The two glass panels are then sealed while maintaining a gap. Thereafter, a liquid solar layer is formed between the two glass panels. Thus, the liquid crystal panel 0 is formed. During the manufacturing process, a test procedure is required to inspect the lower glass panel (hereinafter referred to as a glass panel). Whether the thin film transistor and the pixel electrode are provided with defects, for example, whether the electrical connection of the data line or the scanning line disposed on the glass panel is good, or the color of the pixel unit is accurate. A conventional array detecting device for detecting a glass panel includes a plurality of social needles. The process of detecting the glass panel by the array detecting device includes the position of the probe corresponding to the electrode on the glass panel, and the probe is applied under the force of the force. Contact with the electrode 'and then provide an electronic signal to the f-pole through the probe. The position of the electrodes on the glass panel and the arrangement of the electrodes on the glass panel / ie the number of electrodes and the distance between them, will vary depending on the type of glass panel. Therefore, when testing a plurality of glass panels by using a single substrate test device, it is necessary to have the electrodes (four) and (4) on the glass panel to be tested replaced with the corresponding ones. This is the case. However, when a plurality of glass panels are to be simultaneously detected, the operation of the probe module corresponding to the electrodes thereof may cause a problem in that the efficiency of the process is lowered. 4 201226940 SUMMARY OF THE INVENTION In view of the above problems of the prior art, an object of the present invention is to provide an array detecting device having probes of different arrangement types on different probe rods, and the probe rods can be rotated The way to replace, so that the electrodes with different positions, arrangement and arrangement direction on different glass panels can be efficiently detected by a single array detection device. In order to achieve the above object, an array detecting device of the present invention comprises a probe module disposed on a probe module supporting frame such that the probe module can be along a long axis direction of the probe module supporting frame. Moving; and a plurality of probe rods disposed on the probe module to make the probe rods rotatable, wherein the probe rods respectively have a plurality of probes of different arrangement types. [Embodiment] An array detecting device according to a preferred embodiment of the present invention will be described with reference to the accompanying drawings, wherein like elements will be described with the same reference numerals. Referring to FIG. 1 , an array detecting device according to a first embodiment of the present invention includes a loading unit 10 , a detecting unit 20 , and an unloading unit 30 . The loading unit 10 is configured to load a glass panel. P, the detecting unit 20 can detect the glass panel P loaded by the loading unit 10, and the unloading unit 30 unloads the glass panel P loaded by the loading unit 10 and detected by the detecting unit 20. The test unit 20 is used to test the electrical defects of the glass panel P. The test unit 20 includes a light transmissive floor panel 21, 5 201226940, a test module 22, a probe module 23, and a control unit (the glass panel p on the loading unit ίο is not shown to be placed on the transparent support plate). 