JP4383401B2 - フォトニックｍｅｍｓ及びその構造 - Google Patents
フォトニックｍｅｍｓ及びその構造 Download PDFInfo
- Publication number
- JP4383401B2 JP4383401B2 JP2005275187A JP2005275187A JP4383401B2 JP 4383401 B2 JP4383401 B2 JP 4383401B2 JP 2005275187 A JP2005275187 A JP 2005275187A JP 2005275187 A JP2005275187 A JP 2005275187A JP 4383401 B2 JP4383401 B2 JP 4383401B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- layer
- optical
- light
- interferometric modulator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 claims description 267
- 230000003287 optical effect Effects 0.000 claims description 166
- 239000000463 material Substances 0.000 claims description 129
- 238000000034 method Methods 0.000 claims description 89
- 238000004519 manufacturing process Methods 0.000 claims description 63
- 229910052751 metal Inorganic materials 0.000 claims description 43
- 239000002184 metal Substances 0.000 claims description 43
- 230000008569 process Effects 0.000 claims description 32
- 239000010703 silicon Substances 0.000 claims description 29
- 229910052710 silicon Inorganic materials 0.000 claims description 28
- 238000012545 processing Methods 0.000 claims description 23
- 229910052782 aluminium Inorganic materials 0.000 claims description 17
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 17
- 238000002161 passivation Methods 0.000 claims description 16
- 239000004065 semiconductor Substances 0.000 claims description 14
- 238000000206 photolithography Methods 0.000 claims description 13
- 230000033001 locomotion Effects 0.000 claims description 11
- 229920003023 plastic Polymers 0.000 claims description 11
- 230000004044 response Effects 0.000 claims description 11
- 238000005286 illumination Methods 0.000 claims description 10
- 239000004033 plastic Substances 0.000 claims description 10
- 238000003860 storage Methods 0.000 claims description 9
- 238000002310 reflectometry Methods 0.000 claims description 7
- 230000008093 supporting effect Effects 0.000 claims description 4
- 238000004891 communication Methods 0.000 claims description 3
- 239000011888 foil Substances 0.000 claims description 3
- 229910000831 Steel Inorganic materials 0.000 claims 1
- 229910010293 ceramic material Inorganic materials 0.000 claims 1
- 230000002779 inactivation Effects 0.000 claims 1
- 239000010959 steel Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 154
- 239000010408 film Substances 0.000 description 142
- 239000004020 conductor Substances 0.000 description 37
- 238000013461 design Methods 0.000 description 36
- 239000012212 insulator Substances 0.000 description 29
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 27
- 239000011521 glass Substances 0.000 description 24
- 230000008859 change Effects 0.000 description 22
- 230000006870 function Effects 0.000 description 21
- 239000012528 membrane Substances 0.000 description 20
- 239000000047 product Substances 0.000 description 19
- 238000000151 deposition Methods 0.000 description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 17
- 238000010586 diagram Methods 0.000 description 16
- 239000000126 substance Substances 0.000 description 16
- 230000008021 deposition Effects 0.000 description 15
- 230000001902 propagating effect Effects 0.000 description 15
- 238000013459 approach Methods 0.000 description 14
- 230000007547 defect Effects 0.000 description 14
- 239000010409 thin film Substances 0.000 description 13
- 230000006798 recombination Effects 0.000 description 12
- 238000005215 recombination Methods 0.000 description 12
- 235000012431 wafers Nutrition 0.000 description 12
- 238000005530 etching Methods 0.000 description 11
- 230000002829 reductive effect Effects 0.000 description 10
- 230000000694 effects Effects 0.000 description 9
- 230000005855 radiation Effects 0.000 description 9
- 235000012239 silicon dioxide Nutrition 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 8
- 230000000737 periodic effect Effects 0.000 description 8
- 229920000642 polymer Polymers 0.000 description 8
- 239000000377 silicon dioxide Substances 0.000 description 8
- 230000009471 action Effects 0.000 description 7
- 239000000835 fiber Substances 0.000 description 7
- 239000006096 absorbing agent Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- 238000007689 inspection Methods 0.000 description 6
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 5
- 150000002739 metals Chemical class 0.000 description 5
- 238000001020 plasma etching Methods 0.000 description 5
- 230000001681 protective effect Effects 0.000 description 5
- 238000003491 array Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 239000011651 chromium Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 230000001427 coherent effect Effects 0.000 description 4
- 239000003086 colorant Substances 0.000 description 4
- 230000003750 conditioning effect Effects 0.000 description 4
- 230000009849 deactivation Effects 0.000 description 4
- 230000001965 increasing effect Effects 0.000 description 4
- 229910001507 metal halide Inorganic materials 0.000 description 4
- 150000005309 metal halides Chemical class 0.000 description 4
- 239000004038 photonic crystal Substances 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- 125000006850 spacer group Chemical group 0.000 description 4
- 230000000153 supplemental effect Effects 0.000 description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 239000010937 tungsten Substances 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 229940024548 aluminum oxide Drugs 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 3
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 3
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 3
- 230000000873 masking effect Effects 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- -1 oxides Substances 0.000 description 3
- 239000003973 paint Substances 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- NLKNQRATVPKPDG-UHFFFAOYSA-M potassium iodide Chemical compound [K+].[I-] NLKNQRATVPKPDG-UHFFFAOYSA-M 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 230000003595 spectral effect Effects 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 239000012780 transparent material Substances 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 238000000149 argon plasma sintering Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000001413 cellular effect Effects 0.000 description 2
- 238000003486 chemical etching Methods 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 238000004040 coloring Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 230000001976 improved effect Effects 0.000 description 2
- 238000010348 incorporation Methods 0.000 description 2
- 230000004298 light response Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000005459 micromachining Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 239000002985 plastic film Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 230000000644 propagated effect Effects 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- 238000001429 visible spectrum Methods 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 229910052724 xenon Inorganic materials 0.000 description 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 2
- IRLPACMLTUPBCL-KQYNXXCUSA-N 5'-adenylyl sulfate Chemical compound C1=NC=2C(N)=NC=NC=2N1[C@@H]1O[C@H](COP(O)(=O)OS(O)(=O)=O)[C@@H](O)[C@H]1O IRLPACMLTUPBCL-KQYNXXCUSA-N 0.000 description 1
- 229920002799 BoPET Polymers 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 1
- 239000005041 Mylar™ Substances 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910001362 Ta alloys Inorganic materials 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- 229910001080 W alloy Inorganic materials 0.000 description 1
- 239000005083 Zinc sulfide Substances 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 239000003929 acidic solution Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000009638 autodisplay Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000002457 bidirectional effect Effects 0.000 description 1
- OJIJEKBXJYRIBZ-UHFFFAOYSA-N cadmium nickel Chemical compound [Ni].[Cd] OJIJEKBXJYRIBZ-UHFFFAOYSA-N 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 229910001634 calcium fluoride Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- QGJOPFRUJISHPQ-NJFSPNSNSA-N carbon disulfide-14c Chemical compound S=[14C]=S QGJOPFRUJISHPQ-NJFSPNSNSA-N 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000005094 computer simulation Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 238000012217 deletion Methods 0.000 description 1
- 230000037430 deletion Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 238000004146 energy storage Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 229920002457 flexible plastic Polymers 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000010437 gem Substances 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 150000002506 iron compounds Chemical class 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- YAFKGUAJYKXPDI-UHFFFAOYSA-J lead tetrafluoride Chemical compound F[Pb](F)(F)F YAFKGUAJYKXPDI-UHFFFAOYSA-J 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 239000006194 liquid suspension Substances 0.000 description 1
- 229910001416 lithium ion Inorganic materials 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000007334 memory performance Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 230000009972 noncorrosive effect Effects 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000002285 radioactive effect Effects 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- CMJCEVKJYRZMIA-UHFFFAOYSA-M thallium(i) iodide Chemical compound [Tl]I CMJCEVKJYRZMIA-UHFFFAOYSA-M 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
- 230000014616 translation Effects 0.000 description 1
- RMUKCGUDVKEQPL-UHFFFAOYSA-K triiodoindigane Chemical compound I[In](I)I RMUKCGUDVKEQPL-UHFFFAOYSA-K 0.000 description 1
- NXHILIPIEUBEPD-UHFFFAOYSA-H tungsten hexafluoride Chemical compound F[W](F)(F)(F)(F)F NXHILIPIEUBEPD-UHFFFAOYSA-H 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
- IGELFKKMDLGCJO-UHFFFAOYSA-N xenon difluoride Chemical compound F[Xe]F IGELFKKMDLGCJO-UHFFFAOYSA-N 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Elements Other Than Lenses (AREA)
- Micromachines (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US61356604P | 2004-09-27 | 2004-09-27 | |
| US11/208,420 US7564612B2 (en) | 2004-09-27 | 2005-08-19 | Photonic MEMS and structures |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006133744A JP2006133744A (ja) | 2006-05-25 |
| JP4383401B2 true JP4383401B2 (ja) | 2009-12-16 |
Family
ID=35462464
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005275187A Expired - Fee Related JP4383401B2 (ja) | 2004-09-27 | 2005-09-22 | フォトニックｍｅｍｓ及びその構造 |
Country Status (14)
Families Citing this family (212)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6674562B1 (en) * | 1994-05-05 | 2004-01-06 | Iridigm Display Corporation | Interferometric modulation of radiation |
| US7123216B1 (en) | 1994-05-05 | 2006-10-17 | Idc, Llc | Photonic MEMS and structures |
| US7907319B2 (en) | 1995-11-06 | 2011-03-15 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light with optical compensation |
| US8928967B2 (en) | 1998-04-08 | 2015-01-06 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
| US7532377B2 (en) * | 1998-04-08 | 2009-05-12 | Idc, Llc | Movable micro-electromechanical device |
| WO1999052006A2 (en) | 1998-04-08 | 1999-10-14 | Etalon, Inc. | Interferometric modulation of radiation |
| WO2003007049A1 (en) | 1999-10-05 | 2003-01-23 | Iridigm Display Corporation | Photonic mems and structures |
| TWI289708B (en) | 2002-12-25 | 2007-11-11 | Qualcomm Mems Technologies Inc | Optical interference type color display |
| US7342705B2 (en) | 2004-02-03 | 2008-03-11 | Idc, Llc | Spatial light modulator with integrated optical compensation structure |
| US7706050B2 (en) | 2004-03-05 | 2010-04-27 | Qualcomm Mems Technologies, Inc. | Integrated modulator illumination |
| US7855824B2 (en) | 2004-03-06 | 2010-12-21 | Qualcomm Mems Technologies, Inc. | Method and system for color optimization in a display |
| US7420725B2 (en) | 2004-09-27 | 2008-09-02 | Idc, Llc | Device having a conductive light absorbing mask and method for fabricating same |
| US8004504B2 (en) | 2004-09-27 | 2011-08-23 | Qualcomm Mems Technologies, Inc. | Reduced capacitance display element |
| US7349141B2 (en) * | 2004-09-27 | 2008-03-25 | Idc, Llc | Method and post structures for interferometric modulation |
| US7327510B2 (en) * | 2004-09-27 | 2008-02-05 | Idc, Llc | Process for modifying offset voltage characteristics of an interferometric modulator |
| US20060077148A1 (en) * | 2004-09-27 | 2006-04-13 | Gally Brian J | Method and device for manipulating color in a display |
| US7561323B2 (en) * | 2004-09-27 | 2009-07-14 | Idc, Llc | Optical films for directing light towards active areas of displays |
| US7508571B2 (en) | 2004-09-27 | 2009-03-24 | Idc, Llc | Optical films for controlling angular characteristics of displays |
| US7564612B2 (en) * | 2004-09-27 | 2009-07-21 | Idc, Llc | Photonic MEMS and structures |
| US7813026B2 (en) | 2004-09-27 | 2010-10-12 | Qualcomm Mems Technologies, Inc. | System and method of reducing color shift in a display |
| US7612932B2 (en) * | 2004-09-27 | 2009-11-03 | Idc, Llc | Microelectromechanical device with optical function separated from mechanical and electrical function |
| US7911428B2 (en) | 2004-09-27 | 2011-03-22 | Qualcomm Mems Technologies, Inc. | Method and device for manipulating color in a display |
| US7630119B2 (en) | 2004-09-27 | 2009-12-08 | Qualcomm Mems Technologies, Inc. | Apparatus and method for reducing slippage between structures in an interferometric modulator |
| US8031133B2 (en) * | 2004-09-27 | 2011-10-04 | Qualcomm Mems Technologies, Inc. | Method and device for manipulating color in a display |
| US8362987B2 (en) * | 2004-09-27 | 2013-01-29 | Qualcomm Mems Technologies, Inc. | Method and device for manipulating color in a display |
| US7944599B2 (en) * | 2004-09-27 | 2011-05-17 | Qualcomm Mems Technologies, Inc. | Electromechanical device with optical function separated from mechanical and electrical function |
| US7710632B2 (en) | 2004-09-27 | 2010-05-04 | Qualcomm Mems Technologies, Inc. | Display device having an array of spatial light modulators with integrated color filters |
