TWI659541B - Groove processing device - Google Patents

Abstract

The object of the present invention is to correctly position and install the tool of the tool holder and make it easy to disassemble.

The cover plate 50 is fixed to a bottom plate 40 having a tool mounting portion 42. The inner surfaces of the first and second side wall portions 46 and 47 facing the tool mounting portion 42 facing each other are set as inclined surfaces 46a and 47a to constitute the first and second reference surfaces of the V-shape. The surface of the cover plate 50 is a third reference surface. The cover plate 50 is tightened with screws 63 and the cylindrical tool 60 is fixed by three reference surfaces.

Description

Groove processing device

The present invention relates to a tool holder and a groove processing device mounted on a processing head for groove processing of a thin film during the manufacturing and processing of the thin film solar cell.

In the manufacturing process of the integrated thin-film solar cell, for example, as described in Patent Document 1, there is a step of laminating a semiconductor thin film on a substrate and repeatedly patterning the semiconductor thin film. In this manufacturing step, a metal lower electrode layer is formed on the brittle material substrate, and the electrode layer is divided and divided into short strips by a laser beam as a pattern P1. A P-type light absorbing layer and a buffer layer are formed thereon to form a laminated semiconductor film. Thereafter, as the patterned P2, a portion of the buffer layer and the P-type light absorbing layer is mechanically scored along a line slightly offset from the groove of the patterned P1 to be divided and divided into short strips. Next, a transparent conductive film containing a metal oxide is formed on the buffer layer. Next, as the patterned P3, a part of the transparent conductive film, the buffer layer, and the P-type light absorbing layer is mechanically scribed to divide into strips by following a line slightly offset from the groove of the patterned P2. In this way, thin-film solar cells can be manufactured. Therefore, the lines of the patterned P2 and P3 need to be slightly offset from the lines of the patterned P1, respectively, and it is necessary to form hundreds or dozens of parallel grooves with a pitch of about 5 mm with respect to one substrate.

Patent documents 2 and 3 disclose scoring devices for solar cells. Patent Document 2 is provided with a tool holder for holding a processing tool on the base of the scoring head, an air cylinder for moving the tool holder up and down, and a spring for eliminating the weight of the tool holder, and the like is adjusted by the air cylinder Press the tool against the workpiece with the load side. Also disclosed in Patent Document 3 There is a scoring device that simultaneously performs a plurality of scribings by a sliding mechanism in which a plurality of heads are mounted on a beam.

Further, Patent Document 4 proposes a mounting mechanism for a tool mounted on a front end of a groove processing device for groove processing of a solar cell.

[Prior technical literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2005-191167

[Patent Document 2] Japanese Patent Laid-Open No. 2011-155151

[Patent Document 3] Japanese Patent Laid-Open No. 2010-245255

[Patent Document 4] Japanese Patent Laid-Open No. 2011-142236

However, since the head shown in Patent Document 2 has a structure in which a plurality of members are combined, the width of the head is as large as several tens mm, and it is difficult to reduce the head to be narrower than the current one. Therefore, when a plurality of heads are arranged in parallel as shown in Patent Document 3, there is a problem that the interval between the heads cannot be reduced too much. Therefore, there is a problem in that it is impossible to perform scribes at a narrow interval of, for example, 5 mm and to form a plurality of scribe lines in parallel at the same time in manufacturing steps of solar cells. In addition, Patent Document 4 does not arrange a plurality of heads in parallel, and there is a problem in that two screws need to be removed at the time of tool replacement, making it difficult to replace.

The present invention was made by focusing on the problems of such a previous processing head, and an object thereof is to provide a cylindrical tool that can be positioned and installed correctly when a plurality of tool holders are arranged in parallel at a narrow distance. In the tool holder, the tool holder of the tool can be easily replaced and the groove processing device using the tool holder.

In order to solve this problem, the tool holder of the present invention is mounted on a processing head and holds a cylindrical tool so as to be freely detachable, and is provided with a base plate having a tool for mounting the tool A mounting portion; and a cover plate, which is fixed to the tool mounting portion of the bottom plate; the tool mounting portion of the bottom plate has first and second side wall portions which are disposed at mutually opposed positions, and the first and second side wall portions are from outside The edge is cut inward to form a triangular column shape, and the inclined surfaces are respectively set as the first and second reference surfaces. The cover plate is formed with a surface facing the tool mounting portion, and the surface is set as the third surface. The reference surface is fixed by inserting the tool between the tool mounting portion and the cover plate and pressing the third reference surface of the cover plate to the tool to cooperate with the first and second reference surfaces.