21, the electrical defect of the test glass panel p is tested by the test module 22. The probe set 23 is connected to the electrode of the glass panel p placed on the transparent support floor 21 by a signal 'control unit control test mode Group 2 2 and probe module 2 3. As shown in Fig. 2 and Fig. 3, a probe module support frame % is disposed on the transparent support 211 and along the long axis of the light transmission plate 21 The direction (χ axis direction) is extended to a predetermined length. The probe module 23 is disposed on the probe module fulcrum frame 5G so that the probe module 23 can be along the long axis direction of the probe dies 50 ( The probe module 23 includes a plurality of probe rods 70, a lifting unit 8A, and a rotating unit 9A. The probe rod 7 is rotatably disposed in the probe. On the needle module 23, the probe rods 7 are respectively mounted on the probes 6 不同 in different arrangements. Rotate the single needle with a Q-rotation needle rod %. j = the support frame 50 is coupled with the -Y-axis drive unit 51 so that the probe bundle group support frame 5〇 can be moved in the axial direction), and the direction two drives the early 51 along - Direction long axis direction (X-axis direction). 2 The probe module perpendicular to the probe frame 50 is supported by the frame 50 and the early detection: 52 is ... 23 . A variety of green driving devices, such as a = _ 罙 模组 一 一 一 滚 一 一 一 一 一 一 尊 尊 尊 尊 贿 贿 贿 贿 或 或 或 或 或 或 或 或 或 或 或 或 或It can be used for the cymbal drive unit 51 and/or the probe rod 7 to extend from the probe module 23 in the horizontal direction. The probe 60 201226940 is disposed below each probe stem 70 and arranged along the direction in which the probe stem 70 extends. The probes 60 on the probe stem 70 can be arranged differently from each other. For example, the arrangement of the probes 60 can be determined by the number of probes 60 or by the distance between adjacent probes 60. In the present embodiment, the probe stem 70 includes a first probe stem 71 and a second probe stem 72, wherein the first probe stem 71 has a first type probe 61 arranged in a first type, and The second probe stem 72 has a second type of probe 62 arranged in a second type. The first type arrangement includes a 16-pin arrangement of 16 first type probes 61. The second type of arrangement includes a 24-pin arrangement consisting of 24 second type probes 62. The present invention is not limited to the configuration of the probe 61 and the probe 62 in which two different arrangement modes are respectively provided on the above two types of probe bars 70. In other words, the present invention can be implemented by two or more probe rods 70 having probes 60 of different arrangement. In the present embodiment, the X axis is defined to extend along the long axis direction of the probe module support frame 50. The Y axis is horizontally perpendicular to the X axis, and the Y axis extends in a direction in which the glass panel P is loaded or unloaded in the device. The Z axis is perpendicular to the X and Y axes. In this premise, in a plane including the X-axis and the Y-axis, the first probe bar 71 and the second probe bar 72 may respectively extend a predetermined length and have an angle with each other. In the present embodiment, the first probe lever 71 and the second probe lever 72 have an angle of 90° between their long axis directions, but the present invention is not limited to this configuration. For example, in the longitudinal direction of the first probe stem 71 and the second probe stem 72, the first probe stem 71 and the second probe stem 72 may have an angle of 180 or other angles. Therefore, in the long axis direction of the first