| US7750886B2 (en) | 2004-09-27 | 2010-07-06 | Qualcomm Mems Technologies, Inc. | Methods and devices for lighting displays |
| US7372613B2 (en) | 2004-09-27 | 2008-05-13 | Idc, Llc | Method and device for multistate interferometric light modulation |
| US7583429B2 (en) | 2004-09-27 | 2009-09-01 | Idc, Llc | Ornamental display device |
| US20060066586A1 (en) * | 2004-09-27 | 2006-03-30 | Gally Brian J | Touchscreens for displays |
| US7807488B2 (en) * | 2004-09-27 | 2010-10-05 | Qualcomm Mems Technologies, Inc. | Display element having filter material diffused in a substrate of the display element |
| US7710636B2 (en) * | 2004-09-27 | 2010-05-04 | Qualcomm Mems Technologies, Inc. | Systems and methods using interferometric optical modulators and diffusers |
| US7289259B2 (en) | 2004-09-27 | 2007-10-30 | Idc, Llc | Conductive bus structure for interferometric modulator array |
| US8102407B2 (en) * | 2004-09-27 | 2012-01-24 | Qualcomm Mems Technologies, Inc. | Method and device for manipulating color in a display |
| US7525730B2 (en) * | 2004-09-27 | 2009-04-28 | Idc, Llc | Method and device for generating white in an interferometric modulator display |
| US7630123B2 (en) | 2004-09-27 | 2009-12-08 | Qualcomm Mems Technologies, Inc. | Method and device for compensating for color shift as a function of angle of view |
| US7355780B2 (en) * | 2004-09-27 | 2008-04-08 | Idc, Llc | System and method of illuminating interferometric modulators using backlighting |
| US20060066557A1 (en) * | 2004-09-27 | 2006-03-30 | Floyd Philip D | Method and device for reflective display with time sequential color illumination |
| US7898521B2 (en) * | 2004-09-27 | 2011-03-01 | Qualcomm Mems Technologies, Inc. | Device and method for wavelength filtering |
| US7929195B2 (en) * | 2004-11-19 | 2011-04-19 | Trustees Of Boston University | MEMS based retroreflector |
| US7884989B2 (en) * | 2005-05-27 | 2011-02-08 | Qualcomm Mems Technologies, Inc. | White interferometric modulators and methods for forming the same |
| US7460292B2 (en) | 2005-06-03 | 2008-12-02 | Qualcomm Mems Technologies, Inc. | Interferometric modulator with internal polarization and drive method |
| EP1755006A1 (en) | 2005-08-18 | 2007-02-21 | Ricoh Company, Ltd. | Data transmission between sheet post-processing modules |
| US7566582B2 (en) * | 2005-10-25 | 2009-07-28 | The Charles Stark Draper Laboratory, Inc. | Systems, methods and devices relating to actuatably moveable machines |
| US20070090732A1 (en) * | 2005-10-25 | 2007-04-26 | The Charles Stark Draper Laboratory, Inc. | Systems, methods and devices relating to actuatably moveable machines |
| US7916980B2 (en) | 2006-01-13 | 2011-03-29 | Qualcomm Mems Technologies, Inc. | Interconnect structure for MEMS device |
| US7475368B2 (en) * | 2006-01-20 | 2009-01-06 | International Business Machines Corporation | Deflection analysis system and method for circuit design |
| US7603001B2 (en) | 2006-02-17 | 2009-10-13 | Qualcomm Mems Technologies, Inc. | Method and apparatus for providing back-lighting in an interferometric modulator display device |
| US7550810B2 (en) | 2006-02-23 | 2009-06-23 | Qualcomm Mems Technologies, Inc. | MEMS device having a layer movable at asymmetric rates |
| KR100754686B1 (ko) * | 2006-03-28 | 2007-09-03 | 삼성전자주식회사 | 키패드 어셈블리 |
| US8004743B2 (en) * | 2006-04-21 | 2011-08-23 | Qualcomm Mems Technologies, Inc. | Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display |
| WO2007127214A2 (en) * | 2006-04-25 | 2007-11-08 | The Board Of Regents Of The University Of Oklahoma | Light surface display for rendering a three-dimensional image |
| JP4790481B2 (ja) * | 2006-04-26 | 2011-10-12 | 株式会社小糸製作所 | 車両用灯具ユニット |
| US20070268201A1 (en) * | 2006-05-22 | 2007-11-22 | Sampsell Jeffrey B | Back-to-back displays |
| US7649671B2 (en) | 2006-06-01 | 2010-01-19 | Qualcomm Mems Technologies, Inc. | Analog interferometric modulator device with electrostatic actuation and release |
| US7471442B2 (en) * | 2006-06-15 | 2008-12-30 | Qualcomm Mems Technologies, Inc. | Method and apparatus for low range bit depth enhancements for MEMS display architectures |
| WO2007147075A2 (en) * | 2006-06-16 | 2007-12-21 | Applied Materials, Inc. | Patterning 3d features in a substrate |
| US7766498B2 (en) | 2006-06-21 | 2010-08-03 | Qualcomm Mems Technologies, Inc. | Linear solid state illuminator |
| US7385744B2 (en) | 2006-06-28 | 2008-06-10 | Qualcomm Mems Technologies, Inc. | Support structure for free-standing MEMS device and methods for forming the same |
| US7835061B2 (en) | 2006-06-28 | 2010-11-16 | Qualcomm Mems Technologies, Inc. | Support structures for free-standing electromechanical devices |
| US7527998B2 (en) | 2006-06-30 | 2009-05-05 | Qualcomm Mems Technologies, Inc. | Method of manufacturing MEMS devices providing air gap control |
| US7845841B2 (en) | 2006-08-28 | 2010-12-07 | Qualcomm Mems Technologies, Inc. | Angle sweeping holographic illuminator |
| EP1943551A2 (en) | 2006-10-06 | 2008-07-16 | Qualcomm Mems Technologies, Inc. | Light guide |
| US7855827B2 (en) | 2006-10-06 | 2010-12-21 | Qualcomm Mems Technologies, Inc. | Internal optical isolation structure for integrated front or back lighting |
| US8107155B2 (en) | 2006-10-06 | 2012-01-31 | Qualcomm Mems Technologies, Inc. | System and method for reducing visual artifacts in displays |
| EP1943555B1 (en) | 2006-10-06 | 2012-05-02 | QUALCOMM MEMS Technologies, Inc. | Optical loss structure integrated in an illumination apparatus of a display |
| WO2008045311A2 (en) | 2006-10-06 | 2008-04-17 | Qualcomm Mems Technologies, Inc. | Illumination device with built-in light coupler |
| EP1958010A2 (en) | 2006-10-10 | 2008-08-20 | Qualcomm Mems Technologies, Inc | Display device with diffractive optics |
| US7629197B2 (en) | 2006-10-18 | 2009-12-08 | Qualcomm Mems Technologies, Inc. | Spatial light modulator |
| US7864395B2 (en) | 2006-10-27 | 2011-01-04 | Qualcomm Mems Technologies, Inc. | Light guide including optical scattering elements and a method of manufacture |
| US20080111834A1 (en) * | 2006-11-09 | 2008-05-15 | Mignard Marc M | Two primary color display |
| US7403180B1 (en) * | 2007-01-29 | 2008-07-22 | Qualcomm Mems Technologies, Inc. | Hybrid color synthesis for multistate reflective modulator displays |
| US7777954B2 (en) | 2007-01-30 | 2010-08-17 | Qualcomm Mems Technologies, Inc. | Systems and methods of providing a light guiding layer |
| US8115987B2 (en) * | 2007-02-01 | 2012-02-14 | Qualcomm Mems Technologies, Inc. | Modulating the intensity of light from an interferometric reflector |
| WO2008103632A2 (en) * | 2007-02-20 | 2008-08-28 | Qualcomm Mems Technologies, Inc. | Equipment and methods for etching of mems |
| US7916378B2 (en) * | 2007-03-08 | 2011-03-29 | Qualcomm Mems Technologies, Inc. | Method and apparatus for providing a light absorbing mask in an interferometric modulator display |
| US7742220B2 (en) * | 2007-03-28 | 2010-06-22 | Qualcomm Mems Technologies, Inc. | Microelectromechanical device and method utilizing conducting layers separated by stops |
| US7643202B2 (en) * | 2007-05-09 | 2010-01-05 | Qualcomm Mems Technologies, Inc. | Microelectromechanical system having a dielectric movable membrane and a mirror |
| US7715085B2 (en) * | 2007-05-09 | 2010-05-11 | Qualcomm Mems Technologies, Inc. | Electromechanical system having a dielectric movable membrane and a mirror |
| US7719752B2 (en) | 2007-05-11 | 2010-05-18 | Qualcomm Mems Technologies, Inc. | MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same |
| US8111262B2 (en) * | 2007-05-18 | 2012-02-07 | Qualcomm Mems Technologies, Inc. | Interferometric modulator displays with reduced color sensitivity |
| US7643199B2 (en) * | 2007-06-19 | 2010-01-05 | Qualcomm Mems Technologies, Inc. | High aperture-ratio top-reflective AM-iMod displays |
| US7782517B2 (en) * | 2007-06-21 | 2010-08-24 | Qualcomm Mems Technologies, Inc. | Infrared and dual mode displays |
| US7630121B2 (en) * | 2007-07-02 | 2009-12-08 | Qualcomm Mems Technologies, Inc. | Electromechanical device with optical function separated from mechanical and electrical function |
| US7813029B2 (en) | 2007-07-31 | 2010-10-12 | Qualcomm Mems Technologies, Inc. | Devices and methods for enhancing color shift of interferometric modulators |
| US8072402B2 (en) | 2007-08-29 | 2011-12-06 | Qualcomm Mems Technologies, Inc. | Interferometric optical modulator with broadband reflection characteristics |
| US7847999B2 (en) * | 2007-09-14 | 2010-12-07 | Qualcomm Mems Technologies, Inc. | Interferometric modulator display devices |
| US7773286B2 (en) * | 2007-09-14 | 2010-08-10 | Qualcomm Mems Technologies, Inc. | Periodic dimple array |
| WO2009036215A2 (en) * | 2007-09-14 | 2009-03-19 | Qualcomm Mems Technologies, Inc. | Etching processes used in mems production |
| DE102007044806A1 (de) * | 2007-09-20 | 2009-04-02 | Robert Bosch Gmbh | Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements |
| US8058549B2 (en) | 2007-10-19 | 2011-11-15 | Qualcomm Mems Technologies, Inc. | Photovoltaic devices with integrated color interferometric film stacks |
| JP5209727B2 (ja) | 2007-10-19 | 2013-06-12 | クォルコム・メムズ・テクノロジーズ・インコーポレーテッド | 一体型光起電力デバイスを有するディスプレイ |
| EP2203765A1 (en) * | 2007-10-23 | 2010-07-07 | Qualcomm Mems Technologies, Inc. | Adjustably transmissive mems-based devices |
| KR101415566B1 (ko) | 2007-10-29 | 2014-07-04 | 삼성디스플레이 주식회사 | 표시 장치 |
| US8941631B2 (en) | 2007-11-16 | 2015-01-27 | Qualcomm Mems Technologies, Inc. | Simultaneous light collection and illumination on an active display |
| US7715079B2 (en) | 2007-12-07 | 2010-05-11 | Qualcomm Mems Technologies, Inc. | MEMS devices requiring no mechanical support |
| US8068710B2 (en) | 2007-12-07 | 2011-11-29 | Qualcomm Mems Technologies, Inc. | Decoupled holographic film and diffuser |
| US7949213B2 (en) | 2007-12-07 | 2011-05-24 | Qualcomm Mems Technologies, Inc. | Light illumination of displays with front light guide and coupling elements |
| US20090168459A1 (en) * | 2007-12-27 | 2009-07-02 | Qualcomm Incorporated | Light guide including conjugate film |
| EP2277147A4 (en) * | 2008-01-14 | 2011-08-24 | Univ Oklahoma | VIRTUAL MOBILE SCREEN FOR PLAYING THREE-DIMENSIONAL PICTURES |
| US7863079B2 (en) | 2008-02-05 | 2011-01-04 | Qualcomm Mems Technologies, Inc. | Methods of reducing CD loss in a microelectromechanical device |
| WO2009102733A2 (en) | 2008-02-12 | 2009-08-20 | Qualcomm Mems Technologies, Inc. | Integrated front light diffuser for reflective displays |
| US8654061B2 (en) | 2008-02-12 | 2014-02-18 | Qualcomm Mems Technologies, Inc. | Integrated front light solution |
| WO2009102731A2 (en) | 2008-02-12 | 2009-08-20 | Qualcomm Mems Technologies, Inc. | Devices and methods for enhancing brightness of displays using angle conversion layers |
| US7737514B1 (en) * | 2008-02-21 | 2010-06-15 | Yee-Chung Fu | MEMS pressure sensor using area-change capacitive technique |
| US8164821B2 (en) | 2008-02-22 | 2012-04-24 | Qualcomm Mems Technologies, Inc. | Microelectromechanical device with thermal expansion balancing layer or stiffening layer |
| US7944604B2 (en) | 2008-03-07 | 2011-05-17 | Qualcomm Mems Technologies, Inc. | Interferometric modulator in transmission mode |
| US7612933B2 (en) | 2008-03-27 | 2009-11-03 | Qualcomm Mems Technologies, Inc. | Microelectromechanical device with spacing layer |
| US7898723B2 (en) * | 2008-04-02 | 2011-03-01 | Qualcomm Mems Technologies, Inc. | Microelectromechanical systems display element with photovoltaic structure |
| US7969638B2 (en) * | 2008-04-10 | 2011-06-28 | Qualcomm Mems Technologies, Inc. | Device having thin black mask and method of fabricating the same |
| WO2009129264A1 (en) | 2008-04-15 | 2009-10-22 | Qualcomm Mems Technologies, Inc. | Light with bi-directional propagation |
| US8118468B2 (en) | 2008-05-16 | 2012-02-21 | Qualcomm Mems Technologies, Inc. | Illumination apparatus and methods |
| EP2307795A2 (en) * | 2008-06-04 | 2011-04-13 | QUALCOMM MEMS Technologies, Inc. | Edge shadow reducing methods for prismatic front light |
| US7746539B2 (en) * | 2008-06-25 | 2010-06-29 | Qualcomm Mems Technologies, Inc. | Method for packing a display device and the device obtained thereof |
| US8023167B2 (en) * | 2008-06-25 | 2011-09-20 | Qualcomm Mems Technologies, Inc. | Backlight displays |
| US7768690B2 (en) * | 2008-06-25 | 2010-08-03 | Qualcomm Mems Technologies, Inc. | Backlight displays |
| US7859740B2 (en) | 2008-07-11 | 2010-12-28 | Qualcomm Mems Technologies, Inc. | Stiction mitigation with integrated mech micro-cantilevers through vertical stress gradient control |
| US7855826B2 (en) | 2008-08-12 | 2010-12-21 | Qualcomm Mems Technologies, Inc. | Method and apparatus to reduce or eliminate stiction and image retention in interferometric modulator devices |
| US8358266B2 (en) | 2008-09-02 | 2013-01-22 | Qualcomm Mems Technologies, Inc. | Light turning device with prismatic light turning features |
| US8243426B2 (en) * | 2008-12-31 | 2012-08-14 | Apple Inc. | Reducing optical effects in a display |
| WO2010082952A1 (en) | 2009-01-13 | 2010-07-22 | Qualcomm Mems Technologies, Inc. | Large area light panel and screen |
| WO2011084229A2 (en) | 2009-12-17 | 2011-07-14 | Arizona Board Of Regents, For And On Behalf Of Arizona State University | Embedded mems sensors and related methods |
| WO2010110828A1 (en) * | 2009-01-27 | 2010-09-30 | Arizona Board Of Regents, For And On Behalf Of Arizona State University | Embedded mems sensors and related methods |
| US8172417B2 (en) | 2009-03-06 | 2012-05-08 | Qualcomm Mems Technologies, Inc. | Shaped frontlight reflector for use with display |
| US8270056B2 (en) | 2009-03-23 | 2012-09-18 | Qualcomm Mems Technologies, Inc. | Display device with openings between sub-pixels and method of making same |
| US8334159B1 (en) | 2009-03-30 | 2012-12-18 | Advanced Numicro Systems, Inc. | MEMS pressure sensor using capacitive technique |
| BRPI1011614A2 (pt) | 2009-05-29 | 2016-03-15 | Qualcomm Mems Technologies Inc | aparelhos de iluminação e respectivo método de fabricação |
| WO2011017204A1 (en) * | 2009-08-03 | 2011-02-10 | Qualcomm Mems Technologies, Inc. | Microstructures for light guide illumination |
| DE102009029485A1 (de) * | 2009-09-15 | 2011-03-24 | Robert Bosch Gmbh | Verfahren zur Herstellung eines Keramikbauteils, Keramikbauteil und Bauteilanordnung |
