KR101296808B1 - grinding apparatus for plat display panel and grinding method - Google Patents

Abstract

The present invention relates to a flat panel display panel polishing apparatus that can accurately inspect the polishing state according to the polishing direction of the flat panel display panel and can greatly improve process efficiency and inspection reliability, and a flat panel display panel polishing method using the same.

In detail, the present invention relates to a flat panel display polishing apparatus having first and second side surfaces parallel to each other, comprising: a first sliding table on which the flat panel display panel is seated and sliding in a first direction parallel to the first and second side surfaces; ; A plurality of first polishing wheels for polishing the first and second side surfaces of the sliding flat panel; A flat panel display panel polishing apparatus including at least two first scan cameras provided after the first polishing wheel based on a sliding direction of the flat panel display panel and inspecting polishing states of the first and second side surfaces, respectively. A flat panel display panel polishing method is provided.

Description

Grinding apparatus for plat display panel and grinding method

1 is a schematic view of a general flat panel display polishing apparatus.

2 is a schematic view of a flat panel display panel polishing apparatus according to the present invention.

3 is a side view of the flat panel display polishing apparatus according to the present invention.

<Description of the symbols for the main parts of the drawings>

102: flat panel display panel

102a, 102b, 102c, 102d: first to fourth sides

110,150: first and second polishing unit

112,152: first and second sliding tables

114,154: First and second grinding bars

115,155: First and second abrasive wheels

116,156: first and second CCD camera

118,158: first and second inspection camera

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat display panel grinding apparatus and a polishing method, and more particularly, to accurately inspect a polishing state according to a polishing direction of a flat panel display panel, thereby improving process efficiency and inspection reliability. A flat panel display panel polishing apparatus which can be greatly improved and a flat panel display panel polishing method using the same.

In line with the recent full-scale informatization era, the display field for displaying a large amount of data by an electric signal as a visual image has also been rapidly developed. Accordingly, various flat panel display devices having advantages of light weight, thinness, and low power consumption have been developed. Flat Panel Display device (FPD) is introduced to quickly replace the existing cathode ray tube (CRT).

Some representative examples of such flat panel displays include liquid crystal display (LCD), plasma display panel (PDP), field emission display (FED), and electroluminescent displays. Electro luminescence Display device (ELD), etc. These common flat panel display devices have a common element of the plat display panel for image realization, which is a unique layer of fluorescent or polarizing material The two substrates are put together side by side in between. Recently, an active matrix type in which pixels, which are basic units of image expression, are arranged in a matrix on a flat panel display panel, and each is individually controlled by a switching element such as a thin film transistor (TFT). This video is widely used because of its ability to implement video and to reproduce colors.

On the other hand, a general flat panel display panel manufacturing process includes a substrate manufacturing process for obtaining the first and second substrates, and a cell for bonding the two substrates together with a unique fluorescent or polarizing material layer therebetween to complete the flat panel display panel. It can be divided into processes.

At this time, the substrate manufacturing process and the cell process are generally performed on the first and second large area substrates (bare or mother glass) in which a plurality of cell regions are divided by positions in order to reduce the process or improve the yield. In the manufacturing process, thin film deposition, photo-lithography, and etching are repeated several times to implement thin film transistors including pixels in the cell regions of the first and second large area substrates. In the cell process, a seal pattern for bonding is formed on one of the cell regions of the first or second large area substrate, and then the two substrates are faced to each other via a unique fluorescent or flat material layer. A plurality of flat panel display panels are obtained by cutting each cell region.

Particularly, the cell process includes a polishing process for removing sharp portions by polishing corners and sides of vertices of the flat panel display panel obtained by cutting, and a separate flat panel display panel polishing apparatus is mobilized.

1 is a schematic diagram of a general flat panel display panel polishing apparatus (hereinafter, simply referred to as a polishing apparatus). In this case, the general flat panel display panel 2 shows a form in which separate first and second substrates are bonded to each other, but is simply shown in the drawings for convenience.

