JP4674120B2 - 配線基板およびその製造方法 - Google Patents
配線基板およびその製造方法 Download PDFInfo
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- JP4674120B2 JP4674120B2 JP2005166075A JP2005166075A JP4674120B2 JP 4674120 B2 JP4674120 B2 JP 4674120B2 JP 2005166075 A JP2005166075 A JP 2005166075A JP 2005166075 A JP2005166075 A JP 2005166075A JP 4674120 B2 JP4674120 B2 JP 4674120B2
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Description
(1)配線導体を有する絶縁基板の表面に、フリップチップタイプの第一の半導体素子の電極が半田を介して接続される銅から成る第一の接続パッドと、ワイヤボンディングタイプの第二の半導体素子の電極がボンディングワイヤを介して接続される銅から成る第二の接続パッドとが形成されているととともに、前記第一の接続パッドおよび第二の接続パッドの表面にリンを3〜10質量%含有する無電解ニッケルめっき皮膜と、リンを2〜5質量%含有する厚みが0.01〜0.2μmの還元型無電解パラジウムめっき皮膜と、厚みが0.03〜0.1μmの置換還元型無電解金めっき皮膜とが順次被着されていることを特徴とする配線基板。
(2)無電解ニッケルめっき皮膜の厚みが0.5〜10μmである前記(1)記載の配線基板。
(3)配線導体を有する絶縁基板の表面に形成された、フリップチップタイプの第一の半導体素子の電極が半田を介して接続される銅から成る第一の接続パッドおよびワイヤボンディングタイプの第二の半導体素子の電極がボンディングワイヤを介して接続される銅から成る第二の接続パッドの表面に、リンを3〜10質量%含有する無電解ニッケルめっき皮膜と、リンを2〜5質量%含有する厚みが0.01〜0.2μmの還元型無電解パラジウムめっき皮膜と、厚みが0.03〜0.1μmの置換還元型無電解金めっき皮膜とを順次被着させることを特徴とする配線基板の製造方法。
評価用基板としてガラス織物にエポキシ樹脂を含浸させて成る一辺が25mmで厚みが0.50mmの正方形状のコア基板上にエポキシ樹脂から成る厚みが100μmの絶縁層を5層ずつ積層するとともに、最上層の絶縁層上に厚みが12μmの銅めっき皮膜から成る直径が0.50mmの第一の試験パッドおよび幅が0.05mmで長さが0.1mmの第二の試験パッドをそれぞれ500個ずつ形成し、評価用ベース基板を準備した。
前述の評価用ベース基板における各試験パッドの露出表面を、上村工業株式会社製の酸性脱脂処理液ACL009を用いて55℃の温度で5分脱脂処理した後、15%の過硫酸ソーダ水溶液を用いて8分間ソフトエッチング処理し、さらに5質量%の硫酸溶液を用いて常温で1分酸洗浄処理し、その上に上村工業株式会社製の無電解ニッケルめっき液NPR−4を用いて無電解ニッケルめっき皮膜を6μmの厚みに被着させた。次に、その上に上村工業株式会社製の置換型の無電解パラジウムめっき液MSR−28を用いて置換型無電解パラジウムめっき皮膜を0.05μmの厚みに被着させ、その上に上村工業株式会社製の中性置換還元型無電解金めっき液TSB−72を用いて厚みが0.05μmの置換還元型無電解金めっき皮膜を被着させ、比較例1の評価用基板を得た。
前述の評価用ベース基板における各試験パッドの露出表面を、上村工業株式会社製の酸性脱脂処理液ACL009を用いて55℃の温度で5分脱脂処理した後、15%の過硫酸ソーダ水溶液を用いて8分間ソフトエッチング処理し、さらに5質量%の硫酸溶液を用いて常温で1分酸洗浄処理し、その上に上村工業株式会社製の無電解ニッケルめっき液NPR−4を用いて無電解ニッケルめっき皮膜を6μmの厚みに被着させた。次に、その上に上村工業株式会社製の還元型の無電解パラジウムめっき液TPD−30を用いて還元型無電解パラジウムめっき皮膜を0.05μmの厚みに被着させ、その上に上村工業株式会社製の置換型無電解金めっき液TNC−21を用いて厚みが0.05μmの置換型無電解金めっき皮膜を被着させ、さらにその上に上村工業株式会社製の還元型無電解金めっき液TMX−22を用いて厚みが0.30μmの還元型無電解金めっき皮膜を被着させ、比較例2の評価用基板を得た。
