JP4664372B2 - イメージセンサー用電子パッケージおよびそのパッケージング方法 - Google Patents
イメージセンサー用電子パッケージおよびそのパッケージング方法 Download PDFInfo
- Publication number
- JP4664372B2 JP4664372B2 JP2007540263A JP2007540263A JP4664372B2 JP 4664372 B2 JP4664372 B2 JP 4664372B2 JP 2007540263 A JP2007540263 A JP 2007540263A JP 2007540263 A JP2007540263 A JP 2007540263A JP 4664372 B2 JP4664372 B2 JP 4664372B2
- Authority
- JP
- Japan
- Prior art keywords
- solder
- sealing ring
- substrate
- semiconductor die
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims abstract description 63
- 238000004806 packaging method and process Methods 0.000 title description 15
- 229910000679 solder Inorganic materials 0.000 claims abstract description 253
- 238000007789 sealing Methods 0.000 claims abstract description 174
- 239000000758 substrate Substances 0.000 claims abstract description 96
- 239000004065 semiconductor Substances 0.000 claims abstract description 62
- 238000004519 manufacturing process Methods 0.000 claims abstract description 28
- 238000004891 communication Methods 0.000 claims abstract description 3
- 239000000463 material Substances 0.000 claims description 36
- 229920000642 polymer Polymers 0.000 claims description 24
- 239000002184 metal Substances 0.000 claims description 23
- 229910052751 metal Inorganic materials 0.000 claims description 23
- 238000002161 passivation Methods 0.000 claims description 16
- 238000005476 soldering Methods 0.000 claims description 8
- 239000010409 thin film Substances 0.000 claims description 3
- 238000009501 film coating Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000002834 transmittance Methods 0.000 claims 1
- 238000013022 venting Methods 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 43
- 239000010410 layer Substances 0.000 description 38
- 230000008569 process Effects 0.000 description 26
- 239000000919 ceramic Substances 0.000 description 19
- 238000005516 engineering process Methods 0.000 description 14
- 239000011521 glass Substances 0.000 description 14
- 239000002245 particle Substances 0.000 description 12
- 239000004593 Epoxy Substances 0.000 description 11
- 238000010521 absorption reaction Methods 0.000 description 11
- 230000004907 flux Effects 0.000 description 10
- 229920002120 photoresistant polymer Polymers 0.000 description 9
- 230000008901 benefit Effects 0.000 description 8
- 239000010949 copper Substances 0.000 description 8
- 238000011109 contamination Methods 0.000 description 6
- 230000035515 penetration Effects 0.000 description 6
- 239000002861 polymer material Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- 239000004033 plastic Substances 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 238000004100 electronic packaging Methods 0.000 description 4
- 238000009713 electroplating Methods 0.000 description 4
- 230000005496 eutectics Effects 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 238000006263 metalation reaction Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- 238000004528 spin coating Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910020836 Sn-Ag Inorganic materials 0.000 description 2