As can be seen, a general polishing apparatus may be divided into a first polishing unit 10 for polishing two opposite sides of the flat panel display panel 2 and a second polishing unit 50 for polishing the other two sides. These first and second polishing units 10, 50 are normally arranged in a straight line with a substrate transfer means such as a robot (not shown) interposed therebetween.

Therefore, four side surfaces of the flat panel display panel 2, which is the object to be polished, are polished while passing through the first and second polishing units 10 and 50, respectively. The first and the slidable in any X axis direction or vice versa -X axis direction connecting the first and second polishing units 10 and 50 with horizontal rotation while supporting the flat panel display panel 2; At the upper end of the moving direction of the flat panel display panel 2 with the second sliding tables 12 and 52 and a plurality of polishing wheels mounted thereon to polish the corresponding side surfaces of the flat panel display panel 2 mounted on each of them. Cross-fixed first and second grinding bars 14, 54 are provided.

At this time, the two side surfaces polished by the first polishing unit 10 under the premise that the flat panel display panel 2 is rectangular are referred to as first and second side surfaces 2a and 2b which are long axis sides. When the remaining two side surfaces polished by the third and fourth side surfaces 2c and 2d are short sides, the flat panel display panel 2 seated on the first sliding table 12 of the first polishing unit 10 may be a third side. The first and second side surfaces 2a and 2b are polished while passing from the side surface 2c to the lower end of the first grinding bar 14, and are placed on the second sliding table 52 of the second polishing unit 50. The third and fourth side surfaces 2c and 2d are polished while the plate display panel 2 passes through the lower end of the second grinding bar 54 from the first side surface 2a by 90 ° horizontal rotation.

In addition, the general polishing apparatus checks whether the flat panel display panel 2 is aligned on the upper end of the moving path before the first and second grinding bars 14 and 54, respectively, based on the moving direction of the flat panel display panel 2. First and second CCD cameras 16 and 56 are provided for inspecting the polishing state of the flat panel display panel 2 at the lower end of the movement path before the first and second grinding bars 14 and 54, respectively. First and second inspection cameras 18 and 58 are mounted.

In this case, a pair of first and second alignment marks are provided at both edges of the third side surface 2c and the first side surface 2a of the general flat panel display panel 2, respectively. The first alignment mark may be fixed to the first grinding bar 14 in a pair, respectively, and the second CCD camera 56 may also be fixed to the second grinding bar 54. It can be made in pairs for identifying each of the alignment marks. Further, the first inspection camera 18 is optionally fixed to the lower end of the movement path of the first side 2a to inspect the polishing state of the side of the flat panel display panel 2 passing through the upper side, and the second inspection camera 58 optionally The polishing state of the side surface of the flat panel display panel 2 fixed to the lower end of the moving path of the fourth side surface 2d and passing through the upper side is examined.

Looking at the polishing process of such a general polishing apparatus, the flat panel display panel 2, which is the polishing object, is first mounted on the first sliding table 12 of the first polishing unit 10. In this case, the first sliding table 12 may be positioned at a home position spaced apart from the first grinding bar 14 by a predetermined distance, and the flat display panel 2 may face the first grinding bar 14. The tip is occupied by the third side surface 2c.

Thereafter, the first sliding table 12 is slid in the direction toward the first grinding bar 14, that is, in the X-axis direction, so that the pair of first pairs provided at both edges of the third side surface 2c of the flat panel display panel 2. When the alignment marks are positioned below the first CCD camera 16, the first CCD camera 16 checks the first alignment mark and checks whether the flat panel display panel 2 is aligned. )

When the alignment of the flat panel display panel 2 is confirmed, the first sliding table 12 is slid again in the X-axis direction so that the first sliding bar 14 starts from the third side surface 2c of the flat panel display panel 2. A plurality of polishing wheels, which pass through the lower end and are mounted on the first grinding bar 14 during this process, polish the first and second side surfaces 2a and 2b of the flat panel display panel 2. At this time, if necessary, the four corners of the vertex of the flat panel display panel 2 may be polished together.

