TW201827787A - Detection method and detection apparatus thereof comprising at least one driving base, a first moving module, a second moving module, a third moving module and a detection module - Google Patents

Abstract

This invention relates to a detection method and a detection apparatus thereof. The detection apparatus comprises at least one driving base, a first moving module, a second moving module, a third moving module and a detection module. The first moving module is disposed on the driving base and movable in a first axial direction. The second moving module is disposed on the first moving module and movable in a second axial direction. The third moving module is disposed on the second moving module and also movable in the first axial direction. The first axial direction and the second axial direction are perpendicular to each other. The detection module is disposed on the third mobile module. A to-be-tested object is placed under the detection apparatus, and the first moving module, the second moving module and the third moving module are simultaneously or sequentially moved according to a to-be-tested condition of the to-be-tested object, so that the detection module can perform detection.

Description

Detection method and detection device thereof

The invention relates to a detecting method and a detecting device thereof, in particular to a detecting method capable of performing multi-axial displacement and reducing the processing time and a detecting device thereof.

Flat panel displays, such as liquid crystal displays (LCDs), are smaller, lighter, consume power, and radiate than conventional non-planar displays, such as cathode ray tube (CRT) displays. The low-volume and other advantages, flat-panel displays have gradually replaced the traditional non-planar display, and become the mainstream product in the display market.

Depending on the display technology, the more common flat panel displays include a plasma display panel, a liquid crystal display panel, and an organic light emitting display panel. In order to maintain the quality of the product, the above various display panels must be tested during the process to eliminate defective products. Taking a liquid crystal display panel as an example, a glass substrate, a color filter, a thin film transistor, or other planar substrate may have defects and flaws in the process, and therefore, In the production line of the panel factory, it is necessary to test the flat substrate of the panel. In order to improve the detection efficiency and the accuracy of the test results, the industry is currently testing by means of automated testing.

Most of the aforementioned automated tests use optical sensing components and computer image processing techniques to detect defects and flaws.

The conventional automatic detection is to move the optical sensing component through the mobile device when performing the detection of the panel or the related object to be tested, and the moving device only performs the four-direction displacement, so the coverage of the displacement in the unit time is still It is so limited that it takes a considerable amount of time to complete the test.

The present invention is directed to the improvement of the disadvantages of the prior art in that the displacement axis is small, and provides a detection method and a detection device thereof, which can effectively improve the lack of the prior art and reduce the time required to complete the detection.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a detection method and detection apparatus thereof which can reduce the time required for completion of detection by a moving mechanism capable of multi-axial displacement.

The present invention provides a detection method, comprising the steps of: taking a test object under a detection device; and according to the condition to be tested, at least one first moving module, at least one second movement of the detecting device The module and the at least one third moving module are respectively displaced in a first axial direction, a second axial direction, and the first axial direction, or are sequentially displaced; and at least disposed on the third moving module A detecting module scans, takes images, and photographs the object to be tested; the first axis and the second axis are perpendicular to each other.

One embodiment of the present invention is directed to a detection apparatus having a movement mechanism that is capable of six-way displacement.

An embodiment of the present invention discloses that the object to be tested is a planar substrate.

The present invention provides a detection device including at least one driving base, at least one first moving module, at least one second moving module, at least one third moving module, and at least one detecting module. The first moving module is disposed on the driving base and is displaced by a first axial direction; the second moving module is disposed on the first moving module and is displaced by a second axial direction; The third movement module is disposed on the second movement module, and is also displaced in the first axial direction, and the first axial direction and the second axial direction are perpendicular to each other; the detection module is disposed on the second axial movement module On the third mobile module.

According to an embodiment of the present invention, the detection module includes two detection units respectively disposed on two sides of the third movement module.

An embodiment of the present invention discloses that the driving base can be a magnetic floating type, a belt type, a roller type, a ball screw type, a drum type, a chain type or a linear motor type element.

According to an embodiment of the present invention, the first mobile module has a first driving unit and a plurality of first connecting units, and the first connecting units are disposed on the first driving unit, and the second moving The module is engaged with the first connecting units.

An embodiment of the present invention is to disclose that the second mobile module has a second driving unit and a plurality of second connecting units, and the second connecting units are disposed on the second driving unit, and the third moving The module is engaged with the second connecting units. The detection module is disposed on the third mobile module.

An embodiment of the present invention discloses that the detection module has a plurality of scanning cameras.

An embodiment of the present invention discloses that the first driving unit and the second driving unit may be magnetic floating type, belt type, roller type, ball screw type, drum type, chain type or linear motor type element.

In order to provide a better understanding and understanding of the features of the present invention and the efficacies achieved, the preferred embodiments and detailed descriptions are as follows:

Please refer to the first figure, which is a flow chart of steps of an embodiment of the detection method of the present invention. As shown in the figure, the present embodiment provides a detection method, which is a multi-axial displacement, reduction process time detection method, and includes the following steps: in the first step S1, a test object 100 is placed in a Below the detection device 1. The object to be tested 100 is a planar substrate.

In the second step S3, at least one first mobile module 20, at least one second mobile module 30, and at least one third mobile module 40 of the detecting device 1 respectively according to the condition to be tested of the object to be tested 100 The first axial direction X, the second axial direction Y, and the first axial direction X are respectively displaced, and the displacement can be performed simultaneously or sequentially. The first axial direction X and the second axial direction Y are perpendicular to each other.

In the third step S5, the at least one detection module 50 disposed on the third mobile module 30 performs various detections or detections on the object 100 to be tested, such as scanning, capturing or photographing.

Please refer to FIG. 2A and FIG. 2B, which are perspective and exploded views of the first embodiment of the detecting device of the present invention. As shown in the figure, in the detection method of the present embodiment, the time required to complete the detection is reduced by the movement mechanism capable of performing the six-direction displacement.

The present embodiment is a detection device 1 including at least one driving base 10, a first moving module 20, a second moving module 30, a third moving module 40, and a detecting module 50. In this embodiment, the at least one driving base 10 is represented by two driving bases 10, and two ends of the first moving module 20 are respectively disposed on the two driving bases 10. The two driving bases 10 can be a magnetic floating type, a belt type, a roller type, a ball screw type, a drum type, a chain type or a linear motor type component, etc., and the first moving module 20 can be driven on the driving base 10. Reciprocating displacement in a direction of a first axial direction X. The present invention is not limited to the above-described driving elements, and any of the components that can be used to drive the first moving module 20 can be used for the present invention.

Furthermore, the first mobile module 20 has a first driving unit 210 and a plurality of first connecting units 220. The first connecting units 220 are disposed on the first driving unit 210, and the second moving module The group 30 is joined to the first joining units 220. The first driving unit 210 can drive the first connecting units 220 to reciprocally displace the second moving module 30 in a direction of a second axial direction Y. The second axial direction Y is perpendicular to the first axial direction X. In addition, the second mobile module 30 has a second driving unit 310 and a plurality of second connecting units 320. The second connecting units 320 are disposed on the second driving unit 310, and the third moving module is disposed. 40 is joined to the second connecting units 320. The second driving unit 310 can drive the second connecting units 320 to reciprocally displace the third moving module 40 in the direction of the first axial direction X. The detection module 50 is disposed on the third mobile module 40. The detection module 50 has a plurality of scanning cameras for detecting, and the detection content includes scanning, capturing or photographing, and the like. The first driving unit 210 may be a magnetic floating type, a belt type, a roller type, a ball screw type, a drum type, a chain type or a linear motor type component, and the first connecting units 220 are corresponding to the above components. The first connecting unit 220 can be displaced on the first driving unit 210. The combination of the second driving unit 310 and the second connecting units 320 can be the same as the combination of the first driving unit 210 and the first connecting units 220, and therefore will not be described again.

Please refer to the third and fourth figures together, which are top and bottom views of the first embodiment of the detecting device of the present invention. As shown in the figure, in the embodiment, an object to be tested 100 is placed between the two driving bases 10, and the two driving bases 10 drive the first moving module 20 to perform the first axial direction X. The displacement causes the first moving module 20 to be displaced above the object to be tested 100 (as shown in the fifth figure).

Please refer to the fifth figure, which is a use state diagram of the first embodiment of the detecting device of the present invention. As shown in the figure, the second mobile module 30 of the present embodiment carries the third mobile module 40 and the detection module 50, and is located at one end of the first mobile module 20, and is in the first movement. The module 20 is displaced by the second axial direction Y and displaced to the other end of the first moving module 20 (as shown in the sixth figure). The range of displacement of the second movement module 30 is the detection range of the second axial direction Y of the detecting device 1. When the second mobile module 30 is displaced, the detecting module 50 carried by the second mobile module 30 can simultaneously detect the object to be tested 100. In this embodiment, the second moving module 30 can perform reciprocating displacement on the first moving module 20 .

Please refer to the sixth figure, which is another use state diagram of the first embodiment of the detecting device of the present invention. As shown in the figure, the third mobile module 40 of the embodiment carries the detection module 50 and is located at one end of the second mobile module 30. The third mobile module 40 is displaced in the first axial direction X on the second mobile module 30 and is displaced to the other end of the second mobile module 30 (as shown in FIG. 7). The range of displacement of the third movement module 40 in combination with the range of displacement of the first movement module 20 is the detection range of the first axial direction X of the detecting device 1 . In the embodiment, the third moving module 40 can perform reciprocating displacement on the second moving module 30.

Please refer to the eighth figure, which is still another use state diagram of the first embodiment of the detecting device of the present invention. As shown in the figure, after the second mobile module 30 of the embodiment moves to the other end of the first mobile module 20, it is displaced to one of the original ends. The embodiment does not limit the displacement mode of the second movement module 30 relative to the first movement module 20, and the displacement mode of the third movement module 40 relative to the second movement module 30. The order and method are adjusted according to the needs of the user.