- 229910020988 Sn—Ag Inorganic materials 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 238000005272 metallurgy Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- UTMWFJSRHLYRPY-UHFFFAOYSA-N 3,3',5,5'-tetrachlorobiphenyl Chemical compound ClC1=CC(Cl)=CC(C=2C=C(Cl)C=C(Cl)C=2)=C1 UTMWFJSRHLYRPY-UHFFFAOYSA-N 0.000 description 1
- 229920001342 Bakelite® Polymers 0.000 description 1
- 229910006164 NiV Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910020816 Sn Pb Inorganic materials 0.000 description 1
- 229910020922 Sn-Pb Inorganic materials 0.000 description 1
- 229910008783 Sn—Pb Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical group [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000003466 anti-cipated effect Effects 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 239000004637 bakelite Substances 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 229910002056 binary alloy Inorganic materials 0.000 description 1
- 230000001413 cellular effect Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 229920001688 coating polymer Polymers 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000010943 off-gassing Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 230000002085 persistent effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000013557 residual solvent Substances 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14618—Containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0203—Containers; Encapsulations, e.g. encapsulation of photodiodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/2901—Shape
- H01L2224/29011—Shape comprising apertures or cavities
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
- H01L2224/73203—Bump and layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01077—Iridium [Ir]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/0132—Binary Alloys
- H01L2924/01322—Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
- H01L2924/097—Glass-ceramics, e.g. devitrified glass
- H01L2924/09701—Low temperature co-fired ceramic [LTCC]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/146—Mixed devices
- H01L2924/1461—MEMS
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/161—Cap
- H01L2924/1615—Shape
- H01L2924/16195—Flat cap [not enclosing an internal cavity]
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Electromagnetism (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Wire Bonding (AREA)
Description
Claims (10)
- (a)密閉領域が設けられ、前記密閉領域を囲むように第1ソルダ密閉リングパッドが形成されている少なくとも一つの半導体ダイ;
(b)該半導体ダイに結合され前記第1ソルダ密閉リングパッドに対応して前記半導体ダイの密閉領域に対向する基板の密閉領域を囲むように第2ソルダ密閉リングパッドが形成されている基板;
(c)前記基板および前記半導体ダイの前記第1および第2ソルダ密閉パッドの間に介在されて前記密閉領域を囲むように形成され、前記密閉領域と開放疎通される少なくとも一つの空気通路が形成されているソルダ密閉リング構造を含み、
前記第1および第2ソルダ密閉リングパッドの夫々は少なくとも互いに離隔された主ライン要素および副ライン要素を含んで、前記主ライン要素は前記密閉領域を囲んで前記空気通路が設けられるように開ループ状に設けられ、前記副ライン要素は前記空気通路を遮るように配置されたことを特徴とする半導体素子パッケージ。 - 前記空気通路を遮断するように配置されたポリマー密閉構造をさらに含む請求項1に記載の半導体素子パッケージ。
- 前記副ライン要素は前記密閉領域の外側に配置されたことを特徴とする請求項1に記載の半導体素子パッケージ。
- 前記副ライン要素は前記密閉領域の内側に配置されたことを特徴とする請求項1に記載の半導体素子パッケージ。
- 前記半導体ダイはイメージセンサーを含んで、前記密閉領域はイメージ感知領域を形成し、前記基板は所定波長範囲内の光に対して透明な材質から形成されたことを特徴とする請求項1に記載の半導体素子パッケージ。