Here, the vertex angles formed by cutting the first and second side wall portions of the tool mounting portion of the base plate may be mutually equal angles.

In order to solve the problem, the groove processing apparatus of the present invention includes: a platform on which a substrate is placed; the above-mentioned processing head is mounted with a tool holder having a tool for performing groove processing; The platform and the processing head are relatively moved in a horizontal plane; and the groove processing device of the present invention moves the processing head in parallel with the upper surface of the substrate to form a groove on the substrate.

According to the present invention having such a feature, the inner surfaces of the first and second side wall portions of the bottom plate of the tool holder are V-shaped inclined surfaces. The inclined surfaces are set as the first and second reference planes, and the inner surface of the groove of the cover plate is set as the second reference plane, and the tool is clamped and fixed with the reference planes for positioning. Therefore, the following effect is obtained: the positioning can be performed accurately by tightening only one screw, and the cylindrical tool can be extremely easily fixed or replaced.

10‧‧‧Slot processing equipment

11‧‧‧mounting table

12‧‧‧ Camera

13‧‧‧ base

14‧‧‧ support desk

15‧‧‧rail

16‧‧‧Monitor

17‧‧‧bridge

18a, 18b

19‧‧‧ Guide

20‧‧‧rail

21‧‧‧Motor

30‧‧‧Processing head

31‧‧‧head unit

32‧‧‧Frame

33‧‧‧ cylinder block

34‧‧‧tool holder

40‧‧‧ floor

41‧‧‧Processing head mounting section

42‧‧‧Tool installation department

43a, 43b‧‧‧through hole

44a, 44b‧‧‧ opening

45‧‧‧Luogou

46, 47‧‧‧ sidewall

46a, 47a‧‧‧ inclined plane

48‧‧‧slot

50‧‧‧ cover

51‧‧‧Step Department

52, 53‧‧‧through holes

52a, 52b‧‧‧through hole

54, 55‧‧‧ sidewall

56‧‧‧slot

56a‧‧‧plane

60‧‧‧Tools

61, 62‧‧‧ benchmark pins

63‧‧‧screw

64‧‧‧ Magnet

W‧‧‧ thin film solar cell substrate

FIG. 1 is a perspective view of a groove processing apparatus according to an embodiment of the present invention.

Fig. 2 is a front view of a processing head of a groove processing apparatus according to an embodiment of the present invention.

3 (a) and 3 (b) are a front view and a side view of a tool holder according to this embodiment.

FIG. 4 is a perspective view showing a bottom plate of the tool holder according to this embodiment.

Fig. 5 is a perspective view showing a cover plate according to this embodiment.

6 (a) and 6 (b) are a bottom view and a cross-sectional view showing a state where the tool is mounted on the tool holder of the present embodiment.

FIG. 1 is a perspective view showing the overall configuration of a groove processing apparatus according to an embodiment of the present invention. In this figure, the groove processing device 10 includes a stage 11 on which a thin-film solar cell substrate W to be processed is placed on an xy plane. The platform 11 can be moved in the horizontal plane (xy plane) in the y direction in FIG. 1, and can be rotated to an arbitrary angle in the horizontal plane.

Above the platform 11, cameras 13 are respectively mounted on the two bases 12. Each base 12 can move along a guide rail 15 extending in the x direction provided on the support table 14. The two cameras 13 can be moved up and down, and the images captured by each camera 13 are displayed on the corresponding monitor 16.

A bridge 17 is provided above the platform 11. The bridge 17 includes a pair of support columns 18 a and 18 b, a guide rod 19 provided across the support columns and arranged along the x-axis direction, and a motor 21 that drives a guide rail 20 formed on the guide rod 19. The bridge 17 holds the processing head 30 so that it can move in the x direction along the guide rail 20 in a horizontal plane. Here, the guide rail 20 and the motor 21 provided on the bridge 17 constitute a moving mechanism for relatively moving the processing head 30 in the x-axis direction in the horizontal plane.