| US8270062B2 (en) | 2009-09-17 | 2012-09-18 | Qualcomm Mems Technologies, Inc. | Display device with at least one movable stop element |
| US8488228B2 (en) | 2009-09-28 | 2013-07-16 | Qualcomm Mems Technologies, Inc. | Interferometric display with interferometric reflector |
| US8149496B2 (en) * | 2009-12-22 | 2012-04-03 | Qualcomm Mems Technologies, Inc. | Integrated touch for IMOD displays using back glass |
| EP2360507B1 (en) | 2010-02-22 | 2014-11-05 | DST Innovations Limited | Display elements |
| KR20130100232A (ko) | 2010-04-09 | 2013-09-10 | 퀄컴 엠이엠에스 테크놀로지스, 인크. | 전기 기계 디바이스의 기계층 및 그 형성 방법 |
| CN201732354U (zh) * | 2010-04-11 | 2011-02-02 | 宸鸿科技(厦门)有限公司 | 加强触控面板接合强度的堆栈结构 |
| JP2013525836A (ja) | 2010-04-16 | 2013-06-20 | フレックス ライティング ２，エルエルシー | フィルムベースのライトガイドを備える標識 |
| WO2011130715A2 (en) | 2010-04-16 | 2011-10-20 | Flex Lighting Ii, Llc | Illumination device comprising a film-based lightguide |
| US20110254758A1 (en) * | 2010-04-19 | 2011-10-20 | Qualcomm Mems Technologies, Inc. | Flex Design and Attach Method for Reducing Display Panel Periphery |
| US8848294B2 (en) | 2010-05-20 | 2014-09-30 | Qualcomm Mems Technologies, Inc. | Method and structure capable of changing color saturation |
| KR20110133250A (ko) * | 2010-06-04 | 2011-12-12 | 삼성전자주식회사 | 입체 영상 표시 장치용 셔터 안경 및 이를 포함하는 입체 영상 표시 시스템, 그리고 입체 영상 표시 시스템의 제조 방법 |
| TWI419030B (zh) * | 2010-08-06 | 2013-12-11 | Quanta Comp Inc | 光學觸控系統 |
| CN103109315A (zh) | 2010-08-17 | 2013-05-15 | 高通Mems科技公司 | 对干涉式显示装置中的电荷中性电极的激活和校准 |
| US8402647B2 (en) | 2010-08-25 | 2013-03-26 | Qualcomm Mems Technologies Inc. | Methods of manufacturing illumination systems |
| US9057872B2 (en) | 2010-08-31 | 2015-06-16 | Qualcomm Mems Technologies, Inc. | Dielectric enhanced mirror for IMOD display |
| CN102404953A (zh) * | 2010-09-17 | 2012-04-04 | 瀚斯宝丽股份有限公司 | 电子设备的外壳装置 |
| US8670171B2 (en) | 2010-10-18 | 2014-03-11 | Qualcomm Mems Technologies, Inc. | Display having an embedded microlens array |
| US8743082B2 (en) | 2010-10-18 | 2014-06-03 | Qualcomm Mems Technologies, Inc. | Controller architecture for combination touch, handwriting and fingerprint sensor |
| US8902484B2 (en) | 2010-12-15 | 2014-12-02 | Qualcomm Mems Technologies, Inc. | Holographic brightness enhancement film |
| US9069421B2 (en) | 2010-12-16 | 2015-06-30 | Hung-Ta LIU | Touch sensor and touch display apparatus and driving method thereof |
| US8941607B2 (en) * | 2010-12-16 | 2015-01-27 | Hung-Ta LIU | MEMS display with touch control function |
| US8963159B2 (en) | 2011-04-04 | 2015-02-24 | Qualcomm Mems Technologies, Inc. | Pixel via and methods of forming the same |
| US9134527B2 (en) | 2011-04-04 | 2015-09-15 | Qualcomm Mems Technologies, Inc. | Pixel via and methods of forming the same |
| US8659816B2 (en) | 2011-04-25 | 2014-02-25 | Qualcomm Mems Technologies, Inc. | Mechanical layer and methods of making the same |
| US9046976B2 (en) * | 2011-09-28 | 2015-06-02 | Hung-Ta LIU | Method for transmitting and detecting touch sensing signals and touch device using the same |
| US8736939B2 (en) | 2011-11-04 | 2014-05-27 | Qualcomm Mems Technologies, Inc. | Matching layer thin-films for an electromechanical systems reflective display device |
| CN102566595B (zh) * | 2012-01-21 | 2013-01-23 | 渤海大学 | 一种光伏电池的跟踪控制方法 |
| US9024910B2 (en) | 2012-04-23 | 2015-05-05 | Qualcomm Mems Technologies, Inc. | Touchscreen with bridged force-sensitive resistors |
| US20130335312A1 (en) * | 2012-06-15 | 2013-12-19 | Qualcomm Mems Technologies, Inc. | Integration of thin film switching device with electromechanical systems device |
| US20140028686A1 (en) * | 2012-07-27 | 2014-01-30 | Qualcomm Mems Technologies, Inc. | Display system with thin film encapsulated inverted imod |
| US9181086B1 (en) | 2012-10-01 | 2015-11-10 | The Research Foundation For The State University Of New York | Hinged MEMS diaphragm and method of manufacture therof |
| US9413861B2 (en) * | 2012-10-05 | 2016-08-09 | Nokia Technologies Oy | Metallization and anodization of plastic and conductive parts of the body of an apparatus |
| US9484621B2 (en) * | 2012-11-02 | 2016-11-01 | Nokia Technologies Oy | Portable electronic device body having laser perforation apertures and associated fabrication method |
| US9223128B2 (en) * | 2012-12-18 | 2015-12-29 | Pixtronix, Inc. | Display apparatus with densely packed electromechanical systems display elements |
| US9213182B2 (en) * | 2013-01-18 | 2015-12-15 | Pixtronix, Inc. | Asymmetric overlap and suspended shutter structure |
| KR102067763B1 (ko) * | 2013-03-13 | 2020-01-17 | 삼성전자주식회사 | 공간 광변조기, 이를 포함한 홀로그래피 영상 표시 장치 및 공간 광변조 방법 |
| WO2014176277A1 (en) * | 2013-04-22 | 2014-10-30 | Cornell University | Athermal optical devices based on composite structures |
| US9132361B2 (en) | 2013-05-07 | 2015-09-15 | Disney Enterprises, Inc. | Projectable masks |
| US9272426B2 (en) * | 2013-06-26 | 2016-03-01 | The Uniteed States of America as represented by the Secretary of the Army | Optically-actuated mechanical devices |
| US10359551B2 (en) * | 2013-08-12 | 2019-07-23 | Axsun Technologies, Inc. | Dielectric-enhanced metal coatings for MEMS tunable filters |
| KR20150058609A (ko) * | 2013-11-18 | 2015-05-29 | 삼성디스플레이 주식회사 | 표시 장치 |
| JP6424337B2 (ja) * | 2013-12-27 | 2018-11-21 | パナソニックＩｐマネジメント株式会社 | 波長可変光フィルタモジュール |
| US10031354B2 (en) * | 2014-01-31 | 2018-07-24 | Hewlett Packard Enterprise Development Lp | Active-control optical resonator |
| US9710023B2 (en) * | 2015-01-09 | 2017-07-18 | Apple Inc. | Treatment of substrate sub-surface |
| US9910276B2 (en) | 2015-06-30 | 2018-03-06 | Microsoft Technology Licensing, Llc | Diffractive optical elements with graded edges |
| CN104932145B (zh) * | 2015-06-30 | 2017-09-22 | 京东方科技集团股份有限公司 | 显示基板及其制造方法、显示装置 |
| US10670862B2 (en) | 2015-07-02 | 2020-06-02 | Microsoft Technology Licensing, Llc | Diffractive optical elements with asymmetric profiles |
| JP7046792B2 (ja) | 2015-07-15 | 2022-04-04 | テクノロジー イノベーション モメンタム ファンド（イスラエル）リミテッド パートナーシップ | 調整可能なｍｅｍｓエタロン |
| US9864208B2 (en) | 2015-07-30 | 2018-01-09 | Microsoft Technology Licensing, Llc | Diffractive optical elements with varying direction for depth modulation |
| US10038840B2 (en) | 2015-07-30 | 2018-07-31 | Microsoft Technology Licensing, Llc | Diffractive optical element using crossed grating for pupil expansion |
| US10073278B2 (en) | 2015-08-27 | 2018-09-11 | Microsoft Technology Licensing, Llc | Diffractive optical element using polarization rotation grating for in-coupling |
| US10429645B2 (en) | 2015-10-07 | 2019-10-01 | Microsoft Technology Licensing, Llc | Diffractive optical element with integrated in-coupling, exit pupil expansion, and out-coupling |
| US10241332B2 (en) | 2015-10-08 | 2019-03-26 | Microsoft Technology Licensing, Llc | Reducing stray light transmission in near eye display using resonant grating filter |
| US9970629B2 (en) * | 2015-10-19 | 2018-05-15 | GE Lighting Solutions, LLC | Remote phosphor lighting devices and methods |
| US10234686B2 (en) | 2015-11-16 | 2019-03-19 | Microsoft Technology Licensing, Llc | Rainbow removal in near-eye display using polarization-sensitive grating |
| RU2659275C1 (ru) * | 2015-12-31 | 2018-06-29 | Татьяна Григорьевна Шумилова | Способ получения одномерных углеродных структур фотонного типа пиролизом этанола при повышенном давлении |
| RU2659277C1 (ru) * | 2015-12-31 | 2018-06-29 | Татьяна Григорьевна Шумилова | Способ получения трехмерных углеродных структур фотонного типа пиролизом этанола при повышенном давлении |
| RU167990U1 (ru) * | 2016-03-18 | 2017-01-16 | Александр Евгеньевич Сулим | Конструкционный материал |
| CN105823505B (zh) * | 2016-03-21 | 2018-01-09 | 广东小天才科技有限公司 | 一种检测智能终端入水的方法及装置 |
| US9973860B2 (en) * | 2016-04-05 | 2018-05-15 | Infineon Technologies Ag | System and method for an optical MEMS transducer |
| CN105892042B (zh) * | 2016-06-28 | 2018-12-21 | 京东方科技集团股份有限公司 | 一种反射式显示装置、角度确定方法及装置 |
| TWI612281B (zh) | 2016-09-26 | 2018-01-21 | 財團法人工業技術研究院 | 干涉分光元件封裝裝置 |
| WO2018092104A1 (en) * | 2016-11-20 | 2018-05-24 | Unispectral Ltd. | Tunable mems etalon devices |
| US11114593B2 (en) * | 2016-12-01 | 2021-09-07 | Ams Sensors Singapore Pte. Ltd. | Optoelectronic modules and optoelectronic molding tools and processes for manufacturing the same |
| US10263883B2 (en) * | 2016-12-14 | 2019-04-16 | International Business Machines Corporation | Data flow configuration in hybrid system of silicon and micro-electro-mechanical-switch (MEMS) elements |
| CN106647065B (zh) * | 2017-03-13 | 2019-08-02 | 京东方科技集团股份有限公司 | 显示面板及其控制方法、显示装置 |
| US11235328B2 (en) | 2017-04-21 | 2022-02-01 | Hewlett-Packard Development Company, L.P. | Coplanar microfluidic manipulation |
| EP3582894A4 (en) | 2017-04-21 | 2020-03-04 | Hewlett-Packard Development Company, L.P. | MICROFLUIDIC CHIP |
| WO2018194635A1 (en) | 2017-04-21 | 2018-10-25 | Hewlett-Packard Development Company, L.P. | Chip to chip fluidic interconnect |
| WO2018194651A1 (en) * | 2017-04-21 | 2018-10-25 | Hewlett-Packard Development Company, | Coplanar fluidic interconnect |
| RU2661454C1 (ru) * | 2017-07-20 | 2018-07-16 | Валерий Николаевич Конопский | Способ регистрации процессов осаждения на поверхность твердого тела с двумерной визуализацией и устройство для его осуществления |
| US10727118B2 (en) * | 2017-11-30 | 2020-07-28 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method for manufacturing semiconductor device and pre-clean apparatus for semiconductor device |
| EP3557492B1 (en) * | 2018-04-18 | 2022-03-02 | Michele Reilly | Optically coupled nitrogen vacancy-defect system sor scalable qubit arrays |
| RU2699569C1 (ru) * | 2018-12-11 | 2019-09-06 | Федеральное Государственное Бюджетное Образовательное Учреждение Высшего Образования "Красноярский Государственный Медицинский Университет Имени Профессора В.Ф. Войно-Ясенецкого Министерства Здравоохранения Российской Федерации" | Способ определения чувствительности тромбоцитов к ацетилсалициловой кислоте |
| US10768364B1 (en) | 2019-07-15 | 2020-09-08 | Honeywell International Inc. | High-efficiency, high-divergence chip-scale emitter using a waveguide defect between resonant gratings |
| CN110492942B (zh) * | 2019-08-01 | 2021-02-23 | 深圳市科信恒盛通信技术有限公司 | 一种用于网络通信的运行稳定的光纤收发器 |
| RU199224U1 (ru) * | 2019-11-18 | 2020-08-24 | Федеральное казенное учреждение "Научно-исследовательский институт информационных технологий Федеральной службы исполнения наказаний" | Устройство ретрансляции для расширения зоны приема сигналов электронного браслета системы электронного мониторинга подконтрольных лиц |
| CN111580288B (zh) * | 2020-06-11 | 2023-02-28 | 京东方科技集团股份有限公司 | 一种可调谐热光滤波器、其调节方法及制作方法 |
| RU201507U1 (ru) * | 2020-08-11 | 2020-12-18 | Федеральное государственное автономное образовательное учреждение высшего образования "Национальный исследовательский университет "Московский институт электронной техники" | Фотонный модулятор |
| WO2022059824A1 (ko) * | 2020-09-21 | 2022-03-24 | 한국표준과학연구원 | 다중반사 액침 실리콘 기반 미세유로 측정장치 및 측정방법 |
| KR102363759B1 (ko) * | 2020-12-10 | 2022-02-16 | 한국과학기술원 | 전자기파 주파수 변환 장치 |
| CN113376928B (zh) * | 2021-06-15 | 2023-04-14 | 上海电子信息职业技术学院 | 一种集成光电子混合比特可逆逻辑门 |
Family Cites Families (560)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US377324A (en) * | 1888-01-31 | Steam-generator | ||
| US668092A (en) * | 1900-09-22 | 1901-02-12 | Wilson A Clapp | Street-railway switch. |
| US719945A (en) * | 1902-07-07 | 1903-02-03 | George C Banks | Hogshead-cover. |
| US2534846A (en) | 1946-06-20 | 1950-12-19 | Emi Ltd | Color filter |
| US2590906A (en) | 1946-11-22 | 1952-04-01 | Farrand Optical Co Inc | Reflection interference filter |
| US2677714A (en) | 1951-09-21 | 1954-05-04 | Alois Vogt Dr | Optical-electrical conversion device comprising a light-permeable metal electrode |
| US3037189A (en) | 1958-04-23 | 1962-05-29 | Sylvania Electric Prod | Visual display system |
| US3247392A (en) | 1961-05-17 | 1966-04-19 | Optical Coating Laboratory Inc | Optical coating and assembly used as a band pass interference filter reflecting in the ultraviolet and infrared |
| US3210757A (en) | 1962-01-29 | 1965-10-05 | Carlyle W Jacob | Matrix controlled light valve display apparatus |
| DE1288651B (de) | 1963-06-28 | 1969-02-06 | Siemens Ag | Anordnung elektrischer Dipole fuer Wellenlaengen unterhalb 1 mm und Verfahren zur Herstellung einer derartigen Anordnung |
| FR1603131A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1968-07-05 | 1971-03-22 | ||
| US3813265A (en) | 1970-02-16 | 1974-05-28 | A Marks | Electro-optical dipolar material |
| US3653741A (en) | 1970-02-16 | 1972-04-04 | Alvin M Marks | Electro-optical dipolar material |
| DE10127319B4 (de) | 2001-06-06 | 2004-03-18 | Andrea Burkhardt | Wellnessgerät |
| US3728030A (en) | 1970-06-22 | 1973-04-17 | Cary Instruments | Polarization interferometer |
| US3725868A (en) | 1970-10-19 | 1973-04-03 | Burroughs Corp | Small reconfigurable processor for a variety of data processing applications |
| US3679313A (en) | 1970-10-23 | 1972-07-25 | Bell Telephone Labor Inc | Dispersive element for optical pulse compression |
| JPS4946974A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-09-11 | 1974-05-07 | ||
| DE2336930A1 (de) | 1973-07-20 | 1975-02-06 | Battelle Institut E V | Infrarot-modulator (ii.) |
| US3886310A (en) | 1973-08-22 | 1975-05-27 | Westinghouse Electric Corp | Electrostatically deflectable light valve with improved diffraction properties |
| US4099854A (en) | 1976-10-12 | 1978-07-11 | The Unites States Of America As Represented By The Secretary Of The Navy | Optical notch filter utilizing electric dipole resonance absorption |
| US4196396A (en) | 1976-10-15 | 1980-04-01 | Bell Telephone Laboratories, Incorporated | Interferometer apparatus using electro-optic material with feedback |
| US4389096A (en) | 1977-12-27 | 1983-06-21 | Matsushita Electric Industrial Co., Ltd. | Image display apparatus of liquid crystal valve projection type |
| US4445050A (en) | 1981-12-15 | 1984-04-24 | Marks Alvin M | Device for conversion of light power to electric power |
| US4663083A (en) | 1978-05-26 | 1987-05-05 | Marks Alvin M | Electro-optical dipole suspension with reflective-absorptive-transmissive characteristics |
| US4228437A (en) | 1979-06-26 | 1980-10-14 | The United States Of America As Represented By The Secretary Of The Navy | Wideband polarization-transforming electromagnetic mirror |
| NL8001281A (nl) | 1980-03-04 | 1981-10-01 | Philips Nv | Weergeefinrichting. |