- 前記基板は前記所定波長範囲内の光の透過率を変化させるために少なくとも一表面に形成された薄膜コーティングを含むことを特徴とする請求項5に記載の半導体素子パッケージ。
- (a)複数の電気端子と、これら電気端子に電気的に接続された複数のフリップチップソルダバンプパッドと、密閉領域と、前記密閉領域を囲むように形成された第1ソルダ密閉リングパッドとを含む半導体ダイ;
(b)少なくとも一つのパターニングされた金属層と、該パターニングされた金属層上に形成された少なくとも一つのパッシベーション層と、前記半導体ダイの前記フリップチップバンプパッドに結合するために前記パターニングされた金属およびパッシベーション層によって定義された複数のフリップチップソルダバンプパッドと、前記第1ソルダ密閉リングパッドと対応する領域に形成された第2ソルダ密閉リングパッドとを含んで、前記半導体ダイと結合される基板;
(c)前記半導体ダイおよび基板の前記フリップチップソルダバンプパッドを接続する複数のフリップチップソルダ接合;および
(d)前記基板および半導体ダイの前記第1および第2ソルダ密閉リングパッドの間に介在されて前記密閉領域を囲むように形成され、前記密閉領域と開放疎通される少なくとも一つの空気通路が形成されたソルダ密閉リング構造を含み、
前記第1および第2ソルダ密閉リングパッドの夫々は少なくとも互いに離隔された主ライン要素および副ライン要素を含んで、前記主ライン要素は前記密閉領域を囲んで前記空気通路が設けられるように開ループ状に設けられ、前記副ライン要素は前記空気通路を遮るように配置されたことを特徴とする半導体素子パッケージ。 - 前記空気通路を遮断するように配置されたポリマー密閉構造をさらに含むことを特徴とする請求項7に記載の半導体素子パッケージ。
- (a)少なくとも一つの密閉領域と多数の入出力端子を夫々有する多数の半導体ダイを含む半導体ウェーハを用意する段階;
(b)前記各半導体ダイ上に前記密閉領域を囲んで、少なくとも一つの個所が閉じられていないループ状の構造を有する第1ソルダ密閉リングパッドと、前記多数の入出力端子上にフリップチップソルダジョイントを形成するための多数のフリップチップソルダバンプパッドとを形成する段階;
(c)前記半導体ウェーハの前記第1ソルダ密閉リングパッドにソルダ密閉リングを形成するとともに多数のフリップチップソルダバンプパッドに多数のフリップチップソルダバンプを形成する段階;
(d)前記半導体素子と電気的に接続される少なくとも一つの単位基板を設定する段階;
(e)前記単位基板の上部面に前記第1ソルダ密閉リングパッドに対応して前記半導体素子の密閉領域に対向している基板の密閉領域を囲んで、少なくとも一つの個所が閉じられていないループ状の構造を有する第2ソルダ密閉リングパッドと、前記第2ソルダ密閉リングパッドと離隔されて前記半導体ダイの多数のフリップチップソルダバンプパッドと対応する接触端子を形成する段階;
(f)前記半導体ウェーハの多数の半導体ダイを分離した後に各ダイのソルダ密閉リングが前記単位基板の第2ソルダ密閉リングパッドに対応して接触し、多数のフリップチップソルダバンプが多数の接触端子に対応して接触されるように前記単位基板上に前記半導体ダイを位置付ける段階;
(g)前記基板を非真空状態のリフローソルダリングによって加熱してソルダ密閉リングと多数のフリップチップソルダバンプとを融着させる段階;
を含んで、
前記第1および第2ソルダ密閉リングパッドの夫々は少なくとも互いに離隔された主ライン要素および副ライン要素を含んで、前記主ライン要素は前記密閉領域を囲んで前記空気通路が設けられるように開ループ状に設けられ、前記副ライン要素は前記空気通路を遮るように配置されたことを特徴とする半導体素子のパッケージ製造方法。 - 前記半導体ダイをフリップチップ実装した後、前記空気通路を遮断するポリマー密閉構造を形成する段階をさらに含むことを特徴とする請求項9に記載の半導体素子のパッケージ製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020040090584A KR100498708B1 (ko) | 2004-11-08 | 2004-11-08 | 반도체 소자용 전자패키지 및 그 패키징 방법 |
PCT/KR2005/003748 WO2006049473A1 (en) | 2004-11-08 | 2005-11-07 | Electronic package for image sensor, and the packaging method thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008519463A JP2008519463A (ja) | 2008-06-05 |
JP4664372B2 true JP4664372B2 (ja) | 2011-04-06 |
Family
ID=36315465
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007540263A Active JP4664372B2 (ja) | 2004-11-08 | 2005-11-07 | イメージセンサー用電子パッケージおよびそのパッケージング方法 |
Country Status (6)
Country | Link |
---|---|
US (2) | US7141869B2 (ja) |
JP (1) | JP4664372B2 (ja) |
KR (1) | KR100498708B1 (ja) |
CN (1) | CN100550402C (ja) |
TW (1) | TWI299894B (ja) |
WO (1) | WO2006049473A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10763286B2 (en) | 2015-07-23 | 2020-09-01 | Sony Corporation | Semiconductor device, manufacturing method thereof, and electronic apparatus |
US11410896B2 (en) | 2016-02-08 | 2022-08-09 | Sony Corporation | Glass interposer module, imaging device, and electronic apparatus |
Families Citing this family (82)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7470142B2 (en) * | 2004-06-21 | 2008-12-30 | Sang-Yun Lee | Wafer bonding method |