probe rod 71 and the second probe rod 72, the (four) between the first probe rod 201226940 and the second probe rod 72 may be greater than or less than %, - the long axis of the probe rod 71 and the second probe rod 72: having an angle between - such that when the first probe rod 71 or the second probe rod: one of which corresponds to the electrode of the glass panel P, another One is outside the panel P or above the glass panel; the area where the glass surface does not function. In this way, the other probe rod 7Qa, which is not in contact with the electrode, touches the c-free domain which has a substantial function for the product, resulting in a glass panel. Further, the lifting unit 80 is disposed in the probe module 23 to be coupled. The lifting unit (10) can be driven by a plurality of f or electric drive linear motors or the like, or other devices that can move the rod 7 up and down. The lifting unit 8Q is used to move the probe holder to enable the glass panel P to be placed on the light-transmitting board 2; the J 6 can be pressed close to and correspond to the electrode e on the glass panel p. The wood rotary unit 90 can include a steering shaft and is mounted on the probe module 23 and coupled to the probe stem 7Q to enable the operator to rotate the probe stem 70 in a movable manner. Alternatively, the rotating unit 90 may include a rotary motor 'which is disposed on the probe module 23 and is connected to the probe lever % so that the probe lever 70 is driven by the rotary motor to automatically rotate about the Z axis. In the case of It, U uses a stepping motor (Stepp__.丨) as a rotary motor to precisely control the angle at which the probe shaft 7 is rotated. In the present invention, depending on the type of the glass panel p, the probes 6 that are arranged in different directions by rotating the probe rod 70 can be easily aligned with the electrodes E of the glass panel P (glass panels? can have different arrangements) 201226940 type electrode E). The arrangement of the electrodes E can be determined by the number of electrodes: the distance between the electrodes £ or the direction in which the electrodes are arranged. Can the electrode E contain a glass panel? The electrodes arranged in the first type or the electrodes E may be included in the second column of the glass panel p: Figure 4. The first type arrangement is a 16-electrode type arrangement in which 16 electrodes E are arranged. The second type arrangement is a 24·electrode type arrangement in which 24 electrodes e are arranged. Regarding the arrangement direction of the electrodes E, although the electrode_column of the glass panel P is in the Y-axis direction in FIGS. 3 and 4, the array detecting device according to the first embodiment of the present invention can also be applied to the electrode array at the X. The car is driven by the glass panel ρ in the direction. The rotating single S 90 has a function of rotating the probe shaft 7 around the x-axis. For example, as shown in Fig. 3, when the glass panel ρ having the first type electrode Ε1 corresponding to the first type probe 6i is loaded into the array detecting device, the probe rod 7 is wound by the rotating unit 9? The thief turns to move the first probe rod π to (4) corresponding to the first type electrode E1. As shown in FIG. 4, when the glass panel p having the second type electrode E2 corresponding to the first type probe 62 is loaded into the array detecting skirt, the probe unit 70 is rotated about the two axes by the rotating unit 90 so as to be The two probe rods 7 2 are moved to correspond to the second type t (four) 2 # position. In this way, the array detecting device in the first embodiment of the present invention allows the electrode having different alignment patterns due to the type of the glass panel ρ to pass through the rotating probe rod % to correspond to the electric (four) arrangement pattern. The probe 60 is easily aligned with the electrode on the glass panel ρ. The operation of the array detecting device of the first embodiment of the present invention will be described in detail below. 