| DE3012253A1 (de) | 1980-03-28 | 1981-10-15 | Hoechst Ag, 6000 Frankfurt | Verfahren zum sichtbarmaschen von ladungsbildern und eine hierfuer geeignete vorichtung |
| DE3109653A1 (de) | 1980-03-31 | 1982-01-28 | Jenoptik Jena Gmbh, Ddr 6900 Jena | "resonanzabsorber" |
| US4421381A (en) | 1980-04-04 | 1983-12-20 | Yokogawa Hokushin Electric Corp. | Mechanical vibrating element |
| US4377324A (en) | 1980-08-04 | 1983-03-22 | Honeywell Inc. | Graded index Fabry-Perot optical filter device |
| US4441791A (en) | 1980-09-02 | 1984-04-10 | Texas Instruments Incorporated | Deformable mirror light modulator |
| FR2506026A1 (fr) | 1981-05-18 | 1982-11-19 | Radant Etudes | Procede et dispositif pour l'analyse d'un faisceau de rayonnement d'ondes electromagnetiques hyperfrequence |
| NL8103377A (nl) | 1981-07-16 | 1983-02-16 | Philips Nv | Weergeefinrichting. |
| US4571603A (en) | 1981-11-03 | 1986-02-18 | Texas Instruments Incorporated | Deformable mirror electrostatic printer |
| NL8200354A (nl) | 1982-02-01 | 1983-09-01 | Philips Nv | Passieve weergeefinrichting. |
| US4500171A (en) | 1982-06-02 | 1985-02-19 | Texas Instruments Incorporated | Process for plastic LCD fill hole sealing |
| US4497974A (en) | 1982-11-22 | 1985-02-05 | Exxon Research & Engineering Co. | Realization of a thin film solar cell with a detached reflector |
| US4482213A (en) | 1982-11-23 | 1984-11-13 | Texas Instruments Incorporated | Perimeter seal reinforcement holes for plastic LCDs |
| US4498953A (en) | 1983-07-27 | 1985-02-12 | At&T Bell Laboratories | Etching techniques |
| JPS60159731A (ja) | 1984-01-30 | 1985-08-21 | Sharp Corp | 液晶表示体 |
| US5633652A (en) | 1984-02-17 | 1997-05-27 | Canon Kabushiki Kaisha | Method for driving optical modulation device |
| US4710732A (en) | 1984-07-31 | 1987-12-01 | Texas Instruments Incorporated | Spatial light modulator and method |
| US4566935A (en) | 1984-07-31 | 1986-01-28 | Texas Instruments Incorporated | Spatial light modulator and method |
| US5096279A (en) | 1984-08-31 | 1992-03-17 | Texas Instruments Incorporated | Spatial light modulator and method |
| US5061049A (en) | 1984-08-31 | 1991-10-29 | Texas Instruments Incorporated | Spatial light modulator and method |
| US4596992A (en) | 1984-08-31 | 1986-06-24 | Texas Instruments Incorporated | Linear spatial light modulator and printer |
| US4662746A (en) | 1985-10-30 | 1987-05-05 | Texas Instruments Incorporated | Spatial light modulator and method |
| US4560435A (en) | 1984-10-01 | 1985-12-24 | International Business Machines Corporation | Composite back-etch/lift-off stencil for proximity effect minimization |
| US4615595A (en) | 1984-10-10 | 1986-10-07 | Texas Instruments Incorporated | Frame addressed spatial light modulator |
| US4655554A (en) | 1985-03-06 | 1987-04-07 | The United States Of America As Represented By The Secretary Of The Air Force | Spatial light modulator having a capacitively coupled photoconductor |
| JPS6282454A (ja) * | 1985-10-08 | 1987-04-15 | Canon Inc | 電子機器 |
| US5172262A (en) | 1985-10-30 | 1992-12-15 | Texas Instruments Incorporated | Spatial light modulator and method |
| JPS6282454U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-11-13 | 1987-05-26 | ||
| US4859060A (en) | 1985-11-26 | 1989-08-22 | 501 Sharp Kabushiki Kaisha | Variable interferometric device and a process for the production of the same |
| US4705361A (en) | 1985-11-27 | 1987-11-10 | Texas Instruments Incorporated | Spatial light modulator |
| US5835255A (en) | 1986-04-23 | 1998-11-10 | Etalon, Inc. | Visible spectrum modulator arrays |
| GB8610129D0 (en) | 1986-04-25 | 1986-05-29 | Secr Defence | Electro-optical device |
| US4748366A (en) | 1986-09-02 | 1988-05-31 | Taylor George W | Novel uses of piezoelectric materials for creating optical effects |
| GB8621438D0 (en) | 1986-09-05 | 1986-10-15 | Secr Defence | Electro-optic device |
| US4786128A (en) | 1986-12-02 | 1988-11-22 | Quantum Diagnostics, Ltd. | Device for modulating and reflecting electromagnetic radiation employing electro-optic layer having a variable index of refraction |
| US4822993A (en) | 1987-02-17 | 1989-04-18 | Optron Systems, Inc. | Low-cost, substantially cross-talk free high spatial resolution 2-D bistable light modulator |
| NL8701138A (nl) | 1987-05-13 | 1988-12-01 | Philips Nv | Electroscopische beeldweergeefinrichting. |
| DE3716485C1 (de) | 1987-05-16 | 1988-11-24 | Heraeus Gmbh W C | Xenon-Kurzbogen-Entladungslampe |
| DE3776157D1 (de) | 1987-06-04 | 1992-02-27 | Walter Lukosz | Optisches modulations- und mess-verfahren. |
| US4857978A (en) | 1987-08-11 | 1989-08-15 | North American Philips Corporation | Solid state light modulator incorporating metallized gel and method of metallization |
| US4900136A (en) | 1987-08-11 | 1990-02-13 | North American Philips Corporation | Method of metallizing silica-containing gel and solid state light modulator incorporating the metallized gel |
| GB2210540A (en) | 1987-09-30 | 1989-06-07 | Philips Electronic Associated | Method of and arrangement for modifying stored data,and method of and arrangement for generating two-dimensional images |
| US4956619A (en) | 1988-02-19 | 1990-09-11 | Texas Instruments Incorporated | Spatial light modulator |
| US4856863A (en) | 1988-06-22 | 1989-08-15 | Texas Instruments Incorporated | Optical fiber interconnection network including spatial light modulator |
| US5028939A (en) | 1988-08-23 | 1991-07-02 | Texas Instruments Incorporated | Spatial light modulator system |
| US4925259A (en) | 1988-10-20 | 1990-05-15 | The United States Of America As Represented By The United States Department Of Energy | Multilayer optical dielectric coating |
| JP2700903B2 (ja) | 1988-09-30 | 1998-01-21 | シャープ株式会社 | 液晶表示装置 |
| US4982184A (en) | 1989-01-03 | 1991-01-01 | General Electric Company | Electrocrystallochromic display and element |
| US4973131A (en) | 1989-02-03 | 1990-11-27 | Mcdonnell Douglas Corporation | Modulator mirror |
| US5162787A (en) | 1989-02-27 | 1992-11-10 | Texas Instruments Incorporated | Apparatus and method for digitized video system utilizing a moving display surface |
| KR100202246B1 (ko) | 1989-02-27 | 1999-06-15 | 윌리엄 비. 켐플러 | 디지탈화 비디오 시스템을 위한 장치 및 방법 |
| US5206629A (en) | 1989-02-27 | 1993-04-27 | Texas Instruments Incorporated | Spatial light modulator and memory for digitized video display |
| US5170156A (en) | 1989-02-27 | 1992-12-08 | Texas Instruments Incorporated | Multi-frequency two dimensional display system |
| US5287096A (en) | 1989-02-27 | 1994-02-15 | Texas Instruments Incorporated | Variable luminosity display system |
| US5214419A (en) | 1989-02-27 | 1993-05-25 | Texas Instruments Incorporated | Planarized true three dimensional display |
| US5272473A (en) | 1989-02-27 | 1993-12-21 | Texas Instruments Incorporated | Reduced-speckle display system |
| US5446479A (en) | 1989-02-27 | 1995-08-29 | Texas Instruments Incorporated | Multi-dimensional array video processor system |
| US5192946A (en) | 1989-02-27 | 1993-03-09 | Texas Instruments Incorporated | Digitized color video display system |
| US5214420A (en) | 1989-02-27 | 1993-05-25 | Texas Instruments Incorporated | Spatial light modulator projection system with random polarity light |
| US5079544A (en) | 1989-02-27 | 1992-01-07 | Texas Instruments Incorporated | Standard independent digitized video system |
| US4900395A (en) | 1989-04-07 | 1990-02-13 | Fsi International, Inc. | HF gas etching of wafers in an acid processor |
| US5022745A (en) | 1989-09-07 | 1991-06-11 | Massachusetts Institute Of Technology | Electrostatically deformable single crystal dielectrically coated mirror |
| US4987496A (en) | 1989-09-18 | 1991-01-22 | Eastman Kodak Company | System for scanning halftoned images |
| US4954789A (en) | 1989-09-28 | 1990-09-04 | Texas Instruments Incorporated | Spatial light modulator |
| US5381253A (en) | 1991-11-14 | 1995-01-10 | Board Of Regents Of University Of Colorado | Chiral smectic liquid crystal optical modulators having variable retardation |
| US5124834A (en) | 1989-11-16 | 1992-06-23 | General Electric Company | Transferrable, self-supporting pellicle for elastomer light valve displays and method for making the same |
| US5037173A (en) | 1989-11-22 | 1991-08-06 | Texas Instruments Incorporated | Optical interconnection network |
| JP2910114B2 (ja) | 1990-01-20 | 1999-06-23 | ソニー株式会社 | 電子機器 |
| US5500635A (en) | 1990-02-20 | 1996-03-19 | Mott; Jonathan C. | Products incorporating piezoelectric material |
| CH682523A5 (fr) | 1990-04-20 | 1993-09-30 | Suisse Electronique Microtech | Dispositif de modulation de lumière à adressage matriciel. |
| GB9012099D0 (en) | 1990-05-31 | 1990-07-18 | Kodak Ltd | Optical article for multicolour imaging |
| EP0467048B1 (en) | 1990-06-29 | 1995-09-20 | Texas Instruments Incorporated | Field-updated deformable mirror device |
| US5018256A (en) | 1990-06-29 | 1991-05-28 | Texas Instruments Incorporated | Architecture and process for integrating DMD with control circuit substrates |
| US5099353A (en) | 1990-06-29 | 1992-03-24 | Texas Instruments Incorporated | Architecture and process for integrating DMD with control circuit substrates |
| US5142405A (en) | 1990-06-29 | 1992-08-25 | Texas Instruments Incorporated | Bistable dmd addressing circuit and method |
| US5083857A (en) | 1990-06-29 | 1992-01-28 | Texas Instruments Incorporated | Multi-level deformable mirror device |
| US5216537A (en) | 1990-06-29 | 1993-06-01 | Texas Instruments Incorporated | Architecture and process for integrating DMD with control circuit substrates |
| US5153771A (en) | 1990-07-18 | 1992-10-06 | Northrop Corporation | Coherent light modulation and detector |
| US5062689A (en) | 1990-08-21 | 1991-11-05 | Koehler Dale R | Electrostatically actuatable light modulating device |
| US5192395A (en) | 1990-10-12 | 1993-03-09 | Texas Instruments Incorporated | Method of making a digital flexure beam accelerometer |
| US5526688A (en) | 1990-10-12 | 1996-06-18 | Texas Instruments Incorporated | Digital flexure beam accelerometer and method |
| US5044736A (en) | 1990-11-06 | 1991-09-03 | Motorola, Inc. | Configurable optical filter or display |
| US5331454A (en) | 1990-11-13 | 1994-07-19 | Texas Instruments Incorporated | Low reset voltage process for DMD |
| US5602671A (en) | 1990-11-13 | 1997-02-11 | Texas Instruments Incorporated | Low surface energy passivation layer for micromechanical devices |
| US5233459A (en) | 1991-03-06 | 1993-08-03 | Massachusetts Institute Of Technology | Electric display device |
| US5136669A (en) | 1991-03-15 | 1992-08-04 | Sperry Marine Inc. | Variable ratio fiber optic coupler optical signal processing element |
| DE4108966C2 (de) | 1991-03-19 | 1994-03-10 | Iot Entwicklungsgesellschaft F | Elektro-optischer interferometrischer Lichtmodulator |
| CA2063744C (en) | 1991-04-01 | 2002-10-08 | Paul M. Urbanus | Digital micromirror device architecture and timing for use in a pulse-width modulated display system |
| US5142414A (en) | 1991-04-22 | 1992-08-25 | Koehler Dale R | Electrically actuatable temporal tristimulus-color device |
| US5226099A (en) | 1991-04-26 | 1993-07-06 | Texas Instruments Incorporated | Digital micromirror shutter device |
| US5179274A (en) | 1991-07-12 | 1993-01-12 | Texas Instruments Incorporated | Method for controlling operation of optical systems and devices |
| US5287215A (en) | 1991-07-17 | 1994-02-15 | Optron Systems, Inc. | Membrane light modulation systems |
| US5170283A (en) | 1991-07-24 | 1992-12-08 | Northrop Corporation | Silicon spatial light modulator |
| US5240818A (en) | 1991-07-31 | 1993-08-31 | Texas Instruments Incorporated | Method for manufacturing a color filter for deformable mirror device |
| US5168406A (en) | 1991-07-31 | 1992-12-01 | Texas Instruments Incorporated | Color deformable mirror device and method for manufacture |
| US5254980A (en) | 1991-09-06 | 1993-10-19 | Texas Instruments Incorporated | DMD display system controller |
| US5358601A (en) | 1991-09-24 | 1994-10-25 | Micron Technology, Inc. | Process for isotropically etching semiconductor devices |
| US5315370A (en) | 1991-10-23 | 1994-05-24 | Bulow Jeffrey A | Interferometric modulator for optical signal processing |
| US5563398A (en) | 1991-10-31 | 1996-10-08 | Texas Instruments Incorporated | Spatial light modulator scanning system |
| CA2081753C (en) | 1991-11-22 | 2002-08-06 | Jeffrey B. Sampsell | Dmd scanner |
| US5233385A (en) | 1991-12-18 | 1993-08-03 | Texas Instruments Incorporated | White light enhanced color field sequential projection |
| US5233456A (en) | 1991-12-20 | 1993-08-03 | Texas Instruments Incorporated | Resonant mirror and method of manufacture |
| US5228013A (en) | 1992-01-10 | 1993-07-13 | Bik Russell J | Clock-painting device and method for indicating the time-of-day with a non-traditional, now analog artistic panel of digital electronic visual displays |
| US6381022B1 (en) | 1992-01-22 | 2002-04-30 | Northeastern University | Light modulating device |
| CA2087625C (en) | 1992-01-23 | 2006-12-12 | William E. Nelson | Non-systolic time delay and integration printing |
| US5296950A (en) | 1992-01-31 | 1994-03-22 | Texas Instruments Incorporated | Optical signal free-space conversion board |
| US5231532A (en) | 1992-02-05 | 1993-07-27 | Texas Instruments Incorporated | Switchable resonant filter for optical radiation |
| US5212582A (en) | 1992-03-04 | 1993-05-18 | Texas Instruments Incorporated | Electrostatically controlled beam steering device and method |
| DE69310974T2 (de) | 1992-03-25 | 1997-11-06 | Texas Instruments Inc | Eingebautes optisches Eichsystem |
| US5312513A (en) | 1992-04-03 | 1994-05-17 | Texas Instruments Incorporated | Methods of forming multiple phase light modulators |
| WO1993021663A1 (en) | 1992-04-08 | 1993-10-28 | Georgia Tech Research Corporation | Process for lift-off of thin film materials from a growth substrate |
| US5311360A (en) | 1992-04-28 | 1994-05-10 | The Board Of Trustees Of The Leland Stanford, Junior University | Method and apparatus for modulating a light beam |
| TW245772B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-05-19 | 1995-04-21 | Akzo Nv | |
| JPH0651250A (ja) | 1992-05-20 | 1994-02-25 | Texas Instr Inc <Ti> | モノリシックな空間的光変調器およびメモリのパッケージ |
| US5638084A (en) | 1992-05-22 | 1997-06-10 | Dielectric Systems International, Inc. | Lighting-independent color video display |
