JP4555835B2 - 多孔性担体を用いたダイのカプセル化 - Google Patents
多孔性担体を用いたダイのカプセル化 Download PDFInfo
- Publication number
- JP4555835B2 JP4555835B2 JP2006553132A JP2006553132A JP4555835B2 JP 4555835 B2 JP4555835 B2 JP 4555835B2 JP 2006553132 A JP2006553132 A JP 2006553132A JP 2006553132 A JP2006553132 A JP 2006553132A JP 4555835 B2 JP4555835 B2 JP 4555835B2
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- porous carrier
- porous
- adhesive
- die
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/568—Temporary substrate used as encapsulation process aid
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/93—Batch processes
- H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L2224/96—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being encapsulated in a common layer, e.g. neo-wafer or pseudo-wafer, said common layer being separable into individual assemblies after connecting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Wire Bonding (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/774,977 US7015075B2 (en) | 2004-02-09 | 2004-02-09 | Die encapsulation using a porous carrier |
| PCT/US2005/001529 WO2005076794A2 (en) | 2004-02-09 | 2005-01-12 | Die encapsulation using a porous carrier |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007522675A JP2007522675A (ja) | 2007-08-09 |
| JP2007522675A5 JP2007522675A5 (enExample) | 2008-02-28 |
| JP4555835B2 true JP4555835B2 (ja) | 2010-10-06 |
Family
ID=34827103
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006553132A Expired - Fee Related JP4555835B2 (ja) | 2004-02-09 | 2005-01-12 | 多孔性担体を用いたダイのカプセル化 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7015075B2 (enExample) |
| EP (1) | EP1721332A2 (enExample) |
| JP (1) | JP4555835B2 (enExample) |
| CN (1) | CN1918702B (enExample) |
| TW (1) | TWI389221B (enExample) |
| WO (1) | WO2005076794A2 (enExample) |
Families Citing this family (88)
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| US6930256B1 (en) | 2002-05-01 | 2005-08-16 | Amkor Technology, Inc. | Integrated circuit substrate having laser-embedded conductive patterns and method therefor |
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| US7633765B1 (en) | 2004-03-23 | 2009-12-15 | Amkor Technology, Inc. | Semiconductor package including a top-surface metal layer for implementing circuit features |
| US9691635B1 (en) | 2002-05-01 | 2017-06-27 | Amkor Technology, Inc. | Buildup dielectric layer having metallization pattern semiconductor package fabrication method |
| US7361533B1 (en) | 2002-11-08 | 2008-04-22 | Amkor Technology, Inc. | Stacked embedded leadframe |
| US7723210B2 (en) | 2002-11-08 | 2010-05-25 | Amkor Technology, Inc. | Direct-write wafer level chip scale package |
| US6905914B1 (en) | 2002-11-08 | 2005-06-14 | Amkor Technology, Inc. | Wafer level package and fabrication method |
| US10811277B2 (en) | 2004-03-23 | 2020-10-20 | Amkor Technology, Inc. | Encapsulated semiconductor package |
| US11081370B2 (en) | 2004-03-23 | 2021-08-03 | Amkor Technology Singapore Holding Pte. Ltd. | Methods of manufacturing an encapsulated semiconductor device |
| US7572681B1 (en) | 2005-12-08 | 2009-08-11 | Amkor Technology, Inc. | Embedded electronic component package |
| US20070212813A1 (en) * | 2006-03-10 | 2007-09-13 | Fay Owen R | Perforated embedded plane package and method |
| US7902660B1 (en) | 2006-05-24 | 2011-03-08 | Amkor Technology, Inc. | Substrate for semiconductor device and manufacturing method thereof |