201226940 First, the glass panel P is loaded on the light-transmitting support plate 21 by the loading unit 10. Thereafter, the probe module 23 applies a signal to the electrode E of the glass panel P to test the electrical defects of the glass panel P by the test unit 20. Before the probe module 23 passes the electrical signal to the electrode E of the glass panel P, when the Y-axis driving unit 51 moves the probe module supporting frame 50 along the Y-axis, the probe module 23 also faces along the Y-axis. The X-axis driving unit 52 moves the probe module supporting frame 50 and the probe module 23 in the X-axis direction. The probe module 23 is moved to a region where the electrode E is formed on the glass panel P by moving in the X-axis and/or Y-axis directions. Therefore, the probe 60 on the probe stem 70 can be placed near the electrode E of the glass panel P. The probe stem 70 herein can be rotated by the operator manually or by the rotary unit 90 about the Z axis. Therefore, when the glass panel P has the first type electrode E1 corresponding to the arrangement of the first type probes 61, the first probe lever 71 is placed at a position corresponding to the first type electrode E1. When the glass panel P has the second type electrode E2 corresponding to the arrangement of the second type probe 62, the second probe rod 72 is placed at a position corresponding to the second type electrode E2. Then, the probe lever 70 is moved downward by the operation of the elevating unit 80, so that the probes 60 aligned with the electrodes E are each pressed close to the corresponding electrode E. At the same time, the probes 60 on the probe stem 70 are in contact with the electrodes E and the electrodes E are electrically signaled, and then the test module 22 of the test unit 20 tests the glass panel P for electrical defects. According to the above, the array detecting device and the probe of the first embodiment of the present invention
-J 10 201226940 =:〇上分別具有不同排列型態之探針6〇 可㈣的模式被設置在探針模叙23上。因而，使盘=-J 10 201226940 =: Probes with different alignments on the 〇6 〇 The mode of (4) can be set on the probe module 23. Thus, make the disk =
排列方式對應之摆斜M h E 電 猎由才疋轉探針桿7 0而輕易地與 电極E對齊。因此，即/ 同排列型能的雷κ c ™的破璃面板P上具有不 極…例如’不同的電㈣數目、相鄰電 極E間的距離或雷力 都Λ ± 方向’不同種類之玻璃面板P被 載入一陣列檢測裝置時，本發明 進行玻璃面板Ρ之浐制而ρ…則月b有效地 ★中需要置換探針模組23進行檢測之方式有所不^技 檢測示本發明第二實施例之-種陣列 元输代" 敘述中’與第-實施例相同的 2虎代表相同或相似的元件，且不再贅述。 -探5及圖6 ’第二實施例之陣列檢測裝置，第 針桿’二Γ!二型態排列方式的探針6〗及第二探 位於同-方=㈣排列方式的探針62，兩探針桿均 矩开二 f而言之’如圖5及圖6所示，分別為 ==探:桿;r二探針桿72可以是-咖 门“ 振針桿7]及第二探針桿72分別且有不 同排列型態之第一型探針61及第 第有： 探針61及第二型探針 且第一型 發明不朝向不同方向。當然，本 奸72 ^ 。舉例來^第一探針桿以第二探 对才于72可在z軸方向t由杏丨v ?木 者，本發明不限於上離相互間隔。再 設置在兩探針桿7。上，；::種二:排列型態的探針6。 上本發明更可包含兩種以上之具有 201226940 不同排列型態探針60之探針捍7〇。 1此:施例中，—旋轉單元％包 9】以及—第二旋轉單元… … 旋轉探針桿7G繞著探針桿7() 1早兀9】用以 軸或圖6之職轉，且第方向之-軸（圖… 桿70繞著Z軸旋轉。第—％轉^92用以旋轉探針 第-旋轉單元W可包含連接 =作者能以手動方式旋轉探針桿7〇。或；，第一旋轉單 -連在探針模組23上且與探針桿 此产 \干、猎㈣馬達驅動而自動旋轉。在 探針;T 70 /if係以步進馬達作騎轉馬達以精確地控制 = 度。第—旋轉單元91之功能是用以旋 f, 2 、'者铋針桿7〇延伸之軸向旋轉。例如，當具 對應第一型探針61之第一都雷 測裝置時，第一力m 的破璃面板P載入檢 、 疋轉早兀91繞著探針桿70所延伸之軸向 =探針桿70,使第一探針桿71面向第一变電極£1。當 Z對應第二型探針62之第二型電極的玻璃面板p載入 :測裝置時，第—旋轉單元91繞著探針# 7 〇延伸之軸向 疋轉4木針杯7〇，使第二探針桿72面向第二型電極. 第一紅轉單70 92可包含一轉軸，且該轉軸被設置在 =針模組23並與探針桿7Q連接，使操作者能以手動方式 =軸旋轉探針桿7Q。