| JPH06214169A (ja) | 1992-06-08 | 1994-08-05 | Texas Instr Inc <Ti> | 制御可能な光学的周期的表面フィルタ |
| US5818095A (en) | 1992-08-11 | 1998-10-06 | Texas Instruments Incorporated | High-yield spatial light modulator with light blocking layer |
| US5345328A (en) | 1992-08-12 | 1994-09-06 | Sandia Corporation | Tandem resonator reflectance modulator |
| US5293272A (en) | 1992-08-24 | 1994-03-08 | Physical Optics Corporation | High finesse holographic fabry-perot etalon and method of fabricating |
| US5327286A (en) | 1992-08-31 | 1994-07-05 | Texas Instruments Incorporated | Real time optical correlation system |
| US5325116A (en) | 1992-09-18 | 1994-06-28 | Texas Instruments Incorporated | Device for writing to and reading from optical storage media |
| US5296775A (en) | 1992-09-24 | 1994-03-22 | International Business Machines Corporation | Cooling microfan arrangements and process |
| US5659374A (en) | 1992-10-23 | 1997-08-19 | Texas Instruments Incorporated | Method of repairing defective pixels |
| JP3547160B2 (ja) | 1993-01-11 | 2004-07-28 | テキサス インスツルメンツ インコーポレイテツド | 空間光変調器 |
| FI96450C (fi) | 1993-01-13 | 1996-06-25 | Vaisala Oy | Yksikanavainen kaasun pitoisuuden mittausmenetelmä ja -laitteisto |
| US7830587B2 (en) | 1993-03-17 | 2010-11-09 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light with semiconductor substrate |
| US6674562B1 (en) | 1994-05-05 | 2004-01-06 | Iridigm Display Corporation | Interferometric modulation of radiation |
| US5461411A (en) | 1993-03-29 | 1995-10-24 | Texas Instruments Incorporated | Process and architecture for digital micromirror printer |
| JP3524122B2 (ja) | 1993-05-25 | 2004-05-10 | キヤノン株式会社 | 表示制御装置 |
| DE4317274A1 (de) | 1993-05-25 | 1994-12-01 | Bosch Gmbh Robert | Verfahren zur Herstellung oberflächen-mikromechanischer Strukturen |
| US5559358A (en) | 1993-05-25 | 1996-09-24 | Honeywell Inc. | Opto-electro-mechanical device or filter, process for making, and sensors made therefrom |
| US5324683A (en) | 1993-06-02 | 1994-06-28 | Motorola, Inc. | Method of forming a semiconductor structure having an air region |
| US5489952A (en) | 1993-07-14 | 1996-02-06 | Texas Instruments Incorporated | Method and device for multi-format television |
| US5673139A (en) | 1993-07-19 | 1997-09-30 | Medcom, Inc. | Microelectromechanical television scanning device and method for making the same |
| US5365283A (en) | 1993-07-19 | 1994-11-15 | Texas Instruments Incorporated | Color phase control for projection display using spatial light modulator |
| US5510824A (en) | 1993-07-26 | 1996-04-23 | Texas Instruments, Inc. | Spatial light modulator array |
| US5526172A (en) | 1993-07-27 | 1996-06-11 | Texas Instruments Incorporated | Microminiature, monolithic, variable electrical signal processor and apparatus including same |
| US5581272A (en) | 1993-08-25 | 1996-12-03 | Texas Instruments Incorporated | Signal generator for controlling a spatial light modulator |
| US5552925A (en) | 1993-09-07 | 1996-09-03 | John M. Baker | Electro-micro-mechanical shutters on transparent substrates |
| FR2710161B1 (fr) | 1993-09-13 | 1995-11-24 | Suisse Electronique Microtech | Réseau miniature d'obturateurs de lumière. |
| US5457493A (en) | 1993-09-15 | 1995-10-10 | Texas Instruments Incorporated | Digital micro-mirror based image simulation system |
| US5629790A (en) | 1993-10-18 | 1997-05-13 | Neukermans; Armand P. | Micromachined torsional scanner |
| US5497197A (en) | 1993-11-04 | 1996-03-05 | Texas Instruments Incorporated | System and method for packaging data into video processor |
| US5526051A (en) | 1993-10-27 | 1996-06-11 | Texas Instruments Incorporated | Digital television system |
| US5459602A (en) | 1993-10-29 | 1995-10-17 | Texas Instruments | Micro-mechanical optical shutter |
| US5452024A (en) | 1993-11-01 | 1995-09-19 | Texas Instruments Incorporated | DMD display system |
| US5517347A (en) | 1993-12-01 | 1996-05-14 | Texas Instruments Incorporated | Direct view deformable mirror device |
| CA2137059C (en) | 1993-12-03 | 2004-11-23 | Texas Instruments Incorporated | Dmd architecture to improve horizontal resolution |
| US5583688A (en) | 1993-12-21 | 1996-12-10 | Texas Instruments Incorporated | Multi-level digital micromirror device |
| US5448314A (en) | 1994-01-07 | 1995-09-05 | Texas Instruments | Method and apparatus for sequential color imaging |
| US5500761A (en) | 1994-01-27 | 1996-03-19 | At&T Corp. | Micromechanical modulator |
| FI94804C (fi) | 1994-02-17 | 1995-10-25 | Vaisala Oy | Sähköisesti säädettävä pintamikromekaaninen Fabry-Perot-interferometri käytettäväksi optisessa materiaalianalyysissä |
| US5444566A (en) | 1994-03-07 | 1995-08-22 | Texas Instruments Incorporated | Optimized electronic operation of digital micromirror devices |
| US5665997A (en) | 1994-03-31 | 1997-09-09 | Texas Instruments Incorporated | Grated landing area to eliminate sticking of micro-mechanical devices |
| GB9407116D0 (en) | 1994-04-11 | 1994-06-01 | Secr Defence | Ferroelectric liquid crystal display with greyscale |
| US7826120B2 (en) | 1994-05-05 | 2010-11-02 | Qualcomm Mems Technologies, Inc. | Method and device for multi-color interferometric modulation |
| US6710908B2 (en) | 1994-05-05 | 2004-03-23 | Iridigm Display Corporation | Controlling micro-electro-mechanical cavities |
| US6040937A (en) | 1994-05-05 | 2000-03-21 | Etalon, Inc. | Interferometric modulation |
| US7550794B2 (en) | 2002-09-20 | 2009-06-23 | Idc, Llc | Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer |
| US7852545B2 (en) | 1994-05-05 | 2010-12-14 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
| US7808694B2 (en) | 1994-05-05 | 2010-10-05 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
| US20010003487A1 (en) | 1996-11-05 | 2001-06-14 | Mark W. Miles | Visible spectrum modulator arrays |
| US8081369B2 (en) | 1994-05-05 | 2011-12-20 | Qualcomm Mems Technologies, Inc. | System and method for a MEMS device |
| US7123216B1 (en) | 1994-05-05 | 2006-10-17 | Idc, Llc | Photonic MEMS and structures |
| US6680792B2 (en) | 1994-05-05 | 2004-01-20 | Iridigm Display Corporation | Interferometric modulation of radiation |
| US7738157B2 (en) | 1994-05-05 | 2010-06-15 | Qualcomm Mems Technologies, Inc. | System and method for a MEMS device |
| US7460291B2 (en) | 1994-05-05 | 2008-12-02 | Idc, Llc | Separable modulator |
| KR950033432A (ko) | 1994-05-12 | 1995-12-26 | 윌리엄 이. 힐러 | 공간 광 변조기 디스플레이 포인팅 디바이스 |
| US5497172A (en) | 1994-06-13 | 1996-03-05 | Texas Instruments Incorporated | Pulse width modulation for spatial light modulator with split reset addressing |
| US5673106A (en) | 1994-06-17 | 1997-09-30 | Texas Instruments Incorporated | Printing system with self-monitoring and adjustment |
| US5454906A (en) | 1994-06-21 | 1995-10-03 | Texas Instruments Inc. | Method of providing sacrificial spacer for micro-mechanical devices |
| US5920418A (en) | 1994-06-21 | 1999-07-06 | Matsushita Electric Industrial Co., Ltd. | Diffractive optical modulator and method for producing the same, infrared sensor including such a diffractive optical modulator and method for producing the same, and display device including such a diffractive optical modulator |
| US5499062A (en) | 1994-06-23 | 1996-03-12 | Texas Instruments Incorporated | Multiplexed memory timing with block reset and secondary memory |
| US5636052A (en) | 1994-07-29 | 1997-06-03 | Lucent Technologies Inc. | Direct view display based on a micromechanical modulation |
| US5485304A (en) | 1994-07-29 | 1996-01-16 | Texas Instruments, Inc. | Support posts for micro-mechanical devices |
| DE4431039A1 (de) * | 1994-09-01 | 1996-03-07 | Hoechst Ag | Poly(4,5,9,10-tetrahydropyren-2,7-diyl)-Derivate und ihre Verwendung als Elektrolumineszenzmaterialien |
| US5703710A (en) | 1994-09-09 | 1997-12-30 | Deacon Research | Method for manipulating optical energy using poled structure |
| US6053617A (en) | 1994-09-23 | 2000-04-25 | Texas Instruments Incorporated | Manufacture method for micromechanical devices |
| US5619059A (en) | 1994-09-28 | 1997-04-08 | National Research Council Of Canada | Color deformable mirror device having optical thin film interference color coatings |
| US6560018B1 (en) | 1994-10-27 | 2003-05-06 | Massachusetts Institute Of Technology | Illumination system for transmissive light valve displays |
| US5650881A (en) | 1994-11-02 | 1997-07-22 | Texas Instruments Incorporated | Support post architecture for micromechanical devices |
| FR2726960B1 (fr) | 1994-11-10 | 1996-12-13 | Thomson Csf | Procede de realisation de transducteurs magnetoresistifs |
| US5552924A (en) | 1994-11-14 | 1996-09-03 | Texas Instruments Incorporated | Micromechanical device having an improved beam |
| US5474865A (en) | 1994-11-21 | 1995-12-12 | Sematech, Inc. | Globally planarized binary optical mask using buried absorbers |
| JPH08153700A (ja) | 1994-11-25 | 1996-06-11 | Semiconductor Energy Lab Co Ltd | 導電性被膜の異方性エッチング方法 |
| US5610624A (en) | 1994-11-30 | 1997-03-11 | Texas Instruments Incorporated | Spatial light modulator with reduced possibility of an on state defect |
| US5550373A (en) | 1994-12-30 | 1996-08-27 | Honeywell Inc. | Fabry-Perot micro filter-detector |
| US5726480A (en) | 1995-01-27 | 1998-03-10 | The Regents Of The University Of California | Etchants for use in micromachining of CMOS Microaccelerometers and microelectromechanical devices and method of making the same |
| US5567334A (en) | 1995-02-27 | 1996-10-22 | Texas Instruments Incorporated | Method for creating a digital micromirror device using an aluminum hard mask |
| US5610438A (en) | 1995-03-08 | 1997-03-11 | Texas Instruments Incorporated | Micro-mechanical device with non-evaporable getter |
| US5636185A (en) | 1995-03-10 | 1997-06-03 | Boit Incorporated | Dynamically changing liquid crystal display timekeeping apparatus |
| US5535047A (en) | 1995-04-18 | 1996-07-09 | Texas Instruments Incorporated | Active yoke hidden hinge digital micromirror device |
| US5784190A (en) | 1995-04-27 | 1998-07-21 | John M. Baker | Electro-micro-mechanical shutters on transparent substrates |
| US7898722B2 (en) | 1995-05-01 | 2011-03-01 | Qualcomm Mems Technologies, Inc. | Microelectromechanical device with restoring electrode |
| US5641391A (en) | 1995-05-15 | 1997-06-24 | Hunter; Ian W. | Three dimensional microfabrication by localized electrodeposition and etching |
| US5661592A (en) | 1995-06-07 | 1997-08-26 | Silicon Light Machines | Method of making and an apparatus for a flat diffraction grating light valve |
| US6849471B2 (en) | 2003-03-28 | 2005-02-01 | Reflectivity, Inc. | Barrier layers for microelectromechanical systems |
| US6046840A (en) | 1995-06-19 | 2000-04-04 | Reflectivity, Inc. | Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements |
| US5686979A (en) | 1995-06-26 | 1997-11-11 | Minnesota Mining And Manufacturing Company | Optical panel capable of switching between reflective and transmissive states |
| US6124851A (en) | 1995-07-20 | 2000-09-26 | E Ink Corporation | Electronic book with multiple page displays |
| KR100213026B1 (ko) | 1995-07-27 | 1999-08-02 | 윤종용 | 디엠디 및 그 제조공정 |
| US6324192B1 (en) * | 1995-09-29 | 2001-11-27 | Coretek, Inc. | Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same |
| US5661591A (en) | 1995-09-29 | 1997-08-26 | Texas Instruments Incorporated | Optical switch having an analog beam for steering light |
| US5739945A (en) | 1995-09-29 | 1998-04-14 | Tayebati; Parviz | Electrically tunable optical filter utilizing a deformable multi-layer mirror |
| GB9522135D0 (en) | 1995-10-30 | 1996-01-03 | John Mcgavigan Holdings Limite | Display panels |
| JPH09127551A (ja) | 1995-10-31 | 1997-05-16 | Sharp Corp | 半導体装置およびアクティブマトリクス基板 |
| JP4431196B2 (ja) | 1995-11-06 | 2010-03-10 | アイディーシー エルエルシー | 干渉性変調 |
| US5740150A (en) | 1995-11-24 | 1998-04-14 | Kabushiki Kaisha Toshiba | Galvanomirror and optical disk drive using the same |
| US5999306A (en) | 1995-12-01 | 1999-12-07 | Seiko Epson Corporation | Method of manufacturing spatial light modulator and electronic device employing it |
| US5933183A (en) | 1995-12-12 | 1999-08-03 | Fuji Photo Film Co., Ltd. | Color spatial light modulator and color printer using the same |
| JPH11510219A (ja) | 1995-12-19 | 1999-09-07 | エフエスアイ インターナショナル インコーポレイテッド | スプレー・プロセッサを用いる金属膜の無電解めっき |
| US5825528A (en) | 1995-12-26 | 1998-10-20 | Lucent Technologies Inc. | Phase-mismatched fabry-perot cavity micromechanical modulator |
| JP3799092B2 (ja) | 1995-12-29 | 2006-07-19 | アジレント・テクノロジーズ・インク | 光変調装置及びディスプレイ装置 |
| US5638946A (en) | 1996-01-11 | 1997-06-17 | Northeastern University | Micromechanical switch with insulated switch contact |
| US5751469A (en) | 1996-02-01 | 1998-05-12 | Lucent Technologies Inc. | Method and apparatus for an improved micromechanical modulator |
| US6114862A (en) | 1996-02-14 | 2000-09-05 | Stmicroelectronics, Inc. | Capacitive distance sensor |
| US6624944B1 (en) | 1996-03-29 | 2003-09-23 | Texas Instruments Incorporated | Fluorinated coating for an optical element |
| US5815141A (en) | 1996-04-12 | 1998-09-29 | Elo Touch Systems, Inc. | Resistive touchscreen having multiple selectable regions for pressure discrimination |
| US5710656A (en) | 1996-07-30 | 1998-01-20 | Lucent Technologies Inc. | Micromechanical optical modulator having a reduced-mass composite membrane |
| US5793504A (en) | 1996-08-07 | 1998-08-11 | Northrop Grumman Corporation | Hybrid angular/spatial holographic multiplexer |
| US5838484A (en) | 1996-08-19 | 1998-11-17 | Lucent Technologies Inc. | Micromechanical optical modulator with linear operating characteristic |
| US5912758A (en) | 1996-09-11 | 1999-06-15 | Texas Instruments Incorporated | Bipolar reset for spatial light modulators |
| GB9619781D0 (en) | 1996-09-23 | 1996-11-06 | Secr Defence | Multi layer interference coatings |
| US5771116A (en) | 1996-10-21 | 1998-06-23 | Texas Instruments Incorporated | Multiple bias level reset waveform for enhanced DMD control |
| US7830588B2 (en) | 1996-12-19 | 2010-11-09 | Qualcomm Mems Technologies, Inc. | Method of making a light modulating display device and associated transistor circuitry and structures thereof |
| US6028689A (en) | 1997-01-24 | 2000-02-22 | The United States Of America As Represented By The Secretary Of The Air Force | Multi-motion micromirror |
| US5939795A (en) | 1997-02-10 | 1999-08-17 | Yu; Wei Kong | Seat sensor operating safety system for a motor vehicle |