AU2003209564A1 (en) * | 2002-03-19 | 2003-09-29 | Koninklijke Philips Electronics N.V. | Chip stack with intermediate cavity |
JP3742057B2 (ja) | 2002-12-25 | 2006-02-01 | 株式会社バッファロー | 無線情報通信における電波状態の解析技術 |
US7375431B1 (en) * | 2005-03-18 | 2008-05-20 | National Semiconductor Corporation | Solder bump formation in electronics packaging |
TWI281239B (en) * | 2005-05-11 | 2007-05-11 | Advanced Semiconductor Eng | CIS package and method thereof |
TW200644261A (en) | 2005-06-06 | 2006-12-16 | Megica Corp | Chip-package structure and manufacturing process thereof |
US7687400B2 (en) | 2005-06-14 | 2010-03-30 | John Trezza | Side stacking apparatus and method |
US7786592B2 (en) | 2005-06-14 | 2010-08-31 | John Trezza | Chip capacitive coupling |
US7521806B2 (en) | 2005-06-14 | 2009-04-21 | John Trezza | Chip spanning connection |
US7534722B2 (en) | 2005-06-14 | 2009-05-19 | John Trezza | Back-to-front via process |
US7781886B2 (en) | 2005-06-14 | 2010-08-24 | John Trezza | Electronic chip contact structure |
US7560813B2 (en) | 2005-06-14 | 2009-07-14 | John Trezza | Chip-based thermo-stack |
US7851348B2 (en) | 2005-06-14 | 2010-12-14 | Abhay Misra | Routingless chip architecture |
US7838997B2 (en) | 2005-06-14 | 2010-11-23 | John Trezza | Remote chip attachment |
US8456015B2 (en) | 2005-06-14 | 2013-06-04 | Cufer Asset Ltd. L.L.C. | Triaxial through-chip connection |
US7989958B2 (en) | 2005-06-14 | 2011-08-02 | Cufer Assett Ltd. L.L.C. | Patterned contact |
US7767493B2 (en) * | 2005-06-14 | 2010-08-03 | John Trezza | Post & penetration interconnection |
TWI281700B (en) * | 2005-08-11 | 2007-05-21 | Ind Tech Res Inst | Method and device for enhancing solderability |
US7303935B2 (en) * | 2005-09-08 | 2007-12-04 | Teledyne Licensing, Llc | High temperature microelectromechanical (MEM) devices and fabrication method |
US7635077B2 (en) * | 2005-09-27 | 2009-12-22 | Honeywell International Inc. | Method of flip chip mounting pressure sensor dies to substrates and pressure sensors formed thereby |
JP4184371B2 (ja) * | 2005-10-03 | 2008-11-19 | 日本テキサス・インスツルメンツ株式会社 | 半導体チップ、半導体装置およびそれらの製造方法 |
JP4834369B2 (ja) * | 2005-10-07 | 2011-12-14 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
US20070090478A1 (en) * | 2005-10-18 | 2007-04-26 | Po-Hung Chen | Image sensor package structure |
KR100870820B1 (ko) * | 2005-12-29 | 2008-11-27 | 매그나칩 반도체 유한회사 | 이미지 센서 및 그의 제조방법 |
US7547576B2 (en) * | 2006-02-01 | 2009-06-16 | International Business Machines Corporation | Solder wall structure in flip-chip technologies |
KR100748722B1 (ko) * | 2006-04-03 | 2007-08-13 | 삼성전자주식회사 | 미소소자 패키지 모듈 및 그 제조방법 |
US7687397B2 (en) | 2006-06-06 | 2010-03-30 | John Trezza | Front-end processed wafer having through-chip connections |
JP4802907B2 (ja) * | 2006-07-25 | 2011-10-26 | パナソニック株式会社 | 半導体実装構造 |
TWI423665B (zh) * | 2006-10-10 | 2014-01-11 | Pentax Ricoh Imaging Co Ltd | 角速度偵測設備 |
KR100788280B1 (ko) | 2006-12-29 | 2007-12-27 | 옵토팩 주식회사 | 반도체 소자 패키지 및 그 패키징 방법 |
TW200834756A (en) * | 2007-02-01 | 2008-08-16 | Advanced Semiconductor Eng | Package and method of making the same |
US7670874B2 (en) | 2007-02-16 | 2010-03-02 | John Trezza | Plated pillar package formation |