或者，第二旋轉單元％可包含〆 :轉馬達設置在探針模組23與第—旋轉單元Μ之間，使 &針# 7G措由旋轉馬達繞著z軸自動旋轉。在此情況下， 12 201226940 較佳係以步進馬達作為旋轉馬達以精確地 繞著z軸旋轉的角度。第二旋轉單 二針：二。 轉探針桿7。繞著Z軸旋轉。例如，如圖5所力：：用：旋 在玻璃面板p沿γ轴方向上排列，第二旋轉單元田92H =轉探針桿7〇,使探針6G與對齊。 = 當電極上沿χ軸料上 ^不 元92繞2軸旋轉探針桿 弟一紅轉早 y , ΑΑ ^ 使彳木針60與其相對應排列在 置传用二不π二齊。同時’第二旋轉單元92的設 ρ::=:Ε排列方向之玻璃❿ Ρ上的⑨極轉財向始終是固定的，則 包含第一旋轉單元91而不包含第二旋轉單元92。01、 的被ί發Γ第"實施例之陣列檢測裝置中，即使不同種類 =二上有不型態的電極Ε，亦即，相鄰的 =Γ ，或電極Ε數目的不同，但當玻璃面板ρ r針to二？裝置時’只需藉由旋轉探針桿70就能使 如針60輕易地對齊各個電極E。 产斜二的位置及方向均不同’但可透過旋轉 k針# 70就能使探針6Q輕易地對齊各個電極e。 私,以下’圖7及圖8顯示本發明第三實施例之—種陣列 =裝置。在第三實施例的敛述中，與第一或第二實施例 ㈣的兀件符號代表相同或相似的it件，且不再贅述。 士圖7所不’本發明第三實施例之陣列檢測裝置，假 ^轴為沿探針模組支撐框架5〇之長轴方向延伸。Y軸 為水平地垂直於X軸’並往裝置載入或自裝置卸載玻璃面 201226940 板p之方向上延伸。 此前提下，—第〜〜2軸為垂直地垂直於X軸及Y軸。在 X軸及2：軸的〜w針梓71及一第二探針桿72可在包含 角。且，旋轉單元'^面上延伸出預設長度並相互具有一夾 的第一旋轉單元91可包έ個使探針桿70繞γ軸旋轉 致者，如圖 50之長軸方向延伸示假设Χ軸為沿探針模組支撐框架 載入或自裝置卸栽。γ軸為水平地垂直於Χ軸，並往裝置 直地垂直於X軸及螭面板Ρ之方向上延伸，而Ζ軸為垂 可在包含Υ轴及軸，第一探針桿71及第二探針桿72 有一失角。且，C二面Λ延伸出預設長度並相 互具The slanting M h E of the arrangement is easily aligned with the electrode E by the probe rod 70. Therefore, the glass plate P of the κ κ TM of the same type can have infinite poles... for example, the number of different electric (four), the distance between adjacent electrodes E, or the lightning force Λ ± direction 'different kinds of glass When the panel P is loaded into an array detecting device, the present invention performs the glass panel 而 而 则 则 则 则 则 有效 有效 有效 有效 需要 置换 置换 置换 置换 置换 置换 置换 置换 置换 置换 置换 置换 置换 置换 置换 置换 置换 置换 置换 置换 置换 置换 置换 置换 置换The second embodiment of the present invention is the same or similar elements, and will not be described again. - Detecting 5 and FIG. 6 'The array detecting device of the second embodiment, the first needle bar 'two Γ! The two-type arrangement of the probe 6〗 and the second probe are located in the same-square = (four) arrangement of the probe 62, The two probe rods are both momentally opened by two f' as shown in Fig. 5 and Fig. 6, respectively, == probe: rod; r two probe rod 72 can be - coffee door "vibration needle rod 7" and second The probe rods 72 have different types of first probes 61 and the first type: the probes 61 and the second type probes, and the first type invention does not face in different directions. Of course, the traitor 72 ^. The first probe rod is the second probe pair 72 can be in the z-axis direction t from the apricot v, the invention is not limited to the upper distance from each other. It is then disposed on the two probe rods 7. :: Seed 2: Arranged type of probe 6. The present invention may further comprise two or more probes having the 201226940 different alignment type probes 60. 1: In the example, the rotation unit % Pack 9] and - the second rotating unit... Rotating the probe rod 7G around the probe rod 7 () 1 early 9] for the shaft or the position of Figure 6, and the direction of the shaft (Figure... rod 70 Rotate around the Z axis. -% to ^92 To rotate the probe, the first-rotating unit W can include a connection = the author can manually rotate the probe rod 7 〇. Or; the first rotary single-connected to the probe module 23 and the probe rod , hunting (four) motor drive and automatic rotation. In the probe; T 70 / if with a stepper motor as a riding motor to accurately control = degrees. The first - rotation unit 91 is used to rotate f, 2, ' The axial rotation of the shank rod 7 〇 extends. For example, when the first lightning detecting device corresponding to the first type probe 61 is provided, the glass panel P of the first force m is loaded and inspected, and the 疋 兀 兀 兀 兀 兀 绕The axial direction of the probe rod 70 = the probe rod 70, so that the first probe rod 71 faces the first variable electrode £1. When