| TWI611565B (zh) | 2006-09-29 | 2018-01-11 | 半導體能源研究所股份有限公司 | 半導體裝置的製造方法 |
| US8137417B2 (en) | 2006-09-29 | 2012-03-20 | Semiconductor Energy Laboratory Co., Ltd. | Peeling apparatus and manufacturing apparatus of semiconductor device |
| US7550857B1 (en) | 2006-11-16 | 2009-06-23 | Amkor Technology, Inc. | Stacked redistribution layer (RDL) die assembly package |
| US7588951B2 (en) * | 2006-11-17 | 2009-09-15 | Freescale Semiconductor, Inc. | Method of packaging a semiconductor device and a prefabricated connector |
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| US7696016B2 (en) * | 2006-11-17 | 2010-04-13 | Freescale Semiconductor, Inc. | Method of packaging a device having a tangible element and device thereof |
| US7476563B2 (en) | 2006-11-17 | 2009-01-13 | Freescale Semiconductor, Inc. | Method of packaging a device using a dielectric layer |
| US20080182363A1 (en) * | 2007-01-31 | 2008-07-31 | Freescale Semiconductor, Inc. | Method for forming a microelectronic assembly including encapsulating a die using a sacrificial layer |
| TWI360207B (en) * | 2007-10-22 | 2012-03-11 | Advanced Semiconductor Eng | Chip package structure and method of manufacturing |
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| US8609471B2 (en) * | 2008-02-29 | 2013-12-17 | Freescale Semiconductor, Inc. | Packaging an integrated circuit die using compression molding |
| EP2291858B1 (en) | 2008-06-26 | 2012-03-28 | Nxp B.V. | Packaged semiconductor product and method for manufacture thereof |
| US7741151B2 (en) * | 2008-11-06 | 2010-06-22 | Freescale Semiconductor, Inc. | Integrated circuit package formation |
| JP5586920B2 (ja) * | 2008-11-20 | 2014-09-10 | 株式会社半導体エネルギー研究所 | フレキシブル半導体装置の作製方法 |
| US7960827B1 (en) | 2009-04-09 | 2011-06-14 | Amkor Technology, Inc. | Thermal via heat spreader package and method |
| US8623753B1 (en) | 2009-05-28 | 2014-01-07 | Amkor Technology, Inc. | Stackable protruding via package and method |
| US8222538B1 (en) | 2009-06-12 | 2012-07-17 | Amkor Technology, Inc. | Stackable via package and method |
| TWI456715B (zh) * | 2009-06-19 | 2014-10-11 | 日月光半導體製造股份有限公司 | 晶片封裝結構及其製造方法 |
| TWI466259B (zh) * | 2009-07-21 | 2014-12-21 | 日月光半導體製造股份有限公司 | 半導體封裝件、其製造方法及重佈晶片封膠體的製造方法 |
| TWI405306B (zh) * | 2009-07-23 | 2013-08-11 | 日月光半導體製造股份有限公司 | 半導體封裝件、其製造方法及重佈晶片封膠體 |
| US8471154B1 (en) | 2009-08-06 | 2013-06-25 | Amkor Technology, Inc. | Stackable variable height via package and method |
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| US20110084372A1 (en) * | 2009-10-14 | 2011-04-14 | Advanced Semiconductor Engineering, Inc. | Package carrier, semiconductor package, and process for fabricating same |
| US8378466B2 (en) * | 2009-11-19 | 2013-02-19 | Advanced Semiconductor Engineering, Inc. | Wafer-level semiconductor device packages with electromagnetic interference shielding |
| US8327532B2 (en) * | 2009-11-23 | 2012-12-11 | Freescale Semiconductor, Inc. | Method for releasing a microelectronic assembly from a carrier substrate |
| TWI497679B (zh) * | 2009-11-27 | 2015-08-21 | 日月光半導體製造股份有限公司 | 半導體封裝件及其製造方法 |
| US8937381B1 (en) | 2009-12-03 | 2015-01-20 | Amkor Technology, Inc. | Thin stackable package and method |
| US9691734B1 (en) | 2009-12-07 | 2017-06-27 | Amkor Technology, Inc. | Method of forming a plurality of electronic component packages |
| US8569894B2 (en) | 2010-01-13 | 2013-10-29 | Advanced Semiconductor Engineering, Inc. | Semiconductor package with single sided substrate design and manufacturing methods thereof |