Next, the processing head 30 according to the embodiment of the present invention will be described using FIG. 2. A plurality of head units 31 adjacent to the processing head 30 and arranged at regular intervals are mounted on a frame-shaped frame 32. Here, it is assumed that, for example, 10 head units 31 are arranged at intervals of 5 mm. A cylinder block 33 is provided above the frame 32. Ten cylinders are formed in the cylinder block 33, and each cylinder is provided with a duct for supplying gas independently. Furthermore, by supplying gas to each cylinder, the piston in each cylinder can move freely in the z-axis direction. A head unit 31 is connected to each piston, and a spring (not shown) is mounted between each head unit 31 and the frame 32. Below each head unit 31, a tool holder 34 that can move freely up and down by a linear guide (not shown) is mounted.

Next, a tool holder 34 mounted on the head unit 31 will be described. Figure 3 Front view and side view of the holder 34. The tool holder 34 has an elongated rectangular parallelepiped shape in order to be arranged at a narrow interval. The tool holder 34 includes a bottom plate 40 having a rectangular parallelepiped as a whole and a part of which is cut, and a cover plate 50 attached to the cutout portion. The tool 60 is detachably held at the lower end.

FIG. 4 is a perspective view of the bottom plate 40. As shown in this figure, the bottom plate 40 is substantially rectangular parallelepiped, and has a processing head mounting portion 41 mounted on an upper portion of the linear slider and a tool mounting portion 42 on which a tool is mounted and fixed below. A pair of through-holes 43a and 43b are provided on the processing head mounting portion 41 up and down.

As shown in FIG. 4, the tool mounting portion 42 is cut thinner at the bottom, and has openings 44 a and 44 b for inserting two reference pins at the upper portion, and a screw groove 45 for mounting screws at the lower portion. Below the spiral groove 45, side wall portions 46 and 47 extending on the same surface as the side wall are provided on both sides. The middle of the side wall portions 46 and 47 is an elongated groove 48. As shown in the figure, the side wall portion 46 is cut from the front end of the side edge toward the inside of the groove 48 so as to have a substantially triangular columnar shape, and the inside becomes an inclined surface 46 a. Similarly, the side wall portion 47 is cut from the outer side edge toward the inner groove 48 so as to have a substantially triangular column shape, and the inner side becomes an inclined surface 47 a. The apex angles of the cutouts are equal, for example, 45 ° to 60 °, and the cross sections of the inclined surfaces 46a and 47a are V-shaped. The inclined surface 46a constitutes a first reference surface, and the inclined surface 47a constitutes a second reference surface.

Next, a cover plate 50 mounted on the tool mounting portion 42 will be described. As shown in FIG. 5, the cover plate 50 is an elongated rectangular parallelepiped member, and a portion lower than the stepped portion 51 is cut thin. On the upper part of the stepped portion 51 of the cover plate 50, through holes 52a and 52b for inserting two reference pins and through holes 53 for inserting screws are provided in a row. Below the stepped portion 51 of the cover plate 50, there are side wall portions 54 and 55 that are slanted inward from the side walls on both sides, and the plane 56a of the surface of the inner groove 56 constitutes a third reference plane. This plane 56 a constitutes a plane parallel to the back surface of the cover plate 50.

Next, attachment of the tool 60 to the tool holder 34 will be described. In FIG. 3, first, two reference pins 61 and 62 are inserted through the through holes 52a and 52b of the cover plate and inserted to the bottom. The openings 44a, 44b of the plate 40. Furthermore, the screw 63 is penetrated from the through hole 53 on the cover plate 50 side to the screw groove 45 of the tool mounting portion 42 and the screw 63 is tightened. Thereby, the bottom plate 40 and the cover plate 50 as a whole become a substantially rectangular parallelepiped tool holder 34, and an elongated groove is formed below.

Next, as shown in FIG. 3, insert the blade of the cylindrical tool 60 downward from the groove. Fig. 6 (a) is a bottom view showing a state where a cylindrical tool 60 is installed, and Fig. 6 (b) is a sectional view taken along line A-A of Fig. 3 (a). When the tool 60 is inserted at the deepest position, the upper part of the tool 60 is held by the magnet 64. When the screws 63 are tightened in this state, since the two reference pins 61 and 62 are used, the cover plate 50 is kept parallel and close to the bottom plate 40. The side wall of the tool 60 contacts the flat surface 56 a of the groove 56 of the cover plate 50 and the first and second inclined surfaces 46 a and 47 a of the side wall portions 46 and 47 of the bottom plate and is fixed at a specific position. At this time, the flat surface 56a becomes the third reference surface, and these surfaces are pressed to clamp the tool 60, and the inclined surfaces 46a and 47a of the side wall portions 46 and 47 become the first and second reference surfaces, so that the cylindrical shape can be accurately positioned and attached. Of tools 63. In this way, as shown in FIG. 2, a plurality of tool holders 34 are arranged on the processing head 30 in a state where the tools are mounted on the tool holder. At this time, it is mounted so that the direction for scoring using a tool becomes the x-axis direction indicated by an arrow in FIG. 3 (b). In addition, the side walls 54 and 55 of the cover plate are not in contact with the tool 60 held by the first and second inclined surfaces 46a, 47a and the flat surface 56a, and are not helpful for holding the tool. Therefore, the cover plate may be omitted. The side wall portions 54 and 55.