Z corresponds to the glass plate p of the second type electrode of the second type probe 62 When entering the measuring device, the first rotating unit 91 twists the 4 wooden needle cup 7 around the axial direction of the probe #7 〇, so that the second probe rod 72 faces the second type electrode. The first red turntable 70 92 may include a rotating shaft, and the rotating shaft is disposed on the needle module 23 and connected to the probe rod 7Q, so that the operator can manually rotate the probe rod 7Q by the shaft = or the second rotating unit% Including 转: the rotating motor is disposed between the probe module 23 and the first rotating unit ,, so that the & needle # 7G is automatically rotated by the rotating motor around the z axis. In this case, 12 201226940 is preferably step by step The motor is rotated as an angle of rotation about the z-axis. The second rotation is two-pin: two. The probe rod 7. Rotates around the Z-axis. For example, as shown in Figure 5: The glass panel p is arranged along the γ-axis direction, and the second rotating unit field 92H=turns the probe rod 7〇 to align the probe 6G. = When the electrode is rotated on the electrode along the χ axis, the element is rotated around the 2-axis. The younger brother turns red and turns early y, ΑΑ ^ so that the eucalyptus needle 60 is arranged in the same way as the two. At the same time, the 9-pole turn-by-turn on the glass ❿ 设 of the second rotation unit 92 is always fixed, and includes the first rotation unit 91 and does not include the second rotation unit 92. 01 In the array detecting device of the embodiment of the present invention, even if there are different types of electrode electrodes in different types = two, that is, adjacent = Γ, or the number of electrode turns is different, but when the glass Panel ρ r pin to two? At the time of the device, the needles 60 can be easily aligned with the respective electrodes E by simply rotating the probe lever 70. The position and direction of the oblique two are different', but the probe 6Q can be easily aligned with the respective electrodes e by rotating the k-pin #70. Private, the following Figures 7 and 8 show an array = device of the third embodiment of the present invention. In the shirring of the third embodiment, the same or similar components as those of the first or second embodiment (four) are referred to and will not be described again. In the array detecting device of the third embodiment of the present invention, the false axis extends in the long axis direction of the probe module supporting frame 5''. The Y axis is horizontally perpendicular to the X axis' and extends toward the device loading or from the device unloading glass face 201226940 plate p. Under this premise, the -1 to 2 axes are perpendicular to the X and Y axes. The ~w pin 71 and the second probe bar 72 on the X-axis and 2: axis can be included in the corner. Moreover, the first rotating unit 91 extending from the rotating unit to the preset length and having a clip to each other may be configured to rotate the probe rod 70 around the γ axis, as shown in the long axis direction of FIG. The x-axis is loaded along the probe module support frame or unloaded from the device. The γ axis is horizontally perpendicular to the Χ axis and extends perpendicularly to the X axis and the Ρ panel ,, and the Ζ axis is perpendicular to the Υ axis and the axis, the first probe rod 71 and the second The probe stem 72 has a lost angle. Moreover, the two sides of the C extend beyond the preset length and are mutually compatible.
