JP4625826B2 - Probe unit - Google Patents

Description

  The present invention relates to a probe unit used when, for example, inspecting a liquid crystal display panel, and more particularly to a structure for bringing probe needles supported by a plurality of probe blocks into contact with electrodes of a liquid crystal display panel with high accuracy.

  For example, in the manufacturing process of a liquid crystal display panel, the liquid crystal display panel is turned on before shipping to check whether the liquid crystal display panel is operating normally. In this inspection, a probe unit having a plurality of probe needles is used.

  The probe unit includes a frame having a size corresponding to the liquid crystal display panel to be inspected, and a probe block supported by the frame. The probe block has a plate shape with a length corresponding to one side of the liquid crystal display panel, and a plurality of probe needles that are in contact with the electrodes of the liquid crystal display panel are supported on the lower surface of the probe block. The probe needles are arranged so as to correspond to the pitch of the electrodes.

  In this probe unit, the probe needle is brought into contact with all the electrodes of the liquid crystal display panel in a state where the liquid crystal display panel to be inspected and the frame are aligned, and an electric signal is applied to the liquid crystal display panel to inspect the panel. ing. However, as the liquid crystal display panel becomes larger, the probe block becomes longer and the number of probe needles held by one probe block increases.

  In particular, since recent liquid crystal display panels have been improved in definition, it is inevitable that the number of probe needles will increase and the pitch of probe needles will become increasingly narrower. Therefore, it becomes difficult to accurately arrange the probe needles whose pitches have been reduced over the entire length of the probe block.

  For this reason, conventionally, as disclosed in Patent Document 1, for example, a probe unit in which a probe block is configured by a plurality of block elements arranged in a line along the arrangement direction of electrodes is known.

According to this configuration, the number of probe needles held by each block element can be reduced. Therefore, it is possible to easily cope with the narrowing of the probe needle pitch and the increase in size and definition of the liquid crystal display panel.
JP-A-8-201430

  According to the probe unit disclosed in Patent Document 1, since the probe block is divided into a plurality of block elements, the alignment between the probe needle and the electrode of the liquid crystal display panel must be executed for each block element.

  For this reason, the work of adjusting the position of each block element attached to the frame is essential, and in comparison with the case where there is one probe block, there is a problem that adjustment work of each block element requires a lot of labor and labor. is there.

  An object of the present invention is to obtain a probe unit that can easily and accurately adjust the position of each probe block attached to a frame and has excellent workability.

In order to achieve the above object, a probe unit according to one aspect of the present invention comprises:
A probe unit for inspecting a display panel having a plurality of electrodes arranged at intervals on the outer periphery,
A frame provided along the outer periphery of the display panel;
A plurality of pivot shafts protruding from the support surface of the frame;
A guide hole is provided at the center of the base end opposite to the electrode, and the guide hole and each of the pivot shafts are slidably fitted so that the pivot shaft can be used as a fulcrum. And a plurality of probe blocks having a plurality of probe needles that are arranged along the alignment direction of the electrodes of the display panel and that are in contact with the electrodes;
A plurality of fixing members for fixing the respective probe blocks individually to the frame,
Provided in the frame, anda plurality of adjusting mechanisms for adjusting individually the orientation of the respective probe blocks relative to the frame,
Each adjusting mechanism includes a pair of adjustment members corresponding to each said probe block, these adjustment bodies, while being rotatably supported by the frame, turning the respective probe blocks a fulcrum the pivot shaft And the cam surface of the adjusting body is in contact with each probe block at a position distributed to both sides across the pivot shaft.

  According to the present invention, the plurality of probe blocks individually rotate around the pivot shaft according to the shape of the cam surface, so that the probe needle and the electrode of the display panel are easily aligned for each probe block. be able to.

  In addition, since each probe block and the cam surface are in contact with each other on both sides of the pivot shaft, the probe block whose alignment has been completed does not move freely. For this reason, the orientation of each probe block is determined by fixing the probe block whose alignment has been completed to the frame via the fixing member.