| US5786927A (en) | 1997-03-12 | 1998-07-28 | Lucent Technologies Inc. | Gas-damped micromechanical structure |
| US6384952B1 (en) | 1997-03-27 | 2002-05-07 | Mems Optical Inc. | Vertical comb drive actuated deformable mirror device and method |
| DE69806846T2 (de) | 1997-05-08 | 2002-12-12 | Texas Instruments Inc., Dallas | Verbesserungen für räumliche Lichtmodulatoren |
| EP0879991A3 (en) | 1997-05-13 | 1999-04-21 | Matsushita Electric Industrial Co., Ltd. | Illuminating system |
| US6480177B2 (en) | 1997-06-04 | 2002-11-12 | Texas Instruments Incorporated | Blocked stepped address voltage for micromechanical devices |
| US5808780A (en) | 1997-06-09 | 1998-09-15 | Texas Instruments Incorporated | Non-contacting micromechanical optical switch |
| US6239777B1 (en) | 1997-07-22 | 2001-05-29 | Kabushiki Kaisha Toshiba | Display device |
| US5870221A (en) | 1997-07-25 | 1999-02-09 | Lucent Technologies, Inc. | Micromechanical modulator having enhanced performance |
| US5867302A (en) | 1997-08-07 | 1999-02-02 | Sandia Corporation | Bistable microelectromechanical actuator |
| KR19990016714A (ko) | 1997-08-19 | 1999-03-15 | 윤종용 | 다면 영상 디스플레이형 배면 투사 프로젝트 장치 |
| US6031653A (en) | 1997-08-28 | 2000-02-29 | California Institute Of Technology | Low-cost thin-metal-film interference filters |
| US5994174A (en) | 1997-09-29 | 1999-11-30 | The Regents Of The University Of California | Method of fabrication of display pixels driven by silicon thin film transistors |
| US6285424B1 (en) | 1997-11-07 | 2001-09-04 | Sumitomo Chemical Company, Limited | Black mask, color filter and liquid crystal display |
| US6028690A (en) | 1997-11-26 | 2000-02-22 | Texas Instruments Incorporated | Reduced micromirror mirror gaps for improved contrast ratio |
| US6180428B1 (en) | 1997-12-12 | 2001-01-30 | Xerox Corporation | Monolithic scanning light emitting devices using micromachining |
| WO1999036824A1 (fr) | 1998-01-20 | 1999-07-22 | Seiko Epson Corporation | Dispositif de commutation optique et dispositif d'affichage d'images |
| JPH11211999A (ja) | 1998-01-28 | 1999-08-06 | Teijin Ltd | 光変調素子および表示装置 |
| US5914804A (en) | 1998-01-28 | 1999-06-22 | Lucent Technologies Inc | Double-cavity micromechanical optical modulator with plural multilayer mirrors |
| US6660656B2 (en) | 1998-02-11 | 2003-12-09 | Applied Materials Inc. | Plasma processes for depositing low dielectric constant films |
| US6100861A (en) | 1998-02-17 | 2000-08-08 | Rainbow Displays, Inc. | Tiled flat panel display with improved color gamut |
| US6195196B1 (en) | 1998-03-13 | 2001-02-27 | Fuji Photo Film Co., Ltd. | Array-type exposing device and flat type display incorporating light modulator and driving method thereof |
| US6262697B1 (en) | 1998-03-20 | 2001-07-17 | Eastman Kodak Company | Display having viewable and conductive images |
| US7532377B2 (en) | 1998-04-08 | 2009-05-12 | Idc, Llc | Movable micro-electromechanical device |
| WO1999052006A2 (en) | 1998-04-08 | 1999-10-14 | Etalon, Inc. | Interferometric modulation of radiation |
| US8928967B2 (en) | 1998-04-08 | 2015-01-06 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
| US6097145A (en) | 1998-04-27 | 2000-08-01 | Copytele, Inc. | Aerogel-based phase transition flat panel display |
| US5943158A (en) | 1998-05-05 | 1999-08-24 | Lucent Technologies Inc. | Micro-mechanical, anti-reflection, switched optical modulator array and fabrication method |
| US6160833A (en) | 1998-05-06 | 2000-12-12 | Xerox Corporation | Blue vertical cavity surface emitting laser |
| AU3987299A (en) | 1998-05-12 | 1999-11-29 | E-Ink Corporation | Microencapsulated electrophoretic electrostatically-addressed media for drawing device applications |
| US6282010B1 (en) | 1998-05-14 | 2001-08-28 | Texas Instruments Incorporated | Anti-reflective coatings for spatial light modulators |
| US6339417B1 (en) | 1998-05-15 | 2002-01-15 | Inviso, Inc. | Display system having multiple memory elements per pixel |
| US6046659A (en) | 1998-05-15 | 2000-04-04 | Hughes Electronics Corporation | Design and fabrication of broadband surface-micromachined micro-electro-mechanical switches for microwave and millimeter-wave applications |
| US6323982B1 (en) | 1998-05-22 | 2001-11-27 | Texas Instruments Incorporated | Yield superstructure for digital micromirror device |
| US6147790A (en) | 1998-06-02 | 2000-11-14 | Texas Instruments Incorporated | Spring-ring micromechanical device |
| US6430332B1 (en) | 1998-06-05 | 2002-08-06 | Fiber, Llc | Optical switching apparatus |
| US6496122B2 (en) | 1998-06-26 | 2002-12-17 | Sharp Laboratories Of America, Inc. | Image display and remote control system capable of displaying two distinct images |
| GB2341476A (en) | 1998-09-03 | 2000-03-15 | Sharp Kk | Variable resolution display device |
| US6113239A (en) | 1998-09-04 | 2000-09-05 | Sharp Laboratories Of America, Inc. | Projection display system for reflective light valves |
| US6242989B1 (en) | 1998-09-12 | 2001-06-05 | Agere Systems Guardian Corp. | Article comprising a multi-port variable capacitor |
| JP4074714B2 (ja) | 1998-09-25 | 2008-04-09 | 富士フイルム株式会社 | アレイ型光変調素子及び平面ディスプレイの駆動方法 |
| US6323834B1 (en) | 1998-10-08 | 2001-11-27 | International Business Machines Corporation | Micromechanical displays and fabrication method |
| JP3919954B2 (ja) | 1998-10-16 | 2007-05-30 | 富士フイルム株式会社 | アレイ型光変調素子及び平面ディスプレイの駆動方法 |
| US6171945B1 (en) | 1998-10-22 | 2001-01-09 | Applied Materials, Inc. | CVD nanoporous silica low dielectric constant films |
| US6288824B1 (en) | 1998-11-03 | 2001-09-11 | Alex Kastalsky | Display device based on grating electromechanical shutter |
| JP2000147262A (ja) | 1998-11-11 | 2000-05-26 | Nobuyuki Higuchi | 集光装置及びこれを利用した太陽光発電システム |
| US6335831B2 (en) | 1998-12-18 | 2002-01-01 | Eastman Kodak Company | Multilevel mechanical grating device |
| US6465956B1 (en) | 1998-12-28 | 2002-10-15 | Pioneer Corporation | Plasma display panel |
| US6358021B1 (en) | 1998-12-29 | 2002-03-19 | Honeywell International Inc. | Electrostatic actuators for active surfaces |
| US6215221B1 (en) | 1998-12-29 | 2001-04-10 | Honeywell International Inc. | Electrostatic/pneumatic actuators for active surfaces |
| US6188519B1 (en) | 1999-01-05 | 2001-02-13 | Kenneth Carlisle Johnson | Bigrating light valve |
| US6242932B1 (en) | 1999-02-19 | 2001-06-05 | Micron Technology, Inc. | Interposer for semiconductor components having contact balls |
| JP3864204B2 (ja) | 1999-02-19 | 2006-12-27 | 株式会社日立プラズマパテントライセンシング | プラズマディスプレイパネル |
| US6606175B1 (en) | 1999-03-16 | 2003-08-12 | Sharp Laboratories Of America, Inc. | Multi-segment light-emitting diode |
| US6449084B1 (en) | 1999-05-10 | 2002-09-10 | Yanping Guo | Optical deflector |
| US6323987B1 (en) | 1999-05-14 | 2001-11-27 | Agere Systems Optoelectronics Guardian Corp. | Controlled multi-wavelength etalon |
| US6201633B1 (en) | 1999-06-07 | 2001-03-13 | Xerox Corporation | Micro-electromechanical based bistable color display sheets |
| US6862029B1 (en) | 1999-07-27 | 2005-03-01 | Hewlett-Packard Development Company, L.P. | Color display system |
| US6331909B1 (en) | 1999-08-05 | 2001-12-18 | Microvision, Inc. | Frequency tunable resonant scanner |
| US6525310B2 (en) | 1999-08-05 | 2003-02-25 | Microvision, Inc. | Frequency tunable resonant scanner |
| US6335235B1 (en) | 1999-08-17 | 2002-01-01 | Advanced Micro Devices, Inc. | Simplified method of patterning field dielectric regions in a semiconductor device |
| WO2003007049A1 (en) | 1999-10-05 | 2003-01-23 | Iridigm Display Corporation | Photonic mems and structures |
| US6351329B1 (en) | 1999-10-08 | 2002-02-26 | Lucent Technologies Inc. | Optical attenuator |
| US6741383B2 (en) | 2000-08-11 | 2004-05-25 | Reflectivity, Inc. | Deflectable micromirrors with stopping mechanisms |
| US6960305B2 (en) | 1999-10-26 | 2005-11-01 | Reflectivity, Inc | Methods for forming and releasing microelectromechanical structures |
| US6549338B1 (en) | 1999-11-12 | 2003-04-15 | Texas Instruments Incorporated | Bandpass filter to reduce thermal impact of dichroic light shift |
| US6552840B2 (en) | 1999-12-03 | 2003-04-22 | Texas Instruments Incorporated | Electrostatic efficiency of micromechanical devices |
| US6548908B2 (en) | 1999-12-27 | 2003-04-15 | Xerox Corporation | Structure and method for planar lateral oxidation in passive devices |
| US6674090B1 (en) | 1999-12-27 | 2004-01-06 | Xerox Corporation | Structure and method for planar lateral oxidation in active |
| US6545335B1 (en) | 1999-12-27 | 2003-04-08 | Xerox Corporation | Structure and method for electrical isolation of optoelectronic integrated circuits |
| US6466358B2 (en) | 1999-12-30 | 2002-10-15 | Texas Instruments Incorporated | Analog pulse width modulation cell for digital micromechanical device |
| US6519073B1 (en) | 2000-01-10 | 2003-02-11 | Lucent Technologies Inc. | Micromechanical modulator and methods for fabricating the same |
| CA2397806C (en) | 2000-01-21 | 2009-05-05 | Flex Products, Inc. | Optically variable security devices |
| US6307663B1 (en) | 2000-01-26 | 2001-10-23 | Eastman Kodak Company | Spatial light modulator with conformal grating device |
| US6407851B1 (en) | 2000-08-01 | 2002-06-18 | Mohammed N. Islam | Micromechanical optical switch |
| JP2001221913A (ja) | 2000-02-08 | 2001-08-17 | Yokogawa Electric Corp | ファブリペローフィルタ及び赤外線ガス分析計 |
| GB2359636B (en) | 2000-02-22 | 2002-05-01 | Marconi Comm Ltd | Wavelength selective optical filter |
| WO2001063588A1 (en) | 2000-02-24 | 2001-08-30 | Koninklijke Philips Electronics N.V. | Display device comprising a light guide |
| US6836366B1 (en) | 2000-03-03 | 2004-12-28 | Axsun Technologies, Inc. | Integrated tunable fabry-perot filter and method of making same |
| US6747775B2 (en) | 2000-03-20 | 2004-06-08 | Np Photonics, Inc. | Detunable Fabry-Perot interferometer and an add/drop multiplexer using the same |
| US6698295B1 (en) | 2000-03-31 | 2004-03-02 | Shipley Company, L.L.C. | Microstructures comprising silicon nitride layer and thin conductive polysilicon layer |
| US6400738B1 (en) | 2000-04-14 | 2002-06-04 | Agilent Technologies, Inc. | Tunable Fabry-Perot filters and lasers |
| US7008812B1 (en) | 2000-05-30 | 2006-03-07 | Ic Mechanics, Inc. | Manufacture of MEMS structures in sealed cavity using dry-release MEMS device encapsulation |
| JP2001356701A (ja) | 2000-06-15 | 2001-12-26 | Fuji Photo Film Co Ltd | 光学素子、光源ユニットおよび表示装置 |
| US6466190B1 (en) | 2000-06-19 | 2002-10-15 | Koninklijke Philips Electronics N.V. | Flexible color modulation tables of ratios for generating color modulation patterns |
| US6473274B1 (en) | 2000-06-28 | 2002-10-29 | Texas Instruments Incorporated | Symmetrical microactuator structure for use in mass data storage devices, or the like |
| FR2811139B1 (fr) | 2000-06-29 | 2003-10-17 | Centre Nat Rech Scient | Dispositif optoelectronique a filtrage de longueur d'onde integre |
| TW535024B (en) | 2000-06-30 | 2003-06-01 | Minolta Co Ltd | Liquid display element and method of producing the same |
| KR100840827B1 (ko) | 2000-07-03 | 2008-06-23 | 소니 가부시끼 가이샤 | 광학 다층 구조체, 광학 절환 장치 및 화상 디스플레이 |
| EP1172681A3 (en) | 2000-07-13 | 2004-06-09 | Creo IL. Ltd. | Blazed micro-mechanical light modulator and array thereof |
| US6456420B1 (en) | 2000-07-27 | 2002-09-24 | Mcnc | Microelectromechanical elevating structures |
| US6853129B1 (en) | 2000-07-28 | 2005-02-08 | Candescent Technologies Corporation | Protected substrate structure for a field emission display device |
| US6778155B2 (en) | 2000-07-31 | 2004-08-17 | Texas Instruments Incorporated | Display operation with inserted block clears |
| US6867897B2 (en) | 2003-01-29 | 2005-03-15 | Reflectivity, Inc | Micromirrors and off-diagonal hinge structures for micromirror arrays in projection displays |
| JP2002062490A (ja) | 2000-08-14 | 2002-02-28 | Canon Inc | 干渉性変調素子 |
| US6635919B1 (en) | 2000-08-17 | 2003-10-21 | Texas Instruments Incorporated | High Q-large tuning range micro-electro mechanical system (MEMS) varactor for broadband applications |
| US6376787B1 (en) | 2000-08-24 | 2002-04-23 | Texas Instruments Incorporated | Microelectromechanical switch with fixed metal electrode/dielectric interface with a protective cap layer |
| US6643069B2 (en) | 2000-08-31 | 2003-11-04 | Texas Instruments Incorporated | SLM-base color projection display having multiple SLM's and multiple projection lenses |
| JP4304852B2 (ja) | 2000-09-04 | 2009-07-29 | コニカミノルタホールディングス株式会社 | 非平面液晶表示素子及びその製造方法 |
| US6358254B1 (en) * | 2000-09-11 | 2002-03-19 | D. Greg Anderson | Method and implant for expanding a spinal canal |
| US6466354B1 (en) | 2000-09-19 | 2002-10-15 | Silicon Light Machines | Method and apparatus for interferometric modulation of light |
| US6714565B1 (en) | 2000-11-01 | 2004-03-30 | Agilent Technologies, Inc. | Optically tunable Fabry Perot microelectromechanical resonator |
| JP3466148B2 (ja) | 2000-11-02 | 2003-11-10 | 富士通株式会社 | ガルバノミラーの製造方法およびガルバノミラー |
| US6556338B2 (en) | 2000-11-03 | 2003-04-29 | Intpax, Inc. | MEMS based variable optical attenuator (MBVOA) |
| US6859218B1 (en) | 2000-11-07 | 2005-02-22 | Hewlett-Packard Development Company, L.P. | Electronic display devices and methods |
| US6433917B1 (en) | 2000-11-22 | 2002-08-13 | Ball Semiconductor, Inc. | Light modulation device and system |
| US6647171B1 (en) | 2000-12-01 | 2003-11-11 | Corning Incorporated | MEMS optical switch actuator |
| US6847752B2 (en) | 2000-12-07 | 2005-01-25 | Bluebird Optical Mems Ltd. | Integrated actuator for optical switch mirror array |
| US6906847B2 (en) | 2000-12-07 | 2005-06-14 | Reflectivity, Inc | Spatial light modulators with light blocking/absorbing areas |
| US7196599B2 (en) | 2000-12-11 | 2007-03-27 | Dabbaj Rad H | Electrostatic device |
| US6614576B2 (en) | 2000-12-15 | 2003-09-02 | Texas Instruments Incorporated | Surface micro-planarization for enhanced optical efficiency and pixel performance in SLM devices |
| DE10064616C2 (de) | 2000-12-22 | 2003-02-06 | Ovd Kinegram Ag Zug | Dekorfolie und Verfahren zum Beschriften der Dekorfolie |
| US20020149834A1 (en) | 2000-12-22 | 2002-10-17 | Ball Semiconductor, Inc. | Light modulation device and system |
| US6775174B2 (en) | 2000-12-28 | 2004-08-10 | Texas Instruments Incorporated | Memory architecture for micromirror cell |
| US6625047B2 (en) | 2000-12-31 | 2003-09-23 | Texas Instruments Incorporated | Micromechanical memory element |