Accordingly, the flat panel display panel 2 on which the first and second side surfaces 2a and 2b are polished is positioned after the first grinding bar 14, and then the first sliding table 12 is moved in the -X axis direction. When reverse sliding, the first inspection camera 18 inspects the polishing state of the first side surface 2a of the flat panel display panel 2 passing through the upper end thereof. In this case, the conventional flat panel display panel has a shape in which the first and second substrates are bonded up and down, and the polishing state inspections on both sides of the upper first substrate corresponding to the first and second side surfaces 2a and 2b are respectively performed. Can be advanced by a pair of first CCD cameras 16 placed at the top of the first inspection camera 18 at the bottom of the first side 2a to one side of the lower second substrate passing through the top thereof. Inspect the polishing condition (③ Inspect the polishing condition)

Thereafter, the first sliding table 12 is rotated 180 ° (④ 180 °) so that the fourth side 2d of the flat panel display panel 2 is positioned at the tip facing the first grinding bar 14, and again, the X axis In the sliding direction, the first inspection camera 18 inspects the polishing state of the second side 2b of the flat panel display panel passing through the upper end thereof, and strictly one side of the lower second substrate in the corresponding direction. Health check)

This completes the inspection of the polishing and polishing conditions on the first and second side surfaces 2a and 2b of the flat panel display panel 2 by the first polishing unit 10.

Next, the flat panel display panel 2 is moved to the second sliding table 52 by a substrate transfer means such as a robot, and the second sliding table 52 is rotated 90 degrees horizontally to face the second grinding bar 54. The first side surface 2a is placed at the tip of the flat panel display panel 2.

Subsequently, the polishing and polishing states of the third and fourth side surfaces 2c and 2d of the flat panel display panel 2 are inspected by a similar process as described above. The second sliding table 52 slides in the X-axis direction. When the second alignment mark of the first side surface 2a is placed at the bottom of the second CCD camera 56, the alignment state of the flat panel display panel 2 is checked through the alignment thereof (6) rotated 90 ° and frozen. The second sliding table 52 is slid in the X-axis direction to pass through the lower end of the second grinding bar 54 from the first side surface 2a of the flat panel display panel 2. Polishing is performed on the side surfaces 2c and 2d. (⑦ polishing)

Subsequently, during the reverse sliding of the second sliding table 52 in the -X axis direction, the polishing state of the fourth side surface 2d of the flat panel display panel is inspected using the second inspection camera 58. At this time, the polishing state of both sides of the upper first substrate corresponding to the third and fourth side surfaces 2c and 2d of the flat panel display panel 2 may be performed by the second CCD camera 56 placed on each upper end. (⑧ Polishing condition inspection)

Next, after the second sliding table 52 is rotated 180 ° so that the second side surface 2b of the flat panel display panel 2 is at the tip facing the second grinding bar 54 (⑨ rotates 180 °), Through the X-axis sliding of the second sliding table 52, the polishing state of the third side surface 2c by the second inspection camera 58, strictly corresponding one side of the lower second substrate, is inspected. (⑩ Polishing state inspection)

Finally, the flat panel display panel 2 is carried out to the outside from the end position after the second grinding bar 54.

However, the polishing apparatus and polishing method of the general flat panel display panel described above show very complicated disadvantages, in particular, X-axis sliding and -X-axis reverse sliding of the first and second sliding tables 12 and 52 and 180 °. Due to the mixed rotation, the copper wire is complicated and it takes a long time. As a result, the inspection of the polishing state of the flat panel display panel 2 is currently performed randomly by random sampling rather than all products due to time and yield, and thus, the process reliability is greatly reduced.

In addition, although the general polishing apparatus inevitably inspects the polishing state of the first substrate of the flat panel display panel 2 using the first and second CCD cameras 16 and 56, the first and second CCD cameras ( 16 and 56 are for the purpose of substantially confirming the first and second alignment marks, which shows a considerable qualitative deterioration in comparison with the inspection cameras 18 and 58 in terms of resolution and resolution. It shows the disadvantage of deterioration.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and the polishing device according to the polishing direction is inspected by eliminating reverse sliding and unnecessary rotation of the flat panel display panel, thereby greatly improving the process efficiency and polishing. The purpose is to present the method. At the same time, an object of the present invention is to greatly improve the inspection reliability by enabling inspection of the polishing state of all sides of the flat panel display panel with a dedicated inspection camera.

