JP4780983B2 - 有機ｅｌ素子製造方法 - Google Patents

有機ｅｌ素子製造方法 Download PDF

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Publication number
JP4780983B2
JP4780983B2 JP2005076760A JP2005076760A JP4780983B2 JP 4780983 B2 JP4780983 B2 JP 4780983B2 JP 2005076760 A JP2005076760 A JP 2005076760A JP 2005076760 A JP2005076760 A JP 2005076760A JP 4780983 B2 JP4780983 B2 JP 4780983B2
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Japan
Prior art keywords
substrate
chamber
cooling
organic
vacuum
Prior art date
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Active
Application number
JP2005076760A
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English (en)
Japanese (ja)
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JP2006260939A (ja
Inventor
功二 羽根
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP2005076760A priority Critical patent/JP4780983B2/ja
Priority to TW095107065A priority patent/TWI406442B/zh
Priority to KR1020060024554A priority patent/KR101229595B1/ko
Priority to CNA2006100596744A priority patent/CN1835258A/zh
Publication of JP2006260939A publication Critical patent/JP2006260939A/ja
Application granted granted Critical
Publication of JP4780983B2 publication Critical patent/JP4780983B2/ja
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    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01F—PROCESSING OF HARVESTED PRODUCE; HAY OR STRAW PRESSES; DEVICES FOR STORING AGRICULTURAL OR HORTICULTURAL PRODUCE
    • A01F25/00—Storing agricultural or horticultural produce; Hanging-up harvested fruit
    • A01F25/16—Arrangements in forage silos
    • A—HUMAN NECESSITIES
    • A23—FOODS OR FOODSTUFFS; TREATMENT THEREOF, NOT COVERED BY OTHER CLASSES
    • A23B—PRESERVING, e.g. BY CANNING, MEAT, FISH, EGGS, FRUIT, VEGETABLES, EDIBLE SEEDS; CHEMICAL RIPENING OF FRUIT OR VEGETABLES; THE PRESERVED, RIPENED, OR CANNED PRODUCTS
    • A23B9/00—Preservation of edible seeds, e.g. cereals
    • A23B9/08—Drying; Subsequent reconstitution
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
    • E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
    • E04B1/62—Insulation or other protection; Elements or use of specified material therefor
    • E04B1/74—Heat, sound or noise insulation, absorption, or reflection; Other building methods affording favourable thermal or acoustical conditions, e.g. accumulating of heat within walls
    • E04B1/76—Heat, sound or noise insulation, absorption, or reflection; Other building methods affording favourable thermal or acoustical conditions, e.g. accumulating of heat within walls specifically with respect to heat only
    • E04B1/7608—Heat, sound or noise insulation, absorption, or reflection; Other building methods affording favourable thermal or acoustical conditions, e.g. accumulating of heat within walls specifically with respect to heat only comprising a prefabricated insulating layer, disposed between two other layers or panels
    • E04B1/7612—Heat, sound or noise insulation, absorption, or reflection; Other building methods affording favourable thermal or acoustical conditions, e.g. accumulating of heat within walls specifically with respect to heat only comprising a prefabricated insulating layer, disposed between two other layers or panels in combination with an air space

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  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Architecture (AREA)
  • Environmental Sciences (AREA)
  • Civil Engineering (AREA)
  • Structural Engineering (AREA)
  • Electromagnetism (AREA)
  • Acoustics & Sound (AREA)
  • Wood Science & Technology (AREA)
  • Zoology (AREA)
  • Chemical & Material Sciences (AREA)
  • Food Science & Technology (AREA)
  • Polymers & Plastics (AREA)
  • Physical Vapour Deposition (AREA)
  • Electroluminescent Light Sources (AREA)
JP2005076760A 2005-03-17 2005-03-17 有機ｅｌ素子製造方法 Active JP4780983B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2005076760A JP4780983B2 (ja) 2005-03-17 2005-03-17 有機ｅｌ素子製造方法
TW095107065A TWI406442B (zh) 2005-03-17 2006-03-02 有機電激發光元件製造方法及有機電激發光元件製造裝置
KR1020060024554A KR101229595B1 (ko) 2005-03-17 2006-03-16 유기 ｅｌ 소자 제조 방법 및 유기 ｅｌ 소자 제조 장치
CNA2006100596744A CN1835258A (zh) 2005-03-17 2006-03-17 有机电致发光器件制造方法及有机电致发光器件制造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005076760A JP4780983B2 (ja) 2005-03-17 2005-03-17 有機ｅｌ素子製造方法

Publications (2)

Publication Number Publication Date
JP2006260939A JP2006260939A (ja) 2006-09-28
JP4780983B2 true JP4780983B2 (ja) 2011-09-28

Family

ID=37002930

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005076760A Active JP4780983B2 (ja) 2005-03-17 2005-03-17 有機ｅｌ素子製造方法

Country Status (4)

Country Link
JP (1) JP4780983B2 (zh)
KR (1) KR101229595B1 (zh)
CN (1) CN1835258A (zh)
TW (1) TWI406442B (zh)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5081516B2 (ja) 2007-07-12 2012-11-28 株式会社ジャパンディスプレイイースト 蒸着方法および蒸着装置
JP4684372B1 (ja) * 2010-04-27 2011-05-18 株式会社シンクロン 半導体発光素子基板の製造方法
JP5771372B2 (ja) * 2010-08-02 2015-08-26 株式会社アルバック プラズマ処理装置及び前処理方法
JP5843779B2 (ja) * 2010-10-12 2016-01-13 株式会社カネカ 有機ｅｌ素子の製造装置
CN102054910B (zh) * 2010-11-19 2013-07-31 理想能源设备(上海)有限公司 Led芯片工艺集成系统及其处理方法
KR101878084B1 (ko) * 2013-12-26 2018-07-12 카티바, 인크. 전자 장치의 열 처리를 위한 장치 및 기술
KR102300039B1 (ko) 2014-08-04 2021-09-10 삼성디스플레이 주식회사 표시 장치의 제조 장치 및 표시 장치의 제조 방법
JP6605657B1 (ja) * 2018-05-24 2019-11-13 キヤノントッキ株式会社 成膜装置、成膜方法及び電子デバイスの製造方法
KR20210080776A (ko) * 2019-12-23 2021-07-01 캐논 톡키 가부시키가이샤 성막 시스템 및 기판 반송 시스템

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4608172B2 (ja) * 2000-03-22 2011-01-05 出光興産株式会社 有機ｅｌ表示装置の製造装置およびそれを用いた有機ｅｌ表示装置の製造方法
JP2003208977A (ja) * 2002-01-11 2003-07-25 Seiko Epson Corp 有機ｅｌ装置の製造方法及びその装置、電気光学装置、並びに電子機器
JP4368633B2 (ja) * 2002-08-01 2009-11-18 株式会社半導体エネルギー研究所 製造装置
JP2004171862A (ja) * 2002-11-19 2004-06-17 Seiko Epson Corp 有機ｅｌ装置の製造装置、有機ｅｌ装置の製造方法、有機ｅｌ装置、並びに電子機器
JPWO2004064453A1 (ja) * 2003-01-10 2006-05-18 株式会社半導体エネルギー研究所 発光素子及びその作製方法

Also Published As

Publication number Publication date
KR20060101324A (ko) 2006-09-22
JP2006260939A (ja) 2006-09-28
CN1835258A (zh) 2006-09-20
TWI406442B (zh) 2013-08-21
TW200644312A (en) 2006-12-16
KR101229595B1 (ko) 2013-02-04

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