TWI707830B - Tool holder and groove processing device - Google Patents

Abstract

The subject of the present invention is to accurately position and install the tool of the tool holder and make it easy to disassemble.

The cover plate 50 is fixed to the tool installation portion 42 of the bottom plate 40. The tool mounting portion 42 has a first side wall portion 46 and a second side wall portion 47 facing each other, and a groove 48 is formed therebetween. The second side wall portion 47 is cut inward to form a triangular columnar inclined surface 47a. The side wall 54 of the cover plate 50 is also cut outward to form an inclined surface 54b. The cover plate 50 is tightened with screws 62 so that the inclined surfaces 47a and 54b are in contact with each other, and the angular column tool 60 is fixed by a wedge.

Description

Tool holder and groove processing device

The present invention relates to a tool holder and a groove processing device installed in a processing head for processing grooves on thin films during the manufacturing and processing of thin film solar cells.

In the manufacturing process of an integrated thin-film solar cell, for example, as described in Patent Document 1, there is a process of laminating a semiconductor thin film on a substrate and repeatedly patterning it several times. In this manufacturing step, a metal lower electrode layer is formed on a brittle material substrate, and the electrode layer is divided into short strips using a laser beam as a pattern P1. A P-type light absorbing layer and a buffer layer are formed thereon to make a multilayer semiconductor film. Thereafter, as the patterning P2, a part of the buffer layer and the P-type light absorbing layer is mechanically scribed along a line slightly offset from the groove of the patterning P1 to be divided and divided into short strips. Next, a transparent conductive film containing metal oxide is formed on the buffer layer. Next, as the patterned P3, parts of the transparent conductive film, the buffer layer, and the P-type light absorbing layer are mechanically scribed along a line slightly offset from the groove of the patterned P2 to be divided into short strips. In this way, thin-film solar cells can be manufactured. Therefore, it is necessary to slightly offset the lines of patterned P2 and P3 with respect to the line of patterned P1, and it is necessary to form hundreds of parallel grooves with a pitch of about 5 mm with respect to one substrate.

Patent Documents 2 and 3 disclose scribing devices for solar cells. In Patent Document 2, a tool holder for holding the processing tool on the base of the scribing head, an air cylinder for moving the tool holder up and down, and a spring for eliminating the weight of the tool holder, etc. are provided, and are adjusted by the air cylinder. Press the tool to the workpiece on the load side. Also, it is disclosed in Patent Document 3 There is a scribing device that simultaneously performs multiple scribing by mounting multiple heads on a sliding mechanism on the beam.

In addition, Patent Document 4 proposes a tool installation mechanism installed at the front end of a groove processing device for groove processing of solar cells.

[Prior Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2005-191167

[Patent Document 2] Japanese Patent Laid-Open No. 2011-155151

[Patent Document 3] Japanese Patent Laid-Open No. 2010-245255

[Patent Document 4] Japanese Patent Laid-Open No. 2011-142236

However, since the head shown in Patent Document 2 is a structure in which a plurality of members are combined, the width of the head is as large as about tens of mm, and it is difficult to reduce the head to be narrower than the current one. Therefore, when a plurality of heads are arranged side by side as shown in Patent Document 3, there is a problem that the distance between the heads cannot be reduced excessively. Therefore, there is a problem in that it is impossible to perform scribing at a narrow interval of, for example, 5 mm during the manufacturing steps of the solar cell, while simultaneously forming multiple scribing lines in parallel. In addition, Patent Document 4 does not arrange a plurality of heads in parallel, and has the following problem: it is necessary to remove two screws when replacing the tool, which makes the replacement difficult.

The present invention was completed by focusing on the problems of the conventional groove processing device. The purpose is to provide a method for positioning and positioning the angular column-shaped tools correctly when a plurality of tool holders are arranged side by side with a narrow interval. Installed in the tool holder, and can easily replace the tool holder and the groove processing device using it.