| WO2002058089A1 (en) | 2001-01-19 | 2002-07-25 | Massachusetts Institute Of Technology | Bistable actuation techniques, mechanisms, and applications |
| JP2002221678A (ja) | 2001-01-25 | 2002-08-09 | Seiko Epson Corp | 光スイッチングデバイス、その製造方法および画像表示装置 |
| WO2002079853A1 (en) | 2001-03-16 | 2002-10-10 | Corning Intellisense Corporation | Electrostatically actuated micro-electro-mechanical devices and method of manufacture |
| US20020167072A1 (en) | 2001-03-16 | 2002-11-14 | Andosca Robert George | Electrostatically actuated micro-electro-mechanical devices and method of manufacture |
| JP2002277771A (ja) | 2001-03-21 | 2002-09-25 | Ricoh Co Ltd | 光変調装置 |
| US6661561B2 (en) | 2001-03-26 | 2003-12-09 | Creo Inc. | High frequency deformable mirror device |
| US6630786B2 (en) | 2001-03-30 | 2003-10-07 | Candescent Technologies Corporation | Light-emitting device having light-reflective layer formed with, or/and adjacent to, material that enhances device performance |
| GB0108309D0 (en) | 2001-04-03 | 2001-05-23 | Koninkl Philips Electronics Nv | Matrix array devices with flexible substrates |
| US20020149850A1 (en) | 2001-04-17 | 2002-10-17 | E-Tek Dynamics, Inc. | Tunable optical filter |
| US6600587B2 (en) | 2001-04-23 | 2003-07-29 | Memx, Inc. | Surface micromachined optical system with reinforced mirror microstructure |
| US6657832B2 (en) | 2001-04-26 | 2003-12-02 | Texas Instruments Incorporated | Mechanically assisted restoring force support for micromachined membranes |
| US6465355B1 (en) | 2001-04-27 | 2002-10-15 | Hewlett-Packard Company | Method of fabricating suspended microstructures |
| GB2375184A (en) | 2001-05-02 | 2002-11-06 | Marconi Caswell Ltd | Wavelength selectable optical filter |
| FR2824643B1 (fr) | 2001-05-10 | 2003-10-31 | Jean Pierre Lazzari | Dispositif de modulation de lumiere |
| AU2002303842A1 (en) | 2001-05-22 | 2002-12-03 | Reflectivity, Inc. | A method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants |
| US7106307B2 (en) | 2001-05-24 | 2006-09-12 | Eastman Kodak Company | Touch screen for use with an OLED display |
| US6598985B2 (en) | 2001-06-11 | 2003-07-29 | Nanogear | Optical mirror system with multi-axis rotational control |
| US7749388B2 (en) | 2001-06-15 | 2010-07-06 | Life Technologies Corporation | Low volume filtration column devices and methods of filtering therewith |
| US6822628B2 (en) | 2001-06-28 | 2004-11-23 | Candescent Intellectual Property Services, Inc. | Methods and systems for compensating row-to-row brightness variations of a field emission display |
| AU2002309106A1 (en) | 2001-07-05 | 2003-02-24 | International Business Machines Coporation | Microsystem switches |
| JP3740444B2 (ja) | 2001-07-11 | 2006-02-01 | キヤノン株式会社 | 光偏向器、それを用いた光学機器、ねじれ揺動体 |
| JP4032216B2 (ja) | 2001-07-12 | 2008-01-16 | ソニー株式会社 | 光学多層構造体およびその製造方法、並びに光スイッチング素子および画像表示装置 |
| US6594059B2 (en) | 2001-07-16 | 2003-07-15 | Axsun Technologies, Inc. | Tilt mirror fabry-perot filter system, fabrication process therefor, and method of operation thereof |
| KR100452112B1 (ko) | 2001-07-18 | 2004-10-12 | 한국과학기술원 | 정전 구동기 |
| US6862022B2 (en) | 2001-07-20 | 2005-03-01 | Hewlett-Packard Development Company, L.P. | Method and system for automatically selecting a vertical refresh rate for a video display monitor |
| US6589625B1 (en) | 2001-08-01 | 2003-07-08 | Iridigm Display Corporation | Hermetic seal and method to create the same |
| US6600201B2 (en) | 2001-08-03 | 2003-07-29 | Hewlett-Packard Development Company, L.P. | Systems with high density packing of micromachines |
| US6632698B2 (en) | 2001-08-07 | 2003-10-14 | Hewlett-Packard Development Company, L.P. | Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS |
| US6661562B2 (en) | 2001-08-17 | 2003-12-09 | Lucent Technologies Inc. | Optical modulator and method of manufacture thereof |
| EP1291570A3 (en) * | 2001-09-07 | 2004-06-30 | Avon Polymer Products Limited | Noise and vibration suppressors |
| US7015457B2 (en) | 2002-03-18 | 2006-03-21 | Honeywell International Inc. | Spectrally tunable detector |
| US20030053078A1 (en) | 2001-09-17 | 2003-03-20 | Mark Missey | Microelectromechanical tunable fabry-perot wavelength monitor with thermal actuators |
| WO2003028059A1 (en) | 2001-09-21 | 2003-04-03 | Hrl Laboratories, Llc | Mems switches and methods of making same |
| US7004015B2 (en) | 2001-10-25 | 2006-02-28 | The Regents Of The University Of Michigan | Method and system for locally sealing a vacuum microcavity, methods and systems for monitoring and controlling pressure and method and system for trimming resonant frequency of a microstructure therein |
| US6870581B2 (en) | 2001-10-30 | 2005-03-22 | Sharp Laboratories Of America, Inc. | Single panel color video projection display using reflective banded color falling-raster illumination |
| EP1760036B1 (en) | 2001-11-09 | 2012-06-13 | WiSpry, Inc. | MEMS device having contact and standoff bumps and method of actuating |
| KR100472817B1 (ko) | 2001-12-07 | 2005-03-10 | 마츠시타 덴끼 산교 가부시키가이샤 | 정보기록 매체와 그 제조 방법 |
| JP2003177336A (ja) | 2001-12-11 | 2003-06-27 | Fuji Photo Film Co Ltd | 光変調素子及び光変調素子アレイ並びにそれを用いた露光装置 |
| JP3893421B2 (ja) | 2001-12-27 | 2007-03-14 | 富士フイルム株式会社 | 光変調素子及び光変調素子アレイ並びにそれを用いた露光装置 |
| US6959990B2 (en) | 2001-12-31 | 2005-11-01 | Texas Instruments Incorporated | Prism for high contrast projection |
| US6791735B2 (en) | 2002-01-09 | 2004-09-14 | The Regents Of The University Of California | Differentially-driven MEMS spatial light modulator |
| US6608268B1 (en) | 2002-02-05 | 2003-08-19 | Memtronics, A Division Of Cogent Solutions, Inc. | Proximity micro-electro-mechanical system |
| US6794119B2 (en) | 2002-02-12 | 2004-09-21 | Iridigm Display Corporation | Method for fabricating a structure for a microelectromechanical systems (MEMS) device |
| AU2003207186A1 (en) | 2002-02-15 | 2003-09-04 | Bridgestone Corporation | Image display unit |
| US6643053B2 (en) | 2002-02-20 | 2003-11-04 | The Regents Of The University Of California | Piecewise linear spatial phase modulator using dual-mode micromirror arrays for temporal and diffractive fourier optics |
| US6574033B1 (en) | 2002-02-27 | 2003-06-03 | Iridigm Display Corporation | Microelectromechanical systems device and method for fabricating same |
| EP1482770A4 (en) | 2002-03-01 | 2007-01-03 | Sharp Kk | LIGHT EMITTING DEVICE AND DISPLAY USING THE DEVICE AND READING DEVICE |
| US6891658B2 (en) | 2002-03-04 | 2005-05-10 | The University Of British Columbia | Wide viewing angle reflective display |
| CN1643565A (zh) | 2002-03-13 | 2005-07-20 | 不列颠哥伦比亚大学 | 高动态范围显示装置 |
| US7145143B2 (en) | 2002-03-18 | 2006-12-05 | Honeywell International Inc. | Tunable sensor |
| US6768555B2 (en) | 2002-03-21 | 2004-07-27 | Industrial Technology Research Institute | Fabry-Perot filter apparatus with enhanced optical discrimination |
| US6965468B2 (en) | 2003-07-03 | 2005-11-15 | Reflectivity, Inc | Micromirror array having reduced gap between adjacent micromirrors of the micromirror array |
| JP4799823B2 (ja) | 2002-04-11 | 2011-10-26 | ジェノア・カラー・テクノロジーズ・リミテッド | 属性を向上させるカラー表示装置および方法 |
| KR101009818B1 (ko) | 2002-04-11 | 2011-01-19 | 엔엑스피 비 브이 | 전자 디바이스 제조 방법, 캐리어 및 캐리어 제조 방법 |
| JP2003315732A (ja) | 2002-04-25 | 2003-11-06 | Fuji Photo Film Co Ltd | 画像表示装置 |
| US6972882B2 (en) | 2002-04-30 | 2005-12-06 | Hewlett-Packard Development Company, L.P. | Micro-mirror device with light angle amplification |
| US20030202264A1 (en) | 2002-04-30 | 2003-10-30 | Weber Timothy L. | Micro-mirror device |
| US6954297B2 (en) | 2002-04-30 | 2005-10-11 | Hewlett-Packard Development Company, L.P. | Micro-mirror device including dielectrophoretic liquid |
| US20040212026A1 (en) | 2002-05-07 | 2004-10-28 | Hewlett-Packard Company | MEMS device having time-varying control |
| JP2003340795A (ja) | 2002-05-20 | 2003-12-02 | Sony Corp | 静電駆動型ｍｅｍｓ素子とその製造方法、光学ｍｅｍｓ素子、光変調素子、ｇｌｖデバイス及びレーザディスプレイ |
| JP3801099B2 (ja) | 2002-06-04 | 2006-07-26 | 株式会社デンソー | チューナブルフィルタ、その製造方法、及びそれを使用した光スイッチング装置 |
| US6813059B2 (en) | 2002-06-28 | 2004-11-02 | Silicon Light Machines, Inc. | Reduced formation of asperities in contact micro-structures |
| DE10228946B4 (de) | 2002-06-28 | 2004-08-26 | Universität Bremen | Optischer Modulator, Display, Verwendung eines optischen Modulators und Verfahren zur Herstellung eines optischen Modulators |
| US6741377B2 (en) | 2002-07-02 | 2004-05-25 | Iridigm Display Corporation | Device having a light-absorbing mask and a method for fabricating same |
| US6738194B1 (en) | 2002-07-22 | 2004-05-18 | The United States Of America As Represented By The Secretary Of The Navy | Resonance tunable optical filter |
| US6822798B2 (en) | 2002-08-09 | 2004-11-23 | Optron Systems, Inc. | Tunable optical filter |
| US6674033B1 (en) | 2002-08-21 | 2004-01-06 | Ming-Shan Wang | Press button type safety switch |
| TW544787B (en) | 2002-09-18 | 2003-08-01 | Promos Technologies Inc | Method of forming self-aligned contact structure with locally etched gate conductive layer |
| CN100483176C (zh) | 2002-09-19 | 2009-04-29 | 皇家飞利浦电子股份有限公司 | 可切换光学元件 |
| JP4057871B2 (ja) | 2002-09-19 | 2008-03-05 | 東芝松下ディスプレイテクノロジー株式会社 | 液晶表示装置 |
| KR100512960B1 (ko) | 2002-09-26 | 2005-09-07 | 삼성전자주식회사 | 플렉서블 ｍｅｍｓ 트랜스듀서와 그 제조방법 및 이를채용한 플렉서블 ｍｅｍｓ 무선 마이크로폰 |
| JP4347654B2 (ja) | 2002-10-16 | 2009-10-21 | オリンパス株式会社 | 可変形状反射鏡及びその製造方法 |
| US6986587B2 (en) | 2002-10-16 | 2006-01-17 | Olympus Corporation | Variable-shape reflection mirror and method of manufacturing the same |
| US7085121B2 (en) | 2002-10-21 | 2006-08-01 | Hrl Laboratories, Llc | Variable capacitance membrane actuator for wide band tuning of microstrip resonators and filters |
| FR2846318B1 (fr) | 2002-10-24 | 2005-01-07 | Commissariat Energie Atomique | Microstructure electromecanique integree comportant des moyens de reglage de la pression dans une cavite scellee et procede de reglage de la pression |
| US6747785B2 (en) | 2002-10-24 | 2004-06-08 | Hewlett-Packard Development Company, L.P. | MEMS-actuated color light modulator and methods |
| US6666561B1 (en) | 2002-10-28 | 2003-12-23 | Hewlett-Packard Development Company, L.P. | Continuously variable analog micro-mirror device |
| US7370185B2 (en) | 2003-04-30 | 2008-05-06 | Hewlett-Packard Development Company, L.P. | Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers |
| US6909589B2 (en) | 2002-11-20 | 2005-06-21 | Corporation For National Research Initiatives | MEMS-based variable capacitor |
| US6844959B2 (en) | 2002-11-26 | 2005-01-18 | Reflectivity, Inc | Spatial light modulators with light absorbing areas |
| US6958846B2 (en) | 2002-11-26 | 2005-10-25 | Reflectivity, Inc | Spatial light modulators with light absorbing areas |
| US6741503B1 (en) | 2002-12-04 | 2004-05-25 | Texas Instruments Incorporated | SLM display data address mapping for four bank frame buffer |
| TWI289708B (en) | 2002-12-25 | 2007-11-11 | Qualcomm Mems Technologies Inc | Optical interference type color display |
| JP2004212680A (ja) | 2002-12-27 | 2004-07-29 | Fuji Photo Film Co Ltd | 光変調素子アレイ及びその製造方法 |
| JP2004212638A (ja) | 2002-12-27 | 2004-07-29 | Fuji Photo Film Co Ltd | 光変調素子及び平面表示素子 |
| TW559686B (en) | 2002-12-27 | 2003-11-01 | Prime View Int Co Ltd | Optical interference type panel and the manufacturing method thereof |
| TW594155B (en) | 2002-12-27 | 2004-06-21 | Prime View Int Corp Ltd | Optical interference type color display and optical interference modulator |
| US6808953B2 (en) | 2002-12-31 | 2004-10-26 | Robert Bosch Gmbh | Gap tuning for surface micromachined structures in an epitaxial reactor |
| KR100491257B1 (ko) | 2002-12-31 | 2005-05-24 | 엘지.필립스 엘시디 주식회사 | 반투과형 액정표시장치 |
| US7002719B2 (en) | 2003-01-15 | 2006-02-21 | Lucent Technologies Inc. | Mirror for an integrated device |
| JP2004219843A (ja) | 2003-01-16 | 2004-08-05 | Seiko Epson Corp | 光変調器、表示装置及びその製造方法 |
| US7079154B2 (en) | 2003-01-18 | 2006-07-18 | Hewlett-Packard Development Company, L.P. | Sub-pixel assembly with dithering |
| US20040140557A1 (en) | 2003-01-21 | 2004-07-22 | United Test & Assembly Center Limited | Wl-bga for MEMS/MOEMS devices |
| TW200413810A (en) | 2003-01-29 | 2004-08-01 | Prime View Int Co Ltd | Light interference display panel and its manufacturing method |
| TW557395B (en) | 2003-01-29 | 2003-10-11 | Yen Sun Technology Corp | Optical interference type reflection panel and the manufacturing method thereof |
| US7205675B2 (en) | 2003-01-29 | 2007-04-17 | Hewlett-Packard Development Company, L.P. | Micro-fabricated device with thermoelectric device and method of making |
| US20040147056A1 (en) | 2003-01-29 | 2004-07-29 | Mckinnell James C. | Micro-fabricated device and method of making |
| JP2004235465A (ja) | 2003-01-30 | 2004-08-19 | Tokyo Electron Ltd | 接合方法、接合装置及び封止部材 |
| US7250930B2 (en) | 2003-02-07 | 2007-07-31 | Hewlett-Packard Development Company, L.P. | Transparent active-matrix display |
| US7459402B2 (en) | 2003-02-12 | 2008-12-02 | Texas Instruments Incorporated | Protection layers in micromirror array devices |
| US6903487B2 (en) | 2003-02-14 | 2005-06-07 | Hewlett-Packard Development Company, L.P. | Micro-mirror device with increased mirror tilt |
| TW200417806A (en) | 2003-03-05 | 2004-09-16 | Prime View Int Corp Ltd | A structure of a light-incidence electrode of an optical interference display plate |
| US6844953B2 (en) | 2003-03-12 | 2005-01-18 | Hewlett-Packard Development Company, L.P. | Micro-mirror device including dielectrophoretic liquid |
| TWI328805B (en) | 2003-03-13 | 2010-08-11 | Lg Electronics Inc | Write-once recording medium and defective area management method and apparatus for write-once recording medium |
| KR100925195B1 (ko) | 2003-03-17 | 2009-11-06 | 엘지전자 주식회사 | 대화형 디스크 플레이어의 이미지 데이터 처리장치 및처리방법 |
| JP2004286825A (ja) | 2003-03-19 | 2004-10-14 | Fuji Photo Film Co Ltd | 平面表示装置 |
| US6913942B2 (en) | 2003-03-28 | 2005-07-05 | Reflectvity, Inc | Sacrificial layers for use in fabrications of microelectromechanical devices |
| TW567355B (en) | 2003-04-21 | 2003-12-21 | Prime View Int Co Ltd | An interference display cell and fabrication method thereof |
| TWI224235B (en) | 2003-04-21 | 2004-11-21 | Prime View Int Co Ltd | A method for fabricating an interference display cell |
| TW594360B (en) | 2003-04-21 | 2004-06-21 | Prime View Int Corp Ltd | A method for fabricating an interference display cell |
| TWI226504B (en) | 2003-04-21 | 2005-01-11 | Prime View Int Co Ltd | A structure of an interference display cell |