| US8372689B2 (en) * | 2010-01-21 | 2013-02-12 | Advanced Semiconductor Engineering, Inc. | Wafer-level semiconductor device packages with three-dimensional fan-out and manufacturing methods thereof |
| US8536462B1 (en) | 2010-01-22 | 2013-09-17 | Amkor Technology, Inc. | Flex circuit package and method |
| US8320134B2 (en) * | 2010-02-05 | 2012-11-27 | Advanced Semiconductor Engineering, Inc. | Embedded component substrate and manufacturing methods thereof |
| TWI411075B (zh) * | 2010-03-22 | 2013-10-01 | 日月光半導體製造股份有限公司 | 半導體封裝件及其製造方法 |
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| US8624374B2 (en) | 2010-04-02 | 2014-01-07 | Advanced Semiconductor Engineering, Inc. | Semiconductor device packages with fan-out and with connecting elements for stacking and manufacturing methods thereof |
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| US8338229B1 (en) | 2010-07-30 | 2012-12-25 | Amkor Technology, Inc. | Stackable plasma cleaned via package and method |
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| US9748154B1 (en) | 2010-11-04 | 2017-08-29 | Amkor Technology, Inc. | Wafer level fan out semiconductor device and manufacturing method thereof |
| US8525318B1 (en) | 2010-11-10 | 2013-09-03 | Amkor Technology, Inc. | Semiconductor device and fabricating method thereof |
| US8941222B2 (en) | 2010-11-11 | 2015-01-27 | Advanced Semiconductor Engineering Inc. | Wafer level semiconductor package and manufacturing methods thereof |
| US8557629B1 (en) | 2010-12-03 | 2013-10-15 | Amkor Technology, Inc. | Semiconductor device having overlapped via apertures |
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| JP5903920B2 (ja) * | 2012-02-16 | 2016-04-13 | 富士通株式会社 | 半導体装置の製造方法及び電子装置の製造方法 |
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| KR101429344B1 (ko) | 2012-08-08 | 2014-08-12 | 앰코 테크놀로지 코리아 주식회사 | 반도체 패키지 및 그 제조 방법 |
| KR20140038116A (ko) | 2012-09-20 | 2014-03-28 | 제이앤제이 패밀리 주식회사 | Le d 램프 |
| US9799592B2 (en) | 2013-11-19 | 2017-10-24 | Amkor Technology, Inc. | Semicondutor device with through-silicon via-less deep wells |
| KR101366461B1 (ko) | 2012-11-20 | 2014-02-26 | 앰코 테크놀로지 코리아 주식회사 | 반도체 디바이스 및 그 제조 방법 |
| KR101488590B1 (ko) | 2013-03-29 | 2015-01-30 | 앰코 테크놀로지 코리아 주식회사 | 반도체 디바이스 및 그 제조 방법 |
| TWI642094B (zh) | 2013-08-06 | 2018-11-21 | 半導體能源研究所股份有限公司 | 剝離方法 |
| TWI663722B (zh) | 2013-09-06 | 2019-06-21 | Semiconductor Energy Laboratory Co., Ltd. | 發光裝置以及發光裝置的製造方法 |
| KR101607981B1 (ko) | 2013-11-04 | 2016-03-31 | 앰코 테크놀로지 코리아 주식회사 | 반도체 패키지용 인터포저 및 이의 제조 방법, 제조된 인터포저를 이용한 반도체 패키지 |
| US9937698B2 (en) | 2013-11-06 | 2018-04-10 | Semiconductor Energy Laboratory Co., Ltd. | Peeling method and light-emitting device |
| US10147630B2 (en) * | 2014-06-11 | 2018-12-04 | John Cleaon Moore | Sectional porous carrier forming a temporary impervious support |
| TWI695525B (zh) | 2014-07-25 | 2020-06-01 | 日商半導體能源研究所股份有限公司 | 剝離方法、發光裝置、模組以及電子裝置 |
| US10259207B2 (en) | 2016-01-26 | 2019-04-16 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming separation starting point and separation method |
| US9960328B2 (en) | 2016-09-06 | 2018-05-01 | Amkor Technology, Inc. | Semiconductor device and manufacturing method thereof |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4918811A (en) | 1986-09-26 | 1990-04-24 | General Electric Company | Multichip integrated circuit packaging method |