In order to achieve the above object, the present invention provides a flat panel display panel polishing apparatus having first and second side surfaces parallel to each other, wherein the flat panel display panel is seated and in a first direction parallel to the first and second side surfaces. A first sliding table sliding; A plurality of first polishing wheels for polishing the first and second side surfaces of the sliding flat panel; A flat panel display panel polishing apparatus is provided after the first polishing wheel with respect to the first direction, and includes at least two first scan cameras for inspecting polishing states of the first and second side surfaces, respectively.

At this time, the first scan camera, characterized in that forming at least two pairs respectively fixed to the lower end on a point on the movement path of the first and second side, the first grinding wheel before the first direction And at least one first CCD camera configured to check whether the liquid crystal panel is aligned. The flat panel display panel includes a pair of first arrays provided on the first and second sides, respectively. In addition, the first CCD camera is characterized in that the pair of the recognition of the pair of the first alignment mark on the top of the flat panel display panel. The method may further include a first grinding bar on which the first polishing wheel is mounted and cross-arranged in the first direction at an upper end of the flat panel display panel.

The flat panel display panel may further include third and fourth side surfaces that are parallel to each other, and four corners where the respective side surfaces meet. In this case, the first polishing wheel is configured to slide the flat panel display panel. Four edges are polished together.

And a second sliding table on which the flat panel display panel is mounted and which slides in a second direction parallel to the third and fourth side surfaces; A plurality of second polishing wheels for polishing the third and fourth side surfaces of the sliding flat panel display panel; And at least two second scan cameras provided after the second polishing wheel with respect to the second direction and inspecting the polishing states of the third and fourth side surfaces, respectively. The camera comprises at least two pairs fixed to a lower end on a point on the movement paths of the third and fourth sides, respectively, and is provided before the second polishing wheel based on the second direction. It further comprises at least one second CCD camera for confirming the alignment of the liquid crystal panel.

The flat panel display panel may further include a pair of second alignment marks respectively provided on the third and fourth side surfaces, and the second CCD camera includes the pair of second alignment marks on the top of the flat panel display panel. And a second grinding bar cross-arranged on an upper end of the flat panel display panel on which the second polishing wheel is mounted and slid. In particular, the first direction and the second direction are positioned in a straight line, and the second sliding table rotates the flat panel display panel by 90 °.

In addition, the present invention comprises the steps of (a) polishing the first and second side surfaces of the flat panel display panel facing each other while sliding the flat panel display panel in a first direction; and (b) inspecting the polishing states of the first and second side surfaces while slidingly moving the flat panel display panel in the first direction.

In this case, the method may further include a step of checking whether the flat panel display panel is aligned before the step (a), and after the step (b), (c) while slidingly moving the flat panel display panel in the second direction. Polishing the remaining third and fourth side surfaces of the flat panel display panel; and (d) inspecting the polishing states of the third and fourth side surfaces while slidingly moving the flat panel display panel in the second direction.

The method may further include checking whether the flat panel display panel is aligned after the step (b) and before the step (c). The first direction and the second direction are the same direction in a straight line. and after step (b), before the step (c), horizontally rotating the flat panel display panel by 90 °.

EMBODIMENT OF THE INVENTION Hereinafter, this invention is demonstrated in detail with reference to drawings.

2 and 3 are schematic and side views, respectively, of a flat panel display panel polishing apparatus (hereinafter, simply referred to as a polishing apparatus) according to the present invention. Referring to the drawings, the polishing apparatus according to the present invention is a flat panel display. The panel 2 may be divided into a first polishing unit 110 for polishing two sides parallel to each other and a second polishing unit 150 for polishing the other two sides. In this case, the flat panel display panel 2, which is the object of polishing of the polishing apparatus according to the present invention, has a shape in which the separate first and second substrates are faced and bonded together side by side, but only one substrate is shown in the drawings.

Accordingly, for convenience, both side surfaces of the flat panel display panel 2 polished by the first polishing unit 110 are referred to as first and second side surfaces 102a and 102b of the long axis, and are polished by the second polishing unit 150. When the other two sides are referred to as the third and fourth side surfaces 102c and 102d of the short sides, the first and second side surfaces 102a and 102b are mounted on the first polishing unit 110 with the flat panel display panel 2 seated thereon. A plurality of first polishing wheels 115 for polishing the first sliding table 112 sliding in the first direction parallel to the first and second side surfaces 102a and 102b of the flat panel display panel sliding by the first sliding table 112. The second polishing unit 150 is provided with a second sliding table 152 that slides in a second direction parallel to the third and fourth side surfaces 102c and 102d with the flat panel display panel 2 seated thereon. And a plurality of second polishing wheels 155 for polishing the third and fourth side surfaces 102c and 102d of the flat panel display panel 2 which are thereby slid. It is compared.

In this case, the first and second polishing wheels 115 and 155 may be mounted to the first and second grinding bars 114 and 154 which are cross-fixed in the sliding direction of the flat panel display panel 2, respectively. The first and second side surfaces 102a and 102b are polished in the process of being seated on the first sliding table 112 and passing through the lower end of the first grinding bar 114, and are seated on the second sliding table 152 to be second. The third and fourth side surfaces 102c and 102d are polished in the course of passing through the bottom of the grinding bar 154.

Meanwhile, the sliding directions of the first and second sliding tables 112 and 152 may be the same or different, but for convenience of description, the first and second sliding tables 112 and 152 including the first and second polishing units 110 and 150 are straight. In this case, a separate substrate transfer means, such as a robot, is provided between the first and second polishing units 110 and 150 in this case so as to slide the flat panel display panel 102 of the first sliding table 112 in the second sliding manner. Moving to the table 152, in particular the second sliding table 152 is capable of horizontal rotation of 90 degrees.

In addition, the polishing apparatus according to the present invention includes first and second CCD cameras 116 and 156 at upper ends of the moving paths before the first and second grinding bars 114 and 154, respectively, based on the moving direction of the flat panel display panel 102. In this case, a pair of first and second alignment marks may be provided at both edges of the third side surface 102c and the first side surface 102a of the flat panel display panel 102, and the first CCD camera 116 may be provided. ) Forms a pair for checking the first alignment marks in a state of being fixed to the first grinding bar 114, and the second CCD camera 156 is fixed to the second of the grinding bar 154. It is preferable to form a pair for respectively identifying the alignment marks.

In addition, in the polishing apparatus according to the present invention, the first and second inspection cameras may be formed at upper and / or lower ends of the movement paths after the first and second grinding bars 114 and 154, respectively, based on the moving direction of the flat panel display panel 102. 118 and 158 are provided, in particular, the first inspection camera 118 comprises two pairs fixed to the lower end on the movement path of the first and second side surfaces 102a and 102b, and the second inspection camera 158 is the third and third. It is preferable to form two pairs fixed at the lower end on the movement paths of the four side surfaces 102c and 102d. Each of the first and second inspection cameras 118 and 158 may use a scan camera capable of continuously photographing an object moving within a visible distance.

The polishing method of the flat panel display panel 102 using the polishing apparatus according to the present invention described above will be described.

First, the flat panel display panel 102 is mounted on the first sliding table 112 of the first polishing unit 110. In this case, the first sliding table 112 is located at a home position spaced apart from the first grinding bar 114 by a predetermined distance, and the front end of the flat panel display panel 102 facing the first grinding bar 114 has a third side surface 102c. This occupies.

Thereafter, the first sliding table 112 is slid in the first direction toward the first grinding bar 114 to confirm the alignment state of the flat panel display panel 102. Accordingly, a pair of first alignment marks provided at both edges of the third side surface 102c of the flat panel display panel 102 is positioned at the bottom of the first CCD camera 116, and the first CCD camera 116 is formed of the first The alignment of the flat panel display panel 102 is checked by the existence of the alignment mark.