| US7358966B2 (en) | 2003-04-30 | 2008-04-15 | Hewlett-Packard Development Company L.P. | Selective update of micro-electromechanical device |
| US6853476B2 (en) | 2003-04-30 | 2005-02-08 | Hewlett-Packard Development Company, L.P. | Charge control circuit for a micro-electromechanical device |
| US7447891B2 (en) | 2003-04-30 | 2008-11-04 | Hewlett-Packard Development Company, L.P. | Light modulator with concentric control-electrode structure |
| US6829132B2 (en) | 2003-04-30 | 2004-12-07 | Hewlett-Packard Development Company, L.P. | Charge control of micro-electromechanical device |
| US7072093B2 (en) | 2003-04-30 | 2006-07-04 | Hewlett-Packard Development Company, L.P. | Optical interference pixel display with charge control |
| US7400489B2 (en) | 2003-04-30 | 2008-07-15 | Hewlett-Packard Development Company, L.P. | System and a method of driving a parallel-plate variable micro-electromechanical capacitor |
| US6741384B1 (en) | 2003-04-30 | 2004-05-25 | Hewlett-Packard Development Company, L.P. | Control of MEMS and light modulator arrays |
| US6940630B2 (en) | 2003-05-01 | 2005-09-06 | University Of Florida Research Foundation, Inc. | Vertical displacement device |
| US6819469B1 (en) | 2003-05-05 | 2004-11-16 | Igor M. Koba | High-resolution spatial light modulator for 3-dimensional holographic display |
| JP4075678B2 (ja) | 2003-05-06 | 2008-04-16 | ソニー株式会社 | 固体撮像素子 |
| US7218499B2 (en) | 2003-05-14 | 2007-05-15 | Hewlett-Packard Development Company, L.P. | Charge control circuit |
| JP4338442B2 (ja) | 2003-05-23 | 2009-10-07 | 富士フイルム株式会社 | 透過型光変調素子の製造方法 |
| TW591716B (en) | 2003-05-26 | 2004-06-11 | Prime View Int Co Ltd | A structure of a structure release and manufacturing the same |
| TW570896B (en) | 2003-05-26 | 2004-01-11 | Prime View Int Co Ltd | A method for fabricating an interference display cell |
| US6917459B2 (en) | 2003-06-03 | 2005-07-12 | Hewlett-Packard Development Company, L.P. | MEMS device and method of forming MEMS device |
| TWI223855B (en) | 2003-06-09 | 2004-11-11 | Taiwan Semiconductor Mfg | Method for manufacturing reflective spatial light modulator mirror devices |
| US6811267B1 (en) | 2003-06-09 | 2004-11-02 | Hewlett-Packard Development Company, L.P. | Display system with nonvisible data projection |
| JP2007027150A (ja) | 2003-06-23 | 2007-02-01 | Hitachi Chem Co Ltd | 集光型光発電システム |
| US6822780B1 (en) | 2003-06-23 | 2004-11-23 | Northrop Grumman Corporation | Vertically stacked spatial light modulator with multi-bit phase resolution |
| US7221495B2 (en) | 2003-06-24 | 2007-05-22 | Idc Llc | Thin film precursor stack for MEMS manufacturing |
| FR2857153B1 (fr) | 2003-07-01 | 2005-08-26 | Commissariat Energie Atomique | Micro-commutateur bistable a faible consommation. |
| US6862127B1 (en) | 2003-11-01 | 2005-03-01 | Fusao Ishii | High performance micromirror arrays and methods of manufacturing the same |
| US7190380B2 (en) | 2003-09-26 | 2007-03-13 | Hewlett-Packard Development Company, L.P. | Generating and displaying spatially offset sub-frames |
| JP3786106B2 (ja) | 2003-08-11 | 2006-06-14 | セイコーエプソン株式会社 | 波長可変光フィルタ及びその製造方法 |
| US7173314B2 (en) | 2003-08-13 | 2007-02-06 | Hewlett-Packard Development Company, L.P. | Storage device having a probe and a storage cell with moveable parts |
| TW200506479A (en) | 2003-08-15 | 2005-02-16 | Prime View Int Co Ltd | Color changeable pixel for an interference display |
| TWI251712B (en) | 2003-08-15 | 2006-03-21 | Prime View Int Corp Ltd | Interference display plate |
| TWI305599B (en) | 2003-08-15 | 2009-01-21 | Qualcomm Mems Technologies Inc | Interference display panel and method thereof |
| TW593127B (en) | 2003-08-18 | 2004-06-21 | Prime View Int Co Ltd | Interference display plate and manufacturing method thereof |
| TWI231865B (en) | 2003-08-26 | 2005-05-01 | Prime View Int Co Ltd | An interference display cell and fabrication method thereof |
| US20050057442A1 (en) | 2003-08-28 | 2005-03-17 | Olan Way | Adjacent display of sequential sub-images |
| JP3979982B2 (ja) | 2003-08-29 | 2007-09-19 | シャープ株式会社 | 干渉性変調器および表示装置 |
| TWI230801B (en) | 2003-08-29 | 2005-04-11 | Prime View Int Co Ltd | Reflective display unit using interferometric modulation and manufacturing method thereof |
| TWI232333B (en) | 2003-09-03 | 2005-05-11 | Prime View Int Co Ltd | Display unit using interferometric modulation and manufacturing method thereof |
| US7027204B2 (en) | 2003-09-26 | 2006-04-11 | Silicon Light Machines Corporation | High-density spatial light modulator |
| US6982820B2 (en) | 2003-09-26 | 2006-01-03 | Prime View International Co., Ltd. | Color changeable pixel |
| TW593126B (en) | 2003-09-30 | 2004-06-21 | Prime View Int Co Ltd | A structure of a micro electro mechanical system and manufacturing the same |
| US20050068583A1 (en) | 2003-09-30 | 2005-03-31 | Gutkowski Lawrence J. | Organizing a digital image |
| US6861277B1 (en) | 2003-10-02 | 2005-03-01 | Hewlett-Packard Development Company, L.P. | Method of forming MEMS device |
| JP2005121906A (ja) | 2003-10-16 | 2005-05-12 | Fuji Photo Film Co Ltd | 反射型光変調アレイ素子及び露光装置 |
| TW200524236A (en) | 2003-12-01 | 2005-07-16 | Nl Nanosemiconductor Gmbh | Optoelectronic device incorporating an interference filter |
| US7161728B2 (en) | 2003-12-09 | 2007-01-09 | Idc, Llc | Area array modulation and lead reduction in interferometric modulators |
| EP1544657B1 (en) | 2003-12-19 | 2012-04-04 | Barco N.V. | Broadband full white reflective display structure |
| WO2005089098A2 (en) | 2004-01-14 | 2005-09-29 | The Regents Of The University Of California | Ultra broadband mirror using subwavelength grating |
| TWI235345B (en) | 2004-01-20 | 2005-07-01 | Prime View Int Co Ltd | A structure of an optical interference display unit |
| JP2005235403A (ja) | 2004-02-17 | 2005-09-02 | Hitachi Displays Ltd | 有機・ｅｌ表示装置 |
| TWI256941B (en) | 2004-02-18 | 2006-06-21 | Qualcomm Mems Technologies Inc | A micro electro mechanical system display cell and method for fabricating thereof |
| US7119945B2 (en) | 2004-03-03 | 2006-10-10 | Idc, Llc | Altering temporal response of microelectromechanical elements |
| TW200530669A (en) | 2004-03-05 | 2005-09-16 | Prime View Int Co Ltd | Interference display plate and manufacturing method thereof |
| TWI261683B (en) | 2004-03-10 | 2006-09-11 | Qualcomm Mems Technologies Inc | Interference reflective element and repairing method thereof |
| JP4581453B2 (ja) | 2004-03-29 | 2010-11-17 | ソニー株式会社 | Ｍｅｍｓ素子、光学ｍｅｍｓ素子、回折型光学ｍｅｍｓ素子、並びにレーザディスプレイ |
| JP2005308871A (ja) | 2004-04-19 | 2005-11-04 | Aterio Design Kk | 干渉カラーフィルター |
| US7245285B2 (en) | 2004-04-28 | 2007-07-17 | Hewlett-Packard Development Company, L.P. | Pixel device |
| US7476327B2 (en) | 2004-05-04 | 2009-01-13 | Idc, Llc | Method of manufacture for microelectromechanical devices |
| US7787170B2 (en) | 2004-06-15 | 2010-08-31 | Texas Instruments Incorporated | Micromirror array assembly with in-array pillars |
| US7075700B2 (en) | 2004-06-25 | 2006-07-11 | The Boeing Company | Mirror actuator position sensor systems and methods |
| TWI233916B (en) | 2004-07-09 | 2005-06-11 | Prime View Int Co Ltd | A structure of a micro electro mechanical system |
| CA2572952C (en) | 2004-07-09 | 2012-12-04 | The University Of Cincinnati | Display capable electrowetting light valve |
| TWI270722B (en) | 2004-07-23 | 2007-01-11 | Au Optronics Corp | Dual-side display panel |
| WO2006014929A1 (en) | 2004-07-29 | 2006-02-09 | Idc, Llc | System and method for micro-electromechanical operating of an interferometric modulator |
| US7372348B2 (en) | 2004-08-20 | 2008-05-13 | Palo Alto Research Center Incorporated | Stressed material and shape memory material MEMS devices and methods for manufacturing |
| DE602005007299D1 (de) | 2004-09-01 | 2008-07-17 | Barco Nv | Prismenanordnung |
| KR100648310B1 (ko) * | 2004-09-24 | 2006-11-23 | 삼성전자주식회사 | 영상의 휘도 정보를 이용한 색변환장치 및 이를 구비하는디스플레이 장치 |
| US7321456B2 (en) | 2004-09-27 | 2008-01-22 | Idc, Llc | Method and device for corner interferometric modulation |
| US7184202B2 (en) | 2004-09-27 | 2007-02-27 | Idc, Llc | Method and system for packaging a MEMS device |
| US8008736B2 (en) | 2004-09-27 | 2011-08-30 | Qualcomm Mems Technologies, Inc. | Analog interferometric modulator device |
| US7420725B2 (en) | 2004-09-27 | 2008-09-02 | Idc, Llc | Device having a conductive light absorbing mask and method for fabricating same |
| US7327510B2 (en) | 2004-09-27 | 2008-02-05 | Idc, Llc | Process for modifying offset voltage characteristics of an interferometric modulator |
| US7893919B2 (en) | 2004-09-27 | 2011-02-22 | Qualcomm Mems Technologies, Inc. | Display region architectures |
| US7527995B2 (en) | 2004-09-27 | 2009-05-05 | Qualcomm Mems Technologies, Inc. | Method of making prestructure for MEMS systems |
| US7554714B2 (en) | 2004-09-27 | 2009-06-30 | Idc, Llc | Device and method for manipulation of thermal response in a modulator |
| US7289259B2 (en) | 2004-09-27 | 2007-10-30 | Idc, Llc | Conductive bus structure for interferometric modulator array |
| US7630119B2 (en) | 2004-09-27 | 2009-12-08 | Qualcomm Mems Technologies, Inc. | Apparatus and method for reducing slippage between structures in an interferometric modulator |
| US7302157B2 (en) | 2004-09-27 | 2007-11-27 | Idc, Llc | System and method for multi-level brightness in interferometric modulation |
| US7936497B2 (en) | 2004-09-27 | 2011-05-03 | Qualcomm Mems Technologies, Inc. | MEMS device having deformable membrane characterized by mechanical persistence |
| US7684104B2 (en) | 2004-09-27 | 2010-03-23 | Idc, Llc | MEMS using filler material and method |
| US7564612B2 (en) * | 2004-09-27 | 2009-07-21 | Idc, Llc | Photonic MEMS and structures |
| US7719500B2 (en) | 2004-09-27 | 2010-05-18 | Qualcomm Mems Technologies, Inc. | Reflective display pixels arranged in non-rectangular arrays |
| US7304784B2 (en) | 2004-09-27 | 2007-12-04 | Idc, Llc | Reflective display device having viewable display on both sides |
| US7130104B2 (en) | 2004-09-27 | 2006-10-31 | Idc, Llc | Methods and devices for inhibiting tilting of a mirror in an interferometric modulator |
| US7372613B2 (en) | 2004-09-27 | 2008-05-13 | Idc, Llc | Method and device for multistate interferometric light modulation |
| US7184195B2 (en) | 2005-06-15 | 2007-02-27 | Miradia Inc. | Method and structure reducing parasitic influences of deflection devices in an integrated spatial light modulator |
-
2005
- 2005-08-19 US US11/208,420 patent/US7564612B2/en active Active
- 2005-09-14 AU AU2005209698A patent/AU2005209698A1/en not_active Abandoned
- 2005-09-14 EP EP05255693A patent/EP1643288A3/en not_active Ceased
- 2005-09-16 TW TW102118120A patent/TWI521238B/zh not_active IP Right Cessation
- 2005-09-16 MY MYPI20054362A patent/MY146851A/en unknown
- 2005-09-16 TW TW094132191A patent/TWI451126B/zh not_active IP Right Cessation
- 2005-09-20 CA CA2520384A patent/CA2520384C/en not_active Expired - Fee Related
- 2005-09-22 SG SG200907760-3A patent/SG158078A1/en unknown
- 2005-09-22 JP JP2005275187A patent/JP4383401B2/ja not_active Expired - Fee Related
- 2005-09-22 SG SG200506120A patent/SG121168A1/en unknown
- 2005-09-23 MX MXPA05010236A patent/MXPA05010236A/es active IP Right Grant
- 2005-09-26 RU RU2005129850/28A patent/RU2413963C2/ru not_active IP Right Cessation
- 2005-09-26 CN CN201210359507.7A patent/CN102902060B/zh not_active Expired - Fee Related
- 2005-09-27 KR KR1020050089824A patent/KR101236429B1/ko not_active Expired - Fee Related
- 2005-09-27 BR BRPI0503911-8A patent/BRPI0503911A/pt not_active IP Right Cessation
-
2009
- 2009-07-20 US US12/506,089 patent/US8405899B2/en not_active Expired - Lifetime
-
2012
- 2012-01-27 KR KR1020120008288A patent/KR101293601B1/ko not_active Expired - Fee Related
- 2012-12-27 KR KR1020120154677A patent/KR20130012063A/ko not_active Ceased
-
2014
- 2014-05-02 IN IN1533MU2014 patent/IN2014MU01533A/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| SG158078A1 (en) | 2010-01-29 |
| TW201337328A (zh) | 2013-09-16 |
| RU2005129850A (ru) | 2007-04-10 |
| MXPA05010236A (es) | 2006-03-29 |
| TWI451126B (zh) | 2014-09-01 |
| US20090279162A1 (en) | 2009-11-12 |
| MY146851A (en) | 2012-09-28 |
| KR20120034086A (ko) | 2012-04-09 |
| TWI521238B (zh) | 2016-02-11 |
| BRPI0503911A (pt) | 2006-05-09 |
| JP2006133744A (ja) | 2006-05-25 |
| AU2005209698A1 (en) | 2006-04-13 |
| CN102902060A (zh) | 2013-01-30 |
| TW200626949A (en) | 2006-08-01 |
| US7564612B2 (en) | 2009-07-21 |
| KR20060092915A (ko) | 2006-08-23 |
| US8405899B2 (en) | 2013-03-26 |
| EP1643288A2 (en) | 2006-04-05 |
| RU2413963C2 (ru) | 2011-03-10 |
| SG121168A1 (en) | 2006-04-26 |
| EP1643288A3 (en) | 2006-06-21 |
| KR101293601B1 (ko) | 2013-08-13 |
| CA2520384C (en) | 2013-02-19 |
| KR101236429B1 (ko) | 2013-02-22 |
| US20060067651A1 (en) | 2006-03-30 |
| KR20130012063A (ko) | 2013-01-31 |
| CN102902060B (zh) | 2015-09-09 |
| IN2014MU01533A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 2015-09-04 |
| CA2520384A1 (en) | 2006-03-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4383401B2 (ja) | フォトニックｍｅｍｓ及びその構造 | |
| KR100853131B1 (ko) | 전자 기기 구동 방법 및 장치 | |
| US8643935B2 (en) | Photonic MEMS and structures | |
| US7372619B2 (en) | Display device having a movable structure for modulating light and method thereof | |
| US7848004B2 (en) | System and method for a MEMS device | |
| US7619810B2 (en) | Systems and methods of testing micro-electromechanical devices | |
| JP2012123398A (ja) | 干渉変調装置及びそのアレイを制御する方法 | |
| CN1755498A (zh) | 光子微机电系统和结构 | |
| HK1086344A (en) | Photonic mems and structures |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20081028 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090123 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090210 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090422 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090519 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090805 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20090825 |
|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20090918 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121002 Year of fee payment: 3 |
|
| R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121002 Year of fee payment: 3 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121002 Year of fee payment: 3 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131002 Year of fee payment: 4 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |