JP4441451B2 - シート貼付装置 - Google Patents

シート貼付装置 Download PDF

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Publication number
JP4441451B2
JP4441451B2 JP2005198807A JP2005198807A JP4441451B2 JP 4441451 B2 JP4441451 B2 JP 4441451B2 JP 2005198807 A JP2005198807 A JP 2005198807A JP 2005198807 A JP2005198807 A JP 2005198807A JP 4441451 B2 JP4441451 B2 JP 4441451B2
Authority
JP
Japan
Prior art keywords
sheet
plate
wafer
roller
sticking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005198807A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007019240A (ja
JP2007019240A5 (enExample
Inventor
英明 野中
賢治 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lintec Corp
Original Assignee
Lintec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2005198807A priority Critical patent/JP4441451B2/ja
Application filed by Lintec Corp filed Critical Lintec Corp
Priority to PCT/JP2006/312686 priority patent/WO2007007532A1/ja
Priority to KR1020077030786A priority patent/KR101229857B1/ko
Priority to US11/916,788 priority patent/US7900677B2/en
Priority to DE112006001812T priority patent/DE112006001812T5/de
Priority to CNB2006800243223A priority patent/CN100550337C/zh
Priority to TW095123388A priority patent/TWI391981B/zh
Publication of JP2007019240A publication Critical patent/JP2007019240A/ja
Publication of JP2007019240A5 publication Critical patent/JP2007019240A5/ja
Application granted granted Critical
Publication of JP4441451B2 publication Critical patent/JP4441451B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/12—Surface bonding means and/or assembly means with cutting, punching, piercing, severing or tearing
    • Y10T156/1317—Means feeding plural workpieces to be joined
    • Y10T156/1343—Cutting indefinite length web after assembly with discrete article
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/17—Surface bonding means and/or assemblymeans with work feeding or handling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/17—Surface bonding means and/or assemblymeans with work feeding or handling means
    • Y10T156/1702—For plural parts or plural areas of single part
    • Y10T156/1705—Lamina transferred to base from adhered flexible web or sheet type carrier

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2005198807A 2005-07-07 2005-07-07 シート貼付装置 Expired - Fee Related JP4441451B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2005198807A JP4441451B2 (ja) 2005-07-07 2005-07-07 シート貼付装置
KR1020077030786A KR101229857B1 (ko) 2005-07-07 2006-06-26 시트 첩부장치
US11/916,788 US7900677B2 (en) 2005-07-07 2006-06-26 Sheet sticking apparatus
DE112006001812T DE112006001812T5 (de) 2005-07-07 2006-06-26 Folien-Anklebeeinrichtung
PCT/JP2006/312686 WO2007007532A1 (ja) 2005-07-07 2006-06-26 シート貼付装置
CNB2006800243223A CN100550337C (zh) 2005-07-07 2006-06-26 薄片粘贴装置
TW095123388A TWI391981B (zh) 2005-07-07 2006-06-28 Sheet attachment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005198807A JP4441451B2 (ja) 2005-07-07 2005-07-07 シート貼付装置

Publications (3)

Publication Number Publication Date
JP2007019240A JP2007019240A (ja) 2007-01-25
JP2007019240A5 JP2007019240A5 (enExample) 2009-11-05
JP4441451B2 true JP4441451B2 (ja) 2010-03-31

Family

ID=37636929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005198807A Expired - Fee Related JP4441451B2 (ja) 2005-07-07 2005-07-07 シート貼付装置

Country Status (7)

Country Link
US (1) US7900677B2 (enExample)
JP (1) JP4441451B2 (enExample)
KR (1) KR101229857B1 (enExample)
CN (1) CN100550337C (enExample)
DE (1) DE112006001812T5 (enExample)
TW (1) TWI391981B (enExample)
WO (1) WO2007007532A1 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5430087B2 (ja) * 2008-06-26 2014-02-26 リンテック株式会社 シート貼付装置及び貼付方法
JP2011116486A (ja) * 2009-12-02 2011-06-16 Sharp Corp フィルム剥離装置
CN102723520B (zh) * 2011-03-29 2014-12-10 深圳市鑫力创自动化设备有限公司 一种电池贴面垫设备
JP6527817B2 (ja) * 2015-12-11 2019-06-05 リンテック株式会社 シート貼付装置および貼付方法
JP6796952B2 (ja) * 2016-05-31 2020-12-09 リンテック株式会社 シート貼付装置および貼付方法
US11014203B2 (en) * 2016-07-11 2021-05-25 Laird Technologies, Inc. System for applying interface materials
US10741519B2 (en) 2016-07-11 2020-08-11 Laird Technologies, Inc. Systems of applying materials to components
USD999405S1 (en) 2017-10-06 2023-09-19 Laird Technologies, Inc. Material having edging
USD881822S1 (en) 2017-10-06 2020-04-21 Laird Technologies, Inc. Material having an edge shape
US11141823B2 (en) * 2018-04-28 2021-10-12 Laird Technologies, Inc. Systems and methods of applying materials to components
JP7415395B2 (ja) * 2019-09-25 2024-01-17 オムロン株式会社 保護シート剥離装置および保護シート剥離方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04293253A (ja) * 1991-03-20 1992-10-16 Nitto Denko Corp 半導体ウエハの粘着テープ貼付け装置
JPH0632522A (ja) * 1992-07-16 1994-02-08 Nitto Denko Corp テープ自動貼付け装置
JPH06268047A (ja) * 1993-03-16 1994-09-22 Sharp Corp 半導体レーザチップの供給方法及び供給装置
JP3447518B2 (ja) 1996-08-09 2003-09-16 リンテック株式会社 接着シート貼付装置および方法
JP4502547B2 (ja) * 2000-08-07 2010-07-14 日東電工株式会社 半導体ウエハの保護テープ除去方法およびその装置
JP2003152058A (ja) * 2001-11-13 2003-05-23 Lintec Corp ウェハ転写装置
JP2004047976A (ja) 2002-05-21 2004-02-12 Nitto Denko Corp 保護テープ貼付方法およびその装置
JP4444619B2 (ja) * 2003-10-10 2010-03-31 リンテック株式会社 マウント装置及びマウント方法
JP4276049B2 (ja) * 2003-10-31 2009-06-10 リンテック株式会社 貼合装置及び貼合方法
JP4326519B2 (ja) * 2005-03-31 2009-09-09 日東電工株式会社 保護テープ剥離方法およびこれを用いた装置

Also Published As

Publication number Publication date
KR101229857B1 (ko) 2013-02-05
JP2007019240A (ja) 2007-01-25
DE112006001812T5 (de) 2008-05-15
TWI391981B (zh) 2013-04-01
TW200721241A (en) 2007-06-01
CN101213646A (zh) 2008-07-02
WO2007007532A1 (ja) 2007-01-18
US7900677B2 (en) 2011-03-08
KR20080023319A (ko) 2008-03-13
US20090223638A1 (en) 2009-09-10
CN100550337C (zh) 2009-10-14

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