軸旋轉的第—旋輕。。早70 90可包含一個使探針桿70繞X w早元91。 在本實施例中，八卜 長轴方向間之—夹心|於第—探針桿71及第二探針桿72 例如，介於第一掇可為9〇。，但本發明不限於此結構。 具有大於或何9=71及第二探針桿72長轴方向間可 有不同排列型態之探夹角。此外，本發明不限分別具 換句話說’本發明可據 纟之結構。 且母個探針桿7〇上分 之hm干7〇 之結構。 以具有兩種以上排列方式之探針60 第1轉單元91可包含被連接於探針桿7 一 ，使操作者能以手動方式旋轉探針桿％。或者 轉單元9】彳包含一碇轉馬達設置在探針模組23上且: 針捍70連接，使探針桿7〇藉由旋轉馬達而自動碇轉y 14 201226940 第一旋轉單元91之功能是用以旋轉探針桿70。例如， 當具對應第一型探針61之第一型電極E1的玻璃面板P載 入檢測裝置時，第一旋轉單元91旋轉探針桿71，使第一 探針桿71位於對應第一型電極E1的一位置上。當具對應 第二型探針62之第二型電極E2的玻璃面板P載入檢測裝 置時，第一旋轉單元91旋轉第二探針桿72，以使第二探 針桿72移至對應第二型電極E2的一位置上。 同時，在與第二實施例相同之一方式，旋轉單元90 更包含一可使探針桿70繞Z轴旋轉之第二旋轉單元92。 第二旋轉單元92可包含一轉軸，且該轉軸係被設置在探 針模組23並與探針桿70連接，使操作者能以手動方式繞 Z軸旋轉探針桿70。或者，第二旋轉單元92可包含一旋 轉馬達設置在探針模組23與第一旋轉單元9〗之間，使探 針桿70藉由旋轉馬達自動繞Z轴旋轉。第二旋轉單元92 功能是用以旋轉探針桿70繞Z軸旋轉。因此，即.使具不 同排列方向電極E之不同種類玻璃面板P被載入陣列檢測 裝置時，探針60可被精確地對齊電極E。如此一來，第二 旋轉單元92是用於配合不同電極E排列方向之玻璃面板 P。若玻璃面板P上的電極E排列方向始終是固定的，則 旋轉單元90可只包含第一旋轉單元91而不包含第二旋轉 單元92。The first rotation of the shaft is light. . Early 70 90 may include a probe 91 that wraps around X w early 91. In the present embodiment, the sandwich between the long axis directions and the second probe bar 72 may be, for example, 9 介于 between the first and second probe bars 72. However, the invention is not limited to this structure. There may be a different angle between the longitudinal direction of the second probe rod 72 and the orientation of the second probe rod 72. Further, the present invention is not limited to the structure in which the present invention can be used. And the structure of the main probe rod 7 is divided into hm dry 7〇. The probe unit 60 having two or more arrangements may include a probe unit 7 coupled to the probe rod 7 to allow the operator to manually rotate the probe rod %. Or the rotating unit 9 includes a turning motor disposed on the probe module 23 and: the needle 70 is connected, so that the probe rod 7 is automatically rotated by the rotating motor. y 14 201226940 The function of the first rotating unit 91 It is used to rotate the probe stem 70. For example, when the glass panel P having the first type electrode E1 corresponding to the first type probe 61 is loaded into the detecting device, the first rotating unit 91 rotates the probe lever 71 so that the first probe lever 71 is located in the corresponding first type. One position of the electrode E1. When the glass panel P having the second type electrode E2 corresponding to the second type probe 62 is loaded into the detecting device, the first rotating unit 91 rotates the second probe rod 72 to move the second probe rod 72 to the corresponding portion. One position of the second electrode E2. Meanwhile, in the same manner as the second embodiment, the rotating unit 90 further includes a second rotating unit 92 that can rotate the probe lever 70 about the Z axis. The second rotating unit 92 can include a rotating shaft that is disposed in the probe module 23 and coupled to the probe stem 70 to enable the operator to manually rotate the probe shaft 70 about the Z axis. Alternatively, the second rotating unit 92 may include a rotating motor disposed between the probe module 23 and the first rotating unit 9 such that the probe bar 70 is automatically rotated about the Z axis by a rotary motor. The second rotation unit 92 functions to rotate the probe shaft 70 about the Z axis. Therefore, when the different types of glass panels P having the different alignment direction electrodes E are loaded into the array detecting device, the probes 60 can be accurately aligned with the electrodes E. As a result, the second rotating unit 92 is a glass panel P for aligning the directions in which the electrodes E are arranged. If the arrangement direction of the electrodes E on the glass panel P is always fixed, the rotation unit 90 may include only the first rotation unit 91 and not the second rotation unit 92.
