JP3592831B2 - Probe unit and adjustment method thereof - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a probe unit for inspecting a substrate to be measured by bringing a contact into contact with a large number of electrodes arranged around a rectangular substrate to be measured.
[0002]
[Prior art]
In a liquid crystal prober, a unit in which a contact (a probe needle or the like) is positioned and fixed so that the contact (a probe needle or the like) contacts all electrodes (TAB pads) of a liquid crystal display panel substrate (hereinafter, referred to as a liquid crystal substrate) is called a probe unit. In. Thus, the probe unit is distinguished from the probe card used in the wafer prober.
[0003]
FIG. 5 is a plan view of a conventional probe unit for inspecting a rectangular liquid crystal substrate, and FIG. 6 is a side sectional view thereof (a sectional view taken along line 6-6 in FIG. 5). A plurality of probe blocks 12 are accurately positioned and fixed to the rectangular frame-shaped probe base 10 with screws or the like. Many probe needles for contacting the electrodes (TAB pads) of the liquid crystal substrate 18 are grouped in TAB units, and each group is attached to one probe block 12. One end of a flexible wiring board 14 is connected to the rear end of the probe block 12, and a connector 16 is connected to the other end of the flexible wiring board 14. This connector 16 is connected to a tester. The probe block 12 may be provided with a position adjusting mechanism for finely adjusting the mounting position of the probe needle with respect to the probe block.
[0004]
FIG. 7 is an example of a wiring diagram formed on a liquid crystal substrate. This figure shows a wiring state of a quarter region between the center lines 30 and 32 of the liquid crystal substrate. The data lines 20 extending in the vertical direction have TAB pads 22 for signal input alternately at both ends. These pads 22 are grouped in TAB units and are grouped so as to match the pitch of the TAB wiring pattern. The area 24 in which the pads 22 are aggregated in this manner is hereinafter referred to as a pad area. The gate line 26 extending in the lateral direction has a pad region 28 at one of the left and right ends (the left end in FIG. 7).
[0005]
The dimension of the pad region 24 of the data line 20 in the pad arrangement direction is Wx, and the interval between adjacent pad regions 24 is X1. The dimension of the pad region 28 of the gate line 26 in the pad arrangement direction is Wy, and the interval between adjacent pad regions 26 is Y1.
[0006]
FIG. 8 is a plan view showing an example of the arrangement of pad regions on the liquid crystal substrate. In the liquid crystal substrate 18, four data line pad regions 24 are arranged on each side along two opposing X sides 34 (sides extending in the X direction). Further, three pad regions 26 of the gate line are arranged along one Y side 36 (side extending in the Y direction). The center distance (that is, the pitch) between the centers of the pad regions 24 on the X side 34 is Px, and the center distance between the pad regions 28 on the Y side 36 is Py.
[0007]
FIG. 9 is a plan view showing a difference in the position of a pad region due to a difference in size of a liquid crystal substrate of the same type (for example, an SVGA type). In the same type of liquid crystal substrate, even if the size is different, the size of the pad region is the same because TABs having the same wiring pitch are used. However, the intervals between adjacent pad regions are different. That is, on the X side, the interval between adjacent pad areas 24 is X1 in the 10-inch liquid crystal substrate 18a, but spreads to X2 in the 11-inch liquid crystal substrate 18b, and further spreads to X3 in the 12-inch liquid crystal substrate 18c. Therefore, the center-to-center distance (pitch) of the pad region 24 also differs depending on the size of the liquid crystal substrate. Similarly, on the Y side, the interval between the adjacent pad regions 28 is Y1 in the 10-inch liquid crystal substrate 18a, but spreads to Y2 in the 11-inch liquid crystal substrate 18b, and further spreads to Y3 in the 12-inch liquid crystal substrate 18c. . The TAB used differs depending on the substrate maker.
[0008]
[Problems to be solved by the invention]
As shown in FIG. 9, if the size of the liquid crystal substrate is different, the position of the pad region is different. Therefore, the conventional probe unit shown in FIG. 5 is made as a separate probe unit for each size of the liquid crystal substrate. That is, even for a liquid crystal substrate of the same type (for example, SVGA type), it is necessary to prepare a probe unit for each substrate size such as for a 10-inch substrate, an 11-inch substrate, a 12-inch substrate, and the like. In order to change the size of the liquid crystal substrate to be inspected, it is necessary to replace the probe unit in the liquid crystal prober. Since this probe unit is very large as compared with a probe card for a wafer, the replacement operation is a two-person operation and takes time. Further, there is a possibility that the probe unit may be damaged due to an accident during the operation.