In addition, in the case of using the processing head for groove processing, the thin-film solar cell substrate W is arranged on the stage 11 as shown in FIG. 1. Next, the machining head 30 is moved to one end in the x-axis direction, and the gas supplied to the cylinder of the cylinder block of the machining head is adjusted to control the position in the z-axis direction of the tool of each head unit. Thereby, the load of each tool can be set independently when manufacturing a solar cell. Next, by driving the motor 21 to move the processing head 30 along the x-axis, the thin-film solar substrate W can be scored with an optimal load, and a plurality of grooves can be formed simultaneously. Furthermore, during the scoring, a force symmetrical to the first and second reference planes is applied to the tool 60. When the groove is formed in the x-axis direction as described above, each head piece is slightly raised, and the flat After the table 11 is moved in the y-axis direction, each head block is lowered again and groove processing is performed repeatedly. By doing so, patterning P1, P2, and P3 can be performed at narrow intervals. Here, the apex angles of the cutouts constituting the inclined surfaces 46a and 47a are made equal. Therefore, even if there is a slight error in the outer diameter of the tool 60, the error will become a position deviation in the x-axis direction and a position deviation in the y-axis direction. The situation of shifting disappears.

Further, when the tool is deteriorated and replaced, the screw 63 of the tool holder 34 is loosened and the tool 60 is pulled out downward in FIG. 3. Then, only by inserting a new tool from a slot below the tool holder 34 and tightening it with a screw 63, the new tool can be accurately fixed in a specific position, and the tool replacement operation can be easily performed. At this time, the side wall portions 54 and 55 of the cover plate function as guide rails that restrict the posture of the tool 60 withdrawn or inserted, thereby making it easy to replace the tool.

Furthermore, in this embodiment, a groove processing device for groove processing of a solar cell substrate has been described, but the present invention is not limited to a solar battery substrate, and a groove processing device for performing groove processing on various brittle material substrates can be provided. And tool holders.

[Industrial availability]

The processing head can be used in a slot processing device for a solar cell that forms a plurality of slots at the same time because a plurality of tools can be installed in parallel and a plurality of tools can be installed at a narrow pitch.

Claims (3)

A slot processing device includes: a platform for mounting a substrate; a processing head for mounting a tool holder having a tool for performing slot processing; and a moving mechanism for connecting the platform to the processing head. Relative movement in the horizontal plane; wherein the tool holder is the above-mentioned tool that is mounted on the processing head and removably holds a columnar shape, and includes: a base plate having a tool mounting portion for mounting the tool; and a cover plate that The tool mounting portion fixed to the bottom plate; and the tool mounting portion of the bottom plate has first and second side wall portions provided at positions facing each other, and the first and second side wall portions are formed as edges from the outside It is cut into a triangular column shape inward, and the inclined surfaces are respectively set as the first and second reference surfaces. The cover plate is formed with a surface facing the tool mounting portion, and the surface is set as the third reference surface. The tool is inserted between the tool mounting portion and the cover plate, and the third reference surface of the cover plate is pressed against the tool to cooperate with the first, second, and second tools. The reference surface fixes the tool; and the groove processing device moves the processing head in parallel with the upper surface of the substrate to form a groove on the substrate. For example, the groove processing device of claim 1, wherein the vertex angles at which the first and second side wall portions of the tool mounting portion of the base plate are cut are equal to each other. For example, the groove processing device of claim 1 or 2, wherein the cover plate is formed with a groove facing the tool mounting portion, and a pair of side wall portions are formed on the outer side thereof, and the tool is inserted into the tool mounting portion and In the groove formed by the cover plate, a surface of the groove of the cover plate is set as the third reference surface.