In order to solve this problem, the tool holder of the present invention is installed on the processing head and holds the angular column-shaped tool so that it can be detached freely, and is equipped with: a bottom plate with tools for installing tools Mounting portion; and a cover plate, which is fixed to the tool mounting portion of the bottom plate by screwing; the tool mounting portion of the bottom plate has: a first side wall portion having a first reference surface; a second side wall portion, which is disposed on A position facing the first side wall portion; and a groove formed between the first and second side wall portions and having a second reference surface; the second side wall portion is cut inward from the outer edge toward the groove And formed into a triangular column shape, the cover plate has a side wall part that is cut outwards at a position opposite to the second side wall part of the tool mounting part to form a triangular column shape, and the tool is inserted into the mounting part and In the groove formed by the cover plate, the side wall portion of the cover plate is pressed to the bottom plate to fit the first and second reference surfaces to fix the tool.

Here, the first reference surface of the side wall portion of the tool mounting portion of the bottom plate may have a first plane and a second plane that form the same plane with a fixed interval, and the side wall portion of the cover plate has a side wall portion to cover the When the plate is pressed to the bottom plate, the third plane of the tool is pressed in such a way that it is located between the first and second planes.

In order to solve this problem, the groove processing device of the present invention includes: a platform on which a substrate is placed; the above-mentioned processing head mounted with a tool holder having a tool for processing grooves; and a moving mechanism that makes the platform and The processing head moves relatively in a horizontal plane; and the groove processing device of the present invention moves the processing head parallel to the upper surface of the substrate to form a groove on the substrate.

According to the present invention having such characteristics, the first side wall portion of the bottom plate of the tool holder has a first reference surface, and the groove between the first and second side wall portions has a second reference surface at right angles to the first reference surface surface. When the cover plate is screwed to the bottom plate, the inclined surface of the side wall portion of the cover plate is pressed to the inclined surface of the second side wall portion, and a wedge-shaped tool is fixed. Therefore, only by tightening one screw, the tool surface can be contacted with the first and second reference surfaces and positioned correctly, so that the tool can be easily fixed or replaced.

10‧‧‧Slot processing device

11‧‧‧Platform

12‧‧‧Camera

13‧‧‧Base

14‧‧‧Support Desk

15‧‧‧Guide

16‧‧‧Monitor

17‧‧‧Bridge

18a, 18b‧‧‧pillar

19‧‧‧Guide rod

20‧‧‧Guide

21‧‧‧Motor

30‧‧‧Processing head

31‧‧‧Head unit

32‧‧‧Frame

33‧‧‧Cylinder block

34‧‧‧Tool holder

40‧‧‧Bottom plate

41‧‧‧Processing head installation

42‧‧‧Tool Installation Department

43a, 43b‧‧‧through hole

44‧‧‧Open

45‧‧‧Logou

46, 47‧‧‧ side wall

46a, 46b, 54a‧‧‧plane

47a, 54b‧‧‧inclined surface

48‧‧‧Slot

48a‧‧‧Plane

49‧‧‧Cut

50‧‧‧cover board

51‧‧‧Staircase

52、53‧‧‧Through hole

54‧‧‧Sidewall

60‧‧‧Tools

61‧‧‧reference pin

62‧‧‧Screw

63‧‧‧Magnet

W‧‧‧Thin Film Solar Cell Substrate

Fig. 1 is a perspective view of a groove processing device according to an embodiment of the present invention.

Fig. 2 is a front view of the processing head of the groove processing device of the embodiment of the present invention.

Figure 3 (a) and (b) are front and side views of the tool holder of this embodiment.

Fig. 4 (a) and (b) are a perspective view of the bottom plate of the tool holder of this embodiment and an enlarged view showing a part thereof.

Fig. 5 is a perspective view showing the cover plate of this embodiment.

Figures 6(a) and (b) are bottom views and cross-sectional views showing a state where the tool is installed in the tool holder of this embodiment.