US7883937B1 (en) * | 2007-04-30 | 2011-02-08 | Altera Corporation | Electronic package and method of forming the same |
US20090032925A1 (en) * | 2007-07-31 | 2009-02-05 | England Luke G | Packaging with a connection structure |
KR100876107B1 (ko) * | 2007-08-17 | 2008-12-26 | 삼성전기주식회사 | 웨이퍼 레벨 패키지 및 그 제조방법 |
EP2034718A1 (en) * | 2007-09-05 | 2009-03-11 | THOMSON Licensing | System and method for positioning and fixing an image sensor to a beamsplitter |
KR20090052576A (ko) * | 2007-11-21 | 2009-05-26 | 삼성전기주식회사 | 반도체 패키지 |
WO2009104910A2 (ko) * | 2008-02-22 | 2009-08-27 | (주)에스엠엘전자 | 접합용 구조물 및 이를 이용한 기판 접합 방법 |
US7888758B2 (en) * | 2008-03-12 | 2011-02-15 | Aptina Imaging Corporation | Method of forming a permanent carrier and spacer wafer for wafer level optics and associated structure |
US9147812B2 (en) * | 2008-06-24 | 2015-09-29 | Cree, Inc. | Methods of assembly for a semiconductor light emitting device package |
US20100289104A1 (en) * | 2009-05-14 | 2010-11-18 | Optopac Co., Ltd. | Photosensor package |
CN102439719B (zh) * | 2009-05-14 | 2015-06-24 | 高通股份有限公司 | 系统级封装 |
KR100976812B1 (ko) * | 2010-02-08 | 2010-08-20 | 옵토팩 주식회사 | 전자 소자 패키지 및 그 제조 방법 |
KR100976813B1 (ko) | 2010-04-23 | 2010-08-20 | 옵토팩 주식회사 | 전자 소자 패키지 및 그 제조 방법 |
US8933567B2 (en) | 2010-05-21 | 2015-01-13 | Qualcomm Incorporated | Electrically broken, but mechanically continuous die seal for integrated circuits |
JP5541088B2 (ja) * | 2010-10-28 | 2014-07-09 | ソニー株式会社 | 撮像素子パッケージ、撮像素子パッケージの製造方法、及び、電子機器 |
TW201338139A (zh) * | 2012-03-09 | 2013-09-16 | Azurewave Technologies Inc | 用於降低整體厚度的影像感測模組 |
TWI449167B (zh) * | 2012-10-09 | 2014-08-11 | Kingpaktechnology Inc | 高解析相機模組之結構及製造方法 |
US9263377B2 (en) * | 2012-11-08 | 2016-02-16 | Taiwan Semiconductor Manufacturing Company, Ltd. | POP structures with dams encircling air gaps and methods for forming the same |
US9418971B2 (en) * | 2012-11-08 | 2016-08-16 | Taiwan Semiconductor Manufacturing Company, Ltd. | Package-on-package structure including a thermal isolation material and method of forming the same |
CN103395735B (zh) * | 2013-08-05 | 2015-12-02 | 天津大学 | 微机电系统器件的封装结构 |
US9231124B2 (en) | 2013-09-25 | 2016-01-05 | Delphi Technologies, Inc. | Ball grid array packaged camera device soldered to a substrate |
US9230739B2 (en) | 2013-10-29 | 2016-01-05 | Uchicago Argonne, Llc | PLZT capacitor on glass substrate |
US9627573B2 (en) | 2014-02-21 | 2017-04-18 | Maxim Integreated Products, Inc. | Optical sensor having a light emitter and a photodetector assembly directly mounted to a transparent substrate |
US20150262902A1 (en) | 2014-03-12 | 2015-09-17 | Invensas Corporation | Integrated circuits protected by substrates with cavities, and methods of manufacture |
WO2016031332A1 (ja) * | 2014-08-26 | 2016-03-03 | シャープ株式会社 | カメラモジュール |
US9997554B2 (en) * | 2014-12-24 | 2018-06-12 | Stmicroelectronics Pte Ltd | Chip scale package camera module with glass interposer having lateral conductive traces between a first and second glass layer and method for making the same |