Please refer to the ninth figure, which is a schematic structural view of a second embodiment of the detecting device of the present invention. As shown in the figure, the difference between the embodiment and the first embodiment is that the second mobile module 30, the third mobile module 40, and the second detecting module 50 are provided in the embodiment, and the second Each of the mobile modules 30 carries a third mobile module 40 and a detection module 50, and the second mobile modules 30 are symmetrically disposed on the first mobile module 20 and are not associated with the driving base. The sides of the block 10 are connected. In this embodiment, the two second mobile modules 30 can be respectively displaced in an independent or simultaneous manner, so that the time required for completing the detection can be reduced.

In combination, the detecting method and the detecting device of the present invention comprise at least one driving base, at least one first moving module, at least one second moving module, at least one third moving module and at least one detecting module . The first moving module is disposed on the driving base and is displaced in a first axial direction. The second moving module is disposed on the first moving module and is displaced in a second axial direction. The third movement module is disposed on the second movement module and is also displaced in the first axial direction, and the first axial direction and the second axial direction are perpendicular to each other. The detection module is disposed on the third mobile module. Taking the object to be tested and placing it under the detecting device, the first moving module, the second moving module, and the third moving module of the detecting device are respectively the first according to the condition to be tested The axial direction, the second axial direction, and the first axial direction are simultaneously displaced, or sequentially displaced, and the detecting module disposed on the third moving module scans, images, and Shooting. Further, the first axial direction and the second axial direction are perpendicular to each other.

It can be seen from the above that the present invention is indeed an invention with novelty, progressiveness and industrial applicability, and should conform to the requirements of the patent application for patent law, undoubtedly file an invention patent application according to law, and invites the bureau to grant a legal patent right. German sense.

The above is only the embodiment of the present invention, and is not intended to limit the scope of the present invention, and the variations, modifications, and modifications of the shapes, structures, features, and spirits described in the claims of the present invention are It should be included in the scope of the patent application of the present invention.

1‧‧‧Detection device

10‧‧‧Drive base

100‧‧‧Test object

20‧‧‧First mobile module

210‧‧‧First drive unit

220‧‧‧First Link Unit

30‧‧‧Second mobile module

310‧‧‧Second drive unit

320‧‧‧Second link unit

40‧‧‧ third mobile module

50‧‧‧Test module

X‧‧‧ first axial

Y‧‧‧ second axial

1 is a flow chart showing the steps of an embodiment of the detection method of the present invention; FIG. 2A is a perspective view showing the structure of the first embodiment of the detecting device of the present invention; A structural exploded view of a first embodiment of the detecting device; a third view: a top view of the first embodiment of the detecting device of the present invention; and a fourth view: a bottom view of the first embodiment of the detecting device of the present invention Figure 5 is a view showing a state of use of the first embodiment of the detecting device of the present invention; Figure 6 is a view showing another state of use of the first embodiment of the detecting device of the present invention; It is a further use state diagram of the first embodiment of the detecting device of the present invention; FIG. 8 is another use state diagram of the first embodiment of the detecting device of the present invention; and a ninth drawing: A schematic structural view of a second embodiment of the detecting device of the invention.

Claims (10)

a detecting method, the method comprising: taking a test object under a detecting device; and according to the condition to be tested, at least one first moving module, at least one second moving module, at least a third moving module is simultaneously displaced in a first axial direction, a second axial direction, and the first axial direction, or sequentially displaced, wherein the first axial direction and the second axial direction are perpendicular to each other; The at least one detecting module disposed on the third mobile module detects the object to be tested. The detection method according to the first aspect of the patent application, in the step of detecting the object to be tested, the detection content includes scanning, image capturing or photographing. The detection method of claim 1, wherein the object to be tested is a planar substrate. A detecting device comprising: at least one driving base; at least one first moving module disposed on the driving base and displaced in a first axial direction; at least one second moving module disposed Disposed on the first moving module and in a second axial direction; at least one third moving module is disposed on the second moving module, and is also displaced in the first axial direction, and The first axial direction and the second axial direction are perpendicular to each other; and at least one detecting module is disposed on the third moving module. The detecting device of claim 4, wherein the detecting module comprises two detecting units respectively disposed on two sides of the third moving module. The detecting device of claim 4, wherein the driving base is a magnetic floating type, a belt type, a roller type, a ball screw type, a drum type, a chain type or a linear motor type element. The detecting device of claim 4, wherein the first moving module has a first driving unit and a plurality of first connecting units, and the first connecting units are disposed on the first driving unit. The second moving module is engaged with the first connecting units. The detecting device of claim 4, wherein the second moving module has a second driving unit and a plurality of second connecting units, and the second connecting units are disposed on the second driving unit. The third moving module is engaged with the second connecting units. The detecting device of claim 4, wherein the detecting module has a plurality of scanning cameras. The detecting device of claim 7 or 8, wherein the first driving unit and the second driving unit are magnetic floating type, belt type, roller type, ball screw type, drum type, chain type or Linear motor type components.