Next, in order to polish the first and second side surfaces 102a and 102b of the flat panel display panel 102, the first sliding table 112 continues to slide in the first direction, which is the traveling direction.

Accordingly, the flat panel display panel 102 passes from the third side surface 102c to the bottom of the first grinding bar 114, and during this process, the first polishing wheel 115 mounted on the first grinding bar 114 is The first and second side surfaces 102a and 102b of the flat panel display panel 102 are polished. In this case, preferably, four corners, which are vertices of the flat panel display panel 102, may be polished together.

Subsequently, the first sliding table 112 continues to slide in the first direction, which is the traveling direction, for the polishing amount measurement. At this time, two pairs of first inspection cameras 118 fixed to the lower end of the first and second side surfaces 102a and 102b on the lower end of the movement paths of the first grinding bar 114 are disposed. The second side surfaces 102a and 102b pass between each pair of first inspection cameras 118, through which both the first and second side surfaces 102a and 102b for the first and second substrates on the upper and lower sides are passed. You can check the polishing condition of the machine.

As a result, the polishing of the first and second side surfaces 102a and 102b of the flat panel display panel 102 by the first polishing unit 110 is completed. During this process, the first sliding table 112 repeats sliding in one direction only and does not need to be horizontally rotated except for a predetermined angle for aligning the flat panel display panel 102.

Next, the flat panel display panel 102 is moved to the second sliding table 152 by a substrate transfer means such as a robot, and the second sliding table is provided on the assumption that the first and second sliding tables 112 and 152 are located in a straight line. The table 152 is rotated horizontally by 90 ° so that the first side surface 102a of the flat panel display panel 102 is positioned at the tip facing the second grinding bar 154.

Subsequently, the second sliding table 152 is slid toward the second grinding bar 154 to check the alignment state of the flat panel display panel 102. Accordingly, a pair of second alignment marks provided at both edges of the first side surface 102a of the flat panel display panel 102 are positioned at the bottom of the second CCD camera 156, and the second CCD camera 156 is disposed at the second edge. Check the alignment of the flat panel display panel 102 by the existence of the alignment mark. (④ Rotate 90 ° and align)

Subsequently, the second sliding table 152 continuously slides in the same direction to polish the third and fourth side surfaces 102c and 102d of the flat panel display panel 102. Accordingly, the flat panel display panel 102 passes from the first side surface 102a to the bottom of the second grinding bar 154, and the second polishing wheel 155 mounted on the second grinding bar 154 has a flat panel display panel. The third and fourth side surfaces 102c and 102d of 102 are polished. (5) Polishing

Next, the second sliding table 152 continues to slide in the same direction to check the grinding state of the third and fourth side surfaces 102c and 102d. At this time, two pairs of second inspection cameras 158 fixed to the lower end of the moving paths of the third and fourth side surfaces 102c and 102d are positioned at the rear end of the second grinding bar 154. The third and fourth side surfaces 102c and 102d pass between the pair of second inspection cameras 158, through which the third and fourth substrates of the first and second substrates of the upper and lower portions of the flat panel display panel 102 are passed. The polishing state can be inspected for both of the fourth side surfaces 102c and 102d. (⑥ Polishing state inspection)

As a result, the polishing of the third and fourth side surfaces 102c and 102d of the flat panel display panel 102 by the second polishing unit 150 is completed, and the flat panel display panel 102 has a second grinding bar. The second sliding table 152 also repeatedly slides in one direction, and the polishing direction of the flat panel display panel 102 with respect to the second grinding bar 154 is changed. It does not need to be rotated horizontally except for the initial 90 ° rotation to determine and the desired angle for alignment.

As described above, the flat panel display panel polishing apparatus according to the present invention can inspect the polishing state according to the polishing direction, and greatly improve the process efficiency by eliminating unnecessary sliding and 180 ° rotation of the flat panel display panel. have. In addition, the flat panel display panel polishing apparatus according to the present invention is to inspect the polishing state on all sides with a dedicated scan camera, through which can greatly improve the inspection reliability.