US10107662B2 (en) | 2015-01-30 | 2018-10-23 | Honeywell International Inc. | Sensor assembly |
WO2016144039A1 (en) | 2015-03-06 | 2016-09-15 | Samsung Electronics Co., Ltd. | Circuit element package, manufacturing method thereof, and manufacturing apparatus thereof |
CN105097862A (zh) * | 2015-08-28 | 2015-11-25 | 苏州晶方半导体科技股份有限公司 | 影像传感器封装结构及其封装方法 |
US10477737B2 (en) | 2016-05-04 | 2019-11-12 | Samsung Electronics Co., Ltd. | Manufacturing method of a hollow shielding structure for circuit elements |
US10477687B2 (en) | 2016-08-04 | 2019-11-12 | Samsung Electronics Co., Ltd. | Manufacturing method for EMI shielding structure |
KR102551657B1 (ko) | 2016-12-12 | 2023-07-06 | 삼성전자주식회사 | 전자파 차폐구조 및 그 제조방법 |
US10002844B1 (en) * | 2016-12-21 | 2018-06-19 | Invensas Bonding Technologies, Inc. | Bonded structures |
US10508030B2 (en) | 2017-03-21 | 2019-12-17 | Invensas Bonding Technologies, Inc. | Seal for microelectronic assembly |
FR3065115B1 (fr) * | 2017-04-10 | 2020-01-24 | Ulis | Boitier hermetique pour un detecteur de rayonnement infrarouge |
US10594020B2 (en) | 2017-07-19 | 2020-03-17 | Samsung Electronics Co., Ltd. | Electronic device having antenna element and method for manufacturing the same |
KR102373931B1 (ko) | 2017-09-08 | 2022-03-14 | 삼성전자주식회사 | 전자파 차폐구조 |
BR112020010627A2 (pt) * | 2017-11-30 | 2020-11-10 | Michael Munoz | sistema sensor sem fio habilitado com internet das coisas (iot) que permite controle de processo, métodos para permitir o controle de processo e a manutenção preditiva, de fabricação de uma cápsula do sensor eletromagnético passivo e de fabricação de componentes de hardware de distribuição equipados com sensor eletromagnético passivo |
US10923408B2 (en) | 2017-12-22 | 2021-02-16 | Invensas Bonding Technologies, Inc. | Cavity packages |
US11380597B2 (en) | 2017-12-22 | 2022-07-05 | Invensas Bonding Technologies, Inc. | Bonded structures |
US11004757B2 (en) | 2018-05-14 | 2021-05-11 | Invensas Bonding Technologies, Inc. | Bonded structures |
CN108391042B (zh) * | 2018-05-21 | 2023-09-19 | 光速视觉(北京)科技有限公司 | 一种真空封装图像传感器芯片的相机图像转换系统 |
US10868061B2 (en) | 2018-08-13 | 2020-12-15 | Semiconductor Components Industries, Llc | Packaging structure for a sensor having a sealing layer |
TWI685125B (zh) * | 2018-12-05 | 2020-02-11 | 海華科技股份有限公司 | 影像擷取模組及可攜式電子裝置 |
CN109748235B (zh) * | 2018-12-29 | 2022-01-07 | 深迪半导体(绍兴)有限公司 | 一种半导体器件及其密封腔体制造工艺和图案转移版 |
EP3771028A1 (en) | 2019-07-25 | 2021-01-27 | Nxp B.V. | Semiconductor device and method |
CN111370498B (zh) * | 2020-03-23 | 2022-05-31 | 中国科学院长春光学精密机械与物理研究所 | 一种探测器小型永久高真空腔体及制备方法 |
CN112539846B (zh) * | 2020-12-04 | 2022-04-22 | 武汉高芯科技有限公司 | 非制冷红外探测器及其像素级封装结构 |
CN113035816B (zh) * | 2021-03-08 | 2022-12-13 | 晨宸辰科技有限公司 | 封装结构和方法、半导体器件和电子设备 |
KR102610614B1 (ko) * | 2021-08-26 | 2023-12-07 | 주식회사 아이에이네트웍스 | 허메틱 실링 패키지 모듈 및 그 제조 방법 |
CN114725011A (zh) * | 2022-03-18 | 2022-07-08 | 南京睿芯峰电子科技有限公司 | 一种气密性芯片结构及其制备方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0637143A (ja) * | 1992-07-15 | 1994-02-10 | Toshiba Corp | 半導体装置および半導体装置の製造方法 |
JP2000337959A (ja) * | 1999-05-28 | 2000-12-08 | Mitsubishi Electric Corp | 赤外線検出器及びその製造方法 |
