KR101229595B1 - 유기 ｅｌ 소자 제조 방법 및 유기 ｅｌ 소자 제조 장치 - Google Patents

유기 ｅｌ 소자 제조 방법 및 유기 ｅｌ 소자 제조 장치 Download PDF

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Publication number
KR101229595B1
KR101229595B1 KR1020060024554A KR20060024554A KR101229595B1 KR 101229595 B1 KR101229595 B1 KR 101229595B1 KR 1020060024554 A KR1020060024554 A KR 1020060024554A KR 20060024554 A KR20060024554 A KR 20060024554A KR 101229595 B1 KR101229595 B1 KR 101229595B1
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KR
South Korea
Prior art keywords
substrate
organic
chamber
cooling
mask
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KR1020060024554A
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English (en)
Korean (ko)
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KR20060101324A (ko
Inventor
고지 하네
Original Assignee
가부시키가이샤 알박
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Publication of KR20060101324A publication Critical patent/KR20060101324A/ko
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Publication of KR101229595B1 publication Critical patent/KR101229595B1/ko

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    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01F—PROCESSING OF HARVESTED PRODUCE; HAY OR STRAW PRESSES; DEVICES FOR STORING AGRICULTURAL OR HORTICULTURAL PRODUCE
    • A01F25/00—Storing agricultural or horticultural produce; Hanging-up harvested fruit
    • A01F25/16—Arrangements in forage silos
    • A—HUMAN NECESSITIES
    • A23—FOODS OR FOODSTUFFS; TREATMENT THEREOF, NOT COVERED BY OTHER CLASSES
    • A23B—PRESERVING, e.g. BY CANNING, MEAT, FISH, EGGS, FRUIT, VEGETABLES, EDIBLE SEEDS; CHEMICAL RIPENING OF FRUIT OR VEGETABLES; THE PRESERVED, RIPENED, OR CANNED PRODUCTS
    • A23B9/00—Preservation of edible seeds, e.g. cereals
    • A23B9/08—Drying; Subsequent reconstitution
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
    • E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
    • E04B1/62—Insulation or other protection; Elements or use of specified material therefor
    • E04B1/74—Heat, sound or noise insulation, absorption, or reflection; Other building methods affording favourable thermal or acoustical conditions, e.g. accumulating of heat within walls
    • E04B1/76—Heat, sound or noise insulation, absorption, or reflection; Other building methods affording favourable thermal or acoustical conditions, e.g. accumulating of heat within walls specifically with respect to heat only
    • E04B1/7608—Heat, sound or noise insulation, absorption, or reflection; Other building methods affording favourable thermal or acoustical conditions, e.g. accumulating of heat within walls specifically with respect to heat only comprising a prefabricated insulating layer, disposed between two other layers or panels
    • E04B1/7612—Heat, sound or noise insulation, absorption, or reflection; Other building methods affording favourable thermal or acoustical conditions, e.g. accumulating of heat within walls specifically with respect to heat only comprising a prefabricated insulating layer, disposed between two other layers or panels in combination with an air space

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  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Architecture (AREA)
  • Environmental Sciences (AREA)
  • Civil Engineering (AREA)
  • Structural Engineering (AREA)
  • Electromagnetism (AREA)
  • Acoustics & Sound (AREA)
  • Wood Science & Technology (AREA)
  • Zoology (AREA)
  • Chemical & Material Sciences (AREA)
  • Food Science & Technology (AREA)
  • Polymers & Plastics (AREA)
  • Physical Vapour Deposition (AREA)
  • Electroluminescent Light Sources (AREA)
KR1020060024554A 2005-03-17 2006-03-16 유기 ｅｌ 소자 제조 방법 및 유기 ｅｌ 소자 제조 장치 KR101229595B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005076760A JP4780983B2 (ja) 2005-03-17 2005-03-17 有機ｅｌ素子製造方法
JPJP-P-2005-00076760 2005-03-17

Publications (2)

Publication Number Publication Date
KR20060101324A KR20060101324A (ko) 2006-09-22
KR101229595B1 true KR101229595B1 (ko) 2013-02-04

Family

ID=37002930

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020060024554A KR101229595B1 (ko) 2005-03-17 2006-03-16 유기 ｅｌ 소자 제조 방법 및 유기 ｅｌ 소자 제조 장치

Country Status (4)

Country Link
JP (1) JP4780983B2 (zh)
KR (1) KR101229595B1 (zh)
CN (1) CN1835258A (zh)
TW (1) TWI406442B (zh)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5081516B2 (ja) 2007-07-12 2012-11-28 株式会社ジャパンディスプレイイースト 蒸着方法および蒸着装置
JP4684372B1 (ja) * 2010-04-27 2011-05-18 株式会社シンクロン 半導体発光素子基板の製造方法
JP5771372B2 (ja) * 2010-08-02 2015-08-26 株式会社アルバック プラズマ処理装置及び前処理方法
JP5843779B2 (ja) * 2010-10-12 2016-01-13 株式会社カネカ 有機ｅｌ素子の製造装置
CN102054910B (zh) * 2010-11-19 2013-07-31 理想能源设备(上海)有限公司 Led芯片工艺集成系统及其处理方法
KR101878084B1 (ko) * 2013-12-26 2018-07-12 카티바, 인크. 전자 장치의 열 처리를 위한 장치 및 기술
KR102300039B1 (ko) 2014-08-04 2021-09-10 삼성디스플레이 주식회사 표시 장치의 제조 장치 및 표시 장치의 제조 방법
JP6605657B1 (ja) * 2018-05-24 2019-11-13 キヤノントッキ株式会社 成膜装置、成膜方法及び電子デバイスの製造方法
KR20210080776A (ko) * 2019-12-23 2021-07-01 캐논 톡키 가부시키가이샤 성막 시스템 및 기판 반송 시스템

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020005049A (ko) * 2000-03-22 2002-01-16 도미나가 가즈토 유기 전기발광 표시장치의 제조장치 및 이를 이용한 유기전기발광 표시장치의 제조방법
US20040229080A1 (en) 2003-01-10 2004-11-18 Semiconductor Energy Laboratory Co., Ltd. Light emitting element and method for manufacturing the same

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003208977A (ja) * 2002-01-11 2003-07-25 Seiko Epson Corp 有機ｅｌ装置の製造方法及びその装置、電気光学装置、並びに電子機器
JP4368633B2 (ja) * 2002-08-01 2009-11-18 株式会社半導体エネルギー研究所 製造装置
JP2004171862A (ja) * 2002-11-19 2004-06-17 Seiko Epson Corp 有機ｅｌ装置の製造装置、有機ｅｌ装置の製造方法、有機ｅｌ装置、並びに電子機器

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020005049A (ko) * 2000-03-22 2002-01-16 도미나가 가즈토 유기 전기발광 표시장치의 제조장치 및 이를 이용한 유기전기발광 표시장치의 제조방법
US20040229080A1 (en) 2003-01-10 2004-11-18 Semiconductor Energy Laboratory Co., Ltd. Light emitting element and method for manufacturing the same

Also Published As

Publication number Publication date
KR20060101324A (ko) 2006-09-22
JP4780983B2 (ja) 2011-09-28
JP2006260939A (ja) 2006-09-28
CN1835258A (zh) 2006-09-20
TWI406442B (zh) 2013-08-21
TW200644312A (en) 2006-12-16

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