Fig. 1 is a perspective view showing the overall structure of a groove processing device according to an embodiment of the present invention. In this figure, the groove processing device 10 includes a platform 11 on which a thin-film solar cell substrate W to be processed is placed on the xy plane. The platform 11 can move along the y direction of FIG. 1 in the horizontal plane (xy plane), and can rotate to any angle in the horizontal plane.

Above the platform 11, cameras 13 are installed on two bases 12 respectively. Each base 12 can move along a guide rail 15 provided on the support platform 14 and extending in the x direction. The two cameras 13 can move up and down, and the images taken by each camera 13 are displayed on the corresponding monitor 16.

A bridge 17 is provided above the platform 11. The bridge 17 has a pair of supporting columns 18a and 18b, a guide rod 19 arranged along the x-axis direction across the supporting columns, and a motor 21 for driving the guide rail 20 formed on the guide rod 19. The bridge 17 holds the processing head 30 so that it can move in the x direction in the horizontal plane along the guide rail 20. Here, the guide rail 20 and the motor 21 provided on the bridge 17 constitute a moving mechanism for relatively moving the processing head 30 in the x-axis direction in the horizontal plane.

Next, the processing head 30 according to the embodiment of the present invention will be described using FIG. 2. A plurality of head units 31 adjacent to the processing head 30 and arranged at fixed intervals are mounted on a frame-shaped frame 32. Here, for example, it is assumed that ten head units 31 are arranged at an interval of 5 mm. On frame 32 A cylinder block 33 is provided on the upper part. Ten cylinders are formed in the cylinder block 33, and each cylinder is provided with a duct for independently supplying gas. Furthermore, by supplying gas to each cylinder, the piston in each cylinder can move freely in the z-axis direction. Furthermore, a head unit 31 is connected to each piston, and a spring (not shown) is bridged between each head unit 31 and the frame 32. Below each head unit 31, a tool holder 34 that can move up and down by a linear guide (not shown) is installed.

Next, the tool holder 34 attached to the head unit will be described. FIG. 3 is a front view and a side view of the tool holder 34. The tool holder 34 has an elongated rectangular parallelepiped shape in order to be arranged at narrow intervals. The tool holder 34 has a bottom plate 40 that is a rectangular parallelepiped as a whole and a part of which is cut, and a cover plate 50 attached to the cutout portion, and holds the tool 60 at the lower end in a detachable manner.

Fig. 4(a) is a perspective view of the bottom plate 40, and Fig. 4(b) is a perspective view of the lower part enlarged. As shown in Fig. 4(a), the bottom plate 40 has a substantially rectangular parallelepiped shape and has a processing head mounting portion 41 mounted on the upper portion of the linear slider and a tool mounting portion 42 mounted and fixed below the tool. A pair of through holes 43a and 43b are provided in the processing head mounting portion 41 up and down.

字狀之切口部49， 且於切口部49之內部如下述般嵌入有磁鐵。 As shown in Fig. 4(a), the tool mounting portion 42 is cut to be thinner from the bottom. The upper part of the tool mounting part 42 is provided with an opening 44 for the insertion of the reference pin, and a screw groove 45 for screw mounting is provided below. In addition, under the screw groove 45, side wall portions 46 and 47 extending on the same surface as the side wall are provided on both sides, and the middle part becomes a groove 48 cut from below. As shown in Figure 4(b), a first flat surface 46a parallel to the outer surface of the tool mounting portion 42 is provided on the upper inner side of the side wall 46, and a fixed interval is provided on the lower inner side to form the same first flat surface 46a. The second plane 46b of the plane is slightly cut in between. The flat surfaces 46a and 46b are combined together as a first reference surface, and the flat surface 48a of the groove 48 forming a right angle with the first reference surface is defined as a second reference surface. In addition, as shown in the figure, the side wall portion 47 is cut from the edge of the side surface toward the groove 48 such that the side wall portion 47 becomes a substantially triangular column shape, for example, at an angle of 45°, and the inner side becomes an inclined surface 47a. In addition, the upper part of the side wall 47 has been cut from the side

The notch 49 in the shape of a letter, and a magnet is embedded in the notch 49 as follows.