  Therefore, the orientation of the individual probe blocks attached to the frame can be adjusted easily and accurately, and the workability can be maintained well while the probe unit has a plurality of probe blocks independent from each other. it can.

  Hereinafter, a first embodiment of the present invention will be described with reference to FIGS.

  FIG. 1 discloses an inspection apparatus 1 that is used, for example, when performing a lighting inspection of a liquid crystal display panel. The inspection apparatus 1 includes a pedestal 2 and an apparatus main body 3 installed on the pedestal 2.

  The apparatus main body 3 has a front surface 3a. The front surface 3a is inclined so as to fall backward as it advances upward of the apparatus body 3. A pallet 4 is installed at the center of the front surface 3a.

  The pallet 4 is for detachably holding the liquid crystal display panel 5 to be inspected, and has a rectangular frame shape having a size corresponding to the liquid crystal display panel 5. The pallet 4 is supported by the front surface 3 a so as to be movable in the Z-axis direction along the thickness direction of the liquid crystal display panel 5.

  Further, the pallet 4 is supported on the front surface 3a so as to be movable in the X-axis direction and the Y-axis direction via a table (not shown), and is supported on the front surface 3a so as to be rotatable in the θ direction. The X axis and the Y axis are orthogonal to each other on the same plane as the liquid crystal display panel 5. The θ direction coincides with the direction around the Z axis.

  The liquid crystal display panel 5 is an example of a flat display panel, and includes first and second glass substrates 5a and 5b stacked on each other. The first glass substrate 5a has a first side 6a and a second side 6b which are adjacent to each other so as to be orthogonal to each other, and the first and second sides 6a and 6b are outside the second glass substrate 5b. Protruding.

  As shown in FIGS. 1, 5 and 6, a large number of electrodes 8 are formed on the outer peripheral portion 7 corresponding to the first and second sides 6a and 6b in the first glass substrate 5a. The electrodes 8 are arranged in a line at a predetermined pitch P. The pitch P between the adjacent electrodes 8 becomes narrower as the liquid crystal display panel 5 becomes higher in definition. Furthermore, for example, cross-shaped alignment marks 9a and 9b are formed on the first glass substrate 5a. The alignment marks 9 a and 9 b are located at adjacent corners of the first glass substrate 5 a so as to be separated from each other in the width direction of the liquid crystal display panel 5.

  As shown in FIG. 1, the probe unit 11 is removably supported on the front surface 3 a of the apparatus body 3. The probe unit 11 is disposed so as to face the outer peripheral portion 7 of the liquid crystal display panel 5 held on the pallet 4.

  As best shown in FIG. 2, the probe unit 11 includes a frame 12 and a plurality of probe blocks 13. The frame 12 has a rectangular frame shape with a size corresponding to the liquid crystal display panel 5 to be inspected.

  The frame 12 has a pair of vertical rail portions 14a and 14b and a pair of horizontal rail portions 15a and 15b. One vertical crosspiece 14a is along the first side 6a of the first glass substrate 5a, and one horizontal crosspiece 15a is along the second side 6b of the first glass substrate 5a. The vertical beam portions 14a and 14b and the horizontal beam portions 15a and 15b form a window 16 that surrounds the liquid crystal display panel 5 and cooperates with each other to expose the liquid crystal display panel 5.

  The probe block 13 is supported by one vertical rail portion 14a and one horizontal rail portion 15a, respectively. Since the support structure of the probe block 13 with respect to the vertical beam portion 14a and the horizontal beam portion 15a is common to each other, one vertical beam portion 14a will be described as a representative.

  As shown in FIGS. 3 to 5, one vertical rail portion 14 a includes a block support portion 17 that projects to the inside of the window 16. The block support portion 17 extends along the first side 6 a of the first glass substrate 5 a and has a flat support surface 18.