[0009]
By the way, as the types of liquid crystal probers, there are an array prober for inspecting electrical characteristics of circuit elements such as transistors formed on a glass substrate, and a lighting inspection prober for performing a lighting inspection as a final inspection of the liquid crystal substrate. Each requires a dedicated probe unit. The reason is that, even if the contact position of the probe needle is the same, the configuration of the probe unit (such as the presence or absence of TAB / IC) differs due to the difference of the tester. After all, the probe units for inspecting the liquid crystal substrate include dedicated probe units according to (a) the type of the liquid crystal substrate, (b) the size of the liquid crystal substrate, and (c) the distinction between the array prober and the lighting inspection prober. Is required. For example, if there are two types of liquid crystal substrates and three types of sizes, a total of six types of probe units are required. If two types of array units are used, one for array prober and the other for lighting inspection, a total of 12 units is required. Different types of probe units are required. Actually, another probe unit is prepared for each probe unit, so that 24 probe units are prepared.
[0010]
As described above, in the conventional probe unit, the probe units are prepared for each substrate size. Therefore, (1) the number of probe units increases and the cost increases, and (2) many unused probe units are safely stored. (3) It is necessary to replace the probe unit when the size is changed.
[0011]
SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problem, and an object of the present invention is to enable a common probe unit to cope with different sizes of substrates to be measured.
[0012]
[Means for Solving the Problems]
The probe unit according to the present invention is a probe unit for inspecting a substrate to be measured by bringing a contact into contact with a large number of electrodes arranged around a rectangular substrate to be measured. Is provided. (A) A frame-shaped probe base having an X side extending in the X direction and a Y side extending in the Y direction perpendicular to the X direction. (B) a first movable base mounted so as to be position-adjustable in the Y direction on the X side of the probe base; (C) a second movable base mounted so as to be position-adjustable in the X direction on the Y side of the probe base. (D) A plurality of probe blocks provided with the contacts so as to be adjustable in the X direction with respect to the first movable base.
(E) a plurality of probe blocks which are attached to the second movable base so as to be position-adjustable in the Y direction and include the contacts.
[0013]
The method for adjusting a probe unit according to the present invention includes the following method in the method for adjusting a probe unit for inspecting a substrate to be measured by bringing a contact into contact with a number of electrodes arranged around a rectangular substrate to be measured. Steps a) to d) are provided. (A) adjusting the position of the first movable base in the Y direction perpendicular to the X direction on the X side of the frame-shaped probe base extending in the X direction; (B) adjusting the position of the second movable base in the X direction on the Y side of the probe base extending in the Y direction; (C) adjusting the positions of the plurality of probe blocks including the contacts in the X direction with respect to the first movable base. (D) adjusting the positions of the plurality of probe blocks including the contacts in the Y direction with respect to the second movable base.
[0014]
According to the present invention, the positions of the plurality of probe blocks can be adjusted according to the size of the substrate to be measured, so that a common probe unit can be used for at least two types of substrate sizes. Therefore, when changing the size of the substrate to be measured, the replacement work of the probe unit becomes unnecessary, and the adjustment work of the probe unit accompanying the change of the board size is completed by one operator in a short time. Also, there is no need to prepare or store a probe unit for each substrate size. In addition, taking a liquid crystal substrate as an example of a substrate to be measured, even if the probe unit of the present invention is used, a separate probe unit is required if the type of the liquid crystal substrate is different, and an array prober and a lighting inspection prober are required. On the other hand, a dedicated probe unit is still required. Nevertheless, for example, by using a common probe unit for three types of substrate sizes, the required number of probe units is reduced to one third as compared with a probe unit having a conventional structure.
[0015]
The substrate to be measured to which the present invention is applied is rectangular and has a large number of electrodes arranged in a peripheral portion. Typically, a substrate of a flat display panel such as a liquid crystal display panel or a plasma display panel is used. Applicable. Furthermore, the present invention can be applied to those in which the dimensions of the pad regions divided for each TAB are common in the peripheral portions of these substrates even if the substrate sizes are different.
[0016]
The form of the contact attached to the probe block is not particularly limited, but a cantilevered probe needle, a bump electrode formed on a wiring pattern, or the like can be used.
[0017]
The frame-shaped probe base has four sides, and the side on which the probe block is arranged depends on the arrangement of the pad area on the substrate to be measured. For example, if pad areas are arranged on two X sides and one Y side on the substrate to be measured, the probe blocks are arranged on three sides of the probe base correspondingly. Since a rectangular substrate to be measured is generally formed with wirings vertically and horizontally, pad regions on the substrate exist on at least one X side and one Y side. Therefore, in the present invention, the probe blocks are arranged on at least one X side and at least one Y side of the probe unit.
[0018]
In the present invention, since the position of the probe block is adjusted to correspond to different substrate sizes, the positioning accuracy of the probe block affects the positioning accuracy of the probe needle and the electrode of the substrate to be measured. come. Therefore, if a probe needle position adjusting mechanism is provided for each probe block, the positioning accuracy of the probe needles and the electrodes of the substrate to be measured can be ensured even if the positioning accuracy of the probe block itself is not so high. As a mechanism for adjusting the position of the probe needle which can be provided in the probe block, there is one disclosed in Japanese Patent Application Laid-Open No. 3-218472.
[0019]
BEST MODE FOR CARRYING OUT THE INVENTION
FIG. 1 is a plan view showing one embodiment of the probe unit of the present invention. FIG. 2A is a side sectional view thereof (a sectional view taken along line 2-2 in FIG. 1), and FIG. 3 is a front view thereof. In FIG. 1, a pair of first stationary guides 44 are provided on one X side (side extending in the X direction) 42 of the rectangular frame-shaped probe base 40, and the first stationary guides 44 are arranged in the Y direction. Extends. The X direction and the Y direction are perpendicular to each other. A first movable guide 46 extending in the X direction is slidably engaged with the first stationary guide 44. As shown in FIG. 3, the first movable guide 46 is formed with a groove that engages with the first stationary guide 44 having a rectangular cross section. Along the Y direction. Returning to FIG. 1, the first movable guide 46 has a first guide groove 48 extending in the X direction. Four probe blocks 50 are slidably engaged with the first guide groove 48, and the probe block 50 can move in the X direction along the first guide groove 48. As shown in FIG. 2A, the first guide groove 48 has a dovetail shape, and a protruding portion having a cross-sectional shape adapted to the dovetail groove is formed on the probe block 50. .
[0020]
The other X side 43 of the probe base is also provided with a pair of first stationary guides 44, one first movable guide 46, and four probe blocks 50, similarly to the X side 42 described above. ing. In the illustration of the X side 43, the probe block 50 is shown by a dashed line.
[0021]
One Y side (side extending in the Y direction) 52 of the probe base 40 is provided with a pair of second stationary guides 54, and the second stationary guides 54 extend in the X direction. A second movable guide 56 extending in the Y direction is slidably engaged with the second stationary guide 54, and the second movable guide 56 can move in the X direction along the second stationary guide 54. The second movable guide 56 has a second guide groove 58 extending in the Y direction. Three probe blocks 50 are slidably engaged with the second guide groove 58, and the probe block 50 can move in the Y direction along the second guide groove 58.
[0022]
A large number of probe needles 51 (see FIG. 2A) are attached to each probe block 50 attached to two X sides 42 and 43 and one Y side 52. It has the same arrangement pitch as the electrodes in the pad area of the substrate. These probe needles are grouped in TAB units, and each group is attached to one probe block 50. One end of a flexible wiring board 60 is connected to the rear end of the probe block 50, and a connector 62 is connected to the other end of the flexible wiring board 60. This connector 62 is connected to a tester. The probe block 50 may be provided with a position adjustment mechanism for finely adjusting the tip position of the probe needle with respect to the probe block.
[0023]
The first movable guide 46 and the second movable guide 56 are positioned at predetermined positions (along the first stationary guide 44 or the second stationary guide 54) according to the size of the liquid crystal substrate by using a positioning mechanism such as a positioning pin or a plunger. (A predetermined position), and can be fixed on the first stationary guide 44 or the second stationary guide 54 using a fixing mechanism such as a screw or a clamp. The probe block 50 is also positioned at a predetermined position (a predetermined position along the first guide groove 48 or the second guide groove 58) according to the size of the liquid crystal substrate using a positioning mechanism such as a positioning pin or a plunger. And can be fixed to the first movable guide 46 or the second movable guide 56 using a fixing mechanism such as a screw or a clamp.
[0024]
Next, a procedure for inspecting liquid crystal substrates having different sizes using this probe unit will be described. The state shown in FIG. 1 is a state of the probe unit when measuring a 10-inch liquid crystal substrate. The positions of the probe needles of each probe block 50 correspond to the pad area 24 of the 10-inch liquid crystal substrate 18a in FIG. From this state, the following procedure is used to adjust the probe unit so that an 11 inch or 12 inch liquid crystal substrate can be inspected. First, the first movable guide 46 and the second movable guide 56 are released from the fixed state, and then moved along the first stationary guide 44 or the second stationary guide 54 to correspond to the 11-inch or 12-inch liquid crystal substrate. To the specified position and fix it using the fixing mechanism. Thereby, the first movable guide 46 and the second movable guide 56 spread to fit a larger substrate size. Next, after releasing the fixation of each probe block 50, the probe block 50 is moved along the first guide groove 48 or the second guide groove 58 to move to a position corresponding to the 11-inch or 12-inch liquid crystal substrate, Fix using the fixing mechanism. Thus, the positions of the probe needles of each probe block 50 correspond to the pad area 24 of the 11-inch liquid crystal substrate 18b or the 12-inch liquid crystal substrate 18c in FIG. Further, if the probe block 50 is provided with a mechanism for adjusting the position of the probe needle, subsequently, the positioning of the probe needle and the electrode of the liquid crystal substrate is performed.
[0025]
For a liquid crystal substrate of the same type (for example, SVGA type), even if the size is different, since the individual pad areas divided for each TAB have the same dimensions, the position of each probe block is determined according to the size of the liquid crystal substrate (ie, If the adjustment is made (according to the arrangement position of the pad area), it is possible to cope with the common probe unit like the present invention.
[0026]
FIG. 4 is a plan view after adjusting the probe unit of FIG. 1 so as to correspond to a 12-inch liquid crystal substrate, and FIG. 2B is a side sectional view thereof. Compared to FIG. 1 or FIG. 2A, it can be clearly seen that the distance between the probe blocks 50 is widened.
[0027]
In the above description of the embodiment, three examples of the liquid crystal substrate of 10 inches, 11 inches, and 12 inches have been described, but the substrate size is not limited thereto. Further, the present invention can be applied to a substrate to be measured other than the liquid crystal substrate.
[0028]
In the above-described embodiment, the movable mechanism between the stationary guide and the movable guide and the movable mechanism between the movable guide and the probe block are both sliding mechanisms using grooves. It does not matter. For example, it is also possible to provide an elongated hole on the side of the probe block only to cover the moving range of the probe block, pass a screw through the elongated hole, and fix the probe block to the movable guide with the screw.
[0029]
【The invention's effect】
According to the present invention, the positions of the plurality of probe blocks can be adjusted in accordance with the size of the substrate to be measured. Therefore, when the size of the substrate to be measured is changed, there is no need to replace the probe unit. Therefore, the operation of adjusting the probe unit according to the change in the substrate size is completed in a short time by one operator. Also, there is no need to prepare or store a probe unit for each substrate size.
[Brief description of the drawings]
FIG. 1 is a plan view showing one embodiment of a probe unit of the present invention.
FIG. 2 is a sectional view taken along line 2-2 of FIG.
FIG. 3 is a front view of the probe unit of FIG. 1;
FIG. 4 is a plan view showing another state of the probe unit of FIG. 1;
FIG. 5 is a plan view of a conventional probe unit.
FIG. 6 is a sectional view taken along line 6-6 in FIG. 5;
FIG. 7 is an example of a wiring diagram formed on a liquid crystal substrate.
FIG. 8 is a plan view showing an example of the arrangement of pad regions on a liquid crystal substrate.
FIG. 9 is a plan view showing a difference in the position of a pad region due to a difference in the size of the liquid crystal substrate.
[Explanation of symbols]
40 Probe bases 42, 43 X side 44 First stationary guide 46 First movable guide 48 First guide groove 50 Probe block 52 Y side 54 Second stationary guide 56 Second movable guide 58 Second guide groove

Claims (3)

A probe unit for inspecting a substrate to be measured by bringing a contact into contact with a large number of electrodes arranged around a rectangular substrate to be measured, the probe unit having the following configuration.
(A) A frame-shaped probe base having an X side extending in the X direction and a Y side extending in the Y direction perpendicular to the X direction.
(B) a first movable base mounted so as to be position-adjustable in the Y direction on the X side of the probe base;
(C) a second movable base mounted so as to be position-adjustable in the X direction on the Y side of the probe base.
(D) A plurality of probe blocks provided with the contacts so as to be adjustable in the X direction with respect to the first movable base.
(E) a plurality of probe blocks which are attached to the second movable base so as to be position-adjustable in the Y direction and include the contacts. A method of adjusting a probe unit for inspecting a substrate to be measured by bringing a contact into contact with a plurality of electrodes arranged around a rectangular substrate to be measured, comprising the following steps.
(A) adjusting the position of the first movable base in the Y direction perpendicular to the X direction on the X side extending in the X direction of the frame-shaped probe base;
(B) adjusting the position of the second movable base in the X direction on the Y side of the probe base extending in the Y direction;
(C) adjusting the positions of the plurality of probe blocks including the contacts in the X direction with respect to the first movable base.
(D) adjusting the positions of the plurality of probe blocks including the contacts in the Y direction with respect to the second movable base. 3. The adjusting method according to claim 2, wherein an interval between the probe blocks on the X side and an interval between the probe blocks on the Y side are adjusted according to the size of the substrate to be measured.

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