JP2003204053A (ja) * | 2001-03-05 | 2003-07-18 | Canon Inc | 撮像モジュール及び該撮像モジュールの製造方法、デジタルカメラ |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3292240A (en) | 1963-08-08 | 1966-12-20 | Ibm | Method of fabricating microminiature functional components |
DE3782201T2 (de) | 1986-07-16 | 1993-04-15 | Canon Kk | Halbleiterphotosensor und verfahren zu dessen herstellung. |
US5302778A (en) | 1992-08-28 | 1994-04-12 | Eastman Kodak Company | Semiconductor insulation for optical devices |
IL106892A0 (en) | 1993-09-02 | 1993-12-28 | Pierre Badehi | Methods and apparatus for producing integrated circuit devices |
IL108359A (en) | 1994-01-17 | 2001-04-30 | Shellcase Ltd | Method and device for creating integrated circular devices |
US6117707A (en) | 1994-07-13 | 2000-09-12 | Shellcase Ltd. | Methods of producing integrated circuit devices |
US5877042A (en) * | 1996-08-28 | 1999-03-02 | Motorola, Inc. | Glass/Metal package and method for producing the same |
US6117705A (en) | 1997-04-18 | 2000-09-12 | Amkor Technology, Inc. | Method of making integrated circuit package having adhesive bead supporting planar lid above planar substrate |
US6359333B1 (en) * | 1998-03-31 | 2002-03-19 | Honeywell International Inc. | Wafer-pair having deposited layer sealed chambers |
EP0951068A1 (en) * | 1998-04-17 | 1999-10-20 | Interuniversitair Micro-Elektronica Centrum Vzw | Method of fabrication of a microstructure having an inside cavity |
US6566745B1 (en) | 1999-03-29 | 2003-05-20 | Imec Vzw | Image sensor ball grid array package and the fabrication thereof |
JP2000286401A (ja) | 1999-03-29 | 2000-10-13 | Miyota Kk | 固体撮像装置およびその製造方法 |
JP2001068654A (ja) | 1999-06-25 | 2001-03-16 | Sony Corp | 固体撮像素子および固体撮像素子の製造方法 |
JP2001203913A (ja) | 2000-01-21 | 2001-07-27 | Sony Corp | 撮像装置、カメラモジュール及びカメラシステム |
JP4361658B2 (ja) * | 2000-02-14 | 2009-11-11 | 富士通マイクロエレクトロニクス株式会社 | 実装基板及び実装方法 |
JP2001250889A (ja) | 2000-03-06 | 2001-09-14 | Matsushita Electric Ind Co Ltd | 光素子の実装構造体およびその製造方法 |
KR100464563B1 (ko) | 2000-07-12 | 2004-12-31 | 앰코 테크놀로지 코리아 주식회사 | 반도체 패키지 및 그 제조방법 |
TW454309B (en) | 2000-07-17 | 2001-09-11 | Orient Semiconductor Elect Ltd | Package structure of CCD image-capturing chip |
KR100343432B1 (ko) | 2000-07-24 | 2002-07-11 | 한신혁 | 반도체 패키지 및 그 패키지 방법 |
US20040012698A1 (en) * | 2001-03-05 | 2004-01-22 | Yasuo Suda | Image pickup model and image pickup device |
US6570259B2 (en) * | 2001-03-22 | 2003-05-27 | International Business Machines Corporation | Apparatus to reduce thermal fatigue stress on flip chip solder connections |
JP2003032558A (ja) | 2001-07-13 | 2003-01-31 | Nippon Avionics Co Ltd | イメージセンサicパッケージおよびその製造方法 |
US6580174B2 (en) * | 2001-09-28 | 2003-06-17 | Intel Corporation | Vented vias for via in pad technology yield improvements |
US6747348B2 (en) | 2001-10-16 | 2004-06-08 | Micron Technology, Inc. | Apparatus and method for leadless packaging of semiconductor devices |
JP4766831B2 (ja) * | 2002-11-26 | 2011-09-07 | 株式会社村田製作所 | 電子部品の製造方法 |
-
2004
- 2004-11-08 KR KR1020040090584A patent/KR100498708B1/ko active IP Right Grant
-
2005
