JP4577687B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP4577687B2 JP4577687B2 JP2005077050A JP2005077050A JP4577687B2 JP 4577687 B2 JP4577687 B2 JP 4577687B2 JP 2005077050 A JP2005077050 A JP 2005077050A JP 2005077050 A JP2005077050 A JP 2005077050A JP 4577687 B2 JP4577687 B2 JP 4577687B2
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
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- Computer Hardware Design (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Semiconductor Integrated Circuits (AREA)
Description
2 配線パターン
3,4,5 半導体チップ
6 バンプ
7 貫通電極
7a 貫通導電膜
7b 貫通電極絶縁膜
10、20 半導体チップ
11、21 半導体基板
11a、11b、21a リング状半導体
11d 柱状半導体
12、22 内部貫通電極
12a,22a 内部貫通導電膜
13、23 内部貫通電極絶縁膜
14、14b、24 外周貫通電極
14a、14c、24a 外周貫通導電膜
15、15c、25 外周貫通電極絶縁膜
16、26 接続配線
17、27,33 絶縁膜
18,19 トレンチ
30 接続部
31、32 バンプ
34 接着剤
Claims (7)
- 貫通電極を有する半導体装置であって、前記貫通電極が、リング状半導体と、このリング状半導体の内部に形成された複数の柱状半導体と、これら柱状半導体の間および前記リング状半導体と各柱状半導体との間を埋める導電膜と、この導電膜と前記リング状半導体および各柱状半導体との間に介在する絶縁膜と、前記リング状半導体の外周に形成された外周貫通膜と、で構成され、前記リング状半導体および前記外周貫通膜は共に電気的にフローティング状態となっていることを特徴とする半導体装置。
- 前記外周貫通膜は、外周貫通絶縁膜として形成されていることを特徴とする請求項1に記載の半導体装置。
- 前記外周貫通膜は、外周貫通導電膜と、この外周貫通導電膜と前記リング状半導体および半導体基板との間に介在する外周貫通絶縁膜とで構成されていることを特徴とする請求項1に記載の半導体装置。
- 前記柱状半導体のそれぞれは、正方形又は長方形の形状を有し、前記リング状半導体との間隔が等しくなるように配置されていることを特徴とする請求項1乃至3のいずれかに記載の半導体装置。
- 前記柱状半導体のそれぞれは、正方形又は長方形の形状を有し、前記リング状半導体との間隔および前記複数の柱状半導体のうちの隣接するもの同士の間隔が等しくなるように配置されていることを特徴とする請求項1乃至3のいずれかに記載の半導体装置。
- 前記外周貫通膜の外側に、さらに、リング状半導体と外周貫通膜とを備えた外周層を設けたことを特徴とする請求項1乃至5のいずれかに記載の半導体装置。
- 前記貫通電極は、直接又は接続配線を介してバンプに接続されていることを特徴とする請求項1乃至6のいずれかに記載の半導体装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005077050A JP4577687B2 (ja) | 2005-03-17 | 2005-03-17 | 半導体装置 |
CN2006100596621A CN100407418C (zh) | 2005-03-17 | 2006-03-17 | 半导体器件 |
US11/377,574 US7323785B2 (en) | 2005-03-17 | 2006-03-17 | Semiconductor device |
US12/000,714 US7842610B2 (en) | 2005-03-17 | 2007-12-17 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2005077050A JP4577687B2 (ja) | 2005-03-17 | 2005-03-17 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
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JP2006261403A JP2006261403A (ja) | 2006-09-28 |
JP4577687B2 true JP4577687B2 (ja) | 2010-11-10 |
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Application Number | Title | Priority Date | Filing Date |
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JP2005077050A Active JP4577687B2 (ja) | 2005-03-17 | 2005-03-17 | 半導体装置 |
Country Status (3)
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US (2) | US7323785B2 (ja) |
JP (1) | JP4577687B2 (ja) |
CN (1) | CN100407418C (ja) |
Families Citing this family (46)
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JP4795677B2 (ja) * | 2004-12-02 | 2011-10-19 | ルネサスエレクトロニクス株式会社 | 半導体装置およびそれを用いた半導体モジュール、ならびに半導体装置の製造方法 |
JP2007165461A (ja) * | 2005-12-12 | 2007-06-28 | Elpida Memory Inc | 半導体装置及びその製造方法 |
JP2007243140A (ja) * | 2006-02-09 | 2007-09-20 | Renesas Technology Corp | 半導体装置、電子装置および半導体装置の製造方法 |
JP4961185B2 (ja) * | 2006-09-28 | 2012-06-27 | 株式会社日立製作所 | 半導体装置の製造方法 |
JP4345808B2 (ja) | 2006-12-15 | 2009-10-14 | エルピーダメモリ株式会社 | 半導体装置の製造方法 |
JP5226228B2 (ja) * | 2007-03-06 | 2013-07-03 | オリンパス株式会社 | 半導体装置の製造方法、及び、半導体装置 |
JP2008244187A (ja) * | 2007-03-28 | 2008-10-09 | Elpida Memory Inc | 貫通電極および半導体装置 |
JP5563186B2 (ja) | 2007-03-30 | 2014-07-30 | ピーエスフォー ルクスコ エスエイアールエル | 半導体装置及びその製造方法 |
US8134235B2 (en) * | 2007-04-23 | 2012-03-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | Three-dimensional semiconductor device |
JP5656341B2 (ja) | 2007-10-29 | 2015-01-21 | ピーエスフォー ルクスコ エスエイアールエルPS4 Luxco S.a.r.l. | 半導体装置およびその製造方法 |
KR101052870B1 (ko) * | 2008-04-21 | 2011-07-29 | 주식회사 하이닉스반도체 | 관통 전극, 이를 갖는 회로 기판, 이를 갖는 반도체 패키지및 반도체 패키지를 갖는 적층 반도체 패키지 |
US8053900B2 (en) * | 2008-10-21 | 2011-11-08 | Taiwan Semiconductor Manufacturing Company, Ltd. | Through-substrate vias (TSVs) electrically connected to a bond pad design with reduced dishing effect |
JP2010219425A (ja) * | 2009-03-18 | 2010-09-30 | Toshiba Corp | 半導体装置 |
JP2012164702A (ja) * | 2011-02-03 | 2012-08-30 | Elpida Memory Inc | 半導体装置 |
JP5826511B2 (ja) * | 2011-04-26 | 2015-12-02 | 株式会社東芝 | 固体撮像装置及びその製造方法 |
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JP5780165B2 (ja) * | 2012-01-25 | 2015-09-16 | 富士通セミコンダクター株式会社 | 半導体装置およびその製造方法 |
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US8916471B1 (en) | 2013-08-26 | 2014-12-23 | United Microelectronics Corp. | Method for forming semiconductor structure having through silicon via for signal and shielding structure |
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JP2021057744A (ja) | 2019-09-30 | 2021-04-08 | セイコーエプソン株式会社 | 振動デバイス、電子機器および移動体 |
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Citations (7)
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US7323785B2 (en) | 2008-01-29 |
US20080138982A1 (en) | 2008-06-12 |
US20060220182A1 (en) | 2006-10-05 |
US7842610B2 (en) | 2010-11-30 |
CN100407418C (zh) | 2008-07-30 |
JP2006261403A (ja) | 2006-09-28 |
CN1835224A (zh) | 2006-09-20 |
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