  Each probe block 13 is made of, for example, ceramic and has a square plate shape in plan view. The probe blocks 13 are placed on the support surface 18 and are arranged in a line at intervals in the arrangement direction of the electrodes 8. Each probe block 13 has a tip 19 projecting from the support surface 18 to the inside of the window 16. The tip 19 of each probe block 13 faces the electrode 8 of the liquid crystal display panel 5 placed on the pallet 4.

  A plurality of probe needles 20 are supported on the lower surface of the tip 19 of each probe block 13. The probe needles 20 are arranged, for example, in a staggered manner so as to correspond to the pitch P of the electrodes 8, for example, and project from the lower surface of the distal end portion 19 toward the electrodes 8.

  As shown in FIGS. 4 and 8, each probe block 13 has a guide hole 22 in the base end portion 21 on the side opposite to the tip end portion 19. The guide hole 22 is located at the center along the arrangement direction of the probe blocks 13, and a pivot shaft 23 protruding from the support surface 18 is slidably fitted into the guide hole 22. By this fitting, each probe block 13 can be rotated about the pivot shaft 23 as a fulcrum.

  Each probe block 13 is fixed to the support surface 18 of the block support portion 17 via a pair of fixing screws 24. The fixing screw 24 is an example of a fixing member, and penetrates the probe block 13 on both sides of the pivot shaft 23 therebetween, and is screwed into a pair of screw holes 25 formed in the block support portion 17. Each probe block 13 has a through hole 26 through which the fixing screw 24 passes. A slight play g (see FIG. 7) is formed between the inner surface of the through hole 26 and the outer surface of the fixing screw 24 to enable the position adjustment of the probe block 13.

  As shown in FIGS. 2 to 5, the frame 12 of the probe unit 11 is equipped with an adjustment mechanism 30 for finely adjusting the direction of each probe block 13. The adjustment mechanism 30 has a pair of adjustment bodies 31 for each probe block 13. The adjusting body 31 is arranged adjacent to the base end portion 21 of each probe block 13 and distributed on both sides of the pivot shaft 23 so as to sandwich the pivot shaft 23 serving as the rotation center of each probe block 13. Yes.

  The adjusting body 31 includes a support shaft 32 and an outer cylinder 33, respectively. The support shaft 32 has one end where the first screw portion 34 is formed and the other end where the second screw portion 35 is formed. The first screw portion 34 is detachably screwed into a screw hole 36 provided in the block support portion 17. By this screwing, the support shaft 32 protrudes vertically from the support surface 18 of the block support portion 17.

  Further, the support shaft 32 has a small-diameter portion 37 that protrudes coaxially from the tip of the second screw portion 35. A slit 37a for hooking a tool such as a driver is formed at the protruding end of the small diameter portion 37, for example.

  The outer cylinder 33 has a cylindrical shape that covers the support shaft 32 coaxially. The inner surface of the outer cylinder 33 is screwed into the second screw portion 35. Therefore, when the outer cylinder 33 is rotated, the screwing amount of the outer cylinder 33 with respect to the second screw portion 35 changes, and the outer cylinder 33 moves, for example, several microns along the axial direction of the support shaft 32. The small diameter portion 37 of the support shaft 32 passes through the upper end of the outer cylinder 33 and is exposed to the outside of the outer cylinder 33.

  As shown in FIGS. 5 and 7, a cam surface 39 is formed at the lower portion of the outer peripheral surface of the outer cylinder 33. The cam surface 39 is continuous in the circumferential direction of the outer cylinder 33, and has a taper shape such that the diameter gradually decreases as it proceeds toward the lower end of the outer cylinder 33. The cam surface 39 faces the base end portion 21 of the probe block 13 and is in contact with a corner portion 40 formed in the base end portion 21 and sharpened in an edge shape.

  For this reason, when the outer cylinder 33 of the adjustment body 31 is rotated with the fixing screw 24 loosened, the outer cylinder 33 moves in the axial direction of the support shaft 32, and the cam surface 39 faces the corner portion 40 of the probe block 13. Displaces. Therefore, the probe block 13 rotates about the pivot shaft 23, and the positional relationship between the probe needle 20 and the electrode 8 changes.