| US5032543A (en) | 1988-06-17 | 1991-07-16 | Massachusetts Institute Of Technology | Coplanar packaging techniques for multichip circuits |
| US5144747A (en) | 1991-03-27 | 1992-09-08 | Integrated System Assemblies Corporation | Apparatus and method for positioning an integrated circuit chip within a multichip module |
| US5250843A (en) | 1991-03-27 | 1993-10-05 | Integrated System Assemblies Corp. | Multichip integrated circuit modules |
| US5474958A (en) * | 1993-05-04 | 1995-12-12 | Motorola, Inc. | Method for making semiconductor device having no die supporting surface |
| US5620928A (en) * | 1995-05-11 | 1997-04-15 | National Semiconductor Corporation | Ultra thin ball grid array using a flex tape or printed wiring board substrate and method |
| US5866952A (en) | 1995-11-30 | 1999-02-02 | Lockheed Martin Corporation | High density interconnected circuit module with a compliant layer as part of a stress-reducing molded substrate |
| US5841193A (en) | 1996-05-20 | 1998-11-24 | Epic Technologies, Inc. | Single chip modules, repairable multichip modules, and methods of fabrication thereof |
| US5830800A (en) * | 1997-04-11 | 1998-11-03 | Compeq Manufacturing Company Ltd. | Packaging method for a ball grid array integrated circuit without utilizing a base plate |
| DE19752195A1 (de) * | 1997-11-25 | 1999-06-17 | Siemens Ag | Halbleiterelement mit einer Tragevorrichtung und einem Zuleitungsrahmen und einem damit verbundenen Halbleiterchip |
| KR100266138B1 (ko) * | 1998-06-24 | 2000-09-15 | 윤종용 | 칩 스케일 패키지의 제조 방법 |
| US6613413B1 (en) * | 1999-04-26 | 2003-09-02 | International Business Machines Corporation | Porous power and ground planes for reduced PCB delamination and better reliability |
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| JP2001313350A (ja) * | 2000-04-28 | 2001-11-09 | Sony Corp | チップ状電子部品及びその製造方法、並びにその製造に用いる疑似ウエーハ及びその製造方法 |
| US6528145B1 (en) * | 2000-06-29 | 2003-03-04 | International Business Machines Corporation | Polymer and ceramic composite electronic substrates |
| KR100414479B1 (ko) * | 2000-08-09 | 2004-01-07 | 주식회사 코스타트반도체 | 반도체 패키징 공정의 이식성 도전패턴을 갖는 테이프 및그 제조방법 |
| US6734534B1 (en) | 2000-08-16 | 2004-05-11 | Intel Corporation | Microelectronic substrate with integrated devices |
| JP2002362677A (ja) * | 2001-06-06 | 2002-12-18 | Nitto Denko Corp | チップ状電子部品のキャリアテープ及びその使用方法 |
| JP4100936B2 (ja) * | 2002-03-01 | 2008-06-11 | Necエレクトロニクス株式会社 | 半導体装置の製造方法 |
| JP2003303919A (ja) * | 2002-04-10 | 2003-10-24 | Hitachi Ltd | 半導体装置及びその製造方法 |
-
2004
- 2004-02-09 US US10/774,977 patent/US7015075B2/en not_active Expired - Fee Related
-
2005
- 2005-01-12 JP JP2006553132A patent/JP4555835B2/ja not_active Expired - Fee Related
- 2005-01-12 CN CN2005800043966A patent/CN1918702B/zh not_active Expired - Fee Related
- 2005-01-12 WO PCT/US2005/001529 patent/WO2005076794A2/en not_active Ceased
- 2005-01-12 EP EP05705847A patent/EP1721332A2/en not_active Withdrawn
- 2005-01-25 TW TW094102210A patent/TWI389221B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| CN1918702B (zh) | 2010-05-26 |
| JP2007522675A (ja) | 2007-08-09 |
| EP1721332A2 (en) | 2006-11-15 |
| US7015075B2 (en) | 2006-03-21 |
| US20050176180A1 (en) | 2005-08-11 |
| WO2005076794A3 (en) | 2006-01-19 |
| TWI389221B (zh) | 2013-03-11 |
| WO2005076794A2 (en) | 2005-08-25 |
| TW200531189A (en) | 2005-09-16 |
| CN1918702A (zh) | 2007-02-21 |
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