TW200644312A - Method for manufacturing organic EL device and organic EL device manufacturing apparatus - Google Patents

Method for manufacturing organic EL device and organic EL device manufacturing apparatus

Info

Publication number
TW200644312A
TW200644312A TW095107065A TW95107065A TW200644312A TW 200644312 A TW200644312 A TW 200644312A TW 095107065 A TW095107065 A TW 095107065A TW 95107065 A TW95107065 A TW 95107065A TW 200644312 A TW200644312 A TW 200644312A
Authority
TW
Taiwan
Prior art keywords
substrate
organic
cooling
manufacturing
pretreatment process
Prior art date
Application number
TW095107065A
Other languages
Chinese (zh)
Other versions
TWI406442B (en
Inventor
Koji Hane
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Publication of TW200644312A publication Critical patent/TW200644312A/en
Application granted granted Critical
Publication of TWI406442B publication Critical patent/TWI406442B/en

Links

Classifications

    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01F—PROCESSING OF HARVESTED PRODUCE; HAY OR STRAW PRESSES; DEVICES FOR STORING AGRICULTURAL OR HORTICULTURAL PRODUCE
    • A01F25/00—Storing agricultural or horticultural produce; Hanging-up harvested fruit
    • A01F25/16—Arrangements in forage silos
    • A—HUMAN NECESSITIES
    • A23—FOODS OR FOODSTUFFS; TREATMENT THEREOF, NOT COVERED BY OTHER CLASSES
    • A23B—PRESERVING, e.g. BY CANNING, MEAT, FISH, EGGS, FRUIT, VEGETABLES, EDIBLE SEEDS; CHEMICAL RIPENING OF FRUIT OR VEGETABLES; THE PRESERVED, RIPENED, OR CANNED PRODUCTS
    • A23B9/00—Preservation of edible seeds, e.g. cereals
    • A23B9/08—Drying; Subsequent reconstitution
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
    • E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
    • E04B1/62—Insulation or other protection; Elements or use of specified material therefor
    • E04B1/74—Heat, sound or noise insulation, absorption, or reflection; Other building methods affording favourable thermal or acoustical conditions, e.g. accumulating of heat within walls
    • E04B1/76—Heat, sound or noise insulation, absorption, or reflection; Other building methods affording favourable thermal or acoustical conditions, e.g. accumulating of heat within walls specifically with respect to heat only
    • E04B1/7608—Heat, sound or noise insulation, absorption, or reflection; Other building methods affording favourable thermal or acoustical conditions, e.g. accumulating of heat within walls specifically with respect to heat only comprising a prefabricated insulating layer, disposed between two other layers or panels
    • E04B1/7612—Heat, sound or noise insulation, absorption, or reflection; Other building methods affording favourable thermal or acoustical conditions, e.g. accumulating of heat within walls specifically with respect to heat only comprising a prefabricated insulating layer, disposed between two other layers or panels in combination with an air space

Landscapes

  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Architecture (AREA)
  • Environmental Sciences (AREA)
  • Civil Engineering (AREA)
  • Structural Engineering (AREA)
  • Electromagnetism (AREA)
  • Acoustics & Sound (AREA)
  • Wood Science & Technology (AREA)
  • Zoology (AREA)
  • Chemical & Material Sciences (AREA)
  • Food Science & Technology (AREA)
  • Polymers & Plastics (AREA)
  • Physical Vapour Deposition (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

To provide a manufacturing technique of an organic EL element free from contamination of a substrate at pretreatment process, and for forming a precise organic light emitting layer by precisely positioning a mask on the substrate. The manufacturing method of organic EL element comprises the pretreatment process for the substrate 10, and the pretreatment process comprises a process of heating and cooling the substrate 10 in vacuum. A film formation mask 11 is positioned on the substrate 10 after the cooling process, and a hole transport layer is formed on the substrate 10 through the film forming mask 11, afterwards, at least an organic light emitting layer for one color is formed. The cooling at pretreatment process is carried out in a cooling chamber 24 after heating treatment in a baking chamber 23, and after vacuum plasma treatment in a pretreatment chamber 25.
TW095107065A 2005-03-17 2006-03-02 Method for manufacturing organic el device and organic el device manufacturing apparatus TWI406442B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005076760A JP4780983B2 (en) 2005-03-17 2005-03-17 Organic EL device manufacturing method

Publications (2)

Publication Number Publication Date
TW200644312A true TW200644312A (en) 2006-12-16
TWI406442B TWI406442B (en) 2013-08-21

Family

ID=37002930

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095107065A TWI406442B (en) 2005-03-17 2006-03-02 Method for manufacturing organic el device and organic el device manufacturing apparatus

Country Status (4)

Country Link
JP (1) JP4780983B2 (en)
KR (1) KR101229595B1 (en)
CN (1) CN1835258A (en)
TW (1) TWI406442B (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5081516B2 (en) 2007-07-12 2012-11-28 株式会社ジャパンディスプレイイースト Vapor deposition method and vapor deposition apparatus
JP4684372B1 (en) * 2010-04-27 2011-05-18 株式会社シンクロン Manufacturing method of semiconductor light emitting device substrate
JP5771372B2 (en) * 2010-08-02 2015-08-26 株式会社アルバック Plasma processing apparatus and pretreatment method
JP5843779B2 (en) * 2010-10-12 2016-01-13 株式会社カネカ Organic EL device manufacturing equipment
CN102054910B (en) * 2010-11-19 2013-07-31 理想能源设备(上海)有限公司 LED chip process integration system and treating method thereof
KR101878084B1 (en) * 2013-12-26 2018-07-12 카티바, 인크. Apparatus and techniques for thermal treatment of electronic devices
KR102300039B1 (en) 2014-08-04 2021-09-10 삼성디스플레이 주식회사 Apparatus for manufacturing display apparatus and method of manufacturing display apparatus
JP6605657B1 (en) * 2018-05-24 2019-11-13 キヤノントッキ株式会社 Film forming apparatus, film forming method, and electronic device manufacturing method
KR20210080776A (en) * 2019-12-23 2021-07-01 캐논 톡키 가부시키가이샤 Film-forming system and substrate conveying system

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4608172B2 (en) * 2000-03-22 2011-01-05 出光興産株式会社 Organic EL display device manufacturing method and organic EL display device manufacturing method using the same
JP2003208977A (en) * 2002-01-11 2003-07-25 Seiko Epson Corp Manufacturing method of organic el device and its equipment, electrooptic equipment, and electronic device
JP4368633B2 (en) * 2002-08-01 2009-11-18 株式会社半導体エネルギー研究所 Manufacturing equipment
JP2004171862A (en) * 2002-11-19 2004-06-17 Seiko Epson Corp Manufacturing device of organic el device, manufacturing method of organic el device, organic el device and electronic equipment
JPWO2004064453A1 (en) * 2003-01-10 2006-05-18 株式会社半導体エネルギー研究所 Light emitting device and manufacturing method thereof

Also Published As

Publication number Publication date
KR20060101324A (en) 2006-09-22
JP4780983B2 (en) 2011-09-28
JP2006260939A (en) 2006-09-28
CN1835258A (en) 2006-09-20
TWI406442B (en) 2013-08-21
KR101229595B1 (en) 2013-02-04

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