  As shown in FIG. 3, an engagement groove 41 along the radial direction is formed at the upper end of the outer cylinder 33. The engaging groove 41 is detachably hooked on the adjusting jig 42 when the adjusting jig 42 shown in FIG. Therefore, the outer cylinder 33 is rotated around the axis by the adjustment jig 42.

  As shown in FIGS. 1 and 2, a pair of alignment cameras 44 a and 44 b are attached to the frame 12 of the probe unit 11. The alignment cameras 44 a and 44 b are for recognizing the alignment marks 9 a and 9 b on the second glass substrate 5 b of the liquid crystal display panel 5.

  Images taken by the alignment cameras 44a and 44b are taken into a control unit (not shown) as image information. Based on the image information sent from the alignment cameras 44a and 44b, the control unit determines whether or not the alignment marks 9a and 9b are located in a predetermined region within the visual field of the alignment cameras 44a and 44b. When the alignment marks 9a and 9b are out of the predetermined area, the control unit moves the table supporting the pallet 4 in the X-axis and Y-axis directions and rotates in the θ direction based on the image information. Thereby, alignment with the probe unit 11 and the liquid crystal display panel 5 is performed.

  Images taken by the alignment cameras 44 a and 44 b are displayed on a pair of monitors 45 a and 45 b installed on the upper part of the apparatus body 3. Therefore, the operator can recognize the positional relationship between the probe unit 11 and the liquid crystal display panel 5 based on the images displayed on the monitors 45a and 45b. Furthermore, a pair of operation panels 46a and 46b for operating the control unit, for example, are disposed around the front surface 3a of the apparatus body 3.

  In the probe unit 11 having such a configuration, the alignment of the probe unit 11 and the liquid crystal display panel 5 by the alignment cameras 44a and 44b of the plurality of probe blocks 13 screwed to the block support portion 17 of the frame 12 is completed. In this state, the direction is finely adjusted so that the probe needles 20 are aligned with the electrodes 8 individually. This adjustment operation is executed as follows.

  First, the fixing screw 24 is loosened to release the clamp of the probe block 13 from the block support portion 17. In this state, the outer cylinder 33 of the adjustment body 31 is rotated in the circumferential direction using the adjustment jig 42. By this rotation, the cam surface 39 of the outer cylinder 33 is displaced by several microns in the axial direction of the support shaft 32. As a result, the positional relationship between the cam surface 39 and the corner 40 of the probe block 13 changes relatively, and the probe block 13 moves the pivot shaft 23 so that the probe needle 20 protruding from the probe block 13 faces the electrode 8. Rotate to the center. The operation of rotating the probe block 13 is performed manually by the operator based on an image displayed on a monitor (not shown).

  When the fine adjustment of the orientation of the probe block 13 is completed and the probe needle 20 and the electrode 8 are held in a proper positional relationship, the fixing screw 24 is tightened to fix the probe block 13 to the support surface 18 of the block support portion 17. Secure on top. Thereby, one probe block 13 is fixed to the frame 12 in a normal orientation.

  By performing such an adjustment operation for every probe lock 13, all the probe needles 20 of the probe unit 11 are aligned with the electrodes 8 of the liquid crystal display panel 5, and the probe unit 11 is aligned with the liquid crystal display panel 5. Is completed.

  Finally, the adjustment body 31 is removed from the block support portion 17. In this removal operation, a tool such as a screwdriver is hooked on the slot 37 a at the upper end of the support shaft 32 to rotate the support shaft 32. Thereby, the screwing of the first screw portion 34 into the screw hole 36 is released, and the adjustment body 31 can be removed from the block support portion 17.

  According to the first embodiment of the present invention as described above, the plurality of probe blocks 13 individually rotate around the pivot shaft 23 in accordance with the shape of the cam surface 39, so that each probe block 13 has a probe. The alignment between the needle 20 and the electrode 8 of the liquid crystal display panel 5 can be easily performed.

  In addition, the base end portion 21 of the probe block 13 is in contact with the cam surface 39 of the adjustment body 31 on both sides of the pivot shaft 23 serving as the rotation center of the probe block 13. Therefore, even if the tightening of the probe block 13 by the fixing screw 24 is released, the probe block 13 does not move freely. Therefore, by tightening the fixing screw 24, the orientation of each probe block 13 can be accurately determined so that all the probe needles 20 face the electrode 8.

  Therefore, the orientation of the plurality of probe blocks 13 attached to the block support portion 17 of the frame 12 can be adjusted easily and accurately, and the probe unit 11 has a plurality of probe blocks 13 independent from each other. The workability can be maintained well.

  Further, once each probe block 13 is adjusted and fixed in the above manner, the above adjustment is unnecessary from the next panel inspection, and a stable and accurate inspection can be performed.

  The present invention is not limited to the first embodiment described above, and can be implemented with various modifications without departing from the spirit of the invention.

  For example, FIG. 9 discloses a second embodiment of the present invention.

  This second embodiment is different from the first embodiment in matters relating to the adjustment mechanism 30 for finely adjusting the orientation of each probe lock 13, and the configuration of the probe unit 11 other than this is basically the same. In particular, this is the same as in the first embodiment. Therefore, in the second embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted.

  As shown in FIG. 9, the adjustment mechanism 30 includes one adjustment body 31 and a compression coil spring 51 for each probe block 13. The adjusting body 31 is provided at a position shifted to one side along the arrangement direction of the probe blocks 13 with respect to the pivot shaft 23. The compression coil spring 51 is an example of an elastic member, and is provided at a position shifted to the other side along the arrangement direction of the probe blocks 13 with respect to the pivot shaft 23. Therefore, the adjusting body 31 and the compression coil spring 51 are arranged separately on both sides of the pivot shaft 23 for each probe block 13.

  The compression coil spring 51 is an example of an elastic member. The compression coil spring 51 is interposed in a compressed state between the vertical beam portion 14 a and the base end portion 21 of each probe block 13, and elastically attaches each probe block 13 around the pivot shaft 23 in the clockwise direction. It is fast. Therefore, the corner portion 40 of the base end portion 21 of each probe block 13 is elastically pressed against the cam surface 39 of the adjustment body 31.

  Even in such a configuration, when the outer cylinder 33 of the adjustment body 31 is rotated, each probe block 13 is individually rotated according to the shape of the cam surface 39 so that the probe needle 20 faces the electrode 8. Therefore, as in the first embodiment, the probe needle 20 and the electrode 8 of the liquid crystal display panel 5 can be easily aligned for each probe block 13.

  Further, since the base end portion 21 of the probe block 13 is pressed against the cam surface 39 by the compression coil spring 51, the probe block 13 can move freely even if the tightening of the probe block 13 by the fixing screw 24 is released. There is no. Therefore, by tightening the fixing screw 24, the orientation of each probe block 13 can be accurately determined so that all the probe needles 20 face the electrode 8.

  In the first and second embodiments, the probe block is rotatably supported by fitting the pivot shaft protruding from the support surface of the frame into the fitting hole of each probe block. However, the present invention is not limited to this. For example, a fitting hole may be formed in the support surface of the frame, and a pivot shaft that is slidably fitted into the fitting hole may be provided in the probe block.

  Furthermore, the display panel to be inspected is not limited to the liquid crystal display panel, and can be applied to other flat display panels such as an organic EL display panel, a plasma display panel, or an FED.