本發明第三實施例之陣列檢測裝置中，即使不同種類 的玻璃面板P上有不同排列型態的電極E，亦即，相鄰的 兩電極E間的距離或電極E的數目不同，但當玻璃面板P 15 201226940 被載入陣列檢測裝置時，只需藉由旋轉探針桿70就能使 探針60輕易地對齊各個電極E。且，雖然電極E的位置及 方向多變化，但只需藉由旋轉探針桿70即能使探針60輕 易地對齊各個電極E。 本發明實施例之技術精神可獨立地或相互結合而被 實施。此外，本發明之探針模組可被用於一檢測裝置，除 對玻璃面板之電極通以電性訊號外，也可對其他各種基板 之電極通以電訊號以測試其缺陷。 承上所述，當具有不同電極之排列方式之不同種類玻 璃面板被單一個陣列檢測裝置檢測時，不同於習知技術需 隨不同玻璃面板置換探針模組的方式，本發明之陣列檢測 裝置可透過旋轉探針桿使探針輕易地對齊各個電極，使製 造過程的效率因此而提升。 以上所述僅為舉例性，而非為限制性者。任何未脫離 本發明之精神與範疇，而對其進行之等效修改或變更，均 應包含於後附之申請專利範圍中。 【圖式簡單說明】 圖1為本發明第一實施例之一種陣列檢測裝置之示意 圖； 圖2為圖1之一種陣列檢測裝置之示意圖； 圖3及圖4為圖2之探針模組的連續作動示意圖； 圖5及圖6為本發明之第二實施例之一種陣列檢測裝 置之探針模組示意圖；以及 16 1 201226940 圖7及圖8為本發明之第三實施例之一種陣列檢測裝 置之探針模組示意圖。 【主要元件符號說明】 10 :載入單元 20 :檢測單元 21 :透光支樓板 2 2 .測試彳吴組 23 :探針模組 30 :卸載單元 50 :探針模組支撐框架 51 : Y軸驅動單元 52 : X轴驅動單元 6 0 :探針 61 :第一型探針 62 :第二型探針 70 :探針桿 71 :第一探針桿 72 :第二探針桿 80 :升降單元 90 :旋轉單元 91 :第一旋轉單元 92 :第二旋轉單元 E :電極 201226940In the array detecting device of the third embodiment of the present invention, even if different types of glass panels P have electrodes E of different alignment types, that is, the distance between adjacent two electrodes E or the number of electrodes E is different, When the glass panel P 15 201226940 is loaded into the array detecting device, the probe 60 can be easily aligned with the respective electrodes E by simply rotating the probe lever 70. Further, although the position and direction of the electrode E are varied, the probe 60 can be easily aligned with the respective electrodes E by simply rotating the probe lever 70. The technical spirit of the embodiments of the present invention can be implemented independently or in combination with each other. In addition, the probe module of the present invention can be used in a detecting device. In addition to the electrical signal to the electrodes of the glass panel, electrical signals can be applied to the electrodes of various other substrates to test the defects. As described above, when different types of glass panels having different electrode arrangements are detected by a single array detecting device, unlike the conventional technology, the array detecting device of the present invention can be replaced with different glass panels. By rotating the probe rods to easily align the probes to the individual electrodes, the efficiency of the manufacturing process is thus increased. The above is intended to be illustrative only and not limiting. Any equivalent modifications or alterations to the spirit and scope of the present invention are intended to be included in the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view of an array detecting device according to a first embodiment of the present invention; FIG. 2 is a schematic view of an array detecting device of FIG. 1; FIG. 3 and FIG. FIG. 5 and FIG. 6 are schematic diagrams showing a probe module of an array detecting device according to a second embodiment of the present invention; and 16 1 201226940 FIG. 7 and FIG. 8 are an array detection according to a third embodiment of the present invention. Schematic diagram of the probe module of the device. [Main component symbol description] 10: Loading unit 20: Detection unit 21: Transmissive support floor 2 2. Test group 23: Probe module 30: Unloading unit 50: Probe module support frame 51: Y-axis Drive unit 52: X-axis drive unit 6 0 : Probe 61 : First type probe 62 : Second type probe 70 : Probe rod 71 : First probe rod 72 : Second probe rod 80 : Lift unit 90: rotation unit 91: first rotation unit 92: second rotation unit E: electrode 201226940
El :第一型電極 E2 :第二型電極 P :玻璃面板El : first type electrode E2 : second type electrode P : glass panel