Next, the cover plate 50 attached to the tool attachment portion 42 will be described. The cover plate 50 is an elongated flat member as shown in FIG. 5, and the part below the stepped portion 51 is cut to be thinner. A through hole 52 for the insertion of a reference pin and a through hole 53 for the insertion of a screw are provided in the center of the upper part of the cover plate 50. The side surface on the left side in the figure has a side wall 54 protruding laterally from the lower part slightly lower than the center. Here, as shown in the figure, the side wall portion 54 is provided with a protrusion slightly protruding inward, and the upper surface thereof constitutes a third flat surface 54a. The third flat surface 54a is provided at a position that becomes the middle of the first and second flat surfaces 46a and 46b when the cover plate 50 is attached to the bottom plate 40. Furthermore, the side wall portion 54 is provided from the front end of the inner edge to the outside, and is cut at an apex angle of 45° such that the side wall portion 54 becomes a substantially triangular column shape, and the outside becomes an inclined surface 54b. The apex angle of the cut becomes the same angle as the apex angle of the triangular columnar portion cut in the side wall portion 46 of the bottom plate 40.

Next, the case where the tool 60 is attached to the tool holder 34 will be described. In FIG. 3, first, the reference pin 61 is inserted into the opening 44 of the bottom plate 40 through the through hole 52 of the cover plate. Furthermore, the screw 62 is inserted through the screw groove 45 of the tool attachment portion 42 from the through hole 53 on the cover plate 50 side, and the screw 62 is tightened. Thereby, the bottom plate 40 and the cover plate 50 as a whole become a substantially rectangular parallelepiped-shaped tool holder 34, and a prismatic groove is formed below.

Next, as shown in FIG. 3, the tip of the tool 60, which has a rectangular parallelepiped shape and has a tip formed by grinding from one direction to be sharp, is downward, and the tip of the tip becomes the first reference surface The side is inserted from the slot. Fig. 6(a) is a bottom view showing a state where a rectangular parallelepiped tool is installed, and Fig. 6(b) is a cross-sectional view taken along line A-A of Fig. 3(a). When the tool 60 is inserted to the deepest point, the upper part of the tool 60 is held by the magnet 63. When the screw 62 is tightened in this state, the cover plate 50 approaches parallel to the bottom plate 40, and the inclined surface 47a of the side wall portion 47 of the bottom plate 40 and the inclined surface 54b of the side wall portion 54 of the cover plate 50 are in surface contact with each other. If the screw is further tightened, the cover plate 50 is pressed in the arrow B direction and the lower part of the step 51 is slightly inclined to become a wedge, and the side wall 54 presses the tool 60 in the arrow C direction. this At this time, the tool 60 can be clamped by the first and second flat surfaces 46a, 47a and the third flat surface 54a, and the flat surfaces 46a and 47a of the side wall 46 become the first reference surface and the surface 48a of the groove 48 becomes the second reference surface. Position and install the tip of the angular cylindrical tool 62 correctly. In this way, as shown in FIG. 2, a plurality of tool holders 34 are arranged on the processing head 30 in a state where the tool is mounted on the tool holder.

In addition, when the processing head is used for groove processing, the thin-film solar cell substrate W is arranged on the platform 11 as shown in FIG. 1. Then, the processing head 30 is moved to one end of the x-axis direction, and the gas supplied to the cylinder of the cylinder block of the processing head is adjusted to control the position of the tools of each head unit in the z-axis direction. Thereby, the load of each tool can be set independently when manufacturing solar cells. Then, by driving the motor 21 to move the processing head 30 along the x-axis, the thin-film solar substrate W can be scored with an optimal load, and multiple grooves can be formed at the same time. When the grooves are formed in the x-axis direction as described above, each head block is slightly raised, and the platform 11 is moved in the y-axis direction, and then each head block is lowered again to repeatedly perform groove processing. If this is done, the patterning P1, P2, P3 can be performed at narrow intervals.

Moreover, when the tool is deteriorated and replaced, the screw 62 of the tool holder 34 is loosened and the tool 60 is withdrawn downward in FIG. 3. Then, only by inserting the new tool into the groove under the tool holder 34 and tightening it with the screw 62, the new tool can be correctly fixed at a specific position, so that the tool replacement operation can be easily performed.

Furthermore, in this embodiment, a groove processing device for processing grooves on solar cell substrates has been described, but the present invention is not limited to solar cell substrates, and a groove processing device for processing various brittle material substrates can be provided. And tool holders.

[Industrial availability]

Regarding this processing head, since a plurality of tools can be installed at a narrow interval by installing a plurality of processing heads in parallel, it can be preferably used in a groove processing device for solar cells that simultaneously forms a plurality of grooves.

34‧‧‧Tool holder

40‧‧‧Bottom plate

41‧‧‧Processing head installation

42‧‧‧Tool Installation Department

43a, 43b‧‧‧through hole

50‧‧‧cover board

60‧‧‧Tools

61‧‧‧reference pin

62‧‧‧Screw

63‧‧‧Magnet

Claims (2)

A tool holder, which is installed on a processing head and holds a corner column tool in a freely detachable manner, and is provided with: a bottom plate having a tool installation portion for installing tools; and a cover plate, which is fixed to the tool by screwing The tool mounting portion of the bottom plate; and the tool mounting portion of the bottom plate has: a first side wall portion having a first reference surface; a second side wall portion provided at a position opposite to the first side wall portion; and a groove, It is formed between the first and second side wall portions and has a second reference surface; and the first reference surface has a first plane and a second plane that form the same plane at a fixed interval; the second side wall portion is from The outer edge faces inward and is chamfered toward the groove to form a triangular prism shape. The cover plate has a side wall portion that is chamfered outward at a position opposite to the second side wall of the tool mounting portion to form a triangular prism The side wall portion of the cover plate has a third plane that presses the tool so as to be located between the first and second planes when the cover plate is pressed on the bottom plate; by inserting the tool into the In the groove formed by the tool mounting portion and the cover plate, the side wall portion of the cover plate is pressed against the bottom plate to fit the first and second reference surfaces to fix the tool. A groove processing device, comprising: a platform for placing a substrate; a processing head for installing a tool holder with tools for processing grooves; and A moving mechanism for relatively moving the platform and the processing head in a horizontal plane; and the groove processing device moves the processing head in parallel with the upper surface of the substrate to form a groove on the substrate; the tool holder is detachable A tool for maintaining the shape of a corner column, and is provided with: a bottom plate with a tool installation part for installing tools; and a cover plate, which is fixed to the tool installation part of the bottom plate by screws; and the tool installation part of the bottom plate has: A first side wall portion having a first reference surface; a second side wall portion provided at a position opposed to the first side wall portion; and a groove formed between the first and second side wall portions and having a first 2 datum plane; and the first datum plane has a first plane and a second plane that form the same plane at a fixed interval; the second side wall portion is chamfered from the outer edge inward and toward the groove to form a triangular column The cover plate has a side wall portion, which is angled outwardly at a position opposite to the second side wall portion of the tool mounting portion to form a triangular column shape, and the side wall portion of the cover plate has a side wall portion to hold the cover plate When pressing on the bottom plate, press the third plane of the tool so that it is located between the first and second planes; by inserting the tool into the groove formed by the tool mounting portion and the cover plate, the The side wall portion of the cover plate is pressed against the bottom plate to cooperate with the first and second reference surfaces to fix the tool.

Images