The perspective view of the inspection apparatus which concerns on the 1st Embodiment of this invention. The perspective view of the probe unit which concerns on the 1st Embodiment of this invention. The perspective view of the probe unit which shows the positional relationship of a flame | frame, a probe block, and an adjustment mechanism in the 1st Embodiment of this invention. The top view of the probe unit which shows the positional relationship of a flame | frame, a probe block, and an adjustment mechanism in the 1st Embodiment of this invention. The side view of the probe unit which shows the positional relationship of a flame | frame, a probe block, and an adjustment mechanism in the 1st Embodiment of this invention. The top view which expands and shows the arrangement | sequence state of the electrode of a liquid crystal display panel in the 1st Embodiment of this invention. Sectional drawing of the probe unit which shows the positional relationship of a flame | frame, a probe block, and an adjustment mechanism in the 1st Embodiment of this invention. Sectional drawing which follows the F8-F8 line | wire of FIG. The top view of the probe unit which shows the positional relationship of a flame | frame, a probe block, and an adjustment mechanism in the 2nd Embodiment of this invention.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 5 ... Display panel (liquid crystal display panel), 7 ... Outer peripheral part, 8 ... Electrode, 11 ... Probe unit, 12 ... Frame, 13 ... Probe block, 20 ... Probe needle, 23 ... Pivot shaft, 24 ... Fixing member (fixing screw) ), 30 ... adjustment mechanism, 31 ... adjustment body, 39 ... cam surface, 51 ... elastic member (compression coil spring).

Claims (6)

A probe unit for inspecting a display panel having a plurality of electrodes arranged at intervals on the outer periphery,
A frame provided along the outer periphery of the display panel;
A plurality of pivot shafts protruding from the support surface of the frame;
A guide hole is provided at the center of the base end opposite to the electrode, and the guide hole and each of the pivot shafts are slidably fitted so that the pivot shaft can be used as a fulcrum. And a plurality of probe blocks having a plurality of probe needles that are arranged along the alignment direction of the electrodes of the display panel and that are in contact with the electrodes;
A plurality of fixing members for fixing the respective probe blocks individually to the frame,
Provided in the frame, anda plurality of adjusting mechanisms for adjusting individually the orientation of the respective probe blocks relative to the frame,
Each adjusting mechanism includes a pair of adjustment members corresponding to each said probe block, these adjustment bodies, while being rotatably supported by the frame, turning the respective probe blocks a fulcrum the pivot shaft A probe unit, wherein the cam surface of the adjusting body is in contact with each of the probe blocks at a position distributed on both sides of the pivot shaft. In the description of claim 1, each of the pair of adjusting bodies is
A support shaft removably supported by the frame;
A cylindrical outer cylinder screwed into the support shaft so as to cover the support shaft coaxially ;
Have
The probe unit, wherein the cam surface is formed on an outer peripheral surface of the outer cylinder. 3. The probe unit according to claim 2, wherein the cam surface is continuous in the circumferential direction of the outer cylinder and has a taper shape with a diameter decreasing as it proceeds in the lower end direction of the outer cylinder. In the description of any one of claims 1 to 3,
Each fixing member is provided on both sides of each pivot shaft , and is a fixing screw that passes through each probe block and is screwed into the frame.
Each of the probe blocks has a through hole through which the fixing screw penetrates with play. A probe unit for inspecting a display panel having a plurality of electrodes arranged at intervals on the outer periphery,
A frame provided along the outer periphery of the display panel;
A plurality of pivot shafts protruding from the support surface of the frame;
A guide hole is provided at the center of the base end opposite to the electrode, and the guide hole and each of the pivot shafts are slidably fitted so that the pivot shaft can be used as a fulcrum. And a plurality of probe blocks having a plurality of probe needles that are arranged along the alignment direction of the electrodes of the display panel and that are in contact with the electrodes;
A plurality of fixing members for fixing the respective probe blocks individually to the frame,
Provided in the frame, anda plurality of adjusting mechanisms for adjusting individually the orientation of the respective probe blocks relative to the frame,
Each adjustment mechanism is
(1) it is rotatably supported by the frame, and adjustment member having a cam surface for pivoting the respective probe blocks a fulcrum the pivot shaft by contact with the respective probe blocks,
(2) an elastic member that presses each of the probe blocks against the cam surface of the adjustment body;
A probe unit comprising: In apparatus according to claim 5, the said adjusting member and the elastic member, a probe unit, characterized in that to each probe block are arranged distributed on both sides of each pivot shaft.

Images