前述の評価用ベース基板における各試験パッドの露出表面を、上村工業株式会社製の酸性脱脂処理液ACL009を用いて55℃の温度で5分脱脂処理した後、15%の過硫酸ソーダ水溶液を用いて8分間ソフトエッチング処理し、さらに5質量%の硫酸溶液を用いて常温で1分酸洗浄処理し、その上に上村工業株式会社製の無電解ニッケルめっき液NPR−4を用いて無電解ニッケルめっき皮膜を6μmの厚みに被着させた。次に、その上に上村工業株式会社製の置換型の無電解パラジウムめっき液MSR−28を用いて置換型無電解パラジウムめっき皮膜を0.05μmの厚みに被着させ、その上に上村工業株式会社製の置換型無電解金めっき液TNC−21を用いて厚みが0.05μmの置換型無電解金めっき皮膜を被着させ、さらにその上に上村工業株式会社製の還元型無電解金めっき液TMX−22を用いて厚みが0.30μmの還元型無電解金めっき皮膜を被着させ、比較例3の評価用基板を得た。
前述の評価用ベース基板における各試験パッドの露出表面を、上村工業株式会社製の酸性脱脂処理液ACL009を用いて55℃の温度で5分脱脂処理した後、15%の過硫酸ソーダ水溶液を用いて8分間ソフトエッチング処理し、さらに5質量%の硫酸溶液を用いて常温で1分酸洗浄処理し、その上に上村工業株式会社製の無電解ニッケルめっき液NPR−4を用いて無電解ニッケルめっき皮膜を6μmの厚みに被着させた。次に、その上に上村工業株式会社製の中性置換還元型無電解金めっき液TSB−72を用いて厚みが0.05μmの置換還元型無電解金めっき皮膜を被着させ、さらにその上に上村工業株式会社製の還元型無電解金めっき液TMX−22を用いて厚みが0.30μmの還元型無電解金めっき皮膜を被着させ、比較例4の評価用基板を得た。
次に、上記実施例1〜4および比較例1〜4の評価用基板における第一の試験パッド上にRMA系のフラックスを塗布後、その上に錫96.5質量%と銀3.0質量%と銅0.5質量%とから成る体積が0.20m3の半田ボールを搭載し、それを150〜170℃の温度で120秒間保持して予備加熱した後、217℃以上の保持時間が60秒間でピーク温度が250℃となる加熱条件で窒素ガス雰囲気中においてリフローさせた後、常温に冷却することにより第一の試験パッドに半田ボールを接合した。
2・・・・・配線導体
2a,2b・・・・・接続パッド
3a,3b・・・・・電子部品としての半導体素子
7,9・・・・・半田
8・・・・・ボンディングワイヤ
11・・・・・無電解ニッケルめっき皮膜
12・・・・・還元型無電解パラジウムめっき皮膜
13・・・・・置換還元型無電解金めっき皮膜
100・・・・・配線基板
Claims (3)
- 配線導体を有する絶縁基板の表面に、フリップチップタイプの第一の半導体素子の電極が半田を介して接続される銅から成る第一の接続パッドと、ワイヤボンディングタイプの第二の半導体素子の電極がボンディングワイヤを介して接続される銅から成る第二の接続パッドとが形成されているととともに、前記第一の接続パッドおよび第二の接続パッドの表面にリンを3〜10質量%含有する無電解ニッケルめっき皮膜と、リンを2〜5質量%含有する厚みが0.01〜0.2μmの還元型無電解パラジウムめっき皮膜と、厚みが0.03〜0.1μmの置換還元型無電解金めっき皮膜とが順次被着されていることを特徴とする配線基板。
- 無電解ニッケルめっき皮膜の厚みが0.5〜10μmである請求項1記載の配線基板。
- 配線導体を有する絶縁基板の表面に形成された、フリップチップタイプの第一の半導体素子の電極が半田を介して接続される銅から成る第一の接続パッドおよびワイヤボンディングタイプの第二の半導体素子の電極がボンディングワイヤを介して接続される銅から成る第二の接続パッドの表面に、リンを3〜10質量%含有する無電解ニッケルめっき皮膜と、リンを2〜5質量%含有する厚みが0.01〜0.2μmの還元型無電解パラジウムめっき皮膜と、厚みが0.03〜0.1μmの置換還元型無電解金めっき皮膜とを順次被着させることを特徴とする配線基板の製造方法。
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JP2012009510A (ja) * | 2010-06-22 | 2012-01-12 | Sumitomo Bakelite Co Ltd | 金属微細パターン付き基材、プリント配線板、及び半導体装置、並びに、金属微細パターン付き基材及びプリント配線板の製造方法 |
KR101310256B1 (ko) * | 2011-06-28 | 2013-09-23 | 삼성전기주식회사 | 인쇄회로기판의 무전해 표면처리 도금층 및 이의 제조방법 |
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JP5844101B2 (ja) * | 2011-09-15 | 2016-01-13 | 新光電気工業株式会社 | 発光装置用の配線基板、発光装置及び発光装置用配線基板の製造方法 |
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