Claims (18)

A flat panel display panel polishing apparatus having first and second side surfaces parallel to each other, A first sliding table on which the flat panel display panel is mounted and slides in a first direction parallel to the first and second side surfaces; A plurality of first polishing wheels for polishing the first and second side surfaces of the sliding flat panel; At least two first scanning cameras provided after the first polishing wheel with respect to the first direction and inspecting polishing states of the first and second side surfaces, respectively; And the first scan camera comprises at least two pairs respectively fixed to a lower end on a point on the movement paths of the first and second side surfaces. delete The method of claim 1, At least one first CCD camera provided before the first polishing wheel with respect to the first direction to check alignment of the flat panel display panel. Flat panel display polishing apparatus further comprising. The method of claim 3, The flat panel display panel further includes a pair of first alignment marks provided on the first and second side surfaces, respectively. The first CCD camera is a pair of flat panel display panel polishing apparatus for recognizing the pair of first alignment mark, respectively on the top of the flat panel display panel. The method of claim 1, And a first grinding bar on which the first polishing wheel is mounted and which is arranged in the first direction at an upper end of the flat display panel which is slid. The method of claim 1, And the flat panel display panel further includes third and fourth side surfaces parallel to each other, and four corners where the side surfaces meet. The method according to claim 6, And the first polishing wheel polishes the four corners of the sliding flat panel display panel together. The method according to claim 6, A second sliding table on which the flat panel display panel is mounted and slides in a second direction parallel to the third and fourth side surfaces; A plurality of second polishing wheels for polishing the third and fourth side surfaces of the sliding flat panel display panel; At least two second scan cameras provided after the second polishing wheel with respect to the second direction to inspect polishing states of the third and fourth side surfaces, respectively; Flat panel display polishing apparatus further comprising. 9. The method of claim 8, And the second scan camera comprises at least two pairs fixed to a lower end on a point on the movement paths of the third and fourth side surfaces, respectively. 9. The method of claim 8, At least one second CCD camera provided before the second polishing wheel with respect to the second direction to check whether the flat panel display panel is aligned. Flat panel display polishing apparatus further comprising. The method of claim 10, The flat panel display panel further includes a pair of second alignment marks provided on the third and fourth side surfaces, respectively. The second CCD camera is a pair of flat panel display panel polishing apparatus for recognizing the pair of second alignment mark, respectively on the top of the flat panel display panel. 9. The method of claim 8, And a second grinding bar mounted on the top of the flat panel display panel on which the second polishing wheel is mounted and sliding. 9. The method of claim 8, The first direction and the second direction is located in a straight line, And the second sliding table rotates the flat panel 90 degrees horizontally. A first sliding table on which a flat panel display panel having first and second side surfaces parallel to each other is mounted, and sliding in a first direction parallel to the first and second side surfaces; A plurality of first polishing wheels for polishing the first and second side surfaces of the sliding flat panel; At least two first scan cameras provided after the first polishing wheel on the basis of the first direction and inspecting the polishing states of the first and second side surfaces, respectively, wherein the first scan camera is the first scan camera; And a flat panel display panel polishing apparatus using at least two pairs of flat panel display panel polishing apparatuses respectively fixed to a lower end on a point on the movement path of the second side. (a) polishing first and second side surfaces of the flat panel display panel facing each other while sliding the flat panel panel in a first direction; (b) inspecting polishing conditions of the first and second side surfaces while slidingly moving the flat panel display panel in the first direction; Flat panel display panel polishing method comprising a. 15. The method of claim 14, Before the step (a), further comprising the step of inspecting the alignment of the flat panel display panel. 15. The method of claim 14, After step (b), (c) polishing the remaining third and fourth side surfaces of the flat panel display panel while sliding the flat panel display panel in a second direction; (d) inspecting polishing states of the third and fourth side surfaces by sliding the flat panel display in a second direction; Flat display panel polishing method further comprising. 17. The method of claim 16, And after the step (b) and before the step (c), inspecting the alignment of the flat panel display panel. 17. The method of claim 16, The first direction and the second direction is the same direction in a straight line, And rotating the flat panel display panel by 90 ° horizontally after step (b) and before step (c).

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