- 2005-02-09 US US11/052,864 patent/US7141869B2/en active Active
- 2005-11-04 TW TW094138793A patent/TWI299894B/zh active
- 2005-11-07 JP JP2007540263A patent/JP4664372B2/ja active Active
- 2005-11-07 CN CNB2005800374418A patent/CN100550402C/zh active Active
- 2005-11-07 WO PCT/KR2005/003748 patent/WO2006049473A1/en active Application Filing
-
2006
- 2006-10-24 US US11/585,152 patent/US7384818B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0637143A (ja) * | 1992-07-15 | 1994-02-10 | Toshiba Corp | 半導体装置および半導体装置の製造方法 |
JP2000337959A (ja) * | 1999-05-28 | 2000-12-08 | Mitsubishi Electric Corp | 赤外線検出器及びその製造方法 |
JP2003204053A (ja) * | 2001-03-05 | 2003-07-18 | Canon Inc | 撮像モジュール及び該撮像モジュールの製造方法、デジタルカメラ |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10763286B2 (en) | 2015-07-23 | 2020-09-01 | Sony Corporation | Semiconductor device, manufacturing method thereof, and electronic apparatus |
US11410896B2 (en) | 2016-02-08 | 2022-08-09 | Sony Corporation | Glass interposer module, imaging device, and electronic apparatus |
Also Published As
Publication number | Publication date |
---|---|
KR100498708B1 (ko) | 2005-07-01 |
WO2006049473A1 (en) | 2006-05-11 |
CN100550402C (zh) | 2009-10-14 |
JP2008519463A (ja) | 2008-06-05 |
TWI299894B (en) | 2008-08-11 |
US7141869B2 (en) | 2006-11-28 |
US20060097335A1 (en) | 2006-05-11 |
TW200625565A (en) | 2006-07-16 |
US7384818B2 (en) | 2008-06-10 |
US20070042530A1 (en) | 2007-02-22 |
CN101053080A (zh) | 2007-10-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4664372B2 (ja) | イメージセンサー用電子パッケージおよびそのパッケージング方法 | |
US6943423B2 (en) | Electronic package of photo-image sensors in cellular phone camera modules, and the fabrication and assembly thereof | |
US8487437B2 (en) | Electronic device package and method for fabricating the same | |
US7038287B2 (en) | Electronic package of photo-sensing semiconductor devices, and the fabrication and assembly thereof | |
KR100839976B1 (ko) | 웨이퍼 수준에서 카메라 모듈을 제조하는 방법 | |
KR100976813B1 (ko) | 전자 소자 패키지 및 그 제조 방법 | |
JP4575437B2 (ja) | 光感知素子パッケージ及びその製造方法 | |
KR100788280B1 (ko) | 반도체 소자 패키지 및 그 패키징 방법 | |
KR100839975B1 (ko) | 기판의 배면 상에 패터닝된 층을 갖는 전자 패키지 및 그제조방법 | |
EP2396820A1 (en) | Image and light sensor chip packages | |
KR101142347B1 (ko) | 포토센서 패키지 모듈 및 제작 방법 | |
JP2004179495A (ja) | 半導体装置 | |
US20060180888A1 (en) | Optical sensor package and method of manufacture | |
KR100980810B1 (ko) | 웨이퍼 레벨-칩 스케일 패키지가 가능한 이미지 센서 모듈 및 그 제조방법 | |
KR100494023B1 (ko) | 반도체 촬상소자 패키지 및 그 제조방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20100422 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100427 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100726 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100817 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20101109 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20101207 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20110106 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4664372 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140114 Year of fee payment: 3 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |